US20070081889A1 - Multi-stage friction vacuum pump - Google Patents
Multi-stage friction vacuum pump Download PDFInfo
- Publication number
- US20070081889A1 US20070081889A1 US10/578,989 US57898904A US2007081889A1 US 20070081889 A1 US20070081889 A1 US 20070081889A1 US 57898904 A US57898904 A US 57898904A US 2007081889 A1 US2007081889 A1 US 2007081889A1
- Authority
- US
- United States
- Prior art keywords
- compressor stage
- turbo
- circular
- rotor
- compressor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/10—Centrifugal pumps for compressing or evacuating
- F04D17/12—Multi-stage pumps
- F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
Definitions
- the invention refers to a multi-stage friction vacuum pump with at least one axially compressing turbo-compressor stage having a rotor rotating about its axis and comprising rotor discs projecting between stationary stator discs.
- Turbomolecular pumps belong in the group of friction vacuum pumps with which a high vacuum can be created, for example for recipients used in semi-conductor manufacturing or for mass spectrometers.
- a multi-stage friction vacuum pump described in U.S. Pat. No. 7,011,491 comprises one or a plurality of turbo-compressor stages each formed by a rotor with radially projecting rotor discs and a stator with radially projecting stator discs. The rotor discs and the stator discs mesh in a comb-like manner with little space between them. They cause a molecular flow axial to the rotor axis.
- a circular compressor stage which comprises a rotor with axially projecting rotor blades arranged on a circular line and a stator with axially protruding stator blades arranged on a circular line.
- the rotor blades and the stator blades mesh alternately and cause a molecular flow that is directed either radially inward or radially outward, depending on the sense of rotation and the angle of attack of the blades.
- the vacuum pump comprises a turbo-compressor stage and a circular compressor stage arranged downstream in the flow path.
- the turbo-compressor stage is suited to generate a high vacuum
- the downstream circular compressor stage serves to effect a pressure increase.
- the circular compressor stage can have small dimensions.
- the circular compressor stage has a small axial dimension since it is flown through mainly in the radial direction.
- the overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is clearly intensified with respect to single-stage friction vacuum pumps.
- the present combination of an upstream turbo-compressor stage and a downstream circular compressor stage offers the advantage of requiring little space while having a high compression capacity.
- the turbo-compressor stage and the circular compressor stage are integrated in a common combination of rotor and stator.
- the rotors of both compressor stages are formed by a single combined rotor and the stators of both compressor stages are also formed by a single combined stator.
- the dimensions and the weight can be reduced further.
- the present friction vacuum pump is preferably designed as a multiple inlet pump. It comprises at least two axially spaced, serially compressing turbo-compressor stages between which an intermediate inlet is located.
- a circular compressor stage is arranged on the compressor side of the first turbo-compressor stage and/or the second turbo-compressor stage.
- Such a pump is particularly suited for use in the context of mass spectrometers. Due to the increased gas flow at the intermediate inlet to which the analyzing means of the mass spectrometer is connected, the gas flow at the intermediate inlet is increased without a negative effect on the pressure at the high vacuum inlet. The increase in the gas flow at the intermediate inlet means an increased sensitivity of the mass spectrometer.
- FIG. 1 illustrates a longitudinal section through a friction vacuum pump of the present invention
- FIG. 2 is an illustration of the circular compressor stage
- FIGS. 3 and 4 are longitudinal sections through different embodiments of circular compressor stages.
- the friction vacuum pump illustrated in FIG. 1 comprises a housing 10 of substantially cylindrical design, which has a high vacuum port HV at one end.
- a housing wall In the housing wall an intermediate inlet ZE 1 is provided that is open to the side.
- the intermediate inlet ZE 1 is bridged by webs 18 that connect the stator parts with each other.
- a first turbo-compressor stage 11 formed by a stator 12 and a rotor 13 is arranged.
- the stator 12 has a plurality of stator discs 15 directed radially inward from a circumferential wall 14 .
- the rotor 13 has a plurality of rotor discs 16 projecting radially outward between the stator discs 15 .
