US20200071821A1 - Substrate processing apparatus, and method of manufacturing semiconductor device - Google Patents
Substrate processing apparatus, and method of manufacturing semiconductor device Download PDFInfo
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- US20200071821A1 US20200071821A1 US16/555,755 US201916555755A US2020071821A1 US 20200071821 A1 US20200071821 A1 US 20200071821A1 US 201916555755 A US201916555755 A US 201916555755A US 2020071821 A1 US2020071821 A1 US 2020071821A1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
Definitions
- the present disclosure relates to a substrate processing apparatus, and a method of manufacturing a semiconductor device.
- a substrate processing apparatus includes a processing module having a process furnace that processes a plurality of vertically arranged substrates.
- a substrate processing apparatus including a plurality of processing modules has been proposed in the related art.
- a substrate processing apparatus including a first processing module and a second processing module
- qualities of the films formed by the plurality of processing modules may differ from each other.
- Some embodiments of the present disclosure provide a technique capable of obtaining uniform qualities for films formed by first and second processing modules when forming the same film in the first and second processing modules.
- a technique including: a first processing module including a first processing chamber for processing a plurality of vertically arranged substrates; a second processing module including a second processing chamber for processing the plurality of vertically arranged substrates, the second processing chamber being disposed adjacent to the first processing chamber; a first exhaust box storing a first exhaust system configured to exhaust the first processing chamber; a second exhaust box storing a second exhaust system configured to exhaust the second processing chamber; a common supply box configured to control at least one of a flow path and a flow rate of a plurality of process gases supplied into the first and second processing chambers; a first valve group that connects gas pipes from the common supply box to the first processing chamber such that a communication state between the gas pipes and the first processing chamber is controllable; and a second valve group that connects the gas pipes from the common supply box to the second processing chamber such that a communication state between the gas pipes and the second processing chamber is controllable, wherein, in the first processing module and the second processing module,
- FIG. 1 is a top view schematically showing an example of a substrate processing apparatus suitably used in an embodiment of the present disclosure.
- FIG. 2 is a longitudinal sectional view schematically showing an example of a substrate processing apparatus suitably used in an embodiment of the present disclosure.
- FIG. 3 is a longitudinal sectional view schematically showing an example of a substrate processing apparatus suitably used in an embodiment of the present disclosure.
- FIG. 4 is a longitudinal sectional view schematically showing an example of a process furnace suitably used in an embodiment of the present disclosure.
- FIG. 5 is a cross-sectional view schematically showing an example of a processing module suitably used in an embodiment of the present disclosure.
- FIG. 6A is a view for explaining an example of control of a recipe by a controller.
- FIG. 6B is a view for explaining an example of control of a recipe by a controller.
- FIG. 6C is a view for explaining an example of control of a recipe by a controller.
- FIG. 7 is a view for explaining another example of control of the recipe by the controller.
- FIG. 8 is a view showing a processing flow for determining a shift amount.
- FIG. 9 is a top view schematically illustrating an example of a substrate processing apparatus according to a first modification.
- FIG. 10 is a top view schematically showing an example of a substrate processing apparatus according to a second modification.
- FIG. 11 is a view showing a gas supply system according to a third modification.
- a storage chamber 9 side to be described later is referred to as a front side (forward side), and the transport chambers 6 A and 6 B side to be described later is referred to as a back side (backward side).
- a side facing a boundary line (adjacent surface) of processing modules 3 A and 3 B to be described later is referred to as an inner side, and a side away from the boundary line is referred to as an outer side.
- a substrate processing apparatus 2 is configured as a vertical substrate processing apparatus (hereinafter referred to as a processing apparatus) 2 which carries out a substrate processing process such as heat treatment as one process of a manufacturing process in a method of manufacturing a semiconductor device.
- a substrate processing apparatus 2 which carries out a substrate processing process such as heat treatment as one process of a manufacturing process in a method of manufacturing a semiconductor device.
- the processing apparatus 2 includes two adjacent processing modules 3 A and 3 B.
- the processing module 3 A is constituted by a process furnace 4 A and a transfer chamber 6 A.
- the processing module 3 B is constituted by a process furnace 4 B and a transfer chamber 6 B. Transfer chambers 6 A and 6 B are disposed below the process furnaces 4 A and 4 B, respectively.
- a transfer chamber 8 including a transfer device 7 for transferring a wafer W is disposed adjacent to the front side of the transfer chambers 6 A and 6 B.
- a storage chamber 9 for storing a pod (hoop) 5 for storing a plurality of wafers W is connected to the front side of the transfer chamber 8 .
- An I/O port 22 is installed on the entire surface of the storage chamber 9 , and the pod 5 is loaded/unloaded into/from the processing apparatus 2 via the I/O port 22 .
- Gate valves 90 A and 90 B are installed on the boundary walls (adjacent surfaces) of the transfer chambers 6 A and 6 B and the transfer chamber 8 , respectively.
- Pressure detectors are respectively installed in the transfer chamber 8 and in the transfer chambers 6 A and 6 B, and an internal pressure of the transfer chamber 8 is set to be lower than internal pressures of the transfer chambers 6 A and 6 B.
- oxygen concentration detectors are respectively installed in the transfer chamber 8 and the transfer chambers 6 A and 6 B, and an oxygen concentration in the transfer chamber 8 A and the transfer chambers 6 A and 6 B is kept to be lower than an oxygen concentration in the atmosphere.
- a clean unit 62 C for supplying clean air into the transfer chamber 8 is installed on a ceiling of the transfer chamber 8 .
- the clean unit 62 C is configured to circulate the clean air, for example, an inert gas, in the transfer chamber 8 .
- the inside of the transfer chamber 8 can be made into a clean atmosphere.
- processing module 3 A and the processing module 3 B have the same configuration, only the processing module 3 A will be representatively described below.
- the process furnace 4 A includes a cylindrical reaction tube 10 A and a heater 12 A as a heating means (heating mechanism) installed on an outer periphery of the reaction tube 10 A.
- the reaction tube is made of, for example, quartz or SiC.
- a process chamber 14 A for processing a wafer W as a substrate is formed inside the reaction tube 10 A.
- a temperature detection part 16 A as a temperature detector is installed in the reaction tube 10 A. The temperature detection part 16 A stands along the inner wall of the reaction tube 10 A.
- a gas used for substrate processing is supplied into the process chamber 14 A by a gas supply mechanism 34 as a gas supply system.
- the gas supplied by the gas supply mechanism 34 may be changed depending on a type of film to be formed.
- the gas supply mechanism 34 includes a precursor gas supply part, a reaction gas supply part and an inert gas supply part.
- the gas supply mechanism 34 is stored in a supply box 72 to be described later. Since the supply box 72 is provided in common for the processing modules 3 A and 3 B, it is regarded as a common supply box.
- the precursor gas supply part which is a first gas supply part, includes a gas supply pipe 36 a .
- the gas supply pipe 36 a is provided with a mass flow controller (MFC) 38 a , which is a flow rate controller (flow rate control part), and valves 41 a and 40 a , which are opening/closing valves such as diaphragm valves, in order of upstream to downstream.
- MFC mass flow controller
- the gas supply pipe 36 a is connected to a nozzle 44 a penetrating a side wall of a manifold 18 .
- the nozzle 44 a is vertically installed in the reaction tube 10 A and has a plurality of supply holes opened toward wafers W held by a boat 26 . A precursor gas is supplied to the wafers W through the supply holes of the nozzle 44 a.
- a reaction gas is supplied to the wafers W from the reaction gas supply part, which is a second gas supply part, through a supply pipe 36 b , an WC 38 b , a valve 41 b , a valve 40 b and a nozzle 44 b .
- An inert gas is supplied to the wafers W from the inert gas supply part through supply pipes 36 c and 36 d , MFCs 38 c and 38 d , valves 41 c and 41 d , valves 40 c and 40 d and nozzles 44 a and 44 b .
- the nozzle 44 b is vertically installed in the reaction tube 10 A and has a plurality of supply holes opened toward the wafers W held by the boat 26 .
- the precursor gas is supplied to the wafers W through the supply holes of the nozzle 44 b.
- the gas supply mechanism 34 is provided with a third gas supply part for supplying a reaction gas, a precursor gas, or an inert gas or a cleaning gas that does not directly contribute to the substrate processing, to the wafers W.
- the reaction gas is supplied to the wafers W from the third gas supply part through a supply pipe 36 e , an WC 38 e , a valve 41 e , a valve 40 e and a nozzle 44 c .
- the inert gas or the cleaning gas is supplied to the wafers W from the inert gas supply part through a supply pipe 36 f , an WC 38 f , a valve 41 f , a valve 40 f and a nozzle 44 c .
- the nozzle 44 c is vertically installed in the reaction tube 10 A and has a plurality of supply holes opened toward the wafers W held by the boat 26 .
- the precursor gas is supplied to the wafers W through the supply holes of the nozzle 44 c.
- Three nozzles 44 a , 44 b and 44 c are installed in the reaction tube 10 A, so that three types of precursor gases can be supplied into the reaction tube 10 A in a predetermined sequence or in a predetermined cycle.
- Valves 40 a , 40 b , 40 c , 40 d , 40 e and 40 f connected to the nozzles 44 a , 44 b and 44 c in the reaction tube 10 A are final valves and are provided in a final valve installation part 75 A to be described later.
- three nozzles 44 a , 44 b and 44 c are installed in the reaction tube 10 B, so that three types of precursor gases can be supplied into the reaction tube 10 B in a predetermined sequence or in a predetermined cycle.
- Valves 40 a , 40 b , 40 c , 40 d , 40 e and 40 f connected to the nozzles 44 a , 44 b and 44 c in the reaction tube 10 B are final valves and are provided in a final valve installation part 75 B to be described later.
- a plurality of gas pipes 35 on the output side of the valves 41 a to 41 f are branched into a plurality of gas distribution pipes 35 A respectively connected to the valves 40 a , 40 b , 40 c , 40 d , 40 e and 40 f of the reaction tube 10 A and a plurality of gas distribution pipes 35 B respectively connected to the valves 40 a , 40 b , 40 c , 40 d , 40 e and 40 f of the reaction tube 10 B between the valves 41 a to 41 f and the valves 40 a to 40 f .
- the plurality of gas pipes 35 may be regarded as gas pipes in common for the reaction tubes 10 A and 10 B.
- An exhaust pipe 46 A is attached to the manifold 18 A.
- a vacuum pump 52 A as a vacuum exhaust device is connected to the exhaust pipe 46 A via a pressure sensor 48 A as a pressure detector (pressure detection part) for detecting the internal pressure of the process chamber 14 A and an APC (Auto Pressure Controller) valve 50 A as a pressure regulator (pressure regulation part).
- a pressure sensor 48 A as a pressure detector (pressure detection part) for detecting the internal pressure of the process chamber 14 A
- an APC (Auto Pressure Controller) valve 50 A as a pressure regulator (pressure regulation part).
- An exhaust system A is mainly constituted by the exhaust pipe 46 A, the APC valve 50 A and the pressure sensor 48 A.
- the exhaust system A is stored in an exhaust box 74 A to be described later.
- One vacuum pump 52 A may be installed in common for the processing modules 3 A and 3 B.
- the process chamber 14 A accommodates therein a boat 26 A as a substrate holder which vertically supports a plurality of wafers W, for example, 25 to 150 wafers W, in a shelf shape.
- the boat 26 A is supported above a heat insulating part 24 A by a rotary shaft 28 A penetrating a lid 22 A and the heat insulating part 24 A.
- the rotary shaft 28 A is connected to a rotation mechanism 30 A installed below the lid 22 A.
- the rotary shaft 28 A is configured to be rotatable in a state in which the inside of the reaction tube 10 A is air-tightly sealed.
- the lid 22 A is vertically driven by a boat elevator 32 A as an elevation mechanism.
- the boat 26 A and the lid 22 A are integrally raised and lowered, and the boat 26 A is loaded/unloaded into/from the reaction tube 10 A.
- a clean unit 60 A is installed on one side in the transfer chamber 6 A (an outer side of the transfer chamber 6 A, or a side opposite to a side facing the transfer chamber 6 B).
- the clean unit 60 A is configured to circulate clean air (for example, an inert gas) inside the transfer chamber 6 A.
