TWM322402U - Air suspension stage having plane level adjustment function - Google Patents

Air suspension stage having plane level adjustment function Download PDF

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Publication number
TWM322402U
TWM322402U TW96209503U TW96209503U TWM322402U TW M322402 U TWM322402 U TW M322402U TW 96209503 U TW96209503 U TW 96209503U TW 96209503 U TW96209503 U TW 96209503U TW M322402 U TWM322402 U TW M322402U
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TW
Taiwan
Prior art keywords
axis
air
long
rods
platform
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TW96209503U
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Chinese (zh)
Inventor
Gung-Shiu Ye
Shiang-Sheng Jang
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Contrel Technology Co Ltd
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Application filed by Contrel Technology Co Ltd filed Critical Contrel Technology Co Ltd
Priority to TW96209503U priority Critical patent/TWM322402U/en
Publication of TWM322402U publication Critical patent/TWM322402U/en

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Description

M322402 八、新型說明: 【新型所屬之技術領域】 調 π:::用來運輪板特的承載台有關,特別是指可 平整=:能度=材運輪更為順暢的-種具有平面 【先前技術】 板的Ϊ載:Πϊ板材之承載台,以用來運送玻璃基 是以複數滾輪構成-承載平面,讓 Π)帶動玻璃基板的移動^移動’並且藉由該等滚輪的轉動來 评::觸載台’在帶動玻璃基板移動時,由於 滚輪會接觸到玻璃基板表面,因可 =滾此=生剝落的微粒,造成玻璃基板表面;二。 = 此種問題’遂有氣浮台的產生,其主要利用氣浮 15 ”,使朗基板料在H台上 =二=移動,由於玻細=: 的S 也就解決了前述滚輪式承載台 接士 ί·爭口主要疋由多數的氣浮桿平行排列且頂面齊平所 20 此每個氣浮桿的岐方式就變得極為重要,一 =在氣?桿底部設置完整的支撐面來供每個氣浮桿設 俨^古,方便調整至齊平。然而’在某些場合,氣浮 ―敕沾2’、有局部的支據而已,在氣浮桿的底部未受到 凡正的支採下’未被支撲的部位即會向下弯垂,此會導致 4 M322402 表㈣曲’造成玻璃基板在運送過程中可能撞 ==:=:,成永㈣,一 【新型内容】 功主要目的在純供—種具有平面平整度調整 下,b仍能浮桿在僅有局部有支撐的狀態 3i具千面平整度,使氣浮桿保持平整。 10 15 目士’為了達成前述目的’依據本創作所提供之-種 2 ,、平整度調整功能之氣浮台,包含有:一承台,呈 該承台的長麵係平行於¥軸方向;複數氣浮桿, 翁2二2::空而形成一氣道’頂面平坦且設有複數喷 ;;h軋浮桿彼此相隔預定距離且彼此相平行地設於 氣浮桿之長軸向係平行於X軸方向,且該 等絲杯具有向外延伸出該承台的—懸空段;—連結桿, 接於料氣浮桿之社段末端,且對應於該等 係設有至少一長孔,該長孔的長轴向係與該 ,、一干的長ί向垂直;至少-受力桿,呈長形,設於該承 口上且位於刖述複數氣浮桿中之二氣浮桿之間,該受力桿 t有向外延伸出該承台的一懸空段,該受力桿之懸空段末 端具有-舌部伸入於該長孔内’該舌部具有一螺孔;以及 至少-螺栓’螺接於該螺孔,且該螺检之末端向上頂住於 該長孔頂部之孔壁。藉此,可藉由調整該等螺栓的高度來 調整該等氣浮桿的平面平整度。 5 20 M322402 【實施方式】 為了詳細說明本創作之構造及特點所在,茲 一較佳實施例並配合圖式說明如后,其中·· ^第—圖至第人圖所示,本創作—較佳實施例所提供 種具有平面平整度輕魏之氣浮台10,主要由一承 台Η、複數氣浮桿21、二連結才旱3卜複數受力 複數螺栓51所組成,其中·· 仵以及 =承台1卜呈長形,本實施射係由二桿體iu所組 成,^承台11的長軸向係平行放¥軸方向。 15 該等⑽桿21,呈長形,内部中空而形成一氣道, :供連接-氣贿_未示),該等氣浮桿21頂面平坦且 =有複數喷氣孔(圖中未示),喷氣孔之設置方式屬習知技 V且非本案之重點,容不贅述。該等氣浮桿^彼此相 相平行,独其情設置於該承台11之桿 ”氣桿21之長軸向係平行於χ軸方向,且 該專乱沖2i具有由兩端分別向外延伸出M322402 VIII. New description: [New technical field] π::: It is used for the special bearing plate of the transport wheel plate, especially for flattening =: energy = material transport wheel is smoother - kind with plane [Prior Art] The loading of the board: the carrying table of the sheet metal, used to transport the glass base is composed of a plurality of rollers - the bearing plane, which causes the movement of the glass substrate to move] and by the rotation of the rollers Comment:: When the touch table is moved, the roller will contact the surface of the glass substrate, because it can roll the surface of the glass substrate; = This kind of problem 'has the generation of air floating platform, which mainly uses air float 15", so that the long substrate material is on the H stage = two = mobile, because the glass =: S also solves the aforementioned roller type carrier The main 疋 争 争 争 疋 争 争 争 争 争 ί ί ί ί ί ί ί ί ί ί ί ί ί 多数 多数 多数 多数 ί ί ί 多数 多数 ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί For each air-floating rod, it is easy to adjust to the flush. However, in some occasions, the air-float-smear-dip 2' has a partial support, and the bottom of the air-floating rod is not subject to any The part that has not been plucked will fall downward, which will cause the 4 M322402 table (four) to cause the glass substrate to collide during transportation. ==:=:, Cheng Yong (4), a new content 】 The main purpose of the work is pure supply – the flatness adjustment, b can still float the rod in a state with only partial support 3i with a thousand flatness, so that the air float stays flat. 10 15 The aforementioned purpose 'according to the creation of the 2, the flatness adjustment function of the air floating platform, including a cap, the long face of the cap is parallel to the direction of the ¥ axis; a plurality of air floats, Weng 2 2: 2: empty to form an air passage 'top flat and with a plurality of sprays; The long axial directions of the air floating rods are parallel to the X-axis direction at a predetermined distance and parallel to each other, and the silk cups have a hanging portion extending outward from the socket; the connecting rod is connected to the gas The end of the club of the floating rod, and corresponding to the lines are provided with at least one long hole, the long axis of the long hole is perpendicular to the long axis of the long hole; at least the force rod is elongated, Between the two air floating rods in the plurality of air floating rods, the force rod t has a hanging section extending outward from the socket, and the end of the hanging section of the force rod has a tongue a portion extending into the elongated hole, the tongue has a screw hole; and at least a bolt is screwed to the screw hole, and the end of the screw is pressed upward against the hole wall at the top of the long hole. The plane flatness of the air floats can be adjusted by adjusting the height of the bolts. 5 20 M322402 [Embodiment] In order to explain the creation in detail The structure and characteristics of the present invention are described in the following description, and the description of the drawings is as follows, wherein the first embodiment of the present invention provides a plane flatness and lightness. The air floating platform 10 is mainly composed of a bearing platform, a plurality of air floating rods 21, two connecting only droughts, and a plurality of force-receiving plurality of bolts 51, wherein ··· and the bearing platform 1 are elongated, this embodiment The shooting system is composed of two rods iu, and the long axial direction of the bearing platform 11 is parallel to the direction of the axis. 15 These (10) rods 21 are elongated and hollow inside to form an air passage: for connection - gas bribe _ Not shown), the top surface of the air floating rods 21 is flat and there are a plurality of gas jet holes (not shown), and the arrangement of the gas jet holes is a well-known technique V and is not the focus of the present case, and is not described here. The rods are parallel to each other, and are disposed on the rod of the cap 11 singly. The long axial direction of the gas rod 21 is parallel to the axis of the yaw axis, and the special rushing 2i has outwardly extending from both ends

