US20090120917A1 - Laser Processing Machines and Methods for Providing a Gas to the Beam Guide of a Laser Processing Machine - Google Patents
Laser Processing Machines and Methods for Providing a Gas to the Beam Guide of a Laser Processing Machine Download PDFInfo
- Publication number
- US20090120917A1 US20090120917A1 US12/267,185 US26718508A US2009120917A1 US 20090120917 A1 US20090120917 A1 US 20090120917A1 US 26718508 A US26718508 A US 26718508A US 2009120917 A1 US2009120917 A1 US 2009120917A1
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- Prior art keywords
- gas
- laser
- laser processing
- beam guide
- inlet
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Links
- 238000000034 method Methods 0.000 title claims description 16
- 239000007789 gas Substances 0.000 claims description 93
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims 1
- 238000003466 welding Methods 0.000 description 8
- 238000003698 laser cutting Methods 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 3
- 238000011010 flushing procedure Methods 0.000 description 3
- -1 for example Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
- B23K26/125—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases of mixed gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
- B23K26/128—Laser beam path enclosures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
- B23K26/1436—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for pressure control
Definitions
- the invention relates to laser processing machines having a device for providing gas to the laser beam guide, and to a method of providing a gas to the laser beam guide of a laser processing machine.
- Three dimensional (3D) laser processing machines include a laser processing head having a focusing element and a laser beam guide, as disclosed, for example, in EP 1 640 105 A1.
- the focusing element is a mirror and the beam guide is open towards the processing location.
- Such machines are mainly used for laser welding.
- a clean and constant atmosphere is necessary in the beam guide. Fluctuating CO 2 content, the presence of other substances which influence the beam spread, or an uneven temperature distribution over the beam cross-section can change the unprocessed beam and consequently also the properties at the focal point so that the constancy of the processing operation becomes worse.
- a solution which is already known is to fill the beam guide with clean nitrogen and to obtain, with a given volume flow, a throughput and also an elevated pressure counter to the introduction of contamination from the environment.
- the laser processing head of this laser cutting assembly does not have a lens which seals the beam guide in the direction towards the laser processing region, but instead an open aperture for separation. Expensive pure gas is also discharged from the beam guide through that aperture, but in a substantially smaller quantity than in the above-described laser welding assembly.
- EP 1 182 002 A1 has disclosed, for laser cutting machines having an optical lens unit, flushing a lens at the beam guiding side with very pure gas and accordingly increasing the pressure of the flushing gas in the beam guide when pressure decreases.
- the beam guide is not constructed so as to be open towards the workpiece because the lens seals the beam guide and the processing space relative to each other. Therefore, the pressure adjustment can be carried out in this instance with very pure (expensive) gas without this resulting in a serious cost disadvantage.
- the invention features a laser processing machine for processing a workpiece, the machine comprising: a laser processing head including an optical processing unit that is open to the workpiece; a laser beam guide having a first gas inlet for a first gas and a second gas inlet for a second gas; and a device for supplying a first gas to the first inlet and a second gas to the second inlet.
- the invention also features methods of providing gas to the laser beam guide of a laser processing machine.
- the machines and methods disclosed herein generally reduce the discharge of pure gas that is used to fill the beam guide in an open optical processing unit.
- the beam guide is filled by two gases at two different locations of the beam guide.
- the beam guide is in a manner of speaking subdivided into two gas part-chambers.
- Very pure gas is supplied to the first gas part-chamber with a low volume flow.
- the first gas part-chamber comprises the majority of the beam guiding space and is substantially closed.
- a second gas part-chamber adjoins the first gas part-chamber and is filled with a second gas, preferably a cost-effective gas such as clean air. Only a comparatively small proportion of the beam path is in the second gas part-chamber so that the disruption of the beam spread by the cost-effective gas is comparatively weak.
- the second gas part-chamber may be open, for example, in an optical mirror unit. Pressure fluctuations, etc., are adjusted in the second gas part-chamber.
- FIG. 1 is a perspective illustration of a laser cutting assembly.
- FIG. 2 is a perspective illustration of a laser welding assembly.
- FIG. 1 shows a laser processing machine 1 that includes a laser generator 2 (e.g., a CO 2 laser) and a laser processing head 4 which can be moved relative thereto in the direction of the double-headed arrow 3 .
- a laser beam 5 which is produced by means of the laser generator 2 , is directed from the laser generator 2 , through a beam guiding space 6 which is flushed with a gas, to the processing head 4 .
- the laser beam 5 is directed by the processing head 4 onto a workpiece 7 which is to be processed.
- the workpiece 7 is in the form of a metal sheet which is deposited on a workpiece support 8 of the laser processing machine 1 .
- Both laser piercing and laser-cutting are supported by the addition of a gas.
- Oxygen, nitrogen, compressed air and/or application-specific gases can be used as cutting gases 9 . Which gas is ultimately used is dependent on which materials are being cut and which quality requirements are placed on the workpiece.
- Cutting gas is supplied in the processing head near the processing location.
- the beam guiding space 6 is substantially filled with pure gas, for example, nitrogen.
- the beam guiding space 6 is delimited by a bellows or another hermetic closure (for example a tube, telescopic tube, flexible tube, or the like).
- the laser beam 5 is redirected and focused inside the laser processing head 4 so that a focused laser beam is directed onto the workpiece.
- a housing region of the laser processing head 4 associated with the beam guide 6 is separated from a housing region associated with the nozzle of the laser processing head by a mirror focusing unit (not shown), for example as disclosed by EP 1 623 790 A1 (U.S. 2006/027537, the full disclosure of which is incorporated herein by reference).
- the mirror focusing unit separates the process gas side and the beam guiding atmosphere from each other, and directs the laser beam 5 by an intermediate focal point.
- the components of the mirror focusing unit include a focusing paraboloid mirror and an ellipsoid mirror.
- An element that defines a small aperture through which the laser beam 5 passes is fitted at the intermediate focal point between the two mirrors.
- This type of optical processing unit results in an open beam guiding system.
- the diameter of the aperture is selected so as to be sufficiently large that the laser beam does not touch its edge and sufficiently small that the leakage loss of flushing gas from the beam guide side into the process side is low.
- pure gas having a pressure of 1.1 bar is introduced at a first gas inlet 10 directly downstream of the laser generator 2 .
- a second gas inlet 11 is provided directly upstream of the laser processing head 4 in the beam guide 6 .
- cleaned air is introduced in place of pure gas.
- Practically the whole of the beam guide 6 is flooded with pure gas so that expansion of the laser beam 5 is prevented.
- Cleaned air is introduced transversely relative to the flow of pure gas by means of the second gas inlet 11 .
- the end of the beam guide 6 and the laser cutting head 4 are filled predominantly with the cleaned air, mixed with a small proportion of the pure gas.
- the gas/air mixture can be discharged via a nozzle opening (not shown) of the cutting head.
- an excess pressure valve 12 and a gas compensation volume 13 are provided.
- FIG. 2 shows the construction of a laser welding assembly 101 .
- a machine frame carries the movement unit of the machine and the beam guiding system having redirecting mirrors for a laser beam 105 which is produced in the laser generator 102 .
- a laser welding head 104 having a tilted mirror and a focusing mirror (not shown) is movable by means of two axes of rotation and in three directions in order best to be able to process a weld seam, for example to join together two components 107 and 107 ′ which are arranged on a support.
- the components 107 and 107 ′ are fixed in position by means of a clamping device.
- process gases working gas, protective gas
- a beam guiding chamber 106 is substantially filled with pure gas, for example, nitrogen.
- the beam guiding chamber 106 is delimited by a bellows or another hermetic closure (e.g., a tube, telescopic tube, or the like).
- pure gas having a pressure of 1.1 bar is introduced at a first gas inlet 111 directly downstream of the laser generator 102 .
- a second gas inlet 112 is provided directly upstream of the laser processing head 104 in the beam guide 106 .
- cleaned air is introduced in place of the pure gas.
- Practically the entire beam guide 106 is filled with pure gas so that expansion of the laser beam 105 is prevented.
- Cleaned air is introduced transversely relative to the pure gas flow by means of the second gas inlet 112 .
- the end of the beam guide 106 and the laser welding head 104 are filled with cleaned air.
- the gas/air mixture can be discharged via the nozzle opening of the laser processing head.
- the pressure under which the pure gas (nitrogen) is provided is relatively high, whereas the air pressure of the air which is introduced near the laser processing head 4 , 104 is relatively low.
- the volume flow of the pure gas is relatively low (naturally, some pure gas is also discharged by the processing head 104 , but only a comparatively small amount) and the volume flow of the cleaned air is comparatively high. In some implementations, up to 65 liters less pure gas is needed than would be used in a conventional process.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
- This application is a continuation application of and claims priority under 35 U.S.C. §120 to PCT Application No. PCT/EP2006/004338, filed on May 9, 2006. The contents of that priority application are hereby incorporated by reference in its entirety.
- The invention relates to laser processing machines having a device for providing gas to the laser beam guide, and to a method of providing a gas to the laser beam guide of a laser processing machine.
- Three dimensional (3D) laser processing machines include a laser processing head having a focusing element and a laser beam guide, as disclosed, for example, in
EP 1 640 105 A1. In some cases, the focusing element is a mirror and the beam guide is open towards the processing location. Such machines are mainly used for laser welding. - A clean and constant atmosphere is necessary in the beam guide. Fluctuating CO2 content, the presence of other substances which influence the beam spread, or an uneven temperature distribution over the beam cross-section can change the unprocessed beam and consequently also the properties at the focal point so that the constancy of the processing operation becomes worse.
- A solution which is already known is to fill the beam guide with clean nitrogen and to obtain, with a given volume flow, a throughput and also an elevated pressure counter to the introduction of contamination from the environment.
- Since the known laser processing head is open towards the processing location, a large amount of expensive pure gas is discharged from the beam guide in this solution.
- Similar problems also occur in laser cutting assemblies having optical mirror units, such as, for example, as disclosed in
EP 1 623 790 A1. The laser processing head of this laser cutting assembly does not have a lens which seals the beam guide in the direction towards the laser processing region, but instead an open aperture for separation. Expensive pure gas is also discharged from the beam guide through that aperture, but in a substantially smaller quantity than in the above-described laser welding assembly. -
EP 1 182 002 A1 has disclosed, for laser cutting machines having an optical lens unit, flushing a lens at the beam guiding side with very pure gas and accordingly increasing the pressure of the flushing gas in the beam guide when pressure decreases. In this case the beam guide is not constructed so as to be open towards the workpiece because the lens seals the beam guide and the processing space relative to each other. Therefore, the pressure adjustment can be carried out in this instance with very pure (expensive) gas without this resulting in a serious cost disadvantage. - In one aspect, the invention features a laser processing machine for processing a workpiece, the machine comprising: a laser processing head including an optical processing unit that is open to the workpiece; a laser beam guide having a first gas inlet for a first gas and a second gas inlet for a second gas; and a device for supplying a first gas to the first inlet and a second gas to the second inlet.
- The invention also features methods of providing gas to the laser beam guide of a laser processing machine.
- The machines and methods disclosed herein generally reduce the discharge of pure gas that is used to fill the beam guide in an open optical processing unit. The beam guide is filled by two gases at two different locations of the beam guide. The beam guide is in a manner of speaking subdivided into two gas part-chambers. Very pure gas is supplied to the first gas part-chamber with a low volume flow. The first gas part-chamber comprises the majority of the beam guiding space and is substantially closed. A second gas part-chamber adjoins the first gas part-chamber and is filled with a second gas, preferably a cost-effective gas such as clean air. Only a comparatively small proportion of the beam path is in the second gas part-chamber so that the disruption of the beam spread by the cost-effective gas is comparatively weak. The second gas part-chamber may be open, for example, in an optical mirror unit. Pressure fluctuations, etc., are adjusted in the second gas part-chamber.
- The details of one or more embodiments of the invention are set forth in the accompanying drawings and the description below. Other features and advantages of the invention will be apparent from the description and drawings, and from the claims.
-
FIG. 1 is a perspective illustration of a laser cutting assembly. -
FIG. 2 is a perspective illustration of a laser welding assembly. -
FIG. 1 shows alaser processing machine 1 that includes a laser generator 2 (e.g., a CO2 laser) and alaser processing head 4 which can be moved relative thereto in the direction of the double-headed arrow 3. Alaser beam 5, which is produced by means of the laser generator 2, is directed from the laser generator 2, through a beam guiding space 6 which is flushed with a gas, to theprocessing head 4. Thelaser beam 5 is directed by theprocessing head 4 onto aworkpiece 7 which is to be processed. Theworkpiece 7 is in the form of a metal sheet which is deposited on aworkpiece support 8 of thelaser processing machine 1. - Both laser piercing and laser-cutting are supported by the addition of a gas. Oxygen, nitrogen, compressed air and/or application-specific gases can be used as
cutting gases 9. Which gas is ultimately used is dependent on which materials are being cut and which quality requirements are placed on the workpiece. Cutting gas is supplied in the processing head near the processing location. - The beam guiding space 6 is substantially filled with pure gas, for example, nitrogen. The beam guiding space 6 is delimited by a bellows or another hermetic closure (for example a tube, telescopic tube, flexible tube, or the like).
- The
laser beam 5 is redirected and focused inside thelaser processing head 4 so that a focused laser beam is directed onto the workpiece. A housing region of thelaser processing head 4 associated with the beam guide 6 is separated from a housing region associated with the nozzle of the laser processing head by a mirror focusing unit (not shown), for example as disclosed byEP 1 623 790 A1 (U.S. 2006/027537, the full disclosure of which is incorporated herein by reference). The mirror focusing unit separates the process gas side and the beam guiding atmosphere from each other, and directs thelaser beam 5 by an intermediate focal point. The components of the mirror focusing unit include a focusing paraboloid mirror and an ellipsoid mirror. An element that defines a small aperture through which thelaser beam 5 passes is fitted at the intermediate focal point between the two mirrors. This type of optical processing unit results in an open beam guiding system. The diameter of the aperture is selected so as to be sufficiently large that the laser beam does not touch its edge and sufficiently small that the leakage loss of flushing gas from the beam guide side into the process side is low. - In order to flood the beam guide 6 with gas, pure gas having a pressure of 1.1 bar is introduced at a
first gas inlet 10 directly downstream of the laser generator 2. In order to reduce the throughput of pure gas, asecond gas inlet 11 is provided directly upstream of thelaser processing head 4 in the beam guide 6. At that location, cleaned air is introduced in place of pure gas. Practically the whole of the beam guide 6 is flooded with pure gas so that expansion of thelaser beam 5 is prevented. Cleaned air is introduced transversely relative to the flow of pure gas by means of thesecond gas inlet 11. The end of the beam guide 6 and thelaser cutting head 4 are filled predominantly with the cleaned air, mixed with a small proportion of the pure gas. The gas/air mixture can be discharged via a nozzle opening (not shown) of the cutting head. - In order to prevent damaging excess pressure in the beam guide 6, an
excess pressure valve 12 and agas compensation volume 13 are provided. -
FIG. 2 shows the construction of alaser welding assembly 101. A machine frame carries the movement unit of the machine and the beam guiding system having redirecting mirrors for alaser beam 105 which is produced in thelaser generator 102. - A
laser welding head 104 having a tilted mirror and a focusing mirror (not shown) is movable by means of two axes of rotation and in three directions in order best to be able to process a weld seam, for example to join together twocomponents components laser welding head 104 and can be discharged by means of a discharge device. - A
beam guiding chamber 106 is substantially filled with pure gas, for example, nitrogen. Thebeam guiding chamber 106 is delimited by a bellows or another hermetic closure (e.g., a tube, telescopic tube, or the like). - In order to fill the
beam guide 106 with a suitable gas, pure gas having a pressure of 1.1 bar is introduced at afirst gas inlet 111 directly downstream of thelaser generator 102. In order to reduce the throughput of pure gas, asecond gas inlet 112 is provided directly upstream of thelaser processing head 104 in thebeam guide 106. At that location, cleaned air is introduced in place of the pure gas. Practically theentire beam guide 106 is filled with pure gas so that expansion of thelaser beam 105 is prevented. Cleaned air is introduced transversely relative to the pure gas flow by means of thesecond gas inlet 112. The end of thebeam guide 106 and thelaser welding head 104 are filled with cleaned air. The gas/air mixture can be discharged via the nozzle opening of the laser processing head. - In both embodiments, the pressure under which the pure gas (nitrogen) is provided is relatively high, whereas the air pressure of the air which is introduced near the
laser processing head processing head 104, but only a comparatively small amount) and the volume flow of the cleaned air is comparatively high. In some implementations, up to 65 liters less pure gas is needed than would be used in a conventional process. - A number of embodiments of the invention have been described. Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the invention. For example, while cleaned air has been described above as the second gas, other gases may be used. Accordingly, other embodiments are within the scope of the following claims.
