USD420022S - Electrostatic chuck with improved spacing and charge migration reduction mask - Google Patents

Electrostatic chuck with improved spacing and charge migration reduction mask Download PDF

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Publication number
USD420022S
USD420022S US29/081,238 US8123897F USD420022S US D420022 S USD420022 S US D420022S US 8123897 F US8123897 F US 8123897F US D420022 S USD420022 S US D420022S
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United States
Prior art keywords
electrostatic chuck
charge migration
reduction mask
migration reduction
improved spacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/081,238
Inventor
Vincent E. Burkhart
Allen Flanigan
Steven Sansoni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/081,238 priority Critical patent/USD420022S/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BURKHART, VINCENT E., FLANIGAN, ALLEN, SANSONI, STEVEN
Application granted granted Critical
Publication of USD420022S publication Critical patent/USD420022S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a top view of the electrostatic chuck having the improved spacing and charge migration reduction mask;
FIG. 2 is an elevation view when looking to the right along the x-axis in FIG. 1 , the view when looking to the left along the x-axis in FIG. 1 being identical to that of FIG. 2 thereof;
FIG. 3 is a detailed view of part of the surface seen in FIG. 2 thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is an elevation view when looking down along the y-axis in FIG. 1 thereof; and,
FIG.6 is an elevation view when looking up along the y-axis in FIG. 1 thereof.

Claims (1)

  1. The ornamental design for an electrostatic chuck with improved spacing and charge migration reduction mask, as shown and described.
US29/081,238 1997-12-24 1997-12-24 Electrostatic chuck with improved spacing and charge migration reduction mask Expired - Lifetime USD420022S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/081,238 USD420022S (en) 1997-12-24 1997-12-24 Electrostatic chuck with improved spacing and charge migration reduction mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/081,238 USD420022S (en) 1997-12-24 1997-12-24 Electrostatic chuck with improved spacing and charge migration reduction mask

Publications (1)

Publication Number Publication Date
USD420022S true USD420022S (en) 2000-02-01

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US29/081,238 Expired - Lifetime USD420022S (en) 1997-12-24 1997-12-24 Electrostatic chuck with improved spacing and charge migration reduction mask

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100003824A1 (en) * 2008-07-07 2010-01-07 Lam Research Corporation Clamped showerhead electrode assembly
US20100252197A1 (en) * 2009-04-07 2010-10-07 Lam Reseach Corporation Showerhead electrode with centering feature
US20110070740A1 (en) * 2009-09-18 2011-03-24 Lam Research Corporation Clamped monolithic showerhead electrode
US20110083809A1 (en) * 2009-10-13 2011-04-14 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US8206506B2 (en) 2008-07-07 2012-06-26 Lam Research Corporation Showerhead electrode
US8221582B2 (en) 2008-07-07 2012-07-17 Lam Research Corporation Clamped monolithic showerhead electrode
US8272346B2 (en) 2009-04-10 2012-09-25 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US8573152B2 (en) 2010-09-03 2013-11-05 Lam Research Corporation Showerhead electrode
USD947802S1 (en) 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5528451A (en) * 1994-11-02 1996-06-18 Applied Materials, Inc Erosion resistant electrostatic chuck

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5528451A (en) * 1994-11-02 1996-06-18 Applied Materials, Inc Erosion resistant electrostatic chuck

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8313805B2 (en) 2008-07-07 2012-11-20 Lam Research Corporation Clamped showerhead electrode assembly
US8414719B2 (en) 2008-07-07 2013-04-09 Lam Research Corporation Clamped monolithic showerhead electrode
US8161906B2 (en) 2008-07-07 2012-04-24 Lam Research Corporation Clamped showerhead electrode assembly
US8206506B2 (en) 2008-07-07 2012-06-26 Lam Research Corporation Showerhead electrode
US8221582B2 (en) 2008-07-07 2012-07-17 Lam Research Corporation Clamped monolithic showerhead electrode
US20100003824A1 (en) * 2008-07-07 2010-01-07 Lam Research Corporation Clamped showerhead electrode assembly
US8796153B2 (en) 2008-07-07 2014-08-05 Lam Research Corporation Clamped monolithic showerhead electrode
US8402918B2 (en) 2009-04-07 2013-03-26 Lam Research Corporation Showerhead electrode with centering feature
US20100252197A1 (en) * 2009-04-07 2010-10-07 Lam Reseach Corporation Showerhead electrode with centering feature
US8536071B2 (en) 2009-04-10 2013-09-17 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US8272346B2 (en) 2009-04-10 2012-09-25 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US20110070740A1 (en) * 2009-09-18 2011-03-24 Lam Research Corporation Clamped monolithic showerhead electrode
US8419959B2 (en) 2009-09-18 2013-04-16 Lam Research Corporation Clamped monolithic showerhead electrode
US20110083809A1 (en) * 2009-10-13 2011-04-14 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US9245716B2 (en) 2009-10-13 2016-01-26 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US10262834B2 (en) 2009-10-13 2019-04-16 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US8573152B2 (en) 2010-09-03 2013-11-05 Lam Research Corporation Showerhead electrode
USD947802S1 (en) 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film

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