US20210389393A1 - Dual double-pinned spin valve element having magnet bias with increased linear range - Google Patents
Dual double-pinned spin valve element having magnet bias with increased linear range Download PDFInfo
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- US20210389393A1 US20210389393A1 US16/899,746 US202016899746A US2021389393A1 US 20210389393 A1 US20210389393 A1 US 20210389393A1 US 202016899746 A US202016899746 A US 202016899746A US 2021389393 A1 US2021389393 A1 US 2021389393A1
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- 230000009977 dual effect Effects 0.000 title claims abstract description 46
- 230000005415 magnetization Effects 0.000 claims abstract description 36
- 230000005291 magnetic effect Effects 0.000 claims description 52
- 230000005294 ferromagnetic effect Effects 0.000 claims description 31
- 125000006850 spacer group Chemical group 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 15
- 230000005290 antiferromagnetic effect Effects 0.000 claims description 10
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 230000005641 tunneling Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 238000000137 annealing Methods 0.000 claims 1
- 239000013598 vector Substances 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 230000036039 immunity Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/091—Constructional adaptation of the sensor to specific applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
Definitions
- Magnetic field sensors are used in a variety of applications, including, but not limited to, an angle sensor that senses an angle of a direction of a magnetic field, a current sensor that senses a magnetic field generated by a current carried by a current-carrying conductor, a magnetic switch that senses the proximity of a ferromagnetic object, a rotation detector that senses passing ferromagnetic articles, for example, magnetic domains of a ring magnet or a ferromagnetic target (e.g., gear teeth) where the magnetic field sensor is used in combination with a back-biased or other magnet, and a magnetic field sensor that senses a magnetic field density of a magnetic field.
- an angle sensor that senses an angle of a direction of a magnetic field
- a current sensor that senses a magnetic field generated by a current carried by a current-carrying conductor
- a magnetic switch that senses the proximity of a ferromagnetic object
- a rotation detector that senses passing ferromagnetic articles,
- magnetic field sensors include magnetoresistance elements. These elements have an electrical resistance that changes in the presence of an external magnetic field.
- Spin valves are a type of magnetoresistance element formed from two or more magnetic materials or layers. The simplest form of a spin valve has a reference (or magnetically fixed) layer and a free layer. The resistance of the spin valve changes as a function of the magnetic alignment of the reference and free layers. Typically, the magnetic alignment of the reference layer does not change, while the magnetic alignment of the free layer moves in response to external magnetic fields.
- a spin valve may also have a bias.
- the bias may be generated by one or more magnetic layers (bias layers) that are magnetically coupled to the free layer. In the absence of an external magnetic field, the bias layers may cause the magnetic alignment of the free layer to default to a predetermined alignment.
- the magnetic coupling between the bias layers and the free layer is relatively weak so that an external field can override the bias and realign the magnetic alignment of the free layer.
- a magnetic sensor in a still further aspect, includes a first dual double-pinned spin valve element that includes a first, second, third and fourth pinned layers each have a magnetization in a first direction; and a second dual double-pinned spin valve element that includes a fifth, sixth, seventh and eighth pinned layers each have a magnetization in the first direction.
- the first dual double-pinned spin valve element and the second dual double-pinned spin valve element are connected in series or in parallel to each other.
- the first dual double-pinned spin valve element is biased by a first magnet in a second direction and the second dual double-pinned spin valve element is biased by a second magnet in a third direction.
- the third direction is in the opposite direction to the second direction.
- a dual double-pinned spin valve element includes a first spin valve that includes a first pinned layer and a second pinned layer and a second spin valve disposed on the first spin valve and comprising a third pinned layer and a fourth pinned layer.
- the first, second, third and fourth pinned layers each have a magnetization in a first direction.
- a method in another aspect, includes depositing a stack comprising a dual double-pinned spin valve element and performing an anneal on the stack.
- the dual double-pinned spin valve element includes a first spin valve that includes first and second pinned layers; and a second spin valve that includes third and fourth pinned layers.
- the anneal enables that each of the first, second, third and four pinned layers to have a magnetic direction that is parallel to each other.
- a dual double-pinned spin valve element includes a first spin valve and a second spin valve disposed on the first spin valve.
