TWM634768U - Wafer suspension arm - Google Patents
Wafer suspension arm Download PDFInfo
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- TWM634768U TWM634768U TW111204246U TW111204246U TWM634768U TW M634768 U TWM634768 U TW M634768U TW 111204246 U TW111204246 U TW 111204246U TW 111204246 U TW111204246 U TW 111204246U TW M634768 U TWM634768 U TW M634768U
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Abstract
本新型係一種晶圓懸浮手臂，其包含一本體，本體頂面的一端部貫穿有一吸氣孔，另一端部形成有複數吹氣槽及一通孔，各吹氣槽圍繞通孔排列且相互對稱設置，本體的底面凹設一主流道、複數外側支流道及複數內側支流道，主流道的一端與吸氣孔相連通，各外側支流道及各內側支流道的一端與主流道的另一端相連通，各外側支流道及各內側支流道的另一端連通所對應的吹氣槽；一底蓋，其固設於本體的底面且覆蓋主流道、各外側支流道及各內側支流道；當輸入氣體並自各吹氣槽吹出後，晶圓得以懸浮定位於本體上，具有避免在移動的過程中刮傷晶圓之功效。The present invention is a wafer suspension arm, which includes a body, one end of the top surface of the body runs through a suction hole, and the other end is formed with a plurality of air blowing grooves and a through hole, and each air blowing groove is arranged around the through hole and is symmetrical to each other Setting, the bottom surface of the main body is concavely provided with a main channel, a plurality of outer branch channels and a plurality of inner branch channels, one end of the main channel is connected with the suction hole, and one end of each outer branch channel and each inner branch channel is connected with the other end of the main channel The other end of each outer tributary channel and each inner tributary channel communicates with the corresponding blowing groove; a bottom cover, which is fixed on the bottom surface of the body and covers the main channel, each outer tributary channel and each inner tributary channel; when input After the gas is blown out from each blowing slot, the wafer can be suspended and positioned on the main body, which has the effect of avoiding scratching the wafer during the moving process.
Description
本新型係涉及一種晶圓移動手臂，尤指一種利用吹氣產生負壓使得晶圓可懸浮定位於其上之晶圓懸浮手臂。 The present invention relates to a wafer moving arm, in particular to a wafer suspending arm which utilizes air blowing to generate negative pressure so that wafers can be suspended and positioned thereon.
現有技術的晶圓搬運裝置，其中有一種為真空吸盤手臂，真空吸盤手臂包含一爪形片體及複數吸盤，爪形片體形成有複數氣體通道，各氣體通道連接於外部一抽氣裝置，各吸盤組裝於爪形片體上並且與各氣體通道相連通，藉由抽氣裝置進行抽氣動作，使得真空吸盤手臂可利用其吸盤將晶圓吸附於其上，達到以吸附方式搬運晶圓之功效。 In the prior art wafer handling device, one of them is a vacuum chuck arm. The vacuum chuck arm includes a claw-shaped sheet and a plurality of suction cups. The claw-shaped sheet forms a plurality of gas channels, and each gas channel is connected to an external air extraction device. Each suction cup is assembled on the claw-shaped sheet and communicated with each gas channel, and the vacuum suction device performs the pumping action, so that the vacuum suction cup arm can use its suction cup to adsorb the wafer on it, so as to carry the wafer by adsorption The effect.
然而，現有技術的晶圓其表面形狀變化較多，其中更包含有具簍空結構的晶圓，而在吸附此種具有簍空結構的晶圓時，容易因為吸附位置的不恰當或是於移動過程中產生過多的震動，而導致晶圓變形或與爪形片體之間產生摩擦而刮傷，變形或刮傷將會導致晶圓的品質及良率下降，進而提高了生產成本；因此，現有技術以吸盤吸附方式的晶圓搬運裝置，其整體構造存在有如前述的問題及缺點，實有待加以改良。 However, the surface shape of the wafers in the prior art varies more, including wafers with a hollow structure, and when absorbing such a wafer with a hollow structure, it is easy to be inappropriate due to inappropriate adsorption positions or insufficient Excessive vibrations are generated during the moving process, resulting in deformation of the wafer or scratches caused by friction with the claw-shaped sheet. Deformation or scratches will lead to a decrease in the quality and yield of the wafer, thereby increasing production costs; therefore In the prior art, the overall structure of the wafer transfer device in the sucker adsorption mode has the aforementioned problems and shortcomings, which need to be improved.
