TWM546969U - Sucking apparatus - Google Patents

Description

吸取裝置Suction device

一種吸取裝置，尤指滑動桿外側緣設置有連通氣體通道及腔室之通孔，而腔室內設置有用於堵住進氣口之薄片，使吸取裝置吸附板材時，氣體能經由口徑較小之通孔流通，避免吸取裝置因破真空而失效停機，且腔室底部設置有供氣體回流至伸縮吸盤內之側透氣孔，使吸取裝置能夠快速釋放板材，以提高整體工作效率者。The suction device, in particular, the outer edge of the sliding rod is provided with a through hole for connecting the gas passage and the chamber, and the chamber is provided with a sheet for blocking the air inlet, so that the gas can pass through the small diameter when the suction device adsorbs the sheet. The through hole circulates, avoids the failure of the suction device to stop due to vacuum breaking, and the bottom of the chamber is provided with a side venting hole for returning the gas to the telescopic suction cup, so that the suction device can quickly release the plate to improve the overall working efficiency.

按，一般使用於如印刷電路板、軟性電路板、晶圓、面板或玻璃基材等板材之吸取裝置，主要包含有滑動桿及伸縮吸盤，滑動桿內部設置有氣體通道，氣體通道於滑動桿兩端分別形成有吸氣口及進氣口，吸氣口連通於真空泵，進氣口則連通於伸縮吸盤內部之氣孔，俾使伸縮吸盤能藉由真空泵於氣體通道所產生之真空吸力吸取板材，但上述結構之吸取裝置容易因伸縮吸盤與板材間之接觸不良，導致外界空氣流入吸取裝置內，造成吸取裝置因破真空而失效停機，因此即有相關業者於滑動桿之進氣口與伸縮吸盤之氣孔間設置有可受真空吸力帶動而上下位移之珠體，藉由珠體於真空泵吸氣時，堵住進氣口，避免外界空氣流入吸取裝置內，但當真空泵釋氣提供氣體通道正壓時，該珠體會落至伸縮吸盤之氣孔處，轉而堵住氣孔，導致氣體無法回流至伸縮吸盤內，調整伸縮吸盤內之氣壓值，進而降低吸取裝置釋放板材之速度，而大幅降低吸取裝置之工作效率。Pressing, generally used in a suction device such as a printed circuit board, a flexible circuit board, a wafer, a panel or a glass substrate, mainly comprising a sliding rod and a telescopic suction cup, the sliding rod is internally provided with a gas passage, and the gas passage is arranged on the sliding rod The air inlet and the air inlet are respectively formed at the two ends, and the air inlet is connected to the vacuum pump, and the air inlet is connected to the air hole inside the telescopic suction cup, so that the telescopic suction cup can absorb the sheet by the vacuum suction generated by the vacuum pump in the gas passage. However, the suction device of the above structure is prone to poor contact between the telescopic suction cup and the plate material, so that the outside air flows into the suction device, causing the suction device to fail to stop due to the vacuum breaking, so that the relevant operator is in the air inlet and the expansion and contraction of the sliding rod. The bead of the suction cup is provided with a bead body which can be displaced up and down by the vacuum suction. When the bead body is inhaled by the vacuum pump, the air inlet is blocked to prevent the outside air from flowing into the suction device, but when the vacuum pump releases the gas to provide a gas passage When pressed, the bead will fall to the air hole of the telescopic suction cup, which will block the air hole, causing the gas to not flow back into the telescopic suction cup. Adjust the air pressure within the telescopic suction cup, thus reducing the speed of the draw sheet releasing device, and greatly reduce the efficiency of the device draw.

是以，要如何解決上述習知之問題與缺失，即為相關業者所亟欲研發之課題。Therefore, how to solve the above-mentioned problems and shortcomings is the subject of research and development that the relevant industry is eager to develop.