- the first spin valve includes a first bias layer that includes a first pinned layer and a first pinning layer; and a first reference layer that includes a second pinned layer and a second pinning layer.
- the second spin valve includes a second bias layer that includes a third pinned layer and a third pinning layer; and a second reference layer that includes a fourth pinned layer; and the second pinning layer.
- the first, second, third and fourth pinned layers each have a magnetization in a first direction and the first or second spin valve is one of a tunneling magnetoresistance element or a giant magnetoresistance (GMR) element.
- GMR giant magnetoresistance
- FIG. 1A is a diagram of biasing effect caused by a magnet on a first spin valve of a double spin valve
- FIG. 1B is a diagram of biasing effect caused by the magnet on a second spin valve of the double spin valve
- FIG. 2A is a graph of normalized resistance versus magnetic field intensity for each spin valve of a double spin valve with and without a bias from a magnet;
- FIG. 2B is a graph of normalized resistance versus magnetic field intensity for the double spin valve device with and without the bias from the magnet;
- FIG. 3A is a graph of normalized sensitivity versus magnetic field intensity for each of the spin valves of the double spin valve with and without the bias from the magnet;
- FIG. 3B is a graph of normalized sensitivity versus magnetic field intensity for the double spin valve spin with and without the bias of a magnet
- FIG. 4 is a diagram of an example of a dual double-pinned spin valve element with pinned layers each having the same magnetization direction;
- FIG. 5 is a diagram of an example of a magnetic sensor having two dual double-pinned spin valve elements with pinned layers each having the same magnetization direction;
- FIG. 6 is a flowchart of an example of a process to fabricate a dual double-pinned spin valve element with pinned layers each have the same magnetization direction;
- FIG. 7 is a diagram of an example of a magnetic field sensor package having one or more dual double-pinned spin valve elements with pinned layers each having a magnetization in the same direction.
- MR magnetoresistance
- TMR magnetoresistance
- GMR magnetoresistance
- linear range refers to a range where the changes in resistivity of an MR element are linear with respect to changes in an intensity of a magnetic field along a sensitive direction.
- FIG. 1A depicts the effects of biasing by a magnet on a first spin valve of a double spin valve and FIG. 1B depicts the effects of biasing by the magnet on a second spin valve of the double spin valve.
- a magnetic field vector 100 a represents the bias from the magnet at the first spin valve and a magnetic field vector 100 b represents the bias from the magnet at the second spin valve.
- An arrow 116 a represents a reference direction of the first spin valve and an arrow 116 b represents a reference direction of the second spin valve.
- reference direction is a direction where the spin valve is most sensitive to changes in a magnetic field intensity.
- the first spin valve has an internal bias vector 102 , which is parallel to the reference direction 116 a
- the second spin valve has an internal bias vector 104 , which is antiparallel to the reference direction 116 b .
- the vectors 102 , 104 are antiparallel to each other to produce a linear range centered about a zero magnetic intensity.
- internal biases of each spin valve may have different bias directions from each other or have parallel bias directions, but different bias amplitudes to be able to select the center of a linear range. For example, if a requirement for a linear range to centered at ⁇ 50 Oe was desired, then one spin valve could have a bias of +50 Oe and the other spin valve could have a bias of ⁇ 150 Oe.
- Combining the vector 100 a with the internal bias direction 102 yields a total bias vector 112 and combining the vector 100 b with the internal bias direction 104 yields a total bias vector 114 .
- the total bias vectors 112 , 114 are not parallel to each other. The result of having the total biases of each spin valve not parallel with the magnetic field leads to an extended linear range than traditional devices.
- a graph 200 depicts normalized resistance versus magnetic intensity curves for each spin valve of a double spin valve separately.
- a curve 202 depicts a first spin valve of the double spin valve without a bias from a magnet and a curve 204 depicts a second spin valve of the double spin valve without the bias from the magnet.
- a curve 212 depicts the first spin valve of the double spin valve with the bias of the magnet bias and a curve 214 depicts the second spin valve of the double spin valve with the bias of the magnet.
- a graph 220 depicts normalized resistance versus magnetic intensity curves for the double spin valve.
