US20160179113A1 - Temperature Independent Reference Current Generation For Calibration - Google Patents

Temperature Independent Reference Current Generation For Calibration Download PDF

Info

Publication number
US20160179113A1
US20160179113A1 US14/928,466 US201514928466A US2016179113A1 US 20160179113 A1 US20160179113 A1 US 20160179113A1 US 201514928466 A US201514928466 A US 201514928466A US 2016179113 A1 US2016179113 A1 US 2016179113A1
Authority
US
United States
Prior art keywords
calibration
current
voltage
resistor
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/928,466
Inventor
Subodh Prakash Taigor
Sridhar Yadala
Rangarao Samineni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SanDisk Technologies LLC
Original Assignee
SanDisk Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SanDisk Technologies LLC filed Critical SanDisk Technologies LLC
Priority to US14/928,466 priority Critical patent/US20160179113A1/en
Priority to US15/082,241 priority patent/US9704591B2/en
Assigned to SANDISK TECHNOLOGIES INC. reassignment SANDISK TECHNOLOGIES INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SAMINENI, RANGARAO, TAIGOR, SUBODH PRAKASH, YADALA, SRIDHAR
Assigned to SANDISK TECHNOLOGIES LLC reassignment SANDISK TECHNOLOGIES LLC CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: SANDISK TECHNOLOGIES INC
Publication of US20160179113A1 publication Critical patent/US20160179113A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05FSYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10Regulating voltage or current
    • G05F1/46Regulating voltage or current wherein the variable actually regulated by the final control device is dc
    • G05F1/462Regulating voltage or current wherein the variable actually regulated by the final control device is dc as a function of the requirements of the load, e.g. delay, temperature, specific voltage/current characteristic
    • G05F1/463Sources providing an output which depends on temperature
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/14Power supply arrangements, e.g. power down, chip selection or deselection, layout of wirings or power grids, or multiple supply levels
    • G11C5/147Voltage reference generators, voltage or current regulators; Internally lowered supply levels; Compensation for voltage drops
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C7/00Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/04Arrangements for writing information into, or reading information out from, a digital store with means for avoiding disturbances due to temperature effects
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K19/00Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/0005Modifications of input or output impedance
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C2207/00Indexing scheme relating to arrangements for writing information into, or reading information out from, a digital store
    • G11C2207/22Control and timing of internal memory operations
    • G11C2207/2254Calibration

Definitions

  • the present technology relates to semiconductors and/or non-volatile memory devices.
  • Most semiconductor devices include an input circuit configured to receive signals from the outside world via input pads (or pins) and an output circuit configured to provide internal signals to the outside via output pads (or pins).
  • the input circuit has a termination resistor for impedance matching of the external transmission line.
  • the output circuit has an output driver, which has a resistance (R ON ).
  • the impedance of both the termination resistor and the output driver can change due to various circumstances such as variation of a power supply voltage, a change in operating temperature, etc. Thus, an impedance mismatch can arise.
  • the impedance mismatch can cause signal reflection, which can compromise signal integrity.
  • the swing width that is the difference between high and low logic levels
  • the reduction in the swing width of the signal easily exposes the signal to external noise, causing signal reflection to become more critical at an interface terminal due to impedance mismatch.
  • the impedance mismatch may lead to a difficulty in high-speed transmission of data and distortion of output data.
  • the device's output drivers and the device's termination resistors may be periodically calibrated.
  • One calibration technique is referred to as a ZQ calibration.
  • ZQ calibration may use a precision calibration resistor that is located off chip. The chip may have a variable impedance circuit which is calibrated with respect to the off chip resistor. The ZQ calibration adjusts the impedance of the variable impedance circuit until it is calibrated to the off chip resistor. This results in an impedance code that can be used to adjust the impedance of the device's output drivers.
  • FIG. 1 is a diagram of one embodiment of a calibration circuit having a temperature independent reference current generation.
  • FIG. 2A is a diagram of one embodiment of a temperature independent reference current generation circuit.
  • FIG. 2B is a diagram of one embodiment of an I PTAT current generation circuit of FIG. 2A .
  • FIG. 2C is a diagram of one embodiment of a circuit for providing the temperature independent reference current of FIG. 2A to a calibration node.
  • FIG. 2D is a diagram of one embodiment of a temperature independent reference current generation circuit in which the on chip calibration resistor has a negative TCO.
  • FIG. 3 describes one embodiment of a process of performing an impedance calibration using an on-chip calibration resistor.
  • FIG. 4A depicts one embodiment of the variable impedance circuit 104 of FIG. 1 .
  • FIG. 4B depicts another embodiment of the variable impedance circuit 104 of FIG. 1 .
  • FIG. 5 shows one embodiment of a circuit for varying the resistance of a voltage modulation resistor as a function of the supply voltage.
  • FIG. 6A is a perspective view of a 3D stacked non-volatile memory device in which embodiments may be practiced.
  • FIG. 6B is a functional block diagram of a memory device such as the 3D stacked non-volatile memory device of FIG. 6A .
  • FIG. 7 depicts a cross-sectional view of a block of the 3D non-volatile memory device of having straight strings.
  • the temperature independent reference current may be generated based on a current through an on-chip calibration resistor.
  • the temperature independent reference current is used in a ZQ calibration circuit.
  • the temperature independent reference current is compared with a calibration current in a ZQ calibration circuit. Depending on results of this comparison, the calibration current may be adjusted to bring its magnitude closer to, or equal to, the temperature independent reference current.
  • the device has an on chip calibration resistor. This alleviates the need for an off chip calibration resistor. Off chip calibration resistors can be costly. A part of the cost may be in providing an extra pin or pad for the off chip calibration resistor to connect to. Also, ZQ calibration using an off chip calibration resistor can be slow. A reason for this is capacitive loading on the pad or pin to which the off chip calibration resistor is connected.
  • Embodiments disclosed herein provide for fast calibration (e.g., fast ZQ calibration).
  • Embodiments disclosed herein provide for cost effective calibration (e.g., cost effective ZQ calibration).
  • the resistance of the on chip calibration resistor may depend on temperature. For example, its resistance may either decrease or increase as temperature increases.
  • the temperature dependence may be expressed by a temperature coefficient (TCO) having a sign and magnitude.
  • TCO temperature coefficient
  • a positive temperature coefficient in this context it is meant that the resistance increases as temperature increases and decreases as temperature decreases, for at least a range of temperatures at which the device is normally operated.
  • a negative temperature coefficient in this context it is meant that the resistance decreases as temperature increases and increases as temperature decreases, for at least a range of temperatures at which the device is normally operated.
  • the current through the resistor may be a function of temperature. For example, if the resistance drops as temperature increases, then the current will increase as temperature increases—given the constant voltage difference assumption.
  • a temperature independent reference current is generated based on a current that passes through the on chip calibration resistor.
  • a temperature independent reference current refers to a reference current whose magnitude does not change as temperature changes.
  • a voltage at one terminal of the on chip calibration resistor is modulated to substantially cancel the temperature coefficient of the on chip calibration resistor, in one embodiment. This may result in the current passing through the on chip calibration resistor being temperature independent. For example, given that a certain reference voltage is applied to one terminal of the on chip calibration resistor, the voltage applied to the other terminal may be modulated as temperature changes, such that the current passing through the on chip calibration resistor is constant regardless of the temperature.
  • FIG. 1 is a diagram of one embodiment of a circuit 100 that performs a calibration using a temperature independent reference current.
  • the circuit 100 adjusts the impedance of variable impedance circuit 104 until its impedance matches a target resistance (R TARGET ).
  • the circuit could be used in a ZQ calibration process to determine, for example, calibration codes.
  • the circuit makes use of an on-chip resistor 110 to perform the calibration.
  • circuit 100 resides on an integrated circuit.
  • Temperature independent reference current generation circuit 106 generates a temperature independent reference current (I TIREF ) 112 based on a current (I CR ) through on-chip calibration resistor 110 . Temperature independent reference current generation circuit 106 maintains the temperature independent reference current (I TIREF ) at a constant magnitude despite temperature variations. Those of ordinary skill in the art will understand that maintaining at a constant magnitude may include some small variation in the magnitude of the temperature independent reference current (I TIREF ) with respect to temperature due to non-ideal characteristics of real world circuit elements.
  • the resistance of on-chip calibration resistor 110 has a temperature coefficient (TCO) due to, for example, the material from which it is fabricated.
  • TCO temperature coefficient
  • the TCO is a positive TCO. That is, the resistance of on-chip calibration resistor 110 increases as temperature increases and decreases as temperature decreases.
  • the TCO is a negative TCO. That is, the resistance of on-chip calibration resistor 110 decreases as temperature increases and increases as temperature decreases.
  • the resistor 110 is formed from polysilicon. However, a different semiconductor could be used.
  • the resistor 110 is formed from a doped semiconductor, such as doped silicon.
  • the resistor 110 may be formed from a material that is not a semiconductor. In one embodiment, resistor 110 resides within an integrated circuit.
  • the on-chip calibration resistor 110 has a reference voltage V REF applied to one terminal.
  • the other terminal is supplied with a modulating voltage V M .
  • the modulating voltage cancels the TCO of the resistor 110 , in one embodiment.
  • canceling the TCO of the resistor 110 may include some small temperature dependence of the resistance of resistor 110 due to non-ideal characteristics of real world circuit elements, including those circuit elements that provide the modulating voltage.
  • the current (I CR ) through the resistor is independent of temperature, in one embodiment.
  • the current (I CR ) may be maintained at a constant magnitude despite temperature variations.
  • maintaining the current (I CR ) at a constant magnitude despite temperature variations may include some small variation in the magnitude of the current (I CR ) with respect to temperature due to non-ideal characteristics of real world circuit elements.
  • the modulating voltage having a TCO it is meant that the magnitude of the modulating voltage is a function of temperature.
  • a positive TCO for the modulating voltage means that its magnitude increases as temperature increases and decreases as temperature decreases.
  • a negative TCO for the modulating voltage means that its magnitude decreases as temperature increases, and increases as temperature decreases.
  • the modulating voltage substantially cancels the TCO of the resistor 110 , in one embodiment.
  • the current (I CR ) through the resistor is substantially independent of temperature, in one embodiment.
  • Variable impedance circuit 104 outputs a calibration current (I CAL ).
  • the magnitude of the calibration current may depend on the impedance of variable impedance circuit 104 .
  • the magnitude of the calibration current may be proportional to the impedance of variable impedance circuit 104 .
  • the magnitude of the calibration current is inversely proportional to the impedance of variable impedance circuit 104 .
  • the calibration logic 102 outputs an impedance code (DAC ⁇ n:0>) to the variable impedance circuit 104 .
  • the impedance code has n+1 bits.
  • the variable impedance circuit 104 adjusts its impedance based on the impedance code.
  • Calibration logic 102 may be implemented in a variety of ways, including but not limited to, a state machine, a processor, digital logical, or a combination of any of these elements.
  • the processor may execute instructions that are stored on computer readable storage.
  • the variable impedance circuit 104 may comprise a number of circuit elements, such as transistors.
  • the variable impedance circuit 104 turns those transistors on or off in response to the value of the impedance code (DAC) to alter the impedance of the variable impedance circuit 104 , in one embodiment.
  • variable impedance circuit 104 is a binary weighted transistor circuit.
  • the variable impedance circuit 104 is configured to have 2 n+1 different impedances in response to the different values of an “n+1” bit impedance code (DAC).
  • FIGS. 4A and 4B provide further details of various embodiments of the variable impedance circuit 104 .
  • Comparator 108 compares the magnitude of I CAL with the magnitude of I TIREF 112 . Note that these two currents meet at the non-inverting input of the comparator 108 .
  • the inverting input of the comparator 108 is supplied with a reference voltage V REF .
  • V REF is half the magnitude of V SUPPLY .
  • the magnitude of I TIREF is based on the reference voltage (V REF ) and the target resistance (R T ) to which the variable impedance circuit 104 is being calibrated. In one embodiment, the following equation holds:
  • I TIREF V REF /R T (1)
  • Equation 1 Equation 1
  • V REF V SUPPLY /2
  • the target resistance (R T ) may be the resistance to which the variable impedance circuit 104 is being calibrated.
  • the resistance of the on-chip calibration resistor 110 may be related to the target resistance (R T ). However, the resistance of the on-chip calibration resistor 110 does not necessarily equal the target resistance (R T ). For example, both currents and resistances can be scaled on chip. For example, the resistance of the on-chip calibration resistor 110 could be scaled up from the target resistance to permit on chip currents to be scaled down.
  • Comparator 108 outputs a signal (“Flag”) to the calibration logic 102 that indicates whether the magnitude of the calibration current (I CAL ) is greater than or less than the magnitude of the temperature independent reference current (I TIREF ).
  • the calibration logic 102 adjusts the impedance code (DAC) based on the value of the Flag. In general, if the Flag indicates that I CAL is lower in magnitude than the I TIREF , then the new impedance code will cause the variable impedance circuit 104 to increase the magnitude of I CAL . On the other hand, if the flag indicates that the magnitude of I CAL is greater in magnitude than the magnitude of I TIREF , then the new impedance code (DAC) will cause the variable impedance circuit 104 to decrease the magnitude of I CAL .
  • a binary search is performed to seek a new impedance code. In one embodiment, a linear search is performed to find a new impedance code.
  • variable impedance circuit 104 is connected between V SUPPLY and the non-inverting input of the comparator 108 .
  • the voltage of the non-inverting input of the comparator 108 should be forced to be close to or equal to the voltage (V REF ) at the non-inverting input of the comparator 108 .
  • V REF voltage at the non-inverting input of the comparator 108 .
  • the voltage across the variable impedance circuit 104 should be about V SUPPLY ⁇ V REF , in one embodiment.
  • V SUPPLY is twice V REF , this implies that the voltage across the variable impedance circuit 108 should be approximately V REF .
  • the magnitude of I CAL may be increased by decreasing the impedance of the variable impedance circuit 104 .
  • the temperature independent reference current (I TIREF ) 112 is between the non-inverting input of the comparator 108 and ground.
  • I TIREF temperature independent reference current
  • the voltage across the components that provide I TIREF should be forced to be close to or equal to V REF , in one embodiment.
  • V REF voltage across the components that provide I TIREF (components not depicted in FIG. 1 ) should be forced to be close to or equal to V REF , in one embodiment.
  • V REF the voltage at the non-inverting input of comparator 108 could be slightly higher or slightly lower than V REF .
  • FIG. 2A is a diagram that provides further details of one embodiment of temperature independent reference current generation 106 .
  • the circuit 106 includes an on-chip calibration resistor 110 .
  • the resistance of the on-chip calibration resistor 110 changes with temperature.
  • the resistance of the on-chip calibration resistor 110 has a TCO.
  • the resistance of the on-chip calibration resistor 110 may increase with increases in temperature (e.g., the TCO of the resistance is positive).
  • the current (I CR ) through the chip calibration resistor 110 would decrease as temperature increases.
  • the circuit of FIG. 2A may be used with a resistor 110 having a positive TCO.
  • the resistance of the on-chip calibration resistor 110 might decrease with increases in temperature (e.g., the TCO of the resistance is negative).
  • the concept may be used with a resistor having a negative TCO.
  • FIG. 2D shows one embodiment of circuit that may be used with a resistor having a negative TCO.
  • I CR would increase as temperature increases.
  • the TCO of the on-chip calibration resistor 110 is negative or positive may depend on the material from which the resistor 110 is fabricated, doping, and other factors.
  • the resistivity of undoped silicon may have a negative TCO.
  • doped silicon could have a positive TCO or a negative TCO.
  • the magnitude of the TCO of resistivity for a semiconductor may depend on type of impurity used to dope, as well as the doping concentration.
  • the on-chip calibration resistor 110 is fabricated from silicon that is doped with a type and concentration of an impurity that causes the resistivity of the doped silicon to have a positive TCO.
  • One terminal of the on-chip calibration resistor 110 is supplied with V REF from operational amplifier 214 .
  • one terminal of operational amplifier 214 is coupled to the inverting input of operational amplifier 214 .
  • the non-inverting input of operational amplifier 214 is supplied with V REF . Since the inverting input of operational amplifier 214 is forced to V REF , one terminal of the on-chip calibration resistor 110 is supplied with V REF .
  • the other terminal of the on-chip calibration resistor 110 is provided with a modulating voltage (V M ).
  • V M The magnitude of the modulating voltage may be a function of temperature.
  • this is referred to as the modulating voltage having a TCO.
  • the TCO of the modulating voltage cancels the TCO of the resistance of the on-chip calibration resistor 110 .
  • I CR the current through the on-chip calibration resistor 110 being independent of temperature.
  • I CR may be maintained at a constant magnitude despite temperature variations.
  • the magnitude of the modulating voltage (V M ) may be lower than the magnitude of V REF . Therefore, decreasing V M will result is a greater voltage across the on-chip calibration resistor 110 , and hence a greater current (I CR ) through the on-chip calibration resistor 110 .
  • V M has a negative TCO to cancel a positive TCO of the on-chip calibration resistor 110 .
  • the magnitude of the modulating voltage (V M ) may be higher than the magnitude of V REF . Therefore, decreasing V M will result is a lower voltage across the on-chip calibration resistor 110 , and hence a lower current (I CR ) through the on-chip calibration resistor 110 .
  • V M has a positive TCO to cancel a positive TCO of the on-chip calibration resistor 110 .
  • the current (I CR ) through the on-chip calibration resistor 110 also flows through PMOS transistor 222 , whose current is mirrored to PMOS transistor 224 .
  • the current through PMOS transistor 224 may be used as the temperature independent reference current (I TREF ).
  • I TREF temperature independent reference current
  • the ratio of transistor PMOS 224 to PMOS transistor 222 may be selected to scale current I CR up or down.
  • the current through PMOS transistor 224 or some version of it, may be used for the temperature independent reference current (I TREF ) in FIG. 1 .
  • the current through transistor 224 may be scaled up or down prior to providing it to the calibration node in FIG. 1 .
  • transfer element 270 is depicted to provide I TIREF the to the calibration node.
  • Transfer element 270 may be implemented with transistors.
  • transfer element 270 may be a current mirror.
  • An example of transfer element 270 is depicted in FIG. 2C .
  • operational amplifier 214 is connected to the gate terminal of PMOS transistor 222 , as well as to the gate terminal of PMOS transistor 224 . Also the source terminals of PMOS transistors 222 and 224 are each connected to the voltage supply. Thus, the drain terminal of PMOS transistor 222 is connected to the inverting input of operational amplifier 214 .
  • FIG. 2A depicts an I PTAT current source 201 .
  • the I PTAT current source 201 may be implemented by a band gap reference (BGR) circuit.
  • BGR band gap reference
  • I PTAT may be generated by the band gap reference (BGR) circuit.
  • FIG. 2B One embodiment of I PTAT current source 201 is depicted in FIG. 2B .
  • I PTAT current source 201 is connected between the supply voltage and the inverting input of operational amplifier 202 .
  • the non-inverting input of operational amplifier 202 is supplied with V BGP . Due to the circuit configuration, the voltage at the non-inverting input should be forced to V BGP . Therefore, the voltage across I PTAT current source 201 is given by V SUPPLY ⁇ V BGP . In one embodiment, V BGP is about 1.2 V. Therefore, the resistance (R PTAT ) of I PTAT current source 201 may be expressed as (V SUPPLY ⁇ V BGP )/I PTAT , in one embodiment.
  • the output of operational amplifier 202 is connected to the gate terminal of NMOS transistor 204 .
  • the source terminal of NMOS transistor 204 is connected to the inverting input of operational amplifier 202 .
  • the drain terminal of NMOS transistor 204 is connected to PMOS transistor 208 , which forms a current mirror with PMOS transistor 210 .
  • Band gap reference resistor R BGR 206 is connected between the inverting input of operational amplifier 202 and ground. Thus, resistor R BGR 206 receives I PTAT . Also, during circuit operation, the inverting input of input of operational amplifier 202 will be forced to V BGP . The resistance of resistor R BGR 206 will be referred to as “R BGR ”. Hence, resistor R BGR 206 in effect has V BGP provided to the terminal that receives I PTAT . Hence, the voltage (V BGR ) at that terminal is given by Equation 3:
  • V BGR V BGP +I PTAT *R BGR (3)
  • Equation 3 the component I PTAT *R BGR may be referred to as a, “band gap reference voltage.”
  • Equation 4 The current (I BGR ) through resistor R BGR 206 is given by Equation 4:
  • I BGR I PTAT +V BGP /R BGR (4)
  • the current I BGR also flows through NMOS transistor 204 and PMOS transistor 208 .
  • the current through PMOS transistor 208 is mirrored to PMOS transistor 210 .
  • the source terminals of PMOS transistor 208 and PMOS transistor 210 are each connected to the supply voltage, and their gate terminals are connected.
  • PMOS transistors 208 and 210 are similar in size such that the current through transistor 210 is substantially equal to I BGR .
  • PMOS transistors 208 and 210 do not need to be the same size, in which case the current through transistor 210 may be a scaled version of I BGR .
  • the current of PMOS transistor 210 also flows through voltage modulation resistor R CT 212 . This current is I BGR in one embodiment.
  • Voltage modulation resistor R CT 212 is connected between the inverting input of operational amplifier 216 and ground.
  • the voltage at the inverting input of operational amplifier 216 may be given by Equation 5:
  • V RCT I BGR *R CT (5)
  • the output of operational amplifier 216 is connected to the gate terminal of NMOS transistor 218 .
  • the source of PMOS transistor 218 is connected to ground.
  • the drain of NMOS transistor 218 is connected to the non-inverting input of operational amplifier 216 .
  • the voltage at the non-inverting input of operational amplifier 216 may be forced to V RCT .