Claims (11)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2006/004338 WO2007128333A1 (en) | 2006-05-09 | 2006-05-09 | Laser machining machine with a device for ventilating the laser beam channels and procedure for the ventilation of laser beam channels of a laser machining machine |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2006/004338 Continuation WO2007128333A1 (en) | 2006-05-09 | 2006-05-09 | Laser machining machine with a device for ventilating the laser beam channels and procedure for the ventilation of laser beam channels of a laser machining machine |
Publications (2)
Publication Number | Publication Date |
---|---|
US20090120917A1 true US20090120917A1 (en) | 2009-05-14 |
US8203098B2 US8203098B2 (en) | 2012-06-19 |
Family
ID=37649298
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/267,185 Expired - Fee Related US8203098B2 (en) | 2006-05-09 | 2008-11-07 | Laser processing machines and methods for providing a gas to the beam guide of a laser processing machine |
Country Status (4)
Country | Link |
---|---|
US (1) | US8203098B2 (en) |
EP (1) | EP2024132A1 (en) |
CN (1) | CN101443154B (en) |
WO (1) | WO2007128333A1 (en) |
Cited By (7)
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US20120241423A1 (en) * | 2010-10-15 | 2012-09-27 | Mitsubishi Electric Corporation | Laser machining device and bellows device |
US20120312788A1 (en) * | 2010-02-16 | 2012-12-13 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Laser machining equipment having a common gas source for the laser oscillator and head |
US20130032580A1 (en) * | 2010-11-29 | 2013-02-07 | Mitsubishi Electric Corporation | Optical path structure of laser processing machine |
US20180021822A1 (en) * | 2016-07-20 | 2018-01-25 | SPAWAR System Center Pacific | Transmission Window Cleanliness for Directed Energy Devices |
USD850500S1 (en) * | 2016-08-31 | 2019-06-04 | Trumpf Gmbh + Co. Kg | Machine tool |
US11298772B2 (en) * | 2018-09-26 | 2022-04-12 | Kabushiki Kaisha Toshiba | Welding apparatus and nozzle device |
US11465238B2 (en) * | 2019-02-13 | 2022-10-11 | Bystronic Laser Ag | Gas guide, laser cutting head and laser cutting machine |
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US20120312788A1 (en) * | 2010-02-16 | 2012-12-13 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Laser machining equipment having a common gas source for the laser oscillator and head |
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US8803026B2 (en) * | 2010-10-15 | 2014-08-12 | Mitsubishi Electric Corporation | Laser machining device and bellows device |
US20130032580A1 (en) * | 2010-11-29 | 2013-02-07 | Mitsubishi Electric Corporation | Optical path structure of laser processing machine |
US20180021822A1 (en) * | 2016-07-20 | 2018-01-25 | SPAWAR System Center Pacific | Transmission Window Cleanliness for Directed Energy Devices |
US10307803B2 (en) * | 2016-07-20 | 2019-06-04 | The United States Of America As Represented By Secretary Of The Navy | Transmission window cleanliness for directed energy devices |
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USD870166S1 (en) * | 2016-08-31 | 2019-12-17 | Trumpf Gmbh + Co. Kg | Laser processing machine |
US11298772B2 (en) * | 2018-09-26 | 2022-04-12 | Kabushiki Kaisha Toshiba | Welding apparatus and nozzle device |
US11465238B2 (en) * | 2019-02-13 | 2022-10-11 | Bystronic Laser Ag | Gas guide, laser cutting head and laser cutting machine |
Also Published As
Publication number | Publication date |
---|---|
EP2024132A1 (en) | 2009-02-18 |
US8203098B2 (en) | 2012-06-19 |
CN101443154A (en) | 2009-05-27 |
CN101443154B (en) | 2012-10-24 |
WO2007128333A1 (en) | 2007-11-15 |
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