US3808043A - Method of fabricating a dark heater - Google Patents

Method of fabricating a dark heater Download PDF

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Publication number
US3808043A
US3808043A US00257625A US25762572A US3808043A US 3808043 A US3808043 A US 3808043A US 00257625 A US00257625 A US 00257625A US 25762572 A US25762572 A US 25762572A US 3808043 A US3808043 A US 3808043A
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Prior art keywords
coating
layer
heater
wire
coated
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US00257625A
Inventor
J Hale
G Merritt
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RCA Licensing Corp
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RCA Corp
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Priority to US00257625A priority Critical patent/US3808043A/en
Priority to IT23628/73A priority patent/IT987598B/en
Priority to CA171,257A priority patent/CA1017208A/en
Priority to DE2326202A priority patent/DE2326202B2/en
Priority to GB2452973A priority patent/GB1431571A/en
Priority to NL7307463A priority patent/NL7307463A/xx
Priority to FR7319522A priority patent/FR2186802B1/fr
Priority to JP6071673A priority patent/JPS5331592B2/ja
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Publication of US3808043A publication Critical patent/US3808043A/en
Assigned to RCA LICENSING CORPORATION, TWO INDEPENDENCE WAY, PRINCETON, NJ 08540, A CORP. OF DE reassignment RCA LICENSING CORPORATION, TWO INDEPENDENCE WAY, PRINCETON, NJ 08540, A CORP. OF DE ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: RCA CORPORATION, A CORP. OF DE
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Expired - Lifetime legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/08Manufacture of heaters for indirectly-heated cathodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913Rod, strand, filament or fiber
    • Y10T428/2933Coated or with bond, impregnation or core
    • Y10T428/294Coated or with bond, impregnation or core including metal or compound thereof [excluding glass, ceramic and asbestos]
    • Y10T428/2942Plural coatings
    • Y10T428/2944Free metal in coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913Rod, strand, filament or fiber
    • Y10T428/2933Coated or with bond, impregnation or core
    • Y10T428/294Coated or with bond, impregnation or core including metal or compound thereof [excluding glass, ceramic and asbestos]
    • Y10T428/2942Plural coatings
    • Y10T428/2949Glass, ceramic or metal oxide in coating

Definitions

  • This invention relates to electron discharge tubes, and particularly to a method of fabricating dark insulated heaters for such tubes.
  • Such heaters comprise a core wire of a refractory metal, such as tungsten, a first wire covering layer of an insulating material, such as aluminum oxide, and an outer dark coating such as a particulate mixture of tungsten and aluminum oxide.
  • a purpose of the first coating is to provide insulation between the heater wire and the cathode, and a purpose of the outer coating is to increase the thermal emissivity of the heater, thereby lowering the temperature at which the heater need operate to heat the cathode to'its operating temperature. The greater the proportion of tungsten in the outer coating, the darker the heater.
  • the technique comprises using a coating bath for the outer coating which isrheologically stable, i.e., which has a low settling rate of the particles therein. This results in a high viscosity bath whereby penetration of the bath into the undercoating is prevented.
  • dip coating One methodgenerally known for applying various coatings to heater structures is known as dip" coating. This method involves dipping the heater to be coated into and out of a bath containing an organic solvent and a suspension of the particles to be coated on the heater, the particles adhering to the heater as the emerging heater breaks through the surface of the bath. If the heater structure is in the form of a continuous wire or the like which is drawn through the bath, the process is known as a drag coating process. The thickness of the coating is a function of the specific gravity and viscosity of the bath.
  • the undercoating be rendered relatively hard and impervious prior to the overcoating process, by a high temperature firing operation, for minimizing penetration of the overcoating bath into the undercoating, we have discovered that such a high temperature process is not necessary, and that penetration can be avoided even if the undercoating is in a non-sintered, relatively soft and porous condition during the overcoating process.
  • the undercoating be substantially completely dry and free of all solvents used both in the undercoating process and in the usual rinsing step performed thereafter. That is, we discovered that the prevention of penetration of the overcoating bath into the undercoating is not so much a function of the hardness and imperviousness of the undercoating, as previously thought, but primarily a function of the degree of removal of the solvents from the undercoating. While not known for sure, it appears that the presence of such solvents in the undercoating tends to dilute and reduce the viscosity of the overcoating bath which contacts the undercoating, thus promoting penetration.
  • a heater wire of usual configuration is first coated by a conventional means with a layer of aluminum oxide having a thickness in the order of 5 mils.
  • the coating operation can comprise the known dipping, spraying, or cataphoretic processes.
  • an organic solvent or vehicle for the aluminum oxide is used which tends to remain with the aluminum oxide coating on the heater wire.
  • the aluminum oxide layer is somewhat soft and porous.
  • the coated heater is rinsed in a suitable solvent, such as methanol or acetone, to remove loosely adhered particles.
  • a suitable solvent such as methanol or acetone
  • the heater is air dried at a temperature as high as possible for rapidly drying the heater without causing significant oxidation of the heater wire.
  • the temperature used, and the time required to thoroughly dry the heater are functions of the configuration of the heater and the size and mass of the heater. In general, however, to avoid oxidation of the heater wire and thus avoid the need to use a protective atmosphere during the drying operation, temperatures below 400 C are preferred.
  • heaters can be placed in a conventional air oven and heated.
  • a jet of hot dry air can be blown over the heaters.
  • a source of radiations such as infrared radiations from a conventional source, can be directed onto the heaters.
  • the latter heating means is preferred since it is simple, noiseless, and the radiations can be accurately focused onto the desired portions of the heaters, thereby avoiding heating of fixtures used to carry the heaters.
  • an infrared source is used to heat the heater coating to a temperature of about 300 C for a time of l2 seconds.
  • the coated heaters are provided with the outer coating of tungsten.
  • a coating bath is used in accordance with the process described in the above-described co pending application.
  • a coating bath comprising (by weight) 40 percent tungsten and 60 percent liquid vehicle, the tungsten having a particle size of 0.5 to microns, with the average particle size being about 2 microns, the vehicle comprising 1.68 percent lQQQ second nitrocellulose wet 30 percent by weight by alcohol and 98.5 percent butyl acetate
  • the bath is ball milled for about 6 hours. This provides a rheologically stable bath suitable for coating the tungsten particles onto the heater without bath penetration into the undercoating.
  • overcoating techniques such as spraying or cataphoretic processes, can be used.
  • the heater is again rinsed, in a suitable organic solvent, to remove loosely adherent particles, and the heater is fired at an elevated temperature, in the order of l,600 C to complete the heater.
  • the heater wire can be any refractory wire, such as molybdenum, normally used in heaters.
  • the undercoating can be various known insulating refractory materials normally used in heaters, such as zirconium oxide, beryllium oxide, and the mixture of chrome oxide and titanium oxide. These materials, and others known to workers skilled in these arts, tend to be relatively soft and porous when initially applied, and are normally later fired at high temperatures. Thus, the above-described problems of the prior art processes exist with the use of such materials, and advantages are obtained using the inventive process described herein.
  • the darkening outer coating can comprise various refractory, high thermal emissivity materials such as carbon, titanium, chromium, and molybdenum. Again, avoidance of penetration of these materials into the underlying coating is generally to be desired.
  • a method of fabricating a dark heater comprising:
  • a method of fabricating a dark heater comprising:

Abstract

A refractory metal heater wire is first coated in conventional fashion with a first coating of insulating material, e.g., aluminum oxide. The coating is then dried in air at a temperature below which oxidation of the heater wire occurs for a time sufficient to completely remove all solvents from the first coating. Then, a second coating of a darkening material is applied over the first coating. The complete removal of solvents from the first layer prior to the second layer application step reduces penetration of the material of the second layer into the first layer.