  • the modulating voltage V M may be equal to V RCT . It may be stated that the node of the voltage modulation resistor 212 that is not grounded is coupled to the second terminal of the calibration resistor 110 , as the voltage V RCT may be provided to the second terminal of the calibration resistor 110 .
  • a voltage modulating circuit 232 is configured to provide a modulating voltage (V M ) to one of the terminals of the calibration resistor 110 .
  • V M modulating voltage
  • the voltage modulating circuit 232 modulates a voltage at a terminal of the calibration resistor 110 to cancel the temperature coefficient of the calibration resistor. Therefore, the current passing through the calibration resistor 110 may be temperature independent.
  • the voltage modulating circuit 232 is made up of the I PTAT source 201 , resistors 206 , 212 , operational amplifiers 202 , 216 , and transistors 204 , 208 , 210 , and 218 . Other circuit elements could be used for voltage modulating circuit 232 .
  • the voltage modulating circuit 232 may also be referred to as a temperature dependent voltage generation circuit.
  • the temperature dependent voltage generation circuit may be configured to generate a voltage (V M ) at the second terminal the calibration resistor 110 that has a temperature coefficient configured to cancel the temperature coefficient of the calibration resistor 110 .
  • a reference voltage circuit 236 may be configured to provide a reference voltage (V REF ) to another terminal of the calibration resistor 110 .
  • the reference voltage circuit 236 is made up of operational amplifier 214 and transistor 222 .
  • a temperature independent reference current circuit 234 may be configured to derive the temperature independent reference current (I TIREF ) from the temperature independent current (I CR ) passing through the calibration resistor 110 .
  • the temperature independent reference current circuit 234 may be made up of the calibration resistor 110 , transistor 222 , transistor 224 , and transfer element 270 . Other circuit elements could be used for temperature independent reference current circuit 234 .
  • circuit elements in FIG. 2A may together be referred to as a proportional to temperature circuit that is configured to provide a current proportional to temperature through the voltage modulation resistor 212 .
  • a portion of the voltage modulating circuit 232 that provides the current to voltage modulation resistor 212 may serve this purpose.
  • Those elements include I PTAT source 201 , operational amplifier 202 , resistor R BGR 206 , and transistors 204 , 208 , and 210 .
  • Other circuit elements could be used for proportional to temperature circuit.
  • FIG. 2B depicts one embodiment of I PTAT source 201 , which may be used in circuit 106 of FIG. 2A .
  • I PTAT source 201 includes operational amplifier 240 , PMOS transistor 248 , PMOS transistor 250 , PMOS transistor 252 , R PTAT resistor 242 , diode 244 , and diode 246 .
  • the source terminals of PMOS transistors 248 , 250 , and 252 are each connected to the voltage supply (V SUPPLY ).
  • the drain of PMOS transistor 248 is connected to the inverting input of operational amplifier 240 .
  • the drain of PMOS transistor 250 is connected to the non-inverting input of operational amplifier 240 .
  • the gates of PMOS transistors 248 , 250 , and 252 are each connected to the output of operational amplifier 240 .
  • R PTAT resistor 242 is connected between the non-inverting input of operational amplifier 240 and diode 246 .
  • Diode 246 is connected between R PTAT resistor 242 and ground.
  • Diode 244 is connected between the inverting input of operational amplifier 240 and ground.
  • Diode 244 and diode 246 have a ratio of 1:N.
  • I PTAT current flows through PMOS transistor 252 .
  • the drain of PMOS transistor 252 is connected to one terminal of resistor R BGR 206 .
  • the drain of PMOS transistor 252 is also connected to the inverting input of operational amplifier 202 . Note that resistor R BGR 206 and operational amplifier 202 are also depicted in FIG. 2A .
  • FIG. 2C depicts one embodiment of transfer circuit 270 , which may be used in circuit 106 of FIG. 2A .
  • Transfer circuit 270 provides I TIREF from transistor 224 to the non-inverting input of comparator 108 .
  • Transfer circuit 270 includes NMOS transistor 262 and NMOS transistor 260 , each of which have their source connected to ground.
  • NMOS transistor 262 and NMOS transistor 260 are in a current mirror configuration.
  • the drain of NMOS transistor 262 is connected to the drain of PMOS transistor 224 in order to receive I TIREF from PMOS transistor 224 .
  • the drain of NMOS transistor 260 is connected to the non-inverting input of comparator 108 in order to provide I TIREF to the calibration node.
  • NMOS transistor 262 and NMOS transistor 260 could be the same size, or may be sized differently.
  • the version of I TIREF at the non-inverting input of comparator 108 may be the same magnitude as the version of I TIREF that flows through transistor 224 , may be scaled up, or may be scaled down. Note that comparator 108 is also depicted in FIG. 1 , and that transistor 224 is also depicted in FIG. 2A .
  • FIG. 2D is a diagram of one embodiment of a temperature independent reference current generation circuit in which the on chip calibration resistor 110 has a negative TCO.
  • the circuit is similar to the one in FIG. 2A .
  • FIG. 2D depicts a different embodiment of voltage modulating circuit 232 than the one depicted in FIG. 2A .
  • the I PTAT current is provided directly to resistor 212 .
  • the resistance of the on-chip calibration resistor 110 may decrease with increases in temperature (e.g., the TCO of the resistance is negative). Were the voltage across the on-chip calibration resistor 110 to remain constant, this implies that the current (I CR ) through the on chip calibration resistor 110 would increase as temperature increases.
  • V M has a TCO to cancel the negative TCO of the on-chip calibration resistor 110 , in this embodiment.
  • I PTAT source 201 of FIG. 2B may also be used in the circuit of FIG. 2D .
  • transfer circuit 270 from FIG. 2C may be used in the circuit of FIG. 2D .
  • FIG. 3 describes one embodiment of a process of performing an impedance calibration using an on-chip calibration resistor.
  • the process may be implemented by the circuits of FIG. 1 , 2 A, 2 B, 2 C, and/or 2 D, but is not limited thereto.
  • the process performs a ZQ calibration.
  • a reference voltage is supplied to a first terminal of an on-chip calibration resistor.
  • the reference voltage circuit 236 provides the reference voltage (V REF ) to a terminal of on-chip calibration resistor 110 .
  • a compensating voltage is generated.
  • the compensating voltage may also be referred to as a modulating voltage.
  • voltage modulating circuit 232 generates the compensating voltage.
  • generating the compensating voltage includes generating a proportional to absolute temperature (PTAT) current, and generating the compensating voltage based on the PTAT current.
  • I PTAT current source 201 generates the I PTAT current.
  • a current that is based on I PTAT current is provided to voltage modulation resistor 212 , creating the compensating voltage at the inverting input of operational amplifier 216 .
  • the compensating (or modulating) voltage is provided to a second terminal of the on-chip calibration resistor 110 .
  • voltage modulating circuit 232 provides the compensating voltage to the second terminal of the on-chip calibration resistor 110 .
  • the non-inverting input of operational amplifier 216 is connected to the lower terminal of on-chip calibration resistor 110 to provide V M .
  • the configuration of operational amplifier 216 and transistor 218 may tend to force the voltage at the non-inverting input to be the same as the voltage at the inverting input of operational amplifier 216 . Therefore, the voltage that was created at the terminal of voltage modulation resistor 212 that is not grounded may be provided to the on-chip calibration resistor 110 .
  • a temperature independent reference current is provided to a calibration node.
  • the calibration node is the calibration node at the non-inverting input of comparator 108 of FIG. 1 , in one embodiment.
  • temperature independent reference current generation 106 provides the temperature independent reference current (e.g., I TIREF ) to the calibration node.
  • temperature independent reference current circuit 234 generates I TIREF from the current (I CR ) that passes through the on-chip calibration resistor 110 .
  • a calibration signal is provided to a variable impedance circuit to cause the variable impedance circuit to output a calibration current.
  • calibration logic 102 outputs an impedance code (DAC) to the variable impedance circuit 104 .
  • the variable impedance circuit 104 changes its impedance based on the value of the impedance code.
  • the magnitude of the calibration current is based on the impedance of the variable impedance circuit 104 .
  • a magnitude of the calibration current is compared to a magnitude of the temperature independent reference current.
  • comparator 108 compares the magnitude of the calibration current at its non-inverting input with the magnitude of the temperature independent reference current at its non-inverting input. Comparator 108 outputs a flag based on results of the comparison, as discussed above.
  • step 314 the calibration signal is adjusted based on results of the comparison.
  • calibration logic 102 adjusts the impedance code (DAC) based on the value of flag. As discussed already, this causes the variable impedance circuit 104 to adjust its impedance.
  • the calibration current may respond to changes in the impedance of the variable impedance circuit.
  • Step 310 - 314 can be repeated until the calibration current is balanced with the temperature independent reference current to a desired level of accuracy.
  • a linear search is performed by adjusting the impedance code by one unit at a time.
  • a binary search is performed. Searches other than linear or binary searches may be performed.
  • FIG. 4A depicts one embodiment of the variable impedance circuit 104 of FIG. 1 .
  • the variable impedance circuit 104 a is a replica of an output buffer.
  • variable impedance circuit 104 may be referred to as a replica circuit. In one embodiment, it is a binary weighted pull-up replica.
  • the variable impedance circuit 104 a includes transistors 402 - 0 , 402 - 1 , 402 - 2 , 402 - 3 , 402 - 4 , 402 - 5 , and 402 - 6 .
  • the transistors 402 are p-channel transistors. One terminal of each transistor 402 is connected to the supply voltage V SUPPLY . Another terminal of each transistor is connected to a resistor 414 . The resistor 414 is connected to the calibration node. This refers to the calibration node in FIG. 1 .
  • Each of the transistors 402 has its gate controlled by one of the bits of the impedance code DAC_P ⁇ n:0>.
  • Transistor 402 - 0 has its gate controlled by DAC_P_ 0 , which refers to the least significant bit of DAC_P ⁇ n:0>.
  • Transistor 402 - 1 has its gate controlled by DAC_P_ 1 .
  • Transistor 402 - 2 has its gate controlled by DAC_P_ 2 .
  • Transistor 402 - 3 has its gate controlled by DAC_P_ 3 .
  • Transistor 402 - 4 has its gate controlled by DAC_P_ 4 .
  • Transistor 402 - 5 has its gate controlled by DAC_P_ 5 .
  • Transistor 402 - 6 has its gate controlled by DAC_P_ 6 , which is the most significant bit of DAC_P ⁇ n:0>.
  • the connections to the gates may be referred to as an input to the variable impedance circuit.
  • the value of the impedance code may be used to select which transistors 402 are on/off in order to control the impedance of circuit 104 a .
  • the impedance code may be used to select which transistors 402 are on/off in order to control the output current of circuit 104 a .
  • circuit 104 a may also be referred to as a variable current circuit.
  • the transistors may be “binary weighted” such that transistor 402 - 0 has a weight of “1”, transistor 402 - 1 has a weight of “2”, transistor 402 - 2 has a weight of “4”, transistor 402 - 3 has a weight of “8”, transistor 402 - 4 has a weight of “16”, transistor 402 - 5 has a weight of “32”, and transistor 402 - 6 has a weight of “64”.
  • the weight it is meant the impact the transistor has on the impedance of the main binary weighted pull-up replica 404 a.
  • the transistors 402 have a binary weighted channel width-to-length ratio (W/L).
  • W/L binary weighted channel width-to-length ratio
  • the binary weighted channel W/L may be 1 ⁇ , 2 ⁇ , 4 ⁇ , 8 ⁇ , 16 ⁇ , 32 ⁇ , and 64 ⁇ .
  • the transistor W/L may also be referred to as transistor sizes.
  • a transistor 402 is implemented by multiple transistors.
  • each of the transistors 402 may represent one or more transistors.
  • transistor 402 - 0 might be implemented with a single transistor
  • transistor 402 - 1 might be implemented with two transistors
  • transistor 402 - 2 might be implemented with four transistors, etc.
  • each of the implementation transistors might have the same W/L.
  • FIG. 4B depicts one embodiment of a variable impedance circuit. This could be used in a calibration circuit that is similar to the one depicted in FIG. 1 . However, those of ordinary skill in the art will recognize that some variations may be made to the circuit of FIG. 1 given that the transistors in FIG. 4B are n-channel transistors.
  • the circuit 104 b is a binary weighted pull-down replica. The binary weighted pull-down replica 104 b may replicate a portion of an output driver.
  • the binary weighted pull-down replica 104 b includes transistors 422 - 0 , 422 - 1 , 422 - 2 , 422 - 3 , 422 - 4 , 422 - 5 , and 422 - 6 .
  • transistors 422 are n-channel transistors. One terminal of each transistor 422 is connected to the voltage V SUPPLY . Another terminal of each transistor is connected to a resistor 415 . The resistor 415 is connected to the calibration node.
  • Each of the transistors 422 has its gate controlled by one of the bits of the impedance code DAC_N ⁇ n:0>.
  • Transistor 422 - 0 has its gate controlled by DAC_N_ 0 , which refers to the least significant bit of DAC_P ⁇ n:0>.
  • Transistor 422 - 1 has its gate controlled by DAC_N_ 1 .
  • Transistor 422 - 2 has its gate controlled by DAC_N_ 2 .
  • Transistor 422 - 3 has its gate controlled by DAC_N_ 3 .
  • Transistor 422 - 4 has its gate controlled by DAC_N_ 4 .
  • Transistor 422 - 5 has its gate controlled by DAC_N_ 5 .
  • Transistor 422 - 6 has its gate controlled by DAC_N_ 6 , which is the most significant bit of DAC_N ⁇ n:0>.
  • the connections to the gates may be referred to as an input to the variable impedance circuit
  • the value of the impedance code may be used to select which transistors 402 are on/off in order to control the impedance of circuit 104 b .
  • the impedance code may be used to select which transistors 402 are on/off in order to control the output current of circuit 104 b .
  • circuit 104 b may also be referred to as a variable current circuit.
  • the transistors may be “binary weighted” such that transistor 422 - 0 has a weight of “1”, transistor 422 - 1 has a weight of “2”, transistor 422 - 2 has a weight of “4”, transistor 422 - 3 has a weight of “8”, transistor 422 - 4 has a weight of “16”, transistor 422 - 5 has a weight of “32”, and transistor 422 - 6 has a weight of “64”.
  • the weight it is meant the impact the transistor has on the impedance of the binary weighted pull-up replica 424 a.
  • the transistors 422 have a binary weighted channel width-to-length ratio (W/L).
  • W/L binary weighted channel width-to-length ratio
  • the binary weighted channel W/L may be 1 ⁇ , 2 ⁇ , 4 ⁇ , 8 ⁇ , 16 ⁇ , 32 ⁇ , and 64 ⁇ .
  • the transistor W/L may also be referred to as transistor sizes.
  • a transistor 422 of the binary weighted pull-down replica 414 a is implemented by multiple transistors.
  • each of the transistors 422 may represent one or more transistors.
  • transistor 422 - 0 might be implemented with a single transistor
  • transistor 422 - 1 might be implemented with two transistors
  • transistor 422 - 2 might be implemented with four transistors, etc.
  • each of the implementation transistors might have the same W/L.
  • FIGS. 4A and 4B are for cases in which the impedance code is seven bits. If the impedance code is greater or less than seven bits, then a corresponding change may be made to the number of transistors in FIGS. 4A and 4B .
  • Equation 6 a target for the temperature independent reference current is given by Equation 6:
  • I TIREF V REF /R T (6)
  • R T is the target resistance to which the impedance of the variable impedance circuit 104 is being compared. For example, this could be a target resistance for a ZQ calibration.
  • the reference voltage V REF refers to V REF at the inverting input of comparator 108 in FIG. 1 . As noted above, this may be one-half of the supply voltage (V SUPPLY ).
  • V SUPPLY supply voltage
  • R T could be viewed as a target resistance between the non-inverting input of comparator 108 and ground. Since, V REF may be one-half of V SUPPLY , the goal of the circuit of FIG. 1 may be stated as calibrating the impedance of the variable impedance circuit 104 to R T . More specifically, the goal may be stated as adjusting the impedance of the variable impedance circuit 104 until it is equal, or at least close to, R T .
  • Equation 7 is as follows:
  • V REF ⁇ V M refers to the voltage across on-chip calibration resistor 110 .
  • the resistance (R D ) of the on-chip calibration resistor 110 has a temperature coefficient.
  • the modulating voltage (V M ) is based on a PTAT current, in one embodiment. Equation 8A describes the modulating voltage (V M ) in terms of the PTAT current from I PTAT current source 201 and other elements in FIG. 2A . Recall that the circuit of FIG. 2A may be used when the on chip calibration resistor 110 has a positive TCO.
  • V M V BGP R BGR * R CT - kT q ⁇ ln ⁇ ⁇ N * R CT R PTAT ( 8 ⁇ A )
  • the modulating voltage (V M ) has two components in Equation 8A. Each component includes the resistance (R CT ) of voltage modulation resistor 212 times a current. Recall that the current through the resistor R BGR 206 may be reflected to voltage modulation resistor 212 . Thus, the two currents are the two current components that flow through resistor R BGR 206 . One of those currents may be given by V BGP /R BGR . This is due to the impact of V BGP being provided to resistor R BGR 206 by operational amplifier 202 . The other current is the I PTAT current.
  • Equation 8A the I PTAT current is expressed in terms of Boltzmann's constant (k), the absolute temperature (T) in Kelvin, the absolute value of charge on an electron (q), and an ideality factor (N).
  • R PTAT is the resistance of the I PTAT current source 201 in FIG. 2A , in one embodiment.
  • R PTAT is the resistance of R PTAT resistor 242 in FIG. 2B , in one embodiment.
  • Equation 8B describes the modulating voltage (V M ) in terms of the PTAT current from I PTAT current source 201 and other elements in FIG. 2D . Recall that the circuit of FIG. 2D may be used when the on chip calibration resistor 110 has a negative TCO.
  • V M kT q ⁇ ln ⁇ ⁇ N * R CT R PTAT ( 8 ⁇ B )
  • the modulating voltage (V M ) is designed such that the current (I CR ) through the on-chip calibration resistor 110 is temperature independent, as indicated by Equation 9.
  • Equation 10 Given that the derivative of I CR with respect to temperature is zero, the following condition in Equation 10 may hold true:
  • Equation 7 The following is a restatement of Equation 7, with the temperature dependence of the modulating voltage (V M ) and the on-chip calibration resistor (R D ) noted:
  • V REF / R T V REF - V M ⁇ ( T ) R D ⁇ ( T ) ( 11 )
  • a goal of one embodiment is to have modulating voltage (V M ) nullify the TCO of the on-chip calibration resistor 110 .
  • V M modulating voltage
  • Equation 12 expresses a condition for the temperature dependence of the modulating voltage in order to nullify the TCO of the on-chip calibration resistor.
  • TCO RD may be the temperature coefficient with respect to resistivity of the material(s) (after doping, if doping is used) from which the on-chip calibration resistor 110 is formed. Stated differently, TCO RD may be the temperature coefficient with respect to resistance of the on-chip calibration resistor 110 .
  • TCO RD is a positive value. However, TCO RD could be a negative value, depending on factors such as the material from which the on-chip calibration resistor is fabricated, doping levels, dopant materials, etc.
  • V M ⁇ T V REF * [ - R D ⁇ ( T ) R T ] * TCO RD ( 12 )
  • Equation 13A gives a design equation for one embodiment, where the derivative of the modulating voltage (V M ) with respect to temperature may be given by Equation 12. Equation 13A may apply for the circuit of FIG. 2A , in which TCO of the on-chip calibration resistor 110 is positive.
  • R CT - ⁇ V M ⁇ T * q k * 1 ln ⁇ ⁇ N * R PTAT ( 13 ⁇ A )
  • Equation 13B gives a design equation for one embodiment, where the derivative of the modulating voltage (V M ) with respect to temperature may be given by Equation 12. Equation 13B may apply for the circuit of FIG. 2D , in which TCO of the on-chip calibration resistor 110 is negative.
  • R CT ⁇ V M ⁇ T * q k * 1 ln ⁇ ⁇ N * R PTAT ( 13 ⁇ B )
  • R PTAT may be a property of the I PTAT current source 201 , in one embodiment.
  • R PTAT is R PTAT resistor 242 in FIG. 2B .
  • a suitable value for R CT may be determined from Equations 12, 13A and 13B. Once a suitable value for value for R CT is found, a suitable value for value for R BGR may be determined from, for example, Equation 8A to have an appropriate level for V M .
  • the on-chip calibration resistor 110 may be trimmed to compensate for process variation. For example, if the on-chip calibration resistor 110 is formed from doped polysilicon, its resistance could depend on factors such as the number and size of grain boundaries, shape (length, width, height) of the polysilicon, doping concentration, etc. In one embodiment, the on-chip calibration resistor 110 is trimmed such that at a reference temperature its resistance equals a target resistance.
  • the resistance of the voltage modulation resistor R CT 212 is variable to account for variations in the supply voltage V SUPPLY .
  • FIG. 5 shows one embodiment of a circuit for varying the resistance of the voltage modulation resistor R CT 212 as a function of the supply voltage.
  • the supply voltage is provided to the analog-to-digital converter (ADC) 502 .
  • the ADC 502 generates a digital signal R S that is proportional to the magnitude of the supply voltage V SUPPLY .
  • the digital signal R S is provided to the voltage modulation resistor R CT 212 .
  • the voltage modulation resistor R CT 212 is configured to modify its resistance based on the digital signal R S .
  • the impedance calibration circuit 100 is part of a memory device.
  • the following discussion provides details of the structure of example memory devices which can implement the proposed technology for determining impedance codes.
  • FIG. 6A is a perspective view of a 3D stacked non-volatile memory device.
  • the memory device 800 includes a substrate 801 .
  • On and above the substrate are example blocks BLK 0 and BLK 1 of memory cells (non-volatile storage elements).
  • a peripheral area 804 with circuitry for use by the blocks.
  • the substrate 801 can also carry circuitry under the blocks, along with one or more lower metal layers which are patterned in conductive paths to carry signals of the circuitry.
  • the blocks are formed in an intermediate region 802 of the memory device.
  • In an upper region 803 of the memory device one or more upper metal layers are patterned in conductive paths to carry signals of the circuitry.
  • Each block comprises a stacked area of memory cells, where alternating levels of the stack represent word lines.
  • each block has opposing tiered sides from which vertical contacts extend upward to an upper metal layer to form connections to conductive paths. While two blocks are depicted as an example, additional blocks can be used, extending in the x- and/or y-directions. Additionally, note that components are considered to be connected if they are directly connected or indirectly connected.
  • the length of the plane, in the x-direction represents a direction in which signal paths to word lines extend in the one or more upper metal layers (a word line or SGD line direction)
  • the width of the plane, in the y-direction represents a direction in which signal paths to bit lines extend in the one or more upper metal layers (a bit line direction).
  • the z-direction represents a height of the memory device.
  • FIG. 6B is a functional block diagram of a memory device 800 such as the 3D stacked non-volatile memory device 800 of FIG. 6A .
  • the memory device 800 may include one or more memory die 808 .
  • the memory die 808 includes a memory structure 826 of memory cells, such as an array of memory cells, control circuitry 810 , and read/write circuits 828 .
  • the memory structure can include the blocks BLK 0 and BLK 1 of FIG. 8A .
  • the memory structure 826 is addressable by word lines via a row decoder 824 and by bit lines via a column decoder 832 .
  • the read/write circuits 828 include multiple sense blocks SB 1 , SB 2 , . . .
  • a controller 822 is included in the same memory device 800 (e.g., a removable storage card) as the one or more memory die 808 . In some embodiments, one controller will communicate with multiple memory die. Commands and data are transferred between the host 840 and controller 822 via a data bus 820 and between the controller and the one or more memory die 808 via lines 818 .
  • the memory die has I/O circuitry 700 , in one embodiment. I/O circuitry 700 may contain output buffers. In one embodiment, a ZQ calibration of the output buffers is performed using the circuit of FIG. 1 .
  • Memory structure 826 can be a two dimensional structure or a three dimensional structure of memory cells (e.g., NAND flash memory cells).
  • the memory structure may comprise one or more array of memory cells including a 3D array.
  • the memory structure may comprise a monolithic three dimensional memory structure in which multiple memory levels are formed above (and not in) a single substrate, such as a wafer, with no intervening substrates.
  • the memory structure may comprise any type of non-volatile memory that is monolithically formed in one or more physical levels of arrays of memory cells having an active area disposed above a silicon substrate.
  • the memory structure may be in a non-volatile memory device having circuitry associated with the operation of the memory cells, whether the associated circuitry is above or within the substrate.
  • the control circuitry 810 cooperates with the read/write circuits 828 to perform memory operations on the memory structure 826 , and includes a state machine 812 , an on-chip address decoder 814 , and a power control module 816 .
  • the state machine 812 provides chip-level control of memory operations.
  • Parameter storage 813 may be provided for storing operational parameters.
  • the on-chip address decoder 814 provides an address interface between that used by the host or a memory controller to the hardware address used by the decoders 824 and 832 .
  • the power control module 816 controls the power and voltages supplied to the word lines and bit lines during memory operations. It can include drivers for word line layers (WLLs) in a 3D configuration, SGS and SGD transistors and source lines.
  • the sense blocks can include bit line drivers, in one approach.
  • An SGS transistor is a select gate transistor at a source end of a NAND string
  • an SGD transistor is a select gate transistor at a drain end of a NAND string.
  • control circuitry 810 state machine 812 , decoders 814 / 824 / 832 , power control module 816 , sense blocks SB 1 , SB 2 , . . . , SBp, read/write circuits 828 , and controller 822 can be thought of as at least one or more control circuits.
  • the off-chip controller 822 may comprise a processor 822 c and storage devices (memory) such as ROM 822 a and RAM 822 b .
  • the storage devices comprises code such as a set of instructions, and the processor 822 c is operable to execute the set of instructions to provide the functionality described herein.
  • processor 822 c can access code from a storage device 826 a of the memory structure, such as a reserved area of memory cells in one or more word lines.
  • non-volatile memory in addition to NAND flash memory can also be used.
  • Semiconductor memory devices include volatile memory devices, such as dynamic random access memory (“DRAM”) or static random access memory (“SRAM”) devices, non-volatile memory devices, such as resistive random access memory (“ReRAM”), electrically erasable programmable read only memory (“EEPROM”), flash memory (which can also be considered a subset of EEPROM), ferroelectric random access memory (“FRAM”), and magnetoresistive random access memory (“MRAM”), and other semiconductor elements capable of storing information.
  • volatile memory devices such as dynamic random access memory (“DRAM”) or static random access memory (“SRAM”) devices
  • non-volatile memory devices such as resistive random access memory (“ReRAM”), electrically erasable programmable read only memory (“EEPROM”), flash memory (which can also be considered a subset of EEPROM), ferroelectric random access memory (“FRAM”), and magnetoresistive random access memory (“MRAM”), and other semiconductor elements capable of storing information.
  • ReRAM resistive random access memory
  • EEPROM electrically erasable
  • the memory devices can be formed from passive and/or active elements, in any combinations.
  • passive semiconductor memory elements include ReRAM device elements, which in some embodiments include a resistivity switching storage element, such as an anti-fuse or phase change material, and optionally a steering element, such as a diode or transistor.
  • active semiconductor memory elements include EEPROM and flash memory device elements, which in some embodiments include elements containing a charge storage region, such as a floating gate, conductive nanoparticles, or a charge storage dielectric material.
  • NAND flash memory typically contain memory elements connected in series.
  • a NAND string is an example of a set of series-connected transistors comprising memory cells and select gate transistors.
  • a NAND flash memory array may be configured so that the array is composed of multiple strings of memory in which a string is composed of multiple memory elements sharing a single bit line and accessed as a group.
  • memory elements may be configured so that each element is individually accessible, e.g., a NOR memory array.
  • NAND and NOR memory configurations are exemplary, and memory elements may be otherwise configured.
  • the semiconductor memory elements located within and/or over a substrate may be arranged in two or three dimensions, such as a two dimensional memory structure or a three dimensional memory structure.
  • the semiconductor memory elements are arranged in a single plane or a single memory device level.
  • memory elements are arranged in a plane (e.g., in an x-y direction plane) which extends substantially parallel to a major surface of a substrate that supports the memory elements.
  • the substrate may be a wafer over or in which the layer of the memory elements are formed or it may be a carrier substrate which is attached to the memory elements after they are formed.
  • the substrate may include a semiconductor such as silicon.
  • the memory elements may be arranged in the single memory device level in an ordered array, such as in a plurality of rows and/or columns. However, the memory elements may be arrayed in non-regular or non-orthogonal configurations.
  • the memory elements may each have two or more electrodes or contact lines, such as bit lines and word lines.
  • a three dimensional memory array is arranged so that memory elements occupy multiple planes or multiple memory device levels, thereby forming a structure in three dimensions (i.e., in the x, y and z directions, where the z direction is substantially perpendicular and the x and y directions are substantially parallel to the major surface of the substrate).
  • a three dimensional memory structure may be vertically arranged as a stack of multiple two dimensional memory device levels.
  • a three dimensional memory array may be arranged as multiple vertical columns (e.g., columns extending substantially perpendicular to the major surface of the substrate, i.e., in the y direction) with each column having multiple memory elements.
  • the columns may be arranged in a two dimensional configuration, e.g., in an x-y plane, resulting in a three dimensional arrangement of memory elements with elements on multiple vertically stacked memory planes.
  • Other configurations of memory elements in three dimensions can also constitute a three dimensional memory array.
  • the memory elements may be coupled together to form a NAND string within a single horizontal (e.g., x-y) memory device level.
  • the memory elements may be coupled together to form a vertical NAND string that traverses across multiple horizontal memory device levels.
  • Other three dimensional configurations can be envisioned wherein some NAND strings contain memory elements in a single memory level while other strings contain memory elements which span through multiple memory levels.
  • Three dimensional memory arrays may also be designed in a NOR configuration and in a ReRAM configuration.
  • a monolithic three dimensional memory array typically, one or more memory device levels are formed above a single substrate.
  • the monolithic three dimensional memory array may also have one or more memory layers at least partially within the single substrate.
  • the substrate may include a semiconductor such as silicon.
  • the layers constituting each memory device level of the array are typically formed on the layers of the underlying memory device levels of the array.
  • layers of adjacent memory device levels of a monolithic three dimensional memory array may be shared or have intervening layers between memory device levels.
  • non-monolithic stacked memories can be constructed by forming memory levels on separate substrates and then stacking the memory levels atop each other. The substrates may be thinned or removed from the memory device levels before stacking, but as the memory device levels are initially formed over separate substrates, the resulting memory arrays are not monolithic three dimensional memory arrays. Further, multiple two dimensional memory arrays or three dimensional memory arrays (monolithic or non-monolithic) may be formed on separate chips and then packaged together to form a stacked-chip memory device.
  • Associated circuitry is typically required for operation of the memory elements and for communication with the memory elements.
  • memory devices may have circuitry used for controlling and driving memory elements to accomplish functions such as programming and reading.
  • This associated circuitry may be on the same substrate as the memory elements and/or on a separate substrate.
  • a controller for memory read-write operations may be located on a separate controller chip and/or on the same substrate as the memory elements.
  • FIG. 7 depicts a cross-sectional view of a block of the 3D non-volatile memory device of having straight strings.
  • the block contains a number of non-volatile storage elements. This is one example that can be used in the memory array in FIG. 6B .
  • the stack 777 contains alternating layers of conductive (SGS, WL 0 -WL 5 , SGD) and insulating (D 0 -D 8 ) layers.
  • the conductive could be tungsten, highly doped silicon, etc.
  • the insulating layers could be silicon nitride, etc.
  • Columns of memory cells corresponding to NAND strings NSB 0 to NSB 5 , respectively, are depicted in the multi-layer stack.
  • the stack 777 includes a substrate 801 , an insulating film 709 on the substrate, and a portion of a source line SLB 0 .
  • the NAND strings NSB 0 to NSB 5 are each in a different sub-block, but are in a common set of NAND strings.
  • NSB 0 has a source end 603 and a drain end 701 .
  • a slit 702 is also depicted with other slits. Slits may be formed from an insulator, such as silicon oxide.
  • a portion of the bit line BLB 0 is also depicted. Dashed lines depict memory cells and select gates. Memory cells in in layers WL 0 -WL 5 . Select gates are in layers SGS and SGD.
  • a calibration current supplying means for supplying to a calibration node a calibration current having a magnitude that is proportional to an input code may include variable impedance circuit 104 , variable impedance circuit 104 a , variable impedance circuit 104 b , a plurality of transistors 402 , a plurality of transistors 422 , and/or other hardware.
  • Other embodiments may include similar or equivalent means for supplying to a calibration node a calibration current having a magnitude that is proportional to an input code.
  • a voltage modulating means for modulating a voltage at a calibration resistor with a resistance having a positive temperature coefficient to substantially cancel the positive temperature coefficient of a calibration resistor to cause a current passing through the calibration resistor to be temperature independent may include voltage modulating circuit 232 , reference voltage circuit 236 , I PTAT source 201 , resistors 206 , 212 , operational amplifiers 202 , 216 , and transistors 204 , 208 , 210 , and 218 , operational amplifier 214 , transistor 222 , and/or other hardware.
  • I PTAT source 201 may include operational amplifier 240 , PMOS transistor 248 , PMOS transistor 250 , PMOS transistor 252 , R PTAT resistor 242 , diode 244 , and diode 246 .
  • Other embodiments may include similar or equivalent means for modulating a voltage at a calibration resistor with a resistance having a positive temperature coefficient to substantially cancel the positive temperature coefficient of a calibration resistor to cause a current passing through the calibration resistor to be temperature independent.
  • a temperature independent reference current providing means for providing a temperature independent reference current to a calibration node based on the current passing through the calibration resistor may include temperature independent reference current circuit 234 , on chip calibration resistor 110 , transistors 222 and 224 , temperature independent reference current generation 106 , transfer element (e.g., current mirror) 270 , transistor 262 , transistor 260 and/or other hardware.
  • Other embodiments may include similar or equivalent means for providing a temperature independent reference current to the calibration node based on the current passing through the calibration resistor.
  • a comparison means for comparing a calibration current with a temperature independent reference current to determine whether the calibration current is less than or greater than the temperature independent reference current may include comparator 108 , an operational amplifier, and/or other hardware. Other embodiments may include similar or equivalent means for comparing a calibration current with a temperature independent reference current to determine whether the calibration current is less than or greater than the temperature independent reference current.
  • An input code modification means for modifying the input code to the calibration current supplying means responsive to whether the calibration current is less than or greater than the temperature independent reference current may include calibration logic 102 , processor 822 c , state machine 812 , code stored in ROM 822 a , RAM 822 B, storage device 826 a , and/or other hardware. Other embodiments may include similar or equivalent means for modifying the input code to the calibration current supplying means responsive to whether the calibration current is less than or greater than the temperature independent reference current.
  • One embodiment disclosed herein includes an apparatus comprising a reference current generation circuit configured to generate a temperature independent reference current based on a current through a calibration resistor that resides on an integrated circuit and to provide the temperature independent reference current to a calibration node.
  • the apparatus further comprises a variable impedance circuit coupled to the calibration node, and a comparator having a first input coupled to the calibration node and a second input coupled to a reference voltage.
  • the apparatus of the previous paragraph further comprises a reference voltage circuit that is configured to provide a voltage that is substantially equal to the reference voltage to the first terminal of the calibration resistor.
  • the apparatus further comprises a voltage modulating circuit coupled to the second terminal of the calibration resistor, wherein the voltage modulating circuit is configured to modulate a voltage at the second terminal of the calibration resistor to substantially cancel the temperature coefficient of the calibration resistor, wherein current passing through the calibration resistor is temperature independent.
  • the apparatus further comprises a temperature independent reference current circuit configured to derive the temperature independent reference current from the temperature independent current passing through the calibration resistor.
  • the reference current generation circuit of the apparatus of either of the previous two paragraphs is configured to generate the temperature independent reference current to have a magnitude that is substantially equal to the reference voltage divided by a target resistance (R T ) to which the variable impedance circuit is being calibrated.
  • variable impedance circuit of the apparatus of any of the previous three paragraphs is configured to output to the calibration node a current having a magnitude that is inversely proportional to an impedance of the variable impedance circuit, wherein the comparator is configured to output a signal that responds to a difference between the variable impedance circuit current and the temperature independent reference current, wherein the signal indicates whether the variable impedance circuit current is greater than or less than the temperature independent reference current.
  • the apparatus of any of the previous four paragraphs further comprises logic configured to modify the impedance of the variable impedance circuit responsive to the signal that indicates whether the variable impedance circuit current is greater than or less than the temperature independent reference current to substantially balance the variable impedance circuit current with the temperature independent reference current.
  • the apparatus of any of the previous five paragraphs further comprises logic configured to modify the impedance of the variable impedance circuit responsive to the signal that is output by the comparator to perform a ZQ calibration.
  • the reference current generation circuit comprises a calibration resistor having a first terminal and a second terminal. The first terminal is coupled to a voltage source that provides a first voltage. A resistance of the calibration resistor has a positive temperature coefficient.
  • the reference current generation circuit is configured to modulate a second voltage at the second terminal of the calibration resistor to cancel the positive temperature coefficient of the calibration resistor to cause a current passing through the calibration resistor to be temperature independent.
  • the reference current generation circuit is configured to provide to a calibration node a temperature independent reference current based on the current passing through the calibration resistor.
  • the variable current circuit is configured to output a calibration current to the calibration node.
  • the comparator has a first input that is coupled to the calibration node and a second input that is coupled to a node that provides a third voltage.
  • the comparator is configured to output a signal that indicates whether the calibration current is greater than or less than the temperature independent reference current.
  • the calibration circuit is configured to cause the variable current circuit to change a magnitude of the calibration current based on the signal that indicates whether the calibration current is greater than or less than the temperature independent reference current.
  • One embodiment includes a non-volatile storage device, comprising a three-dimensional memory array comprising a plurality of non-volatile storage elements, a calibration resistor, reference current generation circuit, a variable current circuit, and a comparator.
  • the calibration resistor has a resistance that has a positive temperature coefficient, wherein the calibration resistor has a first terminal coupled to a first reference voltage and a second terminal.
  • the reference current generation circuit may be configured to generate a compensating voltage having a negative temperature coefficient.
  • the reference current generation circuit may be configured to provide the compensating voltage to the second terminal of the calibration resistor, wherein a current that flows in the calibration resistor due to the first reference voltage and the compensating voltage is independent of temperature.
  • the reference current generation circuit may be configured to provide to a calibration node a temperature independent reference current based on the current that flows in the calibration resistor.
  • the variable current circuit is coupled to the calibration node.
  • the variable current circuit may be configured to provide a calibration current to the calibration node.
  • the comparator has a first input that is coupled to the calibration node and a second input that is coupled to a second reference voltage.
  • the comparator may be configured to output a signal responsive to a comparison of the calibration current and the temperature independent reference current.

Abstract

Disclosed herein are techniques for generating a temperature independent reference current, which may be used during calibration. The temperature independent reference current may be generated based on a current through an on-chip calibration resistor. This alleviates the need for an off chip calibration resistor, which can be costly and cause slow calibration. A voltage at one terminal of the on chip calibration resistor may be modulated to substantially cancel a temperature coefficient of the on chip calibration resistor. This may result in the current passing through the on chip calibration resistor being temperature independent. The temperature independent reference current may be compared with a calibration current in a ZQ calibration circuit.

Description

    CLAIM OF PRIORITY
  • The present application claims priority from U.S. Provisional Patent Application No. 62/093,307 entitled “ON CHIP ZQ CALIBRATION,” filed Dec. 17, 2014 and incorporated herein by reference in its entirety.
  • BACKGROUND
  • The present technology relates to semiconductors and/or non-volatile memory devices.
  • Most semiconductor devices include an input circuit configured to receive signals from the outside world via input pads (or pins) and an output circuit configured to provide internal signals to the outside via output pads (or pins). The input circuit has a termination resistor for impedance matching of the external transmission line. The output circuit has an output driver, which has a resistance (RON). The impedance of both the termination resistor and the output driver can change due to various circumstances such as variation of a power supply voltage, a change in operating temperature, etc. Thus, an impedance mismatch can arise.
  • The impedance mismatch can cause signal reflection, which can compromise signal integrity. As the operating speed of electrical products has increased, the swing width (that is the difference between high and low logic levels) of a signal interfaced between semiconductor devices gradually has been reduced in order to minimize a delay time taken for signal transmission. However, the reduction in the swing width of the signal easily exposes the signal to external noise, causing signal reflection to become more critical at an interface terminal due to impedance mismatch. Thus, the impedance mismatch may lead to a difficulty in high-speed transmission of data and distortion of output data.
  • To alleviate impedance mismatch, the device's output drivers and the device's termination resistors may be periodically calibrated. One calibration technique is referred to as a ZQ calibration. Conventionally, ZQ calibration may use a precision calibration resistor that is located off chip. The chip may have a variable impedance circuit which is calibrated with respect to the off chip resistor. The ZQ calibration adjusts the impedance of the variable impedance circuit until it is calibrated to the off chip resistor. This results in an impedance code that can be used to adjust the impedance of the device's output drivers.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • Like-numbered elements refer to common components in the different figures.
  • FIG. 1 is a diagram of one embodiment of a calibration circuit having a temperature independent reference current generation.
  • FIG. 2A is a diagram of one embodiment of a temperature independent reference current generation circuit.
  • FIG. 2B is a diagram of one embodiment of an IPTAT current generation circuit of FIG. 2A.
  • FIG. 2C is a diagram of one embodiment of a circuit for providing the temperature independent reference current of FIG. 2A to a calibration node.
  • FIG. 2D is a diagram of one embodiment of a temperature independent reference current generation circuit in which the on chip calibration resistor has a negative TCO.
  • FIG. 3 describes one embodiment of a process of performing an impedance calibration using an on-chip calibration resistor.
  • FIG. 4A depicts one embodiment of the variable impedance circuit 104 of FIG. 1.
  • FIG. 4B depicts another embodiment of the variable impedance circuit 104 of FIG. 1.
  • FIG. 5 shows one embodiment of a circuit for varying the resistance of a voltage modulation resistor as a function of the supply voltage.
  • FIG. 6A is a perspective view of a 3D stacked non-volatile memory device in which embodiments may be practiced.
  • FIG. 6B is a functional block diagram of a memory device such as the 3D stacked non-volatile memory device of FIG. 6A.
  • FIG. 7 depicts a cross-sectional view of a block of the 3D non-volatile memory device of having straight strings.
  • DETAILED DESCRIPTION
  • Disclosed herein are techniques and apparatus for generating a temperature independent reference current, which may be used during calibration. The temperature independent reference current may be generated based on a current through an on-chip calibration resistor. In one embodiment, the temperature independent reference current is used in a ZQ calibration circuit. In one embodiment, the temperature independent reference current is compared with a calibration current in a ZQ calibration circuit. Depending on results of this comparison, the calibration current may be adjusted to bring its magnitude closer to, or equal to, the temperature independent reference current.
  • In one embodiment, the device has an on chip calibration resistor. This alleviates the need for an off chip calibration resistor. Off chip calibration resistors can be costly. A part of the cost may be in providing an extra pin or pad for the off chip calibration resistor to connect to. Also, ZQ calibration using an off chip calibration resistor can be slow. A reason for this is capacitive loading on the pad or pin to which the off chip calibration resistor is connected. Embodiments disclosed herein provide for fast calibration (e.g., fast ZQ calibration). Embodiments disclosed herein provide for cost effective calibration (e.g., cost effective ZQ calibration).
  • The resistance of the on chip calibration resistor may depend on temperature. For example, its resistance may either decrease or increase as temperature increases. The temperature dependence may be expressed by a temperature coefficient (TCO) having a sign and magnitude. By a positive temperature coefficient in this context it is meant that the resistance increases as temperature increases and decreases as temperature decreases, for at least a range of temperatures at which the device is normally operated. By a negative temperature coefficient in this context it is meant that the resistance decreases as temperature increases and increases as temperature decreases, for at least a range of temperatures at which the device is normally operated.
  • Note that if a resistor is operated with a constant voltage applied across its two terminals, then the current through the resistor may be a function of temperature. For example, if the resistance drops as temperature increases, then the current will increase as temperature increases—given the constant voltage difference assumption.
  • Note that the temperature of the device for which the calibration is being performed may vary widely. Thus, the resistance of the on chip calibration resistor may change over time, in response to the temperature changing. In some embodiments, a temperature independent reference current is generated based on a current that passes through the on chip calibration resistor. Herein, a temperature independent reference current refers to a reference current whose magnitude does not change as temperature changes.
  • A voltage at one terminal of the on chip calibration resistor is modulated to substantially cancel the temperature coefficient of the on chip calibration resistor, in one embodiment. This may result in the current passing through the on chip calibration resistor being temperature independent. For example, given that a certain reference voltage is applied to one terminal of the on chip calibration resistor, the voltage applied to the other terminal may be modulated as temperature changes, such that the current passing through the on chip calibration resistor is constant regardless of the temperature.
  • FIG. 1 is a diagram of one embodiment of a circuit 100 that performs a calibration using a temperature independent reference current. In one embodiment, the circuit 100 adjusts the impedance of variable impedance circuit 104 until its impedance matches a target resistance (RTARGET). The circuit could be used in a ZQ calibration process to determine, for example, calibration codes. However, instead of using an off-chip resistor for the target resistance, the circuit makes use of an on-chip resistor 110 to perform the calibration. In one embodiment, circuit 100 resides on an integrated circuit.
  • Temperature independent reference current generation circuit 106 generates a temperature independent reference current (ITIREF) 112 based on a current (ICR) through on-chip calibration resistor 110. Temperature independent reference current generation circuit 106 maintains the temperature independent reference current (ITIREF) at a constant magnitude despite temperature variations. Those of ordinary skill in the art will understand that maintaining at a constant magnitude may include some small variation in the magnitude of the temperature independent reference current (ITIREF) with respect to temperature due to non-ideal characteristics of real world circuit elements.
  • The resistance of on-chip calibration resistor 110 has a temperature coefficient (TCO) due to, for example, the material from which it is fabricated. In one embodiment, the TCO is a positive TCO. That is, the resistance of on-chip calibration resistor 110 increases as temperature increases and decreases as temperature decreases. In one embodiment, the TCO is a negative TCO. That is, the resistance of on-chip calibration resistor 110 decreases as temperature increases and increases as temperature decreases. In one embodiment, the resistor 110 is formed from polysilicon. However, a different semiconductor could be used. In one embodiment, the resistor 110 is formed from a doped semiconductor, such as doped silicon. Also, the resistor 110 may be formed from a material that is not a semiconductor. In one embodiment, resistor 110 resides within an integrated circuit.
  • In the circuit 100 of FIG. 1, the on-chip calibration resistor 110 has a reference voltage VREF applied to one terminal. The other terminal is supplied with a modulating voltage VM. The modulating voltage cancels the TCO of the resistor 110, in one embodiment. Those of ordinary skill in the art will understand that canceling the TCO of the resistor 110 may include some small temperature dependence of the resistance of resistor 110 due to non-ideal characteristics of real world circuit elements, including those circuit elements that provide the modulating voltage.
  • By cancelling the TCO of the resistor 110, the current (ICR) through the resistor is independent of temperature, in one embodiment. Thus, the current (ICR) may be maintained at a constant magnitude despite temperature variations. Those of ordinary skill in the art will understand that maintaining the current (ICR) at a constant magnitude despite temperature variations may include some small variation in the magnitude of the current (ICR) with respect to temperature due to non-ideal characteristics of real world circuit elements.
  • By the modulating voltage having a TCO, it is meant that the magnitude of the modulating voltage is a function of temperature. Thus, a positive TCO for the modulating voltage means that its magnitude increases as temperature increases and decreases as temperature decreases. A negative TCO for the modulating voltage means that its magnitude decreases as temperature increases, and increases as temperature decreases.
  • The modulating voltage substantially cancels the TCO of the resistor 110, in one embodiment. By substantially cancelling the TCO of the resistor 110, the current (ICR) through the resistor is substantially independent of temperature, in one embodiment.
  • Variable impedance circuit 104 outputs a calibration current (ICAL). The magnitude of the calibration current may depend on the impedance of variable impedance circuit 104. For example, the magnitude of the calibration current may be proportional to the impedance of variable impedance circuit 104. In one embodiment, the magnitude of the calibration current is inversely proportional to the impedance of variable impedance circuit 104. The calibration logic 102 outputs an impedance code (DAC<n:0>) to the variable impedance circuit 104. In this example, the impedance code has n+1 bits. The variable impedance circuit 104 adjusts its impedance based on the impedance code. Also, the magnitude of the calibration current is a function of the impedance of the variable impedance circuit 104. Hence, the magnitude of the calibration current may be adjusted by the impedance code. Calibration logic 102 may be implemented in a variety of ways, including but not limited to, a state machine, a processor, digital logical, or a combination of any of these elements. The processor may execute instructions that are stored on computer readable storage.
  • The variable impedance circuit 104 may comprise a number of circuit elements, such as transistors. The variable impedance circuit 104 turns those transistors on or off in response to the value of the impedance code (DAC) to alter the impedance of the variable impedance circuit 104, in one embodiment. In one embodiment, variable impedance circuit 104 is a binary weighted transistor circuit. In one embodiment, the variable impedance circuit 104 is configured to have 2n+1 different impedances in response to the different values of an “n+1” bit impedance code (DAC). FIGS. 4A and 4B provide further details of various embodiments of the variable impedance circuit 104.
  • Comparator 108 compares the magnitude of ICAL with the magnitude of I TIREF 112. Note that these two currents meet at the non-inverting input of the comparator 108. The inverting input of the comparator 108 is supplied with a reference voltage VREF. In one embodiment, VREF is half the magnitude of VSUPPLY. In one embodiment, the magnitude of ITIREF is based on the reference voltage (VREF) and the target resistance (RT) to which the variable impedance circuit 104 is being calibrated. In one embodiment, the following equation holds:

  • I TIREF =V REF /R T  (1)
  • In one embodiment, the following equation holds in addition to Equation 1:

  • V REF =V SUPPLY/2  (2)
  • Recall that the target resistance (RT) may be the resistance to which the variable impedance circuit 104 is being calibrated. The resistance of the on-chip calibration resistor 110 may be related to the target resistance (RT). However, the resistance of the on-chip calibration resistor 110 does not necessarily equal the target resistance (RT). For example, both currents and resistances can be scaled on chip. For example, the resistance of the on-chip calibration resistor 110 could be scaled up from the target resistance to permit on chip currents to be scaled down.
  • Comparator 108 outputs a signal (“Flag”) to the calibration logic 102 that indicates whether the magnitude of the calibration current (ICAL) is greater than or less than the magnitude of the temperature independent reference current (ITIREF). The calibration logic 102 adjusts the impedance code (DAC) based on the value of the Flag. In general, if the Flag indicates that ICAL is lower in magnitude than the ITIREF, then the new impedance code will cause the variable impedance circuit 104 to increase the magnitude of ICAL. On the other hand, if the flag indicates that the magnitude of ICAL is greater in magnitude than the magnitude of ITIREF, then the new impedance code (DAC) will cause the variable impedance circuit 104 to decrease the magnitude of ICAL. In one embodiment, a binary search is performed to seek a new impedance code. In one embodiment, a linear search is performed to find a new impedance code.
  • Note that the variable impedance circuit 104 is connected between VSUPPLY and the non-inverting input of the comparator 108. The voltage of the non-inverting input of the comparator 108 should be forced to be close to or equal to the voltage (VREF) at the non-inverting input of the comparator 108. Hence, given this condition, the voltage across the variable impedance circuit 104 should be about VSUPPLY−VREF, in one embodiment. Also note that if VSUPPLY is twice VREF, this implies that the voltage across the variable impedance circuit 108 should be approximately VREF. However, during calibration it could be slightly higher or lower than VREF. In view of the foregoing, the magnitude of ICAL may be increased by decreasing the impedance of the variable impedance circuit 104.
  • Also note that the temperature independent reference current (ITIREF) 112 is between the non-inverting input of the comparator 108 and ground. Thus, the voltage across the components that provide ITIREF (components not depicted in FIG. 1) should be forced to be close to or equal to VREF, in one embodiment. However, during calibration it could be slightly higher or lower than VREF. Thus, during calibration, the voltage at the non-inverting input of comparator 108 could be slightly higher or slightly lower than VREF.
  • FIG. 2A is a diagram that provides further details of one embodiment of temperature independent reference current generation 106. The circuit 106 includes an on-chip calibration resistor 110. The resistance of the on-chip calibration resistor 110 changes with temperature. In other words, the resistance of the on-chip calibration resistor 110 has a TCO. For example, the resistance of the on-chip calibration resistor 110 may increase with increases in temperature (e.g., the TCO of the resistance is positive). Were the voltage across the on-chip calibration resistor 110 having a positive TCO to remain constant, this implies that the current (ICR) through the chip calibration resistor 110 would decrease as temperature increases. The circuit of FIG. 2A may be used with a resistor 110 having a positive TCO. Alternatively, the resistance of the on-chip calibration resistor 110 might decrease with increases in temperature (e.g., the TCO of the resistance is negative). With a suitable modification to the circuit of FIG. 2A, the concept may be used with a resistor having a negative TCO. FIG. 2D shows one embodiment of circuit that may be used with a resistor having a negative TCO. For an on-chip calibration resistor 110 having a negative TCO, were the voltage across the on-chip calibration resistor 110 to remain constant, this implies that ICR would increase as temperature increases.
  • Whether the TCO of the on-chip calibration resistor 110 is negative or positive may depend on the material from which the resistor 110 is fabricated, doping, and other factors. For example, the resistivity of undoped silicon may have a negative TCO. However, depending on the type of impurity used to dope, as well as the doping concentration, doped silicon could have a positive TCO or a negative TCO. Also, the magnitude of the TCO of resistivity for a semiconductor may depend on type of impurity used to dope, as well as the doping concentration. In one embodiment, the on-chip calibration resistor 110 is fabricated from silicon that is doped with a type and concentration of an impurity that causes the resistivity of the doped silicon to have a positive TCO.
  • One terminal of the on-chip calibration resistor 110 is supplied with VREF from operational amplifier 214. Note that one terminal of operational amplifier 214 is coupled to the inverting input of operational amplifier 214. Also, the non-inverting input of operational amplifier 214 is supplied with VREF. Since the inverting input of operational amplifier 214 is forced to VREF, one terminal of the on-chip calibration resistor 110 is supplied with VREF.
  • The other terminal of the on-chip calibration resistor 110 is provided with a modulating voltage (VM). The magnitude of the modulating voltage may be a function of temperature. Herein, this is referred to as the modulating voltage having a TCO. This results in the voltage across the on-chip calibration resistor 110 being a function of temperature. In one embodiment, the TCO of the modulating voltage cancels the TCO of the resistance of the on-chip calibration resistor 110. This may result in the current (ICR) through the on-chip calibration resistor 110 being independent of temperature. Thus, ICR may be maintained at a constant magnitude despite temperature variations.
  • In the circuit of FIG. 2A, the magnitude of the modulating voltage (VM) may be lower than the magnitude of VREF. Therefore, decreasing VM will result is a greater voltage across the on-chip calibration resistor 110, and hence a greater current (ICR) through the on-chip calibration resistor 110. In one such embodiment, VM has a negative TCO to cancel a positive TCO of the on-chip calibration resistor 110. In a different circuit configuration, the magnitude of the modulating voltage (VM) may be higher than the magnitude of VREF. Therefore, decreasing VM will result is a lower voltage across the on-chip calibration resistor 110, and hence a lower current (ICR) through the on-chip calibration resistor 110. In one such embodiment, VM has a positive TCO to cancel a positive TCO of the on-chip calibration resistor 110.
  • The current (ICR) through the on-chip calibration resistor 110 also flows through PMOS transistor 222, whose current is mirrored to PMOS transistor 224. The current through PMOS transistor 224 may be used as the temperature independent reference current (ITREF). Note that there may be some scaling of ICR. For example, the ratio of transistor PMOS 224 to PMOS transistor 222 may be selected to scale current ICR up or down. The current through PMOS transistor 224, or some version of it, may be used for the temperature independent reference current (ITREF) in FIG. 1. For example, the current through transistor 224 may be scaled up or down prior to providing it to the calibration node in FIG. 1. However, since ITREF is based on ICR, ITREF is independent of temperature, in one embodiment. Thus, ITIREF may be maintained at a constant magnitude despite temperature variations. In FIG. 2A, transfer element 270 is depicted to provide ITIREF the to the calibration node. Transfer element 270 may be implemented with transistors. For example, transfer element 270 may be a current mirror. An example of transfer element 270 is depicted in FIG. 2C.
  • Also note that the output of operational amplifier 214 is connected to the gate terminal of PMOS transistor 222, as well as to the gate terminal of PMOS transistor 224. Also the source terminals of PMOS transistors 222 and 224 are each connected to the voltage supply. Thus, the drain terminal of PMOS transistor 222 is connected to the inverting input of operational amplifier 214.
  • Next, details of generating the modulating voltage (VM) will be discussed. The magnitude of the modulating voltage (VM) is based, at least in part, on a proportional to absolute temperature current (IPTAT). FIG. 2A depicts an IPTAT current source 201. The IPTAT current source 201 may be implemented by a band gap reference (BGR) circuit. Thus, IPTAT may be generated by the band gap reference (BGR) circuit. One embodiment of IPTAT current source 201 is depicted in FIG. 2B.
  • IPTAT current source 201 is connected between the supply voltage and the inverting input of operational amplifier 202. The non-inverting input of operational amplifier 202 is supplied with VBGP. Due to the circuit configuration, the voltage at the non-inverting input should be forced to VBGP. Therefore, the voltage across IPTAT current source 201 is given by VSUPPLY−VBGP. In one embodiment, VBGP is about 1.2 V. Therefore, the resistance (RPTAT) of IPTAT current source 201 may be expressed as (VSUPPLY−VBGP)/IPTAT, in one embodiment.
  • The output of operational amplifier 202 is connected to the gate terminal of NMOS transistor 204. The source terminal of NMOS transistor 204 is connected to the inverting input of operational amplifier 202. The drain terminal of NMOS transistor 204 is connected to PMOS transistor 208, which forms a current mirror with PMOS transistor 210.
  • Band gap reference resistor R BGR 206 is connected between the inverting input of operational amplifier 202 and ground. Thus, resistor R BGR 206 receives IPTAT. Also, during circuit operation, the inverting input of input of operational amplifier 202 will be forced to VBGP. The resistance of resistor R BGR 206 will be referred to as “RBGR”. Hence, resistor R BGR 206 in effect has VBGP provided to the terminal that receives IPTAT. Hence, the voltage (VBGR) at that terminal is given by Equation 3:

  • V BGR =V BGP +I PTAT *R BGR  (3)
  • In Equation 3, the component IPTAT*RBGR may be referred to as a, “band gap reference voltage.”
  • The current (IBGR) through resistor R BGR 206 is given by Equation 4:

  • I BGR =I PTAT +V BGP /R BGR  (4)
  • The current IBGR also flows through NMOS transistor 204 and PMOS transistor 208. The current through PMOS transistor 208 is mirrored to PMOS transistor 210. Note that the source terminals of PMOS transistor 208 and PMOS transistor 210 are each connected to the supply voltage, and their gate terminals are connected. In one embodiment, PMOS transistors 208 and 210 are similar in size such that the current through transistor 210 is substantially equal to IBGR. However, PMOS transistors 208 and 210 do not need to be the same size, in which case the current through transistor 210 may be a scaled version of IBGR. The current of PMOS transistor 210 also flows through voltage modulation resistor R CT 212. This current is IBGR in one embodiment. As noted, this could also be some scaled version of IBGR. Voltage modulation resistor R CT 212 is connected between the inverting input of operational amplifier 216 and ground. Thus, the voltage at the inverting input of operational amplifier 216 may be given by Equation 5:

  • V RCT =I BGR *R CT  (5)
  • The output of operational amplifier 216 is connected to the gate terminal of NMOS transistor 218. The source of PMOS transistor 218 is connected to ground. The drain of NMOS transistor 218 is connected to the non-inverting input of operational amplifier 216. The voltage at the non-inverting input of operational amplifier 216 may be forced to VRCT. Thus, the modulating voltage VM may be equal to VRCT. It may be stated that the node of the voltage modulation resistor 212 that is not grounded is coupled to the second terminal of the calibration resistor 110, as the voltage VRCT may be provided to the second terminal of the calibration resistor 110.
  • Several sub-circuits are highlighted within temperature independent reference current generation 106. A voltage modulating circuit 232 is configured to provide a modulating voltage (VM) to one of the terminals of the calibration resistor 110. For example, the voltage modulating circuit 232 modulates a voltage at a terminal of the calibration resistor 110 to cancel the temperature coefficient of the calibration resistor. Therefore, the current passing through the calibration resistor 110 may be temperature independent. The voltage modulating circuit 232 is made up of the IPTAT source 201, resistors 206, 212, operational amplifiers 202, 216, and transistors 204, 208, 210, and 218. Other circuit elements could be used for voltage modulating circuit 232. The voltage modulating circuit 232 may also be referred to as a temperature dependent voltage generation circuit. The temperature dependent voltage generation circuit may be configured to generate a voltage (VM) at the second terminal the calibration resistor 110 that has a temperature coefficient configured to cancel the temperature coefficient of the calibration resistor 110.
  • A reference voltage circuit 236 may be configured to provide a reference voltage (VREF) to another terminal of the calibration resistor 110. The reference voltage circuit 236 is made up of operational amplifier 214 and transistor 222. A temperature independent reference current circuit 234 may be configured to derive the temperature independent reference current (ITIREF) from the temperature independent current (ICR) passing through the calibration resistor 110. The temperature independent reference current circuit 234 may be made up of the calibration resistor 110, transistor 222, transistor 224, and transfer element 270. Other circuit elements could be used for temperature independent reference current circuit 234.
  • Several circuit elements in FIG. 2A may together be referred to as a proportional to temperature circuit that is configured to provide a current proportional to temperature through the voltage modulation resistor 212. Specifically, a portion of the voltage modulating circuit 232 that provides the current to voltage modulation resistor 212 may serve this purpose. Those elements include IPTAT source 201, operational amplifier 202, resistor R BGR 206, and transistors 204, 208, and 210. Other circuit elements could be used for proportional to temperature circuit.
  • The foregoing are examples of a voltage modulating circuit 232, a temperature dependent voltage generation circuit, a reference voltage circuit 236, and a temperature independent reference current circuit 234. However, other circuit elements and configurations may be used.
  • FIG. 2B depicts one embodiment of IPTAT source 201, which may be used in circuit 106 of FIG. 2A. IPTAT source 201 includes operational amplifier 240, PMOS transistor 248, PMOS transistor 250, PMOS transistor 252, RPTAT resistor 242, diode 244, and diode 246. The source terminals of PMOS transistors 248, 250, and 252 are each connected to the voltage supply (VSUPPLY). The drain of PMOS transistor 248 is connected to the inverting input of operational amplifier 240. The drain of PMOS transistor 250 is connected to the non-inverting input of operational amplifier 240. The gates of PMOS transistors 248, 250, and 252 are each connected to the output of operational amplifier 240.
  • RPTAT resistor 242 is connected between the non-inverting input of operational amplifier 240 and diode 246. Diode 246 is connected between RPTAT resistor 242 and ground. Diode 244 is connected between the inverting input of operational amplifier 240 and ground. Diode 244 and diode 246 have a ratio of 1:N.
  • IPTAT current flows through PMOS transistor 252. The drain of PMOS transistor 252 is connected to one terminal of resistor R BGR 206. The drain of PMOS transistor 252 is also connected to the inverting input of operational amplifier 202. Note that resistor R BGR 206 and operational amplifier 202 are also depicted in FIG. 2A.
  • FIG. 2C depicts one embodiment of transfer circuit 270, which may be used in circuit 106 of FIG. 2A. Transfer circuit 270 provides ITIREF from transistor 224 to the non-inverting input of comparator 108. Transfer circuit 270 includes NMOS transistor 262 and NMOS transistor 260, each of which have their source connected to ground. NMOS transistor 262 and NMOS transistor 260 are in a current mirror configuration. The drain of NMOS transistor 262 is connected to the drain of PMOS transistor 224 in order to receive ITIREF from PMOS transistor 224. The drain of NMOS transistor 260 is connected to the non-inverting input of comparator 108 in order to provide ITIREF to the calibration node.
  • NMOS transistor 262 and NMOS transistor 260 could be the same size, or may be sized differently. Thus, the version of ITIREF at the non-inverting input of comparator 108 may be the same magnitude as the version of ITIREF that flows through transistor 224, may be scaled up, or may be scaled down. Note that comparator 108 is also depicted in FIG. 1, and that transistor 224 is also depicted in FIG. 2A.
  • FIG. 2D is a diagram of one embodiment of a temperature independent reference current generation circuit in which the on chip calibration resistor 110 has a negative TCO. The circuit is similar to the one in FIG. 2A. Note that FIG. 2D depicts a different embodiment of voltage modulating circuit 232 than the one depicted in FIG. 2A. A difference is that the IPTAT current is provided directly to resistor 212. In the circuit of FIG. 2D, the resistance of the on-chip calibration resistor 110 may decrease with increases in temperature (e.g., the TCO of the resistance is negative). Were the voltage across the on-chip calibration resistor 110 to remain constant, this implies that the current (ICR) through the on chip calibration resistor 110 would increase as temperature increases. VM has a TCO to cancel the negative TCO of the on-chip calibration resistor 110, in this embodiment. Note that the IPTAT source 201 of FIG. 2B may also be used in the circuit of FIG. 2D. Likewise, transfer circuit 270 from FIG. 2C may be used in the circuit of FIG. 2D.
  • FIG. 3 describes one embodiment of a process of performing an impedance calibration using an on-chip calibration resistor. The process may be implemented by the circuits of FIG. 1, 2A, 2B, 2C, and/or 2D, but is not limited thereto. In one embodiment, the process performs a ZQ calibration.
  • In step 302, a reference voltage is supplied to a first terminal of an on-chip calibration resistor. In one embodiment, the reference voltage circuit 236 provides the reference voltage (VREF) to a terminal of on-chip calibration resistor 110.
  • In step 304, a compensating voltage is generated. The compensating voltage may also be referred to as a modulating voltage. In one embodiment, voltage modulating circuit 232 generates the compensating voltage. In one embodiment, generating the compensating voltage includes generating a proportional to absolute temperature (PTAT) current, and generating the compensating voltage based on the PTAT current. In one embodiment, IPTAT current source 201 generates the IPTAT current. In one embodiment, a current that is based on IPTAT current is provided to voltage modulation resistor 212, creating the compensating voltage at the inverting input of operational amplifier 216.
  • In step 306, the compensating (or modulating) voltage is provided to a second terminal of the on-chip calibration resistor 110. In one embodiment, voltage modulating circuit 232 provides the compensating voltage to the second terminal of the on-chip calibration resistor 110. More specifically, the non-inverting input of operational amplifier 216 is connected to the lower terminal of on-chip calibration resistor 110 to provide VM. Note that the configuration of operational amplifier 216 and transistor 218 may tend to force the voltage at the non-inverting input to be the same as the voltage at the inverting input of operational amplifier 216. Therefore, the voltage that was created at the terminal of voltage modulation resistor 212 that is not grounded may be provided to the on-chip calibration resistor 110.
  • In step 308, a temperature independent reference current is provided to a calibration node. The calibration node is the calibration node at the non-inverting input of comparator 108 of FIG. 1, in one embodiment. In one embodiment, temperature independent reference current generation 106 provides the temperature independent reference current (e.g., ITIREF) to the calibration node. In one embodiment, temperature independent reference current circuit 234 generates ITIREF from the current (ICR) that passes through the on-chip calibration resistor 110.
  • In step 310, a calibration signal is provided to a variable impedance circuit to cause the variable impedance circuit to output a calibration current. In one embodiment, calibration logic 102 outputs an impedance code (DAC) to the variable impedance circuit 104. The variable impedance circuit 104 changes its impedance based on the value of the impedance code. The magnitude of the calibration current is based on the impedance of the variable impedance circuit 104.
  • In step 312, a magnitude of the calibration current is compared to a magnitude of the temperature independent reference current. In one embodiment, comparator 108 compares the magnitude of the calibration current at its non-inverting input with the magnitude of the temperature independent reference current at its non-inverting input. Comparator 108 outputs a flag based on results of the comparison, as discussed above.
  • In step 314, the calibration signal is adjusted based on results of the comparison. In one embodiment, calibration logic 102 adjusts the impedance code (DAC) based on the value of flag. As discussed already, this causes the variable impedance circuit 104 to adjust its impedance. In turn, the calibration current may respond to changes in the impedance of the variable impedance circuit. Step 310-314 can be repeated until the calibration current is balanced with the temperature independent reference current to a desired level of accuracy. In one embodiment, a linear search is performed by adjusting the impedance code by one unit at a time. In one embodiment, a binary search is performed. Searches other than linear or binary searches may be performed.
  • FIG. 4A depicts one embodiment of the variable impedance circuit 104 of FIG. 1. In one embodiment, the variable impedance circuit 104 a is a replica of an output buffer. Hence, variable impedance circuit 104 may be referred to as a replica circuit. In one embodiment, it is a binary weighted pull-up replica.
  • The variable impedance circuit 104 a includes transistors 402-0, 402-1, 402-2, 402-3, 402-4, 402-5, and 402-6. In one embodiment, the transistors 402 are p-channel transistors. One terminal of each transistor 402 is connected to the supply voltage VSUPPLY. Another terminal of each transistor is connected to a resistor 414. The resistor 414 is connected to the calibration node. This refers to the calibration node in FIG. 1.
  • Each of the transistors 402 has its gate controlled by one of the bits of the impedance code DAC_P<n:0>. Transistor 402-0 has its gate controlled by DAC_P_0, which refers to the least significant bit of DAC_P<n:0>. Transistor 402-1 has its gate controlled by DAC_P_1. Transistor 402-2 has its gate controlled by DAC_P_2. Transistor 402-3 has its gate controlled by DAC_P_3. Transistor 402-4 has its gate controlled by DAC_P_4. Transistor 402-5 has its gate controlled by DAC_P_5. Transistor 402-6 has its gate controlled by DAC_P_6, which is the most significant bit of DAC_P<n:0>. The connections to the gates may be referred to as an input to the variable impedance circuit.
  • The value of the impedance code may be used to select which transistors 402 are on/off in order to control the impedance of circuit 104 a. In one embodiment, the impedance code may be used to select which transistors 402 are on/off in order to control the output current of circuit 104 a. Thus, circuit 104 a may also be referred to as a variable current circuit.
  • The transistors may be “binary weighted” such that transistor 402-0 has a weight of “1”, transistor 402-1 has a weight of “2”, transistor 402-2 has a weight of “4”, transistor 402-3 has a weight of “8”, transistor 402-4 has a weight of “16”, transistor 402-5 has a weight of “32”, and transistor 402-6 has a weight of “64”. By the weight it is meant the impact the transistor has on the impedance of the main binary weighted pull-up replica 404 a.
  • In one embodiment, the transistors 402 have a binary weighted channel width-to-length ratio (W/L). For example, the binary weighted channel W/L may be 1×, 2×, 4×, 8×, 16×, 32×, and 64×. The transistor W/L may also be referred to as transistor sizes.
  • In one embodiment, a transistor 402 is implemented by multiple transistors. Thus, it will be understand that each of the transistors 402 may represent one or more transistors. Moreover, there could be a binary relationship between the number of transistors used to implement transistors 402-0 through 402-6. For example, transistor 402-0 might be implemented with a single transistor, transistor 402-1 might be implemented with two transistors, transistor 402-2 might be implemented with four transistors, etc. In this example, each of the implementation transistors might have the same W/L.
  • FIG. 4B depicts one embodiment of a variable impedance circuit. This could be used in a calibration circuit that is similar to the one depicted in FIG. 1. However, those of ordinary skill in the art will recognize that some variations may be made to the circuit of FIG. 1 given that the transistors in FIG. 4B are n-channel transistors. In this case, the circuit 104 b is a binary weighted pull-down replica. The binary weighted pull-down replica 104 b may replicate a portion of an output driver. The binary weighted pull-down replica 104 b includes transistors 422-0, 422-1, 422-2, 422-3, 422-4, 422-5, and 422-6. In one embodiment, transistors 422 are n-channel transistors. One terminal of each transistor 422 is connected to the voltage VSUPPLY. Another terminal of each transistor is connected to a resistor 415. The resistor 415 is connected to the calibration node.
  • Each of the transistors 422 has its gate controlled by one of the bits of the impedance code DAC_N<n:0>. Transistor 422-0 has its gate controlled by DAC_N_0, which refers to the least significant bit of DAC_P<n:0>. Transistor 422-1 has its gate controlled by DAC_N_1. Transistor 422-2 has its gate controlled by DAC_N_2. Transistor 422-3 has its gate controlled by DAC_N_3. Transistor 422-4 has its gate controlled by DAC_N_4. Transistor 422-5 has its gate controlled by DAC_N_5. Transistor 422-6 has its gate controlled by DAC_N_6, which is the most significant bit of DAC_N<n:0>. The connections to the gates may be referred to as an input to the variable impedance circuit 104 b.
  • The value of the impedance code may be used to select which transistors 402 are on/off in order to control the impedance of circuit 104 b. In one embodiment, the impedance code may be used to select which transistors 402 are on/off in order to control the output current of circuit 104 b. Thus, circuit 104 b may also be referred to as a variable current circuit.
  • The transistors may be “binary weighted” such that transistor 422-0 has a weight of “1”, transistor 422-1 has a weight of “2”, transistor 422-2 has a weight of “4”, transistor 422-3 has a weight of “8”, transistor 422-4 has a weight of “16”, transistor 422-5 has a weight of “32”, and transistor 422-6 has a weight of “64”. By the weight it is meant the impact the transistor has on the impedance of the binary weighted pull-up replica 424 a.
  • In one embodiment, the transistors 422 have a binary weighted channel width-to-length ratio (W/L). For example, the binary weighted channel W/L may be 1×, 2×, 4×, 8×, 16×, 32×, and 64×. The transistor W/L may also be referred to as transistor sizes.
  • In one embodiment, a transistor 422 of the binary weighted pull-down replica 414 a is implemented by multiple transistors. Thus, it will be understand that each of the transistors 422 may represent one or more transistors. Moreover, there could be a binary relationship between the number of transistors used to implement transistors 422-0 through 422-6. For example, transistor 422-0 might be implemented with a single transistor, transistor 422-1 might be implemented with two transistors, transistor 422-2 might be implemented with four transistors, etc. In this example, each of the implementation transistors might have the same W/L.
  • Note that the examples in FIGS. 4A and 4B are for cases in which the impedance code is seven bits. If the impedance code is greater or less than seven bits, then a corresponding change may be made to the number of transistors in FIGS. 4A and 4B.
  • The following is further details of generation of the temperature independent reference current. In one embodiment, a target for the temperature independent reference current is given by Equation 6:

  • I TIREF =V REF /R T  (6)
  • In Equation 6, RT is the target resistance to which the impedance of the variable impedance circuit 104 is being compared. For example, this could be a target resistance for a ZQ calibration. The reference voltage VREF refers to VREF at the inverting input of comparator 108 in FIG. 1. As noted above, this may be one-half of the supply voltage (VSUPPLY). Conceptually, RT could be viewed as a target resistance between the non-inverting input of comparator 108 and ground. Since, VREF may be one-half of VSUPPLY, the goal of the circuit of FIG. 1 may be stated as calibrating the impedance of the variable impedance circuit 104 to RT. More specifically, the goal may be stated as adjusting the impedance of the variable impedance circuit 104 until it is equal, or at least close to, RT.
  • Under the assumption that the magnitude of current through the on-chip calibration resistor 110 is equal to the temperature independent reference current (ITIREF), Equation 7 is as follows:

  • (V REF −V M)/R D =V REF /R T  (7)
  • In Equation 7, VREF−VM refers to the voltage across on-chip calibration resistor 110. As discussed above, the resistance (RD) of the on-chip calibration resistor 110 has a temperature coefficient.
  • The modulating voltage (VM) is based on a PTAT current, in one embodiment. Equation 8A describes the modulating voltage (VM) in terms of the PTAT current from IPTAT current source 201 and other elements in FIG. 2A. Recall that the circuit of FIG. 2A may be used when the on chip calibration resistor 110 has a positive TCO.
  • V M = V BGP R BGR * R CT - kT q ln N * R CT R PTAT ( 8 A )
  • The modulating voltage (VM) has two components in Equation 8A. Each component includes the resistance (RCT) of voltage modulation resistor 212 times a current. Recall that the current through the resistor R BGR 206 may be reflected to voltage modulation resistor 212. Thus, the two currents are the two current components that flow through resistor R BGR 206. One of those currents may be given by VBGP/RBGR. This is due to the impact of VBGP being provided to resistor R BGR 206 by operational amplifier 202. The other current is the IPTAT current. In Equation 8A, the IPTAT current is expressed in terms of Boltzmann's constant (k), the absolute temperature (T) in Kelvin, the absolute value of charge on an electron (q), and an ideality factor (N). RPTAT is the resistance of the IPTAT current source 201 in FIG. 2A, in one embodiment. RPTAT is the resistance of RPTAT resistor 242 in FIG. 2B, in one embodiment.
  • Equation 8B describes the modulating voltage (VM) in terms of the PTAT current from IPTAT current source 201 and other elements in FIG. 2D. Recall that the circuit of FIG. 2D may be used when the on chip calibration resistor 110 has a negative TCO.
  • V M = kT q ln N * R CT R PTAT ( 8 B )
  • In one embodiment, the modulating voltage (VM) is designed such that the current (ICR) through the on-chip calibration resistor 110 is temperature independent, as indicated by Equation 9.
  • I CR T = 0 ( 9 )
  • Given that the derivative of ICR with respect to temperature is zero, the following condition in Equation 10 may hold true:
  • V REF R T * R D T = k q ln N * R CT R PTAT ( 10 )
  • The following is a restatement of Equation 7, with the temperature dependence of the modulating voltage (VM) and the on-chip calibration resistor (RD) noted:
  • V REF / R T = V REF - V M ( T ) R D ( T ) ( 11 )
  • A goal of one embodiment is to have modulating voltage (VM) nullify the TCO of the on-chip calibration resistor 110. This goal is reflected by Equation 12, which expresses a condition for the temperature dependence of the modulating voltage in order to nullify the TCO of the on-chip calibration resistor. In Equation 12, TCORD may be the temperature coefficient with respect to resistivity of the material(s) (after doping, if doping is used) from which the on-chip calibration resistor 110 is formed. Stated differently, TCORD may be the temperature coefficient with respect to resistance of the on-chip calibration resistor 110. In one embodiment, TCORD is a positive value. However, TCORD could be a negative value, depending on factors such as the material from which the on-chip calibration resistor is fabricated, doping levels, dopant materials, etc.
  • V M T = V REF * [ - R D ( T ) R T ] * TCO RD ( 12 )
  • Equation 13A gives a design equation for one embodiment, where the derivative of the modulating voltage (VM) with respect to temperature may be given by Equation 12. Equation 13A may apply for the circuit of FIG. 2A, in which TCO of the on-chip calibration resistor 110 is positive.
  • R CT = - V M T * q k * 1 ln N * R PTAT ( 13 A )
  • Equation 13B gives a design equation for one embodiment, where the derivative of the modulating voltage (VM) with respect to temperature may be given by Equation 12. Equation 13B may apply for the circuit of FIG. 2D, in which TCO of the on-chip calibration resistor 110 is negative.
  • R CT = V M T * q k * 1 ln N * R PTAT ( 13 B )
  • The value of RPTAT may be a property of the IPTAT current source 201, in one embodiment. In one embodiment, RPTAT is RPTAT resistor 242 in FIG. 2B. With the value for RPTAT known, a suitable value for RCT may be determined from Equations 12, 13A and 13B. Once a suitable value for value for RCT is found, a suitable value for value for RBGR may be determined from, for example, Equation 8A to have an appropriate level for VM.
  • Note that the on-chip calibration resistor 110 may be trimmed to compensate for process variation. For example, if the on-chip calibration resistor 110 is formed from doped polysilicon, its resistance could depend on factors such as the number and size of grain boundaries, shape (length, width, height) of the polysilicon, doping concentration, etc. In one embodiment, the on-chip calibration resistor 110 is trimmed such that at a reference temperature its resistance equals a target resistance.
  • In one embodiment, the resistance of the voltage modulation resistor R CT 212 is variable to account for variations in the supply voltage VSUPPLY. FIG. 5 shows one embodiment of a circuit for varying the resistance of the voltage modulation resistor R CT 212 as a function of the supply voltage. The supply voltage is provided to the analog-to-digital converter (ADC) 502. The ADC 502 generates a digital signal RS that is proportional to the magnitude of the supply voltage VSUPPLY. The digital signal RS is provided to the voltage modulation resistor R CT 212. The voltage modulation resistor R CT 212 is configured to modify its resistance based on the digital signal RS.
  • In some embodiments, the impedance calibration circuit 100 is part of a memory device. The following discussion provides details of the structure of example memory devices which can implement the proposed technology for determining impedance codes.
  • FIG. 6A is a perspective view of a 3D stacked non-volatile memory device. The memory device 800 includes a substrate 801. On and above the substrate are example blocks BLK0 and BLK1 of memory cells (non-volatile storage elements). Also on the substrate is a peripheral area 804 with circuitry for use by the blocks. The substrate 801 can also carry circuitry under the blocks, along with one or more lower metal layers which are patterned in conductive paths to carry signals of the circuitry. The blocks are formed in an intermediate region 802 of the memory device. In an upper region 803 of the memory device, one or more upper metal layers are patterned in conductive paths to carry signals of the circuitry. Each block comprises a stacked area of memory cells, where alternating levels of the stack represent word lines. In one possible approach, each block has opposing tiered sides from which vertical contacts extend upward to an upper metal layer to form connections to conductive paths. While two blocks are depicted as an example, additional blocks can be used, extending in the x- and/or y-directions. Additionally, note that components are considered to be connected if they are directly connected or indirectly connected.
  • In one possible approach, the length of the plane, in the x-direction, represents a direction in which signal paths to word lines extend in the one or more upper metal layers (a word line or SGD line direction), and the width of the plane, in the y-direction, represents a direction in which signal paths to bit lines extend in the one or more upper metal layers (a bit line direction). The z-direction represents a height of the memory device.
  • FIG. 6B is a functional block diagram of a memory device 800 such as the 3D stacked non-volatile memory device 800 of FIG. 6A. The memory device 800 may include one or more memory die 808. The memory die 808 includes a memory structure 826 of memory cells, such as an array of memory cells, control circuitry 810, and read/write circuits 828. In a 3D configuration, the memory structure can include the blocks BLK0 and BLK1 of FIG. 8A. The memory structure 826 is addressable by word lines via a row decoder 824 and by bit lines via a column decoder 832. The read/write circuits 828 include multiple sense blocks SB1, SB2, . . . , SBp (sensing circuitry) and allow a page of memory cells to be read or programmed in parallel. Typically a controller 822 is included in the same memory device 800 (e.g., a removable storage card) as the one or more memory die 808. In some embodiments, one controller will communicate with multiple memory die. Commands and data are transferred between the host 840 and controller 822 via a data bus 820 and between the controller and the one or more memory die 808 via lines 818. The memory die has I/O circuitry 700, in one embodiment. I/O circuitry 700 may contain output buffers. In one embodiment, a ZQ calibration of the output buffers is performed using the circuit of FIG. 1.
  • Memory structure 826 can be a two dimensional structure or a three dimensional structure of memory cells (e.g., NAND flash memory cells). The memory structure may comprise one or more array of memory cells including a 3D array. The memory structure may comprise a monolithic three dimensional memory structure in which multiple memory levels are formed above (and not in) a single substrate, such as a wafer, with no intervening substrates. The memory structure may comprise any type of non-volatile memory that is monolithically formed in one or more physical levels of arrays of memory cells having an active area disposed above a silicon substrate. The memory structure may be in a non-volatile memory device having circuitry associated with the operation of the memory cells, whether the associated circuitry is above or within the substrate.
  • The control circuitry 810 cooperates with the read/write circuits 828 to perform memory operations on the memory structure 826, and includes a state machine 812, an on-chip address decoder 814, and a power control module 816. The state machine 812 provides chip-level control of memory operations. Parameter storage 813 may be provided for storing operational parameters.
  • The on-chip address decoder 814 provides an address interface between that used by the host or a memory controller to the hardware address used by the decoders 824 and 832. The power control module 816 controls the power and voltages supplied to the word lines and bit lines during memory operations. It can include drivers for word line layers (WLLs) in a 3D configuration, SGS and SGD transistors and source lines. The sense blocks can include bit line drivers, in one approach. An SGS transistor is a select gate transistor at a source end of a NAND string, and an SGD transistor is a select gate transistor at a drain end of a NAND string.
  • In various embodiments, one or more of control circuitry 810, state machine 812, decoders 814/824/832, power control module 816, sense blocks SB1, SB2, . . . , SBp, read/write circuits 828, and controller 822 can be thought of as at least one or more control circuits.
  • The off-chip controller 822 may comprise a processor 822 c and storage devices (memory) such as ROM 822 a and RAM 822 b. The storage devices comprises code such as a set of instructions, and the processor 822 c is operable to execute the set of instructions to provide the functionality described herein. Alternatively or additionally, processor 822 c can access code from a storage device 826 a of the memory structure, such as a reserved area of memory cells in one or more word lines.
  • Other types of non-volatile memory in addition to NAND flash memory can also be used.
  • Semiconductor memory devices include volatile memory devices, such as dynamic random access memory (“DRAM”) or static random access memory (“SRAM”) devices, non-volatile memory devices, such as resistive random access memory (“ReRAM”), electrically erasable programmable read only memory (“EEPROM”), flash memory (which can also be considered a subset of EEPROM), ferroelectric random access memory (“FRAM”), and magnetoresistive random access memory (“MRAM”), and other semiconductor elements capable of storing information. Each type of memory device may have different configurations. For example, flash memory devices may be configured in a NAND or a NOR configuration.
  • The memory devices can be formed from passive and/or active elements, in any combinations. By way of non-limiting example, passive semiconductor memory elements include ReRAM device elements, which in some embodiments include a resistivity switching storage element, such as an anti-fuse or phase change material, and optionally a steering element, such as a diode or transistor. Further by way of non-limiting example, active semiconductor memory elements include EEPROM and flash memory device elements, which in some embodiments include elements containing a charge storage region, such as a floating gate, conductive nanoparticles, or a charge storage dielectric material.
  • Multiple memory elements may be configured so that they are connected in series or so that each element is individually accessible. By way of non-limiting example, flash memory devices in a NAND configuration (NAND flash memory) typically contain memory elements connected in series. A NAND string is an example of a set of series-connected transistors comprising memory cells and select gate transistors.
  • A NAND flash memory array may be configured so that the array is composed of multiple strings of memory in which a string is composed of multiple memory elements sharing a single bit line and accessed as a group. Alternatively, memory elements may be configured so that each element is individually accessible, e.g., a NOR memory array. NAND and NOR memory configurations are exemplary, and memory elements may be otherwise configured.
  • The semiconductor memory elements located within and/or over a substrate may be arranged in two or three dimensions, such as a two dimensional memory structure or a three dimensional memory structure.
  • In a two dimensional memory structure, the semiconductor memory elements are arranged in a single plane or a single memory device level. Typically, in a two dimensional memory structure, memory elements are arranged in a plane (e.g., in an x-y direction plane) which extends substantially parallel to a major surface of a substrate that supports the memory elements. The substrate may be a wafer over or in which the layer of the memory elements are formed or it may be a carrier substrate which is attached to the memory elements after they are formed. As a non-limiting example, the substrate may include a semiconductor such as silicon.
  • The memory elements may be arranged in the single memory device level in an ordered array, such as in a plurality of rows and/or columns. However, the memory elements may be arrayed in non-regular or non-orthogonal configurations. The memory elements may each have two or more electrodes or contact lines, such as bit lines and word lines.
  • A three dimensional memory array is arranged so that memory elements occupy multiple planes or multiple memory device levels, thereby forming a structure in three dimensions (i.e., in the x, y and z directions, where the z direction is substantially perpendicular and the x and y directions are substantially parallel to the major surface of the substrate).
  • As a non-limiting example, a three dimensional memory structure may be vertically arranged as a stack of multiple two dimensional memory device levels. As another non-limiting example, a three dimensional memory array may be arranged as multiple vertical columns (e.g., columns extending substantially perpendicular to the major surface of the substrate, i.e., in the y direction) with each column having multiple memory elements. The columns may be arranged in a two dimensional configuration, e.g., in an x-y plane, resulting in a three dimensional arrangement of memory elements with elements on multiple vertically stacked memory planes. Other configurations of memory elements in three dimensions can also constitute a three dimensional memory array.
  • By way of non-limiting example, in a three dimensional NAND memory array, the memory elements may be coupled together to form a NAND string within a single horizontal (e.g., x-y) memory device level. Alternatively, the memory elements may be coupled together to form a vertical NAND string that traverses across multiple horizontal memory device levels. Other three dimensional configurations can be envisioned wherein some NAND strings contain memory elements in a single memory level while other strings contain memory elements which span through multiple memory levels. Three dimensional memory arrays may also be designed in a NOR configuration and in a ReRAM configuration.
  • Typically, in a monolithic three dimensional memory array, one or more memory device levels are formed above a single substrate. Optionally, the monolithic three dimensional memory array may also have one or more memory layers at least partially within the single substrate. As a non-limiting example, the substrate may include a semiconductor such as silicon. In a monolithic three dimensional array, the layers constituting each memory device level of the array are typically formed on the layers of the underlying memory device levels of the array. However, layers of adjacent memory device levels of a monolithic three dimensional memory array may be shared or have intervening layers between memory device levels.
  • Then again, two dimensional arrays may be formed separately and then packaged together to form a non-monolithic memory device having multiple layers of memory. For example, non-monolithic stacked memories can be constructed by forming memory levels on separate substrates and then stacking the memory levels atop each other. The substrates may be thinned or removed from the memory device levels before stacking, but as the memory device levels are initially formed over separate substrates, the resulting memory arrays are not monolithic three dimensional memory arrays. Further, multiple two dimensional memory arrays or three dimensional memory arrays (monolithic or non-monolithic) may be formed on separate chips and then packaged together to form a stacked-chip memory device.
  • Associated circuitry is typically required for operation of the memory elements and for communication with the memory elements. As non-limiting examples, memory devices may have circuitry used for controlling and driving memory elements to accomplish functions such as programming and reading. This associated circuitry may be on the same substrate as the memory elements and/or on a separate substrate. For example, a controller for memory read-write operations may be located on a separate controller chip and/or on the same substrate as the memory elements.
  • FIG. 7 depicts a cross-sectional view of a block of the 3D non-volatile memory device of having straight strings. The block contains a number of non-volatile storage elements. This is one example that can be used in the memory array in FIG. 6B. The stack 777 contains alternating layers of conductive (SGS, WL0-WL5, SGD) and insulating (D0-D8) layers. The conductive could be tungsten, highly doped silicon, etc. The insulating layers could be silicon nitride, etc. Columns of memory cells corresponding to NAND strings NSB0 to NSB5, respectively, are depicted in the multi-layer stack. The stack 777 includes a substrate 801, an insulating film 709 on the substrate, and a portion of a source line SLB0. The NAND strings NSB0 to NSB5 are each in a different sub-block, but are in a common set of NAND strings. NSB0 has a source end 603 and a drain end 701. A slit 702 is also depicted with other slits. Slits may be formed from an insulator, such as silicon oxide. A portion of the bit line BLB0 is also depicted. Dashed lines depict memory cells and select gates. Memory cells in in layers WL0-WL5. Select gates are in layers SGS and SGD.
  • A calibration current supplying means for supplying to a calibration node a calibration current having a magnitude that is proportional to an input code, in various embodiments, may include variable impedance circuit 104, variable impedance circuit 104 a, variable impedance circuit 104 b, a plurality of transistors 402, a plurality of transistors 422, and/or other hardware. Other embodiments may include similar or equivalent means for supplying to a calibration node a calibration current having a magnitude that is proportional to an input code.
  • A voltage modulating means for modulating a voltage at a calibration resistor with a resistance having a positive temperature coefficient to substantially cancel the positive temperature coefficient of a calibration resistor to cause a current passing through the calibration resistor to be temperature independent, in various embodiments, may include voltage modulating circuit 232, reference voltage circuit 236, IPTAT source 201, resistors 206, 212, operational amplifiers 202, 216, and transistors 204, 208, 210, and 218, operational amplifier 214, transistor 222, and/or other hardware. IPTAT source 201 may include operational amplifier 240, PMOS transistor 248, PMOS transistor 250, PMOS transistor 252, RPTAT resistor 242, diode 244, and diode 246. Other embodiments may include similar or equivalent means for modulating a voltage at a calibration resistor with a resistance having a positive temperature coefficient to substantially cancel the positive temperature coefficient of a calibration resistor to cause a current passing through the calibration resistor to be temperature independent.
  • A temperature independent reference current providing means for providing a temperature independent reference current to a calibration node based on the current passing through the calibration resistor, in various embodiments, may include temperature independent reference current circuit 234, on chip calibration resistor 110, transistors 222 and 224, temperature independent reference current generation 106, transfer element (e.g., current mirror) 270, transistor 262, transistor 260 and/or other hardware. Other embodiments may include similar or equivalent means for providing a temperature independent reference current to the calibration node based on the current passing through the calibration resistor.
  • A comparison means for comparing a calibration current with a temperature independent reference current to determine whether the calibration current is less than or greater than the temperature independent reference current, in various embodiments, may include comparator 108, an operational amplifier, and/or other hardware. Other embodiments may include similar or equivalent means for comparing a calibration current with a temperature independent reference current to determine whether the calibration current is less than or greater than the temperature independent reference current.
  • An input code modification means for modifying the input code to the calibration current supplying means responsive to whether the calibration current is less than or greater than the temperature independent reference current, in various embodiments, may include calibration logic 102, processor 822 c, state machine 812, code stored in ROM 822 a, RAM 822B, storage device 826 a, and/or other hardware. Other embodiments may include similar or equivalent means for modifying the input code to the calibration current supplying means responsive to whether the calibration current is less than or greater than the temperature independent reference current.
  • One embodiment disclosed herein includes an apparatus comprising a reference current generation circuit configured to generate a temperature independent reference current based on a current through a calibration resistor that resides on an integrated circuit and to provide the temperature independent reference current to a calibration node. The apparatus further comprises a variable impedance circuit coupled to the calibration node, and a comparator having a first input coupled to the calibration node and a second input coupled to a reference voltage.
  • In one embodiment, the apparatus of the previous paragraph further comprises a reference voltage circuit that is configured to provide a voltage that is substantially equal to the reference voltage to the first terminal of the calibration resistor. The apparatus further comprises a voltage modulating circuit coupled to the second terminal of the calibration resistor, wherein the voltage modulating circuit is configured to modulate a voltage at the second terminal of the calibration resistor to substantially cancel the temperature coefficient of the calibration resistor, wherein current passing through the calibration resistor is temperature independent. The apparatus further comprises a temperature independent reference current circuit configured to derive the temperature independent reference current from the temperature independent current passing through the calibration resistor.
  • In one embodiment, the reference current generation circuit of the apparatus of either of the previous two paragraphs is configured to generate the temperature independent reference current to have a magnitude that is substantially equal to the reference voltage divided by a target resistance (RT) to which the variable impedance circuit is being calibrated.
  • In one embodiment, the variable impedance circuit of the apparatus of any of the previous three paragraphs is configured to output to the calibration node a current having a magnitude that is inversely proportional to an impedance of the variable impedance circuit, wherein the comparator is configured to output a signal that responds to a difference between the variable impedance circuit current and the temperature independent reference current, wherein the signal indicates whether the variable impedance circuit current is greater than or less than the temperature independent reference current.
  • In one embodiment, the apparatus of any of the previous four paragraphs further comprises logic configured to modify the impedance of the variable impedance circuit responsive to the signal that indicates whether the variable impedance circuit current is greater than or less than the temperature independent reference current to substantially balance the variable impedance circuit current with the temperature independent reference current.
  • In one embodiment, the apparatus of any of the previous five paragraphs further comprises logic configured to modify the impedance of the variable impedance circuit responsive to the signal that is output by the comparator to perform a ZQ calibration.
  • One embodiment disclosed herein includes non-volatile storage device comprising a plurality of non-volatile storage elements, a reference current generation circuit, a variable current circuit, a comparator, and a calibration circuit. The reference current generation circuit comprises a calibration resistor having a first terminal and a second terminal. The first terminal is coupled to a voltage source that provides a first voltage. A resistance of the calibration resistor has a positive temperature coefficient. The reference current generation circuit is configured to modulate a second voltage at the second terminal of the calibration resistor to cancel the positive temperature coefficient of the calibration resistor to cause a current passing through the calibration resistor to be temperature independent. The reference current generation circuit is configured to provide to a calibration node a temperature independent reference current based on the current passing through the calibration resistor. The variable current circuit is configured to output a calibration current to the calibration node. The comparator has a first input that is coupled to the calibration node and a second input that is coupled to a node that provides a third voltage. The comparator is configured to output a signal that indicates whether the calibration current is greater than or less than the temperature independent reference current. The calibration circuit is configured to cause the variable current circuit to change a magnitude of the calibration current based on the signal that indicates whether the calibration current is greater than or less than the temperature independent reference current.
  • One embodiment includes a non-volatile storage device, comprising a three-dimensional memory array comprising a plurality of non-volatile storage elements, a calibration resistor, reference current generation circuit, a variable current circuit, and a comparator. The calibration resistor has a resistance that has a positive temperature coefficient, wherein the calibration resistor has a first terminal coupled to a first reference voltage and a second terminal. The reference current generation circuit may be configured to generate a compensating voltage having a negative temperature coefficient. The reference current generation circuit may be configured to provide the compensating voltage to the second terminal of the calibration resistor, wherein a current that flows in the calibration resistor due to the first reference voltage and the compensating voltage is independent of temperature. The reference current generation circuit may be configured to provide to a calibration node a temperature independent reference current based on the current that flows in the calibration resistor. The variable current circuit is coupled to the calibration node. The variable current circuit may be configured to provide a calibration current to the calibration node. The comparator has a first input that is coupled to the calibration node and a second input that is coupled to a second reference voltage. The comparator may be configured to output a signal responsive to a comparison of the calibration current and the temperature independent reference current.
  • One of skill in the art will recognize that this technology is not limited to the two dimensional and three dimensional exemplary structures described but covers all relevant memory structures within the spirit and scope of the technology as described herein and as understood by one of skill in the art. The foregoing detailed description of the invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed. Many modifications and variations are possible in light of the above teaching. The described embodiments were chosen in order to best explain the principles of the invention and its practical application, to thereby enable others skilled in the art to best utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims appended hereto.

Claims (21)

What is claimed is:
1. An apparatus comprising:
a reference current generation circuit configured to generate a temperature independent reference current based on a current through a calibration resistor that resides on an integrated circuit and to provide the temperature independent reference current to a calibration node;
a variable impedance circuit coupled to the calibration node; and
a comparator having a first input coupled to the calibration node and a second input coupled to a reference voltage.
2. The apparatus of claim 1, wherein the calibration resistor has a first terminal and a second terminal, wherein a resistance of the calibration resistor has a temperature coefficient, wherein the reference current generation circuit comprises:
a reference voltage circuit that is configured to provide a voltage that is substantially equal to the reference voltage to the first terminal of the calibration resistor;
a voltage modulating circuit coupled to the second terminal of the calibration resistor, wherein the voltage modulating circuit is configured to modulate a voltage at the second terminal of the calibration resistor to substantially cancel the temperature coefficient of the calibration resistor, wherein current passing through the calibration resistor is temperature independent; and
a temperature independent reference current circuit configured to derive the temperature independent reference current from the temperature independent current passing through the calibration resistor.
3. The apparatus of claim 2, wherein the temperature coefficient of the calibration resistor is a positive temperature coefficient, wherein the resistance of the calibration resistor increases with increases in temperature, wherein the voltage modulating circuit is configured to decrease the voltage at the second terminal of the calibration resistor as temperature increases.
4. The apparatus of claim 1, wherein the calibration resistor has a first terminal and a second terminal, wherein a resistance of the calibration resistor has a temperature coefficient, wherein the reference current generation circuit comprises:
a reference voltage circuit that is configured to provide a voltage that is substantially equal to the reference voltage to the first terminal of the calibration resistor;
a temperature dependent voltage generation circuit coupled to the second terminal of the calibration resistor, wherein the temperature dependent voltage generation circuit is configured to generate a voltage at the second terminal that has a temperature coefficient configured to substantially cancel the temperature coefficient of the calibration resistor; and
a temperature independent reference current circuit configured to provide the temperature independent reference current to the calibration node based on a current through the calibration resistor.
5. The apparatus of claim 4, wherein the temperature coefficient of the calibration resistor is a positive temperature coefficient, wherein the resistance of the calibration resistor increases with increases in temperature, wherein the temperature coefficient of the voltage at the second terminal is a negative temperature coefficient, wherein the voltage at the second terminal of the calibration resistor decreases with increases in temperature.
6. The apparatus of claim 4, wherein the temperature dependent voltage generation circuit comprises:
a voltage modulation resistor having a node coupled to the second terminal of the calibration resistor; and
a proportional to temperature circuit configured to provide a current proportional to temperature through the voltage modulation resistor.
7. The apparatus of claim 6, wherein the proportional to temperature circuit is configured to establish a magnitude of the current that is proportional to temperature to modulate the voltage at the node that is coupled to the second terminal of the calibration resistor to substantially cancel the temperature coefficient of the calibration resistor.
8. The apparatus of claim 1, wherein the reference current generation circuit is configured to generate the temperature independent reference current to have a magnitude that is substantially equal to the reference voltage divided by a target resistance to which the variable impedance circuit is being calibrated.
9. The apparatus of claim 1, wherein the variable impedance circuit is configured to output to the calibration node a current having a magnitude that is inversely proportional to an impedance of the variable impedance circuit, wherein the comparator is configured to output a signal that responds to a difference between the variable impedance circuit current and the temperature independent reference current, wherein the signal indicates whether the variable impedance circuit current is greater than or less than the temperature independent reference current.
10. The apparatus of claim 9, further comprising:
logic configured to modify the impedance of the variable impedance circuit responsive to the signal that indicates whether the variable impedance circuit current is greater than or less than the temperature independent reference current to substantially balance the variable impedance circuit current with the temperature independent reference current.
11. The apparatus of claim 9, further comprising logic configured to modify the impedance of the variable impedance circuit responsive to the signal that is output by the comparator to perform a ZQ calibration.
12. The apparatus of claim 1, further comprising:
a three-dimensional memory array comprising a plurality of non-volatile storage elements.
13. A non-volatile storage device comprising:
a plurality of non-volatile storage elements;
a reference current generation circuit that comprises a calibration resistor having a first terminal and a second terminal, wherein the first terminal is coupled to a voltage source that provides a first voltage, wherein resistance of the calibration resistor has a positive temperature coefficient, wherein the reference current generation circuit is configured to modulate a second voltage at the second terminal of the calibration resistor to cancel the positive temperature coefficient of the calibration resistor to cause a current passing through the calibration resistor to be temperature independent, wherein the reference current generation circuit is configured to provide to a calibration node a temperature independent reference current based on the current passing through the calibration resistor;
a variable current circuit configured to output a calibration current to the calibration node;
a comparator having a first input that is coupled to the calibration node and a second input that is coupled to a node that provides a third voltage, wherein the comparator is configured to output a signal that indicates whether the calibration current is greater than or less than the temperature independent reference current; and
a calibration circuit configured to cause the variable current circuit to change a magnitude of the calibration current based on the signal that indicates whether the calibration current is greater than or less than the temperature independent reference current.
14. The non-volatile storage device of claim 13, wherein the first voltage is equal in magnitude to the third voltage.
15. The non-volatile storage device of claim 13, wherein the variable current circuit comprises an input and a plurality of transistors coupled to the calibration node to provide the calibration current, wherein the variable current circuit is configured to select transistors to modify a magnitude of the calibration current.
16. The non-volatile storage device of claim 13, wherein the reference current generation circuit further comprises:
a proportional to absolute temperature (PTAT) circuit configured to generate a PTAT current, wherein the reference current generation circuit is configured to modulate the second voltage at the second terminal of the calibration resistor based on the PTAT current.
17. The non-volatile storage device of claim 16, wherein the reference current generation circuit further comprises:
a band gap reference resistor having a node coupled to the PTAT circuit, wherein the PTAT current is configured to cause the PTAT current to flow through the band gap reference resistor to create a band gap reference voltage at the node coupled to the PTAT circuit; and
a voltage modulation resistor having a node coupled to the second terminal of the calibration resistor;
wherein the reference current generation circuit is configured to provide a net current that flows through the band gap reference resistor to the voltage modulation resistor to generate a temperature dependent voltage on the node of the voltage modulation resistor that is coupled to the second terminal of the calibration resistor, wherein the reference current generation circuit is configured to provide the temperature dependent voltage to the second terminal of the calibration resistor to nullify the positive temperature coefficient of the calibration resistor.
18. A method comprising:
supplying a reference voltage to a first terminal of a calibration resistor that has a resistance that has a positive temperature coefficient, wherein the calibration resistor resides on an integrated circuit;
generating a compensating voltage having a negative temperature coefficient;
providing the compensating voltage to a second terminal of the calibration resistor, wherein the compensating voltage substantially nullifies the positive temperature coefficient of the calibration resistor, wherein a current through the calibration resistor has a magnitude that is independent of temperature;
providing, to a calibration node, a temperature independent reference current that reflects the current through the calibration resistor;
providing a calibration signal to a variable impedance circuit to cause the variable impedance circuit to output a calibration current to the calibration node;
comparing the calibration current with the temperature independent reference current; and
adjusting the calibration signal based on a result of comparing the calibration current with the temperature independent reference current.
19. The method of claim 18, wherein the adjusting the calibration signal based on the result of comparing the calibration current with the temperature independent reference current comprises:
performing a ZQ calibration.
20. The method of claim 18, wherein the generating a compensating voltage having a negative temperature coefficient comprises:
generating a proportional to absolute temperature (PTAT) current; and
generating the compensating voltage based on the PTAT current.
21. A non-volatile storage device comprising:
calibration current supplying means for supplying to a calibration node a calibration current having a magnitude that is proportional to an input code;
voltage modulating means for modulating a voltage at a calibration resistor with a resistance having a positive temperature coefficient to substantially cancel the positive temperature coefficient of the calibration resistor to cause a current passing through the calibration resistor to be temperature independent, wherein the calibration resistor resides on an integrated circuit of the non-volatile storage device;
temperature independent reference current providing means for providing a temperature independent reference current to the calibration node based on the current passing through the calibration resistor;
comparison means for comparing the calibration current with the temperature independent reference current to determine whether the calibration current is less than or greater than the temperature independent reference current; and
input code modification means for modifying the input code to the calibration current supplying means responsive to whether the calibration current is less than or greater than the temperature independent reference current.
US14/928,466 2014-12-17 2015-10-30 Temperature Independent Reference Current Generation For Calibration Abandoned US20160179113A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US14/928,466 US20160179113A1 (en) 2014-12-17 2015-10-30 Temperature Independent Reference Current Generation For Calibration
US15/082,241 US9704591B2 (en) 2014-12-17 2016-03-28 Temperature independent reference current generation for calibration

