US20070223116A1 - Holding and positioning apparatus for an optical element - Google Patents
Holding and positioning apparatus for an optical element Download PDFInfo
- Publication number
- US20070223116A1 US20070223116A1 US11/804,467 US80446707A US2007223116A1 US 20070223116 A1 US20070223116 A1 US 20070223116A1 US 80446707 A US80446707 A US 80446707A US 2007223116 A1 US2007223116 A1 US 2007223116A1
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- United States
- Prior art keywords
- manipulator
- solid body
- body joint
- movable
- actuator
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
Definitions
- the invention relates to a holding and positioning apparatus for an optical element, a manipulator unit for moving an optical element and a projection objective for semiconductor lithography.
- a projection objective as disclosed by US 2002/0167734 A1, for example, contains a beam splitter and a deflection mirror. While a light beam coming from a reticle is deflected by the beam splitter into a radial arm having a further mirror, the light beam coming from the radial arm is let straight through the beam splitter and deflected by the deflection mirror, parallel to the light beam coming from the reticle, into a further objective region.
- the mirror plane of the deflection mirror In order that the light beam from the radial arm can be deflected into the objective region, it must be possible for the mirror plane of the deflection mirror to be displaced accurately into the point of intersection of the optical axes of radial arm and objective region. Furthermore, the normal to the mirror plane must be oriented toward the bisector of the angle which is formed by the optical axis of the radial arm and the optical axis of the objective region. For the positioning of the deflection mirror at the point of intersection of the optical axes of radial arm and objective region, it must be possible for the deflection mirror to be displaced in a translational manner normally with respect to its mirror plane. In order to orient the mirror plane normal to the bisector, it must be possible for the deflection mirror to be tilted about two mutually independent axes in the mirror plane.
- U.S. Pat. No. 5,986,827 discloses an actuator or a lifting and tilting apparatus for a workpiece.
- the actuator has three identical spring units, a structure on which the spring units are mounted, and three linear actuators.
- an inner ring which carries the workpiece and has three bipods, as they are known, is provided, the latter each representing two rods arranged in a V shape and having spring joints at their ends, which are connected to one another at one end and which can transmit forces only along their longitudinal axis.
- the end of each bipod at which the rods are led together is in each case fastened to a lever, which is mounted in the structure or in the housing such that it can rotate and can be fixed with respect to the housing by setting screws.
- U.S. Pat. No. 5,896,193 discloses a tilting and lifting apparatus having spring elements and at least one pneumatic cylinder.
- the pneumatic cylinder is arranged between an upper and lower structure and connected to the latter, in order to provide a constant rotational counterforce to the upper structure, which carries its own weight.
- the upper structure can be tilted and moved in the vertical direction and also relative to the lower structure.
- the upper structure is carried by the lower structure via three spring elements.
- Each spring element can move in the vertical direction but is kinematically stiff in the horizontal plane.
- Each spring element has three arms which are connected to one another in a Z shape.
- a drive unit is connected both to the spring element and to the lower structure.
- the upper structure is therefore very stiff in the horizontal direction.
- the spring elements are used to guide the upper structure in relation to the lower structure.
- the object is achieved by the features of claim 1 .
- the holding and positioning apparatus for the optical element according to the invention suppresses undesired vibration of the optical element by means of a stiff attachment. It is likewise advantageous that, by means of the at least one manipulator unit, the holding and positioning apparatus is additionally able to compensate for the length differences between the optical element and a base body, to which the at least one manipulator unit is connected, in the event of a deviation from the mounting temperature, in order that the forces on the optical element do not become impermissibly high and lead to deformations or even to damage to the optical element. As a result of having solid body joints, it is likewise possible for the irregularities in joint faces to be compensated for without deforming the optical element impermissibly.
- three manipulator units can be provided.
- This holding and positioning apparatus configured in accordance with the invention, makes it possible to displace the optical element exactly normally with respect to its plane and to tilt it about two mutually independent axes in the plane. Impermissible imaging errors are thus avoided.
- the optical element is mounted as stiffly as possible with respect to vibrations in the plane of the optical element, in an advantageous development of the invention provision can be made for the three manipulator units to be arranged in such a way that a reference point is located at the geometric center of gravity of the triangle covered by the manipulator units.
- the movement of the optical element during the lifting and tilting adjustment of the optical element can be measured, in order to be able to monitor the magnitude of the lift and the tilt and correct any possible disruptive movement.
- a manipulator unit for moving the optical element is specified in claims 9 and 19 .
- the manipulator unit according to the invention has small dimensions, thus being capable of use advantageously in the presence of small spaces.
- a projection objective for semiconductor lithography is specified in claim 13 .
- the structures to be imaged are imaged with high contrast during the exposure process, which leads to a higher resolution of the projection objective.
- FIG. 1 is a perspective illustration of a holding and positioning apparatus
- FIG. 2 is a perspective illustration of a manipulator unit
- FIG. 3 is an illustration of the principle of the manipulator unit in plan view
- FIG. 4 is a perspective illustration of the holding and positioning apparatus from FIG. 1 obliquely from below;
- FIG. 5 is a perspective illustration of an alternative design of the manipulator unit
- FIG. 6 is a perspective illustration of a further alternative design of the manipulator unit
- FIG. 7 is a perspective illustration of the holding and positioning apparatus with an illustration of sensors.
- FIG. 8 is an illustration of the principle of the holding and positioning apparatus with an illustration of the sensors in plan view.
- FIG. 1 shows a holding and positioning apparatus 1 for a projection objective for semiconductor lithography, an optical element 3 being mounted in a mounting ring 2 .
- the optical element 3 is formed as a mirror, preferably as a deflection mirror.
- the mounting ring 2 is carried and supported by three manipulator units 4 , which are firmly connected to a base body 5 .
- the base body 5 is connected in the usual way to a housing (objective housing) or a structure 6 .
- the three manipulator units 4 can be adjusted vertically independently of one another along an optical axis (in the z direction), by which means the mounting ring 2 together with the mirror 3 can be raised at right angles to a mirror plane 3 a or tilted about at least one arbitrary axis in the mirror plane 3 a.
- the manipulator unit 4 is illustrated in principle.
- the manipulator unit 4 has a manipulator head 7 which is connected to the mounting ring 2 .
- the manipulator head 7 is connected to a movable manipulator part 9 via a solid body joint 8 , advantageously a spring tilting joint.
- the solid body joint 8 permits tilting and rotation of the manipulator head 7 by means of bending about an axis 10 .
- the movable manipulator part 9 is connected by an actuator 11 via at least one solid body joint 12 to a manipulator foot 13 .
- a tilting and bending axis 16 of the solid body joint 12 is arranged at right angles to the axis 10 of the solid body joint 8 .
- the solid body joint 12 is preferably formed as a leaf spring and, by means of bending and torsion, is able to implement the other two degrees of rotational freedom and, by means of s-shaped bending, to implement the degrees of translational freedom along the axis 10 of the manipulator head 7 .
- the solid body joint 12 connects the movable manipulator part 9 to the actuator 11 , which in turn is connected to the manipulator foot 13 such that it can rotate, via a solid body joint 14 , which is likewise implemented as a leaf spring.
- the manipulator foot 13 is firmly connected to the objective housing 6 via the base body 5 , the objective housing 6 not being illustrated in this exemplary embodiment.
- the actuator 11 which is implemented as an actuating lever here, can be tilted with respect to the manipulator foot 13 by bending the solid body joint 14 , the angle of the actuator 11 being set and fixed by linear actuating elements 15 .
- the linear actuating elements 15 are formed as setting screws in the exemplary embodiments, it also being possible for other linear actuating elements, such as piezoelectric actuators, magnetostrictive actuators, magnets or other drive elements to be used.
- the solid body joint 12 By means of a laterally offset arrangement of the solid body joint 12 in relation to the solid body joint 14 , the solid body joint 12 performs a movement in the vertical direction (z direction) when the actuator 11 is tilted. As a result, the solid body joint 12 raises and lowers the manipulator head 7 with the optical element 3 and the mounting ring 2 , the solid body joint 12 simultaneously compensating for the tilt angle of the actuator 11 in relation to the manipulator head 7 .
- the solid body joint 12 is used not only to compensate for the angle between the manipulator head 7 and the actuator 11 when the actuator 11 is deflected, but also in the other two manipulator units 4 , which are not actuated at this instant, as a rotary joint about an axis of rotation which is determined by the two passive manipulator units 4 .
- the possibility is provided of displacing the manipulator head 7 in the vertical direction (z direction).
- the optical element 3 can therefore also be displaced in the vertical direction and tilted about two mutually independent axes 10 and 16 , which cover the plane 3 a .
- deformation decoupling is provided for the mounting ring 2 and therefore also for the mirror 3 .
- the deformation decoupling and the manipulation possibility are combined by attaching the solid body joint 12 to the integrated actuator 11 in one component, namely the manipulator unit 4 .
- the solid body joint 8 compensates for angular errors between the mounting ring 2 and the base body 5 about the axis 10
- the solid body joint 12 compensates for angular errors between the mounting ring 2 and the base body 5 about the axis 16 and offset errors between the mounting ring 2 and the base body 5 in the direction of the axis 10 .
- the mirror 3 in conjunction with the mounting ring 2 can expand with respect to the base body 5 , since the mirror 3 and the mounting ring 2 normally have different temperature expansion coefficients from those of the base body 5 and the objective housing 6 . Compensation of this type in the event of temperature changes is thus performed by the manipulator units 4 which are arranged between the mirror 3 and the base structure 5 . This is also possible when fixing the actuator 11 .
- the manipulator units 4 should if possible have a material which provides a very low thermal expansion coefficient. This can be, for example, INVAR or else a ceramic material.
- irradiation of the mirror 3 during operation leads to expansion of the mirror 3 with respect to the base body 5 , since the mirror 3 heats up to a substantially greater extent than the base body 5 .
- These temperature expansions are compensated for by the solid body joint 12 , since the solid body joint 12 permits displacement of the mounting ring 2 with respect to the base body 5 in the direction of the axis 10 .
- FIG. 3 shows an illustration of the principle of an arrangement of the manipulator units 4 in plan view.
- a reference point 17 is defined, which ideally coincides with the point of intersection of the optical axis in the mirror plane 3 a .
- the position of the reference point 17 identifies the position of the mirror 3 with respect to the objective housing 6 or the base body 5 which is firmly connected to the objective housing 6 .
- the reference point 17 must no longer move, or only within a small tolerance, with respect to the objective housing 6 during the entire lifetime of the projection objective (not illustrated).
- the manipulator units 4 should if possible be arranged in such a way that the reference point 17 lies at the geometric center of gravity of the triangle covered by the manipulator units 4 .
- FIG. 4 shows a perspective illustration of the holding and positioning apparatus 1 that can be seen in FIG. 1 , obliquely from below.
- the three manipulator units 4 should be arranged such that the directions of movement of the displacements along the axis 10 made possible by the solid body joint 12 intersect at the reference point 17 of the mirror 3 .
- the reference point 17 should remain stationary with respect to the objective housing 6 and with respect to the base body 5 .
- FIG. 5 shows an alternative design of the manipulator unit 4 .
- the actuator 11 is additionally connected to the manipulator foot 13 by a third solid body joint 18 , which is likewise implemented as a leaf spring.
- the solid body joint 14 together with the solid body joint 18 , forms a crossed-spring joint, the solid body joint 18 in FIG. 5 being implemented as a double leaf spring, and a rear solid body joint part being hidden by the manipulator unit 4 .
- the manipulator foot 13 can thus be moved relative to the optical element 3 .
- the first solid body joint 14 has a first axis of rotation 14 a of the actuator 11
- the second solid body joint 12 has a second axis of rotation 12 a of the movable manipulator part 9 , such that rotation about the first axis of rotation 14 a results in displacement of the second axis of rotation 12 a relative to the manipulator foot 13 , the position of the first axis of rotation 14 a and of the second axis of rotation 12 a being determined at the same time by the third solid body joint 18 .
- the third solid body joint 18 connects the manipulator foot 13 and the movable actuator 11 .
- the third solid body joint 18 also connects the movable manipulator part 9 to the movable actuator 11 , with which the third solid body joint 18 also connects the movable manipulator part 9 to the manipulator foot 13 .
- the third solid body joint 18 is arranged to be rotated through an angle in the deflection direction relative to the solid body joints 12 and 14 with regard to the respective deflection directions of the three solid body joints 12 , 14 and 18 .
- the angle can be between 30 and 150°, an angle of 90° being illustrated by way of example.
- FIG. 6 shows a further possibility of implementing the manipulator unit 4 .
- the solid body joint 18 is provided in the inner part of the manipulator unit 4 or displaced into the latter, likewise again forming a crossed-spring joint with the solid body joint 14 .
- a group comprising a plurality of solid body joints, namely a tilting spring joint 19 , an intermediate element 20 and a tilting spring joint 21 , performs the same function as the solid body joint 12 , the aforementioned group connecting the movable manipulator part 9 to the actuator 11 .
- the manipulator head 7 is predefined a tilting movement about the axis 16 and a translational movement in the direction of the axis 10 with respect to the manipulator foot 13 by the arrangement of the solid body joints 19 , 20 and 21 .
- FIG. 7 shows a perspective view of the holding and positioning apparatus 1 with an illustration of sensors 22 . It is advantageous to measure the movement of the mirror 3 with respect to the base body 5 during the lifting and tilting adjustment of the mirror 3 , in order in this way to be able to monitor the magnitude of the lift and the tilt and therefore to be able to correct any possible disruptive movement.
- the movements relevant to the mirror 3 are the lift and two tilts about respectively mutually independent axes 10 and 16 , which lie at right angles to the lifting movement, namely the z direction.
- two manipulator units 4 are illustrated completely, one manipulator unit 4 being merely indicated in order to illustrate the sensors 22 .
- At least three sensors 22 are provided, which measure the change in the distance, for example in the lifting direction, at three points on the mirror 3 or on the mounting ring 2 .
- the sensors 22 preferably formed as capacitive sensors, are arranged on mountings 23 .
- the sensors 22 should be arranged as far apart from one another as possible, in order to achieve a high resolution for the tilt angle measurement by means of a broad base.
- FIG. 8 which illustrates the holding and positioning apparatus 1 (the manipulator units 4 are hidden) in very simplified form
- the holding and positioning apparatus 1 has the sensors 22 .
- additional sensors 22 can be provided on further mountings 23 .
- each case four sensors 22 are provided for the measurement and are arranged or fitted at the four corners of the mirror 3 .
- the sensors 22 are located very far apart, in order to ensure the best possible tilt angle resolution.
- the mirror 3 can be displaced in the z direction and tilted about two mutually independent axes in the mirror plane 3 a .
- this stiff attachment undesired vibration of the mirror 3 is suppressed by the holding and positioning apparatus 1 , and impermissible imaging errors can be minimized.
Abstract
In a holding and positioning apparatus for an optical element, the optical element is mounted in a mounting ring and the mounting ring is mounted via at least one manipulator unit. The manipulator unit has a linear actuating element. The manipulator unit has a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint. The movable manipulator part is connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator.
Description
- This patent application is a divisional application of and claims priority to U.S. patent application Ser. No. 10/944,135, filed Sep. 17, 2004, entitled “Holding and Positioning Apparatus for an Optical Element”, naming Ulrich Weber and Hubert Holderer as inventors, the teachings of which are incorporated by reference.
- The invention relates to a holding and positioning apparatus for an optical element, a manipulator unit for moving an optical element and a projection objective for semiconductor lithography.
- A projection objective, as disclosed by US 2002/0167734 A1, for example, contains a beam splitter and a deflection mirror. While a light beam coming from a reticle is deflected by the beam splitter into a radial arm having a further mirror, the light beam coming from the radial arm is let straight through the beam splitter and deflected by the deflection mirror, parallel to the light beam coming from the reticle, into a further objective region.
- In order that the light beam from the radial arm can be deflected into the objective region, it must be possible for the mirror plane of the deflection mirror to be displaced accurately into the point of intersection of the optical axes of radial arm and objective region. Furthermore, the normal to the mirror plane must be oriented toward the bisector of the angle which is formed by the optical axis of the radial arm and the optical axis of the objective region. For the positioning of the deflection mirror at the point of intersection of the optical axes of radial arm and objective region, it must be possible for the deflection mirror to be displaced in a translational manner normally with respect to its mirror plane. In order to orient the mirror plane normal to the bisector, it must be possible for the deflection mirror to be tilted about two mutually independent axes in the mirror plane.
- By means of a subsequent change in the position or tilt angle of the deflection mirror, an image offset is primarily produced, the image being displaced with respect to the original image as a result. If vibration of the deflection mirror occurs, then the structures to be imaged in a projection objective for semiconductor lithography during the exposure process become blurred. This leads to an undesired loss of contrast and therefore to a reduction in the resolution of the objective.
- Projection objectives for semiconductor lithography having holding and positioning devices for optical elements are known from the general prior art.
- U.S. Pat. No. 5,986,827 discloses an actuator or a lifting and tilting apparatus for a workpiece. The actuator has three identical spring units, a structure on which the spring units are mounted, and three linear actuators. For the lifting and tilting mechanism, an inner ring, which carries the workpiece and has three bipods, as they are known, is provided, the latter each representing two rods arranged in a V shape and having spring joints at their ends, which are connected to one another at one end and which can transmit forces only along their longitudinal axis. The end of each bipod at which the rods are led together is in each case fastened to a lever, which is mounted in the structure or in the housing such that it can rotate and can be fixed with respect to the housing by setting screws. By means of tilting the respective levers with the setting screws, the inner ring together with the workpiece can both be adjusted vertically and tilted.
- The disadvantage with the actuator and the lifting and tilting apparatus of U.S. Pat. No. 5,986,827 is the very large amount of space which is required, which results from the separation of bipod and actuating lever. Since, for production reasons, the bipods and the actuating levers have to be assembled from different parts, the bipod spring joints also have to compensate for the additional production and mounting tolerances, for which reason the bipods are relatively soft, so that the workpiece mounted by them can quite easily be excited to undesired oscillations.
- Furthermore, U.S. Pat. No. 5,896,193 discloses a tilting and lifting apparatus having spring elements and at least one pneumatic cylinder. The pneumatic cylinder is arranged between an upper and lower structure and connected to the latter, in order to provide a constant rotational counterforce to the upper structure, which carries its own weight. The upper structure can be tilted and moved in the vertical direction and also relative to the lower structure. The upper structure is carried by the lower structure via three spring elements. Each spring element can move in the vertical direction but is kinematically stiff in the horizontal plane. Each spring element has three arms which are connected to one another in a Z shape. A drive unit is connected both to the spring element and to the lower structure. The upper structure is therefore very stiff in the horizontal direction. By means of an arrangement of this type, the spring elements are used to guide the upper structure in relation to the lower structure.
- The disadvantage with such an apparatus is that, as a result of guiding the upper structure by means of the spring elements, the upper structure can be deformed and, as a result of the rectilinear guidance, the angles cannot be compensated.
- It is therefore an object of the invention to provide a holding and positioning apparatus for an optical element, in particular for a mirror, with which the disadvantages of the prior art mentioned at the beginning are avoided, the optical element can be positioned exactly and impermissible imaging errors can be compensated.
- According to the invention, the object is achieved by the features of
claim 1. - The holding and positioning apparatus for the optical element according to the invention suppresses undesired vibration of the optical element by means of a stiff attachment. It is likewise advantageous that, by means of the at least one manipulator unit, the holding and positioning apparatus is additionally able to compensate for the length differences between the optical element and a base body, to which the at least one manipulator unit is connected, in the event of a deviation from the mounting temperature, in order that the forces on the optical element do not become impermissibly high and lead to deformations or even to damage to the optical element. As a result of having solid body joints, it is likewise possible for the irregularities in joint faces to be compensated for without deforming the optical element impermissibly.
- In an advantageous refinement of the invention, three manipulator units can be provided. This holding and positioning apparatus, configured in accordance with the invention, makes it possible to displace the optical element exactly normally with respect to its plane and to tilt it about two mutually independent axes in the plane. Impermissible imaging errors are thus avoided.
- In order that the optical element is mounted as stiffly as possible with respect to vibrations in the plane of the optical element, in an advantageous development of the invention provision can be made for the three manipulator units to be arranged in such a way that a reference point is located at the geometric center of gravity of the triangle covered by the manipulator units.
- In an advantageous development of the invention, provision can, moreover, be made for at least three sensors to be provided in order to measure lifting and tilting movements of the optical element with respect to a base body. Thus, advantageously, the movement of the optical element during the lifting and tilting adjustment of the optical element can be measured, in order to be able to monitor the magnitude of the lift and the tilt and correct any possible disruptive movement.
- A manipulator unit for moving the optical element is specified in
claims - As a result of its design configuration, the manipulator unit according to the invention has small dimensions, thus being capable of use advantageously in the presence of small spaces.
- A projection objective for semiconductor lithography is specified in
claim 13. - By means of the projection objective according to the invention, the structures to be imaged are imaged with high contrast during the exposure process, which leads to a higher resolution of the projection objective.
- Exemplary embodiments of the invention will be explained in more detail below using the drawings.
-
FIG. 1 is a perspective illustration of a holding and positioning apparatus; -
FIG. 2 is a perspective illustration of a manipulator unit; -
FIG. 3 is an illustration of the principle of the manipulator unit in plan view; -
FIG. 4 is a perspective illustration of the holding and positioning apparatus fromFIG. 1 obliquely from below; -
FIG. 5 is a perspective illustration of an alternative design of the manipulator unit; -
FIG. 6 is a perspective illustration of a further alternative design of the manipulator unit; -
FIG. 7 is a perspective illustration of the holding and positioning apparatus with an illustration of sensors; and -
FIG. 8 is an illustration of the principle of the holding and positioning apparatus with an illustration of the sensors in plan view. -
FIG. 1 shows a holding andpositioning apparatus 1 for a projection objective for semiconductor lithography, anoptical element 3 being mounted in amounting ring 2. Theoptical element 3 is formed as a mirror, preferably as a deflection mirror. The mountingring 2 is carried and supported by threemanipulator units 4, which are firmly connected to abase body 5. Thebase body 5 is connected in the usual way to a housing (objective housing) or astructure 6. The threemanipulator units 4 can be adjusted vertically independently of one another along an optical axis (in the z direction), by which means the mountingring 2 together with themirror 3 can be raised at right angles to amirror plane 3 a or tilted about at least one arbitrary axis in themirror plane 3 a. - In
FIG. 2 , themanipulator unit 4 is illustrated in principle. Themanipulator unit 4 has amanipulator head 7 which is connected to the mountingring 2. Themanipulator head 7 is connected to amovable manipulator part 9 via a solid body joint 8, advantageously a spring tilting joint. The solid body joint 8 permits tilting and rotation of themanipulator head 7 by means of bending about anaxis 10. Themovable manipulator part 9 is connected by anactuator 11 via at least one solid body joint 12 to amanipulator foot 13. A tilting and bendingaxis 16 of the solid body joint 12 is arranged at right angles to theaxis 10 of thesolid body joint 8. The solid body joint 12 is preferably formed as a leaf spring and, by means of bending and torsion, is able to implement the other two degrees of rotational freedom and, by means of s-shaped bending, to implement the degrees of translational freedom along theaxis 10 of themanipulator head 7. The solid body joint 12 connects themovable manipulator part 9 to theactuator 11, which in turn is connected to themanipulator foot 13 such that it can rotate, via a solid body joint 14, which is likewise implemented as a leaf spring. Themanipulator foot 13 is firmly connected to theobjective housing 6 via thebase body 5, theobjective housing 6 not being illustrated in this exemplary embodiment. - The
actuator 11, which is implemented as an actuating lever here, can be tilted with respect to themanipulator foot 13 by bending the solid body joint 14, the angle of theactuator 11 being set and fixed bylinear actuating elements 15. Thelinear actuating elements 15 are formed as setting screws in the exemplary embodiments, it also being possible for other linear actuating elements, such as piezoelectric actuators, magnetostrictive actuators, magnets or other drive elements to be used. - By means of a laterally offset arrangement of the solid body joint 12 in relation to the solid body joint 14, the solid body joint 12 performs a movement in the vertical direction (z direction) when the
actuator 11 is tilted. As a result, the solid body joint 12 raises and lowers themanipulator head 7 with theoptical element 3 and the mountingring 2, the solid body joint 12 simultaneously compensating for the tilt angle of theactuator 11 in relation to themanipulator head 7. The solid body joint 12 is used not only to compensate for the angle between themanipulator head 7 and theactuator 11 when theactuator 11 is deflected, but also in the other twomanipulator units 4, which are not actuated at this instant, as a rotary joint about an axis of rotation which is determined by the twopassive manipulator units 4. - For each of the three
manipulator units 4, the possibility is provided of displacing themanipulator head 7 in the vertical direction (z direction). Theoptical element 3 can therefore also be displaced in the vertical direction and tilted about two mutuallyindependent axes plane 3 a. By means of the solid body joint 8 and the solid body joint 12 in themanipulator unit 4, which in the assembly of the threemanipulator units 4 form a statically determined mounting for the mountingring 2, deformation decoupling is provided for the mountingring 2 and therefore also for themirror 3. - The deformation decoupling and the manipulation possibility are combined by attaching the solid body joint 12 to the
integrated actuator 11 in one component, namely themanipulator unit 4. - The solid body joint 8 compensates for angular errors between the mounting
ring 2 and thebase body 5 about theaxis 10, while the solid body joint 12 compensates for angular errors between the mountingring 2 and thebase body 5 about theaxis 16 and offset errors between the mountingring 2 and thebase body 5 in the direction of theaxis 10. - If there are different heights of the
manipulator units 4 or irregularities of the joint faces for themanipulator units 4 on the mountingring 2 and thebase body 5, it is possible for tilting of the mountingring 2 with respect to thebase body 5 to occur. This tilt angle is compensated for via the solid body joint 8 and the solid body joint 12, it being possible for the solid body joint 8 to be tilted about theaxis 10 and for the solid body joint 12 to be tilted about theaxis 16. - As a result of a change in the ambient temperature, for example during transport of the projection objective with the holding and