本創作之主要目的乃在於，利用設置於滑動桿外側、連通於氣體通道及腔室之通孔，與設置於腔室內可受真空吸力帶動上下位移之薄片，使吸取裝置於吸附板材時，能藉由真空吸力帶動薄片位移堵住進氣口，讓氣體經由口徑較小之通孔流通，縮減氣體流通路徑之截面積與空間，防止吸取裝置因破真空而失效停機；以及利用設置於連接件底部且連通腔室及伸縮吸盤內部之側透氣孔，使吸取裝置於釋放板材時，氣體能經由側透氣孔回流至伸縮吸盤內，調整伸縮吸盤內之氣壓值，進而快速釋放板材，提高吸取裝置之整體工作效率。The main purpose of the present invention is to use a through hole disposed outside the sliding rod, communicating with the gas passage and the chamber, and a sheet disposed in the chamber to be vertically displaced by the vacuum suction force, so that the suction device can adsorb the sheet. The vacuum suction drives the sheet displacement to block the air inlet, allows the gas to flow through the through hole with smaller diameter, reduces the cross-sectional area and space of the gas circulation path, prevents the suction device from failing due to vacuum breaking, and uses the connection device. The bottom part communicates with the side venting hole of the chamber and the inside of the telescopic suction cup, so that when the suction device releases the plate, the gas can be returned to the telescopic suction cup through the side vent hole, and the air pressure value in the telescopic suction cup is adjusted, thereby quickly releasing the plate and improving the suction device. The overall work efficiency.

為達上述目的，本創作之吸取裝置，其連接有真空泵，以供作氣壓值之調整，包含有固定件、滑動組及伸縮吸盤，該滑動組具有滑動桿及連接件，滑動桿係滑動地穿設於固定件，且內部設置有氣體通道，氣體通道於滑動桿兩端分別形成有吸氣口及進氣口，吸氣口連通於真空泵，進氣口端部外側緣則設有連通於氣體通道之通孔，且通孔之口徑小於進氣口之口徑；連接件係套設於滑動桿之進氣口端部外周緣，並於內部設置有與進氣口及通孔連通之腔室，腔室內容置有薄片及珠體，薄片及珠體係受真空吸力帶動而上下位移，且薄片係位於珠體與進氣口之間，而連接件底部則設置有主透氣孔，主透氣孔周緣設置有側透氣孔，且主透氣孔與側透氣孔係連通於腔室；上述伸縮吸盤係連接於上述連接件末端，且內部設置有與主透氣孔及側透氣孔連通之氣孔；藉上，當真空泵吸氣提供氣體通道負壓，使伸縮吸盤吸附板材時，該薄片會受真空吸力帶動而堵住進氣口，使氣體經由口徑較小之通孔流通，以縮減氣體可流通路徑的截面積及空間，將整體真空吸力保持一定大小；當真空泵釋氣提供氣體通道正壓，使珠體堵住主透氣孔時，氣體會經由側透氣孔回流至伸縮吸盤之氣孔內，快速調整氣孔內之氣壓值，將被伸縮吸盤吸附之板材釋放。In order to achieve the above object, the suction device of the present invention is connected with a vacuum pump for adjusting the air pressure value, and includes a fixing member, a sliding group and a telescopic suction cup, the sliding group has a sliding rod and a connecting member, and the sliding rod is slidably The utility model is disposed on the fixing member, and is internally provided with a gas passage. The gas passage is respectively formed with an air inlet and an air inlet at two ends of the sliding rod, the air inlet is connected to the vacuum pump, and the outer edge of the air inlet end is connected to the air inlet. a through hole of the gas passage, and the diameter of the through hole is smaller than the diameter of the inlet; the connecting member is sleeved on the outer periphery of the inlet end of the sliding rod, and is internally provided with a cavity communicating with the inlet and the through hole In the chamber, the chamber is provided with a sheet and a bead body, and the sheet and the bead system are driven up and down by the vacuum suction, and the sheet is located between the bead and the air inlet, and the bottom of the connecting member is provided with a main venting hole, and the main ventilation is provided. The side of the hole is provided with a side venting hole, and the main venting hole and the side venting hole are connected to the chamber; the telescopic suction cup is connected to the end of the connecting piece, and the inside is provided with a venting hole communicating with the main venting hole and the side venting hole; on When the suction of the vacuum pump provides the negative pressure of the gas passage, when the telescopic suction cup adsorbs the plate, the sheet is driven by the vacuum suction to block the air inlet, so that the gas flows through the through hole with a small diameter to reduce the flow path of the gas. Area and space, the overall vacuum suction is kept at a certain size; when the vacuum pump releases gas to provide a positive pressure of the gas passage, so that the shell blocks the main vent hole, the gas will flow back into the air hole of the telescopic suction cup through the side vent hole, and the air hole can be quickly adjusted. The pressure value will be released by the plate adsorbed by the telescopic suction cup.

前述之吸取裝置，其中該連接件之薄片係為圓形薄片，其外徑係大於進氣口之口徑，且小於腔室之內徑。In the above suction device, the sheet of the connecting member is a circular sheet whose outer diameter is larger than the diameter of the air inlet and smaller than the inner diameter of the chamber.

前述之吸取裝置，其中該滑動桿於進氣口位置設置有凸緣，供受真空吸力帶動之薄片抵靠，以密封堵住進氣口。In the above suction device, the sliding rod is provided with a flange at the position of the air inlet for abutting against the sheet driven by the vacuum suction to seal the air inlet.

前述之吸取裝置，其中該滑動桿於進氣口位置設置有凸緣，而通孔係設於凸緣外側緣。In the above suction device, the sliding rod is provided with a flange at the position of the air inlet, and the through hole is provided at the outer edge of the flange.

前述之吸取裝置，其中該連接件具有複數側透氣孔，複數側透氣孔係間隔設置於主透氣孔周緣。In the above suction device, the connecting member has a plurality of side vent holes, and the plurality of side vent holes are spaced apart from the periphery of the main vent hole.

前述之吸取裝置，其中該連接件之主透氣孔之口徑係小於珠體之外徑，以防止珠體落出腔室。In the above suction device, the diameter of the main vent hole of the connecting member is smaller than the outer diameter of the bead to prevent the bead from falling out of the chamber.

請參閱第一圖至第四圖所示，由圖中可清楚看出，本創作之吸取裝置，包含有固定件1、滑動組2及伸縮吸盤3，其中：Referring to the first to fourth figures, it can be clearly seen from the figure that the suction device of the present invention comprises a fixing member 1, a sliding group 2 and a telescopic suction cup 3, wherein:

該固定件1具有套接部11以及延伸於套接部11一側之定位部12，並於套接部11上方設置有止擋片13。The fixing member 1 has a sleeve portion 11 and a positioning portion 12 extending from the side of the socket portion 11 , and a stopper piece 13 is disposed above the socket portion 11 .

該滑動組2具有滑動桿21、連接件22及彈性復位件23，該滑動桿21係滑動地穿設於固定件1之套接部11，且滑動桿21內部設置有氣體通道211，氣體通道211於滑動桿21兩端分別形成有吸氣口212及進氣口213，滑動桿21之吸氣口212端部外接有與吸氣口212連通之真空泵(圖中未顯示)，供作氣壓值之調整，且吸氣口212端部外側緣凸設有抵靠部215，抵靠部215係抵靠於上述固定件1之止擋片13頂面，以防止滑動桿21落出套接部11，而滑動桿21於進氣口213位置則設置有凸緣216，凸緣216外側緣設置有連通氣體通道211之通孔214，且通孔214之口徑係小於進氣口213之口徑；該連接件22係套設於滑動桿21之進氣口213端部外周緣，且內部設置有與進氣口213及通孔214連通之腔室221，上述滑動桿21之進氣口213係位於腔室221內部之上方空間內，且腔室221內容置有薄片222及珠體223，薄片222及珠體223係受真空吸力帶動而上下位移，該薄片222係為圓形薄片，並位於珠體223與進氣口213之間，其外徑係大於進氣口213之口徑，且小於腔室221之內徑，而連接件22底部則設置有與腔室221連通之主透氣孔224及複數側透氣孔225，主透氣孔224之口徑係小於珠體223之外徑，以防止珠體223落出腔室221，而複數側透氣孔225係間隔設置於主透氣孔224周緣，且每一側透氣孔225之口徑均小於主透氣孔224之口徑；該彈性復位件23係套設於上述滑動桿21之外側周緣，且一端抵持於上述固定件1之套接部11，另端則抵持於連接件22頂部，以藉由其彈性作用，將於固定件1之套接部11內滑移之滑動桿21恢復原位。The sliding group 2 has a sliding rod 21, a connecting member 22 and an elastic returning member 23, and the sliding rod 21 is slidably disposed through the sleeve portion 11 of the fixing member 1, and the sliding rod 21 is internally provided with a gas passage 211, a gas passage 211 is respectively formed with an air inlet 212 and an air inlet 213 at two ends of the sliding rod 21, and a vacuum pump (not shown) connected to the air inlet 212 is externally connected to the end of the air inlet 212 of the sliding rod 21 for air pressure. The value is adjusted, and the outer edge of the end of the suction port 212 is convexly provided with an abutting portion 215. The abutting portion 215 abuts against the top surface of the stopper piece 13 of the fixing member 1 to prevent the sliding rod 21 from falling out of the socket. The portion 11 of the sliding rod 21 is disposed at the position of the air inlet 213, and the outer edge of the flange 216 is provided with a through hole 214 communicating with the gas passage 211, and the diameter of the through hole 214 is smaller than the diameter of the air inlet 213. The connecting member 22 is sleeved on the outer periphery of the end of the air inlet 213 of the sliding rod 21, and is internally provided with a chamber 221 communicating with the air inlet 213 and the through hole 214, and the air inlet 213 of the sliding rod 21 The space is located in the upper space inside the chamber 221, and the chamber 221 is provided with a sheet 222 and a bead 223, and the sheet 222 and the bead 223 are subjected to The air absorbing force is driven up and down. The sheet 222 is a circular sheet and is located between the bead body 223 and the air inlet 213. The outer diameter of the sheet 222 is larger than the diameter of the air inlet 213 and smaller than the inner diameter of the chamber 221. The bottom of the connecting member 22 is provided with a main venting hole 224 communicating with the chamber 221 and a plurality of side venting holes 225. The diameter of the main venting holes 224 is smaller than the outer diameter of the beads 223 to prevent the beads 223 from falling out of the chamber 221 The plurality of side venting holes 225 are spaced apart from the periphery of the main venting hole 224, and the diameter of each side venting hole 225 is smaller than the diameter of the main venting hole 224; the elastic returning member 23 is sleeved on the outer side of the sliding rod 21 a peripheral edge, and one end abuts against the sleeve portion 11 of the fixing member 1 , and the other end abuts against the top of the connecting member 22 to slide slidingly in the socket portion 11 of the fixing member 1 by the elastic action thereof. The rod 21 is restored to its original position.

該伸縮吸盤3係連接設置於上述滑動組2之連接件22底部，並於內部貫穿設置有氣孔31，氣孔31係正對於連接件22底部之主透氣孔224及側透氣孔225，而與連接件22內部之腔室221連通。The telescopic suction cup 3 is connected to the bottom of the connecting member 22 of the sliding group 2, and is internally provided with a venting hole 31. The air vent 31 is connected to the main venting hole 224 and the side venting hole 225 at the bottom of the connecting member 22, and is connected. The chamber 221 inside the member 22 is in communication.

請參閱第五圖至第八圖所示，由圖中可清楚看出，該滑動組2係以固定件1之定位部12定位於傳動裝置5上，且吸取裝置之數量可依據不同需求進行增設，並連接同一真空泵(圖中未顯示)；於吸取板材4時，該些吸取裝置係藉由傳動裝置5帶動而位移至板材4上方，使伸縮吸盤3接觸於板材4，並使伸縮吸盤3之氣孔31緊密貼合於板材4表面，再啟動真空泵吸氣對滑動桿21之氣體通道211提供負壓，使氣體通道211內產生真空吸力，將板材4吸附於伸縮吸盤3底部，而位於腔室211內之薄片222則受真空吸力帶動，靠近並抵靠於滑動桿21之凸緣216，使進氣口213被薄片222密封堵住，此時，若伸縮吸盤3與板材4之間，因接觸不良而產生間隙時，如第七圖及第八圖所示，外界空氣會經由該間隙流入連接件2之腔室221內，但由於腔室221內之薄片222受真空吸力帶動而堵住進氣口213，使流入腔室221內之外界空氣僅能經由口徑較小之通孔214流入氣體通道211，以縮減氣體可流通路徑之截面積及空間，進而減少單位時間內流入吸取裝置內之空氣流量，讓吸取裝置整體真空吸力維持在一定大小，而不會因為破真空而失效停機。Referring to the fifth to eighth figures, it can be clearly seen from the figure that the sliding group 2 is positioned on the transmission device 5 by the positioning portion 12 of the fixing member 1, and the number of the suction devices can be performed according to different requirements. Adding and connecting the same vacuum pump (not shown); when sucking the plate 4, the suction devices are displaced by the transmission device 5 to the upper portion of the plate 4, the expansion cup 3 is in contact with the plate 4, and the expansion cup is made 3, the air hole 31 is closely attached to the surface of the plate 4, and then the vacuum pump suction is started to provide a negative pressure to the gas passage 211 of the sliding rod 21, so that vacuum suction is generated in the gas passage 211, and the plate 4 is adsorbed to the bottom of the telescopic suction cup 3, and is located at The sheet 222 in the chamber 211 is driven by the vacuum suction force, and is close to and abuts against the flange 216 of the sliding rod 21, so that the air inlet 213 is sealed by the sheet 222. At this time, if between the bellows 3 and the sheet 4 When a gap is generated due to poor contact, as shown in the seventh and eighth figures, outside air flows into the chamber 221 of the connecting member 2 through the gap, but since the sheet 222 in the chamber 221 is driven by vacuum suction Blocking the air inlet 213 to make it flow into the cavity The outer air in the chamber 221 can only flow into the gas passage 211 through the through hole 214 having a small diameter to reduce the cross-sectional area and space of the gas flowable path, thereby reducing the flow of air flowing into the suction device per unit time, so that the suction device as a whole The vacuum suction is maintained at a certain level without failure to stop due to vacuum breaking.

請參閱第九圖所示，由圖中可清楚看出，當吸附有板材4之吸取裝置需要釋放板材4時，係藉由真空泵(圖中未顯示)釋氣提供氣體通道211正壓，使氣體通道221內之氣體經由通孔214流入腔室221內，調整腔室221內之氣壓值，讓珠體223藉其本身之重力，落至腔室211底部，並堵住主透氣孔224，此時，流入腔室221內之氣體，即可經由主透氣孔224周緣之側透氣孔225，流入伸縮吸盤3之氣孔31內，調整伸縮吸盤3內之氣壓值，以快速釋放被吸附於伸縮吸盤3底部之板材4。Referring to the ninth figure, it can be clearly seen from the figure that when the suction device for adsorbing the plate 4 needs to release the plate 4, the gas channel 211 is positively pressurized by the outgas of a vacuum pump (not shown). The gas in the gas passage 221 flows into the chamber 221 through the through hole 214, and the air pressure value in the chamber 221 is adjusted, so that the bead body 223 falls to the bottom of the chamber 211 by its own gravity, and blocks the main vent hole 224. At this time, the gas flowing into the chamber 221 can flow into the air hole 31 of the telescopic chuck 3 through the side vent hole 225 of the main vent hole 224, and adjust the air pressure value in the telescopic chuck 3 to be quickly released and adsorbed to the telescopic tube. The plate 4 at the bottom of the suction cup 3.

是以，本創作為可解決習知之問題與缺失，其關鍵技術在於，利用設置於腔室221內可受真空吸力帶動上下位移之薄片222，以及連通於氣體通道211及腔室221、口徑小於進氣口213之通孔214，讓氣體於真空泵吸氣，使薄片222受真空吸力帶動而位移堵住進氣口213時，經由口徑較小之通孔214流通，進而縮減氣體可流通路徑的截面積及空間，避免吸取裝置因破真空而失效停機；並利用設置於連接件22底部且連通腔室221與伸縮吸盤3氣孔31之側透氣孔225，於真空泵釋氣，使珠體223堵住主透氣孔224時，供氣體回流至伸縮吸盤3內，調整伸縮吸盤3內之氣壓值，以快速釋放被伸縮吸盤3吸附之板材4，以提高吸取裝置之整體工作效率。Therefore, the present invention is capable of solving the problems and deficiencies of the prior art. The key technology is to use the sheet 222 disposed in the chamber 221 to be vertically displaced by the vacuum suction, and to communicate with the gas passage 211 and the chamber 221, and the diameter is smaller than The through hole 214 of the air inlet 213 allows the gas to be inhaled by the vacuum pump, so that when the sheet 222 is driven by the vacuum suction and is displaced by the vacuum port 213, it flows through the through hole 214 having a small diameter, thereby reducing the gas flow path. Cross-sectional area and space, to avoid the failure of the suction device to stop due to vacuum breaking; and use the venting hole 225 disposed at the bottom of the connecting member 22 and communicating with the chamber 221 and the air vent 31 of the telescopic suction cup 3 to release the gas in the vacuum pump to block the beads 223 When the main vent hole 224 is accommodated, the gas is returned to the telescopic chuck 3, and the air pressure value in the telescopic suction cup 3 is adjusted to quickly release the plate 4 adsorbed by the telescopic suction cup 3 to improve the overall working efficiency of the suction device.

1‧‧‧固定件
11‧‧‧套接部
12‧‧‧定位部
13‧‧‧止擋片
2‧‧‧滑動組
21‧‧‧滑動桿
211‧‧‧氣體通道
212‧‧‧吸氣口
213‧‧‧進氣口
214‧‧‧通孔
215‧‧‧抵靠部
216‧‧‧凸緣
22‧‧‧連接件
221‧‧‧腔室
222‧‧‧薄片
223‧‧‧珠體
224‧‧‧主透氣孔
225‧‧‧側透氣孔
23‧‧‧彈性復位件
3‧‧‧伸縮吸盤
31‧‧‧氣孔
4‧‧‧板材
5‧‧‧傳動裝置1‧‧‧Fixed parts
11‧‧‧ Sockets
12‧‧‧ Positioning Department
13‧‧‧stop film
2‧‧‧Sliding group
21‧‧‧Sliding rod
211‧‧‧ gas passage
212‧‧‧ suction port
213‧‧‧air inlet
214‧‧‧through hole
215‧‧‧Affiliation
216‧‧‧Flange
22‧‧‧Connecting parts
221‧‧‧ chamber
222‧‧‧Sheet
223‧‧‧ beads
224‧‧‧Main venting holes
225‧‧‧ side vent
23‧‧‧Elastic reset parts
3‧‧‧Flexible suction cup
31‧‧‧ stomata
4‧‧‧ plates
5‧‧‧Transmission

第一圖係本創作之立體外觀圖。 第二圖係本創作之立體分解圖。 第三圖係本創作之局部剖視圖。 第四圖係本創作於常態時之剖視圖。 第五圖係本創作於使用時之示意圖。 第六圖係本創作吸取板材時之示意圖。 第七圖係本創作之伸縮吸盤與板材接觸不良時之剖視圖。 第八圖係依據第七圖所示之A之放大圖。 第九圖係本創作於釋放板材時之示意圖。The first picture is a three-dimensional appearance of the creation. The second picture is a three-dimensional exploded view of the creation. The third figure is a partial cross-sectional view of the creation. The fourth picture is a cross-sectional view of the present creation in the normal state. The fifth picture is a schematic diagram of the creation of the present invention. The sixth picture is a schematic diagram of the creation of the sheet. The seventh picture is a cross-sectional view of the present invention when the telescopic suction cup is in poor contact with the sheet. The eighth figure is an enlarged view of A according to the seventh figure. The ninth figure is a schematic diagram of the present invention when the sheet is released.

1‧‧‧固定件 1‧‧‧Fixed parts

11‧‧‧套接部 11‧‧‧ Sockets

12‧‧‧定位部 12‧‧‧ Positioning Department

2‧‧‧滑動組 2‧‧‧Sliding group

21‧‧‧滑動桿 21‧‧‧Sliding rod

213‧‧‧進氣口 213‧‧‧air inlet

214‧‧‧通孔 214‧‧‧through hole

215‧‧‧抵靠部 215‧‧‧Affiliation

216‧‧‧凸緣 216‧‧‧Flange

22‧‧‧連接件 22‧‧‧Connecting parts

222‧‧‧薄片 222‧‧‧Sheet

223‧‧‧珠體 223‧‧‧ beads

23‧‧‧彈性復位件 23‧‧‧Elastic reset parts

3‧‧‧伸縮吸盤 3‧‧‧Flexible suction cup

31‧‧‧氣孔 31‧‧‧ stomata

Claims (6)

一種吸取裝置，其連接有真空泵，以供作氣壓值之調整，包含有固定件、滑動組及伸縮吸盤，其中： 該滑動組具有滑動桿及連接件，滑動桿係滑動地穿設於固定件，且內部設置有氣體通道，氣體通道於滑動桿兩端分別形成有吸氣口及進氣口，吸氣口連通於真空泵，而進氣口端部外側緣設置有與氣體通道連通之通孔，且通孔之口徑小於進氣口之口徑；該連接件係套設於滑動桿之進氣口端部外周緣，並於內部設置有與進氣口及通孔連通之腔室，腔室內容置有受真空吸力帶動而上下位移之薄片及珠體，且薄片係位於珠體與進氣口之間，而連接件底部設置有主透氣孔，主透氣孔周緣設置有側透氣孔，且主透氣孔與側透氣孔係連通於腔室； 該伸縮吸盤係設置於上述連接件末端，且內部設置有與主透氣孔及側透氣孔連通之氣孔； 藉上，當真空泵吸氣提供氣體通道負壓，使伸縮吸盤吸附板材時，該薄片會受真空吸力帶動而堵住進氣口，使氣體經由口徑較小之通孔流通，以縮減氣體可流通路徑的截面積及空間，將整體真空吸力保持一定大小；當真空泵釋氣提供氣體通道正壓，使珠體堵住主透氣孔時，氣體會經由側透氣孔回流至伸縮吸盤之氣孔內，快速調整氣孔內之氣壓值，將被伸縮吸盤吸附之板材釋放。A suction device is connected with a vacuum pump for adjusting the air pressure value, comprising a fixing member, a sliding group and a telescopic suction cup, wherein: the sliding group has a sliding rod and a connecting member, and the sliding rod is slidably disposed on the fixing member And a gas passage is arranged inside, the gas passage is respectively formed with an air inlet and an air inlet at two ends of the sliding rod, the air inlet is connected to the vacuum pump, and the outer edge of the air inlet end is provided with a through hole communicating with the gas passage The diameter of the through hole is smaller than the diameter of the air inlet; the connecting member is sleeved on the outer periphery of the end of the air inlet of the sliding rod, and is internally provided with a chamber communicating with the air inlet and the through hole, the chamber The content is provided with a sheet and a bead body which are driven up and down by the vacuum suction, and the sheet is located between the bead body and the air inlet, and the main vent hole is arranged at the bottom of the connecting member, and the side vent hole is provided at the periphery of the main vent hole, and The main venting hole and the side venting hole are connected to the chamber; the telescopic suction cup is disposed at the end of the connecting member, and is internally provided with an air hole communicating with the main venting hole and the side venting hole; When the suction pressure plate sucks the plate, the sheet will be driven by the vacuum suction to block the air inlet, so that the gas flows through the through hole with a small diameter to reduce the cross-sectional area and space of the gas flow path, and the whole The vacuum suction is kept at a certain size; when the vacuum pump releases the positive pressure of the gas passage so that the beads block the main vent hole, the gas will flow back into the air hole of the telescopic suction cup through the side vent hole, and the air pressure value in the air hole will be quickly adjusted, and will be The plate is absorbed by the telescopic suction cup. 如請求項1所述之吸取裝置，其中該連接件之薄片係為圓形薄片，其外徑係大於進氣口之口徑，且小於腔室之內徑。The suction device according to claim 1, wherein the sheet of the connecting member is a circular sheet whose outer diameter is larger than the diameter of the air inlet and smaller than the inner diameter of the chamber. 如請求項1所述之吸取裝置，其中該滑動桿於進氣口位置設置有凸緣，供受真空吸力帶動之薄片抵靠，以密封堵住進氣口。The suction device according to claim 1, wherein the sliding rod is provided with a flange at the position of the air inlet for abutting against the sheet driven by the vacuum suction to seal the air inlet. 如請求項1所述之吸取裝置，其中該滑動桿於進氣口位置設置有凸緣，而通孔係設於凸緣外側緣。The suction device according to claim 1, wherein the sliding rod is provided with a flange at the position of the air inlet, and the through hole is provided at the outer edge of the flange. 如請求項1所述之吸取裝置，其中該連接件具有複數側透氣孔，複數側透氣孔係間隔設置於主透氣孔周緣。The suction device according to claim 1, wherein the connecting member has a plurality of side vent holes, and the plurality of side vent holes are spaced apart from the circumference of the main vent hole. 如請求項1所述之吸取裝置，其中該連接件之主透氣孔之口徑係小於珠體之外徑，以防止珠體落出腔室。The suction device according to claim 1, wherein the main vent hole of the connecting member has a diameter smaller than an outer diameter of the bead to prevent the bead from falling out of the chamber.