TWM450573U - Film formation device for continuous large-area spray-coating of graphene - Google Patents
Film formation device for continuous large-area spray-coating of graphene Download PDFInfo
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本創作係為一種製備石墨烯之成膜裝置，特別關於一種連續式大面積噴塗石墨烯之成膜裝置。The present invention is a film forming apparatus for preparing graphene, and particularly relates to a film forming apparatus for continuous large-area spraying of graphene.
石墨烯具有許多優異性質，如高機械強度(~1,100GPa)，薄膜堅固易脆，但又可以曲折；氣體無法穿透石墨烯薄膜；導熱系數高達5300 W/m．K，比奈米碳管和金鋼石好，在室溫下，石墨烯的電子遷移率(electron mobility)超過15000 cm2 /V．s，比奈米碳管(約10000 cm2 /V．s)高，更是矽晶(1400 cm2 /V．s)的10倍以上；其電阻為約10-6 Ω．cm，比銅或銀金屬更低。Graphene has many excellent properties, such as high mechanical strength (~1,100GPa), the film is firm and brittle, but it can be tortuous; the gas can not penetrate the graphene film; the thermal conductivity is up to 5300 W/m. K, better than carbon nanotubes and diamonds, at room temperature, graphene electron mobility (electron mobility) exceeds 15000 cm 2 /V. s, the carbon nanotubes (about 10000 cm 2 /V.s) is higher, more than 10 times the twins (1400 cm 2 /V.s); its resistance is about 10 -6 Ω. Cm, lower than copper or silver metal.
在過去，製造石墨烯的習知技術包含機械剝離法(mechanical exfoliation)、磊晶成長法(Epitaxial growth)[de Heer et al.,Solid State Comm.(2007)]、化學氣相沈積法(chemical vapor deposition,CVD)[Kim et al.,Nature(2009),de Heer et al.,Solid State Comm.(2007)]及化學剝離法(chemical exfoliation)等。其中，機械剝離法及磊晶成長法，雖然可以獲得品質較佳之石墨烯，但這兩種方法均無法大面積合成石墨烯。化學氣相沈積法的製備過程，則必須使用近千度的高溫及昂貴的金屬基材(如銅或鎳)，而有製造成本上的瓶頸。In the past, conventional techniques for producing graphene include mechanical exfoliation, epitaxial growth [de Heer et al., Solid State Comm. (2007)], and chemical vapor deposition (chemical). Vapor deposition, CVD) [Kim et al., Nature (2009), de Heer et al., Solid State Comm. (2007)] and chemical exfoliation. Among them, the mechanical exfoliation method and the epitaxial growth method, although graphene having better quality can be obtained, neither of the two methods can synthesize graphene over a large area. In the preparation process of chemical vapor deposition, it is necessary to use a high temperature of nearly a thousand degrees and an expensive metal substrate (such as copper or nickel), which has a bottleneck in manufacturing cost.
所以，目前業界極需發展出一種大面積石墨烯薄膜之製備裝置，使用連續式大面積的製備裝置以得到大面積的石墨烯薄膜，同時此石墨烯薄膜可方便的轉印到其他所需的元件上，如此一來，利用此大面積石墨烯薄膜之製備裝置方能同時兼具成本與時效，有效產出大面積且方便轉印之石墨烯薄膜。Therefore, there is a great need in the industry to develop a large-area graphene film preparation device, which uses a continuous large-area preparation device to obtain a large-area graphene film, and the graphene film can be conveniently transferred to other desired materials. On the component, in this way, the preparation device of the large-area graphene film can simultaneously have the cost and the aging effect, and effectively produce a graphene film which is large in area and convenient for transfer.
鑒於上述習知技術之缺點，本創作之主要目的在於提供一種連續式大面積噴塗石墨烯之成膜裝置，整合一輸送單元、一噴灑單元、一滾壓單元、一加熱單元及一轉印單元，以連續式製備出大面積且方便轉印之石墨烯薄膜。In view of the above disadvantages of the prior art, the main purpose of the present invention is to provide a continuous large-area spraying graphene film forming apparatus, which integrates a conveying unit, a spraying unit, a rolling unit, a heating unit and a transfer unit. A graphene film having a large area and convenient transfer is prepared in a continuous manner.
為了達到上述目的，根據本創作所提出之一方案，提供一種連續式大面積噴塗石墨烯成膜的裝置，其包括：一輸送單元，其係用以傳輸基板；一噴灑單元，其係用以噴灑石墨烯片液至基板；一滾壓單元，其係用以滾壓基板，其中該輸送單元自該噴灑單元傳輸基板至該滾壓單元；一加熱單元，其係用以加熱基板，其中該輸送單元自該滾壓單元傳輸基板至該加熱單元；以及一轉印單元，其係用以轉印基板上的石墨烯至一薄膜片上，其中該輸送單元自該加熱單元傳輸基板至該轉印單元。In order to achieve the above object, according to one aspect of the present invention, a continuous large-area sprayed graphene film forming apparatus is provided, comprising: a transport unit for transporting a substrate; and a spray unit for Spraying the graphene sheet liquid to the substrate; a rolling unit for rolling the substrate, wherein the conveying unit transfers the substrate from the spraying unit to the rolling unit; and a heating unit for heating the substrate, wherein the The transport unit transports the substrate from the rolling unit to the heating unit; and a transfer unit for transferring the graphene on the substrate to a film sheet, wherein the transport unit transports the substrate from the heating unit to the transfer unit.
上述裝置中，該輸送單元更包含一加熱溫控平板，其目的是進行加熱基板。In the above device, the conveying unit further comprises a heating temperature control plate, the purpose of which is to heat the substrate.
該噴灑單元係包含一氣助式噴嘴、一溫控裝置、一轉子攪拌裝置及一超音波振盪器，其中該溫控裝置、轉子攪拌裝置及超音波振盪器係用以避免石墨烯片液中發生石墨烯聚集現象；該氣助式噴嘴則包含一石墨烯片液入口端、一高壓氣體入口端及一O型氣密環。The spraying unit comprises a gas-assisted nozzle, a temperature control device, a rotor stirring device and an ultrasonic oscillator, wherein the temperature control device, the rotor stirring device and the ultrasonic oscillator are used to avoid occurrence in the graphene sheet liquid. Graphene aggregation phenomenon; the gas-assisted nozzle comprises a graphene sheet liquid inlet end, a high pressure gas inlet end and an O-type gas tight ring.
該滾壓單元係包含一滾壓滾筒裝置，藉由滾壓滾筒將石墨烯片液均勻滾壓至基板上，以利產生具均勻厚度的石墨烯薄膜；滾壓單元可另包含一刮刀裝置，其設置於滾筒裝置前，刮刀數量可為複數，該刮刀主要的功能為將點狀的石墨烯片液刮平成平面狀石墨烯片液，覆蓋在基板上，並刮除過多的石墨烯片液。The rolling unit comprises a rolling roller device, wherein the graphene sheet liquid is uniformly rolled onto the substrate by a rolling roller to produce a graphene film having a uniform thickness; the rolling unit may further comprise a scraper device. It is disposed in front of the roller device, and the number of the blade can be plural. The main function of the blade is to flatten the spotted graphene liquid into a planar graphene liquid, cover the substrate, and scrape off excess graphene liquid. .
上述裝置中，該加熱單元可是一高溫爐，特別可是一真空高溫爐，藉由高溫爐可使石墨烯片液轉為石墨烯薄膜，而真空的作用則可加速溶劑的揮發。In the above device, the heating unit may be a high temperature furnace, in particular, a vacuum high temperature furnace, wherein the graphene sheet liquid can be converted into a graphene film by a high temperature furnace, and the vacuum can accelerate the evaporation of the solvent.
轉印單元則包含一碾壓轉印滾筒、一熱脫附膠帶輸出裝置以及一成品回收裝置。利用碾壓轉印滾筒可將經高溫爐之石墨烯薄膜基板上的石墨烯薄膜，轉印到熱脫附膠帶上，而此膠帶受熱(約80℃)之後將會失去黏性，可以十分方便地將石墨烯薄膜轉印到任何需要的地方。The transfer unit comprises a roller compaction roller, a thermal debonding tape output device and a finished product recovery device. The graphene film on the graphene film substrate of the high temperature furnace can be transferred onto the thermal debonding tape by using a roller compaction roller, and the tape will lose its viscosity after being heated (about 80 ° C), which is very convenient. Transfer the graphene film to any desired location.
以上之概述與接下來的詳細說明及附圖，皆是為了能進一步說明本創作達到預定目的所採取的方式、手段及功效。而有關本創作的其他目的及優點，將在後續的說明及 圖式中加以闡述。The above summary and the following detailed description and drawings are intended to further illustrate the manner, means and effects of the present invention in achieving its intended purpose. And other purposes and advantages of this creation will be explained in the follow-up Explain in the schema.