positioning apparatus 1 contained therein, themirror 3 in conjunction with the mountingring 2 can expand with respect to thebase body 5, since themirror 3 and the mountingring 2 normally have different temperature expansion coefficients from those of thebase body 5 and theobjective housing 6. Compensation of this type in the event of temperature changes is thus performed by themanipulator units 4 which are arranged between themirror 3 and thebase structure 5. This is also possible when fixing theactuator 11. In order to compensate for expansion differences, themanipulator units 4 should if possible have a material which provides a very low thermal expansion coefficient. This can be, for example, INVAR or else a ceramic material. By means of compensating for the temperature differences, forces on themirror 3, which otherwise could lead to deformations of or even to damage to themirror 3, are thus minimized. - In addition, irradiation of the
mirror 3 during operation leads to expansion of themirror 3 with respect to thebase body 5, since themirror 3 heats up to a substantially greater extent than thebase body 5. These temperature expansions are compensated for by the solid body joint 12, since the solid body joint 12 permits displacement of the mountingring 2 with respect to thebase body 5 in the direction of theaxis 10. -
FIG. 3 shows an illustration of the principle of an arrangement of themanipulator units 4 in plan view. In order to determine the position of themirror 3 with respect to thebase body 5 or theobjective housing 6, areference point 17 is defined, which ideally coincides with the point of intersection of the optical axis in themirror plane 3 a. The position of thereference point 17 identifies the position of themirror 3 with respect to theobjective housing 6 or thebase body 5 which is firmly connected to theobjective housing 6. Following the adjustment of themirror 3, thereference point 17 must no longer move, or only within a small tolerance, with respect to theobjective housing 6 during the entire lifetime of the projection objective (not illustrated). - In order that the
mirror 3 is mounted as stiffly as possible with respect to oscillations in themirror plane 3 a, themanipulator units 4 should if possible be arranged in such a way that thereference point 17 lies at the geometric center of gravity of the triangle covered by themanipulator units 4. -
FIG. 4 shows a perspective illustration of the holding andpositioning apparatus 1 that can be seen inFIG. 1 , obliquely from below. In order that themirror 3 is not decentered with respect to thebase body 5, the threemanipulator units 4 should be arranged such that the directions of movement of the displacements along theaxis 10 made possible by the solid body joint 12 intersect at thereference point 17 of themirror 3. Thereference point 17 should remain stationary with respect to theobjective housing 6 and with respect to thebase body 5. -
FIG. 5 shows an alternative design of themanipulator unit 4. In order to fix the point of rotation of theactuator 11 unambiguously with respect to themanipulator foot 13, in this case theactuator 11 is additionally connected to themanipulator foot 13 by a third solid body joint 18, which is likewise implemented as a leaf spring. The solid body joint 14, together with the solid body joint 18, forms a crossed-spring joint, the solid body joint 18 inFIG. 5 being implemented as a double leaf spring, and a rear solid body joint part being hidden by themanipulator unit 4. - As can be seen, the
manipulator foot 13 can thus be moved relative to theoptical element 3. In this case, the first solid body joint 14 has a first axis ofrotation 14 a of theactuator 11, and the second solid body joint 12 has a second axis ofrotation 12 a of themovable manipulator part 9, such that rotation about the first axis ofrotation 14 a results in displacement of the second axis ofrotation 12 a relative to themanipulator foot 13, the position of the first axis ofrotation 14 a and of the second axis ofrotation 12 a being determined at the same time by the third solid body joint 18. As can be seen, the third solid body joint 18 connects themanipulator foot 13 and themovable actuator 11. The third solid body joint 18 also connects themovable manipulator part 9 to themovable actuator 11, with which the third solid body joint 18 also connects themovable manipulator part 9 to themanipulator foot 13. - As can also be seen from
FIG. 5 , the third solid body joint 18 is arranged to be rotated through an angle in the deflection direction relative to the solid body joints 12 and 14 with regard to the respective deflection directions of the three solid body joints 12, 14 and 18. The angle can be between 30 and 150°, an angle of 90° being illustrated by way of example. -
FIG. 6 shows a further possibility of implementing themanipulator unit 4. In this design configuration of themanipulator unit 4, the solid body joint 18 is provided in the inner part of themanipulator unit 4 or displaced into the latter, likewise again forming a crossed-spring joint with the solid body joint 14. A group comprising a plurality of solid body joints, namely a tilting spring joint 19, anintermediate element 20 and a tilting spring joint 21, performs the same function as the solid body joint 12, the aforementioned group connecting themovable manipulator part 9 to theactuator 11. If theactuator 11 is fixed in its position by thelinear actuating elements 15, themanipulator head 7 is predefined a tilting movement about theaxis 16 and a translational movement in the direction of theaxis 10 with respect to themanipulator foot 13 by the arrangement of the solid body joints 19, 20 and 21. -
FIG. 7 shows a perspective view of the holding andpositioning apparatus 1 with an illustration ofsensors 22. It is advantageous to measure the movement of themirror 3 with respect to thebase body 5 during the lifting and tilting adjustment of themirror 3, in order in this way to be able to monitor the magnitude of the lift and the tilt and therefore to be able to correct any possible disruptive movement. The movements relevant to themirror 3 are the lift and two tilts about respectively mutuallyindependent axes FIG. 7 , twomanipulator units 4 are illustrated completely, onemanipulator unit 4 being merely indicated in order to illustrate thesensors 22. In order to measure the three movements, at least threesensors 22 are provided, which measure the change in the distance, for example in the lifting direction, at three points on themirror 3 or on the mountingring 2. Thesensors 22, preferably formed as capacitive sensors, are arranged onmountings 23. Thesensors 22 should be arranged as far apart from one another as possible, in order to achieve a high resolution for the tilt angle measurement by means of a broad base. - In
FIG. 8 , which illustrates the holding and positioning apparatus 1 (themanipulator units 4 are hidden) in very simplified form, the holding andpositioning apparatus 1 has thesensors 22. In order to average out measurement errors,additional sensors 22 can be provided onfurther mountings 23. - In the exemplary embodiments according to
FIG. 7 andFIG. 8 , in each case foursensors 22 are provided for the measurement and are arranged or fitted at the four corners of themirror 3. As a result of such an arrangement, thesensors 22 are located very far apart, in order to ensure the best possible tilt angle resolution. - By means of the holding and
positioning apparatus 1 in conjunction with themanipulator units 4, themirror 3 can be displaced in the z direction and tilted about two mutually independent axes in themirror plane 3 a. By means of this stiff attachment, undesired vibration of themirror 3 is suppressed by the holding andpositioning apparatus 1, and impermissible imaging errors can be minimized.
Claims (22)
1-2. (canceled)
3. A holding and positioning apparatus for an optical element, the optical element being mounted in a mounting ring and the mounting ring being mounted via at least one manipulator unit, the manipulator unit having a linear actuating element, a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint, and the movable manipulator part being connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator, and the manipulator unit comprising a crossed-spring joint.
4. The holding and positioning apparatus as claimed in claim 3 , the crossed-spring joint being implemented as a double leaf spring, the actuator additionally being connected to the manipulator foot via a further solid body joint.
5. The holding and positioning apparatus as claimed in claim 3 , rotation or tilting of the manipulator head about an axis being provided by means of the solid body joint, which is connected to the movable manipulator part and the manipulator head.
6. The holding and positioning apparatus as claimed in claim 3 , rotation or tilting of the movable manipulator part about an axis being provided by means of the at least one solid body joint, which is connected to the movable manipulator part and the actuator.
7. The holding and positioning apparatus as claimed in claim 3 , at least three sensors being provided in order to measure lifting and tilting movements of the optical element with respect to a base body.
8. The holding and positioning apparatus as claimed in claim 7 , the sensors being formed as capacitive sensors.
9-10. (canceled)
11. A manipulator unit for moving an optical element, in particular a mirror, on an axis at right angles to a plane of the optical element and for tilting the optical element about two mutually independent axes, having a manipulator head, a movable manipulator part, a manipulator foot and a linear actuating element, the manipulator head being connected to the movable manipulator part via a solid body joint, and the movable manipulator part being connected to the manipulator foot via an actuator and at least one solid body joint, and the manipulator unit comprising a crossed-spring joint.
12. The manipulator unit as claimed in claim 11 , the crossed-spring joint being implemented as a double leaf spring, the actuator additionally being connected to the manipulator foot via a further solid body joint.
13-14. (canceled)
15. A projection objective for semiconductor lithography, having optical elements arranged in an objective housing, at least one optical element being provided with a holding and positioning device, the optical element being mounted in a mounting ring and the mounting ring being mounted via at least one manipulator unit, the manipulator unit being connected to a base body and having a linear actuating element, a manipulator head, a movable manipulator part and a manipulator foot, the manipulator head being connected to the movable manipulator part via a solid body joint, and the movable manipulator part being connected to the manipulator foot via an actuator and at least one solid body joint, the linear actuating element being coupled to the manipulator foot and the actuator, and the manipulator unit comprising a crossed-spring joint.
16. The projection objective as claimed in claim 15 , the crossed-spring joint being implemented as a double leaf spring, the actuator additionally being connected to the manipulator foot via a further solid body joint.
17. The projection objective as claimed in claim 15 , the at least one optical element being formed as a mirror, in particular as a deflection mirror.
18. The projection objective as claimed in claim 17 , in an implementation of the projection objective as a catadioptric objective with a radial arm.
19. A manipulator unit for moving an optical element, comprising
a manipulator foot relative to which the optical element can be moved,
an actuating element for adjusting a movable actuator connected to the manipulator foot via a first solid body joint,
a movable manipulator part, connected to the actuator via a second solid body joint, for attachment to the optical element,
the first solid body joint defining a first axis of rotation of the actuator and the second solid body joint defining a second axis of rotation of the movable manipulator part in such a way that rotation about the first axis of rotation results in displacement of the second axis of rotation relative to the manipulator foot, the position of the first and/or second axis of rotation being determined at the same time by at least a third solid body joint.
20. The manipulator unit as claimed in claim 19 , the third solid body joint connecting the manipulator foot and the movable actuator.
21. The manipulator unit as claimed in claim 19 , the third solid body joint connecting the movable manipulator part to the movable actuator.
22. The manipulator unit as claimed in claim 19 , the third solid body joint connecting the movable manipulator part to the manipulator foot.
23. The manipulator unit as claimed in claim 19 , at least one of the solid body joints being formed in the manner of a leaf spring.
24. The manipulator unit as claimed in claim 23 , the third solid body joint being arranged to be rotated through an angle in the deflection direction relative to the first and/or second solid body joint with regard to the respective deflection directions of the solid body joints.
25. The manipulator unit as claimed in claim 24 , the angle being between 30° and 150°.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/804,467 US20070223116A1 (en) | 2003-09-24 | 2007-05-18 | Holding and positioning apparatus for an optical element |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10344178.6 | 2003-09-24 | ||
DE10344178A DE10344178B4 (en) | 2003-09-24 | 2003-09-24 | Holding and positioning device for an optical element |
US10/944,135 US7242537B2 (en) | 2003-09-24 | 2004-09-17 | Holding and positioning apparatus for an optical element |
US11/804,467 US20070223116A1 (en) | 2003-09-24 | 2007-05-18 | Holding and positioning apparatus for an optical element |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US10/944,135 Division US7242537B2 (en) | 2003-09-24 | 2004-09-17 | Holding and positioning apparatus for an optical element |
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US20070223116A1 true US20070223116A1 (en) | 2007-09-27 |
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US11/804,467 Abandoned US20070223116A1 (en) | 2003-09-24 | 2007-05-18 | Holding and positioning apparatus for an optical element |
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US10/944,135 Expired - Fee Related US7242537B2 (en) | 2003-09-24 | 2004-09-17 | Holding and positioning apparatus for an optical element |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104076612A (en) * | 2013-03-27 | 2014-10-01 | 上海微电子装备有限公司 | Flexible heavy load support device |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7738193B2 (en) | 2004-06-29 | 2010-06-15 | Carl Zeiss Smt Ag | Positioning unit and alignment device for an optical element |
DE102005057860A1 (en) * | 2005-12-03 | 2007-06-06 | Carl Zeiss Smt Ag | Lens, in particular projection objective for semiconductor lithography |
DE102006039821A1 (en) | 2006-08-25 | 2008-03-13 | Carl Zeiss Smt Ag | Projection exposure apparatus for microlithography, has manipulator with linear drive, which is designed as direct drive such that lens is displaced up to specific micrometers with accuracy of ten millimeters in two degrees of freedom |
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DE102008036574A1 (en) * | 2008-07-31 | 2010-02-04 | Carl Zeiss Laser Optics Gmbh | Optical element i.e. mirror, supporting device for fusion of silicon layer on substrate, has elastic units formed as monopods, and optical element and area elongated in square-shaped manner with preset aspect ratio |
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DE102010018224A1 (en) * | 2010-04-23 | 2012-02-16 | Carl Zeiss Smt Gmbh | Optical module with an adjustable optical element |
DE102011080408A1 (en) * | 2011-08-04 | 2013-02-07 | Carl Zeiss Smt Gmbh | Support for mirror of extreme UV-projection exposure system used in microlithography process to produce small structure in e.g. nanometer range, has actuators associated to bipod holder, mirror connection and support elements as compensator |
US20130125793A1 (en) * | 2011-11-22 | 2013-05-23 | Alex K. Deyhim | Two degrees of freedom optical table |
DE102012202170A1 (en) * | 2012-02-14 | 2013-06-13 | Carl Zeiss Smt Gmbh | Device for adjusting position of e.g. optical device for projection exposure system for extreme UV projection lithography, has holder unit whose dimension is variable by effect of magnetic field in predetermined direction |
DE102013109185B3 (en) * | 2013-08-23 | 2014-05-22 | Jenoptik Optical Systems Gmbh | Thermal compensated optical component forms spacing between first and third solid joints, and second and fourth solid joints, where spacing is equal to twice length of one coupling of connection unit |
JP6281399B2 (en) * | 2014-04-22 | 2018-02-21 | 京セラドキュメントソリューションズ株式会社 | Optical scanning device and image forming apparatus having the same |
CN106933060B (en) * | 2015-12-30 | 2018-10-16 | 上海微电子装备(集团)股份有限公司 | A kind of prism rotation regulating mechanism and exposure system of photo-etching machine and litho machine |
US11681100B2 (en) | 2016-09-30 | 2023-06-20 | 3Sae Technologies, Inc. | Multi-axis positioner |
DE102016224334A1 (en) | 2016-12-07 | 2017-01-26 | Carl Zeiss Smt Gmbh | OPTICAL DEVICE, AND ASSEMBLY AND STORAGE AND POSITIONING DEVICE FOR OPTICAL ELEMENTS OF THE OPTICAL DEVICE |
DE102017112517B3 (en) | 2017-06-07 | 2018-12-06 | Physik Instrumente (Pi) Gmbh & Co. Kg | locking device |
DE102018200181A1 (en) | 2018-01-08 | 2019-01-10 | Carl Zeiss Smt Gmbh | Projection exposure machine with reduced parasitic deformation of components |
DE102018200178A1 (en) | 2018-01-08 | 2019-01-10 | Carl Zeiss Smt Gmbh | Projection exposure machine with reduced parasitic deformation of components |
DE102018132463B4 (en) * | 2018-12-17 | 2021-09-02 | Deutsches Elektronen-Synchrotron Desy | Positioning unit |
DE102019204335A1 (en) | 2019-03-28 | 2020-10-01 | Carl Zeiss Smt Gmbh | Method for producing a holding and positioning device and a heat sink |
JP7380000B2 (en) * | 2019-09-25 | 2023-11-15 | 株式会社ニコン | Lens barrel and lens barrel alignment method |
DE102020201774A1 (en) * | 2020-02-13 | 2021-08-19 | Carl Zeiss Smt Gmbh | Optical assembly with compensation element and projection exposure system |
FR3110713B1 (en) * | 2020-05-20 | 2022-04-22 | Airbus Defence & Space Sas | FIXING A MIRROR ON A SUPPORT |
CN113917794B (en) * | 2021-09-22 | 2022-12-06 | 哈尔滨工业大学 | Reflector frame and reflecting device |
DE102022101921A1 (en) | 2022-01-27 | 2023-07-27 | Toptica Photonics Ag | Holding arrangement for an optical element |
Citations (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5896193A (en) * | 1997-02-14 | 1999-04-20 | Jds Fitel Inc. | Apparatus for testing an optical component |
US5986827A (en) * | 1998-06-17 | 1999-11-16 | The Regents Of The University Of California | Precision tip-tilt-piston actuator that provides exact constraint |
US6229657B1 (en) * | 1998-06-09 | 2001-05-08 | Carl-Zeiss-Stiftung | Assembly of optical element and mount |
US6259571B1 (en) * | 1999-02-27 | 2001-07-10 | Carl-Zeiss-Stiftung | Adjustable assembly |
US6402329B1 (en) * | 1998-01-22 | 2002-06-11 | Alcatel | Assembly for mounting and correcting the position of an element, such as a mirror, of a space telescope |
US20020072057A1 (en) * | 2000-03-21 | 2002-06-13 | Ovidiu Platica | Method of simultaneous detection of base changes (SDBC) in expressed genes |
US6445515B2 (en) * | 2000-04-20 | 2002-09-03 | Carl-Zeiss-Stiftung | Optical element housing or mounting connector |
US6466380B2 (en) * | 2000-04-05 | 2002-10-15 | Carl-Zeiss-Stiftung | Iris diaphragm |
US20020167734A1 (en) * | 2001-04-07 | 2002-11-14 | Carl Zeiss Semiconductor Manfacturing Technologies Ag | Catadioptric projection objective |
US20020176094A1 (en) * | 2001-03-30 | 2002-11-28 | Thomas Petasch | Apparatus for mounting an optical element in an optical system |
US6538829B2 (en) * | 2000-08-14 | 2003-03-25 | Carl-Zeiss-Stiftung | Optical element mount comprising an optical element holding frame |
US6552862B2 (en) * | 2000-10-31 | 2003-04-22 | Carl-Zeiss-Stiftung | Mounting device for an optical element |
US6580570B2 (en) * | 2000-10-18 | 2003-06-17 | Carl-Zeiss-Stiftung | Mounting apparatus for an optical element |
US6594093B2 (en) * | 2001-01-08 | 2003-07-15 | Carl Zeiss Semiconductor Manufacturing Technologies Ag | Adjusting apparatus for an optical element in a lens system |
US6603615B2 (en) * | 2000-05-27 | 2003-08-05 | Carl-Zeiss-Stiftung | Precision positioning apparatus for positioning a component especially an optical component |
US6667839B2 (en) * | 2001-01-05 | 2003-12-23 | Carl Zeiss Smt Ag | Holding device for an optical element made of a crystalline material |
US6667255B2 (en) * | 1999-12-15 | 2003-12-23 | Texplorer Gmbh | Garment, in particular undergarment, for persons in military and civil defense services |
US6717742B2 (en) * | 2002-04-05 | 2004-04-06 | Carl-Zeiss-Stiftung | Objective for a movie camera |
US6727984B2 (en) * | 2002-01-08 | 2004-04-27 | Zeiss Optronik Gmbh | Multichannel receiver system for angularly resolved laser ranging measurement |
US6733369B1 (en) * | 2002-09-30 | 2004-05-11 | Carl Zeiss Semiconductor Manufacturing Technologies, Ag | Method and apparatus for polishing or lapping an aspherical surface of a work piece |
US6768600B2 (en) * | 2000-10-11 | 2004-07-27 | Carl-Zeiss-Stiftung | Temperature compensation apparatus for thermally loaded bodies of low thermal conductivity |
US6791768B2 (en) * | 2001-11-20 | 2004-09-14 | Carl Zeiss Smt Ag | Arrangement for securing a mount of an optical element |
US6798588B2 (en) * | 2001-10-27 | 2004-09-28 | Carl Zeiss Smt Ag | Method for applying a scale to a carrier |
US6816325B1 (en) * | 2003-09-11 | 2004-11-09 | Carl Zeiss Smt Ag | Mounting apparatus for an optical element |
US6825914B2 (en) * | 2000-12-08 | 2004-11-30 | Carl Zeiss Smt Ag | System for flushing at least one internal space of an objective |
US6829107B2 (en) * | 2000-06-17 | 2004-12-07 | Carl-Zeiss-Stiftung | Device for mounting an optical element, for example a lens element in a lens |
US6844994B2 (en) * | 2000-09-20 | 2005-01-18 | Carl Zeiss Smt Ag | Optical element deformation system |
US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19959616A1 (en) * | 1999-12-10 | 2001-06-13 | Volkswagen Ag | Control device for an automatically and manually shiftable manual transmission in a motor vehicle |
DE20012046U1 (en) * | 2000-07-12 | 2000-09-14 | Zeiss Carl Fa | Device for adjusting a surface of an adjustment part |
-
2003
- 2003-09-24 DE DE10344178A patent/DE10344178B4/en not_active Expired - Fee Related
-
2004
- 2004-09-17 US US10/944,135 patent/US7242537B2/en not_active Expired - Fee Related
-
2007
- 2007-05-18 US US11/804,467 patent/US20070223116A1/en not_active Abandoned
Patent Citations (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5896193A (en) * | 1997-02-14 | 1999-04-20 | Jds Fitel Inc. | Apparatus for testing an optical component |
US6402329B1 (en) * | 1998-01-22 | 2002-06-11 | Alcatel | Assembly for mounting and correcting the position of an element, such as a mirror, of a space telescope |
US6229657B1 (en) * | 1998-06-09 | 2001-05-08 | Carl-Zeiss-Stiftung | Assembly of optical element and mount |
US5986827A (en) * | 1998-06-17 | 1999-11-16 | The Regents Of The University Of California | Precision tip-tilt-piston actuator that provides exact constraint |
US6259571B1 (en) * | 1999-02-27 | 2001-07-10 | Carl-Zeiss-Stiftung | Adjustable assembly |
US6667255B2 (en) * | 1999-12-15 | 2003-12-23 | Texplorer Gmbh | Garment, in particular undergarment, for persons in military and civil defense services |
US20020072057A1 (en) * | 2000-03-21 | 2002-06-13 | Ovidiu Platica | Method of simultaneous detection of base changes (SDBC) in expressed genes |
US6466380B2 (en) * | 2000-04-05 | 2002-10-15 | Carl-Zeiss-Stiftung | Iris diaphragm |
US6445515B2 (en) * | 2000-04-20 | 2002-09-03 | Carl-Zeiss-Stiftung | Optical element housing or mounting connector |
US6603615B2 (en) * | 2000-05-27 | 2003-08-05 | Carl-Zeiss-Stiftung | Precision positioning apparatus for positioning a component especially an optical component |
US6829107B2 (en) * | 2000-06-17 | 2004-12-07 | Carl-Zeiss-Stiftung | Device for mounting an optical element, for example a lens element in a lens |
US6538829B2 (en) * | 2000-08-14 | 2003-03-25 | Carl-Zeiss-Stiftung | Optical element mount comprising an optical element holding frame |
US6844994B2 (en) * | 2000-09-20 | 2005-01-18 | Carl Zeiss Smt Ag | Optical element deformation system |
US6768600B2 (en) * | 2000-10-11 | 2004-07-27 | Carl-Zeiss-Stiftung | Temperature compensation apparatus for thermally loaded bodies of low thermal conductivity |
US6580570B2 (en) * | 2000-10-18 | 2003-06-17 | Carl-Zeiss-Stiftung | Mounting apparatus for an optical element |
US6552862B2 (en) * | 2000-10-31 | 2003-04-22 | Carl-Zeiss-Stiftung | Mounting device for an optical element |
US6825914B2 (en) * | 2000-12-08 | 2004-11-30 | Carl Zeiss Smt Ag | System for flushing at least one internal space of an objective |
US6667839B2 (en) * | 2001-01-05 | 2003-12-23 | Carl Zeiss Smt Ag | Holding device for an optical element made of a crystalline material |
US6594093B2 (en) * | 2001-01-08 | 2003-07-15 | Carl Zeiss Semiconductor Manufacturing Technologies Ag | Adjusting apparatus for an optical element in a lens system |
US20020176094A1 (en) * | 2001-03-30 | 2002-11-28 | Thomas Petasch | Apparatus for mounting an optical element in an optical system |
US6870632B2 (en) * | 2001-03-30 | 2005-03-22 | Carl Zeiss Smt Ag | Apparatus for mounting an optical element in an optical system |
US20020167734A1 (en) * | 2001-04-07 | 2002-11-14 | Carl Zeiss Semiconductor Manfacturing Technologies Ag | Catadioptric projection objective |
US6798588B2 (en) * | 2001-10-27 | 2004-09-28 | Carl Zeiss Smt Ag | Method for applying a scale to a carrier |
US6791768B2 (en) * | 2001-11-20 | 2004-09-14 | Carl Zeiss Smt Ag | Arrangement for securing a mount of an optical element |
US6727984B2 (en) * | 2002-01-08 | 2004-04-27 | Zeiss Optronik Gmbh | Multichannel receiver system for angularly resolved laser ranging measurement |
US6717742B2 (en) * | 2002-04-05 | 2004-04-06 | Carl-Zeiss-Stiftung | Objective for a movie camera |
US6733369B1 (en) * | 2002-09-30 | 2004-05-11 | Carl Zeiss Semiconductor Manufacturing Technologies, Ag | Method and apparatus for polishing or lapping an aspherical surface of a work piece |
US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
US6816325B1 (en) * | 2003-09-11 | 2004-11-09 | Carl Zeiss Smt Ag | Mounting apparatus for an optical element |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104076612A (en) * | 2013-03-27 | 2014-10-01 | 上海微电子装备有限公司 | Flexible heavy load support device |
Also Published As
Publication number | Publication date |
---|---|
DE10344178B4 (en) | 2006-08-10 |
DE10344178A1 (en) | 2005-04-28 |
US7242537B2 (en) | 2007-07-10 |
US20060007563A1 (en) | 2006-01-12 |
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