- the inert gas supplied into the transfer chamber 6 A is exhausted from the transfer chamber 6 A by an exhaust unit 62 A installed on the side surface facing the clean unit 60 A (the side surface facing the transfer chamber 6 B) with the boat 26 A interposed between the exhaust unit 62 A and the clean unit 60 A, and is resupplied from the clean unit 60 A into the transfer chamber 6 A (circulation purge).
- the internal pressure of the transfer chamber 6 A is set to be lower than the internal pressure of the transfer chamber 8 .
- the oxygen concentration in the transfer chamber 6 A is set to be lower than the oxygen concentration in the atmosphere. With such a configuration, it is possible to prevent a natural oxide film from being formed on the wafers W during the transfer operation of the wafers W.
- a controller 100 is connected to and controls the rotation mechanism 30 A, the boat elevator 32 A, the MFCs 38 a to 38 f and the valves 41 a to 40 f of the gas supply mechanism 34 A, and the APC valve 50 A.
- the controller 100 includes, for example, a microprocessor (computer) including a CPU, and is configured to control the operation of the processing apparatus 2 .
- An input/output device 102 configured as, for example, a touch panel or the like is connected to the controller 100 .
- One controller 100 may be installed for each of the processing module 3 A and the processing module 3 B, or may be installed in common for them.
- a storage part 104 may be a storage device (hard disk or flash memory) incorporated in the controller 100 , or an external portable recording device (magnetic tape, magnetic disk such as flexible disk or hard disk, optical disk such as CD or DVD, magneto-optical disk such as MO, or a semiconductor memory such as USB memory or memory card).
- a program may be provided to the computer using communication means such as the Internet or a dedicated line.
- the controller 100 reads the program from the storage part 104 according to an instruction from the input/output device 102 as necessary and executes a process according to a read recipe, the processing apparatus 2 execute a desired process under control of the controller 100 .
- the controller 100 is stored in a controller box 76 ( 76 A and 76 B).
- the controller 100 When the controller 100 is installed for each of the processing module 3 A and the processing module 3 B, the controller 100 (A) for controlling the processing module 3 A is installed in the controller box 76 A, and the controller 100 (B) for controlling the processing module 3 B is installed in the controller box 76 B.
- a process of forming a film on a substrate (film-forming process) using the above-described processing apparatus 2 will be described.
- SiN silicon nitride
- HCDS hexachlorodisilane
- NH 3 ammonia
- the operations of various parts constituting the processing apparatus 2 are controlled by the controller 100 .
- a SiN film is formed on a wafer W by repeating a step of supplying an HCDS gas to the wafer W in the process chamber 14 A, a step of removing the HCDS gas (residual gas) from the inside of the process chamber 14 A, a step of supplying an NH 3 gas to the wafer W in the process chamber 14 A, and a step of removing the NH 3 gas (residual gas) from the inside of the process chamber 14 A a predetermined number of times (once or more).
- this film formation sequence is written as follows for the sake of convenience.
- the gate valve 90 A is opened, and the wafer W is transferred to the boat 26 A.
- the gate valve 90 A is closed.
- the boat 26 A is loaded into the process chamber 14 A by the boat elevator 32 A (boat loading), and the lower opening of the reaction tube 10 A is in a state of being air-tightly closed (sealed) by the lid 22 A.
- the process chamber 14 A is vacuum-exhausted (evacuated) by the vacuum pump 52 A so that the inside of the process chamber 14 A reaches a predetermined pressure (degree of vacuum).
- the internal pressure of the process chamber 14 A is measured by the pressure sensor 48 A, and the APC valve 50 A is feedback-controlled based on the measured pressure information.
- the wafer W in the process chamber 14 A is heated by the heater 12 A so as to have a predetermined temperature.
- a condition of conduction of current to the heater 12 A is feedback-controlled based on the temperature information detected by the temperature detection part 16 A so that the process chamber 14 A has a predetermined temperature distribution. Further, the rotation of the boat 26 A and the wafer W by the rotation mechanism 30 A is started.
- an HCDS gas is supplied to the wafer W in the process chamber 14 A.
- the HCDS gas is controlled by the MFC 38 a to have a desired flow rate, and is supplied into the process chamber 14 A via the gas supply pipe 36 a , the valves 41 a and 40 a and the nozzle 44 a .
- the valve 40 a opens when the valve 41 a of processing module 3 A and/or 3 B opens.
- the valve 40 a operates on interlocking basis, moreover the valve 40 a could operates more slowly than the valve 41 a for longer life time. That is achieved by restricting an air flow for an air-operated valve or by limiting applied voltage for a solenoid-operated valve. For example, a transition time of the valve 41 a from close to open could be set to 5 ms whereas that of valve 40 a is 3 ms. The same applies to the other valves 41 b to 41 f.
- an N 2 gas may be supplied as an inert gas from the inert gas supply part into the process chamber 14 A (inert gas purge).
- an NH 3 gas is supplied to the wafer W in the process chamber 14 A.
- the NH 3 gas is controlled by the MFC 38 b to have a desired flow rate, and is supplied into the process chamber 14 A via the gas supply pipe 36 b , the valves 41 b and 40 b and the nozzle 44 b.
- the supply of the NH 3 gas is stopped, and the inside of the process chamber 14 A is vacuum-exhausted by the vacuum pump 52 A.
- an N 2 gas may be supplied from the inert gas supply part into the process chamber 14 A (inert gas purge).
- an N 2 gas is supplied from the inert gas supply part, the inside of the process chamber 14 A is replaced with the N 2 gas, and the internal pressure of the process chamber 14 A is restored to the normal pressure. Thereafter, the lid 22 A is lowered by the boat elevator 32 A, and the boat 26 A is unloaded from the reaction tube 10 A (boat unloading). Thereafter, the processed wafer W is taken out of the boat 26 A (wafer discharging).
- the wafer W may be stored in the pod 5 and unloaded out of the processing apparatus 2 , or may be transferred to the process furnace 4 B and continuously subjected to substrate processing such as annealing.
- substrate processing such as annealing.
- the gate valves 90 A and 90 B are opened, and the wafer W is directly transferred from the boat 26 A to the boat 26 B.
- Subsequent loading/unloading of the wafer W into/from the process furnace 4 B is performed in the same procedure as the above-described substrate processing by the process furnace 4 A.
- the substrate processing in the process furnace 4 B is performed, for example, in the same procedure as the above-described substrate processing by the process furnace 4 A.
- the processing conditions at the time of forming the SiN film on the wafer W are exemplified as follows.
- the boat 26 For example, if the boat 26 is broken, the boat 26 needs to be replaced. If the reaction tube 10 is broken or needs to be cleaned, it is necessary to remove the reaction tube 10 . In this manner, when maintenance for the transfer chamber 6 or the process furnace 4 is performed, the maintenance is performed from maintenance areas A and B on the back side of the processing apparatus 2 .
- maintenance ports 78 A and 78 B are respectively formed on the back sides of the transfer chambers 6 A and 6 B.
- the maintenance port 78 A is formed on the transfer chamber 6 B side of the transfer chamber 6 A
- the maintenance port 78 B is formed on the transfer chamber 6 A side of the transfer chamber 6 B.
- the maintenance ports 78 A and 78 B are opened and closed by maintenance doors 80 A and 80 B, respectively.
- the maintenance doors 80 A and 80 B are configured to be rotated with hinges 82 A and 82 B as base shafts, respectively.
- the hinge 82 A is installed on the transfer chamber 6 B side of the transfer chamber 6 A, and the hinge 82 B is installed on the transfer chamber 6 A side of the transfer chamber 6 B.
- the hinges 82 A and 82 B are installed adjacent to each other near the inner corner located on the adjacent surfaces on the back sides of the transfer chambers 6 A and 6 B.
- the maintenance areas are formed on the processing module 3 B side on the back surface of the processing module 3 A and on the processing module 3 A side on the back surface of the processing module 3 B.
- the back side maintenance ports 78 A and 78 B are opened.
- the maintenance door 80 A is configured to be opened to the left at 180 degrees toward the transfer chamber 6 A.
- the maintenance door 80 B is configured to be opened to the right at 180 degrees toward the transfer chamber 6 B. That is, the maintenance door 80 A is rotated clockwise toward the transfer chamber 6 A and the maintenance door 80 B is rotated counterclockwise toward the transfer chamber 6 A. In other words, the maintenance doors 80 A and 80 B are rotated in opposite directions. Since the maintenance doors 80 A and 80 B are configured to be removable, they may be removed for maintenance.
- a utility system 70 is installed near the back sides of the transfer chamber 6 A and 6 B.
- the utility system 70 is interposed between maintenance areas A and B. When maintenance of the utility system 70 is performed, the maintenance is performed from the maintenance areas A and B.
- the utility system 70 includes final valve installation parts 75 A and 75 B, exhaust boxes 74 A and 74 B, a supply box 72 and controller boxes 76 A and 76 B.
- the utility system 70 is constituted by the exhaust boxes 74 A and 74 B, the supply box 72 and the controller boxes 76 A and 76 B in this order from the housing side (the transfer chambers 6 A and 6 B).
- the final valve installation parts 75 A and 75 B are provided above the exhaust boxes 74 A and 74 B.
- the maintenance ports of the boxes of the utility system 70 are formed on the maintenance areas A and B, respectively.
- the supply box 72 is disposed on the side opposite to the side adjacent to the transfer chamber 6 A of the exhaust box 74 A, and a supply box 72 B is disposed adjacent to the side adjacent to the transfer chamber 6 B on the exhaust box 74 B.
- the final valve installation part 75 A where the final valves (the valves 40 a , 40 b and 40 c located at the lowermost stage of the gas supply system) of the gas supply mechanism 34 are installed is disposed above the exhaust box 74 A. Preferably, it is disposed just above (right above) the exhaust box 74 A. With such a configuration, even when the supply box 72 is disposed away from the housing side, since the pipe length from the final valves to the process chamber can be shortened, the quality of film formation can be improved.
- the valves 40 d , 40 e and 40 f are also disposed in the final valve installation part 75 A.
- the final valve installation part 75 B where the final valves (the valves 40 a , 40 b and 40 c located at the lowermost stage of the gas supply system) of the gas supply mechanism 34 are installed is disposed above the exhaust box 74 B. Preferably, it is disposed just above (right above) the exhaust box 74 B. With such a configuration, even when the supply box 72 is disposed away from the housing side, since the pipe length from the final valves to the process chamber can be shortened, the quality of film formation can be improved.
- the valves 40 d , 40 e and 40 f are also disposed in the final valve installation part 75 B.
- the configurations of the processing modules 3 A and 3 B and the utility system 70 are arranged in plane symmetry with respect to an adjacent surface S 1 of the processing modules 3 A and 3 B.
- the reaction tubes 10 A and 10 B are also arranged in plane symmetry with respect to the adjacent surface S 1 of the processing modules 3 A and 3 B.
- pipes are arranged such that the pipe lengths of the exhaust pipes 46 A and 46 B from the processing modules 3 A and 3 B to the exhaust boxes 74 A and 74 B are substantially the same in the processing modules 3 A and 3 B.
- pipes (gas pipes) are arranged such that the pipe lengths from final valves 40 A and 40 B installed in the final valve installation parts 75 A and 75 B to nozzles 44 A and 44 B are substantially the same in the processing modules 3 A and 3 B.
- the final valve 40 A indicates the valves 40 a to 40 f of the processing module 3 A
- the final valve 40 B indicates the valves 40 a to 40 f of the processing module 3 B
- the nozzle 44 A indicates the nozzles 44 a to 44 c of the processing module 3 A
- the nozzle 44 B indicates the nozzles 44 a to 44 c of the processing module 3 B.
- a pipe 10 Aa corresponds to a pipe between the valve 40 a of the processing module 3 A and the nozzle 44 a of the processing module 3 A and a pipe 10 Ba corresponds to a pipe between the valve 40 a of the processing module 3 B and the nozzle 44 a of the processing module 3 B
- the pipe 10 Aa and the pipe 10 Ba have substantially the pipe length
- a pipe 10 Ab corresponds to a pipe between the valve 40 b of the processing module 3 A and the nozzle 44 b of the processing module 3 A
- a pipe 10 Bb corresponds to a pipe between the valve 40 b of the processing module 3 B and the nozzle 44 b of the processing module 3 B
- the pipe 10 Ab and the pipe 10 Bb have substantially the pipe length.
- an arrival time when a gas is supplied from the supply box 72 to the nozzle 44 a of the processing module 3 A via the valve 40 a and the pipe 10 Aa of the processing module 3 A may be the same as an arrival time when the same gas is supplied from the supply box 72 to the nozzle 44 a of the processing module 3 B via the valve 40 a and the pipe 10 Ba of the processing module 3 B. Therefore, recipe management of the processing modules 3 A and 3 B by the controller 100 can be facilitated. Furthermore, as indicated by arrows in FIG. 5 , rotation directions of wafers W in the process furnaces 4 A and 4 B are also set to be opposite to each other.
- the form of arrangement of the reaction tubes 10 A and 10 B is not limited to that shown in FIG. 5 .
- the nozzles 44 A and 44 B may be installed to correspond to the final valve installation parts 75 A and 75 B, respectively.
- the reaction tubes 10 A and 10 B may be arranged such that the exhaust pipes 46 A and 46 B leading to the exhaust boxes 74 A and 74 B have the shortest length.
- the reaction tubes 10 A and 10 B may be disposed in plane symmetry with respect to the adjacent surface S 1 of the processing modules 3 A and 3 B.
- the common supply box 72 is provided for the processing modules 3 A and 3 B and the gas pipes from the supply box 72 to the final valves 40 A and 40 B are shared, it is possible to save a space of the substrate processing apparatus.
- a footprint required by the substrate processing apparatus 2 is lowered, and it is possible to reduce a use area of a clean room with respect to a required amount of production, which is very advantageous in terms of economy.
- FIGS. 6A, 6B and 6C are views for explaining an example of control of a recipe by the controller.
- a recipe is one describing a supply amount of each process gas such as reaction gas and precursor gas, a target vacuum degree (or an exhaust speed), process chamber temperature and the like. in a time series, and may include a pattern repeated at a fixed cycle.
- the term recipe may, in a narrow sense, refer to one cycle of this repeated pattern.
- the controller 100 that manages the recipe has a mutual monitoring function so that the same process gas cannot be simultaneously flown into the reaction tubes 10 A and 10 B of the processing modules 3 A and 3 B.
- the controller 100 mutually monitors the recipe for the processing modules 3 A and 3 B based on the registered gas and valve, and performs control to optimize the recipe start time and the like so that the same process gas cannot be simultaneously flown into the processing modules 3 A and 3 B.
- the optimization of the recipe start time and the like can be adjusted using evacuation time of the vacuum pump 52 A to evacuate the reaction tubes 10 A and 10 B or purge time for purging the reaction tubes 10 A and 10 B with an N 2 gas.
- the mutual monitoring and control includes a valve level and a recipe level.
- FIG. 6A shows an example of recipes RC 1 and RC 2 executed respectively by the processing modules 3 A and 3 B.
- the recipes RC 1 and RC 2 are the same recipes, and use three process gases A, B and C.
- the recipes RC 1 and RC 2 of substantially the same gas supply sequence are repeatedly executed for multiple cycles.
- Each of the recipes RC 1 and RC 2 includes process steps PS 1 to PS 9 which are substantially the same gas supply sequence.
- the process step PS 1 is a process (A) of supplying a process gas A into the reaction tube 10 A or 10 B.
- the process step PS 4 is a process (B) of supplying a process gas B into the reaction tube 10 A or 10 B.
- the process step PS 7 is a process (C) of supplying a process gas C into the reaction tube 10 A or 10 B.
- the process steps PS 2 , PS 5 and PS 8 are performed after the process steps PS 1 , PS 4 and PS 7 , respectively.
- the process steps PS 2 , PS 5 and PS 8 are processes (V) of evacuating the reaction tube 10 A or 10 B by setting the target vacuum degree to a relatively low pressure (for example, 10 to 100 Pa).
- the process steps PS 3 , PS 6 and PS 9 are performed after the process step PS 2 , PS 5 and PS 8 , respectively.
- the process steps PS 3 , PS 6 and PS 9 are processes (P) of evacuating the reaction tubes 10 A and 10 B while flowing a purge gas (N 2 gas) into the reaction tubes 10 A and 10 B.
- a mass flow controller for the process gas A is the MFC 38 a
- a mass flow controller for the process gas B is the MFC 38 b
- a mass flow controller for the process gas C is the MFC 38 c .
- the controllers 100 of the processing module 3 A and 3 B mutually monitor an opening/closing state of the valves 40 a to 40 c of the processing module 3 A and an opening/closing state of the valves 40 a to 40 c of the processing module 3 B between the processing modules 3 A and 3 B.
- This control of the valve level is also called an interlock.
- the controller 100 of the processing module 3 A opens the final valves of its own processing module 3 A according to the recipe.
- the controller 100 of the processing module 3 A performs control to interrupt the recipe of its own processing module 3 A until the final valves are closed.
- the controller 100 of the processing module 3 B opens the final valves of its own processing module 3 B according to the recipe.
- the controller 100 of the processing module 3 B performs control to interrupt the recipe of its own processing module 3 B until the final valves are closed.
- the controller 100 monitors progresses of the recipes RC 1 and RC 2 at each timing such as the start of the recipes RC 1 and RC 2 or before the boat loading, etc. and predicts the timing of sequence in which the used gases A, B and C flow.
- the processing modules 3 A and 3 B when the same process gas A, B or C does not flow at the same timing, the recipes RC 1 and RC 2 proceed as they are.
- the controller 100 calculates a sequence in which the same process gas does not flow at the same time, and performs control to shift the timing of the supply of the gas used.
- the processing modules 3 A and 3 B in order to form the same film, processes of repeating substantially the same gas supply sequence are performed in parallel with each other while having a shift time therebetween.
- the shift time is determined by delaying the gas supply sequence of one of the processing modules 3 A and 3 B which will start processing later so that the supply timing of a specific gas among the plurality of process gases A, B and C does not overlap with the gas supply sequence of the other of the processing modules 3 A and 3 B which has previously started processing.
- the controller 100 predicts the timing of the gas supply sequence in which the process gases A, B and C used flow when the recipes RC 1 and RC 2 start. That is, it is assumed that the same process gas A, B or C is predicted to flow into the processing modules 3 A and 3 B at the same timing. In this case, the controller 100 calculates a sequence in which the same process gas does not flow at the same time, and performs control to shift the timing of supplying the gas used.
- the controller 100 before the start of the recipes RC 1 and RC 2 , the controller 100 generates the recipe RC 2 for which the timing of the gas supply sequence is shifted in time so that the same process gas A, B or C does not flow at the same timing in the processing modules 3 A and 3 B.
- a process step PSA 1 is automatically added by the controller 100 before the process step PS 1 .
- the process step PSA 1 is, for example, a process (P) of evacuating the reaction tube 10 B while flowing a purge gas (N 2 gas) into the reaction tube 10 B.
- the process step PSA 1 is added only before the first process step PS 1 of the first cycle.
- the process step PSA 1 is not added before the process step PS 1 in the second and subsequent cycles of the recipe RC 2 (PS 1 to PS 9 ). That is, after performing the last process step PS 9 of the first cycle of the recipe RC 2 (PS 1 to PS 9 ), the first process step PS 1 of the second cycle of the recipe RC 2 (PS 1 to PS 9 ) is performed. Similarly, after performing the last process step PS 9 of the second cycle of the recipe RC 2 (PS 1 to PS 9 ), the first process step PS 1 of the third cycle of the recipe RC 2 (PS 1 to PS 9 ) is performed.
- the one having the longest supply time (t max ) in one cycle of the recipes RC 1 and RC 2 is selected (here PS 7 ), and a recipe time difference t diff between the processing modules 3 A and 3 B is adjusted by delaying the start time of the process step PS 1 of either recipe RC 1 or RC 2 so that the recipe time difference t diff is equal to t max +n*t cycle .
- the start time of PS 1 in the recipe RC 2 is delayed by a time when the process step PSA 1 is added, as compared with the start time of PS 1 in the recipe RC 1 .
- the adjusted time difference t diff_adj t max n*t cycle (where, n is an arbitrary integer and t cycle is the time of one cycle of the recipe: the time from the start time of PS 1 to the end time of PS 7 ). It is assumed that t max ⁇ t cycle /2.
- the controller 100 also has an adjustment function to make the heat histories of the process chambers 14 A and 14 B equal to each other. It is possible to set the determined time and automatically adjust the time for waiting for the purge time set for the history between batches as well as the recipes in simultaneous progression. That is, in the last cycle in which the recipes RC 1 and RC 2 of the processing modules 3 A and 3 B shown in FIG. 6B are repeatedly executed in multiple cycles, the process step PS 9 of the recipe RC 1 of the processing module 3 A will end earlier in time than the process step PS 9 of the recipe RC 2 of the processing module 3 B. Therefore, the heat history of the process chamber 14 A and the heat history of the process chamber 14 B will be different from each other.
- a process step PSA 2 of the same time as PSA 1 is automatically added by the controller 100 after the process step PS 9 .
- the process step PSA 2 is, for example, a process (P) of evacuating the reaction tube 10 A while flowing a purge gas (N 2 gas) into the reaction tube 10 A.
- the processing module 3 A and the processing module 3 B basically operate asynchronously, and dependency between the processing module 3 A and the processing module 3 B is small. Therefore, even if one of the processing module 3 A and the processing module 3 B is stopped due to a failure or the like, the other of the processing module 3 A and the processing module 3 B can continue the processing.
- FIG. 7 is a view for explaining another example of control of the recipe by the controller.
- FIG. 7 shows four examples in which processing times of process steps (PSA 1 to PSA 4 ) added before the process step PS 1 are different in the recipe RC 2 performed in the processing module 3 B.
- a recipe RC 21 shown in FIG. 7 is the same as the recipe RC 2 shown in FIG. 6B , and is based on a rule that the advancing time of the recipe RC 21 is shifted by the supply time of the process gas C for which the supply time in one cycle is the longest. Therefore, in the recipe RC 21 , the process step PSA 1 is added before the process step PS 1 . Thus, after the process step PS 7 of supplying the gas C to the processing module 3 A is completed, the process step PS 7 of supplying the gas C to the processing module 3 B is subsequently started.
- the recipe RC 21 is based on a rule that the exhaust timing of the process gases A and B and the exhaust timing of the process gas C do not overlap with each other.
- the recipe RC 21 is based on a rule that the end of the purge process of the process gases A, B and C does not overlap with the exhaust process of any gas. According to this rule, it is possible to prevent an increase in residual gas concentration at the end of purge.
- a process step PSA 2 is added before the process step PS 1 .
- the process step PS 1 of using the process gas A is started in the processing module 3 B.
- a process step PSA 3 is added before the process step PS 1 .
- the recipe RC 23 is based on a rule that the exhaust timings of the process gases A, B and C do not overlap with each other. This is suitable when a total time of continuous supply, exhaust and purge steps for one gas is t cycle /2 or more.
- a process step PSA 4 is added before the process step PS 1 .
- the supply of the process gas C to the processing module 3 A in the second cycle is subsequently started (the process step PS 7 in the second cycle).
- the recipe RC 24 is equivalent to the recipe RC 21 of the processing module 3 B.
- the start timing of the process step PS 1 of using the process gas A in the processing module 3 B can be optimally controlled by a set parameter and a predicted sequence.
- FIG. 8 is a view showing a processing flow for determining an amount of shift in which the supply timings do not overlap with each other.
- the processing flow of FIG. 8 is to calculate the required amount of shift starting from a state in which a time difference t adj between the cycles of the recipes of the processing modules 3 A and 3 B is zero.
- Step S 1 0 is substituted for a variable t adj_add indicating the time to delay the recipe of the processing module 3 B further than the current time difference t adj .
- Step S 2 The following process (steps S 21 to S 23 ) is performed on each of the process gases by sequentially selecting one (gas x) from the process gases.
- Step S 21 In one specific cycle of the recipe in the processing module 3 A, the supply section of the gas x is sequentially selected from the top, and its start time t 1xi_start and its end time t 1xi_end are specified.
- i is an index of n x existing supply sections.
- Step S 23 If the index i has not reached n x , the process returns to step S 21 , and if it has reached n x , the process proceeds to the next step (step S 3 ).
- Step S 3 If the held variable t adj_add is zero, the current time difference t adj is determined (that is, t adj is determined as t diff_adj or t max ), and the process is ended.
- step S 3 When the variable t adj_add add is non-zero in step S 3 , if t cycle ⁇ t diff_adj +t adj in step S 4 , the process is interrupted because it is impossible to eliminate the overlap.
- step S 4 If t cycle ⁇ t diff_adj +t adj in step S 4 , t diff_adj ⁇ t adj is substituted for t diff_adj in step S 5 , and the process returns to step S 1 .
- a substrate processing apparatus ( 2 ) includes:
- a first processing module ( 3 A) including a first processing chamber (reaction tube ( 10 A)) for processing a plurality of vertically arranged substrates (W);
- a second processing module ( 3 A) including a second processing chamber (reaction tube ( 10 B)) for processing the plurality of vertically arranged substrates, the second processing chamber ( 10 B) being disposed adjacent to the first processing chamber ( 10 A);
- a first exhaust box ( 74 A) storing a first exhaust system configured to exhaust the first processing chamber ( 10 A);
- a second exhaust box ( 74 B) storing a second exhaust system configured to exhaust the second processing chamber ( 10 B);
- a common supply box ( 72 ) that controls at least one of a flow path and a flow rate of a plurality of process gases (A, B and C) supplied into the first and second processing chambers ( 10 A and 10 B);
- a first valve group ( 40 A and 40 a to 40 f ) that connects gas pipes from the common supply box ( 72 ) to the first processing chamber ( 10 A) such that a communication state between the gap pipes and the first processing chamber is controllable;
- a second valve group ( 40 B and 40 a to 40 f ) that connects the gas pipes from the common supply box to the second processing chamber ( 10 B) such that a communication state between the gas pipes and the second processing chamber.
- processes of repeating substantially the same gas supply sequence are performed in parallel with each other while having a shift time therebetween so as to form the same film.
- the shift time is determined by a method (insertion of PSA 1 to recipe RC 2 ) of delaying the gas supply sequence (PS 7 of recipe RC 2 ) of one ( 3 B) of the processing modules ( 3 A and 3 B) so that a supply timing of a predetermined gas among the plurality of process gases (A, B and C) does not overlap with the gas supply sequence (PS 7 of recipe RC 1 ) of the other ( 3 A) of the processing modules ( 3 A and 3 B) which has started the processing before the one of the processing modules ( 3 A and 3 B) starts the processing.
- the substrate processing apparatus ( 2 ) further includes:
- the first and second process controllers ( 100 (A) and 100 (B)) transmit information substantially indicating circulation states of the first and second valve groups ( 40 A and 40 B) controlled respectively by the first and second process controllers ( 100 (A) and 100 (B)) to other process controllers ( 100 (A) and 100 (B)), and the first and second processing modules ( 3 A and 3 B) are operated asynchronously except while prohibiting simultaneous supply of the same gas valve by the first and second valve groups ( 40 A and 40 B).
- FIG. 9 is a top view schematically showing an example of a substrate processing apparatus according to a first modification of the present disclosure.
- a utility system 70 is constituted by a supply box 72 , exhaust boxes 74 A and 74 B and controller boxes 76 A and 76 B.
- the supply box 72 , the exhaust boxes 74 A and 74 B and the controller boxes 76 A and 76 B are arranged in plane symmetry with respect to the adjacent surface S 2 of the transfer chambers 6 A and 6 B.
- the exhaust box 74 A is disposed at an outer corner of the back surface of the transfer chamber 6 A opposite to the transfer chamber 6 B.
- the exhaust box 74 B is disposed at an outer corner of the back surface of the transfer chamber 6 B opposite to the transfer chamber 6 A. That is, the exhaust boxes 74 A and 74 B are installed flat (smoothly) so that the outer side surfaces of the transfer chambers 6 A and 6 B and the outer side surfaces of the exhaust boxes 74 A and 74 B are connected in a plane.
- the supply box 72 is centrally located between the exhaust boxes 74 A and 74 B, spaced apart from the exhaust boxes 74 A and 74 B.
- the front surface of the supply box 72 is disposed in contact with the back surfaces of the transfer chamber 6 A and 6 B.
- the final valve installation parts 75 A and 75 B are installed in contact with the back surfaces of the process furnaces 4 A and 4 B.
- the contacting portion of the side surfaces of the final valve installation parts 75 A and 75 B is provided on the upper side of the front surface of the supply box 72 .
- a plurality of pipes are arranged from the supply box 72 to the final valve installation parts 75 A and 75 B at the overlapping portions of the final valve installation parts 75 A and 75 B and the supply box 72 .
- the controller boxes 76 A and 76 B are provided in contact with the back surface of the supply box 72 .
- an arrival time when a gas is supplied from the supply box 72 to the nozzle 44 a of the processing module 3 A via the valve 40 a and the pipe 10 Aa of the processing module 3 A may be the same as an arrival time when the same gas is supplied from the supply box 72 to the nozzle 44 a of the processing module 3 B via the valve 40 a and the pipe 10 Ba of the processing module 3 B.
- FIG. 10 is a top view schematically showing an example of a substrate processing apparatus according to a second modification of the present disclosure.
- FIG. 10 differs from FIG. 9 in that the controller boxes 76 A and 76 B are provided at the back surfaces of the exhaust boxes 74 A and 74 B and the supply box 72 is provided at the entire floor surface.
- the other configurations are the same as those in FIG. 10 .
- a plurality of pipes from the supply box 72 to the final valve installation parts 75 A and 75 B can be arranged at a position indicated by a dotted rectangular line BB.
- an arrival time when a gas is supplied from the supply box 72 to the nozzle 44 a of the processing module 3 A via the valve 40 a and the pipe 10 Aa of the processing module 3 A may be the same as an arrival time when the same gas is supplied from the supply box 72 to the nozzle 44 a of the processing module 3 B via the valve 40 a and the pipe 10 Ba of the processing module 3 B.
- FIG. 11 is a view showing a gas supply system according to a third modification of the present disclosure.
- FIG. 11 illustrates a gas supply system 34 for supplying a nitrogen gas (N 2 ), an ammonia gas (NH 3 ), an HCDS gas and a cleaning gas (GCL).
- the final valve installation part 75 A has the same configuration as the final valve installation part 75 B, and, explanation of the configuration of the final valve installation part 75 B will not be repeated.
- the HCDS gas can be supplied to the nozzle 44 a of the reaction tubes 10 A and 10 B via the valve 42 a , the MFC 38 a , the valve 41 a , and the valve 40 a of the final valve installation parts 75 A and 75 B.
- the ammonia gas (NH 3 ) can be supplied to the nozzle 44 b of the reaction tubes 10 A and 10 B via the valve 42 b , the MFC 38 b , the valve 41 b , and the valve 40 b of the final valve installation parts 75 A and 75 B.
- the ammonia gas (NH 3 ) can also be supplied to the nozzle 44 c of the reaction tubes 10 A and 10 B via the valve 41 b 2 , and the valve 40 f of the final valve installation parts 75 A and 75 B.
- the nitrogen gas (N 2 ) can be supplied to the nozzle 44 a of the reaction tubes 10 A and 10 B via the valve 42 d , the MFC 38 c , the valve 41 c , and the valve 40 c of the final valve installation parts 75 A and 75 B.
- the nitrogen gas (N 2 ) can also be supplied to the nozzle 44 b of the reaction tubes 10 A and 10 B via the valve 42 d , the MFC 38 d , the valve 41 d , and the valve 40 d of the final valve installation parts 75 A and 75 B.
- the nitrogen gas (N 2 ) can be supplied to the nozzle 44 c of the reaction tubes 10 A and 10 B via the valve 42 d , the MFC 38 f , the valve 41 f , and the valve 40 f of the final valve installation parts 75 A and 75 B.
- the cleaning gas GCL can be supplied to all the nozzles 44 a , 40 b and 40 c of the reaction tubes 10 A and 10 B via the valve 42 g , the MFC 38 g , the valve 41 g , and the valves 40 g , 40 g 2 and 40 g 3 of the final valve installation parts 75 A and 75 B.
- valve 41 a 2 at the downstream of the MFC 38 c , the valve 41 b 3 at the downstream of the MFC 38 b , and the valve 41 g 2 at the downstream of the MFC 38 b are connected to an exhaust system ES.
- a plurality of gas pipes 35 which are distribution pipes on the downstream side of the gas supply system 34 , are branched into a plurality of gas distribution pipes 35 A connected to the final valve installation part 75 A and a plurality of gas pipes 35 B connected to the final valve installation part 75 B.
- the plurality of gas distribution pipes 35 A and the plurality of gas pipes 35 B have the same length.
- the plurality of gas pipes 35 may be appropriately provided with a heater, a filter, a check valve, a buffer tank and the like.
- the valves 40 a to 40 d , 40 f , 40 g , 40 g 2 and 40 g 3 which are a final valve group of the processing module 3 A, are provided in front of three nozzles (also referred to as injectors) 44 a , 44 b and 44 c of the reaction tube 10 A of the processing module 3 A.
- Supply of gas to the injectors can be directly operated by the controller 100 .
- the final valve group (the valves 40 a to 40 d , 40 f , 40 g , 40 g 2 and 40 g 3 ) of FIG. 11 can supply a plurality of gases simultaneously (that is, in mixture) to one injector 44 a , 44 b or 44 c .
- the cleaning gas GCL from one distribution pipe can be supplied to all the injectors 44 a , 44 b and 44 c .
- the valves 40 a to 40 d , 40 f , 40 g , 40 g 2 and 40 g 3 which are a final valve group of the processing module 3 B, have the same configuration as the final valve group (the valves 40 a to 40 d , 40 f , 40 g , 40 g 2 , 40 g 3 ) of the processing module 3 A.
- Heat histories may be made equal among the plurality of processing modules 3 A and 3 B.
- the footprint required by the substrate processing apparatus 2 is lowered, and it is possible to reduce a use area of a clean room with respect to the required amount of production, which is very advantageous in terms of economy.
- the present disclosure is not limited thereto.
- an inorganic halosilane precursor gas such as a DCS (Si 2 H 4 Cl 6 : dichlorodisilane) gas, an MCS (SiH 3 Cl: monochlorosilane) gas or a TCS (SiHCl 3 : trichlorosilane) gas, a halogen group-non-containing amino-based (amine-based) silane precursor gas such as a 3DMAS (Si [N(CH 3 ) 2 ] 3 H: tris-dimethyl-amino-silane) gas or a BTBAS (SiH 2 [NH(C 4 H 9 )] 2 : bis-tertiary-butyl-amino-silane) gas, or a halogen group-non-containing
- a SiN film it may be possible to form a SiO 2 film, a SiON film, a SiOCN film, a SiOC film, a SiCN film, a SiBN film, a SiBCN film or the like using a nitrogen (N)-containing gas (nitriding gas) such as an ammonia (NH 3 ) gas, a carbon (C)-containing gas such as a propylene (C 3 H 6 ) gas, a boron (B)-containing gas such as a boron trichloride (BCl 3 ) gas, or the like.
- N nitrogen
- nitriding gas such as an ammonia (NH 3 ) gas
- C carbon-containing gas
- C 3 H 6 propylene
- B boron-containing gas
- BCl 3 boron trichloride
- the present disclosure is not limited thereto.
- the present disclosure can also be suitably applied to a case where a wafer W or a film formed on the wafer W is subjected to a process such as oxidation, diffusion, annealing, etching or the like.
- reaction chambers of three or more processing modules for one gas supply device and supply a gas through supply pipes having the same length.
- present disclosure can be easily applied to an apparatus that executes two equal-time recipes sharing not all but some (for example, Si precursor gas) of gases used in parallel with a predetermined time difference.
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Abstract
Description
- This application is based upon and claims the benefit of priority from Japanese Patent Application No. 2018-165213, filed on Sep. 4, 2018, the entire contents of which are incorporated herein by reference.
- The present disclosure relates to a substrate processing apparatus, and a method of manufacturing a semiconductor device.
- A substrate processing apparatus includes a processing module having a process furnace that processes a plurality of vertically arranged substrates. As such a type of substrate processing apparatus, a substrate processing apparatus including a plurality of processing modules has been proposed in the related art.
- In a substrate processing apparatus including a first processing module and a second processing module, when the same film is formed on a substrate by each of the processing modules, qualities of the films formed by the plurality of processing modules may differ from each other.
- Some embodiments of the present disclosure provide a technique capable of obtaining uniform qualities for films formed by first and second processing modules when forming the same film in the first and second processing modules.
- Other objects and novel features will be apparent from the description of the present disclosure and the accompanying drawings.
- A summary of a representative embodiment of the present disclosure is simply described as shown below.
- According to one embodiment of the present disclosure, there is provided a technique including: a first processing module including a first processing chamber for processing a plurality of vertically arranged substrates; a second processing module including a second processing chamber for processing the plurality of vertically arranged substrates, the second processing chamber being disposed adjacent to the first processing chamber; a first exhaust box storing a first exhaust system configured to exhaust the first processing chamber; a second exhaust box storing a second exhaust system configured to exhaust the second processing chamber; a common supply box configured to control at least one of a flow path and a flow rate of a plurality of process gases supplied into the first and second processing chambers; a first valve group that connects gas pipes from the common supply box to the first processing chamber such that a communication state between the gas pipes and the first processing chamber is controllable; and a second valve group that connects the gas pipes from the common supply box to the second processing chamber such that a communication state between the gas pipes and the second processing chamber is controllable, wherein, in the first processing module and the second processing module, processes of repeating substantially the same gas supply sequence are performed in parallel with each other while having a shift time therebetween so as to form the same film, and wherein the shift time is determined by delaying the gas supply sequence of one of the first processing module and the second processing module so that a supply timing of a predetermined gas among the plurality of process gases does not overlap with the gas supply sequence of the other of the first processing module and the second processing module which has started the processing before the one of the first processing module and the second processing module starts the processing.
-
FIG. 1 is a top view schematically showing an example of a substrate processing apparatus suitably used in an embodiment of the present disclosure. -
FIG. 2 is a longitudinal sectional view schematically showing an example of a substrate processing apparatus suitably used in an embodiment of the present disclosure. -
FIG. 3 is a longitudinal sectional view schematically showing an example of a substrate processing apparatus suitably used in an embodiment of the present disclosure. -
FIG. 4 is a longitudinal sectional view schematically showing an example of a process furnace suitably used in an embodiment of the present disclosure. -
FIG. 5 is a cross-sectional view schematically showing an example of a processing module suitably used in an embodiment of the present disclosure. -
FIG. 6A is a view for explaining an example of control of a recipe by a controller. -
FIG. 6B is a view for explaining an example of control of a recipe by a controller. -
FIG. 6C is a view for explaining an example of control of a recipe by a controller. -
FIG. 7 is a view for explaining another example of control of the recipe by the controller. -
FIG. 8 is a view showing a processing flow for determining a shift amount. -
FIG. 9 is a top view schematically illustrating an example of a substrate processing apparatus according to a first modification. -
FIG. 10 is a top view schematically showing an example of a substrate processing apparatus according to a second modification. -
FIG. 11 is a view showing a gas supply system according to a third modification. - Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the drawings. Throughout the drawings, the same or corresponding components are denoted by the same or corresponding reference numerals, and explanation thereof will not be repeated. A
storage chamber 9 side to be described later is referred to as a front side (forward side), and thetransport chambers processing modules - In the present embodiment, a
substrate processing apparatus 2 is configured as a vertical substrate processing apparatus (hereinafter referred to as a processing apparatus) 2 which carries out a substrate processing process such as heat treatment as one process of a manufacturing process in a method of manufacturing a semiconductor device. - As shown in
FIGS. 1 and 2 , theprocessing apparatus 2 includes twoadjacent processing modules processing module 3A is constituted by aprocess furnace 4A and atransfer chamber 6A. Theprocessing module 3B is constituted by aprocess furnace 4B and atransfer chamber 6B.Transfer chambers process furnaces transfer chamber 8 including atransfer device 7 for transferring a wafer W is disposed adjacent to the front side of thetransfer chambers storage chamber 9 for storing a pod (hoop) 5 for storing a plurality of wafers W is connected to the front side of thetransfer chamber 8. An I/O port 22 is installed on the entire surface of thestorage chamber 9, and thepod 5 is loaded/unloaded into/from theprocessing apparatus 2 via the I/O port 22. -
Gate valves transfer chambers transfer chamber 8, respectively. Pressure detectors are respectively installed in thetransfer chamber 8 and in thetransfer chambers transfer chamber 8 is set to be lower than internal pressures of thetransfer chambers transfer chamber 8 and thetransfer chambers transfer chambers FIG. 3 , aclean unit 62C for supplying clean air into thetransfer chamber 8 is installed on a ceiling of thetransfer chamber 8. Theclean unit 62C is configured to circulate the clean air, for example, an inert gas, in thetransfer chamber 8. By circularly purging an inside of thetransfer chamber 8 with the inert gas, the inside of thetransfer chamber 8 can be made into a clean atmosphere. With such a configuration, it is possible to prevent particles and the like in thetransfer chambers transfer chamber 8 and prevent a natural oxide film from being formed on the wafer W in thetransfer chamber 8 and thetransfer chambers - Since the
processing module 3A and theprocessing module 3B have the same configuration, only theprocessing module 3A will be representatively described below. - As shown in
FIG. 4 , theprocess furnace 4A includes acylindrical reaction tube 10A and aheater 12A as a heating means (heating mechanism) installed on an outer periphery of thereaction tube 10A. The reaction tube is made of, for example, quartz or SiC. Aprocess chamber 14A for processing a wafer W as a substrate is formed inside thereaction tube 10A. Atemperature detection part 16A as a temperature detector is installed in thereaction tube 10A. Thetemperature detection part 16A stands along the inner wall of thereaction tube 10A. - A gas used for substrate processing is supplied into the
process chamber 14A by agas supply mechanism 34 as a gas supply system. The gas supplied by thegas supply mechanism 34 may be changed depending on a type of film to be formed. Here, thegas supply mechanism 34 includes a precursor gas supply part, a reaction gas supply part and an inert gas supply part. Thegas supply mechanism 34 is stored in asupply box 72 to be described later. Since thesupply box 72 is provided in common for theprocessing modules - The precursor gas supply part, which is a first gas supply part, includes a
gas supply pipe 36 a. Thegas supply pipe 36 a is provided with a mass flow controller (MFC) 38 a, which is a flow rate controller (flow rate control part), andvalves gas supply pipe 36 a is connected to anozzle 44 a penetrating a side wall of a manifold 18. Thenozzle 44 a is vertically installed in thereaction tube 10A and has a plurality of supply holes opened toward wafers W held by a boat 26. A precursor gas is supplied to the wafers W through the supply holes of thenozzle 44 a. - Similarly, a reaction gas is supplied to the wafers W from the reaction gas supply part, which is a second gas supply part, through a
supply pipe 36 b, anWC 38 b, avalve 41 b, avalve 40 b and anozzle 44 b. An inert gas is supplied to the wafers W from the inert gas supply part throughsupply pipes MFCs valves valves nozzles nozzle 44 b is vertically installed in thereaction tube 10A and has a plurality of supply holes opened toward the wafers W held by the boat 26. The precursor gas is supplied to the wafers W through the supply holes of thenozzle 44 b. - In addition, the
gas supply mechanism 34 is provided with a third gas supply part for supplying a reaction gas, a precursor gas, or an inert gas or a cleaning gas that does not directly contribute to the substrate processing, to the wafers W. The reaction gas is supplied to the wafers W from the third gas supply part through asupply pipe 36 e, anWC 38 e, avalve 41 e, avalve 40 e and anozzle 44 c. The inert gas or the cleaning gas is supplied to the wafers W from the inert gas supply part through asupply pipe 36 f, anWC 38 f, avalve 41 f, avalve 40 f and anozzle 44 c. Thenozzle 44 c is vertically installed in thereaction tube 10A and has a plurality of supply holes opened toward the wafers W held by the boat 26. The precursor gas is supplied to the wafers W through the supply holes of thenozzle 44 c. - Three
nozzles reaction tube 10A, so that three types of precursor gases can be supplied into thereaction tube 10A in a predetermined sequence or in a predetermined cycle.Valves nozzles reaction tube 10A are final valves and are provided in a finalvalve installation part 75A to be described later. Similarly, threenozzles Valves nozzles valve installation part 75B to be described later. - A plurality of
gas pipes 35 on the output side of thevalves 41 a to 41 f are branched into a plurality ofgas distribution pipes 35A respectively connected to thevalves reaction tube 10A and a plurality ofgas distribution pipes 35B respectively connected to thevalves valves 41 a to 41 f and thevalves 40 a to 40 f. The plurality ofgas pipes 35 may be regarded as gas pipes in common for thereaction tubes 10A and 10B. - An
exhaust pipe 46A is attached to the manifold 18A. Avacuum pump 52A as a vacuum exhaust device is connected to theexhaust pipe 46A via apressure sensor 48A as a pressure detector (pressure detection part) for detecting the internal pressure of theprocess chamber 14A and an APC (Auto Pressure Controller) valve 50A as a pressure regulator (pressure regulation part). With such a configuration, the internal pressure of theprocess chamber 14A can be set to a processing pressure corresponding to the processing. An exhaust system A is mainly constituted by theexhaust pipe 46A, the APC valve 50A and thepressure sensor 48A. The exhaust system A is stored in anexhaust box 74A to be described later. Onevacuum pump 52A may be installed in common for theprocessing modules - The
process chamber 14A accommodates therein aboat 26A as a substrate holder which vertically supports a plurality of wafers W, for example, 25 to 150 wafers W, in a shelf shape. Theboat 26A is supported above a heat insulating part 24A by arotary shaft 28A penetrating alid 22A and the heat insulating part 24A. Therotary shaft 28A is connected to arotation mechanism 30A installed below thelid 22A. Therotary shaft 28A is configured to be rotatable in a state in which the inside of thereaction tube 10A is air-tightly sealed. Thelid 22A is vertically driven by aboat elevator 32A as an elevation mechanism. Thus, theboat 26A and thelid 22A are integrally raised and lowered, and theboat 26A is loaded/unloaded into/from thereaction tube 10A. - Transfer of the wafers W onto the
boat 26A is performed in thetransfer chamber 6A. As shown inFIG. 1 , aclean unit 60A is installed on one side in thetransfer chamber 6A (an outer side of thetransfer chamber 6A, or a side opposite to a side facing thetransfer chamber 6B). Theclean unit 60A is configured to circulate clean air (for example, an inert gas) inside thetransfer chamber 6A. The inert gas supplied into thetransfer chamber 6A is exhausted from thetransfer chamber 6A by anexhaust unit 62A installed on the side surface facing theclean unit 60A (the side surface facing thetransfer chamber 6B) with theboat 26A interposed between theexhaust unit 62A and theclean unit 60A, and is resupplied from theclean unit 60A into thetransfer chamber 6A (circulation purge). The internal pressure of thetransfer chamber 6A is set to be lower than the internal pressure of thetransfer chamber 8. Further, the oxygen concentration in thetransfer chamber 6A is set to be lower than the oxygen concentration in the atmosphere. With such a configuration, it is possible to prevent a natural oxide film from being formed on the wafers W during the transfer operation of the wafers W. - A
controller 100 is connected to and controls therotation mechanism 30A, theboat elevator 32A, theMFCs 38 a to 38 f and thevalves 41 a to 40 f of the gas supply mechanism 34A, and the APC valve 50A. Thecontroller 100 includes, for example, a microprocessor (computer) including a CPU, and is configured to control the operation of theprocessing apparatus 2. An input/output device 102 configured as, for example, a touch panel or the like is connected to thecontroller 100. Onecontroller 100 may be installed for each of theprocessing module 3A and theprocessing module 3B, or may be installed in common for them. - A
storage part 104 may be a storage device (hard disk or flash memory) incorporated in thecontroller 100, or an external portable recording device (magnetic tape, magnetic disk such as flexible disk or hard disk, optical disk such as CD or DVD, magneto-optical disk such as MO, or a semiconductor memory such as USB memory or memory card). A program may be provided to the computer using communication means such as the Internet or a dedicated line. When thecontroller 100 reads the program from thestorage part 104 according to an instruction from the input/output device 102 as necessary and executes a process according to a read recipe, theprocessing apparatus 2 execute a desired process under control of thecontroller 100. Thecontroller 100 is stored in a controller box 76 (76A and 76B). When thecontroller 100 is installed for each of theprocessing module 3A and theprocessing module 3B, the controller 100 (A) for controlling theprocessing module 3A is installed in thecontroller box 76A, and the controller 100 (B) for controlling theprocessing module 3B is installed in thecontroller box 76B. - Next, a process of forming a film on a substrate (film-forming process) using the above-described
