TWM581511U - Disc brush for glass substrate - Google Patents

Disc brush for glass substrate Download PDF

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Publication number
TWM581511U
TWM581511U TW108204346U TW108204346U TWM581511U TW M581511 U TWM581511 U TW M581511U TW 108204346 U TW108204346 U TW 108204346U TW 108204346 U TW108204346 U TW 108204346U TW M581511 U TWM581511 U TW M581511U
Authority
TW
Taiwan
Prior art keywords
brush
base
glass substrate
ribs
ring portion
Prior art date
Application number
TW108204346U
Other languages
Chinese (zh)
Inventor
林永強
許佳富
李宜哲
Original Assignee
朗曦科技股份有限公司
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Filing date
Publication date
Application filed by 朗曦科技股份有限公司 filed Critical 朗曦科技股份有限公司
Publication of TWM581511U publication Critical patent/TWM581511U/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/26Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/22Lapping pads for working plane surfaces characterised by a multi-layered structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Brushes (AREA)
  • Cleaning In General (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

本創作有關於一種用於玻璃基板之盤刷,其包含有一個基座與一個刷體。基座具有多個肋部與多個開槽,該等肋部與該等開槽之間為交錯排列,刷體設於基座且被基座之肋部給限制位置,此外,刷體的一部分經由基座之開槽凸出於基座外,用以對玻璃基板提供清潔效果。藉此,本創作之用於玻璃基板之盤刷利用特殊結構將基座與刷體固定在一起,並未使用到黏膠,如此即可有效避免基座與刷體之間因為清潔液或溫度的影響而發生結構分離的情況。The present invention relates to a disc brush for a glass substrate, which comprises a base and a brush body. The base has a plurality of ribs and a plurality of slots, and the ribs are staggered with the slots, and the brush body is disposed on the base and is limited by the ribs of the base, and further, the brush body A portion protrudes from the base through the slot of the base to provide a cleaning effect to the glass substrate. Therefore, the disc brush for the glass substrate of the present invention uses a special structure to fix the base and the brush body together, and the adhesive is not used, so that the cleaning liquid or the temperature between the base and the brush body can be effectively avoided. The effect of structural separation occurs.

Description

用於玻璃基板之盤刷Dish brush for glass substrate

本創作與用於玻璃基板之盤刷有關,特別是指一種可抗腐蝕及提升良率之盤刷。This creation relates to a disc brush for a glass substrate, and in particular to a disc brush that is resistant to corrosion and improves yield.

在玻璃基板的清潔作業當中,一般使用滾刷或盤刷來刷洗玻璃基板,就海綿盤刷而言,主要利用黏膠將海綿刷固定於基座上,再將基座固定於驅動源,使基座在驅動源的帶動之下促使海綿刷配合清潔液對玻璃基板進行清洗動作。In the cleaning operation of the glass substrate, the glass substrate is generally brushed by a roller brush or a disk brush. In the case of the sponge disk brush, the sponge brush is mainly fixed on the base by the adhesive, and then the base is fixed to the driving source, so that the base is fixed to the driving source. The susceptor is driven by the driving source to cause the sponge brush to cooperate with the cleaning liquid to clean the glass substrate.

然而在海綿刷浸入清潔液之後,海綿刷和基座之間的黏著介面會受到清潔液的侵入及腐蝕,導致海綿刷和基座之間容易發生脫膠問題,造成盤刷失效。此外,黏膠也可能跟清潔液之間產生化學變化,使黏膠析出對良率造成不良影響的物質。因此,傳統盤刷在結構上有改良之必要。However, after the sponge brush is immersed in the cleaning liquid, the adhesive interface between the sponge brush and the base is invaded and corroded by the cleaning liquid, which causes a problem of degumming between the sponge brush and the base, which causes the disk brush to fail. In addition, the glue may also chemically change with the cleaning liquid, causing the glue to precipitate substances that adversely affect the yield. Therefore, the conventional disc brush is necessary for structural improvement.

本創作之主要目的在於提供一種用於玻璃基板之盤刷,其能有效解決脫膠問題,並提升產品良率。The main purpose of this creation is to provide a disc brush for a glass substrate, which can effectively solve the degumming problem and improve the product yield.

為了達成上述主要目的,本創作之用於玻璃基板之盤刷包含有一個基座與一個刷體。該基座具有多個肋部與多個開槽,各該開槽位於相鄰二該肋部之間,該刷體設於該基座且被該基座之該等肋部給限制位置,如此可以省略黏膠的使用,此外,該刷體的一部分經由該基座之該等開槽凸出於該基座外,用以對玻璃基板提供清潔效果。In order to achieve the above main object, the disk brush for a glass substrate of the present invention comprises a base and a brush body. The base has a plurality of ribs and a plurality of slots, each of the slots being located between the adjacent two ribs, the brush body being disposed on the base and being restricted by the ribs of the base. In this way, the use of the adhesive can be omitted. In addition, a part of the brush body protrudes out of the base via the slots of the base for providing a cleaning effect on the glass substrate.

由上述可知,本創作之用於玻璃基板之盤刷利用該等肋部將該基座與該刷體固定在一起,並非使用傳統以黏膠結合的方式,因而能夠有效避免該基座與該刷體之間因為清潔液的影響而發生相互分離的情況,另外也不會有任何會影響產品良率的物質析出,以維持良好的產品良率。It can be seen from the above that the disk brush for the glass substrate of the present invention uses the ribs to fix the base and the brush body together, instead of using a conventional adhesive bonding method, thereby effectively avoiding the base and the The brush bodies are separated from each other by the influence of the cleaning liquid, and there is no substance precipitation that affects the yield of the product to maintain good product yield.

較佳地,該刷體具有多個凹槽,該刷體以該等凹槽一對一地嵌卡於該基座之該等肋部,以提升定位精度。Preferably, the brush body has a plurality of grooves, and the brush body is fitted to the ribs of the base one-to-one with the grooves to improve the positioning accuracy.

較佳地,該基座由一個座體與一個蓋體所構成,使該刷體定位在該座體與該該蓋體之間,該座體與該蓋體之間可以利用焊接、螺紋、卡榫配合或是諸如螺絲之類的固定元件組裝在一起,以取代傳統使用黏膠結合的方式。Preferably, the base is formed by a seat body and a cover body, the brush body is positioned between the seat body and the cover body, and the base body and the cover body can be welded, threaded, The cassette fits or a fixing element such as a screw is assembled to replace the conventional way of using a glue bond.

較佳地,該蓋體具有一個環部,該等肋部設於該環部之內周面,而且,該等肋部可以相對於該環部之中心呈等角度環狀排列、旋轉對稱排列、相互平行排列、多邊形排列等不同態樣。Preferably, the cover body has a ring portion, and the rib portions are disposed on the inner circumferential surface of the ring portion, and the rib portions can be arranged in an equiangular annular shape and rotationally symmetrically with respect to the center of the ring portion. Different orientations such as parallel arrangement and polygonal arrangement.

有關本創作所提供對於用於玻璃基板之盤刷的詳細構造、特點、組裝或使用方式,將於後續的實施方式詳細說明中予以描述。然而,在本創作領域中具有通常知識者應能瞭解,該等詳細說明以及實施本創作所列舉的特定實施例,僅係用於說明本創作,並非用以限制本創作之專利申請範圍。The detailed construction, features, assembly or use of the disc brushes provided for the glass substrate provided by the present invention will be described in the detailed description of the subsequent embodiments. However, those of ordinary skill in the art should understand that the detailed description and specific embodiments of the present invention are merely used to illustrate the present invention and are not intended to limit the scope of the patent application.

