US20100212544A1 - Fabrication of electrically active films based on multiple layers - Google Patents

Fabrication of electrically active films based on multiple layers Download PDF

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US20100212544A1
US20100212544A1 US12/769,960 US76996010A US2010212544A1 US 20100212544 A1 US20100212544 A1 US 20100212544A1 US 76996010 A US76996010 A US 76996010A US 2010212544 A1 US2010212544 A1 US 2010212544A1
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printing
composition
nanoparticles
printing composition
film
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James Harris
Nigel Pickett
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Nanoco Technologies Ltd
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Nanoco Technologies Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G15/00Compounds of gallium, indium or thallium
    • C01G15/006Compounds containing, besides gallium, indium, or thallium, two or more other elements, with the exception of oxygen or hydrogen
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • C23C24/08Coating starting from inorganic powder by application of heat or pressure and heat
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02568Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02587Structure
    • H01L21/0259Microstructure
    • H01L21/02601Nanoparticles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02623Liquid deposition
    • H01L21/02628Liquid deposition using solutions
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to thin-film materials, their fabrication, and devices made therefrom; and in particular to graded and multi-junction thin-film semiconductor structures.
  • Thin-film technologies are currently being developed for the purpose of reducing the cost of semiconductor devices, in particular photovoltaic (PV) cells.
  • PV photovoltaic
  • conventional solar cells are made of slices of solid crystalline silicon wafers, which have thicknesses of typically a few hundred microns
  • thin-film materials can be directly deposited onto a substrate to form layers of ⁇ 2 ⁇ m or less, resulting in lower material as well as lower manufacturing costs.
  • thin-film technologies allow for monolithic integration, i.e. the in situ creation of electrical connections, which further reduces production costs.
  • Thin-film materials include cadmium-telluride (CdTe), copper indium diselenide (CIS) and variants thereof, amorphous silicon, and polycrystalline silicon ( ⁇ 50 ⁇ m).
  • CdTe cadmium-telluride
  • CIS copper indium diselenide
  • amorphous silicon amorphous silicon
  • polycrystalline silicon ⁇ 50 ⁇ m.
  • Both materials have high absorptivities, so that most of the incident radiation can be absorbed within 1-2 ⁇ m of the film. Used as the absorber layer, in which incoming photons create electron-hole pairs, these materials can be paired with, for instance, a layer of CdS, to form heterojunctions, and sandwiched between front and back contacts to form a solar cell.
  • thin-film PV cells must exhibit high conversion efficiencies of photon energy to electric current, and operate reliably in an outdoor environment over many years, ideally no less than 30 years.
  • Technologies based on CdTe and CIS have demonstrated long-term stability; however, performance degradation has also been observed.
  • Efficiencies of current thin-film devices reach 65% of the theoretical maximum (75% in the laboratory), still lagging behind some monocrystalline silicon and GaAs cells, which have demonstrated 90% of their ultimate achievable performance. Improvements in efficiency of thin-film technologies can be achieved through multijunctions and graded materials. For example, studies on CIS have revealed that doping with gallium, to form compounds referred to as CIGS and exhibiting gradients in the concentrations of Ga and In, lead to better efficiencies.
  • the present invention provides methods for fabricating a continuous film by successively printing and annealing two or more dispersions of prefabricated nanoparticles.
  • some embodiments of the invention facilitate manufacture of graded and multijunction semiconductor films, which can be used in PV cells and other semiconductor devices. Since the method requires no vacuum, it is cheaper and more conveniently practiced than vacuum-based techniques.
  • Nanoparticles according to this invention are particles of specified elemental composition and no more than 100 nm, and preferably no more than 20 nm, in diameter.
  • Typical nanoparticles include metal-oxide particles, which collectively form a powder.
  • Some nanoparticle compositions suitable for semiconductor thin films comprise two or more of the chemical elements Cu, Ag, In, Ga, Al, Te, Se, S, Cd, and As. It should be stressed, however, that the invention is not limited to said elements, but that the method generally applies to any composition of nanoparticles suitable for dispersion, and subsequently printing.
  • One of the advantages of techniques in accordance with the present invention lies in the ability to optimize the composition of the thin film by providing compositional control over the precursor nanoparticles.
  • Dispersions according to the invention include any (homogeneous) mixture of nanoparticles and a suitable flowable carrier comprising solvents or dispersing agents, whether the mixture is a solution, a colloid, or a suspension. These dispersions of nanoparticles are termed “printing compositions” or “nanoparticle-based inks” herein.
  • compositions according to the invention can be implemented using a variety of printing techniques and the corresponding printing equipment, including, but not limited to, techniques such as inkjet printing, pneumatic spray printing, screen printing, pad printing, laser printing, dot matrix printing, thermal printing lithography, or 3D printing.
  • This versatility contributes to feasibility and cost-effectiveness.
  • the composition of the nanoparticles can vary through the various deposition and annealing steps.
  • the different printable compositions comprise nanoparticles of the same elements in different proportions, for example, the nanoparticles may have the formula CuIn 1-x Ga x Se 2 , wherein x varies between 0 and 1, resulting in a concentration gradient of at least one element (in the example In and Ga) through the film.
  • the invention provides a method of fabricating a film, which includes the steps of providing a substrate and flowable printing compositions with different dispersions of prefabricated nanoparticles, and successively printing and annealing layers of these printing compositions into one continuous film.
  • two or more layers are successively printed before they are annealed.
  • an etching step precedes annealing.
  • Some of the individual printed layers may have thicknesses smaller than 1 ⁇ m.
  • the printing compositions contain the same types of nanoparticles in different proportions, or nanoparticles composed of the same elements in different proportions, so that the annealed layers form a film with a concentration gradient of at least one material.
  • each printing composition includes different types of nanoparticles.
  • the nanoparticles have a size no greater than 20 nm and a low size dispersity.
  • the film includes a semiconductor material and interacts electrically with the substrate.
  • this structure can be complemented by an electrically conductive superstrate to form a semiconductor device.
  • the device is a solar cell.
  • the invention provides flowable printing compositions with a substantially viscosity-independent flow rate.
  • These printing compositions contain a carrier and a dispersion of nanoparticles; the nanoparticles include Cu and/or Ag as a first component and Se, Te, and/or S as a second component. Additionally, the printing compositions may contain In, Ga, and/or Al as a third component.
  • FIG. 1 is a flow diagram detailing the steps of a method to manufacture a film by successive printing and annealing.
  • FIG. 2 schematically depicts a system and method for manufacturing the film in accordance with an embodiment of the invention.
  • FIG. 3A is a schematic elevational view of a representative solar cell manufactured in accordance with the invention.
  • FIG. 3B is a schematic elevational view of a graded CIGS film, manufactured by first depositing all constituting layers and then annealing once to produce a continuous film, and of a solar cell made therefrom.
  • FIGS. 1 and 2 illustrate, respectively, a representative process sequence 100 and operative equipment implementing embodiments of the present invention.
  • the process sequence comprises the steps detailed in the flow diagram of FIG. 1 , utilizing the equipment and resulting in the intermediate and final structures illustrated in FIG. 2 .
  • a substrate 200 and a plurality of flowable printing compositions comprising different dispersions of prefabricated nanoparticles, as further described below, are provided.
  • a printing composition 202 a is selected for the first layer in step 112 , and in step 114 , this composition is printed onto the substrate 200 using a printer 204 .
  • an etch step 116 is performed after printing.
  • the deposited layer is dried and annealed using a heat source 206 to form a continuous film 208 .
  • annealing is meant heating of a deposited layer at a sufficient temperature and for a sufficient time that the nanoparticles fuse into a continuous layer of uniform composition. Whether annealing is performed after deposition of a particular layer depends on the specifics of the printing composition, the layer thickness, and desired film characteristics. In general, however, the composition will be dried before a subsequent composition is deposited thereon.
  • Annealing source 206 may be any suitable heat source, e.g., an oven, vacuum oven, furnace, IR lamp, laser, or hot plate, and suitable annealing times and temperatures, which depend on nanoparticle size and composition as well as ink composition, may be obtained without undue experimentation by means of calibration as described below in the context of printing equipment. Anneal temperatures are generally above 200° C.
  • the steps 112 , 114 , and optionally steps 116 , 118 are repeated to print a second printing composition 202 b , which generally differs from the composition 202 a , resulting in a film 208 that now contains two layers.
  • This repetition may involve the same printing and annealing equipment 204 , 206 , in which case the new printing composition is substituted (e.g., in the form of a cartridge) in printer 204 .
  • the process sequence 100 may be carried out in a assembly-line configuration with separate printing and annealing equipment dedicated to each deposition and annealing step. Utilizing the same equipment for multiple steps may be more practical where numerous films are fabricated in parallel (i.e., the same steps are simultaneously performed on multiple substrates); while a line configuration may be preferred where individual substrates 200 are processed serially.
  • Steps 110 - 118 may (but need not) be repeated a plurality of times to form a film having three or more layers 202 a , 202 b , 202 c .
  • a particular printing composition can be utilized once or more than once, although in the case of graded films, the composition will change progressively with each deposition step.
  • an etching step 120 is again optional, but a final annealing step 122 must take place, whether previous anneals 116 have been performed or not, to form a continuous final film 210 from the deposited layers.
  • the number of layers deposited and annealed in this way is at least two, and is limited only by the desired thickness and composition of the final film 210 . Accordingly, while FIG. 2 illustrates the manufacturing of a film with three layers, this is merely for illustration.
  • Each layer may contain a single type of nanoparticle, in which case different layers typically contain nanoparticles having different chemical compositions; or alternatively (or in addition), each layer may contain a plurality of nanoparticle types, in which case the same set of nanoparticles may be used in different proportions in the different layers.
  • the method 100 is employed to produce a high-efficiency graded film by using a variety of printing compositions with nanoparticles comprising the same elements, but in different proportions.
  • a CIGS film may be produced with the varying chemical composition CuIn 1-x Ga x Se 2 , where x varies progressively among successively deposited layers (i.e., successive printing compositions).
  • x may be the distance of a certain location within the film from a boundary surface of the film (e.g., the top surface of the structure or the boundary surface in contact with the substrate), divided by the thickness of the film.
  • Such films have been manufactured by means of chemical vapor deposition (CVD) and used as the absorption layer in a PV cell with the gallium concentration increasing towards a molybdenum back contact, resulting in a particularly high efficiency of 19.5%—a consequence of reduced back-surface recombination due to the quasi-electric field established by the concentration and corresponding bandgap gradient.
