TWM446330U - Air pressure synchronous type image scanning device - Google Patents
Air pressure synchronous type image scanning device Download PDFInfo
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- TWM446330U TWM446330U TW101205801U TW101205801U TWM446330U TW M446330 U TWM446330 U TW M446330U TW 101205801 U TW101205801 U TW 101205801U TW 101205801 U TW101205801 U TW 101205801U TW M446330 U TWM446330 U TW M446330U
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Description
本創作有關於一種氣壓同步式取像掃描裝置，特別是一種減少或整平軟性板材翹曲程度之氣壓同步式取像掃描裝置。The present invention relates to a pneumatic synchronous image capturing scanning device, and more particularly to a pneumatic synchronous image capturing scanning device for reducing or leveling the degree of warpage of a soft sheet.
隨著電子產品的可攜性以及小型化需求，軟性板材等可撓曲基底材料(例如軟性電路板等)應用於電子產品中的機會越來越高，許多種針對軟性板材檢測的掃描檢測裝置被一一開發出來，用來檢測軟性板材中諸如污染、刮傷、漏銅與殘膠等種種瑕疵。請見圖一所示，為用於檢測軟性板材的一習知軟性板材掃描檢測裝置，該軟性板材掃描檢測裝置100包含一真空吸附裝置101、一工作平台102以及一掃描檢測裝置103。該真空吸附裝置101被設置於工作平台102之上，來吸附軟性板材104以利檢測或其他加工工序進行。With the portability and miniaturization requirements of electronic products, flexible substrate materials such as flexible sheets (such as flexible circuit boards) are increasingly used in electronic products, and many kinds of scanning detection devices for soft sheet inspection Developed one by one to detect defects such as contamination, scratches, copper leakage and residual glue in soft boards. As shown in FIG. 1 , it is a conventional soft plate scanning detecting device for detecting a soft plate. The flexible plate scanning detecting device 100 comprises a vacuum adsorption device 101 , a working platform 102 and a scanning detecting device 103 . The vacuum adsorption device 101 is disposed on the work platform 102 to adsorb the flexible sheet material 104 for inspection or other processing steps.
被真空吸附裝置101吸附固定之軟性板材104被工作平台102移往掃描檢測裝置103的下方，由掃描檢測裝置103檢驗軟性板材104，以檢出諸如污染、刮傷、漏銅與殘膠等種種瑕疵。掃描檢測裝置103可為一光學檢測鏡頭，將軟性板材104之影像攝出以進行影像之比對與檢測，透過數位影像處理的方式檢出軟性板材的瑕疵。The flexible sheet material 104 adsorbed and fixed by the vacuum adsorption device 101 is moved by the working platform 102 to the lower side of the scanning detecting device 103, and the soft detecting plate 103 is inspected by the scanning detecting device 103 to detect various kinds of materials such as pollution, scratches, copper leakage and residual glue. defect. The scanning detecting device 103 can be an optical detecting lens, and the image of the flexible sheet 104 is taken out to perform image comparison and detection, and the defect of the soft sheet is detected by digital image processing.
當掃描裝置103為一光學鏡頭時，其所能清楚拍攝的範圍受到限制，此限制範圍稱為光學鏡頭的景深(depth)，只有位於景深深度之內的待測軟性板材可被攝出清晰影像來進行正確的數位影像檢測。When the scanning device 103 is an optical lens, the range in which the image can be clearly captured is limited. This limitation range is called the depth of the optical lens, and only the soft plate to be tested located within the depth of field depth can be taken out. For correct digital image detection.
