US20190270179A1

US20190270179A1 - Pad conditioner and method of conditioning planarization pad

Info

Publication number: US20190270179A1
Application number: US16/417,068
Authority: US
Inventors: Hui-Wen TING
Original assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
Current assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
Priority date: 2013-07-23
Filing date: 2019-05-20
Publication date: 2019-09-05
Also published as: US10293462B2; US20150031273A1

Abstract

A method including rotating a plate of a pad conditioner about an axis parallel to an axis of rotation of a planarization pad of a planarization device. The method further includes dispensing a fluid material onto an upper surface of the planarization pad through a nozzle opening of the pad conditioner during a planarization process, wherein the fluid material comprises an acid. The method further includes maintaining the pad conditioner at a position spaced from the upper surface of the planarization pad during the dispensing of the fluid material and the rotating of the plate.

Description

PRIORITY CLAIM

The present application is a continuation of U.S. application Ser. No. 13/948,799, filed Jul. 23, 2013, which is incorporated herein by reference in its entirety.

BACKGROUND

Technological advances in integrated circuit (IC) materials and design have produced generations of ICs where each generation has smaller and more complex circuits than the previous generation. However, these advances have increased the complexity of processing and manufacturing ICs and, for these advances to be realized, similar developments in IC processing and manufacturing are needed. For example, planarization technology, such as a chemical mechanical polishing (CMP) process, has been implemented to planarize a substrate or one or more layers of features over the substrate. A material removal rate for a CMP process varies according to various factors, including roughness of an upper surface of a planarization pad in a planarization device where the CMP process takes place.

DESCRIPTION OF THE DRAWINGS

One or more embodiments are illustrated by way of example, and not by limitation, in the figures of the accompanying drawings, wherein elements having the same reference numeral designations represent like elements throughout.

FIG. 1 is a cross-sectional view of a portion of a planarization device having a semiconductor wafer therewithin in accordance with one or more embodiments.

FIG. 2 is an enlarged view of region A in FIG. 1 in accordance with one or more embodiments.

FIGS. 3A-3H are diagrams of various patterns of nozzle openings in accordance with one or more embodiments.

FIG. 4 is a flow chart of a method of reconditioning a planarization pad in accordance with one or more embodiments.