Description

United States Patent [1 1 Hale et al.
[ METHOD OF FABRICATING A DARK HEATER [75] Inventors: John Richard Hale, Lancaster, Pa.;
George Irvin Merritt, Clifton, NJ.
[52] US. Cl 117/217, ll7/227, 313/345 [51] Int. Cl B44d l/l8 [58] Field of Search 117/217, 29, 31, 227
[56] References Cited UNITED STATES PATENTS 6/1967 Scheible 117/217 9/1968 Feinleib 117/217 [451 Apr. 30, 1974 Primary Examiner-Cameron K. Weiffenbach Attorney, Agent, or Firm-G. l-l. Bruestle; L. Greenspan [57] ABSTRACT A refractory metal heater wire is first coated in conventional fashion with a first coating of insulating material, e.g., aluminum oxide. The coating is then dried in air at a temperature below which oxidation of the heater wire occurs for a time sufiicient to completely remove all solvents from the first coating. Then, a second coating of a darkening material is applied over the first coating. The complete removal of solvents from the first layer prior to the second layer application step reduces penetration of the material of the second layer into the first layer.
3 Claims, N0 Drawings METHOD OF FABRICATING A DARK HEATER BACKGROUND OF THE INVENTION This invention relates to electron discharge tubes, and particularly to a method of fabricating dark insulated heaters for such tubes.
In various types of electron tubes having indirectly heated cathodes, it is the practice to use dark heaters to heat the cathode to electron emitting temperatures. Such heaters comprise a core wire of a refractory metal, such as tungsten, a first wire covering layer of an insulating material, such as aluminum oxide, and an outer dark coating such as a particulate mixture of tungsten and aluminum oxide. A purpose of the first coating is to provide insulation between the heater wire and the cathode, and a purpose of the outer coating is to increase the thermal emissivity of the heater, thereby lowering the temperature at which the heater need operate to heat the cathode to'its operating temperature. The greater the proportion of tungsten in the outer coating, the darker the heater.
While the use of insulated heaters having an outer coating consisting entirely of tungsten has been suggested in the past (see, for example, US. Pat. No. 3,195,004 issued to Hassett on July 13, 1965), the use of such heaters has generally not been practical. One reason for this is that, in the past, as the percentage of tungsten in the outer coating was increased, the amount of current leakage between the heater and the cathode increased. The cause of such leakage is that particles of tungsten from the outer coating penetrate into the aluminum oxide undercoating and provide leakage paths for current through the undercoating. This is generally undesirable, and the practice in the past has beento limit the ratio of tungsten to aluminum oxide in the outer coating to some upper limit, e.g., in the orderof 40 percent.
A technique has recently been suggested (as described in co-pending US. Pat. application Ser. No. 242,240 filed Apr. 7, 1972 for John I-Iale) for fabricating heaters having outer coatings with a large percentage, ashigh as 100 percent, of tungsten while avoiding high levels of. leakage through the heater. Briefly, the technique comprises using a coating bath for the outer coating which isrheologically stable, i.e., which has a low settling rate of the particles therein. This results in a high viscosity bath whereby penetration of the bath into the undercoating is prevented.
In addition, to further prevent such penetration, it has, in the past, been thought necessary to render the undercoating as impervious to the overcoating bath as possible by means of a high temperature sintering process prior to performing the overcoating process. Disadvantages of the sintering process, however, are that expensive apparatus is generally required, the process tends to be time consuming and expensive, and, owing to the high temperatures involved, various fixtures, such as clips in which the heaters are mounted, have a short life requiring frequent maintenance and replacement. Also, to prevent oxidation of the heater wire, the sintering is done in a protective atmosphere, which adds further cost and complexity to the process.
