USD453402S1 - Vacuum processing equipment configuration - Google Patents

Vacuum processing equipment configuration Download PDF

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Publication number
USD453402S1
USD453402S1 US29/099,072 US9907299F USD453402S US D453402 S1 USD453402 S1 US D453402S1 US 9907299 F US9907299 F US 9907299F US D453402 S USD453402 S US D453402S
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US
United States
Prior art keywords
processing equipment
vacuum processing
equipment configuration
side elevational
elevational view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/099,072
Inventor
Shigekazu Kato
Kouji Nishihata
Tsunehiko Tsubone
Atsushi Itou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to US29/099,072 priority Critical patent/USD453402S1/en
Assigned to HITACHI, LTD. reassignment HITACHI, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ITOU, ATSUSHI, KATO, SHIGEKAZU, NISHIHATA, KOUJI, TSUBONE, TSUNEHIKO
Application granted granted Critical
Publication of USD453402S1 publication Critical patent/USD453402S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is front, top and left side perspective view of cassettes storage eguipment in relation to a conveyor equipped robot and load and unload chambers showing our new design;
FIG. 2 is a top plan view;
FIG. 3 is a front side elevational view;
FIG. 4 is a right side elevational view;
FIG. 5 is a rear side elevational view;
FIG. 6 is a left side elevational view;
FIG. 7 is a bottom plan view; and,
FIG. 8 is a right side elevational view along line 8—8 of FIG. 2.
The details shown in broken lines in all views is for illustrative purposes only and form no part of the claimed design.

Claims (1)

  1. The ornamental design for a vacuum processing equipment configuration, as shown and described.
US29/099,072 1990-08-22 1999-01-12 Vacuum processing equipment configuration Expired - Lifetime USD453402S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/099,072 USD453402S1 (en) 1990-08-22 1999-01-12 Vacuum processing equipment configuration

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP22532189 1990-08-22
JP1-225321 1990-08-22
US75195191 1991-08-29
US9625693 1993-07-26
US30244394 1994-09-09
US44303995 1995-05-17
US59387096 1996-01-30
US88273197 1997-06-26
US6106298 1998-04-16
US29/099,072 USD453402S1 (en) 1990-08-22 1999-01-12 Vacuum processing equipment configuration

Publications (1)

Publication Number Publication Date
USD453402S1 true USD453402S1 (en) 2002-02-05

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Family Applications (1)

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US29/099,072 Expired - Lifetime USD453402S1 (en) 1990-08-22 1999-01-12 Vacuum processing equipment configuration

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US (1) USD453402S1 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD818226S1 (en) * 2015-12-03 2018-05-15 Lg Electronics Inc. Robot vacuum cleaner
USD828660S1 (en) * 2016-06-08 2018-09-11 Lg Electronics Inc. Robot vacuum cleaner
USD840619S1 (en) * 2016-11-23 2019-02-12 Lg Electronics Inc. Robot for cleaning
USD840620S1 (en) * 2016-11-18 2019-02-12 Lg Electronics Inc. Robot for cleaning
USD840618S1 (en) * 2016-11-30 2019-02-12 Lg Electronics Inc. Robot for cleaning
USD877994S1 (en) * 2018-01-12 2020-03-10 Lg Electronics Inc. Robot for cleaning
USD901110S1 (en) * 2018-11-08 2020-11-03 Beijing Xiaomi Mobile Software Co., Ltd. Robot cleaner
USD929690S1 (en) * 2019-03-18 2021-08-31 Beijing Xiaomi Mobile Software Co., Ltd. Sweeper
USD936719S1 (en) * 2019-02-20 2021-11-23 Lg Electronics Inc. Home hub robot
USD940771S1 (en) * 2019-08-15 2022-01-11 Beijing Xiaomi Mobile Software Co., Ltd. Robot vacuum cleaner
USD971530S1 (en) * 2019-03-06 2022-11-29 Cleanbox Technology, Inc. Cleaning device

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
R.P.H. Chang, "Multipurpose plasma reactor for materials research and processing", J. Vac. Sci. Technol., vol. 14, No. 1, Jan./Feb. 1977, pp. 278-280.
Semiconductor Equipment Association of Japan, "Semiconductor News", vol. 4, pp. 38-43, Apr. 10, 1987 (w/translation).
Semiconductor Equipment Association of Japan, Terminological Dictionary of Semiconductor Equipment), front, table, p. 183, back, Nov. 20, 1987.

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD818226S1 (en) * 2015-12-03 2018-05-15 Lg Electronics Inc. Robot vacuum cleaner
USD828660S1 (en) * 2016-06-08 2018-09-11 Lg Electronics Inc. Robot vacuum cleaner
USD840620S1 (en) * 2016-11-18 2019-02-12 Lg Electronics Inc. Robot for cleaning
USD840619S1 (en) * 2016-11-23 2019-02-12 Lg Electronics Inc. Robot for cleaning
USD840618S1 (en) * 2016-11-30 2019-02-12 Lg Electronics Inc. Robot for cleaning
USD877994S1 (en) * 2018-01-12 2020-03-10 Lg Electronics Inc. Robot for cleaning
USD901110S1 (en) * 2018-11-08 2020-11-03 Beijing Xiaomi Mobile Software Co., Ltd. Robot cleaner
USD936719S1 (en) * 2019-02-20 2021-11-23 Lg Electronics Inc. Home hub robot
USD971530S1 (en) * 2019-03-06 2022-11-29 Cleanbox Technology, Inc. Cleaning device
USD929690S1 (en) * 2019-03-18 2021-08-31 Beijing Xiaomi Mobile Software Co., Ltd. Sweeper
USD940771S1 (en) * 2019-08-15 2022-01-11 Beijing Xiaomi Mobile Software Co., Ltd. Robot vacuum cleaner

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