TWM562891U - Actuation sensing module - Google Patents

Abstract

一種致動傳感模組，包含：主體，包括:第一隔腔，內部隔出第一隔室及第二隔室；第二隔腔，內部由承載隔板隔出第三隔室及第四隔室；微粒監測基座，設置於第二隔腔之第三隔室、承載隔板之間；複數個致動器，包括:第一致動器，設置於第二隔室及第一隔板之間；第二致動器，設置於微粒監測基座之承置槽中；複數個傳感器，包括第一傳感器，設置於第一隔室中，並對氣體進行監測；第二傳感器，設置於第三隔室中，以對第三隔室中的氣體監測；以及第三傳感器，位於微粒監測基座之監測通道中，以對監測通道的氣體監測。An actuating sensing module comprises: a main body, comprising: a first compartment, the first compartment and the second compartment are separated inside; the second compartment is internally separated by a carrying partition to partition the third compartment and the first compartment a four compartment; a particle monitoring base disposed between the third compartment of the second compartment and the load-bearing partition; a plurality of actuators including: a first actuator disposed in the second compartment and the first Between the partitions; a second actuator disposed in the receiving groove of the particle monitoring base; a plurality of sensors, including a first sensor, disposed in the first compartment and monitoring the gas; the second sensor, It is disposed in the third compartment to monitor the gas in the third compartment; and a third sensor is located in the monitoring channel of the particle monitoring base to monitor the gas of the monitoring channel.

Description

致動傳感模組Actuating sensor module

本案關於一種致動傳感模組，尤指一種組配於薄型可攜式裝置應用進行氣體監測的致動傳感模組。The present invention relates to an actuating sensing module, and more particularly to an actuating sensing module assembled in a thin portable device for gas monitoring.

現代人對於生活周遭的氣體品質的要求愈來愈重視，例如一氧化碳、二氧化碳、揮發性有機物(Volatile Organic Compound，VOC)、PM2.5、一氧化氮、一氧化硫等等氣體，環境中這些氣體暴露會影響人體健康，嚴重的甚至危害到生命。因此環境氣體品質好壞紛紛引起各國重視，為目前急需要去重視的課題。Modern people are paying more and more attention to the gas quality around them, such as carbon monoxide, carbon dioxide, volatile organic compounds (VOC), PM2.5, nitrogen monoxide, sulfur monoxide, etc., these gases in the environment. Exposure can affect human health, and even endanger life. Therefore, the quality of environmental gases has attracted the attention of all countries, and it is an issue that needs urgent attention.

如何確認氣體品質的好壞，利用一種氣體感測器來監測周圍環境氣體是可行的，若又能即時提供監測資訊，警示處在環境中的人，能夠即時預防或逃離，避免遭受環境中的氣體暴露造成人體健康影響及傷害，利用氣體感測器來監測周圍環境可說是非常好的應用。How to confirm the quality of gas, it is feasible to use a gas sensor to monitor the surrounding environment. If it can provide monitoring information immediately, it can alert people in the environment to prevent or escape immediately, and avoid being exposed to the environment. Gas exposure causes human health effects and injuries, and the use of gas sensors to monitor the surrounding environment is a very good application.

目前氣體感測器之感測監測氣體是依據環境氣流而導送到氣體感測器表面做反應監測，若無致動器來導引氣體，增加氣體流速時，氣體移動至氣體感測器的時間過長，感測效率不彰；然而若加設致動器組成一致動傳感模組，又會因為致動器作動時，因其高速及持續的振動，因而產生熱能，這熱能將會不斷的傳遞至感測氣體感測器周邊，如此熱能進而導致感測器周遭的待測氣體與致動傳感模組感測的外圍氣體有所差異，影響氣體感測器的監測結果。此外，當致動傳感模組應用於一裝置(如可攜式電子裝置)上結合後，裝置內電子元件(如電路板、處理器等)運作後，導致產生裝置內一些氣體汙染、熱源等干擾物質，這些干擾物質導入致動傳感模組內與待測氣體混合皆會影響到氣體感測器之監測品質，無法測量到致動傳感模組的外圍待測氣體真正特性與成份，造成測量結果產生誤差。At present, the sensing and monitoring gas of the gas sensor is sent to the surface of the gas sensor for reaction monitoring according to the ambient air flow. If there is no actuator to guide the gas, and the gas flow rate is increased, the gas moves to the gas sensor. If the time is too long, the sensing efficiency is not good; however, if the actuator is combined to form a constant motion sensing module, heat will be generated due to its high speed and continuous vibration when the actuator is actuated. Continuously transmitted to the periphery of the sensing gas sensor, such heat energy causes the gas to be tested around the sensor to be different from the ambient gas sensed by the actuation sensing module, which affects the monitoring result of the gas sensor. In addition, when the actuating sensor module is applied to a device (such as a portable electronic device), after the electronic components (such as a circuit board, a processor, etc.) in the device operate, some gas pollution and heat sources in the device are generated. Interfering substances, such interference substances introduced into the actuating sensor module and mixing with the gas to be tested will affect the monitoring quality of the gas sensor, and the true characteristics and composition of the gas to be tested at the periphery of the actuating sensor module cannot be measured. , causing errors in the measurement results.

有鑑於此，要如何提升感測效率的同時，又要達到致動傳感模組真正監測到所需待測氣體，降低其他外在因素對於氣體感測器氣體感測器所造成的影響，實為目前迫切需要解決之問題In view of this, how to improve the sensing efficiency, but also to achieve the actuation sensor module to truly monitor the required gas to be tested, and reduce the impact of other external factors on the gas sensor gas sensor, It is an urgent problem that needs to be solved now.

本案之主要目的係提供一種致動傳感模組，可組配於薄型可攜式裝置應用進行氣體監測，致動傳感模組包含一主體、一致動器及一氣體感測器，致動器之設置不僅加快氣體導送到氣體感測器之表面進行監測，提升氣體感測器感測效率，且主體具備有單向開口監測腔室，以提供一單向氣體導入導出之監測，共振片再透過致動器致動導送氣體，達到致動傳感模組真正導入薄型可攜式裝置外氣體進行監測，這致動傳感模組內所需監測氣體特性等同於薄型可攜式裝置外的氣體特性。The main purpose of the present invention is to provide an actuation sensing module that can be assembled in a thin portable device for gas monitoring. The actuation sensing module includes a main body, an actuator, and a gas sensor, and is actuated. The device not only accelerates the gas to be sent to the surface of the gas sensor for monitoring, but also improves the sensing efficiency of the gas sensor, and the main body has a one-way opening monitoring chamber to provide a one-way gas introduction and derivation monitoring, resonance The piece is then actuated to actuate the gas through the actuator, so that the actuating sensor module is actually introduced into the gas outside the thin portable device for monitoring. The required monitoring gas characteristic in the actuating module is equivalent to the thin portable type. Gas characteristics outside the device.

本案之一廣義實施態樣為一種致動傳感模組，包含：一主體，由複數個隔腔結合組成，該複數個隔腔包括:一第一隔腔，內部由一第一隔板區隔出一第一隔室及一第二隔室，且設有一第一進氣口，連通該第一隔室，設有一第一出氣口，連通該第二隔室，以及該第一隔板具有一第一連通口，以連通該第一隔室及該第二隔室；一第二隔腔，供與第一隔腔結合成一體，內部由一承載隔板隔出一第三隔室及一第四隔室，且設有一第二進氣口，連通該第三隔室，設有一第二出氣口，連通該第四隔室，以及該承載隔板具有一第二連通口，以連通該第三隔室及該第四隔室；一微粒監測基座，設置於該第二隔腔之該第三隔室、該承載隔板之間，具有一監測通道，且該監測通道一端具有一承置槽，與該監測通道連通；複數個致動器，包括:一第一致動器，設置於該第二隔室及該第一隔板之間，以控制氣體由該第一進氣口導入該第一隔室，並透過該第一連通口連通而導送於該第二隔室中，再由該第一出氣口排出，構成該第一隔室之單一方向氣體導送；一第二致動器，設置於該微粒監測基座之該承置槽中，封閉該監測通道之一端，以控制氣體由該第二進氣口導入該第三隔室再導入該監測通道，並透過該第二連通口連通而導送於該第四隔室中，再由該第二出氣口排出，構成該第二隔室之單一方向氣體導送；複數個傳感器，包括：一第一傳感器，設置於該第一隔室中，並與該第一致動器保持相互隔離，並對流通於表面之氣體進行監測；一第二傳感器，設置於該第三隔室中，以對導入該第三隔室中的氣體監測；以及一第三傳感器，承載於該承載隔板上，並位於該微粒監測基座之該監測通道中，以對導入該監測通道的氣體監測。A generalized implementation of the present invention is an actuating sensing module comprising: a body consisting of a plurality of compartments, the plurality of compartments comprising: a first compartment, the interior being a first partition zone Separating a first compartment and a second compartment, and providing a first air inlet communicating with the first compartment, providing a first air outlet, communicating the second compartment, and the first partition The first communication port has a first communication port for connecting the first compartment and the second compartment; a second compartment is integrally integrated with the first compartment, and a third compartment is separated by a bearing partition. a second air inlet is connected to the fourth air inlet, and the second air inlet is connected to the third compartment, and a second air outlet is provided to communicate with the fourth compartment, and the carrying partition has a second communication port. The first compartment and the fourth compartment are connected to each other; a particle monitoring base is disposed between the third compartment of the second compartment and the load-bearing partition, and has a monitoring channel, and the monitoring channel One end has a receiving slot communicating with the monitoring channel; a plurality of actuators including: a first actuator disposed on the second Between the chamber and the first partition, the control gas is introduced into the first compartment from the first air inlet, and is communicated through the first communication port to be guided into the second compartment, and then The first air outlet is exhausted to constitute a single direction gas guiding of the first compartment; a second actuator is disposed in the receiving groove of the particle monitoring base to close one end of the monitoring channel to control the gas The second air inlet is introduced into the third compartment and then introduced into the monitoring channel, and is communicated through the second communication port to be guided into the fourth compartment, and then discharged by the second air outlet to constitute the first a single direction gas guiding of the two compartments; a plurality of sensors comprising: a first sensor disposed in the first compartment and kept isolated from the first actuator and conducting gas flowing through the surface Monitoring; a second sensor disposed in the third compartment to monitor gas introduced into the third compartment; and a third sensor carried on the load-bearing partition and located on the particulate monitoring base In the monitoring channel, the gas monitoring for introducing the monitoring channel Measurement.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化，其皆不脫離本案的範圍，且其中的說明及圖示在本質上當作說明之用，而非用以限制本案。Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various embodiments, and is not intended to limit the scope of the invention.

