US8154127B1 - Optical device and method of making the same - Google Patents
Optical device and method of making the same Download PDFInfo
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- US8154127B1 US8154127B1 US11/829,995 US82999507A US8154127B1 US 8154127 B1 US8154127 B1 US 8154127B1 US 82999507 A US82999507 A US 82999507A US 8154127 B1 US8154127 B1 US 8154127B1
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
- H01L29/0669—Nanowires or nanotubes
- H01L29/0673—Nanowires or nanotubes oriented parallel to a substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
- H01L29/0669—Nanowires or nanotubes
- H01L29/068—Nanowires or nanotubes comprising a junction
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
- G02F2/02—Frequency-changing of light, e.g. by quantum counters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/16—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
- H01L33/18—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous within the light emitting region
Definitions
- the present disclosure relates generally to optical device(s) and method(s) for making the same.
- Nanotechnology is centered on the fabrication and application of nano-scale structures, or structures having dimensions that are often 5 to 100 times smaller than conventional semiconductor structures. Nanowires are included in the category of nano-scale structures.
- Nanowires are wire-like structures having at least one linear dimension (e.g., diameter) ranging from about 3 nm to about 200 nm. Nanowires are suitable for use in a variety of applications, including functioning as conventional wires for interconnection applications or as semiconductor devices. Nanowires are also the building blocks of many potential optical nano-scale devices, such as light emitting diodes (LEDs), nanowire-based fiber optic devices, optical sensors, and display screens, to name a few.
- LEDs light emitting diodes
- FIG. 1 is a flow diagram depicting an embodiment of a method of forming an optical device
- FIG. 2 is a schematic view of an embodiment of the optical device
- FIG. 3 is a schematic view of another embodiment of the optical device
- FIG. 4 is a schematic view of an embodiment of an optical system including embodiments of the optical device established on a silicon-on-insulator substrate;
- FIG. 5 is a schematic view of another embodiment of an optical system including embodiments of the optical device established on a single layered substrate;
- FIG. 6 is a schematic orthogonal view of still another embodiment of an optical system including embodiments of the optical device and a waveguide.
- Embodiment(s) of the optical device, the method of making the optical device, and the optical system, as disclosed herein, advantageously include and/or use nanoscale connections (i.e., junction regions) to emit light.
- the device includes a reflective layer, which is believed to contribute to enhanced light collection.
- the device includes a non-linear material, which is believed to absorb photons of one wavelength and emit photons of another wavelength.
- the optical devices disclosed herein may also advantageously be integrated with conventional silicon circuitry.
- the method includes selecting, for a first nanowire segment and/or a second nanowire segment, at least one predetermined characteristic that affects the optical behavior of a junction region formed between the first and second nanowire segments, as shown at reference numeral 11 .
- the method further includes growing the first nanowire segment of a first conductivity type from a first electrode of the first conductivity type, as shown at reference numeral 13 ; and growing the second nanowire segment of a second conductivity type from the first nanowire segment such that the second nanowire segment attaches to a second electrode having the second conductivity type, as shown at reference numeral 15 .
- the resulting optical device has first and second nanowire segments, one or both of which include the at least one predetermined characteristic. It is to be understood that this and other embodiments of the method and device are described in further detail in reference to the other figures hereinbelow.
- junction region refers to the metallurgical junction, the depletion region, and portions of the neutral region with significant excess minority carriers on each side of the depletion region.
- the junction region includes the metallurgical junction, the depletion region, and about three minority carrier diffusion lengths on each side of the depletion region.
- each of the embodiments of the device 10 , 10 ′ shown in these figures includes a first electrode 12 of a first conductivity type, a second electrode 14 of a second conductivity type, a nanowire 16 (having segments 24 , 26 ) positioned between the first and second electrodes 12 , 14 , and a junction region 28 formed between the two nanowire segments 24 , 26 .
- the junction region 28 is capable of emitting light when a voltage is applied between the electrodes 12 , 14 .
- the actual junction between the segments 24 , 26 may be a p-n junction, and the light emitting (i.e., junction) region may extend a moderate distance away from the depletion region of the p-n junction.
- the first and second electrodes 12 , 14 may be formed from a silicon layer 22 of a silicon-on-insulator (SOI) substrate.
- SOI silicon-on-insulator
- a pre-purchased or pre-formed SOI substrate includes a substrate 18 , an insulating layer 20 , and the silicon layer 22 .
- one or both of the silicon layer 22 and the substrate 18 of the SOI substrate has (110) crystallographic orientation (i.e., crystallographic orientation plane (110)).
- the top layer 22 is selected from GaAs or InP
- the substrate 18 is selected from other semiconductor materials (e.g., GaAs), or insulating materials (e.g., sapphire or ceramic). If an insulating material is used for the substrate 18 , the intermediate insulating layer 20 may be omitted. In some embodiments incorporating an insulating material as the substrate 18 , it may be desirable to include the intermediate insulating layer 20 in order to reduce contamination.
- silicon layer 22 is discussed in the following embodiments, it is to be understood that any suitable materials for substrate 18 and layers 20 , 22 may also be used.
- the electrodes 12 , 14 may be formed by patterning (e.g., via photolithography) a desirable electrode design in the silicon layer 22 , and etching (e.g., via dry etching, wet chemical etching, or combinations thereof) the silicon layer 22 to form the electrodes 12 , 14 .
- etching e.g., via dry etching, wet chemical etching, or combinations thereof
- each electrode 12 , 14 may be doped with a dopant that is capable of introducing the first or second conductivity type.
- Dopants for achieving p-type conductivity in silicon include, but are not limited to boron, other like elements, or combinations thereof; and dopants for achieving n-type conductivity include, but are not limited to phosphorus, arsenic, antimony, other like elements, or combinations thereof. It is to be understood that other dopant species may be used to obtain p- and n-conductivity type in other semiconductor materials.
- the silicon layer 22 may be doped of a first conductivity type useful for one of the electrodes 12 , 14 . Both of the electrodes 12 , 14 are formed from this layer 22 . It is to be understood that the conductivity type of the second electrode 14 , 12 may be converted to the second conductivity type before or after the second electrode 14 , 12 is formed from layer 22 . In an embodiment, the conductivity type may be converted by doping (e.g., via gas-phase doping, via diffusion from a dopant-containing oxide, or via ion implantation), by diffusion from a dopant-containing oxide, or by ion implantation. The first electrode 12 , 14 may be protected by a masking material during the doping of the second electrode 14 , 12 , such that the first electrode 12 , 14 retains its first conductivity type.
- doping e.g., via gas-phase doping, via diffusion from a dopant-containing oxide, or via ion implantation
- the silicon layer 22 of the SOI substrate may be lightly doped, and dopant atoms of the first and second conductivity types may be added to the first and second electrodes 12 , 14 , respectively, while protecting the other electrode 14 , 12 from the counter dopant.
- one of the electrodes 12 , 14 may be formed from the silicon layer 22 (of a first conductivity type) of the SOI substrate, and the other of the electrodes 14 , 12 may be deposited on an insulating layer formed on the silicon layer 22 of the SOI substrate after the one electrode 12 , 14 is formed from the silicon layer 22 .
- the insulating layer 20 of the SOI substrate may be laterally etched such that a portion of the first electrode 12 , 14 and a portion of the second electrode 14 , 12 bound a space empty of other material(s).
- the deposited electrode 14 , 12 may be a semiconductor and may be doped with dopant atoms imparting a second conductivity type to the electrode 14 , 12 either during or after deposition.
- the deposited electrode 14 , 12 may be formed of metal.
- one of the electrodes 12 , 14 may be formed from the silicon substrate 18 (of a first conductivity type) of the SOI substrate, and the other of the electrodes 14 , 12 may be formed from the silicon layer 22 on the insulating layer 20 of the SOI substrate.
- the second electrode 14 , 12 formed from the silicon layer 22 may be doped with dopant atoms imparting a second conductivity type to the electrode 14 , 12 either during SOI substrate formation or after the second electrode 14 , 12 is defined.
- the insulating layer 20 may be laterally etched such that a portion of the first electrode 12 , 14 and a portion of the second electrode 14 , 12 bound a space empty of other material(s).
- the nanowire 16 positioned between the electrodes 12 , 14 may be grown laterally or substantially vertically from one of the electrodes 12 , 14 , and connects or attaches to the other of the electrodes 14 , 12 .
- the electrode 12 , 14 surface from which nanowire 16 growth is initiated has (111) surface orientation (i.e., the growth surface of the electrode 12 , 14 has a crystallographic orientation plane (111)), which enables growth in a typical ⁇ 111> crystallographic orientation direction (i.e., perpendicular to the vertical or horizontal surface).
- the crystallographic orientation of the growth initiating electrode 12 , 14 surface and the attaching electrode 14 , 12 surface may be the same or different.
- the growth initiating and attaching surfaces both have a crystallographic orientation plane (111). In other embodiments in which a vertical nanowire 16 is formed, the growth initiating and attaching surfaces may have different crystallographic orientations.
- Nanowire 16 growth may be initiated and continued via a catalyst (e.g., gold, titanium, platinum, palladium, gallium, nickel, or combinations thereof) and a precursor gas. It is to be understood, however, that the nanowire 16 may be formed via any suitable method.
- a catalyst e.g., gold, titanium, platinum, palladium, gallium, nickel, or combinations thereof
- precursor gas e
- lateral nanowires 16 are described in “Ultrahigh-density silicon nanobridges formed between two vertical silicon surfaces” by Islam et al., published in 2004 in Volume 15 of Nanotechnology at pages L5-L8; and “A novel interconnection technique for manufacturing nanowire devices” by Islam et al., published in 2005 in Volume 80 of Appl. Phys. A at pages 1133-1140, both of which are incorporated herein by reference.
- a non-limiting example of forming a substantially vertical nanowire 16 is further described in U.S. patent application Ser. No. 10/982,051, filed on Nov. 5, 2004 (U.S. Publication No. 2006/0097389, published May 11, 2006), incorporated herein by reference.
- nanowire 16 growth may be initiated from either of the first and second electrodes 12 , 14 , regardless of its conductivity type.
- a first nanowire segment 24 is doped with a dopant that is capable of introducing the first or second conductivity type to the segment 24 .
- the dopant is changed to one that is capable of introducing the other of the second or first conductivity type to form the second segment 26 at the end of the first segment 24 .
- the nanowire 16 is grown via any suitable method, and respective dopants capable of introducing the first or second conductivity type are established in and/or on different portions of the nanowire 16 to form the segments 24 , 26 (each having a different conductivity type).
- each of the nanowire segments 24 , 26 is doped to have the same conductivity type as the electrode 12 , 14 from which it is grown or to which it attaches. It is believed that the segments 24 , 26 of different conductivity type along the length of the nanowire 16 form a region near the p-n junction with both high electron density and high hole density.
- the nanowire 16 is formed such that one or both of the segments 24 , 26 includes a predetermined characteristic that affects the optical behavior of the junction region 28 .
- the predetermined characteristics of the respective segments 24 , 26 may be the same or different.
- the predetermined characteristics are selected from bandgap, index of refraction, diameter, transmittance, absorbance, minority-carrier lifetime, band structure, radiative recombination ability (i.e., a material is capable of radiatively recombining injected electrons and holes), and/or combinations thereof.
- at least one of the segments 24 , 26 exhibits radiative recombination, which enables the generation of photons and light emission upon the recombination of electrons and holes at the junction region 28 .
- the materials exhibiting or having the predetermined characteristic(s) is/are selected such that light of a desirable wavelength is emitted from the junction region 28 when a voltage is applied to the nanowire 16 .
- the nanowire 16 is a compound semi-conductor, in which the nanowire segments 24 , 26 are formed of direct bandgap materials, such as GaAs, Ga x Al 1-x As, or InP. Such materials are capable of efficiently emitting photons without involving phonons.
- materials which have indirect bandgaps when in bulk form may also be used to form the nanowire segments 24 , 26 . In the latter embodiment, however, it is believed that the dimensions of the nanowire 16 will be significantly smaller, such that the indirect bandgap materials will effectively behave like direct bandgap materials.
- the nanowire segments 24 , 26 may also be configured to have a diameter that affects one or more optical properties of the junction region 28 . If the diameter is small enough, quantum confinement increases the energies of allowed states and, consequently, decreases the wavelength of the emitted light.
- the nanowire 16 diameter is controlled by controlling the diameter of the catalyst nanoparticle used to grow the nanowire 16 . It is to be understood, however, that the nanowire 16 diameter may also be controlled by controlling the pressure of the deposition ambient or other deposition conditions.
- a voltage is applied between the electrodes 12 , 14 and across the nanowire 16 .
- the optical signal emitted may be modulated by applying a time varying voltage to the junction region 28 . Electrons and holes injected across the junction region 28 recombine, and light is emitted from the nanowire 16 . Generally, the light may be emitted at all angles. In some embodiments, collimation structures are used to direct the emitted light.
- an embodiment of the device 10 includes a reflective layer 30 established on a substrate surface 32 between the electrodes 12 , 14 .
- the insulating layer 20 of the SOI substrate is the substrate surface 32 upon which the reflective layer 30 is established. More generally, the substrate surface 32 upon which the reflective layer 30 is established is substantially parallel to the nanowire 16 and is positioned a spaced distance from the nanowire 16 .
- Non-limiting examples of suitable reflective materials for the layer 30 include insulators (e.g., silicon oxides (including SiO, SiO x , SiO 2 ), Si 3 N 4 , SiN x , SiN x H y , Al 2 O 3 , TiO 2 , etc.), metals (e.g., Al, Au, Rh, Ag, Pt, Ni, Cu, etc.), semiconductors (e.g., Si, Ge, GaAs, AlGaAs (e.g., on a GaAs surface 20 , 22 ), InGaAs (e.g., on a GaAs surface 20 , 22 ), or SiGe (on a Si or Ge surface 20 , 22 )), or combinations thereof.
- the thickness of the layer 30 may be selected such that the reflection from the combination of the layer 30 and the underlying substrate/layers 18 , 20 considered together is maximized.
- the reflective layer 30 may be established via selective deposition processes such as atomic-layer deposition (ALD), and/or the like, or via non-selective deposition processes.
- ALD atomic-layer deposition
- a mask or blocking layer may be used to coat any selected surfaces, in order to prevent deposition on such surfaces during deposition of the reflective layer 30 on the remaining un-masked surfaces.
- a portion of the already present structure serves as at least a portion of the mask or blocking layer.
- the reflective layer 30 is deposited on all exposed surfaces. Those surfaces upon which the reflective layer 30 is desirable are then protected by a masking layer, and any remaining unprotected portions of the reflective layer 30 are subsequently removed. Generally, the masking layer is then removed from the protected surfaces, which remain covered with the reflective layer 30 .
- a collector (not shown) may be operatively positioned to collect light that is reflected from the reflective layer 30 , as well as to collect light that is emitted from the nanowire 16 .
- another embodiment of the device 10 ′ includes a non-linear optical material 34 established on the surface 36 of the nanowire 16 , at least adjacent the junction 28 .
- the non-linear optical material 34 may also be established on the entire surface 36 of the nanowire 16 .
- Techniques suitable for establishing the non-linear optical material 34 include chemical and/or physical vapor deposition techniques, for example, plasma-enhanced chemical vapor deposition, sputtering, laser ablation, and electron-beam evaporation.
- the non-linear optical material 34 is selected such that it absorbs photons (e.g., those having a wavelength characteristic of the segment 24 , 26 materials) that are emitted at or near the junction region 28 , and emits photons of a different wavelength. It is to be understood that the non-linear optical material 34 may be selected to emit light of a desirable wavelength that does not correspond to the wavelength characteristic of the material forming the nanowire 16 . As such, this embodiment of the device 10 ′ may be used to emit light of an energy that may not otherwise be readily emitted using typical semiconductor materials.
- the light emitted by the non-linear optical material 34 has a shorter wavelength than the light absorbed by the non-linear optical material 34 , and in other embodiments, the light emitted by the non-linear optical material 34 has a longer wavelength than the light absorbed by the non-linear optical material 34 .
- the non-linear optical material 34 may be selected for an up-conversion of infrared light to visible light or for a down-conversion for correlated pair emission.
- Non-limiting examples of suitable non-linear materials 34 include phosphor materials, barium titanate, beta barium borate, bismuth germinate, cadmium zinc telluride, cesium lithium borate, lithium niobate, lithium tantalate, lithium triborate, monopotassium phosphate, Nd:YAB (neodymium doped yttrium aluminum borate), Nd:YCOB (neodymium doped yttrium calcium oxyborate), nitrobenzene, potassium aluminum borate, potassium titanyl phosphate, tellurium dioxide, yttrium iron garnet, zinc telluride, or combinations thereof.
- the devices 10 , 10 ′ described are suitable for use as light emitting diodes, photodetectors, optical modulators, optical isolators, and other optical and optoelectronic devices.
- the devices 10 , 10 ′ may be configured for off-chip optical interconnections via, for example, free-space or a wave-guide, for on-chip optical interconnections with other devices 10 , 10 ′ on the substrate, or for both on- and off-chip interconnections.
- FIGS. 4 and 5 depict optical systems 100 incorporating devices 10 , 10 ′ that are configured for on-chip optical interconnections.
- Each optical system 100 includes at least two optoelectronic devices 10 , 10 ′ that electrically connect electronics 38 integrated in and/or on the substrate.
- the electronics 38 may be integrated in the substrate.
- suitable electronics 38 include complementary metal-oxide-semiconductors (CMOS).
- FIG. 4 depicts the system 100 formed with an SOI substrate
- FIG. 5 depicts the system 100 formed on a single layered substrate, such as a silicon wafer.
- one of the devices 10 , 10 ′ shown in FIGS. 4 and 5 may be an optical emitter, and the other device 10 , 10 ′ may be an optical detector.
- Embodiment(s) of the optical device, the method of making the optical device, and the optical system, as disclosed herein, advantageously include, but are not limited to the following advantages.
- a reflective layer 30 may be included which enhances light collection from the device 10 .
- a non-linear optical material 34 may be included which enables photons of one wavelength to be absorbed and photons of another wavelength to be emitted.
- the optical devices 10 , 10 ′ disclosed herein may also advantageously be integrated with conventional silicon circuitry.
Abstract
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