processing apparatus 2 will be described. Here, an example of forming a silicon nitride (SiN) film on a wafer W by supplying a hexachlorodisilane (Si2Cl6, abbreviation: HCDS) gas as a first process gas (precursor gas) and an ammonia (NH3) as a second process gas (reaction gas) to the wafer W will be described. In the following description, the operations of various parts constituting theprocessing apparatus 2 are controlled by thecontroller 100. - In the film-forming process according to the present embodiment, a SiN film is formed on a wafer W by repeating a step of supplying an HCDS gas to the wafer W in the
process chamber 14A, a step of removing the HCDS gas (residual gas) from the inside of theprocess chamber 14A, a step of supplying an NH3 gas to the wafer W in theprocess chamber 14A, and a step of removing the NH3 gas (residual gas) from the inside of theprocess chamber 14A a predetermined number of times (once or more). In the present disclosure, this film formation sequence is written as follows for the sake of convenience. -
(HCDS→NH3)×n⇒SiN - The
gate valve 90A is opened, and the wafer W is transferred to theboat 26A. When a plurality of wafers W are loaded into theboat 26A (wafer charging), thegate valve 90A is closed. Theboat 26A is loaded into theprocess chamber 14A by theboat elevator 32A (boat loading), and the lower opening of thereaction tube 10A is in a state of being air-tightly closed (sealed) by thelid 22A. - The
process chamber 14A is vacuum-exhausted (evacuated) by thevacuum pump 52A so that the inside of theprocess chamber 14A reaches a predetermined pressure (degree of vacuum). The internal pressure of theprocess chamber 14A is measured by thepressure sensor 48A, and the APC valve 50A is feedback-controlled based on the measured pressure information. Further, the wafer W in theprocess chamber 14A is heated by theheater 12A so as to have a predetermined temperature. At this time, a condition of conduction of current to theheater 12A is feedback-controlled based on the temperature information detected by thetemperature detection part 16A so that theprocess chamber 14A has a predetermined temperature distribution. Further, the rotation of theboat 26A and the wafer W by therotation mechanism 30A is started. - When the internal temperature of the
process chamber 14A is stabilized at a preset processing temperature, an HCDS gas is supplied to the wafer W in theprocess chamber 14A. The HCDS gas is controlled by theMFC 38 a to have a desired flow rate, and is supplied into theprocess chamber 14A via thegas supply pipe 36 a, thevalves nozzle 44 a. Thevalve 40 a opens when thevalve 41 a ofprocessing module 3A and/or 3B opens. Thevalve 40 a operates on interlocking basis, moreover thevalve 40 a could operates more slowly than thevalve 41 a for longer life time. That is achieved by restricting an air flow for an air-operated valve or by limiting applied voltage for a solenoid-operated valve. For example, a transition time of thevalve 41 a from close to open could be set to 5 ms whereas that ofvalve 40 a is 3 ms. The same applies to theother valves 41 b to 41 f. - Next, the supply of the HCDS gas is stopped, and the inside of the
process chamber 14A is vacuum-exhausted by thevacuum pump 52A. At this time, an N2 gas may be supplied as an inert gas from the inert gas supply part into theprocess chamber 14A (inert gas purge). - Next, an NH3 gas is supplied to the wafer W in the
process chamber 14A. The NH3 gas is controlled by theMFC 38 b to have a desired flow rate, and is supplied into theprocess chamber 14A via thegas supply pipe 36 b, thevalves nozzle 44 b. - Next, the supply of the NH3 gas is stopped, and the inside of the
process chamber 14A is vacuum-exhausted by thevacuum pump 52A. At this time, an N2 gas may be supplied from the inert gas supply part into theprocess chamber 14A (inert gas purge). By performing a cycle of performing the above-described four steps a predetermined number of times (once or more), a SiN film having a predetermined composition and a predetermined film thickness can be formed on the wafer W. - After the film having a predetermined film thickness is formed, an N2 gas is supplied from the inert gas supply part, the inside of the
process chamber 14A is replaced with the N2 gas, and the internal pressure of theprocess chamber 14A is restored to the normal pressure. Thereafter, thelid 22A is lowered by theboat elevator 32A, and theboat 26A is unloaded from thereaction tube 10A (boat unloading). Thereafter, the processed wafer W is taken out of theboat 26A (wafer discharging). - Thereafter, the wafer W may be stored in the
pod 5 and unloaded out of theprocessing apparatus 2, or may be transferred to theprocess furnace 4B and continuously subjected to substrate processing such as annealing. When processing the wafer W in theprocess furnace 4B continuously after processing of the wafer W in theprocess furnace 4A, thegate valves boat 26A to theboat 26B. Subsequent loading/unloading of the wafer W into/from theprocess furnace 4B is performed in the same procedure as the above-described substrate processing by theprocess furnace 4A. Further, the substrate processing in theprocess furnace 4B is performed, for example, in the same procedure as the above-described substrate processing by theprocess furnace 4A. - The processing conditions at the time of forming the SiN film on the wafer W are exemplified as follows.
-
- Processing temperature (wafer temperature): 100 degrees C. to 800 degrees C.
- Processing pressure (internal pressure of process chamber): 5 Pa to 4,000 Pa
- HCDS gas supply flow rate: 1 sccm to 2,000 sccm
- NH3 gas supply flow rate: 100 sccm to 30,000 sccm
- N2 gas supply flow rate: 1 sccm to 50,000 sccm
- By setting the processing conditions to value within the respective ranges, the film-forming process can be appropriately performed.
- Next, a back surface configuration of the
processing apparatus 2 will be described. - For example, if the boat 26 is broken, the boat 26 needs to be replaced. If the reaction tube 10 is broken or needs to be cleaned, it is necessary to remove the reaction tube 10. In this manner, when maintenance for the transfer chamber 6 or the process furnace 4 is performed, the maintenance is performed from maintenance areas A and B on the back side of the
processing apparatus 2. - As shown in
FIG. 1 ,maintenance ports 78A and 78B are respectively formed on the back sides of thetransfer chambers maintenance port 78A is formed on thetransfer chamber 6B side of thetransfer chamber 6A, and the maintenance port 78B is formed on thetransfer chamber 6A side of thetransfer chamber 6B. Themaintenance ports 78A and 78B are opened and closed bymaintenance doors 80A and 80B, respectively. Themaintenance doors 80A and 80B are configured to be rotated withhinges 82A and 82B as base shafts, respectively. Thehinge 82A is installed on thetransfer chamber 6B side of thetransfer chamber 6A, and the hinge 82B is installed on thetransfer chamber 6A side of thetransfer chamber 6B. That is, thehinges 82A and 82B are installed adjacent to each other near the inner corner located on the adjacent surfaces on the back sides of thetransfer chambers processing module 3B side on the back surface of theprocessing module 3A and on theprocessing module 3A side on the back surface of theprocessing module 3B. - As indicated by imaginary lines, as the
maintenance doors 80A and 80B are horizontally rotated backward on the back side of thetransfer chambers hinges 82A and 82B, the backside maintenance ports 78A and 78B are opened. Themaintenance door 80A is configured to be opened to the left at 180 degrees toward thetransfer chamber 6A. The maintenance door 80B is configured to be opened to the right at 180 degrees toward thetransfer chamber 6B. That is, themaintenance door 80A is rotated clockwise toward thetransfer chamber 6A and the maintenance door 80B is rotated counterclockwise toward thetransfer chamber 6A. In other words, themaintenance doors 80A and 80B are rotated in opposite directions. Since themaintenance doors 80A and 80B are configured to be removable, they may be removed for maintenance. - A
utility system 70 is installed near the back sides of thetransfer chamber utility system 70 is interposed between maintenance areas A and B. When maintenance of theutility system 70 is performed, the maintenance is performed from the maintenance areas A and B. - The
utility system 70 includes finalvalve installation parts exhaust boxes supply box 72 andcontroller boxes - The
utility system 70 is constituted by theexhaust boxes supply box 72 and thecontroller boxes transfer chambers valve installation parts exhaust boxes utility system 70 are formed on the maintenance areas A and B, respectively. Thesupply box 72 is disposed on the side opposite to the side adjacent to thetransfer chamber 6A of theexhaust box 74A, and a supply box 72B is disposed adjacent to the side adjacent to thetransfer chamber 6B on theexhaust box 74B. - As shown in
FIG. 3 , in theprocessing module 3A, the finalvalve installation part 75A where the final valves (thevalves gas supply mechanism 34 are installed is disposed above theexhaust box 74A. Preferably, it is disposed just above (right above) theexhaust box 74A. With such a configuration, even when thesupply box 72 is disposed away from the housing side, since the pipe length from the final valves to the process chamber can be shortened, the quality of film formation can be improved. Although not shown inFIG. 3 , in addition to thevalves valves valve installation part 75A. - In addition, although not shown, in the
processing module 3B, the finalvalve installation part 75B where the final valves (thevalves gas supply mechanism 34 are installed is disposed above theexhaust box 74B. Preferably, it is disposed just above (right above) theexhaust box 74B. With such a configuration, even when thesupply box 72 is disposed away from the housing side, since the pipe length from the final valves to the process chamber can be shortened, the quality of film formation can be improved. In addition to thevalves valves valve installation part 75B. - As shown in
FIG. 5 , the configurations of theprocessing modules utility system 70 are arranged in plane symmetry with respect to an adjacent surface S1 of theprocessing modules reaction tubes 10A and 10B are also arranged in plane symmetry with respect to the adjacent surface S1 of theprocessing modules exhaust pipes 46A and 46B from theprocessing modules exhaust boxes processing modules final valves valve installation parts nozzles processing modules - In
FIG. 5 , thefinal valve 40A indicates thevalves 40 a to 40 f of theprocessing module 3A, and thefinal valve 40B indicates thevalves 40 a to 40 f of theprocessing module 3B. Thenozzle 44A indicates thenozzles 44 a to 44 c of theprocessing module 3A, and thenozzle 44B indicates thenozzles 44 a to 44 c of theprocessing module 3B. For example, when a pipe 10Aa corresponds to a pipe between thevalve 40 a of theprocessing module 3A and thenozzle 44 a of theprocessing module 3A and a pipe 10Ba corresponds to a pipe between thevalve 40 a of theprocessing module 3B and thenozzle 44 a of theprocessing module 3B, the pipe 10Aa and the pipe 10Ba have substantially the pipe length. In addition, when a pipe 10Ab corresponds to a pipe between thevalve 40 b of theprocessing module 3A and thenozzle 44 b of theprocessing module 3A and a pipe 10Bb corresponds to a pipe between thevalve 40 b of theprocessing module 3B and thenozzle 44 b of theprocessing module 3B, the pipe 10Ab and the pipe 10Bb have substantially the pipe length. Thus, an arrival time when a gas is supplied from thesupply box 72 to thenozzle 44 a of theprocessing module 3A via thevalve 40 a and the pipe 10Aa of theprocessing module 3A may be the same as an arrival time when the same gas is supplied from thesupply box 72 to thenozzle 44 a of theprocessing module 3B via thevalve 40 a and the pipe 10Ba of theprocessing module 3B. Therefore, recipe management of theprocessing modules controller 100 can be facilitated. Furthermore, as indicated by arrows inFIG. 5 , rotation directions of wafers W in theprocess furnaces - The form of arrangement of the
reaction tubes 10A and 10B is not limited to that shown inFIG. 5 . Thenozzles valve installation parts reaction tubes 10A and 10B may be arranged such that theexhaust pipes 46A and 46B leading to theexhaust boxes reaction tubes 10A and 10B may be disposed in plane symmetry with respect to the adjacent surface S1 of theprocessing modules - Since the
common supply box 72 is provided for theprocessing modules supply box 72 to thefinal valves - In addition, a footprint required by the
substrate processing apparatus 2 is lowered, and it is possible to reduce a use area of a clean room with respect to a required amount of production, which is very advantageous in terms of economy. -
FIGS. 6A, 6B and 6C are views for explaining an example of control of a recipe by the controller. A recipe is one describing a supply amount of each process gas such as reaction gas and precursor gas, a target vacuum degree (or an exhaust speed), process chamber temperature and the like. in a time series, and may include a pattern repeated at a fixed cycle. The term recipe may, in a narrow sense, refer to one cycle of this repeated pattern. When a created recipe is executed by thecontroller 100, theprocessing apparatus 2 executes a desired process under the control of thecontroller 100. When theprocessing apparatus 2 includes theprocessing modules processing modules - In the present embodiment, the
controller 100 that manages the recipe has a mutual monitoring function so that the same process gas cannot be simultaneously flown into thereaction tubes 10A and 10B of theprocessing modules controller 100 mutually monitors the recipe for theprocessing modules processing modules vacuum pump 52A to evacuate thereaction tubes 10A and 10B or purge time for purging thereaction tubes 10A and 10B with an N2 gas. The mutual monitoring and control includes a valve level and a recipe level. -
