US20100156050A1 - Sealing device for rotary feedthrough - Google Patents
Sealing device for rotary feedthrough Download PDFInfo
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- US20100156050A1 US20100156050A1 US12/643,457 US64345709A US2010156050A1 US 20100156050 A1 US20100156050 A1 US 20100156050A1 US 64345709 A US64345709 A US 64345709A US 2010156050 A1 US2010156050 A1 US 2010156050A1
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- sealing
- sealing elements
- machine element
- sealing device
- rotating machine
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/002—Sealings comprising at least two sealings in succession
- F16J15/004—Sealings comprising at least two sealings in succession forming of recuperation chamber for the leaking fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/002—Sealings comprising at least two sealings in succession
- F16J15/006—Sealings comprising at least two sealings in succession with division of the pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
- F16J15/3208—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip provided with tension elements, e.g. elastic rings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
- F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
- F16J15/3228—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip formed by deforming a flat ring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/46—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/002—Sealings comprising at least two sealings in succession
Definitions
- the invention relates to a sealing device for a rotary feedthrough as is used, for example, in vacuum-processing facilities for coating substrates.
- Rotary feedthroughs are needed in order to feed rotating parts (such as, for example, shafts) through housing walls and the like when the driving machine element, e.g. a drive device, is disposed on one side of the housing wall and the machine element to be driven, e.g. a rotating target, is disposed on the other side of the housing wall.
- the driving machine element e.g. a drive device
- the machine element to be driven e.g. a rotating target
- a pressure differential must be maintained between the two sides of the housing wall (for example, atmospheric pressure on one side, high vacuum on the other side) and/or the atmospheres on the two sides of the housing walls have different compositions (for example, air on one side, inert gas on the other side), then it is necessary to configure the rotary feedthrough so that one prevents an undesired equalization of pressure or an exchange of gas between the two sides of the housing wall due to leakage in the rotary feedthrough.
- Rotary feedthroughs for vacuum facilities can, for example, comprise two seals acting in tandem, where one seal is disposed so that it seals towards the atmosphere and the other seal is disposed so that it seals towards the vacuum or the process atmosphere. Between these two seals a complete separation of the media can be achieved, for example, with a sealing medium, that is, a sealing gas or a sealing liquid. Alternatively, separation of an atmosphere and a processing space can be achieved with an intermediate vacuum generated between both seals.
- sealing materials to be used must have good sliding properties in dry operation. This requirement can, for example, be met with the material PTFE with portions of graphite, molybdenum disulphide, or bronzes.
- the shaft surface can, for example, be coated with chromium oxide, which, in given cases, can be sealed with phenolic resin, thus attaining a very high strength of sealing.
- sealing elements of the sealing device can be provided, for example, with a sealing lip.
- Such sealing lips can, for example, be generated by using as a sealing element a circular ring disc whose inner diameter is less than the outer diameter of the rotating machine element which projects through the rotary feedthrough. Along with this there is a sealing gap between the sealing lip and the rotating machine element, said sealing gap being under intrinsic tension.
- the envisioned sealing combinations have the disadvantage that the sealing lip disposed nearer to the vacuum, due to the lower forces of compression, produces a lower sealing action and the sealing lip disposed nearer to the atmosphere experiences higher wear.
- One object is thus to fashion a sealing combination which simultaneously has good sliding characteristics and low wear and achieves a long service lifetime of the rotary feedthrough.
- the wear of both seals should be matched and the sealing action of the sealing combination should be increased.
- the seals or the sealing elements comprised therein, materials be selected which have good sliding characteristics and low wear.
- materials be selected which have good sliding characteristics and low wear.
- an additional force is applied at least to one sealing element.
- the additional force can be constant, for example, by a spring element being used which encircles the sealing element and is manufactured of a non-conductive material with elastic properties, for example, a polymer.
- This can, for example, be an O-ring or a special ring with a rectangular cross section, where the diameter is chosen so that the ring in the installed state is preloaded and in this way a constant additional force acting in the radial direction on the sealing element is generated ( FIGS. 1 , 2 , 3 ).
- the magnitude of the additional force thus generated can be set.
- the spring element can also consist of a metallic annular spring which is interrupted in a contact-free manner at least one point.
- a variable, and thus also dynamically adjustable, additional force can be generated if a cavity encircling the sealing element is provided, said cavity being pressurized with a selectable internal pressure.
- This can be formed by the sealing element itself, for example, by the sealing element being a tube which is adjacent to the rotating machine element.
- the sealing element can also be a tube which is provided in addition and is adjacent to the sealing element ( FIG. 4 ).
- the sealing element participates in the formation of the spring element in working together with other components, e.g. an additional ring which is also a part of the sealing device, so that the sealing element acts as a membrane which generates an additional radial force on the rotating machine element, said radial force being a function of the internal pressure of the cavity formed ( FIG. 5 ).
- the necessary preloading of the sealing lips is achieved via the atmospheric pressure and in the area of the intermediate vacuum by means of a spring element.
- the spring element is designed so that in total the generated force of compression on one sealing element is the same as the force of compression on the other sealing element, that force of compression being caused by the atmospheric pressure. Since the same forces act on both sealing elements, a maximum sealing with equal wear is achieved.
- FIG. 1 shows a first embodiment example in which the additional force of a sealing element is generated by a spring element and the atmospheric pressure acting thereon,
- FIG. 2 shows a second embodiment example in which the additional force of a sealing element is generated by a mechanically preloaded spring element
- FIG. 3 shows a third embodiment example in which the sealing element is embodied as one piece
- FIG. 4 shows a fourth embodiment example in which the spring element is a tube provided in addition and adjacent to the sealing element
- FIG. 5 shows a fifth embodiment example in which the sealing element forms a cavity whose internal pressure communicating with the atmosphere generates the additional force
- FIG. 6 shows a sixth embodiment example in which the sealing element forms a cavity whose internal pressure communicating with the atmosphere generates the additional force.
- FIGS. 1 to 4 each show a sealing device comprising two sealing elements 7 and 8 disposed in tandem in the axial direction with sealing lips 9 turned up and an intermediate suction element disposed between the two sealing element 7 and 8 for generating a fore vacuum and intermediate vacuum.
- the compressive force of the inner sealing element 7 disposed nearer to the vacuum acts on the shaft 3 .
- the sealing device comprises several components disposed in tandem in a bearing seat 1 and held in position with a flange 2 with concentric openings through which a shaft 3 can be fed.
- These components comprise an inner limiting ring 4 , a central limiting ring 5 , and an outer limiting ring 6 , where the inner limiting ring 4 is disposed on the side of the vacuum and the outer limiting ring 6 is disposed on the side of the atmosphere as well as an inner sealing element 7 disposed between the inner limiting ring 4 and the central limiting ring 5 and an outer sealing element 8 disposed between the central limiting ring 5 and the outer limiting ring 6 .
- the inner sealing element 7 and the outer sealing element 8 are each embodied as flat circular ring disc whose inner diameter is less than the outer diameter of the shaft 3 so that the inner edge of the circular ring disc is turned up and thus forms a sealing lip 9 abutting the shaft 3 .
- the limiting rings 4 , 5 , and 6 comprise, at suitable points, grooves into which O-rings 10 are laid which serve for sealing the limiting rings 4 , 5 , and 6 against one another or against the sealing elements 7 and 8 as well as against the bearing seat 1 .
- the central limiting ring 5 comprises two holes which on one side empty between the inner sealing element 7 and the outer sealing element 8 and on the other side are connected to channels which are provided in the bearing seat 1 . These are a gas intake duct 11 and a gas suction duct 12 .
- the suction duct 12 serves to generate a fore vacuum or intermediate vacuum between the inner sealing element 7 and the outer sealing element 8 .
- the gas intake duct 11 on the contrary communicates with the atmosphere so that in the area of its port between the inner sealing element 7 and the outer sealing element 8 atmospheric pressure prevails.
- the membrane ring has the object of sealing the gas intake duct 11 with respect to the sealing lip 9 , the sealing lip 9 of the inner sealing element 7 lying in the area of the fore vacuum generated by the gas suction duct, and simultaneously transmitting the atmospheric pressure to the spring element 13 .
- the embodiment example represented in FIG. 2 is distinguished from the embodiment example above by the fact that no gas intake duct 11 is present. Instead of this, the spring element 13 is disposed between the central limiting ring 5 and the sealing lip 9 of the inner sealing element 7 and in fact so that the spring element 13 is preloaded. This can be achieved by a suitable choice of the inner diameter of the central limiting ring 5 , of the outer diameter of the sealing lip 9 of the inner sealing element 7 , and the thickness of the spring element 13 .
- the preloading can be set so that the preloading of the spring element 13 generates an additional force on the sealing lip 9 of the inner sealing element 7 , said additional force corresponding to the radial force generated by the atmospheric pressure which is acting on the sealing lip 9 of the outer sealing element 8 .
- the additional force on the sealing lip 9 of the inner sealing element 7 is generated in a manner analogous to the embodiment example according to FIG. 2 , namely by mechanical preloading between the sealing lip 9 and a limiting ring.
- the inner limiting ring 4 is the inner limiting ring 4 .
- a central limiting ring is not provided.
- the inner limiting ring 4 is simultaneously the inner sealing element 7 , that is, the sealing element 7 is not embodied as a separate, flat circular ring disc but rather is integrated into the inner limiting ring 4 .
- the outer sealing element 8 with the sealing lip 9 is an integral component of the outer limiting ring 6 .
