TWM629985U - Polarization beam splitting module and four-beam polarization beam splitting system thereof - Google Patents
Polarization beam splitting module and four-beam polarization beam splitting system thereof Download PDFInfo
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Abstract
本創作係關於一種偏振分光模組,其係應用於接收一脈衝光的環境中,該偏振分光模組包含有:線偏振片、四分之一相位延遲片、分光鏡、空氣層、反射鏡、以及隔離層。其中,線偏振片用於將任意光束轉換為線偏振光,四分之一相位延遲片用於將線偏振光與圓偏振光互為轉換,分光鏡用於將一束圓偏振光分成兩道相位及光強度相同且行進方向互為垂直的兩左旋(右旋)圓偏振光,左旋(右旋)圓偏振光經空氣層及反射鏡後將左旋(右旋)圓偏振光轉換為右旋(左旋)圓偏振光,反射鏡用於改變光束的傳輸方向,隔離層用於保護偏振分光模組。本創作進一步提供一種包含前述偏振分光模組的四束偏振分光系統。This creation is about a polarization beam splitting module, which is used in an environment that receives a pulsed light. The polarization beam splitting module includes: a linear polarizer, a quarter-phase retarder, a beam splitter, an air layer, and a reflector , and the isolation layer. Among them, the linear polarizer is used to convert any beam into linearly polarized light, the quarter-phase retarder is used to convert linearly polarized light and circularly polarized light to each other, and the beam splitter is used to divide a beam of circularly polarized light into two Two left-handed (right-handed) circularly polarized lights with the same phase and light intensity and their traveling directions are perpendicular to each other. (Left-handed) circularly polarized light, the mirror is used to change the transmission direction of the beam, and the isolation layer is used to protect the polarization beam splitting module. The present creation further provides a four-beam polarization beam splitting system including the aforementioned polarization beam splitting module.
Description
本創作係有關於一種偏振分光模組,特別係關於一種可以透過偏振分光模組簡單加工即可實現的四束偏振分光系統。This creation is about a polarization beam splitting module, especially a four-beam polarization beam splitting system that can be realized by simple processing through the polarization beam splitting module.
隨著測距技術的演進,各種測距技術不斷地被發展出來,並且被廣泛地應用於例如車距偵測、人臉辨識以及各種物聯網(Internet-of-Things, IoT)設備。常見的測距技術例如是紅外線測距(Infrared Radiation, IR)技術、超聲波(Ultrasound)測距技術以及脈衝光(Intense Pulsed Light, IPL)測距技術。然而,隨著測距的精準度要求越來越高,採用飛行時間(Time-of-Flight, ToF)量測方法的脈衝光測距技術是目前本領域主要的研究方向之一。With the evolution of ranging technology, various ranging technologies are continuously developed, and are widely used in, for example, vehicle distance detection, face recognition, and various Internet-of-Things (IoT) devices. Common ranging technologies are, for example, infrared ranging (Infrared Radiation, IR) technology, ultrasonic (Ultrasound) ranging technology, and pulsed light (Intense Pulsed Light, IPL) ranging technology. However, with the increasing accuracy requirements of ranging, the pulsed light ranging technology using the Time-of-Flight (ToF) measurement method is one of the main research directions in this field.
飛行時間量測方法為近年來經常受到應用的主動式3D掃描技術,主要原因為可測距離範圍大、解析度高且軟體複雜度低,有利於市場的拓展及技術的開發。飛時測距法的感測技術是在傳統的影像感測器上再增加另一個可量測深度資訊的感測元件,此一元件是以感測光反射接收的時間變化來計算深度資訊。The time-of-flight measurement method is an active 3D scanning technology that has been frequently used in recent years, mainly due to its large measurable distance range, high resolution and low software complexity, which is conducive to market expansion and technology development. The sensing technology of the time-of-fly ranging method is to add another sensing element capable of measuring depth information to the traditional image sensor. This element calculates the depth information by sensing the time change of light reflection and reception.
就目前而言,習知的飛時測距法的感測技術中之光源一般採用非偏極光,近年來逐漸有發展出採取偏極光的感測技術,唯必須採用兩個光源以及多個偏振片,以便產生兩偏振正交的光源作為發射光,其原因在於兩偏振正交的光源,在光感測器接收下不受環境光之干擾,如此一來才能取得較清晰的深度資訊。For now, the light source in the conventional time-of-flight ranging method generally uses non-polarized light. In recent years, a sensing technology using polarized light has been gradually developed, but two light sources and multiple polarized light must be used. The reason is that the two polarized light sources with orthogonal polarizations are not disturbed by ambient light when received by the light sensor, so that clearer depth information can be obtained.
而,隨著智慧型手日漸輕薄,智慧型手機內部空間所能放入的的元件數量將隨之減少,因此如何減少智慧型手機內部元件,以及元件所佔用的使用空間則為研發人員應解決的問題之一。However, as smart hands become thinner and thinner, the number of components that can be placed in the interior space of smartphones will decrease accordingly. Therefore, how to reduce the internal components of smartphones and the usage space occupied by components should be solved by R&D personnel. one of the problems.
是以,本案創作人在觀察上述需求後,而遂有本創作之產生。Therefore, the creator of this case came to this creation after observing the above-mentioned needs.