本案提供一種致動傳感模組，請同時參閱第1圖至第5圖，致動傳感模組包含一主體1、一微粒監測基座2、複數個致動器及複數個傳感器，請先參閱第3圖至第5圖，主體1由複數個隔腔結合組成，複數個隔腔包括了一第一隔腔1a、一第二隔腔1b，第二隔腔1b與第一隔腔1a結合成一體；複數個致動器包含有一第一致動器31及一第二致動器32；複數個傳感器包含有一第一傳感器41、一第二傳感器42及第三傳感器43。The present invention provides an actuation sensing module. Please refer to FIG. 1 to FIG. 5 simultaneously. The actuation sensing module includes a main body 1, a particle monitoring base 2, a plurality of actuators and a plurality of sensors. Referring first to Figures 3 to 5, the main body 1 is composed of a plurality of compartments, and the plurality of compartments include a first compartment 1a, a second compartment 1b, a second compartment 1b and a first compartment. 1a is integrated into one; a plurality of actuators include a first actuator 31 and a second actuator 32; the plurality of sensors include a first sensor 41, a second sensor 42, and a third sensor 43.

請繼續審閱第1圖，上述之第一隔腔1a包含有一第一本體11a、一第二本體11b及一第一隔板11c，第一本體11a與第二本體11b相互對接，第一隔板11c設置於第一本體11a與第二本體11b之間，使的第一本體11a與第二本體11b的內部空間利用第一隔板11c定義一第一隔室11d與第二隔室11e，又第一本體11a與第一隔板11c之間具有一第一進氣口11f，第一隔室11d與第一進氣口11f相通，第二本體11b第一隔板11c之間具有一第一出氣口11g，第二隔室11e與第一出氣口11g相通，此外，隔板11c具有一連通口11h，以連通第一隔室11d與第二隔室11e，使得主體1的內部由第一進氣口11f、第一隔室11d、第一連通口11h、第二隔室11e、第一出氣口11g構成一單向導送導出氣體之氣體通道(如第1圖箭頭所指方向之路徑)。第一致動器31封閉設置於第二本體11b與第一隔板11c之間，於本實施例中，第一致動器31位於第二隔室11e與第一隔板11c之間，其一端固設於第二主體11b，另一端固設於第一隔板11c，以封閉第二隔室11e，透過第一致動器31的致動導送氣體之運作，得以使第一隔室11d內形成負壓，讓氣體由第一進氣口11f導入氣體至第一隔室11d中，再通過第一連通口11h進入第二隔室11e中，再透過第一致動器31的致動導送氣體之運作，推送第二隔室11e內導入氣體由第一出氣口11g排出，構成單一方向氣體導送；第一傳感器41設置於第一隔室11d中，並且與第一致動器31保持相互隔離，第一傳感器41將對於流通於其表面之氣體進行監測。上述之第一隔板11c讓第一傳感器41與第一致動器31保持相互隔離，因此當第一致動器31的致動導送氣體之運作時，因其高速及持續的振動會產生熱源，第一隔板11c就能抑制這些熱源去影響第一感測器41之監測。Please continue to review FIG. 1 . The first compartment 1 a includes a first body 11 a , a second body 11 b and a first partition 11 c . The first body 11 a and the second body 11 b abut each other. 11c is disposed between the first body 11a and the second body 11b, such that the inner space of the first body 11a and the second body 11b defines a first compartment 11d and a second compartment 11e by using the first partition 11c, There is a first air inlet 11f between the first body 11a and the first partition 11c, the first compartment 11d communicates with the first air inlet 11f, and the first body 11b has a first space between the first partitions 11c. The air outlet 11g, the second compartment 11e communicates with the first air outlet 11g, and further, the partition 11c has a communication port 11h to communicate the first compartment 11d and the second compartment 11e such that the interior of the main body 1 is first The air inlet 11f, the first compartment 11d, the first communication port 11h, the second compartment 11e, and the first air outlet 11g constitute a gas passage for directing and exporting the gas (as shown by the arrow in the first figure) ). The first actuator 31 is disposed between the second body 11b and the first partition 11c. In the embodiment, the first actuator 31 is located between the second compartment 11e and the first partition 11c. One end is fixed to the second body 11b, and the other end is fixed to the first partition plate 11c to close the second compartment 11e, and the operation of the gas is transmitted through the actuation of the first actuator 31 to enable the first compartment A negative pressure is formed in the 11d, and the gas is introduced into the first compartment 11d from the first inlet 11f, and then enters the second compartment 11e through the first communication port 11h, and then passes through the first actuator 31. Actuating the operation of the guiding gas, pushing the introduced gas in the second compartment 11e to be discharged from the first air outlet 11g to constitute a single direction gas guiding; the first sensor 41 is disposed in the first compartment 11d, and the first The actuators 31 are kept isolated from each other, and the first sensor 41 monitors the gas flowing through its surface. The first partition plate 11c described above keeps the first sensor 41 and the first actuator 31 isolated from each other, so that when the actuating gas of the first actuator 31 operates, high speed and continuous vibration are generated. The heat source, the first partition 11c, can suppress these heat sources from affecting the monitoring of the first sensor 41.

上述之第一傳感器41可為氣體傳感器，包含一氧氣傳感器、一一氧化碳傳感器、一二氧化碳傳感器、一溫度傳感器、一臭氧傳感器及一揮發性有機物傳感器之至少其中之一或其組合而成之群組；或，上述之氣體傳感器可為監測細菌、病毒及微生物之至少其中之一或其任意組合而成之群組之氣體感測器。The first sensor 41 may be a gas sensor, and includes a group of an oxygen sensor, a carbon monoxide sensor, a carbon dioxide sensor, a temperature sensor, an ozone sensor, and a volatile organic sensor, or a combination thereof. Or, the gas sensor described above may be a gas sensor that monitors a group of at least one of bacteria, viruses, and microorganisms, or any combination thereof.

請繼續參閱第1圖，第一隔腔1a的第一本體11a具有一第一連接穿孔11i，以供一電路軟板5穿伸入連接第一傳感器41，並連接後封膠封閉第一連接穿孔11i，避免氣體導入第一隔室11d；而第二本體11b具有一第二連接穿孔11j，以供電路軟板5穿伸入連接第一致動器31，並連接後封膠封閉第二連接穿孔11j，避免氣體導入第二隔室11e。藉此，致動傳感模組構成為一單向開口監測腔室，且能單一方向氣體導送監測。Continuing to refer to FIG. 1 , the first body 11 a of the first compartment 1 a has a first connecting through hole 11 i for a circuit board 5 to penetrate into the first sensor 41 and connect the back seal to close the first connection. The perforation 11i prevents the gas from being introduced into the first compartment 11d; and the second body 11b has a second connection perforation 11j for the circuit board 5 to penetrate into the first actuator 31 and to connect the post-sealing to close the second The perforations 11j are connected to prevent gas from being introduced into the second compartment 11e. Thereby, the actuation sensing module is configured as a one-way opening monitoring chamber and can monitor the gas in a single direction.

請繼續參閱第2圖，上述之第二隔腔1b包含有一第三本體12a、一第四本體12b及一承載隔板12c，第三本體12a與第四本體12b相互對接，承載隔板12c設置於第三本體12a及第四本體12b之間，使該第三本體12a與承載隔板12c之間構成一第三隔室12d，以及第四本體12b與承載隔板12c之間構成一第四隔室12e，其中，第三本體12a與承載隔板12c之間具有一第二進氣口12f，第二進氣口12f與第三隔室12d相通，第四本體12b與承載隔板12c之間具有一第二出氣口12g，第二出氣口12g與第四隔室12e相通，而第二傳感器42設置於第三隔室12d內，用以對進入第三隔室12d內的氣體進行監測。此外，承載隔板12c具有一第二流通口12h，第三隔室12d與第四隔室12e經由第二流通口12h相通。Continuing to refer to FIG. 2, the second compartment 1b includes a third body 12a, a fourth body 12b and a load-bearing partition 12c. The third body 12a and the fourth body 12b abut each other, and the load-bearing partition 12c is disposed. Between the third body 12a and the fourth body 12b, a third compartment 12d is formed between the third body 12a and the load-bearing partition 12c, and a fourth body 12b and the load-bearing partition 12c form a fourth a compartment 12e, wherein the third body 12a and the load-bearing partition 12c have a second air inlet 12f, the second air inlet 12f communicates with the third compartment 12d, and the fourth body 12b and the load-bearing partition 12c There is a second air outlet 12g, the second air outlet 12g communicates with the fourth compartment 12e, and the second sensor 42 is disposed in the third compartment 12d for monitoring the gas entering the third compartment 12d. . Further, the load-bearing partition 12c has a second flow port 12h, and the third compartment 12d communicates with the fourth compartment 12e via the second flow port 12h.

上述之第三本體12a具有一第三連接穿孔12i及一第四連接孔12j，第三連接穿孔12i供電路軟板5穿深入連接第二傳感器42，第四連接穿孔13j供電路軟板5穿伸入連接第二致動器32，並於連接後利用封膠封閉第三連接穿孔12i及第四連接穿孔12j，避免氣體導入第四隔室12d，促使氣體僅能由第二進氣口12f導入第四隔室12d，而承載隔板12c具有一外露部分(未標示)延伸穿透至第二隔腔1b外，外露部分上具有一連接器12k，連接器12k供電路軟板5穿伸入連接，並且提供承載隔板12c電性連接及訊號連接。The third body 12a has a third connecting through hole 12i and a fourth connecting hole 12j. The third connecting hole 12i is for the circuit board 5 to penetrate the second sensor 42. The fourth connecting hole 13j is for the circuit board 5. Extending into the second actuator 32, and after connecting, the third connecting through hole 12i and the fourth connecting through hole 12j are closed by the sealing glue to prevent the gas from being introduced into the fourth compartment 12d, so that the gas can only be driven by the second air inlet 12f. The fourth compartment 12d is introduced, and the carrying partition 12c has an exposed portion (not shown) extending to the outside of the second compartment 1b, the exposed portion has a connector 12k, and the connector 12k is provided for the circuit board 5 to extend. The connection is made, and the carrier 12c is electrically connected and connected.

前述之微粒監測基座2設置於承載隔板12c上，位於第二隔腔1b之第三隔室12d與承載隔板12c之間，且微粒監測基座2具有一監測通道21，監測通道21的一端具有承置槽22，承置槽22與監測通道21相通，第三傳感器43承載於承載隔板12c上，並且位於微粒監測基座2之監測通道21中，以對導入承載通道21內的空氣進行偵測；其中，承載隔板12c可為一電路板，如此微粒監測基座2及第三傳感器43承載於承載隔板12c上能提供電性連接及訊號連接。The particle monitoring base 2 is disposed on the carrying partition 12c between the third compartment 12d of the second compartment 1b and the carrying partition 12c, and the particle monitoring base 2 has a monitoring channel 21, and the monitoring channel 21 One end has a receiving groove 22, the receiving groove 22 communicates with the monitoring channel 21, and the third sensor 43 is carried on the carrying partition 12c and located in the monitoring channel 21 of the particle monitoring base 2 to be introduced into the carrying channel 21 The air is detected. The carrier 12c can be a circuit board. The particle monitoring base 2 and the third sensor 43 are supported on the carrier 12c to provide electrical connection and signal connection.

上述之微粒監測基座2更包含有一雷射器23及一光束通道24，雷射器23與承載隔板12c電性連接，光束通道24與監測通道21保持垂直且相通，使的雷射器23所發射之光束通過光束通道24後照射至監測通道21中，以對監測通道21上通過氣體之懸浮微粒受到光束照射後所產生之光點投射至第三傳感器43，供第三傳感器43監測氣體。The particle monitoring base 2 further includes a laser 23 and a beam path 24, the laser 23 is electrically connected to the carrying partition 12c, and the beam path 24 is perpendicular and connected to the monitoring channel 21, so that the laser The emitted light beam passes through the beam path 24 and is then irradiated into the monitoring channel 21 to project a spot of light generated by the beam of the aerosol through the gas on the monitoring channel 21 to the third sensor 43 for monitoring by the third sensor 43. gas.

上述之第三傳感器43可為光傳感器，光傳感器接收懸浮微粒受到光束照射後所產生之光點，透過該些光點用以計算懸浮微粒之粒徑及濃度，本實施例之光傳感器為PM2.5傳感器。The third sensor 43 can be a light sensor. The light sensor receives the light spot generated by the suspension of the suspended particles, and the light spots are used to calculate the particle size and concentration of the suspended particles. The light sensor of the embodiment is PM2. .5 sensor.

再請參閱第3圖至第5圖，上述致動傳感模組可應用組配於一薄型可攜式裝置10內，薄型可攜式裝置10具有一第一通孔10a、一第二通孔10b及第三通孔10c，而致動傳感模組配於薄型可攜式裝置10內，其第一隔腔1a的第一進氣口11f對應到第一通孔10a，第一出氣口11g對應到第二通孔10b，第二隔腔1b的第二進氣口12f及第二出氣口12g與第三通孔10c對應，如此薄型可攜式裝置10之外的氣體可被導入薄型可攜式裝置10進行監測，透過第一致動器31的致動運作導送薄型可攜式裝置10之外的氣體經第一隔室11d進入第二隔室11e，得以使第一隔室11d內形成負壓，讓氣體由第一進氣口11f導入至第一隔室11d中，再通過第一連通口11h進入第二隔室11e中，再透過第一致動器31的致動推送第二隔室11e內導入氣體由第一出氣口11g排出，構成一單向氣體導送監測，而第二隔腔1b則透過第二致動器32導入氣體進入第二隔腔1b內，再利用第二傳感器42檢測溫度、濕度，第三傳感器43檢測懸浮微粒濃度。本案致動傳感模組不僅能隔絕其他干擾因素(內部致動器熱源、薄型可攜式裝置10內所產生一些氣體汙染、熱源等干擾物質)對於複數個感測器所造成的影響，再透過複數個致動器之設置，以提供氣體導入導出，且加快氣體導送到複數個傳感器之表面進行監測，提升複數個感測器感測效率，並能達到致動傳感模組真正導入薄型可攜式裝置10外氣體進行監測，致動傳感模組內所需監測氣體特性等同於薄型可攜式裝置10外的氣體特性。Referring to FIG. 3 to FIG. 5, the above-mentioned actuating sensor module can be applied to a thin portable device 10, and the thin portable device 10 has a first through hole 10a and a second through hole. The hole 10b and the third through hole 10c, and the actuation sensing module is disposed in the thin portable device 10, and the first air inlet 11f of the first compartment 1a corresponds to the first through hole 10a, the first out The air port 11g corresponds to the second through hole 10b, and the second air inlet 12f and the second air outlet 12g of the second compartment 1b correspond to the third through hole 10c, so that gases other than the thin portable device 10 can be introduced The thin portable device 10 monitors, and the gas outside the thin portable device 10 is guided through the first compartment 11d into the second compartment 11e through the actuation of the first actuator 31, so that the first compartment is separated. A negative pressure is formed in the chamber 11d, and the gas is introduced into the first compartment 11d from the first air inlet 11f, and then enters the second compartment 11e through the first communication port 11h, and then passes through the first actuator 31. The gas introduced into the second compartment 11e of the actuation push is discharged from the first air outlet 11g to constitute a one-way gas conduction monitoring, and the second compartment 1b is transmitted through the second actuator 32. Gas enters into the second compartment. IB, and then a second temperature sensor 42 detects use, humidity, concentration of particles in suspension 43 detects the third sensor. In this case, the sensing module can not only isolate the influence of other interference factors (internal actuator heat source, some gas pollution generated in the thin portable device 10, heat source and other interference substances) on a plurality of sensors, and then Through the setting of a plurality of actuators, the gas is introduced and exported, and the gas is guided to the surface of the plurality of sensors for monitoring, thereby improving the sensing efficiency of the plurality of sensors, and realizing the real introduction of the actuation sensor module. The gas outside the thin portable device 10 is monitored, and the required monitoring gas characteristics in the actuating module are equivalent to the gas characteristics outside the thin portable device 10.

了解上述之致動傳感模組之特點說明，以下就第一致動器31及第二致動器32之結構及作動方式作一說明:For a description of the characteristics of the above-described actuation sensor module, the following describes the structure and operation of the first actuator 31 and the second actuator 32:

請參閱第6A圖至第7A圖，上述之第一致動器31為一氣體泵浦，包含有依序堆疊的一進氣板311、一共振片312、一壓電致動器313、一絕緣片314、一導電片315；進氣板311具有至少一進氣孔311a、至少一匯流排孔311b及一匯流腔室311c，上述之進氣孔311a與匯流排孔311b其數量相同，於本實施例中，進氣孔311a與匯流排孔311b以數量4個作舉例說明，並不以此為限；4個進氣孔311a分別貫通4個匯流排孔311b，且4個匯流排孔311b匯流到匯流腔室311c。Referring to FIGS. 6A-7A, the first actuator 31 is a gas pump, and includes an air inlet plate 311, a resonant plate 312, a piezoelectric actuator 313, and a stack. An insulating sheet 314 and a conductive sheet 315; the air inlet plate 311 has at least one air inlet hole 311a, at least one bus bar hole 311b, and a confluence chamber 311c. The number of the air inlet holes 311a and the bus bar holes 311b are the same. In this embodiment, the air intake hole 311a and the bus bar hole 311b are exemplified by a number of four, and are not limited thereto; the four air inlet holes 311a respectively penetrate the four bus bar holes 311b and four bus bar holes The 311b merges into the confluence chamber 311c.

上述之共振板312，可透過貼合方式組接於進氣板311上，且共振板312上具有一中空孔312a、一可動部312b及一固定部312c，中空孔312a位於共振板312的中心處，並與進氣板311的匯流腔室311c對應，而設置於中空孔312a的周圍且與匯流腔室311c相對的區域為可動部312b，而設置於共振板312的外周緣部分而貼固於進氣板311上則為固定部312c。The resonator plate 312 is coupled to the air inlet plate 311 by a bonding method. The resonator plate 312 has a hollow hole 312a, a movable portion 312b and a fixing portion 312c. The hollow hole 312a is located at the center of the resonance plate 312. And corresponding to the confluence chamber 311c of the air inlet plate 311, and a region disposed around the hollow hole 312a and opposed to the confluence chamber 311c is a movable portion 312b, and is disposed on the outer peripheral portion of the resonance plate 312 to be attached. The air inlet plate 311 is a fixing portion 312c.

上述之壓電致動器313，包含有一懸浮板313a、一外框313b、至少一連接部313c、一壓電元件313d、至少一間隙313e及一凸部313f；其中，懸浮板313a為一正方型懸浮板，具有第一表面3131a及相對第一表面3131a的一第二表面3132a，外框313b環繞設置於懸浮板313a的周緣，且外框313b具有一組配表面3131b及一下表面3132b，並透過至少一連接部313c連接於懸浮板313a與外框313b之間，以提供彈性支撐懸浮板313a的支撐力，其中，間隙313e為懸浮板313a、外框313b與連接部313c之間的空隙，用以供空氣通過。The piezoelectric actuator 313 includes a suspension plate 313a, an outer frame 313b, at least one connecting portion 313c, a piezoelectric element 313d, at least one gap 313e, and a convex portion 313f. The suspension plate 313a is a square The suspension plate has a first surface 3131a and a second surface 3132a opposite to the first surface 3131a. The outer frame 313b is disposed around the circumference of the suspension plate 313a, and the outer frame 313b has a pair of matching surfaces 3131b and a lower surface 3132b. It is connected between the suspension plate 313a and the outer frame 313b through at least one connecting portion 313c to provide a supporting force for elastically supporting the suspension plate 313a, wherein the gap 313e is a gap between the suspension plate 313a, the outer frame 313b and the connecting portion 313c. Used for air to pass.

此外，懸浮板313a的第一表面3131a具有凸部313f，凸部313f於本實施例中係將凸部313f的周緣且鄰接於連接部313c的連接處透過蝕刻製程，使其下凹，來使懸浮板313a的凸部313f高於第一表面3131a來形成階梯狀結構。In addition, the first surface 3131a of the suspension plate 313a has a convex portion 313f. In the present embodiment, the convex portion 313f passes through the etching process of the peripheral edge of the convex portion 313f and adjacent to the connection portion 313c to be recessed. The convex portion 313f of the suspension plate 313a is higher than the first surface 3131a to form a stepped structure.

