US10666252B2 - Capacitive sensor - Google Patents

Capacitive sensor Download PDF

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US10666252B2
US10666252B2 US15/509,022 US201515509022A US10666252B2 US 10666252 B2 US10666252 B2 US 10666252B2 US 201515509022 A US201515509022 A US 201515509022A US 10666252 B2 US10666252 B2 US 10666252B2
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Prior art keywords
capacitive sensor
conductive surfaces
electrically conductive
circuit carrier
rigid
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US20170257094A1 (en
Inventor
Dietrich Schupp
Joachim Frangen
Volker Eisenhardt
Norbert Wenzel
Volker Hartmann
Frank Gaesslein
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/945Proximity switches
    • H03K17/955Proximity switches using a capacitive detector
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16PSAFETY DEVICES IN GENERAL; SAFETY DEVICES FOR PRESSES
    • F16P3/00Safety devices acting in conjunction with the control or operation of a machine; Control arrangements requiring the simultaneous use of two or more parts of the body
    • F16P3/12Safety devices acting in conjunction with the control or operation of a machine; Control arrangements requiring the simultaneous use of two or more parts of the body with means, e.g. feelers, which in case of the presence of a body part of a person in or near the danger zone influence the control or operation of the machine
    • F16P3/14Safety devices acting in conjunction with the control or operation of a machine; Control arrangements requiring the simultaneous use of two or more parts of the body with means, e.g. feelers, which in case of the presence of a body part of a person in or near the danger zone influence the control or operation of the machine the means being photocells or other devices sensitive without mechanical contact
    • F16P3/148Safety devices acting in conjunction with the control or operation of a machine; Control arrangements requiring the simultaneous use of two or more parts of the body with means, e.g. feelers, which in case of the presence of a body part of a person in or near the danger zone influence the control or operation of the machine the means being photocells or other devices sensitive without mechanical contact using capacitive technology
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V3/00Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
    • G01V3/08Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V3/00Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
    • G01V3/08Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
    • G01V3/088Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices operating with electric fields

Definitions

  • the present invention relates to a capacitive sensor for detecting at a surface that an object is approaching.
  • German Patent Application Nos. DE 10 2009 029 021 A1 and DE 10 2010 064 328 A1 describe a sensor system and an evaluation method for surroundings monitoring at a mechanical component including at least one capacitive sensor element, the capacitive sensor element being mountable on the surface of machines or machine parts.
  • the capacitive sensor element is made up of a layered structure of flexible electrically conductive and electrically insulating layers. In this case, multiple adjacently situated, capacitive sensor elements form a sensor skin, which may be pulled over a machine part to be protected, in the manner of a jacket.
  • An example capacitive sensor according to the present invention has a stable configuration. This has the advantage that large and rigid capacitive sensors are thereby able to be manufactured, which are mountable quickly and reliably on machine parts, in particular on a mechatronic system or a handling device, in particular on a linear axis, on a robot, on a transport system, or on a gripper of a robot. Furthermore, the capacitive sensor according to the present invention has the advantage that once installed, capacitive sensors are able to be easily exchanged. In addition, simple module tests in the disassembled state are possible.
  • Rigidity is a variable which indicates how well a body may resist a deformation caused by an external influence.
  • Flexural rigidity is defined in this case as the product of the geometrical moment of inertia I F and the elasticity modulus E. Flexural rigidity therefore depends both on the cross-sectional shape (shape of the component) and on the material itself (elasticity modulus).
  • Torsional rigidity is defined as the product of the torsional moment of inertia I T and the material shear modulus G. Therefore, torsional rigidity is also component- and material-dependent.
  • Rigidity is alternatively defined by way of the mean elasticity modulus and the thickness. Given a total thickness of the flexurally rigid and/or torsionally rigid material of 2 mm, polyethylene having an elasticity modulus of 200 MPa already has flexural rigidity or torsional rigidity, while polycarbonate having an elasticity modulus of 2400 MPa is likewise flexurally rigid and/or torsionally rigid. Steel having an elasticity modulus of 210000 Mpa is likewise flexurally rigid and/or torsionally rigid when the steel has a thickness of 2 mm.
  • the capacitive sensor is flexurally rigid and/or torsionally rigid when the product of thickness and elasticity modulus of at least one element or a composite of at least two individual elements, in particular the circuit carrier and/or the spacer element and/or the carrier and/or the encapsulated capacitive sensor, is greater than 200 MPa mm, preferably greater than 1800 MPa mm, in particular greater than 4000 MPa mm.
  • the capacitive sensor includes at least two electrically conductive surfaces, which adjoin one another and are insulated with respect to one another and form an electrical capacitor in such a way that the value of the capacitance changes when an object is approaching.
  • an electrical field forms, in the form of electrical field lines between the electrically conductive surfaces in the space between the electrically conductive surfaces.
  • this electrical field is disturbed and the spatial distribution of the electrical field lines changes, so that, in the end, the value of the capacitance measurably changes when an object is approaching.
  • the circuit carrier, in particular the circuit board, of the capacitive sensor is itself already designed to be flexurally rigid and/or torsionally rigid, so that the entire capacitive sensor is flexurally rigid and/or torsionally rigid.
  • the flexurally rigid and/or torsionally rigid design of the circuit carrier has the advantage that this contributes to a cost-effective capacitive sensor, since the circuit carrier is a mass-produced product and, therefore, is a cost-effective component.
  • the spacer element of the capacitive sensor is itself already designed to be flexurally rigid and/or torsionally rigid, so that the entire capacitive sensor is flexurally rigid and/or torsionally rigid.
  • the flexurally rigid and/or torsionally rigid design of the spacer element between the shielding electrode and the electrically conductive surfaces of the capacitors has the advantage that, as a result, the flexural rigidity and/or torsional rigidity is/are able to be cost-effectively manufactured. This is due to the fact that the remaining requirements of the spacer element are low and, therefore, a cost-effective material may be used.
  • the use of a thermoplastic plastic or a duroplastic plastic is particularly advantageous.
  • the spacer element preferably has a dielectric constant of less than 1.5, preferably less than 1.1, in particular less than 1.01.
  • the spacer element is preferably made up of foamed plastic and/or of webs and/or of foam rubber.
  • the specific embodiment is particularly advantageous which is a non-flexurally rigid and/or torsionally rigid circuit board including a spacer element which itself is likewise non-flexurally rigid and/or torsionally rigid, for example, a foam rubber, the composite made up of the circuit board and the spacer element being flexurally rigid and/or torsionally rigid due to the connection of this non-flexurally rigid and/or torsionally rigid circuit board to the non-flexurally rigid and/or torsionally rigid spacer element, for example by bonding.
  • the carrier of the capacitive sensor is itself already designed to be flexurally rigid and/or torsionally rigid, so that the entire capacitive sensor is flexurally rigid and/or torsionally rigid. Since established manufacturing methods may be used for manufacturing the carrier, this contributes to the ability of the capacitive sensor to be cost-effectively manufactured.
  • the capacitive sensor is designed to be flexurally rigid and/or torsionally rigid by encapsulating the capacitive sensor and/or filling the capacitive sensor with foam.
  • the encapsulation or the foam-filling additionally contributes to the capacitive sensor being particularly robust with respect to environmental influences, such as moisture.
  • At least two of the electrically conductive surfaces are slanted with respect to one another at an angle between 0° and 135°, preferably at an angle between 45° and 90°. This contributes to the ability to also monitor corners of machine parts.
  • the capacitive sensor includes at least three electrically conductive surfaces, preferably four electrically conductive surfaces, which are interconnected in such a way that the electrically conductive surfaces form at least two electrical capacitors, the electrically conductive surfaces being situated in such a way that detection areas, which are formed by electrical field lines, of the two electrical capacitors at least partially overlap.
  • the capacitive sensor according to the present invention is used in robots, in particular industrial robots, since an operationally safe interaction between humans and a moving machine part of the robot in the same working space at the same time is possible as a result. This is made possible, on the one hand, by way of the capacitive sensor essentially covering the entire surface area of the movable machine parts of the robot and, on the other hand, by detecting an approach by an object very early without the need for a touching contact.
  • FIG. 1 shows the configuration of a sensor element of a capacitive sensor in one first exemplary embodiment.
  • FIG. 2 shows the configuration of a sensor element of a capacitive sensor in one second exemplary embodiment.
  • FIG. 3 shows the configuration of a sensor element of a capacitive sensor in one third exemplary embodiment.
  • FIG. 4 shows a general layout drawing of a sensor element for illustrating the electrical contacting.
  • FIG. 5 shows the configuration of a sensor segment of a capacitive sensor.
  • FIG. 6 shows one machine part including a capacitive sensor in one first exemplary embodiment.
  • FIG. 7 shows one machine part including a capacitive sensor in one second exemplary embodiment.
  • FIG. 8 shows one machine part including a capacitive sensor in one third exemplary embodiment.
  • FIG. 9 shows one machine part including a capacitive sensor in one fourth exemplary embodiment.
  • FIG. 10 shows a sensor element and an object.
  • a capacitive sensor for detecting at a surface that an object is approaching is described below, the capacitive sensor being designed to be flexurally rigid and/or torsionally rigid.
  • the capacitive sensor preferably includes a circuit carrier and/or a spacer element and/or a carrier.
  • the circuit carrier is designed to be flexurally rigid and/or torsionally rigid and/or the spacer element is designed to be flexurally rigid and/or torsionally rigid and/or the carrier is designed to be flexurally rigid and/or torsionally rigid.
  • the circuit carrier is preferably in the form of a circuit board and is used for making electrical contact with the electrically conductive surfaces of the capacitive sensor.
  • the spacer element is situated between the electrically conductive surfaces and the circuit carrier.
  • the carrier is designed for connecting the capacitive sensor to a machine part, in particular to a machine part of an industrial robot.
  • FIG. 1 shows the configuration of a sensor element 10 of a capacitive sensor in one first exemplary embodiment.
  • Sensor element 10 is made up of a layered structure including a circuit carrier 14 .
  • the circuit carrier 14 is designed as a flexurally rigid and torsionally rigid circuit board.
  • circuit carrier 14 is designed to be flexible, as a foil.
  • the thickness of the circuit carrier is between 30 ⁇ m, as a foil, and one to several millimeters, preferably 2 mm, as a flexurally rigid and torsionally rigid circuit board.
  • the flexurally rigid and torsionally rigid circuit board preferably has a thickness of 500 ⁇ m.
  • strip conductors 22 are fixedly situated on the underside of circuit carrier 14 , strip conductors 22 electrically connecting electrically conductive surfaces 12 , which are located on the top side of sensor element 10 , to electrical components (not shown) of evaluation unit 24 .
  • An electrically conductive shielding electrode 20 is situated on the top side of circuit carrier 14 . Shielding electrode 20 faces electrically conductive surfaces 12 . Shielding electrode 20 is used for the electromagnetic shielding of evaluation unit 24 situated under circuit carrier 14 .
  • a spacer element 18 is situated on the top of shielding electrode 20 . In this exemplary embodiment, spacer element 18 is made up of a non-conductive, planar material (plate material) which has a low dielectric constant.
  • Spacer element 18 is preferably made up of foamed organic material and/or foamed inorganic material.
  • spacer element 18 is designed to be flexible.
  • the spacer element is designed to be flexurally rigid and/or torsionally rigid.
  • Spacer element 18 ensures the predefined distance between electrically conductive surfaces 12 and shielding electrode 20 .
  • a further circuit carrier 16 is situated on the top of spacer element 18 .
  • further circuit carrier 16 is designed as a circuit board or as a foil.
  • Electrically conductive surfaces 12 which are marked as A 1 and B 1 , are installed on further circuit carrier 16 .
  • Electrically conductive surfaces 12 are made up of conductive material, in particular of copper.
  • electrically conductive surfaces 12 are designed as solid surfaces made up of conductive material, in particular copper, without the use of further circuit carrier 16 .
  • electrically conductive surfaces 12 are installed directly on the top side of spacer element 18 .
  • the two electrically conductive surfaces 12 labeled as A 1 and B 1 form an electrical capacitor, an electrical field forming between the two electrically conductive surfaces 12 after the electrical charging of the capacitor. If an object now penetrates the electrical field, the capacitance measurably changes, so that the approach by an object is detected.
  • sensor element 10 includes two further electrically conductive surfaces 12 (not shown) which are labeled with A 2 and B 2 .
  • the four electrically conductive surfaces 12 are situated in such a way that detection areas, which are formed by electrical field lines, of the two electrical capacitors at least partially overlap. Sensor element 10 is therefore designed to be redundant, having two channels.
  • FIG. 2 shows the configuration of a sensor element 10 of a capacitive sensor in one second exemplary embodiment.
  • the second exemplary embodiment is identical to the first exemplary embodiment also in terms of the variants described for the first exemplary embodiment.
  • spacer element 18 has a different design.
  • Sensor element 10 of the second exemplary embodiment is likewise made up of two electrically conductive surfaces 12 which are labeled with A 1 and B 1 and form an electrical capacitor. Electrically conductive surfaces 12 are connected to spacer element 18 either via a further circuit carrier 16 or directly.
  • Sensor element 10 further includes a circuit carrier 14 including strip conductors 22 , an evaluation unit 24 , and a shielding electrode 20 .
  • spacer element 18 is made up of a grid of non-conductive material, so that the grid has no interfering effect on the active principle of the capacitive sensor.
  • spacer element 18 is likewise designed to be flexible.
  • the spacer element is designed to be flexurally rigid and/or torsionally rigid.
  • the mode of operation of sensor element 10 in the second exemplary embodiment is identical to the mode of operation of sensor element 10 in the first exemplary embodiment.
  • sensor element 10 includes two further electrically conductive surfaces (not shown) which are labeled with A 2 and B 2 .
  • the four electrically conductive surfaces 12 are situated in such a way that detection areas, which are formed by electrical field lines, of the two electrical capacitors at least partially overlap, electrically conductive surfaces 12 labeled with A 1 and B 1 , and those labeled with A 2 and B 2 each forming a capacitor and, therefore, a detection area.
  • Sensor element 10 in the second exemplary embodiment is therefore likewise designed to be redundant, having two channels, since the spatial areas detected by the capacitors overlap.
  • FIG. 3 shows the configuration of a sensor element 10 of a capacitive sensor in one third exemplary embodiment.
  • the third exemplary embodiment is based on the first exemplary embodiment and the second exemplary embodiment and is identical thereto except for the use of an encapsulation material 26 .
  • the layered structure of the sensor in particular the electrically conductive layers 12 and/or the circuit carrier and/or the further circuit carrier and/or the spacer element and/or the shielding electrodes 20 and/or the strip conductors on the circuit carrier, are/is rigidly encapsulated using a curing encapsulation material 26 , so that the capacitive sensor is flexurally rigid and/or torsionally rigid due to the encapsulation material 26 .
  • a gel is used as an alternative to the encapsulation material 26 .
  • a foam in particular a curing foam, is used, so that the layered structure of the sensor is foamed-filled.
  • the layered structure of the sensor in particular the electrically conductive surfaces 12 and/or the circuit carrier and/or the further circuit carrier and/or the spacer element and/or shielding electrodes 20 and/or the strip conductors on the circuit carrier, are/is installed in a housing, alternatively or in addition to encapsulation material 26 .
  • Sensor element 10 of the third exemplary embodiment likewise includes four electrically conductive surfaces 12 , which are labeled with A 1 , A 2 , B 1 and B 2 , electrically conductive surfaces 12 labeled with A 1 and B 1 , and those labeled with A 2 and B 2 each forming a capacitor and, therefore, a detection area.
  • Shielding electrodes 20 are situated underneath these electrically conductive surfaces 12 .
  • Encapsulation material 26 is preferably made up of foam rubber and/or foamed plastic and/or polyurethane (PU) and/or polyethylene (PE) and/or polypropylene (PP).
  • FIG. 4 shows a general layout of a sensor element 10 for illustrating the electrical contacting according to the first exemplary embodiment.
  • Electrically conductive surface 12 which is shown by way of example labeled with A 1 and used as an electrode, forms a capacitor together with a further electrically conductive surface (not shown), and is connected to the strip conductors 22 situated underneath circuit carrier 14 via a flexible, electrical conductor 28 through a hole 30 in spacer 18 and/or through a hole 30 in circuit carrier 14 .
  • Electrically conductive surface 12 is therefore electrically connected to evaluation unit 24 .
  • the electrical connection between the electrically conductive surface 12 and strip conductors 22 is established with the aid of rigid, electrically conductive elements, in particular with the aid of pins, and/or with the aid of conductive plastics, the conductive plastics preferably being applied using a jet process.
  • FIG. 5 shows the configuration of a sensor segment 32 of a capacitive sensor made up of multiple sensor elements 10 which are connected electrically via electrical connections 34 and/or mechanically to one another to form a sensor segment 32 .
  • Sensor segment 32 includes at least one electrical plug connection 36 , preferably two electrical plug connections 36 , which make it possible to electrically and/or mechanically connect sensor segment 32 to further sensor segments 32 .
  • FIG. 6 shows one machine part 40 including a capacitive sensor in one first exemplary embodiment.
  • sensor segments 32 or sensor elements according to the preceding exemplary embodiments are mechanically connected, with the aid of a carrier 42 , to a capacitive sensor in such a way that sensor segments 32 or the sensor elements are located on the outside with respect to carrier 42 and completely surround machine part 40 .
  • Sensor segments 32 or the sensor elements are mechanically fixedly connected to the carrier, in particular by bonding and/or screwing and/or clamping.
  • Individual carriers 42 are connected to one another via connectors 44 , in particular corner connectors.
  • Carriers 42 are preferably made up of a solid material, so that carriers 42 are designed to be flexurally rigid and/or torsionally rigid. Carriers 42 are mechanically connected to machine part 40 via a form-locked and/or force-fit connection. Alternatively or additionally, the carriers are fixedly connected to machine part 40 with the aid of connection techniques, in particular via screwing and/or clamping and/or bonding and/or welding.
  • sensor segments 32 or the sensor elements are provided with a protective element 46 toward the outside.
  • Protective element 46 is made up of a material which is non-conductive and/or has a low dielectric constant and/or a small thickness and/or a constant dielectric constant under changing environmental conditions, in particular temperature and moisture, and during aging of the material.
  • Protective element 46 is preferably made up of foamed plastic, in particular polyurethane (PU) and/or polyethylene (PE) and/or polypropylene (PP), preferably having a thickness of 2 mm to 10 mm, preferably 4 mm.
  • FIG. 7 shows one machine part 40 including a capacitive sensor in one second exemplary embodiment.
  • sensor segments 32 or sensor elements according to the preceding exemplary embodiments are mechanically connected, with the aid of a carrier 42 , to a capacitive sensor in such a way that sensor segments 32 or the sensor elements are located on the inside with respect to carrier 42 and completely surround machine part 40 .
  • Sensor segments 32 or the sensor elements are mechanically fixedly connected to the carrier, in particular by bonding and/or screwing and/or clamping.
  • Individual carriers 42 are connected to one another via connectors 44 , in particular corner connectors.
  • Carriers 42 are mechanically connected to machine part 40 via a form-locked and/or force-fit connection.
  • carrier 42 is made up of a material which is non-conductive and/or has a low dielectric constant and/or a small thickness and/or a steady dielectric constant under changing environmental conditions, in particular temperature and moisture, and during aging of the material.
  • Carriers 42 are preferably made up of a solid material, so that carriers 42 are designed to be flexurally rigid and/or torsionally rigid.
  • carriers 42 are made up of polycarbonate or polypropylene, preferably having a thickness between 1 mm and 10 mm, preferably 2 mm, particularly preferably 3 mm.
  • carriers 42 and/or sensor segments 32 and/or the sensor elements in the preceding exemplary embodiments are flat.
  • carriers 42 and/or sensor segments 32 and/or the sensor elements in the preceding exemplary embodiments form surfaces having any shape.
  • the flexural rigidity and/or torsional rigidity of the capacitive sensor are/is achieved with the aid of a flexurally rigid and/or torsionally rigid carrier and/or with the aid of a flexurally rigid and/or torsionally rigid circuit carrier and/or with the aid of a flexurally rigid and/or torsionally rigid spacer element and/or a combination of these elements.
  • FIG. 8 shows a machine part 40 including a capacitive sensor in a third exemplary embodiment, sensor segment 32 being designed according to FIG. 3 , in particular being encapsulated using an encapsulation material.
  • Sensor segments 32 or sensor elements are mechanically connected to machine part 40 via a form-locked and/or force-fit connection.
  • sensor segments 32 or sensor elements are fixedly connected to machine part 40 with the aid of connection techniques, in particular via screwing and/or clamping and/or bonding and/or welding.
  • sensor segments 32 or the sensor elements are provided with a protective element 46 toward the outside.
  • Protective element 46 is made up of a material which is non-conductive and/or has a low dielectric constant and/or a small thickness and/or a steady dielectric constant under changing environmental conditions, in particular temperature and moisture, and during aging of the material.
  • the electrically conductive surfaces designed as electrodes are preferably quadrangular. Alternatively or additionally, the electrically conductive surfaces are designed as triangles. In one further variant, the electrically conductive surfaces are round and/or polygonal.
  • the sensor elements have a 2-channel design and include at least three, preferably four, electrically conductive surfaces, which are situated and interconnected in such a way that the electrical field lines of the at least two capacitors formed by the interconnection of the electrically conductive surfaces cover a shared spatial area.
  • FIG. 9 shows one machine part 40 including a capacitive sensor in one fourth exemplary embodiment.
  • electrically conductive surfaces 12 (electrodes) labeled with A 1 , B 1 , A 2 and B 2 are not situated in one plane, but rather two electrodes are situated on a first plane and the two further electrodes are situated on a second plane which is slanted with respect to the first plane, preferably at an angle ⁇ between 0° and 135°, in particular between 45° and 90°.
  • Electrodes A 1 /B 1 and A 2 /B 2 preferably form a capacitor, so that the spatial area of edge 38 of machine part 40 is monitored on two channels for an approach by an object.
  • electrically conductive surfaces 12 are curved surfaces and/or electrically conductive surfaces 12 are mounted on curved surfaces of machine part 40 .
  • FIG. 10 shows a sensor element 10 and an object 50 .
  • Sensor element 10 includes four electrically conductive surfaces 12 labeled with A 1 , A 2 , B 1 and B 2 .
  • electrically conductive surfaces 12 labeled with A 1 and B 1 form a first capacitor.
  • an electrical field including field lines 48 forms between these electrically conductive surfaces 12 .
  • electrically conductive surfaces 12 labeled with A 2 and B 2 form a second capacitor.
  • an electrical field including field lines 48 likewise forms between these electrically conductive surfaces 12 .
  • the electrical field of the two capacitors is formed in a temporally alternating manner. In one variant, it is provided that the electrical field of the two capacitors is formed at the same point in time.
  • the capacitance between the two electrically conductive surfaces 12 changes, so that the approach by object 50 is detected.
  • the detection area of the sensor is approximately as large as the distance between the two electrodes. The detection area is preferably between 1 mm and 300 mm.
  • the capacitive sensor in a robot by way of example, of how a sensor element detects that an object is approaching, in particular a human body part, on the basis of the change in the value of the capacitance of a capacitor, the capacitor being formed by the two electrically conductive surfaces and the open field space, as a dielectric.
  • the capacitances to be monitored are measured and are stored one time as start values C ij0 .
  • the capacitances C ij to be monitored are measured cyclically in a constant time period, typically 100 Hz-1000 Hz. The information regarding an approach may be derived from an evaluation of these data.
  • uniform data may be used for a multitude of sensor elements, whereby an individual specification of the limiting values for individual sensor elements may also be provided in special cases.
  • the dynamic approach detection effectuates a large operating distance at high speeds and a small operating distance at low speeds. This supports the physical laws that longer braking distances are required at high speeds. Therefore, a collision-free operation of the robot is supported by the dynamic function.
  • the static approach detection also prevents a pinching of body parts at low speeds, since a reliable machine stoppage always takes place when the minimum distance established by T stat is fallen below.
  • Circuit parts of the evaluation units of the sensor elements convert the measured values of the capacitances into electrical signals and transmit these to a central control unit which is not shown in the figures.
  • the evaluation units preferably carry out a cyclical self-diagnosis for checking all safety-relevant functions of the sensor element.
  • All the evaluation units of the sensor elements are connected to the central control unit via electrical lines for energy and data transmission.
  • a large number of sensor elements or sensor segments adjoining one another in a row preferably form a planar capacitive sensor which covers the entire outer surface of a machine part, in particular a robot, particularly preferably a robotic arm as the machine part, in such a way that the spatial surroundings of the machine part may be monitored with respect to the approach by an object.
  • the described capacitive sensor or the sensor segments or the sensor elements may be utilized in various areas of application, for example, in robots, in particular industrial robots or service robots, and mobile platforms, vehicles, in particular unmanned vehicles, in medical technology and/or in the entertainment industry.

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DE102014218535 2014-09-16
DE102014218535.1A DE102014218535A1 (de) 2014-09-16 2014-09-16 Kapazitiver Sensor
DE102014218535.1 2014-09-16
PCT/EP2015/065927 WO2016041653A1 (de) 2014-09-16 2015-07-13 Kapazitiver sensor

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US11635803B2 (en) 2021-03-03 2023-04-25 Guardian Glass, LLC Industrial safety systems and/or methods for creating and passively detecting changes in electrical fields

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DE102014218535A1 (de) * 2014-09-16 2016-03-17 Robert Bosch Gmbh Kapazitiver Sensor
ITUA20163522A1 (it) * 2016-05-17 2017-11-17 Comau Spa "Copertura sensorizzata per un dispositivo industriale"
ITUA20163520A1 (it) * 2016-05-17 2017-11-17 Comau Spa "Dispositivo automatizzato con una struttura mobile, particolarmente un robot"
FR3070022B1 (fr) * 2017-08-10 2020-11-06 Fogale Nanotech Element d’habillage capacitif pour robot, robot muni d’un tel element d’habillage
JP7151072B2 (ja) * 2017-11-15 2022-10-12 セイコーエプソン株式会社 ロボット
FR3084002B1 (fr) * 2018-07-18 2020-07-10 Fogale Nanotech Appareil muni d'une detection capacitive et de ligne(s) electrique(s)
US10769896B1 (en) * 2019-05-01 2020-09-08 Capital One Services, Llc Counter-fraud measures for an ATM device
WO2021022628A1 (zh) * 2019-08-02 2021-02-11 深圳市越疆科技有限公司 机械设备的壳体组件和机器人
CN111037606B (zh) * 2019-12-27 2022-03-11 日照市越疆智能科技有限公司 一种机器人展示方法、装置及电子设备
DE102021207867A1 (de) 2021-07-22 2023-01-26 Robert Bosch Gesellschaft mit beschränkter Haftung Kapazitiver Sensor und Verfahren zur flächigen Erkennung einer Annäherung

Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238502A (ja) 1987-03-27 1988-10-04 Yokohama Rubber Co Ltd:The 近接覚・触覚センサ
US5610528A (en) * 1995-06-28 1997-03-11 International Business Machines Corporation Capacitive bend sensor
US20060097734A1 (en) * 2002-09-06 2006-05-11 Nanotec Solution Proximity detector comprising capacitive sensor
US20070248799A1 (en) * 2006-02-10 2007-10-25 Deangelis Alfred R Flexible capacitive sensor
JP2008004465A (ja) 2006-06-26 2008-01-10 Fujikura Ltd 静電容量式スイッチ
US7359286B2 (en) * 2006-05-03 2008-04-15 Esaote S.P.A. Multi-level capacitive ultrasonic transducer
US20080211519A1 (en) * 2007-02-20 2008-09-04 Omron Corporation Capacitance sensor
US20100097078A1 (en) * 2008-10-22 2010-04-22 Harald Philipp Noise Handling in Capacitive Touch Sensors
US7705611B2 (en) * 2007-01-31 2010-04-27 Kabushiki Kaisha Toshiba Sensor device, and portable communication terminal and electronic device using the sensor device
JP2010237144A (ja) 2009-03-31 2010-10-21 Fujikura Ltd 車両用障害物検出装置および歩行者保護用エアバッグ展開制御装置
JP2010257181A (ja) 2009-04-24 2010-11-11 Panasonic Corp 位置検出装置
US20100289503A1 (en) * 2009-05-12 2010-11-18 Synaptics Incorporated Extended proximity sensor device with electrostatic discharge protection
US7894643B2 (en) * 2005-10-18 2011-02-22 Authentec, Inc. Finger sensor including flexible circuit and associated methods
DE102009029021A1 (de) * 2009-08-31 2011-03-03 Robert Bosch Gmbh Sensorsystem zur Umfeldüberwachung an einem mechanischen Bauteil und ein Verfahren zur Ansteuerung und Auswertung des Sensorsystems
US20110148435A1 (en) * 2009-12-18 2011-06-23 Adam Schwartz Transcapacitive sensor devices with ohmic seams
US20110184558A1 (en) * 2008-08-27 2011-07-28 Kuka Laboratories Gmbh Robot And Method For Controlling A Robot
JP2011248629A (ja) 2010-05-27 2011-12-08 Meihan Shinku Kogyo Kk 透明導電性基材
DE102010064328A1 (de) * 2010-12-29 2012-07-05 Robert Bosch Gmbh Sensorsystem zur Umfeldüberwachung an einem mechanischen Bauteil und Verfahren zur Ansteuerung und Auswertung des Sensorsystems
US20130024169A1 (en) * 2006-01-10 2013-01-24 Guardian Industries Corp. Moisture sensor and/or defogger with bayesian improvements, and related methods
US20130019618A1 (en) * 2006-01-10 2013-01-24 Guardian Industries Corp. Multi-mode moisture sensor and/or defogger, and related methods
US20130075381A1 (en) * 2010-03-26 2013-03-28 Iee International Electronics & Engineering S.A. Occupant sensing and heating textile
US20130093500A1 (en) * 2010-04-14 2013-04-18 Frederick Johannes Bruwer Pressure dependent capacitive sensing circuit switch construction
US20130100053A1 (en) * 2011-10-20 2013-04-25 Samsung Electronics Co., Ltd. Flexible display device
US20130106702A1 (en) * 2011-10-31 2013-05-02 Yi-Ta Chen Proximity sensing device with keyboard function
US20140001888A1 (en) * 2012-06-29 2014-01-02 Robert Bosch Gmbh method for operating a sensor system and sensor system
US20140218057A1 (en) * 2013-02-06 2014-08-07 Nokia Corporation Apparatus Comprising a flexible Substrate and a Component Supported by the Flexible Substrate
US20140238152A1 (en) * 2013-02-27 2014-08-28 Synaptics Incorporated Device and method for localized force sensing
US20150242675A1 (en) * 2012-05-18 2015-08-27 Apple Inc. Capacitive Sensor Packaging
DE102014218535A1 (de) * 2014-09-16 2016-03-17 Robert Bosch Gmbh Kapazitiver Sensor
US9815343B1 (en) * 2014-06-06 2017-11-14 Iowa State University Research Foundation, Inc. Tire sensing method for enhanced safety and controllability of vehicles
US20180088633A1 (en) * 2016-09-28 2018-03-29 Microsoft Technology Licensing, Llc Opening state detection of a foldable device using self-capacitance
US9958532B2 (en) * 2011-09-23 2018-05-01 Microchip Technology Germany Ii Gmbh & Co. Kg Electrode configuration for position detection and method for position detection

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1525016A (en) * 1975-09-23 1978-09-20 Sefton P Electric touch or proximity switches
JP2007098672A (ja) * 2005-09-30 2007-04-19 Kaneka Corp 片面金属張積層板
US7784366B2 (en) * 2008-07-29 2010-08-31 Motorola, Inc. Single sided capacitive force sensor for electronic devices
US9335868B2 (en) * 2008-07-31 2016-05-10 Apple Inc. Capacitive sensor behind black mask
US8648832B2 (en) * 2008-09-25 2014-02-11 Stoneridge Control Devices, Inc. Touch sensor system and method
WO2013058708A1 (en) * 2011-10-18 2013-04-25 Fischer Technology Pte. Ltd. A method of moulding

Patent Citations (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63238502A (ja) 1987-03-27 1988-10-04 Yokohama Rubber Co Ltd:The 近接覚・触覚センサ
US5610528A (en) * 1995-06-28 1997-03-11 International Business Machines Corporation Capacitive bend sensor
US20060097734A1 (en) * 2002-09-06 2006-05-11 Nanotec Solution Proximity detector comprising capacitive sensor
US7894643B2 (en) * 2005-10-18 2011-02-22 Authentec, Inc. Finger sensor including flexible circuit and associated methods
US20130024169A1 (en) * 2006-01-10 2013-01-24 Guardian Industries Corp. Moisture sensor and/or defogger with bayesian improvements, and related methods
US20130019618A1 (en) * 2006-01-10 2013-01-24 Guardian Industries Corp. Multi-mode moisture sensor and/or defogger, and related methods
US9371032B2 (en) * 2006-01-10 2016-06-21 Guardian Industries Corp. Moisture sensor and/or defogger with Bayesian improvements, and related methods
US7578195B2 (en) * 2006-02-10 2009-08-25 Milliken & Company Capacitive sensor
US20080127739A1 (en) * 2006-02-10 2008-06-05 Deangelis Alfred R Capacitive sensor
US20070248799A1 (en) * 2006-02-10 2007-10-25 Deangelis Alfred R Flexible capacitive sensor
US7359286B2 (en) * 2006-05-03 2008-04-15 Esaote S.P.A. Multi-level capacitive ultrasonic transducer
JP2008004465A (ja) 2006-06-26 2008-01-10 Fujikura Ltd 静電容量式スイッチ
US7705611B2 (en) * 2007-01-31 2010-04-27 Kabushiki Kaisha Toshiba Sensor device, and portable communication terminal and electronic device using the sensor device
US20080211519A1 (en) * 2007-02-20 2008-09-04 Omron Corporation Capacitance sensor
US20110184558A1 (en) * 2008-08-27 2011-07-28 Kuka Laboratories Gmbh Robot And Method For Controlling A Robot
US20100097078A1 (en) * 2008-10-22 2010-04-22 Harald Philipp Noise Handling in Capacitive Touch Sensors
JP2010237144A (ja) 2009-03-31 2010-10-21 Fujikura Ltd 車両用障害物検出装置および歩行者保護用エアバッグ展開制御装置
JP2010257181A (ja) 2009-04-24 2010-11-11 Panasonic Corp 位置検出装置
US8232810B2 (en) * 2009-05-12 2012-07-31 Synaptics Incorporated Extended proximity sensor device with electrostatic discharge protection
US20100289503A1 (en) * 2009-05-12 2010-11-18 Synaptics Incorporated Extended proximity sensor device with electrostatic discharge protection
US20110050256A1 (en) * 2009-08-31 2011-03-03 Joachim Frangen Sensor system for monitoring surroundings on a mechanical component and a method for activating and evaluating the sensor system
US8653837B2 (en) * 2009-08-31 2014-02-18 Robert Bosch Gmbh Sensor system for monitoring surroundings on a mechanical component and a method for activating and evaluating the sensor system
DE102009029021A1 (de) * 2009-08-31 2011-03-03 Robert Bosch Gmbh Sensorsystem zur Umfeldüberwachung an einem mechanischen Bauteil und ein Verfahren zur Ansteuerung und Auswertung des Sensorsystems
US20110148435A1 (en) * 2009-12-18 2011-06-23 Adam Schwartz Transcapacitive sensor devices with ohmic seams
US20130075381A1 (en) * 2010-03-26 2013-03-28 Iee International Electronics & Engineering S.A. Occupant sensing and heating textile
US20130093500A1 (en) * 2010-04-14 2013-04-18 Frederick Johannes Bruwer Pressure dependent capacitive sensing circuit switch construction
JP2011248629A (ja) 2010-05-27 2011-12-08 Meihan Shinku Kogyo Kk 透明導電性基材
DE102010064328A1 (de) * 2010-12-29 2012-07-05 Robert Bosch Gmbh Sensorsystem zur Umfeldüberwachung an einem mechanischen Bauteil und Verfahren zur Ansteuerung und Auswertung des Sensorsystems
US20130342224A1 (en) * 2010-12-29 2013-12-26 Joachim Frangen Sensor system for monitoring surroundings on a mechanical component, and method for actuating and evaluating the sensor system
US9513321B2 (en) * 2010-12-29 2016-12-06 Robert Bosch Gmbh Sensor system for monitoring surroundings on a mechanical component, and method for actuating and evaluating the sensor system
US9958532B2 (en) * 2011-09-23 2018-05-01 Microchip Technology Germany Ii Gmbh & Co. Kg Electrode configuration for position detection and method for position detection
US20130100053A1 (en) * 2011-10-20 2013-04-25 Samsung Electronics Co., Ltd. Flexible display device
US20130106702A1 (en) * 2011-10-31 2013-05-02 Yi-Ta Chen Proximity sensing device with keyboard function
US20150242675A1 (en) * 2012-05-18 2015-08-27 Apple Inc. Capacitive Sensor Packaging
US9135495B1 (en) * 2012-05-18 2015-09-15 Apple Inc. Capacitive sensor packaging
US20140001888A1 (en) * 2012-06-29 2014-01-02 Robert Bosch Gmbh method for operating a sensor system and sensor system
US9559515B2 (en) * 2012-06-29 2017-01-31 Robert Bosch Gmbh Method for switching a sensor system between modes and switchable sensor system
US20140218057A1 (en) * 2013-02-06 2014-08-07 Nokia Corporation Apparatus Comprising a flexible Substrate and a Component Supported by the Flexible Substrate
US9366708B2 (en) * 2013-02-06 2016-06-14 Nokia Technologies Oy Apparatus comprising a flexible substrate and a component supported by the flexible substrate
US9075095B2 (en) * 2013-02-27 2015-07-07 Synaptics Incorporated Device and method for localized force sensing
US20140238152A1 (en) * 2013-02-27 2014-08-28 Synaptics Incorporated Device and method for localized force sensing
US9815343B1 (en) * 2014-06-06 2017-11-14 Iowa State University Research Foundation, Inc. Tire sensing method for enhanced safety and controllability of vehicles
WO2016041653A1 (de) * 2014-09-16 2016-03-24 Robert Bosch Gmbh Kapazitiver sensor
DE102014218535A1 (de) * 2014-09-16 2016-03-17 Robert Bosch Gmbh Kapazitiver Sensor
EP3194831A1 (de) * 2014-09-16 2017-07-26 Robert Bosch GmbH Kapazitiver sensor
US20170257094A1 (en) * 2014-09-16 2017-09-07 Robert Bosch Gmbh Capacitive sensor
US20180088633A1 (en) * 2016-09-28 2018-03-29 Microsoft Technology Licensing, Llc Opening state detection of a foldable device using self-capacitance

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
International Search Report dated Oct. 14, 2015, of the corresponding International Application PCT/EP2015/065927 filed Jul. 13, 2015.
LionPrecision. Capacitive Sensors. http://www.lionprecision.com/capacitive-sensors/ Apr. 2007 (Year: 2007). *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11635803B2 (en) 2021-03-03 2023-04-25 Guardian Glass, LLC Industrial safety systems and/or methods for creating and passively detecting changes in electrical fields
US11635804B2 (en) 2021-03-03 2023-04-25 Guardian Glass, LLC Systems and/or methods incorporating electrical tomography related algorithms and circuits

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CN106716838B (zh) 2020-10-23
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