US8667698B2 - Co-ordinate measuring machine - Google Patents
Co-ordinate measuring machine Download PDFInfo
- Publication number
- US8667698B2 US8667698B2 US13/340,156 US201113340156A US8667698B2 US 8667698 B2 US8667698 B2 US 8667698B2 US 201113340156 A US201113340156 A US 201113340156A US 8667698 B2 US8667698 B2 US 8667698B2
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- United States
- Prior art keywords
- bed
- annular structure
- machine according
- sensors
- machine
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0004—Supports
Definitions
- the present invention relates to a co-ordinate measuring machine.
- co-ordinate measuring machines generally comprise a bed designed to support the workpiece to be measured and a mobile unit for moving a measuring sensor with respect to the bed.
- the mobile unit generally comprises a first carriage, which is mobile on the bed along guides parallel to a first axis, a second carriage, which is carried by the first carriage and is mobile along a second axis orthogonal to the first axis, and a third carriage, which is carried by the second carriage and is mobile with respect thereto along a third axis orthogonal to the first two axes.
- the measuring sensor is carried by the third carriage.
- the bed has the dual purpose of supporting the workpiece and of defining the guides for the first carriage.
- the bed itself is normally made of a hard mineral material, typically granite.
- WO 89/03505 discloses a measuring machine comprising a metal base, which carries the guides for the mobile unit, and resting on which is a granite worktable.
- GB-A-2080954 discloses a measuring machine in which a workpiece-holder table made of hard mineral material is constrained to an underlying metal base, provided with guides for the mobile unit, via elements for positioning without any play and such as not to transmit stresses.
- WO 2009/139014 discloses a co-ordinate measuring machine in which, in order to solve the problems referred to above, the bed comprises a perimetral metal frame provided with guides for the mobile unit and a workpiece-holder table housed within the frame, wherein the workpiece-holder table and the frame are constrained to one another by means of constraints of a statically determinate type that uncouple the deformations thereof.
- the workpiece-holder table can be made of non-metrological material, for example concrete.
- the aim of the present invention is to provide a simplified measuring machine that will enable the drawbacks referred to above to be overcome.
- the aforesaid aim is achieved by a co-ordinate measuring machine according to claim 1 .
- FIG. 1 is a perspective and schematic view of a measuring machine provided according to the present invention
- FIGS. 2 and 3 are schematic representations of modes of deformation of a bed of the machine of FIG. 1 ;
- FIG. 4 is a perspective view of a bed of a measuring machine according to a first embodiment of the invention.
- FIGS. 5 , 6 and 7 are, respectively, a top plan view, a side view, and a front view of the bed of FIG. 4 ;
- FIGS. 8 , 9 , 10 and 11 are sections according to the lines VIII-VIII, IX-IX, X-X and XII-XII;
- FIG. 12 is a partial side view of a second embodiment of a measuring machine according to the present invention.
- FIG. 13 is a partially sectioned front view, at an enlarged scale, of the machine of FIG. 12 ;
- FIGS. 14 and 15 are views similar to that of FIG. 13 of measuring machines according to two further embodiments of the invention.
- a measuring machine comprising a bed 2 and a mobile unit 3 .
- the mobile unit 3 comprises:
- the first carriage 4 comprises a pair of uprights 8 , 9 , which support the cross member 6 and are mobile along a main guide 10 and a sliding path 11 , respectively, which are parallel to the axis X and are provided on the opposite longitudinal edges of the bed 2 .
- the deformations of the bed are detected and compensated, in use, via a plurality of sensors S 1 -S 6 , which measure the vertical displacement of corresponding points of the bed 2 with respect to a substantially horizontal reference plane ⁇ .
- the expression “substantially horizontal” is understood in the sense that in its practical embodiment the plane ⁇ may undergo minor rigid displacements with respect to a perfectly horizontal position, as will be described in what follows.
- the readings of the sensors S 1 -S 6 are set at zero at the moment when geometrical compensation of the machine is carried out. Consequently, in use, all the values of displacement consequent upon the deformations of the bed 2 and detected by the sensors S 1 -S 6 are understood as variations with respect to the initial zero. Thus, processing of the readings of the sensors enables, each time, determination of a variation of the geometry of the bed with respect to the initial state, described by the geometrical-compensation map.
- the six sensors S 1 -S 6 are positioned underneath the bed 2 , in the proximity of the four corners and at the middle of the longitudinal sides. Thanks to the use of the sensors, it is possible to correct main deformations of the bed due to different causes, such as instability of the material, application of the weight of the workpiece to be measured, variations of environmental temperature, etc.
