US20160238635A1

US20160238635A1 - Offset voltage compensation

Info

Publication number: US20160238635A1
Application number: US14/625,038
Authority: US
Inventors: Juergen Zimmer
Original assignee: Infineon Technologies AG
Current assignee: Infineon Technologies AG
Priority date: 2015-02-18
Filing date: 2015-02-18
Publication date: 2016-08-18
Also published as: CN105891577A; CN105891577B; US10520556B2; US20180100900A1; DE102016102478A1

Abstract

A bridge offset voltage compensation method and circuit having a bridge circuit and a tunnel magnetoresistance (TMR) resistor cascade. The bridge circuit includes a branch circuit. The TMR resistor cascade is coupled in series with the branch circuit, and is configured to provide a resistance to compensate for a bridge offset voltage of the bridge circuit.

Description

BACKGROUND

A Wheatstone bridge is an electrical circuit used to measure an unknown electrical resistance by balancing two branches of the bridge, one branch of which includes the unknown resistance. In order to obtain an optimum performance when the Wheatstone bridge is used in a sensor, such as an angle sensor, the bridge offset voltage needs to be calibrated on the chip. Usually the bridge offset voltage exhibits a temperature coefficient which might lead to significant offsets at temperatures different from the temperature at which the bridge offset voltage was calibrated.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A illustrates a tunnel magnetoresistance (TMR) stack.

FIG. 1B illustrates a TMR resistor.

FIG. 1C illustrates a bottom electrode resistor.

FIG. 2A illustrates a circuit for compensating for a bridge offset voltage in a full bridge using laser fuses.

FIG. 2B illustrates a circuit for compensating for a bridge offset voltage in a half bridge using laser fuses.

FIG. 3 illustrates a circuit for compensating for a bridge offset voltage and a temperature coefficient.

FIG. 4 illustrates a circuit, showing a full bridge circuit, for compensating for a bridge offset voltage, or for a bridge offset voltage and a temperature coefficient.

FIG. 5 illustrates a circuit for compensating for a bridge offset voltage using contact pads.

FIG. 6A illustrates a flowchart of a method for compensating for a bridge offset voltage in a full bridge.

FIG. 6B illustrates a flowchart of a method for compensating for a bridge offset voltage in a half bridge.

DETAILED DESCRIPTION

The present disclosure is directed to a TMR resistor cascade used to compensate for a bridge offset voltage. A resistance adjustment of the TMR resistor cascade may be accomplished using laser fuses, or alternatively, by switches or by shorting individual TMR resistors of the cascade. Additionally, a combination of the TMR resistor cascade and a bottom electrode resistor cascade having opposing temperature coefficients may be used to result in an offset voltage compensation having a temperature coefficient of zero or substantially close to zero.
FIGS. 1A-1C illustrate basic components used to compensate for bridge offset voltage as disclosed herein.
FIG. 1A illustrates a tunnel magnetoresistance (TMR) stack 100A. The TMR stack 100A comprises a bottom electrode 110A with ferromagnetic properties and a top electrode 130A with ferromagnetic properties, between which is a tunneling barrier 120A. As is known, the conductance of the tunneling barrier 120A varies depending on whether the top and bottom electrodes 110A, 130A are in parallel or anti-parallel with respect to their magnetic properties.
FIG. 1B illustrates a TMR resistor 100B. Similar to the TMR stack 100A, the TMR resistor 100B comprises a ferromagnetic bottom electrode 110B and a ferromagnetic top electrode 130B, between which is a tunneling barrier 120B. For the TMR resistor 100B, though, the top electrode 130B is etched using a standard TMR etch process to define a magnetically active area. The TMR resistor 100B has a negative temperature coefficient nTk, which means that that with increasing temperature its tunneling resistance decreases. The temperature coefficient may be approximately −0.1%/K.
FIG. 1C illustrates a bottom electrode resistor 100C. The bottom electrode resistor 100C comprises a ferromagnetic bottom electrode 110C and a tunneling barrier 120C. Contrary to the TMR resistor 100B, the bottom electrode resistor 100C has a positive temperature coefficient pTk, which means that with increasing temperature its resistance increases. The positive temperature coefficient pTk may be approximately +0.1%/K.
The bridge offset voltage compensation of this disclosure takes advantage of the usual structuring method of the TMR stack 100A that is performed in two steps. In the first step, the top electrode 130 is etched down to the tunneling barrier 120 to define sensor layer geometry. In the second step, the ferromagnetic bottom electrode 110 is structured in a further etch process. In a single deposition structuring process it is therefore possible to define both the TMR resistor 100B, as shown in FIG. 1B, and the ferromagnetic bottom electrode resistor 100C, as shown in FIG. 1C. In another embodiment, the etch process of the first step stops below the tunneling barrier 120 in or within the ferromagnetic bottom electrode 110 as shown in FIG. 1C.
FIG. 2A illustrates a circuit 200A for compensating for the bridge offset voltage in a full bridge, but without compensating for temperature coefficient Tk.
The bridge offset voltage compensation circuit 200A comprises a Wheatstone bridge, a TMR resistor cascade 220A, and a laser fuse circuit 230A.
The Wheatstone bridge comprises a first branch circuit 210 and a second branch circuit (not shown) coupled in parallel. The first branch circuit 210 may include a first TMR resistor 211 and a second TMR resistor 212 coupled in series, between which is an output voltage point V_out1. Only the first branch circuit 210 of the Wheatstone bridge is shown for the sake of simplicity. Like the first branch circuit 210, the second branch circuit includes two TMR resistors coupled in series with an output voltage point between, as is shown in FIG. 4 and described below.
The TMR resistor cascade 220A is coupled in series with the first branch circuit 210, and is configured to provide a resistance to compensate for the bridge offset voltage. The TMR resistor cascade 220A in this example comprises eight TMR resistors, represented with references A, 2A, 4A, 8A, 16A, 32A, 64A, and 128A having resistances R, R/2, R/4, R/8, R/16, R/32, R/64, and R/128, respectively, where R represents a resistance value. The TMR resistor cascade 220A is configured to have a doubling of the area size, that is, a halfening of the resistance from resistor to resistor. The resistance is defined by the size of the top electrode 130, with the larger the size, the larger the current, and the lower the resistance. The thickness of the tunneling barrier 120 of the resistors of the TMR resistor cascade 220A is the same as that of the first and second TMR resistors 211, 212.
The TMR resistor cascade 220A having eight TMR resistors is not meant to be limiting. There may be any number of TMR resistors as suitable for the intended purpose. Also, a halfening of the resistance from resistor to resistor is also not required.
While not shown, the second branch circuit similarly has coupled in series a second cascade of TMR resistors, and is also configured to provide a resistance offset to compensate for the bridge offset voltage.
The laser fuse circuit 230A is coupled in parallel to the TMR resistor cascade 220A. The laser fuse circuit 230A comprises a low ohmic metal line 239, which is coupled to a voltage source VDD, and a plurality of laser fuses 231-238. The laser fuses 231-238 correspond with the TMR resistors 128A, 64A, 32A, 16A, 8A, 4A, 2A, and A, respectively, and are configured to adjust the resistance of the TMR resistor cascade 220A. More specifically, if additional resistance is required to compensate for the bridge offset voltage, individual laser fuses 231-238 are configured to break the low ohmic metal line 239 at predetermined locations to force current through a defined current flow path through the TMR resistor cascade 220A. In this example, any resistance between zero and 2R−R/128 can be realized with a resolution of R/128.
The laser fuse circuit 230A may alternatively be replaced with a low ohmic switch circuit. The low ohmic switch circuit comprises the low ohmic metal line 239 and a plurality of switches as monolithically integrated semiconductor switches in place of the plurality of laser fuses 231-238.
FIG. 2B illustrates a circuit 200B for compensating for a bridge offset voltage in a half bridge using laser fuses. Circuit 200B is similar to circuit 200A of FIG. 2A, with the addition that a further TMR resistor cascade 220B, with corresponding laser fuse circuit 230B, is coupled in series between the GND terminal and the TMR resistor 212. In this circuit 200B, an offset compensation of a Wheatstone half-bridge configuration is enabled. Similar to the circuit 200A of FIG. 2A, the laser fuse circuit 230B may alternatively be replaced with a low ohmic switch circuit.
FIG. 3 illustrates a circuit 300 for compensating for the bridge offset voltage, with an additional compensation for temperature coefficient Tk.
The bridge offset voltage compensation circuit 300 comprises a Wheatstone bridge and a TMR resistor cascade 220A, as described above with respect to FIG. 2A, but now additionally includes a bottom electrode resistor cascade 340.
The bottom electrode resistor cascade 340 is coupled in series with the TMR resistor cascade 220A. The bottom electrode resistor cascade 340 in this example comprises eight bottom electrode resistors having resistances R, R/2, R/4, R/8, R/16, R/32, R/64, and R/128, where R represents a resistance value. Similar to the TMR resistor cascade 220A, the bottom electrode resistor cascade 340 is configured to have a doubling of the width at a certain length, that is, a halfening of the resistance from resistor to resistor. The disclosure is not limited to the bottom electrode resistor cascade 340 having eight resistors and/or a halfening of the resistance from resistor to resistor, but may be configured as suitable for the intended purpose.
The laser fuse circuit 330 includes the laser fuses 231-238 of FIG. 2A, and additionally includes laser fuses 331-338 to correspond with the bottom electrode resistors of the bottom electrode resistor cascade 340.
The TMR resistor cascade 220A has a negative temperature coefficient nTk, and the bottom electrode resistor cascade 340 has a positive temperature coefficient pTk, as described above. The resistance values of the cascades 220A, 340 to be adjusted to compensate for the bridge offset voltage can be calculated by first calculating a variable α in accordance with the following Equation 1:
$\begin{matrix} α = \frac{{Tk_Offset}_{target}}{\langle {Tk_R}_{TMR} \rangle + \langle {Tk_R}_{Bottom} \rangle} & (Equation 1) \end{matrix}$
where Tk_Offset_targetis the measured temperature coefficient Tk of the offset voltage which is to be compensated. Further, Tk_R_TMRand Tk_R_Bottomdenote the temperature coefficient of resistance of the TMR resistor cascade 220A and bottom electrode resistor cascade 340, respectively.
If the sign of the coefficient α is negative, then
R _Bottom =α·R _corr
R _TMR=(1−α)·R _Corr (Equations 2A and 2B)
where R_Bottomand R_TMRdenote the resistances to be adjusted by laser fusing for the TMR resistor cascade 220A and bottom electrode resistor cascade 340, respectively. R_Corris a resistance needed to compensate for the offset voltage of the bridge circuit.
Alternatively, if the sign of the coefficient α is positive, then
R _TMR =α·R _corr
R _Bottom=(1−α)·R _Corr (Equations 3A and 3B)
Any compensation resistance between zero and 2R−R/128 may be realized with any temperature coefficient offset Tk_Offset between Tk_R_TMRand Tk_R_Bottomto achieve a bridge offset voltage compensation having a temperature coefficient Tk of zero or substantially close to zero.
It is advantageous if the magnitudes of the resistances of the TMR resistor cascade 220A and the bottom electrode resistor cascade 340 are substantially equal. In such a case, the opposing temperature coefficients Tk of the TMR resistor cascade 220A and the bottom electrode resistor cascade 340 results in a bridge offset voltage compensation with a temperature coefficient Tk of zero or substantially close to zero.
While not shown, the second branch circuit similarly has coupled in series a second cascade of TMR resistors and a second cascade of bottom electrode resistors, and is also configured to provide a resistance offset to compensate for the bridge offset voltage with an additional compensation for temperature coefficient Tk.
Further, the circuit 300 is described as compensating for the bridge offset voltage and with an additional compensation for temperature coefficient Tk with respect to a full bridge. The concepts of circuit 300 are also applicable to a half bridge by the addition of a further TMR resistor cascade and a further bottom electrode resistor cascade coupled in series between the GND terminal and the TMR resistor 212, in a similar manner as described above with respect to the half bridge of the circuit 200B of FIG. 2B.
FIG. 4 illustrates a circuit 400 for compensating for a bridge offset voltage, or for a bridge offset voltage and a temperature coefficient. Circuit 400 shows a full Wheatstone bridge 420, as opposed to only the half shown in FIGS. 2 and 3.
The Wheatstone bridge 420 comprises a first branch circuit 210 and a second branch circuit 410 coupled in parallel. The first branch circuit 210 comprises TMR resistor 211 coupled to TMR resistor 212, between which is output voltage point V_OUT1. The second branch circuit 410 comprises TMR resistor 413 coupled to TMR resistor 414, between which is output voltage point V_OUT2. As is known, a voltage difference between output voltage points V_OUT1and V_OUT2represents the bridge offset voltage.
A first cascade of resistors 430 is coupled in series with the first branch circuit 210. This first cascade of resistors 430 may include the TMR resistor cascade 220A, or alternatively, a combination of the TMR resistor cascade 220A and the bottom electrode resistor cascade 340, as described above with respect to FIGS. 2A and 3, respectively. Similarly, the second cascade of resistors 440 is coupled in series with the second branch circuit 410, and is configured similarly as the first cascade of resistors 430.
If, by way of example, a bridge offset voltage is caused by the resistance of the TMR resistor 414 being too high, then the bridge offset voltage can be reduced by increasing the resistance of the second cascade 440, which is serially coupled to the TMR resistor 413. And if, for example, the bridge offset voltage is caused by a resistance of the TMR resistor 212 being too high, then the bridge offset voltage can be reduced by increasing the resistance of the first cascade 430, which is serially coupled to the TMR resistor 211. If each of the first and second cascades 430, 440 includes the combination of the TMR resistor cascade 220A and the bottom electrode resistor cascade 340, then the temperature coefficient Tk can also be reduced to zero or substantially close to zero.
FIG. 5 illustrates a circuit 500 for compensating for a bridge offset voltage using contact pads.
This offset voltage compensation circuit 500 is similar to the offset voltage compensation circuit 200A of FIG. 2A, except that in place of the laser fuse circuit 230, there are a plurality of contact pads 530 (531-539) coupled between the respective TMR resistors of the TMR resistor cascade 220A.
A TMR resistor can be shorted by applying a voltage above a breakdown voltage V_BDacross its top and bottom electrodes 130B, 1106. The tunneling barrier 120B is destroyed and shorted permanently, resulting in the TMR resistor having a low resistance.
The contact pads 531-539 may be used to short any of the TMR resistors of the TMR resistor cascade 220A, thereby adjusting the resistance of the TMR resistor cascade 220A in an electrical manner. For example, when a voltage greater than the breakdown voltage V_BDis applied to contact pads 538 and 539, the first TMR resistor R is shorted, thereby reducing the resistance of the TMR resistor cascade 220A by R. Using this method, it is possible to compensate for the bridge offset voltage in an electrical manner without the use of a laser or switch.
While not shown, the second branch circuit similarly has coupled in series a second cascade of TMR resistors, and is also configured to provide a resistance offset to compensate for the bridge offset voltage.
Further, the circuit 500 is described as compensating for the bridge offset voltage with respect to a full bridge. The concepts of circuit 500 are also applicable to a half bridge by the addition of a further TMR resistor cascade coupled in series between the GND terminal and the TMR resistor 212, in a similar manner as described above with respect to the half bridge of the circuit 200B of FIG. 2B.
FIG. 6A illustrates a flowchart 600A of a method for compensating for a bridge offset voltage in a full bridge.
At Step 610A, a Wheatstone bridge 420 having a first branch circuit 210 and a second branch circuit 410 coupled in parallel is provided.
At Step 620A, a first resistor cascade 430 is coupled in series with the first branch circuit 210.
At Step 630A, a second resistor cascade 440 is coupled in series with the second branch circuit 410.
At Step 640A, a bridge offset voltage of the Wheatstone bridge 420 is measured. This measuring step 640A may be performed using the calculations described above with respect to FIG. 3.
At Step 650A, the resistance of at least one of the first and second resistor cascades 430, 440, is configured, based on the measured bridge offset voltage, to provide a resistance to compensate for the bridge offset voltage.
The bridge circuit is shown as a Wheatstone bridge, though the disclosure is not limited in this respect. The disclosure is applicable to any circuit where the resistance needs to be adjusted to a high accuracy. Also, the bridge circuit may be comprised within a sensor, such as a sensor found in an automobile, though the disclosure is not limited in this respect.
FIG. 6B illustrates a flowchart 600B of a method for compensating for a bridge offset voltage in a half bridge.
At Step 610B, a half bridge circuit having a branch circuit 210 is provided.
At Step 620B, a TMR resistor cascade 220B is coupled in series with the branch circuit 210.
At Step 640B, a bridge offset voltage of the branch circuit 210 is measured. This measuring step 640B may be performed using the calculations described above with respect to FIG. 3.
At Step 650B, the resistance of the TMR resistor cascade 220B is configured, based on the measured bridge offset voltage, to provide a resistance to compensate for the bridge offset voltage.
While the foregoing has been described in conjunction with exemplary embodiment, it is understood that the term “exemplary” is merely meant as an example, rather than the best or optimal. Accordingly, the disclosure is intended to cover alternatives, modifications and equivalents, which may be included within the scope of the disclosure.
Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that a variety of alternate and/or equivalent implementations may be substituted for the specific embodiments shown and described without departing from the scope of the present disclosure. This disclosure is intended to cover any adaptations or variations of the specific embodiments discussed herein.

Claims

What is claimed is:

1. A bridge offset voltage compensation circuit, comprising:

a bridge circuit having a first branch circuit; and

a tunnel magnetoresistance (TMR) resistor cascade coupled in series with the first branch circuit, and configured to provide a resistance to compensate for a bridge offset voltage of the bridge circuit.

2. The bridge offset voltage compensation circuit of claim 1, further comprising:

a low ohmic metal line coupled in parallel to the TMR resistor cascade and having fuses,

wherein the fuses are configured to adjust the resistance of the TMR resistor cascade.

3. The bridge offset voltage compensation circuit of claim 2, wherein the fuses are configured to break the low ohmic metal line at predetermined locations to establish a defined current flow path through the TMR resistor cascade.

4. The bridge offset voltage compensation circuit of claim 1, further comprising:

a low ohmic metal line coupled in parallel to the TMR resistor cascade and having switching elements,

wherein the switching elements are configured to adjust the resistance of the TMR resistor cascade.

5. The bridge offset voltage compensation circuit of claim 1, wherein

the TMR resistor cascade is coupled in series between the first branch circuit and a voltage source, and

the bridge offset voltage compensation circuit further comprises a further TMR resistor cascade coupled in series between the first branch circuit and a ground terminal.

6. The bridge offset voltage compensation circuit of claim 1, wherein the resistance values of respective TMR resistors of the TMR resistor cascade increase by a factor of two.

7. The bridge offset voltage compensation circuit of claim 1, wherein

the bridge circuit has a second branch circuit coupled in parallel with the first branch circuit, and

bridge offset voltage compensation circuit further comprises a second TMR resistor cascade coupled in series to the second branch circuit, and configured to provide a resistance to compensate for the bridge offset voltage.

