US20020182433A1 - Method of producing a roughening-treated copper foil - Google Patents

Method of producing a roughening-treated copper foil Download PDF

Info

Publication number
US20020182433A1
US20020182433A1 US09/838,228 US83822801A US2002182433A1 US 20020182433 A1 US20020182433 A1 US 20020182433A1 US 83822801 A US83822801 A US 83822801A US 2002182433 A1 US2002182433 A1 US 2002182433A1
Authority
US
United States
Prior art keywords
copper
copper foil
current density
layer
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US09/838,228
Other versions
US6497806B1 (en
Inventor
Yasuhiro Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Denkai Co Ltd
Original Assignee
Nippon Denkai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2000124637A priority Critical patent/JP3949871B2/en
Priority claimed from JP2000124637A external-priority patent/JP3949871B2/en
Application filed by Nippon Denkai Co Ltd filed Critical Nippon Denkai Co Ltd
Priority to US09/838,228 priority patent/US6497806B1/en
Assigned to NIPPON DENKAI, LTD. reassignment NIPPON DENKAI, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ENDO, YASUHIRO
Publication of US20020182433A1 publication Critical patent/US20020182433A1/en
Application granted granted Critical
Publication of US6497806B1 publication Critical patent/US6497806B1/en
Adjusted expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/56Electroplating: Baths therefor from solutions of alloys
    • C25D3/58Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0307Providing micro- or nanometer scale roughness on a metal surface, e.g. by plating of nodules or dendrites
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0723Electroplating, e.g. finish plating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12431Foil or filament smaller than 6 mils
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12431Foil or filament smaller than 6 mils
    • Y10T428/12438Composite

