M345236 八、新型說明： 【新型所屬之技術領域】 特別是指一種可替換 本新型是有關於一種測試裝置 探針之測試裝置。 【先前技術】 厂小 75又閃跟徠針11是設置於一基板10，並 可將該測試探針U電連接_第_、 電性檢測；該測試探針i … ，以進行 十U疋以導電材料所製成，並包括-合置於該探針孔13的上、 下接觸件111、112，及一可壓縮 形變地設置於該上、下接 、、、 卜稷觸件U1、112間的彈筈113，苴 中，該上、下接觸件lu ’、 z刀別具有一上接觸部114， 及一下接觸部115，兮卜、π &々 — μ 接觸部114、115可分別與該 第一、二接點12、14觸接。 在測試時’該上、下接觸部114、出將會分別受到該 "接點12、14的觸壓而使該測試探針U產生電導通 ，進而將測試訊號傳遞至一分 刀析儀裔（圖未示）以進行訊號分 析0 當该下接觸部115分別受到兮楚一 ⑺又勻忒第一接點14觸壓時，該 下接觸部115受到一向上的作 刃作用力，此時，藉由該彈簧113 吸收其作用力並對該下 ”卞1屋生一弹性回復力，用以 减緩該下接觸部115鱼第-技赴！ ^ h η弟一接點14接觸的壓力，不過，該 該下接觸件112之作用力，會葬由 m丄* 曰精由違無黃113吸收而將其作 用力傳導至該上接觸部 r 在此冋時，該上接觸部114受 到該第一接點12所觸接的向 r作用力時，兩股上、下相反 M345236 的作用力將增加该上接觸 歷力，提莴吁篦拉 、弟接點12兩者接觸的 杈间°亥弟—接點12磨損的風險。 隨著所測試對象不同，該第二 11S兩科私枝細 丧點14與該下接觸部 所接觸的壓力也不相同，兩者間長期的相 使该下接觸部115產生磨耗損壞而需更換新的下接觸件112 ，不過，由於該測試探針u係將該下接觸件112卡設於該 接觸件111中而無法直接抽出，並藉由該彈簧113的彈性M345236 VIII. New description: [New technical field] It refers to a kind of replaceable. The present invention relates to a test device for a test device probe. [Prior Art] The factory small 75 flashing and licking pin 11 is disposed on a substrate 10, and can electrically connect the test probe U to the __, electrical detection; the test probe i ... for ten U 疋Made of a conductive material, and comprising upper and lower contacts 111, 112 disposed in the probe hole 13, and a compressively deformably disposed on the upper, lower, and the contact U1 The 112 magazines 113, the upper and lower contacts lu', the z-knife have an upper contact portion 114, and a lower contact portion 115, and the π & 々-μ contact portions 114, 115 can be They are respectively connected to the first and second contacts 12 and 14. During the test, the upper and lower contacts 114 and the outlets are respectively subjected to the contact pressure of the contacts 12 and 14 to electrically conduct the test probe U, thereby transmitting the test signal to the analyzer. (not shown) for signal analysis 0. When the lower contact portion 115 is respectively pressed by the first contact 14 and the first contact 14 is pressed, the lower contact portion 115 is subjected to an upward blade force. At the time, the spring 113 absorbs its force and generates an elastic restoring force for the lower 卞1 housing, thereby slowing down the lower contact portion 115 fish-technical! ^ h η 弟一 contact 14 contact The pressure, however, the force of the lower contact member 112 is occluded by the m丄* 曰 fine, which is absorbed by the illuminating yellow 113 and transmits its force to the upper contact portion r. When the force acting on the r contacted by the first contact 12 is applied, the force of the two upper and lower opposite M345236 will increase the contact force of the upper contact, and the daytime contact between the two sides is contacted. °Haidi—the risk of wear of the joint 12. With the different objects tested, the second 11S two branches have a smothering point 14 and The pressure contacted by the lower contact portion is also different, and the long-term phase between the two causes the lower contact portion 115 to be worn and damaged, and the new lower contact member 112 needs to be replaced. However, since the test probe u is the lower contact member 112 is disposed in the contact member 111 and cannot be directly extracted, and the elasticity of the spring 113 is utilized.
回復力將該下接觸# 112之靠抵部m頂抵於該上接觸件 之卡制116上’使該下接觸部115向外突伸’因此每 ，要汰換該下接觸# 112 _，需將固設於該基板Η上的測 試探針11整組汰換’造成作業的不便且成本耗費較高。 【新型内容】 因此，本新型之目的，即在提供一種避免過度扎損接 點且可提高探針汰換效率的測試探針。 於是’本新型測試裝置，包含一基板單元，及一測試 單元。 違基板單元包括一下合板、一設於該下合板上的擋板 ’及一設於該擋板上的上合板，其中，該上合板形成有一 上通道’該擋板形成有一連通該上通道的通孔，該下合板 形成有一連通該通孔的下通道。 該測試單元包括一設於該下合板之下通道中的下探針 、一設於該上合板之上通道中的上探針、一設於該上通道 中的第一緩衝件，及一設於該下通道中的第二緩衝件。 該下探針具有一靠抵該下合板的基壁、一自該基壁周 6 M345236 緣向上延伸之圍繞壁，及-自該基壁近中心處向下延伸並 大伸於口亥下合板外的下接觸件，該基壁與該圍繞壁界定出 一插置空間。 。亥上探針具有-罪抵该上合板的靠接件，及一自該靠 接件向下延伸且牙伸5亥播板之通孔並伸入該下探針之插置 空間的伸入件。 - 緩衝件套置於該上探針之伸人件，該第一緩衝 .彳兩端分別頂抵該靠接件與該基板單元之擋板，並怪提供 -彈性回復力於該上探針，該第二緩衝件兩端分別頂抵該 擋板與該下探針之圍繞壁上緣，並恆提供一彈性回復力於 該下探針。 本新型之功效在於，當該上、下探針受力而分別頂抵 該第一、二緩衝件時，該第一、二緩衝件會提供不同的彈 性回復力而減少觸點的傷害，而且，藉由該第一、二緩衝 件係靠抵於該擋板，該上、下探針受力作動時，兩者不會 互相影響而增加彼此觸點的壓力。 • 【實施方式】 - 有關本新型之前述及其他技術内容、特點與功效，在 以下配合參考圖式之五個較佳實施例的詳細說明中，將可 清楚的呈現。 在本新型被詳細描述之前，要注意的是，在以下的說 明中，類似的元件是以相同的編號來表示。 參閱圖2，本新型測試裝置2的第一較佳實施例，包含 一基板單元3，及一測試單元4。 7 M345236 该基板單元3包括一下合板3 1、一組設於該下合板3 j 上的擋板32，及一組設於該擋板32上的上合板33，其中 ，該上合板33形成有一上通道330，該擋板32形成有一連 通該上通道330的通孔320，該下合板31形成有一連通該 通孔320的下通道31〇。 該測試單元4包括一設於該下合板31之下通道31〇中 且可與一下測試接點51觸接的下探針41、一設於該上合板 33之上通道33〇中且可與一上測試接點52觸接的上探針 42、一設於該上通道33〇中的第一緩衝件43，及一設於該 下通道310中的第二緩衝件44。 該下探針41具有一靠抵該下合板31的基壁411、一自 該基壁411周緣向上延伸之圍繞壁412，及—自該基壁4ΐι 近中心處向下延伸並突伸於該下合板31外的下接觸件413 ，該基壁411與該圍繞壁412界定出一插置空間41〇。 該上探針42具有一靠抵該上合板33的靠接件421，及 一自該靠接件421向下延伸且穿伸該播板32之通孔32〇並 伸入該下探針41之插置空間410的伸入件425。 省第緩衝件43(即為一彈簧）套置於該上探針42之伸 牛 "亥第一緩衝件43兩端分別頂抵該上探針42之靠 接件421與該基板單元3之擋板32，且該第一緩衝件43對 該上探針42恆提供一彈性回復力。 該第二緩衝件44(即為一彈簧）兩端分別頂抵該基板單元 ^之播板32與該下探針41之圍繞壁412上緣，且該第二緩 衝件44對该下探針4卜艮提供一彈性回復力。 8 M345236 42:==Λ，#該上測試赫52靠近觸接該上探針 的罪接4 421時，該靠接部421受到頂 而推壓該第一緩種^ 1 ^ ΜΤ用力 铰衝件43，此時，該第一緩衝件杓一 於擋板32,且另一被&糾#止从 ^罪抵 鳊文到该罪接部421壓擠，因而彈性變 形k供一向上的彈糾门作★ 旳弹性回復力，用以減緩該上探針42盥 測試接點52之間觸抵的壓力。 虽6亥下測試接點51靠近觸接該下探針41的下接觸件The restoring force abuts the abutting portion m of the lower contact #112 against the carding 116 of the upper contact member to 'extend the lower contact portion 115 outward'. Therefore, the lower contact #112_ is replaced every time, It is necessary to replace the test probes 11 fixed on the substrate stack in a whole group, which causes inconvenience in operation and high cost. [New content] Therefore, the object of the present invention is to provide a test probe that avoids excessive damage and improves the efficiency of probe replacement. Thus, the novel test apparatus comprises a substrate unit and a test unit. The substrate unit includes a lower plate, a baffle disposed on the lower plate, and a top plate disposed on the baffle, wherein the upper plate is formed with an upper passage formed to communicate with the upper passage The through hole is formed with a lower passage communicating with the through hole. The test unit includes a lower probe disposed in the channel below the lower plate, an upper probe disposed in the upper passage of the upper plate, a first buffer member disposed in the upper channel, and a set a second buffer member in the lower channel. The lower probe has a base wall that abuts against the lower ply, a surrounding wall extending upward from the edge of the base wall 6 M345236, and - extends downward from the center of the base wall and extends outwardly from the bottom plate The outer lower contact member defines an insertion space with the surrounding wall. . The probe on the sea has a sin against the abutment of the upper ply, and a through hole extending downward from the abutment and extending into the insertion hole of the submerged plate and extending into the insertion space of the lower probe Pieces. - a cushioning member is placed on the protruding member of the upper probe, and the first buffering member respectively abuts against the abutting member and the baffle of the substrate unit, and provides a resilient restoring force to the upper probe. The two ends of the second buffering member respectively abut the upper edge of the surrounding wall of the baffle and the lower probe, and constantly provide an elastic restoring force to the lower probe. The utility model has the advantages that when the upper and lower probes are pressed against the first and second buffering members respectively, the first and second buffering members provide different elastic restoring forces to reduce contact damage, and When the first and second buffer members abut against the baffle, when the upper and lower probes are actuated by force, the two do not affect each other and increase the pressure of the contacts of each other. [Embodiment] The foregoing and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. Referring to Figure 2, a first preferred embodiment of the novel test apparatus 2 includes a substrate unit 3 and a test unit 4. 7 M345236 The base unit 3 includes a lower plate 3 1 , a set of baffles 32 disposed on the lower plate 3 j , and a plurality of upper plates 33 disposed on the baffle 32 , wherein the upper plate 33 is formed with a baffle plate 33 . In the upper channel 330, the baffle 32 is formed with a through hole 320 communicating with the upper passage 330. The lower plate 31 is formed with a lower passage 31〇 communicating with the through hole 320. The test unit 4 includes a lower probe 41 disposed in the channel 31 之下 below the lower plate 31 and contacting the lower test contact 51, and a lower probe 41 disposed on the upper plate 33 and adjacent to the upper plate 33. An upper probe 42 that is touched by the test contact 52, a first buffer member 43 disposed in the upper channel 33, and a second buffer member 44 disposed in the lower channel 310. The lower probe 41 has a base wall 411 against the lower plate 31, a surrounding wall 412 extending upward from the periphery of the base wall 411, and extending downward from the center of the base wall 4ΐ and protruding therefrom A lower contact member 413 outside the lower plate 31 defines an insertion space 41〇 with the surrounding wall 412. The upper probe 42 has abutting member 421 against the upper platen 33, and a through hole 32 extending downward from the abutting member 421 and extending through the playing plate 32 and extending into the lower probe 41. The insertion member 425 of the insertion space 410. The first buffering member 43 (ie, a spring) is disposed on the two ends of the first probe member 43 of the upper probe 42 and abuts against the abutting member 421 of the upper probe 42 and the substrate unit 3 respectively. The baffle 32, and the first buffer member 43 constantly provides an elastic restoring force to the upper probe 42. The second buffering member 44 (that is, a spring) respectively abuts against the upper edge of the surrounding wall 412 of the substrate unit 32 and the lower probe 41, and the second buffering member 44 is opposite to the lower probe. 4 Divination provides an elastic restoring force. 8 M345236 42:==Λ,# When the upper test He 52 is close to the sin 4 421 that touches the upper probe, the abutment portion 421 is pushed against the top and pushes the first mitigation ^ 1 ^ ΜΤ The piece 43 is at this time, the first cushioning member is disposed on the baffle 32, and the other is crushed from the sinus to the sinus portion 421, thereby elastically deforming k for an upward direction. The elastic correction force is used to slow down the pressure between the upper probe 42 and the test contact 52. Although the test contact 51 at 6 hai is close to the lower contact of the lower probe 41
"3緩=接觸件413受到頂抵之向上作用力而推壓該第 -緩衝件44 ’此時，該第二緩衝件44 一端靠抵於播板μ ’且另—端受到該圍繞冑412頂緣麼擠，因而彈性變形提 供該下探針41 —向下的彈性回復力，用以減緩該下探針41 與該下測試接點51之間觸抵的麼力，特別的是，該第__、 f緩衝件43、44所提供的彈性回復力不同，相對可調整與 m、下測試接點52、51觸抵的力量，例如將該第一、 二緩衝件43、44之彈性回復力分別為3〇公克及1〇公克時 ’便提供了上、下探針42、41不同的緩衝力量，該上探針 42所受之30公克力量無法直接傳遞到該下探針41上，因 此該下探針41可以減低對該下接觸點51所造成的傷害。 由於該第一、二緩衝件43、44皆靠抵於該擋板32，一 旦受到該上、下探針42、41的擠壓而產生彈性回復力時， °亥第緩衝件43所吸收的作用力不會往該下探針41傳遞 ，而且該第二緩衝件44所吸收的作用力亦不會傳遞到該上 才木針42，因此，藉由此設計，不僅可減緩該上、下探針42 、41與該上、下測試接點52、51之間的接觸力道，且兩者 9 M345236 之間所受的作用力 亦不會相互影響而增加彼此的接觸壓力"3 retardation=contact member 413 is pressed against the first cushioning member 44' by the upward force of the topping. At this time, the second cushioning member 44 has one end abutting against the playing board μ' and the other end receiving the surrounding buffer. The top edge of the 412 is so squeezing that the elastic deformation provides the downward resilient returning force of the lower probe 41 to slow the contact between the lower probe 41 and the lower test contact 51, in particular, The elastic restoring force provided by the first __, f buffering members 43 and 44 is different, and the force that can be touched with the m and the lower test joints 52, 51 can be adjusted, for example, the first and second buffering members 43 and 44 are When the elastic restoring force is 3 gram and 1 gram, respectively, the different buffering forces of the upper and lower probes 42, 41 are provided, and the 30 gram force of the upper probe 42 cannot be directly transmitted to the lower probe 41. Therefore, the lower probe 41 can reduce the damage caused to the lower contact point 51. Since the first and second buffering members 43, 44 are both against the baffle 32, when the elastic restoring force is generated by the pressing of the upper and lower probes 42, 41, the cushioning member 43 absorbs The force is not transmitted to the lower probe 41, and the force absorbed by the second cushioning member 44 is not transmitted to the upper wooden needle 42. Therefore, by this design, not only the upper and lower sides can be slowed down. The contact force between the probes 42, 41 and the upper and lower test contacts 52, 51, and the forces between the two 9 M345236 do not affect each other and increase the contact pressure of each other.
X基板單兀3之上、下合板33、31與該擋板32 糸組合在-起，當該上探針42或下探針41污損磨耗 、、’即可將該上合板33或下合板31拆解並對該上探針42 士下探針41進行快速抽換，不僅節省更換探針的成本，更 縮短換置探針的時間。 3參閱圖4,本新型測試裝置之第二較佳實施例，大致上 是與該第一較佳實施例相同’相同之處不再資古，置中不 相同之處在於’該靠接件421具有一靠抵該上合板3;的限 制部422,及-可分離地組合於該限制部似i的替換部 藉由本實施例的設計，可在不拆解該基板單元3的狀 態下’直接將該靠接件421之替換部423自該限制部似 上進行拆換更新的作業’提高其磨耗污損之探針的更換作 業效率。The upper surface of the X substrate 3, the lower plate 33, 31 and the baffle 32 are combined, and when the upper probe 42 or the lower probe 41 is worn out, the 'upper plate 33 or lower can be used. The plywood 31 is disassembled and the upper probe 42 is quickly replaced, which not only saves the cost of replacing the probe, but also shortens the time for replacing the probe. 3, referring to FIG. 4, the second preferred embodiment of the novel test apparatus is substantially the same as the first preferred embodiment. The same is no longer the same, and the difference is in the 'connecting piece. The 421 has a restricting portion 422 that abuts against the upper plate 3; and a replacement portion that is detachably combined with the restricting portion i can be replaced by the design of the embodiment without disassembling the substrate unit 3 The operation of replacing the replacement portion 423 of the abutment member 421 directly from the restriction portion is improved to improve the efficiency of replacement of the probe for abrasion and staining.
參閱圖5、6，本新型測試裝置之第 致上是與該第一較佳實施例相同，相同 中不相同之處在於，該上合板33具有一 上結合部331，及一可分離地組合於該上結合部 —較佳實施例’大 之處不再贅言，其 該擋板32結合的 331的上分 離部332，該上探針42之靠接件421係靠抵於該上分離部 332，而且，該上探針42更具有_設於該伸入件425表面 上且可卡抵限制該第-緩衝件43抽套移動的凸桓傷。 藉由本實施例的設計，同樣可達到節省更換探針的成 10 M345236 二 =換置探針的時間的功效，而且，將該基板單元3 =單Γ離’再將内部之上探針42抽換，可避免 將忒基板早兀3之上合板3 .^ i鬼手起而造成構件過大，其 ==的困擾，再者，利用該第—緩衝件㈣卡抵並 ^ 一、，移動’使該上探針42在抽換時可與該第 一缓衝 件43 —併取出，而避免 t尤4弟綾衝件43自該上探針42上 滑洛。 參閱圖7’本新型測試裝置之第四較佳實施例，大致上 疋贫該弟三較佳實施例相同，相同之處不再贅言，其中不 相同之處在於，該靠接件421具有—限制部似，及一可分 2地組合於該限制部422上的替換部423，該替換部423係 罪抵並卡設於該上合板33之上分離部332上。 藉由本實施例之設計，當該上探針42之替換部…欲 更換時’僅需將該上分離部332拆離’即可替換卡設於該 上分離部332上的替換部422，接η + 旳’換。"23，同樣可達到節省更換探針的 成本，更縮短換置探針的時間的功效。 參閲圖8、9,本新型測試裝置之第五較佳實施例，大 致上是與該第四較佳實施例相同，相同之處不再贅言，其 中不相同之處在於’該下合板31具有—與該擋板32σ結ς 的下結合部31卜及-可分離地組合於該下結合部3ιι的下 分離部312，該下探針41之基壁411係靠抵於該下分離部 312 ° 藉由本實施例的設計，同樣可達到節省更換探針的成 本，更縮短換置探針的時間的功效，而且，將該基板單元3 11 M345236 之下分離部312 _Referring to Figures 5 and 6, the first test device of the present invention is identical to the first preferred embodiment. The same difference is that the upper plate 33 has an upper joint portion 331 and a detachable combination. In the upper joint portion - the preferred embodiment, it is no longer said that the baffle 32 is coupled to the upper separating portion 332 of the 331, and the abutment member 421 of the upper probe 42 is abutted against the upper separating portion. 332. Moreover, the upper probe 42 further has a convex shackle disposed on the surface of the extending member 425 and is slidable to restrict the movement of the first cushioning member 43. With the design of the embodiment, the effect of saving the time of replacing the probe into 10 M345236 ==changing the probe can also be achieved, and the substrate unit 3=single off and then the inner probe 42 is pumped. Change, can avoid the 忒 兀 兀 之上 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 The upper probe 42 can be taken out together with the first cushioning member 43 during the exchange, and the slider 4 can be prevented from sliding on the upper probe 42. Referring to Fig. 7', the fourth preferred embodiment of the novel test apparatus is substantially the same as the preferred embodiment of the third embodiment. The same is not the same, and the difference is that the abutment 421 has - The restriction portion is similar to the replacement portion 423 which is combined with the restriction portion 422. The replacement portion 423 is sinned and attached to the separation portion 332 of the upper plate 33. With the design of the embodiment, when the replacement portion of the upper probe 42 is to be replaced, the only need to detach the upper separation portion 332 is to replace the replacement portion 422 that is attached to the upper separation portion 332. η + 旳 'change. "23, can also save the cost of replacing the probe, and shorten the time to replace the probe. Referring to Figures 8 and 9, the fifth preferred embodiment of the test apparatus of the present invention is substantially the same as the fourth preferred embodiment, and the similarities are no longer in common, wherein the difference is that the lower plate 31 is The lower joint portion 31 having the same as the lower portion of the lower joint portion 3 is detachably coupled to the lower joint portion 312 of the lower joint portion 3, and the base wall 411 of the lower probe 41 abuts against the lower split portion 312 ° By the design of the embodiment, the cost of replacing the probe can be saved, and the time for replacing the probe can be shortened. Moreover, the separation unit 312 _ under the substrate unit 3 11 M345236
作業較不變的困擾。 部離，再將内部之下探針41 之下合板31整塊拿起而 ‘种41抽換，可避免 而造成構件過大，其The work is more troublesome. Partially removed, and then the inner lower 41 of the probe 41 under the inner part of the probe 41 is picked up and ‘the type 41 is exchanged, which can be avoided and the component is too large.
44係靠抵於該擋板32，該上、下探針 歸納上述，當該」 第一、二緩衝件43、 知:供不同的彈性回復 第一、二緩衝件43、 42 41又力作動日夺’兩者不f互相影響而增加彼此觸點的 壓力，故確實能達到本新型之目的。 惟以上所述者’僅為本新型之五個較佳實施例而已， S不能以此限定本新型實施之範圍，即大凡依本新型申請 專利範圍及新型說明内容所作之簡單的等效變化與修飾， 皆仍屬本新型專利涵蓋之範圍内。 12 M345236 【圖式簡單說明】 圖1是一剖視圖，説明一般測試探針之熊樣； 圖2是一側視圖，說明本新型測試裝置之第一較佳實 施例； 圖3是-側視圖，說明該第一較佳實施例之態樣； 圖4是-部分分解側視圖’說明本新型測試裝置之第 一較佳實施例；44 is abutted against the baffle 32, and the upper and lower probes are summarized as described above. When the first and second cushioning members 43 are known, the first and second cushioning members 43 and 42 41 are activated. It is true that the two do not affect each other and increase the pressure on each other's contacts, so it can achieve the purpose of this new type. However, the above description is only for the five preferred embodiments of the present invention, and S cannot limit the scope of the implementation of the present invention, that is, the simple equivalent change of the scope of the patent application and the new description of the present invention. Modifications are still within the scope of this new patent. 12 M345236 [Simplified illustration of the drawings] Fig. 1 is a cross-sectional view showing a bear sample of a general test probe; Fig. 2 is a side view showing a first preferred embodiment of the test device of the present invention; Fig. 3 is a side view, Illustrating the first preferred embodiment; FIG. 4 is a partially exploded side view illustrating a first preferred embodiment of the novel test apparatus;
圖5是-部分側視圖，說明本新型測試裝置之第三較 佳實施例； 圖6是一部份分解側視圖，古穿日日 一 况明该弟三較佳實施例之 圖’說明本新型測試裝置之第 "兄明本新型測試裝置之第五較 圖，說明該第五較佳實施例之 圖7是一部份分解侧視 四較佳實施例； 圖8是一部份側視圖， 佳實施例；及 圖9是一部份分解側視 態樣。 13 M345236 【主要元件符號說明】 2……… 測試裝置 412 …圍繞壁 3 ,,,,,, 基板單元 413 …下接觸件 1 X 下合板 < ：· 上探針 311 下結合部 421 <靠接件 312… …下分離部 4 2 2… 5限制部 …擋板 4 2 3… …替換部 33""'' s上合板 425 5 ”伸入件 331 - …上結合部 426 κ …凸桓 3 3 2… 上分離部 …第一緩衝件 S.* ·> "測試單元 "第二緩衝件 41 …下探針 1 々 …下測試接點 410 …插置空間 …上測試接點 411 …基壁 14Figure 5 is a partial side elevational view showing a third preferred embodiment of the novel test apparatus; Figure 6 is a partially exploded side view of the same embodiment of the preferred embodiment of the third embodiment of the present invention The fifth comparative diagram of the novel test apparatus is shown in Fig. 7 which is a partially exploded side view of the preferred embodiment; Fig. 8 is a partial side The view, the preferred embodiment; and Figure 9 are a partial exploded side view. 13 M345236 [Description of main component symbols] 2......... Test device 412 ... around wall 3,,,,, substrate unit 413 ... lower contact 1 X lower plate < :· upper probe 311 lower joint 421 < Abutment 312 ... lower separation part 4 2 2... 5 restriction part... baffle 4 2 3 ... replacement part 33""''s upper plate 425 5" extension piece 331 ... ... upper joint part 426 κ ... Convex 3 3 2... upper separation section... first buffer member S.* ·>"testunit"second buffer member 41...down probe 1 々...down test contact 410 ...interpolation space...upper test Contact 411 ... base wall 14