DETAILED DESCRIPTION OF THE INVENTION One methodgenerally known for applying various coatings to heater structures is known as dip" coating. This method involves dipping the heater to be coated into and out of a bath containing an organic solvent and a suspension of the particles to be coated on the heater, the particles adhering to the heater as the emerging heater breaks through the surface of the bath. If the heater structure is in the form of a continuous wire or the like which is drawn through the bath, the process is known as a drag coating process. The thickness of the coating is a function of the specific gravity and viscosity of the bath.
As previously noted, a problem in the past using dark heaters having large percentages of tungsten in the outer coating is that the tubes using the heaters generally have unacceptably high levels of heater to cathode leakage. This occurs because of penetration of particles of tungsten from the outer coating into the aluminum oxide undercoating.
We have discovered that probably the principal cause of penetration of the tungsten particles into the undercoating is the use of outer coating processes in which the viscosity of the coating bath is allowed to become too low. In such case, as described in the abovecited co-pending application, the highly fluid bath, including tungsten particles conveyed therewith, penetrates into the undercoating.
Although it is generally desirable that the undercoating be rendered relatively hard and impervious prior to the overcoating process, by a high temperature firing operation, for minimizing penetration of the overcoating bath into the undercoating, we have discovered that such a high temperature process is not necessary, and that penetration can be avoided even if the undercoating is in a non-sintered, relatively soft and porous condition during the overcoating process.
What is necessary, we discovered, is that the undercoating be substantially completely dry and free of all solvents used both in the undercoating process and in the usual rinsing step performed thereafter. That is, we discovered that the prevention of penetration of the overcoating bath into the undercoating is not so much a function of the hardness and imperviousness of the undercoating, as previously thought, but primarily a function of the degree of removal of the solvents from the undercoating. While not known for sure, it appears that the presence of such solvents in the undercoating tends to dilute and reduce the viscosity of the overcoating bath which contacts the undercoating, thus promoting penetration.
The prior art process of sintering the undercoating prior to the overcoating process also results in a complete drying and removal of the solvent. The advantage of our discovery, that sintering of the undercoating is not necessary, is that a much lower temperature drying operation can be used, thereby allowing the use of simple apparatus, no reducing atmosphere, and a processing rate higher than was heretofore possible.
In a specific embodiment of the invention, a heater wire of usual configuration is first coated by a conventional means with a layer of aluminum oxide having a thickness in the order of 5 mils. The coating operation can comprise the known dipping, spraying, or cataphoretic processes. In such operations, as known, an organic solvent or vehicle for the aluminum oxide is used which tends to remain with the aluminum oxide coating on the heater wire. Also, the aluminum oxide layer is somewhat soft and porous.
While it is not possible to give a quantitative definition of what is meant by soft" and porous," the difference in softness and porosity of an aluminum oxide layer before and after a high temperature firing operation is well known to persons skilled in these arts. In general, the soft layer can be scraped off the heater wire in a paste-like form, whereas the sintered layer is quite brittle and crumbles upon being scraped or bent.
Thereafter, in accordance with usual techniques, the coated heater is rinsed in a suitable solvent, such as methanol or acetone, to remove loosely adhered particles.
Then, in accordance with the instant invention, the heater is air dried at a temperature as high as possible for rapidly drying the heater without causing significant oxidation of the heater wire. The temperature used, and the time required to thoroughly dry the heater, are functions of the configuration of the heater and the size and mass of the heater. In general, however, to avoid oxidation of the heater wire and thus avoid the need to use a protective atmosphere during the drying operation, temperatures below 400 C are preferred.
Although the drying operation is performed at a temperature well below that used in the prior art sintering process (generally above l,600 C), some degree of hardening of the insulation coating occurs. This is desirable for further reducing the possibility of bath penetration.
Various means for performing the drying process can be used. For example, heaters can be placed in a conventional air oven and heated. Alternatively, a jet of hot dry air can be blown over the heaters. Further still, a source of radiations, such as infrared radiations from a conventional source, can be directed onto the heaters. The latter heating means is preferred since it is simple, noiseless, and the radiations can be accurately focused onto the desired portions of the heaters, thereby avoiding heating of fixtures used to carry the heaters.
In one embodiment of the invention, in which is air dried a heater having an undercoating of aluminum oxide of 5 mils thickness and weight of 5 miligrams, and a base wire of tungsten of 54 mm length and 3.5 mils diameter an infrared source is used to heat the heater coating to a temperature of about 300 C for a time of l2 seconds.
After thorough drying, the coated heaters are provided with the outer coating of tungsten. Preferably, in order to avoid penetration of the tungsten into the undercoating, a coating bath is used in accordance with the process described in the above-described co pending application. For example, with a coating bath comprising (by weight) 40 percent tungsten and 60 percent liquid vehicle, the tungsten having a particle size of 0.5 to microns, with the average particle size being about 2 microns, the vehicle comprising 1.68 percent lQQQ second nitrocellulose wet 30 percent by weight by alcohol and 98.5 percent butyl acetate, the bath is ball milled for about 6 hours. This provides a rheologically stable bath suitable for coating the tungsten particles onto the heater without bath penetration into the undercoating.
Other overcoating techniques, such as spraying or cataphoretic processes, can be used.
After the overcoating process, the heater is again rinsed, in a suitable organic solvent, to remove loosely adherent particles, and the heater is fired at an elevated temperature, in the order of l,600 C to complete the heater.
While the invention has been described using specific materials, the invention has utility in the fabrication of heaters using other materials. For example, the heater wire can be any refractory wire, such as molybdenum, normally used in heaters.
The undercoating can be various known insulating refractory materials normally used in heaters, such as zirconium oxide, beryllium oxide, and the mixture of chrome oxide and titanium oxide. These materials, and others known to workers skilled in these arts, tend to be relatively soft and porous when initially applied, and are normally later fired at high temperatures. Thus, the above-described problems of the prior art processes exist with the use of such materials, and advantages are obtained using the inventive process described herein.
Also, the darkening outer coating can comprise various refractory, high thermal emissivity materials such as carbon, titanium, chromium, and molybdenum. Again, avoidance of penetration of these materials into the underlying coating is generally to be desired.
We claim:
1. A method of fabricating a dark heater comprising:
coating a tungsten wire with a relatively soft and porous first layer of aluminum oxide containing a solvent,
heating said coated wire in air at a temperature below 400 C for a time sufficient to remove said solvent from said first layer,
coating said coated wire with a second layer of tungsten metal particles while said first layer is still relatively soft and porous and firing said coated wire at an elevated temperature to complete the heater.
2. A method of fabricating a dark heater comprising:
coating a refractory metal heater wire with a relatively soft and porous first layer of electrically insulating inorganic material containing a solvent,
heating said coated wire in air at a temperature below 400 C and below which oxidation of said wire occurs for a time sufficient to remove said solvent from said first layer,
coating said coated heater wire while said first layer is still relatively soft and porous with a second layer containing refractory metal particles of high thermal emissivity, and
firing said coated heater wire to sinter said coatings.
3. The method of claim 2 wherein said second layer is coated by a process in which a solvent is caused to contact said first layer.