又如第7A圖所示，本實施例之懸浮板313a採以沖壓成形使其向下凹陷，其下陷距離可由至少一連接部313c成形於懸浮板313a與外框313b之間所調整，使在懸浮板313a上的凸部313f的表面與外框313b的組配表面3131b兩者形成非共平面，亦即凸部313f的表面將低於外框313b的組配表面3131b，且懸浮板313a的第二表面3132a低於外框313b的下表面3132b，又壓電元件313d貼附於懸浮板313a的第二表面3132a，與凸部313f相對設置，壓電元件313d被施加驅動電壓後由於壓電效應而產生形變，進而帶動懸浮板313a彎曲振動；利用於外框313b的組配表面3131b上塗佈少量黏合劑，以熱壓方式使壓電致動器313貼合於共振板312的固定部312c，進而使得壓電致動器313得以與共振板312組配結合。Further, as shown in FIG. 7A, the suspension plate 313a of the embodiment is formed by press forming to be recessed downward, and the depression distance thereof can be adjusted by forming at least one connecting portion 313c between the suspension plate 313a and the outer frame 313b. The surface of the convex portion 313f on the suspension plate 313a and the assembly surface 3131b of the outer frame 313b form a non-coplanar, that is, the surface of the convex portion 313f will be lower than the assembly surface 3131b of the outer frame 313b, and the suspension plate 313a The second surface 3132a is lower than the lower surface 3132b of the outer frame 313b, and the piezoelectric element 313d is attached to the second surface 3132a of the suspension plate 313a, opposite to the convex portion 313f, and the piezoelectric element 313d is applied with a driving voltage due to the piezoelectric The effect is deformed, and the suspension plate 313a is caused to bend and vibrate. A small amount of adhesive is applied to the assembly surface 3131b of the outer frame 313b, and the piezoelectric actuator 313 is bonded to the fixed portion of the resonance plate 312 by hot pressing. 312c, in turn, causes the piezoelectric actuator 313 to be combined with the resonant plate 312.

此外，絕緣片314及導電片315皆為框型的薄型片體，依序堆疊於壓電致動器313下。於本實施例中，絕緣片314貼附於壓電致動器313之外框313b的下表面3132b。In addition, the insulating sheet 314 and the conductive sheet 315 are both thin frame-shaped sheets, which are sequentially stacked under the piezoelectric actuator 313. In the present embodiment, the insulating sheet 314 is attached to the lower surface 3132b of the outer frame 313b of the piezoelectric actuator 313.

請繼續參閱第7A圖，第一致動器31的進氣板311、共振板312、壓電致動器313、絕緣片314、導電片315依序堆疊結合後，其中懸浮板313a之第一表面3131a與共振板312之間形成一腔室間距g，腔室間距g將會影響第一致動器31的傳輸效果，故維持一固定的腔室間距g對於第一致動器31提供穩定的傳輸效率是十分重要。本案之第一致動器31係對懸浮板313a使用沖壓方式，使其向下凹陷，讓懸浮板313a的第一表面3131a與外框313b的組配表面3131b兩者為非共平面，亦即懸浮板313a的第一表面3131a將低於外框313b的組配表面3131b，且懸浮板313a的第二表面3132a低於外框313b的下表面3132b，使得壓電致動器313之懸浮板313a凹陷形成一空間得與共振板312構成一可調整之腔室間距g，直接透過將上述壓電致動器313之懸浮板313a採以成形凹陷構成一腔室空間316的結構改良，如此一來，所需的腔室間距g得以透過調整壓電致動器313之懸浮板313a成形凹陷距離來完成，有效地簡化了調整腔室間距g的結構設計，同時也達成簡化製程，縮短製程時間等優點。Continuing to refer to FIG. 7A, the air intake plate 311, the resonance plate 312, the piezoelectric actuator 313, the insulating sheet 314, and the conductive sheet 315 of the first actuator 31 are sequentially stacked and combined, wherein the first suspension plate 313a A chamber spacing g is formed between the surface 3131a and the resonance plate 312. The chamber spacing g will affect the transmission effect of the first actuator 31, so that maintaining a fixed chamber spacing g provides stability to the first actuator 31. The transmission efficiency is very important. The first actuator 31 of the present invention uses a punching method for the suspension plate 313a to be recessed downward so that both the first surface 3131a of the suspension plate 313a and the assembly surface 3131b of the outer frame 313b are non-coplanar, that is, The first surface 3131a of the suspension plate 313a will be lower than the assembly surface 3131b of the outer frame 313b, and the second surface 3132a of the suspension plate 313a is lower than the lower surface 3132b of the outer frame 313b, so that the suspension plate 313a of the piezoelectric actuator 313 The recess forms a space to form an adjustable chamber spacing g with the resonant plate 312, and directly improves the structure of the cavity plate 316 by forming the floating plate 313a of the piezoelectric actuator 313 by forming a recess. The required chamber spacing g can be achieved by adjusting the recess distance of the suspension plate 313a of the piezoelectric actuator 313, which simplifies the structural design of the adjustment chamber spacing g, and also simplifies the process and shortens the process time. advantage.

第7B圖至第7D圖為第7A圖所示之第一致動器31的作動示意圖，請先參閱第7B圖，壓電致動器313的壓電元件313d被施加驅動電壓後產生形變帶動懸浮板313a向下位移，此時腔室空間316的容積提升，於腔室空間316內形成了負壓，便汲取匯流腔室311c內的空氣進入腔室空間316內，同時共振片312受到共振原理的影響被同步向下位移，連帶增加了匯流腔室311c的容積，且因匯流腔室311c內的空氣進入腔室空間316的關係，造成匯流腔室311c內同樣為負壓狀態，進而通過匯流排孔311b、進氣口311a來吸取空氣進入匯流腔室311c內；請再參閱第7C圖，壓電元件313d帶動懸浮板313c向上位移，壓縮腔室空間316，迫使腔室空間316內的空氣通過間隙313e向下傳輸，來達到傳輸空氣的效果，同時間，共振板312同樣被懸浮板313a因共振而向上位移，同步推擠匯流腔室311c內的空氣往腔室空間316移動；最後請參閱第7D圖，當懸浮板313c被向下帶動時，共振板312也同時被帶動而向下位移，此時的共振板312將使壓縮腔室空間316內的空氣向間隙313e移動，並且提升匯流腔室311c內的容積，讓空氣能夠持續地通過進氣口311a、匯流排孔311b來匯聚於匯流腔室311c內，透過不斷地重複上述步驟，使第一致動器31能夠連續將空氣自進氣口311a進入，再由間隙313e向下傳輸，達成傳輸空氣至第一傳感器41的功效，以提供空氣給第一傳感器41感測，提升感測效率。7B to 7D are diagrams showing the operation of the first actuator 31 shown in FIG. 7A. Referring to FIG. 7B, the piezoelectric element 313d of the piezoelectric actuator 313 is subjected to a driving voltage to generate a deformation. The suspension plate 313a is displaced downward, and the volume of the chamber space 316 is increased, and a negative pressure is formed in the chamber space 316, so that the air in the confluence chamber 311c is taken into the chamber space 316, and the resonator 312 is resonated. The influence of the principle is synchronously displaced downward, which increases the volume of the confluence chamber 311c, and due to the relationship of the air in the confluence chamber 311c into the chamber space 316, the confluence chamber 311c is also in a negative pressure state, and then passes through. The bus bar hole 311b and the air inlet port 311a suck air into the confluence chamber 311c; referring to FIG. 7C, the piezoelectric element 313d drives the suspension plate 313c to move upward, compressing the chamber space 316, forcing the cavity space 316. The air is transmitted downward through the gap 313e to achieve the effect of transmitting air. Meanwhile, the resonance plate 312 is also displaced upward by the suspension plate 313a due to resonance, and the air in the confluence chamber 311c is synchronously pushed to move into the chamber space 316; Referring to FIG. 7D, when the suspension plate 313c is driven downward, the resonance plate 312 is also driven to be displaced downward, and the resonance plate 312 at this time will move the air in the compression chamber space 316 toward the gap 313e. And the volume in the confluence chamber 311c is increased, so that air can be continuously collected in the confluence chamber 311c through the air inlet 311a and the bus bar hole 311b, and the first actuator 31 can be continuously continuous by repeating the above steps. Air is taken in from the air inlet 311a and then transmitted downward by the gap 313e to achieve the effect of transmitting air to the first sensor 41 to provide air to the first sensor 41 for sensing and improving the sensing efficiency.

請繼續參閱第7A圖，第一致動器31其另一實施方式可透過微機電的方式使第一致動器31為一微機電系統氣體泵浦，其中，進氣板311、共振片312、壓電致動器313、絕緣片314、導電片315皆可透過面型微加工技術製成，以縮小第一致動器31的體積。Continuing to refer to FIG. 7A, another embodiment of the first actuator 31 can micro-electromechanically illuminate the first actuator 31 into a MEMS gas pump, wherein the air inlet plate 311 and the resonant plate 312 The piezoelectric actuator 313, the insulating sheet 314, and the conductive sheet 315 are all made through a surface micromachining technique to reduce the volume of the first actuator 31.

