US20130078816A1 - Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium - Google Patents
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium Download PDFInfo
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- US20130078816A1 US20130078816A1 US13/627,085 US201213627085A US2013078816A1 US 20130078816 A1 US20130078816 A1 US 20130078816A1 US 201213627085 A US201213627085 A US 201213627085A US 2013078816 A1 US2013078816 A1 US 2013078816A1
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- oxygen
- substrate
- gas
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- containing layer
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- 239000000758 substrate Substances 0.000 title claims abstract description 127
- 238000012545 processing Methods 0.000 title claims abstract description 62
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000000034 method Methods 0.000 claims abstract description 255
- 230000008569 process Effects 0.000 claims abstract description 240
- 239000007789 gas Substances 0.000 claims abstract description 232
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 109
- 239000001301 oxygen Substances 0.000 claims abstract description 109
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 109
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 85
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 69
- 229920005591 polysilicon Polymers 0.000 claims abstract description 69
- 150000004767 nitrides Chemical class 0.000 claims abstract description 43
- 238000010438 heat treatment Methods 0.000 claims abstract description 42
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 42
- 239000001257 hydrogen Substances 0.000 claims abstract description 39
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 39
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 37
- 230000005284 excitation Effects 0.000 claims abstract description 30
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 17
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 77
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 27
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 21
- 230000007246 mechanism Effects 0.000 description 16
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 15
- 230000003647 oxidation Effects 0.000 description 15
- 238000007254 oxidation reaction Methods 0.000 description 15
- 125000004429 atom Chemical group 0.000 description 12
- 239000000126 substance Substances 0.000 description 11
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 230000006870 function Effects 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 238000012546 transfer Methods 0.000 description 8
- 238000011144 upstream manufacturing Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 5
- 210000003323 beak Anatomy 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 125000004433 nitrogen atom Chemical group N* 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- -1 hydrogen radicals Chemical class 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 150000002831 nitrogen free-radicals Chemical class 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- HDZGCSFEDULWCS-UHFFFAOYSA-N monomethylhydrazine Chemical compound CNN HDZGCSFEDULWCS-UHFFFAOYSA-N 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Images
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02321—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment introduction of substances into an already existing insulating layer
- H01L21/02329—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment introduction of substances into an already existing insulating layer introduction of nitrogen
- H01L21/02332—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment introduction of substances into an already existing insulating layer introduction of nitrogen into an oxide layer, e.g. changing SiO to SiON
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32669—Particular magnets or magnet arrangements for controlling the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02247—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by nitridation, e.g. nitridation of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3211—Nitridation of silicon-containing layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
Definitions
- the present invention relates to a substrate processing apparatus for processing a substrate using an excited process gas, a method of manufacturing a semiconductor device and a non-transitory computer-readable recording medium.
- One process for manufacturing a semiconductor device such as a flash memory may include a substrate processing process such as a process for loading a substrate, which includes a gate electrode whose sidewall is exposed by etching, into a process chamber; and a process for performing oxidation by supplying a hydrogen-containing gas and an oxygen-containing gas, which are excited with plasma for the substrate, into a process chamber.
- a substrate processing process such as a process for loading a substrate, which includes a gate electrode whose sidewall is exposed by etching, into a process chamber; and a process for performing oxidation by supplying a hydrogen-containing gas and an oxygen-containing gas, which are excited with plasma for the substrate, into a process chamber.
- the etching damage which is caused as the etching is performed on the sidewall of the gate electrode formed of a polysilicon film, is recovered by performing the oxidation.
- the polysilicon film may be oxidized to an excessive extent exceeding a desired level.
- a substrate processing process for forming a nitride layer on a polysilicon film in advance may be performed by supplying a process gas including nitrogen atoms excited with plasma into a process chamber and supplying a process gas into a substrate before oxidation.
- an oxygen-containing layer such as a native oxide layer may be formed on a substrate by exposing the substrate to the atmosphere through transfer of the substrate before formation of the nitride layer.
- an oxygen-containing layer such as a native oxide layer
- the nitride layer is formed on the substrate on which such an oxygen-containing layer such as a native oxide layer is formed by supplying a process gas containing nitrogen atoms, it is impossible to increase a concentration of the nitrogen atoms in the nitride layer. Therefore, when etching damage of sidewalls of a polysilicon film caused by oxidation is recovered, there have been cases in which excessive oxidation of the polysilicon film may not be inhibited.
- the objects of the present invention aim at providing a substrate processing apparatus including a polysilicon film having improved oxidation resistance by modifying an oxygen-containing layer into an oxynitride layer or a nitride layer having a high nitrogen concentration, and a method and program for manufacturing a semiconductor device.
- a substrate processing apparatus including: a process chamber accommodating a substrate including a polysilicon film having an oxygen-containing layer formed thereon; a heating unit installed in the process chamber to heat the substrate; a gas supply unit configured to supply a process gas containing nitrogen and hydrogen to the substrate in the process chamber; an excitation unit configured to excite the process gas supplied into the process chamber; an exhaust unit configured to exhaust an inside of the process chamber; and a control unit configured to control at least the heating unit, the gas supply unit, the excitation unit and the exhaust unit so as to modify the oxygen-containing layer into an oxynitride layer or a nitride layer by heating the substrate to a predetermined temperature using the heating unit, exciting the process gas supplied by the gas supply unit using the excitation unit, and supplying the process gas excited by the excitation unit to the substrate.
- a method of manufacturing a semiconductor device including: loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; heating the substrate; supplying a process gas containing nitrogen and hydrogen into the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- a non-transitory computer-readable recording medium storing a program that causes a computer to perform a process, the process including: heating a substrate accommodated in a process chamber, the substrate including a polysilicon film having an oxygen-containing layer thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- FIG. 1 is a schematic cross-sectional view of a substrate processing apparatus according to one embodiment of the present invention.
- FIG. 2 is a flowchart showing a substrate processing process according to one embodiment of the present invention.
- FIG. 3 is a graph illustrating the composition analysis results of an oxynitride layer in a depth direction according to Example 1 of the present invention.
- FIG. 4 is a graph illustrating the composition analysis results of an oxynitride layer in a depth direction according to Example 2 of the present invention.
- FIG. 5 is a graph illustrating the composition analysis results of an oxynitride layer in a depth direction according to Example 3 of the present invention.
- FIG. 6 is a graph illustrating the composition analysis results of an oxynitride layer in a depth direction according to Comparative Example.
- FIG. 7 is a schematic cross-sectional view of a substrate processing apparatus including a lamp heating unit according to another embodiment of the present invention.
- FIG. 8 is a schematic cross-sectional view of an ICP-type plasma processing device as the substrate processing apparatus according to another embodiment of the present invention.
- FIG. 9 is a schematic cross-sectional view of an ECR-type plasma processing device as the substrate processing apparatus according to still another embodiment of the present invention.
- FIG. 10 is a schematic configuration diagram of a controller of the substrate processing apparatus which may be preferably used in the embodiments of the present invention.
- the recovery by the above-described etching and oxidation is, for example, performed on a gate structure of a flash memory, etc.
- the flash memory is formed, for example, by sequentially stacking a silicon oxide film (SiO 2 film), a polysilicon film, a thin film having an ONO structure and a polysilicon film on a wafer 200 such as a silicon substrate and patterning each film through dry etching as described above using a predetermined resist pattern as a mask.
- Each film functions as a tunnel gate-insulating film, a floating gate, an interelectrode insulating film, and a control gate.
- etching damage to the sidewalls of the polysilicon film may often be caused. Therefore, the oxidation is carried out to recover the etching damage as described above.
- bird beaks as will be described below may be formed. That is, an oxide species used for the oxidation penetrates into the stacked film from an end of the stacked film, and the polysilicon film may be oxidized by reaction with the oxide species in the vicinity of the interface between the polysilicon film and an oxide film in the ONO structure, thereby forming the bird beaks.
- the reliability of a semiconductor device may be lowered due to a decrease in capacitance of the gate structure.
- a native oxide layer may be formed on the polysilicon film.
- N 2 gas nitrogen gas
- the present inventors have obtained the findings of a method capable of solving the above-described problems since a surface of the polysilicon film may be nitride, and the oxygen-containing layer may be modified into an oxynitride layer or a nitride layer having a high nitrogen concentration as well when the nitridation is performed on the polysilicon film. Therefore, the present invention was based on the findings obtained by the present inventors.
- FIG. 1 is a schematic cross-sectional view of a substrate processing apparatus configured as an MMT apparatus.
- An MMT apparatus is an apparatus configured to plasma-process a wafer 200 serving as a substrate made of, for example, silicon using a modified magnetron typed plasma source which can generate high-density plasma by means of an electric field and a magnetic field.
- the MMT apparatus may perform various kinds of plasma processing, for example, by exciting a process gas into a plasma state to oxidize/nitride a surface of a substrate or a thin film formed on the substrate, form a thin film on the substrate, or etch a surface of the substrate.
- a processing container 203 constituting a process chamber 201 of the substrate processing apparatus 100 includes a dome-shaped upper container 210 serving as a first container, and a bowl-shaped lower container 211 serving as a second container.
- the process chamber 201 is formed by covering the upper container 210 on the lower container 211 .
- the upper container 210 is formed of a non-metallic material such as aluminum oxide (Al 2 O 3 ) or quartz (SiO 2 ), and the lower container 211 is, for example, formed of aluminum (Al).
- a gate valve 244 serving as a sluice valve is installed at the sidewall of the lower container 211 .
- a transfer mechanism (not shown) may be used to load the wafer 200 into the process chamber 201 or unload the wafer 200 from the process chamber 201 .
- an inside of the process chamber 201 is configured to be hermetically closed.
- a susceptor 217 serving as a substrate supporting unit configured to support the wafer 200 is disposed at a lower center of the inside of the process chamber 201 .
- the susceptor 217 may be, for example, formed of a non-metallic material such as aluminum nitride (A 1 N), ceramics or quartz so as to reduce metal contamination of the wafer 200 . Also, the susceptor 217 is electrically insulated from the lower container 211 .
- An inside of the susceptor 217 is equipped with an impedance electrode 217 c configured to change impedance.
- the impedance electrode 217 c is installed via an impedance variation mechanism 274 .
- the impedance variation mechanism 274 includes a coil or variable condenser, and is configured to control an electric potential of the wafer 200 via the impedance electrode 217 c and the susceptor 217 by controlling a pattern number of the coil and a capacitance value of the variable condenser. Also, a controller 221 as will be described below is electrically connected to the impedance variation mechanism 274 .
- a susceptor lift mechanism 268 configured to lift the susceptor 217 is installed at the susceptor 217 .
- a through hole 217 a is installed in the susceptor 217 .
- At least three wafer lift pins 266 configured to raise or lower the wafer 200 are installed at a bottom surface of the above-described lower container 211 .
- the through hole 217 a and the wafer lift pins 266 are disposed so that the wafer lift pins 266 can pass through the through hole 217 a without coming in contact with the susceptor 217 .
- a heater 217 b serving as a heating unit is configured to heat the wafer 200 since the heater 217 b is mounted integrally with an inside of the susceptor 217 .
- a surface of the wafer 200 is configured to be heated to a predetermined temperature (for example, 350° C. to 700° C., preferably 450° C. to 700° C.).
- a temperature sensor (not shown) is installed at the susceptor 217 .
- a controller 221 as will be described below is electrically connected to the heater 217 b and the temperature sensor. The controller 221 is configured to control electric power to be supplied to the heater 217 b based on temperature information detected by the temperature sensor.
- a shower head 236 configured to supply a process gas into the process chamber 201 is installed in an upper portion of the process chamber 201 .
- the shower head 236 includes a cap-shaped cover 233 , a gas introduction section 234 , a buffer chamber 237 , a shield plate 240 and a gas outlet 239 .
- the cover 233 is hermetically installed at an opening formed on an upper surface of the upper container 210 .
- a shield plate 240 is installed below the cover 233 .
- a space formed between the cover 233 and the shield plate 240 is a buffer chamber 237 .
- the buffer chamber 237 functions as a dispersion space through which a process gas introduced through the gas introduction section 234 is dispersed.
- the process gas passing through the buffer chamber 237 is configured to be supplied into the process chamber 201 through the gas outlet 239 arranged at a lateral portion of the shield plate 240 .
- an opening is installed at the cover 233 .
- a downstream end of the gas introduction section 234 is hermetically installed at the opening of the cover 233 .
- a downstream end of the gas supply pipe 232 is connected to an upstream end of the gas introduction section 234 via an O-ring 203 b serving as an encapsulation member.
- a nitrogen-containing gas such as ammonia gas (NH 3 gas) serving as the process gas
- a downstream end of a hydrogen-containing gas supply pipe 232 b configured to supply a hydrogen-containing gas such as hydrogen gas (H 2 gas) serving as the process
- the gas supply pipe 232 , the nitrogen-containing gas supply pipe 232 a , the hydrogen-containing gas supply pipe 232 b and the rare gas supply pipe 232 c are, for example, formed of a non-metallic material such as quartz or aluminum oxide and a metallic material such as SUS.
- An NH 3 gas supply source 250 a , a mass flow controller 252 a serving as a flow rate control device, and a valve 253 a serving as an opening/closing valve are connected to the nitrogen-containing gas supply pipe 232 a sequentially from an upstream side thereof.
- a H 2 gas supply source 250 b , a mass flow controller 252 b serving as a flow rate control device, and a valve 253 b serving as an opening/closing valve are connected to the hydrogen-containing gas supply pipe 232 b sequentially from an upstream side thereof.
- An Ar gas supply source 250 c , a mass flow controller 252 c serving as a flow rate control device, and a valve 253 c serving as an opening/closing valve are connected to the rare gas supply pipe 232 c sequentially from an upstream side thereof.
- a controller 221 as will be described below is electrically connected to the mass flow controllers 252 a to 252 c and the valves 253 a to 253 c .
- the controller 221 is configured to control the mass flow controllers 252 a to 252 c and the opening/closing of the valves 253 a to 253 c so that a flow rate of a gas supplied into the process chamber 201 reaches a predetermined flow rate.
- the controller 221 is configured to allow NH 3 gas, H 2 gas and Ar gas to be freely supplied into the process chamber 201 via the gas supply pipe 232 , the buffer chamber 237 and the gas outlet 239 while allowing the mass flow controllers 252 a to 252 c to control a flow rate through the opening/closing of the valves 253 a to 253 c.
- the gas supply unit includes the shower head 236 , the O-ring 203 b , the gas supply pipe 232 , the nitrogen-containing gas supply pipe 232 a , the hydrogen-containing gas supply pipe 232 b , the rare gas supply pipe 232 c , the mass flow controllers 252 a to 252 c and the valves 253 a to 253 c .
- the gas supply unit may further include the NH 3 gas supply source 250 a , the H 2 gas supply source 250 b , and the Ar gas supply source 250 c.
- a gas exhaust port 235 configured to exhaust a process gas from an inside of the process chamber 201 is installed beneath a sidewall of the lower container 211 .
- An upstream end of the gas exhaust pipe 231 configured to exhaust a gas is connected to the gas exhaust port 235 .
- An APC 242 serving as a pressure regulator, a valve 243 serving as an opening/closing valve, and a vacuum pump 246 serving as an exhaust device are installed at the gas exhaust pipe 231 sequentially from an upstream side thereof.
- a pressure sensor (not shown) is installed at the gas exhaust pipe 231 .
- a controller 221 as will be described below is electrically connected to the APC 242 , the valve 243 , the vacuum pump 246 and the pressure sensor.
- the exhaust unit includes the gas exhaust port 235 , the gas exhaust pipe 231 , the APC 242 , and the valve 243 . Also, the exhaust unit may further include the vacuum pump 246 .
- a tubular electrode 215 serving as a plasma-generating electrode is installed at an external circumference of the processing container 203 (upper container 210 ) to surround a plasma-generating region 224 in the process chamber 201 .
- the tubular electrode 215 is formed in a tubular shape, for example, a cylindrical shape.
- the tubular electrode 215 is connected to a high-frequency power source 273 configured to generate high-frequency electric power via a matching transformer 272 configured to perform matching of impedance.
- the tubular electrode 215 functions as a discharge mechanism configured to excite a process gas supplied into the process chamber 201 and then supplied to a surface of the wafer 200 .
- An upper magnet 216 a and a lower magnet 216 b are installed at upper and lower ends of an external surface of the tubular electrode 215 , respectively.
- Each of the upper magnet 216 a and the lower magnet 216 b is formed of a permanent magnet formed in a tubular shape, for example, a ring shape.
- the upper magnet 216 a and the lower magnet 216 b have magnetic poles at both ends of the process chamber 201 in a radial direction (that is, inner and outer circumferential ends of each magnet).
- the magnetic poles of the upper magnet 216 a and the lower magnet 216 b are disposed so that the magnetic poles can be formed in opposite directions.
- a magnetron discharge plasma may be generated at a plasma-generating region 224 in the process chamber 201 by supplying a high-frequency electric power to the tubular electrode 215 to form an electric field.
- the above-described electric field and magnetic field may be allowed to rotate emitted electrons to increase an ionization generation rate of the plasma, thereby generating high-density plasma having a long life span.
- the excitation unit includes the tubular electrode 215 , the upper magnet 216 a , and the lower magnet 216 b . Also, the excitation unit may further include the matching transformer 272 , and the high-frequency power source 273 .
- a shield plate 223 made of a metal configured to effectively shield the electric field and the magnetic field is installed at surroundings of the tubular electrode 215 , the upper magnet 216 a and the lower magnet 216 b so that the electric field and magnetic field formed by the tubular electrode 215 , the upper magnet 216 a and the lower magnet 216 b cannot have an adverse effect on external environments or other devices such as a processing furnace.
- the controller 221 serving as a control unit is formed as a computer including a central processing unit (CPU) 221 a , a random access memory (RAM) 221 b , a memory device 221 c , and an I/O port 221 d .
- the RAM 221 b , the memory device 221 c , and the I/O port 221 d are configured to be able to exchange data with the CPU 221 a via an internal bus 221 e .
- a touch panel, mouse, keyboard, operation terminal and the like may be connected as the input/output device 225 to the controller 221 .
- a display may be, for example, connected as a display unit to the controller 221 .
- the memory device 221 c includes a flash memory, a hard disk drive (HDD), and a CD-ROM.
- a control program configured to control operation of the substrate processing apparatus 100 and a process recipe describing the order and conditions for processing a substrate are stored in the memory device 221 c so that the control program and the process recipe is read from the memory device 221 c .
- the process recipe is combined so that predetermined results is obtained by executing the respective procedures at the controller 221 in a substrate processing process as will be described below, and thus functions as a program.
- both of the process recipe and the control program are simply referred to as a program.
- the program includes only a single process recipe, includes only a single control program, or includes both of the process recipe and the control program.
- the RAM 221 b is configured as a memory area (work area) to temporarily hold a program or data read by the CPU 221 a.
- the I/O port 221 d is connected to the mass flow controllers 252 a to 252 c , the valves 211 and 243 , the APC 242 , the vacuum pump 246 , the heater 217 b , the matching transformer 272 , the high-frequency power source 273 , the susceptor lift mechanism 268 , and the impedance variation mechanism 274 , as described above.
- the CPU 221 a is configured to read the process recipe from the memory device 221 c according to input of an operation command from the input/output device 281 while reading the control program from the memory device 221 c and executing the control program. Based on the read contents of the process recipe, the CPU 221 a is configured to control an operation of adjusting an opening degree of the APC 242 and an opening/closing operation of the valve 243 and start/stop of the vacuum pump 246 through a signal line A, a raising/lowering operation of the susceptor lift mechanism 268 through a signal line B, an operation of adjusting electric power supplied into the heater 217 b (a temperature-adjusting operation) based on a temperature sensor or an operation of adjusting an impedance value by means of the impedance variation mechanism 274 through a signal line C, an opening/closing operation of the gate valve 244 through a signal line D, operations of the matching transformer 272 and the high-frequency power source 273 through a signal line E, and an operation of adjusting flow rates of
- the controller 221 may be configured as a general-purpose computer.
- the controller 221 according to this embodiment may be configured by preparing an external memory device 226 in which the above-described program is stored (for example, a magnetic disk such as a magnetic tape, a flexible disk or a hard disk, an optical disc such as CD or DVD, an optical magnetic disc such as MO, or a semiconductor memory such as a USB memory or a memory card), and installing a program on a general-purpose computer using the related external memory device 226 .
- an external memory device 226 for example, a magnetic disk such as a magnetic tape, a flexible disk or a hard disk, an optical disc such as CD or DVD, an optical magnetic disc such as MO, or a semiconductor memory such as a USB memory or a memory card
- a method of supplying a program to a computer is not limited to a case in which the program is supplied to the computer via the external memory device 226 .
- the program may be supplied using a communication means such as the Internet or a dedicated line without using the external memory device 226 .
- the memory device 221 c or the external memory device 226 is configured as a computer-readable recording medium.
- these devices are simply referred to as a recording medium.
- the term “recording medium” is used in this specification, there are cases in which the recording medium includes only a single memory device 221 c , includes only an external memory device 226 , or includes both of the memory device 221 c and the external memory device 226 .
- FIG. 2 a substrate processing process that is carried out as one semiconductor manufacturing process according to this embodiment will be described with reference to FIG. 2 .
- This process is carried out using the above-described substrate processing apparatus 100 which is configured as the MMT apparatus. Also, in the following description, operations of respective parts constituting the substrate processing apparatus 100 are controlled by the controller 221 .
- an oxygen-containing layer is modified into an oxynitride layer or a nitride layer when the wafer 200 which includes a polysilicon film having the oxygen-containing layer formed thereon, is processed using ammonia (NH 3 ) gas as a process gas containing nitrogen and hydrogen atoms and the nitrogen atoms are introduced into the polysilicon film is described.
- ammonia (NH 3 ) gas as a process gas containing nitrogen and hydrogen atoms and the nitrogen atoms are introduced into the polysilicon film is described.
- the susceptor 217 is lowered to a transfer position of the wafer 200 so that the wafer lift pin 266 passes through the through hole 217 a of the susceptor 217 .
- the lift pin 266 protrudes from a surface of the susceptor 217 by a predetermined height.
- the gate valve 244 is opened, and the wafer 200 is loaded into the process chamber 201 using a transfer mechanism (not shown). As a result, the wafer 200 is supported in a horizontal posture on the wafer lift pin 266 protruding from the surface of the susceptor 217 .
- a polysilicon film is formed in advance on a surface of the wafer 200 .
- the polysilicon film is formed using a chemical vapor deposition (CVD) method or an atomic layer deposition (ALD) method of supplying a silicon (Si) source such as monosilane (SiH 4 ) gas and hydrogen gas (H 2 gas) to the surface of the wafer 200 .
- CVD chemical vapor deposition
- ALD atomic layer deposition
- the polysilicon film has an oxygen-containing layer formed on a surface thereof.
- the oxygen-containing layer is a native oxide layer formed on the polysilicon film by oxygen (O 2 ) in the atmosphere when the oxygen-containing layer is exposed to the atmosphere during transfer of the wafer 200 .
- a thickness of the oxygen-containing layer is, for example, in a range of 0.5 nm to 2.0 nm. When the thickness of the oxygen-containing layer exceeds 0.5 nm, an effect of modifying an oxygen-containing layer as will be described below into an oxynitride layer or a nitride layer may be easily obtained.
- the transfer mechanism When the wafer 200 is loaded into the process chamber 201 , the transfer mechanism is evacuated from the process chamber 201 , and the gate valve 244 is closed to hermetically close the process chamber 201 .
- the susceptor lift mechanism 268 is used to raise the susceptor 217 .
- the wafer 200 is disposed on a surface of the susceptor 217 .
- the wafer 200 is raised to a predetermined processing position by raising the susceptor 217 to a predetermined position.
- Ar gas serving as a purge gas may be supplied from the gas supply unit into the process chamber 201 while exhausting an inside of the process chamber 201 using the exhaust unit. That is, the inside of the process chamber 201 is exhausted by driving the vacuum pump 246 and opening the valve 243 . At the same time, the valve 253 c may be opened to supply the Ar gas into the process chamber 201 via the buffer chamber 237 . Therefore, invasion of particles into the process chamber 201 or attachment of particles to the wafer 200 may be inhibited. Also, the vacuum pump 246 is always driven until a substrate unloading operation (S 60 ) as will be described below is finished at least from the substrate loading/placing operation (S 10 ).
- the wafer 200 is maintained at a temperature of 350° C. to 700° C., preferably 450° C. to 700° C.
- the oxygen-containing layer may be modified into an oxynitride layer or a nitride layer, as will be described below.
- a temperature of the heater 217 b is regulated by controlling an electric power supplied to the heater 217 b based on the temperature information detected by a temperature sensor (not shown).
- a pressure is regulated by the APC 242 so that an inside of the process chamber 201 can reach a desired pressure (for example, a range of 1 Pa to 100 Pa, preferably 20 Pa to 100 Pa).
- a desired pressure for example, a range of 1 Pa to 100 Pa, preferably 20 Pa to 100 Pa.
- the pressure in the process chamber 201 is measured using a pressure sensor (not shown), and an opening degree of the APC 242 is feedback-controlled based on the measured pressure information.
- NH 3 gas is, for example, used as the process gas containing nitrogen and hydrogen atoms. That is, the NH 3 gas serving as the nitrogen-containing gas functions as a hydrogen-containing gas according to this embodiment.
- the valve 253 a is opened, and the NH 3 gas serving as the process gas is supplied through the nitrogen-containing gas supply pipe 232 a into the process chamber 201 via the buffer chamber 237 .
- a flow rate of the NH 3 gas is adjusted by the mass flow controller 252 a so that the flow rate of the NH 3 gas can reach a predetermined flow rate (for example, a flow rate of 50 sccm to 1,000 sccm, preferably 100 sccm to 1,000 sccm).
- a predetermined high-frequency electric power for example, a voltage of 100 W to 1,000 W, preferably 100 W to 800 W
- a magnetron discharge is generated in the process chamber 201 , and a high-density plasma is generated at the plasma-generating region 224 arranged above the wafer 200 .
- the impedance variation mechanism 274 is controlled in advance to have a desired impedance value.
- the NH 3 gas supplied into the process chamber 201 is excited and activated.
- Active species for example, nitrogen radicals (N*), hydrogen radicals (H*), ammonium ions (NH 4 + ), etc.
- N* nitrogen radicals
- H* hydrogen radicals
- NH 4 + ammonium ions
- O oxygen
- the separated oxygen (O) atoms are replaced with nitrogen (N) atoms, nitridation of a surface of the polysilicon film and nitridation of the oxygen-containing layer are facilitated.
- the active species containing nitrogen (N) atoms such as nitrogen radicals (N*) are supplied to the polysilicon film
- a surface of the polysilicon film may be nitrided.
- the nitrogen radicals (N*) have an effect of separating and removing oxygen (O) atoms from the polysilicon film, for example, using sputtering so as to have high energy.
- Nitrogen (N) atoms bind to dangling bonds generated when the oxygen (O) atoms are separated by a sputtering effect, thereby further facilitating nitridation of the surface of the polysilicon film.
- the oxygen-containing layer when the active species containing hydrogen (H) atoms such as hydrogen radicals (H*) are supplied to the oxygen-containing layer, the oxygen (O) atoms included in the oxygen-containing layer are separated by a hydrogen reduction reaction. Then, nitrogen (N) atoms bind to dangling bonds generated when the oxygen (O) atoms are separated, and nitridation of the oxygen-containing layer is facilitated, thereby modifying the oxygen-containing layer into an oxynitride layer or a nitride layer. As a result, the oxygen-containing layer may be modified into an oxynitride layer or a nitride layer having a high nitrogen concentration.
- H hydrogen
- H* hydrogen radicals
- an inside of the process chamber 201 continues to be exhausted using the gas exhaust pipe 231 when the valve 243 is kept open so as to discharge a residual gas in the process chamber 201 . That is, until a concentration of the process gas in the process chamber 201 reaches a concentration equal to or less than a predetermined value, the inside of the process chamber 201 is exhausted to discharge the residual gas. For example, the inside of the process chamber 201 is exhausted until the concentration of the process gas reaches a concentration at which a substrate unloading operation (S 60 ) as will be described below is performed for unloading the wafer 200 from the process chamber 201 .
- the inside of the process chamber 201 may be exhausted until the process gas is free from at least a surface of the wafer 200 .
- the discharging of the residual gas from the process chamber 201 may be facilitated by opening the valve 253 c and supplying an inert gas such as Ar gas serving as a purge gas into the process chamber 201 .
- an opening degree of the APC 242 is adjusted to return a pressure in the process chamber 201 to atmospheric pressure, and also lower a temperature of the wafer 200 to a predetermined temperature. More particularly, the pressure in the process chamber 201 is increased to atmospheric pressure by controlling opening/closing of the APC 242 and the valve 243 of the exhaust unit based on the pressure information detected by a pressure sensor (not shown) while supplying the Ar gas serving as the inert gas into the process chamber 201 when the valve 253 c is kept open. Then, a temperature of the wafer 200 is lowered by controlling an electric power supplied to the heater 217 b.
- the wafer 200 is supported by the wafer lift pin 266 protruding from a surface of the susceptor 217 by lowering the susceptor 217 to a transfer position of the wafer 200 .
- the gate valve 244 is opened, and the wafer 200 is unloaded from the process chamber 201 using a transfer mechanism (not shown).
- the substrate processing process according to this embodiment is finished.
- the conditions such as a temperature of the wafer 200 , a pressure in the process chamber 201 , a flow rate of each gas, an electric power applied to the tubular electrode 215 , and a processing time are optionally adjusted according to a material of a layer to be modified, a thickness of a layer, etc.
- This embodiment is configured so that the process gas containing nitrogen and hydrogen atoms is supplied into the process chamber 201 using the gas supply unit and excited using the excitation unit, and the excited process gas is supplied to a surface of the wafer 200 which includes a polysilicon film having an oxygen-containing layer formed thereon. Therefore, in addition to nitriding a surface of the polysilicon film, the oxygen-containing layer of the polysilicon film may be modified into an oxynitride layer or nitride layer having a high nitrogen concentration (that is, a low oxygen concentration).
- oxidation resistance of the polysilicon film may be improved. Therefore, when the processed wafer 200 according to this embodiment is, for example, formed on a flash memory, that is, when the thin film having an ONO structure as described above is formed on the wafer 200 and etched, and recovered by oxidation, formation of bird beaks between the polysilicon film and the thin film having an ONO structure may be inhibited. As a result, when the processed wafer 200 according to this embodiment becomes a flash memory, for example, input and erasing characteristics of electrons may be improved.
- the native oxide layer may be modified into an oxynitride layer or a nitride layer, and a surface of the polysilicon film may be nitride at the same time.
- the wafer 200 is heated using the heater 217 b so that a surface temperature of the wafer 200 can reach a temperature of 350° C. to 700° C.
- the oxygen-containing layer is, for example, modified into an oxynitride layer or a nitride layer. In this case, when the modification is performed to a certain extent, the intake of the excited hydrogen atoms into the oxygen-containing layer may be reduced.
- the wafer 200 is also processed, using the MMT apparatus as the substrate processing apparatus, by exciting the process gas.
- the wafer 200 which includes a polysilicon film having a native oxide layer formed thereon as the oxygen-containing layer is used to modify the oxygen-containing layer into an oxynitride layer or nitride layer having a high nitrogen concentration, and simultaneously nitride a surface of the polysilicon film.
- the native oxide layer may have different thicknesses according to a circuit pattern formed on a surface of the wafer 200 , the kind of the wafer 200 , the kind of a film formed on a surface of the wafer 200 , and a leaving time of the wafer 200 .
- a thickness of the surface of the wafer 200 may not be controlled so that the surface of the wafer 200 can have a uniform thickness distribution.
- a pre-cleaning process of removing impurities such as metals or organic matters using ozone water may be performed on the wafer 200 .
- DHF diluted hydrofluoric acid
- a pre-cleaning process of removing impurities such as metals or organic matters using ozone water may be performed on the wafer 200 .
- the oxygen-containing layer such as a chemical oxide layer may be formed on the polysilicon film.
- even the chemical oxide layer may interfere with formation of a high-concentration nitride layer on the polysilicon film.
- the wafer 200 which includes a polysilicon film having an oxygen-containing layer formed thereon as the chemical oxide layer is used, and the oxygen-containing layer is modified into an oxynitride layer or nitride layer having a high nitrogen concentration by supplying a process gas containing nitrogen and hydrogen atoms.
- the chemical oxide layer formed on every wafer 200 has a uniform thickness.
- a thickness of the chemical oxide layer may be controlled so that the chemical oxide layer can be uniformly distributed on the surface of the wafer 200 .
- the chemical oxide layer has a thickness of approximately 0.5 nm to 2 nm, and a thickness of 1 nm on average.
- the process gas containing nitrogen and hydrogen atoms is supplied into the process chamber 201 using the gas supply unit and excited using the excitation unit, and the excited process gas is supplied to the wafer 200 which includes a polysilicon film having a chemical oxide layer formed thereon as the oxygen-containing layer
- the chemical oxide layer may be modified into an oxynitride layer or nitride layer having a high nitrogen concentration, and a surface of the polysilicon film may be uniformly nitrided with good reproducibility.
- ammonia gas (NH 3 gas) is used as the process gas containing nitrogen and hydrogen atoms
- the present invention is not limited to the above-described embodiments. That is, for example, monomethylhydrazine gas (CH 6 N 2 gas) may be used as the process gas containing nitrogen and hydrogen atoms.
- a gas obtained, for example, by mixing a nitrogen-containing gas and a hydrogen-containing gas may also be used as the process gas.
- ammonia gas (NH 3 gas) or nitrogen gas (N 2 gas) may be, for example, used as the nitrogen-containing gas
- hydrogen gas (H 2 gas) may be, for example, used as the hydrogen-containing gas. That is, as shown in FIG. 1 , the valve 253 a may be opened to supply the NH 3 gas into the process chamber 201 through the nitrogen-containing gas supply pipe 232 a .
- the valve 253 b may be opened to supply the H 2 gas into the process chamber 201 through the hydrogen-containing gas supply pipe 232 b .
- nitrogen radicals (N*) and hydrogen radicals (H*) may be supplied to the wafer 200 which includes a polysilicon film having an oxygen-containing layer formed thereon, the oxygen-containing layer may be modified into an oxynitride layer or nitride layer in addition to nitridation of the polysilicon film.
- the mass flow controllers 252 a and 252 b are controlled so that a ratio of hydrogen (H) atoms of active species containing hydrogen among the active species included in the excited process gas can be in a range of 10% to 90%, and thus a ratio between a flow rate of the nitrogen-containing gas such as NH 3 gas and a flow rate of the hydrogen-containing gas such as H 2 gas may be adjusted.
- the wafer 200 may be uniformly processed according to a thickness of the oxygen-containing layer, and a content of oxygen in the oxygen-containing layer.
- the mass flow controllers 252 a and 252 b may be adjusted so that the sum of the flow rates of the nitrogen-containing gas such as NH 3 gas and the hydrogen-containing gas such as H 2 gas can be in a range of 100 sccm to 1,000 sccm.
- a ratio between a flow rate of the NH 3 gas and a flow rate of the H 2 gas may be dynamically adjusted in the early stage of modification, for example, a flow rate of the H 2 gas may be higher than that of the NH 3 gas.
- the Ar gas serving as the inert gas may be supplied together into the process chamber 201 via the buffer chamber 237 by opening the valve 253 c and adjusting the flow rate using the mass flow controller 252 c . Therefore, the conditions such as a concentration and a flow velocity of a gas supplied into the process chamber 201 may be freely adjusted with no variation in the flow rates and ratios of the nitrogen-containing gas and the hydrogen-containing gas.
- the wafer 200 is configured to be heated by the heater 217 b installed inside the susceptor 217 in the above-described embodiments
- the present invention is not limited to the embodiments.
- the wafer 200 may be heated by irradiation with infrared rays from a lamp heating unit 280 in addition to the heater 217 b .
- the lamp heating unit 280 may be configured to irradiate an inside of the process chamber 201 with light via a light transmitting window 278 installed above the process chamber 201 , that is, installed on a surface of the upper container 210 .
- the wafer 200 may be heated in a shorter time compared to when the wafer 200 is heated using only the heater 217 b . Also, the wafer 200 may be heated using only the lamp heating unit 280 without installing the heater 217 b . Also, the lamp heating unit 280 is configured to be controlled by the controller 221 through the signal line G.
- the substrate processing operation may be performed using an inductively coupled plasma (ICP) device or an electron cyclotron resonance (ECR) device.
- ICP inductively coupled plasma
- ECR electron cyclotron resonance
- FIG. 8 shows an ICP-type plasma processing device 300 that is the substrate processing apparatus according to another embodiment of the present invention.
- the ICP-type plasma processing device 300 generates plasma by supplying an electric power via each of matching transformers 272 a and 272 b , high-frequency power sources 273 a and 273 b and dielectric coils 315 a and 315 b .
- the dielectric coil 315 a is arranged outside a ceiling side of the processing container 203 .
- the dielectric coil 315 b is arranged outside an external circumferential wall of the processing container 203 .
- the process gas containing nitrogen and hydrogen atoms is supplied through the gas supply pipe 232 into the process chamber 201 via the gas introduction section 234 .
- an electric field is formed by induction of electrons.
- active species may be generated by exciting the supplied process gas into a plasma state.
- FIG. 9 shows an ECR-type plasma processing device 400 that is the substrate processing apparatus according to still another embodiment of the present invention.
- the ECR-type plasma processing device 400 includes a matching transformer 272 b configured to supply microwaves to generate plasma, a high-frequency power source 273 b , a microwave introduction pipe 415 a and a dielectric coil 415 b .
- the microwave introduction pipe 415 a is arranged outside a ceiling wall of the processing container 203 .
- the dielectric coil 415 b is arranged outside an external circumferential wall of the processing container 203 .
- the process gas containing nitrogen and hydrogen atoms is supplied through the gas supply pipe 232 into the process chamber 201 via the gas introduction section 234 .
- microwaves 418 a are introduced into the microwave introduction pipe 415 a before/after the supply of the gas, and the microwaves 418 a are emitted to the process chamber 201 .
- the active species may be generated by the high-frequency electric power from the microwaves 418 a and the dielectric coil 415 b by exciting the supplied process gas into a plasma state.
- NH 3 gas excited by an excitation unit was supplied to a wafer 200 which included a polysilicon film having an oxygen-containing layer formed thereon, the wafer 200 was heated to 350° C., and substrate processing was performed to modify an oxygen-containing layer into an oxynitride layer (Example 1). Also, substrate processing was performed under the same conditions as in Example 1 to modify an oxygen-containing layer into an oxynitride layer (Example 2), except that a heating temperature of the wafer 200 was set to 450° C.
- Substrate processing was performed under the same conditions as in Example 1 to modify an oxygen-containing layer into an oxynitride layer (Example 3), except that a heating temperature of the wafer 200 was set to 550° C. Also, a case in which an N 2 gas excited by an excitation unit was supplied to a wafer which included a polysilicon film having an oxygen-containing layer formed thereon, the wafer was heated to 350° C., and substrate processing was performed to modify an oxygen-containing layer into an oxynitride layer is described as Comparative Example.
- FIGS. 3 to 6 are graphs illustrating the element concentrations (atomic %) of the oxynitride layers in a depth direction when the oxynitride layers according to Examples 1 to 3 and Comparative Example of the present invention were measured using high resolution-Rutherford backscattering spectrometry (HR-RBS).
- HR-RBS high resolution-Rutherford backscattering spectrometry
- Table 1 lists the compositions (atomic %) of a silicon element (Si), an oxygen element (O) and a nitrogen element (N) in each of the oxynitride layers of Examples 1 to 3 and Comparative Example, which are calculated from FIGS. 3 to 6 .
- Example 2 As described in Example 2 ( FIG. 4 ) and Example 3 ( FIG. 5 ), it could be seen that, in modification in which a heating temperature of the wafer 200 was 450° C. or more, the oxygen-containing layer could be modified into an oxynitride layer having a lower oxygen concentration and higher nitrogen concentration, compared with Comparative Example ( FIG. 6 ). Also, as described in Example 1 ( FIG. 3 ), it could be seen that even when the modification in which the heating temperature of the wafer 200 was 350° C. was performed, a slight effect of lowering an oxygen concentration and increasing a nitrogen concentration was expected when a depth was 2 nm or more. As described above, it could be seen from FIGS.
- the oxygen-containing layer might be modified into an oxynitride layer having a high nitrogen concentration by supplying a process gas containing nitrogen and hydrogen atoms to the wafer 200 which included the polysilicon film having an oxygen-containing layer formed thereon so as to perform the modification on the oxygen-containing layer.
- a substrate processing apparatus including: a process chamber accommodating a substrate including a polysilicon film having an oxygen-containing layer formed thereon; a heating unit installed in the process chamber to heat the substrate; a gas supply unit configured to supply a process gas containing nitrogen and hydrogen to the substrate in the process chamber; an excitation unit configured to excite the process gas supplied into the process chamber; an exhaust unit configured to exhaust an inside of the process chamber; and a control unit configured to control at least the heating unit, the gas supply unit, the excitation unit and the exhaust unit so as to modify the oxygen-containing layer into an oxynitride layer or a nitride layer by heating the substrate to a predetermined temperature using the heating unit, exciting the process gas supplied by the gas supply unit using the excitation unit, and supplying the process gas excited by the excitation unit to the substrate.
- the oxygen-containing layer is a native oxide layer.
- the oxygen-containing layer is an oxide layer formed by cleaning the substrate.
- the predetermined temperature is in a range of 350° C. to 700° C.
- control unit controls a ratio of hydrogen atoms of active species containing hydrogen among the active species included in the process gas excited by the excitation unit such that the ratio ranges from 10% to 90%.
- the oxygen-containing layer has a thickness ranging from 0.5 nm to 2.0 nm.
- a method of manufacturing a semiconductor device including: loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber while heating the substrate and exhausting an inside of the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- a method of manufacturing a semiconductor device including loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; heating the substrate; supplying a process gas containing nitrogen and hydrogen into the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- a program for sequentially executing procedures in a computer including: loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber while heating the substrate and exhausting an inside of the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- a non-transitory computer-readable recording medium storing a program that causes a computer to perform a process, the process including: loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber while heating the substrate and exhausting an inside of the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- a non-transitory computer-readable recording medium storing a program that causes a computer to perform a process, the process including: heating a substrate accommodated in a process chamber, the substrate including a polysilicon film having an oxygen-containing layer thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- an apparatus for manufacturing a semiconductor device including: a process chamber accommodating a substrate including a polysilicon film having an oxygen-containing layer formed thereon; a heating unit installed in the process chamber to heat the substrate; a gas supply unit configured to supply a process gas containing nitrogen and hydrogen to the substrate in the process chamber; an excitation unit configured to excite the process gas supplied into the process chamber; an exhaust unit configured to exhaust an inside of the process chamber; and a control unit configured to control at least the heating unit, the gas supply unit, the excitation unit and the exhaust unit so as to modify the oxygen-containing layer into an oxynitride layer or a nitride layer by heating the substrate to a predetermined temperature using the heating unit, exciting the process gas supplied by the gas supply unit using the excitation unit, and supplying the process gas excited by the excitation unit to the substrate.
- the oxidation resistance of a polysilicon film can be improved by modifying an oxygen-containing layer into an oxynitride layer or a nitride layer having a high nitrogen concentration.
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Abstract
A substrate processing apparatus includes: a process chamber accommodating a substrate including a polysilicon film having an oxygen-containing layer formed thereon; a heating unit in the process chamber to heat the substrate; a gas supply unit to supply a process gas containing nitrogen and hydrogen to the substrate in the process chamber; an excitation unit to excite the process gas supplied into the process chamber; an exhaust unit to exhaust an inside of the process chamber; and a control unit to control at least the heating unit, the gas supply unit, the excitation unit and the exhaust unit for modifying the oxygen-containing layer into an oxynitride or nitride layer by heating the substrate to a predetermined temperature using the heating unit, exciting the process gas supplied by the gas supply unit using the excitation unit, and supplying the process gas excited by the excitation unit to the substrate.
Description
- This application claims foreign priority under 35 U.S.C. §119(a)-(d) to Application Nos. JP 2011-210427 and 2012-187883 filed on Sep. 27, 2011 and Aug. 28, 2012, respectively, the entire contents of each of which are hereby incorporated by reference.
- The present invention relates to a substrate processing apparatus for processing a substrate using an excited process gas, a method of manufacturing a semiconductor device and a non-transitory computer-readable recording medium.
- One process for manufacturing a semiconductor device such as a flash memory may include a substrate processing process such as a process for loading a substrate, which includes a gate electrode whose sidewall is exposed by etching, into a process chamber; and a process for performing oxidation by supplying a hydrogen-containing gas and an oxygen-containing gas, which are excited with plasma for the substrate, into a process chamber. In such a substrate processing process, the etching damage, which is caused as the etching is performed on the sidewall of the gate electrode formed of a polysilicon film, is recovered by performing the oxidation. However, for example, when the sidewall of the polysilicon film is recovered, the polysilicon film may be oxidized to an excessive extent exceeding a desired level.
- Therefore, to inhibit excessive oxidation of the polysilicon film, for example, a substrate processing process for forming a nitride layer on a polysilicon film in advance may be performed by supplying a process gas including nitrogen atoms excited with plasma into a process chamber and supplying a process gas into a substrate before oxidation.
- For example, although a nitride layer is formed to achieve the above-described objects, an oxygen-containing layer such as a native oxide layer may be formed on a substrate by exposing the substrate to the atmosphere through transfer of the substrate before formation of the nitride layer. When the nitride layer is formed on the substrate on which such an oxygen-containing layer such as a native oxide layer is formed by supplying a process gas containing nitrogen atoms, it is impossible to increase a concentration of the nitrogen atoms in the nitride layer. Therefore, when etching damage of sidewalls of a polysilicon film caused by oxidation is recovered, there have been cases in which excessive oxidation of the polysilicon film may not be inhibited.
- The objects of the present invention aim at providing a substrate processing apparatus including a polysilicon film having improved oxidation resistance by modifying an oxygen-containing layer into an oxynitride layer or a nitride layer having a high nitrogen concentration, and a method and program for manufacturing a semiconductor device.
- According to one embodiment, there is provided a substrate processing apparatus including: a process chamber accommodating a substrate including a polysilicon film having an oxygen-containing layer formed thereon; a heating unit installed in the process chamber to heat the substrate; a gas supply unit configured to supply a process gas containing nitrogen and hydrogen to the substrate in the process chamber; an excitation unit configured to excite the process gas supplied into the process chamber; an exhaust unit configured to exhaust an inside of the process chamber; and a control unit configured to control at least the heating unit, the gas supply unit, the excitation unit and the exhaust unit so as to modify the oxygen-containing layer into an oxynitride layer or a nitride layer by heating the substrate to a predetermined temperature using the heating unit, exciting the process gas supplied by the gas supply unit using the excitation unit, and supplying the process gas excited by the excitation unit to the substrate.
- According to another embodiment, there is provided a method of manufacturing a semiconductor device including: loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; heating the substrate; supplying a process gas containing nitrogen and hydrogen into the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- According to still another embodiment, there is provided a non-transitory computer-readable recording medium storing a program that causes a computer to perform a process, the process including: heating a substrate accommodated in a process chamber, the substrate including a polysilicon film having an oxygen-containing layer thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
-
FIG. 1 is a schematic cross-sectional view of a substrate processing apparatus according to one embodiment of the present invention. -
FIG. 2 is a flowchart showing a substrate processing process according to one embodiment of the present invention. -
FIG. 3 is a graph illustrating the composition analysis results of an oxynitride layer in a depth direction according to Example 1 of the present invention. -
FIG. 4 is a graph illustrating the composition analysis results of an oxynitride layer in a depth direction according to Example 2 of the present invention. -
FIG. 5 is a graph illustrating the composition analysis results of an oxynitride layer in a depth direction according to Example 3 of the present invention. -
FIG. 6 is a graph illustrating the composition analysis results of an oxynitride layer in a depth direction according to Comparative Example. -
FIG. 7 is a schematic cross-sectional view of a substrate processing apparatus including a lamp heating unit according to another embodiment of the present invention. -
FIG. 8 is a schematic cross-sectional view of an ICP-type plasma processing device as the substrate processing apparatus according to another embodiment of the present invention. -
FIG. 9 is a schematic cross-sectional view of an ECR-type plasma processing device as the substrate processing apparatus according to still another embodiment of the present invention. -
FIG. 10 is a schematic configuration diagram of a controller of the substrate processing apparatus which may be preferably used in the embodiments of the present invention. - First, the findings obtained by the present inventors will be described prior to description of embodiments of the present invention.
- The recovery by the above-described etching and oxidation is, for example, performed on a gate structure of a flash memory, etc. In general, the flash memory is formed, for example, by sequentially stacking a silicon oxide film (SiO2 film), a polysilicon film, a thin film having an ONO structure and a polysilicon film on a
wafer 200 such as a silicon substrate and patterning each film through dry etching as described above using a predetermined resist pattern as a mask. Each film functions as a tunnel gate-insulating film, a floating gate, an interelectrode insulating film, and a control gate. - When the stacked film is patterned, for example, etching damage to the sidewalls of the polysilicon film may often be caused. Therefore, the oxidation is carried out to recover the etching damage as described above. In this case, however, bird beaks as will be described below may be formed. That is, an oxide species used for the oxidation penetrates into the stacked film from an end of the stacked film, and the polysilicon film may be oxidized by reaction with the oxide species in the vicinity of the interface between the polysilicon film and an oxide film in the ONO structure, thereby forming the bird beaks. When the bird beaks are formed, the reliability of a semiconductor device may be lowered due to a decrease in capacitance of the gate structure.
- However, when a nitride layer is formed in advance between the polysilicon film and the oxide film in the ONO structure, diffusion of oxidation toward the polysilicon film during the oxidation is difficult, thereby inhibiting formation of the bird beaks.
- As described above, however, when a substrate is transferred to the atmosphere prior to performing the nitridation on the polysilicon film, a native oxide layer may be formed on the polysilicon film. Even when the nitridation is performed, for example, by supplying nitrogen gas (N2 gas) to such a polysilicon film having an oxygen-containing layer formed thereon, such as a native oxide layer, a nitride layer having a sufficiently high concentration of nitrogen atoms may not be formed.
- Accordingly, the present inventors have obtained the findings of a method capable of solving the above-described problems since a surface of the polysilicon film may be nitride, and the oxygen-containing layer may be modified into an oxynitride layer or a nitride layer having a high nitrogen concentration as well when the nitridation is performed on the polysilicon film. Therefore, the present invention was based on the findings obtained by the present inventors.
- One embodiment of the present invention will be described with reference to the drawings.
- First, the substrate processing apparatus according to this embodiment will be described with reference to
FIG. 1 .FIG. 1 is a schematic cross-sectional view of a substrate processing apparatus configured as an MMT apparatus. - An MMT apparatus is an apparatus configured to plasma-process a
wafer 200 serving as a substrate made of, for example, silicon using a modified magnetron typed plasma source which can generate high-density plasma by means of an electric field and a magnetic field. The MMT apparatus may perform various kinds of plasma processing, for example, by exciting a process gas into a plasma state to oxidize/nitride a surface of a substrate or a thin film formed on the substrate, form a thin film on the substrate, or etch a surface of the substrate. - Process Chamber
- A
processing container 203 constituting aprocess chamber 201 of thesubstrate processing apparatus 100 according to this embodiment includes a dome-shapedupper container 210 serving as a first container, and a bowl-shapedlower container 211 serving as a second container. Theprocess chamber 201 is formed by covering theupper container 210 on thelower container 211. For example, theupper container 210 is formed of a non-metallic material such as aluminum oxide (Al2O3) or quartz (SiO2), and thelower container 211 is, for example, formed of aluminum (Al). - A
gate valve 244 serving as a sluice valve is installed at the sidewall of thelower container 211. When thegate valve 244 is open, a transfer mechanism (not shown) may be used to load thewafer 200 into theprocess chamber 201 or unload thewafer 200 from theprocess chamber 201. When thegate valve 244 is closed, an inside of theprocess chamber 201 is configured to be hermetically closed. - Substrate Supporting Unit
- A
susceptor 217 serving as a substrate supporting unit configured to support thewafer 200 is disposed at a lower center of the inside of theprocess chamber 201. Thesusceptor 217 may be, for example, formed of a non-metallic material such as aluminum nitride (A1N), ceramics or quartz so as to reduce metal contamination of thewafer 200. Also, thesusceptor 217 is electrically insulated from thelower container 211. - An inside of the
susceptor 217 is equipped with animpedance electrode 217 c configured to change impedance. Theimpedance electrode 217 c is installed via animpedance variation mechanism 274. Theimpedance variation mechanism 274 includes a coil or variable condenser, and is configured to control an electric potential of thewafer 200 via theimpedance electrode 217 c and thesusceptor 217 by controlling a pattern number of the coil and a capacitance value of the variable condenser. Also, acontroller 221 as will be described below is electrically connected to theimpedance variation mechanism 274. - A
susceptor lift mechanism 268 configured to lift thesusceptor 217 is installed at thesusceptor 217. A throughhole 217 a is installed in thesusceptor 217. At least three wafer lift pins 266 configured to raise or lower thewafer 200 are installed at a bottom surface of the above-describedlower container 211. When thesusceptor 217 is lowered by thesusceptor lift mechanism 268, the throughhole 217 a and the wafer lift pins 266 are disposed so that the wafer lift pins 266 can pass through the throughhole 217 a without coming in contact with thesusceptor 217. - Heating Unit
- A
heater 217 b serving as a heating unit is configured to heat thewafer 200 since theheater 217 b is mounted integrally with an inside of thesusceptor 217. When electric power is supplied to theheater 217 b, a surface of thewafer 200 is configured to be heated to a predetermined temperature (for example, 350° C. to 700° C., preferably 450° C. to 700° C.). Also, a temperature sensor (not shown) is installed at thesusceptor 217. Acontroller 221 as will be described below is electrically connected to theheater 217 b and the temperature sensor. Thecontroller 221 is configured to control electric power to be supplied to theheater 217 b based on temperature information detected by the temperature sensor. - Gas Supply Unit
- A
shower head 236 configured to supply a process gas into theprocess chamber 201 is installed in an upper portion of theprocess chamber 201. Theshower head 236 includes a cap-shapedcover 233, agas introduction section 234, abuffer chamber 237, ashield plate 240 and agas outlet 239. - The
cover 233 is hermetically installed at an opening formed on an upper surface of theupper container 210. Ashield plate 240 is installed below thecover 233. A space formed between thecover 233 and theshield plate 240 is abuffer chamber 237. Thebuffer chamber 237 functions as a dispersion space through which a process gas introduced through thegas introduction section 234 is dispersed. The process gas passing through thebuffer chamber 237 is configured to be supplied into theprocess chamber 201 through thegas outlet 239 arranged at a lateral portion of theshield plate 240. Also, an opening is installed at thecover 233. A downstream end of thegas introduction section 234 is hermetically installed at the opening of thecover 233. A downstream end of thegas supply pipe 232 is connected to an upstream end of thegas introduction section 234 via an O-ring 203 b serving as an encapsulation member. - A downstream end of a nitrogen-containing
gas supply pipe 232 a configured to supply a nitrogen-containing gas such as ammonia gas (NH3 gas) serving as the process gas, a downstream end of a hydrogen-containinggas supply pipe 232 b configured to supply a hydrogen-containing gas such as hydrogen gas (H2 gas) serving as the process gas, and a downstream end of a raregas supply pipe 232 c configured to supply a rare gas, for example, Ar gas serving as an inert gas, are connected to an upstream side of thegas supply pipe 232 so that the downstream ends of the nitrogen-containinggas supply pipe 232 a, the hydrogen-containinggas supply pipe 232 b and the raregas supply pipe 232 c join together at the upstream side of thegas supply pipe 232. Thegas supply pipe 232, the nitrogen-containinggas supply pipe 232 a, the hydrogen-containinggas supply pipe 232 b and the raregas supply pipe 232 c are, for example, formed of a non-metallic material such as quartz or aluminum oxide and a metallic material such as SUS. - An NH3
gas supply source 250 a, amass flow controller 252 a serving as a flow rate control device, and avalve 253 a serving as an opening/closing valve are connected to the nitrogen-containinggas supply pipe 232 a sequentially from an upstream side thereof. A H2gas supply source 250 b, amass flow controller 252 b serving as a flow rate control device, and avalve 253 b serving as an opening/closing valve are connected to the hydrogen-containinggas supply pipe 232 b sequentially from an upstream side thereof. An Argas supply source 250 c, amass flow controller 252 c serving as a flow rate control device, and avalve 253 c serving as an opening/closing valve are connected to the raregas supply pipe 232 c sequentially from an upstream side thereof. - A
controller 221 as will be described below is electrically connected to themass flow controllers 252 a to 252 c and thevalves 253 a to 253 c. Thecontroller 221 is configured to control themass flow controllers 252 a to 252 c and the opening/closing of thevalves 253 a to 253 c so that a flow rate of a gas supplied into theprocess chamber 201 reaches a predetermined flow rate. Thecontroller 221 is configured to allow NH3 gas, H2 gas and Ar gas to be freely supplied into theprocess chamber 201 via thegas supply pipe 232, thebuffer chamber 237 and thegas outlet 239 while allowing themass flow controllers 252 a to 252 c to control a flow rate through the opening/closing of thevalves 253 a to 253 c. - In general, the gas supply unit according to this embodiment includes the
shower head 236, the O-ring 203 b, thegas supply pipe 232, the nitrogen-containinggas supply pipe 232 a, the hydrogen-containinggas supply pipe 232 b, the raregas supply pipe 232 c, themass flow controllers 252 a to 252 c and thevalves 253 a to 253 c. Also, the gas supply unit may further include the NH3gas supply source 250 a, the H2gas supply source 250 b, and the Argas supply source 250 c. - Exhaust Unit
- A
gas exhaust port 235 configured to exhaust a process gas from an inside of theprocess chamber 201 is installed beneath a sidewall of thelower container 211. An upstream end of thegas exhaust pipe 231 configured to exhaust a gas is connected to thegas exhaust port 235. AnAPC 242 serving as a pressure regulator, avalve 243 serving as an opening/closing valve, and avacuum pump 246 serving as an exhaust device are installed at thegas exhaust pipe 231 sequentially from an upstream side thereof. Also, a pressure sensor (not shown) is installed at thegas exhaust pipe 231. Acontroller 221 as will be described below is electrically connected to theAPC 242, thevalve 243, thevacuum pump 246 and the pressure sensor. As thevacuum pump 246 is driven to open thevalve 243, an inside of theprocess chamber 201 may be exhausted. Also, as an opening degree of theAPC 242 is adjusted based on the pressure information detected by the pressure sensor, a pressure value in theprocess chamber 201 may be adjusted. In general, the exhaust unit according to this embodiment includes thegas exhaust port 235, thegas exhaust pipe 231, theAPC 242, and thevalve 243. Also, the exhaust unit may further include thevacuum pump 246. - Excitation Unit
- A
tubular electrode 215 serving as a plasma-generating electrode is installed at an external circumference of the processing container 203 (upper container 210) to surround a plasma-generatingregion 224 in theprocess chamber 201. Thetubular electrode 215 is formed in a tubular shape, for example, a cylindrical shape. Thetubular electrode 215 is connected to a high-frequency power source 273 configured to generate high-frequency electric power via amatching transformer 272 configured to perform matching of impedance. Thetubular electrode 215 functions as a discharge mechanism configured to excite a process gas supplied into theprocess chamber 201 and then supplied to a surface of thewafer 200. - An
upper magnet 216 a and alower magnet 216 b are installed at upper and lower ends of an external surface of thetubular electrode 215, respectively. Each of theupper magnet 216 a and thelower magnet 216 b is formed of a permanent magnet formed in a tubular shape, for example, a ring shape. Theupper magnet 216 a and thelower magnet 216 b have magnetic poles at both ends of theprocess chamber 201 in a radial direction (that is, inner and outer circumferential ends of each magnet). The magnetic poles of theupper magnet 216 a and thelower magnet 216 b are disposed so that the magnetic poles can be formed in opposite directions. That is, the magnetic poles of inner circumferential portions of theupper magnet 216 a and thelower magnet 216 b become different poles. Therefore, a magnetic line of force in a cylindrical axis direction is formed along an inner lateral surface of thetubular electrode 215. - In a place in which a magnetic field is formed by the
upper magnet 216 a and thelower magnet 216 b after the supply of the process gas into theprocess chamber 201 is initiated, a magnetron discharge plasma may be generated at a plasma-generatingregion 224 in theprocess chamber 201 by supplying a high-frequency electric power to thetubular electrode 215 to form an electric field. In this case, the above-described electric field and magnetic field may be allowed to rotate emitted electrons to increase an ionization generation rate of the plasma, thereby generating high-density plasma having a long life span. - In general, the excitation unit according to this embodiment includes the
tubular electrode 215, theupper magnet 216 a, and thelower magnet 216 b. Also, the excitation unit may further include the matchingtransformer 272, and the high-frequency power source 273. - Also, a
shield plate 223 made of a metal configured to effectively shield the electric field and the magnetic field is installed at surroundings of thetubular electrode 215, theupper magnet 216 a and thelower magnet 216 b so that the electric field and magnetic field formed by thetubular electrode 215, theupper magnet 216 a and thelower magnet 216 b cannot have an adverse effect on external environments or other devices such as a processing furnace. - Control Unit
- As shown in
FIG. 10 , thecontroller 221 serving as a control unit is formed as a computer including a central processing unit (CPU) 221 a, a random access memory (RAM) 221 b, amemory device 221 c, and an I/O port 221 d. TheRAM 221 b, thememory device 221 c, and the I/O port 221 d are configured to be able to exchange data with theCPU 221 a via aninternal bus 221 e. For example, a touch panel, mouse, keyboard, operation terminal and the like may be connected as the input/output device 225 to thecontroller 221. Also, a display may be, for example, connected as a display unit to thecontroller 221. - For example, the
memory device 221 c includes a flash memory, a hard disk drive (HDD), and a CD-ROM. A control program configured to control operation of thesubstrate processing apparatus 100 and a process recipe describing the order and conditions for processing a substrate are stored in thememory device 221 c so that the control program and the process recipe is read from thememory device 221 c. Also, the process recipe is combined so that predetermined results is obtained by executing the respective procedures at thecontroller 221 in a substrate processing process as will be described below, and thus functions as a program. Hereinafter, both of the process recipe and the control program are simply referred to as a program. Also, when the term “program” is used in this specification, there are cases in which the program includes only a single process recipe, includes only a single control program, or includes both of the process recipe and the control program. Also, theRAM 221 b is configured as a memory area (work area) to temporarily hold a program or data read by theCPU 221 a. - The I/
O port 221 d is connected to themass flow controllers 252 a to 252 c, thevalves APC 242, thevacuum pump 246, theheater 217 b, the matchingtransformer 272, the high-frequency power source 273, thesusceptor lift mechanism 268, and theimpedance variation mechanism 274, as described above. - The
CPU 221 a is configured to read the process recipe from thememory device 221 c according to input of an operation command from the input/output device 281 while reading the control program from thememory device 221 c and executing the control program. Based on the read contents of the process recipe, theCPU 221 a is configured to control an operation of adjusting an opening degree of theAPC 242 and an opening/closing operation of thevalve 243 and start/stop of thevacuum pump 246 through a signal line A, a raising/lowering operation of thesusceptor lift mechanism 268 through a signal line B, an operation of adjusting electric power supplied into theheater 217 b (a temperature-adjusting operation) based on a temperature sensor or an operation of adjusting an impedance value by means of theimpedance variation mechanism 274 through a signal line C, an opening/closing operation of thegate valve 244 through a signal line D, operations of the matchingtransformer 272 and the high-frequency power source 273 through a signal line E, and an operation of adjusting flow rates of a variety of gases by means of themass flow controllers 252 a to 252 c and an opening/closing operation of thevalves 253 a to 253 c through a signal line F. - Meanwhile, the present invention is not limited to a case in which the
controller 221 is configured as a dedicated computer. Thecontroller 221 may be configured as a general-purpose computer. For example, thecontroller 221 according to this embodiment may be configured by preparing anexternal memory device 226 in which the above-described program is stored (for example, a magnetic disk such as a magnetic tape, a flexible disk or a hard disk, an optical disc such as CD or DVD, an optical magnetic disc such as MO, or a semiconductor memory such as a USB memory or a memory card), and installing a program on a general-purpose computer using the relatedexternal memory device 226. Also, a method of supplying a program to a computer is not limited to a case in which the program is supplied to the computer via theexternal memory device 226. For example, the program may be supplied using a communication means such as the Internet or a dedicated line without using theexternal memory device 226. Also, thememory device 221 c or theexternal memory device 226 is configured as a computer-readable recording medium. Hereinafter, these devices are simply referred to as a recording medium. Also, when the term “recording medium” is used in this specification, there are cases in which the recording medium includes only asingle memory device 221 c, includes only anexternal memory device 226, or includes both of thememory device 221 c and theexternal memory device 226. - Next, a substrate processing process that is carried out as one semiconductor manufacturing process according to this embodiment will be described with reference to
FIG. 2 . This process is carried out using the above-describedsubstrate processing apparatus 100 which is configured as the MMT apparatus. Also, in the following description, operations of respective parts constituting thesubstrate processing apparatus 100 are controlled by thecontroller 221. - Here, one case in which an oxygen-containing layer is modified into an oxynitride layer or a nitride layer when the
wafer 200 which includes a polysilicon film having the oxygen-containing layer formed thereon, is processed using ammonia (NH3) gas as a process gas containing nitrogen and hydrogen atoms and the nitrogen atoms are introduced into the polysilicon film is described. - Substrate Loading/Placing Operation (S10)
- First, the
susceptor 217 is lowered to a transfer position of thewafer 200 so that thewafer lift pin 266 passes through the throughhole 217 a of thesusceptor 217. As a result, thelift pin 266 protrudes from a surface of thesusceptor 217 by a predetermined height. Next, thegate valve 244 is opened, and thewafer 200 is loaded into theprocess chamber 201 using a transfer mechanism (not shown). As a result, thewafer 200 is supported in a horizontal posture on thewafer lift pin 266 protruding from the surface of thesusceptor 217. - A polysilicon film is formed in advance on a surface of the
wafer 200. For example, the polysilicon film is formed using a chemical vapor deposition (CVD) method or an atomic layer deposition (ALD) method of supplying a silicon (Si) source such as monosilane (SiH4) gas and hydrogen gas (H2 gas) to the surface of thewafer 200. - The polysilicon film has an oxygen-containing layer formed on a surface thereof. For example, the oxygen-containing layer is a native oxide layer formed on the polysilicon film by oxygen (O2) in the atmosphere when the oxygen-containing layer is exposed to the atmosphere during transfer of the
wafer 200. A thickness of the oxygen-containing layer is, for example, in a range of 0.5 nm to 2.0 nm. When the thickness of the oxygen-containing layer exceeds 0.5 nm, an effect of modifying an oxygen-containing layer as will be described below into an oxynitride layer or a nitride layer may be easily obtained. - When the
wafer 200 is loaded into theprocess chamber 201, the transfer mechanism is evacuated from theprocess chamber 201, and thegate valve 244 is closed to hermetically close theprocess chamber 201. Thesusceptor lift mechanism 268 is used to raise thesusceptor 217. As a result, thewafer 200 is disposed on a surface of thesusceptor 217. Thereafter, thewafer 200 is raised to a predetermined processing position by raising thesusceptor 217 to a predetermined position. - Also, when the
wafer 200 is loaded into theprocess chamber 201, Ar gas serving as a purge gas may be supplied from the gas supply unit into theprocess chamber 201 while exhausting an inside of theprocess chamber 201 using the exhaust unit. That is, the inside of theprocess chamber 201 is exhausted by driving thevacuum pump 246 and opening thevalve 243. At the same time, thevalve 253 c may be opened to supply the Ar gas into theprocess chamber 201 via thebuffer chamber 237. Therefore, invasion of particles into theprocess chamber 201 or attachment of particles to thewafer 200 may be inhibited. Also, thevacuum pump 246 is always driven until a substrate unloading operation (S60) as will be described below is finished at least from the substrate loading/placing operation (S10). - Heating/Pressure Adjusting Operation (S20)
- Next, electric power is supplied to the
heater 217 b installed inside thesusceptor 217 to heat a surface of thewafer 200 to a predetermined temperature. In this case, thewafer 200 is maintained at a temperature of 350° C. to 700° C., preferably 450° C. to 700° C. When thewafer 200 is maintained at a temperature of 350° C. or more, preferably a temperature of 450° C., for example, the oxygen-containing layer may be modified into an oxynitride layer or a nitride layer, as will be described below. In this case, when the modification is performed to a certain extent, an intake of the excited hydrogen atoms into the oxygen-containing layer may be reduced. In this case, a temperature of theheater 217 b is regulated by controlling an electric power supplied to theheater 217 b based on the temperature information detected by a temperature sensor (not shown). - Also, a pressure is regulated by the
APC 242 so that an inside of theprocess chamber 201 can reach a desired pressure (for example, a range of 1 Pa to 100 Pa, preferably 20 Pa to 100 Pa). In this case, the pressure in theprocess chamber 201 is measured using a pressure sensor (not shown), and an opening degree of theAPC 242 is feedback-controlled based on the measured pressure information. - Modification Operation (S30)
- Here, one case in which NH3 gas is, for example, used as the process gas containing nitrogen and hydrogen atoms will be described. That is, the NH3 gas serving as the nitrogen-containing gas functions as a hydrogen-containing gas according to this embodiment.
- First, the
valve 253 a is opened, and the NH3 gas serving as the process gas is supplied through the nitrogen-containinggas supply pipe 232 a into theprocess chamber 201 via thebuffer chamber 237. In this case, a flow rate of the NH3 gas is adjusted by themass flow controller 252 a so that the flow rate of the NH3 gas can reach a predetermined flow rate (for example, a flow rate of 50 sccm to 1,000 sccm, preferably 100 sccm to 1,000 sccm). - In a place in which a magnetic field is formed by the
upper magnet 216 a and thelower magnet 216 b after the supply of the NH3 gas is initiated, a predetermined high-frequency electric power (for example, a voltage of 100 W to 1,000 W, preferably 100 W to 800 W) is applied from the high-frequency power source 273 to thetubular electrode 215 via the matchingtransformer 272. As a result, a magnetron discharge is generated in theprocess chamber 201, and a high-density plasma is generated at the plasma-generatingregion 224 arranged above thewafer 200. In this case, theimpedance variation mechanism 274 is controlled in advance to have a desired impedance value. - When the plasma is generated in the
process chamber 201 as described above, the NH3 gas supplied into theprocess chamber 201 is excited and activated. Active species (for example, nitrogen radicals (N*), hydrogen radicals (H*), ammonium ions (NH4 +), etc.) are supplied to the polysilicon film and the oxygen-containing layer disposed on thewafer 200. Thus, oxygen (O) atoms are removed (separated) from the polysilicon film and the oxygen-containing layer. When the separated oxygen (O) atoms are replaced with nitrogen (N) atoms, nitridation of a surface of the polysilicon film and nitridation of the oxygen-containing layer are facilitated. - That is, when the active species containing nitrogen (N) atoms such as nitrogen radicals (N*) are supplied to the polysilicon film, a surface of the polysilicon film may be nitrided. Also, the nitrogen radicals (N*) have an effect of separating and removing oxygen (O) atoms from the polysilicon film, for example, using sputtering so as to have high energy. Nitrogen (N) atoms bind to dangling bonds generated when the oxygen (O) atoms are separated by a sputtering effect, thereby further facilitating nitridation of the surface of the polysilicon film.
- In this case, when the active species containing hydrogen (H) atoms such as hydrogen radicals (H*) are supplied to the oxygen-containing layer, the oxygen (O) atoms included in the oxygen-containing layer are separated by a hydrogen reduction reaction. Then, nitrogen (N) atoms bind to dangling bonds generated when the oxygen (O) atoms are separated, and nitridation of the oxygen-containing layer is facilitated, thereby modifying the oxygen-containing layer into an oxynitride layer or a nitride layer. As a result, the oxygen-containing layer may be modified into an oxynitride layer or a nitride layer having a high nitrogen concentration.
- When modification of the oxygen-containing layer is finished with lapse of a predetermined processing time, the supply of an electric power to the
tubular electrode 215 is stopped. Then, thevalve 253 a is closed to stop the supply of the NH3 gas into theprocess chamber 201. - Purging Operation (S40)
- When the above-described modification operation (S30) is completed, an inside of the
process chamber 201 continues to be exhausted using thegas exhaust pipe 231 when thevalve 243 is kept open so as to discharge a residual gas in theprocess chamber 201. That is, until a concentration of the process gas in theprocess chamber 201 reaches a concentration equal to or less than a predetermined value, the inside of theprocess chamber 201 is exhausted to discharge the residual gas. For example, the inside of theprocess chamber 201 is exhausted until the concentration of the process gas reaches a concentration at which a substrate unloading operation (S60) as will be described below is performed for unloading thewafer 200 from theprocess chamber 201. Also, for example, the inside of theprocess chamber 201 may be exhausted until the process gas is free from at least a surface of thewafer 200. In this case, the discharging of the residual gas from theprocess chamber 201 may be facilitated by opening thevalve 253 c and supplying an inert gas such as Ar gas serving as a purge gas into theprocess chamber 201. - Temperature Lowering/Atmospheric Pressure Returning Operation (S50)
- When the purging operation (S40) is completed, an opening degree of the
APC 242 is adjusted to return a pressure in theprocess chamber 201 to atmospheric pressure, and also lower a temperature of thewafer 200 to a predetermined temperature. More particularly, the pressure in theprocess chamber 201 is increased to atmospheric pressure by controlling opening/closing of theAPC 242 and thevalve 243 of the exhaust unit based on the pressure information detected by a pressure sensor (not shown) while supplying the Ar gas serving as the inert gas into theprocess chamber 201 when thevalve 253 c is kept open. Then, a temperature of thewafer 200 is lowered by controlling an electric power supplied to theheater 217 b. - Substrate Unloading Operation (S60)
- Subsequently, the
wafer 200 is supported by thewafer lift pin 266 protruding from a surface of thesusceptor 217 by lowering thesusceptor 217 to a transfer position of thewafer 200. Then, thegate valve 244 is opened, and thewafer 200 is unloaded from theprocess chamber 201 using a transfer mechanism (not shown). As a result, the substrate processing process according to this embodiment is finished. As described above, the conditions such as a temperature of thewafer 200, a pressure in theprocess chamber 201, a flow rate of each gas, an electric power applied to thetubular electrode 215, and a processing time are optionally adjusted according to a material of a layer to be modified, a thickness of a layer, etc. - (3) Effects According to this Embodiment
- According to this embodiment, one or a plurality of the following effects are achieved.
- (a) This embodiment is configured so that the process gas containing nitrogen and hydrogen atoms is supplied into the
process chamber 201 using the gas supply unit and excited using the excitation unit, and the excited process gas is supplied to a surface of thewafer 200 which includes a polysilicon film having an oxygen-containing layer formed thereon. Therefore, in addition to nitriding a surface of the polysilicon film, the oxygen-containing layer of the polysilicon film may be modified into an oxynitride layer or nitride layer having a high nitrogen concentration (that is, a low oxygen concentration). - As a result, oxidation resistance of the polysilicon film may be improved. Therefore, when the processed
wafer 200 according to this embodiment is, for example, formed on a flash memory, that is, when the thin film having an ONO structure as described above is formed on thewafer 200 and etched, and recovered by oxidation, formation of bird beaks between the polysilicon film and the thin film having an ONO structure may be inhibited. As a result, when the processedwafer 200 according to this embodiment becomes a flash memory, for example, input and erasing characteristics of electrons may be improved. - (b) According to this embodiment, when the excited nitrogen and hydrogen atoms are supplied to the
wafer 200 which includes a polysilicon film having a native oxide layer formed thereon as the oxygen-containing layer, the native oxide layer may be modified into an oxynitride layer or a nitride layer, and a surface of the polysilicon film may be nitride at the same time. - (c) According to this embodiment, the
wafer 200 is heated using theheater 217 b so that a surface temperature of thewafer 200 can reach a temperature of 350° C. to 700° C. As a result, the oxygen-containing layer is, for example, modified into an oxynitride layer or a nitride layer. In this case, when the modification is performed to a certain extent, the intake of the excited hydrogen atoms into the oxygen-containing layer may be reduced. - Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiment, and can be variously modified without departing from the scope of the present invention. Hereinafter, other embodiments of the present invention will be described. In this embodiment, the
wafer 200 is also processed, using the MMT apparatus as the substrate processing apparatus, by exciting the process gas. - In the above-described embodiments, the
wafer 200 which includes a polysilicon film having a native oxide layer formed thereon as the oxygen-containing layer is used to modify the oxygen-containing layer into an oxynitride layer or nitride layer having a high nitrogen concentration, and simultaneously nitride a surface of the polysilicon film. - However, the native oxide layer may have different thicknesses according to a circuit pattern formed on a surface of the
wafer 200, the kind of thewafer 200, the kind of a film formed on a surface of thewafer 200, and a leaving time of thewafer 200. Thus, a thickness of the surface of thewafer 200 may not be controlled so that the surface of thewafer 200 can have a uniform thickness distribution. - Therefore, after the native oxide layer formed on the
wafer 200 is removed using diluted hydrofluoric acid (DHF, obtained by diluting hydrofluoric acid (HF) with pure water), for example, a pre-cleaning process of removing impurities such as metals or organic matters using ozone water, may be performed on thewafer 200. When the surface of thewafer 200 is pre-cleaned as described above, the above-described uneven native oxide layer may be removed. However, the oxygen-containing layer such as a chemical oxide layer may be formed on the polysilicon film. However, even the chemical oxide layer may interfere with formation of a high-concentration nitride layer on the polysilicon film. - Accordingly, in this embodiment, the
wafer 200 which includes a polysilicon film having an oxygen-containing layer formed thereon as the chemical oxide layer is used, and the oxygen-containing layer is modified into an oxynitride layer or nitride layer having a high nitrogen concentration by supplying a process gas containing nitrogen and hydrogen atoms. - Since the chemical oxide layer is formed by the pre-cleaning process under the constant conditions unlike the above-described native oxide layer, the chemical oxide layer formed on every
wafer 200 has a uniform thickness. Thus, a thickness of the chemical oxide layer may be controlled so that the chemical oxide layer can be uniformly distributed on the surface of thewafer 200. The chemical oxide layer has a thickness of approximately 0.5 nm to 2 nm, and a thickness of 1 nm on average. Therefore, when the process gas containing nitrogen and hydrogen atoms is supplied into theprocess chamber 201 using the gas supply unit and excited using the excitation unit, and the excited process gas is supplied to thewafer 200 which includes a polysilicon film having a chemical oxide layer formed thereon as the oxygen-containing layer, the chemical oxide layer may be modified into an oxynitride layer or nitride layer having a high nitrogen concentration, and a surface of the polysilicon film may be uniformly nitrided with good reproducibility. - Also, when the chemical oxide layer is formed on the polysilicon film provided in the
wafer 200, formation of the native oxide layer on the polysilicon film may be inhibited. - Although the embodiments have been described above, the present invention is not limited to the above-described embodiments, and can be variously modified without departing from the scope of the present invention.
- In the above-described embodiments, one case in which the ammonia gas (NH3 gas) is used as the process gas containing nitrogen and hydrogen atoms has been described, but the present invention is not limited to the above-described embodiments. That is, for example, monomethylhydrazine gas (CH6N2 gas) may be used as the process gas containing nitrogen and hydrogen atoms.
- For example, a gas obtained, for example, by mixing a nitrogen-containing gas and a hydrogen-containing gas may also be used as the process gas. More particularly, ammonia gas (NH3 gas) or nitrogen gas (N2 gas) may be, for example, used as the nitrogen-containing gas, and hydrogen gas (H2 gas) may be, for example, used as the hydrogen-containing gas. That is, as shown in
FIG. 1 , thevalve 253 a may be opened to supply the NH3 gas into theprocess chamber 201 through the nitrogen-containinggas supply pipe 232 a. At the same time, thevalve 253 b may be opened to supply the H2 gas into theprocess chamber 201 through the hydrogen-containinggas supply pipe 232 b. As a result, since nitrogen radicals (N*) and hydrogen radicals (H*) may be supplied to thewafer 200 which includes a polysilicon film having an oxygen-containing layer formed thereon, the oxygen-containing layer may be modified into an oxynitride layer or nitride layer in addition to nitridation of the polysilicon film. - In this case, the
mass flow controllers wafer 200 may be uniformly processed according to a thickness of the oxygen-containing layer, and a content of oxygen in the oxygen-containing layer. - Also, the
mass flow controllers - In addition, when the process gas is supplied into the
process chamber 201, the Ar gas serving as the inert gas may be supplied together into theprocess chamber 201 via thebuffer chamber 237 by opening thevalve 253 c and adjusting the flow rate using themass flow controller 252 c. Therefore, the conditions such as a concentration and a flow velocity of a gas supplied into theprocess chamber 201 may be freely adjusted with no variation in the flow rates and ratios of the nitrogen-containing gas and the hydrogen-containing gas. - Also, although the
wafer 200 is configured to be heated by theheater 217 b installed inside thesusceptor 217 in the above-described embodiments, the present invention is not limited to the embodiments. For example, as shown inFIG. 7 , thewafer 200 may be heated by irradiation with infrared rays from alamp heating unit 280 in addition to theheater 217 b. In this case, thelamp heating unit 280 may be configured to irradiate an inside of theprocess chamber 201 with light via alight transmitting window 278 installed above theprocess chamber 201, that is, installed on a surface of theupper container 210. When thelamp heating unit 280 is used together with theheater 217 b, thewafer 200 may be heated in a shorter time compared to when thewafer 200 is heated using only theheater 217 b. Also, thewafer 200 may be heated using only thelamp heating unit 280 without installing theheater 217 b. Also, thelamp heating unit 280 is configured to be controlled by thecontroller 221 through the signal line G. - Furthermore, in the above-described embodiments, one case in which the
wafer 200 is processed using thesubstrate processing apparatus 100 configured as the MMT apparatus has been described, but the present invention is not limited thereto. For example, the substrate processing operation may be performed using an inductively coupled plasma (ICP) device or an electron cyclotron resonance (ECR) device. -
FIG. 8 shows an ICP-typeplasma processing device 300 that is the substrate processing apparatus according to another embodiment of the present invention. For the requirements of components having the same functions as in the embodiments, the components having the same functions have the same reference numerals. Therefore, detailed description of the configuration according to this embodiment is omitted. Also, illustration of the gas supply unit is omitted. The ICP-typeplasma processing device 300 according to this embodiment generates plasma by supplying an electric power via each of matchingtransformers frequency power sources dielectric coils dielectric coil 315 a is arranged outside a ceiling side of theprocessing container 203. Thedielectric coil 315 b is arranged outside an external circumferential wall of theprocessing container 203. According to this embodiment, the process gas containing nitrogen and hydrogen atoms is supplied through thegas supply pipe 232 into theprocess chamber 201 via thegas introduction section 234. Also, when high-frequency electric power flows in thedielectric coils -
FIG. 9 shows an ECR-typeplasma processing device 400 that is the substrate processing apparatus according to still another embodiment of the present invention. For the requirements of components having the same functions as in the embodiments, the components having the same functions have the same reference numerals. Therefore, detailed description of the configuration according to this embodiment is omitted. Also, illustration of the gas supply unit is omitted. The ECR-typeplasma processing device 400 according to this embodiment includes a matchingtransformer 272 b configured to supply microwaves to generate plasma, a high-frequency power source 273 b, amicrowave introduction pipe 415 a and adielectric coil 415 b. Themicrowave introduction pipe 415 a is arranged outside a ceiling wall of theprocessing container 203. Thedielectric coil 415 b is arranged outside an external circumferential wall of theprocessing container 203. According to this embodiment, the process gas containing nitrogen and hydrogen atoms is supplied through thegas supply pipe 232 into theprocess chamber 201 via thegas introduction section 234. Also,microwaves 418 a are introduced into themicrowave introduction pipe 415 a before/after the supply of the gas, and themicrowaves 418 a are emitted to theprocess chamber 201. The active species may be generated by the high-frequency electric power from themicrowaves 418 a and thedielectric coil 415 b by exciting the supplied process gas into a plasma state. - Hereinafter, Examples of the present invention will be described with reference to
FIGS. 3 to 6 . - In Examples of the present invention, NH3 gas excited by an excitation unit was supplied to a
wafer 200 which included a polysilicon film having an oxygen-containing layer formed thereon, thewafer 200 was heated to 350° C., and substrate processing was performed to modify an oxygen-containing layer into an oxynitride layer (Example 1). Also, substrate processing was performed under the same conditions as in Example 1 to modify an oxygen-containing layer into an oxynitride layer (Example 2), except that a heating temperature of thewafer 200 was set to 450° C. Substrate processing was performed under the same conditions as in Example 1 to modify an oxygen-containing layer into an oxynitride layer (Example 3), except that a heating temperature of thewafer 200 was set to 550° C. Also, a case in which an N2 gas excited by an excitation unit was supplied to a wafer which included a polysilicon film having an oxygen-containing layer formed thereon, the wafer was heated to 350° C., and substrate processing was performed to modify an oxygen-containing layer into an oxynitride layer is described as Comparative Example. - For Examples 1 to 3 and Comparative Example as described above, the composition analysis of the oxynitride layers formed by the modification in a thickness direction was performed. The results are shown in
FIGS. 3 to 6 . That is,FIGS. 3 to 6 are graphs illustrating the element concentrations (atomic %) of the oxynitride layers in a depth direction when the oxynitride layers according to Examples 1 to 3 and Comparative Example of the present invention were measured using high resolution-Rutherford backscattering spectrometry (HR-RBS). - Next, the compositional ratios of the above-described oxynitride layers of Examples 1 to 3 and Comparative Example are listed in Table 1. Table 1 lists the compositions (atomic %) of a silicon element (Si), an oxygen element (O) and a nitrogen element (N) in each of the oxynitride layers of Examples 1 to 3 and Comparative Example, which are calculated from
FIGS. 3 to 6 . -
TABLE 1 compositions (atomic %) silicon element oxygen element nitrogen element Example 1 41.4 25.6 32.9 Example 2 42.7 15.2 42.1 Example 3 43.3 14.1 42.6 Comparative 42.8 22.8 34.4 Example - As described in Example 2 (
FIG. 4 ) and Example 3 (FIG. 5 ), it could be seen that, in modification in which a heating temperature of thewafer 200 was 450° C. or more, the oxygen-containing layer could be modified into an oxynitride layer having a lower oxygen concentration and higher nitrogen concentration, compared with Comparative Example (FIG. 6 ). Also, as described in Example 1 (FIG. 3 ), it could be seen that even when the modification in which the heating temperature of thewafer 200 was 350° C. was performed, a slight effect of lowering an oxygen concentration and increasing a nitrogen concentration was expected when a depth was 2 nm or more. As described above, it could be seen fromFIGS. 3 to 6 and Table 1 that the oxygen-containing layer might be modified into an oxynitride layer having a high nitrogen concentration by supplying a process gas containing nitrogen and hydrogen atoms to thewafer 200 which included the polysilicon film having an oxygen-containing layer formed thereon so as to perform the modification on the oxygen-containing layer. - Hereinafter, preferred embodiments of the present invention will be further stated.
- According to one embodiment of the present invention, there is provided a substrate processing apparatus including: a process chamber accommodating a substrate including a polysilicon film having an oxygen-containing layer formed thereon; a heating unit installed in the process chamber to heat the substrate; a gas supply unit configured to supply a process gas containing nitrogen and hydrogen to the substrate in the process chamber; an excitation unit configured to excite the process gas supplied into the process chamber; an exhaust unit configured to exhaust an inside of the process chamber; and a control unit configured to control at least the heating unit, the gas supply unit, the excitation unit and the exhaust unit so as to modify the oxygen-containing layer into an oxynitride layer or a nitride layer by heating the substrate to a predetermined temperature using the heating unit, exciting the process gas supplied by the gas supply unit using the excitation unit, and supplying the process gas excited by the excitation unit to the substrate.
- Preferably, the oxygen-containing layer is a native oxide layer.
- Preferably, the oxygen-containing layer is an oxide layer formed by cleaning the substrate.
- Also, preferably, the predetermined temperature is in a range of 350° C. to 700° C.
- Also, preferably, the control unit controls a ratio of hydrogen atoms of active species containing hydrogen among the active species included in the process gas excited by the excitation unit such that the ratio ranges from 10% to 90%.
- Also, preferably, the oxygen-containing layer has a thickness ranging from 0.5 nm to 2.0 nm.
- According to another embodiment, there is provided a method of manufacturing a semiconductor device including: loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber while heating the substrate and exhausting an inside of the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- According to another embodiment, a method of manufacturing a semiconductor device including loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; heating the substrate; supplying a process gas containing nitrogen and hydrogen into the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- According to still another embodiment, there is provided a program for sequentially executing procedures in a computer, the procedures including: loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber while heating the substrate and exhausting an inside of the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- According to still another embodiment, there is provided a non-transitory computer-readable recording medium storing a program that causes a computer to perform a process, the process including: loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber while heating the substrate and exhausting an inside of the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- According to still another embodiment, there is provided a non-transitory computer-readable recording medium storing a program that causes a computer to perform a process, the process including: heating a substrate accommodated in a process chamber, the substrate including a polysilicon film having an oxygen-containing layer thereon; supplying a process gas containing nitrogen and hydrogen into the process chamber; and modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
- According to yet another embodiment, there is provided an apparatus for manufacturing a semiconductor device including: a process chamber accommodating a substrate including a polysilicon film having an oxygen-containing layer formed thereon; a heating unit installed in the process chamber to heat the substrate; a gas supply unit configured to supply a process gas containing nitrogen and hydrogen to the substrate in the process chamber; an excitation unit configured to excite the process gas supplied into the process chamber; an exhaust unit configured to exhaust an inside of the process chamber; and a control unit configured to control at least the heating unit, the gas supply unit, the excitation unit and the exhaust unit so as to modify the oxygen-containing layer into an oxynitride layer or a nitride layer by heating the substrate to a predetermined temperature using the heating unit, exciting the process gas supplied by the gas supply unit using the excitation unit, and supplying the process gas excited by the excitation unit to the substrate.
- According to the substrate processing apparatus and the method and program for manufacturing a semiconductor device according to the present invention, the oxidation resistance of a polysilicon film can be improved by modifying an oxygen-containing layer into an oxynitride layer or a nitride layer having a high nitrogen concentration.
Claims (18)
1. A substrate processing apparatus comprising:
a process chamber accommodating a substrate including a polysilicon film having an oxygen-containing layer formed thereon;
a heating unit installed in the process chamber to heat the substrate;
a gas supply unit configured to supply a process gas containing nitrogen and hydrogen to the substrate in the process chamber;
an excitation unit configured to excite the process gas supplied into the process chamber;
an exhaust unit configured to exhaust an inside of the process chamber; and
a control unit configured to control at least the heating unit, the gas supply unit, the excitation unit and the exhaust unit so as to modify the oxygen-containing layer into an oxynitride layer or a nitride layer by heating the substrate to a predetermined temperature using the heating unit, exciting the process gas supplied by the gas supply unit using the excitation unit, and supplying the process gas excited by the excitation unit to the substrate.
2. The substrate processing apparatus according to claim 1 , wherein the oxygen-containing layer is a native oxide layer.
3. The substrate processing apparatus according to claim 1 , wherein the oxygen-containing layer is an oxide layer formed by cleaning the substrate.
4. The substrate processing apparatus according to claim 1 , wherein the control unit controls a ratio of hydrogen atoms of active species containing hydrogen among the active species included in the process gas excited by the excitation unit such that the ratio ranges from 10% to 90%.
5. The substrate processing apparatus according to claim 1 , wherein the oxygen-containing layer has a thickness ranging from 0.5 nm to 2.0 nm.
6. The substrate processing apparatus according to claim 1 , wherein the excitation unit is configured to magnetron-discharge the process gas.
7. A method of manufacturing a semiconductor device comprising:
loading a substrate into a process chamber, the substrate including a polysilicon film having an oxygen-containing layer formed thereon;
heating the substrate;
supplying a process gas containing nitrogen and hydrogen into the process chamber; and
modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
8. The method according to claim 7 , wherein the oxygen-containing layer is a native oxide layer.
9. The method according to claim 7 , wherein the oxygen-containing layer is an oxide layer formed by cleaning the substrate.
10. The method according to claim 7 , wherein the modifying the oxygen-containing layer is performed by controlling a ratio of hydrogen atoms of active species containing hydrogen among the active species included in the excited process gas such that the ratio ranges from 10% to 90%.
11. The method according to claim 7 , wherein the oxygen-containing layer has a thickness ranging from 0.5 nm to 2.0 nm.
12. The method according to claim 7 , wherein the modifying the oxygen-containing layer is performed by magnetron-discharging the process gas.
13. A non-transitory computer-readable recording medium storing a program that causes a computer to perform a process, the process comprising:
heating a substrate accommodated in a process chamber, the substrate including a polysilicon film having an oxygen-containing layer thereon;
supplying a process gas containing nitrogen and hydrogen into the process chamber; and
modifying the oxygen-containing layer into an oxynitride layer or a nitride layer by exciting the process gas supplied into the process chamber and supplying an excited process gas to a surface of the substrate.
14. The non-transitory computer-readable recording medium according to claim 13 , wherein the oxygen-containing layer is a native oxide layer.
15. The non-transitory computer-readable recording medium according to claim 13 , wherein the oxygen-containing layer is an oxide layer formed by cleaning the substrate.
16. The non-transitory computer-readable recording medium according to claim 13 , wherein modifying the oxygen-containing layer includes controlling a ratio of hydrogen atoms of active species containing hydrogen among the active species included in the excited process gas such that the ratio ranges from 10% to 90%.
17. The non-transitory computer-readable recording medium according to claim 13 , wherein the oxygen-containing layer has a thickness ranging from 0.5 nm to 2.0 nm.
18. The non-transitory computer-readable recording medium according to claim 13 , wherein modifying the oxygen-containing layer into the oxynitride layer or the nitride layer includes magnetron-discharging the process gas.
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Also Published As
Publication number | Publication date |
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KR20130033971A (en) | 2013-04-04 |
JP2013084918A (en) | 2013-05-09 |
US20160172191A1 (en) | 2016-06-16 |
KR101444765B1 (en) | 2014-09-26 |
US10049870B2 (en) | 2018-08-14 |
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