- FIG. 4 a further embodiment example is represented in which a tube 15 is inserted into the gas intake duct 11 , said tube being adjacent to the sealing lip 9 of the inner sealing element 7 in the interior of the central limiting ring 5 . Due to the difference in pressure between the atmospheric pressure within the tube 15 and the fore vacuum outside of the tube 15 the tube 15 inflates and thus generates an additional radial force on the sealing lip 9 of the inner sealing element 7 .
- an auxiliary ring 16 is disposed between the inner limiting ring 4 and the central limiting ring 5 , said auxiliary ring comprising the hole connected to the gas intake duct 11 .
- This hole empties into the interior of an inner sealing element 7 which is U-shaped in longitudinal section so that the atmospheric pressure acts on the lower area of the U-shaped cross section and thus there is generated an additional radial force on this lower area generating the sealing action with respect to the shaft 3 .
- a gas suction duct 12 is in turn disposed for generating a fore vacuum or an intermediate vacuum.
- FIG. 6 A similar development of a sealing device is represented in FIG. 6 .
- the inner limiting ring 4 itself forms the inner sealing element 7 .
- a central limiting ring 5 is not needed.
- the auxiliary ring 16 is embedded in the inner limiting ring 4 , that is, the auxiliary ring 16 is encircled by the inner limiting ring 4 .
- the inner sealing element 7 disposed nearer to the vacuum, together with the encircled auxiliary ring 16 forms a spring element with a cavity, where the encircled auxiliary ring 16 comprises a hole through which the cavity communicates with the gas intake duct 11 and in this way with the atmosphere.
- the atmospheric pressure acts on the lower area of the inner sealing element 7 and thus there is generated an additional radial force on this lower area, said radial force generating the sealing action with respect to the shaft 3 .
- a gas suction duct 12 for generating a fore vacuum and an intermediate vacuum, said duct emptying in the embodiment example in the area of the outer sealing element 8 with the sealing lip 9 .
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Architecture (AREA)
- Fluid Mechanics (AREA)
- Mechanical Sealing (AREA)
- Sealing Devices (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
A sealing device for a rotary feedthrough for receiving a rotating machine element whose outer side can be applied to another machine element includes at least two sealing elements disposed in tandem in the axial direction of the machine element. Inner sides of the sealing elements are configured for forming an active sealing connection with the rotating machine element. At least one of the sealing elements can be pressurized with an additional force acting in the radial direction so that the force of compression acting on the rotating machine element for the at least one of the sealing elements can be adjusted relative to the force of compression acting on the rotating machine element due to at least one other sealing element.
Description
- The invention relates to a sealing device for a rotary feedthrough as is used, for example, in vacuum-processing facilities for coating substrates.
- Rotary feedthroughs are needed in order to feed rotating parts (such as, for example, shafts) through housing walls and the like when the driving machine element, e.g. a drive device, is disposed on one side of the housing wall and the machine element to be driven, e.g. a rotating target, is disposed on the other side of the housing wall.
- If a pressure differential must be maintained between the two sides of the housing wall (for example, atmospheric pressure on one side, high vacuum on the other side) and/or the atmospheres on the two sides of the housing walls have different compositions (for example, air on one side, inert gas on the other side), then it is necessary to configure the rotary feedthrough so that one prevents an undesired equalization of pressure or an exchange of gas between the two sides of the housing wall due to leakage in the rotary feedthrough.
- Rotary feedthroughs for vacuum facilities can, for example, comprise two seals acting in tandem, where one seal is disposed so that it seals towards the atmosphere and the other seal is disposed so that it seals towards the vacuum or the process atmosphere. Between these two seals a complete separation of the media can be achieved, for example, with a sealing medium, that is, a sealing gas or a sealing liquid. Alternatively, separation of an atmosphere and a processing space can be achieved with an intermediate vacuum generated between both seals.
- It is known that at higher rate of flow of alternating current through the shaft all the electrically conductive components which encircle the shaft in the manner of a ring can heat up to the point of destruction due to self-induction. This has as a consequence the fact that, in the selection of seals, springs, or supporting rings which encircle the shaft, attention must be paid to the fact that they have to be of non-conductive material or interrupted in their circumference.
- It is also known that the sealing materials to be used must have good sliding properties in dry operation. This requirement can, for example, be met with the material PTFE with portions of graphite, molybdenum disulphide, or bronzes. The shaft surface can, for example, be coated with chromium oxide, which, in given cases, can be sealed with phenolic resin, thus attaining a very high strength of sealing.
- However, several vacuum processes using large amounts of oxygen require a seal free of sealing media and cannot consist of oxidizing materials. For these instances of use, the sealing material PTFE with portions of polyoxybenzoyl ester combined with a countersurface of chromium oxide sealed with phenolic resin has proven itself effective. In that case the seal runs on the chromium oxide layer without lubrication.
- In order to achieve a sufficient sealing effect, sealing elements of the sealing device can be provided, for example, with a sealing lip. Such sealing lips can, for example, be generated by using as a sealing element a circular ring disc whose inner diameter is less than the outer diameter of the rotating machine element which projects through the rotary feedthrough. Along with this there is a sealing gap between the sealing lip and the rotating machine element, said sealing gap being under intrinsic tension.
- The atmospheric pressure which is present and the intermediate vacuum which is present generate in addition a pressure load on the sealing lip. Under the different pressure loads of the two sealing lips, different wear of the same arises towards the sliding surface. However, wear is of decisive importance for the service lifetime of the sealing device.
- In the selection of the sealing materials of the sealing lips one must pay attention to the properties of good restoration properties, low wear, and good sliding characteristics. Problematic in the selection of the sealing materials is the fact that all the properties have mutual interactions.
- The envisioned sealing combinations have the disadvantage that the sealing lip disposed nearer to the vacuum, due to the lower forces of compression, produces a lower sealing action and the sealing lip disposed nearer to the atmosphere experiences higher wear.
- One object is thus to fashion a sealing combination which simultaneously has good sliding characteristics and low wear and achieves a long service lifetime of the rotary feedthrough. The wear of both seals should be matched and the sealing action of the sealing combination should be increased.
- For this purpose it is first of all proposed that for the seals, or the sealing elements comprised therein, materials be selected which have good sliding characteristics and low wear. Moreover, it is proposed to actively affect the relationship of the forces of compression which are exerted on the rotating machine element by the sealing elements in that it is provided that an additional force is applied at least to one sealing element. The additional force can be constant, for example, by a spring element being used which encircles the sealing element and is manufactured of a non-conductive material with elastic properties, for example, a polymer. This can, for example, be an O-ring or a special ring with a rectangular cross section, where the diameter is chosen so that the ring in the installed state is preloaded and in this way a constant additional force acting in the radial direction on the sealing element is generated (
FIGS. 1 , 2, 3). By an appropriate design the magnitude of the additional force thus generated can be set. - The spring element can also consist of a metallic annular spring which is interrupted in a contact-free manner at least one point.
- A variable, and thus also dynamically adjustable, additional force can be generated if a cavity encircling the sealing element is provided, said cavity being pressurized with a selectable internal pressure. This can be formed by the sealing element itself, for example, by the sealing element being a tube which is adjacent to the rotating machine element. The sealing element can also be a tube which is provided in addition and is adjacent to the sealing element (
FIG. 4 ). Finally, it can be provided that the sealing element participates in the formation of the spring element in working together with other components, e.g. an additional ring which is also a part of the sealing device, so that the sealing element acts as a membrane which generates an additional radial force on the rotating machine element, said radial force being a function of the internal pressure of the cavity formed (FIG. 5 ). - In the embodiment examples presented the necessary preloading of the sealing lips is achieved via the atmospheric pressure and in the area of the intermediate vacuum by means of a spring element. The spring element is designed so that in total the generated force of compression on one sealing element is the same as the force of compression on the other sealing element, that force of compression being caused by the atmospheric pressure. Since the same forces act on both sealing elements, a maximum sealing with equal wear is achieved.
- In the following the invention will be explained in more detail with the aid of embodiment examples and corresponding drawings. Therein
-
FIG. 1 shows a first embodiment example in which the additional force of a sealing element is generated by a spring element and the atmospheric pressure acting thereon, -
FIG. 2 shows a second embodiment example in which the additional force of a sealing element is generated by a mechanically preloaded spring element, -
FIG. 3 shows a third embodiment example in which the sealing element is embodied as one piece, -
FIG. 4 shows a fourth embodiment example in which the spring element is a tube provided in addition and adjacent to the sealing element, -
FIG. 5 shows a fifth embodiment example in which the sealing element forms a cavity whose internal pressure communicating with the atmosphere generates the additional force, -
FIG. 6 shows a sixth embodiment example in which the sealing element forms a cavity whose internal pressure communicating with the atmosphere generates the additional force. - The embodiment examples of
FIGS. 1 to 4 each show a sealing device comprising twosealing elements 7 and 8 disposed in tandem in the axial direction withsealing lips 9 turned up and an intermediate suction element disposed between the twosealing element 7 and 8 for generating a fore vacuum and intermediate vacuum. Through the additionally providedspring element 13 the compressive force of the inner sealing element 7 disposed nearer to the vacuum acts on theshaft 3. - In
FIG. 1 the sealing device comprises several components disposed in tandem in abearing seat 1 and held in position with aflange 2 with concentric openings through which ashaft 3 can be fed. These components comprise an inner limitingring 4, a central limitingring 5, and an outerlimiting ring 6, where the inner limitingring 4 is disposed on the side of the vacuum and the outer limitingring 6 is disposed on the side of the atmosphere as well as an inner sealing element 7 disposed between the inner limitingring 4 and the central limitingring 5 and anouter sealing element 8 disposed between the central limitingring 5 and the outer limitingring 6. - The inner sealing element 7 and the
outer sealing element 8 are each embodied as flat circular ring disc whose inner diameter is less than the outer diameter of theshaft 3 so that the inner edge of the circular ring disc is turned up and thus forms asealing lip 9 abutting theshaft 3. - The limiting
rings rings 10 are laid which serve for sealing the limitingrings elements 7 and 8 as well as against thebearing seat 1. - The central limiting
ring 5 comprises two holes which on one side empty between the inner sealing element 7 and theouter sealing element 8 and on the other side are connected to channels which are provided in thebearing seat 1. These are agas intake duct 11 and agas suction duct 12. Thesuction duct 12 serves to generate a fore vacuum or intermediate vacuum between the inner sealing element 7 and theouter sealing element 8. Thegas intake duct 11 on the contrary communicates with the atmosphere so that in the area of its port between the inner sealing element 7 and theouter sealing element 8 atmospheric pressure prevails. - Between the port of the
gas intake duct 11 and the turned-upsealing lip 9 of the inner sealing element 7 anannular spring element 13 and amembrane ring 14 are disposed. The membrane ring has the object of sealing thegas intake duct 11 with respect to thesealing lip 9, thesealing lip 9 of the inner sealing element 7 lying in the area of the fore vacuum generated by the gas suction duct, and simultaneously transmitting the atmospheric pressure to thespring element 13. - In this way the atmospheric pressure is transmitted through the gas intake duct over the
membrane ring 14 and thespring element 13 to thesealing lip 9 of the inner sealing element 7 although at thesealing lip 9 of the inner sealing element 7 the pressure of the fore vacuum is present. Thus the pressure on the sealinglip 9 of the inner sealing element 7 is just as great as on the sealinglip 9 of theouter sealing element 8 which is directly exposed to the atmospheric pressure. - The embodiment example represented in
FIG. 2 is distinguished from the embodiment example above by the fact that nogas intake duct 11 is present. Instead of this, thespring element 13 is disposed between the central limitingring 5 and thesealing lip 9 of the inner sealing element 7 and in fact so that thespring element 13 is preloaded. This can be achieved by a suitable choice of the inner diameter of the central limitingring 5, of the outer diameter of thesealing lip 9 of the inner sealing element 7, and the thickness of thespring element 13. In so doing, the preloading can be set so that the preloading of thespring element 13 generates an additional force on thesealing lip 9 of the inner sealing element 7, said additional force corresponding to the radial force generated by the atmospheric pressure which is acting on thesealing lip 9 of theouter sealing element 8. - In the embodiment example according to
FIG. 3 the additional force on thesealing lip 9 of the inner sealing element 7 is generated in a manner analogous to the embodiment example according toFIG. 2 , namely by mechanical preloading between thesealing lip 9 and a limiting ring. In this case however it is the inner limitingring 4. A central limiting ring is not provided. In this development the inner limitingring 4 is simultaneously the inner sealing element 7, that is, the sealing element 7 is not embodied as a separate, flat circular ring disc but rather is integrated into the inner limitingring 4. In the same manner theouter sealing element 8 with the sealinglip 9 is an integral component of the outer limitingring 6. - In
FIG. 4 a further embodiment example is represented in which atube 15 is inserted into thegas intake duct 11, said tube being adjacent to the sealinglip 9 of the inner sealing element 7 in the interior of the central limitingring 5. Due to the difference in pressure between the atmospheric pressure within thetube 15 and the fore vacuum outside of thetube 15 thetube 15 inflates and thus generates an additional radial force on the sealinglip 9 of the inner sealing element 7. - In the embodiment example according to
FIG. 5 anauxiliary ring 16 is disposed between the inner limitingring 4 and the central limitingring 5, said auxiliary ring comprising the hole connected to thegas intake duct 11. This hole empties into the interior of an inner sealing element 7 which is U-shaped in longitudinal section so that the atmospheric pressure acts on the lower area of the U-shaped cross section and thus there is generated an additional radial force on this lower area generating the sealing action with respect to theshaft 3. - In the embodiment example according to
FIG. 5 the inner sealing element 7 disposed nearer to the vacuum, together with the adjacentauxiliary ring 16, forms a spring element with a cavity, where the adjacentauxiliary ring 16 comprises a hole through which the cavity communicates with thegas intake duct 11 and in this way with the atmosphere. Between the two sealing elements 7 and 8 agas suction duct 12 is in turn disposed for generating a fore vacuum or an intermediate vacuum. - A similar development of a sealing device is represented in
FIG. 6 . Therein the inner limitingring 4 itself forms the inner sealing element 7. A central limitingring 5 is not needed. Theauxiliary ring 16 is embedded in the inner limitingring 4, that is, theauxiliary ring 16 is encircled by the inner limitingring 4. The inner sealing element 7 disposed nearer to the vacuum, together with the encircledauxiliary ring 16, forms a spring element with a cavity, where the encircledauxiliary ring 16 comprises a hole through which the cavity communicates with thegas intake duct 11 and in this way with the atmosphere. The atmospheric pressure acts on the lower area of the inner sealing element 7 and thus there is generated an additional radial force on this lower area, said radial force generating the sealing action with respect to theshaft 3. Between the two sealingelements 7 and 8 there is disposed in turn agas suction duct 12 for generating a fore vacuum and an intermediate vacuum, said duct emptying in the embodiment example in the area of theouter sealing element 8 with the sealinglip 9. -
-
- 1 Bearing seat
- 2 Flange
- 3 Shaft
- 4 Inner limiting ring
- 5 Central limiting ring
- 6 Outer limiting ring
- 7 Inner sealing element
- 8 Outer sealing element
- 9 Sealing lip
- 10 O-Ring
- 11 Gas intake duct
- 12 Gas suction duct
- 13 Spring element
- 14 Membrane ring
- 15 Tube
- 16 Auxiliary ring
Claims (8)
1. Sealing device for a rotary feedthrough for receiving a rotating machine element whose outer side can be applied to another machine element, comprising at least two sealing elements disposed in tandem in an axial direction of the rotating machine element, the at least two sealing elements having inner sides configured for forming an active sealing connection with the rotating machine element, and means for pressurizing at least one of the sealing elements with an additional force acting in a radial direction so that force of compression acting on the rotating machine element for the at least one of the sealing elements relative to force of compression acting on the rotating machine element for at least one other of the sealing elements can be adjusted.
2. Sealing device according to claim 1 , wherein the means for pressurizing with the additional force comprises a spring element.
3. Sealing device according to claim 2 , wherein the spring element is adjacent to the at least one of the sealing elements and is manufactured of a non-conductive material.
4. Sealing device according to claim 2 , wherein the spring element comprises a ring of a polymer material.
5. Sealing device according to claim 2 , wherein the at least one of the sealing elements itself forms the spring element and comprises a cavity pressurized with an internal pressure.
6. Sealing device according to claim 2 , wherein the at least one of the sealing elements participates in the formation of the spring element with a cavity which can be pressurized with an internal pressure.
7. Sealing device according to claim 2 , wherein between two of the sealing elements at least one gas suction duct for generating a low pressure is disposed.
8. Sealing device according to claim 7 wherein said at least one as suction duct generates an intermediate vacuum.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US13/561,875 US8827275B2 (en) | 2008-12-22 | 2012-07-30 | Sealing device for rotary feedthrough |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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DE102008064181 | 2008-12-22 | ||
DE102008064181.2 | 2008-12-22 | ||
