GB2558921B - A multiple stage turbomolecular pump with inter-stage inlet - Google Patents

A multiple stage turbomolecular pump with inter-stage inlet Download PDF

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Publication number
GB2558921B
GB2558921B GB1700992.9A GB201700992A GB2558921B GB 2558921 B GB2558921 B GB 2558921B GB 201700992 A GB201700992 A GB 201700992A GB 2558921 B GB2558921 B GB 2558921B
Authority
GB
United Kingdom
Prior art keywords
stage
inter
turbomolecular pump
inlet
multiple stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1700992.9A
Other versions
GB201700992D0 (en
GB2558921A (en
Inventor
Cobbett Andrew
Andrew Galtry Michael
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1700992.9A priority Critical patent/GB2558921B/en
Publication of GB201700992D0 publication Critical patent/GB201700992D0/en
Priority to CN201880007722.6A priority patent/CN110177950B/en
Priority to EP18700813.1A priority patent/EP3571414A1/en
Priority to US16/478,741 priority patent/US20190345948A1/en
Priority to PCT/GB2018/050074 priority patent/WO2018134566A1/en
Priority to JP2019538604A priority patent/JP2020505546A/en
Publication of GB2558921A publication Critical patent/GB2558921A/en
Application granted granted Critical
Publication of GB2558921B publication Critical patent/GB2558921B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/545—Ducts
    • F04D29/547—Ducts having a special shape in order to influence fluid flow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB1700992.9A 2017-01-20 2017-01-20 A multiple stage turbomolecular pump with inter-stage inlet Active GB2558921B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB1700992.9A GB2558921B (en) 2017-01-20 2017-01-20 A multiple stage turbomolecular pump with inter-stage inlet
PCT/GB2018/050074 WO2018134566A1 (en) 2017-01-20 2018-01-11 A multiple stage turbomolecular pump with inter-stage inlet
EP18700813.1A EP3571414A1 (en) 2017-01-20 2018-01-11 A multiple stage turbomolecular pump with inter-stage inlet
US16/478,741 US20190345948A1 (en) 2017-01-20 2018-01-11 A multiple stage turbomolecular pump with inter-stage inlet
CN201880007722.6A CN110177950B (en) 2017-01-20 2018-01-11 Multistage turbomolecular pump with interstage inlet
JP2019538604A JP2020505546A (en) 2017-01-20 2018-01-11 Multi-stage turbo molecular pump with interstage inlet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1700992.9A GB2558921B (en) 2017-01-20 2017-01-20 A multiple stage turbomolecular pump with inter-stage inlet

Publications (3)

Publication Number Publication Date
GB201700992D0 GB201700992D0 (en) 2017-03-08
GB2558921A GB2558921A (en) 2018-07-25
GB2558921B true GB2558921B (en) 2020-06-17

Family

ID=58463032

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1700992.9A Active GB2558921B (en) 2017-01-20 2017-01-20 A multiple stage turbomolecular pump with inter-stage inlet

Country Status (6)

Country Link
US (1) US20190345948A1 (en)
EP (1) EP3571414A1 (en)
JP (1) JP2020505546A (en)
CN (1) CN110177950B (en)
GB (1) GB2558921B (en)
WO (1) WO2018134566A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1302667A1 (en) * 2001-10-15 2003-04-16 The BOC Group plc Vacuum pumps
US20110311348A1 (en) * 2009-02-28 2011-12-22 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2229724B2 (en) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
DE10353034A1 (en) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Multi-stage friction vacuum pump
DE102007027354A1 (en) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump
JP5786639B2 (en) * 2011-10-24 2015-09-30 株式会社島津製作所 Turbo molecular pump
EP2757266B1 (en) * 2013-01-22 2016-03-16 Agilent Technologies, Inc. Rotary vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1302667A1 (en) * 2001-10-15 2003-04-16 The BOC Group plc Vacuum pumps
US20110311348A1 (en) * 2009-02-28 2011-12-22 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump

Also Published As

Publication number Publication date
GB201700992D0 (en) 2017-03-08
EP3571414A1 (en) 2019-11-27
JP2020505546A (en) 2020-02-20
CN110177950B (en) 2021-12-28
WO2018134566A1 (en) 2018-07-26
GB2558921A (en) 2018-07-25
US20190345948A1 (en) 2019-11-14
CN110177950A (en) 2019-08-27

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