US20130075934A1 - Semiconductor device - Google Patents
Semiconductor device Download PDFInfo
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- US20130075934A1 US20130075934A1 US13/423,027 US201213423027A US2013075934A1 US 20130075934 A1 US20130075934 A1 US 20130075934A1 US 201213423027 A US201213423027 A US 201213423027A US 2013075934 A1 US2013075934 A1 US 2013075934A1
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- wiring
- semiconductor device
- reference potential
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- shield
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5221—Crossover interconnections
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5225—Shielding layers formed together with wiring layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- Exemplary embodiments described herein generally relate to a semiconductor device and in particular to the semiconductor device including multi-layer wirings.
- a reference potential wiring or the like is provided with shield wirings to reduce the coupling noise from neighboring wirings and thereby to mitigate the negative influence of the noise.
- a reference wiring has a non-negligible negative influence of noise from shield wirings set at a fixed potential, when the shield wirings are located too close to the reference wiring.
- a distance is secured between the shield wiring and the reference wiring or the like.
- a coupling capacitance is increased due to a “sneak path” effect in a portion where a reference wiring, for example, of an upper layer intersects a noise source wiring, for example, of an underlying layer.
- the reference potential is affected more by the noise source wiring, and causes a malfunction of the semiconductor device at some timing.
- FIG. 1 is a layout chart illustrating a semiconductor device according to a first embodiment
- FIG. 2 is a layout chart illustrating a semiconductor device according to a second embodiment
- FIG. 3 is a layout chart illustrating a semiconductor device according to a third embodiment
- FIG. 4 is a layout chart illustrating a semiconductor device according to a fourth embodiment
- FIG. 5 is a layout chart illustrating a semiconductor device according to a fifth embodiment
- FIG. 6 is another layout chart illustrating the semiconductor device according to the fifth embodiment.
- FIG. 7 is a layout chart illustrating a semiconductor device combined the first embodiment and the second embodiment
- FIG. 8 is a layout chart illustrating a semiconductor device combined the third embodiment and the fourth embodiment
- FIG. 9 is a layout chart illustrating a semiconductor device according to a modification of the fifth embodiment.
- FIG. 10 is a layout chart illustrating a semiconductor device according to the third embodiment and the fifth embodiment.
- FIG. 11 is a layout chart illustrating a semiconductor device combined the fourth embodiment and the fifth embodiment.
- a semiconductor device in one embodiment, includes a first wiring provided in a first wiring layer along a first direction, a second wiring provided in a second wiring layer along a second direction orthogonal to the first direction, the second wiring intersecting with the first wiring at a first intersect portion, and a third wiring provided close to and along the second wiring in the second wiring layer, the third wiring intersecting with the first wiring at a second intersect portion, wherein a distance between the second wiring in the first intersection portion and the third wiring in the second intersection portion is narrower than a distance between the second wiring another than the first intersection portion and the third wiring another than the second intersection portion.
- FIG. 1 is a layout chart showing a semiconductor device according to a first embodiment.
- FIG. 1 mainly shows an example of a reference potential wiring 13 (a reference wiring) and portions related to coupling noise.
- FIG. 1 shows only two wiring layers stacked with an insulating layer interposed therebetween among multiple wiring layers, for simplification.
- the hatched portion in FIG. 1 represents a wiring layout provided in the underlying wiring layer.
- the underlying wiring layer and the upper wiring layer are covered with insulating films, and have the insulating layer interposed therebetween.
- the semiconductor device includes shield lines 12 a, 12 b and a signal wiring 11 , all of which are provided in the underlying wiring layer.
- the semiconductor device also includes a reference potential wiring 13 and shield lines 14 a, 14 b, all of which are provided in the upper wiring layer.
- the signal wiring 11 is provided in the underlying wiring layer and extends in a first direction.
- the shield lines 12 a, 12 b are provided in the underlying wiring layer and extend close to and along the signal wiring 11 .
- the two shield lines 12 a, 12 b are provided respectively on the two sides of the signal wiring 11 in such a manner as to face each other over the signal wiring 11 .
- the reference potential wiring 13 is provided in the upper wiring layer and extends in a second direction substantially orthogonal to the first direction.
- the upper wiring layer is located above the underlying wiring layer with an insulating film located in between.
- the reference potential wiring 13 three-dimensionally intersects with the signal wiring 11 in the underlying layer at an intersection portion 15 c with the insulating film located in between.
- the shield lines 14 a, 14 b are provided in the upper wiring layer and extend close to and along the reference potential wiring 13 .
- the two shield lines 14 a, 14 b are provided respectively on the two sides of the reference potential wiring 13 in such a manner as to face each other over the reference potential wiring 13 .
- the shield lines 14 a, 14 b cross the signal wiring 11 in the underlying layer respectively at intersection portions 15 a, 15 b with the insulating film located in between. Further, the intersection portions 15 a, 15 b can be arranged wider or narrower than an overlapped portion with the signal wiring 11 in plane view.
- the signal wiring 11 is the wiring which can be a noise source to provide electrical influence as coupling noise to the reference potential wiring 13 via the coupling capacitance at the intersection portion 15 c.
- the signal wiring 11 can affect or can be affected by other nearby wirings NW provided in the same underlying wiring layer.
- the shield lines 12 a, 12 b are provided respectively on the two sides of the signal wiring 11 so as to electrically shield the signal wiring 11 from such other nearby wirings NW.
- the shield lines 12 a, 12 b are electrically connected to a fixed potential such as the earth potential Vss.
- the reference potential wiring 13 is a wiring to transfer the reference potential which is referred to by various portions in the semiconductor device.
- the reference potential wiring 13 can be electrically affected by the signal wiring 11 via the coupling capacitance at the intersection portion 15 c.
- the reference potential wiring 13 can be affected by other nearby wirings NW provided in the same upper wiring layer.
- the shield lines 14 a, 14 b are provided respectively on the two sides of the reference potential wiring 13 so as to electrically shield the reference potential wiring 13 from such other nearby wirings.
- the shield lines 14 a, 14 b are electrically connected to a fixed potential such as the earth potential Vss.
- Each of the shield lines 14 a, 14 b is separated away from the reference potential wiring 13 by a distance D. Even when the potential of the shield line 14 a or 14 b is fluctuated by the influence of the coupling noise, securing the above-mentioned distance D can prevent the fluctuation in the potential of the shield line 14 a or 14 b from easily affecting the potential of the reference potential wiring 13 . Such a distance D is not secured in the areas near the intersection portions 15 a, 15 b.
- the shield line 14 a has a larger wiring width w near the intersection portion 15 a of both the shield line 14 a and the signal wiring 11 than the wiring width W in other portions (i.e., w>W). Hence, the shield line 14 a is separated away from the reference potential wiring 13 by a smaller distance d near the intersection portion 15 c than the distance D in the other portions (i.e., d ⁇ D). In this case, all portions of shield line 14 a with the wide width W can be included in the intersection portion 15 a.
- the shield line 14 b has a larger wiring width w near the intersection portion 15 b of both the shield line 14 b and the signal wiring 11 than the wiring width W in the other portions (i.e., w>W). Hence, the shield line 14 b is separated away from the reference potential wiring 13 by a smaller distance d near the intersection portion 15 c than the distance D in the other portions (i.e., d ⁇ D). In this case, all portions of shield line 14 b with the wide width W can be included in the intersection portion 15 b.
- the reference potential wiring 13 is separated away from each of the shield lines 14 a, 14 b by a narrower distance in the intersection portion 15 c of both the signal wiring 11 and the reference potential wiring 13 .
- the line of the electric force which would otherwise be directed from the signal wiring 11 to the reference potential wiring 13 can be directed to the shield lines 14 a, 14 b, and thus the coupling capacitance of both the signal wiring 11 and the reference potential wiring 13 caused by the sneak path effect can be reduced.
- the coupling capacitance is reduced in the intersection portion 15 c, so that the influence of the coupling noise between the wirings of the multilayer wirings can be reduced.
- the distance between the reference potential wiring 13 and each shield line 19 is widened in the portions other than the intersection portion 15 c, so that the influence of the noise from the shield line 14 can be reduced.
- the reduction of the influence of the coupling noise can be accomplished without narrowing any of the reference potential wiring 13 and the signal wiring 11 in the intersection portion 15 c. Accordingly, both the resistance of the reference potential wiring 13 and the resistance of the signal wiring 11 can be kept low.
- the shield lines 14 a, 14 b are provided respectively on the two sides of the reference potential wiring 13 , but the embodiment is not limited to the above case. The embodiment is also applicable to only one of the shield lines.
- FIG. 2 is a layout chart showing a semiconductor device according to a second embodiment.
- FIG. 2 mainly shows an example of a reference potential wiring 23 (a reference wiring) and portions of the wiring related to coupling noise Like as FIG. 1 .
- FIG. 2 shows only the two wiring layers while omitting the insulating films.
- the semiconductor device includes a signal wiring 21 and shield lines 22 a, 22 b, all of which are provided on the underlying wiring layer.
- the semiconductor device also includes a reference potential wiring 23 and shield lines 24 a, 24 b, all of which are provided in the upper wiring layer.
- the signal wiring 21 , the reference potential wiring 23 , and the shield lines 22 a, 22 b, 24 a, 24 b according to the second embodiment have their respective functions and the positional relationship on the layout which are similar to those in the first embodiment. Hence, no detailed description is given of the functions and the positions.
- the second embodiment is different from the first embodiment in which, instead of the shield lines 24 a, 24 b provided in the upper wiring layer, the shield lines 22 a, 22 b provided in the underlying wiring layer are provided more closely to the signal wiring 21 near an intersection portion 25 c of both the signal wiring 21 and the reference potential wiring 23 .
- the shield lines 22 a, 22 b are provided in the underlying wiring layer and extend close to and along the signal wiring 21 .
- the shield lines 22 a, 22 b are provided respectively on the two sides of the signal wiring 21 in such a manner as to face each other over the signal wiring 21 .
- the shield lines 22 a, 22 b three-dimensionally cross the reference potential wiring 23 on the upper layer respectively at intersection portions 25 a, 25 b with the insulating film located in between.
- Each of the shield lines 22 a, 22 b is separated away from the signal wiring 21 by a distance D.
- the shield line 22 a has a larger wiring width w near the intersection portion 25 a of both the shield line 22 a and the reference potential wiring 23 than the wiring width W in e other portions (i.e., w>W). Hence, the shield line 22 a is separated away from the signal wiring 21 by a smaller distance d near the intersection portion 25 c than the distance Din the other portions (i.e., d ⁇ D). In this case, all portions of shield line 22 a with the wide width W can be included in the intersection portion 25 a.
- the shield line 22 b has a larger wiring width w near the intersection portion 25 b of both the shield line 22 b and the reference potential wiring 23 than the wiring width W in the other portions (i.e., w>W). Hence, the shield line 22 b is separated away from the signal wiring 21 by a smaller distance d near the intersection portion 25 c than the distance D in the other portions (i.e., d ⁇ D). In this case, all portions of shield line 22 b with the wide width W can be included in the intersection portion 25 b.
- the signal wiring 21 is separated away from each of the shield lines 22 a, 22 b by a narrower distance in the intersection portion 25 c of both the signal wiring 21 and the reference potential wiring 23 .
- the line of the electric force which would otherwise be directed from the reference potential wiring 23 to the signal wiring 21 can be directed to the shield lines 22 a, 22 b, and thus the coupling capacitance of both the signal wiring 21 and the reference potential wiring 23 caused by the sneak path effect can be reduced.
- Such a layout is particularly effective when the reference potential wiring 23 is wide and has a long overlapped area with the signal wiring 21 in the intersection portion 25 c of both the reference potential wiring 23 and the signal wiring 21 .
- the coupling capacitance is reduced in the intersection portion 25 c, so that the influence of the coupling noise between the wirings of the multilayer wirings can be reduced.
- the distance between the signal wiring 21 and each shield line 22 is widened in the portions other than the intersection portion 25 c, so that the load capacitance between the signal wiring 21 and each shield line 22 can be reduced.
- the reduction of the influence of the coupling noise can be accomplished without narrowing any of the reference potential wiring 23 and the signal wiring 21 in the intersection portion 25 c. Accordingly, both the resistance of the reference potential wiring 23 and the resistance of the signal wiring 21 can be kept low.
- the shield lines 22 a, 22 b are provided respectively on the two sides of the signal wiring 21 , but the invention is not limited to the above case. The invention is also applicable to only one of the shield lines.
- FIG. 3 is a layout chart showing a semiconductor device according to a third embodiment.
- FIG. 3 mainly shows an example of a reference potential wiring 33 (a reference wiring) and portions of the wiring related to coupling noise Like as FIG. 1 .
- FIG. 3 shows only the two wiring layers while omitting the insulating films.
- the semiconductor device includes a signal wiring 31 and shield lines 32 a, 32 b, all of which are provided on the underlying wiring layer.
- the semiconductor device also includes a reference potential wiring 33 and shield lines 34 a, 34 b, all of which are provided on the upper wiring layer.
- the signal wiring 31 , the reference potential wiring 33 , and the shield lines 32 a, 32 b, 34 a, 34 b according to the third embodiment have their respective functions and positional relationships on the layout which are similar to those in the first embodiment. Hence, no detailed description is given of the functions and the positions.
- the third embodiment is different from the first embodiment in which the reference potential wiring 33 provided in the upper wiring layer has a narrower portion near an intersection portion 35 c of both the reference potential wiring 33 and the signal wiring 31 than in other portions.
- the reference potential wiring 33 has a smaller wiring width w 1 near the intersection portion 35 c of both the reference potential wiring 33 and the signal wiring 31 than the wiring width W 1 in the other portions (i.e., w 1 ⁇ W 1 ).
- the wiring width w 1 of the reference potential wiring 33 near the intersection portion 35 c is set at such a value which the reference potential wiring 33 can have a resistance allowable under a design rule.
- the shield line 34 a has a larger wiring width w 2 near the intersection portion 35 a of both the shield line 34 a and the signal wiring 31 than the wiring width W 2 in the other portions (i.e., w 2 >W 2 ). Hence, the shield line 34 a is separated away from the reference potential wiring 33 by a smaller distance d near the intersection portion 35 c than the distance D in the other portions (i.e., d ⁇ D). In this case, all portions of shield line 34 a with the wide width W 2 can be included in the intersection portion 35 a.
- the shield line 34 b has a larger wiring width w 2 near the intersection portion 35 b of both the shield line 34 b and the signal wiring 31 than the wiring width W 2 in the other portions (i.e., w 2 >W 2 ). Hence, the shield line 34 b is separated away from the reference potential wiring 33 by a smaller distance d near the intersection portion 35 c than the distance D in the other portions (i.e., d ⁇ D). In this case, all portions of shield line 34 b with the wide width W 2 can be included in the intersection portion 35 b.
- the signal wiring 31 is separated away from each of the shield lines 34 a, 34 b by a narrower distance in the intersection portion 35 c of both the signal wiring 31 and the reference potential wiring 33 .
- the line of the electric force which would otherwise be directed from the signal wiring 31 to the reference potential wiring 33 can be directed to the shield lines 34 a, 34 b.
- the coupling capacitance of both the signal wiring 31 and the reference potential wiring 33 caused by the sneak path effect can be reduced.
- the influence of the noise from each shield line 34 can be reduced by widening the distance between the reference potential wiring 33 and each shield line 34 .
- the reference potential wiring 33 has a smaller wiring width in the intersection portion 35 c than in the other portions, the area where the signal wiring 31 and the reference potential wiring 33 overlap each other can be reduced and thus the coupling capacitance can be reduced further.
- Such a layout is particularly effective when the signal wiring 31 is wide and has a long overlapped area with the reference potential wiring 33 in the intersection portion 35 c.
- the influence of the coupling noise between the wirings of the multilayer wirings can be reduced further.
- the shield lines 34 a, 34 b are provided respectively on the two sides of the reference potential wiring 33 , but the embodiment is not limited to the above case. The embodiment is also applicable to only one of the shield lines.
- FIG. 4 is a layout chart showing a semiconductor device according to a fourth embodiment.
- FIG. 4 mainly shows an example of a reference potential wiring 43 (a reference wiring) and portions of the wiring related to coupling noise Like as FIG. 1 .
- FIG. 4 shows only the two wiring layers while omitting the insulating films.
- the semiconductor device includes a signal wiring 41 and shield lines 42 a, 42 b, all of which are provided on the underlying wiring layer.
- the semiconductor device also includes a reference potential wiring 43 and shield lines 44 a, 44 b, all of which are provided in the upper wiring layer.
- the signal wiring 41 , the reference potential wiring 43 , and the shield lines 42 a, 42 b, 44 a, 44 b according to the fourth embodiment have their respective functions and positional relationships on the layout which are similar to those in the second embodiment. Hence, no detailed description is given of the functions and the positions.
- the fourth embodiment is different from the second embodiment in which the signal wiring 41 provided in the underlying wiring layer has a narrower portion near an intersection portion 45 c of both the signal wiring 41 and the reference potential wiring 43 than in other portions.
- the signal wiring has a smaller wiring width w 1 near the intersection portion 45 c of both the signal wiring 41 and the reference potential wiring 43 than the wiring width W 1 in the other portions (i.e., w 1 ⁇ W 1 ).
- the wiring width w 1 of the signal wiring 41 near the intersection portion 45 c is set in such a manner which the signal wiring 41 can have a resistance value which is allowable in light of design requirements.
- the shield line 42 a has a larger wiring width w 2 near the intersection portion 45 a of both the shield line 42 a and the reference potential wiring 43 than the wiring width W 2 in the other portions (i.e., w 2 >W 2 ).
- the shield line 42 a is separated away from the signal wiring 41 by a smaller distance d near the intersection portion 45 c than the distance D in the other portions (i.e., d ⁇ D).
- all portions of shield line 42 a with the wide width W 2 can be included in the intersection portion 45 a.
- the shield line 42 b has a larger wiring width w 2 near an intersection portion 45 b of both the shield line 42 b and the reference potential wiring 43 than the wiring width W 2 in the other portions (i.e., w 2 >W 2 ).
- the shield line 42 b is separated away from the signal wiring 41 by a smaller distance d near the intersection portion 45 c than the distance D in the other portions (i.e., d ⁇ D).
- all portions of shield line 42 b with the wide width W 2 can be included in the intersection portion 45 b.
- the signal wiring 41 is separated away from each of the shield lines 42 a, 42 b by a narrower distance in the intersection portion 45 c of both the signal wiring 41 and the reference potential wiring 43 .
- the line of the electric force which would otherwise be directed from the reference potential wiring 43 to the signal wiring 41 can be directed to the shield lines 42 a, 42 b, and thus the coupling capacitance of both the signal wiring 41 and the reference potential wiring 43 caused by the sneak path effect can be reduced.
- the load capacitance between the signal wiring 41 and each shield line 42 can be reduced by widening the distance between the signal wiring 41 and each shield line 42 .
- the signal wiring 41 has a smaller wiring width in the intersection portion 45 c than in the other portions, the area where the signal wiring 41 and the reference potential wiring 43 overlap each other can be reduced and thus the coupling capacitance can be reduced further.
- Such a layout is particularly effective when the reference potential wiring 43 is wide and has a long overlapped area with the in the intersection portion 45 c of both the reference potential wiring 43 and the signal wiring 41 .
- the influence of the coupling noise between the wirings of the multilayer wirings can be reduced further.
- the shield lines 42 a, 42 b are provided respectively on the two sides of the signal wiring 41 , but the invention is not limited to the above layout. The invention is also applicable to only one of the shield lines.
- FIG. 5 is a layout chart showing a semiconductor device according to a fifth embodiment.
- FIG. 5 mainly shows an example of a reference potential wiring 53 (a reference wiring) and portions of the wiring related to coupling noise like as FIG. 1 .
- FIG. 5 shows only the two wiring layers while omitting the insulating films.
- the semiconductor device includes a signal wiring 51 and shield lines 52 a, 52 b, all of which are provided in the underlying wiring layer.
- the semiconductor device also includes a reference potential wiring 53 and shield lines 54 a, 54 b, all of which are provided in the upper wiring layer.
- the signal wiring 51 , the reference potential wiring 53 , and the shield lines 52 a, 52 b, 54 a, 54 b according to the fifth embodiment have their respective functions and positional relationships on the layout which are similar to those in the first embodiment. Hence, no detailed description is given of the functions and the positions.
- the fifth embodiment is different from the first embodiment in which the shield lines 54 a, 54 b are provided to have U-shapes which project toward the reference potential wiring 53 in positions near intersection portions 55 a, 55 b of both the signal wiring 51 and the shield lines 54 a, 54 b, instead of being provided with larger wiring widths.
- the shield line 54 a is provided to have a U-shape projecting toward the reference potential wiring 53 near the intersection portion 55 a of both the shield line 54 a and the signal wiring 51 .
- the shield line 54 a projects downward in FIG. 5 .
- the shield line 54 a is separated away from the reference potential wiring 53 by a smaller distance d near an intersection portion 55 c than the distance D in other portions (i.e., d ⁇ D).
- the shield line 54 b is provided to have a U-shape projecting toward the reference potential wiring 53 near the intersection portion 55 b of both the shield line 54 b and the signal wiring 51 .
- the shield line 54 b projects upward in FIG. 5 .
- the shield line 54 b is separated away from the reference potential wiring 53 by a smaller distance d near the intersection portion 55 c than the distance D in the other portions (i.e., d ⁇ D).
- the reference potential wiring 53 is separated away from each of the shield lines 54 a, 54 b by a narrower distance in the intersection portion 55 c of both the signal wiring 51 and the reference potential wiring 53 .
- the line of the electric force which would otherwise be directed from the signal wiring 51 to the reference potential wiring 53 can be directed to the shield lines 59 a, 59 b, and thus the coupling capacitance of both the signal wiring 51 and the reference potential wiring 53 caused by the sneak path effect can be reduced.
- the formation of the U-shape shield lines 54 a, 54 b improves the degree of freedom of the layout because, as shown in FIG. 6 for example, a contact wiring 67 and a contact 66 with the signal wiring 51 in the underlying layer wiring layer can be provided in a space inside the U-shape shield line 54 a or 54 b.
- the shield lines 54 a, 54 b are provided respectively on the two sides of the reference potential wiring 53 , but the embodiment is not limited to the above case. The embodiment is also applicable to only one of the shield lines.
- the shapes of the shield lines 54 a, 54 b provided in the upper wiring layer are modified into U-shapes, but the embodiment is not limited only to the above-described configuration.
- the shapes of the shield lines 52 a, 52 b provided in the underlying wiring layer can be modified into U-shapes.
- the modified shape of the shield lines 54 a, 54 b provided in the upper wiring layer are modified into U-shapes in the fifth embodiment, the modified shape does not have to be a U-shape. Any shape is acceptable as long as the shield line 54 a, 54 b are at least modified into such shapes which come close to the reference potential wiring 53 near the intersection portion 55 a, 55 b.
- the wiring layout of either the upper wiring layer or the underlying wiring layer is modified.
- the embodiments are not limited only to such configuration.
- the wiring layouts of both of the wiring layers can be modified independently of each other.
- each shield line is electrically connected to a fixed potential, but the embodiments are not limited only to such a configuration.
- any wiring can be employed as long as the wiring can serve as a shield line immediately before and after a particular timing when the reference potential is referred to, that is, at a timing when the influence of the coupling noise at the intersection portion would cause a malfunction of a system.
- the wiring affected by the coupling noise is the reference potential wiring, but the embodiments are not limited only to such a premise.
- the embodiment is applicable to any wiring which can be affected by coupling noise at an intersection portion and can cause a malfunction of a system.
- the distance (d) between each shield line on the underlying layer and the signal wiring can be shortened and the distance (d) between the shield line on the upper layer and the reference potential wiring can be shortened at the same time.
- the influence of the coupling noise in the intersection portion can be reduced further.
- Embodiments can be carried out in a combination of the third embodiment and the fourth embodiment as shown in FIG. 8 .
- the intersection portion 35 C it is also possible to reduce the distance (d 3 ) between each shield line and the signal wiring in the underlying layer and the width of the signal wiring from the distance (D 3 ), and to reduce the distance (d) between each shield line and the reference potential in the upper layer and the width of the reference potential wiring from the distance (D), at the same time.
- the influence of the coupling noise in the intersection portion can be reduced further.
- the configuration of the fifth embodiment can be applied to both of the wirings in the upper layer and the wirings in the underlying layer as shown in FIG. 9 .
- each shield line is made to come close to the signal wiring in the underlying layer while each shield line is made to come close to the reference potential wiring in the upper layer.
- the influence of the coupling noise in the intersection portion can be reduced further.
- Embodiments can be carried out in a combination of the third embodiment and the fifth embodiment and a combination of the fourth embodiment and the fifth embodiment as shown in FIGS. 10 , 11 , respectively.
- the embodiments are applicable not only to the case where the reference potential wiring intersects the signal wiring but also to the case where the reference potential wiring intersects a high voltage wiring, and to the case where the signal wiring intersects the high voltage wiring.
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Abstract
In one embodiment, a semiconductor device includes a first wiring provided in a first wiring layer along a first direction, a second wiring provided in a second wiring layer along a second direction orthogonal to the first direction, the second wiring intersecting with the first wiring at a first intersect portion, and a third wiring provided close to and along the second wiring in the second wiring layer, the third wiring intersecting with the first wiring at a second intersect portion, wherein a distance between the second wiring in the first intersection portion and the third wiring in the second intersection portion is narrower than a distance between the second wiring another than the first intersection portion and the third wiring another than the second intersection portion.
Description
- This application is based upon and claims the benefit of priority from prior Japanese Patent Application No. 2011-211666, filed on Sep. 27, 2011, the entire contents of which are incorporated herein by reference.
- Exemplary embodiments described herein generally relate to a semiconductor device and in particular to the semiconductor device including multi-layer wirings.
- Semiconductor devices of recent years have undergone a non-negligible increase in a parasitic capacitance due to the narrowing of the distance between wirings and the thinning of a film between wiring layers along with advancement of micro-fabrication in the manufacturing process. Therefore, a reference potential wiring or the like is provided with shield wirings to reduce the coupling noise from neighboring wirings and thereby to mitigate the negative influence of the noise.
- However, in the semiconductor devices, a reference wiring has a non-negligible negative influence of noise from shield wirings set at a fixed potential, when the shield wirings are located too close to the reference wiring.
- When a shield wiring is located too close to a signal wiring or a high-voltage line which transmits high-voltage electricity, the parasitic load may increase, leading to an increase in power consumption.
- Hence, for some of conventional semiconductor devices, a distance is secured between the shield wiring and the reference wiring or the like. In this regard, in a conventional semiconductor device with a multilayer wiring, a coupling capacitance is increased due to a “sneak path” effect in a portion where a reference wiring, for example, of an upper layer intersects a noise source wiring, for example, of an underlying layer.
- Accordingly, the reference potential is affected more by the noise source wiring, and causes a malfunction of the semiconductor device at some timing.
-
FIG. 1 is a layout chart illustrating a semiconductor device according to a first embodiment; -
FIG. 2 is a layout chart illustrating a semiconductor device according to a second embodiment; -
FIG. 3 is a layout chart illustrating a semiconductor device according to a third embodiment; -
FIG. 4 is a layout chart illustrating a semiconductor device according to a fourth embodiment; -
FIG. 5 is a layout chart illustrating a semiconductor device according to a fifth embodiment; -
FIG. 6 is another layout chart illustrating the semiconductor device according to the fifth embodiment. -
FIG. 7 is a layout chart illustrating a semiconductor device combined the first embodiment and the second embodiment; -
FIG. 8 is a layout chart illustrating a semiconductor device combined the third embodiment and the fourth embodiment; -
FIG. 9 is a layout chart illustrating a semiconductor device according to a modification of the fifth embodiment; -
FIG. 10 is a layout chart illustrating a semiconductor device according to the third embodiment and the fifth embodiment; and -
FIG. 11 is a layout chart illustrating a semiconductor device combined the fourth embodiment and the fifth embodiment. - In one embodiment, a semiconductor device includes a first wiring provided in a first wiring layer along a first direction, a second wiring provided in a second wiring layer along a second direction orthogonal to the first direction, the second wiring intersecting with the first wiring at a first intersect portion, and a third wiring provided close to and along the second wiring in the second wiring layer, the third wiring intersecting with the first wiring at a second intersect portion, wherein a distance between the second wiring in the first intersection portion and the third wiring in the second intersection portion is narrower than a distance between the second wiring another than the first intersection portion and the third wiring another than the second intersection portion.
- Embodiments of the invention will be described with reference to the drawings.
- (First Embodiment)
-
FIG. 1 is a layout chart showing a semiconductor device according to a first embodiment.FIG. 1 mainly shows an example of a reference potential wiring 13 (a reference wiring) and portions related to coupling noise. In addition,FIG. 1 shows only two wiring layers stacked with an insulating layer interposed therebetween among multiple wiring layers, for simplification. The hatched portion inFIG. 1 represents a wiring layout provided in the underlying wiring layer. The underlying wiring layer and the upper wiring layer are covered with insulating films, and have the insulating layer interposed therebetween. - The semiconductor device according to the first embodiment includes
shield lines signal wiring 11, all of which are provided in the underlying wiring layer. The semiconductor device also includes a referencepotential wiring 13 andshield lines - The
signal wiring 11 is provided in the underlying wiring layer and extends in a first direction. Theshield lines signal wiring 11. The twoshield lines signal wiring 11 in such a manner as to face each other over thesignal wiring 11. - The reference
potential wiring 13 is provided in the upper wiring layer and extends in a second direction substantially orthogonal to the first direction. The upper wiring layer is located above the underlying wiring layer with an insulating film located in between. To put it differently, the reference potential wiring 13 three-dimensionally intersects with thesignal wiring 11 in the underlying layer at anintersection portion 15 c with the insulating film located in between. - The
shield lines potential wiring 13. The twoshield lines potential wiring 13 in such a manner as to face each other over the referencepotential wiring 13. As shown inFIG. 1 , theshield lines signal wiring 11 in the underlying layer respectively atintersection portions signal wiring 11 in plane view. - The
signal wiring 11 is the wiring which can be a noise source to provide electrical influence as coupling noise to thereference potential wiring 13 via the coupling capacitance at theintersection portion 15 c. - The
signal wiring 11 can affect or can be affected by other nearby wirings NW provided in the same underlying wiring layer. Theshield lines signal wiring 11 so as to electrically shield thesignal wiring 11 from such other nearby wirings NW. Theshield lines - The reference
potential wiring 13 is a wiring to transfer the reference potential which is referred to by various portions in the semiconductor device. Thereference potential wiring 13 can be electrically affected by thesignal wiring 11 via the coupling capacitance at theintersection portion 15 c. - The
reference potential wiring 13 can be affected by other nearby wirings NW provided in the same upper wiring layer. Theshield lines potential wiring 13 so as to electrically shield the referencepotential wiring 13 from such other nearby wirings. Theshield lines shield lines potential wiring 13 by a distance D. Even when the potential of theshield line shield line potential wiring 13. Such a distance D is not secured in the areas near theintersection portions - The
shield line 14 a has a larger wiring width w near theintersection portion 15 a of both theshield line 14 a and thesignal wiring 11 than the wiring width W in other portions (i.e., w>W). Hence, theshield line 14 a is separated away from the referencepotential wiring 13 by a smaller distance d near theintersection portion 15 c than the distance D in the other portions (i.e., d<D). In this case, all portions ofshield line 14 a with the wide width W can be included in theintersection portion 15 a. - The
shield line 14 b has a larger wiring width w near theintersection portion 15 b of both theshield line 14 b and thesignal wiring 11 than the wiring width W in the other portions (i.e., w>W). Hence, theshield line 14 b is separated away from the referencepotential wiring 13 by a smaller distance d near theintersection portion 15 c than the distance D in the other portions (i.e., d<D). In this case, all portions ofshield line 14 b with the wide width W can be included in theintersection portion 15 b. - As described above, the reference
potential wiring 13 is separated away from each of theshield lines intersection portion 15 c of both thesignal wiring 11 and the referencepotential wiring 13. Hence the line of the electric force which would otherwise be directed from thesignal wiring 11 to thereference potential wiring 13 can be directed to theshield lines signal wiring 11 and thereference potential wiring 13 caused by the sneak path effect can be reduced. - According to the first embodiment, the coupling capacitance is reduced in the
intersection portion 15 c, so that the influence of the coupling noise between the wirings of the multilayer wirings can be reduced. In addition, the distance between the referencepotential wiring 13 and each shield line 19 is widened in the portions other than theintersection portion 15 c, so that the influence of the noise from the shield line 14 can be reduced. - In addition, according to the first embodiment, the reduction of the influence of the coupling noise can be accomplished without narrowing any of the reference
potential wiring 13 and thesignal wiring 11 in theintersection portion 15 c. Accordingly, both the resistance of the referencepotential wiring 13 and the resistance of thesignal wiring 11 can be kept low. - In the first embodiment, the shield lines 14 a, 14 b are provided respectively on the two sides of the reference
potential wiring 13, but the embodiment is not limited to the above case. The embodiment is also applicable to only one of the shield lines. - (Second Embodiment)
-
FIG. 2 is a layout chart showing a semiconductor device according to a second embodiment.FIG. 2 mainly shows an example of a reference potential wiring 23 (a reference wiring) and portions of the wiring related to coupling noise Like asFIG. 1 . In addition,FIG. 2 shows only the two wiring layers while omitting the insulating films. - The semiconductor device according to the second embodiment includes a
signal wiring 21 andshield lines potential wiring 23 andshield lines - The
signal wiring 21, the referencepotential wiring 23, and the shield lines 22 a, 22 b, 24 a, 24 b according to the second embodiment have their respective functions and the positional relationship on the layout which are similar to those in the first embodiment. Hence, no detailed description is given of the functions and the positions. The second embodiment is different from the first embodiment in which, instead of the shield lines 24 a, 24 b provided in the upper wiring layer, the shield lines 22 a, 22 b provided in the underlying wiring layer are provided more closely to thesignal wiring 21 near anintersection portion 25 c of both thesignal wiring 21 and the referencepotential wiring 23. - The shield lines 22 a, 22 b are provided in the underlying wiring layer and extend close to and along the
signal wiring 21. The shield lines 22 a, 22 b are provided respectively on the two sides of thesignal wiring 21 in such a manner as to face each other over thesignal wiring 21. As shown inFIG. 2 , the shield lines 22 a, 22 b three-dimensionally cross the referencepotential wiring 23 on the upper layer respectively atintersection portions signal wiring 21 by a distance D. Even when the potential of theshield line shield line signal wiring 21. Such a distance D is not secured in the areas near theintersection portions - The
shield line 22 a has a larger wiring width w near theintersection portion 25 a of both theshield line 22 a and the referencepotential wiring 23 than the wiring width W in e other portions (i.e., w>W). Hence, theshield line 22 a is separated away from thesignal wiring 21 by a smaller distance d near theintersection portion 25 c than the distance Din the other portions (i.e., d<D). In this case, all portions ofshield line 22 a with the wide width W can be included in theintersection portion 25 a. - The
shield line 22 b has a larger wiring width w near theintersection portion 25 b of both theshield line 22 b and the referencepotential wiring 23 than the wiring width W in the other portions (i.e., w>W). Hence, theshield line 22 b is separated away from thesignal wiring 21 by a smaller distance d near theintersection portion 25 c than the distance D in the other portions (i.e., d<D). In this case, all portions ofshield line 22 b with the wide width W can be included in theintersection portion 25 b. - As described above, the
signal wiring 21 is separated away from each of the shield lines 22 a, 22 b by a narrower distance in theintersection portion 25 c of both thesignal wiring 21 and the referencepotential wiring 23. Hence, the line of the electric force which would otherwise be directed from the referencepotential wiring 23 to thesignal wiring 21 can be directed to the shield lines 22 a, 22 b, and thus the coupling capacitance of both thesignal wiring 21 and the referencepotential wiring 23 caused by the sneak path effect can be reduced. Such a layout is particularly effective when the referencepotential wiring 23 is wide and has a long overlapped area with thesignal wiring 21 in theintersection portion 25 c of both the referencepotential wiring 23 and thesignal wiring 21. - According to the second embodiment, the coupling capacitance is reduced in the
intersection portion 25 c, so that the influence of the coupling noise between the wirings of the multilayer wirings can be reduced. In addition, the distance between thesignal wiring 21 and each shield line 22 is widened in the portions other than theintersection portion 25 c, so that the load capacitance between thesignal wiring 21 and each shield line 22 can be reduced. - According to the second embodiment, the reduction of the influence of the coupling noise can be accomplished without narrowing any of the reference
potential wiring 23 and thesignal wiring 21 in theintersection portion 25 c. Accordingly, both the resistance of the referencepotential wiring 23 and the resistance of thesignal wiring 21 can be kept low. - In the second embodiment, the shield lines 22 a, 22 b are provided respectively on the two sides of the
signal wiring 21, but the invention is not limited to the above case. The invention is also applicable to only one of the shield lines. - (Third Embodiment)
-
FIG. 3 is a layout chart showing a semiconductor device according to a third embodiment.FIG. 3 mainly shows an example of a reference potential wiring 33 (a reference wiring) and portions of the wiring related to coupling noise Like asFIG. 1 . In addition,FIG. 3 shows only the two wiring layers while omitting the insulating films. - The semiconductor device according to the third embodiment includes a
signal wiring 31 andshield lines potential wiring 33 andshield lines - The
signal wiring 31, the referencepotential wiring 33, and the shield lines 32 a, 32 b, 34 a, 34 b according to the third embodiment have their respective functions and positional relationships on the layout which are similar to those in the first embodiment. Hence, no detailed description is given of the functions and the positions. The third embodiment is different from the first embodiment in which the referencepotential wiring 33 provided in the upper wiring layer has a narrower portion near anintersection portion 35 c of both the referencepotential wiring 33 and thesignal wiring 31 than in other portions. - Specifically, as shown in
FIG. 3 , the referencepotential wiring 33 has a smaller wiring width w1 near theintersection portion 35 c of both the referencepotential wiring 33 and thesignal wiring 31 than the wiring width W1 in the other portions (i.e., w1<W1). The wiring width w1 of the referencepotential wiring 33 near theintersection portion 35 c is set at such a value which the referencepotential wiring 33 can have a resistance allowable under a design rule. - The
shield line 34 a has a larger wiring width w2 near theintersection portion 35 a of both theshield line 34 a and thesignal wiring 31 than the wiring width W2 in the other portions (i.e., w2>W2). Hence, theshield line 34 a is separated away from the referencepotential wiring 33 by a smaller distance d near theintersection portion 35 c than the distance D in the other portions (i.e., d<D). In this case, all portions ofshield line 34 a with the wide width W2 can be included in theintersection portion 35 a. - The
shield line 34 b has a larger wiring width w2 near theintersection portion 35 b of both theshield line 34 b and thesignal wiring 31 than the wiring width W2 in the other portions (i.e., w2>W2). Hence, theshield line 34 b is separated away from the referencepotential wiring 33 by a smaller distance d near theintersection portion 35 c than the distance D in the other portions (i.e., d<D). In this case, all portions ofshield line 34 b with the wide width W2 can be included in theintersection portion 35 b. - As described above, the
signal wiring 31 is separated away from each of the shield lines 34 a, 34 b by a narrower distance in theintersection portion 35 c of both thesignal wiring 31 and the referencepotential wiring 33. Hence, the line of the electric force which would otherwise be directed from thesignal wiring 31 to the referencepotential wiring 33 can be directed to the shield lines 34 a, 34 b. Thus the coupling capacitance of both thesignal wiring 31 and the referencepotential wiring 33 caused by the sneak path effect can be reduced. In the portions other than theintersection portion 35 c, the influence of the noise from each shield line 34 can be reduced by widening the distance between the referencepotential wiring 33 and each shield line 34. - Since the reference
potential wiring 33 has a smaller wiring width in theintersection portion 35 c than in the other portions, the area where thesignal wiring 31 and the referencepotential wiring 33 overlap each other can be reduced and thus the coupling capacitance can be reduced further. - Such a layout is particularly effective when the
signal wiring 31 is wide and has a long overlapped area with the referencepotential wiring 33 in theintersection portion 35 c. - According to the third embodiment, the influence of the coupling noise between the wirings of the multilayer wirings can be reduced further.
- In the third embodiment, the shield lines 34 a, 34 b are provided respectively on the two sides of the reference
potential wiring 33, but the embodiment is not limited to the above case. The embodiment is also applicable to only one of the shield lines. - (Fourth Embodiment)
-
FIG. 4 is a layout chart showing a semiconductor device according to a fourth embodiment.FIG. 4 mainly shows an example of a reference potential wiring 43 (a reference wiring) and portions of the wiring related to coupling noise Like asFIG. 1 . In addition,FIG. 4 shows only the two wiring layers while omitting the insulating films. - The semiconductor device according to the fourth embodiment includes a
signal wiring 41 andshield lines potential wiring 43 andshield lines - The
signal wiring 41, the referencepotential wiring 43, and the shield lines 42 a, 42 b, 44 a, 44 b according to the fourth embodiment have their respective functions and positional relationships on the layout which are similar to those in the second embodiment. Hence, no detailed description is given of the functions and the positions. The fourth embodiment is different from the second embodiment in which thesignal wiring 41 provided in the underlying wiring layer has a narrower portion near anintersection portion 45 c of both thesignal wiring 41 and the referencepotential wiring 43 than in other portions. - Specifically, as shown in
FIG. 4 , the signal wiring has a smaller wiring width w1 near theintersection portion 45 c of both thesignal wiring 41 and the referencepotential wiring 43 than the wiring width W1 in the other portions (i.e., w1<W1). The wiring width w1 of thesignal wiring 41 near theintersection portion 45 c is set in such a manner which thesignal wiring 41 can have a resistance value which is allowable in light of design requirements. - The
shield line 42 a has a larger wiring width w2 near theintersection portion 45 a of both theshield line 42 a and the referencepotential wiring 43 than the wiring width W2 in the other portions (i.e., w2>W2). Hence, theshield line 42 a is separated away from thesignal wiring 41 by a smaller distance d near theintersection portion 45 c than the distance D in the other portions (i.e., d<D). In this case, all portions ofshield line 42 a with the wide width W2 can be included in theintersection portion 45 a. - The
shield line 42 b has a larger wiring width w2 near anintersection portion 45 b of both theshield line 42 b and the referencepotential wiring 43 than the wiring width W2 in the other portions (i.e., w2>W2). Hence, theshield line 42 b is separated away from thesignal wiring 41 by a smaller distance d near theintersection portion 45 c than the distance D in the other portions (i.e., d<D). In this case, all portions ofshield line 42 b with the wide width W2 can be included in theintersection portion 45 b. - As described above, the
signal wiring 41 is separated away from each of the shield lines 42 a, 42 b by a narrower distance in theintersection portion 45 c of both thesignal wiring 41 and the referencepotential wiring 43. Hence, the line of the electric force which would otherwise be directed from the referencepotential wiring 43 to thesignal wiring 41 can be directed to the shield lines 42 a, 42 b, and thus the coupling capacitance of both thesignal wiring 41 and the referencepotential wiring 43 caused by the sneak path effect can be reduced. Moreover, in the portions other than theintersection portion 45 c, the load capacitance between thesignal wiring 41 and each shield line 42 can be reduced by widening the distance between thesignal wiring 41 and each shield line 42. - In addition, since the
signal wiring 41 has a smaller wiring width in theintersection portion 45 c than in the other portions, the area where thesignal wiring 41 and the referencepotential wiring 43 overlap each other can be reduced and thus the coupling capacitance can be reduced further. - Such a layout is particularly effective when the reference
potential wiring 43 is wide and has a long overlapped area with the in theintersection portion 45 c of both the referencepotential wiring 43 and thesignal wiring 41. - According to the fourth embodiment, the influence of the coupling noise between the wirings of the multilayer wirings can be reduced further.
- In the fourth embodiment, the shield lines 42 a, 42 b are provided respectively on the two sides of the
signal wiring 41, but the invention is not limited to the above layout. The invention is also applicable to only one of the shield lines. - (Fifth Embodiment)
-
FIG. 5 is a layout chart showing a semiconductor device according to a fifth embodiment.FIG. 5 mainly shows an example of a reference potential wiring 53 (a reference wiring) and portions of the wiring related to coupling noise like asFIG. 1 . In addition,FIG. 5 shows only the two wiring layers while omitting the insulating films. - The semiconductor device according to the fifth embodiment includes a
signal wiring 51 andshield lines potential wiring 53 andshield lines - The
signal wiring 51, the referencepotential wiring 53, and the shield lines 52 a, 52 b, 54 a, 54 b according to the fifth embodiment have their respective functions and positional relationships on the layout which are similar to those in the first embodiment. Hence, no detailed description is given of the functions and the positions. The fifth embodiment is different from the first embodiment in which the shield lines 54 a, 54 b are provided to have U-shapes which project toward the referencepotential wiring 53 in positions nearintersection portions signal wiring 51 and the shield lines 54 a, 54 b, instead of being provided with larger wiring widths. - As shown in
FIG. 5 , theshield line 54 a is provided to have a U-shape projecting toward the referencepotential wiring 53 near theintersection portion 55 a of both theshield line 54 a and thesignal wiring 51. To put it differently, theshield line 54 a projects downward inFIG. 5 . Hence, theshield line 54 a is separated away from the referencepotential wiring 53 by a smaller distance d near anintersection portion 55 c than the distance D in other portions (i.e., d<D). - Likewise, the
shield line 54 b is provided to have a U-shape projecting toward the referencepotential wiring 53 near theintersection portion 55 b of both theshield line 54 b and thesignal wiring 51. To put it differently, theshield line 54 b projects upward inFIG. 5 . Hence, theshield line 54 b is separated away from the referencepotential wiring 53 by a smaller distance d near theintersection portion 55 c than the distance D in the other portions (i.e., d<D). - As described above, the reference
potential wiring 53 is separated away from each of the shield lines 54 a, 54 b by a narrower distance in theintersection portion 55 c of both thesignal wiring 51 and the referencepotential wiring 53. Hence, the line of the electric force which would otherwise be directed from thesignal wiring 51 to the referencepotential wiring 53 can be directed to the shield lines 59 a, 59 b, and thus the coupling capacitance of both thesignal wiring 51 and the referencepotential wiring 53 caused by the sneak path effect can be reduced. - In addition, the formation of the
U-shape shield lines FIG. 6 for example, a contact wiring 67 and acontact 66 with thesignal wiring 51 in the underlying layer wiring layer can be provided in a space inside theU-shape shield line - According to the fifth embodiment, effects which are similar to those of the first embodiment can be obtained. In addition, it is possible to improve the degree of freedom of the wiring layout while reducing the layout area.
- In the fifth embodiment, the shield lines 54 a, 54 b are provided respectively on the two sides of the reference
potential wiring 53, but the embodiment is not limited to the above case. The embodiment is also applicable to only one of the shield lines. - In the fifth embodiment, the shapes of the shield lines 54 a, 54 b provided in the upper wiring layer are modified into U-shapes, but the embodiment is not limited only to the above-described configuration. Alternatively, the shapes of the shield lines 52 a, 52 b provided in the underlying wiring layer can be modified into U-shapes.
- In addition, though the shapes of the shield lines 54 a, 54 b provided in the upper wiring layer are modified into U-shapes in the fifth embodiment, the modified shape does not have to be a U-shape. Any shape is acceptable as long as the
shield line potential wiring 53 near theintersection portion - In the first to the fifth embodiments, the wiring layout of either the upper wiring layer or the underlying wiring layer is modified. However, the embodiments are not limited only to such configuration. The wiring layouts of both of the wiring layers can be modified independently of each other.
- In the first to the fifth embodiments, each shield line is electrically connected to a fixed potential, but the embodiments are not limited only to such a configuration. For example, any wiring can be employed as long as the wiring can serve as a shield line immediately before and after a particular timing when the reference potential is referred to, that is, at a timing when the influence of the coupling noise at the intersection portion would cause a malfunction of a system.
- In the first to the fifth embodiments, the wiring affected by the coupling noise is the reference potential wiring, but the embodiments are not limited only to such a premise. The embodiment is applicable to any wiring which can be affected by coupling noise at an intersection portion and can cause a malfunction of a system.
- It is also possible to carry out a combination of the first embodiment and the second embodiment as shown in
FIG. 7 . For example, at the intersection portion 15C, the distance (d) between each shield line on the underlying layer and the signal wiring can be shortened and the distance (d) between the shield line on the upper layer and the reference potential wiring can be shortened at the same time. As a consequence, the influence of the coupling noise in the intersection portion can be reduced further. - Embodiments can be carried out in a combination of the third embodiment and the fourth embodiment as shown in
FIG. 8 . For example, at the intersection portion 35C, it is also possible to reduce the distance (d3) between each shield line and the signal wiring in the underlying layer and the width of the signal wiring from the distance (D3), and to reduce the distance (d) between each shield line and the reference potential in the upper layer and the width of the reference potential wiring from the distance (D), at the same time. As a consequence, the influence of the coupling noise in the intersection portion can be reduced further. - The configuration of the fifth embodiment can be applied to both of the wirings in the upper layer and the wirings in the underlying layer as shown in
FIG. 9 . For example, at the intersection portion 55C, each shield line is made to come close to the signal wiring in the underlying layer while each shield line is made to come close to the reference potential wiring in the upper layer. As a consequence, the influence of the coupling noise in the intersection portion can be reduced further. In addition, it is also possible to improve the degree of freedom of the wiring layout. - Embodiments can be carried out in a combination of the third embodiment and the fifth embodiment and a combination of the fourth embodiment and the fifth embodiment as shown in
FIGS. 10 , 11, respectively. - Moreover, the embodiments are applicable not only to the case where the reference potential wiring intersects the signal wiring but also to the case where the reference potential wiring intersects a high voltage wiring, and to the case where the signal wiring intersects the high voltage wiring.
- While certain embodiments have been described, these embodiments have been presented by way of example only, and are not intended to limit the scope of the inventions. Indeed, the novel embodiments described herein may be embodied in a variety of other forms; furthermore, various omissions, substitutions and changes in the form of the embodiments described herein may be made without departing from the spirit of the inventions. The accompanying claims and their equivalents are intended to cover such forms or modifications as would fall within the scope and spirit of the inventions.
Claims (18)
1. A semiconductor device, comprising:
a first wiring provided in a first wiring layer along a first direction;
a second wiring provided in a second wiring layer along a second direction orthogonal to the first direction, the second wiring intersecting with the first wiring at a first intersect portion; and
a third wiring provided close to and along the second wiring in the second wiring layer, the third wiring intersecting with the first wiring at a second intersect portion;
wherein a distance between the second wiring in the first intersection portion and the third wiring in the second intersection portion is narrower than a distance between the second wiring another than the first intersection portion and the third wiring another than the second intersection portion.
2. The semiconductor device of claim 1 , wherein
a width of the first intersect portion of the third wiring is wider than a width of the second intersect portion of the third wiring.
3. The semiconductor device of claim 2 , wherein
a width of the first intersect portion of the second wiring is narrower than a width of the second intersect portion of the second wiring.
4. The semiconductor device of claim 1 wherein
the width of the second intersect portion of the third wiring is the same as the width of another portion of the third wiring.
5. The semiconductor device of claim 4 , wherein
the third wiring has U-shape.
6. The semiconductor device of claim 5 , wherein
a contact wiring electrically connecting to the first wiring is provided in a space inside the U-shape of the third wiring.
7. The semiconductor device of claim 5 , wherein
the width of the first intersect portion of the second wiring is narrower than the width of the second intersect portion of the second wiring.
8. The semiconductor device of claim 1 , further comprising:
a fourth wiring provided close to and along the first wiring provided in the first wiring layer, the fourth wiring intersecting with the second wiring at a third intersect portion.
9. The semiconductor device of claim 8 , wherein
a distance between the fourth wiring in the third intersection portion and the first wiring in the first intersection portion is narrower than a distance between the fourth wiring another than the third intersection portion and the first wiring another than the first intersection portion.
10. The semiconductor device of claim 9 , wherein
a width of the first intersect portion of the fourth wiring is wider than a width of the second intersect portion of the fourth wiring.
11. The semiconductor device of claim 11 , wherein
the width of the first intersect portion of the first wiring is narrower than the width of the second intersect portion of the first wiring.
12. The semiconductor device of claim 9
wherein the width of the first intersect portion of the fourth wiring is the same as the width of another portion of the fourth wiring.
13. The semiconductor device of claim 12 , wherein
the third wiring has U-shape.
14. The semiconductor device of claim 12 , wherein
a contact wiring electrically connecting to the first wiring is provided in a space inside the U-shape of the third wiring.
15. The semiconductor device of claim 12 , wherein
the width of the first intersect portion of the first wiring is narrower than the width of second intersect portion of the first wiring.
16. The semiconductor device of claim 12 , wherein
the width of the first intersect portion of the second wiring is narrower than the width of the second intersect portion of the second wiring.
17. The semiconductor device of claim 8 , wherein
both the third wiring and the fourth wiring act as a shield line to shield the first wiring and the second wiring.
18. The semiconductor device of claim 1 , wherein
one of the first wiring and the second wiring is a signal wiring and the other is a reference potential line.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011211666A JP2013074075A (en) | 2011-09-27 | 2011-09-27 | Semiconductor device |
JP2011-211666 | 2011-09-27 |
Publications (1)
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US20130075934A1 true US20130075934A1 (en) | 2013-03-28 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US13/423,027 Abandoned US20130075934A1 (en) | 2011-09-27 | 2012-03-16 | Semiconductor device |
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US (1) | US20130075934A1 (en) |
JP (1) | JP2013074075A (en) |
CN (1) | CN202736910U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150214135A1 (en) * | 2014-01-27 | 2015-07-30 | Micron Technology, Inc. | Semiconductor Device Including Conductive Layer with Conductive Plug |
KR20160074417A (en) * | 2014-12-18 | 2016-06-28 | 가부시키가이샤 파이오락꾸스 | Valve apparatus for fuel tank |
US11600689B2 (en) | 2020-05-22 | 2023-03-07 | Chengdu Boe Optoelectronics Technology Co., Ltd. | Display substrate having a varying width power supply wire, display panel and display device having the same |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6272745B2 (en) | 2014-10-27 | 2018-01-31 | ソニー・オリンパスメディカルソリューションズ株式会社 | Medical device substrate and medical device |
JP6602241B2 (en) * | 2016-03-10 | 2019-11-06 | 三菱電機株式会社 | Signal transmission board |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US36837A (en) * | 1862-11-04 | Improvement in pumps |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0682671B2 (en) * | 1986-03-03 | 1994-10-19 | 日本電信電話株式会社 | Wiring method of integrated circuit |
JP2578954B2 (en) * | 1987-11-14 | 1997-02-05 | キヤノン株式会社 | Semiconductor device |
JPH01202842A (en) * | 1988-02-08 | 1989-08-15 | Nippon Telegr & Teleph Corp <Ntt> | Line crossing circuit for microwave integrated circuit |
JPH0522001A (en) * | 1991-07-15 | 1993-01-29 | Fujitsu Ltd | Transmission line structure |
JPH10171369A (en) * | 1996-12-16 | 1998-06-26 | Sharp Corp | Transmission line for video and image display device |
JP2005033081A (en) * | 2003-07-09 | 2005-02-03 | Mitsubishi Electric Corp | Semiconductor device |
-
2011
- 2011-09-27 JP JP2011211666A patent/JP2013074075A/en active Pending
-
2012
- 2012-03-15 CN CN201220097552.5U patent/CN202736910U/en not_active Expired - Fee Related
- 2012-03-16 US US13/423,027 patent/US20130075934A1/en not_active Abandoned
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US36837A (en) * | 1862-11-04 | Improvement in pumps |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150214135A1 (en) * | 2014-01-27 | 2015-07-30 | Micron Technology, Inc. | Semiconductor Device Including Conductive Layer with Conductive Plug |
US9318416B2 (en) * | 2014-01-27 | 2016-04-19 | Micron Technology, Inc. | Semiconductor device including conductive layer with conductive plug |
KR20160074417A (en) * | 2014-12-18 | 2016-06-28 | 가부시키가이샤 파이오락꾸스 | Valve apparatus for fuel tank |
KR102253339B1 (en) | 2014-12-18 | 2021-05-18 | 가부시키가이샤 파이오락꾸스 | Valve apparatus for fuel tank |
US11600689B2 (en) | 2020-05-22 | 2023-03-07 | Chengdu Boe Optoelectronics Technology Co., Ltd. | Display substrate having a varying width power supply wire, display panel and display device having the same |
Also Published As
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JP2013074075A (en) | 2013-04-22 |
CN202736910U (en) | 2013-02-13 |
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