US20150174687A1 - Method for fusing nanowire junctions in conductive films - Google Patents
Method for fusing nanowire junctions in conductive films Download PDFInfo
- Publication number
- US20150174687A1 US20150174687A1 US14/567,983 US201414567983A US2015174687A1 US 20150174687 A1 US20150174687 A1 US 20150174687A1 US 201414567983 A US201414567983 A US 201414567983A US 2015174687 A1 US2015174687 A1 US 2015174687A1
- Authority
- US
- United States
- Prior art keywords
- conductive film
- film
- substrate
- constant current
- ultrasonic welding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002070 nanowire Substances 0.000 title claims abstract description 149
- 238000000034 method Methods 0.000 title claims abstract description 72
- 229910052751 metal Inorganic materials 0.000 claims abstract description 72
- 239000002184 metal Substances 0.000 claims abstract description 72
- 238000003466 welding Methods 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims description 50
- 239000011521 glass Substances 0.000 claims description 7
- 239000004973 liquid crystal related substance Substances 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims description 5
- 229920003023 plastic Polymers 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 121
- 239000010409 thin film Substances 0.000 description 8
- 230000004927 fusion Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- 125000002524 organometallic group Chemical group 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000002042 Silver nanowire Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 239000002482 conductive additive Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000007499 fusion processing Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007764 slot die coating Methods 0.000 description 1
- 239000004984 smart glass Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/002—Resistance welding; Severing by resistance heating specially adapted for particular articles or work
- B23K11/008—Manufacturing of metallic grids or mats by spot welding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/002—Resistance welding; Severing by resistance heating specially adapted for particular articles or work
- B23K11/0026—Welding of thin articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/16—Resistance welding; Severing by resistance heating taking account of the properties of the material to be welded
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/24—Electric supply or control circuits therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
Definitions
- the following description relates generally to transparent and conductive films.
- Transparent conductive thin films have been widely used for devices such as Liquid Crystal Displays (LCDs), Organic Light Emitting Device (OLED) Displays, solar photovoltaics, touch screens, or electrochromic oxide-based films such as smart windows.
- LCDs Liquid Crystal Displays
- OLED Organic Light Emitting Device
- electrochromic oxide-based films such as smart windows.
- ITO indium tin oxide
- ITO requires high temperature for processing, and the ITO thin film is brittle and prone to cracking on flexible substrates.
- the thickness of the ITO film has to be increased, which in turn leads to reduced light transmission and increased cost.
- metal nanowires have good conductivity along the length of the nanowires, but have high contact resistance at the junctions where two or more nanowires cross one another.
- An aspect according to one or more embodiments of the present invention is directed toward a method for fusing metal nanowire junctions in a conductive film, where such a film may be coated on a substrate.
- the metal nanowires have reduced contact resistance, and the conductive film has good electrical conductivity as a result of the fusion of the metal nanowire junctions.
- a method for fusing metal nanowire junctions in a conductive film includes applying a constant current through the conductive film including a plurality of metal nanowires and a plurality of metal nanowire junctions.
- the applying of the constant current may be through a pair of electrodes facing each other.
- the applying of the constant current may be through an array of electrodes.
- the conductive film may be coated on a glass substrate or a plastic substrate.
- the substrate may be rigid, flexible, or stretchable.
- the substrate may be optically transparent or opaque.
- the applying of the constant current through the conductive film may include: applying the constant current to a first section of the conductive film; advancing the conductive film; and applying the constant current to a second section of the conductive film.
- the applying of the constant current may be performed as part of a roll-to-roll process.
- the constant current may be applied continuously during the roll-to-roll process.
- a speed of advancement of the roll may be varied to control a treatment time of the film.
- a method for fusing metal nanowire junctions in a conductive film includes conducting an ultrasonic welding of the conductive film including a plurality of metal nanowires and a plurality of metal nanowire junctions.
- the ultrasonic welding may be conducted at a frequency of about 10 to 400 kHz, for example, 20 to 40 kHz.
- the conducting of the ultrasonic welding may be through an array of ultrasonic heads.
- the array of ultrasonic heads may be in contact with the conductive film during the conducting of the ultrasonic welding.
- the array of ultrasonic heads may be separated from the conductive film by an air gap during the conducting of the ultrasonic welding.
- the conductive film may be coated on a glass substrate or a plastic substrate.
- the substrate may be rigid, flexible, or stretchable.
- the substrate may be optically transparent or opaque.
- the conducting of the ultrasonic welding of the conductive film may include: conducting the ultrasonic welding on a first section of the conductive film; advancing the conductive film; and conducting the ultrasonic welding on a second section of the conductive film.
- the conducting of the ultrasonic welding may be performed as part of a roll-to-roll process.
- the ultrasonic welding may be applied continuously during the roll-to-roll process.
- a speed of advancement of the roll may be varied to control a treatment time of the film.
- a method of manufacturing part of a device includes applying at least one of a constant current or an ultrasonic welding through a conductive film including a plurality of metal nanowires and a plurality of metal nanowire junctions, wherein the device is a liquid crystal display, an organic light emitting device, a solar photovoltaic, a touch screen, or electrochromic oxide-based film.
- FIG. 1 is a scanning electron microscope image of a metal nanowire film
- FIG. 2 ( a ) is a schematic illustration of a constant current treatment on a metal nanowire film according to an embodiment of the present invention
- FIG. 2 ( b ) is a schematic illustration of the conductive path of the nanowire film of FIG. 2 ( a );
- FIGS. 3 ( a )- 3 ( b ) are schematic illustrations of a constant current treatment on a metal nanowire film, each according to an embodiment of the present invention
- FIG. 4 ( a ) is a side view of a constant current treatment applied on a roll-to-roll process according to an embodiment of the present invention
- FIGS. 4 ( b )- 4 ( e ) are schematic illustrations of a constant current treatment applied on a roll-to-roll process according to an embodiment of the present invention
- FIGS. 4 ( f )- 4 ( g ) are schematic illustrations of a constant current treatment applied on a roll-to-roll process, each according to an embodiment of the present invention
- FIG. 5 is a schematic cross-sectional view of a device according to an embodiment of the present invention.
- FIG. 6 is a flow-chart illustrating a method of fusing metal nanowire junctions in a conductive film according to an embodiment of the present invention.
- FIG. 1 is a scanning electron microscope image of a metal nanowire film, also referred to as a conductive film throughout this disclosure.
- the metal nanowire film includes a plurality of randomly oriented metal nanowires 101 .
- a metal nanowire junction 102 is formed when two or more metal nanowires cross each other.
- Each metal nanowire 101 has good electrical conductivity along the length of the metal nanowire.
- the metal nanowire junction 102 has high contact resistance, due to the loose contact between the nanowires at the contact point, residual non-conductive materials from the formation process of the metal nanowire film, or other factors. While increasing the nanowire concentration along with post-treatment of film may reduce the film resistance, which may also lead to reduced film transparency, increased haze, and exposure to elevated temperature and pressure.
- the conductive film may be formed on any suitable substrates.
- the conductive film may be coated on a glass substrate or a plastic substrate.
- the substrate may be optically transparent or opaque.
- the conductive film may be formed on a polymer substrate such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI), or polymethyl methacrylate (PMMA).
- PET polyethylene terephthalate
- PEN polyethylene naphthalate
- PI polyimide
- PMMA polymethyl methacrylate
- Other suitable polymeric substrates include those of polydimethylsiloxane (PDMS or silicone) in nature, where the substrates may be flexible and stretchable.
- more rigid substrates such as a glass substrate, a metal foil substrate, or any other suitable substrate of an optoelectronic device, known to those skilled in the art, may be utilized.
- Other elements for forming a device such as a liquid crystal display, an organic light emitting diode, a solar cell, or others, may be formed on top of this conductive layer.
- the metal nanowire conductive film could be formed on top of the mentioned elements.
- the conductive film including the metal nanowires may be formed utilizing any suitable methods.
- the conductive film may be formed utilizing a solution formulation process, such as a spin coating process, a Meyer rod process, a slot die coating process, a gravure coating process, an offset printing process, a spray coating process, or an inkjet process.
- a solution formulation process such as a spin coating process, a Meyer rod process, a slot die coating process, a gravure coating process, an offset printing process, a spray coating process, or an inkjet process.
- typical small organic or organometallic molecules are attached to the nanowires that are suspended in a solution to reduce or to prevent the metal nanowires from coagulation in the solution.
- the solvents and small organic or organometallic molecules are first removed through an evaporative process, which is often accelerated by a heating process. Heating of the metal nanowires also serve to anneal the conductive film. However, a subsequent sintering process that can significantly reduce the contact resistance between the metal nanowires often require a temperature that is over 150° C. and could be around 200° C.
- the substrate is a polymeric material, and/or includes other elements for forming a device (such as an optoelectronic device), the heating process may cause damage to the substrate and/or the other elements of the device.
- FIG. 2 ( a ) is a schematic illustration of a constant current treatment on a metal nanowire film according to an embodiment of the present invention.
- a pair of electrodes for example, a negative electrode 204 and a positive electrode 205 , is brought into contact with a surface of the nanowire film.
- the pair of electrodes may be brought into contact with the same surface but along the opposing edges of the nanowire film.
- a constant current is applied to the nanowire film through the pair of electrodes.
- This constant linear current density may be, for example, from 0.01 A/cm to 1 A/cm, and for a duration of time in the range of, for example, from 10 ms to 10 s.
- FIG. 2 ( b ) is a schematic illustration of the conductive path of the nanowire film of FIG. 2 ( a ).
- the electrical current passes from a first nanowire contacting the positive electrode 205 to a last nanowire contacting the electrode 204 through a number of nanowires and a number of junctions 202 (indicated by dotted lines) in between the two electrodes.
- the high contact resistance at the nanowire to nanowire junctions causes high local ohmic heating at the nanowire junctions.
- the nanowire junctions are heated up to a higher temperature than the rest of the metal nanowire film, and in one embodiment, the temperature of the nanowire junctions could be 2 or more times the temperature of the substrate.
- the local temperature across a metal nanowire junction may reach 200° C. or above where it is sufficient for the two nanowires crossing each other to sinter together, or at least partially fuse together, but the temperature in the rest of the film and particularly the substrate may stay below 100° C.
- the fusion of metal nanowires may therefore be achieved within temperature limits where the substrates or where the other elements of electrooptic device are not damaged.
- Equation 1 P is the power converted from electrical energy to thermal energy, I is the electrical current, and R is the electrical resistance.
- the contact resistance may be from about 2 times the resistance of the nanowire along the length of the nanowire, to about 10,000 or more times the resistance of the nanowire along the length of the nanowire. Therefore, when a constant current is passed through a nanowire film, the temperature of the nanowire junctions may be much higher than the temperature of the rest of the nanowire. That is, the junctions are heated up so that the nanowires soften and are fused at the junctions where they cross each other, and the rest of the nanowire film remains at a lower temperature.
- the metal nanowire film may be treated utilizing the constant current until a desired sheet resistance is achieved.
- the sheet resistance of the nanowire film may be monitored continuously while a constant current is applied to the nanowire film. Once the sheet resistance reaches the desired value, the current can be stopped and, the manufacturing of a transparent conductive thin film is completed.
- FIGS. 3 ( a ) to 3 ( b ) are schematic illustrations of a constant current treatment on a metal nanowire film.
- a pair of electrodes 307 is utilized to contact two opposing edges of a nanowire film 310 to conduct the constant current treatment.
- the electrodes span over the nanowire film 310 .
- two or more pairs of electrodes are utilized in treating a nanowire film.
- a plurality of pairs of electrodes may form in a row or two rows (e.g., 308 , 309 ) as illustrated in the FIG. 3 ( b ) over the top surface of the nanowire film 310 , and a constant current is applied between each pair of the electrodes.
- Nanowire junctions between a given pair of electrodes are fused accordingly.
- the pairs of electrodes may be arranged in a pattern to uniformly cover areas of the surface of the nanowire film and could be used to produce a uniform conductive film, e.g., a conductive film with more uniform resistance throughout the film.
- the electrodes are in physical contact with the conductive film and therefore electrically in contact but are not soldered to the film.
- FIG. 4 ( a ) is a side view of a constant current treatment applied on a roll-to-roll process according to an embodiment of the present invention
- FIGS. 4 ( b )- 4 ( e ) are schematic illustrations (top view) of a constant current treatment applied on a roll-to-roll process according to an embodiment of the present invention
- FIGS. 4 ( f )- 4 ( g ) are schematic illustrations (top view) of a constant current treatment applied on a roll-to-roll process, each according to an embodiment of the present invention.
- the nanowire thin film is manufactured in a roll-to-roll web process.
- the nanowire film 411 may be deposited on a web, for example, a flexible substrate such as those made of PET or PEN substrate, utilizing a suitable wet deposition process and subsequent solvent evaporation and curing process compatible with the substrate.