Definitions

  • the present invention relates to a roughening-treated copper foil useful for printed wiring boards or the like and to the production thereof, particularly, to a roughening-treated copper foil, which is useful for printed wiring boards due to its excellent adhesive strength to resin base materials of high Tg's, such as FR-5, and to a method suitable for the production thereof.
  • Copper foil for printed wiring boards generally has a bonding surface, which is previously roughened by some means to give higher adhesive strength on lamination onto resin base materials.
  • plating methods are mainly used as the roughening treatment.
  • Japanese Patent Application Examined Publication No. 53-39376 (1978) discloses an example of the plating methods.
  • a dendritic copper electrodeposition layer is formed on at least one bonding surface of a copper foil as a cathode by the so-called burning plating in an acidic copper plating bath at a current of the limiting current density or higher, then a smooth copper electrodeposition layer is formed on the dendritic copper electrodeposition layer at a current of a current density lower than the limiting current density (covering plating) to change the dendritic copper into nodular copper and to increase the adhesive strength by the nodular copper.
  • the surface of the copper foil has a larger specific surface than before the electrolysis treatment, and the nodular copper works as an anchor, improving the adhesive strength between resin base materials and the copper foil.
  • nodular copper is formed on electrolytic copper foil, which generally has a surface (mat surface) rougher than the other surface (shiny surface), current is mainly centered to convexes, and the formation of the nodular copper is centered on the extreme ends of the convexes.
  • Japanese Patent Application Examined Publication No. 54-38053 (1979) discloses an improved method of forming a roughened surface by carrying out electrolysis treatment at an approximate limiting current density in an acidic copper plating bath to which a specific amount of at least one metal selected from arsenic, antimony, bismuth, selenium and tellurium is added.
  • a specific amount of at least one metal selected from arsenic, antimony, bismuth, selenium and tellurium is added.
  • the addition of a very small amount of arsenic, antimony, bismuth, selenium or tellurium permits the formation of minute projections, but cannot solve the problem centering to the convexes on the copper foil.
  • copper foil containing arsenic, antimony, bismuth, selenium or tellurium, which are poisons or deadly poisons, in printed wiring boards causes the problem of environmental pollution on discarding etching waste liquors or the printed wiring boards.
  • Japanese patent Application Unexamined Publication No. 8-236930 discloses a method for solving the problem, wherein electrolysis is carried out at approximate limiting current density in an acidic copper plating bath containing metal ions of at least one metal selected from chromium and tungsten and metal ions of at least one metal selected from vanadium, nickel, iron, cobalt, zinc, germanium and molybdenum, to form a roughening-treated layer containing the metals added.
  • 11-256389 (1999) discloses a method of carrying out electrolysis at approximate limiting current density in an acidic copper plating bath containing molybdenum ions and metal ions of at least one metal selected from iron, cobalt, nickel and tungsten, to form a layer of burnt deposits (a layer formed by burning plating) containing the metals added.
  • An object of the present invention is to solve the problems in the prior arts. That is, an object of the present invention is to provide a roughening-treated copper foil, which is suitable for printed wiring boards due to its high adhesive strength to resin base materials, by treating the bonding surface of copper foil by electrolysis so as to form nodular copper not only on the convexes on the bonding surface but also on the concaves thereon without increasing the surface roughness.
  • Another object of the present invention is to provide a method suitable for producing the roughening-treated copper foil.
  • the present invention provides a roughening-treated copper foil, comprising
  • a composite metal layer which is formed on a bonding surface of the copper foil and comprises (I) copper, (II) at least one metal selected from the group consisting of tungsten and molybdenum and (III) at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, and
  • the terms “the bonding surface of a copper foil” mean a surface of a copper foil, which faces an adherent when the copper foil is bonded to the adherent.
  • the present invention further provides a method of producing a roughening-treated copper foil, comprising
  • the terms “the limiting current density of the plating bath” mean a current density at which generation of hydrogen accompanies the cathode reaction for the deposition of the metals or metal compounds.
  • FIG. 1 is a scanning electron microscope photograph showing the roughened surface of the roughening-treated copper foil obtained in Example 1.
  • FIG. 2 is a scanning electron microscope photograph showing the roughened surface of the roughening-treated copper foil obtained in Comparative Example 5.
  • a preferred example of the copper foil (raw copper foil) to be used in the present invention is electrolytic copper foil. It is also possible to use other ones, such as rolled copper foil or plastic film coated with copper film by, for example, vacuum plating. There is no particular limitation in the thickness of the copper foil and the roughness and form of the surfaces of the copper foil.
  • the copper foil may have one or two bonding surfaces.
  • the bonding surface of the copper foil is coated with a composite metal layer, which comprises (I) preferably 5,000 to 10,000 ⁇ g/dm 2 of copper, (II) preferably 10 to 1,000 ⁇ g/dm 2 , more preferably 100 to 1,000 ⁇ g/dm 2 of at least one metal selected from the group consisting of tungsten and molybdenum and (III) preferably 10 to 1,000 ⁇ g/dm 2 , more preferably 10 to 300 ⁇ g/dm 2 of at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, all in coating amount.
  • a composite metal layer which comprises (I) preferably 5,000 to 10,000 ⁇ g/dm 2 of copper, (II) preferably 10 to 1,000 ⁇ g/dm 2 , more preferably 100 to 1,000 ⁇ g/dm 2 of at least one metal selected from the group consisting of tungsten and molybdenum and (III) preferably 10 to 1,000 ⁇ g/dm 2 , more preferably 10 to 300 ⁇
  • the coating amount of the at least one metal selected from the group consisting of nickel, cobalt, iron and zinc is less than 10 ⁇ g/dm 2 , the formation of the nodular copper by the plating may not extend to the concaves on the copper foil, but be centered to the convexes, and if more than 1,000 ⁇ g/dm 2 , etching the plated layer may require very long time to remove unnecessary copper to form copper circuits.
  • the coating amount of the at least one metal selected from the group consisting of nickel, cobalt, iron and zinc depends on the composition of the plating bath and the treating conditions, which may be selected from those described later.
  • the coating amount of copper in the composite metal layer is less than 5,000 ⁇ g/dm 2 , the nodular copper may not be formed on the entire concaves, and if more than 10,000 ⁇ g/dm 2 , the formation of the nodular copper on the entire concaves may be less effective and the production cost may increase. If the coating amount of the at least one metal selected from the group consisting of tungsten and molybdenum in the composite metal layer is less than 10 ⁇ g/dm 2 , nodular copper may not be formed on the entire concaves, and if more than 1,000 ⁇ g/dm 2 , the nodular copper may not grow large.
  • the composite metal layer is preferably 0.05 to 0.15 ⁇ m thick, more preferably 0.07 to 0.12 ⁇ m thick.
  • the composite metal layer is formed by treating the bonding surface of a copper foil as a cathode by electrolysis in a plating bath containing (i) copper ions, (ii) metal ions of at least one metal selected from the group consisting of tungsten and molybdenum and (iii) metal ions of at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, at a current density lower than the limiting current density of the plating bath.
  • the bonding surface of the copper foil is preferably subjected to pickling and degreasing prior to the electrolysis.
  • the sources of the metal ions in the plating bath are water-soluble metal salts.
  • the following is a non-limitative but preferred range of the composition of the bath.
  • copper ion source copper sulfate pentahydrate: 10-100 g/l
  • molybdenum ion source sodium molybdate dehydrate: 0.5-20 g/l
  • iron ion source ferrous sulfate heptahydrate
  • the electrolysis conditions are not limited, and are generally selected from the following ranges.
  • electrolysis treatment period 1-30 sec.
  • bath temperature 10-60° C.
  • the preferred pH of the plating bath ranges from 1.5 to 5.0. If the pH is lower than 1.5, the preferred ranges of the coating amounts of the at least one metal selected from the group consisting of tungsten and molybdenum and the at least one metal selected from the group consisting of nickel, cobalt, iron and zinc in the composite layer may be narrowed, so that the formation of nodular copper by the plating does not extend to the concaves on the copper foil but be centered on the convexes. If the pH is higher than 5.0, it may take a very long time to dissolve the metal ions of at least one metal selected from tungsten and molybdenum, lowering the productivity. The pH more preferably ranges from 2.0 to 4.0.
  • the composite metal layer By forming the composite metal layer, fine particles are formed on the convexes on the copper foil, but cannot give sufficient adhesive strength as they are or even after coated with copper by burning plating or covering plating. To improve adhesive strength, a roughened layer comprising copper is formed on the composite metal layer by using both burning plating and covering plating to deposit nodular copper further on the concaves on the copper foil.
  • the copper foil treated under the above-described conditions is washed with water, and then a roughened layer comprising copper is formed on the composite metal layer by carrying out burning plating whereby a dendritic copper electrodeposition layer is formed by electrolysis in a plating bath containing copper ions at a current density not lower than the limiting current density of the plating bath, followed by covering plating whereby nodular copper is formed by electrolysis at a current density lower than the limiting current density of the plating bath.
  • the coating amount of copper in the roughened layer comprising copper is preferably 30,000 to 300,000 ⁇ g/dm 2 . If it is less than 30,000 ⁇ g/dm 2 , copper nodules may be too small to give sufficient adhesive strength, and if more than 300,000 ⁇ g/dm 2 , adhesive strength may be sufficient, but the production cost will be problematically high. More preferred coating amount is 100,000 to 200,000 ⁇ g/dm 2 . The combined step of burning plating/covering plating may be repeated to form the roughened layer comprising copper.
  • copper ion source copper sulfate pentahydrate: 20-300 g/l
  • electrolysis treatment period burning plating—1-10 seconds; covering plating—40-100 seconds
  • bath temperature 20-60° C.
  • a rust preventing layer such as a chromate layer, a zinc layer, a copper-zinc alloy layer, a zinc alloy layer, a nickel-molybdenum-cobalt layer or an indium-zinc layer, a coupling agent treatment layer, or an adhesive resin layer, such as a phenolic resin, epoxy resin or polyimide resin layer, according to demands.
  • the roughening-treated copper foil coated with the above-described layers is laminated onto a resin base material with heat and pressure, to form a copper-clad laminate for printed wiring boards.
  • a 35 ⁇ m thick electrolytic copper foil (surface roughness Ra of mat surface: 0.9 ⁇ m as measured according to JIS B 0601) was subjected to pickling for 20 seconds by using a 10% sulfuric acid solution.
  • the coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 7,900 ⁇ g/dm 2 of copper, 178 ⁇ g/dm 2 of molybdenum and 145 ⁇ g/dm 2 of nickel. After the treatment, the treated surface had a surface roughness Ra of 0.9 ⁇ m.
  • the copper foil was then washed with water, dipped for 10 seconds in an aqueous solution of 0.1 wt % 3-glycidoxypropyltrimethoxysilane, and then immediately dried at 80° C., to form a silane coupling agent treatment layer.
  • a composite metal layer containing copper, molybdenum, cobalt and iron.
  • the coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 7,900 ⁇ g/dm 2 of copper, 180 ⁇ g/dm 2 of molybdenum, 12 ⁇ g/dm 2 of cobalt and 50 ⁇ g/dm 2 of iron.
  • the treated surface had a surface roughness Ra of 0.9 ⁇ m.
  • a roughened layer comprising copper was formed in the same manner as in Example 1.
  • the roughened layer comprising copper had a coating amount of copper of 150,000 ⁇ g/dm 2 and a surface roughness Ra of 1.5 ⁇ m.
  • nodular copper formed all over the irregularities on the copper foil.
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • Example 1 After the same electrolytic copper foil as that used in Example 1 was pickled and washed with water in the same manner as in Example 1, the mat surface (bonding surface) of the copper foil was treated by electrolysis at a current density of 7 A/dm 2 for 4 seconds in a plating bath, which contained 50 g/l of copper sulfate pentahydrate, 2 g/l of sodium molybdate dehydrate and 50 g/l of zinc sulfate heptahydrate and was adjusted to pH 2.5 and to a bath temperature of 30° C., to form on the bonding surface of the copper foil a composite metal layer containing copper, molybdenum and zinc.
  • a plating bath which contained 50 g/l of copper sulfate pentahydrate, 2 g/l of sodium molybdate dehydrate and 50 g/l of zinc sulfate heptahydrate and was adjusted to pH 2.5 and to a bath temperature of 30° C.
  • the coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 9,200 ⁇ g/dm 2 of copper, 230 ⁇ g/dm 2 of molybdenum and 159 ⁇ g/dm 2 of m. On the roughening-treated electrolytic copper foil was observed nodular copper formed all over the irregularities on the copper foil.
  • ICP inductively coupled plasma luminescent
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • the mat surface (bonding surface) of the copper foil was treated by electrolysis at a current density of 6 A/dm 2 for 4 seconds in a plating bath, which contained 50 g/l of copper sulfate pentahydrate, 10 g/l of sodium tungstate dihydrate, 30 g/l of cobalt sulfate heptahydrate and 30 g/l of ferrous sulfate heptahydrate and was adjusted to pH 2.0 and to a bath temperature of 30° C., to form on the bonding surface of the copper foil a composite metal layer containing copper, tungsten, cobalt and iron.
  • the coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 7,900 ⁇ g/dm 2 of copper, 200 ⁇ g/dm 2 of tungsten, 12 ⁇ g/dm 2 of cobalt and 50 ⁇ g/dm 2 of iron.
  • the treated surface had a surface roughness Ra of 0.9 ⁇ m.
  • a roughened layer comprising copper was formed in the same manner as in Example 1.
  • the roughened layer had a surface roughness Ra of 1.5 ⁇ m.
  • On the roughening-treated electrolytic copper foil was observed nodular copper formed all over the irregularities on the copper foil.
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • the mat surface (bonding surface) of the copper foil was treated by electrolysis at a current density of 7 A/dm 2 for 4 seconds in a plating bath, which contained 50 g/l of copper sulfate pentahydrate, 1 g/l of sodium tungstate dihydrate, 2 g/l of sodium molybdate dihydrate and 50 g/l of zinc sulfate heptahydrate and was adjusted to pH 2.5 and to a bath temperature of 30° C., to form on the bonding surface of the copper foil a composite metal layer containing copper, tungsten, molybdenum and zinc.
  • the coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 9,200 ⁇ g/dm 2 of copper, 50 ⁇ g/dm 2 of tungsten, 180 ⁇ g/dm 2 of molybdenum and 160 ⁇ g/dm 2 of zinc. After the treatment, the treated surface had a surface roughness Ra of 0.9 ⁇ m. Subsequently, a roughened layer comprising copper was formed in the same manner as in Example 1. The roughened layer comprising copper had a surface roughness Ra of 1.4 ⁇ m. On the roughening-treated electrolytic copper foil was observed nodular copper formed all over the irregularities on the copper foil.
  • ICP inductively coupled plasma luminescent
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • Example 4 The same treatments as in Example 4 were repeated except that a 18 ⁇ m thick rolled copper foil (surface roughness Ra: 0.1 ⁇ m) was used, to form a composite metal layer containing copper, tungsten and nickel.
  • the coating amounts of the metals in the composite metal layer were 7,900 ⁇ g/dm 2 of copper, 145 ⁇ g/dm 2 of tungsten and 128 ⁇ g/dm 2 of nickel.
  • the treated surface had a surface roughness Ra of 0.1 ⁇ m.
  • a roughened layer comprising copper was formed in the same manner as in Example 1.
  • the roughened layer comprising copper had a surface roughness Ra of 0.5 ⁇ m.
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • Example 4 The same treatments as in Example 4 were repeated except that a 12 ⁇ m thick electrolytic copper foil (surface roughness Ra of the mat surface: 0.2 ⁇ m) was used, to form a composite metal layer containing copper, tungsten and nickel.
  • the coating amounts of the metals in the composite metal layer were 7,900 ⁇ g/dm 2 of copper, 150 ⁇ g/dm 2 of tungsten and 135 ⁇ g/dm 2 of nickel.
  • the treated surface had a surface roughness Ra of 0.2 ⁇ m.
  • a roughened layer comprising copper was formed in the same manner as in Example 1.
  • the roughened layer comprising copper had a surface roughness Ra of 0.6 ⁇ m.
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • Example 2 The same treatments as in Example 1 were repeated except that the step (3) for forming a roughened layer by using a with water and then treated by electrolysis at a current density of 5 A/dm 2 (lower than the limiting current density) for 80 seconds by using a plating bath, which contained 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid and was adjusted to a bath temperature of 30° C., to form a smooth copper layer (covering plating).
  • the smooth copper layer had a coating amount of copper of 132,000 ⁇ g/dm 2 and a surface roughness Ra of 1.1 ⁇ m.
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • Example 1 The same electrolytic copper foil as that used in Example 1 was pickled and washed with water in the same manner as in Example 1. Without forming a composite metal layer, the mat surface (bonding surface) of the copper foil was then treated in a plating bath of a bath temperature of 30° C. containing 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid by ⁇ circle over (1) ⁇ electrolysis at a current density of 30 A/dm 2 (not lower than the limiting current density) for 3 seconds and ⁇ circle over (2) ⁇ electrolysis at a current density of 5 A/dm 2 (lower than the limiting current density) for 80 seconds, to form a roughened layer comprising copper.
  • a plating bath of a bath temperature of 30° C. containing 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid by ⁇ circle over (1) ⁇ electrolysis at a current density of 30 A/dm 2 (not lower than the
  • the roughened layer comprising copper had a coating amount of copper of 150,000 ⁇ g/dm 2 and a surface roughness Ra of 1.8 ⁇ m.
  • the roughening-treated electrolytic copper foil was observed the formation of nodular copper centered on the convexes on the irregular surface of the copper foil.
  • FIG. 2 shows a scanning electron microscope photograph (magnification: 2000, object angle: 45°) of the roughened surface.
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • Example 7 The same rolled copper foil as that used in Example 7 was pickled and washed with water in the same manner as in Example 1. Without forming a composite metal layer, the mat surface (bonding surface) of the copper foil was then treated in a plating bath of a bath temperature of 30° C. containing 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid by ⁇ circle over (1) ⁇ electrolysis at a current density of 30 A/dm 2 (not lower than the limiting current density) for 3 seconds and ⁇ circle over (2) ⁇ electrolysis at a current density of 5 A/dm 2 (lower than the limiting current density) for 80 seconds, to form a roughened layer comprising copper.
  • the roughened layer comprising copper had a coating amount of copper of 150,000 ⁇ g/dm 2 and a surface roughness Ra of 0.8 ⁇ m.
  • Example 1 After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1.
  • Example 8 The same electrolytic copper foil as that used in Example 8 was pickled and washed with water in the same manner as in Example 1. Without forming a composite metal layer, the mat surface (bonding surface) of the copper foil was then treated in a plating bath of a bath temperature of 30° C.
  • Example 2 of about 0.1 ⁇ m in diameter
  • Example 3 of about 0.1 ⁇ m in diameter
  • Example 4 Comp. 1.6 15 particles of 10 ⁇ m 23 particles of 2-10 Example 5 or less in diameter ⁇ m in diameter

Abstract

A roughening-treated copper foil, comprising (A) a copper foil, (B) a composite metal layer, which is formed on a bonding surface of the copper foil and comprises (I) copper, (II) at least one metal selected from the group consisting of tungsten and molybdenum and (III) at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, and (C) a roughened layer comprising copper, which is formed on the composite metal layer.

Description

    BACKGROUND OF THE INVENTION
  • (a) Field of the Invention [0001]
  • The present invention relates to a roughening-treated copper foil useful for printed wiring boards or the like and to the production thereof, particularly, to a roughening-treated copper foil, which is useful for printed wiring boards due to its excellent adhesive strength to resin base materials of high Tg's, such as FR-5, and to a method suitable for the production thereof. [0002]
  • (b) Description of the Related Art [0003]
  • Copper foil for printed wiring boards generally has a bonding surface, which is previously roughened by some means to give higher adhesive strength on lamination onto resin base materials. For electrolytic copper foil, plating methods are mainly used as the roughening treatment. Japanese Patent Application Examined Publication No. 53-39376 (1978) discloses an example of the plating methods. According to the method, first a dendritic copper electrodeposition layer is formed on at least one bonding surface of a copper foil as a cathode by the so-called burning plating in an acidic copper plating bath at a current of the limiting current density or higher, then a smooth copper electrodeposition layer is formed on the dendritic copper electrodeposition layer at a current of a current density lower than the limiting current density (covering plating) to change the dendritic copper into nodular copper and to increase the adhesive strength by the nodular copper. After the formation of the nodular copper by the electrolysis treatment, the surface of the copper foil has a larger specific surface than before the electrolysis treatment, and the nodular copper works as an anchor, improving the adhesive strength between resin base materials and the copper foil. When nodular copper is formed on electrolytic copper foil, which generally has a surface (mat surface) rougher than the other surface (shiny surface), current is mainly centered to convexes, and the formation of the nodular copper is centered on the extreme ends of the convexes. [0004]
  • The recent spread of note type personal computers and pocket telephones has increased the use of glass-epoxy printed wiring boards produced by using as resin base materials FR-5 materials having high Tg's. As compared with conventional FR-4 materials, epoxy resins having high Tg's are more resistive to heat but have lower adhesive strength to copper foil. A means of enhancing the adhesive strength of copper foil to resin base materials is to increase the roughness of the bonding surface of copper foil. However, increasing the surface roughness tends to cause the so-called copper powder-falling off that is the falling of nodular copper even with small abrasion force and the so-called residual copper that is nodular copper left in resin base materials after the etching step in the production of printed circuits. [0005]
  • Japanese Patent Application Examined Publication No. 54-38053 (1979) discloses an improved method of forming a roughened surface by carrying out electrolysis treatment at an approximate limiting current density in an acidic copper plating bath to which a specific amount of at least one metal selected from arsenic, antimony, bismuth, selenium and tellurium is added. The addition of a very small amount of arsenic, antimony, bismuth, selenium or tellurium permits the formation of minute projections, but cannot solve the problem centering to the convexes on the copper foil. Further, using copper foil containing arsenic, antimony, bismuth, selenium or tellurium, which are poisons or deadly poisons, in printed wiring boards causes the problem of environmental pollution on discarding etching waste liquors or the printed wiring boards. [0006]
  • Addition of benzoquinoline to an acidic copper plating bath (Japanese Patent Application Examined Publication No. 56-41196 (1981)) or addition of molybdenum (Japanese Patent Application Examined Publication No. 62-56677 (1987)) are also proposed, but cannot improve adhesive strength sufficiently. [0007]
  • Japanese patent Application Unexamined Publication No. 8-236930 (1996) discloses a method for solving the problem, wherein electrolysis is carried out at approximate limiting current density in an acidic copper plating bath containing metal ions of at least one metal selected from chromium and tungsten and metal ions of at least one metal selected from vanadium, nickel, iron, cobalt, zinc, germanium and molybdenum, to form a roughening-treated layer containing the metals added. Japanese Patent Application Unexamined Publication No. 11-256389 (1999) discloses a method of carrying out electrolysis at approximate limiting current density in an acidic copper plating bath containing molybdenum ions and metal ions of at least one metal selected from iron, cobalt, nickel and tungsten, to form a layer of burnt deposits (a layer formed by burning plating) containing the metals added. [0008]
  • These methods, however, also cause the phenomena of copper powder-falling off and residual copper because nodular copper is formed exclusively on the extreme ends of the convexes on copper foil. [0009]
  • SUMMARY OF THE INVENTION
  • An object of the present invention is to solve the problems in the prior arts. That is, an object of the present invention is to provide a roughening-treated copper foil, which is suitable for printed wiring boards due to its high adhesive strength to resin base materials, by treating the bonding surface of copper foil by electrolysis so as to form nodular copper not only on the convexes on the bonding surface but also on the concaves thereon without increasing the surface roughness. [0010]
  • Another object of the present invention is to provide a method suitable for producing the roughening-treated copper foil. [0011]
  • Accordingly, the present invention provides a roughening-treated copper foil, comprising [0012]
  • (A) a copper foil, [0013]
  • (B) a composite metal layer, which is formed on a bonding surface of the copper foil and comprises (I) copper, (II) at least one metal selected from the group consisting of tungsten and molybdenum and (III) at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, and [0014]
  • (C) a roughened layer comprising copper, which is formed on the composite metal layer. [0015]
  • Herein, the terms “the bonding surface of a copper foil” mean a surface of a copper foil, which faces an adherent when the copper foil is bonded to the adherent. [0016]
  • The present invention further provides a method of producing a roughening-treated copper foil, comprising [0017]
  • treating a copper foil as a cathode by electrolysis in a plating bath containing (i) copper ions, (ii) metal ions of at least one metal selected from the group consisting of tungsten and molybdenum and (iii) metal ions of at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, at a current density lower than a limiting current density of the plating bath, to form on the copper foil a composite metal layer comprising (I) copper, (II) at least one metal selected from the group consisting of tungsten and molybdenum and (III) at least one metal selected from the group consisting of nickel, cobalt, iron and zinc; and [0018]
  • forming a roughened layer comprising copper on the composite metal layer by carrying out electrolysis in a plating bath containing copper ions at a current density not lower than a limiting current density of the plating bath to form a dendritic copper electrodeposition layer, and then carrying out subsequent electrolysis at a current density lower than the limiting current density of the plating bath to form nodular copper. Herein, the terms “the limiting current density of the plating bath” mean a current density at which generation of hydrogen accompanies the cathode reaction for the deposition of the metals or metal compounds.[0019]
  • BRIEF DESCRIPTION OF THE DRAWING
  • FIG. 1 is a scanning electron microscope photograph showing the roughened surface of the roughening-treated copper foil obtained in Example 1. [0020]
  • FIG. 2 is a scanning electron microscope photograph showing the roughened surface of the roughening-treated copper foil obtained in Comparative Example 5.[0021]
  • DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • A preferred example of the copper foil (raw copper foil) to be used in the present invention is electrolytic copper foil. It is also possible to use other ones, such as rolled copper foil or plastic film coated with copper film by, for example, vacuum plating. There is no particular limitation in the thickness of the copper foil and the roughness and form of the surfaces of the copper foil. The copper foil may have one or two bonding surfaces. [0022]
  • The bonding surface of the copper foil is coated with a composite metal layer, which comprises (I) preferably 5,000 to 10,000 μg/dm[0023] 2 of copper, (II) preferably 10 to 1,000 μg/dm2, more preferably 100 to 1,000 μg/dm2 of at least one metal selected from the group consisting of tungsten and molybdenum and (III) preferably 10 to 1,000 μg/dm2, more preferably 10 to 300 μg/dm2 of at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, all in coating amount.
  • If the coating amount of the at least one metal selected from the group consisting of nickel, cobalt, iron and zinc is less than 10 μg/dm[0024] 2, the formation of the nodular copper by the plating may not extend to the concaves on the copper foil, but be centered to the convexes, and if more than 1,000 μg/dm2, etching the plated layer may require very long time to remove unnecessary copper to form copper circuits. The coating amount of the at least one metal selected from the group consisting of nickel, cobalt, iron and zinc depends on the composition of the plating bath and the treating conditions, which may be selected from those described later.
  • If the coating amount of copper in the composite metal layer is less than 5,000 μg/dm[0025] 2, the nodular copper may not be formed on the entire concaves, and if more than 10,000 μg/dm2, the formation of the nodular copper on the entire concaves may be less effective and the production cost may increase. If the coating amount of the at least one metal selected from the group consisting of tungsten and molybdenum in the composite metal layer is less than 10 μg/dm2, nodular copper may not be formed on the entire concaves, and if more than 1,000 μg/dm2, the nodular copper may not grow large. The composite metal layer is preferably 0.05 to 0.15 μm thick, more preferably 0.07 to 0.12 μm thick.
  • According to the present invention, the composite metal layer is formed by treating the bonding surface of a copper foil as a cathode by electrolysis in a plating bath containing (i) copper ions, (ii) metal ions of at least one metal selected from the group consisting of tungsten and molybdenum and (iii) metal ions of at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, at a current density lower than the limiting current density of the plating bath. The bonding surface of the copper foil is preferably subjected to pickling and degreasing prior to the electrolysis. [0026]
  • The sources of the metal ions in the plating bath are water-soluble metal salts. The following is a non-limitative but preferred range of the composition of the bath. [0027]
  • copper ion source—copper sulfate pentahydrate: 10-100 g/l [0028]
  • tungsten ion source—sodium tungstate dehydrate: 0.01-20 g/l [0029]
  • molybdenum ion source—sodium molybdate dehydrate: 0.5-20 g/l [0030]
  • nickel ion source—nickel sulfate hexahydrate [0031]
  • cobalt ion source—cobalt sulfate heptahydrate [0032]
  • iron ion source—ferrous sulfate heptahydrate [0033]
  • zinc ion source—zinc sulfate heptahydrate [0034]
  • the total of nickel sulfate hexahydrate, cobalt sulfate heptahydrate, ferrous sulfate heptahydrate and zinc sulfate heptahydrate: 10-100 g/l [0035]
  • So far as the current density is lower than the limiting current density of the plating bath, the electrolysis conditions are not limited, and are generally selected from the following ranges. [0036]
  • current density: 1-10 A/dm[0037] 2
  • electrolysis treatment period: 1-30 sec. [0038]
  • bath temperature: 10-60° C. [0039]
  • The preferred pH of the plating bath ranges from 1.5 to 5.0. If the pH is lower than 1.5, the preferred ranges of the coating amounts of the at least one metal selected from the group consisting of tungsten and molybdenum and the at least one metal selected from the group consisting of nickel, cobalt, iron and zinc in the composite layer may be narrowed, so that the formation of nodular copper by the plating does not extend to the concaves on the copper foil but be centered on the convexes. If the pH is higher than 5.0, it may take a very long time to dissolve the metal ions of at least one metal selected from tungsten and molybdenum, lowering the productivity. The pH more preferably ranges from 2.0 to 4.0. [0040]
  • By forming the composite metal layer, fine particles are formed on the convexes on the copper foil, but cannot give sufficient adhesive strength as they are or even after coated with copper by burning plating or covering plating. To improve adhesive strength, a roughened layer comprising copper is formed on the composite metal layer by using both burning plating and covering plating to deposit nodular copper further on the concaves on the copper foil. [0041]
  • That is, the copper foil treated under the above-described conditions is washed with water, and then a roughened layer comprising copper is formed on the composite metal layer by carrying out burning plating whereby a dendritic copper electrodeposition layer is formed by electrolysis in a plating bath containing copper ions at a current density not lower than the limiting current density of the plating bath, followed by covering plating whereby nodular copper is formed by electrolysis at a current density lower than the limiting current density of the plating bath. [0042]
  • The coating amount of copper in the roughened layer comprising copper is preferably 30,000 to 300,000 μg/dm[0043] 2. If it is less than 30,000 μg/dm2, copper nodules may be too small to give sufficient adhesive strength, and if more than 300,000 μg/dm2, adhesive strength may be sufficient, but the production cost will be problematically high. More preferred coating amount is 100,000 to 200,000 μg/dm2. The combined step of burning plating/covering plating may be repeated to form the roughened layer comprising copper.
  • In cases where the roughened layer comprising copper is formed by using a common sulfuric acid-acidic copper sulfate bath, preferred but non-limitative examples of the composition of the bath and electrolysis conditions are as follows. [0044]
  • copper ion source—copper sulfate pentahydrate: 20-300 g/l [0045]
  • sulfuric acid: 10-200 g/l [0046]
  • current density: burning plating (not lower than limiting current density of the plating bath)—10-200 A/dm[0047] 2; covering plating (lower than limiting current density or the plating bath)—1-20 A/dm2
  • electrolysis treatment period: burning plating—1-10 seconds; covering plating—40-100 seconds [0048]
  • bath temperature: 20-60° C. [0049]
  • On the copper foil coated with the roughened layer comprising copper, it is preferable to form other layers commonly formed on copper foil, for example, a rust preventing layer, such as a chromate layer, a zinc layer, a copper-zinc alloy layer, a zinc alloy layer, a nickel-molybdenum-cobalt layer or an indium-zinc layer, a coupling agent treatment layer, or an adhesive resin layer, such as a phenolic resin, epoxy resin or polyimide resin layer, according to demands. The roughening-treated copper foil coated with the above-described layers is laminated onto a resin base material with heat and pressure, to form a copper-clad laminate for printed wiring boards. [0050]
  • Hereinafter the present invention will be described in more detail referring to Examples and Comparative Examples, which, however, do not limit the scope of the present invention. [0051]
  • EXAMPLES 1 TO 8 AND COMPARATIVE EXAMPLES 1 TO 8 Example 1
  • (1) A 35 μm thick electrolytic copper foil (surface roughness Ra of mat surface: 0.9 μm as measured according to JIS B 0601) was subjected to pickling for 20 seconds by using a 10% sulfuric acid solution. [0052]
  • (2) The copper foil was then washed with water, and the mat surface (bonding surface) of the copper foil was treated by electrolysis at a current density of 6 A/dm[0053] 2 for 4 seconds in a plating bath, which contained 50 g/l of copper sulfate pentahydrate, 2 g/l of sodium molybdate dehydrate and 50 g/l of nickel sulfate hexahydrate and was adjusted to pH 3.0 and to a bath temperature of 30° C., to form on the bonding surface of the copper foil a composite metal layer containing copper molybdenum and nickel. The coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 7,900 μg/dm2 of copper, 178 μg/dm2 of molybdenum and 145 μg/dm2 of nickel. After the treatment, the treated surface had a surface roughness Ra of 0.9 μm.
  • (3) The copper foil was then washed with water, and the surface of the composite metal layer was treated by {circle over (1)} electrolysis at a current density of 30 A/dm[0054] 2 (not lower than the limiting current density) for 3 seconds followed by {circle over (2)} electrolysis at 5 A/dm2 (lower than the limiting current density) for 80 seconds both in a plating bath containing 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid and adjusted to a bath temperature of 30° C., to form a roughened layer comprising copper. The roughened layer comprising copper had a coating amount of copper of 150,000 μg/dm2 and a surface roughness Ra of 1.4 μm. On the roughening-treated electrolytic copper foil was observed nodular copper formed all over the irregularities on the copper foil. FIG. 1 shows a scanning electron microscope photograph (magnification: 2000, object angle: 45°) of the roughened surface.
  • (4) The copper foil was then washed with water, and dipped for 10 seconds in an aqueous solution of 3.5 g/l of sodium bichromate dihydrate adjusted to pH 4.2 and a bath temperature of 28° C., to form a rust preventing layer. [0055]
  • (5) The copper foil was then washed with water, dipped for 10 seconds in an aqueous solution of 0.1 wt % 3-glycidoxypropyltrimethoxysilane, and then immediately dried at 80° C., to form a silane coupling agent treatment layer. form on the bonding surface of the copper foil a composite metal layer containing copper, molybdenum, cobalt and iron. The coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 7,900 μg/dm[0056] 2 of copper, 180 μg/dm2 of molybdenum, 12 μg/dm2 of cobalt and 50 μg/dm2 of iron. After the treatment, the treated surface had a surface roughness Ra of 0.9 μm. Subsequently, a roughened layer comprising copper was formed in the same manner as in Example 1. The roughened layer comprising copper had a coating amount of copper of 150,000 μg/dm2 and a surface roughness Ra of 1.5 μm. On the roughening-treated electrolytic copper foil was observed nodular copper formed all over the irregularities on the copper foil.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0057]
  • Example 3
  • After the same electrolytic copper foil as that used in Example 1 was pickled and washed with water in the same manner as in Example 1, the mat surface (bonding surface) of the copper foil was treated by electrolysis at a current density of 7 A/dm[0058] 2 for 4 seconds in a plating bath, which contained 50 g/l of copper sulfate pentahydrate, 2 g/l of sodium molybdate dehydrate and 50 g/l of zinc sulfate heptahydrate and was adjusted to pH 2.5 and to a bath temperature of 30° C., to form on the bonding surface of the copper foil a composite metal layer containing copper, molybdenum and zinc. The coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 9,200 μg/dm2 of copper, 230 μg/dm2 of molybdenum and 159 μg/dm2 of m. On the roughening-treated electrolytic copper foil was observed nodular copper formed all over the irregularities on the copper foil.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0059]
  • Example 5
  • After the same electrolytic copper foil as that used in Example 1 was pickled and washed with water in the same manner as in Example 1, the mat surface (bonding surface) of the copper foil was treated by electrolysis at a current density of 6 A/dm[0060] 2 for 4 seconds in a plating bath, which contained 50 g/l of copper sulfate pentahydrate, 10 g/l of sodium tungstate dihydrate, 30 g/l of cobalt sulfate heptahydrate and 30 g/l of ferrous sulfate heptahydrate and was adjusted to pH 2.0 and to a bath temperature of 30° C., to form on the bonding surface of the copper foil a composite metal layer containing copper, tungsten, cobalt and iron. The coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 7,900 μg/dm2 of copper, 200 μg/dm2 of tungsten, 12 μg/dm2 of cobalt and 50 μg/dm2 of iron. After the treatment, the treated surface had a surface roughness Ra of 0.9 μm. Subsequently, a roughened layer comprising copper was formed in the same manner as in Example 1. The roughened layer had a surface roughness Ra of 1.5 μm. On the roughening-treated electrolytic copper foil was observed nodular copper formed all over the irregularities on the copper foil.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0061]
  • Example 6
  • After the same electrolytic copper foil as that used in Example 1 was pickled and washed with water in the same manner as in Example 1, the mat surface (bonding surface) of the copper foil was treated by electrolysis at a current density of 7 A/dm[0062] 2 for 4 seconds in a plating bath, which contained 50 g/l of copper sulfate pentahydrate, 1 g/l of sodium tungstate dihydrate, 2 g/l of sodium molybdate dihydrate and 50 g/l of zinc sulfate heptahydrate and was adjusted to pH 2.5 and to a bath temperature of 30° C., to form on the bonding surface of the copper foil a composite metal layer containing copper, tungsten, molybdenum and zinc. The coating amounts of the metals in the composite metal layer were measured by an ICP (inductively coupled plasma luminescent) analyzer to be 9,200 μg/dm2 of copper, 50 μg/dm2 of tungsten, 180 μg/dm2 of molybdenum and 160 μg/dm2 of zinc. After the treatment, the treated surface had a surface roughness Ra of 0.9 μm. Subsequently, a roughened layer comprising copper was formed in the same manner as in Example 1. The roughened layer comprising copper had a surface roughness Ra of 1.4 μm. On the roughening-treated electrolytic copper foil was observed nodular copper formed all over the irregularities on the copper foil.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0063]
  • Example 7
  • The same treatments as in Example 4 were repeated except that a 18 μm thick rolled copper foil (surface roughness Ra: 0.1 μm) was used, to form a composite metal layer containing copper, tungsten and nickel. The coating amounts of the metals in the composite metal layer were 7,900 μg/dm[0064] 2 of copper, 145 μg/dm2 of tungsten and 128 μg/dm2 of nickel. After the treatment, the treated surface had a surface roughness Ra of 0.1 μm. Subsequently, a roughened layer comprising copper was formed in the same manner as in Example 1. The roughened layer comprising copper had a surface roughness Ra of 0.5 μm.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0065]
  • Example 8
  • The same treatments as in Example 4 were repeated except that a 12 μm thick electrolytic copper foil (surface roughness Ra of the mat surface: 0.2 μm) was used, to form a composite metal layer containing copper, tungsten and nickel. The coating amounts of the metals in the composite metal layer were 7,900 μg/dm[0066] 2 of copper, 150 μg/dm2 of tungsten and 135 μg/dm2 of nickel. After the treatment, the treated surface had a surface roughness Ra of 0.2 μm. Subsequently, a roughened layer comprising copper was formed in the same manner as in Example 1. The roughened layer comprising copper had a surface roughness Ra of 0.6 μm.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0067]
  • Comparative Example 1
  • The same treatments as in Example 1 were repeated except that the step (3) for forming a roughened layer by using a with water and then treated by electrolysis at a current density of 5 A/dm[0068] 2 (lower than the limiting current density) for 80 seconds by using a plating bath, which contained 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid and was adjusted to a bath temperature of 30° C., to form a smooth copper layer (covering plating). The smooth copper layer had a coating amount of copper of 132,000 μg/dm2 and a surface roughness Ra of 1.1 μm.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0069]
  • Comparative Example 5
  • The same electrolytic copper foil as that used in Example 1 was pickled and washed with water in the same manner as in Example 1. Without forming a composite metal layer, the mat surface (bonding surface) of the copper foil was then treated in a plating bath of a bath temperature of 30° C. containing 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid by {circle over (1)} electrolysis at a current density of 30 A/dm[0070] 2 (not lower than the limiting current density) for 3 seconds and {circle over (2)} electrolysis at a current density of 5 A/dm2 (lower than the limiting current density) for 80 seconds, to form a roughened layer comprising copper. The roughened layer comprising copper had a coating amount of copper of 150,000 μg/dm2 and a surface roughness Ra of 1.8 μm. On the roughening-treated electrolytic copper foil was observed the formation of nodular copper centered on the convexes on the irregular surface of the copper foil. FIG. 2 shows a scanning electron microscope photograph (magnification: 2000, object angle: 45°) of the roughened surface.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0071]
  • Comparative Example 6
  • The same rolled copper foil as that used in Example 7 was pickled and washed with water in the same manner as in Example 1. Without forming a composite metal layer, the mat surface (bonding surface) of the copper foil was then treated in a plating bath of a bath temperature of 30° C. containing 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid by {circle over (1)} electrolysis at a current density of 30 A/dm[0072] 2 (not lower than the limiting current density) for 3 seconds and {circle over (2)} electrolysis at a current density of 5 A/dm2 (lower than the limiting current density) for 80 seconds, to form a roughened layer comprising copper. The roughened layer comprising copper had a coating amount of copper of 150,000 μg/dm2 and a surface roughness Ra of 0.8 μm.
  • After the treatments (4) and (5) of Example 1 were carried out, the measurement of adhesive strength and tests for residual copper and powder falling were carried out in the same manner as in Example 1 (6), and the results are listed in Table 1. [0073]
  • Comparative Example 7
  • The same electrolytic copper foil as that used in Example 8 was pickled and washed with water in the same manner as in Example 1. Without forming a composite metal layer, the mat surface (bonding surface) of the copper foil was then treated in a plating bath of a bath temperature of 30° C. containing 130 g/l of copper sulfate pentahydrate and 100 g/l of sulfuric acid by {circle over (1)} electrolysis at a current density of 30 A/dm[0074] 2 (not lower than the limiting current density) for 3 seconds and {circle over (2)} electrolysis at a current density of 5 A/dm2 (lower than the limiting current density)
    TABLE 1
    Adhesive
    strength
    kN/m Residual copper Powder-falling
    Example 1 2.0 No No
    Example 2 1.9 No No
    Example 3 1.9 No No
    Example 4 2.0 No No
    Example 5 2.1 No No
    Example 6 1.9 No No
    Example 7 1.0 No No
    Example 8 0.9 No No
    Comp. 0.9 No Countless particles
    Example 1 of about 0.1 μm in
    diameter
    Comp. 0.9 No Countless particles
    Example 2 of about 0.1 μm in
    diameter
    Comp. 1.0 No Countless particles
    Example 3 of about 0.1 μm in
    diameter
    Comp. 1.3 No No
    Example 4
    Comp. 1.6 15 particles of 10 μm 23 particles of 2-10
    Example 5 or less in diameter μm in diameter
    Comp. 0.5 8 particles of 10 μm 15 particles of 2-10
    Example 6 or less in diameter μm in diameter
    Comp. 0.5 7 particles of 10 μm 18 particles of 2-10
    Example 7 or less in diameter μm in diameter
    Comp. 1.7 2 particles of 10 μm 3 particles of 2-10
    Example 8 or less in diameter μm in diameter
  • As apparent from comparison of FIG. 1 with FIG. 2, unlike the roughening-treated copper foil obtained in Comparative Example 5 on which nodular copper was locally electrodeposited on the convexes on the copper foil surface, [0075]

Claims (6)

What is claimed is,
1. A roughening-treated copper foil, comprising
(A) a copper foil,
(B) a composite metal layer, which is formed on a bonding surface of the copper foil and comprises (I) copper, (II) at least one metal selected from the group consisting of tungsten and molybdenum and (III) at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, and
(C) a roughened layer comprising copper, which is formed on the composite metal layer.
2. The roughening-treated copper foil of claim 1, wherein the composite metal layer comprises 5,000 to 10,000 μg/dm2 of copper, 10 to 1,000 μg/dm2 of at least one metal selected from the group consisting of tungsten and molybdenum and 10 to 1,000 μg/dm2 of at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, all in coating amount.
3. The roughening-treated copper foil of claim 1, wherein the roughened layer comprises 30,000 to 300,000 μg/dm2 of copper in coating amount.
4. The roughening-treated copper foil of claim 2, wherein the roughened layer comprises 30,000 to 300,000 μg/dm2 of copper in coating amount.
5. A method of producing a roughening-treated copper foil, comprising
treating a copper foil as a cathode by electrolysis in a plating bath containing (i) copper ions, (ii) metal ions of at least one metal selected from the group consisting of tungsten and molybdenum and (iii) metal ions of at least one metal selected from the group consisting of nickel, cobalt, iron and zinc, at a current density lower than a limiting current density of the plating bath, to form on the copper foil a composite metal layer comprising (I) copper, (II) at least one metal selected from the group consisting of tungsten and molybdenum and (III) at least one metal selected from the group consisting of nickel, cobalt, iron and zinc; and
forming a roughened layer comprising copper on the composite metal layer by carrying out electrolysis in a plating bath containing copper ions at a current density not lower than a limiting current density of the plating bath to form a dendritic copper electrodeposition layer and then carrying out subsequent electrolysis at a current density lower than the limiting current density of plating bath to form nodular copper.
6. The method of claim 5, wherein the plating bath containing (i) copper ions, (ii) metal ions of at least one metal selected from the group consisting of tungsten and molybdenum and (iii) metal ions of at least one metal selected from the group consisting of nickel, cobalt, iron and zinc is pH 1.5 to 5.0.
US09/838,228 1999-12-10 2001-04-20 Method of producing a roughening-treated copper foil Expired - Fee Related US6497806B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000124637A JP3949871B2 (en) 1999-12-10 2000-04-25 Roughening copper foil and method for producing the same
US09/838,228 US6497806B1 (en) 2000-04-25 2001-04-20 Method of producing a roughening-treated copper foil

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000124637A JP3949871B2 (en) 1999-12-10 2000-04-25 Roughening copper foil and method for producing the same
US09/838,228 US6497806B1 (en) 2000-04-25 2001-04-20 Method of producing a roughening-treated copper foil

Publications (2)

Publication Number Publication Date
US20020182433A1 true US20020182433A1 (en) 2002-12-05
US6497806B1 US6497806B1 (en) 2002-12-24

Family

ID=26590764

Family Applications (1)

Application Number Title Priority Date Filing Date
US09/838,228 Expired - Fee Related US6497806B1 (en) 1999-12-10 2001-04-20 Method of producing a roughening-treated copper foil

Country Status (1)

Country Link
US (1) US6497806B1 (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1394291A2 (en) * 2002-09-02 2004-03-03 Furukawa Circuit Foil Co., Ltd. Copper foil for chip-on-film use, plasma display panel, or high-frequency printed circuit board
US20040170857A1 (en) * 2003-02-27 2004-09-02 Yasuhisa Yoshihara Electromagnetic shielding copper foil, method of production thereof and electromagnetic shield
WO2005021836A2 (en) 2003-09-02 2005-03-10 Olin Corporation Chromium-free antitarnish adhesion promoting treatment composition
WO2006001594A1 (en) * 2004-06-02 2006-01-05 Iljin Copper Foil Co., Ltd. Method for manufacturing black surface- treated copper foil for emi shield and copper foil the same and the composite material using it
WO2006004298A1 (en) * 2004-04-01 2006-01-12 Iljin Copper Foil Co., Ltd. Method for manufacturing black surface-treated copper foil for emi shield
WO2006004299A1 (en) * 2004-04-02 2006-01-12 Iljin Copper Foil Co., Ltd. Method for manufacturing black surface-treated copper foil for emi shield
EP1562413A3 (en) * 2004-02-06 2008-04-02 Furukawa Circuit Foil Co., Ltd. Treated copper foil and circuit board
US20150008020A1 (en) * 2013-07-03 2015-01-08 Shinko Electric Industries Co., Ltd. Wiring Board and Method of Manufacturing Wiring Board
CN104372384A (en) * 2014-11-18 2015-02-25 安徽铜冠铜箔有限公司 Method for manufacturing ultra-thick electronic copper foil
KR20170038969A (en) * 2015-09-30 2017-04-10 일진머티리얼즈 주식회사 Surface-treated Copper Foil for PCB having fine-circuit pattern and Method of manufacturing of the same
US9709348B2 (en) * 2015-10-27 2017-07-18 Chang Chun Petrochemical Co., Ltd. Heat-dissipating copper foil and graphene composite
US20180160529A1 (en) * 2016-12-05 2018-06-07 Jx Nippon Mining & Metals Corporation Surface Treated Copper Foil, Copper Foil With Carrier, Laminate, Method for Manufacturing Printed Wiring Board, and Method for Manufacturing Electronic Device
US11160174B2 (en) 2016-06-09 2021-10-26 Murata Manufacturing Co., Ltd. Method of manufacturing multilayer substrate
US11337314B2 (en) 2018-04-27 2022-05-17 Jx Nippon Mining & Metals Corporation Surface treated copper foil, copper clad laminate, and printed circuit board
CN115921571A (en) * 2022-12-19 2023-04-07 富威科技(吴江)有限公司 Rolled copper foil and manufacturing method thereof

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003051673A (en) * 2001-08-06 2003-02-21 Mitsui Mining & Smelting Co Ltd Printed wiring board copper foil and copper-plated laminated board using the same
KR100553840B1 (en) * 2003-05-29 2006-02-24 일진소재산업주식회사 Method for manufacturing thin copper film for printed circuit board
US20050173259A1 (en) * 2004-02-06 2005-08-11 Applied Materials, Inc. Endpoint system for electro-chemical mechanical polishing
US8066552B2 (en) 2003-10-03 2011-11-29 Applied Materials, Inc. Multi-layer polishing pad for low-pressure polishing
US8449987B2 (en) 2006-06-12 2013-05-28 Jx Nippon Mining & Metals Corporation Rolled copper or copper alloy foil with roughened surface and method of roughening rolled copper or copper alloy foil
JP5181618B2 (en) * 2007-10-24 2013-04-10 宇部興産株式会社 Metal foil laminated polyimide resin substrate
KR101426038B1 (en) * 2008-11-13 2014-08-01 주식회사 엠디에스 Printed circuit board and method of manufacturing the same
US8206569B2 (en) * 2009-02-04 2012-06-26 Applied Materials, Inc. Porous three dimensional copper, tin, copper-tin, copper-tin-cobalt, and copper-tin-cobalt-titanium electrodes for batteries and ultra capacitors
US8192605B2 (en) * 2009-02-09 2012-06-05 Applied Materials, Inc. Metrology methods and apparatus for nanomaterial characterization of energy storage electrode structures
CN103348041B (en) 2011-07-29 2016-10-12 古河电气工业株式会社 Electrolyte used in cathode copper Alloy Foil, its preparation method, preparation, use secondary battery cathode collector body, secondary cell and the electrode thereof of this cathode copper Alloy Foil
TWI652163B (en) * 2017-11-15 2019-03-01 財團法人工業技術研究院 Copper foil for high frequency circuit and manufacturing method thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551210A (en) * 1984-11-13 1985-11-05 Olin Corporation Dendritic treatment of metallic surfaces for improving adhesive bonding
US4961828A (en) * 1989-04-05 1990-10-09 Olin Corporation Treatment of metal foil
DE69005691T2 (en) * 1989-05-02 1994-04-28 Nikko Gould Foil Co Treatment of copper foil for printed circuits.
JP2717911B2 (en) * 1992-11-19 1998-02-25 日鉱グールド・フォイル株式会社 Copper foil for printed circuit and manufacturing method thereof
US5385660A (en) * 1993-12-20 1995-01-31 Xerox Corporation Dendritic growth assisted electroform separation
JP2920083B2 (en) * 1995-02-23 1999-07-19 日鉱グールド・フォイル株式会社 Copper foil for printed circuit and manufacturing method thereof
JP3739929B2 (en) * 1998-03-09 2006-01-25 古河サーキットフォイル株式会社 Copper foil for printed wiring board and method for producing the same

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1394291A3 (en) * 2002-09-02 2006-11-22 Furukawa Circuit Foil Co., Ltd. Copper foil for chip-on-film use, plasma display panel, or high-frequency printed circuit board
US20040043242A1 (en) * 2002-09-02 2004-03-04 Furukawa Circuit Foil Co., Ltd. Copper foil for chip-on-film use, plasma display panel, or high-frequency printed circuit board
EP1394291A2 (en) * 2002-09-02 2004-03-03 Furukawa Circuit Foil Co., Ltd. Copper foil for chip-on-film use, plasma display panel, or high-frequency printed circuit board
US7172818B2 (en) 2002-09-02 2007-02-06 Furukawa Circuit Foil Co., Ltd. Copper foil for chip-on-film use, plasma display panel, or high-frequency printed circuit board
US20040170857A1 (en) * 2003-02-27 2004-09-02 Yasuhisa Yoshihara Electromagnetic shielding copper foil, method of production thereof and electromagnetic shield
US7476449B2 (en) * 2003-02-27 2009-01-13 Furukawa Circuit Foil Co., Ltd. Electromagnetic shielding copper foil, method of production thereof and electromagnetic shield
WO2005021836A2 (en) 2003-09-02 2005-03-10 Olin Corporation Chromium-free antitarnish adhesion promoting treatment composition
EP1709215A2 (en) * 2003-09-02 2006-10-11 Olin Corporation Chromium-free antitarnish adhesion promoting treatment composition
EP1709215A4 (en) * 2003-09-02 2008-08-27 Gbc Metals Llc Chromium-free antitarnish adhesion promoting treatment composition
EP1562413A3 (en) * 2004-02-06 2008-04-02 Furukawa Circuit Foil Co., Ltd. Treated copper foil and circuit board
WO2006004298A1 (en) * 2004-04-01 2006-01-12 Iljin Copper Foil Co., Ltd. Method for manufacturing black surface-treated copper foil for emi shield
WO2006004299A1 (en) * 2004-04-02 2006-01-12 Iljin Copper Foil Co., Ltd. Method for manufacturing black surface-treated copper foil for emi shield
WO2006001594A1 (en) * 2004-06-02 2006-01-05 Iljin Copper Foil Co., Ltd. Method for manufacturing black surface- treated copper foil for emi shield and copper foil the same and the composite material using it
US20150008020A1 (en) * 2013-07-03 2015-01-08 Shinko Electric Industries Co., Ltd. Wiring Board and Method of Manufacturing Wiring Board
US9313904B2 (en) * 2013-07-03 2016-04-12 Shinko Electric Industries Co., Ltd. Wiring board and method of manufacturing wiring board
CN104372384A (en) * 2014-11-18 2015-02-25 安徽铜冠铜箔有限公司 Method for manufacturing ultra-thick electronic copper foil
KR20170038969A (en) * 2015-09-30 2017-04-10 일진머티리얼즈 주식회사 Surface-treated Copper Foil for PCB having fine-circuit pattern and Method of manufacturing of the same
EP3154319A1 (en) * 2015-09-30 2017-04-12 Iljin Materials Co., Ltd. Surface-treated copper foil for pcb having fine-circuit pattern and method of manufacturing the same
US9709348B2 (en) * 2015-10-27 2017-07-18 Chang Chun Petrochemical Co., Ltd. Heat-dissipating copper foil and graphene composite
US11160174B2 (en) 2016-06-09 2021-10-26 Murata Manufacturing Co., Ltd. Method of manufacturing multilayer substrate
US11856712B2 (en) 2016-06-09 2023-12-26 Murata Manufacturing Co., Ltd. Method of manufacturing multilayer substrate
US20180160529A1 (en) * 2016-12-05 2018-06-07 Jx Nippon Mining & Metals Corporation Surface Treated Copper Foil, Copper Foil With Carrier, Laminate, Method for Manufacturing Printed Wiring Board, and Method for Manufacturing Electronic Device
US10820414B2 (en) * 2016-12-05 2020-10-27 Jx Nippon Mining & Metals Corporation Surface treated copper foil, copper foil with carrier, laminate, method for manufacturing printed wiring board, and method for manufacturing electronic device
US11337314B2 (en) 2018-04-27 2022-05-17 Jx Nippon Mining & Metals Corporation Surface treated copper foil, copper clad laminate, and printed circuit board
US11337315B2 (en) 2018-04-27 2022-05-17 Jx Nippon Mining & Metals Corporation Surface treated copper foil, copper clad laminate, and printed circuit board
US11375624B2 (en) * 2018-04-27 2022-06-28 Jx Nippon Mining & Metals Corporation Surface treated copper foil, copper clad laminate, and printed circuit board
US11382217B2 (en) 2018-04-27 2022-07-05 Jx Nippon Mining & Metals Corporation Surface treated copper foil, copper clad laminate, and printed circuit board
CN115921571A (en) * 2022-12-19 2023-04-07 富威科技(吴江)有限公司 Rolled copper foil and manufacturing method thereof

Also Published As

Publication number Publication date
US6497806B1 (en) 2002-12-24

Similar Documents

Publication Publication Date Title
US20020182433A1 (en) Method of producing a roughening-treated copper foil
EP0396056B1 (en) Treatment of copper foil for printed circuits
US6495022B2 (en) Method of producing copper foil for fine wiring
US8530749B2 (en) Copper foil attached to the carrier foil, a method for preparing the same and printed circuit board using the same
JPH07233497A (en) Non-cyan copper-zinc electroplating bath, surface treatment of copper foil for printed circuit board using the bath, and the copper foil for printed circuit board
JP2002292788A (en) Composite copper foil and method for manufacturing the same
US6419811B2 (en) Method for surface treatment of copper foil
JP2005048269A (en) Surface treated copper foil, and board obtained by using the same
JPH1018075A (en) Electrolytic copper foil
JP2920083B2 (en) Copper foil for printed circuit and manufacturing method thereof
JP3949871B2 (en) Roughening copper foil and method for producing the same
JP2010141227A (en) Rolled copper foil for printed wiring board
JP4612978B2 (en) Composite copper foil and method for producing the same
US7037597B2 (en) Copper foil for printed-wiring board
JP2006028635A (en) Method for manufacturing surface treated copper foil for microfabrication circuit substrate
JP3429290B2 (en) Manufacturing method of copper foil for fine wiring
JP2007009261A (en) Copper foil for printed circuit board, and its manufacturing method
JPH06169168A (en) Printed circuit copper foil and manufacture thereof
JP2014172179A (en) Carrier-provided copper foil, method of producing carrier-provided copper foil, printed wiring board, printed circuit board, copper-clad laminate and method of producing printed wiring board
JP2012064769A (en) Copper foil for printed circuit board
JP3709142B2 (en) Copper foil for printed wiring board and method for producing the same
JP2005353919A (en) Surface-roughening treatment method of copper foil for printed-wiring board
JPH06237078A (en) Manufacture of copper foil for printed circuit
JP2684164B2 (en) Surface treatment method for copper foil for printed circuits
KR100404005B1 (en) Roughening-treated copper foil and production of the same

Legal Events

Date Code Title Description
AS Assignment

Owner name: NIPPON DENKAI, LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ENDO, YASUHIRO;REEL/FRAME:011723/0608

Effective date: 20010405

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20141224