- FIG. 2 is a schematic illustration of the torsional deformation of the bed, which causes rolling of the first carriage 4 along its travel.
- the torsional deformation determines differences of reading l Sn between the sensors (S 1 , S 2 , S 3 ) set on one side of the bed 2 and the corresponding sensors (S 4 , S 5 , S 6 ) set on the opposite side.
- the torsion of the first stretch of bed comprised between the pairs of sensors S 1 -S 4 and S 2 -S 5 is given by the expression ((l S2 ⁇ l S5 ) ⁇ (l S1 ⁇ l S4 ))/t
- the torsion of the first stretch of bed comprised between the pairs of sensors S 2 -S 5 and S 3 -S 6 is given by the expression ((l S3 ⁇ l S6 ) ⁇ (l S2 ⁇ l S5 ))/t
- Roll of the first carriage 4 can hence be corrected introducing into the machine-compensation map an appropriate variation based upon the calculated torsion angles.
- FIG. 3 is a schematic illustration of the flexural deformation of the bed 2 , which causes pitching of the first carriage 4 along its travel.
- the flexural deformation gives rise to differences of reading between the sensors set on one and the same side of the bed; in particular, the sensors S 1 , S 2 , S 3 set on the side where the main guide 10 of the first carriage 4 is located are considered.
- the difference between the reading l S2 of the central sensor S 2 and the average of the readings l S1 , l S3 of the end sensors S 1 , S 3 corresponds to the vertical deflection of the elastica followed by said side of the bed.
- Said elastica indicates the deformation with respect to an undeformed configuration referred to the end sensors S 1 , S 3 . Consequently, it does not depend upon a possible rigid rotation but takes into account exclusively the actual flexure of the bed 2 .
- FIGS. 4 to 7 illustrate a first practical embodiment of the present invention.
- the bed 2 delimited at the top by a plane surface 20 , is provided with a peripheral groove 12 defining a seat for an annular structure 13 designed to define the reference plane ⁇ .
- the annular structure 13 is constituted by four metal sectional elements 14 , 15 , 16 , 17 with quadrangular cross section, welded to one another to form a sort of rectangular frame.
- the sectional elements 14 , 15 are set in a direction parallel to the axis X, whilst the sectional elements 16 , 17 are set in a direction parallel to the axis Y.
- All the sectional elements preferably have a hollow rectangular cross section, and the sectional elements 16 , 17 are welded, for example butt welded, to the ends of the sectional elements 14 , 15 .
- the annular structure 13 is constrained to the bed 2 via a system of statically determinate constraints defined by two constraints 20 , 21 arranged along the sectional element 14 , and by one constraint 22 in the middle of the sectional element 15 ( FIG. 5 ).
- FIGS. 8 , 9 , and 10 are schematic representations of the constraints 20 , 21 , 22 , which eliminate, respectively, three degrees of freedom, two degrees of freedom, and one degree of freedom.
- the annular structure 13 is constrained to the bed 2 in such a way as to uncouple the deformations thereof. Consequently, even in the presence of deformations of the bed 2 , the annular structure 13 may at the most be subject to a roto-translation with respect to the bed 2 but does not undergo deformation.
- each sensor S 1 , . . . , S 8 is provided with a body 23 , rigidly fixed to a top wall 24 of the corresponding sectional element 14 , 15 ( FIG. 11 ) and a mobile member 25 that bears on a surface 26 of the bed 2 that delimits the groove 12 at the top.
- the plane ⁇ is consequently defined by a top surface 27 of the annular structure 13 , which, thanks to the system of statically determinate constraints, is kept planar but is subject to roto-translations, albeit minor ones, which can lead to small deviations of the plane ⁇ with respect to the horizontal.
- springs may be set between the top surface 27 of the annular structure 13 and the surface 26 of the bed 2 .
- Said springs can be conveniently incorporated in the sensors S 1 , S 8 so as to load the mobile members 25 elastically against the surface 26 .
- FIGS. 12 and 13 illustrate another embodiment of the invention, designated as a whole by 30 , in which three sensors S 11 , S 12 , S 13 are used set between the annular structure 13 and the first carriage 4 , instead of the bed 2 .
- the sensors S 11 -S 13 have the body 23 fixed to the first carriage 4 and the mobile member 25 in sliding contact with the top surface 27 of the annular structure 13 .
- the sensors S 11 , SS 12 are carried by the upright 8 of the first carriage 4 and have the mobile member 25 in contact with the sectional element 14 .
- the sensor S 13 is carried by the upright 9 of the first carriage and has the mobile member 25 in contact with the sectional element 15 .