本創作的目的在於提供一種偏振分光模組,其係藉由簡單的加工及組合,即可實現同時完成多個不同偏極化方向之激發光的功能,從而使偏振分光系統簡單化和小型化,進一步提高了其技術性能和可靠性,在光學測試、光學調製、光學測距等應用技術領域中具有極為重要的實際意義。The purpose of this creation is to provide a polarization beam splitting module, which can realize the function of simultaneously completing the excitation light of multiple different polarization directions through simple processing and combination, thereby simplifying and miniaturizing the polarization beam splitting system. , which further improves its technical performance and reliability, and has extremely important practical significance in the fields of optical testing, optical modulation, optical ranging and other application technologies.
本創作的另一目的在於提供一種四束偏振分光系統,其係透過偏振分光模組簡單的加工及組合,即可實現四種不同偏極化方向之激發光,將原本需要至少兩光源產生複數偏振光源才能執行的測距感測技術,縮減至僅需要一個光源且可自行調整激發光的偏極化方向,以執行ToF感測技術之運算,大幅減少成本且增加系統的穩定性。Another purpose of the present creation is to provide a four-beam polarization beam splitting system, which can realize excitation light of four different polarization directions through simple processing and combination of polarization beam splitting modules, and it requires at least two light sources to generate complex numbers The ranging sensing technology that can only be performed by a polarized light source is reduced to only one light source and the polarization direction of the excitation light can be adjusted by itself to perform the calculation of the ToF sensing technology, which greatly reduces the cost and increases the stability of the system.
為達上述目的,本創作提供一種偏振分光系統,其係應用於接收一脈衝光的環境中,該偏振分光模組包含有:一線偏振片,其係用於將該脈衝光轉換為線偏振光;一四分之一相位延遲片,其係設置於該線偏振片上;一分光鏡,其係設置於該四分之一相位延遲片上,該分光鏡具有一入射面、一第一出光面、以及一第二出光面;一空氣層,其係設置於該四分之一相位延遲片上,並且耦接於該第二出光面;一反射鏡,其係設置於該四分之一相位延遲片上並耦接於該第二出光面,該反射鏡係用於使光束產生反射,進而改變光束的傳輸方向,以及改變圓偏極化光的旋轉方向;以及一隔離層,其係設置於該分光鏡以及該反射鏡上;其中,該脈衝光通過該線偏振片後轉換為一具有預設偏極化方向的線偏振光,該具有預設偏極化方向的線偏振光通過該四分之一相位延遲片轉換為一具有第一偏極化方向的圓偏振光,該具有第一偏極化方向的圓偏振光從該入射面進入該分光鏡,該分光鏡從該第一出光面輸出沿一第一方向傳輸的該具有第一偏極化方向的圓偏振光至該隔離層,並且該分光鏡從該第二出光面輸出沿一第二方向傳輸的該具有第一偏極化方向的圓偏振光,該具有第一偏極化方向的圓偏振光穿過該空氣層至該反射鏡後產生反射,並且改變偏極化方向形成一具有第二偏極化方向的圓偏振光,該具有第二偏極化方向的圓偏振光從沿該第二方向傳輸轉向為沿該第一方向至該隔離層。In order to achieve the above-mentioned purpose, the present invention provides a polarization beam splitting system, which is applied in an environment that receives a pulsed light. The polarization beam splitter module includes: a linear polarizer, which is used to convert the pulsed light into linearly polarized light. ; a quarter-phase retarder, which is arranged on the linear polarizer; a beam splitter, which is arranged on the quarter-phase retarder, the beam splitter has an incident surface, a first light-emitting surface, and a second light-emitting surface; an air layer, which is arranged on the quarter-phase retarder, and is coupled to the second light-emitting surface; a reflection mirror, which is arranged on the quarter-phase retarder and coupled to the second light-emitting surface, the reflector is used to reflect the light beam, thereby changing the transmission direction of the light beam, and changing the rotation direction of the circularly polarized light; and an isolation layer, which is arranged on the beam splitter mirror and the reflecting mirror; wherein, the pulsed light is converted into a linearly polarized light with a preset polarization direction after passing through the linear polarizer, and the linearly polarized light with a preset polarization direction passes through the quarter A phase retarder is converted into a circularly polarized light with a first polarization direction, the circularly polarized light with a first polarization direction enters the beam splitter from the incident surface, and the beam splitter outputs from the first light exit surface The circularly polarized light with the first polarization direction transmitted in a first direction is sent to the isolation layer, and the beam splitter outputs the circularly polarized light with the first polarization direction transmitted in a second direction from the second light exit surface the circularly polarized light, the circularly polarized light with the first polarization direction passes through the air layer to the reflector and is reflected, and changes the polarization direction to form a circularly polarized light with a second polarization direction, The circularly polarized light having the second polarization direction is diverted from being transmitted along the second direction to the isolation layer along the first direction.
較佳地,根據本創作之偏振分光模組,其中,該線偏振片為一金屬光柵。Preferably, according to the polarization beam splitting module of the present invention, the linear polarizer is a metal grating.
較佳地,根據本創作之偏振分光模組,其中,該第一方向正交於該第二方向。Preferably, according to the polarization beam splitting module of the present invention, the first direction is orthogonal to the second direction.
較佳地,根據本創作之偏振分光模組,其中,該脈衝光的波長介於780nm至1400nm之間。Preferably, according to the polarization beam splitting module of the present invention, the wavelength of the pulsed light is between 780nm and 1400nm.
又,為達上述目的,本創作係根據上述偏振分光模組為基礎,進一步提供一種四束偏振分光系統,其係包含有:一第一偏振分光模組,其係用於接收該脈衝光,該第一偏振分光模組包含上述的偏振分光模組以及一第一四分之一相位延遲片,該第一四分之一相位延遲片設置於該隔離層上並且涵蓋該分光鏡,該第一四分之一相位延遲片係用於將圓偏振光轉換為線偏振光;一第二偏振分光模組,其係耦接於該第一偏振分光模組,該第二偏振分光模組包含上述的偏振分光模組以及一第二四分之一相位延遲片,該第二四分之一相位延遲片設置於該隔離層上並且涵蓋該分光鏡以及該反射鏡,該第二四分之一相位延遲片係用於將圓偏振光轉換為線偏振光;以及一第三偏振分光模組,其係耦接於該第一偏振分光模組,該第三偏振分光模組包含上述的偏振分光模組;其中,該第一偏振分光模組接收該脈衝光後,該第一偏振分光模組輸出該具有預設偏極化方向的線偏振光至該第二偏振分光模組,並且該第一偏振分光模組輸出該第二偏極化方向的圓偏振光至該第三偏振分光模組,該第二偏振分光模組接收該具有預設偏極化方向的線偏振光後,該第二偏振分光模組輸出該具有預設偏極化方向的線偏振光以及一具有第三偏極化方向的線偏振光,該第三偏振分光模組接收該第二偏極化方向的圓偏振光後,該第三偏振分光模組輸出該具有第一偏極化方向的圓偏振光以及一具有第四偏極化方向的偏振光。Also, in order to achieve the above-mentioned purpose, the present creation is based on the above-mentioned polarization beam splitting module, and further provides a four-beam polarization beam splitting system, which includes: a first polarization beam splitting module, which is used to receive the pulsed light, The first polarizing beam splitting module includes the above-mentioned polarizing beam splitting module and a first quarter-phase retarder, the first quarter-phase retarder is disposed on the isolation layer and covers the beam splitter, the first quarter-phase retarder A quarter-phase retarder is used to convert circularly polarized light into linearly polarized light; a second polarized light splitting module is coupled to the first polarized light splitting module, and the second polarized light splitting module includes The above-mentioned polarization beam splitting module and a second quarter phase retardation plate, the second quarter phase retardation plate is arranged on the isolation layer and covers the beam splitter and the reflection mirror, the second quarter phase retardation plate A phase retarder is used to convert circularly polarized light into linearly polarized light; and a third polarized light splitting module is coupled to the first polarized light splitting module, and the third polarized light splitting module includes the above-mentioned polarized light a light splitting module; wherein, after the first polarized light splitting module receives the pulsed light, the first polarized light splitting module outputs the linearly polarized light with a preset polarization direction to the second polarized light splitting module, and the The first polarized light splitting module outputs the circularly polarized light in the second polarization direction to the third polarized light splitting module, and after the second polarized light splitting module receives the linearly polarized light with the preset polarization direction, the The second polarization beam splitting module outputs the linearly polarized light with the preset polarization direction and a linearly polarized light with a third polarization direction, and the third polarization beam splitting module receives the circular polarization in the second polarization direction After polarized light, the third polarized light splitting module outputs the circularly polarized light with the first polarization direction and a polarized light with a fourth polarization direction.
較佳地,根據本創作之四束偏振分光系統,其中,該預設偏極化方向與該第三偏極化方向相互正交。Preferably, according to the four-beam polarization beam splitting system of the present invention, the predetermined polarization direction and the third polarization direction are orthogonal to each other.
較佳地,根據本創作之四束偏振分光系統,其中,該第三偏振分光模組進一步包含一偏光層,該偏光層設置於該隔離層上,該偏光層係用於將圓偏振光轉換為線偏振光。Preferably, according to the four-beam polarization beam splitting system of the present invention, the third polarization beam splitting module further comprises a polarizing layer, the polarizing layer is disposed on the isolation layer, and the polarizing layer is used for converting the circularly polarized light. is linearly polarized light.
較佳地,根據本創作之四束偏振分光系統,其中,該預設偏極化方向與該第四偏極化方向之間相差45度。Preferably, according to the four-beam polarization beam splitting system of the present invention, the difference between the preset polarization direction and the fourth polarization direction is 45 degrees.
藉此,本創作提供一種偏振分光模組,其係藉由簡單的加工及組合,即可實現同時完成多個不同偏極化方向之激發光的功能,從而使偏振分光系統簡單化和小型化,進一步提高了其技術性能和可靠性,在光學測試、光學調製、光學測距等應用技術領域中具有極為重要的實際意義。此外,該偏振分光模組之線偏振片及四分之一相位延遲片可以使用雙折射型偏振片,使用雙折射型偏振片的優點在於雙折射型偏振片相較於其他偏振片,在高能雷射的照射下較不易產生變化,達成預防長時間高能雷射照射後的熱累積,防止造成變形、變質等問題之功效。Therefore, the present invention provides a polarization beam splitting module, which can realize the function of simultaneously completing the excitation light of multiple different polarization directions through simple processing and combination, thereby simplifying and miniaturizing the polarization beam splitting system. , which further improves its technical performance and reliability, and has extremely important practical significance in the fields of optical testing, optical modulation, optical ranging and other application technologies. In addition, the linear polarizer and quarter-phase retarder of the polarization beam splitting module can use birefringent polarizers. It is less likely to change under the irradiation of laser, which can prevent heat accumulation after long-term high-energy laser irradiation, and prevent problems such as deformation and deterioration.
爲使熟悉該項技藝人士瞭解本創作之目的、特徵及功效,茲藉由下述具體實施例,並配合所附之圖式,對本創作詳加說明如下。In order to make those skilled in the art understand the purpose, features and effects of the creation, the following specific examples are used to describe the creation in detail with the accompanying drawings.
現在將參照其中示出本創作概念的示例性實施例的附圖 在下文中更充分地闡述本創作概念。以下藉由參照附圖更詳細地闡述的示例性實施例,本創作概念的優點及特徵以及其達成方法將顯而易見。然而,應注意,本創作概念並非僅限於以下示例性實施例,而是可實施為各種形式。因此,提供示例性實施例僅是為了揭露本創作概念並使熟習此項技術者瞭解本創作概念的類別。在圖式中,本創作概念的示例性實施例並非僅限於本文所提供的特定實例且為清晰起見而進行誇大。The inventive concept will now be explained more fully hereinafter with reference to the accompanying drawings in which exemplary embodiments of the inventive concept are shown. Advantages and features of the inventive concept and methods for achieving the same will be apparent from the following exemplary embodiments, which are set forth in more detail with reference to the accompanying drawings. However, it should be noted that the present inventive concept is not limited to the following exemplary embodiments, but may be implemented in various forms. Accordingly, the exemplary embodiments are provided merely to disclose the inventive concept and to familiarize those skilled in the art with the class of the inventive concept. In the drawings, exemplary embodiments of the inventive concepts are not limited to the specific examples provided herein and are exaggerated for clarity.
本文所用術語僅用於闡述特定實施例,而並非旨在限制本創作。除非上下文中清楚地另外指明,否則本文所用的單數形式的用語「一」及「該」旨在亦包括複數形式。本文所用的用語「及/或」包括相關所列項其中一或多者的任意及所有組合。應理解,當稱元件「連接」或「耦合」至另一元件時,所述元件可直接連接或耦合至所述另一元件或可存在中間元件。The terminology used herein is used to describe particular embodiments only, and is not intended to limit the present invention. As used herein, the singular terms "a" and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present.
相似地,應理解,當稱一個元件(例如層、區或基板)位於另一元件「上」時,所述元件可直接位於所述另一元件上,或可存在中間元件。相比之下,用語「直接」意指不存在中間元件。更應理解,當在本文中使用用語「包括」、「包含」時,是表明所陳述的特徵、整數、步驟、操作、元件、及/或組件的存在,但不排除一或多個其他特徵、整數、步驟、操作、元件、組件、及/或其群組的存在或添加。Similarly, it will be understood that when an element (eg, a layer, region, or substrate) is referred to as being "on" another element, it can be directly on the other element or intervening elements may be present. In contrast, the term "directly" means that no intervening elements are present. It should be further understood that when the terms "comprising" and "comprising" are used herein, it is intended to indicate the presence of stated features, integers, steps, operations, elements, and/or components, but does not exclude one or more other features , integers, steps, operations, elements, components, and/or the presence or addition of groups thereof.
此外,將藉由作為本創作概念的理想化示例性圖的剖視圖來闡述詳細說明中的示例性實施例。相應地,可根據製造技術及/或可容許的誤差來修改示例性圖的形狀。因此,本創作概念的示例性實施例並非僅限於示例性圖中所示出的特定形狀,而是可包括可根據製造製程而產生的其他形狀。圖式中所例示的區域具有一般特性,且用於說明元件的特定形狀。因此,此不應被視為僅限於本創作概念的範圍。Furthermore, exemplary embodiments in the detailed description are illustrated in cross-section illustrations that are idealized exemplary illustrations of the present inventive concepts. Accordingly, the shapes of the exemplary figures may be modified according to manufacturing techniques and/or tolerable errors. Therefore, the exemplary embodiments of the present inventive concept are not limited to the specific shapes shown in the exemplary figures, but may include other shapes that may be produced according to the manufacturing process. The regions illustrated in the figures have general characteristics and are used to illustrate specific shapes of elements. Therefore, this should not be considered limited to the scope of this creative concept.
