UA33751A - Magnetic system of magnetron atomizer - Google Patents

Magnetic system of magnetron atomizer

Info

Publication number
UA33751A
UA33751A UA99031772A UA99031772A UA33751A UA 33751 A UA33751 A UA 33751A UA 99031772 A UA99031772 A UA 99031772A UA 99031772 A UA99031772 A UA 99031772A UA 33751 A UA33751 A UA 33751A
Authority
UA
Ukraine
Prior art keywords
magnetic system
relation
interface surface
constant
magnetic
Prior art date
Application number
UA99031772A
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Вячеслав Іванович Перекрестов
Вячеслав Иванович Перекрестов
Андрій Володимирович Павлов
Андрей Владимирович Павлов
Сергій Миколайович Кравченко
Сергей Николаевич Кравченко
Original Assignee
Сумський Державний Університет
Сумский Государственный Университет
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Сумський Державний Університет, Сумский Государственный Университет filed Critical Сумський Державний Університет
Priority to UA99031772A priority Critical patent/UA33751A/en
Publication of UA33751A publication Critical patent/UA33751A/en

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Abstract

The system comprises three magnetic elements made of constant magnets and mounted with air space in relation to each other from the side of a not sawed target. The magnet element placed between internal and outside magnetic elements consist of two parts representing a pair of integral magnet where the cross section in direction perpendicular to an interface surface in all constant one is and the interface surface is in the form of a cylinder concentrically placed in relation to magnetic system elements.
UA99031772A 1999-03-30 1999-03-30 Magnetic system of magnetron atomizer UA33751A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA99031772A UA33751A (en) 1999-03-30 1999-03-30 Magnetic system of magnetron atomizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA99031772A UA33751A (en) 1999-03-30 1999-03-30 Magnetic system of magnetron atomizer

Publications (1)

Publication Number Publication Date
UA33751A true UA33751A (en) 2001-02-15

Family

ID=74197441

Family Applications (1)

Application Number Title Priority Date Filing Date
UA99031772A UA33751A (en) 1999-03-30 1999-03-30 Magnetic system of magnetron atomizer

Country Status (1)

Country Link
UA (1) UA33751A (en)

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