- a curve 222 depicts the double spin valve without the bias of the magnet and a curve 224 depicts the double spin valve with the bias of the magnet.
- the linear range in the curve 224 extends from about ⁇ 200 Oersted (Oe) to 200 Oe while a single spin valve provides only a linear range between about ⁇ 50 Oe to 50 Oe.
- a graph 300 depicts normalized sensitivity versus magnetic intensity curves for each spin valve of the double spin valve separately.
- a curve 302 depicts the first spin valve of the double spin valve without a magnet bias and a curve 304 depicts the second spin valve of the double spin valve without a magnet bias.
- a curve 312 depicts the first spin valve of the double spin valve with a magnet bias and a curve 314 depicts the second spin valve of the double spin valve with a magnet bias.
- a graph 320 depicts normalized sensitivity versus magnetic intensity curves for the double spin valve.
- a curve 322 depicts the double spin valve without the bias of the magnet and a curve 324 depicts the double spin valve with the bias of the magnet.
- the sensitivity of a double spin valve biased with a magnet as shown in the curve 324 extends from about ⁇ 200 Oersted (Oe) to 200 Oe while a single spin valve provides only sensitivity between about ⁇ 50 Oe to 50 Oe.
- an MR element 400 is an example of a dual double-pinned spin valve element with pinned layers having magnetization in the same direction.
- the MR element 400 is deposited or otherwise provided upon a substrate 401 and includes a plurality of layers.
- the plurality of layers includes a nonmagnetic seed layer 402 disposed over the substrate 401 , a first spin valve 401 a disposed over the nonmagnetic seed layer 402 and a second spin valve 401 b disposed over the first spin valve 401 a .
- the plurality of layers also includes an antiferromagnetic pinning layer 420 , which is shared by the first spin valve 401 a and the second spin valve 401 b , and a nonmagnetic cap layer 404 disposed over the second spin valve 401 b.
- the first spin valve 401 a includes bias layers 410 , free layer 414 and reference layers 416 .
- the bias layers 410 includes an antiferromagnetic pinning layer 411 disposed over the nonmagnetic seed layer 402 and a ferromagnetic pinned layer 412 disposed over the antiferromagnetic pinning layer 411 .
- the first spin valve 401 a also includes a nonmagnetic spacer layer 413 disposed over the ferromagnetic pinned layer 412 with the free layers 414 structure 414 disposed over the nonmagnetic spacer layer 413 .
- the free layers 414 includes a first ferromagnetic free layer 414 a and a second ferromagnetic free layer 414 b disposed over the first ferromagnetic free layer 414 a.
- the first spin valve 401 a further includes a nonmagnetic spacer layer 415 disposed over the free layers 414 with the reference layers 416 disposed over the nonmagnetic spacer layer 415 .
- the reference layers 416 includes a ferromagnetic layer 416 a , a ferromagnetic pinned layer 416 c and a nonmagnetic spacer layer 416 b disposed therebetween.
- the second spin valve 401 b which is similar to the first spin valve 401 a , but includes layers that are in a substantially reverse order or arrangement as the layers which are shown in the first spin valve 401 a with respect to the seed layer 402 , includes reference layers 431 disposed over the antiferromagnetic pinning layer 420 , a nonmagnetic spacer layer 432 disposed over the reference layers 431 and free layers 433 disposed over the nonmagnetic spacer layer 432 .
- the reference layers 431 includes a first ferromagnetic layer 431 a , a second ferromagnetic pinned layer 431 c and a nonmagnetic spacer layer 431 b disposed therebetween.
- the free layers 433 includes a first ferromagnetic free layer 433 a and a second ferromagnetic free layer 433 b disposed over the first ferromagnetic free layer 433 a.
- the second spin valve 401 b also includes bias layers 430 .
- the bias layer 430 includes nonmagnetic spacer layer 434 disposed over the free layers 433 , a ferromagnetic pinned layer 435 disposed over the nonmagnetic spacer layer 434 and an antiferromagnetic pinning layer 436 disposed over the ferromagnetic pinned layer 435 .
- a nonmagnetic cap layer 404 is disposed over the antiferromagnetic pinning layer 436 .
- Each of the layers in prior art MR element 400 includes one or more respective materials (e.g., magnetic materials) and has a respective thickness, as shown. Materials of the layers are shown by atomic symbols. Additionally, thicknesses of the layers are shown in nanometers. In other embodiments, the material and thicknesses of the layers in MR element 400 may be replaced with other materials and thicknesses.
- materials e.g., magnetic materials
- thicknesses of the layers are shown in nanometers. In other embodiments, the material and thicknesses of the layers in MR element 400 may be replaced with other materials and thicknesses.
- Arrows are shown that are indicative of magnetization directions of the layers. Arrows coming out of the page are indicated as dots within circles and arrows going into the page are indicated as crosses within circles.
- the ferromagnetic pinned layer 412 has a magnetization in a direction 452 .
- the ferromagnetic pinned layer 416 c has a magnetization in a direction 454 .
- the ferromagnetic pinned layer 431 a has a magnetization in a direction 456 .
- the ferromagnetic pinned layer 435 has a magnetization in a direction 458 .
- the free layers 414 have the same magnetization direction as the ferromagnetic pinned layer 412 due to ferromagnetic coupling due to the thickness of the nonmagnetic spacer layer 413 . That is, a magnetization direction 462 a of the first ferromagnetic free layer 414 a and a magnetization direction 462 b of the second ferromagnetic free layer 414 b point in the same direction as magnetization direction 452 .
- the free layers 433 have the opposite magnetization direction as the ferromagnetic pinned layer 435 due to antiferromagnetic coupling due to the thickness of the nonmagnetic spacer layer 434 . That is, a magnetization direction 464 a of the first ferromagnetic free layer 433 a and a magnetization direction 464 b of the second ferromagnetic free layer 433 b point in the opposite direction as magnetization direction 458 .
- a magnet bias 499 with the MR element 400 enables an extended linear range with respect to traditional devices.
- the MR element 400 may be used with other MR elements fabricated like MR element 400 to reduce the effects of stray fields.
- a magnetic field sensor includes an MR element 400 ′ and an MR element 400 ′′ that are connected in series.
- the MR element 400 ′ is biased by a magnet bias 590 coming out of the page and the MR element 400 ′′ is biased by a magnet bias 599 going into the page.
- a stray magnetic field parallel to a magnetic bias is compensated for because both dual double-pinned spin valve elements are included. That is, one dual double-pinned spin valve element will increase the bias (hence decrease the sensitivity) while the other dual double-pinned spin valve element will decrease the bias (hence increase the sensitivity). Thus, the effect on one dual double-pinned spin valve element is compensated for by the effect on the other dual double-pinned spin valve element.
- the MR element 400 ′ and the MR element 400 ′′ are the same structure as the MR element 400 ( FIG. 4 ). In other examples, the MR element 400 ′ and the MR element 400 ′′ do not have identical layers, but each has pinned layers with a magnetization direction that point in the same direction.
- the MR element 400 ′ and the MR element 400 ′′ may be connected in parallel. In one example, the MR element 400 ′ and the MR element 400 ′′ may be used together as a single unified element. Multiple unified elements may be used to form bridges in magnetic field sensors.
- Process 600 deposits a stack of layers ( 602 ).
- the stack of layers or layers 402 , 414 , 415 , 416 , 420 , 431 , 433 , 430 , 404 are deposited on the substrate 401 ( FIG. 4 ).
- Process 600 performs an anneal along the sensitive axis ( 606 ).
- the sensitive axis is fixed by the directions 466 , 468 ( FIG. 4 ).
- the stack in processing block 602 is heated for one hour at 290° C.
- the dual double-pinned spin valve element with pinned layers may be fabricated in a magnetic field sensor 700 .
- the magnetic field sensor 700 may be fabricated on a die (not shown) in an integrated circuit (IC) package 702 in a first orientation in relation to a rotating structure 702 having gear teeth 704 (a target).
- the IC package 702 includes a magnet.
- the magnet is located outside of the IC package 702 .
- the back-bias position of the magnetic field sensor 700 can be considered the zero-degree position.
- the axis of sensitivity 706 is shown for the magnetic field sensor 700 .
- the magnetic field sensor 700 may be rotated to any angle in the plane of the die (e.g., to enable the sensitive axis to be parallel to an axis of rotation of the target).
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Abstract
Description
- Magnetic field sensors are used in a variety of applications, including, but not limited to, an angle sensor that senses an angle of a direction of a magnetic field, a current sensor that senses a magnetic field generated by a current carried by a current-carrying conductor, a magnetic switch that senses the proximity of a ferromagnetic object, a rotation detector that senses passing ferromagnetic articles, for example, magnetic domains of a ring magnet or a ferromagnetic target (e.g., gear teeth) where the magnetic field sensor is used in combination with a back-biased or other magnet, and a magnetic field sensor that senses a magnetic field density of a magnetic field.
- In certain applications, magnetic field sensors include magnetoresistance elements. These elements have an electrical resistance that changes in the presence of an external magnetic field. Spin valves are a type of magnetoresistance element formed from two or more magnetic materials or layers. The simplest form of a spin valve has a reference (or magnetically fixed) layer and a free layer. The resistance of the spin valve changes as a function of the magnetic alignment of the reference and free layers. Typically, the magnetic alignment of the reference layer does not change, while the magnetic alignment of the free layer moves in response to external magnetic fields.
- In some cases, a spin valve may also have a bias. The bias may be generated by one or more magnetic layers (bias layers) that are magnetically coupled to the free layer. In the absence of an external magnetic field, the bias layers may cause the magnetic alignment of the free layer to default to a predetermined alignment. The magnetic coupling between the bias layers and the free layer is relatively weak so that an external field can override the bias and realign the magnetic alignment of the free layer.
- In a still further aspect, a magnetic sensor, includes a first dual double-pinned spin valve element that includes a first, second, third and fourth pinned layers each have a magnetization in a first direction; and a second dual double-pinned spin valve element that includes a fifth, sixth, seventh and eighth pinned layers each have a magnetization in the first direction. The first dual double-pinned spin valve element and the second dual double-pinned spin valve element are connected in series or in parallel to each other. The first dual double-pinned spin valve element is biased by a first magnet in a second direction and the second dual double-pinned spin valve element is biased by a second magnet in a third direction. The third direction is in the opposite direction to the second direction.
- In one aspect, a dual double-pinned spin valve element includes a first spin valve that includes a first pinned layer and a second pinned layer and a second spin valve disposed on the first spin valve and comprising a third pinned layer and a fourth pinned layer. The first, second, third and fourth pinned layers each have a magnetization in a first direction.
- In another aspect, a method includes depositing a stack comprising a dual double-pinned spin valve element and performing an anneal on the stack. The dual double-pinned spin valve element includes a first spin valve that includes first and second pinned layers; and a second spin valve that includes third and fourth pinned layers. The anneal enables that each of the first, second, third and four pinned layers to have a magnetic direction that is parallel to each other.
- In a further aspect, a dual double-pinned spin valve element includes a first spin valve and a second spin valve disposed on the first spin valve. The first spin valve includes a first bias layer that includes a first pinned layer and a first pinning layer; and a first reference layer that includes a second pinned layer and a second pinning layer. The second spin valve includes a second bias layer that includes a third pinned layer and a third pinning layer; and a second reference layer that includes a fourth pinned layer; and the second pinning layer. The first, second, third and fourth pinned layers each have a magnetization in a first direction and the first or second spin valve is one of a tunneling magnetoresistance element or a giant magnetoresistance (GMR) element.
- The foregoing features may be more fully understood from the following description of the drawings. The drawings aid in explaining and understanding the disclosed technology. Since it is often impractical or impossible to illustrate and describe every possible embodiment, the provided figures depict one or more illustrative embodiments. Accordingly, the figures are not intended to limit the scope of the broad concepts, systems and techniques described herein. Like numbers in the figures denote like elements.