亦應理解,儘管本文中可能使用用語「第一」、「第二」、「第三」等來闡述各種元件,然而該些元件不應受限於該些用語。該些用語僅用於區分各個元件。因此,某些實施例中的第一元件可在其他實施例中被稱為第二元件,而此並不背離本創作的教示內容。本文中所闡釋及說明的本創作概念的態樣的示例性實施例包括其互補對應物。本說明書通篇中,相同的參考編號或相同的指示物表示相同的元件。It will also be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish each element. Thus, a first element in some embodiments could be termed a second element in other embodiments without departing from the teachings of the present creation. Exemplary embodiments of aspects of the present inventive concept illustrated and described herein include their complementary counterparts. Throughout this specification, the same reference numbers or the same designators refer to the same elements.
此外,本文中參照剖視圖及/或平面圖來闡述示例性實施例,其中所述剖視圖及/或平面圖是理想化示例性說明圖。因此,預期存在由例如製造技術及/或容差所造成的相對於圖示形狀的偏離。因此,示例性實施例不應被視作僅限於本文中所示區的形狀,而是欲包括由例如製造所導致的形狀偏差。因此,圖中所示的區為示意性的,且其形狀並非旨在說明裝置的區的實際形狀、亦並非旨在限制示例性實施例的範圍。Furthermore, example embodiments are described herein with reference to cross-sectional and/or plan views, which are illustrations of idealized example illustrations. Accordingly, deviations from the shapes shown, for example, caused by manufacturing techniques and/or tolerances, are expected. Accordingly, the exemplary embodiments should not be considered limited to the shapes of the regions shown herein, but are intended to include deviations in shapes resulting from, for example, manufacturing. Thus, the regions illustrated in the figures are schematic and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of example embodiments.
請參閱圖1-3,圖1為根據本創作之偏振分光模組的方塊圖;圖2為根據本創作之偏振分光模組具體細節的示意圖;圖3為說明本創作之偏振分光模組接收來自外界環境之入射光的示意圖。如圖1所示,根據本創作之偏振分光模組100,其係應用於接收脈衝光Lp中的環境中,偏振分光模組100包括:線偏振片11、四分之一相位延遲片12、分光鏡13、反射鏡14、隔離層15、以及空氣層16。Please refer to Figures 1-3, Figure 1 is a block diagram of the polarization beam splitter module according to the present creation; Figure 2 is a schematic diagram of the specific details of the polarization beam splitter module according to the present creation; Figure 3 illustrates the polarization beam splitter module reception of the present creation Schematic diagram of incident light from the external environment. As shown in FIG. 1 , the polarization
具體地,如圖1及圖2所示,根據本創作之線偏振片11,其係用於將任意光束轉換為線偏振光L,其中,線偏振片11係將入射之脈衝光Lp轉換為具有預設偏極化方向D的線偏振光L。具體地,在一些實施例中,線偏振片11為金屬光柵,舉例而言,線偏振片11可以使用具有互補性的金屬光柵結構製作兆赫波段的二分之一波片,將分別具有電容性與電感性的金屬網彼此以互相垂直的方式堆疊,使得入射之脈衝光Lp沿著這兩個方向的電場分量經歷不同的相位改變,藉此改變脈衝光Lp的偏極化狀態。具體地,請參閱圖3所示,在一些實施例中,脈衝光Lp的波長範圍為紅外光波長範圍,更體而言,脈衝光Lp的波長範圍介於780nm至1400nm之間。並且線偏振片11係將入射之脈衝光Lp轉換為水平線偏振光L1,其中預設偏極化方向D即為水平偏極化方向,然而本創作不限於此。Specifically, as shown in FIG. 1 and FIG. 2 , the
具體地,如圖1及圖2所示,根據本創作之四分之一相位延遲片12,其係設置於線偏振片11上,四分之一相位延遲片12用於將線偏振光L轉換為圓偏振光Lc,其中,四分之一相位延遲片12將具有預設偏極化方向D的線偏振光L轉換為一具有第一偏極化方向D1的圓偏振光Lc。具體地,在一些實施例中,四分之一相位延遲片12可以是反射型、二向色型和雙折射型偏振片其中之一者。較佳地,四分之一相位延遲片12可以使用雙折射晶體,使用雙折射晶體的優點在於雙折射晶體相較於其他偏振片,在高能雷射的照射下較不易產生變化,達成預防長時間高能雷射照射後的熱累積,造成變形、變質等問題之功效。因此,根據本創作的四分之一相位延遲片12可以使用雙折射晶體使得線偏振光L轉換為圓偏振光Lc。具體地,請參閱圖3所示,在本實施例中,四分之一相位延遲片12可以為四分之一波片(quarter wave plate, QWP),使得水平線偏振光L1係入射至四分之一相位延遲片12後,四分之一相位延遲片12係將水平線偏振光L1轉換為換為右旋偏振光Lcr,其中第一偏極化方向D1即為右旋偏極化方向,然而本創作不限於此。Specifically, as shown in FIG. 1 and FIG. 2 , the quarter-
具體地,如圖1及圖2所示,根據本創作之分光鏡13,其係設置於四分之一相位延遲片12上,該分光鏡13具有入射面131、第一出光面132、以及第二出光面133,其中,該具有第一偏極化方向D1的圓偏振光Lc從入射面131進入分光鏡13,分光鏡13從第一出光面132輸出沿第一方向X傳輸的具有第一偏極化方向D1的圓偏振光Lc至隔離層15,並且分光鏡13從第二出光面133輸出沿第二方向Y傳輸的具有第一偏極化方向D1的圓偏振光Lc。具體地,在一些實施例中,分光鏡13可以是由天然方解石晶體製成的雙折射偏光器件,其係採用雙反射式結構設計,利用入射光在晶體介面上的全內雙反射完成改變偏極化方向以及分束,從而實現透過分光鏡13可以完成改變偏極化方向、分束以及光束轉向等多種功能的一體化之功效。具體地,請參閱圖3所示,在一些實施例中,透過分光鏡13將右旋偏振光Lcr轉換為沿第一方向X傳輸的右旋偏振光Lcr至隔離層15,以及沿第二方向Y傳輸的右旋偏振光Lcr至空氣層16,然而本創作不限於此。Specifically, as shown in FIG. 1 and FIG. 2 , the
具體地,如圖1及圖2所示,根據本創作之空氣層16,其係設置於四分之一相位延遲片12上,並且耦接於第二出光面133。具體地,在一些實施例中,空氣層16的折射率小於反射鏡14的折射率,使得由空氣層16相對於反射鏡14為光疏介質,造成光束由空氣層16傳輸至反射鏡14後產生偏極化方向的改變,形成與原本光束偏振方向正交的反射光。Specifically, as shown in FIG. 1 and FIG. 2 , the
具體地,如圖1及圖2所示,根據本創作之反射鏡14,其係設置於四分之一相位延遲片12上並耦接於第二出光面133,反射鏡14係用於使光束產生反射,進而改變光束的傳輸方向。具體地,請參閱圖2及圖3所示,在一些實施例中,沿第二方向Y傳輸的右旋偏振光Lcr傳輸至反射鏡14後,形成沿第二方向Y傳輸的具有第二偏極化方向D2的圓偏振光Lc,其中第二偏極化方向D2即為左旋偏極化方向,使得原本沿第二方向Y傳輸的右旋偏振光Lcr轉換為沿第一方向X傳輸的左旋偏振光Lcl至隔離層15。具體地,在一些實施例中,第一偏極化方向D1與第二偏極化方向D2相互正交,然而本創作不限於此。Specifically, as shown in FIG. 1 and FIG. 2 , the
具體地,如圖1及圖2所示,根據本創作之隔離層15,其係設置於該偏振分光模組100的最上層。更具體而言,在存在複數偏振分光模組100時設置在偏振分光模組100之間。從而,隔離層15在一些實施例中可以作為複數偏振分光模組100之間的隔離結構。在本創作中,用詞「隔離」涵蓋電性隔離及物理隔離二個方面。隔離層15可以為無機封裝材料的單層、無機封裝材料的多層堆疊、或成對的無機封裝材料與有機封裝材料的堆疊。所使用的無機封裝材料例如但不限於為氮化矽(SiNx)、氧化矽(SiOx)、氮氧化矽(SiONx)、氧化鋁(AlOx)、或氧化鈦(TiOx)。Specifically, as shown in FIGS. 1 and 2 , the
值得一提的是,根據本創作之偏振分光模組100的隔離層15可以直接作為其他偏光片的基板使用,不須另外設置基板,並且使用者可以直接在隔離層15上進行簡單的加工實現不同偏極化方向之激發光,使得本創作可以實現偏振分光模組100薄型化外,同時具有廣泛適用性。It is worth mentioning that the
藉此,本創作提供一種偏振分光模組100,其係可以藉由簡單的加工及組合,即可實現同時完成多個不同偏極化方向之激發光的功能,從而使偏振分光系統簡單化和薄型化,進一步提高了其技術性能和可靠性,在光學測試、光學調製、光學測距等應用技術領域中具有極為重要的實際意義。此外,偏振分光模組100之線偏振片11及四分之一相位延遲片12藉由使用雙折射型偏振片,在高能雷射的照射下較不易產生變化,達成預防長時間高能雷射照射後的熱累積,防止造成變形、變質等問題之功效。Therefore, the present invention provides a polarization
以下提供偏振分光模組的其他示例,以使本創作所屬技術領域中具有通常知識者更清楚的理解可能的變化。以與上述實施例相同的元件符號指示的元件實質上相同於上述參照圖1、圖2所敘述者。與偏振分光模組100相同的元件、特徵、和優點將不再贅述。Other examples of polarized light splitting modules are provided below, so that those with ordinary knowledge in the technical field to which this creation belongs can more clearly understand possible changes. Elements denoted by the same reference numerals as the above-mentioned embodiments are substantially the same as those described above with reference to FIG. 1 and FIG. 2 . The same elements, features, and advantages as those of the polarization
請參照圖4,其繪示例示性的第一偏振分光模組100A。第一偏振分光模組100A與偏振分光模組100的不同之處在於,第一偏振分光模組100A進一步設置有第一四分之一相位延遲片121,該第一四分之一相位延遲片121設置於隔離層15A上並且涵蓋分光鏡13A,第一四分之一相位延遲片121係用於將圓偏振光轉換為線偏振光。具體地,在一些實施例中,第一偏振分光模組100A接收脈衝光Lp後,第一偏振分光模組100A輸出具有預設偏極化方向D的線偏振光以及第二偏極化方向D2的圓偏振光,其中,預設偏極化方向D的線偏振光即為水平線偏振光L1,第二偏極化方向D2的圓偏振光即為左旋偏振光Lcl,然而本創作不限於此。Please refer to FIG. 4 , which illustrates an exemplary first polarization
請參照圖5,其繪示例示性的第二偏振分光模組100B。第二偏振分光模組100B與偏振分光模組100的不同之處在於,第二偏振分光模組100B進一步設置有第二四分之一相位延遲片122,第二四分之一相位延遲片122設置於隔離層15B上並且涵蓋分光鏡13B以及反射鏡14B,第二四分之一相位延遲片122係用於將圓偏振光轉換為線偏振光。具體地,在一些實施例中,第二偏振分光模組100B接收具有預設偏極化方向D的線偏振光後,第二偏振分光模組100B輸出具有預設偏極化方向D的線偏振光以及具有第三偏極化方向D3的線偏振光,其中,四分之一相位延遲片12B可以為四分之一波片,且偏極化方向D與第三偏極化方向D3相互正交,如此一來,偏極化方向D的線偏振光即為水平線偏振光L1,第三偏極化方向D3的線偏振光即為垂直線偏振光L2,然而本創作不限於此。Please refer to FIG. 5 , which illustrates an exemplary second polarization
需要進一步說明的是,相較於偏振分光模組100,第二偏振分光模組100B之分光鏡13B以及反射鏡14B與振分光模組100之分光鏡13以及反射鏡14為鏡像對稱,產生鏡像對稱的方式可以是簡單將偏振分光模組100水平翻轉180度後,設置第二四分之一相位延遲片122於隔離層15B上,以產生第二偏振分光模組100B,然而本創作不限於此。It should be further noted that, compared with the polarization
請參照圖6,其繪示例示性的偏振分光模組100C。第三偏振分光模組100C與偏振分光模組100的不同之處在於,第三偏振分光模組100C進一步設置有偏光層17,偏光層17設置於隔離層15C上並且涵蓋反射鏡14C,偏光層17係用於將圓偏振光轉換為線偏振光。具體地,在一些實施例中,第三偏振分光模組100C接收第二偏極化方向D2的圓偏振光後,第三偏振分光模組100C輸出具有第一偏極化方向D1的圓偏振光以及具有第四偏極化方向D4的線偏振光,其中,第一偏極化方向D1的圓偏振光即為右旋偏振光Lcr,且偏光層17可以為任意偏極化方向之偏振片,在本實施例中,第四偏極化方向D4與預設偏極化方向D之間相差45度,然而,第四偏極化方向D4的線偏振光可以是任意偏振角度的線偏振光,不須特別限制。Please refer to FIG. 6 , which illustrates an exemplary polarization
可以理解的是,本創作所屬技術領域中具有通常知識者能夠基於上述示例再作出各種變化和調整,在此不再一一列舉。以下將重點放在應用根據實施例的四束偏振分光系統。It can be understood that those with ordinary knowledge in the technical field to which the present creation belongs can make various changes and adjustments based on the above examples, which will not be listed one by one here. The following will focus on applying the four-beam polarization beam splitting system according to the embodiment.
請參閱圖7,其繪示例示性的四束偏振分光系統10。如圖6所示,根據本創作之四束偏振分光系統10,其係應用如上所述的實施例,四束偏振分光系統10包括:第一偏振分光模組100A、第二偏振分光模組100B、以及第三偏振分光模組100C。Please refer to FIG. 7 , which illustrates an exemplary four-beam polarization beam splitting system 10 . As shown in FIG. 6 , according to the four-beam polarization beam splitting system 10 of the present invention, which applies the above-mentioned embodiments, the four-beam polarization beam splitting system 10 includes: a first polarization
為供進一步瞭解本創作構造特徵、運用技術手段及所預期達成之功效,茲將本創作實際執行過程加以敘述,相信當可由此而對本創作有更深入且具體瞭解,如下所述:In order to further understand the structural characteristics of this creation, the use of technical means and the expected effect, the actual execution process of this creation is described here. I believe that this will give you a more in-depth and specific understanding of this creation, as follows:
具體地,請參閱圖7所示,根據本創作之四束偏振分光系統10實際分光過程說明如下:首先,第一偏振分光模組100A接收脈衝光Lp,第一偏振分光模組100A輸出水平線偏振光L1至第二偏振分光模組100B,並且第一偏振分光模組100A輸出左旋偏振光Lcl至第三偏振分光模組100C;接著,第二偏振分光模組100B接收水平線偏振光L1,第二偏振分光模組100B輸出具有預設偏極化方向D的水平線偏振光L1以及具有第三偏極化方向D3的垂直線偏振光L2;同時,第三偏振分光模組100C處接收左旋偏振光Lcl,第三偏振分光模組100C輸出具有第一偏極化方向D1的右旋偏振光Lcr以及具有第四偏極化方向D4的線偏振光。Specifically, please refer to FIG. 7 , the actual light splitting process of the four-beam polarized light splitting system 10 according to the present invention is described as follows: First, the first polarized
藉此,本創作透過偏振分光模組100簡單的加工及組合,即可實現四種不同偏極化方向之激發光,將原本需要至少兩光源產生複數偏振光源才能執行的測距感測技術,縮減至僅需要一個光源且可自行調整激發光的偏極化方向,以執行ToF感測技術之運算,大幅減少成本且增加系統的穩定性。In this way, through the simple processing and combination of the polarization
值得一提的是,根據本創作之四束偏振分光系統10可以偏振分光模組100進行不同的加工及組合,即可實現四種不同偏極化方向之激發光,四束偏振分光系統10所輸出的偏振光之偏振方向可以根據使用者需求進行調整,舉例而言,第三偏振分光模組100C未設有該偏光層17時,四束偏振分光系統10所輸出之偏振光將為水平線偏振光L1、垂直線偏振光L2、右旋偏振光Lcr、以及左旋偏振光Lcl。此外,當越多的偏振分光模組100進行不同的加工及組合,本創作之偏振分光模組100可以實現六束偏振分光系統或者八束偏振分光系統,可以理解的是,本創作所屬技術領域中具有通常知識者能夠基於上述示例再作出各種變化和調整,在此不再一一列舉。It is worth mentioning that, according to the four-beam polarization beam splitting system 10 of the present creation, the polarization
最後,再將本創作的技術特徵及其可達成之技術功效彙整如下:Finally, the technical features of this creation and its achievable technical effects are summarized as follows:
其一,本創作提供一種偏振分光模組100,其係可以藉由簡單的加工及組合,即可實現同時完成多個不同偏極化方向之激發光的功能,從而使偏振分光系統簡單化和薄型化,進一步提高了其技術性能和可靠性,在光學測試、光學調製、光學測距等應用技術領域中具有極為重要的實際意義。First, the present invention provides a polarization
其二,根據本創作之偏振分光模組100之線偏振片11及四分之一相位延遲片12藉由使用雙折射型偏振片,在高能雷射的照射下較不易產生變化,達成預防長時間高能雷射照射後的熱累積,防止造成變形、變質等問題之功效。Second, by using birefringent polarizers, the
其三,本創作透過偏振分光模組100簡單的加工及組合,即可實現四種不同偏極化方向之激發光,將原本需要至少兩光源產生複數偏振光源才能執行的測距感測技術,縮減至僅需要一個光源且可自行調整激發光的偏極化方向,以執行ToF感測技術之運算,大幅減少成本且增加系統的穩定性。Thirdly, through simple processing and combination of the polarization
以上係藉由特定的具體實施例說明本創作之實施方式,所屬技術領域具有通常知識者可由本說明書所揭示之內容輕易地瞭解本創作之其他優點及功效。The above describes the implementation of the present invention by means of specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.
以上所述僅為本創作之較佳實施例,並非用以限定本創作之範圍;凡其它未脫離本創作所揭示之精神下所完成之等效改變或修飾,均應包含在下述之專利範圍內。The above descriptions are only preferred embodiments of this creation, and are not intended to limit the scope of this creation; all other equivalent changes or modifications that have been completed without departing from the spirit disclosed in this creation shall be included in the following patent scope Inside.
100、100A、100B、100C:偏振分光模組
11、11A、11B、11C:線偏振片
12、12A、12B、12C:四分之一相位延遲片
121:第一四分之一相位延遲片
122:第二四分之一相位延遲片
13、13A、13B、13C:分光鏡
131:入射面
132:第一出光面
133:第二出光面
14、14A、14B、14C:反射鏡
15、15A、15B、15C:隔離層
16:空氣層
17:偏光層
A:預設偏極化方向
A1:第一偏極化方向
A2:第二偏極化方向
A3:第三偏極化方向
A4:第四偏極化方向
L:線偏振光
Lc:圓偏振光
Lcl:左旋偏振光
Lcr:右旋偏振光
PL:脈衝光
X:第一方向
Y:第二方向
100, 100A, 100B, 100C: Polarization
圖1為根據本創作之偏振分光模組的方塊圖; 圖2為根據本創作之偏振分光模組具體細節的示意圖; 圖3為說明本創作之偏振分光模組接收來自外界環境之入射光的示意圖; 圖4至圖6分別為其他各種不同的例示性的偏振分光模組的示意圖; 圖7為例示性的四束偏振分光系統的示意圖。 Fig. 1 is the block diagram of the polarization beam splitting module according to the present creation; 2 is a schematic diagram of the specific details of the polarization beam splitting module according to the present creation; 3 is a schematic diagram illustrating that the polarization beam splitting module of the present invention receives incident light from the external environment; 4 to 6 are schematic diagrams of various other exemplary polarization beam splitting modules, respectively; FIG. 7 is a schematic diagram of an exemplary four-beam polarization splitting system.
100:偏振分光模組 100: Polarization beam splitter module
11:線偏振片 11: Linear polarizer
12:四分之一相位延遲片 12: Quarter phase retarder
13:分光鏡 13: Beamsplitter
14:反射鏡 14: Reflector
15:隔離層 15: isolation layer
16:空氣層 16: Air layer
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TWI816358B (en) * | 2022-04-11 | 2023-09-21 | 大陸商廣州印芯半導體技術有限公司 | Polarization beam splitting module and four-beam polarization beam splitting system using the same |
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