申請人首先在此說明,於整篇說明書中,包括以下介紹的實施例以及申請專利範圍的請求項中,有關方向性的名詞皆以圖式中的方向為基準。其次,在以下將要介紹之實施例以及圖式中,相同之元件標號,代表相同或近似之元件或其結構特徵。The Applicant first describes here, and throughout the specification, including the embodiments described below and the claims of the claims, the nouns relating to directionality are based on the directions in the drawings. In the following embodiments, the same reference numerals will be given to the same or similar elements or structural features thereof.

請參閱第1至3圖,本創作第1實施例之用於玻璃基板之盤刷10包含有一個基座20及一個刷體30,Referring to FIGS. 1 to 3, the disc brush 10 for a glass substrate according to the first embodiment of the present invention includes a base 20 and a brush body 30.

基座20的材質可以選用工程塑膠或金屬,在此不加以限定。基座20具有一個座體21與一個蓋體23,座體21之一端面具有二個螺孔22,蓋體23具有一個環部24與四個肋部25,在本實施例中,該等肋部25自環部24之內周面朝環部24之中心一體地延伸而出且相對於環部24之中心呈等角度環狀排列,使相鄰二個肋部25之間形成一個呈扇形之開槽26,此外,該等肋部25之末端共同一體地連接一個連接部27,連接部27具有二個穿孔28,藉由二根螺栓29以一對一的方式穿過蓋體23之連接部27的穿孔28且鎖設於座體21之螺孔22,使座體21與蓋體23組裝在一起。The material of the base 20 can be selected from engineering plastics or metal, and is not limited herein. The base 20 has a base body 21 and a cover body 23. One end surface of the base body 21 has two screw holes 22, and the cover body 23 has a ring portion 24 and four rib portions 25, which are in the embodiment. The ribs 25 integrally extend from the inner peripheral surface of the ring portion 24 toward the center of the ring portion 24 and are equiangularly arranged with respect to the center of the ring portion 24, so that a space is formed between the adjacent two rib portions 25. The fan-shaped slot 26, in addition, the ends of the ribs 25 are integrally connected to a connecting portion 27, and the connecting portion 27 has two through holes 28, which are passed through the cover body 23 in a one-to-one manner by two bolts 29. The through hole 28 of the connecting portion 27 is locked to the screw hole 22 of the seat body 21 to assemble the seat body 21 and the cover body 23.

刷體30的材質為海綿。刷體30設於座體21與蓋體23之間,更明確地說,刷體30被蓋體23之環部24所圍繞著,刷體30之一端面抵靠於座體21,刷體30之另一端面具有四個凹槽31,刷體30之凹槽31以一對一的方式嵌卡於基座20之蓋體23的肋部25,此外,刷體30更具有一個供該二螺栓29穿過之軸孔32,以避免與該二螺栓29之間產生干涉。如此,刷體30可以穩固地組裝於基座20,而且在組裝完成之後,刷體30會有一部分經由該等開槽26凸出基座20外,這些凸出於基座20外的部分即形成多個用來清潔玻璃基板(凸中未示)之凸部33。The material of the brush body 30 is a sponge. The brush body 30 is disposed between the seat body 21 and the cover body 23, and more specifically, the brush body 30 is surrounded by the ring portion 24 of the cover body 23. One end surface of the brush body 30 abuts against the seat body 21, and the brush body The other end surface of the cover 30 has four recesses 31, and the recesses 31 of the brush body 30 are fitted in a one-to-one manner to the ribs 25 of the cover body 23 of the base 20, and further, the brush body 30 has a The two bolts 29 pass through the shaft holes 32 to avoid interference with the two bolts 29. In this way, the brush body 30 can be stably assembled to the base 20, and after the assembly is completed, a part of the brush body 30 protrudes out of the base 20 via the slots 26, and the portions protruding from the outside of the base 20 are A plurality of convex portions 33 for cleaning the glass substrate (not shown) are formed.

在此需要補充說明的是,座體21與蓋體23之間不限於使用螺栓29鎖固的方式進行組裝,亦可以用焊接或螺紋、卡榫配合的方式固定在一起,如第4及8圖所示,如此,座體21可以省略螺孔22的加工,蓋體23可以省略連接部27的加工,至於刷體30則是可以省略軸孔32的加工。It should be noted that the seat body 21 and the cover body 23 are not limited to being assembled by bolts 29, and may be fixed by welding or screwing or snapping, such as 4 and 8. As shown in the figure, the seat body 21 can omit the processing of the screw hole 22, and the cover body 23 can omit the processing of the connecting portion 27, and the brush body 30 can eliminate the machining of the shaft hole 32.

另一方面,蓋體23之肋部25的結構可以根據實際需要而有不同的變化,刷體30之凹槽31則是配合肋部25而有相同的結構變化,例如:在第4及5圖當中,該等肋部25之末端並未連接在一起,使該等開槽26之間彼此相通;在第6及7圖當中,該等肋部25以相互平行的方式連接於環部24之內周面,使相鄰二個肋部25之間的開槽26與刷體30之凸部33皆以狹長型的態樣呈現;在第8至11圖當中,該等肋部25連接成矩形或三角形的態樣;在第12及13圖當中,該等肋部25相對於環部24之中心呈旋轉對稱;在第14及15圖當中,蓋體40更具有一個連接環部41之端壁42,端壁42以圓孔作為開槽43且以相鄰二個圓孔之間的連接部分作為肋部44,該等開槽43與該等肋部44相對於環部41之中心呈等間隔環狀排列且彼此交錯設置,為了配合圓孔的態樣,刷體30之凸部33以圓柱形的態樣呈現,並以一對一的方式穿設於開槽43,相鄰二個凸部33之間形成一個供肋部44嵌卡之凹槽31。On the other hand, the structure of the rib 25 of the cover 23 can be differently changed according to actual needs, and the groove 31 of the brush body 30 has the same structural change as the rib 25, for example, in the 4th and 5th. In the figure, the ends of the ribs 25 are not connected together, so that the slots 26 communicate with each other; in the sixth and seventh figures, the ribs 25 are connected to the ring portion 24 in a mutually parallel manner. The inner circumferential surface is such that the groove 26 between the adjacent two ribs 25 and the convex portion 33 of the brush body 30 are both elongated; in the eighth to eleventh, the ribs 25 are connected A rectangular or triangular shape; in the 12th and 13th views, the ribs 25 are rotationally symmetrical with respect to the center of the ring portion 24; in the 14th and 15th, the cover 40 further has a connecting ring portion 41. The end wall 42 and the end wall 42 have a circular hole as the slot 43 and a connecting portion between the adjacent two circular holes as the rib 44, and the slots 43 and the ribs 44 are opposite to the ring portion 41. The centers are arranged at equal intervals in a ring shape and are alternately arranged with each other. In order to match the shape of the circular holes, the convex portions 33 of the brush body 30 are presented in a cylindrical shape and are in a one-to-one manner. Disposed through the slot 43, a groove 31 for a rib 44 of the insert card between the two adjacent convex portions 33.

綜上所陳,本創作之盤刷10利用該等肋部25對刷體30提供定位效果,並非使用傳統以黏膠結合的方式,因而能夠有效解決習用技術當中因為黏膠被清潔液所腐蝕而造成基座20與刷體30分離的問題,也因為沒有使用黏膠,所以在清洗玻璃基板的過程中也不會有任何對產品良率造成不良影響的物質析出,以維持良好的產品良率。In summary, the disc brush 10 of the present invention uses the ribs 25 to provide a positioning effect on the brush body 30, instead of using a conventional adhesive bonding method, thereby effectively solving the problem in the prior art because the adhesive is corroded by the cleaning liquid. The problem of separating the susceptor 20 from the brush body 30 is also because no glue is used, so that no material that adversely affects the yield of the product is precipitated during the process of cleaning the glass substrate, so as to maintain a good product. rate.

10‧‧‧盤刷10‧‧‧Dish brush

20‧‧‧基座 20‧‧‧ Pedestal

21‧‧‧座體 21‧‧‧ body

22‧‧‧螺孔 22‧‧‧ screw holes

23‧‧‧蓋體 23‧‧‧ Cover

24‧‧‧環部 24‧‧‧ Ring Department

25‧‧‧肋部 25‧‧‧ ribs

26‧‧‧開槽 26‧‧‧ slotting

27‧‧‧連接部 27‧‧‧Connecting Department

28‧‧‧穿孔 28‧‧‧Perforation

29‧‧‧螺栓 29‧‧‧Bolts

30‧‧‧刷體 30‧‧‧ brush body

31‧‧‧凹槽 31‧‧‧ Groove

32‧‧‧軸孔 32‧‧‧Axis hole

33‧‧‧凸部 33‧‧‧ convex

40‧‧‧蓋體 40‧‧‧ cover

41‧‧‧環部 41‧‧‧ Ring Department

42‧‧‧端壁 42‧‧‧End wall

43‧‧‧開槽 43‧‧‧ slotting

44‧‧‧肋部 44‧‧‧ ribs

第1圖為本創作第1實施例之盤刷的外觀立體圖。 第2圖為本創作第1實施例之盤刷的立體分解圖。 第3圖為本創作第1實施例之盤刷的端視圖。 第4圖為本創作第2實施例之盤刷的立體分解圖。 第5圖為本創作第2實施例之盤刷的端視圖。 第6圖為本創作第3實施例之盤刷的立體分解圖。 第7圖為本創作第3實施例之盤刷的端視圖。 第8圖為本創作第4實施例之盤刷的立體分解圖。 第9圖為本創作第4實施例之盤刷的端視圖。 第10圖為本創作第5實施例之盤刷的立體分解圖。 第11圖為本創作第5實施例之盤刷的端視圖。 第12圖為本創作第6實施例之盤刷的立體分解圖。 第13圖為本創作第6實施例之盤刷的端視圖。 第14圖為本創作第7實施例之盤刷的立體分解圖。 第15圖為本創作第7實施例之盤刷的端視圖。Fig. 1 is a perspective view showing the appearance of a disk brush according to a first embodiment of the present invention. Fig. 2 is an exploded perspective view showing the disk brush of the first embodiment of the present invention. Fig. 3 is an end view of the disk brush of the first embodiment of the present invention. Fig. 4 is an exploded perspective view showing the disk brush of the second embodiment of the present invention. Fig. 5 is an end view of the disk brush of the second embodiment of the present invention. Fig. 6 is an exploded perspective view showing the disk brush of the third embodiment of the present invention. Fig. 7 is an end view of the disk brush of the third embodiment of the present invention. Fig. 8 is an exploded perspective view showing the disk brush of the fourth embodiment of the present invention. Figure 9 is an end view of the disc brush of the fourth embodiment of the present invention. Fig. 10 is an exploded perspective view showing the disk brush of the fifth embodiment of the present invention. Figure 11 is an end view of the disk brush of the fifth embodiment of the present invention. Fig. 12 is an exploded perspective view showing the disk brush of the sixth embodiment of the present invention. Figure 13 is an end view of the disk brush of the sixth embodiment of the present invention. Fig. 14 is an exploded perspective view showing the disk brush of the seventh embodiment of the present invention. Figure 15 is an end view of the disk brush of the seventh embodiment of the present invention.

Claims (10)

一種用於玻璃基板之盤刷,包含有: 一基座,具有多個肋部與多個開槽,各該開槽位於相鄰二該肋部之間;以及 一刷體,設於該基座,該刷體被該基座之該等肋部給限制位置,且該刷體的一部分經由該基座之該等開槽凸出於該基座外。A disc brush for a glass substrate, comprising: a base having a plurality of ribs and a plurality of slots, each of the slots being located between the adjacent two of the ribs; and a brush body disposed on the base The holder is given a restricted position by the ribs of the base, and a portion of the brush protrudes out of the base via the slots of the base. 如請求項1所述之用於玻璃基板之盤刷,其中該刷體具有多個凹槽,各該凹槽嵌卡該基座之一該肋部。A disk brush for a glass substrate according to claim 1, wherein the brush body has a plurality of grooves, each of the grooves being embedded in one of the ribs of the base. 如請求項2所述之用於玻璃基板之盤刷,其中該基座具有一座體與一蓋體,該蓋體設於該座體且具有該等肋部與該等開槽,該刷體設於該座體與該蓋體之間。The disk brush for a glass substrate according to claim 2, wherein the base has a body and a cover, the cover is disposed on the base and has the ribs and the slots, the brush body It is disposed between the seat body and the cover body. 如請求項3所述之用於玻璃基板之盤刷,其中該蓋體更具有一環繞該刷體之環部,該等肋部自該環部之內周面朝該環部之中心延伸而出且相對於該環部之中心呈等角度環狀排列。The disc brush for a glass substrate according to claim 3, wherein the cover body further has a ring portion surrounding the brush body, the rib portions extending from an inner peripheral surface of the ring portion toward a center of the ring portion And arranged at equal angular intervals with respect to the center of the ring portion. 如請求項4所述之用於玻璃基板之盤刷,其中該蓋體更具有一連接該等肋部之連接部。A disk brush for a glass substrate according to claim 4, wherein the cover body further has a connecting portion connecting the ribs. 如請求項4所述之用於玻璃基板之盤刷,其中各該肋部之末端並未連接在一起。A disk brush for a glass substrate according to claim 4, wherein ends of each of the ribs are not joined together. 如請求項3所述之用於玻璃基板之盤刷,其中該蓋體更具有一環繞該刷體之環部,該等肋部以相互平行的方式連接於該環部之內周面。The disk brush for a glass substrate according to claim 3, wherein the cover body further has a ring portion surrounding the brush body, and the rib portions are connected to the inner circumferential surface of the ring portion in a mutually parallel manner. 如請求項3所述之用於玻璃基板之盤刷,其中該蓋體更具有一環繞該刷體之環部,該等肋部連接於該環部之內周面而形成一多邊形。The disk brush for a glass substrate according to claim 3, wherein the cover body further has a ring portion surrounding the brush body, and the rib portions are connected to the inner circumferential surface of the ring portion to form a polygonal shape. 如請求項3所述之用於玻璃基板之盤刷,其中該蓋體更具有一環繞該刷體之環部,該等肋部連接於該環部之內周面且相對於該環部之中心呈旋轉對稱。The disk brush for a glass substrate according to claim 3, wherein the cover body further has a ring portion surrounding the brush body, the ribs being connected to an inner circumferential surface of the ring portion and opposite to the ring portion The center is rotationally symmetrical. 如請求項3所述之用於玻璃基板之盤刷,其中該蓋體更具有一環部與一連接該環部之端壁,該端壁具有該等肋部與該等開槽,該等肋部相對於該環部之中心呈等間隔環狀排列且與該等開槽之間為交錯設置,該刷體具有多個凸部,該等凸部分別穿設於一該開槽,且相鄰二該凸部之間形成一該凹槽。The disk brush for a glass substrate according to claim 3, wherein the cover body further has a ring portion and an end wall connecting the ring portion, the end wall having the ribs and the slots, the ribs The portions are arranged at equal intervals in a ring shape with respect to the center of the ring portion, and are interlaced with the slots. The brush body has a plurality of convex portions, and the convex portions are respectively disposed in the slot, and the phases are respectively A groove is formed between the adjacent two convex portions.
TW108204346U 2018-11-29 2019-04-10 Disc brush for glass substrate TWM581511U (en)

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