US20190308300A1 - Appearance inspection apparatus, surface treatment system, appearance inspection method, program and shot material replacement determination method - Google Patents

Appearance inspection apparatus, surface treatment system, appearance inspection method, program and shot material replacement determination method Download PDF

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Publication number
US20190308300A1
US20190308300A1 US16/309,029 US201716309029A US2019308300A1 US 20190308300 A1 US20190308300 A1 US 20190308300A1 US 201716309029 A US201716309029 A US 201716309029A US 2019308300 A1 US2019308300 A1 US 2019308300A1
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US
United States
Prior art keywords
shot material
inspection target
captured image
replacement
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US16/309,029
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English (en)
Inventor
Shigenori TERAOKA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority claimed from PCT/JP2017/016481 external-priority patent/WO2017217121A1/ja
Assigned to SCREEN Holdings Co., Ltd. reassignment SCREEN Holdings Co., Ltd. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TERAOKA, Shigenori
Publication of US20190308300A1 publication Critical patent/US20190308300A1/en
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0092—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed by mechanical means, e.g. by screw conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • B24C1/083—Deburring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring
    • G01N2021/8416—Application to online plant, process monitoring and process controlling, not otherwise provided for

Definitions

  • the present invention relates to a technique of inspecting a surface of an inspection target subjected to surface treatment with a shot material, and a technique of determining the necessity to replace the shot material in an ejector.
  • Patent Literature 1 Japanese Patent Application Publication No. 2015-068668
  • the present invention has been made in view of the above-described problem.
  • the present invention is intended to reduce overdetection in an appearance inspection apparatus and to conduct an inspection with a high degree of accuracy.
  • One aspect of the present invention is an appearance inspection apparatus that inspects a surface of an inspection target subjected to surface treatment with a shot material.
  • the apparatus includes: an imaging part that captures an image of the surface of the inspection target to acquire a captured image; a storage that contains a reference image corresponding to the captured image; a defect candidate detector that detects a defect candidate region in the captured image based on the captured image and the reference image; and a replacement determination part that determines the necessity to replace the shot material based on the brightness level of an inspection target region in the captured image and the brightness level of a reference region in the reference image corresponding to the inspection target region.
  • the imaging controller 401 controls the imaging part 31 and the light emitters 32 , 33 to acquire an image of the inspection target Wk (in an exact sense, data indicating the image).
  • the image data is stored into the storage 402 .
  • the imaging part 31 acquires image data.
  • an image acquired through imaging by the imaging part 31 will be called a “captured image,” and data about the captured image is called “captured image data 911 .”
  • the captured image data 911 is stored into the storage 402 .
  • the storage 402 contains data about “reference images” stored as reference image data 912 .
  • Each of the reference images is an ideal image of the inspection target Wk under each illuminated state. Specifically, data about an ideal image corresponding to each illuminated state of the imaging part 31 is prepared in the storage 402 as the reference image data 912 .
  • the reference image data 912 is data about a reference image acquired through imaging of the inspection target Wk determined to be a conforming item by the imaging part 31 , for example.
  • the defect candidate detection step S 12 is preformed in which the defect candidate detector 403 detects a defect candidate region in the captured image.
  • processing on image data will be described simply as processing on an image, where appropriate.
  • FIG. 7 is an example of a reference image 820 showing the surface of the inspection target Wk as a conforming item acquired by the imaging part 31 in the multiplied illuminated state.
  • a region appearing in the reference image 820 and corresponding to the defect inspection target region 811 in the captured image 810 is illustrated as a “defect reference region 821 .”
  • a region appearing in the reference image 820 and corresponding to the replacement inspection target region 812 in the captured image 810 is illustrated as a “replacement reference region 822 .”
  • the defect candidate detector 403 calculates an average of pixels in the replacement inspection target region 812 in the captured image 810 (specifically, an average of luminance values corresponding to the brightness level of the replacement inspection target region 812 ), and stores the calculated average in association with the extracted defect candidate region 813 into the storage 402 as the result data 914 .
  • the brightness level of the replacement inspection target region 812 and the brightness level of the replacement reference region 822 in the reference image 820 are compared by calculating the absolute of a difference between these brightness levels, and determining whether the absolute is a predetermined threshold or more.
  • the threshold is acquired through referring to the threshold data 913 in the storage 402 by the replacement determination part 404 . If the absolute is the threshold or more, the replacement determination part 404 determines that the shot material 211 needs replacement in the ejector 2 , and outputs the shot material replacement signal Sig 1 .
  • the supply controller 25 of the ejector 2 issues an operation command for the on-off valve 26 to open the on-off valve 26 .
  • a new shot material 211 is supplied from the shot material storage 24 to the shot material supplier 22 through the pipe 27 . In this way, the shot material 211 is replaced in the ejector 2 .
  • the operator inputs an indication through the input part 42 that the designated inspection target Wk “has no defect (is a conforming item)” by checking the display part 41 .
  • This makes it possible to acquire information indicating that the extracted defect candidate region 813 has no defect, specifically, that a result of the defect inspection indicating the presence of a defect at this inspection target Wk is overdetection.
  • the present invention may be configured as a program for causing a computer to inspect a surface of an inspection target subjected to surface treatment with a shot material.
  • Execution of the program by the computer causes the program to perform: a preparation step of preparing a captured image by capturing an image of the surface of the inspection target and a reference image corresponding to the captured image; a defect candidate detection step of detecting a defect candidate region in the captured image based on the captured image and the reference image; and a replacement determination step of determining the necessity to replace the shot material based on the brightness level of an inspection target region in the captured image and the brightness level of a reference region in the reference image corresponding to the inspection target region.
  • Ath threshold (for the overdetection ratio)