Claims (2)

  1. 2. A method of fabricating a dark heater comprising: coating a refractory metal heater wire with a relatively soft and porous first layer of electrically insulating inorganic material containing a solvent, heating said coated wire in air at a temperature below 400* C and below which oxidation of said wire occurs for a time sufficient to remove said solvent from said first layer, coating said coated heater wire while said first layer is still relatively soft and porous with a second layer containing refractory metal particles of high thermal emissivity, and firing said coated heater wire to sinter said coatings.
  2. 3. The method of claim 2 wherein said second layer is coated by a process in which a solvent is caused to contact said first layer.
US00257625A 1972-05-30 1972-05-30 Method of fabricating a dark heater Expired - Lifetime US3808043A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
US00257625A US3808043A (en) 1972-05-30 1972-05-30 Method of fabricating a dark heater
IT23628/73A IT987598B (en) 1972-05-30 1973-05-02 METHOD FOR THE MANUFACTURE OF DARK RADIATION HEATERS
CA171,257A CA1017208A (en) 1972-05-30 1973-05-14 Method of fabricating a dark heater
GB2452973A GB1431571A (en) 1972-05-30 1973-05-23 Method of fabricating a dark heater
DE2326202A DE2326202B2 (en) 1972-05-30 1973-05-23 Process for manufacturing dark heaters for electron tubes
NL7307463A NL7307463A (en) 1972-05-30 1973-05-29
FR7319522A FR2186802B1 (en) 1972-05-30 1973-05-29
JP6071673A JPS5331592B2 (en) 1972-05-30 1973-05-30

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Application Number Priority Date Filing Date Title
US00257625A US3808043A (en) 1972-05-30 1972-05-30 Method of fabricating a dark heater

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US3808043A true US3808043A (en) 1974-04-30

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US00257625A Expired - Lifetime US3808043A (en) 1972-05-30 1972-05-30 Method of fabricating a dark heater

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US (1) US3808043A (en)
JP (1) JPS5331592B2 (en)
CA (1) CA1017208A (en)
DE (1) DE2326202B2 (en)
FR (1) FR2186802B1 (en)
GB (1) GB1431571A (en)
IT (1) IT987598B (en)
NL (1) NL7307463A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4568572A (en) * 1984-12-24 1986-02-04 Texaco Inc. Method of forming an alumina coated substrate
US4844942A (en) * 1985-05-17 1989-07-04 Hitachi, Ltd. Method of producing dark heater
EP3130689A1 (en) 2012-08-07 2017-02-15 Plansee SE Heating element for a planar heater of a mocvd reactor

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142717A (en) * 1974-05-10 1975-11-17
JPS50142715A (en) * 1974-05-10 1975-11-17
GB8611967D0 (en) * 1986-05-16 1986-10-29 English Electric Valve Co Ltd Directly heated cathodes

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328201A (en) * 1964-04-27 1967-06-27 Rca Corp Heater for electron tubes
US3401297A (en) * 1965-08-23 1968-09-10 Varian Associates Thermionic cathodes for electron discharge devices with improved refractory metal heater wires

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE557165A (en) * 1956-05-02
DE1281038B (en) * 1962-08-01 1968-10-24 Telefunken Patent Process for the production of an indirectly heated cathode for an electrical discharge tube
US3450565A (en) * 1964-12-18 1969-06-17 Sylvania Electric Prod Method of coating heater coils
DE1564843A1 (en) * 1966-05-24 1970-03-05 Telefunken Patent Process for the production of an indirectly heated cathode for an electrical discharge tube
NL7109224A (en) * 1971-07-03 1973-01-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328201A (en) * 1964-04-27 1967-06-27 Rca Corp Heater for electron tubes
US3401297A (en) * 1965-08-23 1968-09-10 Varian Associates Thermionic cathodes for electron discharge devices with improved refractory metal heater wires

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4568572A (en) * 1984-12-24 1986-02-04 Texaco Inc. Method of forming an alumina coated substrate
US4844942A (en) * 1985-05-17 1989-07-04 Hitachi, Ltd. Method of producing dark heater
EP3130689A1 (en) 2012-08-07 2017-02-15 Plansee SE Heating element for a planar heater of a mocvd reactor

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Publication number Publication date
JPS5331592B2 (en) 1978-09-04
DE2326202B2 (en) 1975-07-17
NL7307463A (en) 1973-12-04
JPS4951868A (en) 1974-05-20
DE2326202A1 (en) 1973-12-20
FR2186802A1 (en) 1974-01-11
IT987598B (en) 1975-03-20
GB1431571A (en) 1976-04-07
FR2186802B1 (en) 1976-04-23
CA1017208A (en) 1977-09-13

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