US6693834B1

US6693834B1 - Device and method for detecting alignment of bit lines and bit line contacts in DRAM devices

Info

Publication number: US6693834B1
Application number: US10/448,727
Authority: US
Inventors: Tie Jiang Wu; Chien-Chang Huang; Yu-Wei Ting; Bo Ching Jiang
Original assignee: Nanya Technology Corp
Current assignee: Nanya Technology Corp
Priority date: 2002-08-28
Filing date: 2003-05-29
Publication date: 2004-02-17
Anticipated expiration: 2023-05-29
Also published as: TWI305648B

Abstract

A method and device for detecting alignment of bit lines and bit line contacts in DRAM devices. In the present invention, the test device is disposed in the scribe line region and is formed by the same masks and process as the bit lines and bit line contacts in the memory regions simultaneously. The memory deices and test may have the same alignment shift between bit line contacts and bit line due to use of the same masks and process. Thus, alignment of bit lines and bit line contacts in the memory region is determined according to two resistances (R1 and R2) detected by the test device. Further, the alignment shift can be obtained by

Δ W = R_{MO} \times L \times (\frac{1}{R_{1}} - \frac{1}{R_{2}}),

wherein R_MOis the resistance per surface area of the bit lines, and L is the length of the bar-type bit line contacts in the test device.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a test device, and in particular to a test device for detecting alignment of bit lines and bit line contacts in DRAM devices, as well as a test method thereof.

2. Description of the Related Art

FIG. 1a is a layout of conventional deep trench capacitors in a memory device. Deep trench capacitors 10 are disposed under the passing word lines. Transistors 14 are electrically coupled to the storage nodes 16 of the capacitors 10 through the diffusion regions 18. The diffusion regions 20 are connected to plugs 22 coupled to bit lines (not shown). The transistors 14 are driven by word lines 12, and the channels under the word lines 12 are conductive when appropriate voltages are applied to the word lines 12. Consequently, the current produced between the

diffusion regions

18 and 20 may flow into or out of the storage nodes 16.

FIG. 1b is a cross-section of FIG. 1a. After the deep trench capacitors 10 are completely formed in the substrate, trench isolations are formed in the substrate and deep trench capacitors 10 to define active areas. The word lines 12 are then formed on the substrate, the

diffusion regions

18 and 20 are formed in the active areas by word lines 12 during the implant process, and the

diffusion regions

18 and 20 are located on both sides of the word lines 12. Finally, the plugs 22 are formed on the diffusions 20. The adjacent memory cells may experience current leakage and cell failure, reducing process yield, if bit line masks and contacts are not aligned accurately.

Therefore, the process yield and reliability of the memory cells can be improved if alignment inaccuracy between the masks of active areas and the deep trench capacitors is controlled within an acceptable range.

SUMMARY OF THE INVENTION

Accordingly, an object of the invention is to detect alignment of bit lines and bit line contacts in DRAM devices.

According to the above mentioned objects, the present invention provides a test device for detecting alignment of bit lines and bit line contacts in DRAM devices.

In the test device of the present invention, an active area is disposed in the scribe line area. Parallel first and second bar-type bit line contacts are disposed in the active area. The first and second bar-type bit line contacts are shorter than the active area, and each bar-type line contact has an outside surface and two terminals. First and second bit lines are disposed in the active area, the first bar-type bit line contact is covered by the first bit line with a first outside surface aligned with the outside surface of the first bar-type contact. The second bar-type bit line contact is covered by the second bit line with a second outside surface aligned with the outside surface of the second bar-type contact. First and second plugs are disposed on the two terminals of the first bit line respectively. Third and fourth plugs are disposed on the two terminals of the second bit line respectively.

According to the above mentioned objects, the present invention also provides a method for detecting alignment of bit lines and bit line contacts in DRAM devices.

In the method of the present invention, a wafer with at least one scribe line region and at least one memory region is provided. A plurality of memory cells in the memory region and at least one test device in the scribe line region are formed simultaneously, wherein the memory region has bit line contacts and bit lines. A first resistance is detected by the first plug and the second plug, and the second resistance is detected by the third plug and the fourth plug, respectively. Alignment of the bar-type bit line contacts and the bit lines of the test device is determined according to the first resistance and the second resistance. Finally, alignment of the bit line contacts and the bit lines is determined according to alignment of the bar-type bit line contacts and bit lines of the test device.

A detailed description is given in the following embodiments with reference to the accompanying drawings.

DESCRIPTION OF THE DRAWINGS

The present invention can be more fully understood by reading the subsequent detailed description and examples with references made to the accompanying drawings, wherein:

FIGS. 1a and 1 b are layouts of a conventional memory device with deep trench capacitors;

FIG. 2 is a layout of the test device according to the present invention;

FIG. 3 is a cross section of FIG. 2 according to the present invention; and

FIG. 4 is a layout of the test device with alignment shift according to the present invention; and

FIG. 5 is a cross section of FIG. 4.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 2 is a layout of the test device according to the present invention, and FIG. 3 is a cross section of FIG. 2. The test device detects whether the alignment of bit lines and bit line contacts in DRAM devices, wherein at least one test device is disposed a scribe line region 160 of a wafer 100.

An active area 181 is defined in the scribe line region of the wafer by trench isolation, wherein the active area 181 has a width about 2 micrometers and a length of about 300 micrometers.

First and second bar-type

bit line contacts

22 ₁and 22 ₂are parallel to each other and disposed in the active area 181. The first and second bar-type

bit line contacts

22 ₁and 22 ₂are shorter than the active area 181. In this case, length L of the first and second bar-type

bit line contacts

22 ₁and 22 ₂is about 290 micrometers and the width of the first and second bar-type

bit line contacts

22 ₁and 22 ₂is about 0.2 micrometers. In addition, the first bar-type line contact 22 ₁and the second bar-type contact 22 ₂have outside surfaces S₂₂₁and S₂₂₂, respectively, are made of, for example, polysilicon.

First and second bit lines are disposed in the active area 181, wherein the first bar-type bit line contact 22 ₁is covered by the first bit line 13 ₁. The first bit line 13 ₁has a first outside surface S₁₃₁aligned with the outside surface S₂₂₁of the first bar-type contact 22 ₁. The second bar-type bit line contact 22 ₂is covered by the second bit line S₁₃₂. The second bit line 13 ₂has a second outside surface S₁₃₂aligned with the outside surface S₂₂₂of the second bar-type contact 222.

Bit lines

13 ₁and 13 ₂are longer than bar-type

bit line contacts

22 ₁and 22 ₂and the active area. For example, the

bit lines

13 ₁and 13 ₂may have length of about 310 micrometers and width (W₁and W₂) of about 0.5 micrometers, and the

bit lines

13 ₁and 13 ₂are made of tungsten.

In addition, first and second plugs CS₁and CS₂are disposed on the two terminals of the first bit line 13 ₁respectively and third and fourth plugs CS₃and CS₄are disposed on the two terminals of the second bit line 13 ₂respectively.

Usually, a first resistance R₁can be determined by the first and second plugs CS₁and CS₂, and a second resistance R₂can be determined by the third and fourth plugs CS₃and CS₄. The first resistance R₁and the second resistance R₂can be presented by

equations

1 and 2 respectively.

\begin{matrix} R_{1} = R_{MO} \times \frac{L}{W_{1}} & (1) \\ R_{2} = R_{MO} \times \frac{L}{W_{2}} & (2) \end{matrix}

Equations 3 and 4 are obtained according to the

equations

1 and 2 respectively.

\begin{matrix} W_{1} = \frac{R_{MO} \times L}{R_{1}} & (3) \\ W_{2} = \frac{R_{MO} \times L}{R_{2}} & (4) \end{matrix}

Because the first bit line 13 ₁and second bit line 13 ₂are formed in the same process with the same conditions and parameters, the resistances per surface area of the first and

second bit lines

13 ₁and 13 ₂are both R_MO. Also, the lengths of the first and second bar-type

bit line contacts

22 ₁and 22 ₂are both L. Equation 5 is obtained by substituting equations 3 and 4.

\begin{matrix} Δ W = W_{1} - W_{2} = \frac{R_{MO} \times L}{R_{1}} - \frac{R_{MO} \times L}{R} = R_{MO} \times L \times (\frac{1}{R_{1}} - \frac{1}{R_{2}}) & (5) \end{matrix}

Therefore, the alignment shift ΔW between first and second bar-type bit line contacts (22 ₁and 22 ₂) and the first and second bit lines (13 ₁and 13 ₂) can be obtained if the first resistance R₁and the second resistance R₂are detected. That is to say, the alignment shift ΔW between first and second bar-type bit line contacts (22 ₁and 22 ₂) and the first and second bit lines (13 ₁and 13 ₂) when the first resistance R₁equals the second resistance R₂.

For example, with reference to FIG. 4 and FIG. 5, the bit lines 13 ₁and 13 ₂are shifted by a distance ΔW along the direction X₁if the masks of the bit lines (13 ₁and 13 ₂) and the bar-type bit line contacts (22 ₁and 22 ₂) have an alignment shift in the direction X₁. If this condition is met, the second outside surface S₁₃₂of the second bit line 13 ₂may not align with the outside surface S₂₂₂of the second bar-type bit line contact 22 ₂. The second bar-type bit line contact 22 ₂is not covered by the second bit line 13 ₂completely, and the portion with width ΔW is exposed. The first bar-type bit line contact 22 ₂is covered by the first bit line 13 ₁completely, even though the first bit line 13 ₁has been shifted by a distance ΔW. Thus, the equivalent width of the second bit line 13 ₂is increased to W₂+ΔW, but that of the first bit line 13 ₁is still W₁. Resistance is inversely proportional to the cross section of the conductor, and the cross section of the conductor can be regarded as a product of width and length of the conductor. In the present invention, the lengths of the bit lines 13 ₁and 13 ₂are equal, and the lengths of the bar-type

bit line contacts

22 ₁and 22 ₂are equal. Thus, in the present invention, resistance is inversely proportional to equivalent width of conductor. In this condition, the first resistance R₁detected by the first and second plugs (CS₁and CS₂) is larger than the second resistance R₂detected by the third and fourth plugs (CS₃and CS₄), and further, the alignment shift can be obtained by the equation 5.

On the contrary, the bit lines 13 ₁and 13 ₂are shifted by a distance ΔW along the direction X₂(not shown in FIG. 4 and FIG. 5) if the masks of the bit lines (13 ₁and 13 ₂) and the bar-type bit line contacts (22 ₁and 22 ₂) have an alignment shift in the direction X₂. If this condition is met, the first outside surface S₁₃₁of the first bit line 13 ₁may not align with the outside surface S₂₂₁of the first bar-type bit line contact 22 ₁. The first bar-type bit line contact 22 ₁is not covered by the first bit line 13 ₁completely, and the portion with width ΔW is exposed. The second bar-type bit line contact 22 ₁is covered by the second bit line 13 ₂completely, even though the second bit line 13 ₂has been shifted by a distance W. Thus, the equivalent width of the first bit line 13 ₁is increased to W₁+ΔW, but that of the second bit line 13 ₂is still W₂. In the present invention, resistance is inversely proportional to equivalent width of conductor. Thus, in this condition, the first resistance R₁detected by the first and second plugs (CS₁and CS₂) is smaller than the second resistance R₂detected by the third and fourth plugs (CS₃and CS₄), and the alignment shift ΔW can be obtained by the equation 5.

The present invention also provides a method for detecting alignment of bit lines and bit line contacts in DRAM device. In the method of the present invention, a wafer with at least one scribe line area and at least one memory region is provided (not shown).

A plurality of memory cells in the memory region and at least one test device in the scribe line area are formed simultaneously, wherein the memory regions have bit lines and bit line contacts as shown in FIGS. 1a and 1 b. The structure of the test device is shown in FIG. 2 and FIG. 3. The bit line contacts in the memory regions and the bar-type bit line contacts in the test device are formed by the same mask and the same process. The bit lines in the memory regions and first and second bit lines in the test device are formed by the same mask and the same process.

After that, the first resistance R₁is detected by the first plug CS₁and the second plug CS₂in the test device, and the second resistance R₂is detected by the third plug CS₃and the fourth plug CS₄in the test device. Alignment of the bit lines (13 ₁and 13 ₂) and the bar-type bit line contacts (22 ₁and 22 ₂) of the test device is determined according to whether the first resistance R₁is equal to the second resistance R₂.

The memory regions and the test device may have the same alignment shift between the bit line contacts and bit lines due to use of the same masks and the same process. Thus, alignment of bit lines and bit line contacts in memory regions can be obtained according to alignment of bar-type bit line contacts (22 ₁and 22 ₂) and bit lines (13 ₁and 13 ₂) of the test device. The alignment shift between bit lines and the bit line contacts in the memory regions can also be obtained according to the equation 5.

In the present invention, the test device is disposed in the scribe line region and is formed by the same masks and process as the bit lines and bit line contacts in the memory regions simultaneously. Therefore, the test device disposed in the scribe line region can detect the alignment shift between the bit lines and bit line contacts in the memory regions because the test device and the memory regions may have the same alignment shift when masks are aligned. Further, in the present invention the test device is disposed in the scribe line region to avoid occupying layout space in memory regions.

While the invention has been described by way of example and in terms of the preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. To the contrary, it is intended to cover various modifications and similar arrangements (as would be apparent to those skilled in the art). Therefore, the scope of the appended claims should be accorded the broadest interpretation so as to encompass all such modifications and similar arrangements.

Claims

What is claimed is:

1. A test device for detecting alignment of bit lines and bit line contacts in DRAM devices, wherein the test device is disposed in a scribe line region of a wafer, comprising:

an active area disposed in the scribe line area;

parallel first and second bar-type bit line contacts, disposed in the active area, wherein the first and second bar-type bit line contacts are shorter than the active area, and each bar-type line contact has an outside surface and two terminals;

first and second bit lines disposed in the active area, wherein the first bar-type bit line contact is covered by the first bit line with a first outside surface aligned with the outside surface of the first bar-type contact, and the second bar-type bit line contact is covered by the second bit line with a second outside surface aligned with the outside surface of the second bar-type contact;

first and second plugs disposed on the two terminals of the first bit line respectively; and

third and fourth plugs disposed on the two terminals of the second bit line respectively.

2. The test device as claimed in claim 1, wherein a first resistance is detected by the first and second plugs, and a second resistance is detected by the third and fourth plugs.

3. The test device as claimed in claim 1, wherein the first bar-type bit line contact and second bar-type bit line contact have the same width.

4. The test device as claimed in claim 1, wherein the first and second bit lines have the same width and are longer than the widths of the first and second bar-type bit line contacts.

5. The test device as claimed in claim 1, wherein the first and second bit lines are longer than the first bar-type bit line contact and the active area.

6. The test device as claimed in claim 2, wherein the alignment of the bit line contact and the bar-type active area is abnormal when the first resistance is not equal to the second resistance.

7. The test device as claimed in claim 1, wherein the first and second bit lines are made of tungsten.

8. The test device as claimed in claim 1, wherein the first and second bar-type bit line contacts are made of polysilicon.

9. A method for detecting alignment of bit lines and bit line contacts in DRAM devices, comprising:

providing a wafer with at least one scribe line and at least one memory region;

forming a plurality of memory cells in the memory region and at least one test device in the scribe line simultaneously, wherein the memory region has bit line contacts and bit lines, the test device including:

an active area disposed in the scribe line area;

third and fourth plugs disposed on the two terminals of the second bit line respectively;

detection of a first resistance by the first and second plugs;

detection of a second resistance by the third and fourth plugs;

determining alignment of the first and second bit lines and the first and second bar-type bit line contacts of the test device according to the first resistance and the second resistance; and

determining alignment of the bit line contacts and the bit lines in the memory regions according to alignment of the bar-type bit line contacts and bit lines of the test device.

10. The method as claimed in claim 9, wherein the first bar-type bit line contact and second bar-type bit line contact have the same width.

11. The method as claimed in claim 9, wherein the first and second bit lines have the same width and are longer than the width of the first and second bar-type bit line contacts.

12. The method as claimed in claim 9, wherein the first and second bit lines are longer than the first bar-type bit line contact and the active area, and the first and second bit lines have the same resistance per surface area.

13. The method as claimed in claim 9, wherein the alignment of the bit line contact and the bar-type active area is determined to be abnormal when the first resistance is not equal to the second resistance.

14. The method as claimed in claim 12, further comprising a step of determining alignment shift of the bit line contacts and the bit lines according to the first resistance, the second resistance, the length of the first and second bar-type bit line contacts and the resistance per surface area of the first and second bit lines.

15. The method as claimed in claim 14, wherein the alignment shift (ΔW) is determined by an equation:

Δ W = R_{MO} \times L \times (\frac{1}{R_{1}} - \frac{1}{R_{2}});

wherein RMO is the resistance per surface area of the first and second bit lines, L is the length of the first and second bar-type bit line contacts, R1 is the first resistance, and R2 is the second resistance.