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Signal Processing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
US16/309,029 2016-06-15 2017-04-26 Appearance inspection apparatus, surface treatment system, appearance inspection method, program and shot material replacement determination method Abandoned US20190308300A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2016118746 2016-06-15
JP2016-118746 2016-06-15
JP2017-083355 2017-04-20
JP2017083355A JP6917757B2 (ja) 2016-06-15 2017-04-20 外観検査装置、表面処理システム、外観検査方法、プログラム、および投射材交換判断方法
PCT/JP2017/016481 WO2017217121A1 (ja) 2016-06-15 2017-04-26 外観検査装置、表面処理システム、外観検査方法、プログラム、および投射材交換判断方法

Publications (1)

Publication Number Publication Date
US20190308300A1 true US20190308300A1 (en) 2019-10-10

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US16/309,029 Abandoned US20190308300A1 (en) 2016-06-15 2017-04-26 Appearance inspection apparatus, surface treatment system, appearance inspection method, program and shot material replacement determination method

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US (1) US20190308300A1 (ja)
EP (1) EP3474004A4 (ja)
JP (1) JP6917757B2 (ja)
TW (1) TWI630070B (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT522989B1 (de) * 2019-10-03 2021-12-15 Fill Gmbh Oberflächenbehandlungsverfahren
CN115335688A (zh) * 2020-03-27 2022-11-11 日本电产株式会社 图像处理***和计算机程序
CN117007611B (zh) * 2023-09-28 2024-01-09 杭州百子尖科技股份有限公司 片状材料的周期性缺陷检测方法、装置、设备以及介质
CN117067112B (zh) * 2023-10-17 2024-01-16 杭州泓芯微半导体有限公司 一种水切割机及其控制方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02180559A (ja) * 1988-12-28 1990-07-13 Nissan Motor Co Ltd ショットピーニング装置
JPH04159082A (ja) * 1990-10-22 1992-06-02 Toyoda Gosei Co Ltd ブラスト処理の検査方法
JPH07128037A (ja) * 1993-11-04 1995-05-19 Toyota Motor Corp 面粗さ評価方法、面粗さ評価装置、ブラスト処理方法及びブラスト処理制御装置
JPH09193015A (ja) * 1996-01-12 1997-07-29 Nissan Motor Co Ltd ショットピーニング装置およびショットピーニング方法
JP2001337044A (ja) * 2000-05-30 2001-12-07 Honda Motor Co Ltd 鋳造品の外観検査方法
JP2006224260A (ja) * 2005-02-18 2006-08-31 Hitachi Plant Technologies Ltd ブラスト媒体の使用寿命判断方法
JP2007050469A (ja) * 2005-08-17 2007-03-01 Hitachi Plant Technologies Ltd ブラスト装置及びブラスト方法
JP2008254131A (ja) * 2007-04-05 2008-10-23 Toshiba Corp 被研磨材の研磨方法および被研磨材の研磨装置
JP5057236B2 (ja) * 2008-04-23 2012-10-24 新東工業株式会社 ショットブラスト処理装置
JP2010066153A (ja) * 2008-09-11 2010-03-25 Daido Steel Co Ltd 外観検査方法および外観検査装置
TWI420097B (zh) * 2010-12-29 2013-12-21 Utechzone Co Ltd Method for detecting surface defect of object and device thereof
JP6370177B2 (ja) * 2014-09-05 2018-08-08 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および検査方法

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Publication number Publication date
EP3474004A1 (en) 2019-04-24
JP6917757B2 (ja) 2021-08-11
JP2017227621A (ja) 2017-12-28
EP3474004A4 (en) 2020-01-15
TW201808536A (zh) 2018-03-16
TWI630070B (zh) 2018-07-21

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Owner name: SCREEN HOLDINGS CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:TERAOKA, SHIGENORI;REEL/FRAME:047848/0039

Effective date: 20181206

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STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION