USD412513S - Upper electrode for manufacturing semiconductors - Google Patents
Upper electrode for manufacturing semiconductors Download PDFInfo
- Publication number
- USD412513S USD412513S US29/074,109 US7410997F USD412513S US D412513 S USD412513 S US D412513S US 7410997 F US7410997 F US 7410997F US D412513 S USD412513 S US D412513S
- Authority
- US
- United States
- Prior art keywords
- upper electrode
- manufacturing semiconductors
- electrode
- showing
- elevational view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a front elevational view of an upper electrode for manufacturing semiconductors showing my new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a front elevational view thereof, showing the electrode in an opened state;
FIG. 8 is a rear elevational view thereof, showing the electrode in an opened state;
FIG. 9 is a top plan view thereof, showing the electrode in an opened state;
FIG. 10 is a bottom plan view thereof, showing the electrode in an opened state;
FIG. 11 is a right side elevational view thereof, showing the electrode in an opened state;
FIG. 12 is a left side elevational view thereof, showing the electrode in an opened state; and,
FIG. 13 is a reduced front elevational view thereof, showing the electrode in an opened state, with the broken-line disclosure being for illustrative purposes only and forming no part of the claimed design.
Claims (1)
- I claim the ornamental design for an upper electrode for manufacturing semiconductors, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP220897 | 1997-01-29 | ||
JP9-2208 | 1997-06-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD412513S true USD412513S (en) | 1999-08-03 |
Family
ID=71660676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/074,109 Expired - Lifetime USD412513S (en) | 1997-01-29 | 1997-07-28 | Upper electrode for manufacturing semiconductors |
Country Status (1)
Country | Link |
---|---|
US (1) | USD412513S (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100252197A1 (en) * | 2009-04-07 | 2010-10-07 | Lam Reseach Corporation | Showerhead electrode with centering feature |
US20110070740A1 (en) * | 2009-09-18 | 2011-03-24 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US20110083809A1 (en) * | 2009-10-13 | 2011-04-14 | Lam Research Corporation | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
US8161906B2 (en) | 2008-07-07 | 2012-04-24 | Lam Research Corporation | Clamped showerhead electrode assembly |
US8206506B2 (en) | 2008-07-07 | 2012-06-26 | Lam Research Corporation | Showerhead electrode |
US8221582B2 (en) | 2008-07-07 | 2012-07-17 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8272346B2 (en) | 2009-04-10 | 2012-09-25 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
US8573152B2 (en) | 2010-09-03 | 2013-11-05 | Lam Research Corporation | Showerhead electrode |
USD735255S1 (en) * | 2013-12-24 | 2015-07-28 | The Yankee Candle Company, Inc. | Heater dish and wax cup for electric wax melting system |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4857689A (en) * | 1988-03-23 | 1989-08-15 | High Temperature Engineering Corporation | Rapid thermal furnace for semiconductor processing |
US5314574A (en) * | 1992-06-26 | 1994-05-24 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
US5320218A (en) * | 1992-04-07 | 1994-06-14 | Shinko Electric Co., Ltd. | Closed container to be used in a clean room |
-
1997
- 1997-07-28 US US29/074,109 patent/USD412513S/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4857689A (en) * | 1988-03-23 | 1989-08-15 | High Temperature Engineering Corporation | Rapid thermal furnace for semiconductor processing |
US5320218A (en) * | 1992-04-07 | 1994-06-14 | Shinko Electric Co., Ltd. | Closed container to be used in a clean room |
US5314574A (en) * | 1992-06-26 | 1994-05-24 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8313805B2 (en) | 2008-07-07 | 2012-11-20 | Lam Research Corporation | Clamped showerhead electrode assembly |
US8796153B2 (en) | 2008-07-07 | 2014-08-05 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8414719B2 (en) | 2008-07-07 | 2013-04-09 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8161906B2 (en) | 2008-07-07 | 2012-04-24 | Lam Research Corporation | Clamped showerhead electrode assembly |
US8206506B2 (en) | 2008-07-07 | 2012-06-26 | Lam Research Corporation | Showerhead electrode |
US8221582B2 (en) | 2008-07-07 | 2012-07-17 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US8402918B2 (en) | 2009-04-07 | 2013-03-26 | Lam Research Corporation | Showerhead electrode with centering feature |
US20100252197A1 (en) * | 2009-04-07 | 2010-10-07 | Lam Reseach Corporation | Showerhead electrode with centering feature |
US8272346B2 (en) | 2009-04-10 | 2012-09-25 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
US8536071B2 (en) | 2009-04-10 | 2013-09-17 | Lam Research Corporation | Gasket with positioning feature for clamped monolithic showerhead electrode |
US8419959B2 (en) | 2009-09-18 | 2013-04-16 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US20110070740A1 (en) * | 2009-09-18 | 2011-03-24 | Lam Research Corporation | Clamped monolithic showerhead electrode |
US20110083809A1 (en) * | 2009-10-13 | 2011-04-14 | Lam Research Corporation | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
US9245716B2 (en) | 2009-10-13 | 2016-01-26 | Lam Research Corporation | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
US10262834B2 (en) | 2009-10-13 | 2019-04-16 | Lam Research Corporation | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly |
US8573152B2 (en) | 2010-09-03 | 2013-11-05 | Lam Research Corporation | Showerhead electrode |
USD735255S1 (en) * | 2013-12-24 | 2015-07-28 | The Yankee Candle Company, Inc. | Heater dish and wax cup for electric wax melting system |
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