FIG. 6A shows an example of recipes RC1 and RC2 executed respectively by theprocessing modules reaction tubes 10A and 10B, the recipes RC1 and RC2 of substantially the same gas supply sequence are repeatedly executed for multiple cycles. Each of the recipes RC1 and RC2 includes process steps PS1 to PS9 which are substantially the same gas supply sequence. The process step PS1 is a process (A) of supplying a process gas A into thereaction tube 10A or 10B. The process step PS4 is a process (B) of supplying a process gas B into thereaction tube 10A or 10B. The process step PS7 is a process (C) of supplying a process gas C into thereaction tube 10A or 10B. The process steps PS2, PS5 and PS8 are performed after the process steps PS1, PS4 and PS7, respectively. The process steps PS2, PS5 and PS8 are processes (V) of evacuating thereaction tube 10A or 10B by setting the target vacuum degree to a relatively low pressure (for example, 10 to 100 Pa). The process steps PS3, PS6 and PS9 are performed after the process step PS2, PS5 and PS8, respectively. The process steps PS3, PS6 and PS9 are processes (P) of evacuating thereaction tubes 10A and 10B while flowing a purge gas (N2 gas) into thereaction tubes 10A and 10B. - As shown in
FIG. 6A , in the recipes RC1 and RC2, when the recipes RC1 and RC2 are started with a short time difference with respect to time T, it is assumed that the same process gases A, B and C are simultaneously used. That is, the process steps PS1, PS4 and PS7 of theprocessing module 3A and the process steps PS1, PS4 and PS7 of theprocessing module 3B may be executed simultaneously. However, there is only one mass flow controller (MFC) corresponding to each of the process gases A, B and C. As shown inFIG. 4 , in thegas supply mechanism 34 stored in thesupply box 72, for example, a mass flow controller for the process gas A is theMFC 38 a, a mass flow controller for the process gas B is theMFC 38 b, and a mass flow controller for the process gas C is theMFC 38 c. For this reason, when the same process gas A, B or C is simultaneously used in theprocessing modules processing modules modules processing modules processing modules processing modules - In the control of the valve level, the
controllers 100 of theprocessing module valves 40 a to 40 c of theprocessing module 3A and an opening/closing state of thevalves 40 a to 40 c of theprocessing module 3B between theprocessing modules - For example, when the corresponding final valves (that is, connected by the same distribution pipe) of the
processing module 3B on the other side are closed, thecontroller 100 of theprocessing module 3A opens the final valves of itsown processing module 3A according to the recipe. On the other hand, when the corresponding final valves (that is, connected by the same distribution pipe) of theprocessing module 3B on the other side are opened, thecontroller 100 of theprocessing module 3A performs control to interrupt the recipe of itsown processing module 3A until the final valves are closed. In addition, when the corresponding final valves (that is, connected by the same distribution pipe) of theprocessing module 3A on the other side are closed, thecontroller 100 of theprocessing module 3B opens the final valves of itsown processing module 3B according to the recipe. On the other hand, when the corresponding final valves (that is, connected by the same distribution pipe) of theprocessing module 3A on the other side are opened, thecontroller 100 of theprocessing module 3B performs control to interrupt the recipe of itsown processing module 3B until the final valves are closed. - On the other hand, in the control of the process recipe level, the
controller 100 monitors progresses of the recipes RC1 and RC2 at each timing such as the start of the recipes RC1 and RC2 or before the boat loading, etc. and predicts the timing of sequence in which the used gases A, B and C flow. In theprocessing modules processing modules controller 100 calculates a sequence in which the same process gas does not flow at the same time, and performs control to shift the timing of the supply of the gas used. - That is, in the
processing modules processing modules processing modules - For example, as shown in
FIG. 6A , it is assumed that thecontroller 100 predicts the timing of the gas supply sequence in which the process gases A, B and C used flow when the recipes RC1 and RC2 start. That is, it is assumed that the same process gas A, B or C is predicted to flow into theprocessing modules controller 100 calculates a sequence in which the same process gas does not flow at the same time, and performs control to shift the timing of supplying the gas used. That is, before the start of the recipes RC1 and RC2, thecontroller 100 generates the recipe RC2 for which the timing of the gas supply sequence is shifted in time so that the same process gas A, B or C does not flow at the same timing in theprocessing modules FIG. 6B , in the recipe RC2 performed in theprocessing module 3B, a process step PSA1 is automatically added by thecontroller 100 before the process step PS1. The process step PSA1 is, for example, a process (P) of evacuating the reaction tube 10B while flowing a purge gas (N2 gas) into the reaction tube 10B. When the recipe RC2 (PS1 to PS9) is executed for a plurality of cycles, the process step PSA1 is added only before the first process step PS1 of the first cycle. The process step PSA1 is not added before the process step PS1 in the second and subsequent cycles of the recipe RC2 (PS1 to PS9). That is, after performing the last process step PS9 of the first cycle of the recipe RC2 (PS1 to PS9), the first process step PS1 of the second cycle of the recipe RC2 (PS1 to PS9) is performed. Similarly, after performing the last process step PS9 of the second cycle of the recipe RC2 (PS1 to PS9), the first process step PS1 of the third cycle of the recipe RC2 (PS1 to PS9) is performed. - In the example of
FIG. 6B , among the process gases A, B and C which cannot be flown at the same time, the one having the longest supply time (tmax) in one cycle of the recipes RC1 and RC2 is selected (here PS7), and a recipe time difference tdiff between theprocessing modules FIG. 6B , the start time of PS1 in the recipe RC2 is delayed by a time when the process step PSA1 is added, as compared with the start time of PS1 in the recipe RC1. That is, the adjusted time difference tdiff_adj=tmax n*tcycle (where, n is an arbitrary integer and tcycle is the time of one cycle of the recipe: the time from the start time of PS1 to the end time of PS7). It is assumed that tmax≤tcycle/2. - If it is preferable to reduce the delay time, depending on the current time difference (the advancing time of the recipe RC2 of the
current processing module 3B based on the recipe RC1 of theprocessing module 3A) tdiff, -
{ if (tmax ≤ (|tdiff | % tcycle) < tmax + tcycle/2) then {the advancing processing module is delayed by (|tdiff|%tcycle) − tmax (i.e., tdiff_adj = tdiff − ((|tdiff| % tcycle)− tmax));} else if ((|tdiff| % tcycle) < tmax) then {the delayed PM is delayed by (|tdiff | % tcycle) − tmax;} Else {the delayed processing module is delayed by tcycle − (|tdiff| % tcycle) − tmax;} } Where, % is an operator of the least nonnegative remainder. When 0<(tdiff%tcycle)<tcycle/2, the processing module 3A is in progress .Otherwise, the processing module 3B is in progress. - The
controller 100 also has an adjustment function to make the heat histories of theprocess chambers 14A and 14B equal to each other. It is possible to set the determined time and automatically adjust the time for waiting for the purge time set for the history between batches as well as the recipes in simultaneous progression. That is, in the last cycle in which the recipes RC1 and RC2 of theprocessing modules FIG. 6B are repeatedly executed in multiple cycles, the process step PS9 of the recipe RC1 of theprocessing module 3A will end earlier in time than the process step PS9 of the recipe RC2 of theprocessing module 3B. Therefore, the heat history of theprocess chamber 14A and the heat history of the process chamber 14B will be different from each other. - As shown in
FIG. 6C , in the last cycle of the recipe RC1 of theprocessing module 3A, a process step PSA2 of the same time as PSA1 is automatically added by thecontroller 100 after the process step PS9. Thus, the heat history of theprocess chamber 14A and the heat history of the process chamber 14B can be equal to each other. The process step PSA2 is, for example, a process (P) of evacuating thereaction tube 10A while flowing a purge gas (N2 gas) into thereaction tube 10A. - The
processing module 3A and theprocessing module 3B basically operate asynchronously, and dependency between theprocessing module 3A and theprocessing module 3B is small. Therefore, even if one of theprocessing module 3A and theprocessing module 3B is stopped due to a failure or the like, the other of theprocessing module 3A and theprocessing module 3B can continue the processing. -
FIG. 7 is a view for explaining another example of control of the recipe by the controller.FIG. 7 shows four examples in which processing times of process steps (PSA1 to PSA4) added before the process step PS1 are different in the recipe RC2 performed in theprocessing module 3B. - A recipe RC21 shown in
FIG. 7 is the same as the recipe RC2 shown inFIG. 6B , and is based on a rule that the advancing time of the recipe RC21 is shifted by the supply time of the process gas C for which the supply time in one cycle is the longest. Therefore, in the recipe RC21, the process step PSA1 is added before the process step PS1. Thus, after the process step PS7 of supplying the gas C to theprocessing module 3A is completed, the process step PS7 of supplying the gas C to theprocessing module 3B is subsequently started. Alternatively, it can be said that the recipe RC21 is based on a rule that the exhaust timing of the process gases A and B and the exhaust timing of the process gas C do not overlap with each other. According to this rule, when the process gas C undergoes a gas phase reaction with the process gases A and B, it is possible to suppress generation of undesirable solids in the upstream of the common vacuum pump 52. Alternatively, it can be said that the recipe RC21 is based on a rule that the end of the purge process of the process gases A, B and C does not overlap with the exhaust process of any gas. According to this rule, it is possible to prevent an increase in residual gas concentration at the end of purge. - In a recipe RC22 shown in
FIG. 7 , a process step PSA2 is added before the process step PS1. Thus, after using the process gases A and B in theprocessing module 3A (after the end of the process step PS4), the process step PS1 of using the process gas A is started in theprocessing module 3B. - In a recipe RC23 shown in
FIG. 7 , a process step PSA3 is added before the process step PS1. The recipe RC23 is based on a rule that the phase of the recipe is simply inverted between theprocessing modules gas supply system 34 and the finalvalve installation parts processing modules - In a recipe RC24 shown in
FIG. 7 , a process step PSA4 is added before the process step PS1. Thus, after the end of the supply of the process gas C to theprocessing module 3B (after the end of the process step PS7), the supply of the process gas C to theprocessing module 3A in the second cycle is subsequently started (the process step PS7 in the second cycle). When theprocessing modules processing module 3B. - As shown in the recipes RC1 to RC4 of
FIG. 7 , the start timing of the process step PS1 of using the process gas A in theprocessing module 3B can be optimally controlled by a set parameter and a predicted sequence. - However, none of the recipes RC1 and RC21 to RC24 in
FIG. 7 can be said to be guaranteed that all the gas supply timings do not overlap with each other for any recipe. -
FIG. 8 is a view showing a processing flow for determining an amount of shift in which the supply timings do not overlap with each other. The processing flow ofFIG. 8 is to calculate the required amount of shift starting from a state in which a time difference tadj between the cycles of the recipes of theprocessing modules - Step S1: 0 is substituted for a variable tadj_add indicating the time to delay the recipe of the
processing module 3B further than the current time difference tadj. - Step S2: The following process (steps S21 to S23) is performed on each of the process gases by sequentially selecting one (gas x) from the process gases.
- Step S21: In one specific cycle of the recipe in the
processing module 3A, the supply section of the gas x is sequentially selected from the top, and its start time t1xi_start and its end time t1xi_end are specified. Where, i is an index of nx existing supply sections. - Step S22: It is checked whether or not there is supply of gas x which starts between the start time t1xt_start and the end time t1xi_end in any one cycle of the recipe in the
processing module 3B having a time tadj difference from theprocessing module 3A, and a maximum value of the delay time required to eliminate overlap of supply sections is updated. Specifically, t2xj_start satisfying the condition of t1xi_start≤t2xj_start<t1xi_end is searched from all cycle supply sections j=1 . . . nx, and if tadj_add<t2xj_start−t1xi_start, then t2xj_start−t1xi_start is substituted for tadj_add. - Step S23: If the index i has not reached nx, the process returns to step S21, and if it has reached nx, the process proceeds to the next step (step S3).
- Step S3: If the held variable tadj_add is zero, the current time difference tadj is determined (that is, tadj is determined as tdiff_adj or tmax), and the process is ended.
- When the variable tadj_add add is non-zero in step S3, if tcycle<tdiff_adj+tadj in step S4, the process is interrupted because it is impossible to eliminate the overlap.
- If tcycle≥tdiff_adj+tadj in step S4, tdiff_adj−tadj is substituted for tdiff_adj in step S5, and the process returns to step S1.
- The above description is summarized as follows.
- A substrate processing apparatus (2) includes:
- a first processing module (3A) including a first processing chamber (reaction tube (10A)) for processing a plurality of vertically arranged substrates (W);
- a second processing module (3A) including a second processing chamber (reaction tube (10B)) for processing the plurality of vertically arranged substrates, the second processing chamber (10B) being disposed adjacent to the first processing chamber (10A);
- a first exhaust box (74A) storing a first exhaust system configured to exhaust the first processing chamber (10A);
- a second exhaust box (74B) storing a second exhaust system configured to exhaust the second processing chamber (10B);
- a common supply box (72) that controls at least one of a flow path and a flow rate of a plurality of process gases (A, B and C) supplied into the first and second processing chambers (10A and 10B);
- a first valve group (40A and 40 a to 40 f) that connects gas pipes from the common supply box (72) to the first processing chamber (10A) such that a communication state between the gap pipes and the first processing chamber is controllable; and
- a second valve group (40B and 40 a to 40 f) that connects the gas pipes from the common supply box to the second processing chamber (10B) such that a communication state between the gas pipes and the second processing chamber.
- In the first processing module and the second processing modules (3A and 3B), processes of repeating substantially the same gas supply sequence (recipes RC1 and RC2) are performed in parallel with each other while having a shift time therebetween so as to form the same film.
- The shift time is determined by a method (insertion of PSA1 to recipe RC2) of delaying the gas supply sequence (PS7 of recipe RC2) of one (3B) of the processing modules (3A and 3B) so that a supply timing of a predetermined gas among the plurality of process gases (A, B and C) does not overlap with the gas supply sequence (PS7 of recipe RC1) of the other (3A) of the processing modules (3A and 3B) which has started the processing before the one of the processing modules (3A and 3B) starts the processing.
- In the substrate processing apparatus (2),
-
- The first and second processing modules (3A and 3B), the first and second exhaust boxes (74A and 74B) and the first and second valve groups (40A and 40B) are respectively configured and arranged in plane symmetry with each other, based on surfaces (S1 and S2) to which the first and second processing modules (3A and 3B) are adjacent.
- Lengths of a plurality of gas pipes (10Aa and 10Ab) between the first valve group (40A) and the first processing module (3A) are equal to lengths of the corresponding gas pipes (10Ba and 10Bb) between the second valve group (40B) and the second processing module (3B).
- In the substrate processing apparatus (2),
-
- The plurality of process gases includes three types of precursor gases.
- The gas supply sequence (recipes RC1 and RC2) is to periodically supply three types of process gases (A, B and C) at time intervals to one processing chamber. While the gas supply sequence is being performed in parallel in the first and second processing modules (3A and 3B), there is a timing (in
FIG. 6B , PS2 and PS3 of RC1, PSA1 of RC2, PS5 and PS6 of RC1, and PS2 and PS3 of RC2) at which each of the three types of process gases (A, B and C) is not supplied to any of the first and second processing modules (3A and 3B).
- The substrate processing apparatus (2) further includes:
-
- a first process controller (controller 100(A)) that controls the first processing module (3A), the first exhaust box (74A) and the first valve group (40A); and
- a second process controller (controller 100 (B)) that controls the second processing module (3B), the second exhaust box (74B) and the second valve group (40B).
- The first and second process controllers (100 (A) and 100 (B)) transmit information substantially indicating circulation states of the first and second valve groups (40A and 40B) controlled respectively by the first and second process controllers (100 (A) and 100 (B)) to other process controllers (100 (A) and 100 (B)), and the first and second processing modules (3A and 3B) are operated asynchronously except while prohibiting simultaneous supply of the same gas valve by the first and second valve groups (40A and 40B).
- Several modifications will be described below.
-
FIG. 9 is a top view schematically showing an example of a substrate processing apparatus according to a first modification of the present disclosure. - As shown in
FIG. 9 , autility system 70 is constituted by asupply box 72,exhaust boxes controller boxes supply box 72, theexhaust boxes controller boxes transfer chambers exhaust box 74A is disposed at an outer corner of the back surface of thetransfer chamber 6A opposite to thetransfer chamber 6B. Theexhaust box 74B is disposed at an outer corner of the back surface of thetransfer chamber 6B opposite to thetransfer chamber 6A. That is, theexhaust boxes transfer chambers exhaust boxes - The
supply box 72 is centrally located between theexhaust boxes exhaust boxes supply box 72 is disposed in contact with the back surfaces of thetransfer chamber valve installation parts process furnaces valve installation parts supply box 72. A plurality of pipes are arranged from thesupply box 72 to the finalvalve installation parts valve installation parts supply box 72. Thecontroller boxes supply box 72. - Even with such a configuration, similarly to the one described in
FIG. 5 , an arrival time when a gas is supplied from thesupply box 72 to thenozzle 44 a of theprocessing module 3A via thevalve 40 a and the pipe 10Aa of theprocessing module 3A may be the same as an arrival time when the same gas is supplied from thesupply box 72 to thenozzle 44 a of theprocessing module 3B via thevalve 40 a and the pipe 10Ba of theprocessing module 3B. -
FIG. 10 is a top view schematically showing an example of a substrate processing apparatus according to a second modification of the present disclosure.FIG. 10 differs fromFIG. 9 in that thecontroller boxes exhaust boxes supply box 72 is provided at the entire floor surface. The other configurations are the same as those inFIG. 10 . A plurality of pipes from thesupply box 72 to the finalvalve installation parts - Even with such a configuration, similarly to the one described in
FIG. 5 , an arrival time when a gas is supplied from thesupply box 72 to thenozzle 44 a of theprocessing module 3A via thevalve 40 a and the pipe 10Aa of theprocessing module 3A may be the same as an arrival time when the same gas is supplied from thesupply box 72 to thenozzle 44 a of theprocessing module 3B via thevalve 40 a and the pipe 10Ba of theprocessing module 3B. -
FIG. 11 is a view showing a gas supply system according to a third modification of the present disclosure. -
FIG. 11 illustrates agas supply system 34 for supplying a nitrogen gas (N2), an ammonia gas (NH3), an HCDS gas and a cleaning gas (GCL). The finalvalve installation part 75A has the same configuration as the finalvalve installation part 75B, and, explanation of the configuration of the finalvalve installation part 75B will not be repeated. - The HCDS gas can be supplied to the
nozzle 44 a of thereaction tubes 10A and 10B via thevalve 42 a, theMFC 38 a, thevalve 41 a, and thevalve 40 a of the finalvalve installation parts - The ammonia gas (NH3) can be supplied to the
nozzle 44 b of thereaction tubes 10A and 10B via the valve 42 b, theMFC 38 b, thevalve 41 b, and thevalve 40 b of the finalvalve installation parts nozzle 44 c of thereaction tubes 10A and 10B via thevalve 41b 2, and thevalve 40 f of the finalvalve installation parts - The nitrogen gas (N2) can be supplied to the
nozzle 44 a of thereaction tubes 10A and 10B via thevalve 42 d, theMFC 38 c, thevalve 41 c, and thevalve 40 c of the finalvalve installation parts nozzle 44 b of thereaction tubes 10A and 10B via thevalve 42 d, theMFC 38 d, thevalve 41 d, and thevalve 40 d of the finalvalve installation parts nozzle 44 c of thereaction tubes 10A and 10B via thevalve 42 d, theMFC 38 f, thevalve 41 f, and thevalve 40 f of the finalvalve installation parts - The cleaning gas GCL can be supplied to all the
nozzles reaction tubes 10A and 10B via the valve 42 g, theMFC 38 g, the valve 41 g, and the valves 40 g, 40g 2 and 40 g 3 of the finalvalve installation parts - Further, the
valve 41 a 2 at the downstream of theMFC 38 c, thevalve 41 b 3 at the downstream of theMFC 38 b, and the valve 41g 2 at the downstream of theMFC 38 b are connected to an exhaust system ES. - As shown in
FIG. 11 , a plurality ofgas pipes 35, which are distribution pipes on the downstream side of thegas supply system 34, are branched into a plurality ofgas distribution pipes 35A connected to the finalvalve installation part 75A and a plurality ofgas pipes 35B connected to the finalvalve installation part 75B. The plurality ofgas distribution pipes 35A and the plurality ofgas pipes 35B have the same length. The plurality ofgas pipes 35 may be appropriately provided with a heater, a filter, a check valve, a buffer tank and the like. - The
valves 40 a to 40 d, 40 f, 40 g, 40g 2 and 40 g 3, which are a final valve group of theprocessing module 3A, are provided in front of three nozzles (also referred to as injectors) 44 a, 44 b and 44 c of thereaction tube 10A of theprocessing module 3A. Supply of gas to the injectors can be directly operated by thecontroller 100. The final valve group (thevalves 40 a to 40 d, 40 f, 40 g, 40g 2 and 40 g 3) ofFIG. 11 can supply a plurality of gases simultaneously (that is, in mixture) to oneinjector injectors valves 40 a to 40 d, 40 f, 40 g, 40g 2 and 40 g 3, which are a final valve group of theprocessing module 3B, have the same configuration as the final valve group (thevalves 40 a to 40 d, 40 f, 40 g, 40g 2, 40 g 3) of theprocessing module 3A. - According to the present embodiments, one or more of the following effects can be obtained.
- 1) Qualities of films formed among a plurality of
processing modules - 2) Heat histories may be made equal among the plurality of
processing modules - 3) Since a common supply box is provided for the plurality of
processing modules - 4) By the above item 3), the footprint required by the
substrate processing apparatus 2 is lowered, and it is possible to reduce a use area of a clean room with respect to the required amount of production, which is very advantageous in terms of economy. - Although an example of using the HCDS gas as a precursor gas has been illustrated in the above embodiments, the present disclosure is not limited thereto. For example, in addition to the HCDS gas, it may be possible to use, as the precursor gas, an inorganic halosilane precursor gas such as a DCS (Si2H4Cl6: dichlorodisilane) gas, an MCS (SiH3Cl: monochlorosilane) gas or a TCS (SiHCl3: trichlorosilane) gas, a halogen group-non-containing amino-based (amine-based) silane precursor gas such as a 3DMAS (Si [N(CH3)2]3H: tris-dimethyl-amino-silane) gas or a BTBAS (SiH2[NH(C4H9)]2: bis-tertiary-butyl-amino-silane) gas, or a halogen group-non-containing inorganic silane precursor gas such as an MS (SiH4: monosilane) gas or a DS (Si2H6: disilane) gas.
- Although an example of forming a SiN film has been illustrated in the above embodiments, the present disclosure is not limited thereto. For example, in addition to the SiN film, it may be possible to form a SiO2 film, a SiON film, a SiOCN film, a SiOC film, a SiCN film, a SiBN film, a SiBCN film or the like using a nitrogen (N)-containing gas (nitriding gas) such as an ammonia (NH3) gas, a carbon (C)-containing gas such as a propylene (C3H6) gas, a boron (B)-containing gas such as a boron trichloride (BCl3) gas, or the like. Even when these films are formed, the film formation can be performed under the same processing conditions as the above embodiments, and the same effects as the above embodiments can be obtained.
- Although an example of depositing a film on a wafer W has been illustrated in the above embodiments, the present disclosure is not limited thereto. For example, the present disclosure can also be suitably applied to a case where a wafer W or a film formed on the wafer W is subjected to a process such as oxidation, diffusion, annealing, etching or the like.
- Although the present disclosure made by the present inventors has been concretely described by way of examples, the present disclosure is not limited to the above embodiments and examples, but may be changed and modified in different ways.
- For example, it is also possible to arrange reaction chambers of three or more processing modules for one gas supply device and supply a gas through supply pipes having the same length. In addition, it is to be understood by those skilled in the art that the present disclosure can be easily applied to an apparatus that executes two equal-time recipes sharing not all but some (for example, Si precursor gas) of gases used in parallel with a predetermined time difference.
- According to the present disclosure in some embodiments, it is possible to obtain uniform qualities for films formed by first and second processing modules.
- While certain embodiments have been described, these embodiments have been presented by way of example only, and are not intended to limit the scope of the disclosures. Indeed, the embodiments described herein may be embodied in a variety of other forms. Furthermore, various omissions, substitutions and changes in the form of the embodiments described herein may be made without departing from the spirit of the disclosures. The accompanying claims and their equivalents are intended to cover such forms or modifications as would fall within the scope and spirit of the disclosures.
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