有鑒於現有技術的不足，本新型提供一種晶圓懸浮手臂，其藉由於本體的頂面設置懸浮部，底面形成流道部，達到可供晶圓懸浮於本體上方之目的。 In view of the deficiencies in the prior art, the present invention provides a wafer suspension arm, which provides a floating part on the top surface of the main body, and forms a flow channel part on the bottom surface, so as to achieve the purpose of suspending the wafer above the main body.
為達上述之新型目的，本新型所採用的技術手段為設計一種晶圓懸浮手臂，其包含：一本體，其具有一頂面及一底面，該頂面及該底面為上、下相對的二側面，該本體包含有一連接部、一懸浮部及一流道部，該連接部位於該頂面的一端部且貫穿有一吸氣孔，該懸浮部位於該頂面的另一端部，且該懸浮部形成有複數吹氣槽及一通孔，自該連接部朝向該懸浮部的方向延伸有一假想中心線，該假想中心線將該本體平分為一左側及一右側，各該吹氣槽圍繞該通孔呈環狀間隔排列，且各該吹氣槽的位置以該假想中心線為基準於該左側及該右側相互對稱設置，該流道部位於該底面且凹設有一主流道、複數外側支流道及複數內側支流道，該主流道的一端與該吸氣孔相連通，各該外側支流道的一端與該主流道的另一端相連通，各該內側支流道的一端與該主流道的另一端相連通，每一該外側支流道的另一端連通於所對應的每一該吹氣槽，每一該內側支流道的另一端連通於所對應的每一該吹氣槽；一底蓋，其固設於該本體的該底面且覆蓋該主流道、各外側支流道及各該內側支流道。 In order to achieve the above-mentioned novel purpose, the technical means adopted in the present invention is to design a wafer suspension arm, which includes: a body, which has a top surface and a bottom surface, and the top surface and the bottom surface are two opposing upper and lower surfaces. On the side, the body includes a connecting part, a floating part and a channel part, the connecting part is located at one end of the top surface and passes through a suction hole, the floating part is located at the other end of the top surface, and the floating part A plurality of blowing grooves and a through hole are formed, and an imaginary centerline extends from the connecting portion toward the suspension portion, and the imaginary centerline divides the main body into a left side and a right side, and each blowing groove forms a ring around the through hole The air blowing grooves are arranged at intervals, and the positions of the air blowing grooves are arranged symmetrically on the left side and the right side based on the imaginary centerline. One end of the main channel communicates with the suction hole, one end of each outer branch channel communicates with the other end of the main channel, and one end of each inner branch channel communicates with the other end of the main channel, The other end of each of the outer branch channels communicates with each of the corresponding air blowing grooves, and the other end of each of the inner branch channels communicates with each of the corresponding air blowing grooves; a bottom cover is fixed on the The bottom surface of the body covers the main channel, each outer branch channel and each inner branch channel.
進一步而言，所述之晶圓懸浮手臂，其中每一該吹氣槽的內壁面鄰近於槽底的位置貫穿有複數吹氣口，各該吹氣口的開口方向與該吹氣槽的內壁面相互平行且同向，其中一該吹氣口與該外側支流道相連通，另一該吹氣口與該內側支流道相連通。 Further, in the above-mentioned wafer suspension arm, a plurality of air blowing ports penetrate through the inner wall surface of each air blowing groove adjacent to the bottom of the groove, and the opening direction of each air blowing port is in contact with the inner wall surface of the air blowing groove. Parallel and in the same direction, one of the blowing ports communicates with the outer branch channel, and the other blowing port communicates with the inner branch channel.
進一步而言，所述之晶圓懸浮手臂，其中位於該左側的各該吹氣槽的各該吹氣口為朝向順時針方向，位於該右側的各該吹氣槽的各該吹氣口為朝向逆時針方向。 Further, in the wafer suspension arm, the blowing ports of the blowing slots on the left side face clockwise, and the blowing ports of the blowing slots on the right side face in the opposite direction. clockwise direction.
進一步而言，所述之晶圓懸浮手臂，其中各該外側支流道的另一端形成有複數外側分流道，每一該外側分流道連通於每一該吹氣槽，該外側 分流道的內徑為自該外側支流道朝向該吹氣槽的方向漸減，各該內側支流道的另一端形成有複數內側分流道，每一該內側分流道連通於每一該吹氣槽，該內側分流道的內徑為自該內側支流道朝向該吹氣槽的方向漸減。 Further, in the above-mentioned wafer suspension arm, a plurality of outer branch channels are formed at the other end of each of the outer branch channels, and each of the outer branch channels is connected to each of the air blowing slots, and the outer The inner diameter of the branch channel is gradually reduced from the outer branch channel towards the direction of the blowing groove, and the other end of each of the inner branch channels is formed with a plurality of inner branch channels, and each of the inner branch channels is connected to each of the blowing grooves, The inner diameter of the inner branch channel gradually decreases from the inner branch channel toward the blowing groove.
進一步而言，所述之晶圓懸浮手臂，其中每一該吹氣槽的開口周緣形成有一凸部，該凸部環凸於該本體的該頂面。 Furthermore, in the above-mentioned wafer suspension arm, a protrusion is formed on the periphery of the opening of each air blowing slot, and the protrusion ring protrudes from the top surface of the main body.
進一步而言，所述之晶圓懸浮手臂，其進一步包含複數定位件，各該定位件以該本體的假想中心線為基準於該左側及該右側相互對稱設置於該本體的該頂面。 Furthermore, the wafer suspension arm further includes a plurality of positioning pieces, and each positioning piece is symmetrically arranged on the top surface of the main body on the left side and the right side based on the imaginary center line of the main body.
進一步而言，所述之晶圓懸浮手臂，其進一步包含一感測件，該本體的該頂面內凹有一安裝槽，該感測件設置於該安裝槽中。 Furthermore, the wafer suspension arm further includes a sensing element, a mounting groove is recessed in the top surface of the main body, and the sensing element is disposed in the mounting groove.
進一步而言，所述之晶圓懸浮手臂，其中該吸氣孔的內徑自該本體的該頂面朝向該底面的方向漸增。 Furthermore, in the wafer suspension arm, the inner diameter of the suction hole gradually increases from the top surface of the body toward the bottom surface.
本新型的優點在於，藉由吹氣槽吹出氣體使得晶圓得以懸浮定位於本體上，達到以未接觸晶圓的方式即可移動晶圓，並且避免在移動的過程中刮傷晶圓之功效；此外，因為各吹氣槽的吹氣口所吹出的氣體呈漩渦狀，故可增進氣流的順暢度及流速，以提升氣體流動效率；各內側分流道及各外側分流道的內徑為漸減，故可藉此增進氣體的流速，以提升氣體的流動效率。 The advantage of this new model is that the wafer can be suspended and positioned on the body by blowing out the gas from the blowing tank, so that the wafer can be moved without touching the wafer, and the effect of avoiding scratching the wafer during the movement In addition, because the gas blown out by the blowing ports of each blowing groove is in a swirl shape, the smoothness and flow velocity of the airflow can be improved to improve the gas flow efficiency; the inner diameters of each inner runner and each outer runner are gradually reduced, Therefore, the flow velocity of the gas can be increased to improve the flow efficiency of the gas.
10:本體 10: Ontology
11:連接部 11: Connecting part
111:吸氣孔 111: suction hole
12:懸浮部 12:Suspended part
121:通孔 121: Through hole
122:吹氣槽 122: Blowing slot
123:定位件 123: Positioning piece
124:安裝槽 124: Mounting groove
125:缺口 125: Gap
126:吹氣口 126: Blowing port
127:凸部 127: convex part
13:流道部 13: runner part
131:主流道 131: main channel
132:外側支流道 132: Outer branch channel
133:內側支流道 133: Inner tributary channel
134:外側分流道 134: Outer shunt
135:內側分流道 135: Inner shunt
14:感測件 14: Sensing parts
15:假想中心線 15: Imaginary center line
20:底蓋 20: Bottom cover
21:穿孔 21: perforation
30:連接頭 30: connector
40:晶圓 40: Wafer
圖1係本新型之立體外觀圖。 Fig. 1 is the three-dimensional appearance diagram of the present invention.
圖2係本新型之分解圖。 Fig. 2 is an exploded view of the new model.
圖3係本新型之另一角度分解圖。 Fig. 3 is an exploded view of another angle of the present invention.
圖4係本新型之流道部局部放大圖。 Fig. 4 is a partially enlarged view of the runner portion of the present invention.
圖5係本新型之流道部局部透視放大圖。 Fig. 5 is a partial perspective enlarged view of the flow channel part of the present invention.
圖6係本新型之流道部局部剖面放大圖。 Fig. 6 is an enlarged view of a partial cross-section of the flow channel portion of the present invention.
圖7係本新型之使用示意圖。 Fig. 7 is the schematic diagram of the use of the present invention.
圖8係本新型之局部氣體流動示意圖。 Fig. 8 is a schematic diagram of local gas flow of the present invention.
以下配合圖式以及本新型之較佳實施例，進一步闡述本新型為達成預定新型目的所採取的技術手段。 In the following, in conjunction with the drawings and preferred embodiments of the present invention, the technical means adopted by the present invention for achieving the intended purpose of the new model will be further described.
請參閱圖1及圖2所示，本新型之晶圓懸浮手臂，其包含一本體10及一底蓋20。
Please refer to FIG. 1 and FIG. 2 , the wafer suspension arm of the present invention includes a
請參閱圖2及圖3所示，本體10為一長條形片體，其具有一頂面及一底面，頂面及底面為上、下相對的二側面，本體10包含有一連接部11、一懸浮部12及一流道部13，連接部11位於頂面的一端部且貫穿有一吸氣孔111，吸氣孔111的內徑自頂面朝向底面的方向漸增，形成一漸擴狀之孔洞，但不以此為限。
Please refer to Fig. 2 and Fig. 3, the
請參閱圖2、圖3及圖5所示，懸浮部12位於頂面的另一端部，且懸浮部12形成有一通孔121、複數吹氣槽122、複數定位件123、一安裝槽124及一缺口125，在此定義自連接部11朝向懸浮部12的長軸方向延伸有一假想中心線15，假想中心線15將本體10平分為一左側及一右側，通孔121貫穿於本體10，各吹氣槽122圍繞通孔121呈環狀間隔排列，各吹氣槽122的位置以本體10的假想中心線15為基準於左側及右側相互對稱設置，每一吹氣槽122的內壁面鄰近於槽底的位置貫穿有二吹氣口126，二吹氣口126位於相對的二側，吹氣口126的開口方向與吹氣槽122的內壁面相互平行，具體而言為吹氣口126的開設方式為斜開口，使得當氣體自吹氣口126吹出後，會沿著吹氣槽122的內壁面呈
漩渦狀流動，在本實施例中，位於左側的各吹氣槽122的吹氣口126為朝向順時針方向，位於右側的各吹氣槽122的吹氣口126為朝向逆時針方向，每一吹氣槽122的開口周緣形成有一凸部127，凸部127環凸於本體10的頂面，但不以此為限，吹氣槽122之數量及形式可依使用者需求作改變。
2, 3 and 5, the
每一定位件123為塊狀體，其形狀對應於晶圓(圖式中未示)的外周緣形狀，定位件123貫穿有複數鎖孔，本體10貫穿有複數螺孔，各定位件123藉由複數鎖固件鎖固於本體10的螺孔，在本實施例中，各定位件123以本體10的假想中心線15為基準於左側及右側相互對稱設置，但不以此為限，定位件123之形式及數量可依使用者需求作改變。
Each
安裝槽124為一長槽，其內凹於懸浮部12且自懸浮部12朝向連接部11的一端延伸，安裝槽124用以設置一感測件14，感測件14為光學檢測裝置，用以判斷晶圓是否位於其上方位置，此為現有技術之制式組件，其細部構造不再贅述，但不以此為限，亦可不形成安裝槽124及設置感測件14。
The
缺口125自本體10的懸浮部12的一端內凹成型，使得本體10的端部形成類似U形結構，但不以此為限，亦可不形成缺口125。
The
請參閱圖3至圖6所示，流道部13位於本體10的底面且凹設有一主流道131、複數外側支流道132及複數內側支流道133，主流道131的一端與吸氣孔111相連通，各外側支流道132及各內側支流道133以本體10的假想中心線15為基準於左側及右側相互對稱設置，故以其中一側的外側支流道132及內側支流道133為例說明，外側支流道132鄰近於本體10的外側邊，外側支流道132的一端與主流道131的另一端相連通，外側支流道132的另一端形成有複數外側分流道134，每一外側分流道134連通於所對應的每一吹氣槽122的其中一吹氣口126，外側分流道134的內徑為自外側支流道132朝向吹氣槽122的方向漸減；內側支流道133鄰近於本體10的內側邊，內側支流道133的一端與主流道131的
另一端相連通，內側支流道133的另一端形成有複數內側分流道135，每一內側分流道135連通於所對應的每一吹氣槽122的另一吹氣口126，內側分流道135的內徑為自內側支流道133朝向吹氣槽122的方向漸減，但不以此為限，外側分流道134及內側分流道135的形式可依使用者需求作改變。
Please refer to Fig. 3 to Fig. 6, the
底蓋20為一片體，其形狀對應於流道部13的形狀，底蓋20貫穿有一穿孔21，穿孔21的位置對應於通孔121的位置，底蓋20固設於本體10的底面且覆蓋主流道131、各外側支流道132及各內側支流道133，穿孔21與通孔121相連通，使得主流道131、各外側支流道132及各內側支流道133封閉形成一內部氣體流動空間。
The
本新型使用時，請參閱圖5、圖7及圖8所示，可藉由連接部11連接於一機械手臂(圖式中未示)使用，再以一連接頭30設置於吸氣孔111，連接頭30與吸氣管路(圖式中未示)連接，當本新型的懸浮部12移動至一晶圓40的一側面時，吸氣管路進行吸氣動作將外部氣體經由吸氣孔111吸入，再流經主流道131、各外側支流道132、各外側分流道134、各內側支流道133及各內側分流道135，從各吹氣槽122的吹氣口126吹出，氣體於吹氣槽122中形成漩渦狀並朝向吹氣槽122的槽口移動，吹出之其中一部分氣體撞擊到晶圓40後會朝向位於內側的通孔121流出，而另一部分之氣體撞擊到晶圓40後會朝向外側方向流出，故位於通孔121位置的各氣體交會處與晶圓40之間所圍繞的空間會形成一真空帶，因此晶圓40下方位置的壓力較晶圓40上方位置的壓力低，使得晶圓40上方之壓力大於下方之壓力而朝向本新型靠近，再藉由使用者調整輸入氣流量，使得晶圓40下方所受氣體吹拂之推力等於晶圓40上方之壓力，而晶圓40得以懸浮定位於各定位件123之間，達到以未接觸晶圓40的方式即可移動晶圓40，並且避免在移動的過程中刮傷晶圓40之功效；此外，因為各吹氣槽122的吹氣口126
所吹出的氣體呈漩渦狀，故可增進氣流的順暢度及流速，以提升氣體流動效率。
When the new model is in use, please refer to Fig. 5, Fig. 7 and Fig. 8, it can be connected to a mechanical arm (not shown in the drawings) through the connecting
前述過程中，由於各內側分流道135及各外側分流道134的內徑為漸減，故可藉此增進氣體的流速，以提升氣體的流動效率。
In the foregoing process, since the inner diameters of the
以上所述僅是本創作之較佳實施例而已，並非對本創作做任何形式上的限制，雖然本創作已以較佳實施例揭露如上，然而並非用以限定本創作，任何所屬技術領域中具有通常知識者，在不脫離本創作技術方案的範圍內，當可利用上述揭示的技術內容作出些許更動或修飾作為等同變化的等效實施例，但凡是未脫離本創作技術方案的內容，依據本創作的技術實質對以上實施例所做的任何簡單修改、等同變化與修飾，均仍屬於本創作技術方案的範圍內。 The above description is only a preferred embodiment of this creation, and does not impose any formal restrictions on this creation. Although this creation has been disclosed as above with a preferred embodiment, it is not used to limit this creation. Anyone in the technical field has Ordinary knowledgeable persons, without departing from the scope of this creative technical solution, may use the technical content disclosed above to make some changes or modifications as equivalent embodiments of equivalent changes, but any content that does not deviate from this creative technical solution, according to this Any simple modifications, equivalent changes and modifications made to the above embodiments by the technical essence of the creation still belong to the scope of the technical solution of the creation.
10:本體 10: Ontology
11:連接部 11: Connecting part
111:吸氣孔 111: suction hole
12:懸浮部 12:Suspended part
121:通孔 121: Through hole
122:吹氣槽 122: Blowing slot
123:定位件 123: Positioning piece
124:安裝槽 124: Mounting groove
125:缺口 125: Gap
127:凸部 127: convex part
14:感測件 14: Sensing parts
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111204246U TWM634768U (en) | 2022-04-25 | 2022-04-25 | Wafer suspension arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111204246U TWM634768U (en) | 2022-04-25 | 2022-04-25 | Wafer suspension arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWM634768U true TWM634768U (en) | 2022-12-01 |
Family
ID=85785933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111204246U TWM634768U (en) | 2022-04-25 | 2022-04-25 | Wafer suspension arm |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWM634768U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI812190B (en) * | 2022-04-25 | 2023-08-11 | 盛詮科技股份有限公司 | Wafer suspension arm |
-
2022
- 2022-04-25 TW TW111204246U patent/TWM634768U/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI812190B (en) * | 2022-04-25 | 2023-08-11 | 盛詮科技股份有限公司 | Wafer suspension arm |
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