US20110216428A1

US20110216428A1 - Housing structure

Info

Publication number: US20110216428A1
Application number: US13/108,549
Authority: US
Inventors: Stefan Xalter; Peter Deufel; Yim Bun Patrick Kwan; Bernard Stommen; Herman Soemers; Franz van Deuren; Paul Peter Anne Brom
Original assignee: Carl Zeiss SMT GmbH
Current assignee: Carl Zeiss SMT GmbH
Priority date: 2004-02-26
Filing date: 2011-05-16
Publication date: 2011-09-08
Also published as: JP2007524129A; US8018664B2; JP2012048251A; JP5008551B2; WO2005083487A1; US20090303626A1; JP5583646B2

Abstract

A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6′. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6′ and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention
The invention relates to a housing structure which has a frame structure on which there are arranged via connecting elements several optical elements which are held in mounts or structural modules.
2. Description of the Prior Mt
A housing structure of this type is described, for example, in EP 1 278 089 A2. It has frame parts and connecting plates on which several optical elements are fastened, bores or openings being provided in part for this purpose. The housing structure forms a stable self-supporting unit. Appropriate auxiliary constructions with fastening elements are required for fastening the optical elements with their mounts or structural modules. The mounting is relatively complicated, and an additional installation space is required for the connection. The optical elements connected to the frame structure constitute virtually separate parts on the housing structure and have little dynamic influence on the housing structure. Moreover, thermal influences and influences of internal stress are difficult to calculate.

SUMMARY OF THE INVENTION

The object of the present invention is to avoid the above-named disadvantages of the prior art, in particular to create a housing structure, there being a simpler and reproducible connection between the housing structure and the optical elements arranged therein.
This object is achieved according to the invention when the optical elements are detachably connected to the frame structure with their mounts or structural modules and connecting elements in such a way that in the installed state they are integrated as bearing units in the frame structure.
The inventive design results in a uniform mechanical support structure both for the housing structure with its frame structure, and for the optical elements with their mounts and structural modules in addition to connecting elements. The optical elements therefore make a kinematic contribution to the stability or stiffness of the housing structure. This means that without the optical elements inserted the housing structure alone is not self-supporting or sufficiently stable, but that an integral load-bearing unit results after installation of the optical elements.
In addition to a saving of material and weight and of installation space, a clearer and reproducible connection is created in this way between the frame structure and the optical elements. The individual optical elements, which are arranged either individually in a mount, or else in subgroups or in structural modules, can be separately constructed, preadjusted and tested and be installed in the frame structure as appropriately prefabricated units only after this, and be appropriately adjusted in the process.
The optical elements are preferably supported in kinematically determined fashion. This can be performed, for example, by setting members which can be adjusted in six degrees of freedom. A hexapod, for example, is suitable for this purpose.

BRIEF DESCRIPTION OF THE DRAWINGS

Further advantageous refinements and developments emerge from the subclaims and from the following exemplary embodiments described in principle with the aid of the drawings, in which:

FIG. 1 shows an illustration of the principle of a housing structure with an inserted optical element;

FIG. 2 shows a further configuration of a frame structure with a multiplicity of optical elements;

FIG. 3 shows a detail of the housing structure with an optical element supported in a mount;

FIG. 4 shows a frame structure in an exploded fashion; and

FIGS. 5-8 show various mounts/structural modules with fastening points.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The housing structure illustrated in FIGS. 1 and 2 has a frame structure 1 which is assembled from several frame parts 2 and reinforcing plates 3. The frame structure 1 is provided with a multiplicity of cutouts or openings 4. Optical elements 5 with their mounts 6 are inserted into the openings 4. Connecting elements 7 (not illustrated in more detail) are provided for this purpose. Setting members or actuators 8 are arranged between the mount 6, which can be constructed as a base element, and the optical element 5, for example, a mirror 5. The arrangement and configuration of the setting members 8 are not described in more detail below, since they are known in principle. The setting members 8 should as far as possible permit adjustments of the optical element 5 in six degrees of freedom, and can be constructed for this purpose as hexapods, for example.
FIG. 2 shows a housing structure which can be, for example, an objective housing 9 of a projection objective in microlithography, as is described, for example, in more detail in EP 1 278 089 A2. The projection objective 9 can be provided, for example, for EUV lithography for which extremely high demands are placed on accuracy. In this case, the optical elements constitute mirrors 5, for example, “5′” indicating a stop. As may be seen from FIG. 1 in the upper area, and from FIG. 2, a multiplicity of optical elements 5 with their mounts 6 are inserted into the openings 4 in the frame structure 1. The connecting elements 7 and the mounts 6 are configured in such a way that in the illustrated installed state of the optical elements 5 with their mounts 6 these form a bearing unit with the frame structure 1 or are integrated in the latter in such a way that a stable unit of great rigidity is created in this way.
FIG. 3 shows in an enlarged illustration a detail of the frame structure 1 with a frame part 2 to which the mount 6 of the optical element, constructed as a mirror 5, for example, is connected via adapting elements (spacer) 10. A gravity compensator 11 can be arranged between the optical element 5 and the mount 6. The gravity compensator 11 serves the purpose of reducing the weight of the optical element 5 so that the setting members or actuators 8 need to apply smaller forces in order to adjust the optical element 5. Lorenz actuators or piezoelectric elements, for example, can be provided as actuators 8. One or more actuators are provided in each case as setting members 8 for the purpose of adjusting an optical element 5. Furthermore, the mount 6 is provided with sensors 12 for determining the position of the optical element 5. The application U.S. 60/502,334 contains further information on this. It is a part of this application in its entirety.
Instead of simple mounts 6 for each optical element 5, it is also possible, of course, to provide structural modules 6′ as so-called subgroups, if required, several optical elements 5 being held in a structural module, as is indicated, for example, in FIG. 2 by the structural module 6′. As may be seen, in this case the structural module 6′ provides a transverse connection between the laterally opposite frame parts 2, and lends the frame structure 9 a high degree of stability in this way.
The frame parts 2 of the frame structure 1, the mounts 6 and the structural modules 6′ should consist of a material with at least approximately the same coefficients of thermal expansion so that no internal stresses are introduced, particularly in the case of the occurences of heating that occur in EUV lithography. For the same reason, materials with very low coefficients of thermal expansion should also be used such as, for example, glass ceramics (Zerodur® from Schott Glas).
FIG. 4 shows a frame structure 9 in a modification of FIG. 2. As may be seen, the frame structure 9 is split into several parts, the optical elements with their mounts 6 or structural modules 6′ being integrated in the individual components. After appropriate preadjustment, the individual components 9 are then combined in relation to the frame structure 9 so as to form an integral bearing unit.
Various examples of mounts 6 and/or structural modules are illustrated in FIGS. 5 to 8, with in each case six fastening points for connecting to the frame structure 1. The optical elements 5, which are respectively connected to the mount 6 via actuators 8, are not illustrated here.
The arrows indicate the degree of freedom with which a connecting point is respectively rigidly connected to the frame structure 1. The connecting point is formed to be “softly” in the respective other directions or degrees of freedom. This configuration leads to a so-called kinematic bearing with six degrees of freedom and six supported directions.
As illustrated by the arrows 13, the support directions will advantageously be selected in this case in such a way that they lie respectively in the plane of an associated plate or strut of the frame structure 1.
The course of the arrows 13, and thus of the force direction, is therefore determined in each case by the position and/or site of installation on the frame structure 1, and by the course of the frame structure or frame strut or frame plate at this point.
The six degrees of freedom relate to translations in three coordinate directions, and to rotations about each of the three axes of rotation laid through their centroid. This means that in total six movements are possible, specifically linear movements in terms of the three components in the axial direction of the spatial coordinate system, and rotary movements in terms of the three components of the rotation about the three axes of rotation.
FIGS. 5 to 8 respectively show the same principle of connection with the force directions. The directions of the arrows 13 for the six degrees of freedom are a function only of the position of installation, which is shown in FIGS. 5 to 8 only by way of example for different positions.

Claims

1.-14. (canceled)

15. A housing, comprising:

a frame structure comprising a plurality of frame parts including a first frame part and a second frame part that is laterally opposite the first frame part;

a structural module connecting the first and second frame parts; and

a first optical element carried by the structural module,

wherein the housing is an EUV microlithography projection objective housing

16. The housing of claim 15, wherein the structural module is partially disposed in openings between frame parts, or the structural module disposed is in an opening in one of the frame parts.

17. The housing of claim 15, further comprising a mount, wherein the mount is disposed in an opening between frame parts, or the mount is disposed in an opening in one of the frame parts.

18. The housing of claim 17, further comprising a second optical element, wherein the second optical element is carried by the mount.

19. The housing of claim 18, wherein the frame parts, the structural module and the mount have at least approximately the same coefficient of thermal expansion.

20. The housing of claim 18, wherein the frame parts, the structural module and the mount comprise a glass ceramic.

21. The housing of claim 18, further comprising an actuator between the mount and the second optical element.

22. The housing of claim 18, further comprising a plurality of actuators between the mount and the second optical element, the plurality of actuators being configured to adjust a position of the second optical element in six degrees of freedom.

23. The housing of claim 21, further comprising a gravity compensator between the mount and the second optical element.

24. The housing of claim 15, wherein the structural element is rigidly connected to the first and second frame parts in six degrees of freedom.

25. The housing of claim 15, wherein the first frame part, the second frame part and the structural module have at least approximately the same coefficient of thermal expansion.

26. The housing of claim 15, wherein the first frame part, the second frame part and the structural module comprise a glass ceramic.

27. The housing of claim 15, wherein the structural module is connected to the frame structure via a connecting point which is inflexible in one degree of freedom and flexible in other degrees of freedom.

28. A housing, comprising:

a frame structure;

a member selected from the group consisting of a mount and a structural module, the member being connected to the frame structure via a first connecting point, the first connection point being inflexible in one degree of freedom and flexible in all other degrees of freedom; and

an optical element carried by the member,

wherein the housing is an EUV microlithography projection objective housing.

29. The housing of claim 28, wherein the member is connected to the frame structure by multiple connecting points including the first connecting point.

30. The housing of claim 29, wherein, for each connecting point, the connecting point is inflexible in one degree of freedom and flexible in other degrees of freedom.

31. The housing of claim 28, wherein the frame structure and the member have at least approximately the same coefficient of thermal expansion.

32. The housing of claim 28, wherein the frame structure and the member comprise a glass ceramic.

33. The housing of claim 28, further comprising an actuator between the member and the optical element.

34. The housing of claim 28, further comprising a plurality of actuators between the mount and the optical element, the plurality of actuators being configured to adjust a position the optical element in six degrees of freedom.

35. The housing of claim 34, further comprising a gravity compensator between the member and the optical element.

36. The housing of claim 28, wherein the member comprises a second mount.

37. The housing of claim 36, wherein the frame structure comprises a plurality of frame parts, the second mount is disposed in an opening between frame parts, or the second mount is disposed in an opening in one of the frame parts.

38. The housing of claim 28, wherein the frame structure comprises a plurality of frame parts, and the structural module is disposed in openings between frame parts.

39. The housing of claim 28, wherein the frame structure comprises a first frame part and a second frame part laterally opposed to the first frame part, and the member connects laterally opposed frame parts.

40. The housing of claim 28, wherein the frame structure comprises a plurality of frame parts.

41. A housing, comprising:

a frame structure comprising two frame parts;

a first member connected to the two frame parts;

a second member connected to one of the two frame parts; and

an optical element carried by at least one member selected from the group consisting of the first member and the second member,

wherein:

the first and second members are selected from the group consisting of a mount and a structural module, and

the housing is an EUV microlithography projection objective housing.

42. The housing of claim 41, wherein one of the first and second members is connected to the frame structure via a first connecting point, the first connection point is inflexible in one degree of freedom, and the first connection point is flexible in all other degrees of freedom.

43. The housing of claim 42, wherein the member that is connected to the frame structure via the first connecting point is connected to the frame structure by multiple connecting points including the first connecting point.

44. The housing of claim 43, wherein, for each connecting point, the connecting point is inflexible in one degree of freedom and flexible in other degrees of freedom.

45. The housing of claim 41, wherein the frame structure, the first member and the second member have at least approximately the same coefficient of thermal expansion.

46. The housing of claim 41, wherein the frame structure, the first member and the second member comprise a glass ceramic.

47. The housing of claim 41, further comprising an actuator between the optical element and one of the members.

48. The housing of claim 47, further comprising a plurality of actuators between the mount and the optical element, the plurality of actuators being configured to adjust a position the optical element in six degrees of freedom.

49. The housing of claim 48, further comprising a gravity compensator between the optical element and one of the members.

50. The housing of claim 41, wherein the first frame part and the second frame part are arranged laterally opposed to each other, and one of the members connects the laterally opposed frame parts.

51. The housing of claim 41, wherein the first member is disposed in an opening between frame parts, or the first member is disposed in an opening of the two frame parts.