DE102009014214A DE102009014214A1 (en) | 2008-12-22 | 2009-03-25 | Seal device for rotary feedthrough |
DE102009014214.2 | 2009-03-25 |
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US13/561,875 Continuation US8827275B2 (en) | 2008-12-22 | 2012-07-30 | Sealing device for rotary feedthrough |
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US20100156050A1 true US20100156050A1 (en) | 2010-06-24 |
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US12/643,457 Abandoned US20100156050A1 (en) | 2008-12-22 | 2009-12-21 | Sealing device for rotary feedthrough |
US13/561,875 Expired - Fee Related US8827275B2 (en) | 2008-12-22 | 2012-07-30 | Sealing device for rotary feedthrough |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/561,875 Expired - Fee Related US8827275B2 (en) | 2008-12-22 | 2012-07-30 | Sealing device for rotary feedthrough |
Country Status (3)
Country | Link |
---|---|
US (2) | US20100156050A1 (en) |
BE (1) | BE1019119A5 (en) |
DE (1) | DE102009014214A1 (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US20110148048A1 (en) * | 2009-12-18 | 2011-06-23 | Von Ardenne Anlagentechnik Gmbh | Sealing arrangement |
US20110254231A1 (en) * | 2010-04-19 | 2011-10-20 | Isenberg Timothy J | Clean-In-Place Seal Assembly |
US20120267857A1 (en) * | 2011-04-20 | 2012-10-25 | Dresser-Rand Company | High moisture environment seal assembly |
CN103807448A (en) * | 2012-11-09 | 2014-05-21 | 克罗内斯股份公司 | Method and device for sealing a machine part relative to a second machine part |
US20140183826A1 (en) * | 2011-08-02 | 2014-07-03 | Nexter Mechanics | Rotating sealing device and sealing ring for such device |
US20140284883A1 (en) * | 2013-03-22 | 2014-09-25 | Saint-Gobain Performance Plastics Corporation | System, Method and Apparatus for Lip Seal Assembly |
US20150184751A1 (en) * | 2013-12-31 | 2015-07-02 | Aktiebolaget Skf | Fluid seal assembly with extruded sealing member for leakage protection |
US20170370473A1 (en) * | 2015-01-08 | 2017-12-28 | Krones Ag | Sealing ring |
US10041596B2 (en) | 2011-06-06 | 2018-08-07 | Elringklinger Ag | Radial shaft seal |
CN110067862A (en) * | 2019-05-06 | 2019-07-30 | 北京化工大学 | A kind of stirred tank sealing device, system and sealing control method |
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FR2967228B1 (en) * | 2011-12-21 | 2013-03-29 | Poclain Hydraulics Ind | DRAIN FOR DYNAMIC SEAL MOUNTING |
EP2836747A1 (en) * | 2012-05-07 | 2015-02-18 | Emigal Electronic Test Solutions Ltd. | Variable structure seals |
DE102013106788B4 (en) | 2013-06-28 | 2019-07-11 | VON ARDENNE Asset GmbH & Co. KG | Vacuum treatment plant with vacuum chamber feedthrough |
FR3033855B1 (en) | 2015-03-18 | 2017-03-10 | Skf Ab | BEARING, IN PARTICULAR FOR VEHICLE |
CN107949733B (en) * | 2015-07-31 | 2020-03-03 | 特瑞堡密封***美国有限公司 | High pressure seal |
DE102020215911A1 (en) | 2020-12-15 | 2022-06-15 | Siemens Energy Global GmbH & Co. KG | poetry |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4109922A (en) * | 1976-04-28 | 1978-08-29 | Soudure Autogene Francaise | Sealing device for a vacuum enclosure |
US4534569A (en) * | 1983-09-27 | 1985-08-13 | Mitsubishi Jukogyo Kabushiki Kaisha | Stern tube seal device providing a seal about a rotatable shaft |
US4741561A (en) * | 1984-03-02 | 1988-05-03 | Doryokuro Kakunenryo Kaihatsu Jigyodan | Remotely monitored seal in a connection joint |
US5137116A (en) * | 1990-05-30 | 1992-08-11 | Blohm + Voss Ag | Sealing device for a rotating shaft of a ship propeller shaft |
US5180008A (en) * | 1991-12-18 | 1993-01-19 | Fmc Corporation | Wellhead seal for wide temperature and pressure ranges |
US5219434A (en) * | 1991-02-19 | 1993-06-15 | Blohm+Voss Ag | Sealing arrangement for rotating propeller shafts of ships |
US5368648A (en) * | 1991-02-26 | 1994-11-29 | Tokyo Electron Sagami Kabushiki Kaisha | Sealing apparatus |
US5562406A (en) * | 1995-01-11 | 1996-10-08 | Ansimag Inc. | Seal assembly for fluid pumps and method for detecting leaks in fluid pumps or fluid containment devices |
US6481720B1 (en) * | 2000-08-07 | 2002-11-19 | Japan Marine Technologies Ltd. | Stern tube sealing apparatus |
US6514108B2 (en) * | 2000-12-28 | 2003-02-04 | B+V Industrietechnik Gmbh | Ocean-going ship, and an ocean-going vessel with a stern tube seal arrangement for sealing a stern tube for a propeller drive shaft, and an arrangement for sealing propeller drive shafts in an ocean-going vessel |
US6688604B2 (en) * | 1998-10-26 | 2004-02-10 | Teijin Seiki Co., Ltd. | Sealing mechanism for sealing a vacuum chamber |
US20040229240A1 (en) * | 1998-02-02 | 2004-11-18 | Watson Michnick Stephen William | In vivo screening of protein-protein interactions with protein-fragment complementation assays |
US7648177B2 (en) * | 2003-09-02 | 2010-01-19 | Atomate Corporation | Apparatus and method for actuating or maintaining a seal by differential pressure |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2702809A1 (en) | 1976-01-28 | 1977-08-04 | M & J Dev Co | VALVE |