請參閱第8圖，前述之第二致動器32包含有依序堆疊之噴氣孔片321、腔體框架322、致動體323、絕緣框架324及導電框架325；噴氣孔片321包含了複數個支架321a、一懸浮片321b及一中空孔洞321c，懸浮片321b可彎曲振動，複數個支架321a鄰接於懸浮片321b的周緣，本實施例中，支架321a其數量為4個，分別鄰接於懸浮片321b的4個角落，但不此以為限，而中空孔洞321c形成於懸浮片321b的中心位置；腔體框架322承載疊置於懸浮片321b上，致動體323承載疊置於腔體框架322上，並包含了一壓電載板323a、一調整共振板323b、一壓電片323c，其中，壓電載板323a承載疊置於腔體框架322上，調整共振板323b承載疊置於壓電載板323a上，壓電板323c承載疊置於調整共振板323b上，供施加電壓後發生形變以帶動壓電載板323a及調整共振板323b進行往復式彎曲振動；絕緣框架324則是承載疊置於致動體323之壓電載板323a上，導電框架325承載疊置於絕緣框架324上，其中，致動體323、腔體框架322及該懸浮片321b之間形成一共振腔室326，其中，調整共振板323b的厚度大於壓電載板323a的厚度，調整共振片323b位於壓電片323c與壓電載板323a之間，做為兩者之間的緩衝物，來調整壓電載板323a的振動頻率，且調整共振片323b的厚度大於壓電載板323a的厚度，可利用不同的調整共振片的厚度來調整第二致動器32的振動頻率，使第二致動器32的振動頻率控制能與噴氣孔片321的振動頻率達成共振匹配，而第二致動器32的振動頻率在10K至30K赫茲(Hz)為最佳。Referring to FIG. 8, the foregoing second actuator 32 includes a plurality of air-jet aperture sheets 321 , a cavity frame 322 , an actuating body 323 , an insulating frame 324 , and a conductive frame 325 . The air-jet aperture 321 includes a plurality of The bracket 321a, a suspension piece 321b and a hollow hole 321c, the suspension piece 321b can be flexed and vibrated, and the plurality of brackets 321a are adjacent to the circumference of the suspension piece 321b. In this embodiment, the number of the brackets 321a is four, respectively adjacent to the suspension. The four corners of the piece 321b are not limited thereto, and the hollow hole 321c is formed at a center position of the suspension piece 321b; the cavity frame 322 is carried on the suspension piece 321b, and the actuating body 323 is stacked on the cavity frame. The 322 includes a piezoelectric carrier 323a, an adjustment resonator 323b, and a piezoelectric 323c. The piezoelectric carrier 323a is stacked on the cavity frame 322, and the adjustment resonator 323b is stacked. On the piezoelectric carrier 323a, the piezoelectric plate 323c is placed on the adjustment resonator plate 323b, and is deformed to apply the voltage to drive the piezoelectric carrier 323a and the adjustment resonator plate 323b to perform reciprocating bending vibration; the insulating frame 324 is Carrying the stack on the actuating body 323 On the piezoelectric carrier 323a, the conductive frame 325 is stacked on the insulating frame 324, wherein a resonant cavity 326 is formed between the actuating body 323, the cavity frame 322 and the floating piece 321b, wherein the resonant plate 323b is adjusted. The thickness of the piezoelectric carrier 323a is larger than the thickness of the piezoelectric carrier 323a, and the adjustment resonator 323b is located between the piezoelectric sheet 323c and the piezoelectric carrier 323a as a buffer between the two to adjust the vibration frequency of the piezoelectric carrier 323a. Moreover, the thickness of the adjustment resonator piece 323b is larger than the thickness of the piezoelectric carrier 323a, and the vibration frequency of the second actuator 32 can be adjusted by using different thicknesses of the adjustment resonator piece, so that the vibration frequency of the second actuator 32 can be controlled. The vibration frequency of the air vent sheet 321 achieves a resonance matching, and the vibration frequency of the second actuator 32 is preferably 10K to 30K Hz.

請參閱第9A圖至第9C圖，第9B圖、第9C圖為第9A圖所示之本案之第二致動器32之作動示意圖。請先參閱第9A圖，第二致動器32透過支架321a使第二致動器32設置於微粒監測基座2的承置槽22上方，噴氣孔片321與承置槽22的底面間隔設置，並於兩者之間形成氣流腔室327；請再參閱第9B圖，當施加電壓於致動體323之壓電板323c時，壓電板323c因壓電效應開始產生形變並同部帶動調整共振板323b與壓電載板323a，此時，噴氣孔片321會因亥姆霍茲共振（Helmholtz resonance）原理一起被帶動，使得致動體323向上移動，由於致動體323向上位移，使得噴氣孔片321與承置槽22的底面之間的氣流腔室327的容積增加，其內部氣壓形成負壓，於第二致動器32外的空氣將因為壓力梯度由噴氣孔片321的支架321a與承置槽22的側壁之間的空隙進入氣流腔室327並進行集壓；最後請參閱第9C圖，氣體不斷地進入氣流腔室326內，使氣流腔室327內的氣壓形成正壓，此時，致動體323受電壓驅動向下移動，將壓縮氣流腔室327的容積，並且推擠氣流腔室327內空氣，使氣體進入氣流通道21內，並將氣體提供給第三傳感器43，以透過第三傳感器43檢測氣體內的懸浮微粒濃度。Please refer to FIG. 9A to FIG. 9C. FIG. 9B and FIG. 9C are diagrams showing the operation of the second actuator 32 of the present invention shown in FIG. 9A. Referring to FIG. 9A, the second actuator 32 is disposed above the receiving groove 22 of the particle monitoring base 2 through the bracket 321a, and the air ejection orifice 321 is spaced apart from the bottom surface of the receiving groove 22. And forming an air flow chamber 327 therebetween; referring to FIG. 9B, when a voltage is applied to the piezoelectric plate 323c of the actuating body 323, the piezoelectric plate 323c starts to deform due to the piezoelectric effect and is driven by the same portion. The resonant plate 323b and the piezoelectric carrier 323a are adjusted. At this time, the air vent 321 is driven together by the Helmholtz resonance principle, so that the actuating body 323 moves upward, and the actuating body 323 is displaced upward. The volume of the airflow chamber 327 between the air vent 321 and the bottom surface of the receiving groove 22 is increased, the internal air pressure thereof forms a negative pressure, and the air outside the second actuator 32 will be due to the pressure gradient by the air vent 321 The gap between the bracket 321a and the side wall of the receiving groove 22 enters the air flow chamber 327 and collects pressure; finally, referring to Fig. 9C, the gas continuously enters the air flow chamber 326, so that the air pressure in the air flow chamber 327 is positive. Pressure, at this time, the actuating body 323 is driven to move downward by voltage The volume of the airflow chamber 327 will be compressed, and the air in the airflow chamber 327 will be pushed, the gas will enter the airflow passage 21, and the gas will be supplied to the third sensor 43 to detect the suspended particles in the gas through the third sensor 43. concentration.

請參閱第10圖，致動傳感模組中第一隔腔1a的另一實施例，可更包含有至少一閥6，於本實施例中，閥6的數量為2個，分別設置於進氣口11f及出氣口11g，且利用閥6開啟及關閉進氣口11f及出氣口11g，特別是偵測揮發性有機物時，由於揮發性有機物的沸點較低，容易受外在環境因素影響，所以在偵測揮發性有機物時，利用閥6關閉進氣口11f與出氣口11g，再經由第一本體11a、第二本體11b隔離外在因素對於第一隔腔1a內部的影響，最後由第一隔板11c阻隔該第一致動器31對於第一傳感器41之干擾，使得第一傳感器41能夠不受到環境因素的影響來偵測第一隔腔1a內部中空氣所具有的揮發性有機物的含量。Referring to FIG. 10, another embodiment of actuating the first compartment 1a in the sensing module may further include at least one valve 6. In this embodiment, the number of the valves 6 is two, respectively The air inlet 11f and the air outlet 11g, and the opening and closing of the air inlet 11f and the air outlet 11g by the valve 6, especially when detecting volatile organic compounds, are susceptible to external environmental factors due to low boiling point of volatile organic compounds. Therefore, when detecting the volatile organic matter, the air inlet 11f and the air outlet 11g are closed by the valve 6, and the influence of the external factor on the inside of the first compartment 1a is separated by the first body 11a and the second body 11b, and finally The first partition plate 11c blocks the interference of the first actuator 31 with the first sensor 41, so that the first sensor 41 can detect the volatile organic compounds in the air in the interior of the first compartment 1a without being affected by environmental factors. The content.

請參閱第11A圖及第11B圖，閥6為包含一保持件61、一密封件62以及一位移件63。位移件63設置於保持件61及密封件62之間並於兩者間位移，保持件61上分別具有複數個通孔611，而位移件63對應保持件61上通孔611位置也設通孔631，保持件61的通孔611及位移件63的通孔631，其位置為相互對準，以及密封件62上設有複數個通孔621，且密封件62之通孔621與保持件61之通孔611之位置形成錯位而不對準。閥6之保持件61、密封件62以及位移件63透過電路軟板5連接一處理器(未圖示)來控制，以控制位移件63朝保持件61靠近，構成閥6之開啟。Referring to FIGS. 11A and 11B, the valve 6 includes a retaining member 61, a sealing member 62, and a displacement member 63. The displacement member 63 is disposed between the retaining member 61 and the sealing member 62 and is displaced therebetween. The retaining member 61 has a plurality of through holes 611 respectively, and the displacement member 63 is also provided with a through hole corresponding to the position of the through hole 611 of the retaining member 61. 631, the through hole 611 of the holding member 61 and the through hole 631 of the displacement member 63 are disposed in alignment with each other, and the sealing member 62 is provided with a plurality of through holes 621, and the through hole 621 of the sealing member 62 and the holding member 61 The position of the through hole 611 is misaligned and not aligned. The holder 61 of the valve 6, the seal 62 and the displacement member 63 are controlled by a circuit board 5 (not shown) via a circuit board 5 to control the displacement member 63 toward the holder 61 to constitute the opening of the valve 6.

前述之閥6之第一實施例態樣中，位移件63為一帶電荷之材料，保持件61為一兩極性之導電材料，保持件61電性連接電路軟板5之處理器，用以控制保持件61之極性(正電極性或負電極性)。若位移件63為一帶負電荷之材料，當閥6須受控開啟時，控制保持件61形成一正電極，此時位移件63與保持件61維持不同極性，如此會使位移件63朝保持件61靠近，構成閥6之開啟(如第11B圖所示)。反之，若位移件63為一帶負電荷之材料，當閥6須受控關閉時，控制保持件61形成一負電極，此時位移件63與保持件61維持相同極性，使位移件63朝密封件62靠近，構成閥6之關閉(如第11A圖所示)。In the first embodiment of the valve 6, the displacement member 63 is a charged material, the holder 61 is a two-polar conductive material, and the holder 61 is electrically connected to the processor of the circuit board 5 for controlling The polarity of the holder 61 (positive or negative). If the displacement member 63 is a negatively charged material, when the valve 6 is to be controlled to open, the control holder 61 forms a positive electrode, and the displacement member 63 and the holder 61 maintain different polarities, so that the displacement member 63 is kept facing. The member 61 is close to form the opening of the valve 6 (as shown in Fig. 11B). On the other hand, if the displacement member 63 is a negatively charged material, when the valve 6 is to be controlled to be closed, the control holder 61 forms a negative electrode, and the displacement member 63 and the holder 61 maintain the same polarity, so that the displacement member 63 faces the seal. The member 62 is close to form the closing of the valve 6 (as shown in Fig. 11A).

上述之閥6之第二實施例態樣中，位移件63為一帶磁性之材料，而保持件61為一可受控變換極性之磁性材料。保持件61電性連接電路軟板5之處理器，用以控制保持件61之極性(正極或負極)。若位移件63為一帶負極之磁性材料，當閥6須受控開啟時，保持件61形成一正極之磁性，此時控制位移件63與保持件61維持不同極性，使位移件63朝保持件61靠近，構成閥6開啟(如第11B圖所示)。反之，若位移件63為一帶負極之磁性材料，當閥6須受控關閉時，控制保持件61形成一負極之磁性，此時控制位移件63與保持件61維持相同極性，使位移件63朝密封件62靠近，構成閥6之關閉(如第11A圖所示)。In the second embodiment of the valve 6 described above, the displacement member 63 is a magnetic material, and the holder 61 is a magnetic material of controlled polarity. The holder 61 is electrically connected to the processor of the circuit board 5 for controlling the polarity (positive or negative) of the holder 61. If the displacement member 63 is a magnetic material with a negative pole, when the valve 6 is to be controlled to open, the retaining member 61 forms a magnetic pole of the positive pole, and at this time, the control displacement member 63 and the retaining member 61 maintain different polarities, so that the displacement member 63 faces the retaining member. 61 is close to form valve 6 open (as shown in Figure 11B). On the other hand, if the displacement member 63 is a magnetic material with a negative electrode, when the valve 6 has to be controlled to be closed, the control holder 61 forms a magnetic property of the negative electrode, and at this time, the control displacement member 63 and the holder 61 maintain the same polarity, so that the displacement member 63 Approaching the seal 62 constitutes the closing of the valve 6 (as shown in Figure 11A).

請參閱第12圖，本案致動傳感模組的第二隔腔1b的另一實施例，其中，第二進氣口12f直接對應監測通道21的位置，如此監測通道21垂直方向位置之通氣路徑形成最短，盡可能使通氣路徑上減少氣流阻力，使得第二致動器32致動時，空氣由第二進氣口12f進入後能夠直接進入監測通道21內，以形成氣體直接對流，提升氣體輸送的效率。Referring to FIG. 12, another embodiment of the second compartment 1b of the sensing module is actuated, wherein the second air inlet 12f directly corresponds to the position of the monitoring channel 21, so that the ventilation of the vertical position of the channel 21 is monitored. The path formation is the shortest, and the airflow resistance is reduced as much as possible on the ventilation path, so that when the second actuator 32 is actuated, the air can enter the monitoring channel 21 directly after entering the second air inlet 12f, thereby forming direct gas convection and lifting. The efficiency of gas delivery.

請參閱第13圖及第14圖所示，上述第二隔腔1b的另一實施例的致動傳感模組組配於薄型可攜式裝置10時，薄型可攜式裝置10更包含一第四通孔10d，其中，薄型可攜式裝置10的第三通孔10c直接對應於第二隔腔1b之第二出氣口12g，第四通孔10d直接對應於第二隔腔1b之第二進氣口12f，使氣體能夠直接對流進出第二隔腔1b，提升氣體傳輸的效果。Referring to FIG. 13 and FIG. 14 , when the actuation sensing module of another embodiment of the second compartment 1 b is assembled with the thin portable device 10 , the thin portable device 10 further includes a The fourth through hole 10d, wherein the third through hole 10c of the thin portable device 10 directly corresponds to the second air outlet 12g of the second compartment 1b, and the fourth through hole 10d directly corresponds to the second compartment 1b The two air inlets 12f enable the gas to directly convect and flow into and out of the second compartment 1b, thereby enhancing the effect of gas transmission.

綜上所述，本案所提供之致動傳感模組，利用致動器的懸浮板下凹來使得致動器得以快速、穩定地將氣體導入致動傳感模組內，提升感測效率，又透過複數個隔腔將各傳感器相互隔開，於多個傳感器同時偵測時，能夠避免彼此干擾，且也阻隔其他致動器的影響，可以避免當致動傳感模組真正導入薄型可攜式裝置外氣體進行監測時，能夠不被薄型可攜式裝置內的處理器或其他元件影響，達到致動傳感模組真正導入薄型可攜式裝置以達到可隨時、隨地偵測的目的。In summary, the actuating sensor module provided in the present invention utilizes the suspension plate of the actuator to make the actuator quickly and stably introduce the gas into the actuating sensor module, thereby improving the sensing efficiency. Moreover, the sensors are separated from each other through a plurality of compartments, and when multiple sensors are simultaneously detected, mutual interference can be avoided, and the influence of other actuators can be blocked, and the actuation module can be prevented from being actually introduced into the thin type. When the gas outside the portable device is monitored, it can be not affected by the processor or other components in the thin portable device, so that the actuating sensor module can be actually introduced into the thin portable device to achieve detection at any time and anywhere. purpose.

本案得由熟知此技術之人士任施匠思而為諸般修飾，然皆不脫如附申請專利範圍所欲保護者。This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

10‧‧‧薄型可攜式裝置
10a‧‧‧第一通孔
10b‧‧‧第二通孔
10c‧‧‧第三通孔
10d‧‧‧第四通孔
1‧‧‧主體
1a‧‧‧第一隔腔
11a‧‧‧第一本體
11b‧‧‧第二本體
11c‧‧‧隔板
11d‧‧‧第一隔室
11e‧‧‧第二隔室
11f‧‧‧第一進氣口
11g‧‧‧第一出氣口
11h‧‧‧第一流通口
11i‧‧‧第一連接穿孔
11j‧‧‧第二連接穿孔
1b‧‧‧第二隔腔
12a‧‧‧第三主體
12b‧‧‧第四主擬
12c‧‧‧承載隔板
12d‧‧‧第三隔室
12e‧‧‧第四隔室
12f‧‧‧第二進氣口
12g‧‧‧第二出氣口
12h‧‧‧第二流通口
12i‧‧‧第三連接穿孔
13j‧‧‧第四連接穿孔
13k‧‧‧連接器
2‧‧‧微粒監測基座
21‧‧‧監測通道
22‧‧‧承置槽
31‧‧‧第一致動器
311‧‧‧進氣板
311a‧‧‧進氣孔
311b‧‧‧匯流排孔
311c‧‧‧匯流腔室
312‧‧‧共振板
312a‧‧‧中空孔
312b‧‧‧可動部
312c‧‧‧固定部
313‧‧‧壓電致動器
313a‧‧‧懸浮板
3131a‧‧‧第一表面
3132a‧‧‧第二表面
313b‧‧‧外框
3131b‧‧‧組配表面
3132b‧‧‧下表面
313c‧‧‧連接部
313d‧‧‧壓電元件
313e‧‧‧間隙
313f‧‧‧凸部
314‧‧‧絕緣片
315‧‧‧導電片
316‧‧‧腔室空間
32‧‧‧第二致動器
321‧‧‧噴氣孔片
321a‧‧‧支架
321b‧‧‧懸浮片
321c‧‧‧中空孔洞
322‧‧‧腔體框架
323‧‧‧致動體
323a‧‧‧壓電載板
323b‧‧‧調整共振板
323c‧‧‧壓電片
324‧‧‧絕緣框架
325‧‧‧導電框架
326‧‧‧共振腔室
327‧‧‧氣流腔室
41‧‧‧第一傳感器
42‧‧‧第二傳感器
43‧‧‧第三傳感器
5‧‧‧電路軟板
6‧‧‧閥
61‧‧‧保持件
62‧‧‧密封件
63‧‧‧位移件
g‧‧‧腔室間距10‧‧‧Thin portable device
10a‧‧‧First through hole
10b‧‧‧second through hole
10c‧‧‧ third through hole
10d‧‧‧fourth through hole
1‧‧‧ Subject
1a‧‧‧first compartment
11a‧‧‧ first ontology
11b‧‧‧Second ontology
11c‧‧‧Baffle
11d‧‧‧First compartment
11e‧‧‧Second compartment
11f‧‧‧first air inlet
11g‧‧‧first air outlet
11h‧‧‧ first circulation
11i‧‧‧First connection perforation
11j‧‧‧Second connection perforation
1b‧‧‧second compartment
12a‧‧‧ third subject
12b‧‧‧ Fourth Master
12c‧‧‧ carrying partition
12d‧‧‧ third compartment
12e‧‧‧fourth compartment
12f‧‧‧second air inlet
12g‧‧‧second air outlet
12h‧‧‧second circulation
12i‧‧‧3rd connection perforation
13j‧‧‧fourth connection perforation
13k‧‧‧Connector
2‧‧‧Particle monitoring base
21‧‧‧Monitoring channel
22‧‧‧ socket
31‧‧‧First actuator
311‧‧‧Air intake plate
311a‧‧‧Air intake
311b‧‧‧ bus bar hole
311c‧‧ ‧ confluence chamber
312‧‧‧Resonance board
312a‧‧‧ hollow hole
312b‧‧‧movable department
312c‧‧‧Fixed Department
313‧‧‧ Piezoelectric Actuator
313a‧‧‧suspension plate
3131a‧‧‧ first surface
3132a‧‧‧ second surface
313b‧‧‧ frame
3131b‧‧‧ matching surface
3132b‧‧‧ lower surface
313c‧‧‧Connecting Department
313d‧‧‧Piezoelectric components
313e‧‧‧ gap
313f‧‧‧ convex
314‧‧‧Insulation sheet
315‧‧‧Electrical sheet
316‧‧‧chamber space
32‧‧‧Second actuator
321‧‧‧Air hole film
321a‧‧‧ bracket
321b‧‧‧suspension tablets
321c‧‧‧ hollow holes
322‧‧‧ cavity frame
323‧‧‧Acoustic body
323a‧‧‧Piezo carrier
323b‧‧‧Adjusting the resonance plate
323c‧‧‧ Piezo Pieces
324‧‧‧Insulation frame
325‧‧‧Electrical frame
326‧‧‧Resonance chamber
327‧‧‧Airflow chamber
41‧‧‧First sensor
42‧‧‧Second sensor
43‧‧‧ third sensor
5‧‧‧ circuit board
6‧‧‧ valve
61‧‧‧ Holder
62‧‧‧Seal
63‧‧‧ displacement parts
G‧‧‧ Chamber spacing

第1圖為本案致動傳感模組之第一隔腔剖面示意圖。 第2圖為本案致動傳感模組之第二隔腔剖面示意圖。 第3圖為本案致動傳感模組應用於薄型可攜式裝置示意圖。 第4圖為第3圖之致動傳感模組應用於薄型可攜式裝置之第一隔腔剖面示意圖。 第5圖為第3圖之致動傳感模組應用於薄型可攜式裝置之第二隔腔剖面示意圖。 第6A圖為本案致動傳感模組之第一致動器分解示意圖。 第6B圖為本案致動傳感模組之第一致動器另一角度分解示意圖。 第7A圖為本案致動傳感模組之第一致動器剖面示意圖。 第7B圖至第7D圖為本案致動傳感模組之第一致動器作動示意圖。 第8圖為本案致動傳感模組之第二致動器分解示意圖。 第9A圖為本案致動傳感模組之第二致動器組設於微粒監測基座上剖面示意圖。 第9B圖及第9C圖為本案致動傳感模組之第二致動器組設於微粒監測基座上作動示意圖。 第10圖為本案致動傳感模組之第一隔腔另一實施例剖面示意圖 第11A圖為本案致動傳感模組另一實施例之閥示意圖。 第11B圖為本案致動傳感模組另一實施例之閥作動示意圖。 第12圖為本案致動傳感模組之第三隔腔另一實施例剖面示意圖。 第13圖為本案致動傳感模組之第三隔腔另一實施例應用於薄型可攜式裝置所對應第四通孔示意圖。 第14圖為本案致動傳感模組之第三隔腔另一實施例應用於薄型可攜式裝置 剖面示意圖。Figure 1 is a schematic cross-sectional view of the first compartment of the sensing module of the present invention. Figure 2 is a schematic cross-sectional view of the second compartment of the sensing module of the present invention. The third figure is a schematic diagram of the actuating sensor module applied to the thin portable device. Figure 4 is a schematic cross-sectional view of the first compartment of the thin portable device according to the actuation sensor module of Figure 3. Figure 5 is a schematic cross-sectional view of the second compartment of the thin portable device according to the actuation sensor module of Figure 3. FIG. 6A is a schematic exploded view of the first actuator of the actuating sensing module of the present invention. FIG. 6B is another perspective exploded view of the first actuator for actuating the sensing module of the present invention. Figure 7A is a cross-sectional view showing the first actuator of the sensing module of the present invention. 7B to 7D are schematic views showing the actuation of the first actuator of the actuating sensor module of the present invention. Figure 8 is a schematic exploded view of the second actuator of the actuating sensor module of the present invention. FIG. 9A is a schematic cross-sectional view showing the second actuator set of the actuating module of the present invention disposed on the particle monitoring base. 9B and 9C are schematic views showing the actuation of the second actuator set of the actuating sensor module on the particle monitoring base. Figure 10 is a cross-sectional view showing another embodiment of the first compartment for actuating the sensing module of the present invention. Figure 11A is a schematic view of a valve of another embodiment of the actuating sensing module of the present invention. FIG. 11B is a schematic view showing the operation of the valve of another embodiment of the actuating sensor module of the present invention. Figure 12 is a cross-sectional view showing another embodiment of the third compartment for actuating the sensing module of the present invention. FIG. 13 is a schematic view showing a fourth through hole corresponding to the thin portable device according to another embodiment of the third cavity for actuating the sensing module. Figure 14 is a cross-sectional view showing another embodiment of the third compartment for actuating the sensing module applied to the thin portable device.

Claims (27)

一種致動傳感模組，包含： 一主體，由複數個隔腔結合組成，該複數個隔腔包括: 一第一隔腔，內部由一第一隔板區隔出一第一隔室及一第二隔室，且設有一第一進氣口，連通該第一隔室，設有一第一出氣口，連通該第二隔室，以及該第一隔板具有一第一連通口，以連通該第一隔室及該第二隔室；以及 一第二隔腔，供與第一隔腔結合成一體，內部由一承載隔板隔出一第三隔室及一第四隔室，且設有一第二進氣口，連通該第三隔室，設有一第二出氣口，連通該第四隔室，以及該承載隔板具有一第二連通口，以連通該第三隔室及該第四隔室； 一微粒監測基座，設置於該第二隔腔之該第三隔室、該承載隔板之間，具有一監測通道，且該監測通道一端具有一承置槽，與該監測通道連通； 複數個致動器，包括: 一第一致動器，設置於該第二隔室及該第一隔板之間，以控制氣體由該第一進氣口導入該第一隔室，並透過該第一連通口連通而導送於該第二隔室中，再由該第一出氣口排出，構成該第一隔室之單一方向氣體導送；以及 一第二致動器，設置於該微粒監測基座之該承置槽中，封閉該監測通道之一端，以控制氣體由該第二進氣口導入該第三隔室再導入該監測通道，並透過該第二連通口連通而導送於該第四隔室中，再由該第二出氣口排出，構成該第二隔室之單一方向氣體導送； 複數個傳感器，包括： 一第一傳感器，設置於該第一隔室中，並與該第一致動器保持相互隔離，並對流通於表面之氣體進行監測； 一第二傳感器，設置於該第三隔室中，以對導入該第三隔室中的氣體監測；以及 一第三傳感器，承載於該承載隔板上，並位於該微粒監測基座之該監測通道中，以對導入該監測通道的氣體監測。An actuating sensing module comprises: a main body, which is composed of a plurality of compartments, the plurality of compartments comprising: a first compartment, wherein a first compartment is separated by a first partition and a second compartment, and a first air inlet is connected to the first compartment, a first air outlet is provided, the second compartment is connected, and the first partition has a first communication port. The first compartment and the second compartment are connected to each other; and a second compartment is integrated with the first compartment, and a third compartment and a fourth compartment are separated by a carrying partition. And a second air inlet is connected to the third compartment, a second air outlet is provided to communicate with the fourth compartment, and the load barrier has a second communication port to communicate with the third compartment And the fourth compartment; a particle monitoring base disposed between the third compartment of the second compartment and the load-bearing partition, having a monitoring channel, and one end of the monitoring channel has a receiving slot Connected to the monitoring channel; a plurality of actuators, comprising: a first actuator disposed in the second compartment and the first compartment The control gas is introduced into the first compartment from the first air inlet, communicates through the first communication port, is guided to the second compartment, and is discharged from the first air outlet. a single direction gas guiding of the first compartment; and a second actuator disposed in the receiving groove of the particle monitoring base to close one end of the monitoring channel to control gas from the second intake The port is introduced into the third compartment and then introduced into the monitoring channel, and is communicated through the second communication port to be guided into the fourth compartment, and then discharged by the second air outlet to constitute a single direction of the second compartment. a gas sensor; a plurality of sensors, comprising: a first sensor disposed in the first compartment and kept isolated from the first actuator and monitoring gas flowing through the surface; a second sensor And being disposed in the third compartment to monitor the gas introduced into the third compartment; and a third sensor carried on the load-bearing partition and located in the monitoring channel of the particle monitoring base, Monitor the gas introduced into the monitoring channel. 如申請專利範圍第1項所述之致動傳感模組，其中該第一隔腔包括一第一本體及一第二本體，其中該第一本體及該第二本體相互對接，且該第一隔板設置於該第一本體、該第二本體之間，以使該第一本體、該第一隔板之間構成第一隔室，該第二本體、該第一隔板之間構成第二隔室，而該第一進氣口設置於該第一本體、該第一隔板之間連通該第一隔室，該第一出氣口設置於該第二本體、該第一隔板之間連通該第二隔室。The actuating sensor module of claim 1, wherein the first compartment comprises a first body and a second body, wherein the first body and the second body are butted together, and the first a partition is disposed between the first body and the second body such that the first body and the first partition form a first compartment, and the second body and the first partition form a second compartment, wherein the first air inlet is disposed between the first body and the first partition, and the first air outlet is disposed on the second body, the first partition The second compartment is connected to each other. 如申請專利範圍第1項所述之致動傳感模組，其中該第二隔腔包括一第三本體及一第四本體，其中該第三本體及該第四本體相互對接以區隔出第三隔室，且該承載隔板設置於該第三本體、該第四本體之間，以使該第三本體、該承載隔板之間構成第三隔室，該第四本體、該承載隔板之間構成第四隔室，而該第二進氣口設置於該第三本體、該承載隔板之間連通該第三隔室，該第二出氣口設置於該第四本體、該承載隔板之間連通該第四隔室。The actuating sensor module of claim 1, wherein the second compartment comprises a third body and a fourth body, wherein the third body and the fourth body are butted to each other to be separated a third compartment, and the load-bearing partition is disposed between the third body and the fourth body, so that the third body and the load-bearing partition form a third compartment, the fourth body, the load a fourth compartment is formed between the partitions, and the second air inlet is disposed between the third body and the load-bearing partition to communicate with the third compartment, and the second air outlet is disposed on the fourth body, The fourth compartment is communicated between the load-bearing partitions. 如申請專利範圍第1項所述之致動傳感模組，其中該第一傳感器為氣體傳感器。The actuating sensor module of claim 1, wherein the first sensor is a gas sensor. 如申請專利範圍第4項所述之致動傳感模組，其中該氣體感測器包含一氧氣感測器、一一氧化碳感測器及一二氧化碳感測器之至少其中之一或其任意組合而成之群組。The actuating sensor module of claim 4, wherein the gas sensor comprises at least one of an oxygen sensor, a carbon monoxide sensor, and a carbon dioxide sensor, or any combination thereof a group of people. 如申請專利範圍第4項所述之致動傳感模組，其中該氣體傳感器包含一揮發性有機物傳感器。The actuating sensor module of claim 4, wherein the gas sensor comprises a volatile organic sensor. 如申請專利範圍第4項所述之致動傳感模組，其中該氣體傳感器包含監測細菌、病毒及微生物之至少其中之一或其任意組合而成之群組之傳感器。The actuating sensor module of claim 4, wherein the gas sensor comprises a sensor that monitors at least one of bacteria, viruses, and microorganisms, or any combination thereof. 如申請專利範圍第1項所述之致動傳感模組，其中該第二傳感器為溫度傳感器及濕度傳感器之至少其中之一。The actuating sensor module of claim 1, wherein the second sensor is at least one of a temperature sensor and a humidity sensor. 如申請專利範圍第1項所述之致動傳感模組，其中該第三傳感器為光感傳感器。The actuating sensor module of claim 1, wherein the third sensor is a light sensor. 如申請專利範圍第9項所述之致動傳感模組，其中該光感傳感器為PM2.5傳感器。The actuating sensor module of claim 9, wherein the photo sensor is a PM2.5 sensor. 如申請專利範圍第1項所述之致動傳感模組，其中該第一致動器為一微機電系統氣體泵浦。The actuating sensor module of claim 1, wherein the first actuator is a microelectromechanical system gas pump. 如申請專利範圍第1項所述之致動傳感模組，其中該第一致動器為一氣體泵浦，其包含： 一進氣板，具有至少一進氣孔、至少一匯流排孔及一匯流腔室，其中該至少一進氣孔供導入氣流，該匯流排孔對應該進氣孔，且引導該進氣孔之氣流匯流至該匯流腔室； 一共振片，具有一中空孔對應該匯流腔室，且該中空孔之周圍為一可動部；以及 一壓電致動器，與該共振片相對應設置； 其中，該共振片與該壓電致動器之間具有一間隙形成一腔室空間，以使該壓電致動器受驅動時，使氣流由該進氣板之該至少一進氣孔導入，經該至少一匯流排孔匯集至該匯流腔室，再流經該共振片之該中空孔，由該壓電致動器與該共振片之該可動部產生共振傳輸氣流。The actuating sensor module of claim 1, wherein the first actuator is a gas pump, comprising: an air inlet plate having at least one air inlet hole and at least one bus bar hole And a manifold chamber, wherein the at least one air inlet hole is configured to introduce an air flow, the bus bar hole corresponding to the air inlet hole, and the air flow guiding the air inlet hole is merged into the convergence flow chamber; a resonance piece having a hollow hole Corresponding to the confluence chamber, and the periphery of the hollow hole is a movable portion; and a piezoelectric actuator disposed corresponding to the resonance piece; wherein the resonance piece has a gap with the piezoelectric actuator Forming a chamber space for driving the piezoelectric actuator to be introduced from the at least one air inlet hole of the air intake plate, collecting the flow into the confluence chamber through the at least one bus bar hole, and reflowing Through the hollow hole of the resonator piece, the piezoelectric actuator and the movable portion of the resonance piece generate a resonant transmission airflow. 如申請專利範圍第12項所述之致動傳感模組，其中該壓電致動器包含： 一懸浮板，具有一第一表面及一第二表面，該第一表面具有一凸部； 一外框，環繞設置於該懸浮板之外側，並具有一組配表面； 至少一支架，連接於該懸浮板與該外框之間，以提供彈性支撐該懸浮板；以及 一壓電元件，貼附於該懸浮板之該第二表面上，用以施加電壓以驅動該懸浮板彎曲振動； 其中，該至少一支架成形於該懸浮板與該外框之間，並使該懸浮板之該第一表面與該外框之該組配表面形成為非共平面結構，且使該懸浮板之該第一表面與該共振板保持一腔室間距。The actuating sensor module of claim 12, wherein the piezoelectric actuator comprises: a suspension plate having a first surface and a second surface, the first surface having a convex portion; An outer frame disposed around the outer side of the suspension plate and having a set of matching surfaces; at least one bracket connected between the suspension plate and the outer frame to provide elastic support for the suspension plate; and a piezoelectric element, Attaching to the second surface of the suspension plate for applying a voltage to drive the suspension plate to bend vibration; wherein the at least one bracket is formed between the suspension plate and the outer frame, and the suspension plate is The first surface and the assembled surface of the outer frame are formed in a non-coplanar structure, and the first surface of the suspension plate is maintained at a chamber spacing from the resonant plate. 如申請專利範圍第13項所述之致動傳感模組，其中該懸浮板為一正方形懸浮板，並具有一凸部。The actuating sensor module of claim 13, wherein the suspension plate is a square suspension plate and has a convex portion. 如申請專利範圍第12項所述之致動傳感模組，其中該氣體泵浦包括一導電片 以及一絕緣片，其中該進氣板、該共振片、該壓電致動器、該導電片、該絕緣片及依序堆疊設置。The actuating sensor module of claim 12, wherein the gas pump comprises a conductive sheet and an insulating sheet, wherein the air inlet plate, the resonant plate, the piezoelectric actuator, the conductive The sheet, the insulating sheet and the stacking are arranged in sequence. 如申請專利範圍第1項所述之致動傳感模組，其中該承載隔板為一電路板。The actuating sensor module of claim 1, wherein the carrying baffle is a circuit board. 如申請專利範圍第16項所述之致動傳感模組，其中該微粒監測基座及該第三傳感器承載於該承載隔板電性連接，該微粒監測基座包含有一雷射發射器，與該承載隔板電性連接，並設有一光束通道，與該監測通道垂直連通，供該雷射發射器發設之光束照射至該監測通道中，以對該監測通道上通通該氣體之懸浮粒照射產生光點投射於該第三傳感器上感測。The actuating sensor module of claim 16, wherein the particle monitoring base and the third sensor are electrically connected to the carrying baffle, and the particle monitoring base comprises a laser emitter. Electrically connected to the carrying baffle, and provided with a beam path, which is in vertical communication with the monitoring channel, and a beam emitted by the laser emitter is irradiated into the monitoring channel to suspend the gas suspension on the monitoring channel The particle illumination produces a spot that is projected onto the third sensor for sensing. 如申請專利範圍第2項所述之致動傳感模組，其中該第一本體具有一第一連接穿孔，以供一電路軟板穿伸入連接該第一傳感器，並連接後封膠封閉該第一連接穿孔。The actuating sensor module of claim 2, wherein the first body has a first connecting through hole for a circuit board to penetrate into the first sensor and is connected to the sealant. The first connection is perforated. 如申請專利範圍第2項所述之致動傳感模組，其中該第二本體具有一第二連接穿孔，以供一電路軟板穿伸入連接該第一致動器，並連接後封膠封閉該第二連接穿孔。The actuating sensor module of claim 2, wherein the second body has a second connecting through hole for a circuit board to penetrate into the first actuator and connect the back seal The glue closes the second connecting perforation. 如申請專利範圍第3項所述之致動傳感模組，其中該第三本體具有一第三連接穿孔，以供一電路軟板穿伸入連接該第二傳感器，並連接後封膠封閉該第三連接穿孔。The actuating sensor module of claim 3, wherein the third body has a third connecting through hole for a circuit board to extend into and connect to the second sensor, and the connecting seal is sealed. The third connection is perforated. 如申請專利範圍第3項所述之致動傳感模組，其中該第三本體具有一第四連接穿孔，以供一電路軟板穿伸入連接該第二致動器，並連接後封膠封閉該第四連接穿孔。The actuating sensor module of claim 3, wherein the third body has a fourth connecting through hole for a circuit board to penetrate into the second actuator and connect the back seal The glue closes the fourth connecting perforation. 如申請專利範圍第16項所述之致動傳感模組，其中該承載隔板具有一外露部份穿伸至第二隔腔外部，該外露部分上具有一連接器，以供一電路軟板穿伸入連接，提供該承載隔板電性連接及訊號連接。The actuating sensor module of claim 16, wherein the carrying partition has an exposed portion extending to the outside of the second compartment, the exposed portion having a connector for a circuit soft The board penetrates into the connection to provide electrical connection and signal connection of the carrying partition. 如申請專利範圍第1項所述之致動傳感模組，其中該第一進氣口及該第一出氣口分別設有一閥，該閥包含一保持件、一密封件及一位移件，其中該位移件設置於該保持件及該密封件之間，以及該保持件、該密封件及該位移件上分別具有複數個通孔，而該保持件及該位移件上複數個通孔位置係相互對準，且該密封件與該保持件之複數個通孔位置為相互錯位不對準，其中該位移件透過電路軟板連接一處理器來控制，以控制位移件朝該保持件靠近，以構成該閥之開啟。The actuating sensor module of claim 1, wherein the first air inlet and the first air outlet are respectively provided with a valve, and the valve comprises a holding member, a sealing member and a displacement member. The displacement member is disposed between the holding member and the sealing member, and the holding member, the sealing member and the displacement member respectively have a plurality of through holes, and the plurality of through holes are disposed on the holding member and the displacement member The plurality of through hole positions of the sealing member and the holding member are mutually misaligned and misaligned, wherein the displacement member is controlled by a processor connected to the circuit board to control the displacement member toward the holder. To constitute the opening of the valve. 如申請專利範圍第1項所述之致動傳感模組，其中該第二進氣口設置於直接對應該監測通道之位置，以形成該氣體直接對流。The actuating sensor module of claim 1, wherein the second air inlet is disposed at a position directly corresponding to the monitoring channel to form direct convection of the gas. 如申請專利範圍第1項所述之致動傳感模組，其中該第二致動器包括： 一噴氣孔片，包含複數個支架、一懸浮片及一中空孔洞，該懸浮片可彎曲振動，該複數個支架鄰接於該懸浮片周緣，而該中空孔洞形成於懸浮片的中心位置，透過複數個支架設置該微粒監測基座的承置槽上方，並提供彈性支撐該懸浮片，並該噴氣孔片與該承置槽之間形成一氣流腔室，且該複數個支架及該懸浮片之間形成至少一空隙； 一腔體框架，承載疊置於該懸浮片上； 一致動體，承載疊置於該腔體框架上，以接受電壓而產生往復式地彎曲振動； 一絕緣框架，承載疊置於該致動體上；以及 一導電框架，承載疊設置於該絕緣框架上；其中，該致動體、該腔體框架及該懸浮片之間形成一共振腔室，透過驅動該致動體以帶動該噴氣孔片產生共振，使該噴氣孔片之該懸浮片產生往復式地振動位移，以造成該氣體通過該至少一空隙進入該氣流腔室，再由該氣體流道排出，實現該氣體之傳輸流動。The actuating sensor module of claim 1, wherein the second actuator comprises: a jet orifice piece comprising a plurality of brackets, a suspension piece and a hollow hole, the suspension piece being bendable and vibrating The plurality of brackets are adjacent to the periphery of the suspension piece, and the hollow holes are formed at a center position of the suspension piece, and the plurality of brackets are disposed above the receiving groove of the particle monitoring base, and elastically supports the suspension piece, and the elastic hole is supported Forming an air flow chamber between the air venting piece and the receiving groove, and forming at least one gap between the plurality of brackets and the suspension piece; a cavity frame stacked on the suspension piece; Stacked on the frame of the cavity to receive a voltage to generate a reciprocating bending vibration; an insulating frame stacked on the actuating body; and a conductive frame on which the carrier stack is disposed; Forming a resonant cavity between the actuating body, the cavity frame and the suspension piece, driving the actuating body to drive the air venting piece to resonate, and causing the floating piece of the air venting piece to reciprocate Vibration displacement to cause the at least one gap through which the gas stream enters the chamber, and then discharged from the gas flow path, the flow of gases to achieve transmission. 如申請專利範圍第25項所述之致動傳感模組，其中該致動體包含: 一壓電載板，承載疊置於該腔體框架上； 一調整共振板，承載疊置於該壓電載板上；以及 一壓電板，承載疊置於該調整共振板上，以接受電壓而驅動該壓電載板及該調整共振板產生往復式地彎曲振動。The actuating sensor module of claim 25, wherein the actuating body comprises: a piezoelectric carrier plate stacked on the cavity frame; an adjustment resonant plate, the carrier is stacked thereon a piezoelectric carrier; and a piezoelectric plate stacked on the adjustment resonator plate to receive the voltage to drive the piezoelectric carrier and the adjustment resonator plate to generate reciprocating bending vibration. 如申請專利範圍第26項所述之致動傳感模組，其中該調整共振板之厚度大於該壓電載板之厚度。The actuating sensor module of claim 26, wherein the thickness of the adjusting resonant plate is greater than the thickness of the piezoelectric carrier.