- the nanowire film 411 and its substrate in this roll-to-roll process generally moves at a constant speed that is controlled by the angular velocity of its primary roller and subsequent slave rollers, which also sets the proper surface tension of the film.
- a pair of electrodes 407 or a row of electrodes may be placed over a section of the surface of the nanowire film 411 along a cross-web direction, that is, along a direction that is perpendicular to the direction the web film moves.
- the arrows indicate the direction the web film moves and the direction the roller 412 rotates.
- a constant current may be applied to the section of the nanowire film to fuse the metal nanowire junctions sandwiched between the electrodes.
- the electrodes can slide on the surface of the film to be in contact with the surface of the nanowire film such that when the web advances (e.g., moves relative to the electrodes), a different area of the nanowire film maybe treated.
- the distance between the electrode, the web speed (from the two the duration of the treatment is defined), and the current applied determine the treatment condition.
- the constant current drive can be turned off when the web advances, and be turned on when the web stops moving to conduct treatment on a different area of the film, if the web assumes a discrete, batch like process condition.
- the current drive could be left in an ON state, and the electrodes can be physically separated from the surface when the web advances and moved to contact the surface when the web stops moving.
- the current drive could be turned off and the electrodes kept in electrical contact with the surface when the web advances.
- the current drive could be turned off and electrodes removed from the surface when the web advances.
- the advancement in web allows for the treatment of the nanowire film in a different area in the nanowire film and ultimately the entire film. For example, as shown in FIG. 4 ( c ), a pair of electrodes 407 comes in contact with a first section of the nanowire film 411 , and a constant current is applied through the pair of electrodes 407 .
- the current flow is stopped and the web is advanced so that the next section (e.g., a second section) of the conductive film comes in contact with the pair of electrodes, as shown in FIG. 4 ( d ).
- the constant current treatment is conducted on this section (e.g., the second section) of the conductive film, as shown in FIG. 4 ( e ).
- the current intensity between each pair of electrodes maybe adjusted to optimize the metal nanowire junction fusion process.
- additional rows of electrodes see FIGS. 4 ( f )- 4 ( g ) maybe added to reduce the time required to obtain desired sheet resistance of the metal nanowire films.
- the two electrodes forming a pair of electrodes through which the constant current is applied may be arranged symmetrically over the surface of the web (see FIG. 4 ( f ), the electrodes in row 408 or 409 ), or asymmetrically (see FIG. 4 ( g ), the electrodes in row 408 ′ or 409 ′).
- the constant current may be applied continuously between the electrodes as the web advances.
- the speed of the web may be adjusted such that the desired fusion of the metal nanowire junctions is achieved. For example, the speed of advancement of the roll may be adjusted to slower when longer treatment time is needed.
- ultrasonic welding may be utilized to fuse the nanowire junctions.
- a low amplitude acoustic vibration such as an ultrasonic vibration at about 10 to 400 kHz, or 20 to 40 kHz, may be applied to fuse the nanowire junctions.
- the ultrasonic vibrations cause the nanowires to rub against each other at the junctions. The friction generates heat at the nanowire junctions and the generated heat fuses the nanowire junctions.
- the frictional heat may heat the nanowires to a temperature high enough to remove those non-conductive additives and organometallic molecules from the surface of the nanowires and allow the metal atoms to move between the surfaces of the two crossing nanowires and form bonds to each other.
- the required temperature to fuse the metal nanowires together may be below the melting temperature of the nanowires, for example, the required temperature to fuse the metal nanowires together may be a fraction of the melting temperature of the metal nanowire.
- the ultrasonic generator may be directly in contact with the nanowire film during the ultrasonic welding process.
- the contact will allow for efficient transfer of acoustic energy to the film and may enhance the efficiency of nanowire fusion due to the ultrasonic welding process.
- the ultrasonic welding may move to a different area of the metal nanowire film when a desired sheet resistance in the area is achieved.
- the ultrasonic generator may not be in contact with the nanowire film, i.e., an air gap may exist between the ultrasonic generator and the nanowire film, and the acoustic vibrations or acoustic energy is transmitted to the film through the air gap.
- the desired feature of this embodiment is that this is a non-contact method, and there is reduced or minimized contamination and disturbance to the metal nanowire film.
- the air gap maybe as small as possible, for example, about 1 mm or less, to reduce the loss of the acoustic energy due to the air gap.
- an array of ultrasonic heads may be applied over the surface of the nanowire film to produce a nanowire film with more uniform conductivity.
- the nanowire film is manufactured in a roll-to-roll web process similar to the constant current treatment described above, and the ultrasonic welding is conducted continuously in the roll-to-roll process.
- the speed of advancement of the roll is varied to control the treatment time of the conductive film such that a desired sheet resistance can be achieved.
- the speed of advancement of the roll may be adjusted to slower when longer treatment time is needed.
- the web assumes a discrete, batch like process condition. After the nanowire film is formed on a section of the web, the formed nanowire film may be brought in contact with or under an ultrasonic head, or an array of ultrasonic heads. Ultrasonic vibration is then applied to the nanowire film and the treatment is completed once a set time or a desired sheet resistance is reached.
- the nanowire film is then advanced and the treated section of the nanowire film is transported to a next station for further processing, such as the addition of additional functional elements, or for rolling up.
- a new section of the nanowire film is brought in contact with or under the ultrasonic head, and the ultrasonic welding is conducted on this new section of the nanowire film.
- FIG. 5 is a schematic cross-sectional view of a device according to an embodiment of the present invention.
- the device may be a liquid crystal display, an organic light emitting device, a solar photovoltaic, a touch screen, or an energy efficient building material.
- the device includes a substrate 501 , a conductive film 502 , and a functional structure 503 .
- the substrate 501 may be any suitable material for the corresponding device, such as a glass, a polymer material, etc.
- the conductive film 502 may be a transparent nanowire conductive film according to one or more embodiments of the present invention and functions as a transparent electrode of the device.
- the conductive film 502 may be deposited on a second substrate.
- the conductive film 502 may be deposited on the functional structure 503 or vice versa.
- the functional structure 503 may be a structure that completes the construction of the device together with the substrate 501 and the conductive film 502 . Additional layers may be formed over the conductive film 502 or functional structure 503 , such as a protective layer, a sealing layer, etc.
- FIG. 6 is a flow-chart illustrating a method of fusing metal nanowire junctions in a conductive film according to an embodiment of the present invention.
- the nanowires are deposited on a substrate to fabricate a nanowire conductive film including a plurality of metal nanowires and metal nanowire junctions.
- the metal nanowire junctions are fused.
- the metal nanowire junctions may be fused utilizing the constant current method or the ultrasonic welding method.
- the sheet resistance of the nanowire conductive film is measured. If the measured resistance value is acceptable, the fusing of the metal nanowire junctions will be stopped and the conductive film is ready. If the measured resistance value is not acceptable, the metal nanowire junctions will be fused further through the constant current method or the ultrasonic welding method.
Abstract
Description
- This application claims priority to and the benefit of U.S. Provisional Application No. 61/920,402, filed on Dec. 23, 2013, the entire content of which is incorporated herein by reference.
- 1. Field
- The following description relates generally to transparent and conductive films.
- 2. Description of the Related Art
- Transparent conductive thin films have been widely used for devices such as Liquid Crystal Displays (LCDs), Organic Light Emitting Device (OLED) Displays, solar photovoltaics, touch screens, or electrochromic oxide-based films such as smart windows. Among these applications, indium tin oxide (ITO) has been used broadly to form the transparent conductive thin film due to its high electrical conductivity and high optical transparency. However, ITO requires high temperature for processing, and the ITO thin film is brittle and prone to cracking on flexible substrates. In addition, in order to lower the sheet resistance, the thickness of the ITO film has to be increased, which in turn leads to reduced light transmission and increased cost.
- Transparent and conductive thin films formed from metal nanowires are among the most promising candidates as alternatives to ITO thin films. However, metal nanowires have good conductivity along the length of the nanowires, but have high contact resistance at the junctions where two or more nanowires cross one another.
- An aspect according to one or more embodiments of the present invention is directed toward a method for fusing metal nanowire junctions in a conductive film, where such a film may be coated on a substrate. The metal nanowires have reduced contact resistance, and the conductive film has good electrical conductivity as a result of the fusion of the metal nanowire junctions.
- Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments.
- According to an embodiment of the present invention, a method for fusing metal nanowire junctions in a conductive film includes applying a constant current through the conductive film including a plurality of metal nanowires and a plurality of metal nanowire junctions.
- The applying of the constant current may be through a pair of electrodes facing each other.
- The applying of the constant current may be through an array of electrodes.
- The conductive film may be coated on a glass substrate or a plastic substrate. The substrate may be rigid, flexible, or stretchable. The substrate may be optically transparent or opaque.
- The applying of the constant current through the conductive film may include: applying the constant current to a first section of the conductive film; advancing the conductive film; and applying the constant current to a second section of the conductive film.
- The applying of the constant current may be performed as part of a roll-to-roll process. The constant current may be applied continuously during the roll-to-roll process. A speed of advancement of the roll may be varied to control a treatment time of the film.
- According to an embodiment of the present invention, a method for fusing metal nanowire junctions in a conductive film includes conducting an ultrasonic welding of the conductive film including a plurality of metal nanowires and a plurality of metal nanowire junctions.
- The ultrasonic welding may be conducted at a frequency of about 10 to 400 kHz, for example, 20 to 40 kHz.
- The conducting of the ultrasonic welding may be through an array of ultrasonic heads.
- The array of ultrasonic heads may be in contact with the conductive film during the conducting of the ultrasonic welding.
- The array of ultrasonic heads may be separated from the conductive film by an air gap during the conducting of the ultrasonic welding.
- The conductive film may be coated on a glass substrate or a plastic substrate. The substrate may be rigid, flexible, or stretchable. The substrate may be optically transparent or opaque.
- The conducting of the ultrasonic welding of the conductive film may include: conducting the ultrasonic welding on a first section of the conductive film; advancing the conductive film; and conducting the ultrasonic welding on a second section of the conductive film.
- The conducting of the ultrasonic welding may be performed as part of a roll-to-roll process. The ultrasonic welding may be applied continuously during the roll-to-roll process. A speed of advancement of the roll may be varied to control a treatment time of the film.
- According to an embodiment of the present invention, a method of manufacturing part of a device includes applying at least one of a constant current or an ultrasonic welding through a conductive film including a plurality of metal nanowires and a plurality of metal nanowire junctions, wherein the device is a liquid crystal display, an organic light emitting device, a solar photovoltaic, a touch screen, or electrochromic oxide-based film.
- These and/or other aspects will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings in which:
-
FIG. 1 is a scanning electron microscope image of a metal nanowire film; -
FIG. 2 (a) is a schematic illustration of a constant current treatment on a metal nanowire film according to an embodiment of the present invention; -
FIG. 2 (b) is a schematic illustration of the conductive path of the nanowire film ofFIG. 2 (a); -
FIGS. 3 (a)-3(b) are schematic illustrations of a constant current treatment on a metal nanowire film, each according to an embodiment of the present invention; -
FIG. 4 (a) is a side view of a constant current treatment applied on a roll-to-roll process according to an embodiment of the present invention; -
FIGS. 4 (b)-4 (e) are schematic illustrations of a constant current treatment applied on a roll-to-roll process according to an embodiment of the present invention; -
FIGS. 4 (f)-4 (g) are schematic illustrations of a constant current treatment applied on a roll-to-roll process, each according to an embodiment of the present invention; -
FIG. 5 is a schematic cross-sectional view of a device according to an embodiment of the present invention; and -
FIG. 6 is a flow-chart illustrating a method of fusing metal nanowire junctions in a conductive film according to an embodiment of the present invention. - Reference will now be made in more detail to embodiments, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout. In this regard, the present embodiments may have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the embodiments are merely described below, by referring to the drawings, to explain aspects of the present invention. The use of “may” when describing embodiments of the present invention refers to “one or more embodiments of the present invention.” Expressions such as “at least one of,” when preceding a list of elements, modify the entire list of elements and do not modify the individual elements of the list.
- As the invention allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in more detail in the written description. The attached drawings for illustrating example embodiments of the present invention are referred to in order to gain a sufficient understanding of the present invention, the merits thereof, and the objectives accomplished by the implementation of the present invention.
- It will be further understood that the terms “comprises” and/or “comprising” used herein specify the presence of the stated features or components, but do not preclude the presence or addition of one or more other features or components. Further, it will be understood that when a first element is referred to as being “coupled” or “connected” to a second element, it can be directly coupled or connected to the second element or intervening elements may be present.
- Hereinafter, the present invention will be described in more detail by explaining example embodiments of the invention with reference to the attached drawings. Like reference numerals in the drawings denote like elements. Sizes of components in the drawings may be exaggerated for convenience of explanation. In other words, since sizes and thicknesses of components in the drawings are arbitrarily illustrated for convenience of explanation, the following embodiments are not limited thereto.
-
FIG. 1 is a scanning electron microscope image of a metal nanowire film, also referred to as a conductive film throughout this disclosure. The metal nanowire film includes a plurality of randomly orientedmetal nanowires 101. Ametal nanowire junction 102 is formed when two or more metal nanowires cross each other. Eachmetal nanowire 101 has good electrical conductivity along the length of the metal nanowire. However, themetal nanowire junction 102 has high contact resistance, due to the loose contact between the nanowires at the contact point, residual non-conductive materials from the formation process of the metal nanowire film, or other factors. While increasing the nanowire concentration along with post-treatment of film may reduce the film resistance, which may also lead to reduced film transparency, increased haze, and exposure to elevated temperature and pressure. - Silver nanowires, and other suitable metal nanowires (such as copper nanowires) may be utilized to form the nanowire conductive film. The conductive film may be formed on any suitable substrates. For example, the conductive film may be coated on a glass substrate or a plastic substrate. The substrate may be optically transparent or opaque. For example, the conductive film may be formed on a polymer substrate such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI), or polymethyl methacrylate (PMMA). Other suitable polymeric substrates include those of polydimethylsiloxane (PDMS or silicone) in nature, where the substrates may be flexible and stretchable. Further, more rigid substrates, such as a glass substrate, a metal foil substrate, or any other suitable substrate of an optoelectronic device, known to those skilled in the art, may be utilized. Other elements for forming a device such as a liquid crystal display, an organic light emitting diode, a solar cell, or others, may be formed on top of this conductive layer. Alternatively, if the underlying layers are not affected by the wet process or method for forming and fusing nanowire junctions, the metal nanowire conductive film could be formed on top of the mentioned elements.
- The conductive film including the metal nanowires may be formed utilizing any suitable methods. For example, the conductive film may be formed utilizing a solution formulation process, such as a spin coating process, a Meyer rod process, a slot die coating process, a gravure coating process, an offset printing process, a spray coating process, or an inkjet process. In a comparable process utilizing solution formulation process, typical small organic or organometallic molecules are attached to the nanowires that are suspended in a solution to reduce or to prevent the metal nanowires from coagulation in the solution. When the solution containing metal nanowires are deposited as a thin film on a substrate utilizing, for example, a spin coating process, the solvents and small organic or organometallic molecules are first removed through an evaporative process, which is often accelerated by a heating process. Heating of the metal nanowires also serve to anneal the conductive film. However, a subsequent sintering process that can significantly reduce the contact resistance between the metal nanowires often require a temperature that is over 150° C. and could be around 200° C. When the substrate is a polymeric material, and/or includes other elements for forming a device (such as an optoelectronic device), the heating process may cause damage to the substrate and/or the other elements of the device. Other alternative approaches require embedding of the metal nanowires in a conductive polymer film and the usage of pressure to force the nanowires to be in close contact with one another, which may distort the shape of the nanowires and may damage the other elements formed on the substrate. The method according to one or more embodiments of the present invention does not have these drawbacks.
-
FIG. 2 (a) is a schematic illustration of a constant current treatment on a metal nanowire film according to an embodiment of the present invention. Referring toFIG. 2 (a), a pair of electrodes, for example, anegative electrode 204 and apositive electrode 205, is brought into contact with a surface of the nanowire film. For example, the pair of electrodes may be brought into contact with the same surface but along the opposing edges of the nanowire film. A constant current is applied to the nanowire film through the pair of electrodes. This constant linear current density may be, for example, from 0.01 A/cm to 1 A/cm, and for a duration of time in the range of, for example, from 10 ms to 10 s. -
FIG. 2 (b) is a schematic illustration of the conductive path of the nanowire film ofFIG. 2 (a). Referring toFIG. 2 (b), the electrical current passes from a first nanowire contacting thepositive electrode 205 to a last nanowire contacting theelectrode 204 through a number of nanowires and a number of junctions 202 (indicated by dotted lines) in between the two electrodes. According to example embodiments, the high contact resistance at the nanowire to nanowire junctions causes high local ohmic heating at the nanowire junctions. As such, the nanowire junctions are heated up to a higher temperature than the rest of the metal nanowire film, and in one embodiment, the temperature of the nanowire junctions could be 2 or more times the temperature of the substrate. For example, the local temperature across a metal nanowire junction may reach 200° C. or above where it is sufficient for the two nanowires crossing each other to sinter together, or at least partially fuse together, but the temperature in the rest of the film and particularly the substrate may stay below 100° C. The fusion of metal nanowires may therefore be achieved within temperature limits where the substrates or where the other elements of electrooptic device are not damaged. - In ohmic heating, the power is calculated according to equation 1.
-
P=I2R equation 1 - In equation 1, P is the power converted from electrical energy to thermal energy, I is the electrical current, and R is the electrical resistance.
- In a nanowire film, the contact resistance may be from about 2 times the resistance of the nanowire along the length of the nanowire, to about 10,000 or more times the resistance of the nanowire along the length of the nanowire. Therefore, when a constant current is passed through a nanowire film, the temperature of the nanowire junctions may be much higher than the temperature of the rest of the nanowire. That is, the junctions are heated up so that the nanowires soften and are fused at the junctions where they cross each other, and the rest of the nanowire film remains at a lower temperature.
- The metal nanowire film may be treated utilizing the constant current until a desired sheet resistance is achieved. For example, the sheet resistance of the nanowire film may be monitored continuously while a constant current is applied to the nanowire film. Once the sheet resistance reaches the desired value, the current can be stopped and, the manufacturing of a transparent conductive thin film is completed.
-
FIGS. 3 (a) to 3 (b) are schematic illustrations of a constant current treatment on a metal nanowire film. Referring toFIG. 3 (a), in one embodiment, a pair ofelectrodes 307 is utilized to contact two opposing edges of ananowire film 310 to conduct the constant current treatment. The electrodes span over thenanowire film 310. - Referring to
FIG. 3 (b), in another embodiment, two or more pairs of electrodes are utilized in treating a nanowire film. For example, a plurality of pairs of electrodes may form in a row or two rows (e.g., 308, 309) as illustrated in theFIG. 3 (b) over the top surface of thenanowire film 310, and a constant current is applied between each pair of the electrodes. Nanowire junctions between a given pair of electrodes are fused accordingly. The pairs of electrodes may be arranged in a pattern to uniformly cover areas of the surface of the nanowire film and could be used to produce a uniform conductive film, e.g., a conductive film with more uniform resistance throughout the film. The electrodes are in physical contact with the conductive film and therefore electrically in contact but are not soldered to the film. By moving the metal nanowire film in a direction perpendicular to the electrode row direction while maintaining physical and electrical contact between the electrode and the film surface, the fusion of metal nanowire junctions can be obtained throughout the entire film. -
FIG. 4 (a) is a side view of a constant current treatment applied on a roll-to-roll process according to an embodiment of the present invention;FIGS. 4 (b)-4 (e) are schematic illustrations (top view) of a constant current treatment applied on a roll-to-roll process according to an embodiment of the present invention; andFIGS. 4 (f)-4 (g) are schematic illustrations (top view) of a constant current treatment applied on a roll-to-roll process, each according to an embodiment of the present invention. - Referring to
FIGS. 4 (a) to 4 (g), in one or more embodiments, the nanowire thin film is manufactured in a roll-to-roll web process. Thenanowire film 411 may be deposited on a web, for example, a flexible substrate such as those made of PET or PEN substrate, utilizing a suitable wet deposition process and subsequent solvent evaporation and curing process compatible with the substrate. Thenanowire film 411 and its substrate in this roll-to-roll process generally moves at a constant speed that is controlled by the angular velocity of its primary roller and subsequent slave rollers, which also sets the proper surface tension of the film. Here, a pair ofelectrodes 407 or a row of electrodes (e.g., 408, 409, 408′ or 409′,) may be placed over a section of the surface of thenanowire film 411 along a cross-web direction, that is, along a direction that is perpendicular to the direction the web film moves. InFIGS. 4 (a)-4 (g), the arrows indicate the direction the web film moves and the direction theroller 412 rotates. A constant current may be applied to the section of the nanowire film to fuse the metal nanowire junctions sandwiched between the electrodes. The electrodes can slide on the surface of the film to be in contact with the surface of the nanowire film such that when the web advances (e.g., moves relative to the electrodes), a different area of the nanowire film maybe treated. In this embodiment, the distance between the electrode, the web speed (from the two the duration of the treatment is defined), and the current applied determine the treatment condition. In another embodiment, the constant current drive can be turned off when the web advances, and be turned on when the web stops moving to conduct treatment on a different area of the film, if the web assumes a discrete, batch like process condition. The current drive could be left in an ON state, and the electrodes can be physically separated from the surface when the web advances and moved to contact the surface when the web stops moving. The current drive could be turned off and the electrodes kept in electrical contact with the surface when the web advances. In addition, the current drive could be turned off and electrodes removed from the surface when the web advances. The advancement in web allows for the treatment of the nanowire film in a different area in the nanowire film and ultimately the entire film. For example, as shown inFIG. 4 (c), a pair ofelectrodes 407 comes in contact with a first section of thenanowire film 411, and a constant current is applied through the pair ofelectrodes 407. After the surface resistance reaches a set value, or after a set amount of time, the current flow is stopped and the web is advanced so that the next section (e.g., a second section) of the conductive film comes in contact with the pair of electrodes, as shown inFIG. 4 (d). Then the constant current treatment is conducted on this section (e.g., the second section) of the conductive film, as shown inFIG. 4 (e). In this process, the current intensity between each pair of electrodes maybe adjusted to optimize the metal nanowire junction fusion process. Furthermore, additional rows of electrodes (seeFIGS. 4 (f)-4 (g)) maybe added to reduce the time required to obtain desired sheet resistance of the metal nanowire films. The two electrodes forming a pair of electrodes through which the constant current is applied may be arranged symmetrically over the surface of the web (seeFIG. 4 (f), the electrodes inrow 408 or 409), or asymmetrically (seeFIG. 4 (g), the electrodes inrow 408′ or 409′). In another embodiment, the constant current may be applied continuously between the electrodes as the web advances. Additionally, the speed of the web may be adjusted such that the desired fusion of the metal nanowire junctions is achieved. For example, the speed of advancement of the roll may be adjusted to slower when longer treatment time is needed. - According to another embodiment of the present invention, ultrasonic welding may be utilized to fuse the nanowire junctions. For example, a low amplitude acoustic vibration, such as an ultrasonic vibration at about 10 to 400 kHz, or 20 to 40 kHz, may be applied to fuse the nanowire junctions. In a simplified picture, the ultrasonic vibrations cause the nanowires to rub against each other at the junctions. The friction generates heat at the nanowire junctions and the generated heat fuses the nanowire junctions. According to example embodiments, for example, the frictional heat may heat the nanowires to a temperature high enough to remove those non-conductive additives and organometallic molecules from the surface of the nanowires and allow the metal atoms to move between the surfaces of the two crossing nanowires and form bonds to each other. The required temperature to fuse the metal nanowires together may be below the melting temperature of the nanowires, for example, the required temperature to fuse the metal nanowires together may be a fraction of the melting temperature of the metal nanowire.
- In one embodiment, the ultrasonic generator may be directly in contact with the nanowire film during the ultrasonic welding process. The contact will allow for efficient transfer of acoustic energy to the film and may enhance the efficiency of nanowire fusion due to the ultrasonic welding process. The ultrasonic welding may move to a different area of the metal nanowire film when a desired sheet resistance in the area is achieved. In an alternative embodiment, the ultrasonic generator may not be in contact with the nanowire film, i.e., an air gap may exist between the ultrasonic generator and the nanowire film, and the acoustic vibrations or acoustic energy is transmitted to the film through the air gap. The desired feature of this embodiment is that this is a non-contact method, and there is reduced or minimized contamination and disturbance to the metal nanowire film. The air gap maybe as small as possible, for example, about 1 mm or less, to reduce the loss of the acoustic energy due to the air gap.
- In one embodiment, an array of ultrasonic heads may be applied over the surface of the nanowire film to produce a nanowire film with more uniform conductivity.
- In another embodiment, the nanowire film is manufactured in a roll-to-roll web process similar to the constant current treatment described above, and the ultrasonic welding is conducted continuously in the roll-to-roll process. The speed of advancement of the roll is varied to control the treatment time of the conductive film such that a desired sheet resistance can be achieved. For example, the speed of advancement of the roll may be adjusted to slower when longer treatment time is needed. In another embodiment, the web assumes a discrete, batch like process condition. After the nanowire film is formed on a section of the web, the formed nanowire film may be brought in contact with or under an ultrasonic head, or an array of ultrasonic heads. Ultrasonic vibration is then applied to the nanowire film and the treatment is completed once a set time or a desired sheet resistance is reached. The nanowire film is then advanced and the treated section of the nanowire film is transported to a next station for further processing, such as the addition of additional functional elements, or for rolling up. As a result of the advancement of the web, a new section of the nanowire film is brought in contact with or under the ultrasonic head, and the ultrasonic welding is conducted on this new section of the nanowire film.
