TWM329650U - Main frame of systematized ceiling for clean room - Google Patents

Main frame of systematized ceiling for clean room Download PDF

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Publication number
TWM329650U
TWM329650U TW96216899U TW96216899U TWM329650U TW M329650 U TWM329650 U TW M329650U TW 96216899 U TW96216899 U TW 96216899U TW 96216899 U TW96216899 U TW 96216899U TW M329650 U TWM329650 U TW M329650U
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TW
Taiwan
Prior art keywords
auxiliary
ceiling
clean room
frame
skeleton
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TW96216899U
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Chinese (zh)
Inventor
Hiroshi Yamazaki
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Jun Ten Professional Decoration Engineering Co Ltd
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Application filed by Jun Ten Professional Decoration Engineering Co Ltd filed Critical Jun Ten Professional Decoration Engineering Co Ltd
Priority to TW96216899U priority Critical patent/TWM329650U/en
Publication of TWM329650U publication Critical patent/TWM329650U/en

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M329650 x , 八、新型說明: 【新型所屬之技術領域】 本創作係有關一種無塵室系統化天花板之主架體,更 詳而言之,特別係指一種使用於無塵室天花板之組合式支 架結構,不但施工簡易,並能兼具穩固性以及更佳之承受 力。 【先前技術】 按,無塵室亦即為無菌室或係潔淨室,係半導體、光 ’電、面板、醫工、生物化學乃至食品加工等相關產業中, 所不可獲缺的重要設施,由於近年來隨著生活品質與水準 提高’產品要求日益精密,對於產品加工環境亦係極為注 重,而無塵室之設置則係在達成此等無菌、無塵埃之需求 者;但由於無塵室之造價昂貴,且内部空間有限,是以一 般皆會將許多管線或設備配置在無塵室的天花板上以能 充分利用空間,因此構成無塵室天花板的支架在結構上= .僅要施工簡易(以免產生過多塵埃、造成污染),同時要 能兼具有穩固性以及較大之承受力。 本案創作人從事相關領域產品之開發與研究多年,對 •於相關器具構造上的優缺點持有相當程度的瞭解,有鑑於 習知無塵室用之天花板支架尚有不及之處,是以本著精益 求精之精神潛心研究設計,在歷經多次測試後,終於完成 本創作。 【新型内容】 本創作之主要目的,在於提供一種使用於無塵室天花 5 M329650 \ t 板之支架結構,能夠依據天花板範圍大 元體結構相互再行組合及擴充,以構成 - 架體,不但施工簡易且不會產生塵埃污 穩固性以及更佳之承受力’俾能將無塵 作更有效之利用。 緣是,本創作所述的一種無塵室系 體,其特徵在於可將〆組以上之單元體 充範圍成為天花板之支樓架構;該所述 ® 直向骨架、橫向骨架以及鎖固片所組成 設置於直向骨架之側邊,再以鎖固片將 於直向骨架,從而構成單元體之結構者 據天花板面積範圍,將系統化之單元體 充’使其構成不同範園大小之天花板架 ’且能兼具穩固性以及更佳之承受力, 板上的空間作更佳且有效之利用。 φ 【實施方式】 為期使責審查委員對於本創作之目 特徵能有更詳細明確的瞭解,茲舉出如 •並配合圖示說明如後。 請參閱第一圖並配合第二圖所示, 視圖與分解示意圖。 本創作所述之無塵室系統化天花板 在於係將一個以上之單元體相互組合, 支樓結構者;其中,所述之單元體主裏 小,將系統化之單 更大範圍之天花板 染’同時能夠兼具 至天花板上的空間 統化天花板之主架 相互組合,俾能擴 之單元體大致係由 ’令橫向骨架分別 橫向骨架鎖固定位 ;本創作係能夠根 相互進行組合與擴 體,不但施工簡易 故能將無塵室天花 的、功效以及構造 下述之較佳實施例 其係為本創作之透 之主架體,其特徵 俾擴充為天花板之 •係由一直向骨架1 6 M329650 ^ 、分設於直向骨架兩邊的橫向骨架2、以及數個鎖固片3所 組成之結構者,並呈一十(井)字型態樣。 直向骨架1係由至少一個其截面呈倒T型態樣的鋁擠 型輔助骨架10所構成;該辅助骨架10大致係具有一板體 41 100,並於板體1〇〇底部兩邊形成有凸部101,凸部101内側 係鏤空形成一嵌槽1010,在凸部101鄰於板體100之處則係 形成有滑槽102,兩個凸部101之間係形成有第一滑軌103 ^ ,板體100頂部亦係形成有第二滑軌104,該第二滑執104 籲内侧係可設置有複數個τ型螺絲31,作為接合其他外部元 件之用。 橫向骨架2主要係設置於直向骨架1之兩侧,由至少一 個其截面呈倒丁型態樣的鋁擠型輔助骨架2 0、以及其所配 附之辅助隔板11加以構成;該辅助隔板11大致係由三個板 體110所形成截面呈一 Π型態樣者;該輔助隔板11其中兩 相對板體11 〇之間,係形成一容置槽11,使辅助隔板Π兩 _相對之板體11 〇得以沿著辅助骨架2 0上的滑槽2 0 2定位而夾 設在辅助骨架20板體200之兩侧。 ’ 鎖固片3係截面呈一门型態樣之片體,其頂面係穿設 -有一個以上之螺孔30,俾使設置於骨架1、2第二滑軌中的 丁型螺絲31能與之對應而作螺合。 單元體之組合係於一直向骨架1的兩邊侧面適當處, 各別設置一橫向骨架2者;首先將一嵌合件13嵌插至橫向 骨架2其辅助骨架20鄰於直向骨架i的嵌槽2〇1〇中,並使喪 合件13的嵌體130緊密塞住該嵌槽1〇2〇,達到氣密效果; 7 M329650 令辅助隔板li之板體110沿著輔助骨架20上的滑槽2〇2定位 而夾設於輔助骨架20兩側,再以鎖固片3跨接在輔助骨架 20兩相對板體11〇之適當處,使辅助骨架2〇第二滑軌2〇4上 的丁型螺絲31得穿過鎖固片3的螺孔3〇並以螺帽32螺接固 定’使輔助骨架20與輔助隔板n相互鎖固而形成一橫向骨 架2者;將已鎖固的輔助隔板n其板體lu貼合於直向骨架 1之輔助骨架1 0的適當處,並使兩側的橫向骨架2呈一直線 狀排列,以一鎖固片3夾設於兩橫向骨架2輔助隔板丨丨的容 >置槽112槽壁,並使鎖固片3上的螺孔3〇對向直向骨架1上 的T型螺絲31而穿過,再以螺帽32與丁型螺絲3丨作螺接鎖 固’即完成一單元體的組合。 清參閱第二圖並配合第三圖所示,本創作係能依據無 塵室天花板面積大小之需求,將上述單元體作多體連接並 加以擴充為更大之範圍者;首先將連接片丨2沿著兩相連之 直向骨架1(或橫向骨架2)其輔助骨架10 (或2〇)的滑槽 .1〇2(或202)作定位,再以鎖固片3設置於輔助骨架1〇( 或20)第二滑軌1〇4 (或2〇4)上部並連同連接片12跨接夾 設於兩相連之直向骨架1 (或橫向骨架2 )兩侧,並令設置 於第二滑軌104(或204)上的T型螺絲31穿過鎖固片3的 螺孔30 ’再以螺帽32螺接T型螺絲31作鎖固,俾完成兩個 單元體之直向骨架1的連接(橫向骨架2亦然)。 請參閱第四圖所示,本創作並得依據環境安全需求, 添設諸如灑水器4等裝置,以便因應火災等事故的應急處 理·將前述之嵌合件1 3改以一特定之嵌合件丨4作設置,該 8 M329650 t 嵌合件14係設置有勾部141,嵌合件14中心處係開設有一 接孔144,嵌合件14外部係形成有三個嵌體,中央之嵌體 140則係穿設有一螺孔142 ;組合時先將嵌體嵌插於辅助骨 ,架20之嵌槽2010中’並使嵌合件14中央之嵌體ι4〇嵌設於 該輔助骨架20的第一滑軌203内,以螺絲143穿過喪體140 之螺孔142使嵌合件14與辅助骨架20接合固定;再設置一 輔助隔板11夾設於辅助骨架20侧邊,該辅助隔板η係增設 有一板體,將輔助隔板11容置槽i丨2劃分為兩個空間,呈 _開口狀之空間係能容置辅助骨架2〇之板體2〇〇,以鎖固片3 將輔助隔板11與輔助骨架2〇鎖固而形成橫向骨架2,並將 嵌合件14之勾部141卡制於直向骨架1之凸部1〇1適當處定 位’之後再利用鎖固片3將該橫向骨架2與直向骨架1鎖固 ’俾完成部分之組合;將灑水器4則安裝於該嵌合件14之 接孔144中’麗水器所接設之管線4〇則置放定位在辅助隔 板11的圍閉之空間内,俾完成灑水器之設置,使發生火災 _事故時能夠及時作出應急處理;基於同理,本創作係能配 口所需’輕易設置其它如警報器或監視器等裝置者,俾提 昇工作環境的安全性。 表丁、合上述’本創作無塵室系統化天花板之主架體係可 歸納有以下優點: 1 ·此依據天花板範圍,將系統化之單元體骨架結構再行 靈/舌組合及擴充,以構成符合大範圍之天花板架體。 •本創作在安裝上僅需作簡單的鎖固及組合動作,施工 簡易’且不會產生塵埃而對環境造成污染。 9 M329650 3 ·本創作係能配合環境所需,增設如灑水器、警報器等 裝置者,安裝簡易。 4·因為本創作係透過鎖固片與輔助隔板作多重固接之設 置’是以本創作能達成極佳之穩固性,對物體的承受 力亦得到強化,是以可將無塵室天花板上方之空間作 更佳有效之利用,俾提升其附加效益。 本創作在同類領域中具有極佳之進步性及實用性,同 時查遍國内外關於此類架構之技術資料文獻,亦未發現有 同近似之構造存在於先,應已符合『創作性』、『新穎 性 、『、 <』 進步性』以及『合於產業利用性』的專利要件, 菱依法之提出申請。 凡准’以上所述者僅係本創作之較佳實施例而已,故舉 %用本專利說明書以及申請專利範圍所為之其他等效方 :構變化者’均屬可行,理應包含在本創作之申請專利 M329650 【圖式簡單說明】 第一圖係為本創作之透視圖。 第二圖係為本創作之分解示意圖。 第三圖係為本創作所述骨架相互接合之示意圖。 第四圖係為本創作所述灑水頭接合之示意圖。M329650 x , VIII, new description: [New technical field] This creation is related to the main frame of a clean room systemized ceiling, more specifically, a combination used for clean room ceilings. The structure of the bracket is not only simple to construct, but also has both stability and better endurance. [Prior Art] According to the clean room, it is a sterile room or a clean room. It is an important facility that cannot be missed in semiconductor, optical 'electricity, panel, medical, biochemical and even food processing industries. In recent years, with the improvement of quality of life and standards, 'product requirements are becoming more and more sophisticated, and the processing environment of the products is also extremely important, and the setting of the clean room is to meet the demand for such aseptic and dust-free; but because of the clean room The cost is high, and the internal space is limited. Generally, many pipelines or equipments are placed on the ceiling of the clean room to make full use of the space. Therefore, the frame that constitutes the clean room ceiling is structurally =. Simple construction is required ( In order to avoid excessive dust and pollution, and to have both stability and greater tolerance. The creators of this case have been engaged in the development and research of products in related fields for many years, and have a considerable degree of understanding of the advantages and disadvantages of the construction of related instruments, in view of the fact that the ceiling brackets used in the clean room are still inaccessible, The spirit of excellence is devoted to research and design, and after many tests, the creation is finally completed. [New content] The main purpose of this creation is to provide a support structure for the clean room ceiling 5 M329650 \ t board, which can be combined and expanded according to the ceiling-wide structure of the large body to form a frame. It is easy to construct and does not produce dust and solidity and better endurance. It can make dust-free use more efficient. The invention relates to a clean room system according to the present invention, which is characterized in that the unit body above the raft group can be filled into a ceiling structure; the straight frame, the transverse frame and the locking piece are The composition is arranged on the side of the straight frame, and then the locking piece will be directed to the straight frame, so that the structure of the unit body is filled according to the ceiling area, and the systemized unit body is filled to make it a ceiling of different size. The frame's both stability and better endurance, and the space on the board is better and more efficient. φ [Implementation] In order to have a more detailed and clear understanding of the characteristics of this creation, the review committee will give a detailed explanation. Please refer to the first figure and the diagram and decomposition diagram shown in the second figure. The clean room systemized ceiling described in the present invention consists in that more than one unit body is combined with each other, and the structure of the branch building; wherein the unit body is small and small, and the systemized single larger ceiling is dyed' At the same time, the main frame of the ceiling can be combined with the ceiling to the ceiling, and the unit body that can be expanded can be roughly fixed by the transverse frame of the horizontal frame; the creation system can mutually combine and expand the body. Not only the construction is simple, but also the clean room ceiling, the efficacy and the following preferred embodiment are the main frame of the creation. The features are expanded to the ceiling and the main frame is 1 6 M329650. ^, the horizontal skeleton 2 on both sides of the straight frame, and the structure of several locking pieces 3, and in a ten (well) shape. The straight frame 1 is composed of at least one aluminum extruded auxiliary frame 10 whose cross section is inverted T-shaped; the auxiliary frame 10 has a plate body 41 100 and is formed on both sides of the bottom of the plate body 1 The convex portion 101 has a groove 1010 formed in the inner side of the convex portion 101, and a sliding groove 102 is formed in the convex portion 101 adjacent to the plate body 100. The first sliding rail 103 is formed between the two convex portions 101. ^, the top of the plate body 100 is also formed with a second sliding rail 104. The second sliding handle 104 can be provided with a plurality of τ-type screws 31 for engaging the other external components. The transverse skeleton 2 is mainly disposed on both sides of the straight frame 1, and is composed of at least one aluminum extrusion type auxiliary skeleton 20 whose cross section is in a inverted shape, and an auxiliary partition 11 to which it is attached; The partition plate 11 is substantially formed in a shape of a cross section formed by the three plate bodies 110. The auxiliary partition plate 11 defines an accommodating groove 11 between the two opposite plates 11 to make the auxiliary partition Π The two opposite plates 11 are positioned along the chutes 20 2 on the auxiliary bobbin 20 and are sandwiched on both sides of the auxiliary bobbin 20 plate 200. 'The locking piece 3 is in the form of a door-shaped section, the top surface of which is threaded - there are more than one screw hole 30, so that the D-type screw 31 disposed in the second sliding rail of the skeleton 1, 2 It can be screwed in correspondence with it. The combination of the unit bodies is provided at a position on both sides of the skeleton 1 at a proper position, and a lateral frame 2 is separately provided; first, a fitting member 13 is inserted into the lateral frame 2, and the auxiliary frame 20 is adjacent to the straight frame i. In the groove 2〇1〇, the inlay 130 of the funnel 13 is tightly plugged into the groove 1〇2〇 to achieve an airtight effect; 7 M329650 causes the plate 110 of the auxiliary partition li to be along the auxiliary frame 20 The chute 2〇2 is positioned and clamped on both sides of the auxiliary bobbin 20, and then the locking piece 3 is bridged between the two opposite plates 11 of the auxiliary bobbin 20 to make the auxiliary bobbin 2 〇 the second sliding rail 2〇 The D-type screw 31 on the 4 is passed through the screw hole 3 of the locking piece 3 and screwed and fixed by the nut 32 to lock the auxiliary frame 20 and the auxiliary partition n to form a transverse frame 2; The auxiliary auxiliary partition plate n is attached to the appropriate portion of the auxiliary frame 10 of the straight frame 1 and the lateral frames 2 on both sides are arranged in a straight line, and a locking piece 3 is sandwiched between the two pieces. The transverse frame 2 assists the volume of the spacer &; the groove 112 is grooved, and the screw hole 3 上 on the locking piece 3 is passed through the T-shaped screw 31 on the straight frame 1 to pass through, In the nut 32 and the screw-type D 3 for screwing the locking Shu 'complete composition of a unit body. Referring to the second figure and in conjunction with the third figure, the author can connect the unit body to a larger range according to the size of the clean room ceiling area; 2 Locating the chutes 1 . 2 (or 202) of the auxiliary skeleton 10 (or 2 〇) along the two connected straight skeletons 1 (or the lateral skeleton 2), and then placing the locking sheets 3 on the auxiliary skeleton 1 〇 (or 20) the upper part of the second slide rail 1〇4 (or 2〇4) and the connecting piece 12 is bridged on both sides of the two connected straight frame 1 (or the lateral frame 2), and is placed on the The T-shaped screw 31 on the second sliding rail 104 (or 204) passes through the screw hole 30' of the locking piece 3, and then the T-screw 31 is screwed by the nut 32 to lock the straight frame of the two unit bodies. The connection of 1 (the horizontal skeleton 2 is also the same). Please refer to the fourth figure, this creation has to add equipment such as sprinkler 4 according to environmental safety requirements, in order to respond to the emergency treatment of accidents such as fires, and change the aforementioned fittings 1 to a specific embedded The fitting member 4 is provided with a hook portion 141. The fitting member 14 defines a hole 144 at the center thereof, and the outer portion of the fitting member 14 is formed with three inlays. The body 140 is provided with a screw hole 142; in combination, the inlay is first inserted into the auxiliary bone, and the inlay 2010 of the frame 20 is 'integrated and embedded in the center of the fitting 14 is embedded in the auxiliary frame 20 In the first sliding rail 203, the screw 143 passes through the screw hole 142 of the funnel 140 to fix the fitting member 14 and the auxiliary frame 20; and an auxiliary partition 11 is disposed on the side of the auxiliary frame 20, the auxiliary The partition η is additionally provided with a plate body, and the auxiliary partition 11 receiving groove i丨2 is divided into two spaces, and the open space is capable of accommodating the plate body 2〇〇 of the auxiliary frame 2〇 for locking The sheet 3 locks the auxiliary partition 11 and the auxiliary frame 2〇 to form the lateral frame 2, and clamps the hook portion 141 of the fitting 14 to the straight The convex portion 1〇1 of the skeleton 1 is positioned at a proper position, and then the combination of the lateral skeleton 2 and the straight skeleton 1 is locked by the locking piece 3; the sprinkler 4 is attached to the fitting member. In the 14th hole 144, the pipeline 4 connected to the Lishui device is placed in the enclosed space of the auxiliary partition 11, and the sprinkler is installed to make the emergency in case of fire_accident Processing; based on the same reason, the creative department can match the mouth needed to easily set up other devices such as alarms or monitors to improve the safety of the working environment. The main frame system of the above-mentioned 'clean room systemized ceiling can be summarized as follows: 1 · According to the ceiling range, the systemized skeleton structure of the unit body is further combined and expanded to form Meets a wide range of ceiling frames. • This creation requires only simple locking and combination operations for installation, and the construction is simple and does not generate dust and pollute the environment. 9 M329650 3 · This creation department can be installed in an environment such as a sprinkler or an alarm, and it is easy to install. 4. Because this creation is made up of multiple fixings through the locking piece and the auxiliary partition plate, the creation of this piece can achieve excellent stability, and the bearing capacity of the object is also enhanced, so that the clean room ceiling can be The space above is used for better and more efficient use, and its additional benefits are enhanced. This creation has excellent progress and practicality in the same field. At the same time, it has searched the domestic and foreign technical literature on such architecture, and has not found that the same structure exists first, and should have been consistent with "creative". "Professionality, ", <" Progressiveness" and the patent requirements for "integration of industrial use", Ling applied for it according to law. The above is only the preferred embodiment of the present invention, so the use of this patent specification and the other equivalents of the patent application scope: the structural changer are all feasible and should be included in the creation. Patent application M329650 [Simple description of the diagram] The first picture is a perspective view of the creation. The second picture is an exploded view of the creation. The third figure is a schematic diagram of the joints of the skeletons of the present creation. The fourth figure is a schematic view of the sprinkler head jointing of the present creation.

【主要元件符號說明】 1 直向骨架 142 螺孔 2 橫向骨架 143 螺絲 10 ' 20 輔助骨架 144 接孔 100 > 200 板體 3 鎖固片 101 > 201 凸部 30 螺孔 1010 ^ 2010 喪槽 31 T型螺絲 102 >202 滑槽 32 螺帽 103 ^ 203 第一滑軌 4 灑水器 104 、204 第二滑軌 40 管線 11 輔助隔板 110 板體 111 板體 112 容置槽 12 連接片 13 ^ 14 嵌合件 130 、140 嵌體 141 勾部 11[Main component symbol description] 1 Straight frame 142 Screw hole 2 Transverse frame 143 Screw 10 ' 20 Auxiliary frame 144 Hole 100 > 200 Plate 3 Locking piece 101 > 201 Projection 30 Screw hole 1010 ^ 2010 31 T-screw 102 > 202 Chute 32 Nut 103 ^ 203 First slide rail 4 Sprinkler 104, 204 Second slide rail 40 Line 11 Auxiliary partition 110 Plate body 111 Plate 112 accommodating groove 12 Connecting piece 13 ^ 14 fittings 130, 140 inlays 141 hooks 11

Claims (1)

M329650 ,九、申請專利範圍: 1 · 一種無塵室系統化天花板之主架體,其特徵在於將一組以 • 上之單元體相互作組合,從而擴充為天花板之支撐結構; . 該所述之單元體係由直向骨架、橫向骨架以及鎖固片所形 成之結構者,其中: 直向骨架’係由至少一辅助骨架所連接構成者,該辅助骨 • 架係具有一板體,於板體底部兩邊形成有凸部,使其截面 _ 呈一倒丁型態樣;輔助骨架之凸部鄰於板體處係形成有滑 槽’凸部内部係鏤空形成一嵌槽,板體頂部係形成有滑軌 ’該滑軌係可放置有T型螺絲; 輪向月架’係設置於直向骨架之侧邊,由至少一輔助骨架 、及辅助隔板連接組成者,該辅助隔板係由三個板體形成 ’使其截面呈一Π型態樣;該輔助隔板中兩相對板體之間 係形成一容置槽; 鎖固片,係呈一 π狀之片體,頂面係穿設有至少一個以上 • 之螺孔者。 -2.依據中請專利範圍第1項所述之無塵室系統化天花板之主 架體,其中’該辅助骨架凸部之嵌槽處,係可嵌插有嵌合 件者。 3 據申請專利範園第2項所述之無塵室系統化天花板之主 二體其中,該嵌合件係為一板體,並於板體側邊表面形 成有嵌體者。 ·:據申請專利範圍第2項所述之無塵室系統化天花板之主 、體’其中’該嵌合件係為一板體,嵌合件中心處開設有 12 M329650 一接孔,嵌合件侧邊表面處係形成有三個喪體’並於中央 之嵌體表面穿設有一螺孔。 5.依據申請專利範圍第4項所述之無塵室系統化天花板之主 架體,其中,該嵌合件之接孔係可接設有一灑水器。M329650, Nine, the scope of application for patents: 1 · A main frame body of a clean room systemized ceiling, characterized in that a group of units on the top of each other are combined to expand into a ceiling support structure; The unit system is composed of a straight skeleton, a lateral skeleton and a locking piece, wherein: the straight skeleton ' is composed of at least one auxiliary skeleton, and the auxiliary bone frame has a plate body and a plate. The convex portion is formed on both sides of the bottom of the body, so that the cross section _ is in a inverted shape; the convex portion of the auxiliary skeleton is formed adjacent to the plate body with a chute. The inner portion of the convex portion is hollowed out to form a recessed groove, and the top of the plate body is Formed with a slide rail 'the slide rail can be placed with a T-shaped screw; the wheel lunar frame' is disposed on the side of the straight frame, and is composed of at least one auxiliary skeleton and an auxiliary partition plate, and the auxiliary partition system is Formed by three plates, the cross section of the auxiliary plate is formed in a shape; the auxiliary plate defines a receiving groove between the two opposite plates; the locking piece is a π-shaped piece, the top surface Wear at least one or more Screw holes are. The main frame body of the clean room systemized ceiling according to the first aspect of the patent application, wherein the fitting groove of the auxiliary frame convex portion is insertable with a fitting. 3 According to the second part of the clean room systemized ceiling described in the second application of the patent garden, the fitting is a plate body, and an inlay is formed on the side surface of the plate body. · The main body and body of the clean room systemized ceiling according to item 2 of the patent application scope is a board body, and a 12 M329650 one hole is formed at the center of the fitting member. There are three funnels formed on the side surface of the piece and a screw hole is formed in the surface of the central inlay. 5. The main frame body of the clean room systemized ceiling according to claim 4, wherein the fitting of the fitting member is connected to a sprinkler. 1313
TW96216899U 2007-10-09 2007-10-09 Main frame of systematized ceiling for clean room TWM329650U (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9704367B2 (en) 2012-07-09 2017-07-11 Tokyo Electron Limited Clean-room monitoring device and method for monitoring clean-room

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9704367B2 (en) 2012-07-09 2017-07-11 Tokyo Electron Limited Clean-room monitoring device and method for monitoring clean-room
TWI664339B (en) * 2012-07-09 2019-07-01 東京威力科創股份有限公司 Monitoring device for clean room and method for monitoring clean room

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