-
FIG. 1A is a diagram of biasing effect caused by a magnet on a first spin valve of a double spin valve; -
FIG. 1B is a diagram of biasing effect caused by the magnet on a second spin valve of the double spin valve; -
FIG. 2A is a graph of normalized resistance versus magnetic field intensity for each spin valve of a double spin valve with and without a bias from a magnet; -
FIG. 2B is a graph of normalized resistance versus magnetic field intensity for the double spin valve device with and without the bias from the magnet; -
FIG. 3A is a graph of normalized sensitivity versus magnetic field intensity for each of the spin valves of the double spin valve with and without the bias from the magnet; -
FIG. 3B is a graph of normalized sensitivity versus magnetic field intensity for the double spin valve spin with and without the bias of a magnet; -
FIG. 4 is a diagram of an example of a dual double-pinned spin valve element with pinned layers each having the same magnetization direction; -
FIG. 5 is a diagram of an example of a magnetic sensor having two dual double-pinned spin valve elements with pinned layers each having the same magnetization direction; -
FIG. 6 is a flowchart of an example of a process to fabricate a dual double-pinned spin valve element with pinned layers each have the same magnetization direction; and -
FIG. 7 is a diagram of an example of a magnetic field sensor package having one or more dual double-pinned spin valve elements with pinned layers each having a magnetization in the same direction. - Described herein are techniques to fabricate a magnetic sensor that have magnetoresistance (MR) elements (e.g., TMR, GMR and so forth) that have an increased linear range than traditional MR elements. As used herein the term “linear range” refers to a range where the changes in resistivity of an MR element are linear with respect to changes in an intensity of a magnetic field along a sensitive direction. An improved linear range enables a better immunity to magnet asymmetry in back-bias magnet products.
-
FIG. 1A depicts the effects of biasing by a magnet on a first spin valve of a double spin valve andFIG. 1B depicts the effects of biasing by the magnet on a second spin valve of the double spin valve. Amagnetic field vector 100 a represents the bias from the magnet at the first spin valve and amagnetic field vector 100 b represents the bias from the magnet at the second spin valve. Anarrow 116 a represents a reference direction of the first spin valve and anarrow 116 b represents a reference direction of the second spin valve. As used herein the term “reference direction” is a direction where the spin valve is most sensitive to changes in a magnetic field intensity. - The first spin valve has an
internal bias vector 102, which is parallel to thereference direction 116 a, and the second spin valve has aninternal bias vector 104, which is antiparallel to thereference direction 116 b. Thevectors - In other examples, internal biases of each spin valve may have different bias directions from each other or have parallel bias directions, but different bias amplitudes to be able to select the center of a linear range. For example, if a requirement for a linear range to centered at −50 Oe was desired, then one spin valve could have a bias of +50 Oe and the other spin valve could have a bias of −150 Oe.
- Combining the
vector 100 a with theinternal bias direction 102 yields atotal bias vector 112 and combining thevector 100 b with theinternal bias direction 104 yields atotal bias vector 114. Thetotal bias vectors - Referring to
FIG. 2A , agraph 200 depicts normalized resistance versus magnetic intensity curves for each spin valve of a double spin valve separately. For example, acurve 202 depicts a first spin valve of the double spin valve without a bias from a magnet and acurve 204 depicts a second spin valve of the double spin valve without the bias from the magnet. In other examples, acurve 212 depicts the first spin valve of the double spin valve with the bias of the magnet bias and acurve 214 depicts the second spin valve of the double spin valve with the bias of the magnet. - Referring to
FIG. 2B , agraph 220 depicts normalized resistance versus magnetic intensity curves for the double spin valve. Acurve 222 depicts the double spin valve without the bias of the magnet and acurve 224 depicts the double spin valve with the bias of the magnet. One of ordinary skill in the art would recognize that the linear range in thecurve 224 extends from about −200 Oersted (Oe) to 200 Oe while a single spin valve provides only a linear range between about −50 Oe to 50 Oe. - Referring to
FIG. 3A , agraph 300 depicts normalized sensitivity versus magnetic intensity curves for each spin valve of the double spin valve separately. For example, acurve 302 depicts the first spin valve of the double spin valve without a magnet bias and acurve 304 depicts the second spin valve of the double spin valve without a magnet bias. Acurve 312 depicts the first spin valve of the double spin valve with a magnet bias and acurve 314 depicts the second spin valve of the double spin valve with a magnet bias. - Referring to
FIG. 3B , agraph 320 depicts normalized sensitivity versus magnetic intensity curves for the double spin valve. Acurve 322 depicts the double spin valve without the bias of the magnet and acurve 324 depicts the double spin valve with the bias of the magnet. One of ordinary skill in the art would recognize that the sensitivity of a double spin valve biased with a magnet as shown in thecurve 324 extends from about −200 Oersted (Oe) to 200 Oe while a single spin valve provides only sensitivity between about −50 Oe to 50 Oe. - Referring now to
FIG. 4 , anMR element 400 is an example of a dual double-pinned spin valve element with pinned layers having magnetization in the same direction. TheMR element 400 is deposited or otherwise provided upon asubstrate 401 and includes a plurality of layers. The plurality of layers includes anonmagnetic seed layer 402 disposed over thesubstrate 401, afirst spin valve 401 a disposed over thenonmagnetic seed layer 402 and asecond spin valve 401 b disposed over thefirst spin valve 401 a. The plurality of layers also includes an antiferromagnetic pinninglayer 420, which is shared by thefirst spin valve 401 a and thesecond spin valve 401 b, and anonmagnetic cap layer 404 disposed over thesecond spin valve 401 b. - The
first spin valve 401 a includes bias layers 410,free layer 414 and reference layers 416. The bias layers 410 includes an antiferromagnetic pinninglayer 411 disposed over thenonmagnetic seed layer 402 and a ferromagnetic pinnedlayer 412 disposed over the antiferromagnetic pinninglayer 411. Thefirst spin valve 401 a also includes anonmagnetic spacer layer 413 disposed over the ferromagnetic pinnedlayer 412 with thefree layers 414structure 414 disposed over thenonmagnetic spacer layer 413. Thefree layers 414 includes a first ferromagneticfree layer 414 a and a second ferromagneticfree layer 414 b disposed over the first ferromagneticfree layer 414 a. - The
first spin valve 401 a further includes anonmagnetic spacer layer 415 disposed over thefree layers 414 with the reference layers 416 disposed over thenonmagnetic spacer layer 415. The reference layers 416 includes a ferromagnetic layer 416 a, a ferromagnetic pinnedlayer 416 c and anonmagnetic spacer layer 416 b disposed therebetween. - The
second spin valve 401 b, which is similar to thefirst spin valve 401 a, but includes layers that are in a substantially reverse order or arrangement as the layers which are shown in thefirst spin valve 401 a with respect to theseed layer 402, includes reference layers 431 disposed over the antiferromagnetic pinninglayer 420, anonmagnetic spacer layer 432 disposed over the reference layers 431 andfree layers 433 disposed over thenonmagnetic spacer layer 432. The reference layers 431 includes a firstferromagnetic layer 431 a, a second ferromagnetic pinnedlayer 431 c and anonmagnetic spacer layer 431 b disposed therebetween. Additionally, thefree layers 433 includes a first ferromagneticfree layer 433 a and a second ferromagneticfree layer 433 b disposed over the first ferromagneticfree layer 433 a. - The
second spin valve 401 b also includes bias layers 430. Thebias layer 430 includesnonmagnetic spacer layer 434 disposed over thefree layers 433, a ferromagnetic pinnedlayer 435 disposed over thenonmagnetic spacer layer 434 and an antiferromagnetic pinninglayer 436 disposed over the ferromagnetic pinnedlayer 435. Anonmagnetic cap layer 404 is disposed over the antiferromagnetic pinninglayer 436. - Each of the layers in prior
art MR element 400 includes one or more respective materials (e.g., magnetic materials) and has a respective thickness, as shown. Materials of the layers are shown by atomic symbols. Additionally, thicknesses of the layers are shown in nanometers. In other embodiments, the material and thicknesses of the layers inMR element 400 may be replaced with other materials and thicknesses. - Arrows are shown that are indicative of magnetization directions of the layers. Arrows coming out of the page are indicated as dots within circles and arrows going into the page are indicated as crosses within circles.