8. The bridge offset voltage compensation circuit of claim 7, wherein the bridge circuit is a Wheatstone bridge.

9. The bridge offset voltage compensation circuit of claim 1, further comprising:

a plurality of contact pads coupled between respective TMR resistors of the TMR resistor cascade,

wherein the plurality of contact pads are configured to provide an applied voltage that is greater than a breakdown voltage to at least one of the TMR resistors of the TMR resistor cascade to short the at least one of the TMR resistors and lower the resistance of the TMR resistor cascade.

10. The bridge offset voltage compensation circuit of claim 1, further comprising:

a bottom electrode resistor cascade coupled in series with the TMR resistor cascade,

wherein the TMR resistor cascade has a negative temperature coefficient, and the bottom electrode resistor cascade has a positive temperature coefficient.

11. The bridge offset voltage compensation circuit of claim 10, wherein a magnitude of the resistance of the TMR resistor cascade and a magnitude of the resistance of the bottom electrode resistor cascade are substantially equal.

12. The bridge offset voltage compensation circuit of claim 10, wherein the bridge offset voltage has a temperature coefficient of zero or substantially close to zero.

13. A sensor comprising the offset voltage compensation circuit of claim 1.

14. A bridge offset voltage compensation circuit, comprising:

a bridge circuit having a first branch circuit; and

a first cascade of resistors coupled in series with the first branch circuit and having a positive temperature coefficient; and

a second cascade of resistors coupled in series with the first branch circuit and the first cascade of resistors, and having a negative temperature coefficient,

wherein the first and second cascades of resistors are configured to provide a resistance to compensate for a bridge offset voltage of the bridge circuit, and the bridge offset voltage has a temperature coefficient of zero or substantially close to zero.

15. A method of compensating for a bridge offset voltage, comprising:

providing a bridge circuit having a branch circuit;

providing a tunnel magnetoresistance (TMR) resistor cascade coupled in series with the branch circuit;

measuring a bridge offset voltage of the bridge circuit; and

configuring, based on the measured bridge offset voltage, the resistance of the TMR resistor cascade to compensate for the bridge offset voltage of the bridge circuit.

16. The method of claim 15,

further comprising providing a low ohmic metal line coupled in parallel with the TMR resistor cascade, and having fuses,

wherein the configuring step comprises breaking, using the fuses, the low ohmic metal line at predetermined locations to establish a defined current flow path through the TMR resistor cascade.

17. The method of claim 15,

further comprising providing, for the TMR resistor cascade, a plurality of contact pads coupled between respective TMR resistors of the TMR resistor cascade,

wherein the configuring step comprises providing, using the plurality of contact pads, a voltage greater than a breakdown voltage to at least one of the TMR resistors to lower the resistance of the TMR resistor cascade.

18. The method of claim 15,

further comprising providing a bottom electrode resistor cascade coupled in series with the TMR resistor cascade,

19. The method of claim 18,

further comprising providing a low ohmic metal line coupled in parallel with the TMR resistor cascade and the bottom electrode resistor cascade, wherein the low ohmic metal line has fuses,

wherein the configuring step comprises breaking, using the fuses, the low ohmic metal line at predetermined locations to establish a defined current flow path through the TMR resistor cascade and the bottom electrode resister cascade.

20. The method of claim 15, wherein the configuring step comprises:

calculating a variable α in accordance with the equation

α = \frac{{Tk_Offset}_{target}}{\langle {Tk_R}_{TMR} \rangle + \langle {Tk_R}_{Bottom} \rangle},

where Tk_Offset_targetis a measured temperature coefficient of the bridge offset voltage of the bridge circuit, and

if a sign of the variable α is negative, a compensation resistance of the TMR resistor cascade is R_TMR=(1−α)·R_Corr, and a compensation resistance of the bottom electrode resistor cascade is R_bottom=α·R_Corr, and

if the sign of the variable α is positive, the compensation resistance of the TMR resistor cascade is R_TMR=α·R_Corr, and the compensation resistance of the bottom electrode resistor cascade is R_bottom=(1−α)·R_Corr,

where R_Corris a resistance needed to compensate for the bridge offset voltage of the bridge circuit.