GB2558921B - A multiple stage turbomolecular pump with inter-stage inlet - Google Patents
A multiple stage turbomolecular pump with inter-stage inlet Download PDFInfo
- Publication number
- GB2558921B GB2558921B GB1700992.9A GB201700992A GB2558921B GB 2558921 B GB2558921 B GB 2558921B GB 201700992 A GB201700992 A GB 201700992A GB 2558921 B GB2558921 B GB 2558921B
- Authority
- GB
- United Kingdom
- Prior art keywords
- stage
- inter
- turbomolecular pump
- inlet
- multiple stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/545—Ducts
- F04D29/547—Ducts having a special shape in order to influence fluid flow
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1700992.9A GB2558921B (en) | 2017-01-20 | 2017-01-20 | A multiple stage turbomolecular pump with inter-stage inlet |
PCT/GB2018/050074 WO2018134566A1 (en) | 2017-01-20 | 2018-01-11 | A multiple stage turbomolecular pump with inter-stage inlet |
EP18700813.1A EP3571414A1 (en) | 2017-01-20 | 2018-01-11 | A multiple stage turbomolecular pump with inter-stage inlet |
US16/478,741 US20190345948A1 (en) | 2017-01-20 | 2018-01-11 | A multiple stage turbomolecular pump with inter-stage inlet |
CN201880007722.6A CN110177950B (en) | 2017-01-20 | 2018-01-11 | Multistage turbomolecular pump with interstage inlet |
JP2019538604A JP2020505546A (en) | 2017-01-20 | 2018-01-11 | Multi-stage turbo molecular pump with interstage inlet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1700992.9A GB2558921B (en) | 2017-01-20 | 2017-01-20 | A multiple stage turbomolecular pump with inter-stage inlet |
Publications (3)
Publication Number | Publication Date |
---|---|
GB201700992D0 GB201700992D0 (en) | 2017-03-08 |
GB2558921A GB2558921A (en) | 2018-07-25 |
GB2558921B true GB2558921B (en) | 2020-06-17 |
Family
ID=58463032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1700992.9A Active GB2558921B (en) | 2017-01-20 | 2017-01-20 | A multiple stage turbomolecular pump with inter-stage inlet |
Country Status (6)
Country | Link |
---|---|
US (1) | US20190345948A1 (en) |
EP (1) | EP3571414A1 (en) |
JP (1) | JP2020505546A (en) |
CN (1) | CN110177950B (en) |
GB (1) | GB2558921B (en) |
WO (1) | WO2018134566A1 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1302667A1 (en) * | 2001-10-15 | 2003-04-16 | The BOC Group plc | Vacuum pumps |
US20110311348A1 (en) * | 2009-02-28 | 2011-12-22 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2229724B2 (en) * | 1972-06-19 | 1980-06-04 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbo molecular pump |
GB9725146D0 (en) * | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
US6412173B1 (en) * | 1999-07-26 | 2002-07-02 | Phoenix Analysis And Design Technologies, Inc. | Miniature turbomolecular pump |
US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
DE10353034A1 (en) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Multi-stage friction vacuum pump |
DE102007027354A1 (en) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Turbo molecular pump |
JP5786639B2 (en) * | 2011-10-24 | 2015-09-30 | 株式会社島津製作所 | Turbo molecular pump |
EP2757266B1 (en) * | 2013-01-22 | 2016-03-16 | Agilent Technologies, Inc. | Rotary vacuum pump |
-
2017
- 2017-01-20 GB GB1700992.9A patent/GB2558921B/en active Active
-
2018
- 2018-01-11 JP JP2019538604A patent/JP2020505546A/en active Pending
- 2018-01-11 EP EP18700813.1A patent/EP3571414A1/en active Pending
- 2018-01-11 WO PCT/GB2018/050074 patent/WO2018134566A1/en unknown
- 2018-01-11 US US16/478,741 patent/US20190345948A1/en not_active Abandoned
- 2018-01-11 CN CN201880007722.6A patent/CN110177950B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1302667A1 (en) * | 2001-10-15 | 2003-04-16 | The BOC Group plc | Vacuum pumps |
US20110311348A1 (en) * | 2009-02-28 | 2011-12-22 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
GB201700992D0 (en) | 2017-03-08 |
EP3571414A1 (en) | 2019-11-27 |
JP2020505546A (en) | 2020-02-20 |
CN110177950B (en) | 2021-12-28 |
WO2018134566A1 (en) | 2018-07-26 |
GB2558921A (en) | 2018-07-25 |
US20190345948A1 (en) | 2019-11-14 |
CN110177950A (en) | 2019-08-27 |
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