US20140264989A1

US20140264989A1 - Methods for reducing charge effects and separation forces in nanoimprint

Info

Publication number: US20140264989A1
Application number: US14/216,858
Authority: US
Inventors: Stephen Y. Chou; Yixing Liang
Original assignee: Princeton University
Current assignee: Princeton University
Priority date: 2013-03-15
Filing date: 2014-03-17
Publication date: 2014-09-18
Also published as: WO2014197097A3; US20140265013A1; CN105358979A; WO2014145798A2; CN105229467A; US20160025634A1; CN105209884A; EP2969542A2; US20220205920A1; WO2014144133A1; CN105246682A; EP2972239A4; WO2014197096A2; WO2014146115A3; EP2969542A4; US20190079013A1; WO2014145036A1; CN105247349A; WO2014197097A2; US20190049385A1

Abstract

The present invention relates to methods to reduce release force caused by tribo-charge. The invented mold is termed as MicroE mold and substrate is termed as MicroE substrate. The addition of conductive thin coatings (less than 10 nm and approaching monolayer coating) onto surface of insulating mold or substrate provides a reduction of the separation force caused by tribo-electric charge. The MicroE mold and MicroE substrate are specifically good for a lithographic method that involves contact between mold and substrate, or between mold and thin film carried on substrate, and used for creation and replication of ultra-fine structures (sub-25 nm) as well as millimeter scale. The present invention is particularly but not exclusively applied to any contact lithographic method.

Description

CROSS-REFERENCING

This application is also claims the benefit of: provisional application Ser. No. 61/801,424, filed Mar. 15, 2013 (NSNR-004PRV), provisional application Ser. No. 61/801,096, filed Mar. 15, 2013 (NSNR-005PRV), provisional application Ser. No. 61/800,915, filed Mar. 15, 2013 (NSNR-006PRV), provisional application Ser. No. 61/793,092, filed Mar. 15, 2013 (NSNR-008PRV), provisional Application Ser. No. 61/801,933, filed Mar. 15, 2013 (NSNR-009PRV), provisional Application Ser. No.61/794,317, filed Mar. 15, 2013 (NSNR-010PRV), provisional application Ser. No. 61/802,020, filed Mar. 15, 2013 (NSNR-011PRV) and provisional application Ser. No. 61/802,223, filed Mar. 15, 2013 (NSNR-012PRV), all of which applications are incorporated by reference herein for all purposes.

BACKGROUND

Nanoimprint needs reduction charge effects and separation forces.

SUMMARY

The following brief summary is not intended to include all features and aspects of the present invention, nor does it imply that the invention must include all features and aspects discussed in this summary.
The invention is related to the methods and apparatus to reduce charge effects and separation forces in nanoimprint, hence improve nanoimprint quality.

BRIEF DESCRIPTION OF THE DRAWINGS

The skilled artisan will understand that the drawings, described below, are for illustration purposes only. The drawings are not intended to limit the scope of the present teachings in any way. Some of the drawings are not in scale.

FIG. 1 Schematics of a nanoimprint mold and a substrate, each has three layers. The table shows which layer should be grounded. The best approach is the ground layer as close to the contact surface as possible.

FIG. 2 Schematics of the possibility of grounding.

FIG. 3 (A) the cross section view of one type of MicroE mold that has an insulating body. (B) the cross section view of one type of MicroE mold that has a conductive body. And (C) the cross section view of MicroE substrate that carries a thin film as resist.

FIG. 4 is the experimental results comparing the effect in reducing the separation force between planar MicroE mold and conventional mold.

FIG. 5 The experimental results comparing the effect in reducing the separation force between the nanostructured MicroE mold and conventional mold, showing the advantage of the MicroE mold.

Corresponding reference numerals indicate corresponding parts throughout the several figures of the drawings. It is to be understood that the drawings are for illustrating the concepts set forth in the present disclosure and are not to scale.
Before any embodiments of the invention are explained in detail, it is to be understood that the invention is not limited in its application to the details of construction and the arrangement of components set forth in the following description or illustrated in the drawings.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

The following detailed description illustrates some embodiments of the invention by way of example and not by way of limitation.
This disclosure incorporates by reference the following disclosures: U.S. application Ser. No.13/838,600, filed Mar. 15, 2013 (NSNR-003), and U.S. application Ser. No. 13/699,270, filed Jun. 13, 2013 (NSNR-001).
The invention is related to nanoparticle structures,
The methods invented, that can reduce the charge effects in nanoimprint, comprising

- 1. Having a substrate with a thin conducting layer up close to the surface;
- 2. Having a mold with conducting layer close to surface, therefore the contact charge between the mold and the substrate will be reduced.

In another approach, when separating the mold and substrate, an ion beam discharge will be used to discharge the charge between the mold and substrate. The separation will start from edge and gradually open up.
the deposit metal film on the surface of the mold, in thin resist with good conductivity using light after imprint to increase conductivity of the resist, if resist is photoconductive.
The present invention relates to the strength of electric field between mold and substrate in their separation. For any lithography that involves contact, tribo-electricity is generated after lithography mask separates from substrate. The tribo-charge on the surface of mold and thin film on substrate give rise to electric field between them. The electric field caused attraction between mold and substrate and enlarges the mold-substrate separation force.
The present invention relates to the method to reduce the strength of electric field between mold and substrate in their separation. The method is to coat a thin conductive layer (thinner than 10 nm and approaching monolayer) onto insulating mold surface and onto surface of substrate carrying on insulating thin film. The image charge induced in the process of mold-substrate separation reduces the strength of electric field in the gap between them. The description of conductive and insulating material may be described as follows. A conductive coating or material is one whose relaxation time is shorter than the time taken to separate mold from substrate. The relaxation time of material is the product of R and C, where R is the material resistance and C is the material capacitance. In addition, the relaxation time equals to ε₀/σ a for metallic materials and ε_rε₀/σ for semiconducting or dielectric materials, where ε₀and ε_rare vacuum permittivity and relative dielectric constant respectively, and σ is conductivity of material. Setting t as the process time to release mold from substrate, by conductive materials, it meant that conductivity of materials is larger than ε/t, while insulating materials means materials whose conductivity smaller than ε/t. For example, if it takes 1 ms to separate mold from substrate, then materials and coating film having a conductivity larger than 10⁻⁶S/m are conductive materials. By the same principle, conductivity of insulating materials is smaller than 10⁻⁶S/m.
FIG. 3A shows MicroE mold 1 that has insulating body 2 as defined above. Surface of MicroE mold is coated by a thin conductive layer 3. On top of 3 deposited a layer of release layer that has non-stick functionality as US 2001/6309580 (Stephen Chou). The conductive coating material can be, but not limited to, metallic, semi-metallic, metallic and semi-metallic oxides, carbides and nitrides, polymeric, semiconductors, glass, ceramic, dielectrics and composites, as long as the charge relaxation time of materials (RC time) is shorter than time t used in separation. The thickness of the coating is thinner than 10 nm and approaches monolayer thickness until the conductivity of thin film significantly drop and the film transforms to insulator. The insulating body 2 in FIG. 1A has a relaxation time longer than separation time t, particularly but not exclusively includes glass, ceramic, polymeric materials, oxides, carbides and nitrides dielectrics and composites.
FIG. 3B shows another type of MicroE mold 5. It has a conductive body 6, on top of which coated by anti-sticky layer 8 as disclosed in US 2005/0146079 (Stephen Chou). The conductive thin layer 7 between 6 and 8 is coated only when the surface of MicroE mold body 6 does not provide sufficient bonds to anti-sticky layer 8 and performs to assist molecular bonding. The materials of conductive layer coating includes but not limited to metallic, semi-metallic, metallic and semi-metallic oxides, carbides and nitrides, polymeric, semiconductors, glass, ceramic, dielectrics and composites.
FIG. 3C shows the MicroE substrate 9. It consists of a substrate body 10. A thin conductive layer 11 is coated on the surface of substrate body 10 and carries the thin film 12 known as resist in lithography methods. Examples of thin layer 11 are but not limited to metallic, semi-metallic, metallic and semi-metallic oxides, carbides and nitrides, polymeric, semiconductors, glass, ceramic, dielectrics and composites. Thin film 12 may comprise thermally or optically curable polymer material or any other materials that may change materials property following the change of environment (e.g. heating, mechanically re-shaping, optically shinning, electron beam treating).
Furthermore, light can be used to reduce the tribo-electric charge.
Although the foregoing invention has been described in some detail by way of illustration and example for purposes of clarity of understanding, it is readily apparent to those of ordinary skill in the art in light of the teachings of this invention that certain changes and modifications may be made thereto without departing from the spirit or scope of the appended claims.
Accordingly, the preceding merely illustrates the principles of the invention. It will be appreciated that those skilled in the art will be able to devise various arrangements which, although not explicitly described or shown herein, embody the principles of the invention and are included within its spirit and scope. Furthermore, all examples and conditional language recited herein are principally intended to aid the reader in understanding the principles of the invention and the concepts contributed by the inventors to furthering the art, and are to be construed as being without limitation to such specifically recited examples and conditions. Moreover, all statements herein reciting principles, aspects, and embodiments of the invention as well as specific examples thereof, are intended to encompass both structural and functional equivalents thereof. Additionally, it is intended that such equivalents include both currently known equivalents and equivalents developed in the future, i.e., any elements developed that perform the same function, regardless of structure. The scope of the present invention, therefore, is not intended to be limited to the exemplary embodiments shown and described herein. Rather, the scope and spirit of present invention is embodied by the appended claims.

EXAMPLES

An example of MircroE mold body consists of silicon dioxide backed by silicon bulk. The conductive layer used in one experiment is Ti. A 5 nm Ti coating layer was coated onto the surface of MicroE mold body using electron beam sputtering machine. A mold release layer of 1H, 1H, 2H, 2H-perfluorodocecyltrichlorosilane (commercially available as a 97% solids solution) is bonded to the surface of Ti and used as an anti-release layer.
The MicroE mold was then applied in nanoimprint lithography US 1998/5772905 (Stephen Y Chou). In nanoimprint lithography, the silicon substrate carries a commercially thermal-plastic resist (NX-1025) that would get intimate get with the MicroE mold and get separated afterwards.
FIG. 4 shows experimental results on peak separation force comparing MicroE mold with conventional mold without 5 nm conductive coating. In the experiment, MicroE mold is planar. A 8× reduction in separation force is obtained by using MicroE mold with a bulky silicon dioxide body and nanomprinted onto thermal-plastic resist on silicon substrate.
FIG. 5. shows experimental results on peak separation force comparing MicroE mold with conventional mold without 5 nm conductive coating. In the experiment, MicroE mold has 200 nm pitch 160 nm deep grating and 1 micro-meter pitch, 160 nm deep grating feature size. The substrate used is silicon substrate that carries NX-1025 thermal-plastic resist. A 3× reduction in separation force is obtained for MicroE mold with 1 micron-meter pitch grating and 2× reduction for the one with 200 nm pitch grating features.
Table 1 shows results on measured charge density on as-imprinted thin film on substrate as a function of thickness of SiO2 middle layer.

TABLE 1

	Imprint		Charge
Substrate	Type	Surface Potential (V)	density (C/m²)

Si*	T-NIL	19	2.5 × 10⁻³
1 μm SiO₂/Si*	T-NIL	80	2.2 × 10⁻³
2.5 μm SiO₂/Si*	T-NIL	179	2.3 × 10⁻³
5 μm SiO₂/Si*	T-NIL	347	2.2 × 10⁻³
10 μm SiO₂/Si*	T-NIL	388	1.3 × 10⁻³
500 μm SiO₂/Cr**	T-NIL	1600	1.1 × 10⁻⁴
Fused Silica	T-NIL	27,000	1.0 × 10⁻⁵
	UV-NIL	20,000	7.5 × 10⁻⁶

*Si was grounded during separation and surface potential measurement
**Cr was grounded during separation and surface potential measurement

Claims

What is claimed is:

1. A method to reduce tribo-electricity effect between a mold and a resist on a substrate and improve mold separation and/or nanoimprint quality, comprising:

(a) adding a conducting layer on the mold;

(b) adding a conducing layer on the substrate; and

(c) grounding the conducting layer on the mold and the conducting layer on the substrate,

thereby reducing the tribo-electricity effect between a mold and a resist on a substrate, and/or improving the mold separation and/or nanoimprint quality.