US20080073857A1 - Sealing system - Google Patents
Sealing system Download PDFInfo
- Publication number
- US20080073857A1 US20080073857A1 US11/902,576 US90257607A US2008073857A1 US 20080073857 A1 US20080073857 A1 US 20080073857A1 US 90257607 A US90257607 A US 90257607A US 2008073857 A1 US2008073857 A1 US 2008073857A1
- Authority
- US
- United States
- Prior art keywords
- sealing
- flange
- receiving space
- sealing system
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/16—Flanged joints characterised by the sealing means
- F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
- F16L23/20—Flanged joints characterised by the sealing means the sealing means being rings made exclusively of metal
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N13/00—Exhaust or silencing apparatus characterised by constructional features ; Exhaust or silencing apparatus, or parts thereof, having pertinent characteristics not provided for in, or of interest apart from, groups F01N1/00 - F01N5/00, F01N9/00, F01N11/00
- F01N13/18—Construction facilitating manufacture, assembly, or disassembly
- F01N13/1805—Fixing exhaust manifolds, exhaust pipes or pipe sections to each other, to engine or to vehicle body
- F01N13/1827—Sealings specially adapted for exhaust systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/16—Flanged joints characterised by the sealing means
- F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
Definitions
- the invention relates to a sealing system, in particular for sealing multi-part exhaust gas pipes for an internal combustion engine, with at least first and second flange parts that guide a heat flow and that border between them a receiving space for at least one sealing element.
- Sealing systems of this type are known.
- DE 10 2004 060 845 A1 shows, for example, such a sealing system for the exhaust gas pipe of a reciprocating engine, as a sealing element, a metal sealing ring in the form of a profile element with a C-shaped profile cross-section being provided.
- Sealing elements in the exhaust gas system are subject to very high temperatures, which can exceed 600° Celsius. Even though materials with properties that are selected for heat resistance are used, the sealing elements lose their functional properties required for sealing in cases where high operating temperatures prevail; the elasticity of the sealing elements is reduced in particular by creep processes caused by excessively high thermal stresses.
- the object of the invention is to make available a sealing system that ensures reliable sealing when used in the hot gas range, even when high temperatures occur in the exhaust gas pipes that are to be sealed.
- this object is achieved by a sealing system that has the features of claim 1 in its entirety.
- an essential characteristic of the invention consists in that the flange parts that are to seal against one another form a ring flange that faces away from the heat flow and extends outward transversely to the latter, in which the receiving space for the sealing element is designed for the respective sealing element such that a chamber is formed for the sealing element.
- An especially effective thermal decoupling of the sealing element relative to the heat flow is produced when the receiving space, relative to the heat flow, is located on the radial outer end area of the flange parts, i.e., in the area of the flange that has the lowest temperature level.
- the arrangement can be made such that the receiving space that is open radially outward is limited by a ring-shaped recess, which is created in at least one of the flange parts of its peripheral edge and is open on the face, as well as by the adjacent face of the other flange part.
- the thus formed receiving space for the sealing element is open on the peripheral side on the ring flange and thus forms only a partial chamber for the sealing element, such that on the radial outer side of the sealing element, no heat transfer to the latter takes place.
- the arrangement is made such that the receiving space that is open radially outward is bordered axially by the adjacent faces of the flange parts and radially inward by an insertion element that is found between the flange parts.
- the insertion element can act as a heat barrier between the inner heat flow and the receiving space of the sealing element, for example by the insertion element being formed by a metal fire ring, or, as an especially advantageous embodiment, by an insertion element that is made of a material of low heat conductivity, for example a non-metallic material, being provided.
- the receiving space can also be formed by a flange part, which has an open, axially recessed annular groove on the face.
- a cover element that is arranged in the annular groove and that forms a heat shield for the respective sealing element at least on its side that faces the face of the flange part can be provided.
- a metal ring element can be provided, for example a flat ring that is inserted between the sealing element and face of the flange part, or a ring element that has a curved or angled profile, which surrounds the sealing element not only on its side facing the face.
- a mold seal which can have in particular a V- or C-shaped profile cross-section, is provided as a sealing element, the mold seal being preferably installed in the receiving space such that the C-profile is open radially inward.
- a meandering profile cross-section like a bellows solution, in which several superjacent folds on top of each other form the cross-section.
- metal crimping seals can be installed in the receiving space.
- the invention ensures thermal protection for the respective sealing element such that with metal sealing elements made from a material that is available for high-temperature use, a reliable sealing into the hot gas ranges is ensured.
- the ring shape for the sealing element can be circular or approximately ringlike. Also, ring shapes that are conceivable as ovals or rectangles, preferably with rounded corner areas. An annular groove that can be identified then preferably is to follow the respective ring shape of the sealing element.
- FIG. 1 shows, greatly simplified diagrammatically, a cutaway and half-page longitudinal section of adjacent pipe pieces of an exhaust gas pipe, the pipe pieces being mutually sealed by a sealing system according to an embodiment of the invention
- FIGS. 2 and 3 show longitudinal sections, similar to FIG. 1 , of a second or third embodiment of the sealing system
- FIG. 4 shows a half-page longitudinal section of only the joint area of the adjacent flange parts of two pipe pieces, provided with a fourth embodiment of the sealing system, and
- FIGS. 5 and 6 show similar depictions, provided with a fifth or sixth embodiment of the sealing system.
- a first pipe piece and a second pipe piece of an exhaust gas pipe are referred to as 1 or as 3 .
- the exhaust gas pipe of an exhaust gas heat flow 5 with a corresponding high exhaust gas temperature results.
- the pipe pieces 1 and 3 that are to be connected to one another and that are to seal against one another by means of the sealing system according to the invention in each case have a flange part 9 or 11 that projects radially outward relative to the pipe axis 7 .
- the flange parts 9 and 11 together form a ring flange 13 , the flange parts 9 and 11 having faces 15 or 17 that face one another.
- the flange parts 9 , 11 of the ring flange 13 are clamped to one another by suitable tensioning means, of which only tensioning means of the usual type in FIGS. 1 and 2 are indicated heavily schematized, in FIG. 1 , tension rings 19 with threaded joints 21 being shown, and in FIG. 2 , a tension ring 27 accommodated on bevelings 25 of the flange parts 9 and 11 being shown.
- FIG. 1 shows a two-layer metal crimping seal 29 , while in the examples of FIGS. 2 to 6 in each case, a metal mold seal 31 of a C-shaped profile cross-section is shown.
- the respective sealing element is chambered to some extent in a receiving space 33 that is formed between the flange parts 9 and 11 .
- the receiving space which is open on the outer peripheral side on ring flange 13 , is bordered axially by the faces 15 and 17 of the flange parts 9 or 11 and is bordered radially inside by an insertion element, in which the example of FIG. 1 is a metal fire ring 35 , which is inserted between the flange parts 9 and 11 and borders the receiving space 33 with its radial outer annular edge 37 .
- FIG. 2 differs mainly in the respect that instead of the crimping seal 29 , a mold seal 31 is installed in the receiving space 33 and that instead of the fire ring 35 , a non-metallic insertion element is inserted between the flange parts 9 and 11 , specifically a ring element 39 that is made of a material of poor heat conductivity.
- materials for this purpose for example, i.a., ceramic fiber materials, for example made of amorphous aluminum silicate fibers or crystalline aluminum oxide fibers, are suitable or any materials that form an effective heat shield between heat flow 5 and receiving space 33 .
- the insertion element can also consist of a modern composite material, for example, can be formed from metallic or non-metallic material, which in the corresponding compound ensures a good heat shield.
- FIG. 3 shows an embodiment in which the receiving space 33 is formed by a ring-shaped recess 41 , which is created in the flange part 9 of its peripheral edge 43 such that the receiving space 33 is bordered axially by the face 17 of the flange part 11 and the opposite wall of the recess in the flange part 9 .
- the sealing element is thus accommodated in a receiving space 33 and partially chambered, the receiving space 33 in turn being located on the end of the ring flange 13 that is furthest out in the radial direction, i.e., in the range that has the lowest operating temperature.
- the receiving space 33 can also be formed by two ring-shaped recesses that face one another, which are created in each case in the flange part 9 as well as 11 of its peripheral edge, such that then the sealing element is arranged in approximately the middle with its C-shaped opening edge along the face between the two flange parts 9 and 11 .
- FIGS. 4 to 6 show embodiments in which the receiving space 33 in each case is formed by an annular groove 45 , which is created recessed in axial direction in the flange part 11 of its face 17 , whereby in connection with the face 15 of the flange part 9 , a closed chamber for the mold seal 31 is formed.
- a cover element 47 which is inserted into the annular groove 45 , in the form of a metal ring element is provided.
- the example of FIG. 4 is a flat ring element, while as cover elements 47 in the examples of FIGS. 5 and 6 , profile rings are provided, specifically a curved ring in FIG. 5 and an angled ring in the example of FIG. 6 .
- the cover element 47 is installed in the annular groove 45 such that the mold seal 31 is covered at least on the side that is facing the point of impact between the faces 15 and 17 of the flange part 9 or 11 .
- a flow arrow 49 the section of the point of impact between the faces 15 and 17 that is closest to the heat flow 5 is most heavily affected by the heat flow, against which that section of the cover element 47 facing the point of impact forms a shield.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Gasket Seals (AREA)
- Exhaust Silencers (AREA)
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
Abstract
Description
- The invention relates to a sealing system, in particular for sealing multi-part exhaust gas pipes for an internal combustion engine, with at least first and second flange parts that guide a heat flow and that border between them a receiving space for at least one sealing element.
- Sealing systems of this type are known. DE 10 2004 060 845 A1 shows, for example, such a sealing system for the exhaust gas pipe of a reciprocating engine, as a sealing element, a metal sealing ring in the form of a profile element with a C-shaped profile cross-section being provided. Sealing elements in the exhaust gas system are subject to very high temperatures, which can exceed 600° Celsius. Even though materials with properties that are selected for heat resistance are used, the sealing elements lose their functional properties required for sealing in cases where high operating temperatures prevail; the elasticity of the sealing elements is reduced in particular by creep processes caused by excessively high thermal stresses.
- In this context, the object of the invention is to make available a sealing system that ensures reliable sealing when used in the hot gas range, even when high temperatures occur in the exhaust gas pipes that are to be sealed.
- According to the invention, this object is achieved by a sealing system that has the features of
claim 1 in its entirety. - Accordingly, an essential characteristic of the invention consists in that the flange parts that are to seal against one another form a ring flange that faces away from the heat flow and extends outward transversely to the latter, in which the receiving space for the sealing element is designed for the respective sealing element such that a chamber is formed for the sealing element. Such an installation of the sealing element in a ring flange that extends outward away from the heat flow makes possible a thermal shield against the heat flow that is adequate for the operability and service life of the sealing element, such that the system according to the invention can also be used reliably on exhaust gas pipes that are subject to high thermal loads.
- An especially effective thermal decoupling of the sealing element relative to the heat flow is produced when the receiving space, relative to the heat flow, is located on the radial outer end area of the flange parts, i.e., in the area of the flange that has the lowest temperature level.
- In this connection, in the case of advantageous embodiments, the arrangement can be made such that the receiving space that is open radially outward is limited by a ring-shaped recess, which is created in at least one of the flange parts of its peripheral edge and is open on the face, as well as by the adjacent face of the other flange part. The thus formed receiving space for the sealing element is open on the peripheral side on the ring flange and thus forms only a partial chamber for the sealing element, such that on the radial outer side of the sealing element, no heat transfer to the latter takes place.
- In additional especially advantageous embodiments, the arrangement is made such that the receiving space that is open radially outward is bordered axially by the adjacent faces of the flange parts and radially inward by an insertion element that is found between the flange parts. In this connection, the insertion element can act as a heat barrier between the inner heat flow and the receiving space of the sealing element, for example by the insertion element being formed by a metal fire ring, or, as an especially advantageous embodiment, by an insertion element that is made of a material of low heat conductivity, for example a non-metallic material, being provided.
- As an alternative, the receiving space can also be formed by a flange part, which has an open, axially recessed annular groove on the face.
- In an especially advantageous way, in the case of such configurations as additional heat protection for the sealing element, a cover element that is arranged in the annular groove and that forms a heat shield for the respective sealing element at least on its side that faces the face of the flange part can be provided.
- As such a cover element, a metal ring element can be provided, for example a flat ring that is inserted between the sealing element and face of the flange part, or a ring element that has a curved or angled profile, which surrounds the sealing element not only on its side facing the face.
- Preferably, a mold seal, which can have in particular a V- or C-shaped profile cross-section, is provided as a sealing element, the mold seal being preferably installed in the receiving space such that the C-profile is open radially inward. There also exists the possibility of providing to the sealing element, instead of a V- or C-shaped profile cross-section, a meandering profile cross-section like a bellows solution, in which several superjacent folds on top of each other form the cross-section.
- As an alternative, metal crimping seals can be installed in the receiving space. In any case, the invention ensures thermal protection for the respective sealing element such that with metal sealing elements made from a material that is available for high-temperature use, a reliable sealing into the hot gas ranges is ensured. The ring shape for the sealing element can be circular or approximately ringlike. Also, ring shapes that are conceivable as ovals or rectangles, preferably with rounded corner areas. An annular groove that can be identified then preferably is to follow the respective ring shape of the sealing element.
- Below, the invention will be explained in detail based on the embodiments that are depicted in the drawing. Here:
-
FIG. 1 shows, greatly simplified diagrammatically, a cutaway and half-page longitudinal section of adjacent pipe pieces of an exhaust gas pipe, the pipe pieces being mutually sealed by a sealing system according to an embodiment of the invention; -
FIGS. 2 and 3 show longitudinal sections, similar toFIG. 1 , of a second or third embodiment of the sealing system; -
FIG. 4 shows a half-page longitudinal section of only the joint area of the adjacent flange parts of two pipe pieces, provided with a fourth embodiment of the sealing system, and -
FIGS. 5 and 6 show similar depictions, provided with a fifth or sixth embodiment of the sealing system. - In the FIGS., a first pipe piece and a second pipe piece of an exhaust gas pipe are referred to as 1 or as 3. During operation of the respective internal combustion engine, the exhaust gas pipe of an exhaust
gas heat flow 5 with a corresponding high exhaust gas temperature results. Thepipe pieces flange part pipe axis 7. Theflange parts ring flange 13, theflange parts pipe pieces flange parts ring flange 13 are clamped to one another by suitable tensioning means, of which only tensioning means of the usual type inFIGS. 1 and 2 are indicated heavily schematized, inFIG. 1 ,tension rings 19 with threadedjoints 21 being shown, and inFIG. 2 , atension ring 27 accommodated onbevelings 25 of theflange parts - For the seal between the
flange parts FIG. 1 shows a two-layermetal crimping seal 29, while in the examples ofFIGS. 2 to 6 in each case, ametal mold seal 31 of a C-shaped profile cross-section is shown. In each instance, the respective sealing element is chambered to some extent in areceiving space 33 that is formed between theflange parts FIG. 1 , the receiving space, which is open on the outer peripheral side onring flange 13, is bordered axially by thefaces flange parts FIG. 1 is ametal fire ring 35, which is inserted between theflange parts receiving space 33 with its radial outerannular edge 37. - Apart from the other tensioning means (tension ring 27), however, the example of
FIG. 2 differs mainly in the respect that instead of the crimpingseal 29, amold seal 31 is installed in thereceiving space 33 and that instead of thefire ring 35, a non-metallic insertion element is inserted between theflange parts ring element 39 that is made of a material of poor heat conductivity. As materials for this purpose, for example, i.a., ceramic fiber materials, for example made of amorphous aluminum silicate fibers or crystalline aluminum oxide fibers, are suitable or any materials that form an effective heat shield betweenheat flow 5 and receivingspace 33. The insertion element can also consist of a modern composite material, for example, can be formed from metallic or non-metallic material, which in the corresponding compound ensures a good heat shield. -
FIG. 3 shows an embodiment in which thereceiving space 33 is formed by a ring-shaped recess 41, which is created in theflange part 9 of itsperipheral edge 43 such that thereceiving space 33 is bordered axially by theface 17 of theflange part 11 and the opposite wall of the recess in theflange part 9. Analogous to the examples ofFIGS. 1 and 2 , the sealing element is thus accommodated in areceiving space 33 and partially chambered, thereceiving space 33 in turn being located on the end of thering flange 13 that is furthest out in the radial direction, i.e., in the range that has the lowest operating temperature. In modifying the embodiment according toFIG. 3 , thereceiving space 33 can also be formed by two ring-shaped recesses that face one another, which are created in each case in theflange part 9 as well as 11 of its peripheral edge, such that then the sealing element is arranged in approximately the middle with its C-shaped opening edge along the face between the twoflange parts -
FIGS. 4 to 6 show embodiments in which thereceiving space 33 in each case is formed by anannular groove 45, which is created recessed in axial direction in theflange part 11 of itsface 17, whereby in connection with theface 15 of theflange part 9, a closed chamber for themold seal 31 is formed. - In the examples of
FIGS. 4 to 6 , as an additional heat protection for themold seal 31 that is located in thereceiving space 33, in each case acover element 47, which is inserted into theannular groove 45, in the form of a metal ring element is provided. The example ofFIG. 4 is a flat ring element, while ascover elements 47 in the examples ofFIGS. 5 and 6 , profile rings are provided, specifically a curved ring inFIG. 5 and an angled ring in the example ofFIG. 6 . In any case, thecover element 47 is installed in theannular groove 45 such that themold seal 31 is covered at least on the side that is facing the point of impact between thefaces flange part FIG. 4 by aflow arrow 49, the section of the point of impact between thefaces heat flow 5 is most heavily affected by the heat flow, against which that section of thecover element 47 facing the point of impact forms a shield.
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006045584A DE102006045584A1 (en) | 2006-09-27 | 2006-09-27 | sealing system |
DE102006045584.3 | 2006-09-27 |
Publications (1)
Publication Number | Publication Date |
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US20080073857A1 true US20080073857A1 (en) | 2008-03-27 |
Family
ID=38668977
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/309,952 Expired - Fee Related US8328203B2 (en) | 2006-09-27 | 2007-09-01 | Sealing system for exhaust-gas lines |
US12/309,951 Abandoned US20090284008A1 (en) | 2006-09-27 | 2007-09-01 | Sealing system for exhaust-gas lines |
US11/902,576 Abandoned US20080073857A1 (en) | 2006-09-27 | 2007-09-24 | Sealing system |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/309,952 Expired - Fee Related US8328203B2 (en) | 2006-09-27 | 2007-09-01 | Sealing system for exhaust-gas lines |
US12/309,951 Abandoned US20090284008A1 (en) | 2006-09-27 | 2007-09-01 | Sealing system for exhaust-gas lines |
Country Status (6)
Country | Link |
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US (3) | US8328203B2 (en) |
EP (2) | EP2066952A1 (en) |
JP (2) | JP2010505069A (en) |
CN (2) | CN101523106B (en) |
DE (1) | DE102006045584A1 (en) |
WO (2) | WO2008037331A1 (en) |
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DE102011001279A1 (en) | 2011-03-15 | 2012-09-20 | Elringklinger Ag | Method for producing profiled ring e.g. sealing ring in car, involves shaping ring into profiled ring in continuous manner along circumference of ring in sections by exerting pressure in radial direction by profiling element |
DE112011100966B4 (en) | 2010-03-19 | 2023-02-02 | Elringklinger Ag | Process and device for the production of sealing elements |
DE102010015679A1 (en) * | 2010-04-21 | 2011-10-27 | Bayerische Motoren Werke Aktiengesellschaft | sealing arrangement |
CN102108914A (en) * | 2011-01-26 | 2011-06-29 | 重庆长安汽车股份有限公司 | Flat-face flange sealing gasket for automotive exhaust system |
JP5883885B2 (en) * | 2011-01-27 | 2016-03-15 | ボーグワーナー インコーポレーテッド | Adjusting flap device |
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DE102011054213A1 (en) | 2011-10-05 | 2013-04-11 | Elringklinger Ag | Hot gas pipeline has fastening unit having gas-tight fastened flange plates which are axially located at both end portions of tubular portion, and axially deformable sealing element that is arranged between flange plates |
DE102011119513A1 (en) * | 2011-11-26 | 2013-05-29 | Gm Global Technology Operations, Llc | Pipe connection for fluid-tight connection of components of an air conditioner |
CN102606823B (en) * | 2012-03-16 | 2014-07-09 | 苏州宝骅机械技术有限公司 | Constant-stress constant-displacement-line sealing component |
DE102013202453A1 (en) * | 2013-02-14 | 2014-08-14 | Elringklinger Ag | Hot-gas connection used in exhaust system of internal combustion engine, has seal whose one end is provided on gasket receptacle and other end of seal is provided on end face of cylinder head port and cylinder head |
DE102013213850B4 (en) * | 2013-07-16 | 2015-11-19 | Bayerische Motoren Werke Aktiengesellschaft | Arrangement for fluid-conducting connection of a housing of an exhaust gas turbocharger with a further exhaust gas-carrying component |
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- 2006-09-27 DE DE102006045584A patent/DE102006045584A1/en not_active Ceased
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2007
- 2007-09-01 JP JP2009529554A patent/JP2010505069A/en active Pending
- 2007-09-01 CN CN2007800361474A patent/CN101523106B/en not_active Expired - Fee Related
- 2007-09-01 US US12/309,952 patent/US8328203B2/en not_active Expired - Fee Related
- 2007-09-01 JP JP2009529555A patent/JP2010505070A/en not_active Withdrawn
- 2007-09-01 WO PCT/EP2007/007645 patent/WO2008037331A1/en active Application Filing
- 2007-09-01 US US12/309,951 patent/US20090284008A1/en not_active Abandoned
- 2007-09-01 WO PCT/EP2007/007644 patent/WO2008037330A1/en active Application Filing
- 2007-09-01 EP EP07802062A patent/EP2066952A1/en not_active Withdrawn
- 2007-09-01 CN CNA2007800359686A patent/CN101517303A/en active Pending
- 2007-09-01 EP EP07802061A patent/EP2066951A1/en not_active Withdrawn
- 2007-09-24 US US11/902,576 patent/US20080073857A1/en not_active Abandoned
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US4603892A (en) * | 1984-04-05 | 1986-08-05 | Commissariat A L'energie Atomique | Tight connection device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112984245A (en) * | 2021-02-09 | 2021-06-18 | 兰州空间技术物理研究所 | Flange applied to gas mass flow controller |
Also Published As
Publication number | Publication date |
---|---|
JP2010505070A (en) | 2010-02-18 |
WO2008037331A1 (en) | 2008-04-03 |
DE102006045584A1 (en) | 2008-05-15 |
US20090284008A1 (en) | 2009-11-19 |
EP2066952A1 (en) | 2009-06-10 |
WO2008037330A1 (en) | 2008-04-03 |
JP2010505069A (en) | 2010-02-18 |
EP2066951A1 (en) | 2009-06-10 |
US8328203B2 (en) | 2012-12-11 |
US20090322039A1 (en) | 2009-12-31 |
CN101523106B (en) | 2013-03-06 |
CN101523106A (en) | 2009-09-02 |
CN101517303A (en) | 2009-08-26 |
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