US1509823A - Lapping machine - Google Patents

Lapping machine Download PDF

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US1509823A
US1509823A US1509823DA US1509823A US 1509823 A US1509823 A US 1509823A US 1509823D A US1509823D A US 1509823DA US 1509823 A US1509823 A US 1509823A
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laps
spider
lapping
lap
articles
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

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  • This invention relates to a lapping or abrading machine and particularly to a machine for simultaneously lapping a plurality of gages to a predetermined identical dimension.
  • One of the objects of the present invention is to provide a machine in which a plurality of gages or other articles may be simultaneously ground on their opposite end faces to predetermined identical di1nensions, the opposite end surfaces being ⁇ flat and parallel to each other.
  • Another object of the invention is to mount the gages or other articles to be ,ground in a holder or spider between adjacent surfaces of a pair of laps and simul taneously rotate and reciprocate the holder or spider containing; ⁇ the articles to be ⁇ around between the laps.
  • a further object of the :invention is to provide a convenientmeans for removing; the upper lap from operative position to enamine or remove the articles to be ground and also to provide pressure against the upper surface of the upper laps to force the upper lap against the articles grouped in the spider or holder.
  • Another object of the invention is to provide a convenient'. and simple means for obtaining' the lapping; movements of the holder containing the articles to be ground whereby the surfaces being lapped are brought into contact with the entire surfaces of the laps.
  • a still further object of the invention is 'to provide automatically operating means to stop the lapping action after a predetermined variable number of lapping movements.
  • Figure l shows a central vertical sectional view of the complete machine.
  • Fig'. 2 shows a plan view of the machine with the upper lap and its supporting means removed.
  • Fig. 3 is a plan view of the automatic stopping' device forming a part of the machine, the control switch being shown in its closed position.
  • Fig. 4r is a vertical sectional View Of the saine with the switch in its open position.
  • my invention in its broadest aspect comprises the following ⁇ principal parts: first, a base; second, a lap station- ⁇ arily mounted thereon.; third, an upper lap non-rotatably mounted above the lower lap and adapted to adjust itself relative to the articles beine ⁇ lapped; fourth, a spider or other holding means for the articles to be l.around disposed between the laps; fifth, op erating means for simultaneously reciprd ⁇ eating and rotatingv said spider to cause lappii'ig movement between the articles and laps; sixth., automatic means for stopping; the movements of said spider after any predetermined numbcr of lappingl movements; and seventh, means to conveniently position and remove the upper lap.
  • the base of a lapping ⁇ machine on which is centrally mounted a lap l1.
  • the lap 1l rests upon an annular member 12 which in 'turn rests upon the central upper portion of the base 10 and is non-rotatably held in that position by any suitable means (not shown).
  • the upper surface 12a of lap l1 is very carefully finished to a smooth and perfect plane to which abrasive material is adapted to be supplied.
  • a worm 8O is provided which is adapted to mesh with a worm wheel.
  • lVorm wheel 8l is mounted at the inner end ol a horizontal.
  • shaft 82 which cxtends laterally through the base l0 and meses through a bracket member 83 provided on the side of the machine as shown in Fig. l.
  • Mounted in the bracket member 83 is a worm Wheel S5 meshing with a worm 86 formed on the outer end ot the shaft 82.
  • Vorm wheel 85 is mounted to rotate about a central vertical shaft 87 suitably mounted in the bracket member 855. Also mounted to rotate about the ⁇ central shaft S7 is a dial plate 88 and a plate 89 carrying a ratchet pawl 90. Preferably the ratchet pawl 90 engages teeth provided on an internal surface oit the gear 85 as shown. in Fig'. 23.
  • the dial plate 8S may be rotated to any given position and, when the lapping' operations are l'iegun, rotation ot the shaft. 82 ritates the ⁇ rear wheel 85, this also rotates the plate 89 through the ratchet pawl 90.
  • Plate 89 has a notch 94 cut in its periphery lor a purpose presently to be described. Rotation ot thc handle 92 and the rotation oit this plate S9 thus rotates a notch 9st away from a stationary ng'er 96, and, when a certain number et lapping ⁇ movements ha ve taken place, the plate 89 is rotated by means o'l the gear wheel 85 to the position. shown in Fig. 3 so that the linger 96 will drop into the notch 94.
  • the finger or plunger 96 is spring-pressed ⁇ in a direction to torce it into the notch 9e and is at all times pressed toward the plate 89.
  • a switch member 9i' which is held in engagement with contact members 98 and 99 so long' as the notch 94 is not :in line with the plunger 9G so that the circuit tor the motor operatin?, ⁇ the driving' shaft is normallyclosed
  • the switch member 97 is removed trom the contacts 98 and 99 thus opening the motor circuit and stopping further rotation oit the shaft 54; and the spider 40.
  • dial plate 88 The upper surface of dial plate 88 is graduated as shown at 100. These graduations correspond to the number of lapping movements which Will take place before the lapping movements are stopped by movement oit plunger 9G into notch 94 and opening ot the switch 9i'.
  • the machine may be set to operate 'tor any predetermined number oi lapping operations after which it will be automatically stopped by opening ot switch 9T.
  • a lapping machine comprising in combination, a base, a lower lap mounted thereon, an upper lap, means to non-rotatably support said laps in operative position relatively to cach other, a spider adapted to hold a pliy 1ality ot articles disposed between said laps, and positive means to simultaneously rapidly reciprocate and slowly rotate said spider between said laps whereby lapping, ⁇ movements between the articles and aps are accomplished,
  • a lapping machine comprising in combination, a hase, a lower lap mounted thereonA an upper lap adapted to rest upon and adjust itself as to parallelism relative to the lower lap, means to non-rotatably support said laps in operative position relatively to each other, a spider adapted to hold a plurality ot articles disposed between said laps, and positive means to simultaneously reciprecate and rotate said spider between said laps whereby lapping movements between. the articles and laps are acconiplisl'ied.
  • il lapping' machine comprising ⁇ in coinbination, a base, a lower lag mounted thereon, an upper lap, means to non-rotatably support said laps in operative position relatively to each other, a spider adapted to hold a plurality el? articles disposed between said laps, and geared means operatively connected to said spider to simultaneously reciprocate and rotate said spider between said laps whereby lapping ⁇ movements between the articles and laps accomplished, the rotary movement ol" said spider beine' relatively sl. was than its reciprocatory nievement.
  • lapping' machine comprisingin combination. .a ba se, a lower lap mounted thereon, an upiier lap, means to non-rotatably support said laps in operative position relativelyv te each other, a spider adapted to hold plurality oit' articles disposed be tween said laps, and driving means comprisine' a plurality or' cranlrsand gears operativ y connected to said spider to simultaneously reciprocate and rotate said spider between said laps whereby lapping movements between said articles and laps are accomplished.
  • l lapping machine comprising in combination, a base, a lower lap mounted thereon, an upper lap adapted to rest upon and adjust itself relative to the articles being lapped, means to non-rotatably support said laps in operative position relative to each other, a spider adapted to hold a plurality ot articles disposed between said laps, and driving means comprising a plurality ot cranks and gears operatively connected to said spider to simultaneously reciprocate and rotate said spider between said laps whereby lapping movements between said laps and articles are accomplished.
  • a lapping machine comprising in combination, a base, a lower lap mounted thereon, an upper lap, means to non-rotatably support said laps in operative position relatively to each other, a spider adapted to hold a plurality et articles disposed between said laps, and means to operate said spider between said laps whereby said articles pass over the entire lapping surfaces or".
  • said laps said means comprising a central shaft, a crank thereon, a three armed member operated thereby, cranks engaging bearings at the extremities of said arms, gears eccentrically rotated by said cranks, said gears engaging said spider whereby said spider is positively reciprocated and rotated between said laps.
  • a lapping machine comprising ⁇ in combination, a base, a lower lap thereon, an upper lap cooperating therewith, a spider adapted to hold a plurality of articles disposed between said laps, means to move said spider relative to said laps to produce lapping movements on articles mounted in said spider, and means to stop said lapping movements after any predetermined number of movements.
  • a lapping machine comprising in combination, a base, a lower lap thereon, an upper lap adapted to rest upon and adjust itself relative to the articles being lapped, a spider adapted to hold a plurality of articles disposed between said laps, means to move said spider relativel to said laps to produce lapping ⁇ movements on articles mounted in said spider, and means to stop said lapping movements after any predetermined number ot movements.
  • a lapping machine comprising in combination, a base, a lower lap thereon, an upper lap cooperating therewith, a spider adapted to hold a plurality et articles dis posed between said laps, means to move said spider relative to said laps to produce rotary and reciprocatory lapping movements on articles mounted in said spider, and means to stop said lapping movements a any predetermined number of moveine lO.
  • a lappingmachine comprising in conibination, a base, a lower lap mounted thereon, an upper lap, means to non-rotatably support said laps in operative position relatively to each other, a spider adapted to hold a plurality of articles disposed between said laps, means to operate said spider between said laps, said means comprising a central shaft, a crank thereon, a three armed meniber operated thereby, cranks engaging bear ings at the extremities of said arms, eccentrically rotated by said cranlrs, said gears engaging said spider whereby said spider is positively reciprocated and rotated. between said laps, and means to stop thc movement of said central shaft after any predetermined number of lapping movements.
  • a lapping machine comprising in combination, a base, a lower lap thereon, an upper lap cooperating therewith, a spider mounted between said laps, means to move said spider relative to said laps, means permitting movement of said upper lap toward said lower lap, and means to elevate and laterally move said upper lap.
  • a lapping machine comprising in combination, a base, a. lower lap thereon, an upper lap cooperating therewith, a spider mounted between said laps, means to move said spider relative to said laps, a bracl-:ct rotatably mounted in said base, means coin necting said bracket with said upper lap whereby said upper lap may be moved to ward said lower lap or elevated and removed from operative position.
  • a lapping machine comprising in combination, a base, a lower lap thereon, an upper lap cooperating therewith, a spider mounted between said laps, means to move said spider relative to said laps, a bracket rotatably mounted in said base, means to lock said bracket in operative position, means connecting said bracket with said upper lap whereby said upper lap may be moved toward said lower lap or elevated and removed from operative position.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Description

B. H. BLGOD LAPPING MACHINE Sept. 3o 1924. 1,509,823
ijiled April lsfxezx 2 sheets-snee: 1
S31/Wenko@ Sept. 30 1924. 509,823
B. H. BLOOD 'LAPPING MACHINE Filed April 13.
Patented Sept. 30, 1924.
UNITED STATES i wenn PATENT orifice.
BRYANT H. BLOOD, OF HARTFORD, CONNECTTCT, ASSlCrNOR TO PLELATT & VIHITNEY COMPANY, OF NEW YORK, N. Y., A CORPORLTIGN Oi JERSEY.
LAEPING IIIACHTNE.
Application filed April. 13, 19121.
To all toll/m t int/.y comic/rn.'
Be it known that- I, BRYANT H. BLOOD, a citizen of the United States, residing` at Hartford, in the county of Hartford and State of Connecticut, have invented certain new and useful improvements in flapping Machines, of which the following` is a specication.
This invention relates to a lapping or abrading machine and particularly to a machine for simultaneously lapping a plurality of gages to a predetermined identical dimension.
One of the objects of the present invention is to provide a machine in which a plurality of gages or other articles may be simultaneously ground on their opposite end faces to predetermined identical di1nensions, the opposite end surfaces being` flat and parallel to each other.
Another object of the invention is to mount the gages or other articles to be ,ground in a holder or spider between adjacent surfaces of a pair of laps and simul taneously rotate and reciprocate the holder or spider containing;` the articles to be `around between the laps.
A further object of the :invention is to provide a convenientmeans for removing; the upper lap from operative position to enamine or remove the articles to be ground and also to provide pressure against the upper surface of the upper laps to force the upper lap against the articles grouped in the spider or holder.
Another object of the invention is to provide a convenient'. and simple means for obtaining' the lapping; movements of the holder containing the articles to be ground whereby the surfaces being lapped are brought into contact with the entire surfaces of the laps.
A still further object of the invention is 'to provide automatically operating means to stop the lapping action after a predetermined variable number of lapping movements.
W'ith these and other objects in view, my invention consists in the features of construction and operation set forth in the following-specification and illustrated in the accompanying drawings.
In the accompanying drawings annexed hereto and forming` a part of this specification, I have shown my invention embodied Serial No. 460,903.
in a gagelapping` machine, but it will be understood that the invention can be othou wise embodied and that the drawings are not to be construed as defining or limiting the scope of the invention, the claims appended to this specification. beingrelied upon forthat purpose.
ln the drawings:
Figure l shows a central vertical sectional view of the complete machine.
Fig'. 2 shows a plan view of the machine with the upper lap and its supporting means removed.
Fig. 3 is a plan view of the automatic stopping' device forming a part of the machine, the control switch being shown in its closed position.
Fig. 4r is a vertical sectional View Of the saine with the switch in its open position.
In the above mentioned drawings, l have shown but one modification of the invention which is now deemed preferable, but it is to be understood that changes and modifications may be made within the scope of the appended claims without departing from the spirit of the invention.
Briefly, my invention in its broadest aspect comprises the following` principal parts: first, a base; second, a lap station-` arily mounted thereon.; third, an upper lap non-rotatably mounted above the lower lap and adapted to adjust itself relative to the articles beine` lapped; fourth, a spider or other holding means for the articles to be l.around disposed between the laps; fifth, op erating means for simultaneously reciprd` eating and rotatingv said spider to cause lappii'ig movement between the articles and laps; sixth., automatic means for stopping; the movements of said spider after any predetermined numbcr of lappingl movements; and seventh, means to conveniently position and remove the upper lap.
Referring` more in detail to the figures of the drawing` at lO is shown the base of a lapping` machine on which is centrally mounted a lap l1. As shown in Fig. l, the lap 1l rests upon an annular member 12 which in 'turn rests upon the central upper portion of the base 10 and is non-rotatably held in that position by any suitable means (not shown). The upper surface 12a of lap l1 is very carefully finished to a smooth and perfect plane to which abrasive material is adapted to be supplied.
rocates back and forth it slowly rotates about its own axis. Also, as the movements ot the spider are induced by the cranlrs 58 and 6G and the intermeshing action of Lfears 72 and t3 both the reciprocatory and rotary movement of the spider l0 are positive.
ln order to discontinue the lapping` operation after a predetermined time or after a predetermined number olf lapping' movements have been accomplished, the following device is utilized: On the central vertical driving; shalt 54, a worm 8O is provided which is adapted to mesh with a worm wheel. 81. lVorm wheel 8l is mounted at the inner end ol a horizontal. shaft 82 which cxtends laterally through the base l0 and meses through a bracket member 83 provided on the side of the machine as shown in Fig. l. Mounted in the bracket member 83 is a worm Wheel S5 meshing with a worm 86 formed on the outer end ot the shaft 82. Vorm wheel 85 is mounted to rotate about a central vertical shaft 87 suitably mounted in the bracket member 855. Also mounted to rotate about the` central shaft S7 is a dial plate 88 and a plate 89 carrying a ratchet pawl 90. Preferably the ratchet pawl 90 engages teeth provided on an internal surface oit the gear 85 as shown. in Fig'. 23. By means ot handle 92, the dial plate 8S may be rotated to any given position and, when the lapping' operations are l'iegun, rotation ot the shaft. 82 ritates the `rear wheel 85, this also rotates the plate 89 through the ratchet pawl 90. Plate 89 has a notch 94 cut in its periphery lor a purpose presently to be described. Rotation ot thc handle 92 and the rotation oit this plate S9 thus rotates a notch 9st away from a stationary ng'er 96, and, when a certain number et lapping` movements ha ve taken place, the plate 89 is rotated by means o'l the gear wheel 85 to the position. shown in Fig. 3 so that the linger 96 will drop into the notch 94.
The finger or plunger 96 is spring-pressed `in a direction to torce it into the notch 9e and is at all times pressed toward the plate 89. Mounted on the plunger 96 is a switch member 9i' which is held in engagement with contact members 98 and 99 so long' as the notch 94 is not :in line with the plunger 9G so that the circuit tor the motor operatin?,` the driving' shaft is normallyclosed As soon, however, as the plate 89 is rotated to a position permitting the linger or plunger 96 to enter the notch 84, the switch member 97 is removed trom the contacts 98 and 99 thus opening the motor circuit and stopping further rotation oit the shaft 54; and the spider 40.
The upper surface of dial plate 88 is graduated as shown at 100. These graduations correspond to the number of lapping movements which Will take place before the lapping movements are stopped by movement oit plunger 9G into notch 94 and opening ot the switch 9i'. By iirst manually rotatinggv the dial member 88 by means ot the handle 92, the machine may be set to operate 'tor any predetermined number oi lapping operations after which it will be automatically stopped by opening ot switch 9T.
That l claim is:
l. A lapping machine comprising in combination, a base, a lower lap mounted thereon, an upper lap, means to non-rotatably support said laps in operative position relatively to cach other, a spider adapted to hold a pliy 1ality ot articles disposed between said laps, and positive means to simultaneously rapidly reciprocate and slowly rotate said spider between said laps whereby lapping,` movements between the articles and aps are accomplished,
2. A lapping machine comprising in combination, a hase, a lower lap mounted thereonA an upper lap adapted to rest upon and adjust itself as to parallelism relative to the lower lap, means to non-rotatably support said laps in operative position relatively to each other, a spider adapted to hold a plurality ot articles disposed between said laps, and positive means to simultaneously reciprecate and rotate said spider between said laps whereby lapping movements between. the articles and laps are acconiplisl'ied.
3. il lapping' machine comprising` in coinbination, a base, a lower lag mounted thereon, an upper lap, means to non-rotatably support said laps in operative position relatively to each other, a spider adapted to hold a plurality el? articles disposed between said laps, and geared means operatively connected to said spider to simultaneously reciprocate and rotate said spider between said laps whereby lapping` movements between the articles and laps accomplished, the rotary movement ol" said spider beine' relatively sl. wer than its reciprocatory nievement.
lapping' machine comprisingin combination. .a ba se, a lower lap mounted thereon, an upiier lap, means to non-rotatably support said laps in operative position relativelyv te each other, a spider adapted to hold plurality oit' articles disposed be tween said laps, and driving means comprisine' a plurality or' cranlrsand gears operativ y connected to said spider to simultaneously reciprocate and rotate said spider between said laps whereby lapping movements between said articles and laps are accomplished.
5. l lapping machine comprising in combination, a base, a lower lap mounted thereon, an upper lap adapted to rest upon and adjust itself relative to the articles being lapped, means to non-rotatably support said laps in operative position relative to each other, a spider adapted to hold a plurality ot articles disposed between said laps, and driving means comprising a plurality ot cranks and gears operatively connected to said spider to simultaneously reciprocate and rotate said spider between said laps whereby lapping movements between said laps and articles are accomplished.
A6. A lapping machine comprising in combination, a base, a lower lap mounted thereon, an upper lap, means to non-rotatably support said laps in operative position relatively to each other, a spider adapted to hold a plurality et articles disposed between said laps, and means to operate said spider between said laps whereby said articles pass over the entire lapping surfaces or". said laps, said means comprising a central shaft, a crank thereon, a three armed member operated thereby, cranks engaging bearings at the extremities of said arms, gears eccentrically rotated by said cranks, said gears engaging said spider whereby said spider is positively reciprocated and rotated between said laps.
7. A lapping machine comprising` in combination, a base, a lower lap thereon, an upper lap cooperating therewith, a spider adapted to hold a plurality of articles disposed between said laps, means to move said spider relative to said laps to produce lapping movements on articles mounted in said spider, and means to stop said lapping movements after any predetermined number of movements.
8. A lapping machine comprising in combination, a base, a lower lap thereon, an upper lap adapted to rest upon and adjust itself relative to the articles being lapped, a spider adapted to hold a plurality of articles disposed between said laps, means to move said spider relativel to said laps to produce lapping` movements on articles mounted in said spider, and means to stop said lapping movements after any predetermined number ot movements.
9. A lapping machine comprising in combination, a base, a lower lap thereon, an upper lap cooperating therewith, a spider adapted to hold a plurality et articles dis posed between said laps, means to move said spider relative to said laps to produce rotary and reciprocatory lapping movements on articles mounted in said spider, and means to stop said lapping movements a any predetermined number of moveine lO. A lappingmachine comprising in conibination, a base, a lower lap mounted thereon, an upper lap, means to non-rotatably support said laps in operative position relatively to each other, a spider adapted to hold a plurality of articles disposed between said laps, means to operate said spider between said laps, said means comprising a central shaft, a crank thereon, a three armed meniber operated thereby, cranks engaging bear ings at the extremities of said arms, eccentrically rotated by said cranlrs, said gears engaging said spider whereby said spider is positively reciprocated and rotated. between said laps, and means to stop thc movement of said central shaft after any predetermined number of lapping movements.
ll. A lapping machine comprising in combination, a base, a lower lap thereon, an upper lap cooperating therewith, a spider mounted between said laps, means to move said spider relative to said laps, means permitting movement of said upper lap toward said lower lap, and means to elevate and laterally move said upper lap.
l2. A lapping machine comprising in combination, a base, a. lower lap thereon, an upper lap cooperating therewith, a spider mounted between said laps, means to move said spider relative to said laps, a bracl-:ct rotatably mounted in said base, means coin necting said bracket with said upper lap whereby said upper lap may be moved to ward said lower lap or elevated and removed from operative position.
13. A lapping machine comprising in combination, a base, a lower lap thereon, an upper lap cooperating therewith, a spider mounted between said laps, means to move said spider relative to said laps, a bracket rotatably mounted in said base, means to lock said bracket in operative position, means connecting said bracket with said upper lap whereby said upper lap may be moved toward said lower lap or elevated and removed from operative position.
ln testimony whereof, l hereto atlii; my signature.
BRYANT l-l. BL@ @D
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2438916A (en) * 1945-09-24 1948-04-06 Bell Telephone Labor Inc Work holding nest
US2695479A (en) * 1954-02-24 1954-11-30 Norton Co Lapping machine
US3063206A (en) * 1959-05-05 1962-11-13 Westinghouse Electric Corp Lapping machine
US4205489A (en) * 1976-12-10 1980-06-03 Balabanov Anatoly S Apparatus for finishing workpieces on surface-lapping machines
US4402519A (en) * 1980-07-03 1983-09-06 Meaden Thomas F Tool connector
US4782631A (en) * 1986-02-06 1988-11-08 Nissei Industry Corporation Double-end surface grinding machine
US4856232A (en) * 1987-05-07 1989-08-15 Daisyo Seiki Kabushiki Kaisha Workpiece carrier means for surface grinding machine
US5980366A (en) * 1997-12-08 1999-11-09 Speedfam-Ipec Corporation Methods and apparatus for polishing using an improved plate stabilizer
US6168506B1 (en) * 1998-01-21 2001-01-02 Speedfam-Ipec Corporation Apparatus for polishing using improved plate supports

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2438916A (en) * 1945-09-24 1948-04-06 Bell Telephone Labor Inc Work holding nest
US2695479A (en) * 1954-02-24 1954-11-30 Norton Co Lapping machine
US3063206A (en) * 1959-05-05 1962-11-13 Westinghouse Electric Corp Lapping machine
US4205489A (en) * 1976-12-10 1980-06-03 Balabanov Anatoly S Apparatus for finishing workpieces on surface-lapping machines
US4402519A (en) * 1980-07-03 1983-09-06 Meaden Thomas F Tool connector
US4782631A (en) * 1986-02-06 1988-11-08 Nissei Industry Corporation Double-end surface grinding machine
US4856232A (en) * 1987-05-07 1989-08-15 Daisyo Seiki Kabushiki Kaisha Workpiece carrier means for surface grinding machine
US5980366A (en) * 1997-12-08 1999-11-09 Speedfam-Ipec Corporation Methods and apparatus for polishing using an improved plate stabilizer
US6168506B1 (en) * 1998-01-21 2001-01-02 Speedfam-Ipec Corporation Apparatus for polishing using improved plate supports

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