US3181029A - Process of and apparatus for the stabilization of high-frequency gas and glow discharges - Google Patents

Process of and apparatus for the stabilization of high-frequency gas and glow discharges Download PDF

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Publication number
US3181029A
US3181029A US50276A US5027660A US3181029A US 3181029 A US3181029 A US 3181029A US 50276 A US50276 A US 50276A US 5027660 A US5027660 A US 5027660A US 3181029 A US3181029 A US 3181029A
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US
United States
Prior art keywords
arc
discharge
voltage
sensing
over
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Expired - Lifetime
Application number
US50276A
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English (en)
Inventor
Berghaus Bernhard
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Elektrophysikalische Anstalt Bernhard Berghaus
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Elektrophysikalische Anstalt Bernhard Berghaus
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • A—HUMAN NECESSITIES
    • A63—SPORTS; GAMES; AMUSEMENTS
    • A63F—CARD, BOARD, OR ROULETTE GAMES; INDOOR GAMES USING SMALL MOVING PLAYING BODIES; VIDEO GAMES; GAMES NOT OTHERWISE PROVIDED FOR
    • A63F3/00—Board games; Raffle games
    • A63F3/02—Chess; Similar board games
    • A63F3/027—Pocket chess
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
    • G05F1/52—Regulating voltage or current wherein the variable actually regulated by the final control device is dc using discharge tubes in series with the load as final control devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • A—HUMAN NECESSITIES
    • A63—SPORTS; GAMES; AMUSEMENTS
    • A63F—CARD, BOARD, OR ROULETTE GAMES; INDOOR GAMES USING SMALL MOVING PLAYING BODIES; VIDEO GAMES; GAMES NOT OTHERWISE PROVIDED FOR
    • A63F3/00—Board games; Raffle games
    • A63F3/00173—Characteristics of game boards, alone or in relation to supporting structures or playing piece
    • A63F3/00574—Connections between board and playing pieces
    • A63F2003/00615—Connections between board and playing pieces with a hook or an eyelet
    • A—HUMAN NECESSITIES
    • A63—SPORTS; GAMES; AMUSEMENTS
    • A63F—CARD, BOARD, OR ROULETTE GAMES; INDOOR GAMES USING SMALL MOVING PLAYING BODIES; VIDEO GAMES; GAMES NOT OTHERWISE PROVIDED FOR
    • A63F3/00—Board games; Raffle games
    • A63F3/00173—Characteristics of game boards, alone or in relation to supporting structures or playing piece
    • A63F3/00574—Connections between board and playing pieces
    • A63F2003/00618—Clamps or clips

Definitions

  • the process according to this invention for the stabilization of high-frequency gas and glow discharges in a discharge vessel by reducing the operating voltage at the moment of sudden ⁇ clramges of an operation quantity of the discharge is characterized by the fact that the necessary time for reducing the voltage following the formation and tiashover of a spark or arc discharge in the discharge vessel is made shorter than heretofore.
  • This invention relates moreover to a device for carrying out the process with a switch member designed to reduce the operating Voltage, being controlled by a sensing member which reacts to sudden changes of an operation quantity characterized by the fact that the action time for both the sensing member and the switch member is made shorter than the time o-f build-up and flash-over for a spark or arc discharge in the discharge vessel.
  • the simplified wiring diagram which embodies in large part the structure shown and described in Patent No. 2,884,511, represents an installation for carrying out the process and especially for such case wherein, by means of a glow discharge, the nitriding of three steel tubes 2a, 2b, 2c takes place.
  • the tubes 2a, 2b, 2c are each combined with the connections 3a, 3b, 3c over an insulated current lead-in. inside of each tube and insulated therefrom, an internal lead is arranged consisting, for instance, of a 7 mm. wide steel wire. All the internal leads in the receptacle have parallel connections and are connected with the terminal 4E- over an insulated current lead-in.
  • a pump (not shown) is an exhaust line 5 as well as a gas lead-in 6 with the control valves 45 and 46.
  • the current supply is, as an example, a parallelly connected three-phase AC. current over a three-phase variable voltage transformer 7 and three rectifying tubes 15a, 15b, 15e which feed the terminals 3a, 3b, 3c so that the tubes 2a, 2b, 2c act as cathodes against the internal lead.
  • the variable voltage transformer 7 is shown only with its secondary windings. The primary windings may be connected to the polyphase main by means of a star or delta-connection.
  • the variable voltage transformer 7 is provided with a mutual regulating mechanism 9 for all the three taps at the windings, wherein, by means of the reversible motor il, it can be adjusted to higher or lower secondary voltages.
  • the regulating mechanism 9 is moreover provided with a scale i3 which, for the initial and end adjustment, is controlled by a contact which, if so desired, may be arranged for signalling intermediary adjustments.
  • variable voltage transformer 7 The three secondary windings of the variable voltage transformer 7 are interconnected to the connections 3a, 3b, 3c, respectively, over the cumulative grid rectifying tube 15a, 15b, 15e, respectively, which may be disconnected independently one from the other over the control members la, idly, 16o, respectively.
  • the secondary windings of the variable voltage transformer 7 are operated in star-connection, however, an impedance coil 23a, 23]), 23C, respectively, is connected inthe intermediate line from the neutral conductor 22 to the three secondary windings.
  • All the three impedance ing or sensing member 28 which is also connected to the three secondary phase voltages over the three impedances 27.
  • This checking or sensing member 28 reacts to all voltage changes exceeding an adjustable minimum value between the neutral line 22 and the three phases, and that in dependance on their actual-sequence which will be explained hereinbelow.
  • the sensing member 28 is con- -n'ected to a line each by the three control members toa, lob, li6c.
  • Thewhole installation is controlled by a central control device 29 to which a cadence tapper or timer 3d is connected.
  • the controlmember 29 is connected, via the control line 3l, to the supply unit 32 of the adjusting motor 1l of the variable voltage transformer 7 and receives the revertive communication of thel scale 1.3 over the line 33.
  • the supply unit 33 for the adjusting motor 25 of the chokes 23 is activated in one or the other direction over the control line 37.
  • control device 29 The functional sequence of the control device 29 is provided with suitable relays, step-by-step selectors or electronic means in such a manner that the necessary con- -trol steps follow one another, the next step being introduced, however, only ⁇ in the moment when the previous step is signalled back to the control device 29 to have taken place. If, therefore, the just passing step is stopped by a checking member independent from the control device 29, the next step cannot take place unless the stopped control step is freed and terminated by the checking member and the revertive signalY received by the control device 29.
  • a control member is represented by theV sensing member 28 which, when being activated over the control device 29,V inuences in a suitable manner the supply units 32 and 38 for the adjusting motors of the variable voltage transformer 7.
  • the embodiment of this installation according to the described principal diagram is kprovided for an all-automatic program control at the setting into working order of the discharge vessel l as well as for the automatic control of the tubes to be treated 2a, 2b, and 2c during the whole treating time as regards the temperature, the latter being checked on the one hand by an output meter i8 and on the other hand, attached to the tube 2a, by a thermoelectric element 49 with the registering ⁇ and regulating device 50 which, for its part, influences the control device 29.
  • a predetermined voltage may be set to the rectier tubes 551, b, and 15e and also to the terminals 3a, 3b, and 3c by means of the regulating motor M and the voltage taps 9 at the secondary windings of the transformer '7. It is unnecessary to describe herein in detail the functions of the control device '29 ⁇ as a similar installation is shown and explained in full in the above-mentioned Patent No.
  • the actuating time required by the checking connections and the grid control devices for the blocking of the respective rectifier tube may be made practically of any desired short duration.
  • the whole actuating time required for the operation of the checking members in the sensing device 28 and of the control members la, lob, and 16e, and the parent rectifier tubes 15a, 15b, and 15C must be made shorter than the production and hash-over time needed for a spark or arc discharge to be formed in the discharge vesse if this rule is observed, it will be possibie to suppress an incipient arc discharge already during its forma tion so that, in any case, an arc or spark hash-over between the tubes Za, 2b, and 2c, and the parent inner electrodes can be suppressed.
  • the operating voltage at the respective tube is suddenly reduced strongly or disconnected altogether, for which purpose electronic connecting members working practically without moments of inertia must be used.
  • This kind of connecting member is generally known today and may be operated within microseconds.
  • the duration of disconnection of the operating voltage may be relatively short, since the respective are discharge has been interrupted already during the interval of its formation sothat there is no strong ionization and local concentration to be feared. It has been shown that disconnections ranging within a few milliseconds Ymay be sur'iicient to eliminate a new arc to be formed suddenly at the same spot after reconnection of the current.
  • the current power in thethree supply lines may also be checked.
  • rectifier operationas described in this embodiment and as experience shows alternating voltages deviating from the sinusoidal form are often to be observed at such spots to which the sensing connections are applied via the impedances 27.
  • the sensing connections mustthen be adjusted so as not to be actuated in spite of such'distorted voltage curves being produced.
  • the carrying kout of the present process will naturally be much easier if the respective discharge path arenoso is operated with direct current of a constant Voltage.
  • the respective sensing connection may be designed in such a manner that, practically, any shortlived voltage iluctuation will cause this connection to actuate, and a short reduction of the voltage or disconnection of the voltage to be obtained.
  • a connecting member a grid controlled tube or a controllable semi-conductor diode with a respective eiciency may also be employed. In view of the short time intervals at disposal'from the rst appearance of signs of a formation of an arc discharge to shortly before the actual arc flash-over takes place, mechanical or electro-mechanical connecting members cannot be used for this process.
  • the short voltage reduction needed for i the suppression of the arc flash-over may not only be 0btained by disconnecting the current supply but also by a respective short bridging of the connections at the discharge vessel, a protective impedance being provided in the bridging current circuit which permits the elimination of an increase of the charge of the current supply beyond an admissible top value during the bridging interval.
  • a protective impedance being provided in the bridging current circuit which permits the elimination of an increase of the charge of the current supply beyond an admissible top value during the bridging interval.
  • the method of stabilizing a high current glow discharge between electrodes in a vessel and wherein operating voltage is impressed on said electrodes comprising the steps of: sensing the commencement of changes in the character of said discharge, which changes presage formation of an arc; and, in response to said changes, reducing the operatingambaage on said electrodes, completing said voltage reducing step in a time interval following said sensing step which is less than the time necessary for formation of an arc.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Discharge Heating (AREA)
  • Particle Accelerators (AREA)
  • Lasers (AREA)
US50276A 1959-08-17 1960-08-17 Process of and apparatus for the stabilization of high-frequency gas and glow discharges Expired - Lifetime US3181029A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH7704459A CH374779A (de) 1959-08-17 1959-08-17 Verfahren und Vorrichtung zur Stabilisierung von stromstarken Gas- und Glimmentladungen in einem Entladungsgefäss

Publications (1)

Publication Number Publication Date
US3181029A true US3181029A (en) 1965-04-27

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Family Applications (1)

Application Number Title Priority Date Filing Date
US50276A Expired - Lifetime US3181029A (en) 1959-08-17 1960-08-17 Process of and apparatus for the stabilization of high-frequency gas and glow discharges

Country Status (4)

Country Link
US (1) US3181029A (zh)
CH (1) CH374779A (zh)
GB (2) GB954799A (zh)
NL (2) NL254957A (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3274424A (en) * 1963-01-10 1966-09-20 Edgar A Bunt Discontinuous electrode arc plasma generator
US3437784A (en) * 1966-02-16 1969-04-08 Gen Electric Power supply for reducing arcing damage in glow discharge apparatus
US4331856A (en) * 1978-10-06 1982-05-25 Wellman Thermal Systems Corporation Control system and method of controlling ion nitriding apparatus
US4476373A (en) * 1978-10-06 1984-10-09 Wellman Thermal Systems Corporation Control system and method of controlling ion nitriding apparatus
WO1994014183A1 (de) * 1992-12-17 1994-06-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur durchführung von stabilen niederdruck-glimmprozessen

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BG29362A1 (en) * 1979-03-11 1980-11-14 Minchev Apparatus for chemical- thermal processing of matal articles in the condition of electrical smouldering charge
AU2015318258B2 (en) 2014-09-15 2019-02-14 Crown Equipment Corporation Lift truck with optical load sensing structure

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2550477A (en) * 1950-10-26 1951-04-24 Gen Electric Stabilized arc suppressing system for electronic devices
US2680212A (en) * 1953-07-01 1954-06-01 Atomic Energy Commission Protective circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2550477A (en) * 1950-10-26 1951-04-24 Gen Electric Stabilized arc suppressing system for electronic devices
US2680212A (en) * 1953-07-01 1954-06-01 Atomic Energy Commission Protective circuit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3274424A (en) * 1963-01-10 1966-09-20 Edgar A Bunt Discontinuous electrode arc plasma generator
US3437784A (en) * 1966-02-16 1969-04-08 Gen Electric Power supply for reducing arcing damage in glow discharge apparatus
US4331856A (en) * 1978-10-06 1982-05-25 Wellman Thermal Systems Corporation Control system and method of controlling ion nitriding apparatus
US4476373A (en) * 1978-10-06 1984-10-09 Wellman Thermal Systems Corporation Control system and method of controlling ion nitriding apparatus
WO1994014183A1 (de) * 1992-12-17 1994-06-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur durchführung von stabilen niederdruck-glimmprozessen

Also Published As

Publication number Publication date
NL254957A (zh)
NL254958A (zh)
GB954799A (en) 1964-04-08
CH374779A (de) 1964-01-31
GB977656A (en) 1964-12-09

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