  • the method 100 provides an alternative to the CVD process: using a suitable substrate, such as Mo-covered glass, CuInSe 2 may be deposited for the first layer, followed by printing compositions in which the Ga content is progressively (in a linear or nonlinear fashion) increased in each layer, until the composition of the nanoparticles is primarily CuGaSe 2 . Once the layers are printed in the desired sequence, they are annealed to form a high-performance graded CIGS film. Other nanoparticle-based inks may also be introduced as intermediate layers to further tune the band structure of the material in order to optimize the performance of the cell. Techniques in accordance with the present invention offer the additional advantage, compared with CVD, of avoiding the need for vacuum equipment.
  • the printing compositions comprise different types of nanoparticles.
  • the method 100 can, for instance, be used to manufacture a CdS/CdTe thin film.
  • the approach of the invention can be applied to any material for which a suitable nanoparticle source is available.
  • the printing step 114 a variety of well-characterized printing processes can be used to advantage, including, but not limited to, inkjet printing, pneumatic spraying, screen printing, pad printing, laser printing, dot matrix printing, thermal printing, lithography, and 3D printing.
  • Computer-controlled inkjet printers are readily available and particularly attractive for practice of the invention because of the level of control they provide.
  • a commercially available inkjet printer can be used with little or no modification to print nanoparticle-based inks (the printing compositions) as described herein.
  • the viscosities of nanoparticle-based inks can be adjusted to those of inks produced by the printer's manufacturer, as detailed below in the context of printing compositions.
  • the amenability of the method 100 to readily available, low-cost equipment, such as inkjet printers, constitutes one of its advantages.
  • the printer can be calibrated as follows. For each printing composition, a sequence of print runs is carried out, each print run involving a different number of printing passes. Drying and annealing are performed after each printing pass or at the end of a run. The thickness of the film resulting from each of the runs is different, and is determined via scanning electron microscopy (SEM) or transmission electron microscopy (TEM), or any other suitable technique. As a result, a layer having a desired thickness may be made by reference to the number of printing passes corresponding to that thickness. Similar calibration techniques can be used to determine optimal annealing temperatures and times for desired film properties.
  • SEM scanning electron microscopy
  • TEM transmission electron microscopy
  • Particulate precursor materials simplify compositional control for multi-component materials such as, for example, CIGS, since key components (e.g., Cu, In, Ga) can be precisely mixed in the precursor powders.
  • One method of fabricating these powders involves mixing the constituent elements at the required ratios, dissolving them in acid to form an aqueous mixture, using hydroxide precipitation to form a gelatinous mixture of hydroxides of the elements, and drying the mixture to obtain a fine powder of mixed oxides.
  • Nanoparticle synthesis can also be carried out using techniques described, for example, in U.S. Pat. No. 6,379,635 and co-pending U.S. patent application Ser. Nos. 11/579,050 and 11/588,880, the entire disclosures of which are hereby incorporated by reference.
  • a method for producing CIGS nanoparticles of any desirable stoichiometry employing a selenol compound is disclosed in U.S. Provisional Application Ser. No. 60/991,510.
  • Embodiments of the method involve dispersing at least a first portion of a nanoparticle precursor composition (comprising sources of at least one of Al, Ga, and/or In, and at least one of Cu, Ag, Zn, and/or Cd) in a solvent (e.g., a long-chain hydrocarbon solvent); heating the solvent to a first temperature for an appropriate length of time; adding a selenol compound to the solvent and heating the solvent; adding a second portion of the nanoparticle precursor composition to the reaction mixture; heating the mixture to a second temperature higher than the first temperature over an appropriate length of time; and maintaining the temperature for up to 10 hours.
  • a solvent e.g., a long-chain hydrocarbon solvent
  • the surface atoms of the particles will typically be coordinated to a capping agent, which can comprise the selenol compound employed in the method. If a volatile selenol compound is used, this capping agent can be driven off with heating to yield ‘naked’ nanoparticles amenable to capping with other coordinating ligands and further processing. Examples 1 and 2 provide further details regarding the implementation of this method:
  • a stock solution of TOPSe was prepared by dissolving Se powder (10.9, 138 mmol) in TOP (60 mL) under nitrogen. To dry, degassed ODE was added Cu(I) acetate (7.89 g, 64.4 mmol) and In(III) acetate (20.0 g, 68.5 mmol). The reaction vessel was evacuated and heated at 140° C. for 10 min, backfilled with N 2 and cooled to room temp. 1-Octane selenol (200 mL) was added to produce a bright orange suspension. The temperature of the flask was raised to 140° C. and acetic acid distilled from the reaction at 120° C. On reaching 140° C. the TOPSe solution was added dropwise over the course of 1 hour.
  • the nanoparticles can be characterized with respect to their composition, size, and charge by conventional techniques including x-ray diffraction (XRD), UV/Vis/Near-IR spectrometry, scanning or transmission electron microscopy (SEM/TEM), energy dispersive x-ray microanalysis (EDAX), photoluminescence spectrometry, and/or elemental analysis.
  • XRD x-ray diffraction
  • UV/Vis/Near-IR spectrometry UV/Vis/Near-IR spectrometry
  • SEM/TEM scanning or transmission electron microscopy
  • EDAX energy dispersive x-ray microanalysis
  • photoluminescence spectrometry and/or elemental analysis.
  • ICPAES Inductively coupled plasma atomic-emission spectroscopy
  • the nanoparticles have average sizes not greater than 20 nm, and low size dispersities of around ⁇ 2 nm or less. Conformance to these constraints facilitates printing of thin films with control over the band structure through the film, resulting in high conversion efficiencies. Moreover, low size dispersities allow for good packing of the nanoparticles, and uniform melting temperature of the nanoparticle films, which contributes to proper film formation.
  • the nanoparticles are dispersed in a carrier comprising solvents, such as toluene, and dispersing agents to form the printing composition.
  • the dispersion may take the form of a solution, colloid, or suspension, generally depending on the particle size, and may have the consistency of a liquid, paste, or other viscoelastic material, as long as it is flowable. Its viscosity should be within the range from 0.158 ⁇ 10 11 cP to 2.3 ⁇ 10 11 cP.
  • surface area and charge of the particles drive the selection of dispersants suitable for ink formulation.
  • the overall charge the particles acquire i.e., the zeta potential
  • the average agglomerate size should be minimized.
  • particle sizes of over 500 nm may cause plugging of the inkjet nozzles, compromising print quality.
  • nanoparticles can be coated in water-solubilizing capping agents, such as a mercaptocarboxylic acid (e.g., mercaptoacetic acid).
  • a mercaptocarboxylic acid e.g., mercaptoacetic acid
  • U.S. Pat. No. 6,114,0308 the entire disclosure of which is hereby incorporated by reference, teaches how to exchange the coating groups of water-insoluble, pyridine-capped nanocrystals with a large excess of neat mercaptocarboxylic acid to obtain water-soluble capped nanocrystals.
  • the pyridine-capped nanocrystals are precipitated with hexanes and centrifuged; the residue is dissolved in neat mercaptoacetic acid and incubated at room temperature for at least six hours; chloroform is added to precipitate the nanocrystals and wash away excess thiol; and the nanocrystals are again centrifuged, washed with chloroform and hexane, and dried with argon.
  • the viscosity of the printing composition is desirably adjusted to achieve plastic flow behavior, i.e., where viscosity is essentially independent of flow rate. This facilitates control over coating characteristics.
  • Capping agents needed for solubilization or suspension can be removed to stop the formation of carbon deposits within the film. In some cases, this removal occurs naturally as a result of annealing at elevated temperatures, but if does not, it can be aided by a prior etching step 116 , 120 .
  • FIG. 3A illustrates a representative structure of a solar cell with a CIGS absorber film.
  • the substrate 305 comprises molybdenum on glass, and the submicron Mo layer also provides the back contact of the cell 300 .
  • the absorber film 307 comprises a series of annealed layers of CIGS, and exhibits increasing Ga and decreasing In concentration towards the Mo contact 300 . This film can be manufactured by printing and annealing each layer consecutively. Alternatively, as illustrated in FIG.
  • a buffer layer 312 forms the junction with the CIGS film. Conventionally, this junction comprises CdS.
  • preferred PV cells are cadmium-free, using ZnS, ZnO(O,OH), or In 2 S 3 instead. Accordingly, a ZnO layer 314 over a glass cover 316 provides the superstrate of the cell 300 .
  • CIGS variants e.g., as shown in the following Table 1 in which Se is replaced by S or Te, Cu by Ag, or In or Ga by Al, for example, can be used to manipulate the energies of the valence and conduction bands to aid in electron-hole capture.
  • Embodiments of the invention provide a convenient means to integrate these additional layers.
  • these layers can likewise be integrated into the device by printing and annealing, as long as none of the required annealing temperatures is detrimental to the other layers within the device.

Abstract

A continuous film of desired electrical characteristics is obtained by successively printing and annealing two or more dispersions of prefabricated nanoparticles.

Description

    CROSS-REFERENCE TO RELATED APPLICATION
  • This application is a divisional of U.S. patent application Ser. No. 12/104,902 filed on Apr. 17, 2008, which claims priority to and the benefits of U.S. Provisional Application Ser. Nos. 60/923,984, filed on Apr. 18, 2007, and 60/991,510, filed on Nov. 30, 2007, the entire disclosures of which are hereby incorporated by reference.
  • FIELD OF THE INVENTION
  • The present invention relates to thin-film materials, their fabrication, and devices made therefrom; and in particular to graded and multi-junction thin-film semiconductor structures.
  • BACKGROUND OF THE INVENTION
  • Thin-film technologies are currently being developed for the purpose of reducing the cost of semiconductor devices, in particular photovoltaic (PV) cells. Whereas conventional solar cells are made of slices of solid crystalline silicon wafers, which have thicknesses of typically a few hundred microns, thin-film materials can be directly deposited onto a substrate to form layers of ˜2 μm or less, resulting in lower material as well as lower manufacturing costs. Moreover, thin-film technologies allow for monolithic integration, i.e. the in situ creation of electrical connections, which further reduces production costs.
  • Thin-film materials include cadmium-telluride (CdTe), copper indium diselenide (CIS) and variants thereof, amorphous silicon, and polycrystalline silicon (<50 μm). In recent years, technical progress has occurred particularly in thin-film technologies based on CdTe and CIS. Both materials have high absorptivities, so that most of the incident radiation can be absorbed within 1-2 μm of the film. Used as the absorber layer, in which incoming photons create electron-hole pairs, these materials can be paired with, for instance, a layer of CdS, to form heterojunctions, and sandwiched between front and back contacts to form a solar cell.
  • To gain widespread acceptance, thin-film PV cells must exhibit high conversion efficiencies of photon energy to electric current, and operate reliably in an outdoor environment over many years, ideally no less than 30 years. Technologies based on CdTe and CIS have demonstrated long-term stability; however, performance degradation has also been observed. Efficiencies of current thin-film devices reach 65% of the theoretical maximum (75% in the laboratory), still lagging behind some monocrystalline silicon and GaAs cells, which have demonstrated 90% of their ultimate achievable performance. Improvements in efficiency of thin-film technologies can be achieved through multijunctions and graded materials. For example, studies on CIS have revealed that doping with gallium, to form compounds referred to as CIGS and exhibiting gradients in the concentrations of Ga and In, lead to better efficiencies.
  • The complexities of thin-film technologies, which are essential for high efficiencies, adversely affect cost and manufacturability, establishing a need for improved techniques—in particular low-cost techniques amenable to practice with off-the-shelf equipment. Challenges to the development of low-cost and reliable CIGS and CdTe devices include the standardization of equipment for layer deposition, absorber layers having thicknesses less than 1 μm, and control of film uniformity over large areas.
  • SUMMARY OF THE INVENTION
  • In various embodiments, the present invention provides methods for fabricating a continuous film by successively printing and annealing two or more dispersions of prefabricated nanoparticles. In particular, some embodiments of the invention facilitate manufacture of graded and multijunction semiconductor films, which can be used in PV cells and other semiconductor devices. Since the method requires no vacuum, it is cheaper and more conveniently practiced than vacuum-based techniques.
  • Nanoparticles according to this invention are particles of specified elemental composition and no more than 100 nm, and preferably no more than 20 nm, in diameter. Typical nanoparticles include metal-oxide particles, which collectively form a powder. Some nanoparticle compositions suitable for semiconductor thin films comprise two or more of the chemical elements Cu, Ag, In, Ga, Al, Te, Se, S, Cd, and As. It should be stressed, however, that the invention is not limited to said elements, but that the method generally applies to any composition of nanoparticles suitable for dispersion, and subsequently printing. One of the advantages of techniques in accordance with the present invention lies in the ability to optimize the composition of the thin film by providing compositional control over the precursor nanoparticles. This facilitates the fabrication of a continuous film comprised of layers of specified chemical composition, which allows for the compositional optimization of these layers, and, as a result thereof, for improved control over the electric characteristics of the film and, in particular, over the variation of these characteristics throughout the thickness of the film.
  • Dispersions according to the invention include any (homogeneous) mixture of nanoparticles and a suitable flowable carrier comprising solvents or dispersing agents, whether the mixture is a solution, a colloid, or a suspension. These dispersions of nanoparticles are termed “printing compositions” or “nanoparticle-based inks” herein.
  • Methods according to the invention can be implemented using a variety of printing techniques and the corresponding printing equipment, including, but not limited to, techniques such as inkjet printing, pneumatic spray printing, screen printing, pad printing, laser printing, dot matrix printing, thermal printing lithography, or 3D printing. This versatility contributes to feasibility and cost-effectiveness. Furthermore, the composition of the nanoparticles can vary through the various deposition and annealing steps. For example, in one embodiment of the invention, the different printable compositions comprise nanoparticles of the same elements in different proportions, for example, the nanoparticles may have the formula CuIn1-xGaxSe2, wherein x varies between 0 and 1, resulting in a concentration gradient of at least one element (in the example In and Ga) through the film.
  • Accordingly, in a first aspect, the invention provides a method of fabricating a film, which includes the steps of providing a substrate and flowable printing compositions with different dispersions of prefabricated nanoparticles, and successively printing and annealing layers of these printing compositions into one continuous film. In some embodiments, two or more layers are successively printed before they are annealed. Further, in some embodiments an etching step precedes annealing. Some of the individual printed layers may have thicknesses smaller than 1 μm.
  • In certain embodiments, the printing compositions contain the same types of nanoparticles in different proportions, or nanoparticles composed of the same elements in different proportions, so that the annealed layers form a film with a concentration gradient of at least one material. In alternative embodiments, each printing composition includes different types of nanoparticles. In preferred embodiments, the nanoparticles have a size no greater than 20 nm and a low size dispersity.
  • In some embodiments, the film includes a semiconductor material and interacts electrically with the substrate. Moreover, this structure can be complemented by an electrically conductive superstrate to form a semiconductor device. In a particular embodiment, the device is a solar cell.
  • In a second aspect, the invention provides flowable printing compositions with a substantially viscosity-independent flow rate. These printing compositions contain a carrier and a dispersion of nanoparticles; the nanoparticles include Cu and/or Ag as a first component and Se, Te, and/or S as a second component. Additionally, the printing compositions may contain In, Ga, and/or Al as a third component.
  • It should be stressed that embodiments of methods in accordance with the invention are not limited to the printing compositions described above.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The foregoing discussion will be understood more readily from the following detailed description of the invention when taken in conjunction with the accompanying drawings.
  • FIG. 1 is a flow diagram detailing the steps of a method to manufacture a film by successive printing and annealing.
  • FIG. 2 schematically depicts a system and method for manufacturing the film in accordance with an embodiment of the invention.
  • FIG. 3A is a schematic elevational view of a representative solar cell manufactured in accordance with the invention.
  • FIG. 3B is a schematic elevational view of a graded CIGS film, manufactured by first depositing all constituting layers and then annealing once to produce a continuous film, and of a solar cell made therefrom.
  • DETAILED DESCRIPTION OF THE INVENTION 1. Fabrication Method
  • Refer first to FIGS. 1 and 2, which illustrate, respectively, a representative process sequence 100 and operative equipment implementing embodiments of the present invention. The process sequence comprises the steps detailed in the flow diagram of FIG. 1, utilizing the equipment and resulting in the intermediate and final structures illustrated in FIG. 2. In a first step 110, a substrate 200 and a plurality of flowable printing compositions comprising different dispersions of prefabricated nanoparticles, as further described below, are provided. A printing composition 202 a is selected for the first layer in step 112, and in step 114, this composition is printed onto the substrate 200 using a printer 204. In some cases, which will be described below, an etch step 116 is performed after printing. In an optional step 118, the deposited layer is dried and annealed using a heat source 206 to form a continuous film 208. By “annealing” is meant heating of a deposited layer at a sufficient temperature and for a sufficient time that the nanoparticles fuse into a continuous layer of uniform composition. Whether annealing is performed after deposition of a particular layer depends on the specifics of the printing composition, the layer thickness, and desired film characteristics. In general, however, the composition will be dried before a subsequent composition is deposited thereon. Annealing source 206 may be any suitable heat source, e.g., an oven, vacuum oven, furnace, IR lamp, laser, or hot plate, and suitable annealing times and temperatures, which depend on nanoparticle size and composition as well as ink composition, may be obtained without undue experimentation by means of calibration as described below in the context of printing equipment. Anneal temperatures are generally above 200° C.
  • The steps 112, 114, and optionally steps 116, 118, are repeated to print a second printing composition 202 b, which generally differs from the composition 202 a, resulting in a film 208 that now contains two layers. This repetition may involve the same printing and annealing equipment 204, 206, in which case the new printing composition is substituted (e.g., in the form of a cartridge) in printer 204. Alternatively, the process sequence 100 may be carried out in a assembly-line configuration with separate printing and annealing equipment dedicated to each deposition and annealing step. Utilizing the same equipment for multiple steps may be more practical where numerous films are fabricated in parallel (i.e., the same steps are simultaneously performed on multiple substrates); while a line configuration may be preferred where individual substrates 200 are processed serially.
  • Steps 110-118 may (but need not) be repeated a plurality of times to form a film having three or more layers 202 a, 202 b, 202 c. Once again, a particular printing composition can be utilized once or more than once, although in the case of graded films, the composition will change progressively with each deposition step. After the last layer has been printed, an etching step 120 is again optional, but a final annealing step 122 must take place, whether previous anneals 116 have been performed or not, to form a continuous final film 210 from the deposited layers. The number of layers deposited and annealed in this way is at least two, and is limited only by the desired thickness and composition of the final film 210. Accordingly, while FIG. 2 illustrates the manufacturing of a film with three layers, this is merely for illustration.
  • Each layer may contain a single type of nanoparticle, in which case different layers typically contain nanoparticles having different chemical compositions; or alternatively (or in addition), each layer may contain a plurality of nanoparticle types, in which case the same set of nanoparticles may be used in different proportions in the different layers. In some embodiments of the invention, the method 100 is employed to produce a high-efficiency graded film by using a variety of printing compositions with nanoparticles comprising the same elements, but in different proportions. For example, a CIGS film may be produced with the varying chemical composition CuIn1-xGaxSe2, where x varies progressively among successively deposited layers (i.e., successive printing compositions). For example, x may be the distance of a certain location within the film from a boundary surface of the film (e.g., the top surface of the structure or the boundary surface in contact with the substrate), divided by the thickness of the film. Such films have been manufactured by means of chemical vapor deposition (CVD) and used as the absorption layer in a PV cell with the gallium concentration increasing towards a molybdenum back contact, resulting in a particularly high efficiency of 19.5%—a consequence of reduced back-surface recombination due to the quasi-electric field established by the concentration and corresponding bandgap gradient. The method 100 provides an alternative to the CVD process: using a suitable substrate, such as Mo-covered glass, CuInSe2 may be deposited for the first layer, followed by printing compositions in which the Ga content is progressively (in a linear or nonlinear fashion) increased in each layer, until the composition of the nanoparticles is primarily CuGaSe2. Once the layers are printed in the desired sequence, they are annealed to form a high-performance graded CIGS film. Other nanoparticle-based inks may also be introduced as intermediate layers to further tune the band structure of the material in order to optimize the performance of the cell. Techniques in accordance with the present invention offer the additional advantage, compared with CVD, of avoiding the need for vacuum equipment.
  • In other embodiments of the invention, the printing compositions comprise different types of nanoparticles. The method 100 can, for instance, be used to manufacture a CdS/CdTe thin film. In general, the approach of the invention can be applied to any material for which a suitable nanoparticle source is available.
  • 2. Printing Equipment 204
  • For the implementation of the printing step 114, a variety of well-characterized printing processes can be used to advantage, including, but not limited to, inkjet printing, pneumatic spraying, screen printing, pad printing, laser printing, dot matrix printing, thermal printing, lithography, and 3D printing. Computer-controlled inkjet printers are readily available and particularly attractive for practice of the invention because of the level of control they provide. A commercially available inkjet printer can be used with little or no modification to print nanoparticle-based inks (the printing compositions) as described herein. To avoid problems such as clogging of the printer head or other incompatibilities, the viscosities of nanoparticle-based inks can be adjusted to those of inks produced by the printer's manufacturer, as detailed below in the context of printing compositions. The amenability of the method 100 to readily available, low-cost equipment, such as inkjet printers, constitutes one of its advantages.
  • To facilitate control over the thicknesses of the individual layers and the film as a whole, the printer can be calibrated as follows. For each printing composition, a sequence of print runs is carried out, each print run involving a different number of printing passes. Drying and annealing are performed after each printing pass or at the end of a run. The thickness of the film resulting from each of the runs is different, and is determined via scanning electron microscopy (SEM) or transmission electron microscopy (TEM), or any other suitable technique. As a result, a layer having a desired thickness may be made by reference to the number of printing passes corresponding to that thickness. Similar calibration techniques can be used to determine optimal annealing temperatures and times for desired film properties.
  • 3. Printing Compositions 202
  • Printing compositions in accordance herewith are flowable dispersions of nanoparticles. Particulate precursor materials simplify compositional control for multi-component materials such as, for example, CIGS, since key components (e.g., Cu, In, Ga) can be precisely mixed in the precursor powders. One method of fabricating these powders involves mixing the constituent elements at the required ratios, dissolving them in acid to form an aqueous mixture, using hydroxide precipitation to form a gelatinous mixture of hydroxides of the elements, and drying the mixture to obtain a fine powder of mixed oxides. Nanoparticle synthesis can also be carried out using techniques described, for example, in U.S. Pat. No. 6,379,635 and co-pending U.S. patent application Ser. Nos. 11/579,050 and 11/588,880, the entire disclosures of which are hereby incorporated by reference.
  • A method for producing CIGS nanoparticles of any desirable stoichiometry employing a selenol compound is disclosed in U.S. Provisional Application Ser. No. 60/991,510. Embodiments of the method involve dispersing at least a first portion of a nanoparticle precursor composition (comprising sources of at least one of Al, Ga, and/or In, and at least one of Cu, Ag, Zn, and/or Cd) in a solvent (e.g., a long-chain hydrocarbon solvent); heating the solvent to a first temperature for an appropriate length of time; adding a selenol compound to the solvent and heating the solvent; adding a second portion of the nanoparticle precursor composition to the reaction mixture; heating the mixture to a second temperature higher than the first temperature over an appropriate length of time; and maintaining the temperature for up to 10 hours. Once the particles have been formed, the surface atoms of the particles will typically be coordinated to a capping agent, which can comprise the selenol compound employed in the method. If a volatile selenol compound is used, this capping agent can be driven off with heating to yield ‘naked’ nanoparticles amenable to capping with other coordinating ligands and further processing. Examples 1 and 2 provide further details regarding the implementation of this method:
  • Example 1
  • Cu(I) acetate (1 mmol) and In(III) acetate (1 mmol) are added to a clean and dry RB-flask. Octadecene ODE (5 mL) is added the reaction mixture heated at 100° C. under vacuum for 30 mins. The flask is back-filled with nitrogen and the temperature raised to 140° C. 1-octane selenol is injected and the temperature falls to 120° C. The resulting orange suspension is heated with stirring and a transparent orange/red solution is obtained when the temperature has reached 140° C. This temperature is maintained for 30 minutes, then 1M tri-octyl-phoshine selenide TOPSe (2 mL, 2 mmol) is added dropwise and the solution heated at 160° C. The PL is monitored until it reaches the desired wavelength, after which it is cooled and the resulting oil washed with methanol/acetone (2:1) 4-5 times and finally isolated by precipitation with acetone.
  • Example 2 Large Scale Production
  • A stock solution of TOPSe was prepared by dissolving Se powder (10.9, 138 mmol) in TOP (60 mL) under nitrogen. To dry, degassed ODE was added Cu(I) acetate (7.89 g, 64.4 mmol) and In(III) acetate (20.0 g, 68.5 mmol). The reaction vessel was evacuated and heated at 140° C. for 10 min, backfilled with N2 and cooled to room temp. 1-Octane selenol (200 mL) was added to produce a bright orange suspension. The temperature of the flask was raised to 140° C. and acetic acid distilled from the reaction at 120° C. On reaching 140° C. the TOPSe solution was added dropwise over the course of 1 hour. After 3 hours the temperature was raised to 160° C. The progress of the reaction was monitored by taking aliquots from the reaction periodically and measuring the UV/Visible and photoluminescence spectra. After 7 hours the reaction was cooled to room temperature and the resulting black oil washed with methanol. Methanol washing was continued until it was possible to precipitate a fine black material from the oil by addition of acetone. The black precipitate was isolated by centrifugation, washed with acetone and dried under vacuum. Yield: 31.97 g.
  • To optimize particle properties or the selection of suitable dispersants, the nanoparticles can be characterized with respect to their composition, size, and charge by conventional techniques including x-ray diffraction (XRD), UV/Vis/Near-IR spectrometry, scanning or transmission electron microscopy (SEM/TEM), energy dispersive x-ray microanalysis (EDAX), photoluminescence spectrometry, and/or elemental analysis. Inductively coupled plasma atomic-emission spectroscopy (ICPAES) analysis of representative Cu/In/Se core particles, prepared in a 1-octane selenol capping agent which was subsequently removed, provided the following suitable nanoparticle composition: Cu 16.6%; In 36.6%; Se 48.3%, corresponding to Cu1.00, In1.22, Se2.34, and a Cu/In ratio of 0.82.
  • In preferred embodiments of this invention, the nanoparticles have average sizes not greater than 20 nm, and low size dispersities of around ±2 nm or less. Conformance to these constraints facilitates printing of thin films with control over the band structure through the film, resulting in high conversion efficiencies. Moreover, low size dispersities allow for good packing of the nanoparticles, and uniform melting temperature of the nanoparticle films, which contributes to proper film formation.
  • The nanoparticles are dispersed in a carrier comprising solvents, such as toluene, and dispersing agents to form the printing composition. The dispersion may take the form of a solution, colloid, or suspension, generally depending on the particle size, and may have the consistency of a liquid, paste, or other viscoelastic material, as long as it is flowable. Its viscosity should be within the range from 0.158×1011 cP to 2.3×1011 cP.
  • In embodiments in which water-based inks are formed with non-soluble nanoparticles, surface area and charge of the particles drive the selection of dispersants suitable for ink formulation. For example, in pigment-based inkjet printing, the overall charge the particles acquire (i.e., the zeta potential) in the medium in which they are dispersed should be sufficiently high to ensure dispersion stability; but excessive dispersion stability can result in flocculation and consequent clogging of the printer head. To ensure the jetting potential of the ink through the nozzle, the average agglomerate size should be minimized. In the printing industry, it is generally recognized that particle sizes of over 500 nm may cause plugging of the inkjet nozzles, compromising print quality.
  • To mitigate print-head blocking concerns, nanoparticles can be coated in water-solubilizing capping agents, such as a mercaptocarboxylic acid (e.g., mercaptoacetic acid). For example, U.S. Pat. No. 6,114,038, the entire disclosure of which is hereby incorporated by reference, teaches how to exchange the coating groups of water-insoluble, pyridine-capped nanocrystals with a large excess of neat mercaptocarboxylic acid to obtain water-soluble capped nanocrystals. In brief, the pyridine-capped nanocrystals are precipitated with hexanes and centrifuged; the residue is dissolved in neat mercaptoacetic acid and incubated at room temperature for at least six hours; chloroform is added to precipitate the nanocrystals and wash away excess thiol; and the nanocrystals are again centrifuged, washed with chloroform and hexane, and dried with argon. The viscosity of the printing composition (nanoparticle-based ink) is desirably adjusted to achieve plastic flow behavior, i.e., where viscosity is essentially independent of flow rate. This facilitates control over coating characteristics. Capping agents needed for solubilization or suspension can be removed to stop the formation of carbon deposits within the film. In some cases, this removal occurs naturally as a result of annealing at elevated temperatures, but if does not, it can be aided by a prior etching step 116, 120.
  • 4. Applications
  • Semiconductor thin-film structures manufactured according to the method illustrated in FIG. 1 can be used in photovoltaic cells, LEDs, transistors, and other semiconductor devices. FIG. 3A illustrates a representative structure of a solar cell with a CIGS absorber film. The substrate 305 comprises molybdenum on glass, and the submicron Mo layer also provides the back contact of the cell 300. The absorber film 307 comprises a series of annealed layers of CIGS, and exhibits increasing Ga and decreasing In concentration towards the Mo contact 300. This film can be manufactured by printing and annealing each layer consecutively. Alternatively, as illustrated in FIG. 3B, which exemplifies the In and Ga contents of individual layers, it can be manufactured by first depositing all the layers, and subsequently fusing these layers into one continuous film in one annealing step. A buffer layer 312 forms the junction with the CIGS film. Conventionally, this junction comprises CdS. However, due to environmental and health concerns associated with Cd, preferred PV cells are cadmium-free, using ZnS, ZnO(O,OH), or In2S3 instead. Accordingly, a ZnO layer 314 over a glass cover 316 provides the superstrate of the cell 300. The performance of a ZnO/ZnO(O,OH)/CIGS/Mo cell can be improved or optimized by introducing layers of other semiconductor materials within the absorber film 307. CIGS variants (e.g., as shown in the following Table 1) in which Se is replaced by S or Te, Cu by Ag, or In or Ga by Al, for example, can be used to manipulate the energies of the valence and conduction bands to aid in electron-hole capture. Embodiments of the invention provide a convenient means to integrate these additional layers. Moreover, if nanoparticle sources are available for the junction layer and/or the substrate or superstrate, these layers can likewise be integrated into the device by printing and annealing, as long as none of the required annealing temperatures is detrimental to the other layers within the device.
  • TABLE 1
    Low Bandgap High Bandgap
    Material Eg (eV) Material Eg (eV)
    CuInSe2 1.0  CuAlSe2 2.71
    CuInTe2 1.0-1.15 CuInS2 1.53
    CuGaTe2 1.23 CuAlTe2 2.06
    CuGaSe2 1.70
    CuGaS2 2.50
    AgInSe2 1.20 AgGaSe2 1.80
    AgGaTe2 1.1-1.3  AgAlSe2 1.66
    AgAlTe2 0.56 AgInS2 1.80
    AgGaSe2 1.80
    AgGaS2 2.55
    AgAlS2 3.13
  • Although the present invention has been described with reference to specific details, it is not intended that such details should be regarded as limitations upon the scope of the invention, except as and to the extent that they are included in the accompanying claims.

Claims (19)

1. A flowable printing composition comprising a carrier and a dispersion of nanoparticles therein, the nanoparticles comprising first and second components, the first component comprising at least one of Cu or Ag, and the second component comprising at least one of Se, Te, or S, the composition having a viscosity substantially independent of flow rate.
2. The printing composition of claim 1, wherein the first component comprises Cu or Ag, but not both.
3. The printing composition of claim 1, wherein the second component comprises exactly one of the elements Se, Te, or S.
4. The printing composition of claim 1, wherein the nanoparticles comprise a third component comprising at least one of In, Ga, or Al.
5. The printing composition of claim 4, wherein the nanoparticles have the formula CuIn1-xGaxSe2 where x varies between 1 and 0.
6. The printing composition of claim 1, wherein the composition is adapted for use in a printing method selected from the group consisting of inkjet printing, pneumatic spraying, screen printing, pad printing, laser printing, dot matrix printing, thermal printing, lithography and 3D printing.
7. The printing composition of claim 1, wherein the nanoparticles have an average size not greater than 20 nm.
8. The printing composition of claim 1, wherein the nanoparticles have a size dispersity of ±2 nm or less.
9. The printing composition of claim 1, wherein the carrier comprises at least one of a solvent or a dispersing agent.
10. The printing composition of claim 9, wherein the solvent is an organic solvent.
11. The printing composition of claim 10, wherein the solvent is toluene.
12. The printing composition of claim 1, wherein the dispersion has a form selected from the group consisting of a solution, a colloid and a suspension.
13. The printing composition of claim 1, wherein the composition has a viscosity in the range from 0.158×1011 cP to 2.3×1011 cP.
14. The printing composition of claim 1, wherein the nanoparticles are coated with a capping agent.
15. The printing composition of claim 14, wherein the capping agent is a water solubilising capping agent.
16. The printing composition of claim 14, wherein the capping agent is mercaptoacetic acid.
17. A flowable printing composition comprising a carrier and a dispersion of nanoparticles therein, the nanoparticles each comprising first, second, and third components, the first component comprising at least one of Cu or Ag, the second component comprising at least one of Se, Te, or S, and the third component comprising at least one of In, Ga, or Al, the composition having a viscosity substantially independent of flow rate.
18. The printing composition of claim 17, wherein the first component comprises Cu or Ag, but not both.
19. The printing composition of claim 17, wherein the second component comprises exactly one of the elements Se, Te, or S.
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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080257201A1 (en) * 2007-04-18 2008-10-23 James Harris Fabrication of Electrically Active Films Based on Multiple Layers
US20090139574A1 (en) * 2007-11-30 2009-06-04 Nanoco Technologies Limited Preparation of nanoparticle material
US20090212258A1 (en) * 2008-02-25 2009-08-27 Nanoco Technologies Limited Semicondcutor nanoparticle capping agents
US20100059721A1 (en) * 2008-07-19 2010-03-11 Nanoco Technologies Limited Method for Producing Aqueous Compatible Nanoparticles
US20100068522A1 (en) * 2008-08-07 2010-03-18 Nanoco Technologies Limited Surface Functionalised Nanoparticles
US20100113813A1 (en) * 2008-11-04 2010-05-06 Nanoco Technologies Limited Surface functionalised nanoparticles
US20100123155A1 (en) * 2008-11-19 2010-05-20 Nanoco Technologies Limited Semiconductor nanoparticle-based light-emitting devices and associated materials and methods
US20100193767A1 (en) * 2009-02-05 2010-08-05 Imad Naasani Encapsulated nanoparticles
US20110070443A1 (en) * 2004-04-30 2011-03-24 Nanoco Technologies Limited Preparation of Nanoparticle Materials
US20110068322A1 (en) * 2009-09-23 2011-03-24 Nanoco Technologies Limited Semiconductor Nanoparticle-Based Materials
US20110068321A1 (en) * 2009-09-23 2011-03-24 Nanoco Technologies Limited Semiconductor nanoparticle-based materials
US20110108799A1 (en) * 2005-08-12 2011-05-12 Nigel Pickett Nanoparticles
US8394663B2 (en) 2007-04-25 2013-03-12 Nanoco Technologies, Ltd. Hybrid photovoltaic cells and related methods
US8859442B2 (en) 2010-04-01 2014-10-14 Nanoco Technologies Ltd. Encapsulated nanoparticles
CN106392066A (en) * 2016-11-11 2017-02-15 湖北万佳宏铝业股份有限公司 Method for preparing aluminum alloy section bar by 3D printing
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Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7588828B2 (en) * 2004-04-30 2009-09-15 Nanoco Technologies Limited Preparation of nanoparticle materials
GB0522027D0 (en) * 2005-10-28 2005-12-07 Nanoco Technologies Ltd Controlled preparation of nanoparticle materials
GB0606845D0 (en) 2006-04-05 2006-05-17 Nanoco Technologies Ltd Labelled beads
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US20090301562A1 (en) * 2008-06-05 2009-12-10 Stion Corporation High efficiency photovoltaic cell and manufacturing method
BRPI1006965A2 (en) * 2009-01-21 2016-04-12 Purdue Research Foundation selenization of precursor layer containing cuins2 nanoparticles
TWI644865B (en) * 2009-06-29 2018-12-21 國立成功大學 Method for preparing cuinx2 compound nano-particles using polyol
KR20120043050A (en) * 2009-08-04 2012-05-03 프리커서 에너제틱스, 인코퍼레이티드. Polymeric precursors for caigas aluminum-containing photovoltaics
KR20120043051A (en) 2009-08-04 2012-05-03 프리커서 에너제틱스, 인코퍼레이티드. Polymeric precursors for cis and cigs photovoltaics
CN102473778A (en) * 2009-08-04 2012-05-23 普瑞凯瑟安质提克斯公司 Methods for photovoltaic absorbers with controlled stoichiometry
EP2462150A2 (en) * 2009-08-04 2012-06-13 Precursor Energetics, Inc. Polymeric precursors for caigs and aigs silver-containing photovoltaics
US8224006B2 (en) 2009-08-28 2012-07-17 Siemens Medical Instruments Pte. Ltd. Hearing aid device and a method of manufacturing a hearing aid device
TWI406431B (en) * 2009-10-29 2013-08-21 Bosin Technology Co Ltd Method of manufacturing absorption layer of solar cells and its structure
WO2011084171A1 (en) * 2009-12-17 2011-07-14 Precursor Energetics, Inc. Molecular precursors for optoelectronics
US8289352B2 (en) * 2010-07-15 2012-10-16 HJ Laboratories, LLC Providing erasable printing with nanoparticles
US20130136917A1 (en) * 2010-08-05 2013-05-30 Newcastle Innovation Limited Processes for preparing devices and films based on conductive nanoparticles
US8883550B2 (en) 2010-09-15 2014-11-11 Precursor Energetics, Inc. Deposition processes for photovoltaic devices
US20120122265A1 (en) * 2010-11-17 2012-05-17 Hitachi Chemical Company, Ltd. Method for producing photovoltaic cell
WO2012138480A2 (en) 2011-04-08 2012-10-11 Ut-Battelle, Llc Methods for producing complex films, and films produced thereby
WO2013106836A1 (en) * 2012-01-13 2013-07-18 The Regents Of The University Of California Metal-chalcogenide photovoltaic device with metal-oxide nanoparticle window layer
KR101712053B1 (en) 2012-07-09 2017-03-03 나노코 테크놀로지스 리미티드 Group XIII Selenide Nanoparticles
JP2016510179A (en) 2013-03-15 2016-04-04 ナノコ テクノロジーズ リミテッド PV device with adjusted particle size and S: Se ratio
WO2014172252A1 (en) * 2013-04-15 2014-10-23 Kent State University Patterned liquid crystal alignment using ink-jet printed nanoparticles and use thereof to produce patterned, electro-optically addressable devices; ink-jet printable compositions
US9196767B2 (en) 2013-07-18 2015-11-24 Nanoco Technologies Ltd. Preparation of copper selenide nanoparticles
KR102164628B1 (en) 2013-08-05 2020-10-13 삼성전자주식회사 Processes for synthesizing nanocrystals
US9960314B2 (en) 2013-09-13 2018-05-01 Nanoco Technologies Ltd. Inorganic salt-nanoparticle ink for thin film photovoltaic devices and related methods
US9893220B2 (en) * 2013-10-15 2018-02-13 Nanoco Technologies Ltd. CIGS nanoparticle ink formulation having a high crack-free limit
CN108840312A (en) * 2013-11-15 2018-11-20 纳米技术有限公司 The preparation of copper and indium (gallium) diselenide/disulphide nanoparticle of copper-rich
US9837191B2 (en) * 2014-01-02 2017-12-05 Raytheon Company Method of connecting an additive communication cable to an electrical harness
CA2937085C (en) 2014-01-17 2023-09-12 Graphene 3D Lab Inc. Fused filament fabrication using multi-segment filament
US10170651B2 (en) * 2014-01-30 2019-01-01 Nanoco Technologies Ltd. Metal-doped cu(In,Ga) (S,Se)2 nanoparticles
JP2017511782A (en) 2014-01-31 2017-04-27 ナノコ テクノロジーズ リミテッド H2S reactive annealing to reduce carbon in thin films made from nanoparticles
US10727537B2 (en) 2014-09-02 2020-07-28 G6 Materials Corp. Electrochemical devices comprising nanoscopic carbon materials made by additive manufacturing
US11097492B2 (en) 2015-03-02 2021-08-24 G6 Materials Corp. Thermoplastic composites comprising water-soluble PEO graft polymers useful for 3-dimensional additive manufacturing
CN105153807B (en) 2015-07-21 2016-10-19 京东方科技集团股份有限公司 Quantum dot ink
US11591467B2 (en) 2015-07-29 2023-02-28 G6 Materials Corp. Thermoplastic polymer composites and methods for preparing, collecting, and tempering 3D printable materials and articles from same
US11648731B2 (en) 2015-10-29 2023-05-16 Hewlett-Packard Development Company, L.P. Forming three-dimensional (3D) printed electronics
CN106784170B (en) * 2016-12-07 2018-06-01 深圳摩方材料科技有限公司 A kind of Superlight solar cell prepared based on 3D printing technique
CN108039392A (en) * 2017-11-06 2018-05-15 北京汉能薄膜发电技术有限公司 Copper-indium-gallium-selenium compound, ink and its film absorption layer preparation method
US20210187858A1 (en) * 2019-12-18 2021-06-24 Dieu Cam Vuong Method and system for manufacturing of pharmaceutical formulas in form of orally disintegrating films (odf)

Citations (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2769838A (en) * 1953-11-20 1956-11-06 Ciba Pharm Prod Inc Polyglycol ether acid anilides
US3524771A (en) * 1969-04-03 1970-08-18 Zenith Radio Corp Semiconductor devices
US4609689A (en) * 1984-04-27 1986-09-02 Becton, Dickinson And Company Method of preparing fluorescently labeled microbeads
US6114038A (en) * 1998-11-10 2000-09-05 Biocrystal Ltd. Functionalized nanocrystals and their use in detection systems
US6207229B1 (en) * 1997-11-13 2001-03-27 Massachusetts Institute Of Technology Highly luminescent color-selective materials and method of making thereof
US6221602B1 (en) * 1998-11-10 2001-04-24 Bio-Pixels Ltd. Functionalized nanocrystals and their use in labeling for strand synthesis or sequence determination
US6261779B1 (en) * 1998-11-10 2001-07-17 Bio-Pixels Ltd. Nanocrystals having polynucleotide strands and their use to form dendrimers in a signal amplification system
US6326144B1 (en) * 1998-09-18 2001-12-04 Massachusetts Institute Of Technology Biological applications of quantum dots
US6333110B1 (en) * 1998-11-10 2001-12-25 Bio-Pixels Ltd. Functionalized nanocrystals as visual tissue-specific imaging agents, and methods for fluorescence imaging
US6379635B2 (en) * 1995-09-15 2002-04-30 Imperial College Of Science, Technology & Medicine Process for preparing a nanocrystalline material
US6423551B1 (en) * 1997-11-25 2002-07-23 The Regents Of The University Of California Organo luminescent semiconductor nanocrystal probes for biological applications and process for making and using such probes
US6426513B1 (en) * 1998-09-18 2002-07-30 Massachusetts Institute Of Technology Water-soluble thiol-capped nanocrystals
US20030017264A1 (en) * 2001-07-20 2003-01-23 Treadway Joseph A. Luminescent nanoparticles and methods for their preparation
US20030106488A1 (en) * 2001-12-10 2003-06-12 Wen-Chiang Huang Manufacturing method for semiconductor quantum particles
US20030148024A1 (en) * 2001-10-05 2003-08-07 Kodas Toivo T. Low viscosity precursor compositons and methods for the depositon of conductive electronic features
US6607829B1 (en) * 1997-11-13 2003-08-19 Massachusetts Institute Of Technology Tellurium-containing nanocrystalline materials
US6660379B1 (en) * 1999-02-05 2003-12-09 University Of Maryland, Baltimore Luminescence spectral properties of CdS nanoparticles
US20040007169A1 (en) * 2002-01-28 2004-01-15 Mitsubishi Chemical Corporation Semiconductor nanoparticles and thin film containing the same
US20040036130A1 (en) * 2001-08-02 2004-02-26 Lee Howard Wing Hoon Methods of forming quantum dots of group iv semiconductor materials
US6699723B1 (en) * 1997-11-25 2004-03-02 The Regents Of The University Of California Organo luminescent semiconductor nanocrystal probes for biological applications and process for making and using such probes
US20040110002A1 (en) * 2002-08-13 2004-06-10 Sungjee Kim Semiconductor nanocrystal heterostructures
US20040110347A1 (en) * 2002-05-28 2004-06-10 Matsushita Electric Industrial Co. Ltd. Method of production of nanoparticle and nanoparticle produced by the method of production
US20040178390A1 (en) * 2002-09-05 2004-09-16 Nanosys, Inc. Organic species that facilitate charge transfer to or from nanostructures
US20040250745A1 (en) * 2003-03-31 2004-12-16 Nof Corporation Polyethylene glycol-modified semiconductor nanoparticles, method for producing the same, and material for biological diagnosis
US6855551B2 (en) * 1998-09-18 2005-02-15 Massachusetts Institute Of Technology Biological applications of quantum dots
US20050098204A1 (en) * 2003-05-21 2005-05-12 Nanosolar, Inc. Photovoltaic devices fabricated from nanostructured template
US20050129947A1 (en) * 2003-01-22 2005-06-16 Xiaogang Peng Monodisperse core/shell and other complex structured nanocrystals and methods of preparing the same
US6914264B2 (en) * 2002-09-20 2005-07-05 Formosa Epitaxy Incorporation Structure and manufacturing method for GaN light emitting diodes
US20050145853A1 (en) * 2002-12-19 2005-07-07 Hitachi Software Engineering Co., Ltd. Semiconductor nanoparticle and method for producing same
US20050183767A1 (en) * 2004-02-19 2005-08-25 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US20060019098A1 (en) * 2004-07-26 2006-01-26 Chan Yinthai Microspheres including nanoparticles
US6992202B1 (en) * 2002-10-31 2006-01-31 Ohio Aerospace Institute Single-source precursors for ternary chalcopyrite materials, and methods of making and using the same
US20060061017A1 (en) * 2004-09-20 2006-03-23 The Regents Of The University Of California Method for synthesis of colloidal nanoparticles
US20060062902A1 (en) * 2004-09-18 2006-03-23 Nanosolar, Inc. Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
US20060068154A1 (en) * 2004-01-15 2006-03-30 Nanosys, Inc. Nanocrystal doped matrixes
US20060110279A1 (en) * 2002-12-16 2006-05-25 Mingyong Han Ternary and quarternary nanocrystals, processes for their production and uses thereof
US20060118757A1 (en) * 2004-12-03 2006-06-08 Klimov Victor I Multifunctional nanocrystals
US20060130741A1 (en) * 2001-07-30 2006-06-22 Xiaogang Peng High quality colloidal nanocrystals and methods of preparing the same in non-coordinating solvents
US7151047B2 (en) * 2004-04-28 2006-12-19 Warren Chan Stable, water-soluble quantum dot, method of preparation and conjugates thereof
US20070012941A1 (en) * 2005-07-13 2007-01-18 Kwang-Ohk Cheon Light emitting diode comprising semiconductor nanocrystal complexes
US20070034833A1 (en) * 2004-01-15 2007-02-15 Nanosys, Inc. Nanocrystal doped matrixes
US20070059705A1 (en) * 2003-08-08 2007-03-15 Huachang Lu Fluorescent magnetic nanoparticles and process of preparation
US20070104865A1 (en) * 2005-10-28 2007-05-10 Nanoco Technologies Limited Controlled preparation of nanoparticle materials
US20070110816A1 (en) * 2005-11-11 2007-05-17 Jun Shin-Ae Method of coating nanoparticles
US20070114520A1 (en) * 2005-09-02 2007-05-24 Osram Opto Semiconductors Gmbh Radiation emitting device and method of manufacturing the same
US20070131905A1 (en) * 2005-01-06 2007-06-14 Hitachi Software Engineering Co., Ltd. Semiconductor nanoparticle surface modification method
US20070199109A1 (en) * 2006-02-21 2007-08-23 Samsung Electronics Co., Ltd. Nanocomposite material and method of manufacturing the same
US20070202333A1 (en) * 2004-04-30 2007-08-30 Nanoco Technologies Limited Preparation Of Nanoparticle Materials
US7264527B2 (en) * 1998-04-01 2007-09-04 Lumileds Lighting U.S., Llc Quantum dot white and colored light-emitting devices
US20070238126A1 (en) * 2006-04-05 2007-10-11 Nanoco Technologies Limited Labelled beads
US20080107911A1 (en) * 2006-11-06 2008-05-08 Evident Technologies, Inc. Water-stable semiconductor nanocrystal complexes and methods of making same
US20080121844A1 (en) * 2006-08-21 2008-05-29 Samsung Electronics Co., Ltd. Composite light-emitting material and light-emitting device comprising the same
US20080122877A1 (en) * 2004-06-15 2008-05-29 Koji Aoyama Image Processing Device And Method, Storage Medium, And Program
US20080160306A1 (en) * 2004-04-30 2008-07-03 Nanoco Technologies Limited Preparation of Nanoparticle Materials
US20080220593A1 (en) * 2005-08-12 2008-09-11 Nanoco Technologies Limited Nanoparticles
US20080257201A1 (en) * 2007-04-18 2008-10-23 James Harris Fabrication of Electrically Active Films Based on Multiple Layers
US20080264479A1 (en) * 2007-04-25 2008-10-30 Nanoco Technologies Limited Hybrid Photovoltaic Cells and Related Methods
US20090139574A1 (en) * 2007-11-30 2009-06-04 Nanoco Technologies Limited Preparation of nanoparticle material
US20090190483A1 (en) * 2008-01-25 2009-07-30 Inventec Corporation Network transmission system and a testing method thereof
US20090212258A1 (en) * 2008-02-25 2009-08-27 Nanoco Technologies Limited Semicondcutor nanoparticle capping agents
US20100059721A1 (en) * 2008-07-19 2010-03-11 Nanoco Technologies Limited Method for Producing Aqueous Compatible Nanoparticles
US20100068522A1 (en) * 2008-08-07 2010-03-18 Nanoco Technologies Limited Surface Functionalised Nanoparticles
US20100113813A1 (en) * 2008-11-04 2010-05-06 Nanoco Technologies Limited Surface functionalised nanoparticles
US20100123155A1 (en) * 2008-11-19 2010-05-20 Nanoco Technologies Limited Semiconductor nanoparticle-based light-emitting devices and associated materials and methods
US20100193767A1 (en) * 2009-02-05 2010-08-05 Imad Naasani Encapsulated nanoparticles

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3249407B2 (en) * 1996-10-25 2002-01-21 昭和シェル石油株式会社 Thin-film solar cells composed of chalcopyrite-based multi-compound semiconductor thin-film light-absorbing layers
JP4425470B2 (en) 1998-09-18 2010-03-03 マサチューセッツ インスティテュート オブ テクノロジー Biological applications of semiconductor nanocrystals
WO2002004527A2 (en) 2000-07-11 2002-01-17 Sri International Encoding methods using up-converting phosphors for high-throughput screening of catalysts
EP1176646A1 (en) 2000-07-28 2002-01-30 Ecole Polytechnique Féderale de Lausanne (EPFL) Solid state heterojunction and solid state sensitized photovoltaic cell
EP1318973A2 (en) 2000-09-22 2003-06-18 Glaxo Group Limited Novel alkanoic acid derivatives
DE60143622D1 (en) 2000-10-04 2011-01-20 Univ Arkansas SYNTHESIS OF COLLOIDAL METAL CHALCOGENIDE NANOCRYSTALLS
CN1394599A (en) 2001-07-06 2003-02-05 中国科学院上海原子核研究所 Preparation method of medicinal antimony sulfide nano colloidal particles
AU2003251890A1 (en) 2002-07-15 2004-02-02 Advanced Research And Technology Institute, Inc. Rapid low-temperature synthesis of quantum dots
US7563507B2 (en) 2002-08-16 2009-07-21 University Of Massachusetts Pyridine and related ligand compounds, functionalized nanoparticulate composites and methods of preparation
AU2003264452A1 (en) 2002-09-20 2004-05-04 Matsushita Electric Industrial Co., Ltd. Method for preparing nano-particle and nano-particle prepared by said preparation method
EP1556902A4 (en) * 2002-09-30 2009-07-29 Miasole Manufacturing apparatus and method for large-scale production of thin-film solar cells
WO2005021150A2 (en) 2003-09-01 2005-03-10 The University Of Manchester Labelled polymeric materials
JP2005139389A (en) 2003-11-10 2005-06-02 Sumitomo Osaka Cement Co Ltd Semiconductor of ultrafine particle
WO2006001848A2 (en) 2004-02-12 2006-01-05 Advanced Research And Technology Institute, Inc. Quantum dots as high-sensitivity optical sensors and biocompatible imaging probes, compositions thereof, and related methods
US20080044340A1 (en) 2004-06-10 2008-02-21 Ohio University Method for Producing Highly Monodisperse Quantum Dots
US20070045777A1 (en) 2004-07-08 2007-03-01 Jennifer Gillies Micronized semiconductor nanocrystal complexes and methods of making and using same
EP1783137A4 (en) 2004-08-26 2014-10-22 Nippon Shinyaku Co Ltd Galactose derivative, drug carrier and medicinal composition
EP1848995A4 (en) 2005-01-17 2010-09-29 Agency Science Tech & Res Water-soluble nanocrystals and methods of preparing them
TWI389897B (en) 2005-02-22 2013-03-21 Chugai Pharmaceutical Co Ltd 1- (2H) -isoquinolinone derivatives
EP1861916A4 (en) 2005-03-16 2013-03-27 Nanosolar Inc Mettalic dispersion and formation of compound film for photovoltaic device active layer
WO2006118543A1 (en) 2005-05-04 2006-11-09 Agency For Science, Technology And Research Novel water-soluble nanocrystals comprising a low molecular weight coating reagent, and methods of preparing the same
KR101374512B1 (en) 2005-06-15 2014-03-14 이섬 리서치 디벨러프먼트 컴파니 오브 더 히브루 유니버시티 오브 예루살렘 엘티디. Ⅲ-Ⅴ Semiconductor Core-heteroshell nanocrystals
DE202005021785U1 (en) * 2005-08-05 2010-02-25 Epoq Gmbh Apparatus for conducting telephone campaigns
AU2007217091A1 (en) 2006-02-16 2007-08-30 Solexant Corp. Nanoparticle sensitized nanostructured solar cells
WO2007149835A2 (en) * 2006-06-20 2007-12-27 Konarka Technologies, Inc. Photovoltaic cells
US20080112877A1 (en) * 2006-11-14 2008-05-15 Toyota Engineering & Manufacturing North America, Inc. Metal telluride nanocrystals and synthesis thereof
US20080190483A1 (en) * 2007-02-13 2008-08-14 Carpenter R Douglas Composition and method of preparing nanoscale thin film photovoltaic materials
GB0714865D0 (en) 2007-07-31 2007-09-12 Nanoco Technologies Ltd Nanoparticles

Patent Citations (77)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2769838A (en) * 1953-11-20 1956-11-06 Ciba Pharm Prod Inc Polyglycol ether acid anilides
US3524771A (en) * 1969-04-03 1970-08-18 Zenith Radio Corp Semiconductor devices
US4609689A (en) * 1984-04-27 1986-09-02 Becton, Dickinson And Company Method of preparing fluorescently labeled microbeads
US6379635B2 (en) * 1995-09-15 2002-04-30 Imperial College Of Science, Technology & Medicine Process for preparing a nanocrystalline material
US6207229B1 (en) * 1997-11-13 2001-03-27 Massachusetts Institute Of Technology Highly luminescent color-selective materials and method of making thereof
US6607829B1 (en) * 1997-11-13 2003-08-19 Massachusetts Institute Of Technology Tellurium-containing nanocrystalline materials
US6322901B1 (en) * 1997-11-13 2001-11-27 Massachusetts Institute Of Technology Highly luminescent color-selective nano-crystalline materials
US6699723B1 (en) * 1997-11-25 2004-03-02 The Regents Of The University Of California Organo luminescent semiconductor nanocrystal probes for biological applications and process for making and using such probes
US6423551B1 (en) * 1997-11-25 2002-07-23 The Regents Of The University Of California Organo luminescent semiconductor nanocrystal probes for biological applications and process for making and using such probes
US7264527B2 (en) * 1998-04-01 2007-09-04 Lumileds Lighting U.S., Llc Quantum dot white and colored light-emitting devices
US6326144B1 (en) * 1998-09-18 2001-12-04 Massachusetts Institute Of Technology Biological applications of quantum dots
US7235361B2 (en) * 1998-09-18 2007-06-26 Massachusetts Institute Of Technology Biological applications of quantum dots
US6426513B1 (en) * 1998-09-18 2002-07-30 Massachusetts Institute Of Technology Water-soluble thiol-capped nanocrystals
US6855551B2 (en) * 1998-09-18 2005-02-15 Massachusetts Institute Of Technology Biological applications of quantum dots
US6261779B1 (en) * 1998-11-10 2001-07-17 Bio-Pixels Ltd. Nanocrystals having polynucleotide strands and their use to form dendrimers in a signal amplification system
US6333110B1 (en) * 1998-11-10 2001-12-25 Bio-Pixels Ltd. Functionalized nanocrystals as visual tissue-specific imaging agents, and methods for fluorescence imaging
US6221602B1 (en) * 1998-11-10 2001-04-24 Bio-Pixels Ltd. Functionalized nanocrystals and their use in labeling for strand synthesis or sequence determination
US6114038A (en) * 1998-11-10 2000-09-05 Biocrystal Ltd. Functionalized nanocrystals and their use in detection systems
US6660379B1 (en) * 1999-02-05 2003-12-09 University Of Maryland, Baltimore Luminescence spectral properties of CdS nanoparticles
US20030017264A1 (en) * 2001-07-20 2003-01-23 Treadway Joseph A. Luminescent nanoparticles and methods for their preparation
US20070125983A1 (en) * 2001-07-20 2007-06-07 Invitrogen Corporation Methods for the preparation of luminescent nanoparticles using two solvents
US20060057382A1 (en) * 2001-07-20 2006-03-16 Treadway Joseph A Luminescent nanoparticles and methods for their preparation
US6815064B2 (en) * 2001-07-20 2004-11-09 Quantum Dot Corporation Luminescent nanoparticles and methods for their preparation
US20060130741A1 (en) * 2001-07-30 2006-06-22 Xiaogang Peng High quality colloidal nanocrystals and methods of preparing the same in non-coordinating solvents
US20040036130A1 (en) * 2001-08-02 2004-02-26 Lee Howard Wing Hoon Methods of forming quantum dots of group iv semiconductor materials
US20030148024A1 (en) * 2001-10-05 2003-08-07 Kodas Toivo T. Low viscosity precursor compositons and methods for the depositon of conductive electronic features
US20030106488A1 (en) * 2001-12-10 2003-06-12 Wen-Chiang Huang Manufacturing method for semiconductor quantum particles
US20040007169A1 (en) * 2002-01-28 2004-01-15 Mitsubishi Chemical Corporation Semiconductor nanoparticles and thin film containing the same
US20040110347A1 (en) * 2002-05-28 2004-06-10 Matsushita Electric Industrial Co. Ltd. Method of production of nanoparticle and nanoparticle produced by the method of production
US20040110002A1 (en) * 2002-08-13 2004-06-10 Sungjee Kim Semiconductor nanocrystal heterostructures
US20040178390A1 (en) * 2002-09-05 2004-09-16 Nanosys, Inc. Organic species that facilitate charge transfer to or from nanostructures
US6914264B2 (en) * 2002-09-20 2005-07-05 Formosa Epitaxy Incorporation Structure and manufacturing method for GaN light emitting diodes
US6992202B1 (en) * 2002-10-31 2006-01-31 Ohio Aerospace Institute Single-source precursors for ternary chalcopyrite materials, and methods of making and using the same
US20060110279A1 (en) * 2002-12-16 2006-05-25 Mingyong Han Ternary and quarternary nanocrystals, processes for their production and uses thereof
US20050145853A1 (en) * 2002-12-19 2005-07-07 Hitachi Software Engineering Co., Ltd. Semiconductor nanoparticle and method for producing same
US20050129947A1 (en) * 2003-01-22 2005-06-16 Xiaogang Peng Monodisperse core/shell and other complex structured nanocrystals and methods of preparing the same
US20040250745A1 (en) * 2003-03-31 2004-12-16 Nof Corporation Polyethylene glycol-modified semiconductor nanoparticles, method for producing the same, and material for biological diagnosis
US20050098204A1 (en) * 2003-05-21 2005-05-12 Nanosolar, Inc. Photovoltaic devices fabricated from nanostructured template
US20070059705A1 (en) * 2003-08-08 2007-03-15 Huachang Lu Fluorescent magnetic nanoparticles and process of preparation
US20060068154A1 (en) * 2004-01-15 2006-03-30 Nanosys, Inc. Nanocrystal doped matrixes
US20070034833A1 (en) * 2004-01-15 2007-02-15 Nanosys, Inc. Nanocrystal doped matrixes
US20050183767A1 (en) * 2004-02-19 2005-08-25 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US7151047B2 (en) * 2004-04-28 2006-12-19 Warren Chan Stable, water-soluble quantum dot, method of preparation and conjugates thereof
US20070202333A1 (en) * 2004-04-30 2007-08-30 Nanoco Technologies Limited Preparation Of Nanoparticle Materials
US7803423B2 (en) * 2004-04-30 2010-09-28 Nanoco Technologies Limited Preparation of nanoparticle materials
US7588828B2 (en) * 2004-04-30 2009-09-15 Nanoco Technologies Limited Preparation of nanoparticle materials
US20080160306A1 (en) * 2004-04-30 2008-07-03 Nanoco Technologies Limited Preparation of Nanoparticle Materials
US20080122877A1 (en) * 2004-06-15 2008-05-29 Koji Aoyama Image Processing Device And Method, Storage Medium, And Program
US20060019098A1 (en) * 2004-07-26 2006-01-26 Chan Yinthai Microspheres including nanoparticles
US20060062902A1 (en) * 2004-09-18 2006-03-23 Nanosolar, Inc. Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
US20060061017A1 (en) * 2004-09-20 2006-03-23 The Regents Of The University Of California Method for synthesis of colloidal nanoparticles
US20060118757A1 (en) * 2004-12-03 2006-06-08 Klimov Victor I Multifunctional nanocrystals
US20070131905A1 (en) * 2005-01-06 2007-06-14 Hitachi Software Engineering Co., Ltd. Semiconductor nanoparticle surface modification method
US20070012941A1 (en) * 2005-07-13 2007-01-18 Kwang-Ohk Cheon Light emitting diode comprising semiconductor nanocrystal complexes
US7867557B2 (en) * 2005-08-12 2011-01-11 Nanoco Technologies Limited Nanoparticles
US20080220593A1 (en) * 2005-08-12 2008-09-11 Nanoco Technologies Limited Nanoparticles
US20070114520A1 (en) * 2005-09-02 2007-05-24 Osram Opto Semiconductors Gmbh Radiation emitting device and method of manufacturing the same
US7867556B2 (en) * 2005-10-28 2011-01-11 Nanoco Technologies Limited Controlled preparation of nanoparticle materials
US20070104865A1 (en) * 2005-10-28 2007-05-10 Nanoco Technologies Limited Controlled preparation of nanoparticle materials
US20070110816A1 (en) * 2005-11-11 2007-05-17 Jun Shin-Ae Method of coating nanoparticles
US20070199109A1 (en) * 2006-02-21 2007-08-23 Samsung Electronics Co., Ltd. Nanocomposite material and method of manufacturing the same
US7544725B2 (en) * 2006-04-05 2009-06-09 Nanoco Technologies Limited Labelled beads
US20090263816A1 (en) * 2006-04-05 2009-10-22 Nanoco Technologies Limited Labelled beads
US7674844B2 (en) * 2006-04-05 2010-03-09 Nanoco Technologies Limited Labelled beads
US20070238126A1 (en) * 2006-04-05 2007-10-11 Nanoco Technologies Limited Labelled beads
US20080121844A1 (en) * 2006-08-21 2008-05-29 Samsung Electronics Co., Ltd. Composite light-emitting material and light-emitting device comprising the same
US20080107911A1 (en) * 2006-11-06 2008-05-08 Evident Technologies, Inc. Water-stable semiconductor nanocrystal complexes and methods of making same
US20080257201A1 (en) * 2007-04-18 2008-10-23 James Harris Fabrication of Electrically Active Films Based on Multiple Layers
US20080264479A1 (en) * 2007-04-25 2008-10-30 Nanoco Technologies Limited Hybrid Photovoltaic Cells and Related Methods
US20090139574A1 (en) * 2007-11-30 2009-06-04 Nanoco Technologies Limited Preparation of nanoparticle material
US20090190483A1 (en) * 2008-01-25 2009-07-30 Inventec Corporation Network transmission system and a testing method thereof
US20090212258A1 (en) * 2008-02-25 2009-08-27 Nanoco Technologies Limited Semicondcutor nanoparticle capping agents
US20100059721A1 (en) * 2008-07-19 2010-03-11 Nanoco Technologies Limited Method for Producing Aqueous Compatible Nanoparticles
US20100068522A1 (en) * 2008-08-07 2010-03-18 Nanoco Technologies Limited Surface Functionalised Nanoparticles
US20100113813A1 (en) * 2008-11-04 2010-05-06 Nanoco Technologies Limited Surface functionalised nanoparticles
US20100123155A1 (en) * 2008-11-19 2010-05-20 Nanoco Technologies Limited Semiconductor nanoparticle-based light-emitting devices and associated materials and methods
US20100193767A1 (en) * 2009-02-05 2010-08-05 Imad Naasani Encapsulated nanoparticles

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Tapping Mode Atomic Force Microscopy for Nanoparticle Sizing: Tip-Sample Interaction Effects"Yuval Ebenstein ; Nano Letters, 2002, 2 (9), pp 945-950 *
Malik et al. "A Novel Route for the Preparation of CuSe and CuInSe2 Nanoparticles"; Advanced MaterialsVolume 11, Issue 17, pages 1441-1444, December, *

Cited By (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110070443A1 (en) * 2004-04-30 2011-03-24 Nanoco Technologies Limited Preparation of Nanoparticle Materials
US8524365B2 (en) 2004-04-30 2013-09-03 Nanoco Technologies Ltd. Preparation of nanoparticle materials
US8062703B2 (en) 2004-04-30 2011-11-22 Nanoco Technologies Ltd. Preparation of nanoparticle materials
US7985446B2 (en) 2004-04-30 2011-07-26 Nanoco Technologies Limited Preparation of nanoparticle materials
US20110070147A1 (en) * 2004-04-30 2011-03-24 Nanoco Technologies Limited Preparation of Nanoparticle Materials
US20110108799A1 (en) * 2005-08-12 2011-05-12 Nigel Pickett Nanoparticles
US8563348B2 (en) 2007-04-18 2013-10-22 Nanoco Technologies Ltd. Fabrication of electrically active films based on multiple layers
US20080257201A1 (en) * 2007-04-18 2008-10-23 James Harris Fabrication of Electrically Active Films Based on Multiple Layers
US8394663B2 (en) 2007-04-25 2013-03-12 Nanoco Technologies, Ltd. Hybrid photovoltaic cells and related methods
US9251922B2 (en) 2007-11-30 2016-02-02 Nanoco Technologies, Ltd. Preparation of nanoparticle material
US8784701B2 (en) 2007-11-30 2014-07-22 Nanoco Technologies Ltd. Preparation of nanoparticle material
US20090139574A1 (en) * 2007-11-30 2009-06-04 Nanoco Technologies Limited Preparation of nanoparticle material
US20090212258A1 (en) * 2008-02-25 2009-08-27 Nanoco Technologies Limited Semicondcutor nanoparticle capping agents
US8337720B2 (en) 2008-02-25 2012-12-25 Nanoco Technologies, Ltd. Semiconductor nanoparticle capping agents
US20100059721A1 (en) * 2008-07-19 2010-03-11 Nanoco Technologies Limited Method for Producing Aqueous Compatible Nanoparticles
US8741177B2 (en) 2008-07-19 2014-06-03 Nanoco Technologies Ltd. Method for producing aqueous compatible nanoparticles
US20100068522A1 (en) * 2008-08-07 2010-03-18 Nanoco Technologies Limited Surface Functionalised Nanoparticles
US8597730B2 (en) 2008-08-07 2013-12-03 Nanoco Technologies Ltd. Surface functionalised nanoparticles
US8394976B2 (en) 2008-11-04 2013-03-12 Nanoco Technologies, Ltd. Surface functionalised nanoparticles
US20100113813A1 (en) * 2008-11-04 2010-05-06 Nanoco Technologies Limited Surface functionalised nanoparticles
US20100123155A1 (en) * 2008-11-19 2010-05-20 Nanoco Technologies Limited Semiconductor nanoparticle-based light-emitting devices and associated materials and methods
US8921827B2 (en) 2008-11-19 2014-12-30 Nanoco Technologies, Ltd. Semiconductor nanoparticle-based light-emitting devices and associated materials and methods
US20100193767A1 (en) * 2009-02-05 2010-08-05 Imad Naasani Encapsulated nanoparticles
US8847197B2 (en) 2009-09-23 2014-09-30 Nanoco Technologies Ltd. Semiconductor nanoparticle-based materials
US20110068321A1 (en) * 2009-09-23 2011-03-24 Nanoco Technologies Limited Semiconductor nanoparticle-based materials
US8957401B2 (en) 2009-09-23 2015-02-17 Nanoco Technologies, Ltd Semiconductor nanoparticle-based materials
US20110068322A1 (en) * 2009-09-23 2011-03-24 Nanoco Technologies Limited Semiconductor Nanoparticle-Based Materials
US9543481B2 (en) 2009-09-23 2017-01-10 Nanoco Technologies Ltd. Semiconductor nanoparticle-based materials
US8859442B2 (en) 2010-04-01 2014-10-14 Nanoco Technologies Ltd. Encapsulated nanoparticles
US9159590B2 (en) 2010-04-01 2015-10-13 Nanoco Technologies, Ltd. Encapsulated nanoparticles
WO2018071847A1 (en) * 2016-10-14 2018-04-19 Bulk Nano Processing Llc Rotary filter apparatus for roll-to-roll nanomaterial dispersion papermaking
CN106392066A (en) * 2016-11-11 2017-02-15 湖北万佳宏铝业股份有限公司 Method for preparing aluminum alloy section bar by 3D printing

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