US3637296A - Cooling means for reflecting device - Google Patents

Cooling means for reflecting device Download PDF

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Publication number
US3637296A
US3637296A US43493A US3637296DA US3637296A US 3637296 A US3637296 A US 3637296A US 43493 A US43493 A US 43493A US 3637296D A US3637296D A US 3637296DA US 3637296 A US3637296 A US 3637296A
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reflecting device
channels
set forth
reflecting
passages
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Expired - Lifetime
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US43493A
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George H Mclafferty
George R Wisner
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Raytheon Technologies Corp
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United Aircraft Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G02B7/1815—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation with cooling or heating systems

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  • ABSTRACT This reflecting device is for use wherein the reflecting surface is subjected to heat and includes a thick backing member with channels on one surface thereof with one surface of a cover member fixed to said channeled surface forming passages. A reflecting surface is formed on the other surface of the cover member and a manifold system directs a coolant through the passages formed by the channels of the backing member and the mating surface of the cover member.
  • the manifold system includes an inlet and an outlet which can be conn cted to any desired control means to achieve the proper flow.
  • fihis cooling arrangement not only provides the cooling necess ry to maintain the reflecting device in an operating condition but also maintains the high quality of the reflecting surfaces? 10 Claims, 4 Drawing Figures l PATENTEU JAN 2 5 I972 SHEET 1 fiF 2 )7 M if CROSS-REFERENCE TO RELATED APPLICATIONS Application Ser. No. 34,672, filed May 5, 1970, which is a continuation of application Ser. No. 804,386, filed Mar. 3, 1969 for Cooling Means for Reflecting Device, contains subject matter which is an improvement to the subject matter herein.
  • Reflecting surfaces have been made by having passages drilled radially into a block adjacent the reflecting surface; however, this method was not satisfactory due to difficulty in manifolding the passages and having the passages follow a curved surface.
  • the passages also would have to be large and the material thickness from the surface of the cooling channel would be excessive.
  • This reflecting device permits close dimensional tolerance passages and simplified manifolding.
  • the coolant passages can also be formed of complex contours with the same tolerance.
  • This construction also gives flexibility of materials in that the requirement for thermal stability of the material can be relaxed in favor of other requirements if necessary.
  • the method of making a reflecting device such as this is greatly simplified and the quality greatly increased. Quality means that the reflecting surface is maintained to produce diffraction limited optics.
  • FIG. I is a top view showing the location of the inlet and outlet along with the manifolds and the cooling passages.
  • FIG. 2 is a view taken along the line 2-2 of FIG. 1.
  • FIG. 3 is a view taken along the line 33 of FIG. 1.
  • FIG. 4 is an enlarged view of a portion of FIG. 3 showing the cooling passages in detail.
  • the reflecting device shown includes a backing member 2 and a platelike cover member 4. While members 2 and 4 are shown as substantially circular in shape (see FIG. 1), other contours desired can be used, such as rectangular.
  • the backing member 2 is shown as being constructed from two parts, 6 and 8.
  • Part 6 is relatively thick and has arcuate slots 10 and 12 cut into one end surface 14. These slots, 10 and 12, extend inwardly to an inner surface 16 adjacent the other end surface 18 of part 6, and are formed having the same radial distance from the center of the part 6 of the circular backing member 2. Each slot, 10 and 12, is adjacent the outer edge of the part 6 and extends substantially through an arc of 180.
  • a passage 20 extends in a radial direction within part 6 and connects the midpoint of the arcuate slot 10 with the exterior of the backing member 2.
  • a passage 22 extends in a radial direction within part 6 and connects the midpoint of the arcuate slot 12 with the exterior of the backing member 2.
  • Channels, or grooves, 24 are formed in the surface 18 of part 6. This surface 18 is shaped to receive one surface 26 of the platelike cover member 4.
  • the channels 24 are rectangular in cross section with webs 28 being formed therebetween.
  • the channels are positioned in a parallel relationship with one end of each channel being connected to the slot 10 at its inner surface 16 and the other end of each channel being connected to the slot 12 at its inner surface 16.
  • Part 8 is a manifold cover having a surface 30 which covers the open ends of slots 10 and I2 and forms two manifolds 32 and 34 therewith, respectively.
  • This surface 30 of part 8 is fixed to surface 14 of part 6 so as to have a leakproof attachment.
  • Any fixing means can be used which will provide this leak iroof attachment, such as brazin Platelr e cover member 4 has its surface 26 fixed to surface 18 of part 6 which includes the tops of the webs 28. This surface 26 forms a plurality of passages 36 with channels 24. These surfaces 18 and 26 are also fixed together so as to have a leakproof attachment. Any fixing means can be used which will provide this leakproof attachment, such as brazing.
  • the outer surface 38 of platelike cover member 4 is made into a reflecting surface.
  • aligning pin means are shown. To position the part 8 with part 6 holes 40 and 42 are aligned and pins 44 are pressed into place. To position the platelike cover member 4 with part 6 holes 46 and 48 are aligned and pins 50 are pressed into place.
  • a coolant can enter passage 22, flow into manifold 34 and be directed into one end of all the passages 36.
  • the coolant flows through the passages 36 adjacent the reflecting surface 38 to the manifold 32 where it exits through passage 20.
  • Any control means desired can be vused to control the flow of coolant liquid through the reflecting device which will maintain the flow at a rate which will prevent the temperature difference between the reflecting surface 38 and the surface 18 of part6 from contributing to thermal distortions.
  • the thickness of the backing member 2 was made approximately 16 times the thickness of the platelike cover member 4.
  • the material used to form the backing member 2 and the platelike cover member 4 was copper. This material was used since it has a high rate of conductivity. While other coolants can be used, water was used.
  • the reflecting surface formed on surface 38 can be made in many ways. In the construction referred to, the copper platelike cover member 4 was coated with electroless nickel, which was then coated by vapor deposited gold-chromium, and polished.
  • An optical reflecting device for operating under heat comprising a thick backing member having a metallic surface of a predetermined shape, a second relatively thin metallic platelike member fixed to the surface thereof, one of said members having channels on the side facing the other member, said channels forming webs therebetween, the free faces of the webs being fixed to the other member, said channels forming passages with the other member, a coolant manifold system comprising at least two manifolds, said manifold system being connected to said passages, said free face of said second member being treated to form a reflecting surface.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

This reflecting device is for use wherein the reflecting surface is subjected to heat and includes a thick backing member with channels on one surface thereof with one surface of a cover member fixed to said channeled surface forming passages. A reflecting surface is formed on the other surface of the cover member and a manifold system directs a coolant through the passages formed by the channels of the backing member and the mating surface of the cover member. The manifold system includes an inlet and an outlet which can be connected to any desired control means to achieve the proper flow. This cooling arrangement not only provides the cooling necessary to maintain the reflecting device in an operating condition but also maintains the high quality of the reflecting surface.

Description

United States Patent McLafferty et a].
[451 Jan. 25, 1972 [541 COOLING MEANS FOR REFLECTING DEVICE 3,488,110 1/1970 Evog ..350/3l0 FOREIGN PATENTS OR APPUCATIONS Primary ExaminerDavid Schonberg Assistant Examiner-Michael J Tokar Attorney-Jack N. McCarthy [5 7] ABSTRACT This reflecting device is for use wherein the reflecting surface is subjected to heat and includes a thick backing member with channels on one surface thereof with one surface of a cover member fixed to said channeled surface forming passages. A reflecting surface is formed on the other surface of the cover member and a manifold system directs a coolant through the passages formed by the channels of the backing member and the mating surface of the cover member. The manifold system includes an inlet and an outlet which can be conn cted to any desired control means to achieve the proper flow. fihis cooling arrangement not only provides the cooling necess ry to maintain the reflecting device in an operating condition but also maintains the high quality of the reflecting surfaces? 10 Claims, 4 Drawing Figures l PATENTEU JAN 2 5 I972 SHEET 1 fiF 2 )7 M if CROSS-REFERENCE TO RELATED APPLICATIONS Application Ser. No. 34,672, filed May 5, 1970, which is a continuation of application Ser. No. 804,386, filed Mar. 3, 1969 for Cooling Means for Reflecting Device, contains subject matter which is an improvement to the subject matter herein.
BACKGROUND OF THE INVENTION Reflecting surfaces have been made by having passages drilled radially into a block adjacent the reflecting surface; however, this method was not satisfactory due to difficulty in manifolding the passages and having the passages follow a curved surface. The passages also would have to be large and the material thickness from the surface of the cooling channel would be excessive.
SUMMARY OF THE INVENTION This reflecting device permits close dimensional tolerance passages and simplified manifolding. The coolant passages can also be formed of complex contours with the same tolerance. This construction also gives flexibility of materials in that the requirement for thermal stability of the material can be relaxed in favor of other requirements if necessary. The method of making a reflecting device such as this is greatly simplified and the quality greatly increased. Quality means that the reflecting surface is maintained to produce diffraction limited optics.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. I is a top view showing the location of the inlet and outlet along with the manifolds and the cooling passages.
FIG. 2 is a view taken along the line 2-2 of FIG. 1.
FIG. 3 is a view taken along the line 33 of FIG. 1.
FIG. 4 is an enlarged view of a portion of FIG. 3 showing the cooling passages in detail.
DESCRIPTION OF THE PREFERRED EMBODIMENT The reflecting device shown includes a backing member 2 and a platelike cover member 4. While members 2 and 4 are shown as substantially circular in shape (see FIG. 1), other contours desired can be used, such as rectangular. The backing member 2 is shown as being constructed from two parts, 6 and 8.
Part 6 is relatively thick and has arcuate slots 10 and 12 cut into one end surface 14. These slots, 10 and 12, extend inwardly to an inner surface 16 adjacent the other end surface 18 of part 6, and are formed having the same radial distance from the center of the part 6 of the circular backing member 2. Each slot, 10 and 12, is adjacent the outer edge of the part 6 and extends substantially through an arc of 180.
A passage 20 extends in a radial direction within part 6 and connects the midpoint of the arcuate slot 10 with the exterior of the backing member 2. A passage 22 extends in a radial direction within part 6 and connects the midpoint of the arcuate slot 12 with the exterior of the backing member 2. These passages 20 and 22 are positioned at diametrically opposed locations.
Channels, or grooves, 24 are formed in the surface 18 of part 6. This surface 18 is shaped to receive one surface 26 of the platelike cover member 4. The channels 24 are rectangular in cross section with webs 28 being formed therebetween.
The channels are positioned in a parallel relationship with one end of each channel being connected to the slot 10 at its inner surface 16 and the other end of each channel being connected to the slot 12 at its inner surface 16.
Part 8 is a manifold cover having a surface 30 which covers the open ends of slots 10 and I2 and forms two manifolds 32 and 34 therewith, respectively. This surface 30 of part 8 is fixed to surface 14 of part 6 so as to have a leakproof attachment. Any fixing means can be used which will provide this leak iroof attachment, such as brazin Platelr e cover member 4 has its surface 26 fixed to surface 18 of part 6 which includes the tops of the webs 28. This surface 26 forms a plurality of passages 36 with channels 24. These surfaces 18 and 26 are also fixed together so as to have a leakproof attachment. Any fixing means can be used which will provide this leakproof attachment, such as brazing. The outer surface 38 of platelike cover member 4 is made into a reflecting surface.
To align the part 8 and the platelike cover member 4 with part 6 for fixing them together aligning pin means are shown. To position the part 8 with part 6 holes 40 and 42 are aligned and pins 44 are pressed into place. To position the platelike cover member 4 with part 6 holes 46 and 48 are aligned and pins 50 are pressed into place.
In operation, as shown in FIG. 1, a coolant can enter passage 22, flow into manifold 34 and be directed into one end of all the passages 36. The coolant flows through the passages 36 adjacent the reflecting surface 38 to the manifold 32 where it exits through passage 20. Any control means desired can be vused to control the flow of coolant liquid through the reflecting device which will maintain the flow at a rate which will prevent the temperature difference between the reflecting surface 38 and the surface 18 of part6 from contributing to thermal distortions.
In a reflecting device, or mirror, constructed in this manner, the thickness of the backing member 2 was made approximately 16 times the thickness of the platelike cover member 4. The material used to form the backing member 2 and the platelike cover member 4 was copper. This material was used since it has a high rate of conductivity. While other coolants can be used, water was used. The reflecting surface formed on surface 38 can be made in many ways. In the construction referred to, the copper platelike cover member 4 was coated with electroless nickel, which was then coated by vapor deposited gold-chromium, and polished.
We claim:
1. An optical reflecting device for operating under heat comprising a thick backing member having a metallic surface of a predetermined shape, a second relatively thin metallic platelike member fixed to the surface thereof, one of said members having channels on the side facing the other member, said channels forming webs therebetween, the free faces of the webs being fixed to the other member, said channels forming passages with the other member, a coolant manifold system comprising at least two manifolds, said manifold system being connected to said passages, said free face of said second member being treated to form a reflecting surface.
2. A reflecting device as set forth in claim 1 wherein the manifold system is formed within the device.
3. A reflecting device as set forth in claim 2 wherein said thick backing member has a manifold formed in each side thereof with said channels being connected therebetween.
4. A reflecting device as set forth in claim 1 wherein the contour of the channels is rectangular.
5. A reflecting device as set forth in claim 1 wherein means directs a coolant into said manifold system for flow through said passages.
6. A reflecting device as set forth in claim 1 wherein the ratio between the thickness of said backing member and the thickness of the second member thickness is large.
7. A reflecting device as set forth in claim 1 wherein the free face of the second member has a layer of reflective material thereon.
8. A reflecting device as set forth in claim 1 wherein the channels are formed on the surface of said thick backing member.
9. A reflecting device as set forth in claim 3 wherein the channels are formed on the surface of said thick backing member, each end of said channels intersecting one of said manifolds.
10. A reflecting device as set forth in claim I wherein the free faces of the webs are brazed to the other member.

Claims (10)

1. An optical reflecting device for operating under heat comprising a thick backing member having a metallic surface of a predetermined shape, a second relatively thin metallic platelike member fixed to the surface thereof, one of said members having channels on the side facing the other member, said channels forming webs therebetween, the free faces of the webs being fixed to the other member, said channels forming passages with the other member, a coolant manifold system comprising at least two manifolds, said manifold system being connected to said passages, said free face of said second member being treated to form a reflecting surface.
2. A reflecting device as set forth in claim 1 wherein the manifold system is formed within the device.
3. A reflecting device as set forth in claim 2 wherein said thick backing member has a manifold formed iN each side thereof with said channels being connected therebetween.
4. A reflecting device as set forth in claim 1 wherein the contour of the channels is rectangular.
5. A reflecting device as set forth in claim 1 wherein means directs a coolant into said manifold system for flow through said passages.
6. A reflecting device as set forth in claim 1 wherein the ratio between the thickness of said backing member and the thickness of the second member thickness is large.
7. A reflecting device as set forth in claim 1 wherein the free face of the second member has a layer of reflective material thereon.
8. A reflecting device as set forth in claim 1 wherein the channels are formed on the surface of said thick backing member.
9. A reflecting device as set forth in claim 3 wherein the channels are formed on the surface of said thick backing member, each end of said channels intersecting one of said manifolds.
10. A reflecting device as set forth in claim 1 wherein the free faces of the webs are brazed to the other member.
US43493A 1970-06-04 1970-06-04 Cooling means for reflecting device Expired - Lifetime US3637296A (en)

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Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731992A (en) * 1972-04-06 1973-05-08 States Of Air Force Spiral grooved liquid cooled laser mirror
US3817606A (en) * 1973-01-11 1974-06-18 Avco Everett Res Lab Inc Mirror for high power lasers and method of fabricating same
US3836236A (en) * 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
US3854799A (en) * 1973-01-26 1974-12-17 United Aircraft Corp Reflecting device construction
US3854800A (en) * 1973-01-26 1974-12-17 United Aircraft Corp Reflecting device construction
US3861787A (en) * 1973-08-29 1975-01-21 Avco Everett Res Lab Inc Laser mirror
US3884558A (en) * 1972-07-03 1975-05-20 Rockwell International Corp Stabilized thermally compensated mirror
US3909118A (en) * 1974-03-04 1975-09-30 Textron Inc Fluid cooled mirror
US3926510A (en) * 1973-01-11 1975-12-16 Avco Everett Res Lab Inc Mirror for high power lasers
US4053241A (en) * 1976-05-24 1977-10-11 Caterpillar Tractor Co. Chambered mirror construction for lasers
US4076374A (en) * 1976-07-14 1978-02-28 Schwab Robert E Means for maintaining visibility in the use of mirrors subject to aqueous deposits
US4175835A (en) * 1978-07-20 1979-11-27 The United States Of America As Represented By The Secretary Of The Air Force Floating head laser mirror assembly
US4253739A (en) * 1979-06-25 1981-03-03 United Technologies Corporation Thermally compensated mirror
US4264146A (en) * 1980-01-14 1981-04-28 Avco Everett Research Laboratory, Inc. Folding laser mirror
US4314742A (en) * 1980-06-02 1982-02-09 United Technologies Corporation High performance cooled laser mirror
US4772110A (en) * 1985-08-02 1988-09-20 The Perkin-Elmer Corporation Cooled mirror with compensating backplate
US4932767A (en) * 1989-07-25 1990-06-12 The United States Of America As Represented By The Secretary Of The Air Force Balanced moment laser mirror cooling device
US5005640A (en) * 1989-06-05 1991-04-09 Mcdonnell Douglas Corporation Isothermal multi-passage cooler
DE102005053415A1 (en) * 2005-11-04 2007-05-10 Carl Zeiss Laser Optics Gmbh Optical component with improved thermal behavior
US8831170B2 (en) 2006-11-03 2014-09-09 Carl Zeiss Smt Gmbh Mirror with a mirror carrier and projection exposure apparatus
US10216101B2 (en) * 2014-12-12 2019-02-26 Asml Netherlands B.V. Reflector
DE102021200604A1 (en) 2021-01-25 2022-07-28 Carl Zeiss Smt Gmbh OPTICAL SYSTEM, LITHOGRAPHY EQUIPMENT AND PROCESS

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1530441A (en) * 1922-10-30 1925-03-17 Gen Electric Mirror
US2705948A (en) * 1953-05-07 1955-04-12 Gunther H Rostock Solar water heater
FR1097233A (en) * 1953-12-29 1955-07-01 Solar absorber
US3488110A (en) * 1965-10-22 1970-01-06 Martin Evoy Water-cooled inspection mirror

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1530441A (en) * 1922-10-30 1925-03-17 Gen Electric Mirror
US2705948A (en) * 1953-05-07 1955-04-12 Gunther H Rostock Solar water heater
FR1097233A (en) * 1953-12-29 1955-07-01 Solar absorber
US3488110A (en) * 1965-10-22 1970-01-06 Martin Evoy Water-cooled inspection mirror

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731992A (en) * 1972-04-06 1973-05-08 States Of Air Force Spiral grooved liquid cooled laser mirror
US3884558A (en) * 1972-07-03 1975-05-20 Rockwell International Corp Stabilized thermally compensated mirror
US3836236A (en) * 1972-11-24 1974-09-17 Gte Sylvania Inc Mirror mount for high power lasers
US3817606A (en) * 1973-01-11 1974-06-18 Avco Everett Res Lab Inc Mirror for high power lasers and method of fabricating same
US3926510A (en) * 1973-01-11 1975-12-16 Avco Everett Res Lab Inc Mirror for high power lasers
US3854799A (en) * 1973-01-26 1974-12-17 United Aircraft Corp Reflecting device construction
US3854800A (en) * 1973-01-26 1974-12-17 United Aircraft Corp Reflecting device construction
US3861787A (en) * 1973-08-29 1975-01-21 Avco Everett Res Lab Inc Laser mirror
US3909118A (en) * 1974-03-04 1975-09-30 Textron Inc Fluid cooled mirror
US4053241A (en) * 1976-05-24 1977-10-11 Caterpillar Tractor Co. Chambered mirror construction for lasers
US4076374A (en) * 1976-07-14 1978-02-28 Schwab Robert E Means for maintaining visibility in the use of mirrors subject to aqueous deposits
US4175835A (en) * 1978-07-20 1979-11-27 The United States Of America As Represented By The Secretary Of The Air Force Floating head laser mirror assembly
US4253739A (en) * 1979-06-25 1981-03-03 United Technologies Corporation Thermally compensated mirror
US4264146A (en) * 1980-01-14 1981-04-28 Avco Everett Research Laboratory, Inc. Folding laser mirror
US4314742A (en) * 1980-06-02 1982-02-09 United Technologies Corporation High performance cooled laser mirror
US4772110A (en) * 1985-08-02 1988-09-20 The Perkin-Elmer Corporation Cooled mirror with compensating backplate
US5005640A (en) * 1989-06-05 1991-04-09 Mcdonnell Douglas Corporation Isothermal multi-passage cooler
US4932767A (en) * 1989-07-25 1990-06-12 The United States Of America As Represented By The Secretary Of The Air Force Balanced moment laser mirror cooling device
DE102005053415A1 (en) * 2005-11-04 2007-05-10 Carl Zeiss Laser Optics Gmbh Optical component with improved thermal behavior
US8831170B2 (en) 2006-11-03 2014-09-09 Carl Zeiss Smt Gmbh Mirror with a mirror carrier and projection exposure apparatus
US10216101B2 (en) * 2014-12-12 2019-02-26 Asml Netherlands B.V. Reflector
DE102021200604A1 (en) 2021-01-25 2022-07-28 Carl Zeiss Smt Gmbh OPTICAL SYSTEM, LITHOGRAPHY EQUIPMENT AND PROCESS

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