UA67392A - High-freqiency ion source - Google Patents

High-freqiency ion source

Info

Publication number
UA67392A
UA67392A UA2003098400A UA2003098400A UA67392A UA 67392 A UA67392 A UA 67392A UA 2003098400 A UA2003098400 A UA 2003098400A UA 2003098400 A UA2003098400 A UA 2003098400A UA 67392 A UA67392 A UA 67392A
Authority
UA
Ukraine
Prior art keywords
gas
ion source
freqiency
discharge chamber
inductor
Prior art date
Application number
UA2003098400A
Inventor
Sergii Mykolaiovych Mordyk
Vitalii Ivanovych Voznyi
Valentyn Ivanov Miroshnychenko
Volodymyr Yukhymovyc Storizhko
Original Assignee
Inst Of Applied Physics Of The
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Of Applied Physics Of The filed Critical Inst Of Applied Physics Of The
Priority to UA2003098400A priority Critical patent/UA67392A/en
Publication of UA67392A publication Critical patent/UA67392A/en

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  • Electron Sources, Ion Sources (AREA)

Abstract

The proposed high-frequency ion source contains a gas-discharge chamber coupled with a gas-supply system, an inductor, an optical system, and annular permanent magnets that enclose the gas-discharge chamber. The permanent magnets are arranged between the inductor and the optical system, with the possibility to move along the longitudinal axis of the gas-discharge chamber.
UA2003098400A 2003-09-11 2003-09-11 High-freqiency ion source UA67392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA2003098400A UA67392A (en) 2003-09-11 2003-09-11 High-freqiency ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA2003098400A UA67392A (en) 2003-09-11 2003-09-11 High-freqiency ion source

Publications (1)

Publication Number Publication Date
UA67392A true UA67392A (en) 2004-06-15

Family

ID=34518554

Family Applications (1)

Application Number Title Priority Date Filing Date
UA2003098400A UA67392A (en) 2003-09-11 2003-09-11 High-freqiency ion source

Country Status (1)

Country Link
UA (1) UA67392A (en)

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