- The ferromagnetic pinned
layer 412 has a magnetization in adirection 452. The ferromagnetic pinnedlayer 416 c has a magnetization in adirection 454. The ferromagnetic pinnedlayer 431 a has a magnetization in adirection 456. The ferromagnetic pinnedlayer 435 has a magnetization in adirection 458. After a single anneal process, themagnetization directions magnetization directions 454, 456 (which is to the right of the page inFIG. 4 ). - The
free layers 414 have the same magnetization direction as the ferromagnetic pinnedlayer 412 due to ferromagnetic coupling due to the thickness of thenonmagnetic spacer layer 413. That is, amagnetization direction 462 a of the first ferromagneticfree layer 414 a and amagnetization direction 462 b of the second ferromagneticfree layer 414 b point in the same direction asmagnetization direction 452. - The
free layers 433 have the opposite magnetization direction as the ferromagnetic pinnedlayer 435 due to antiferromagnetic coupling due to the thickness of thenonmagnetic spacer layer 434. That is, amagnetization direction 464 a of the first ferromagneticfree layer 433 a and amagnetization direction 464 b of the second ferromagneticfree layer 433 b point in the opposite direction asmagnetization direction 458. - A
magnet bias 499 with theMR element 400 enables an extended linear range with respect to traditional devices. - Referring to
FIG. 5 , the MR element 400 (FIG. 4 ) may be used with other MR elements fabricated likeMR element 400 to reduce the effects of stray fields. In one example, a magnetic field sensor includes anMR element 400′ and anMR element 400″ that are connected in series. TheMR element 400′ is biased by amagnet bias 590 coming out of the page and theMR element 400″ is biased by amagnet bias 599 going into the page. By having two MR elements with pinned layers aligned in the same direction and each biased by a magnet in an opposite direction from the other magnet, a stray magnetic field immunity is formed. For example, a stray magnetic field parallel to a magnetic bias is compensated for because both dual double-pinned spin valve elements are included. That is, one dual double-pinned spin valve element will increase the bias (hence decrease the sensitivity) while the other dual double-pinned spin valve element will decrease the bias (hence increase the sensitivity). Thus, the effect on one dual double-pinned spin valve element is compensated for by the effect on the other dual double-pinned spin valve element. - In one example, the
MR element 400′ and theMR element 400″ are the same structure as the MR element 400 (FIG. 4 ). In other examples, theMR element 400′ and theMR element 400″ do not have identical layers, but each has pinned layers with a magnetization direction that point in the same direction. - In other examples, the
MR element 400′ and theMR element 400″ may be connected in parallel. In one example, theMR element 400′ and theMR element 400″ may be used together as a single unified element. Multiple unified elements may be used to form bridges in magnetic field sensors. - Referring to
FIG. 6 , an example of a process to fabricate a dual double-pinned spin valve like, for example, theMR element 400 ofFIG. 4 is aprocess 600.Process 600 deposits a stack of layers (602). For example, the stack of layers orlayers FIG. 4 ).Process 600 performs an anneal along the sensitive axis (606). In one example, the sensitive axis is fixed by thedirections 466, 468 (FIG. 4 ). In one example, the stack inprocessing block 602 is heated for one hour at 290° C. in the presence of a magnetic field having an intensity of 10 k Oe. The fabrication of the stack requires only a single anneal step, while traditional methods of fabricating double pinned MR elements perform a second anneal at a lower temperature than the first anneal at 90° from the sensitive axis. - Referring to
FIG. 7 , the dual double-pinned spin valve element with pinned layers (e.g., theMR element 400 inFIG. 4 , or theMR element 400′ and 400′ inFIG. 5 ) may be fabricated in amagnetic field sensor 700. Themagnetic field sensor 700 may be fabricated on a die (not shown) in an integrated circuit (IC)package 702 in a first orientation in relation to arotating structure 702 having gear teeth 704 (a target). In one example, theIC package 702 includes a magnet. In another example, the magnet is located outside of theIC package 702. - In one example, the back-bias position of the
magnetic field sensor 700 can be considered the zero-degree position. The axis ofsensitivity 706 is shown for themagnetic field sensor 700. In other examples, themagnetic field sensor 700 may be rotated to any angle in the plane of the die (e.g., to enable the sensitive axis to be parallel to an axis of rotation of the target). - Elements of different embodiments described herein may be combined to form other embodiments not specifically set forth above. Various elements, which are described in the context of a single embodiment, may also be provided separately or in any suitable subcombination. Other embodiments not specifically described herein are also within the scope of the following claims.
Claims (20)
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