以下係藉由特定的具體實例說明本創作之實施方式，熟悉此技藝之人士可由本說明書所揭示之內容輕易地了解本創作之優點及功效。The embodiments of the present invention are described by way of specific examples, and those skilled in the art can readily understand the advantages and effects of the present invention from the disclosure of the present disclosure.
請參閱第一圖所示，為本創作一種連續式大面積噴塗石墨烯之成膜裝置示意圖，其包括：Please refer to the first figure, which is a schematic diagram of a continuous large-area sprayed graphene film forming apparatus, which includes:
一輸送單元，其係可包含轉動滾筒111、鍊條112，藉由鍊條112及轉動滾筒111的組合，可將基板運送至裝置中其他單元；該輸送單元可再包含一溫控加熱裝置，可對基板作加熱作業。輸送單元也可用機械手臂系統完成運送基板之任務。a conveying unit, which may include a rotating drum 111 and a chain 112. The combination of the chain 112 and the rotating drum 111 can transport the substrate to other units in the device; the conveying unit can further comprise a temperature-controlled heating device, which can The substrate is heated. The transport unit can also perform the task of transporting the substrate with a robotic arm system.
一噴灑單元，其係用以噴灑石墨烯片液至基板，當輸送單元將基板運至噴灑單元時，噴灑單元將噴灑石墨烯片液至基板。該噴灑單元包含一氣助式噴嘴121、一溫控裝置、一轉子攪拌裝置122及一超音波振盪器，其中，該溫控裝置、轉子攪拌裝置122及超音波振盪器係用以避免石墨烯片液中發生石墨烯聚集現象；石墨烯片液可用濃度為固含量0.001%至10%之間的石墨烯片液，而石墨烯片係由為片尺寸直徑為10奈米至100微米之間的石墨烯片，層數為1至100層，氧含量為0.05~50%之間的石墨烯片所組成，另外該石墨烯片液的溶劑可用高揮發性之極性或非極 性有機溶劑，如甲醇、乙醇、丙醇、丁醇、丙酮等。A spraying unit is configured to spray the graphene sheet liquid to the substrate, and when the conveying unit transports the substrate to the spraying unit, the spraying unit sprays the graphene sheet liquid to the substrate. The spraying unit comprises a gas-assisted nozzle 121, a temperature control device, a rotor stirring device 122 and an ultrasonic oscillator, wherein the temperature control device, the rotor stirring device 122 and the ultrasonic oscillator are used to avoid graphene sheets. Graphene aggregation occurs in the liquid; the graphene sheet liquid can be used in a graphene solution having a solid content of 0.001% to 10%, and the graphene sheet is formed from a sheet size of 10 nm to 100 μm. Graphene sheets consisting of 1 to 100 layers and graphene sheets with an oxygen content of 0.05 to 50%. In addition, the solvent of the graphene sheet can be highly volatile or non-polar. Organic solvents such as methanol, ethanol, propanol, butanol, acetone, and the like.
一滾壓單元，可包含一滾壓滾筒130及一刮刀131，其係用以滾壓基板，當輸送單元將基板從噴灑單元運至滾壓單元時，此時基板上有噴灑的石墨烯片液，該石墨烯片液以點狀排列在基板上。首先，該刮刀131可對石墨烯片液作刮除動作，將多餘的石墨烯片液刮除，並將該石墨烯片液由點狀石墨烯片液，變成覆蓋在整個基板上的石墨烯片液，再將滾壓滾筒130的滾壓動作，可使整個石墨烯片液具有均勻的厚度且均勻的分布在該基板上。A rolling unit may include a rolling roller 130 and a scraper 131 for rolling the substrate. When the conveying unit transports the substrate from the spraying unit to the rolling unit, the substrate is sprayed with graphene sheets. The liquid, the graphene sheet liquid is arranged in a dot shape on the substrate. First, the scraper 131 can scrape off the graphene sheet liquid, scrape off the excess graphene sheet liquid, and change the graphene sheet liquid from the spot graphene sheet liquid to the graphene covering the entire substrate. The sheet liquid, and then the rolling action of the rolling drum 130, allows the entire graphene sheet liquid to have a uniform thickness and is uniformly distributed on the substrate.
一加熱單元，其係用以加熱基板，該加熱單元可是一高溫爐，特別是一真空高溫爐140。當輸送單元將基板從滾壓單元運至真空高溫爐140時，該真空高溫爐140將進行抽真空及加熱動作，抽真空可加速溶劑的揮發，並提供一乾淨的環境，使該基板的石墨烯片液逐漸經加熱流程後，轉變為石墨烯薄膜。A heating unit for heating the substrate, the heating unit being a high temperature furnace, in particular a vacuum high temperature furnace 140. When the transport unit transports the substrate from the rolling unit to the vacuum high temperature furnace 140, the vacuum high temperature furnace 140 performs vacuuming and heating operations, and vacuuming accelerates solvent evaporation and provides a clean environment for the graphite of the substrate. After the olefin liquid is gradually heated, it is converted into a graphene film.
一轉印單元，其係用以轉印基板上的石墨烯薄膜至一薄膜片上，該轉印單元包含一碾壓轉印滾筒151、一熱脫附膠帶輸出裝置152以及一成品回收裝置153。當輸送單元將基板從真空高溫爐140運至時轉印單元150時，該熱脫附膠帶輸出裝置152將熱脫附膠帶輸出至碾壓轉印滾筒151，而該碾壓轉印滾筒151將基板上的石墨烯薄膜轉印至熱脫附膠帶(薄膜片)上；成品回收裝置153則是將印有石 墨烯薄膜之熱脫附膠帶(薄膜片)回收成捲，當需要應用時，此回收之熱脫附膠帶受熱(~80℃)之後將會失去黏性，因此可以十分方便地將石墨烯薄膜轉印到任何需要的表面上。A transfer unit for transferring a graphene film on the substrate to a film sheet, the transfer unit comprising a roller compaction transfer roller 151, a thermal debonding tape output device 152, and a finished product recovery device 153. When the transport unit transports the substrate from the vacuum high temperature furnace 140 to the time transfer unit 150, the thermal release tape output device 152 outputs the thermal release tape to the roller compaction roller 151, and the roller compaction transfer roller 151 will The graphene film on the substrate is transferred onto the thermal debonding tape (film sheet); the finished product recovery device 153 is printed with stone The thermal debonding tape (film sheet) of the olefin film is recycled into a roll. When it is needed, the recovered thermal detaching tape loses its viscosity after being heated (~80 ° C), so the graphene film can be conveniently used. Transfer to any desired surface.
上述之實施例僅為例示性說明本創作之特點及功效，非用以限制本創作之實質技術內容的範圍。任何熟悉此技藝之人士均可在不違背創作之精神及範疇下，對上述實施例進行修飾與變化。因此，本創作之權利保護範圍，應如後述之申請專利範圍所列。The above-described embodiments are merely illustrative of the features and functions of the present invention and are not intended to limit the scope of the technical content of the present invention. Any person skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the creation. Therefore, the scope of protection of this creation should be as listed in the scope of the patent application described later.
111‧‧‧轉動滾筒111‧‧‧Rotating roller
112‧‧‧鏈帶112‧‧‧Chain
113‧‧‧加熱溫控平版113‧‧‧heating temperature control lithography
121‧‧‧氣助式噴嘴121‧‧‧Air-assisted nozzle
122‧‧‧轉子攪拌裝置122‧‧‧Rotor Stirrer
130‧‧‧滾壓滾筒130‧‧‧Rolling roller
131‧‧‧刮刀131‧‧‧Scraper
140‧‧‧真空高溫爐140‧‧‧vacuum furnace
151‧‧‧碾壓轉印滾筒151‧‧‧ Rolling roller
152‧‧‧熱脫附膠帶輸出裝置152‧‧‧Hot detachable tape output device
153‧‧‧成品回收裝置153‧‧‧ Finished product recovery unit
第一圖係為本創作一種連續式大面積噴塗石墨烯成膜的裝置示意圖。The first figure is a schematic diagram of a device for forming a continuous large-area sprayed graphene film.
111‧‧‧轉動滾筒111‧‧‧Rotating roller
112‧‧‧鏈帶112‧‧‧Chain
113‧‧‧加熱溫控平版113‧‧‧heating temperature control lithography
121‧‧‧氣助式噴嘴121‧‧‧Air-assisted nozzle
122‧‧‧轉子攪拌裝置122‧‧‧Rotor Stirrer
130‧‧‧滾壓滾筒130‧‧‧Rolling roller
131‧‧‧刮刀131‧‧‧Scraper
140‧‧‧真空高溫爐140‧‧‧vacuum furnace
151‧‧‧碾壓轉印滾筒151‧‧‧ Rolling roller
152‧‧‧熱脫附膠帶輸出裝置152‧‧‧Hot detachable tape output device
153‧‧‧成品回收裝置153‧‧‧ Finished product recovery unit
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| TWI600611B (en) * | 2014-01-29 | 2017-10-01 | 奈創國際控股有限公司 | Apparatus and method for formatting graphene film, and graphene film structure |
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