DE2811196C2 (en) | 1978-03-15 | 1982-08-19 | Howaldtswerke-Deutsche Werft Ag Hamburg Und Kiel, 2300 Kiel | Sealing for shafts |
DE9014461U1 (en) * | 1990-10-18 | 1993-03-11 | Siemens Ag, 8000 Muenchen, De | |
DE4316672C1 (en) * | 1993-05-13 | 1994-07-28 | Mannesmann Ag | Device for the production of metallic bodies by spraying |
US5425543A (en) * | 1993-09-17 | 1995-06-20 | Buckshaw; Dennis J. | Seal assembly for rotating shaft |
JP3905937B2 (en) | 1996-06-26 | 2007-04-18 | キーパー株式会社 | Stern tube emergency seal device |
US6161834A (en) * | 1997-08-01 | 2000-12-19 | Imadco, Inc. | Pressure energized seal |
EP1954967B1 (en) * | 2005-11-15 | 2013-03-27 | Ashbridge & Roseburgh Inc. | Sequentially-deployable lip seal systems |
AT503578B1 (en) * | 2006-04-28 | 2007-11-15 | Andritz Ag Maschf | SEALING ARRANGEMENT |
-
2009
- 2009-03-25 DE DE102009014214A patent/DE102009014214A1/en not_active Withdrawn
- 2009-12-21 BE BE2009/0802A patent/BE1019119A5/en not_active IP Right Cessation
- 2009-12-21 US US12/643,457 patent/US20100156050A1/en not_active Abandoned
-
2012
- 2012-07-30 US US13/561,875 patent/US8827275B2/en not_active Expired - Fee Related
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4109922A (en) * | 1976-04-28 | 1978-08-29 | Soudure Autogene Francaise | Sealing device for a vacuum enclosure |
US4534569A (en) * | 1983-09-27 | 1985-08-13 | Mitsubishi Jukogyo Kabushiki Kaisha | Stern tube seal device providing a seal about a rotatable shaft |
US4741561A (en) * | 1984-03-02 | 1988-05-03 | Doryokuro Kakunenryo Kaihatsu Jigyodan | Remotely monitored seal in a connection joint |
US5137116A (en) * | 1990-05-30 | 1992-08-11 | Blohm + Voss Ag | Sealing device for a rotating shaft of a ship propeller shaft |
US5219434A (en) * | 1991-02-19 | 1993-06-15 | Blohm+Voss Ag | Sealing arrangement for rotating propeller shafts of ships |
US5368648A (en) * | 1991-02-26 | 1994-11-29 | Tokyo Electron Sagami Kabushiki Kaisha | Sealing apparatus |
US5180008A (en) * | 1991-12-18 | 1993-01-19 | Fmc Corporation | Wellhead seal for wide temperature and pressure ranges |
US5562406A (en) * | 1995-01-11 | 1996-10-08 | Ansimag Inc. | Seal assembly for fluid pumps and method for detecting leaks in fluid pumps or fluid containment devices |
US20040229240A1 (en) * | 1998-02-02 | 2004-11-18 | Watson Michnick Stephen William | In vivo screening of protein-protein interactions with protein-fragment complementation assays |
US6688604B2 (en) * | 1998-10-26 | 2004-02-10 | Teijin Seiki Co., Ltd. | Sealing mechanism for sealing a vacuum chamber |
US6481720B1 (en) * | 2000-08-07 | 2002-11-19 | Japan Marine Technologies Ltd. | Stern tube sealing apparatus |
US6514108B2 (en) * | 2000-12-28 | 2003-02-04 | B+V Industrietechnik Gmbh | Ocean-going ship, and an ocean-going vessel with a stern tube seal arrangement for sealing a stern tube for a propeller drive shaft, and an arrangement for sealing propeller drive shafts in an ocean-going vessel |
US7648177B2 (en) * | 2003-09-02 | 2010-01-19 | Atomate Corporation | Apparatus and method for actuating or maintaining a seal by differential pressure |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110148048A1 (en) * | 2009-12-18 | 2011-06-23 | Von Ardenne Anlagentechnik Gmbh | Sealing arrangement |
US20110254231A1 (en) * | 2010-04-19 | 2011-10-20 | Isenberg Timothy J | Clean-In-Place Seal Assembly |
US20120267857A1 (en) * | 2011-04-20 | 2012-10-25 | Dresser-Rand Company | High moisture environment seal assembly |
US9739379B2 (en) * | 2011-04-20 | 2017-08-22 | Dresser-Rand Company | High moisture environment seal assembly |
US10041596B2 (en) | 2011-06-06 | 2018-08-07 | Elringklinger Ag | Radial shaft seal |
US20140183826A1 (en) * | 2011-08-02 | 2014-07-03 | Nexter Mechanics | Rotating sealing device and sealing ring for such device |
US9435437B2 (en) * | 2011-08-02 | 2016-09-06 | Nexter Mechanics | Rotating sealing device and sealing ring for such device |
CN103807448A (en) * | 2012-11-09 | 2014-05-21 | 克罗内斯股份公司 | Method and device for sealing a machine part relative to a second machine part |
US20140284883A1 (en) * | 2013-03-22 | 2014-09-25 | Saint-Gobain Performance Plastics Corporation | System, Method and Apparatus for Lip Seal Assembly |
US20150184751A1 (en) * | 2013-12-31 | 2015-07-02 | Aktiebolaget Skf | Fluid seal assembly with extruded sealing member for leakage protection |
US20170370473A1 (en) * | 2015-01-08 | 2017-12-28 | Krones Ag | Sealing ring |
US10557553B2 (en) * | 2015-01-08 | 2020-02-11 | Krones Ag | Sealing ring |
CN110067862A (en) * | 2019-05-06 | 2019-07-30 | 北京化工大学 | A kind of stirred tank sealing device, system and sealing control method |
Also Published As
Publication number | Publication date |
---|---|
US8827275B2 (en) | 2014-09-09 |
US20120299247A1 (en) | 2012-11-29 |
BE1019119A5 (en) | 2012-03-06 |
DE102009014214A1 (en) | 2010-06-24 |
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