- a drive 17 including a fast rotating electric motor drives the rotor 13 at a number of rotations between 30,000 and 60,000 rpm.
- a second turbo-compressor stage 21 is arranged on the compressor side of the first turbo-compressor stage 11 and has its inlet connected with the intermediate inlet ZE 1 .
- the turbo-compressor stage 21 is formed by a stator 22 and a rotor 23 .
- the stator 22 comprises a plurality of stator discs 25 directed radially inward from a circumferential wall 22 .
- the rotor 23 comprises a plurality of rotor discs 26 projecting radially outward between the stator discs 25 .
- the rotors 13 and 23 are fixedly interconnected and are driven together by the drive 17 .
- a further compressor stage 30 follows the second turbo-compressor stage 21 , this further compressor stage being additionally connected with an intermediate inlet ZE 2 .
- the compressor stage 30 is a Holweck stage or another molecular pump, for example a Gaede pump, a Siegbahn pump, an Englander pump or a side channel pump.
- a circular compressor stage 33 is provided following the first turbo-compressor stage 11 . It comprises a rotor disc 34 which is a part of the rotor 13 of the turbo-compressor stage 11 , and a stator disc 32 which is a part of the stator 12 .
- the rotor disc 34 comprises rotor blades 35 arranged on concentric circles
- the stator disc 32 comprises stator blades 36 also arranged on concentric circles and engaging in gaps between the rotor circles, as is illustrated in FIG. 2 .
- the stator blades and the rotor blades are inclined oppositely with respect to the radial direction.
- the circular compressor stage 33 conveys either radially outward or radially inward.
- the conveying direction is indicated by the arrow 37 .
- the gas transport passes from the high vacuum inlet HV through the turbo-compressor stage 11 and radially inward from the circumference thereof through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE 1 .
- the turbo-compressor stage 21 conveys the gas to the compressor stage 30 .
- the second intermediate inlet ZE 2 also opens into the compressor stage 30 .
- the compressor stage 30 conveys to an outlet (not illustrated).
- One of the rotor discs 16 of the turbo compressor stage 11 is the supporting disc for the rotor blades of the circular compressor stage 33 .
- the stator disc of the circular compressor disc simultaneously forms the end wall of the pressure-side end of the turbo-compressor stage 11 .
- a circular compressor stage 33 may also be provided behind the second turbo-compressor stage 21 .
- the circular compressor stage arranged on the pressure side of the respective turbo-compressor stage and integrated in the turbo-compressor stage increases the gas flow on the pressure side. For a mass spectrometer connected thereto, this means an increase in sensitivity.
- FIG. 3 illustrates the gas flow 40 through the circular compressor stage 33 flowing radially from the outside inward.
- the blade surface of the rotor disc 34 is conical.
- the rotor blades 35 have an axial length that decreases as the radius of the circular path decreases.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
A multi-stage vacuum pump includes at least one turbo-compressor stage (11) and is equipped with a circular compressor stage (33) on the pressure side of the turbo-compressor stage. The pump has small axial dimensions, enabling the compression to be increased without significantly increasing the space requirement.
Description
- The invention refers to a multi-stage friction vacuum pump with at least one axially compressing turbo-compressor stage having a rotor rotating about its axis and comprising rotor discs projecting between stationary stator discs.
- Turbomolecular pumps belong in the group of friction vacuum pumps with which a high vacuum can be created, for example for recipients used in semi-conductor manufacturing or for mass spectrometers. A multi-stage friction vacuum pump described in U.S. Pat. No. 7,011,491 comprises one or a plurality of turbo-compressor stages each formed by a rotor with radially projecting rotor discs and a stator with radially projecting stator discs. The rotor discs and the stator discs mesh in a comb-like manner with little space between them. They cause a molecular flow axial to the rotor axis. In addition to the turbo-compressor stage, a circular compressor stage may be provided which comprises a rotor with axially projecting rotor blades arranged on a circular line and a stator with axially protruding stator blades arranged on a circular line. The rotor blades and the stator blades mesh alternately and cause a molecular flow that is directed either radially inward or radially outward, depending on the sense of rotation and the angle of attack of the blades.
- It is the object of the invention to provide a multi-stage friction vacuum pump with at least one turbo-compressor stage, wherein the stages are arranged in series in the flow path and which is to yield higher compression.
- The vacuum pump comprises a turbo-compressor stage and a circular compressor stage arranged downstream in the flow path. Whereas the turbo-compressor stage is suited to generate a high vacuum, the downstream circular compressor stage serves to effect a pressure increase. As a consequence, since the gas volume is reduced by compression, the circular compressor stage can have small dimensions. The circular compressor stage has a small axial dimension since it is flown through mainly in the radial direction. The overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is clearly intensified with respect to single-stage friction vacuum pumps. The present combination of an upstream turbo-compressor stage and a downstream circular compressor stage offers the advantage of requiring little space while having a high compression capacity.
- According to a preferred embodiment of the invention, the turbo-compressor stage and the circular compressor stage are integrated in a common combination of rotor and stator. This means that the rotors of both compressor stages are formed by a single combined rotor and the stators of both compressor stages are also formed by a single combined stator. Thus, the dimensions and the weight can be reduced further.
- The present friction vacuum pump is preferably designed as a multiple inlet pump. It comprises at least two axially spaced, serially compressing turbo-compressor stages between which an intermediate inlet is located. A circular compressor stage is arranged on the compressor side of the first turbo-compressor stage and/or the second turbo-compressor stage. Such a pump is particularly suited for use in the context of mass spectrometers. Due to the increased gas flow at the intermediate inlet to which the analyzing means of the mass spectrometer is connected, the gas flow at the intermediate inlet is increased without a negative effect on the pressure at the high vacuum inlet. The increase in the gas flow at the intermediate inlet means an increased sensitivity of the mass spectrometer.
- Depending on the compression ratio, different types and structures may be used for the circular compressor stages, such as described in U.S. Pat. No. 7,011,491.
- The following is a detailed description of embodiments of the invention with reference to the drawings. These embodiments should not be seen as limiting the scope of protection of the present invention. Rather, this scope is defined by the claims and the equivalents thereof.
- In the Figures:
-
FIG. 1 illustrates a longitudinal section through a friction vacuum pump of the present invention, -
FIG. 2 is an illustration of the circular compressor stage, -
FIGS. 3 and 4 are longitudinal sections through different embodiments of circular compressor stages. - The friction vacuum pump illustrated in
FIG. 1 comprises ahousing 10 of substantially cylindrical design, which has a high vacuum port HV at one end. In the housing wall an intermediate inlet ZE1 is provided that is open to the side. The intermediate inlet ZE1 is bridged bywebs 18 that connect the stator parts with each other. - In the
front portion 10 a of thehousing 10, a first turbo-compressor stage 11 formed by astator 12 and arotor 13 is arranged. Thestator 12 has a plurality ofstator discs 15 directed radially inward from acircumferential wall 14. Therotor 13 has a plurality ofrotor discs 16 projecting radially outward between thestator discs 15. Adrive 17 including a fast rotating electric motor drives therotor 13 at a number of rotations between 30,000 and 60,000 rpm. - A second turbo-
compressor stage 21 is arranged on the compressor side of the first turbo-compressor stage 11 and has its inlet connected with the intermediate inlet ZE1. The turbo-compressor stage 21 is formed by astator 22 and arotor 23. Thestator 22 comprises a plurality ofstator discs 25 directed radially inward from acircumferential wall 22. Therotor 23 comprises a plurality ofrotor discs 26 projecting radially outward between thestator discs 25. Therotors drive 17. - In the
housing 10, afurther compressor stage 30 follows the second turbo-compressor stage 21, this further compressor stage being additionally connected with an intermediate inlet ZE2. For example, thecompressor stage 30 is a Holweck stage or another molecular pump, for example a Gaede pump, a Siegbahn pump, an Englander pump or a side channel pump. - In the present embodiment, a