- the sensors S 11 , S 12 are aligned to one another and set at a distance apart in the direction of the axis X.
- FIG. 14 illustrates a different embodiment of the present invention, designated as a whole by the reference number 31 .
- the annular structure 13 is “suspended” from the bed 2 and set in a bottom perimetral recess 35 thereof.
- Two sensors S 11 and S 12 are carried by the upright 8 of the first carriage 4 and once again set with their axis vertical, but detect a bottom surface 36 , instead of the top surface, of the sectional element 14 .
- a bottom surface 36 instead of the top surface, of the sectional element 14 .
- the sensors S 15 , S 16 detect the roll and yaw rotations, which can be decomposed and corrected analytically.
- FIG. 15 illustrates a further embodiment of the present invention, designated as a whole by 32 .
- the annular structure 13 is housed in a perimetral trench 38 provided on the top surface of the bed 2 .
- Said trench can be effectively covered by a bellows protection 39 of a conventional type.
- the machine comprises three sensors S 11 , S 12 , S 13 arranged on, and interacting with, the annular structure 13 in a way similar to what has been described with reference to the solution of FIGS. 12 and 13 .
- the machine moreover comprises two sensors S 15 , S 16 carried by the upright in a position adjacent to the sensors S 11 , S 12 but with their axis horizontal in such a way that the mobile member 25 contacts an internal side surface 40 of the sectional element 14 .
- the sensors S 11 -S 13 have the function of detecting the pitch and roll rotations, the sensors S 15 , S 16 have the function of detecting prevalently the yaw rotations (with a small component of roll, which can be decomposed analytically).
- non-metrological material i.e., a material not provided with characteristics of stiffness and stability typical of metrological applications, such as, for example, concrete, and at the same time maintain a conventional structure of the machine, with the guides for the mobile unit 3 provided directly on the bed.
- the bed can be made of any material, and in particular of any non-metallic pourable material, for example a resin with appropriate fillers.
- the measuring surface can be coated with another material, such as granite, having the aforesaid characteristics.
- the guides or paths can be coated with a metal or non-metal material having the necessary mechanical characteristics, in particular of resistance to wear.
- the annular structure 13 can be made of a different material, for example a composite material or granite, which are substantially invariant with temperature.
- the annular structure 13 is made of a metal material, as in the embodiments described, in order to reduce the effects of the thermal expansion it is possible to close the seat 12 and insulate it thermally.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Machine Tool Units (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10425404 | 2010-12-30 | ||
EP10425404.0 | 2010-12-30 | ||
EP10425404.0A EP2472216B1 (en) | 2010-12-30 | 2010-12-30 | Coordinate measuring machine |
Publications (2)
Publication Number | Publication Date |
---|---|
US20120167402A1 US20120167402A1 (en) | 2012-07-05 |
US8667698B2 true US8667698B2 (en) | 2014-03-11 |
Family
ID=43983690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/340,156 Active 2032-08-22 US8667698B2 (en) | 2010-12-30 | 2011-12-29 | Co-ordinate measuring machine |
Country Status (8)
Country | Link |
---|---|
US (1) | US8667698B2 (zh) |
EP (1) | EP2472216B1 (zh) |
KR (1) | KR101908344B1 (zh) |
CN (1) | CN102620623B (zh) |
BR (1) | BRPI1105291B1 (zh) |
ES (1) | ES2435919T3 (zh) |
PL (1) | PL2472216T3 (zh) |
TW (1) | TW201237365A (zh) |
Cited By (2)
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---|---|---|---|---|
US20130205607A1 (en) * | 2011-08-12 | 2013-08-15 | Hexagon Metrology S.P.A. | Measuring machine provided with a block of concrete having the function of foundation or machine bed, and method for compensating the measuring errors due to deformations of the block |
US11391566B2 (en) | 2016-09-30 | 2022-07-19 | Carl Zeiss Industrielle Messtechnik Gmbh | Rotary table for a coordinate measuring apparatus |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009139014A1 (en) * | 2008-05-16 | 2009-11-19 | Hexagon Metrology S.P.A. | Machine bed for a co-ordinate measuring machine |
EP2270425A1 (en) | 2009-07-03 | 2011-01-05 | Leica Geosystems AG | Coordinate measuring machine (CMM) and method of compensating errors in a CMM |
JP6113958B2 (ja) * | 2012-01-13 | 2017-04-12 | 株式会社ミツトヨ | 測定座標補正方法、及び三次元測定機 |
CN106164617A (zh) * | 2014-04-04 | 2016-11-23 | 海克斯康测量技术有限公司 | 带有碳纤维空气轴承的坐标测量机 |
CN105509678A (zh) * | 2016-02-18 | 2016-04-20 | 苏州莱测检测科技有限公司 | 一种坐标测量机 |
DE102016115305B4 (de) * | 2016-08-18 | 2021-07-22 | Carl Zeiss Industrielle Messtechnik Gmbh | Koordinatenmessgerät |
US10443998B2 (en) * | 2016-09-09 | 2019-10-15 | Quality Vision International, Inc. | Moving bridge coordinate measuring machine |
US11092419B2 (en) * | 2017-04-13 | 2021-08-17 | Sa08700334 | Ultra-light and ultra-accurate portable coordinate measurement machine with multi-piece joint engagement |
EP3392610B1 (en) * | 2017-04-19 | 2022-02-23 | Renishaw PLC | Bearing mount |
DE102018005422A1 (de) * | 2018-07-07 | 2020-01-09 | Ptg Präzisionstechnologien Goldau Gmbh | Anordnung zum reproduzierbaren Spannen von baugleichen Werkstücken und Verfahren zum Betreiben der Anordnung |
CN109506546A (zh) * | 2019-01-04 | 2019-03-22 | 深圳力合精密装备科技有限公司 | 一种坐标测量机的附设导轨及其安装方法 |
KR102143388B1 (ko) | 2019-05-29 | 2020-08-11 | 한국산업기술시험원 | 레일 하부에 지지대가 구성된 측정 장치 및 방법 |
WO2021048413A1 (de) * | 2019-09-13 | 2021-03-18 | Schneeberger Mineralgusstechnik S.R.O. | Strukturbauteil für eine werkzeugmaschine und verfahren zu dessen herstellung |
DE102019130324A1 (de) * | 2019-11-11 | 2021-05-12 | Sudholt-Wasemann GmbH | Verfahren zum Betrieb eines Arbeitsprozesses |
CN113251889B (zh) * | 2021-05-17 | 2024-06-21 | 成都宏明双新科技股份有限公司 | 一种拱料带实时检测装置 |
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JPS59180323A (ja) | 1983-03-30 | 1984-10-13 | Hitachi Ltd | 変位検出器 |
JPS6029604A (ja) | 1983-07-29 | 1985-02-15 | Mitsubishi Heavy Ind Ltd | 機器台座面歪自動計測装置 |
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2010
- 2010-12-30 EP EP10425404.0A patent/EP2472216B1/en active Active
- 2010-12-30 PL PL10425404T patent/PL2472216T3/pl unknown
- 2010-12-30 ES ES10425404T patent/ES2435919T3/es active Active
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2011
- 2011-12-28 TW TW100149192A patent/TW201237365A/zh unknown
- 2011-12-28 KR KR1020110144782A patent/KR101908344B1/ko active IP Right Grant
- 2011-12-29 US US13/340,156 patent/US8667698B2/en active Active
- 2011-12-29 BR BRPI1105291A patent/BRPI1105291B1/pt not_active IP Right Cessation
- 2011-12-30 CN CN201110457143.1A patent/CN102620623B/zh active Active
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JPS59180323A (ja) | 1983-03-30 | 1984-10-13 | Hitachi Ltd | 変位検出器 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130205607A1 (en) * | 2011-08-12 | 2013-08-15 | Hexagon Metrology S.P.A. | Measuring machine provided with a block of concrete having the function of foundation or machine bed, and method for compensating the measuring errors due to deformations of the block |
US8844150B2 (en) * | 2011-08-12 | 2014-09-30 | Hexagon Metrology S.P.A. | Measuring machine provided with a block of concrete having the function of foundation or machine bed, and method for compensating the measuring errors due to deformations of the block |
US11391566B2 (en) | 2016-09-30 | 2022-07-19 | Carl Zeiss Industrielle Messtechnik Gmbh | Rotary table for a coordinate measuring apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR101908344B1 (ko) | 2018-12-10 |
KR20120078624A (ko) | 2012-07-10 |
PL2472216T3 (pl) | 2014-01-31 |
CN102620623B (zh) | 2016-06-15 |
EP2472216A1 (en) | 2012-07-04 |
CN102620623A (zh) | 2012-08-01 |
BRPI1105291B1 (pt) | 2020-04-14 |
EP2472216B1 (en) | 2013-08-14 |
BRPI1105291A2 (pt) | 2013-04-24 |
ES2435919T3 (es) | 2013-12-26 |
TW201237365A (en) | 2012-09-16 |
US20120167402A1 (en) | 2012-07-05 |
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