-
FIG. 5 is a schematic cross-sectional view of a device according to an embodiment of the present invention. The device may be a liquid crystal display, an organic light emitting device, a solar photovoltaic, a touch screen, or an energy efficient building material. The device includes asubstrate 501, aconductive film 502, and afunctional structure 503. Thesubstrate 501 may be any suitable material for the corresponding device, such as a glass, a polymer material, etc. Theconductive film 502 may be a transparent nanowire conductive film according to one or more embodiments of the present invention and functions as a transparent electrode of the device. Theconductive film 502 may be deposited on a second substrate. In addition, theconductive film 502 may be deposited on thefunctional structure 503 or vice versa. Thefunctional structure 503 may be a structure that completes the construction of the device together with thesubstrate 501 and theconductive film 502. Additional layers may be formed over theconductive film 502 orfunctional structure 503, such as a protective layer, a sealing layer, etc. -
FIG. 6 is a flow-chart illustrating a method of fusing metal nanowire junctions in a conductive film according to an embodiment of the present invention. The nanowires are deposited on a substrate to fabricate a nanowire conductive film including a plurality of metal nanowires and metal nanowire junctions. The metal nanowire junctions are fused. Here, the metal nanowire junctions may be fused utilizing the constant current method or the ultrasonic welding method. The sheet resistance of the nanowire conductive film is measured. If the measured resistance value is acceptable, the fusing of the metal nanowire junctions will be stopped and the conductive film is ready. If the measured resistance value is not acceptable, the metal nanowire junctions will be fused further through the constant current method or the ultrasonic welding method. - It should be understood that the example embodiments described therein should be considered in a descriptive sense only and not for purposes of limitation. Descriptions of features or aspects within each embodiment should typically be considered as available for other similar features or aspects in other embodiments.
- While one or more embodiments of the present invention have been described with reference to the figures, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims, and equivalents thereof.
Claims (19)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/567,983 US9925616B2 (en) | 2013-12-23 | 2014-12-11 | Method for fusing nanowire junctions in conductive films |
EP14199796.5A EP2889265A3 (en) | 2013-12-23 | 2014-12-22 | Method for fusing nanowire junctions in conductive films |
CN201410815923.2A CN104733974A (en) | 2013-12-23 | 2014-12-23 | Method for fusing nanowire junctions in conductive films |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361920402P | 2013-12-23 | 2013-12-23 | |
US14/567,983 US9925616B2 (en) | 2013-12-23 | 2014-12-11 | Method for fusing nanowire junctions in conductive films |
Publications (2)
Publication Number | Publication Date |
---|---|
US20150174687A1 true US20150174687A1 (en) | 2015-06-25 |
US9925616B2 US9925616B2 (en) | 2018-03-27 |
Family
ID=52282500
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/567,983 Expired - Fee Related US9925616B2 (en) | 2013-12-23 | 2014-12-11 | Method for fusing nanowire junctions in conductive films |
Country Status (3)
Country | Link |
---|---|
US (1) | US9925616B2 (en) |
EP (1) | EP2889265A3 (en) |
CN (1) | CN104733974A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160126486A1 (en) * | 2013-05-24 | 2016-05-05 | Osram Oled Gmbh | Process for producing an optoelectronic component and optoelectronic component |
US10357992B2 (en) * | 2016-02-01 | 2019-07-23 | John Stephen Van Dewerker | Method and system for creating virtual light sculpture art images |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108539058A (en) * | 2018-05-28 | 2018-09-14 | 吉林建筑大学 | A kind of preparation method of nano silver wire grid electrode |
CN111462941A (en) * | 2020-04-13 | 2020-07-28 | 安徽宇航派蒙健康科技股份有限公司 | Carbon nano tube composite flexible conductive film and preparation method thereof |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080119034A1 (en) * | 2003-10-10 | 2008-05-22 | Wostec, Inc. | Method of formation of coherent wavy nanostructures (variants) |
US20090038735A1 (en) * | 2007-08-06 | 2009-02-12 | Kouroche Kian | Method of making rfid devices |
US20100243295A1 (en) * | 2006-10-12 | 2010-09-30 | Cambrios Technologies Corporation | Nanowire-based transparent conductors and applications thereof |
US20110089160A1 (en) * | 2008-05-19 | 2011-04-21 | Fujifilm Corporation | Conductive film and transparent heating element |
US20110143161A1 (en) * | 2009-12-14 | 2011-06-16 | Gm Global Technology Operations, Inc. | Coulomb damping features using ultrasonic welding |
US20110204330A1 (en) * | 2010-01-25 | 2011-08-25 | Lemieux Melburne C | Joined nanostructures and methods therefor |
US20120018200A1 (en) * | 2010-07-26 | 2012-01-26 | Samsung Electro-Mechanics Co., Ltd. | Transparent conductive film for touch panel and method for manufacturing the same |
US20120132644A1 (en) * | 2009-03-16 | 2012-05-31 | Zhiyong Gu | Methods for the fabrication of nanostructures heating elements |
US20120138913A1 (en) * | 2010-12-07 | 2012-06-07 | Rhodia Operations | Electrically conductive nanostructures, method for making such nanostructures, electrically conductive polumer films containing such nanostructures, and electronic devices containing such films |
DE102011111786A1 (en) * | 2011-09-01 | 2013-03-07 | Ovd Kinegram Ag | Method and apparatus for joining transfer or laminating film webs |
US20130273315A1 (en) * | 2012-03-29 | 2013-10-17 | Cambrios Technologies Corporation | Electrical contacts in layered structures |
US20150053459A1 (en) * | 2013-08-20 | 2015-02-26 | Carestream Health, Inc. | Patterning of electrically conductive films |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2251389B8 (en) | 2005-08-12 | 2012-09-19 | Cambrios Technologies Corporation | Nanowire ink |
US8758717B2 (en) | 2006-10-19 | 2014-06-24 | Rensselaer Polytechnic Institute | Electrical current-induced structural changes and chemical functionalization of carbon nanotubes |
JP5124770B2 (en) | 2007-03-29 | 2013-01-23 | 国立大学法人東北大学 | Nanomaterial bonding method and nanomaterial bonding apparatus |
US8323744B2 (en) | 2009-01-09 | 2012-12-04 | The Board Of Trustees Of The Leland Stanford Junior University | Systems, methods, devices and arrangements for nanowire meshes |
EP2598942A4 (en) | 2010-07-30 | 2014-07-23 | Univ Leland Stanford Junior | Conductive films |
KR101327069B1 (en) | 2011-07-28 | 2013-11-07 | 엘지이노텍 주식회사 | Electrode structure and method for producing electrode |
-
2014
- 2014-12-11 US US14/567,983 patent/US9925616B2/en not_active Expired - Fee Related
- 2014-12-22 EP EP14199796.5A patent/EP2889265A3/en not_active Withdrawn
- 2014-12-23 CN CN201410815923.2A patent/CN104733974A/en active Pending
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080119034A1 (en) * | 2003-10-10 | 2008-05-22 | Wostec, Inc. | Method of formation of coherent wavy nanostructures (variants) |
US20100243295A1 (en) * | 2006-10-12 | 2010-09-30 | Cambrios Technologies Corporation | Nanowire-based transparent conductors and applications thereof |
US20090038735A1 (en) * | 2007-08-06 | 2009-02-12 | Kouroche Kian | Method of making rfid devices |
US20110089160A1 (en) * | 2008-05-19 | 2011-04-21 | Fujifilm Corporation | Conductive film and transparent heating element |
US20120132644A1 (en) * | 2009-03-16 | 2012-05-31 | Zhiyong Gu | Methods for the fabrication of nanostructures heating elements |
US20110143161A1 (en) * | 2009-12-14 | 2011-06-16 | Gm Global Technology Operations, Inc. | Coulomb damping features using ultrasonic welding |
US20110204330A1 (en) * | 2010-01-25 | 2011-08-25 | Lemieux Melburne C | Joined nanostructures and methods therefor |
US20120018200A1 (en) * | 2010-07-26 | 2012-01-26 | Samsung Electro-Mechanics Co., Ltd. | Transparent conductive film for touch panel and method for manufacturing the same |
US20120138913A1 (en) * | 2010-12-07 | 2012-06-07 | Rhodia Operations | Electrically conductive nanostructures, method for making such nanostructures, electrically conductive polumer films containing such nanostructures, and electronic devices containing such films |
DE102011111786A1 (en) * | 2011-09-01 | 2013-03-07 | Ovd Kinegram Ag | Method and apparatus for joining transfer or laminating film webs |
US20140311654A1 (en) * | 2011-09-01 | 2014-10-23 | Ovd Kinegram Ag | Method and Device for Joining Transfer or Laminating Film Webs |
US20130273315A1 (en) * | 2012-03-29 | 2013-10-17 | Cambrios Technologies Corporation | Electrical contacts in layered structures |
US20150053459A1 (en) * | 2013-08-20 | 2015-02-26 | Carestream Health, Inc. | Patterning of electrically conductive films |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160126486A1 (en) * | 2013-05-24 | 2016-05-05 | Osram Oled Gmbh | Process for producing an optoelectronic component and optoelectronic component |
US9825246B2 (en) * | 2013-05-24 | 2017-11-21 | Osram Oled Gmbh | Process for producing an optoelectronic component and optoelectronic component |
US10357992B2 (en) * | 2016-02-01 | 2019-07-23 | John Stephen Van Dewerker | Method and system for creating virtual light sculpture art images |
Also Published As
Publication number | Publication date |
---|---|
EP2889265A3 (en) | 2015-07-15 |
EP2889265A2 (en) | 2015-07-01 |
US9925616B2 (en) | 2018-03-27 |
CN104733974A (en) | 2015-06-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9925616B2 (en) | Method for fusing nanowire junctions in conductive films | |
US9253890B2 (en) | Patterned conductive film, method of fabricating the same, and application thereof | |
JP5341966B2 (en) | Pattern transfer method and pattern transfer apparatus, flexible display panel using the same, flexible solar cell, electronic book, thin film transistor, electromagnetic wave shielding sheet, flexible printed circuit board | |
JP6897734B2 (en) | Transfer substrate | |
JP2011090879A (en) | Method of manufacturing transparent conductor | |
WO2016041259A1 (en) | Touch screen and manufacturing method therefor and display device | |
JP2010066768A (en) | Double-layer liquid crystal lens and method for manufacturing same | |
KR101226086B1 (en) | Pattern fabricating method and pattern transferring apparatus | |
US20190384087A1 (en) | Manufacturing method of graphene electrode and liquid crystal display panel | |
US20180213650A1 (en) | Manufacturing methods of flexible substrates and flexible panels by screen printing machines | |
US20230395327A1 (en) | Method of manufacturing thin film devices | |
KR101164061B1 (en) | Pattern fabricating method and pattern transferring apparatus, flexible display panel, flexible solar cell, electronic book, thin film transistor, electromagnetic-shielding sheet, flexible printed circuit board applying thereof | |
JP2015072362A (en) | Display device and manufacturing method of the same | |
KR102178118B1 (en) | Manufacturing method of film for liquid crystal alignment | |
CN113555161A (en) | Patterning method of nanowire electrode | |
US20210402432A1 (en) | Method and apparatus to create transparent conductive films with controlled anisotropic electrical conductivity | |
KR101383488B1 (en) | High Quality Flexible Transparent Electrodes and Fabricating Method Thereof | |
CN108351548B (en) | Method for producing liquid crystal alignment film, method for producing three-dimensional liquid crystal cell, and three-dimensional liquid crystal cell | |
JP7116962B2 (en) | Electrode-forming method and electrode-forming apparatus for organic thin-film transistor, and method for manufacturing organic thin-film transistor | |
US10782578B2 (en) | Method for forming wire portion of liquid crystal chromic device and liquid crystal chromic device | |
JP2016068481A (en) | Laminated film manufacturing method, circuit board manufacturing method, roll body, and release film | |
KR102295547B1 (en) | Method of fabricating conductive film | |
CN109922962B (en) | Method for forming pattern of large-area liquid crystal device | |
CN204229372U (en) | Touch control display apparatus | |
US10025178B2 (en) | Patterning device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: SAMSUNG DISPLAY CO., LTD., KOREA, REPUBLIC OF Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GALELA, JENNIFER J.;XUE, JIUZHI;REEL/FRAME:034836/0485 Effective date: 20141210 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
FEPP | Fee payment procedure |
Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
LAPS | Lapse for failure to pay maintenance fees |
Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20220327 |