US5618216C1 - Fabrication process for lateral-emitter field-emission device with simplified anode - Google Patents

Fabrication process for lateral-emitter field-emission device with simplified anode Download PDF

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Publication number
US5618216C1
US5618216C1 US45903395A US5618216C1 US 5618216 C1 US5618216 C1 US 5618216C1 US 45903395 A US45903395 A US 45903395A US 5618216 C1 US5618216 C1 US 5618216C1
Authority
US
United States
Prior art keywords
lateral
fabrication process
emission device
emitter field
simplified anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
Inventor
Michael D Potter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Vision Technologies Inc
Original Assignee
Advanced Vision Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US08459033 priority Critical patent/US5618216C1/en
Application filed by Advanced Vision Technologies Inc filed Critical Advanced Vision Technologies Inc
Priority to CA002221378A priority patent/CA2221378A1/en
Priority to JP8536735A priority patent/JPH11510638A/en
Priority to CN96194389A priority patent/CN1072836C/en
Priority to AU59617/96A priority patent/AU5961796A/en
Priority to JP8536743A priority patent/JPH11510639A/en
Priority to KR1019970708697A priority patent/KR19990022218A/en
Priority to PCT/US1996/008237 priority patent/WO1996038855A1/en
Priority to AU59628/96A priority patent/AU5962896A/en
Priority to PCT/US1996/008254 priority patent/WO1996038854A1/en
Priority to EP96916907A priority patent/EP0829093A4/en
Priority to CN96194391A priority patent/CN1186568A/en
Priority to CA002221443A priority patent/CA2221443C/en
Priority to KR1019970708696A priority patent/KR19990022217A/en
Priority to EP96916893A priority patent/EP0829094A4/en
Assigned to ADVANCED VISION TECHNOLOGIES, INC. reassignment ADVANCED VISION TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: POTTER, MICHAEL D.
Priority to US08/735,042 priority patent/US5700176A/en
Application granted granted Critical
Publication of US5618216A publication Critical patent/US5618216A/en
Publication of US5618216C1 publication Critical patent/US5618216C1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/40—Closing vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30423—Microengineered edge emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/38—Control of maintenance of pressure in the vessel
    • H01J2209/385—Gettering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
US08459033 1995-06-02 1995-06-02 Fabrication process for lateral-emitter field-emission device with simplified anode Expired - Fee Related US5618216C1 (en)

Priority Applications (16)

Application Number Priority Date Filing Date Title
US08459033 US5618216C1 (en) 1995-06-02 1995-06-02 Fabrication process for lateral-emitter field-emission device with simplified anode
CA002221443A CA2221443C (en) 1995-06-02 1996-05-31 Fabrication process for hermetically sealed chamber in substrate
CN96194389A CN1072836C (en) 1995-06-02 1996-05-31 Fabrication of vanity for sealed substrates
AU59617/96A AU5961796A (en) 1995-06-02 1996-05-31 Fabrication process for hermetically sealed chamber in subst rate
JP8536743A JPH11510639A (en) 1995-06-02 1996-05-31 Side emitter field emission device with simplified anode and method of making same
KR1019970708697A KR19990022218A (en) 1995-06-02 1996-05-31 Method of forming a closed chamber in a substrate
PCT/US1996/008237 WO1996038855A1 (en) 1995-06-02 1996-05-31 Fabrication process for hermetically sealed chamber in substrate
AU59628/96A AU5962896A (en) 1995-06-02 1996-05-31 Lateral-emitter field-emission device with simplified anode and fabrication thereof
CA002221378A CA2221378A1 (en) 1995-06-02 1996-05-31 Lateral-emitter field-emission device with simplified anode and fabrication thereof
EP96916907A EP0829093A4 (en) 1995-06-02 1996-05-31 Lateral-emitter field-emission device with simplified anode and fabrication thereof
CN96194391A CN1186568A (en) 1995-06-02 1996-05-31 Lateral-emitter field-emission device with simplified anode and fabrication thereof
JP8536735A JPH11510638A (en) 1995-06-02 1996-05-31 Process for making hermetically sealed cavities in a substrate
KR1019970708696A KR19990022217A (en) 1995-06-02 1996-05-31 Side-emitter field-emission device with simplified anode and method of manufacturing the same
EP96916893A EP0829094A4 (en) 1995-06-02 1996-05-31 Fabrication process for hermetically sealed chamber in substrate
PCT/US1996/008254 WO1996038854A1 (en) 1995-06-02 1996-05-31 Lateral-emitter field-emission device with simplified anode and fabrication thereof
US08/735,042 US5700176A (en) 1995-06-02 1996-10-22 Method of gettering and sealing an evacuated chamber of a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08459033 US5618216C1 (en) 1995-06-02 1995-06-02 Fabrication process for lateral-emitter field-emission device with simplified anode

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US08/735,042 Division US5700176A (en) 1995-06-02 1996-10-22 Method of gettering and sealing an evacuated chamber of a substrate

Publications (2)

Publication Number Publication Date
US5618216A US5618216A (en) 1997-04-08
US5618216C1 true US5618216C1 (en) 2001-06-26

Family

ID=23823129

Family Applications (2)

Application Number Title Priority Date Filing Date
US08459033 Expired - Fee Related US5618216C1 (en) 1995-06-02 1995-06-02 Fabrication process for lateral-emitter field-emission device with simplified anode
US08/735,042 Expired - Fee Related US5700176A (en) 1995-06-02 1996-10-22 Method of gettering and sealing an evacuated chamber of a substrate

Family Applications After (1)

Application Number Title Priority Date Filing Date
US08/735,042 Expired - Fee Related US5700176A (en) 1995-06-02 1996-10-22 Method of gettering and sealing an evacuated chamber of a substrate

Country Status (8)

Country Link
US (2) US5618216C1 (en)
EP (1) EP0829094A4 (en)
JP (1) JPH11510638A (en)
KR (1) KR19990022218A (en)
CN (1) CN1072836C (en)
AU (1) AU5961796A (en)
CA (1) CA2221443C (en)
WO (1) WO1996038855A1 (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998010459A1 (en) * 1996-09-03 1998-03-12 Advanced Vision Technologies, Inc. Oxide based phosphors and processes therefor
WO1999003122A1 (en) * 1997-07-11 1999-01-21 Fed Corporation Anhydrous method of packaging organic light emitting displays
US5872421A (en) * 1996-12-30 1999-02-16 Advanced Vision Technologies, Inc. Surface electron display device with electron sink
US5965971A (en) * 1993-01-19 1999-10-12 Kypwee Display Corporation Edge emitter display device
US5965192A (en) * 1996-09-03 1999-10-12 Advanced Vision Technologies, Inc. Processes for oxide based phosphors
WO1999056301A1 (en) * 1998-04-29 1999-11-04 Candescent Technologies Corporation Microwave sealing of flat panel displays
US6005335A (en) * 1997-12-15 1999-12-21 Advanced Vision Technologies, Inc. Self-gettering electron field emitter
US6015326A (en) * 1996-09-03 2000-01-18 Advanced Vision Technologies,Inc. Fabrication process for electron field-emission display
US6015324A (en) * 1996-12-30 2000-01-18 Advanced Vision Technologies, Inc. Fabrication process for surface electron display device with electron sink
US6017257A (en) * 1997-12-15 2000-01-25 Advanced Vision Technologies, Inc. Fabrication process for self-gettering electron field emitter
US6071633A (en) * 1996-09-03 2000-06-06 Advanced Vision Technologies, Inc Oxide based phosphors and processes therefor
US6169357B1 (en) 1997-07-28 2001-01-02 Advanced Vision Technologies, Inc. Electron field-emission display cell device having opening depth defined by etch stop
US20050017648A1 (en) * 2003-07-22 2005-01-27 Ron Naaman Display device
US20060145605A1 (en) * 2002-11-26 2006-07-06 Lg Philips Lcd Co., Ltd. Organic electroluminescent display panel device and method of fabricating the same
US20140346459A1 (en) * 2013-05-21 2014-11-27 Samsung Display Co., Ltd. Organic light emitting display apparatus and method of manufacturing the same
US9779906B2 (en) * 2014-11-19 2017-10-03 Kabushiki Kaisha Toyota Chuo Kenkyusho Electron emission device and transistor provided with the same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1055248A1 (en) * 1998-02-09 2000-11-29 Advanced Vision Technologies, Inc. Confined electron field emission device and fabrication process
US20020018172A1 (en) * 2000-02-10 2002-02-14 Alwan James J. Method for manufacturing a flat panel display using localized wet etching
JP3754859B2 (en) * 2000-02-16 2006-03-15 キヤノン株式会社 Manufacturing method of image display device
MX2017013673A (en) 2015-04-28 2018-03-15 Koninklijke Philips Nv Device for radio frequency skin treatment.

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4721885A (en) * 1987-02-11 1988-01-26 Sri International Very high speed integrated microelectronic tubes
US4904895A (en) * 1987-05-06 1990-02-27 Canon Kabushiki Kaisha Electron emission device
US4855636A (en) * 1987-10-08 1989-08-08 Busta Heinz H Micromachined cold cathode vacuum tube device and method of making
FR2634059B1 (en) * 1988-07-08 1996-04-12 Thomson Csf AUTOSCELLED ELECTRONIC MICROCOMPONENT IN VACUUM, ESPECIALLY DIODE, OR TRIODE, AND MANUFACTURING METHOD THEREOF
US5192240A (en) * 1990-02-22 1993-03-09 Seiko Epson Corporation Method of manufacturing a microelectronic vacuum device
US5141459A (en) * 1990-07-18 1992-08-25 International Business Machines Corporation Structures and processes for fabricating field emission cathodes
US5203731A (en) * 1990-07-18 1993-04-20 International Business Machines Corporation Process and structure of an integrated vacuum microelectronic device
US5173634A (en) * 1990-11-30 1992-12-22 Motorola, Inc. Current regulated field-emission device
JP3235172B2 (en) * 1991-05-13 2001-12-04 セイコーエプソン株式会社 Field electron emission device
US5144191A (en) * 1991-06-12 1992-09-01 Mcnc Horizontal microelectronic field emission devices
US5233263A (en) * 1991-06-27 1993-08-03 International Business Machines Corporation Lateral field emission devices
US5374868A (en) * 1992-09-11 1994-12-20 Micron Display Technology, Inc. Method for formation of a trench accessible cold-cathode field emission device

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5965971A (en) * 1993-01-19 1999-10-12 Kypwee Display Corporation Edge emitter display device
US6023126A (en) * 1993-01-19 2000-02-08 Kypwee Display Corporation Edge emitter with secondary emission display
US6071633A (en) * 1996-09-03 2000-06-06 Advanced Vision Technologies, Inc Oxide based phosphors and processes therefor
US5965192A (en) * 1996-09-03 1999-10-12 Advanced Vision Technologies, Inc. Processes for oxide based phosphors
US6254805B1 (en) 1996-09-03 2001-07-03 Advanced Vision Technologies, Inc. Oxide based phosphors and processes therefor
WO1998010459A1 (en) * 1996-09-03 1998-03-12 Advanced Vision Technologies, Inc. Oxide based phosphors and processes therefor
US6015326A (en) * 1996-09-03 2000-01-18 Advanced Vision Technologies,Inc. Fabrication process for electron field-emission display
US6241911B1 (en) 1996-09-03 2001-06-05 Advanced Vision Technologies, Inc. Oxide based phosphors and processes therefor
US5872421A (en) * 1996-12-30 1999-02-16 Advanced Vision Technologies, Inc. Surface electron display device with electron sink
US6015324A (en) * 1996-12-30 2000-01-18 Advanced Vision Technologies, Inc. Fabrication process for surface electron display device with electron sink
WO1999003122A1 (en) * 1997-07-11 1999-01-21 Fed Corporation Anhydrous method of packaging organic light emitting displays
US6169357B1 (en) 1997-07-28 2001-01-02 Advanced Vision Technologies, Inc. Electron field-emission display cell device having opening depth defined by etch stop
US6005335A (en) * 1997-12-15 1999-12-21 Advanced Vision Technologies, Inc. Self-gettering electron field emitter
US6017257A (en) * 1997-12-15 2000-01-25 Advanced Vision Technologies, Inc. Fabrication process for self-gettering electron field emitter
US6037710A (en) * 1998-04-29 2000-03-14 Candescent Technologies, Inc. Microwave sealing of flat panel displays
WO1999056301A1 (en) * 1998-04-29 1999-11-04 Candescent Technologies Corporation Microwave sealing of flat panel displays
US20060145605A1 (en) * 2002-11-26 2006-07-06 Lg Philips Lcd Co., Ltd. Organic electroluminescent display panel device and method of fabricating the same
US7131884B2 (en) * 2002-11-26 2006-11-07 Lg.Philips Lcd Co., Ltd. Organic electroluminescent display panel device and method of fabricating the same
US20050017648A1 (en) * 2003-07-22 2005-01-27 Ron Naaman Display device
US20050018467A1 (en) * 2003-07-22 2005-01-27 Ron Naaman Electron emission device
US7646149B2 (en) 2003-07-22 2010-01-12 Yeda Research and Development Company, Ltd, Electronic switching device
US20140346459A1 (en) * 2013-05-21 2014-11-27 Samsung Display Co., Ltd. Organic light emitting display apparatus and method of manufacturing the same
US9048454B2 (en) * 2013-05-21 2015-06-02 Samsung Display Co., Ltd. Organic light emitting display apparatus and method of manufacturing the same
US9779906B2 (en) * 2014-11-19 2017-10-03 Kabushiki Kaisha Toyota Chuo Kenkyusho Electron emission device and transistor provided with the same

Also Published As

Publication number Publication date
CN1072836C (en) 2001-10-10
WO1996038855A1 (en) 1996-12-05
CA2221443C (en) 2001-09-25
AU5961796A (en) 1996-12-18
US5700176A (en) 1997-12-23
US5618216A (en) 1997-04-08
EP0829094A1 (en) 1998-03-18
CA2221443A1 (en) 1996-12-05
EP0829094A4 (en) 1998-06-17
KR19990022218A (en) 1999-03-25
CN1186569A (en) 1998-07-01
JPH11510638A (en) 1999-09-14

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Legal Events

Date Code Title Description
AS Assignment

Owner name: ADVANCED VISION TECHNOLOGIES, INC., NEW YORK

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:POTTER, MICHAEL D.;REEL/FRAME:008046/0886

Effective date: 19960702

RR Request for reexamination filed

Effective date: 19980720

FPAY Fee payment

Year of fee payment: 4

B1 Reexamination certificate first reexamination

Free format text: THE PATENTABILITY OF CLAIMS 10-12 IS CONFIRMED. CLAIMS 1-9 ARE CANCELLED. NEW CLAIMS 13-19 ARE ADDED AND DETERMINED TO BE PATENTABLE.

C1 Reexamination certificate (1st level)
REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20050408