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462093307P 2014-12-17 2014-12-17
US14/928,466 US20160179113A1 (en) 2014-12-17 2015-10-30 Temperature Independent Reference Current Generation For Calibration

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US15/082,241 Continuation-In-Part US9704591B2 (en) 2014-12-17 2016-03-28 Temperature independent reference current generation for calibration

Publications (1)

Publication Number Publication Date
US20160179113A1 true US20160179113A1 (en) 2016-06-23

Family

ID=56129277

Family Applications (2)

Application Number Title Priority Date Filing Date
US14/928,466 Abandoned US20160179113A1 (en) 2014-12-17 2015-10-30 Temperature Independent Reference Current Generation For Calibration
US14/966,891 Active US9563213B2 (en) 2014-12-17 2015-12-11 On chip ZQ calibration resistor trimming

Family Applications After (1)

Application Number Title Priority Date Filing Date
US14/966,891 Active US9563213B2 (en) 2014-12-17 2015-12-11 On chip ZQ calibration resistor trimming

Country Status (1)

Country Link
US (2) US20160179113A1 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170023966A1 (en) * 2015-07-23 2017-01-26 Samsung Electronics Co., Ltd. Semiconductor device having a mismatch detection and correction circuit
US20180138895A1 (en) * 2016-11-17 2018-05-17 Realtek Semiconductor Corporation Resistance calibration circuit and device
CN108107964A (en) * 2016-11-24 2018-06-01 瑞昱半导体股份有限公司 Resistance correcting circuit and device
US10141900B2 (en) 2017-04-26 2018-11-27 Sandisk Technologies Llc Offset trimming for differential amplifier
WO2020036639A1 (en) * 2018-08-17 2020-02-20 Micron Technology, Inc Systems and methods for impedance calibration of a semiconductor device
US20200118624A1 (en) * 2018-10-15 2020-04-16 International Business Machines Corporation Apparatus for a memristor crossbar array
CN111552341A (en) * 2020-05-15 2020-08-18 电子科技大学 Margin-adjustable output voltage margin generation circuit
CN113261063A (en) * 2021-03-31 2021-08-13 长江存储科技有限责任公司 ZQ resistor calibration circuit in memory device and calibration method thereof
US11488641B2 (en) 2020-06-03 2022-11-01 Samsung Electronics Co., Ltd. Memory device including variable reference resistor and method of calibrating the variable reference resistor

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10025685B2 (en) 2015-03-27 2018-07-17 Intel Corporation Impedance compensation based on detecting sensor data
US9679643B1 (en) * 2016-03-09 2017-06-13 Taiwan Semiconductor Manufacturing Co., Ltd. Resistive memory device having a trimmable resistance of at least on of a driver and a sinker is trimmed based on a row location
US10062453B1 (en) 2017-03-09 2018-08-28 Toshiba Memory Corporation Calibrating I/O impedances using estimation of memory die temperature
US9825613B1 (en) * 2017-05-03 2017-11-21 Novatek Microelectronics Corp. Resistor calibration system
US10530617B2 (en) 2017-08-07 2020-01-07 Micron Technology, Inc. Programmable channel equalization for multi-level signaling
US10277441B2 (en) * 2017-08-07 2019-04-30 Micron Technology, Inc. Uniformity between levels of a multi-level signal
US10447512B2 (en) 2017-08-07 2019-10-15 Micron Technology, Inc. Channel equalization for multi-level signaling
US10277435B2 (en) 2017-08-07 2019-04-30 Micron Technology, Inc. Method to vertically align multi-level cells
KR102401182B1 (en) 2018-01-19 2022-05-24 삼성전자주식회사 Memory device and memory package
US10224928B1 (en) * 2018-03-23 2019-03-05 Western Digital Technologies, Inc. On-die impedance calibration
CN108491023B (en) * 2018-05-22 2020-04-14 电子科技大学 Low-power-consumption high-precision current reference circuit
US10461965B1 (en) * 2018-09-28 2019-10-29 Western Digital Technologies, Inc. Active low-power termination
CN112368772A (en) 2018-10-12 2021-02-12 英特尔公司 Techniques for calibrating impedance levels
US10693460B1 (en) * 2019-08-19 2020-06-23 Micron Technology, Inc. Fuse adjustable output driver
CN111490751B (en) * 2020-04-22 2023-05-12 上海微阱电子科技有限公司 On-chip resistor self-calibration circuit
JP6916929B1 (en) 2020-05-25 2021-08-11 華邦電子股▲ふん▼有限公司Winbond Electronics Corp. Impedance calibration circuit
US11488682B2 (en) 2020-06-24 2022-11-01 Sandisk Technologies Llc Calibration for integrated memory assembly
TWI782288B (en) * 2020-06-29 2022-11-01 大陸商珠海興芯存儲科技有限公司 Pseudo-analog memory computing circuit
US11594532B2 (en) 2020-06-29 2023-02-28 Texas Instruments Incorporated On-chip heater temperature calibration
CN112669894A (en) * 2021-01-12 2021-04-16 广州匠芯创科技有限公司 ZQ calibration circuit and ZQ calibration method
US20220350522A1 (en) * 2021-04-29 2022-11-03 Micron Technology, Inc. Multi-driver signaling
KR20230031590A (en) 2021-08-27 2023-03-07 에스케이하이닉스 주식회사 Semiconductor apparatus including a calibration circuit
US20240086347A1 (en) * 2022-09-09 2024-03-14 Sandisk Technologies Llc Zq calibration circuit and method for memory interfaces

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231316A (en) * 1991-10-29 1993-07-27 Lattice Semiconductor Corporation Temperature compensated cmos voltage to current converter
US6459326B2 (en) * 2000-06-13 2002-10-01 Em Microelectronic-Marin Sa Method for generating a substantially temperature independent current and device allowing implementation of the same
US20040124850A1 (en) * 2002-12-31 2004-07-01 Koneru Surya N. Calibration circuit for current source and on-die terminations
US6836170B2 (en) * 2003-04-17 2004-12-28 Kabushiki Kaisha Toshiba Impedance trimming circuit
US7064575B2 (en) * 2004-08-31 2006-06-20 Semtech Corporation Method and system for adaptively controlling output driver impedance
US7170318B2 (en) * 2004-01-06 2007-01-30 Samsung Electronics Co., Ltd. Impedance controller and impedance control method
US7504878B2 (en) * 2006-07-03 2009-03-17 Mediatek Inc. Device having temperature compensation for providing constant current through utilizing compensating unit with positive temperature coefficient
US20090302825A1 (en) * 2008-06-04 2009-12-10 Raydium Semiconductor Corporation Current source
US7965100B1 (en) * 2009-11-25 2011-06-21 Texas Instruments Incorporated Transmitter with internal compensation for variance in differential data line impedance
US8446209B1 (en) * 2011-11-28 2013-05-21 Semiconductor Components Industries, Llc Semiconductor device and method of forming same for temperature compensating active resistance
US8489044B2 (en) * 2011-08-11 2013-07-16 Fujitsu Semiconductor Limited System and method for reducing or eliminating temperature dependence of a coherent receiver in a wireless communication device
US8509008B2 (en) * 2010-10-26 2013-08-13 SK Hynix Inc. Internal voltage generator of semiconductor memory device
US8710904B2 (en) * 2012-08-14 2014-04-29 Texas Instruments Incorporated MOS resistor apparatus and methods
US8811055B2 (en) * 2011-09-19 2014-08-19 Samsung Electronics Co., Ltd. Semiconductor memory device
US8907652B2 (en) * 2011-04-08 2014-12-09 Stmicroelectronics S.R.L. Band-gap voltage generator
US9019727B2 (en) * 2012-07-18 2015-04-28 Linear Technology Corporation Temperature compensation of output diode in an isolated flyback converter
US9391523B2 (en) * 2011-09-23 2016-07-12 Power Integrations, Inc. Controller with constant current limit

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0782193A1 (en) 1995-12-15 1997-07-02 Lucent Technologies Inc. Adaptive resistor trimming circuit
JP3515025B2 (en) * 1999-09-22 2004-04-05 株式会社東芝 Semiconductor device
KR100465759B1 (en) * 2002-06-14 2005-01-13 삼성전자주식회사 Semiconductor device
US7154421B2 (en) 2003-12-12 2006-12-26 Telasic Communications, Inc. DNL/INL trim techniques for comparator based analog to digital converters
US7218155B1 (en) * 2005-01-20 2007-05-15 Altera Corporation Techniques for controlling on-chip termination resistance using voltage range detection
US8179151B2 (en) 2008-04-04 2012-05-15 Fairchild Semiconductor Corporation Method and system that determines the value of a resistor in linear and non-linear resistor sets
US7642852B2 (en) 2008-04-25 2010-01-05 Texas Instruments Incorporated Resistor self-trim circuit for increased performance
US7782080B2 (en) 2008-09-09 2010-08-24 Promos Technologies Pte.Ltd. High capacitive load and noise tolerant system and method for controlling the drive strength of output drivers in integrated circuit devices
US7973553B1 (en) * 2010-03-11 2011-07-05 Altera Corporation Techniques for on-chip termination

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231316A (en) * 1991-10-29 1993-07-27 Lattice Semiconductor Corporation Temperature compensated cmos voltage to current converter
US6459326B2 (en) * 2000-06-13 2002-10-01 Em Microelectronic-Marin Sa Method for generating a substantially temperature independent current and device allowing implementation of the same
US20040124850A1 (en) * 2002-12-31 2004-07-01 Koneru Surya N. Calibration circuit for current source and on-die terminations
US6836170B2 (en) * 2003-04-17 2004-12-28 Kabushiki Kaisha Toshiba Impedance trimming circuit
US7170318B2 (en) * 2004-01-06 2007-01-30 Samsung Electronics Co., Ltd. Impedance controller and impedance control method
US7064575B2 (en) * 2004-08-31 2006-06-20 Semtech Corporation Method and system for adaptively controlling output driver impedance
US7504878B2 (en) * 2006-07-03 2009-03-17 Mediatek Inc. Device having temperature compensation for providing constant current through utilizing compensating unit with positive temperature coefficient
US20090302825A1 (en) * 2008-06-04 2009-12-10 Raydium Semiconductor Corporation Current source
US7965100B1 (en) * 2009-11-25 2011-06-21 Texas Instruments Incorporated Transmitter with internal compensation for variance in differential data line impedance
US8509008B2 (en) * 2010-10-26 2013-08-13 SK Hynix Inc. Internal voltage generator of semiconductor memory device
US8907652B2 (en) * 2011-04-08 2014-12-09 Stmicroelectronics S.R.L. Band-gap voltage generator
US8489044B2 (en) * 2011-08-11 2013-07-16 Fujitsu Semiconductor Limited System and method for reducing or eliminating temperature dependence of a coherent receiver in a wireless communication device
US8811055B2 (en) * 2011-09-19 2014-08-19 Samsung Electronics Co., Ltd. Semiconductor memory device
US9391523B2 (en) * 2011-09-23 2016-07-12 Power Integrations, Inc. Controller with constant current limit
US8446209B1 (en) * 2011-11-28 2013-05-21 Semiconductor Components Industries, Llc Semiconductor device and method of forming same for temperature compensating active resistance
US9019727B2 (en) * 2012-07-18 2015-04-28 Linear Technology Corporation Temperature compensation of output diode in an isolated flyback converter
US8710904B2 (en) * 2012-08-14 2014-04-29 Texas Instruments Incorporated MOS resistor apparatus and methods

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170023966A1 (en) * 2015-07-23 2017-01-26 Samsung Electronics Co., Ltd. Semiconductor device having a mismatch detection and correction circuit
US10310536B2 (en) * 2015-07-23 2019-06-04 Samsung Electronics Co., Ltd. Semiconductor device having a mismatch detection and correction circuit
US20180138895A1 (en) * 2016-11-17 2018-05-17 Realtek Semiconductor Corporation Resistance calibration circuit and device
US10079591B2 (en) * 2016-11-17 2018-09-18 Realtek Semiconductor Corporation Resistance calibration circuit and device
CN108107964A (en) * 2016-11-24 2018-06-01 瑞昱半导体股份有限公司 Resistance correcting circuit and device
US10141900B2 (en) 2017-04-26 2018-11-27 Sandisk Technologies Llc Offset trimming for differential amplifier
WO2020036639A1 (en) * 2018-08-17 2020-02-20 Micron Technology, Inc Systems and methods for impedance calibration of a semiconductor device
US10886918B2 (en) 2018-08-17 2021-01-05 Micron Technology, Inc. Systems and methods for impedance calibration of a semiconductor device
US20200118624A1 (en) * 2018-10-15 2020-04-16 International Business Machines Corporation Apparatus for a memristor crossbar array
US10832772B2 (en) * 2018-10-15 2020-11-10 International Business Machines Corporation Apparatus for a memristor crossbar array
CN111552341A (en) * 2020-05-15 2020-08-18 电子科技大学 Margin-adjustable output voltage margin generation circuit
US11488641B2 (en) 2020-06-03 2022-11-01 Samsung Electronics Co., Ltd. Memory device including variable reference resistor and method of calibrating the variable reference resistor
CN113261063A (en) * 2021-03-31 2021-08-13 长江存储科技有限责任公司 ZQ resistor calibration circuit in memory device and calibration method thereof

Also Published As

Publication number Publication date
US20160182044A1 (en) 2016-06-23
US9563213B2 (en) 2017-02-07

Similar Documents

Publication Publication Date Title
US20160179113A1 (en) Temperature Independent Reference Current Generation For Calibration
US9704591B2 (en) Temperature independent reference current generation for calibration
US9531382B1 (en) Search for impedance calibration
US9437318B2 (en) Adaptive program pulse duration based on temperature
EP3248195B1 (en) Method and apparatus for refresh programming of memory cells based on amount of threshold voltage downshift
CN107239092B (en) Temperature independent reference electric current for calibration generates
US20190348096A1 (en) Resistive memory device providing reference calibration, and operating method thereof
US20110122679A1 (en) Resistive Sense Memory Calibration for Self-Reference Read Method
US11410730B2 (en) I/O buffer offset mitigation while applying a same voltage level to two inputs of an input buffer
US9740220B2 (en) Device having internal voltage generating circuit
US10930353B1 (en) Non-volatile memory device and operating method of the same
JP2015088212A (en) Semiconductor storage device and data control method of the same
US9601209B2 (en) Voltage generator and semiconductor memory device
US20210098037A1 (en) Managing bit line voltage generating circuits in memory devices
CN114550793A (en) Impedance calibration circuit in memory device and method of calibrating impedance
US9190117B2 (en) Nonvolatile semiconductor memory device
KR102307216B1 (en) Method and apparatus for programming memory
KR20210072819A (en) Driving adjacent word lines of a NAND string to a target voltage level
TW202238596A (en) Memory device
US11756944B2 (en) Semiconductor wafer
US11442091B2 (en) Apparatus and methods for determination of capacitive and resistive characteristics of access lines
KR102631352B1 (en) Resistive memory device providing reference calibration and operating method thereof
US11386967B2 (en) Voltage generator and memory device including the same
US20220404408A1 (en) Apparatus for determination of capacitive and resistive characteristics of access lines
US20210181777A1 (en) Voltage generation system and method for negative and positive voltage driven systems

Legal Events

Date Code Title Description
AS Assignment

Owner name: SANDISK TECHNOLOGIES INC., TEXAS

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:TAIGOR, SUBODH PRAKASH;YADALA, SRIDHAR;SAMINENI, RANGARAO;SIGNING DATES FROM 20160224 TO 20160301;REEL/FRAME:038154/0297

AS Assignment

Owner name: SANDISK TECHNOLOGIES LLC, TEXAS

Free format text: CHANGE OF NAME;ASSIGNOR:SANDISK TECHNOLOGIES INC;REEL/FRAME:038812/0954

Effective date: 20160516

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION