TWM532528U - Energy-saving type vacuum precision pressure regulating valve - Google Patents
Energy-saving type vacuum precision pressure regulating valve Download PDFInfo
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Description
本創作係關於一種節能型真空精密調壓閥,該本體內部設有調壓通道、調壓副通道、以及衡壓通道,透過壓力流體流通於前述各通道內,使平衡膜片與主膜片受壓產生位移,讓本體免持續吸入大氣,又能持續調整內部真空壓力,使其達到節省真空源能源及精密調整之目標。 The present invention relates to an energy-saving vacuum precision pressure regulating valve, wherein the body is provided with a pressure regulating passage, a pressure regulating auxiliary passage, and a pressure regulating passage, and the pressure fluid flows through the foregoing passages to make the balance diaphragm and the main membrane. The piece is pressed to generate displacement, so that the body can be continuously inhaled into the atmosphere, and the internal vacuum pressure can be continuously adjusted to achieve the goal of saving vacuum source energy and fine adjustment.
以往,自動化設備領域所廣泛使用的真空精密調壓閥,不論是在國內、外市場銷售產品,就技術應用類型而言,都必須藉持續吸入大氣才能維持調壓閥的真空壓力精準度;該類真空精密調壓閥,於使用過程中勢必會讓壓力流體持續吸入外部的空氣流量,雖能達成預定之目標,但過程所耗費的資源,將會提高整體製造的成本,於長期使用狀態下的累積金額將非常可觀。為提升自動化加工流程的精細及效率,亦有業者透過以氣壓迴路減少吸入空氣流量來換取高精度輸出壓,並非容易的真空精密調壓閥設計,在結構設計及生產製作上存有複雜化的傾向,是故仍有許多可改善之處。 In the past, vacuum precision pressure regulating valves widely used in the field of automation equipment, whether in the domestic and foreign markets, in terms of technical application types, must continue to inhale the atmosphere to maintain the vacuum pressure accuracy of the pressure regulating valve; Vacuum-like precision pressure regulating valve will inevitably allow the pressure fluid to continuously inhale the external air flow during use. Although the intended goal can be achieved, the resources consumed by the process will increase the overall manufacturing cost under long-term use. The cumulative amount will be very substantial. In order to improve the precision and efficiency of the automated processing process, some operators have exchanged high-precision output pressure by reducing the suction air flow rate through the pneumatic circuit. It is not an easy vacuum precision pressure regulating valve design, which is complicated in structural design and production. There is still a lot of room for improvement.
本創作者於先前創作結構中,透過改良內部通路使壓力流體,得以產生對等壓力,使其能以回饋方式讓能源損耗得以大幅減少,雖 具有一定成效,但對於大氣需持續流入本體內部之改善並不卓越,且於運作上仍有不甚流暢的情況,其憑藉前述結構於實際應用與研究後知悉,故有必須改善之缺點。 In the previous creation structure, the creator created a pressure equal to the pressure fluid through the improved internal passage, so that the energy loss can be greatly reduced by feedback. It has certain effects, but the improvement of the atmosphere that needs to continue into the interior of the body is not excellent, and there is still a lack of smooth operation. Because of the above structure, it is known after practical application and research, so there are some shortcomings that must be improved.
本創作之節能型真空精密調壓閥,其主要技術性目的,在於利用本體內部的數個通道,讓壓力流體能通配合主閥門口、以及直桿閥門口,用以穩定本體內部壓力,並無需利用大氣吸入流量即能保持平衡,且能透過該調壓器進行精密調整該壓力流體,讓使用效率上更為理想。 The main technical purpose of the energy-saving vacuum precision pressure regulating valve of the present invention is to utilize the several passages inside the body to allow the pressure fluid to pass through the main valve port and the straight valve port to stabilize the internal pressure of the body. It can maintain balance even without using the atmospheric suction flow rate, and the pressure fluid can be precisely adjusted through the pressure regulator, which makes the use efficiency more ideal.
結構上係由主閥座、中閥座、以及調壓器依序由下至上構成一本體,該主閥座具有能供壓力流體流通的輸入端與輸出端、以及由溢流管所構成的主閥門口,並於該溢流管頂端設有主膜片,而該中閥座則具有由調壓直桿所構成的直桿閥門口、以及調壓副通道,並於該調壓直桿設有平衡膜片,而該主閥座至直桿閥門口設有一調壓通道,該調壓通道至該主膜片則設有一調壓副通道,另有一衡壓通道於該調壓器至該主膜片、以及該輸出端。 Structurally, the main valve seat, the middle valve seat, and the pressure regulator sequentially form a body from bottom to top. The main valve seat has an input end and an output end for the flow of the pressure fluid, and an overflow pipe. a main valve port, and a main diaphragm is arranged at a top end of the overflow pipe, and the middle valve seat has a straight valve port formed by a pressure regulating straight rod, and a pressure regulating sub passage, and the pressure regulating straight rod A balance diaphragm is disposed, and the main valve seat to the straight valve port is provided with a pressure regulating passage, the pressure regulating passage to the main diaphragm is provided with a pressure regulating sub passage, and a pressure regulating passage is provided to the pressure regulator to The main diaphragm and the output end.
藉前述結構,利用該壓力流體由輸入端經該調壓通道流通,配合調壓器調整主彈簧推移該平衡膜片,使其能繼續流通至該調壓副通道,藉以推移主膜片成平衡狀態,進一步利用該衡壓通道輸出至該輸出端,能讓本體於無吸入大氣壓的流量下,仍能精密調整該壓力流體之目的。 According to the foregoing structure, the pressure fluid is circulated from the input end through the pressure regulating passage, and the balance spring is adjusted by the regulator to adjust the main spring to move to the pressure regulating sub passage, thereby shifting the main diaphragm into a balance. The state further utilizes the output of the pressure-pressure channel to the output end, so that the body can precisely adjust the pressure fluid under the flow rate without suction atmospheric pressure.
[本創作] [This creation]
1‧‧‧本體 1‧‧‧ Ontology
2‧‧‧主閥座 2‧‧‧Main seat
21‧‧‧輸入端 21‧‧‧ input
22‧‧‧輸出端 22‧‧‧ Output
23‧‧‧溢流管 23‧‧‧Overflow tube
231‧‧‧迫緊 231‧‧‧
24‧‧‧主閥門口 24‧‧‧Main valve port
25‧‧‧主膜片 25‧‧‧Main diaphragm
251‧‧‧中空孔 251‧‧‧ hollow hole
26‧‧‧節流孔 26‧‧‧ orifice
3‧‧‧中閥座 3‧‧‧ middle seat
31‧‧‧調壓直桿 31‧‧‧Regulating straight rod
311‧‧‧溢流孔 311‧‧‧ overflow hole
32‧‧‧活塞 32‧‧‧Piston
33‧‧‧直桿閥門口 33‧‧‧straight valve port
34‧‧‧平衡膜片 34‧‧‧ Balanced diaphragm
4‧‧‧調壓器 4‧‧‧Regulator
41‧‧‧主彈簧 41‧‧‧Main Spring
42‧‧‧旋鈕 42‧‧‧ knob
43‧‧‧止漏密封件 43‧‧‧ leak seals
5‧‧‧調壓通道 5‧‧‧pressure channel
51‧‧‧調壓副通道 51‧‧‧pressure secondary channel
52‧‧‧衡壓通道 52‧‧‧Balance pressure channel
53‧‧‧大氣通道 53‧‧‧Atmospheric passage
P‧‧‧壓力流體 P‧‧‧Pressure fluid
P1‧‧‧真空源 P1‧‧‧vacuum source
P2‧‧‧真空吸入端 P2‧‧‧vacuum suction end
Pt‧‧‧平衡壓力 Pt‧‧‧balanced pressure
第1圖係本創作於準備狀態的結構示意圖。 Figure 1 is a schematic diagram of the structure of the creation in the state of preparation.
第1A圖係為本創作第1圖中的A之局部放大示意圖。 Fig. 1A is a partially enlarged schematic view of A in Fig. 1 of the creation.
第1B圖係為本創作第1圖中的B之局部放大示意圖。 Fig. 1B is a partially enlarged schematic view of B in Fig. 1 of the creation.
第2圖係本創作於使用狀態的結構示意圖。 Figure 2 is a schematic diagram of the structure of the creation state in use.
第2A圖係本創作第2圖中的A之局部放大示意圖。 Fig. 2A is a partially enlarged schematic view of A in Fig. 2 of the present creation.
第2B圖係本創作第2圖中的B之局部放大示意圖。 Fig. 2B is a partially enlarged schematic view of B in Fig. 2 of the present creation.
第3圖係本創作於洩壓狀態的結構示意圖。 The third figure is a schematic diagram of the structure of the creation in the state of pressure relief.
第3A圖係本創作第3圖中的A之局部放大示意圖。 Fig. 3A is a partially enlarged schematic view of A in Fig. 3 of the present creation.
第3B圖係本創作第3圖中的B之局部放大示意圖。 Fig. 3B is a partially enlarged schematic view of B in Fig. 3 of the present creation.
第4圖係本創作內部氣壓迴路的示意圖。 Figure 4 is a schematic diagram of the internal air pressure circuit of this creation.
本創作係為一種節能型真空精密調壓閥,通常根據本創作最佳之可行實施例,配合圖式第1~4圖詳細說明後,俾增加對本創作之瞭解,其結構上具有一本體(1),該本體(1)係由一主閥座(2)、一中閥座(3)、以及一調壓器(4),依序由下至上所構成,該主閥座(2)具有能供一壓力流體(P)流通的一輸入端(21)與一輸出端(22)、以及由一溢流管(23)所構成的一主閥門口(24),並且在該溢流管(23)頂端另設有一主膜片(25),而該中閥座(3)則具有由一調壓直桿(31)所構成的直桿閥門口(33)、以及一調壓副通道(51),且該調壓直桿(31)頂端另設有一平衡膜片(34);而該調壓器(4)具有一主彈簧(41)、一旋鈕(42)、以及一止漏密封件(43),該主彈簧(41)設於該調壓器(4) 內,能受設於該調壓器(4)外的旋鈕(42)操控調整,讓該主彈簧(41)能頂抵該平衡膜片(34),並於該主彈簧(41)頂端設置該止漏密封件(43)用以防止本體(1)內部的壓力流體(P)由此溢出。 This creation is an energy-saving vacuum precision pressure regulating valve. Generally, according to the best feasible embodiment of this creation, with the detailed description of Fig. 1~4, the understanding of this creation is increased, and the structure has an ontology ( 1) The body (1) is composed of a main valve seat (2), a middle valve seat (3), and a pressure regulator (4), which are sequentially composed from bottom to top, and the main valve seat (2) An input port (21) and an output end (22) capable of circulating a pressure fluid (P), and a main valve port (24) formed by an overflow pipe (23), and in the overflow The top end of the tube (23) is further provided with a main diaphragm (25), and the middle valve seat (3) has a straight valve port (33) formed by a pressure regulating straight rod (31), and a pressure regulating pair a channel (51), and a top of the pressure regulating straight rod (31) is further provided with a balance diaphragm (34); and the pressure regulator (4) has a main spring (41), a knob (42), and a stop a leakage seal (43), the main spring (41) is disposed on the pressure regulator (4) The knob (42) disposed outside the voltage regulator (4) can be adjusted and adjusted to allow the main spring (41) to abut against the balance diaphragm (34) and be disposed at the top of the main spring (41). The leak seal (43) serves to prevent the pressure fluid (P) inside the body (1) from overflowing therefrom.
該本體(1)內更設有數個通道,分別係為:調壓通道(5)、調壓副通道(51)、衡壓通道(52)、以及大氣通道(53)。其中調壓通道(5)係由該主閥座(2)連接至該中閥座(3)至直桿閥門口(33),且設有一節流孔(26);該調壓副通道(51)則係由該調壓通道(5)連接至該主膜片(25)所設位置;該衡壓通道(52)則係由該調壓器(4)連接至該主膜片(25)、以及該輸出端(22);以及一大氣通道(53)由該調壓直桿(31)上方連接至該中閥座(3)的側緣。 The body (1) is further provided with a plurality of channels, which are: a pressure regulating channel (5), a pressure regulating subchannel (51), a pressure regulating channel (52), and an atmospheric channel (53). The pressure regulating passage (5) is connected to the middle valve seat (3) to the straight valve port (33) by the main valve seat (2), and is provided with a flow hole (26); the pressure regulating auxiliary passage ( 51) is connected to the position of the main diaphragm (25) by the pressure regulating passage (5); the pressure regulating passage (52) is connected to the main diaphragm by the pressure regulator (4) (25) And the output end (22); and an atmospheric passage (53) connected to the side edge of the middle valve seat (3) from above the pressure regulating straight rod (31).
透過該壓力流體(P)由輸入端(21)經該調壓通道(5),配合該調壓器(4)調整主彈簧(41)推移該平衡膜片(34),使該壓力流體(P)能繼續流通至該調壓副通道(51),藉以讓該主膜片(25)推移成氣壓的平衡狀態,進一步利用該衡壓通道(52)輸出至該輸出端(22),讓該本體(1)於無吸入大氣壓下,仍能精密調整該壓力流體(P)之目的。 Through the pressure fluid (P), the input end (21) passes through the pressure regulating passage (5), and the regulator (4) adjusts the main spring (41) to push the balance diaphragm (34) to make the pressure fluid ( P) can continue to flow to the pressure regulating sub-channel (51), thereby causing the main diaphragm (25) to be in a balanced state of air pressure, and further outputting the pressure-pressure channel (52) to the output end (22), The body (1) can precisely adjust the pressure fluid (P) without inhalation atmospheric pressure.
再請參閱如第1~1B圖,前述有關壓力流體(P)係具有多種壓力,其中有一真空源(P1)係由該輸入端(21)、該調壓通道(5)、以及該調壓副通道(51)內吸取形成;一真空吸入端(P2)於該輸出端(22)、該衡壓通道(52)、以及該溢流管(23)內形成;一平衡壓力(Pt)於該本體(1)內的真空源(P1)與該真空吸入端(P2)相互平衡所形成。 Referring again to Figures 1 to 1B, the foregoing pressure fluid (P) has various pressures, wherein a vacuum source (P1) is from the input end (21), the pressure regulating passage (5), and the pressure regulation. a suction passage is formed in the auxiliary passage (51); a vacuum suction end (P2) is formed in the output end (22), the pressure regulating passage (52), and the overflow pipe (23); a balance pressure (Pt) is The vacuum source (P1) in the body (1) and the vacuum suction end (P2) are balanced with each other.
當真空源(P1)於輸入端(21)配合該調壓通道(5)吸取,於準備狀態時,該真空源(P1)只止於該直桿閥門口(33)處,故該真空吸入端(P2)等於該平衡壓力(Pt)等於0,且該真空源(P1)小於0; 此時,平衡膜片(34)未受調壓器(4)上的旋鈕(42)調整主彈簧(41),該平衡膜片(34)下方所設活塞(32)尚未與該調壓直桿(31)頂抵,該活塞(32)中的溢流孔(311)則與該大氣通道(53)相通連;而該溢流管(23)的主閥門口(24)係呈關閉狀態。 When the vacuum source (P1) is sucked at the input end (21) with the pressure regulating passage (5), in the ready state, the vacuum source (P1) only stops at the straight valve port (33), so the vacuum suction The end (P2) is equal to the equilibrium pressure (Pt) equal to 0, and the vacuum source (P1) is less than 0; At this time, the balance diaphragm (34) is not adjusted by the knob (42) on the pressure regulator (4) to adjust the main spring (41), and the piston (32) disposed under the balance diaphragm (34) has not been adjusted with the pressure The rod (31) abuts, the overflow hole (311) in the piston (32) is in communication with the atmospheric passage (53); and the main valve port (24) of the overflow pipe (23) is closed. .
再請參閱如第2~2B、以及第4圖,係為本創作於工作狀態,此時的真空吸入端(P2)小於0,且該真空源(P1)小於該平衡壓力(Pt)小於該真空吸入端(P2);透過該調壓器(4)轉動旋鈕(42)讓主彈簧(41)向下施壓,讓該平衡膜片(34)推動該活塞(32),並關閉該溢流孔(311),以及推動該調壓直桿(31)向下開啟該直桿閥門口(33),此時的真空源(P1)則能由節流孔(26)與調壓通道(5)進入該調壓副通道(51),並於該主膜片(25)下方形成一平衡壓力(Pt);而該真空吸入端(P2)形成的真空壓力能藉由衡壓通道(52)至該主膜片(25)上方,推移主膜片(25);節流孔(26)的作用可減小真空源(P1)的吸入流量,使平衡壓力(Pt)的變動不致於太劇烈,主膜片(25)也可平穩的達成壓力平衡,當形成平衡的工作狀態時,該直桿閥門口(33)會向上關閉,而下方主閥門(24)為開啟狀態,藉此真空源(P1)進入主閥體(2)內,形成輸出壓力,再流通至該真空吸入端(P2)。 Referring to Figures 2~2B and Figure 4, the vacuum suction end (P2) is less than 0, and the vacuum source (P1) is smaller than the equilibrium pressure (Pt). Vacuum suction end (P2); the main spring (41) is pressed downward by the knob (42) through the pressure regulator (4), the balance diaphragm (34) pushes the piston (32), and the overflow is closed. a flow hole (311), and pushing the pressure regulating straight rod (31) to open the straight valve port (33) downward, and the vacuum source (P1) at this time can be used by the orifice (26) and the pressure regulating passage ( 5) entering the pressure regulating sub-channel (51) and forming an equilibrium pressure (Pt) under the main diaphragm (25); and the vacuum pressure formed by the vacuum suction end (P2) can be passed through the pressure regulating channel (52) Above the main diaphragm (25), the main diaphragm (25) is moved; the function of the orifice (26) can reduce the suction flow of the vacuum source (P1), so that the fluctuation of the equilibrium pressure (Pt) is not too high. Severely, the main diaphragm (25) can also smoothly achieve pressure balance. When a balanced working state is formed, the straight valve port (33) will be closed upward, and the lower main valve (24) is opened, thereby vacuuming The source (P1) enters the main valve body (2) to form an output pressure The force is then circulated to the vacuum suction end (P2).
再請參閱如第3~3B圖,係為本創作於洩壓狀態,此時的真空源(P1)等於0,而正常洩壓狀態下,該調壓器(4)內的主彈簧(41)會讓直桿閥門口(33)開啟,並關閉該溢流孔(311),而該真空源(P1)的空氣經直桿閥門口(33)與調壓副通道(51)進入至該主膜片(25)下方破壞平衡壓力(Pt),並推開主膜片(25),透過該主膜片(25)中央所設的中空孔(251)與衡壓通道(52)進入至該真空吸入端(P2)破壞輸出壓力,而主閥門口(24)呈關閉狀態; 再者,若本體(1)內部平衡壓力(Pt)與真空吸入端(P2)壓差不夠大時,該內部主膜片(25)容易產生卡緊無法順利洩壓,故於該溢流管(23)底端設有一迫緊(231),能供空氣單向推開迫緊(231),藉由該溢流管(23)的外徑表面,使空氣能順利流入溢流管(23)的中央直孔,再讓該真空源(P1)的空氣藉由衡壓通道(52)進入至該真空吸入端(P2)破壞輸出壓力。 Please refer to the figure 3~3B, which is based on the pressure relief state, when the vacuum source (P1) is equal to 0, and the main spring in the pressure regulator (4) under normal pressure relief state (41) ) will open the straight valve port (33) and close the overflow hole (311), and the air of the vacuum source (P1) enters through the straight valve port (33) and the pressure regulating sub-channel (51). The equilibrium pressure (Pt) is broken under the main diaphragm (25), and the main diaphragm (25) is pushed open, and penetrates through the hollow hole (251) and the pressure regulating passage (52) provided in the center of the main diaphragm (25). The vacuum suction end (P2) destroys the output pressure, and the main valve port (24) is closed; Furthermore, if the pressure difference between the internal equilibrium pressure (Pt) and the vacuum suction end (P2) of the main body (1) is not sufficiently large, the inner main diaphragm (25) is likely to be jammed and cannot be smoothly relieved, so the overflow tube is (23) The bottom end is provided with a pressing force (231), which can be used for one-way pushing and pressing of the air (231). By the outer diameter surface of the overflow pipe (23), the air can smoothly flow into the overflow pipe (23). The central straight hole allows the air of the vacuum source (P1) to enter the vacuum suction end (P2) to break the output pressure by the pressure regulating passage (52).
然而上述於平衡膜片(34)所受真空吸入端(P2)的面積乘以該真空吸入端(P2)的所得值與該平衡壓力(Pt)的面積乘以該平衡壓力(Pt)的所得值之比大於等於5以上時,節流孔(26)直徑大小可在0.5以下,能夠有效提高該真空吸入端(P2)壓力的穩定狀態。 However, the above-mentioned area of the vacuum suction end (P2) of the balance diaphragm (34) is multiplied by the obtained value of the vacuum suction end (P2) and the area of the equilibrium pressure (Pt) multiplied by the equilibrium pressure (Pt). When the ratio of the values is 5 or more, the diameter of the orifice (26) may be 0.5 or less, and the steady state of the pressure of the vacuum suction end (P2) can be effectively increased.
綜上所述,本創作節能型真空精密調壓閥,透過於不同運作狀態,能清楚瞭解該本體(1)內部的各通道,配合主閥門口(24)與直桿閥門口(33),能於無需持續吸入大氣壓流量的情況下,維持本體(1)內的真空平衡,且仍能可以透過該調壓器(4)進行精密調整壓力之目的,讓其節省真空源能源的效益具有實際利用性。 In summary, the creation of the energy-saving vacuum precision pressure regulating valve can clearly understand the internal passages of the body (1) through different operating states, and cooperate with the main valve port (24) and the straight valve port (33). The utility model can maintain the vacuum balance in the body (1) without continuously inhaling the atmospheric pressure flow, and can still precisely adjust the pressure through the pressure regulator (4), so that the utility of saving the vacuum source energy has practical Utilization.
最後,必須再次說明的是,本創作於前述實施例中所揭露的構成元件及其形狀僅為舉例說明,並非用來限制本案之範圍,舉凡其他易於思及的結構變化,或與其它等效元件的替代變化,亦應為本案之申請專利範圍所涵蓋。 Finally, it must be stated that the constituent elements and their shapes disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention, and other structural changes that are easily conceivable, or equivalent to others. Alternative changes to components should also be covered by the scope of the patent application in this case.
1‧‧‧本體 1‧‧‧ Ontology
2‧‧‧主閥座 2‧‧‧Main seat
21‧‧‧輸入端 21‧‧‧ input
22‧‧‧輸出端 22‧‧‧ Output
23‧‧‧溢流管 23‧‧‧Overflow tube
231‧‧‧迫緊 231‧‧‧
24‧‧‧主閥門口 24‧‧‧Main valve port
25‧‧‧主膜片 25‧‧‧Main diaphragm
251‧‧‧中空孔 251‧‧‧ hollow hole
26‧‧‧節流孔 26‧‧‧ orifice
3‧‧‧中閥座 3‧‧‧ middle seat
31‧‧‧調壓直桿 31‧‧‧Regulating straight rod
311‧‧‧溢流孔 311‧‧‧ overflow hole
32‧‧‧活塞 32‧‧‧Piston
33‧‧‧直桿閥門口 33‧‧‧straight valve port
34‧‧‧平衡膜片 34‧‧‧ Balanced diaphragm
4‧‧‧調壓器 4‧‧‧Regulator
41‧‧‧主彈簧 41‧‧‧Main Spring
42‧‧‧旋鈕 42‧‧‧ knob
43‧‧‧止漏密封件 43‧‧‧ leak seals
5‧‧‧調壓通道 5‧‧‧pressure channel
51‧‧‧調壓副通道 51‧‧‧pressure secondary channel
52‧‧‧衡壓通道 52‧‧‧Balance pressure channel
53‧‧‧大氣通道 53‧‧‧Atmospheric passage
P‧‧‧壓力流體 P‧‧‧Pressure fluid
P1‧‧‧真空源 P1‧‧‧vacuum source
P2‧‧‧真空吸入端 P2‧‧‧vacuum suction end
Pt‧‧‧平衡壓力 Pt‧‧‧balanced pressure
Claims (7)
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TW105210411U TWM532528U (en) | 2016-07-12 | 2016-07-12 | Energy-saving type vacuum precision pressure regulating valve |
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TW105210411U TWM532528U (en) | 2016-07-12 | 2016-07-12 | Energy-saving type vacuum precision pressure regulating valve |
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TWM532528U true TWM532528U (en) | 2016-11-21 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI659171B (en) * | 2018-02-26 | 2019-05-11 | 台灣氣立股份有限公司 | Vacuum energy-saving large-capacity precision pressure regulating valve |
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2016
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI659171B (en) * | 2018-02-26 | 2019-05-11 | 台灣氣立股份有限公司 | Vacuum energy-saving large-capacity precision pressure regulating valve |
DE102018126428B4 (en) | 2018-02-26 | 2022-07-28 | Taiwan Chelic Co., Ltd. | Energy-saving large-capacity vacuum precision pressure control valve |
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