然而，軟性板材104具有可撓曲的特性，因此，其未被真空吸嘴所吸附的邊緣部份很可能產生翹曲情形。換言之，於工作平台102上移往掃描檢測裝置103下方的軟性板材104可能位於距離光學鏡頭不同的垂直距離上，亦即同一塊軟性板材104對於光學鏡頭而言位於不同的景深上，當軟性板材104的某一部分太過於翹曲而超過光學鏡頭所能拍攝的景深時，光學鏡頭將無法清楚照出軟性板材104各部份之清晰影像，使得該片軟性板材104缺乏進行影像處理所需的影像資料，而無法完成缺陷檢測。However, the flexible sheet material 104 has a flexible property, and therefore, the edge portion which is not adsorbed by the vacuum nozzle is likely to cause warpage. In other words, the flexible sheet 104 moving on the working platform 102 below the scanning detecting device 103 may be located at a different vertical distance from the optical lens, that is, the same flexible sheet 104 is located at different depths of field for the optical lens, when the flexible sheet is used. When a certain portion of 104 is too warped to exceed the depth of field that the optical lens can capture, the optical lens will not be able to clearly illuminate the clear image of each part of the flexible sheet 104, so that the flexible sheet 104 lacks the image required for image processing. Data, and the defect detection cannot be completed.
再者，當軟性板材104產生翹曲情形時，其表面可能過於彎折，當光學鏡頭取像時，肇因於表面形變等因素，也可能使取像的影像產生過大形變而無法用於後續的數位影像處理。Moreover, when the soft sheet 104 is warped, the surface may be too bent. When the optical lens is taken, the image may be deformed too much due to surface deformation and the like, and may not be used for subsequent Digital image processing.
為了使軟性基板104的翹曲控制在一定的景深範圍內，習知的軟性板材掃描檢測裝置100需要進行改良。In order to control the warpage of the flexible substrate 104 within a certain depth of field, the conventional flexible sheet scanning detecting apparatus 100 needs to be improved.
有鑑於此，本創作之目的在於提供一種氣壓同步式取像掃描裝置，使軟性板材之翹曲程度可以減少或被整平，使得軟性板材於通過掃描檢測裝置下方時，整體均位於同一平面度，亦即對光學鏡頭而言處於同一景深內，以使軟性板材可被攝出位於同一平面度的清晰影像，來進行正確的數位影像檢測。In view of this, the purpose of the present invention is to provide a pneumatic synchronous image capturing scanning device, which can reduce or flatten the degree of warpage of the soft board, so that the soft sheet is located at the same flatness when passing under the scanning detecting device. That is, in the same depth of field for the optical lens, so that the soft sheet can be captured with clear images at the same flatness for correct digital image detection.
依據本創作所提供的氣壓同步式取像掃描裝置，包含一掃描檢測裝置，掃描一軟性板材以產生一檢測影像；一工作平台，設置於該掃描檢測裝置的下方，輸送該軟性板材至該掃描檢測裝置進行檢測；以及一氣體導出裝置，設置於環繞該掃描檢測裝置之任一側位置上，導出氣體對該軟性板材施加一壓力。The air pressure synchronous image capturing scanning device provided by the present invention comprises a scanning detecting device for scanning a soft plate to generate a detection image; a working platform disposed under the scanning detecting device for conveying the flexible plate to the scanning The detecting device performs detection; and a gas deriving device is disposed at a position surrounding either side of the scanning detecting device, and the derived gas applies a pressure to the flexible sheet.
為了讓本創作之上述和其他目的、特徵、和優點能更明顯易懂，下文特舉一較佳實施例，並配合所附圖示，作詳細說明如下。The above and other objects, features, and advantages of the present invention will become more apparent and understood.
有關本創作之前述內容以及其他技術內容、特點與功效，在以下配合參考圖示並特舉一較佳實施例並詳細說明之。The foregoing and other technical contents, features, and advantages of the present invention are described in conjunction with the preferred embodiments and described in detail herein below.
請見圖二所示，為本發明所揭露之一氣壓同步式取像掃描裝置200之側視圖，包含一真空吸附裝置201、一工作平台202、一掃描檢測裝置203以及一氣體導出裝置205，該真空吸附裝置201被設置於工作平台202之上，用以吸附軟性板材204以利檢測或其他加工工序進行。軟性板材204由一進料處被置於真空吸附裝置201上，真空吸附裝置201吸附該些軟性板材204，該些軟性板材204並隨著真空吸附裝置201由工作平台202被送往該掃描檢測裝置203。該掃描檢測裝置203位於該工作平台202上方的適當位置，該工作平台202將被真空吸附裝置201所吸附的軟性板材204由該進料處移動至該掃描檢測裝置203的下方進行軟性板材204的檢測。於本實施例中，掃描檢測裝置203可為一光學檢測鏡頭，將軟性板材204之影像攝出以進行影像之比對與檢測，透過數位影像處理的方式檢出軟性板材的瑕疵。此光學鏡頭所能清楚拍攝的範圍受到限制，此限制範圍被定義為該掃描檢測裝置203的景深(depth)，只有位於景深深度之內的待測軟性板材可被攝出清晰影像來進行正確的數位影像檢測。因為軟性板材204具有可撓曲的特性，因此，其未被真空吸嘴所吸附平整部份具有至少一翹曲部。As shown in FIG. 2, a side view of a pneumatic synchronous image capturing and scanning device 200 according to the present invention includes a vacuum adsorption device 201, a working platform 202, a scanning detecting device 203, and a gas exporting device 205. The vacuum adsorption device 201 is disposed on the working platform 202 for adsorbing the flexible sheet material 204 for inspection or other processing steps. The flexible sheet material 204 is placed on the vacuum adsorption device 201 by a feeding portion, and the vacuum adsorption device 201 adsorbs the soft sheet materials 204, and the soft sheet materials 204 are sent to the scanning inspection by the working platform 202 along with the vacuum adsorption device 201. Device 203. The scanning detecting device 203 is located at an appropriate position above the working platform 202. The working platform 202 moves the flexible sheet 204 adsorbed by the vacuum suction device 201 from the feeding portion to the lower side of the scanning detecting device 203 for the flexible sheet 204. Detection. In this embodiment, the scan detecting device 203 can be an optical detecting lens, and the image of the flexible sheet 204 is taken to perform image comparison and detection, and the defect of the soft sheet is detected by digital image processing. The range in which the optical lens can be clearly photographed is limited. The limit range is defined as the depth of the scan detecting device 203. Only the soft sheet to be tested located within the depth of field depth can be sharply imaged to be correct. Digital image detection. Since the flexible sheet material 204 has a flexible property, it has at least one warp portion which is not absorbed by the flat portion of the vacuum nozzle.
該氣體導出裝置205被設置於該掃描檢測裝置203周圍的適當位置上。於本實施例中，該氣體導出裝置205設置於該掃描檢測裝置203相對於該工作平台202移動方向的前方位置。氣體導出裝置205穩定的吹出一定量的氣體，以於該工作平台202的平面上鄰近於該掃描裝置203周圍的適當位置上產生穩定的壓力。本實施例中，該壓力範圍及於該掃描檢測裝置203相對於該工作平台202移動方向的前方位置以及該掃描檢測裝置203的正下方。當該工作平台203將被真空吸附裝置201所吸附的軟性板材204由該進料處移動至該掃描檢測裝置203的下方進行軟性板材204的檢測時，該氣體導出裝置205所產生之壓力將對軟性板材204施力，使軟性板材204更貼合於該工作平台202所承載的真空吸附裝置201上。於此同時，軟性板材204的翹曲部也受到壓力影響而平貼於真空吸附裝置201上，使得軟性板材204於通過該掃描檢測裝置203下方時，相對於該掃描檢測裝置203上的影像感測器而言，整體均位於同一平面度。換言之，軟性板材204於通過該掃描檢測裝置203下方時，對光學鏡頭而言，整體均位於同一景深下，使得軟性板材204可被攝出位於同一平面度的清晰影像來進行正確的數位影像檢測。再者，經過該氣體導出裝置205所產生之壓力吹平之軟性板材204一可進一步避免表面形變，使得表面形變減小或消失，以利進行後續之影像處理，降低進行影像處理的複雜度。The gas deriving device 205 is disposed at an appropriate position around the scan detecting device 203. In the present embodiment, the gas deriving device 205 is disposed at a forward position of the scan detecting device 203 with respect to the moving direction of the working platform 202. The gas delivery device 205 stably blows a certain amount of gas to generate a stable pressure on a plane of the work platform 202 adjacent to the periphery of the scanning device 203. In the present embodiment, the pressure range is in front of the scanning detection device 203 with respect to the moving direction of the working platform 202 and directly below the scanning detecting device 203. When the working platform 203 moves the flexible sheet material 204 adsorbed by the vacuum adsorption device 201 from the feed portion to the lower side of the scanning detecting device 203 for the detection of the flexible sheet material 204, the pressure generated by the gas stripping device 205 will be The flexible sheet 204 is biased to make the flexible sheet 204 more conformable to the vacuum adsorption device 201 carried by the working platform 202. At the same time, the warpage portion of the flexible sheet material 204 is also pressed against the vacuum suction device 201 by the pressure, so that when the flexible sheet material 204 passes under the scanning detecting device 203, the image sense on the scanning detecting device 203 is sensed. For the detector, the whole is in the same flatness. In other words, when the flexible sheet 204 passes under the scanning detecting device 203, the optical lens is entirely at the same depth of field, so that the flexible sheet 204 can be captured with clear images at the same flatness for correct digital image detection. . Moreover, the soft plate 204 which is blown by the pressure generated by the gas deriving device 205 can further avoid surface deformation, so that the surface deformation is reduced or disappeared, so as to facilitate subsequent image processing and reduce the complexity of performing image processing.
請見圖三所示，為本發明所揭露之該氣壓同步式取像掃描裝置200的另一實施例，本實施例中，氣體導出裝置205亦穩定的吹出一定量的氣體，以於該工作平台202的平面上鄰近於該掃描裝置203周圍的適當位置上產生穩定的一壓力，但此處產生之壓力小於上一實施例所揭露者。因此，當該工作平台202將被真空吸附裝置201所吸附的軟性板材204由該進料處移動至該掃描檢測裝置203的下方進行軟性板材的檢測時，該氣體導出裝置205所產生之壓力雖然對軟性板材204施力，使軟性板材204更貼合於該工作平台202所承載的真空吸附裝置201上。但於此同時，軟性板材204的翹曲部雖然受到壓力影響，但卻未平貼於真空吸附裝置201上，僅使翹曲部之翹曲程度減小。然而只要翹曲部之翹曲程度減小至光學鏡頭可接受之一景深差異值範圍之內，則軟性板材204亦可被攝出清晰影像來進行正確的數位影像檢測。再者，經過該氣體導出裝置205所產生之壓力吹平之軟性板材一可降低表面形變，使得表面形變減小，以利進行後續之影像處理，降低進行影像處理的複雜度。As shown in FIG. 3, another embodiment of the pneumatic synchronous image capturing and scanning device 200 disclosed in the present invention, in the embodiment, the gas deriving device 205 also stably blows a certain amount of gas for the work. A stable pressure is generated in the plane of the platform 202 adjacent to the periphery of the scanning device 203, but the pressure generated there is less than that disclosed in the previous embodiment. Therefore, when the work platform 202 moves the flexible sheet material 204 adsorbed by the vacuum suction device 201 from the feed portion to the lower side of the scan detecting device 203 for the detection of the flexible sheet material, the pressure generated by the gas stripping device 205 is The flexible sheet 204 is biased to fit the flexible sheet 204 to the vacuum adsorption device 201 carried by the working platform 202. At the same time, however, although the warpage portion of the flexible sheet material 204 is affected by the pressure, it is not flattened on the vacuum suction device 201, and only the warpage of the warped portion is reduced. However, as long as the warpage of the warp portion is reduced to within a range of depth difference values acceptable to the optical lens, the flexible sheet 204 can also be captured with a clear image for correct digital image detection. Moreover, the soft sheet which is blown by the pressure generated by the gas deriving device 205 can reduce the surface deformation, so that the surface deformation is reduced, so as to facilitate subsequent image processing and reduce the complexity of performing image processing.
請見圖四所示，為本發明所揭露之一氣體導出裝置配置的側視圖，與圖二所揭露者不同，本實施例中所揭露之氣體導出裝置205係配合環繞該掃描檢測裝置203上線狀配置的影像感測器，線狀地配置於該掃描檢測裝置203的週遭位置，使得該掃描裝置203周圍的一環繞區域上均產生穩定的下壓力，以避免氣體導出裝置集中配置於該掃描裝置203某一側所可能產生的下壓力不平衡問題。除此之外，氣體導出裝置205也可以配置在該掃描檢測裝置203相對於移動載台工作平台202之前後位置上，透過這樣的配置也可以降低下壓力的不平衡。As shown in FIG. 4, a side view of a gas deriving device according to the present invention is different. As disclosed in FIG. 2, the gas deriving device 205 disclosed in the present embodiment is fitted around the scan detecting device 203. The image sensor disposed in a line is disposed in a circumferential position of the scan detecting device 203 such that a stable downforce is generated on a surrounding area around the scanning device 203 to prevent the gas exporting device from being centrally disposed in the scan. A downforce imbalance problem that may occur on one side of the device 203. In addition to this, the gas deriving device 205 may be disposed at a position before and after the scan detecting device 203 is moved relative to the moving stage operating platform 202, and such an arrangement may also reduce the imbalance of the downforce.
藉由本發明的實施，軟性板材之翹曲程度可以降低或被整平，使得軟性板材於通過該掃描檢測裝置下方時，相對於該掃描檢測裝置203上的影像感測器而言，整體均位於同一平面度，亦即對光學鏡頭而言處於同一景深內，以使軟性板材可被攝出位於同一平面度的清晰影像，來進行正確的數位影像檢測。By the implementation of the present invention, the degree of warpage of the flexible sheet can be reduced or leveled, so that when the flexible sheet is passed under the scanning detecting device, the whole is located relative to the image sensor on the scanning detecting device 203. The same flatness, that is, the same depth of field for the optical lens, allows the flexible sheet to be captured in clear images at the same flatness for correct digital image detection.
雖然本創作已以較佳實施例揭露如上，然其並非用以限定本創作，任何熟習此技藝者，在不脫離本創作之精神和範圍內，當可作些許之更動與潤飾，本創作之保護範圍當以後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention, and anyone skilled in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of protection shall be subject to the definition of the scope of the patent application attached.
100．．．軟性板材掃描檢測裝置100. . . Flexible sheet scanning detection device
101．．．真空吸附裝置101. . . Vacuum adsorption device
102．．．工作平台102. . . Work platform
103．．．掃描檢測裝置103. . . Scanning detection device
200．．．氣壓同步式取像掃描裝置200. . . Pneumatic synchronous image capturing scanning device
201．．．真空吸附裝置201. . . Vacuum adsorption device
202．．．工作平台202. . . Work platform
203．．．掃描檢測裝置203. . . Scanning detection device
204．．．軟性板材204. . . Soft board
205．．．氣體導出裝置205. . . Gas export device
圖一為用於檢測軟性板材的一習知軟性板材掃描檢測裝置。Figure 1 is a conventional soft plate scanning detecting device for detecting a soft board.
圖二為本發明所揭露之一氣壓同步式取像掃描裝置之側視圖。FIG. 2 is a side view of a pneumatic synchronous image capturing and scanning device according to the present invention.
圖三為本發明所揭露之該氣壓同步式取像掃描裝置的另一實施例。FIG. 3 is another embodiment of the air pressure synchronous image capturing and scanning apparatus disclosed in the present invention.
圖四為本發明所揭露之一氣體導出裝置配置的側視圖。Figure 4 is a side elevational view of the configuration of a gas delivery device of the present invention.
201‧‧‧真空吸附裝置201‧‧‧Vacuum adsorption device
202‧‧‧工作平台202‧‧‧Working platform
203‧‧‧掃描檢測裝置203‧‧‧Scan detection device
204‧‧‧軟性板材204‧‧‧Soft sheet
205‧‧‧氣體導出裝置205‧‧‧ gas export device
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| TWI645192B (en) * | 2017-10-23 | 2018-12-21 | 由田新技股份有限公司 | A semiconductor wafer leveling device and method thereof |
| TW201930847A (en) * | 2017-12-29 | 2019-08-01 | 由田新技股份有限公司 | Panel pressing optical inspection machine |
| CN112527148A (en) * | 2020-12-15 | 2021-03-19 | 霸州市云谷电子科技有限公司 | Bonding prepressing device and method |
-
2012
- 2012-03-30 TW TW101205801U patent/TWM446330U/en not_active IP Right Cessation
- 2012-07-10 CN CN 201220330151 patent/CN202735260U/en not_active Expired - Lifetime
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| Publication number | Publication date |
|---|---|
| CN202735260U (en) | 2013-02-13 |
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