circular compressor stage 33 is provided following the first turbo-compressor stage 11. It comprises arotor disc 34 which is a part of therotor 13 of the turbo-compressor stage 11, and astator disc 32 which is a part of thestator 12. Therotor disc 34 comprisesrotor blades 35 arranged on concentric circles, and thestator disc 32 comprisesstator blades 36 also arranged on concentric circles and engaging in gaps between the rotor circles, as is illustrated inFIG. 2 . The stator blades and the rotor blades are inclined oppositely with respect to the radial direction. Depending on the sense of rotation of the rotor, thecircular compressor stage 33 conveys either radially outward or radially inward. In the present embodiment, the conveying direction is indicated by thearrow 37. The gas transport passes from the high vacuum inlet HV through the turbo-compressor stage 11 and radially inward from the circumference thereof through thecircular compressor stage 33 and from there through agap 38 to the intermediate inlet ZE1. From the intermediate inlet ZE1, the turbo-compressor stage 21 conveys the gas to thecompressor stage 30. The second intermediate inlet ZE2 also opens into thecompressor stage 30. Thecompressor stage 30 conveys to an outlet (not illustrated). - One of the
rotor discs 16 of theturbo compressor stage 11 is the supporting disc for the rotor blades of thecircular compressor stage 33. The stator disc of the circular compressor disc simultaneously forms the end wall of the pressure-side end of the turbo-compressor stage 11. - It is a special advantage that the
circular compressor stage 33 is quasi integrated in the turbo-compressor stage 11. The only additional effort required are the rotor andstator blades - As an alternative to the present embodiment, a
circular compressor stage 33 may also be provided behind the second turbo-compressor stage 21. The circular compressor stage arranged on the pressure side of the respective turbo-compressor stage and integrated in the turbo-compressor stage increases the gas flow on the pressure side. For a mass spectrometer connected thereto, this means an increase in sensitivity. -
FIG. 3 illustrates thegas flow 40 through thecircular compressor stage 33 flowing radially from the outside inward. - In the embodiment of
FIG. 4 , the blade surface of therotor disc 34 is conical. Therotor blades 35 have an axial length that decreases as the radius of the circular path decreases. - It is also possible to use a circular compressor stage with a plurality of discs and alternately outward and inward directed flow paths, as is generally illustrated in FIG. 7 of U.S. Pat. No. 7,011,491.
- The invention has been described with reference to the preferred embodiments. Modifications and alterations may occur to others upon reading and understanding the preceding detailed description. It is intended that the invention be constructed as including all such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (8)
1. A multi-stage friction vacuum pump comprising:
at least one axially compressing turbo-compressor stage with a rotor rotating about its axis and having rotor discs projecting between stationary stator discs;
a radially compressing circular compressor stage arranged on the compressor side of the turbo-compressor stage, said circular compressor stage comprising a rotor having axially projecting rotor blades arranged on circular paths and a stator having axially projecting stator blades arranged on circular paths, the stator blades engaging in radial gaps between adjacent circular paths of rotor blades.
2. The friction vacuum pump of claim 1 , wherein the rotor blades of the circular compressor stage are arranged on a rotor body of the turbo-compressor stage carrying the rotor discs.
3. The friction vacuum pump of claim 1 , wherein the stator blades are arranged on a stator body of the turbo-compressor stage carrying the stator discs.
4. The friction vacuum pump of claim 1 , as a multi-inlet pump, further including:
at least two axially spaced, serially compressing turbo-compressor stages between which an intermediate inlet is situated, and
a circular compressor stage on the compressor side of the first turbo-compressor stage.
5. The friction vacuum pump of claim 1 , as a multi-inlet pump, further including:
at least two axially spaced, serially compressing turbo-compressor stages between which an intermediate inlet is situated, and
a circular compressor stage on the compressor side of the second turbo-compressor stage.
6. The friction vacuum pump of claim 1 , wherein the circular compressor stage compresses radially inward.
7. The friction vacuum pump of claim 1 , wherein in that the circular compressor stage is designed with at least two stages and alternately compresses one of radially inward and radially outward.
8. The friction vacuum pump of claim 1 , wherein the rotor blades have an axial length that tapers in a direction of compression.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10353034A DE10353034A1 (en) | 2003-11-13 | 2003-11-13 | Multi-stage friction vacuum pump |
DE10353034.7 | 2003-11-13 | ||
PCT/EP2004/012196 WO2005047707A1 (en) | 2003-11-13 | 2004-10-28 | Multi-stage friction vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
US20070081889A1 true US20070081889A1 (en) | 2007-04-12 |
Family
ID=34559626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/578,989 Abandoned US20070081889A1 (en) | 2003-11-13 | 2004-10-28 | Multi-stage friction vacuum pump |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070081889A1 (en) |
EP (1) | EP1706645B1 (en) |
JP (1) | JP2007510853A (en) |
CN (1) | CN100453817C (en) |
CA (1) | CA2545566A1 (en) |
DE (2) | DE10353034A1 (en) |
WO (1) | WO2005047707A1 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070031263A1 (en) * | 2003-09-30 | 2007-02-08 | Stones Ian D | Vacuum pump |
WO2010089579A1 (en) * | 2009-02-06 | 2010-08-12 | Edwards Limited | Multiple inlet vacuum pumps |
US20110311348A1 (en) * | 2009-02-28 | 2011-12-22 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
EP2620649A1 (en) | 2012-01-27 | 2013-07-31 | Edwards Limited | Gas transfer vacuum pump |
WO2013110936A2 (en) | 2012-01-27 | 2013-08-01 | Edwards Ltd | Gas transfer vacuum pump |
WO2015055374A1 (en) * | 2013-10-16 | 2015-04-23 | Asml Netherlands B.V. | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method |
WO2021102583A1 (en) * | 2019-11-28 | 2021-06-03 | Laminar Lift Systems Inc. | Tesla turbine pump and associated methods |
RU212977U1 (en) * | 2022-04-15 | 2022-08-17 | Юлия Алексеевна Шостак | Molecular Disc Vacuum Pump |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007048703A1 (en) * | 2007-10-11 | 2009-04-16 | Oerlikon Leybold Vacuum Gmbh | Multi-stage turbomolecular pump pump rotor |
CN101392749B (en) * | 2008-10-31 | 2012-05-23 | 东北大学 | Vortex vacuum pump |
US9217439B2 (en) | 2010-07-02 | 2015-12-22 | Edwards Japan Limited | Vacuum pump |
JP6079052B2 (en) * | 2012-08-24 | 2017-02-15 | 株式会社島津製作所 | Vacuum pump |
DE102014105582A1 (en) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | vacuum pump |
GB2558921B (en) * | 2017-01-20 | 2020-06-17 | Edwards Ltd | A multiple stage turbomolecular pump with inter-stage inlet |
CN108105121B (en) * | 2017-12-29 | 2020-03-24 | 东北大学 | Multistage composite high-vacuum dry pump |
CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
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US3947193A (en) * | 1973-03-30 | 1976-03-30 | Compagnie Industrielle Des Telecommunications Cit-Alcatel | Molecular vacuum pump structure |
US5695316A (en) * | 1993-05-03 | 1997-12-09 | Leybold Aktiengesellschaft | Friction vacuum pump with pump sections of different designs |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
US5848873A (en) * | 1996-05-03 | 1998-12-15 | The Boc Group Plc | Vacuum pumps |
US6030189A (en) * | 1995-10-20 | 2000-02-29 | Leybold Vakuum Gmbh | Friction vacuum pump with intermediate inlet |
US6135709A (en) * | 1998-05-20 | 2000-10-24 | The Boc Group Plc | Vacuum pump |
US6435811B1 (en) * | 1998-05-14 | 2002-08-20 | Leybold Vakuum Gmbh | Friction vacuum pump with a stator and a rotor |
US6508631B1 (en) * | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
US6705844B2 (en) * | 2000-02-01 | 2004-03-16 | Leybold Vakuum Gmbh | Dynamic seal |
US7011491B2 (en) * | 2000-02-01 | 2006-03-14 | Leybold Vakuum Gmbh | Friction vacuum pump |
US7160081B2 (en) * | 2003-08-29 | 2007-01-09 | Alcatel | Vacuum pump |
-
2003
- 2003-11-13 DE DE10353034A patent/DE10353034A1/en not_active Withdrawn
-
2004
- 2004-10-28 US US10/578,989 patent/US20070081889A1/en not_active Abandoned
- 2004-10-28 JP JP2006538704A patent/JP2007510853A/en active Pending
- 2004-10-28 DE DE502004008709T patent/DE502004008709D1/en active Active
- 2004-10-28 CA CA002545566A patent/CA2545566A1/en not_active Abandoned
- 2004-10-28 CN CNB2004800334295A patent/CN100453817C/en not_active Expired - Fee Related
- 2004-10-28 WO PCT/EP2004/012196 patent/WO2005047707A1/en active Application Filing
- 2004-10-28 EP EP04790966A patent/EP1706645B1/en not_active Not-in-force
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3947193A (en) * | 1973-03-30 | 1976-03-30 | Compagnie Industrielle Des Telecommunications Cit-Alcatel | Molecular vacuum pump structure |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
US5695316A (en) * | 1993-05-03 | 1997-12-09 | Leybold Aktiengesellschaft | Friction vacuum pump with pump sections of different designs |
US6030189A (en) * | 1995-10-20 | 2000-02-29 | Leybold Vakuum Gmbh | Friction vacuum pump with intermediate inlet |
US5848873A (en) * | 1996-05-03 | 1998-12-15 | The Boc Group Plc | Vacuum pumps |
US6435811B1 (en) * | 1998-05-14 | 2002-08-20 | Leybold Vakuum Gmbh | Friction vacuum pump with a stator and a rotor |
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US6508631B1 (en) * | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8393854B2 (en) * | 2003-09-30 | 2013-03-12 | Edwards Limited | Vacuum pump |
US20070031263A1 (en) * | 2003-09-30 | 2007-02-08 | Stones Ian D | Vacuum pump |
US8740588B2 (en) | 2009-02-06 | 2014-06-03 | Edwards Limited | Multiple inlet vacuum pumps |
WO2010089579A1 (en) * | 2009-02-06 | 2010-08-12 | Edwards Limited | Multiple inlet vacuum pumps |
US20110311348A1 (en) * | 2009-02-28 | 2011-12-22 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
US8926266B2 (en) * | 2009-02-28 | 2015-01-06 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
EP2620649A1 (en) | 2012-01-27 | 2013-07-31 | Edwards Limited | Gas transfer vacuum pump |
WO2013110936A2 (en) | 2012-01-27 | 2013-08-01 | Edwards Ltd | Gas transfer vacuum pump |
US10337517B2 (en) | 2012-01-27 | 2019-07-02 | Edwards Limited | Gas transfer vacuum pump |
WO2015055374A1 (en) * | 2013-10-16 | 2015-04-23 | Asml Netherlands B.V. | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method |
US10222701B2 (en) | 2013-10-16 | 2019-03-05 | Asml Netherlands B.V. | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method |
US10459342B2 (en) | 2013-10-16 | 2019-10-29 | Asml Netherlands B.V. | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method |
WO2021102583A1 (en) * | 2019-11-28 | 2021-06-03 | Laminar Lift Systems Inc. | Tesla turbine pump and associated methods |
RU212977U1 (en) * | 2022-04-15 | 2022-08-17 | Юлия Алексеевна Шостак | Molecular Disc Vacuum Pump |
Also Published As
Publication number | Publication date |
---|---|
CN100453817C (en) | 2009-01-21 |
JP2007510853A (en) | 2007-04-26 |
WO2005047707A1 (en) | 2005-05-26 |
DE502004008709D1 (en) | 2009-01-29 |
EP1706645B1 (en) | 2008-12-17 |
EP1706645A1 (en) | 2006-10-04 |
CA2545566A1 (en) | 2005-05-26 |
CN1878962A (en) | 2006-12-13 |
DE10353034A1 (en) | 2005-06-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: LEYBOLD VAKUUM GMBH, GERMANY Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ENGLANDER, HEINRICH;REEL/FRAME:017884/0551 Effective date: 20060425 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |