US20050150525A1 - Cleaning method and cleaning device for fluid dynamic bearings component - Google Patents

Cleaning method and cleaning device for fluid dynamic bearings component Download PDF

Info

Publication number
US20050150525A1
US20050150525A1 US11/066,037 US6603705A US2005150525A1 US 20050150525 A1 US20050150525 A1 US 20050150525A1 US 6603705 A US6603705 A US 6603705A US 2005150525 A1 US2005150525 A1 US 2005150525A1
Authority
US
United States
Prior art keywords
cleaning
fluid dynamic
bearing surface
nozzle
sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/066,037
Inventor
Kesao Suzuki
Noriyuki Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Minebea Co Ltd
Original Assignee
Minebea Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minebea Co Ltd filed Critical Minebea Co Ltd
Priority to US11/066,037 priority Critical patent/US20050150525A1/en
Publication of US20050150525A1 publication Critical patent/US20050150525A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/06Sliding surface mainly made of metal
    • F16C33/10Construction relative to lubrication
    • F16C33/1025Construction relative to lubrication with liquid, e.g. oil, as lubricant
    • F16C33/106Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
    • F16C33/107Grooves for generating pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/10Sliding-contact bearings for exclusively rotary movement for both radial and axial load
    • F16C17/102Sliding-contact bearings for exclusively rotary movement for both radial and axial load with grooves in the bearing surface to generate hydrodynamic pressure
    • F16C17/107Sliding-contact bearings for exclusively rotary movement for both radial and axial load with grooves in the bearing surface to generate hydrodynamic pressure with at least one surface for radial load and at least one surface for axial load

Definitions

  • This invention relates to a method and a device for cleaning fluid dynamic pressure bearings.
  • Fluid dynamic bearings operate by generating a dynamic pressure in a fluid contained between the spindle motor's shaft and the sleeve that supports the shaft. This pressure is generated by dynamic pressure generating grooves, which are formed on one or more or the bearing surfaces such as the sleeve or the shaft. These dynamic pressure generating grooves are shaped so as to generate a dynamic pressure when the shaft or the sleeve rotates and they have a depth of several microns. The dynamic pressure generated by the fluid allows the shaft to be supported in a non-contact state without mechanical friction. Accordingly, fluid dynamic bearings are able to achieve high rotational speed, low friction, low noise and long life.
  • the shaft and the sleeve of fluid dynamic pressure bearings are often made from stainless steel. Finishing work on the bearing, cutting and polishing, creates a mirror-like bearing surfaces on the sleeve and the shaft. Dynamic pressure generating grooves are then be formed on the bearing surfaces of the sleeve or the shaft by electrochemical machining (ECM).
  • ECM electrochemical machining
  • the oxide film generated by ECM is removed prior to the bearing's use by having an operator manually rub the bearing surface with a brush to which an abrasive material such as toothpaste or the like has been applied, or it is removed with an electric drill or the like furnished with a brush to which an abrasive material has been applied. Accordingly, removing the oxide film is an extremely difficult, inconsistent, labor intensive process that substantially impacts upon the quality of fluid dynamic bearings. Additionally, after the oxide film has been removed, it is necessary to wash off the abrasive material resulting in an additional manufacturing cost. Furthermore, the work must be done with scrupulous care to avoid damaging the bearing surface, since irregularities or the like can easily occur during the brushing and or the washing process.
  • one aspect of the present invention is a cleaning method designed to remove the oxide film generated when electrochemical machining of dynamic pressure grooves on the bearing surface of a fluid dynamic pressure bearing is conducted.
  • This method is characterized by removing the oxide film from the electrochemical machined grooves portion of the surface by spraying a high-pressured liquid jet onto the bearing surface.
  • This method makes it possible to remove the oxide film produced by electrochemical machining without damaging the bearing surface. Additionally, this method pre-removes undesirable protrusions and burrs, which are caused by mechanical machining.
  • Another aspect of the present invention is to use deionized pure water for the high-pressured liquid jet.
  • deionized pure water eliminates the need for subsequently washing off the abrasives or cleaning agents, which are used in brush polishing.
  • deionized pure water there is no occurrence of scaling, corrosion or blockages in the high-pressure liquid jet nozzle and the high-pressure tubing resulting from the various impurities contained in tap water or the like.
  • Another aspect of the present invention is to use water mixed with abrasives and surfactants for the high-pressure liquid jet.
  • abrasives and surfactants makes it possible to effectively remove the protrusion, burrs and other byproducts of mechanical machining.
  • Another aspect of the present invention is a cleaning device designed to remove the oxide film generated when electrochemical machining of the dynamic pressure grooves on the bearing surface of the fluid dynamic pressure bearing is conducted.
  • This device removes the oxide film by spraying a high-pressured liquid jet onto the bearing surface. Additionally, this device makes it possible to remove other foreign matter such as protrusions and burrs produced by mechanical machining.
  • the cleaning device can be used with either deionized pure water or it can be used with water and an abrasive or surfacant.
  • FIG. 1 is an explanatory view showing the cleaning method of the first embodiment of this invention.
  • FIG. 2 is an explanatory view showing the cleaning method of the second embodiment of this invention.
  • FIG. 3 is a longitudinal cross-sectional view of a conventional spindle motor provided with a fluid dynamic pressure bearing.
  • FIG. 4 is an enlarged view of a sleeve composing the fluid dynamic pressure bearing in the conventional spindle motor shown in FIG. 3 .
  • FIG. 5 is a bottom view of the sleeve shown in FIG. 4 .
  • FIG. 6 is a layout view showing the third embodiment of this invention.
  • FIG. 7 is a plane view of the jig that holds the sleeves that are cleaned by the device shown in FIG. 6 .
  • FIG. 8 is a plane view of the jig that supports the counter-plates that are cleaned by the device shown in FIG. 6 .
  • FIGS. 1 and 2 Two embodiments of the present invention are shown in FIGS. 1 and 2 , and they are described hereunder by reference to FIGS. 1-5 .
  • FIG. 3 shows a spindle motor containing a fluid dynamic bearing.
  • the fluid dynamic bearing is comprised of shaft 3 , sleeve 5 , thrust-plate 13 , which is affixed to the shaft, counter-plate 15 , which is affixed to the sleeve, and pressure generating grooves 17 , 18 , 19 , and 20 .
  • the pressure generating grooves can be placed on either the shaft components or the sleeve components of the fluid dynamic bearing.
  • Shaft 3 , sleeve 5 , thrust-plate 13 , and counter-plate 15 are generally made from stainless steel. Bearing surfaces are formed on shaft 3 , sleeve 5 , thrust-plate 13 , and counter-plate 15 by cutting and polishing the stainless steel to create a mirrored finish. Pressure generating grooves 17 , 18 , 19 , and 20 are then formed by electrochemical machining of the mirror finished bearing surface.
  • FIG. 1 A cleaning method according to the first embodiment of the present invention is shown in FIG. 1 .
  • a high pressure fluid is provided from fluid pump 22 to nozzle 21 .
  • Nozzle 21 sprays the high pressure fluid onto pressure generating grooves 19 , which are formed on thrust-plate 13 .
  • the fluid spray from nozzle 21 has a diameter d equal to the injection mouth diameter of nozzle 21 .
  • the high pressure fluid spray removes the oxide film from the grooved surface of thrust plate 19 .
  • Nozzle 21 then revolves around thrust-plate 13 at a rotational speed A, which is measured in revolutions per second (rps).
  • the radius of revolution R(t) is initially equal to R 0 (the distance from the axis of thrust-plate 13 to the far outer edge of thrust-plate 13 ).
  • the cleaning can stop or the nozzle 21 can continue revolving and spraying high pressure fluid onto the grooved surface of thrust-plate 13 with the radius R(t) increasing at a constant rate F until R(t) is equal to R 0 .
  • nozzle 21 has two cleaning cycles.
  • the cleaning cycles can be repeated continuously as many times as desired.
  • deionized pure water is used for the high-pressure liquid jet, and the injection mouth diameter of the nozzle 21 is set at 0.25 mm, injection pressure is set to 700 kg/cm 2 , and the distance between the nozzle 21 and the work W is set at 20-40 mm.
  • the rotational speed A is 1000 rpm (16.67 rps) and the moving speed F is 2 to 5 mm/s.
  • Nozzle 21 may be reciprocated one or more times. By this means, one can efficiently remove the oxide film. This method can also be used to clean the bearing surface on counter-plate 15 , which contains grooves 20 , and other similar bearing surfaces.
  • FIG. 2 A cleaning method according to a second embodiment of the present invention is shown in FIG. 2 .
  • a high pressure fluid is provided from fluid pump 24 to nozzle 23 .
  • Nozzle 23 sprays the high pressure fluid onto the bearing surface of sleeve 5 , which has pressure generating grooves 17 and 18 formed thereon.
  • Nozzle 23 includes a pair of injection mouths 25 , which are diametrically opposed to each other.
  • the fluid spray from nozzle 23 has a diameter d equal to the diameter of injection mouths 25 of nozzle 23 .
  • the high pressure fluid spray removes the oxide film from the grooved surface of sleeve 5 .
  • Nozzle 23 is positioned in the axial center of sleeve 5 and it rotates at a constant rotational speed B. Nozzle 23 moves up and down at a rate G (“the moving speed”) within sleeve 5 . Provided that the rotational speed B (rps), the moving speed G (mm/s), and the diameter d (mm) of injection mouths 25 meet the relationship G ⁇ 2 B ⁇ d then the entire bearing surface of sleeve 5 will be cleaned without any gaps. However, if the process is reciprocated, the oxide film can be effectively removed even if there are gaps.
  • deionized pure water is used for the high-pressure liquid jet, and the diameter d of the injection mouth 25 of the nozzle 23 is set at 0.25 mm, the injection pressure is set to 700 kg/cm2, and the distance between the nozzle 23 and the work W is set at 0.5-1.0 mm.
  • the rotational speed B is 3000 rpm (50 rps) and the moving speed G is 5 to 9 mm/s.
  • Nozzle 23 may be reciprocated one or more times. By this means, one can efficiently remove the oxide film.
  • the oxide film produced in electrochemical machining can be unfailingly removed without injury to the finished surface, and other minute foreign matter such as processed chips, bearded needles, and burrs, which are produced at the time of machining, can simultaneously be completely removed.
  • deionized pure water for the high-pressure liquid jet there is no need to wash off any cleaning agents, abrasive agents, etc., and one can simplify the cleaning process. Consequently, the above embodiments make it possible to automate the cleaning process and greatly raise productivity by automation.
  • deionized pure water In addition to deionized pure water, one can also use municipal tap water, RO (reverse osmosis) water and the like for the high-pressure liquid jet, but it is preferable to use deionized deionized pure water from the standpoint of preventing blockages of impurities, scaling, corrosion, chemical reactions and the like due to the small diameter of the injection mouth of the nozzle.
  • deionized deionized pure water from the standpoint of preventing blockages of impurities, scaling, corrosion, chemical reactions and the like due to the small diameter of the injection mouth of the nozzle.
  • a surfactant and abrasive agents such as CRB ceramic powder, calcium carbonate, silicon, and high polymer resin granules as the high-pressure liquid jet aids in removing the fins, burrs and the like generated during machining.
  • the cleaning device 26 is provided with a sleeve-cleaning device 27 for the purpose of cleaning the sleeve 5 , a plate-cleaning device 28 for the purpose of cleaning the counter-plate 15 or the thrust-plate 13 , and a deionized pure water-recycling device 29 for the purpose of recycling the deionized pure water supplied to sleeve-cleaning device 27 and plate-cleaning device 28 .
  • cleaning device 27 includes platform 30 , on which are arranged input part 31 , flat cleaning part 32 , internal cleaning part 33 , draining part 34 , and discharge part 35 .
  • a conveyance device 37 is provided to sequentially move jig 36 , which supports a plurality of works W (bearing surfaces that are to be cleaned), from the input part 31 to the flat cleaning part 32 , to the internal cleaning part 33 , to the draining part 34 and to the discharge part 35 .
  • the jig 36 is a roughly rectangular aluminum block, and it has multiple support holes 38 vertically formed in its support surface where the sleeves 5 (work W) are inserted and supported while attached to the base 4 .
  • the support holes 38 are arranged in two parallel rows with six holes each at equal intervals in a rectilinear manner, for a total of twelve holes.
  • an engagement depression 39 for purposes of engaging the conveyance device 37 and a positioning depression 40 for purposes of positioning.
  • each rotary gun 39 corresponds to the three works W on the jig 36 .
  • Each rotary gun 39 is equipped with a nozzle (not illustrated) facing the work W, and this nozzle is connected to a high-pressure generating device (not illustrated) that supplies deionized pure water at high pressure.
  • the rotary guns 39 are rotated at the specified rotational speed via the belt 41 by the motor 40 , and the feed bar 38 is moved at the specified feeding speed, with the result that a high-pressure liquid jet (deionized pure water) is injected by the method shown in FIG. 1 onto the work W while the nozzle is moving.
  • a high-pressure liquid jet deionized pure water
  • the internal cleaning part 33 is provided with 12 rotary guns 42 facing the work W on the jig 36 that is moved from the flat cleaning part 32 and positioned by the conveyance device 37 .
  • Each rotary gun 42 is equipped with a nozzle (not illustrated) possessing an injection mouth on the side face that is inserted into the work W (sleeve 5 ), and this nozzle is connected to a high-pressure generating device (not illustrated) that supplies deionized pure water at high pressure.
  • a high-pressure generating device not illustrated
  • the rotary guns 42 are attached to the feed bar (not illustrated), and can be moved in the axial direction.
  • the rotary guns 42 are rotated at the specified rotational speed, and are moved in the axial direction at the specified feeding speed, with the result that a high-pressure liquid jet (deionized pure water) is injected by the method shown in FIG. 2 onto the work W while the nozzle is moving.
  • a high-pressure liquid jet deionized pure water
  • the draining part 34 conducts draining and accelerates drying by air-blowing the work W on the jig 36 that has been moved from the internal cleaning part 33 by the conveyance device 37 .
  • the discharge part 35 sends the jig 36 , which has been moved from the draining part 34 by the conveyance device 37 , to the roller conveyor 45 and discharges it to the specified position by the roller conveyor 45 .
  • the deionized pure water recycling device 29 recycles the cleaning water that has been drained from the flat cleaning part 32 , the internal cleaning part 33 and the draining part 34 after cleaning of the work, regenerates the deionized pure water level by activated carbon, ionic exchange and the like, and recirculates it to the high pressure generating device.
  • centrifugal mist treatment device 46 attracts and conducts purification treatment of the spray, mist and the like of the cleaning water produced by the flat cleaning part 32 , internal cleaning part 33 and draining part 34 .
  • Reference number 47 is the control panel that serves to control the flat cleaning part 32 , internal cleaning part 33 , draining part 34 , conveyance device 37 , deionized pure water recycling device 29 and mist treatment device 46 .
  • the jig 36 is sequentially moved by the conveyance device 37 .
  • the end face of the large bore part 14 of the sleeve 5 is cleaned by the flat cleaning part 32
  • the inner periphery of the sleeve 5 is cleaned by the internal cleaning part 33
  • discharge of the jig 36 is conducted from the discharge part 35 .
  • the oxide film and foreign matter produced by electrochemical machining on the bearing surface of the sleeve 5 can be automatically removed and cleaned and productivity can be greatly improved.
  • Plate cleaning device 28 includes platform 48 , on which are arranged input part 49 , cleaning part 50 , draining part 51 and discharge part 52 in this order.
  • the jig 53 which holds the work W that is introduced at the input part 49 , is sequentially moved to the cleaning part 50 , draining part 51 , and discharge part 52 by the conveyance device (not illustrated).
  • jig 53 includes twenty-five support holes 54 (only the two holes at the two ends are illustrated) arranged on the support surface in one row at equal intervals into which the counter-plate is inserted and supported.
  • the cleaning part 50 is preferably provided with only one rotary gun 55 , which is similar to the cleaning part 32 of the sleeve-cleaning device 27 .
  • the jig 53 is moved at the specified feeding speed by the conveyance device and the nozzle (not illustrated) is rotated at the specified rotational speed. Accordingly, a high-pressure liquid jet (deionized pure water) is injected by the method shown in FIG. 2 onto the work W, which is held by jig 53 while the nozzle is moving.
  • the draining part 51 conducts draining and accelerates drying by air-blowing the work W, which is held on the jig 53 , that has been moved from the cleaning part 50 by the conveyance device.
  • the discharge part 52 sends the jig 53 that has been moved from the draining part 51 by the conveyance device to the roller conveyor 56 and it discharges the jig to the specified position by the roller conveyor 56 .
  • the plate cleaning device 28 is provided with a centrifugal mist treatment device 57 that attracts and purifies the spray, mist and the like produced by the cleaning part 50 and draining part 51 . Moreover, the cleaning water that is discharged from the cleaning part 50 and draining part 51 is recycled and treated by the deionized pure water-recycling device 29 in the same way as the aforementioned sleeve-cleaning device 27 .
  • a work W is put on jig 53 at the input part 49 , the jig 53 is sequentially moved by the conveyance device, is cleaned by the cleaning part 50 , and drained by the draining part 51 , after which discharge is conducted from the discharge part 52 .
  • the oxide film and foreign matter produced by electrochemical machining on the bearing surface of the counter-plate 15 can be automatically removed and cleaned.
  • this third embodiment it is simultaneously possible to remove the oxide film produced by electrochemical machining of the dynamic pressure grooves without injury to the bearing surface, and also to unfailingly remove foreign matter such as fins and burrs caused by machining, thereby allowing obtainment of a clean bearing surface.
  • a high-pressure liquid jet it becomes possible to automate the cleaning process for dynamic pressure bearings, and to greatly improve productivity.
  • deionized pure water for the high-pressure liquid jet, not only is the oxide film and foreign matter such as fins and burrs removed by the high-pressure liquid jet, but also as adequate cleaning is able to be conducted with the deionized pure water and there is no need for subsequently washing off abrasives, cleaning agents or the like, thereby, simplifying the cleaning process.
  • deionized pure water there is no occurrence of scaling, corrosion or blockages in the high-pressure liquid jet nozzle and the high-pressure tubing resulting from the various impurities contained in municipal tap water or the like.

Abstract

The present invention provides a method and device for cleaning the oxide layer created on the bearing surface of a fluid dynamic bearing by the electrochemical machining of pressure generating grooves onto the bearing surface, wherein the method involves spraying a high-pressure liquid jet onto the bearing surface and the cleaning device is an apparatus for spraying a high-pressure liquid jet onto the bearing surface.

Description

  • This application is a divisional of U.S. Ser. No. 10/340,345, filed Jan. 10, 2003, and claim all rights of priority thereto.
  • BACKGROUND OF THE INVENTION
  • This invention relates to a method and a device for cleaning fluid dynamic pressure bearings.
  • In order to satisfy the increasing information density and the increasing rotational speeds of the magnetic disks used by computer hard disk drives, there exists a need for high rotational accuracy, low friction, low noise and long life bearings for the spindle motors that drive the magnetic disks. Accordingly fluid dynamic bearings have been developed for use with such spindle motors.
  • Fluid dynamic bearings operate by generating a dynamic pressure in a fluid contained between the spindle motor's shaft and the sleeve that supports the shaft. This pressure is generated by dynamic pressure generating grooves, which are formed on one or more or the bearing surfaces such as the sleeve or the shaft. These dynamic pressure generating grooves are shaped so as to generate a dynamic pressure when the shaft or the sleeve rotates and they have a depth of several microns. The dynamic pressure generated by the fluid allows the shaft to be supported in a non-contact state without mechanical friction. Accordingly, fluid dynamic bearings are able to achieve high rotational speed, low friction, low noise and long life.
  • Although other materials can be used, the shaft and the sleeve of fluid dynamic pressure bearings are often made from stainless steel. Finishing work on the bearing, cutting and polishing, creates a mirror-like bearing surfaces on the sleeve and the shaft. Dynamic pressure generating grooves are then be formed on the bearing surfaces of the sleeve or the shaft by electrochemical machining (ECM).
  • As a result of the electrochemical machining used to form the dynamic pressure grooves on the fluid dynamic pressure bearing, a hard oxide film is generated on the surface of the electrochemical machined grooves portion of the bearing. Since the clearance between the sleeve and the shaft is very small, if this oxide film comes loose from the sleeve during use, it can become wedged into the clearance between the sleeve and the shaft, the friction caused thereby can cause rotational irregularities and deficiencies due to adhesion and the like.
  • Conventionally, the oxide film generated by ECM is removed prior to the bearing's use by having an operator manually rub the bearing surface with a brush to which an abrasive material such as toothpaste or the like has been applied, or it is removed with an electric drill or the like furnished with a brush to which an abrasive material has been applied. Accordingly, removing the oxide film is an extremely difficult, inconsistent, labor intensive process that substantially impacts upon the quality of fluid dynamic bearings. Additionally, after the oxide film has been removed, it is necessary to wash off the abrasive material resulting in an additional manufacturing cost. Furthermore, the work must be done with scrupulous care to avoid damaging the bearing surface, since irregularities or the like can easily occur during the brushing and or the washing process.
  • SUMMARY OF THE INVENTION
  • It is therefore an object of the present invention to provide a cleaning method and a cleaning device for fluid dynamic pressure bearings that allows the easy and efficient removal of the oxide film that is generated by electrochemical machining of the dynamic pressure generating grooves on a fluid dynamic pressure bearing.
  • In order to solve the aforementioned problems, one aspect of the present invention is a cleaning method designed to remove the oxide film generated when electrochemical machining of dynamic pressure grooves on the bearing surface of a fluid dynamic pressure bearing is conducted. This method is characterized by removing the oxide film from the electrochemical machined grooves portion of the surface by spraying a high-pressured liquid jet onto the bearing surface. This method makes it possible to remove the oxide film produced by electrochemical machining without damaging the bearing surface. Additionally, this method pre-removes undesirable protrusions and burrs, which are caused by mechanical machining.
  • Another aspect of the present invention is to use deionized pure water for the high-pressured liquid jet. The use of deionized pure water eliminates the need for subsequently washing off the abrasives or cleaning agents, which are used in brush polishing. Moreover, when deionized pure water is used, there is no occurrence of scaling, corrosion or blockages in the high-pressure liquid jet nozzle and the high-pressure tubing resulting from the various impurities contained in tap water or the like.
  • Another aspect of the present invention is to use water mixed with abrasives and surfactants for the high-pressure liquid jet. The use of abrasives and surfactants makes it possible to effectively remove the protrusion, burrs and other byproducts of mechanical machining.
  • Another aspect of the present invention is a cleaning device designed to remove the oxide film generated when electrochemical machining of the dynamic pressure grooves on the bearing surface of the fluid dynamic pressure bearing is conducted. This device removes the oxide film by spraying a high-pressured liquid jet onto the bearing surface. Additionally, this device makes it possible to remove other foreign matter such as protrusions and burrs produced by mechanical machining. The cleaning device can be used with either deionized pure water or it can be used with water and an abrasive or surfacant.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The invention is illustrated by way of example and not limitation and the figures of the accompanying drawings in which like references denote like or corresponding parts, and in which:
  • FIG. 1 is an explanatory view showing the cleaning method of the first embodiment of this invention.
  • FIG. 2 is an explanatory view showing the cleaning method of the second embodiment of this invention.
  • FIG. 3 is a longitudinal cross-sectional view of a conventional spindle motor provided with a fluid dynamic pressure bearing.
  • FIG. 4 is an enlarged view of a sleeve composing the fluid dynamic pressure bearing in the conventional spindle motor shown in FIG. 3.
  • FIG. 5 is a bottom view of the sleeve shown in FIG. 4.
  • FIG. 6 is a layout view showing the third embodiment of this invention.
  • FIG. 7 is a plane view of the jig that holds the sleeves that are cleaned by the device shown in FIG. 6.
  • FIG. 8 is a plane view of the jig that supports the counter-plates that are cleaned by the device shown in FIG. 6.
  • DETAILED DESCRIPTION
  • Two embodiments of the present invention are shown in FIGS. 1 and 2, and they are described hereunder by reference to FIGS. 1-5.
  • FIG. 3 shows a spindle motor containing a fluid dynamic bearing. The fluid dynamic bearing is comprised of shaft 3, sleeve 5, thrust-plate 13, which is affixed to the shaft, counter-plate 15, which is affixed to the sleeve, and pressure generating grooves 17, 18, 19, and 20. As shown in FIGS. 3, 4, and 5, the pressure generating grooves can be placed on either the shaft components or the sleeve components of the fluid dynamic bearing.
  • Shaft 3, sleeve 5, thrust-plate 13, and counter-plate 15 are generally made from stainless steel. Bearing surfaces are formed on shaft 3, sleeve 5, thrust-plate 13, and counter-plate 15 by cutting and polishing the stainless steel to create a mirrored finish. Pressure generating grooves 17, 18, 19, and 20 are then formed by electrochemical machining of the mirror finished bearing surface.
  • A cleaning method according to the first embodiment of the present invention is shown in FIG. 1. A high pressure fluid is provided from fluid pump 22 to nozzle 21. Nozzle 21 sprays the high pressure fluid onto pressure generating grooves 19, which are formed on thrust-plate 13. The fluid spray from nozzle 21 has a diameter d equal to the injection mouth diameter of nozzle 21. The high pressure fluid spray removes the oxide film from the grooved surface of thrust plate 19.
  • The nozzle 21 is initially directed to spray the high pressure fluid at the far outer edge of thrust-plate 13, which is a distance R0 from the axis of thrust-plate 13, where R0 equals one half the diameter of thrust-plate 13 (R0=½D). Nozzle 21 then revolves around thrust-plate 13 at a rotational speed A, which is measured in revolutions per second (rps). The radius of revolution R(t) is initially equal to R0 (the distance from the axis of thrust-plate 13 to the far outer edge of thrust-plate 13). The radius of revolution R(t) then decreases at a constant rate F (“the moving speed”) until R(t) is equal to the radius of the inner edge of thrust-plate 13 (R(t)=R1). At this point, the cleaning can stop or the nozzle 21 can continue revolving and spraying high pressure fluid onto the grooved surface of thrust-plate 13 with the radius R(t) increasing at a constant rate F until R(t) is equal to R0.
  • As described above, nozzle 21 has two cleaning cycles. During cycle 1, the radius of revolution R(t) is equal to the outer radius of thrust plate 13 R0 minus the moving speed F multiplied by the time from the beginning of the cycle t (R(t)=R0−F*t). During cycle 2, the radius of revolution R(t) is equal to the inner radius of thrust plate 13 R1 plus the moving speed F multiplied by the time from the beginning of the cycle t (R(t)=R1+F*t). The cleaning cycles can be repeated continuously as many times as desired.
  • Provided that the rotational speed A (RPS), the moving speed F (mm/s), and the injection mouth diameter d (mm) of nozzle 21 meet the relationship F÷A≦d then the entire surface of thrust-plate 13 will be cleaned without any gaps.
  • In this embodiment, deionized pure water is used for the high-pressure liquid jet, and the injection mouth diameter of the nozzle 21 is set at 0.25 mm, injection pressure is set to 700 kg/cm2, and the distance between the nozzle 21 and the work W is set at 20-40 mm. The rotational speed A is 1000 rpm (16.67 rps) and the moving speed F is 2 to 5 mm/s. Nozzle 21 may be reciprocated one or more times. By this means, one can efficiently remove the oxide film. This method can also be used to clean the bearing surface on counter-plate 15, which contains grooves 20, and other similar bearing surfaces.
  • A cleaning method according to a second embodiment of the present invention is shown in FIG. 2. A high pressure fluid is provided from fluid pump 24 to nozzle 23. Nozzle 23 sprays the high pressure fluid onto the bearing surface of sleeve 5, which has pressure generating grooves 17 and 18 formed thereon. Nozzle 23 includes a pair of injection mouths 25, which are diametrically opposed to each other. The fluid spray from nozzle 23 has a diameter d equal to the diameter of injection mouths 25 of nozzle 23. The high pressure fluid spray removes the oxide film from the grooved surface of sleeve 5.
  • Nozzle 23 is positioned in the axial center of sleeve 5 and it rotates at a constant rotational speed B. Nozzle 23 moves up and down at a rate G (“the moving speed”) within sleeve 5. Provided that the rotational speed B (rps), the moving speed G (mm/s), and the diameter d (mm) of injection mouths 25 meet the relationship G÷2B≦d then the entire bearing surface of sleeve 5 will be cleaned without any gaps. However, if the process is reciprocated, the oxide film can be effectively removed even if there are gaps.
  • In this second embodiment, deionized pure water is used for the high-pressure liquid jet, and the diameter d of the injection mouth 25 of the nozzle 23 is set at 0.25 mm, the injection pressure is set to 700 kg/cm2, and the distance between the nozzle 23 and the work W is set at 0.5-1.0 mm. The rotational speed B is 3000 rpm (50 rps) and the moving speed G is 5 to 9 mm/s. Nozzle 23 may be reciprocated one or more times. By this means, one can efficiently remove the oxide film.
  • As shown in the first and second embodiment, by injecting a high-pressure liquid jet onto the bearing surface, the oxide film produced in electrochemical machining can be unfailingly removed without injury to the finished surface, and other minute foreign matter such as processed chips, bearded needles, and burrs, which are produced at the time of machining, can simultaneously be completely removed. Moreover, by using deionized pure water for the high-pressure liquid jet, there is no need to wash off any cleaning agents, abrasive agents, etc., and one can simplify the cleaning process. Consequently, the above embodiments make it possible to automate the cleaning process and greatly raise productivity by automation.
  • In addition to deionized pure water, one can also use municipal tap water, RO (reverse osmosis) water and the like for the high-pressure liquid jet, but it is preferable to use deionized deionized pure water from the standpoint of preventing blockages of impurities, scaling, corrosion, chemical reactions and the like due to the small diameter of the injection mouth of the nozzle. On the other hand, using water mixed with a surfactant and abrasive agents such as CRB ceramic powder, calcium carbonate, silicon, and high polymer resin granules as the high-pressure liquid jet aids in removing the fins, burrs and the like generated during machining.
  • The third embodiment of the present invention is described by reference to FIGS. 6-8. As shown in FIG. 6, the cleaning device 26 is provided with a sleeve-cleaning device 27 for the purpose of cleaning the sleeve 5, a plate-cleaning device 28 for the purpose of cleaning the counter-plate 15 or the thrust-plate 13, and a deionized pure water-recycling device 29 for the purpose of recycling the deionized pure water supplied to sleeve-cleaning device 27 and plate-cleaning device 28.
  • As shown in FIG. 6, cleaning device 27 includes platform 30, on which are arranged input part 31, flat cleaning part 32, internal cleaning part 33, draining part 34, and discharge part 35. A conveyance device 37 is provided to sequentially move jig 36, which supports a plurality of works W (bearing surfaces that are to be cleaned), from the input part 31 to the flat cleaning part 32, to the internal cleaning part 33, to the draining part 34 and to the discharge part 35.
  • As shown in FIG. 7, the jig 36 is a roughly rectangular aluminum block, and it has multiple support holes 38 vertically formed in its support surface where the sleeves 5 (work W) are inserted and supported while attached to the base 4. The support holes 38 are arranged in two parallel rows with six holes each at equal intervals in a rectilinear manner, for a total of twelve holes. In the jig 36 are formed an engagement depression 39 for purposes of engaging the conveyance device 37 and a positioning depression 40 for purposes of positioning.
  • In the flat cleaning part 32, four rotary guns 39 are attached to the feed bar 38. The four rotary guns 39 are arranged at the front, back, right and left on the support surface of the jig 36 that is moved from the input part 31 and positioned by the conveyance device 37. Each rotary gun 39 corresponds to the three works W on the jig 36. Each rotary gun 39 is equipped with a nozzle (not illustrated) facing the work W, and this nozzle is connected to a high-pressure generating device (not illustrated) that supplies deionized pure water at high pressure. The rotary guns 39 are rotated at the specified rotational speed via the belt 41 by the motor 40, and the feed bar 38 is moved at the specified feeding speed, with the result that a high-pressure liquid jet (deionized pure water) is injected by the method shown in FIG. 1 onto the work W while the nozzle is moving.
  • The internal cleaning part 33 is provided with 12 rotary guns 42 facing the work W on the jig 36 that is moved from the flat cleaning part 32 and positioned by the conveyance device 37. Each rotary gun 42 is equipped with a nozzle (not illustrated) possessing an injection mouth on the side face that is inserted into the work W (sleeve 5), and this nozzle is connected to a high-pressure generating device (not illustrated) that supplies deionized pure water at high pressure. With regard to the rotary guns 42, three guns neighboring one another are rotated by one motor 43 via the belt 44 so that four motors 43 rotate the total of twelve rotary guns 42. The rotary guns 42 are attached to the feed bar (not illustrated), and can be moved in the axial direction. The rotary guns 42 are rotated at the specified rotational speed, and are moved in the axial direction at the specified feeding speed, with the result that a high-pressure liquid jet (deionized pure water) is injected by the method shown in FIG. 2 onto the work W while the nozzle is moving.
  • The draining part 34 conducts draining and accelerates drying by air-blowing the work W on the jig 36 that has been moved from the internal cleaning part 33 by the conveyance device 37. The discharge part 35 sends the jig 36, which has been moved from the draining part 34 by the conveyance device 37, to the roller conveyor 45 and discharges it to the specified position by the roller conveyor 45.
  • The deionized pure water recycling device 29 recycles the cleaning water that has been drained from the flat cleaning part 32, the internal cleaning part 33 and the draining part 34 after cleaning of the work, regenerates the deionized pure water level by activated carbon, ionic exchange and the like, and recirculates it to the high pressure generating device.
  • As shown in FIG. 6 centrifugal mist treatment device 46 attracts and conducts purification treatment of the spray, mist and the like of the cleaning water produced by the flat cleaning part 32, internal cleaning part 33 and draining part 34. Reference number 47 is the control panel that serves to control the flat cleaning part 32, internal cleaning part 33, draining part 34, conveyance device 37, deionized pure water recycling device 29 and mist treatment device 46.
  • When the work W is put on the jig 36 and introduced to the input part 31, the jig 36 is sequentially moved by the conveyance device 37. The end face of the large bore part 14 of the sleeve 5 is cleaned by the flat cleaning part 32, the inner periphery of the sleeve 5 is cleaned by the internal cleaning part 33, and, after draining by the draining part 34, discharge of the jig 36 is conducted from the discharge part 35. In this manner, the oxide film and foreign matter produced by electrochemical machining on the bearing surface of the sleeve 5 can be automatically removed and cleaned and productivity can be greatly improved.
  • Plate cleaning device 28 includes platform 48, on which are arranged input part 49, cleaning part 50, draining part 51 and discharge part 52 in this order. The jig 53, which holds the work W that is introduced at the input part 49, is sequentially moved to the cleaning part 50, draining part 51, and discharge part 52 by the conveyance device (not illustrated).
  • As shown in FIG. 8, jig 53 includes twenty-five support holes 54 (only the two holes at the two ends are illustrated) arranged on the support surface in one row at equal intervals into which the counter-plate is inserted and supported.
  • The cleaning part 50 is preferably provided with only one rotary gun 55, which is similar to the cleaning part 32 of the sleeve-cleaning device 27. The jig 53 is moved at the specified feeding speed by the conveyance device and the nozzle (not illustrated) is rotated at the specified rotational speed. Accordingly, a high-pressure liquid jet (deionized pure water) is injected by the method shown in FIG. 2 onto the work W, which is held by jig 53 while the nozzle is moving.
  • The draining part 51 conducts draining and accelerates drying by air-blowing the work W, which is held on the jig 53, that has been moved from the cleaning part 50 by the conveyance device.
  • The discharge part 52 sends the jig 53 that has been moved from the draining part 51 by the conveyance device to the roller conveyor 56 and it discharges the jig to the specified position by the roller conveyor 56.
  • The plate cleaning device 28 is provided with a centrifugal mist treatment device 57 that attracts and purifies the spray, mist and the like produced by the cleaning part 50 and draining part 51. Moreover, the cleaning water that is discharged from the cleaning part 50 and draining part 51 is recycled and treated by the deionized pure water-recycling device 29 in the same way as the aforementioned sleeve-cleaning device 27.
  • In this third embodiment, a work W is put on jig 53 at the input part 49, the jig 53 is sequentially moved by the conveyance device, is cleaned by the cleaning part 50, and drained by the draining part 51, after which discharge is conducted from the discharge part 52. In this manner, the oxide film and foreign matter produced by electrochemical machining on the bearing surface of the counter-plate 15 can be automatically removed and cleaned.
  • Through the use of this third embodiment, it is simultaneously possible to remove the oxide film produced by electrochemical machining of the dynamic pressure grooves without injury to the bearing surface, and also to unfailingly remove foreign matter such as fins and burrs caused by machining, thereby allowing obtainment of a clean bearing surface. By this means of applying a high-pressure liquid jet, it becomes possible to automate the cleaning process for dynamic pressure bearings, and to greatly improve productivity.
  • Furthermore, by using deionized pure water for the high-pressure liquid jet, not only is the oxide film and foreign matter such as fins and burrs removed by the high-pressure liquid jet, but also as adequate cleaning is able to be conducted with the deionized pure water and there is no need for subsequently washing off abrasives, cleaning agents or the like, thereby, simplifying the cleaning process. Moreover, by using deionized pure water, there is no occurrence of scaling, corrosion or blockages in the high-pressure liquid jet nozzle and the high-pressure tubing resulting from the various impurities contained in municipal tap water or the like.
  • On the other hand, it is possible to effectively remove the fins, burrs and the like produced by mechanical machining through the use of water mixed with abrasives and surfactants for the high-pressure liquid jet.
  • For the convenience of the reader, the above description has focused on a representative sample of all possible embodiments, a sample that teaches the principles of the invention and conveys the best mode contemplated for carrying it out. The description has not attempted to exhaustively enumerate all possible variations. Other undescribed variations or modifications may be possible. For example, where multiple alternative embodiments are described, in many cases it will be possible to combine elements of different embodiments, or to combine elements of the embodiments described here with other modifications or variations that are not expressly described. Many of those undescribed variations, modifications and variations are within the literal scope of the following claims, and others are equivalent.

Claims (5)

1. A device for cleaning fluid dynamic bearings comprising:
a means for holding a work piece having a bearing surface;
a means for pressurizing a liquid; and
a means for directing said pressurized liquid onto the bearing surface.
2. A device for cleaning fluid dynamic bearings comprising:
a jig;
a conveyance device;
a cleaning part configured to spray a pressurized liquid onto said fluid dynamic
bearings; and
a draining part.
3. A device according to claim 2 further comprising:
an input part; and
a discharge part.
4. A device for cleaning fluid dynamic bearings comprising:
a jig;
a conveyance device;
a flat cleaning part configured to spray a pressurized liquid jet onto a flat fluid dynamic bearing surface; and an
an internal cleaning part configured to spray a pressurized liquid jet onto a cylindrical bearing surface.
5. A device according to claim 4 further comprising:
a draining part.
US11/066,037 2002-01-21 2005-02-25 Cleaning method and cleaning device for fluid dynamic bearings component Abandoned US20050150525A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US11/066,037 US20050150525A1 (en) 2002-01-21 2005-02-25 Cleaning method and cleaning device for fluid dynamic bearings component

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002-011529 2002-01-21
JP2002011529A JP2003214427A (en) 2002-01-21 2002-01-21 Cleaning method and cleaning device for fluid dynamic pressure bearing
US10/340,345 US6932681B2 (en) 2002-01-21 2003-01-10 Cleaning method and cleaning device for fluid dynamic bearings component
US11/066,037 US20050150525A1 (en) 2002-01-21 2005-02-25 Cleaning method and cleaning device for fluid dynamic bearings component

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US10/340,345 Division US6932681B2 (en) 2002-01-21 2003-01-10 Cleaning method and cleaning device for fluid dynamic bearings component

Publications (1)

Publication Number Publication Date
US20050150525A1 true US20050150525A1 (en) 2005-07-14

Family

ID=19191684

Family Applications (2)

Application Number Title Priority Date Filing Date
US10/340,345 Expired - Fee Related US6932681B2 (en) 2002-01-21 2003-01-10 Cleaning method and cleaning device for fluid dynamic bearings component
US11/066,037 Abandoned US20050150525A1 (en) 2002-01-21 2005-02-25 Cleaning method and cleaning device for fluid dynamic bearings component

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US10/340,345 Expired - Fee Related US6932681B2 (en) 2002-01-21 2003-01-10 Cleaning method and cleaning device for fluid dynamic bearings component

Country Status (2)

Country Link
US (2) US6932681B2 (en)
JP (1) JP2003214427A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130025117A1 (en) * 2011-07-27 2013-01-31 Alphana Technology Co., Ltd. Method for manufacturing a rotating device
US20130333204A1 (en) * 2012-06-15 2013-12-19 Samsung Electro-Mechanics Japan Advanced Technology Co., Ltd. Method of manufacturing hard disk drive device and hard disk drive device
RU2625878C2 (en) * 2013-12-19 2017-07-19 Александр Устимович Стельмах Contactless method of controlled hydraulic magnetic bearing and treatment device for its implementation (variants)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3987745B2 (en) * 2002-03-26 2007-10-10 株式会社ソーデナガノ Thrust plate manufacturing method, dynamic pressure bearing shaft manufacturing method, dynamic pressure bearing, spindle motor, and recording disk drive device
US8003748B2 (en) * 2004-02-17 2011-08-23 Chevron Phillips Chemical Company, Lp Polythiourethane compositions and processes for making and using same
JP2006002937A (en) 2004-05-20 2006-01-05 Minebea Co Ltd Fluid dynamic pressure bearing device, its manufacturing method, spindle motor and recording disk drive
US8381404B2 (en) * 2009-10-02 2013-02-26 Alphana Technology Co., Ltd. Method manufacturing of fluid dynamic bearing using cutting tool that performs micro alternating drive
US8506361B2 (en) * 2011-08-25 2013-08-13 General Electric Company Fixture to facilitate sandblasting of a cylindrical object
CN102357483B (en) * 2011-09-30 2013-04-24 江苏力星通用钢球股份有限公司 Immersed car hub steel ball cleaning system
CN103802028B (en) * 2012-11-15 2016-09-14 中国广核集团有限公司 The clean method of steam turbine for nuclear power station low pressure rotor race and equipment

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2823682A (en) * 1953-10-19 1958-02-18 Coulter Clyde Bearing cleaning apparatus
US3059654A (en) * 1960-09-02 1962-10-23 Weiner Al Bearing washer
US4304611A (en) * 1980-04-24 1981-12-08 Aluminum Company Of America Method and apparatus for cleaning container closures
US4456037A (en) * 1979-04-19 1984-06-26 Olympus Optical Company Limited Process of delivering samples and reagents
US4662125A (en) * 1984-08-10 1987-05-05 Georg Fischer Aktiengesellschaft Centrifugal blasting machine having a rotatable workpiece holder
US4727619A (en) * 1986-07-01 1988-03-01 Robbins Robin S Apparatus for cleaning wheel bearings
US5024561A (en) * 1988-10-04 1991-06-18 Isao Kitagawa Bulk material feeder provided with internal cleaning mechanism
US5827114A (en) * 1996-09-25 1998-10-27 Church & Dwight Co., Inc. Slurry blasting process
US6066032A (en) * 1997-05-02 2000-05-23 Eco Snow Systems, Inc. Wafer cleaning using a laser and carbon dioxide snow
US6099396A (en) * 1997-03-14 2000-08-08 Eco-Snow Systems, Inc. Carbon dioxide jet spray pallet cleaning system
US6286523B1 (en) * 2000-01-25 2001-09-11 Cae Ransohoff Inc. Parts transport mechanism for a rotary style parts treating machine
US6394112B1 (en) * 1999-03-26 2002-05-28 Lufthansa Technik Ag Pipe cleaning nozzle
US6655393B2 (en) * 2000-08-04 2003-12-02 Grease Duct Technologies, Llc Grease exhaust cleaning system
US6694991B1 (en) * 1999-11-09 2004-02-24 Nsk Ltd. Ball/roller bearing cleaning apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1251542A (en) * 1998-03-16 2000-04-26 东海旅客铁道株式会社 Bearing cleaning device for electric motors

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2823682A (en) * 1953-10-19 1958-02-18 Coulter Clyde Bearing cleaning apparatus
US3059654A (en) * 1960-09-02 1962-10-23 Weiner Al Bearing washer
US4456037A (en) * 1979-04-19 1984-06-26 Olympus Optical Company Limited Process of delivering samples and reagents
US4304611A (en) * 1980-04-24 1981-12-08 Aluminum Company Of America Method and apparatus for cleaning container closures
US4662125A (en) * 1984-08-10 1987-05-05 Georg Fischer Aktiengesellschaft Centrifugal blasting machine having a rotatable workpiece holder
US4727619A (en) * 1986-07-01 1988-03-01 Robbins Robin S Apparatus for cleaning wheel bearings
US5024561A (en) * 1988-10-04 1991-06-18 Isao Kitagawa Bulk material feeder provided with internal cleaning mechanism
US5827114A (en) * 1996-09-25 1998-10-27 Church & Dwight Co., Inc. Slurry blasting process
US6099396A (en) * 1997-03-14 2000-08-08 Eco-Snow Systems, Inc. Carbon dioxide jet spray pallet cleaning system
US6066032A (en) * 1997-05-02 2000-05-23 Eco Snow Systems, Inc. Wafer cleaning using a laser and carbon dioxide snow
US6394112B1 (en) * 1999-03-26 2002-05-28 Lufthansa Technik Ag Pipe cleaning nozzle
US6694991B1 (en) * 1999-11-09 2004-02-24 Nsk Ltd. Ball/roller bearing cleaning apparatus
US6286523B1 (en) * 2000-01-25 2001-09-11 Cae Ransohoff Inc. Parts transport mechanism for a rotary style parts treating machine
US6655393B2 (en) * 2000-08-04 2003-12-02 Grease Duct Technologies, Llc Grease exhaust cleaning system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130025117A1 (en) * 2011-07-27 2013-01-31 Alphana Technology Co., Ltd. Method for manufacturing a rotating device
US20130333204A1 (en) * 2012-06-15 2013-12-19 Samsung Electro-Mechanics Japan Advanced Technology Co., Ltd. Method of manufacturing hard disk drive device and hard disk drive device
RU2625878C2 (en) * 2013-12-19 2017-07-19 Александр Устимович Стельмах Contactless method of controlled hydraulic magnetic bearing and treatment device for its implementation (variants)

Also Published As

Publication number Publication date
US6932681B2 (en) 2005-08-23
JP2003214427A (en) 2003-07-30
US20030136427A1 (en) 2003-07-24

Similar Documents

Publication Publication Date Title
US20050150525A1 (en) Cleaning method and cleaning device for fluid dynamic bearings component
CN1326660C (en) Tool changing device and tool cleaning method
JP2003151943A (en) Scrub cleaning apparatus
US7210988B2 (en) Method and apparatus for reduced wear polishing pad conditioning
US20020007840A1 (en) Substrate cleaning apparatus, substrate cleaning method and substrate processing apparatus
KR20010050233A (en) Polishing apparatus, polishing method and method of conditioning polishing pad
US11642704B2 (en) Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
JP2007167837A (en) Cleaning apparatus for discharge nozzle
US6319100B1 (en) Disk edge polishing machine and disk edge polishing system
JP2001170864A (en) Grinding device
KR920003212B1 (en) Method and device for grinding cylindrical surface of cylindrical or column-shaped work
JP2003326223A (en) Method for cleaning ball bearing and method for cleaning various parts
JP2006066447A (en) Work chuck cleaning apparatus, work chuck cleaning method, and polishing equipment equipped with the work chuck cleaning apparatus
JP2004098187A (en) Polishing device
JP2006120757A (en) Cleaning brush, cleaning method and cleaning apparatus for work chuck
CN219442686U (en) Oil removing device for electroplating processing
JP4554589B2 (en) Brush grinding apparatus and brush grinding method
JP2008311382A (en) Washing method for porous ceramic-made chuck
JP2006269582A (en) Cleaning apparatus for work chuck, polishing device, cleaning method of work chuck, and manufacturing method of wafer
JP3738765B2 (en) Lapping machine
JPH1128657A (en) Dressing method and device of polishing tool
JP2000246639A (en) Surface grinding device
JPS61164779A (en) Method and device for machining rubber roll
JP2005138250A (en) Finishing method and finishing device for joint bolt
US20050011535A1 (en) Cleaning semiconductor wafers

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION