US3363124A - Apparatus including secondary emission means for neutralizing an ion beam - Google Patents

Apparatus including secondary emission means for neutralizing an ion beam Download PDF

Info

Publication number
US3363124A
US3363124A US359960A US35996064A US3363124A US 3363124 A US3363124 A US 3363124A US 359960 A US359960 A US 359960A US 35996064 A US35996064 A US 35996064A US 3363124 A US3363124 A US 3363124A
Authority
US
United States
Prior art keywords
ion beam
ion
diverging
causing
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US359960A
Other languages
English (en)
Inventor
Bensussan Andre
Vincent Germaine
Jr Robert-Jean Warnecke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ROBERT JEAN WARNECKE JR
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of US3363124A publication Critical patent/US3363124A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H1/00—Using plasma to produce a reactive propulsive thrust
    • F03H1/0006—Details applicable to different types of plasma thrusters
    • F03H1/0025—Neutralisers, i.e. means for keeping electrical neutrality
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
    • B64G1/00—Cosmonautic vehicles
    • B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
    • B64G1/40—Arrangements or adaptations of propulsion systems
    • B64G1/405—Ion or plasma engines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
    • B64G1/00—Cosmonautic vehicles
    • B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
    • B64G1/40—Arrangements or adaptations of propulsion systems
    • B64G1/411—Electric propulsion
    • B64G1/413—Ion or plasma engines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H01J27/024—Extraction optics, e.g. grids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/02—Tubes in which one or a few electrodes are secondary-electron emitting electrodes

Definitions

  • the object of the present invention is a propulsion device with a neutralized ion beam in which the presence of a hot cathode is eliminated to achieve neutralization.
  • the present invention is characterized by the fact that the electrons serving the purpose of neutralization of an ion beam are secondary electrons emitted by a target bombarded by a portion of the ion beam.
  • one causes the beam to converge for bombarding a grid having strong secondary emission properties.
  • these aims are attained by ion-optical means, disposed to the rear of the output of the ion beam from the source, ion-optical means which cause the beam to converge after having diverged, in such'a manner as to determine a cross-over point beyond which the beam again diverges in such a manner that the peripheral portion thereof strikes the target whereas the interior portion thereof continues along its path, and the electric field of this interior portion of the beam attracts the secondary electron derived from this target thereby assuring the neutralization of the initial beam.
  • These ion-optical means may be constituted by a lens which may be either an electrostatic or a magnetic lens.
  • one provides adjusting means for controlling the said lenses in such a manner as to displace the cross-over point and therewith to modify the angle of impact of the bombardment ions on the target, thus causing the quantity of secondary electrons emitted to vary and thereby obtaining, at will, a beam either exactly neutralized, over-compensated or under-compensated.
  • the desired degree of compensation of the beam obtained with the device of the present invention, will be stable.
  • a fortuitous reduction of the number of electrons corresponding to the desired degree of neutralization will cause the beam to diverge more strongly, thereby increasing the quantity of secondary electrons emitted, and thus reducing the space charge of the beam.
  • a fortuitous excess of electrons will translate itself, in contrast, by a tightening of the beam, from which follows a diminution of the secondary electrons emitted.
  • an ion beam propulsion motor utilizing a substantially neutralized ion beam for the propulsion thereof which eliminates, by extremely simple means, the drawbacks encountered by analogous ion beam propulsion motors of the prior art.
  • Another object of the present invention resides in the provision of an ion beam engine which greatly facilitates the neutralization of the beam and at the same time assures a stable neutralization.
  • Still another object of the present invention resides in the provision of an ion beam engine which permits the elimination, by simple means involving structurally relative simple and relatively inexpensive parts, of any electric space charge fields that might be antagonistic to the propulsion effect produced by the ion beam.
  • Still a further object of the present invention resides in the provision of an ion beam propulsion engine dispensing with the need of a hot cathode for neutralizing the ion beam.
  • a further object of the present invention resides in the provision of an ion beam propulsion engine which relies on the emission of secondary electrons for neutralizing the ion beam.
  • Another object of the present invention resides in the provision of an ion beam engine provided with control means readily permitting any desired degree of compensation for the neutralization of the beam.
  • a further object of the present invention resides in the provision of an ion beam engine utilizing a neutralized ion beam in which the neutralization is automatically maintained by extremely simple and reliable means.
  • FIGURE 1 is a somewhat schematic transverse cross sectional view through a rst embodiment of an ion propulsion device utilizing a neutralized ion beam, in accordance with the present invention
  • FIGURE 2 is a somewhat schematic transverse cross sectional view through a second embodiment of a propulsion device with a neutralized ion beam according to the present invention, comprising a controllable electrostatic lens to permit the adjustment of the neutralization;
  • FIGURE 3 is a partial transverse cross sectional view 3 through a modified embodiment of the ion beam propulsion device of FIGURE 2;
  • FIGURE 4 is a partial transverse cross sectional view through still another modied embodiment of the ion beam propulsion device of FIG. 2 in accordance with the present invention.
  • FIGURE 4 is a somewhat schematic transverse crosssectional view of a still further modied embodiment of a propulsion device with neutralized ion beam, similar to FIGURE 2, but including a magnetic lens in accordance with the present invention.
  • the ion engine represented in this gure comprises an ion source including an enclosure 1 into which a gas such as argon or cesium vapor is admitted through the tubulure 2, and in which is disposed a cathode 3 fed by way of conductors 4 from a conventional source (not shown), and operating as source of ionizing electrons.
  • the ionized gas is concentrated into a beam by the magnetic eld produced by the windings 5 and escapes across theêt 6 pierced into a diaphragm 7.
  • the beam then passes through the orifice 8 provided in the extraction electrode 9, carried by means of source 11) at a negative potential, for example, at -10 kv. with respect to the ion source 1.
  • This electrode 9 comprises preferably a frusto-conical surface 11 on which is disposed a target 48 with strong secondary emission.
  • the electrode 9 is rendered rigid with the source 1 by means of small insulating columns 12, 12.
  • the beam 13 emerging'from the orifice 6 possesses a strong natural divergence after the passage thereof through the orifice 8. Owing to this divergence, a portion of the beam, corresponding to the extreme or outermost path 14 thereof, come to strike the electrode 48, for example, of molybdenum, which emits secondary electrons along the paths 15. These secondary electronsV then mix with the ions whose paths 16 have not struck the electrode 48, and thus form a neutralized beam of which the Vejection exerts a thrust on the missile or rocket propelled by the engine.
  • the electrode 48 for example, of molybdenum
  • FIGURE 2 represents a modied embodiment of an ion engine utilizing the same principle of neutralization by secondary electrons emitted under the impact of a portion of the primary ion beam.
  • the engine of FIGURE 2 comprises an ion gun of any desired classical structure, for example, constituted by an enclosure 17 into which a gas such as vaporized cesium is admitted through the tubulure 18 and in which is disposed a cathode 19, fed by way of conductors 20 from a source of conventional nature (not illustrated), and operating as source of ionizing electrons.
  • the ionized gas escapes through the orifice 21 within a diphragm 22, in the form of a beam focused by the winding 23.
  • the beam passes across an extraction electrode 24 of conical shape, fixed on the injector or ejector body 25.
  • This body 25 is insulated from the enclosure 17 by an insulating cylinder 26, and a suitable positive potential is applied from source 27 to the diaphragm 22 with respect to the electrode 24.
  • the beam 28 which has diverged at the output of the electrode 24, is subjected to the action of an adjustable lens which, in the illustrated embodiment, is an electrostatic lens constituted by an electrode 29 extending across the body 25 through the insulating passage 30 and carried by means of source -27 at an adjustable intermediate potential between the potentials of the ion source 17 and of the body 25.
  • This lens causes the beam 28 to converge at a cross-over point 31 Whose position varies with the adjustable potential of the electrode 29.
  • this cross-over point 31 is placed within an electrode 32 of which a portion of the walls, spaced suiriciently far from the electrode 29 in order that the secondary electrons be subjected to the field of the ion beam and not to that of the electrostatic lens, is covered at 33 with a substance having strong secondary emission properties.
  • the beam 34 escapes into the surrounding environment and produces the desired thrust. Consequentlys are provided at 39 and 40 to cause the ion source 17 to communicate with the external vacuum.
  • FIGURE 3 represents a modified embodiment of the electrode 32 of the device of FIGURE 2.
  • This electrode designated in FIGURE 3 by the same reference numeral 32, comprises, in a manner analogous tothe electrode 9 of FIGURE 1, a frusto-conical aring 41 along which is disposed the layer 33 with secondary emission.
  • a frusto-conical aring 41 along which is disposed the layer 33 with secondary emission.
  • FIGURE 2 one has shown the cross-over point 31 and the trajectories of both the ions aswell as the secondary electrons which mix to form the neutralized beam 34.
  • the angle of impact which is formed by the extreme or outermost trajectories of the ion beam with the normal or perpendicular to the layer 33, is increased, which increases the secondary emission ratio of this layer 33.
  • the output of the electrode 32 is obturated by a grid 35 with suitable transparency, realized in a material having a strong coefcient of secondary emission.
  • the transparency may in particular be chosen in such a manner that thefraction of the ion beam captured by this grid produces, due con-V pitch in the direction from the center toward the edges thereof.
  • the supplementary advantage of the devices accord-V ing to FIGURES 2 and 4 is not to necessitate any magnetic winding for the focusing of the ion beam nor of the secondary electron beam, which diminishes Vthe Weight and cost of the installation.
  • the disadvantage of the electrostatic lens is that it does not separate the ions of different masses contained within the gas utilized, Vthat is, isotope ions or multi-atomic ions.
  • FIGURE Y5 eliminates this shortcoming.
  • the drawing only shows the modified portion of FIGURE 2, it being understood that this portion is connected to the same elements of FIG- URE 2 of which the reference numerals are again shown in FIGURE 5.
  • the beam 2S traverses the extraction electrode 24 which is fixed on the body 42 of the magnetic lens excited by the winding ⁇ 43.
  • This winding 43 is traversed by a current supplied from a suitable source (not shown) and adjusted by means of the rheostat 44.
  • the vacuum-tight enclosure is delimited by an insulating spacer 45 between the body 42 and the source 17, and by an insulating cylinder 46 on the inside of the body y42.
  • the trajectories of the ion beams are designated in FIGURE with the same reference numerals as in FIG- URE 2, and the trajectories of the secondary electrons with the same reference numeral as in FIGURE 1.
  • the ions formed are either mono-atomic or bi-atomic or possibly tri-atomic, and that in this case, the extreme or outermost trajectories which strike the electrode 48 are followed particularly by the bi-atomic and eventually the tri-atomic ions whereas the mono-atomic ions follow the trajectories which avoid the electrode 48 and constitute a beam to be neutralized.
  • the ions of different masses are thus separated, and the plasma 34 is formed with substantially mono-atomic ions.
  • the control of current of the magnetic lens permits, in a manner analogous to the control of the Voltage of the electrostatic lens of FIGURE 2, to displace the crossover point 31 and therewith to adjust, at will, the secondary emission ratio of the electrode 48 thereby adjusting the ratio of neutralization of the plasma beam.
  • said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the elctric charge thereof.
  • ion source means means for extracting from said source means a diverging ion beam, means for causing the diverging ion beam to converge thereby to obtain a Cross-over point beyond which the beam re-diverges, means forming a surface of secondary electron emissive material, and means for bombarding said surface means by a portion of said re-diverging ion beam thereby causing the emission of secondary electrons from said surface, said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof, said means forming the emissive surface being provided on the internal walls of a hollow substantially conical piece forming at least a part of a hollow piece substantially coaxial with said ion beam and positioned along the path thereof.
  • ion source means means for extracting from said source means a diverging ion beam, means for causing the diverging ion beam to converge therebyrto obtain a cross-over point beyond which the beam re-diverges, means forming a surface of secondary electron emissive material, and means for bombarding said surface means by a portion of said re-diverging ion beam thereby causing the emission of secondary electrons from said surface, said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof, said means forming the emissive surface being constituted by the surfaces of bars of a grid-like structure positioned along the path of thev ion beam in such a manner as to be traversed by at least a substantial portion of the ion beam, 5.
  • a propulsion engine utilizing the ejection of an ion beam, in combination, comprising:
  • ion source means means for extracting from said source means a diverging ion beam, A means for causing the diverging ion beam to converge thereby to obtain a cross-over point beyond which the beam re-diverges, l means forming a surface of secondary electron emissive material,
  • said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof,
  • said means forming the emissive surface being constituted by the surfaces of bars of a grid-like structure positioned along the path of the ion beam in such a manner as to be traversed by -at least a subtantial portion of the ion beam,
  • said grid-like structure having a variable pitch which varies in dependence on the distance from the axis of the beam.
  • a propulsion engine utilizing the ejection of an ion beam in combination, comprising:
  • said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof,
  • said means for causing the ion beam to converge being -an ion-optical lens.
  • said surface means being so positioned with respect t said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof
  • said means for causing the ion beam to converge being an electrostatic ion-optical lens.
  • said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof,
  • said means for causing the ion beam to converge being an electrostatic ion-optical lense including means for controlling the voltage applied thereto.
  • said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof, Y
  • said means for causing said ion beam to converge being a magnetic ion-optical lens.
  • ion source means means for extracting from said source means a diverging ion beam
  • Y means for causing the diverging ion beam to converge thereby to obtain a cross-over point beyond which the beam re-diverges
  • said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof,
  • said means for causing said ion beam to converge being a magnetic ion-optical lens including means for controlling the energizing current of the magnetic lens.
  • said surface means being so positioned with respect to said ion beam that the electrons, during movement thereof, mix with said ion beam thereby substantially neutralizing the electric charge thereof,
  • said means for causing said ion beam to converge being a magnetic ion-optical lens
  • said means for controlling the energizing current of the magnetic lens said lens forming part of a body having a substantially conical depression substantially coaxial with said beam, and said means forming the emissive surface being arranged on the Walls of said depression.
  • said surface means being so positioned with respect to said ion beam that the electrons thereof move through said ion beam to mix therewith thereby substantially neutralizing the electric charge thereof
  • substantially conical extracting electrode means having an axial aperture substantially coaxial With 10 said ion beam to permit passage therethrough of said beam, said means forming the emissive surface being provided on the conical walls of said extracting electrode means at a place beyond the aperture thereof.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Remote Sensing (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Spark Plugs (AREA)
  • Electron Sources, Ion Sources (AREA)
US359960A 1963-05-02 1964-04-15 Apparatus including secondary emission means for neutralizing an ion beam Expired - Lifetime US3363124A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR933389A FR1366023A (fr) 1963-05-02 1963-05-02 Perfectionnements aux dispositifs de propulsion à faisceau ionique neutralisé

Publications (1)

Publication Number Publication Date
US3363124A true US3363124A (en) 1968-01-09

Family

ID=8802874

Family Applications (1)

Application Number Title Priority Date Filing Date
US359960A Expired - Lifetime US3363124A (en) 1963-05-02 1964-04-15 Apparatus including secondary emission means for neutralizing an ion beam

Country Status (4)

Country Link
US (1) US3363124A (xx)
FR (1) FR1366023A (xx)
GB (1) GB1039824A (xx)
NL (1) NL6404832A (xx)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3448315A (en) * 1966-10-11 1969-06-03 Itt Ion gun improvements for operation in the micron pressure range and utilizing a diffuse discharge
US3546513A (en) * 1968-03-11 1970-12-08 Us Air Force High yield ion source
US3702416A (en) * 1969-04-04 1972-11-07 Lucien Bex Ion source having a uniform radial density
US3845300A (en) * 1973-04-18 1974-10-29 Atomic Energy Commission Apparatus and method for magnetoplasmadynamic isotope separation
EP0104818A2 (en) * 1982-09-29 1984-04-04 Eaton Corporation Ion implantation device
US4463255A (en) * 1980-09-24 1984-07-31 Varian Associates, Inc. Apparatus for enhanced neutralization of positively charged ion beam
US4598231A (en) * 1982-11-25 1986-07-01 Nissin-High Voltage Co. Ltd. Microwave ion source
US4713542A (en) * 1984-10-31 1987-12-15 United States Of America As Represented By The Secretary Of The Navy Ton beam neutralizer
US4914292A (en) * 1987-07-02 1990-04-03 Sumitomo Eaton Nova Corporation Ion implanting apparatus
US4933546A (en) * 1988-08-23 1990-06-12 Grumman Aerospace Corporation Orifice ring ion beam neutralizer
US5136171A (en) * 1990-03-02 1992-08-04 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system
US6158209A (en) * 1997-05-23 2000-12-12 Societe Nationale D'etude Et De Construction De Moteurs D'aviation-S.N.E.C.M.A. Device for concentrating ion beams for hydromagnetic propulsion means and hydromagnetic propulsion means equipped with same
US20190378684A1 (en) * 2018-06-08 2019-12-12 Kla-Tencor Corporation Neutral Atom Imaging System

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3014154A (en) * 1959-10-01 1961-12-19 Kenneth W Ehlers Ion rocket engine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3014154A (en) * 1959-10-01 1961-12-19 Kenneth W Ehlers Ion rocket engine

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3448315A (en) * 1966-10-11 1969-06-03 Itt Ion gun improvements for operation in the micron pressure range and utilizing a diffuse discharge
US3546513A (en) * 1968-03-11 1970-12-08 Us Air Force High yield ion source
US3702416A (en) * 1969-04-04 1972-11-07 Lucien Bex Ion source having a uniform radial density
US3845300A (en) * 1973-04-18 1974-10-29 Atomic Energy Commission Apparatus and method for magnetoplasmadynamic isotope separation
US4463255A (en) * 1980-09-24 1984-07-31 Varian Associates, Inc. Apparatus for enhanced neutralization of positively charged ion beam
EP0104818A3 (en) * 1982-09-29 1985-10-23 Eaton Corporation Ion implantation device
EP0104818A2 (en) * 1982-09-29 1984-04-04 Eaton Corporation Ion implantation device
US4598231A (en) * 1982-11-25 1986-07-01 Nissin-High Voltage Co. Ltd. Microwave ion source
US4713542A (en) * 1984-10-31 1987-12-15 United States Of America As Represented By The Secretary Of The Navy Ton beam neutralizer
US4914292A (en) * 1987-07-02 1990-04-03 Sumitomo Eaton Nova Corporation Ion implanting apparatus
US4933546A (en) * 1988-08-23 1990-06-12 Grumman Aerospace Corporation Orifice ring ion beam neutralizer
US5136171A (en) * 1990-03-02 1992-08-04 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system
US6158209A (en) * 1997-05-23 2000-12-12 Societe Nationale D'etude Et De Construction De Moteurs D'aviation-S.N.E.C.M.A. Device for concentrating ion beams for hydromagnetic propulsion means and hydromagnetic propulsion means equipped with same
US20190378684A1 (en) * 2018-06-08 2019-12-12 Kla-Tencor Corporation Neutral Atom Imaging System
US10714307B2 (en) * 2018-06-08 2020-07-14 Kla-Tencor Corporation Neutral atom imaging system

Also Published As

Publication number Publication date
GB1039824A (en) 1966-08-24
NL6404832A (xx) 1964-11-03
FR1366023A (fr) 1964-07-10

Similar Documents

Publication Publication Date Title
US3363124A (en) Apparatus including secondary emission means for neutralizing an ion beam
US6449941B1 (en) Hall effect electric propulsion system
US4937456A (en) Dielectric coated ion thruster
US4247804A (en) Cold cathode discharge device with grid control
US3050652A (en) Methods and apparatus for developing forces with ion beams
US3262262A (en) Electrostatic ion rocket engine
US2736809A (en) Ion generator and projector
US3757518A (en) Ion engine
US20140138533A1 (en) Ion mass selector, ion irradiation device, surface analysis device, and ion mass selecting method
US3890535A (en) Ion sources
GB2143281A (en) Electric thruster for spacecraft propulsion
US4070595A (en) Apparatus for the acceleration of ions in the virtual cathode of an intense relativistic electron beam
US3517240A (en) Method and apparatus for forming a focused monoenergetic ion beam
JPH04109598A (ja) 高速原子線源
US4939425A (en) Four-electrode ion source
US3234427A (en) Electron pulsing device
US3302054A (en) Direct viewing storage tube having inclined flood gun and virtual cathode
US3514666A (en) Charged particle generator yielding a mono-energetic ion beam
GB1153363A (en) Method of Coating.
JPH10275566A (ja) イオン源
US3525013A (en) Metallic ion source including plurality of electron guns
US3253402A (en) Apparatus for and method of emitting particles
JPS6347226B2 (xx)
SU1102475A1 (ru) Ускоритель ионов
JP2666143B2 (ja) イオン中和器