DETAILED DESCRIPTION

It is understood that the following disclosure provides one or more different embodiments, or examples, for implementing different features of the disclosure. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, examples and are not intended to be limiting. In accordance with the standard practice in the industry, various features in the drawings are not drawn to scale and are used for illustration purposes only.
Moreover, spatially relative terms, for example, “lower,” “upper,” “horizontal,” “vertical,” “above,” “below,” “up,” “down,” “top,” “bottom,” “left,” “right,” etc. as well as derivatives thereof (e.g., “horizontally,” “downwardly,” “upwardly,” etc.) are used for ease of the present disclosure of one features relationship to another feature. The spatially relative terms are intended to cover different orientations of the device including the features.
In accordance with the present application, in at least one embodiment, a pressurized fluid material is dispensed onto a planarization pad of a planarization device for maintaining the roughness of the planarization pad and for removing residues on the planarization pad, which are sometimes collectively referred to as reconditioning the planarization pad. Compared with another configuration using diamond plate for reconditioning, using pressurized fluid material reduces the scratch defects on a CMP-processed wafer caused by cracked diamonds.
FIG. 1 is a cross-sectional view of a portion of a planarization device 100 having a semiconductor wafer 110 therewithin in accordance with one or more embodiments. Planarization device 100 includes a platform 120, a planarization pad 130 over platform 120, a wafer holder 140 over platform 120 and holding wafer 110, a pad conditioner 150 over planarization pad 130, and a slurry dispenser 160 over platform 120. Planarization pad 130 has an upper surface 132 and grooves 134, and the grooves 134 have bottom surfaces lower than the upper surface 132. The upper surface 132 of the planarization pad 130 defines a reference plane in parallel with X direction and Y direction (a direction into the page, not shown). In some embodiments, the wafer 110 is a semiconductor wafer having a surface 112 to be processed by a planarization process. During a period that planarization device 100 is operated to perform a planarization process, such as a CMP process, a layer of slurry material 172 is over the planarization pad 130, filling the grooves 134, and in contact with upper surface 132 of planarization pad 130 and surface 112 of wafer 110.
Wafer holder 140 includes a robot arm 142 and a clamper 144 rotatably mounted to the robot arm. In some embodiments, robot arm 142 includes a driving unit configured to move clamper 144 along a direction parallel to the upper surface 132 of planarization pad 130. In some embodiments, robot arm 142 and/or clamper 144 include a driving unit configured to cause clamper 144 to rotate according to a first predetermined rotational-speed profile. In some embodiments, the first predetermined rotational-speed profile includes a rotational speed ranging from 0 to 200 revolutions per minute (rpm).
Pad conditioner 150 includes a robot arm 152 and a plate 154 rotatably mounted to the robot arm. In some embodiments, robot arm 152 includes a driving unit configured to move plate 154 along a direction parallel to the upper surface 132 of planarization pad 130. In some embodiments, robot arm 152 and/or clamper 154 include a driving unit configured to cause plate 154 to rotate according to a second predetermined rotational-speed profile. In some embodiments, the second predetermined rotational-speed profile includes a rotational speed ranging from 40 rpm to 300 rpm. In at least one embodiment, the platform 120 is also rotatable.
Slurry dispenser 160 delivers a slurry material 174 onto upper surface 132 of the planarization pad 130 to form the layer of slurry material 172. In some embodiments, the layer of slurry material 172 includes a solution containing etchant and/or polishing grit.
During operation of the planarization device 100, the wafer holder 140 and the planarization pad 130 are movable with respect to each other. The layer of slurry material 172 chemically etching and mechanically abrading the surface 112 of the wafer 110 in order to planarize (also being referred to as “polish”) the surface 112 of the wafer 110 at a predetermined removal rate.
In some embodiments, the upper surface 132 of the planarization pad 130 is prepared to have a predetermined range of roughness. However, during operation of the planarization device 100, the upper surface 132 of the planarization pad 130 becomes smoother. In order to keep the roughness of the upper surface 132 within the predetermined range, pad conditioner 150 is usable to scratch the upper surface 132 of the planarization pad 130 in order to maintain the roughness of the upper surface 132 and to remove any residues formed on the upper surface 132.
The plate 154 of pad conditioner 150 has a lower surface 156 separated from upper surface 132 of the planarization pad 130 by a predetermined distance D (FIG. 2) and one or more nozzle openings on the lower surface 156 of the plate 154. A fluid material 158 is dispensed onto upper surface 132 of the planarization pad 130 through the one or more nozzle openings in order to recondition the planarization pad. In some embodiments, the reconditioning of the upper surface 132 of the planarization pad 130 is performed during the polishing of the surface 112 of the wafer 110 or before or after the polishing of the surface 112.
FIG. 2 is an enlarged view of region A in FIG. 1 in accordance with one or more embodiments. One or more nozzle openings 210 are disposed on a lower surface of plate 154. The lower surface 156 of the plate 154 and the upper surface 132 of the planarization pad 130 are separated by a predetermined distance D. In some embodiments, the predetermined distance D ranges from 0.1 to 250 millimeters (mm).
A fluid dispensing unit 220 is coupled with the one or more nozzle openings 210 through a conduit system 230. In some embodiments, conduit system 230 includes a network of tubes passing though the robot arm 152, a rotational axel 240 connecting the plate 154 and robot arm 152, and/or embedded inside the plate 154. Fluid dispensing unit 220 is configured to dispense the fluid material 158 onto the upper surface 132 of the planarization pad 130 through the one or more nozzle openings 210. In some embodiments, fluid dispensing unit 220 is mounted on the robot arm 152. In some embodiments, fluid dispensing unit 220 is disposed separately from the robot arm 152.
In some embodiments, fluid dispensing unit 220 is configured to dispense the fluid material 158 at a predetermined spray pressure at the one or more nozzle openings 210. In some embodiments, the predetermined pressure is set to be sufficient to remove residues on the planarization pad 130. In some embodiments, the predetermined pressure is set to be sufficient to restore the roughness of the upper surface 132 of the planarization pad 130.
In some embodiments, the predetermined spray pressure ranges from 0.1 pounds per square inch (PSI) to 20 PSI. In some embodiments, fluid dispensing unit 220 and the one or more nozzle openings are configured to dispense the fluid material 158 at a predetermined spray angle θ at one of the one or more nozzle openings, and the predetermined spray angle θ ranges from 0 degree to 45 degrees with respect to Z direction, which is perpendicular to the upper surface 132 of the planarization pad. A non-zero degree spray angle helps to wash residues out of the grooves 134 and restore the roughness of the upper surface 132. In some embodiments, the reconditioning of planarization pad 130 is primarily based on a downward (i.e., along the negative Z direction) force to “grind” the upper surface 132 by pressurized fluid material. Thus, if the spray angle is greater than 45 degrees, the reconditioning of planarization pad 130 would be less power-efficient.
In some embodiments, the fluid material 158 includes a slurry material when the fluid dispensing unit 220 is operated during a planarization process performed by the planarization device 100 (FIG. 1). In some embodiments, the fluid material 158 includes water, de-ionized water, NH₄OH based solution, HF based solution, KOH based solution, or citric acid based solution, silica based solution, cerium based solution, or hydrous solution having a water weight percentage greater than 20%, when the fluid dispensing unit 220 is operated before or after a planarization process performed by the planarization device 100.
Various patterns of nozzle openings are illustrated in conjunction with FIGS. 3A-3H.
FIG. 3A is a diagram of a first example pattern of nozzle openings 320 a-320 d in accordance with one or more embodiments. Nozzle openings 320 a-320 d are on the lower surface 156 of the plate and arranged in a radially symmetrical manner about a rotational center 310 of the rotatable plate. In the example depicted in FIG. 3A, nozzle openings 320 a and 320 c are positioned along a line crossing the rotational center 310, and nozzle openings 320 b and 320 d are positioned along another line crossing the rotational center 310.
FIG. 3B is a diagram of a second example pattern of nozzle openings 330 in accordance with one or more embodiments. Nozzle openings 330 are on the lower surface 156 of the plate and arranged in a circularly symmetrical manner about the rotational center 310 of the rotatable plate. In the example depicted in FIG. 3B, nozzle openings 330 are positioned along a peripheral of a circle having a center coinciding with the rotational center 310.
FIG. 3C is a diagram of a third example pattern of nozzle openings 340 a-340 c in accordance with one or more embodiments. Nozzle openings 340 a-340 c are on the lower surface 156 of the plate and arranged in a circularly symmetrical manner about the rotational center 310 of the rotatable plate. In the example depicted in FIG. 3C, nozzle openings 340 a, 340 b, and 340 c are positioned along peripherals of corresponding circles having centers coinciding with the rotational center 310. In other words, nozzle openings 340 a, 340 b, and 340 c are positioned along peripherals of concentric circles about the rotational center 310.
FIG. 3D is a diagram of a fourth example pattern of nozzle openings 350 a-350 c in accordance with one or more embodiments. Nozzle openings 350 a-350 c are on the lower surface 156 of the plate. Nozzle openings 350 a have a geographic center 352 a, nozzle openings 350 b have a geographic center 352 b, and nozzle openings 350 c have a geographic center 352 c. The geographic centers 352 a-352 c of nozzle openings 350 a-350 c are arranged in a radially symmetrical manner or a circularly symmetrical manner about the rotational center 310 of the plate.
FIGS. 3E-3G are diagrams of additional example patterns of nozzle openings 360, 370, and 380 in accordance with one or more embodiments. Nozzle openings 360, 370, and 380 are on the lower surface 156 of the plate and positioned along at least one polygon, such as a triangle (360), a square or rectangle (370), a pentagon (380), or an ellipse (not shown), or any other suitable shapes. Although only one polygon is depicted in FIG. 3E, 3F, or 3G, in some embodiments, nozzle openings are arranged according to one or more of the same polygon of a different size or different polygons, circles, or ellipses of various sizes.
FIG. 3H is a diagram of yet another example pattern of nozzle openings 390 in accordance with one or more embodiments. Nozzle openings 390 are on the lower surface 156 of the plate and evenly distributed on the lower surface of the plate. In at least one embodiment, nozzle openings 390 are randomly distributed on the lower surface 156 of the plate.
The patterns of nozzle openings depicted in FIGS. 3A-3H are merely examples. In some embodiments, nozzle openings are positioned according to other suitable patterns. In some embodiments, nozzle openings have a geographic center substantially coinciding with the rotational center of the plate.
FIG. 4 is a flow chart of a method 400 of reconditioning a planarization pad in accordance with one or more embodiments. It is understood that additional operations may be performed before, during, and/or after the method 400 depicted in FIG. 8, and that some other processes may only be briefly described herein.
As depicted in FIG. 4 and FIG. 1, in operation 410, a driving unit causes a plate 154 of a pad conditioner 150 to rotate according to a predetermined rotational-speed profile. In some embodiments, the predetermined rotational-speed profile includes a rotational speed ranging from 40 rpm to 300 rpm.
As depicted in FIG. 4 and FIGS. 1-2, in operation 420, a fluid dispensing unit 220 dispenses a fluid material 158 onto an upper surface 132 of a planarization pad 150 of a planarization device 100 through nozzle openings 210 disposed on a lower surface 156 of the plate 154. In some embodiments, the dispensing the fluid material includes dispensing the fluid material 158 at a predetermined spray pressure at the nozzle openings 210. In some embodiments, the predetermined spray pressure ranges from 0.1 PSI to 20 PSI. In some embodiments, the dispensing the fluid material includes dispensing the fluid material 158 at a predetermined spray angle θ at the nozzle openings 210. In some embodiments, the predetermined spray angle θ ranges from 0 degree to 45 degrees with respect to Z direction, which is perpendicular to the upper surface 132 of the planarization pad 130.
In some embodiments, the dispensing the fluid material further includes dispensing a slurry material during a period the planarization pad 130 is operated to perform a planarization process. In some embodiments, the dispensing the fluid material further includes dispensing water, de-ionized water, NH₄OH based solution, HF based solution, KOH based solution, or citric acid based solution, silica based solution, cerium based solution, or hydrous solution having a water weight percentage greater than 20%, during a period before or after the planarization pad 130 is operated to perform a planarization process.
An aspect of this description relates to a method including rotating a plate of a pad conditioner about an axis parallel to an axis of rotation of a planarization pad of a planarization device. The method further includes dispensing a fluid material onto an upper surface of the planarization pad through a nozzle opening of the pad conditioner during a planarization process, wherein the fluid material comprises an acid. The method further includes maintaining the pad conditioner at a position spaced from the upper surface of the planarization pad during the dispensing of the fluid material and the rotating of the plate. In some embodiments, the dispensing the fluid material further includes dispensing the fluid material at a predetermined spray pressure at the nozzle openings, the predetermined spray pressure ranging from 0.1 pounds per square inch (PSI) to 20 PSI. In some embodiments, the dispensing the fluid material further includes dispensing the fluid material at a predetermined spray angle at the nozzle openings, the predetermined spray angle ranging from 0 degrees to 45 degrees with respect to a direction perpendicular to the upper surface of the planarization pad. In some embodiments, the dispensing the fluid material further includes dispensing a slurry material during a period the planarization pad is operated to perform the planarization process. In some embodiments, dispensing the fluid material further includes dispensing one or more of water, de-ionized water NH₄OH based solution, KOH based solution, silica based solution, cerium based solution, or hydrous solution having a water weight percentage greater than 20%, during a period before or after the planarization pad is operated to perform the planarization process. In some embodiments, dispensing the fluid material includes dispensing the acid comprising at least one of an HF based solution or a citric acid based solution. In some embodiments, dispensing the fluid material includes dispensing the fluid material from a plurality of nozzles. In some embodiments, dispensing the fluid material includes dispensing the fluid material from a plurality of nozzles arranged in a concentric pattern. In some embodiments, dispensing the fluid material comprises dispensing the fluid material from a plurality of nozzles arranged in a circular pattern. In some embodiments, dispensing the fluid material includes dispensing the fluid material from a plurality of nozzles arranged along two intersecting lines. In some embodiments, dispensing the fluid material includes dispensing the fluid material from a plurality of nozzles arranged in a polygonal pattern.
An aspect of this description relates to a planarization device. The planarization device includes a planarization pad; and a pad conditioner over the planarization pad. The pad conditioner includes a rotatable plate having a lower surface separated from an upper surface of the planarization pad by a predetermined distance. The pad conditioner further includes a plurality of nozzle openings on the lower surface of the rotatable plate. The pad conditioner further includes a fluid dispensing unit configured to selectively dispense a fluid material onto the upper surface of the planarization pad through the plurality of nozzle openings based on an operating mode of the planarization device, wherein the fluid material comprises an acid, and the pad conditioner is configured to maintain at least the predetermined distance between the lower surface of the rotatable plate and the upper surface of the planarization pad during dispensing of the fluid material. In some embodiments, the planarization device further includes a slurry dispenser for dispensing a slurry onto the planarization pad, wherein the slurry dispenser is spaced from the pad conditioner. In some embodiments, the plurality of nozzles is arranged in a concentric pattern. In some embodiments, the plurality of nozzles is arranged in a circular pattern. In some embodiments, the plurality of nozzles is arranged along two intersecting lines. In some embodiments, the plurality of nozzles is arranged in a polygonal pattern.
An aspect of this description relates to a method including dispensing a slurry onto a planarization pad. The method further includes rotating the planarization pad about a first axis. The method further includes rotating a plate of a pad conditioner about an axis parallel to the first axis. The method further includes dispensing a fluid material onto an upper surface of the planarization pad through a plurality of nozzle openings of the pad conditioner during the rotation of the planarization pad, wherein the fluid material comprises an acid. The method further includes maintaining the pad conditioner at a position spaced from the upper surface of the planarization pad during the dispensing of the fluid material and the rotating of the plate. In some embodiments, dispensing the fluid material includes dispensing the fluid material during the dispensing of the slurry. In some embodiments, dispensing the fluid material includes dispensing the fluid material during a period before or after the planarization pad is operated to perform a planarization process.
The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.

Claims

What is claimed is:

1. A method comprising:

rotating a plate of a pad conditioner about an axis parallel to an axis of rotation of a planarization pad of a planarization device;

dispensing a fluid material onto an upper surface of the planarization pad through a nozzle opening of the pad conditioner during a planarization process, wherein the fluid material comprises an acid;

maintaining the pad conditioner at a position spaced from the upper surface of the planarization pad during the dispensing of the fluid material and the rotating of the plate.

2. The method of claim 1, wherein the dispensing the fluid material further comprises:

dispensing the fluid material at a predetermined spray pressure at the nozzle openings, the predetermined spray pressure ranging from 0.1 pounds per square inch (PSI) to 20 PSI.

3. The method of claim 1, wherein the dispensing the fluid material further comprises:

dispensing the fluid material at a predetermined spray angle at the nozzle openings, the predetermined spray angle ranging from 0 degrees to 45 degrees with respect to a direction perpendicular to the upper surface of the planarization pad.

4. The method of claim 1, wherein the dispensing the fluid material further comprises dispensing a slurry material during a period the planarization pad is operated to perform the planarization process.

5. The method of claim 1, wherein dispensing the fluid material further comprises dispensing one or more of water, de-ionized water NH₄OH based solution, KOH based solution, silica based solution, cerium based solution, or hydrous solution having a water weight percentage greater than 20%, during a period before or after the planarization pad is operated to perform the planarization process.

6. The method of claim 1, wherein dispensing the fluid material comprises dispensing the acid comprising at least one of an HF based solution or a citric acid based solution.

7. The method of claim 1, wherein dispensing the fluid material comprises dispensing the fluid material from a plurality of nozzles.

8. The method of claim 1, wherein dispensing the fluid material comprises dispensing the fluid material from a plurality of nozzles arranged in a concentric pattern.

9. The method of claim 1, wherein dispensing the fluid material comprises dispensing the fluid material from a plurality of nozzles arranged in a circular pattern.

10. The method of claim 1, wherein dispensing the fluid material comprises dispensing the fluid material from a plurality of nozzles arranged along two intersecting lines.

11. The method of claim 1, wherein dispensing the fluid material comprises dispensing the fluid material from a plurality of nozzles arranged in a polygonal pattern.

12. A planarization device, comprising:

a planarization pad; and

a pad conditioner over the planarization pad, the pad conditioner comprising:

a rotatable plate having a lower surface separated from an upper surface of the planarization pad by a predetermined distance;

a plurality of nozzle openings on the lower surface of the rotatable plate; and

a fluid dispensing unit configured to selectively dispense a fluid material onto the upper surface of the planarization pad through the plurality of nozzle openings based on an operating mode of the planarization device, wherein the fluid material comprises an acid, and the pad conditioner is configured to maintain at least the predetermined distance between the lower surface of the rotatable plate and the upper surface of the planarization pad during dispensing of the fluid material.

13. The planarization device of claim 12, further comprising a slurry dispenser for dispensing a slurry onto the planarization pad, wherein the slurry dispenser is spaced from the pad conditioner.

14. The planarization device of claim 1, wherein the plurality of nozzles is arranged in a concentric pattern.

15. The planarization device of claim 1, wherein the plurality of nozzles is arranged in a circular pattern.

16. The planarization device of claim 1, wherein the plurality of nozzles is arranged along two intersecting lines.

17. The planarization device of claim 1, wherein the plurality of nozzles is arranged in a polygonal pattern.

18. A method comprising:

dispensing a slurry onto a planarization pad;

rotating the planarization pad about a first axis;

rotating a plate of a pad conditioner about an axis parallel to the first axis;

dispensing a fluid material onto an upper surface of the planarization pad through a plurality of nozzle openings of the pad conditioner during the rotation of the planarization pad, wherein the fluid material comprises an acid;

19. The method of claim 18, wherein dispensing the fluid material comprises dispensing the fluid material during the dispensing of the slurry.

20. The method of claim 18, wherein dispensing the fluid material comprises dispensing the fluid material during a period before or after the planarization pad is operated to perform a planarization process.