US3373113A - Process for etching copper printed circuits - Google Patents

Process for etching copper printed circuits Download PDF

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Publication number
US3373113A
US3373113A US480750A US48075065A US3373113A US 3373113 A US3373113 A US 3373113A US 480750 A US480750 A US 480750A US 48075065 A US48075065 A US 48075065A US 3373113 A US3373113 A US 3373113A
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Prior art keywords
etching
printed circuits
copper
printed
solution
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US480750A
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Achenbach Karl
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FMC Corp
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FMC Corp
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/18Acidic compositions for etching copper or alloys thereof

Definitions

  • the present invention concerns a process for etching the portions of the copper printed circuits which are not protected by printing ink.
  • an insulating backing is first provided with a copper coating 35 or 70 m. thick which is then printed with an etch resistant printing ink on the portions which should be retained as conductor lines after the etching.
  • the etching is effected by spraying the printed plates with an etching liquid or by dipping such printed plates in an etching bath in order to dissolve the copper which is not protected by the printed resist.
  • Usual etching liquids are strong mineral acids such as H 80, and HNO;,, as well as chromic acid, iron chloride or ammonium persulfate solutions.
  • H 80, and HNO mineral acids
  • chromic acid iron chloride or ammonium persulfate solutions.
  • the use of such solutions entail certain disadvantages.
  • ammonium persulfate While several disadvantages could be avoided by the use of ammonium persulfate, its use still has several drawbacks. As ammonium persulfate only attacks the copper slowly, it is necessary to add activators or the solution is activated with heat. In spite of this the etching periods necessary, even though not very great, are still longer than those required for iron chloride. Ammonium persulfate solutions can only effectively be used in a concentration range of 150 to 250 g./liter of water.
  • H O activated mineral acid baths
  • the essence of the process according to the invention resides in the use of aqueous H O, containing mineral acid solutions which in addition contain phosphoric acid, as stabilizer, for the etching of printed circuits.
  • a process for etching printed copper circuits which comprises contacting the printed copper circuit with an aqueous etching solution of a mineral acid selected from the group consisting of sulfuric acid and nitric acid containing H O, as an activator for the mineral acid, the step of incorporating an effective stabilizing amount of H PO, as a stabilizer for the H 0 in said aqueous etching solution.

Description

3,373,113 PROCESS FOR ETCHING COPPER PRINTED CIRCUITS Karl Achenbach, Frankfurt am Main, Germany, assignor to FMC Corporation, New York, N.Y., a corporation of Delaware No Drawing. Filed Aug. 18, 1965, Ser. No. 480,750 Claims priority, application (grmany, Aug. 22, 1964,
5 Claims. (Cl: 252-112 ABSTRACT OF THE DISCLOSURE Process for etching printed copper circuits in which an aqueous solution of a mineral acid such as H 80 or HNO, containing H as. activator and H PO, as stabilizer for the B 0, is employed as the etching liquid.
The present invention concerns a process for etching the portions of the copper printed circuits which are not protected by printing ink.
.In the production of printed circuits, an insulating backing is first provided with a copper coating 35 or 70 m. thick which is then printed with an etch resistant printing ink on the portions which should be retained as conductor lines after the etching. After the resist has been printed on, the etching is effected by spraying the printed plates with an etching liquid or by dipping such printed plates in an etching bath in order to dissolve the copper which is not protected by the printed resist.
Usual etching liquids are strong mineral acids such as H 80, and HNO;,, as well as chromic acid, iron chloride or ammonium persulfate solutions. The use of such solutions, however, entail certain disadvantages.
In order to be able to carry out the etching procedure in an acceptable short period, it is necessary to use the mineral acids in high concentration which requires use of corrosion proof apparatus. This is also true of iron chloride and chromic acid. As it mostly is necessary to operate at higher temperatures, the resulting vapors are burdensome to the operating personnel. With iron chloride, which is used at a concentration of 42" B. insoluble reaction products are formed which settle out as slime like deposits which when sprays are employed can clog the pumps and/or the spray nozzles. As the sediments in addition have an abrasive action on the resist coatings, such baths usually are only utilized to 60% of their theoretical Cu dissolving capacity.
Recovery of copper from the spent etching solutions or their preparation for satisfactory disposal is very costly, especially with iron chloride or chromic acid etching solutions.
While several disadvantages could be avoided by the use of ammonium persulfate, its use still has several drawbacks. As ammonium persulfate only attacks the copper slowly, it is necessary to add activators or the solution is activated with heat. In spite of this the etching periods necessary, even though not very great, are still longer than those required for iron chloride. Ammonium persulfate solutions can only effectively be used in a concentration range of 150 to 250 g./liter of water.
Therefore the capacity of such solutions for take up of Cu is correspondingly smaller than when iron chloride solutions are employed. The recovery of copper from the spent ammonium persulfate solutions is somewhat simpler than from'spent iron chloride or chromic acid solutions. It, for example, can be etfected by cementation with aluminum or by electrolysis, nevertheless the removal of the remaining ammonium ions requires additional measures.
3,3 73,1 13 Patented Mar. 12, 1968 As dilute mineral acids, such as, dilute H 80 or HNO; only attack copper slowly they do not come into consider'ation for etching printed circuits where complete dissolution in the shortest time po'ssible is required. It is only through addition of an oxidizing agent, such as, H O, or other peroxygen compounds, such as, persulfates or perborates that dissolution of copper can be accelerated when dilute mineral acids are used. Baths of this type have been suggested in the literature for the surface treatment of metals especially for polishing such surfaces. See Surface Treatment of Metals with Peroxygen Compounds, Plating 42, 1955, pages 561- 66. In such surface treatments metal ions go into solu' tion which decompose the active oxygen c'atalytically and in a short time reduces the activity of the baths to a considerable degree. This is especially true when higher temperatures of, for example, 40-60 C. are employed. Application of baths of this composition for etching printed circuits therefore appeared completely out of the question, as in such etching process considerably higher copper concentrations must be reckoned with, especially with a view to the proper industrial efliciency of such process. In order to provide for optimum use of the active substance of printed circuit etching baths copper concentrations of 40 to 60 g./Cu/l. are no rarity. An effective protection of H 0; containing ba'ths against the decomposing action of Cu-ions at such concentration was previously unknown. As a result it previously appeared impossible to employ H O, containing mineral acid b'aths for etching of printed circuits.
According to the invention it was found that despite these considerations, H O, activated mineral acid baths could be successfully used for etching printed circuits when certain definite requirements are met. The essence of the process according to the invention resides in the use of aqueous H O, containing mineral acid solutions which in addition contain phosphoric acid, as stabilizer, for the etching of printed circuits.
It was furthermore found that if the etching velocity is to be accelerated still further this can effectively be accomplished by the addition of other activators, namely, salts of heavy metals which are more noble than cop per, such as, for example, HgCI The activating effects of such heavy metal salts are known in connection with etching processes with ammonium persulfate. The etching baths according to the invention, even in the presence of such additional activ'ators, possess sufficient stability for use in the etching process although it was to be expected that an accelerated decomposition of the bath would take place.
The process according to the invention is illustrated by the embodiments thereof given in the following ex ample Example An etching bath of the following composition per liter was employed.
0.14 kg. H conc. (D: 1.84)
0.15 kg. H 0, (35% by wt.)
0.05 kg. H PO, (84.5% by wt., D=1.70)
1.0 ml. HgCl, solution (6.8 g. HgCl /l. corr. to 5 p.p.m.
3 sulfate containing etching baths as can be seen from the following table:
Etching time in minutes and seconds G. Cu/l Bath according Ammoniumto example persulfate bath 6,1401 77m" grzsl! 13 18' 2130" 33' Analogous results were obtained when the HgCl solution employed in the bath composition was replaced by the following:
1 ml AgNO; solution (9.93 g. AgNO /l.=6.3 p.p.m. Ag 1 m. Rh (80 solution (3.45 g.
Rh (SO .12H 0/l.=5 ppm. Rm 1 In]. HQPtC-le solution (2.12 g.
l-l-,,PtCl,.6H O/l.=8 p.p.m. Pt
1 claim:
1. In a process for etching printed copper circuits which comprises contacting the printed copper circuit with an aqueous etching solution of a mineral acid selected from the group consisting of sulfuric acid and nitric acid containing H O, as an activator for the mineral acid, the step of incorporating an effective stabilizing amount of H PO, as a stabilizer for the H 0 in said aqueous etching solution.
2. The process of claim 1 in which said aqueous mineral acid is dilute sulfuric acid containing 0.01 to 0.7 kg. of sulfuric acid per liter.
3. The process of claim 2 in which said dilute sulfuric acid solution by weight contains 15-10% of H 0 and 1-10% of the H PO 4. The process of claim 2 in which said dilute sulfuric acid solution by weight contains 3.5-7% of H 0; (100%) and about 5% of the H PO 5. The process of claim 4 in which said dilute aqueous sulfuric acid solution contains about 0.1 to 0.2 kg. of sulfuric acid per liter References Cited UNITED STATES PATENTS 2,923,608 2/1960 Margulies 156-18 2,978,301 4/1961 Margulies 25279.1 2,982,625 5/ 1961 Saubestre.
FOREIGN PATENTS 955,000 4/1964 Great Britain.
LEON D. ROSDOL. Primary Examiner.
I. T FEDIGAN, M. WEINBLATT,
Assistant Examineris.
US480750A 1964-08-22 1965-08-18 Process for etching copper printed circuits Expired - Lifetime US3373113A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DED45263A DE1253008B (en) 1964-08-22 1964-08-22 Process for etching copper foils for the production of printed circuits

Publications (1)

Publication Number Publication Date
US3373113A true US3373113A (en) 1968-03-12

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US480750A Expired - Lifetime US3373113A (en) 1964-08-22 1965-08-18 Process for etching copper printed circuits

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US (1) US3373113A (en)
BE (1) BE668423A (en)
DE (1) DE1253008B (en)
FR (1) FR1442848A (en)
GB (1) GB1063007A (en)
NL (1) NL6510928A (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3864271A (en) * 1972-12-04 1975-02-04 Du Pont Stabilized acidic hydrogen peroxide solutions
US3869401A (en) * 1972-12-04 1975-03-04 Du Pont Stabilized acidic hydrogen peroxide solutions
US3892833A (en) * 1972-11-10 1975-07-01 Matsushita Electric Ind Co Ltd Method of making an ion-selective electrode
US3905907A (en) * 1972-12-22 1975-09-16 Furukawa Electric Co Ltd Solutions for chemical dissolution treatment of metal materials
US3953263A (en) * 1973-11-26 1976-04-27 Hitachi, Ltd. Process for preventing the formation of nitrogen monoxide in treatment of metals with nitric acid or mixed acid
US4051001A (en) * 1974-08-26 1977-09-27 Hitachi, Ltd. Process for regenerating etching solution
US4356069A (en) * 1981-03-09 1982-10-26 Ross Cunningham Stripping composition and method for preparing and using same
US4401509A (en) * 1982-09-07 1983-08-30 Fmc Corporation Composition and process for printed circuit etching using a sulfuric acid solution containing hydrogen peroxide
US4491500A (en) * 1984-02-17 1985-01-01 Rem Chemicals, Inc. Method for refinement of metal surfaces
US4497687A (en) * 1983-07-28 1985-02-05 Psi Star, Inc. Aqueous process for etching cooper and other metals
EP0079505B1 (en) * 1981-10-29 1987-02-04 LeaRonal, Inc. A method of recovering copper from spent etch solutions
EP0387057A1 (en) * 1989-03-08 1990-09-12 Tokai Denka Kogyo Kabushiki Kaisha Surface-treating agents for copper and copper alloy
US5362712A (en) * 1990-08-17 1994-11-08 Hoechst Aktiengesellschaft Process for removing a copper mold from a molded body
US5364549A (en) * 1989-10-05 1994-11-15 Interox Chemicals Limited Hydrogen peroxide solutions

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2923608A (en) * 1956-04-13 1960-02-02 Fmc Corp Method of improving the bonding properties of steel surfaces
US2978301A (en) * 1957-01-11 1961-04-04 Fmc Corp Process and composition for the dissolution of copper
US2982625A (en) * 1957-03-22 1961-05-02 Sylvania Electric Prod Etchant and method
GB955000A (en) * 1961-04-13 1964-04-08 Marconi Co Ltd Improvements in or relating to copper etching solutions

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2211400A (en) * 1938-08-10 1940-08-13 Chase Brass & Copper Co Pickling solution for copper-base alloys
US2428804A (en) * 1945-09-07 1947-10-14 Esther M Terry Copper cleaning composition

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2923608A (en) * 1956-04-13 1960-02-02 Fmc Corp Method of improving the bonding properties of steel surfaces
US2978301A (en) * 1957-01-11 1961-04-04 Fmc Corp Process and composition for the dissolution of copper
US2982625A (en) * 1957-03-22 1961-05-02 Sylvania Electric Prod Etchant and method
GB955000A (en) * 1961-04-13 1964-04-08 Marconi Co Ltd Improvements in or relating to copper etching solutions

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3892833A (en) * 1972-11-10 1975-07-01 Matsushita Electric Ind Co Ltd Method of making an ion-selective electrode
US3864271A (en) * 1972-12-04 1975-02-04 Du Pont Stabilized acidic hydrogen peroxide solutions
US3869401A (en) * 1972-12-04 1975-03-04 Du Pont Stabilized acidic hydrogen peroxide solutions
US3905907A (en) * 1972-12-22 1975-09-16 Furukawa Electric Co Ltd Solutions for chemical dissolution treatment of metal materials
US3953263A (en) * 1973-11-26 1976-04-27 Hitachi, Ltd. Process for preventing the formation of nitrogen monoxide in treatment of metals with nitric acid or mixed acid
US4051001A (en) * 1974-08-26 1977-09-27 Hitachi, Ltd. Process for regenerating etching solution
US4356069A (en) * 1981-03-09 1982-10-26 Ross Cunningham Stripping composition and method for preparing and using same
EP0079505B1 (en) * 1981-10-29 1987-02-04 LeaRonal, Inc. A method of recovering copper from spent etch solutions
US4401509A (en) * 1982-09-07 1983-08-30 Fmc Corporation Composition and process for printed circuit etching using a sulfuric acid solution containing hydrogen peroxide
US4497687A (en) * 1983-07-28 1985-02-05 Psi Star, Inc. Aqueous process for etching cooper and other metals
US4491500A (en) * 1984-02-17 1985-01-01 Rem Chemicals, Inc. Method for refinement of metal surfaces
EP0387057A1 (en) * 1989-03-08 1990-09-12 Tokai Denka Kogyo Kabushiki Kaisha Surface-treating agents for copper and copper alloy
US5364549A (en) * 1989-10-05 1994-11-15 Interox Chemicals Limited Hydrogen peroxide solutions
US5362712A (en) * 1990-08-17 1994-11-08 Hoechst Aktiengesellschaft Process for removing a copper mold from a molded body

Also Published As

Publication number Publication date
FR1442848A (en) 1966-06-17
DE1253008B (en) 1967-10-26
BE668423A (en) 1965-12-16
GB1063007A (en) 1967-03-22
NL6510928A (en) 1966-02-23

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