懸空段24。 J 該等連結桿31 ’呈長形’固接於該等氣浮桿2i兩端之 懸空段24末端,而龍料轉21 _末端聯結起來, ^該等賴桿31對聽該軌料^之空随設有複數 長孔32,該專長孔32的長軸向係與該連結桿3 垂直。該等連結桿Μ固接於料氣浮桿21的方式係^ 由螺絲鎖固於氣洋桿21端面,由於此種鎖时式極為^ 20 M322402 知’合不再予詳述或詳細圖示。 段設呈長形’彼此相隔預定距離,以其中 、χ 口之桿體111上且位於前述複數氣浮桿21 中之二氣浮桿21之間,各該受力桿41具有 ζ21 5軸方向延伸出該承台U的-懸空段44,各 ^ 41之懸空段44末端具有一舌部%伸入於該長孔u内, 二:!二f有一螺孔47。該等受力桿41的頂面係低於 該等Ο予杯21的頂面。 該等螺栓5卜分別螺接於各該螺孔47,且各該螺检51 1〇之末端向上頂住於各該長孔32頂部之孔壁。 ” 本實施例中,該承台11係以其桿體111中段設置於— 基座61上,該承台11之兩端分別具有一作用板12 ,各該 作用板12具有至少一長孔13,該長孔13之長轴向係相 於地面呈垂直。該承台11具有二Y轴受力桿71以其中段 15設於該基座61,該等γ軸受力桿71兩端分別具有向外沿〇 軸延伸出該基座61的一 γ軸懸空段74,各該丫軸懸空段 74末端具有一 Y軸舌部76伸入於各該長孔13内,各該〇 軸舌部76具有一 Y軸螺孔77,複數Y軸螺拴78螺接於各 該Y轴螺孔77内且末端向上頂住於各該長孔13頂 2〇 壁。 σ 札 請再參閱第三圖及第八圖,本創作於操作時,主要係 透過該等螺栓51及Υ軸螺栓78來調整該等氣浮桿21之末 端高度。其原理在於,由於該等氣浮桿21的兩端均被該等 連結桿31所連接,因此只要調整該等連結桿μ的高度, M322402 等氣浮桿21兩端的高度。而藉由該等螺栓51 1敫^4舌部46並向上頂住各該長孔32之孔壁,可在 二上頂的高度時’將該等連結桿31向上頂,而 的下垂重量則透過該等受力桿41之舌部你 及“二,桿41上予以吸收。亦即’透過該連結桿31 =專舌."6及該等螺栓51之連接關係,可將 重Λ轉移至料受力桿41上,該等氣浮桿 ρ了藉此幵南而使頂面齊平。 作用=的4藉由該等¥軸螺栓78及¥軸受力桿71以及 ,透過上述的操作原理,可解決該承 垂的問題。 卜 由上可知,本案所能達成之功效在於·· 15 可调王平面平整度··透過本創作之技術,可在 底部僅局賴置於該承台的狀態下,藉由該等螺检來調^ ,平面平整度’使得所有的氣浮桿均能麟平整。進而使 得玻璃基板或#他板狀材在運送時,均能藝的進行。 8 M322402 【圖式簡單說明】 第一圖係本創作〜較佳實施例之立體圖。 第二圖係本創作〜較佳實施例之立體示意圖,顯示氣 浮桿移除後之狀態。 第三圖係第二圖之局部放大圖,顯示受力桿與連結桿 之關係。 第四圖係本創作一較佳實施例之前視圖。 第五圖係第四圖之局部放大圖。 第六圖係本創作一較佳實施例之侧視圖。 第七圖係第六圖之局部放大圖。 第八圖係本創作一較佳實施例之動作示意圖,顯示Y 軸受力桿與作用板以及氣浮桿之間的關係。 【主要元件符號說明】 15 1〇具有平面平整度調整功能之氣浮台 11承台 13長孔 24懸空段 41受力桿 47螺孔 71 Y軸受力桿 77 Y軸螺孔 U1桿體 21氣浮桿 31連結桿 44懸空段 51螺栓 74 Y轴懸空段 78 Y軸螺栓 12作用板 22氣道 32長孔 46舌部 61基座 76 γ軸舌部 9 20Suspended section 24. J. The connecting rods 31' are elongated and fixed to the ends of the suspended sections 24 at the ends of the air floating rods 2i, and the long ends of the connecting rods 21_ are connected, and the pair of rods 31 are to listen to the rails. The space is provided with a plurality of long holes 32, and the long axis of the special holes 32 is perpendicular to the connecting rod 3. The manner in which the connecting rods are fixed to the gas floating rod 21 is screwed to the end surface of the gas ocean pole 21, and the lock type is extremely close to the surface of the gas ocean pole 21, which is no longer detailed or detailed. . The sections are formed in a long shape 'separated from each other by a predetermined distance between the two air floating rods 21 of the plurality of air floating rods 21 on the shaft 111 of the mouth, each of the force rods 41 having a ζ21 5 axis direction Extending out of the suspension U of the platform U, the end of the suspension section 44 of each of the 41 has a tongue portion extending into the elongated hole u, and the second: f has a screw hole 47. The top surface of the force receiving rods 41 is lower than the top surface of the urging cups 21. The bolts 5 are respectively screwed to the screw holes 47, and the ends of the screws 51 1 向上 are upwardly supported by the holes on the top of each of the long holes 32. In this embodiment, the platform 11 is disposed on the base 61 with the middle portion of the rod body 111. The two ends of the platform 11 respectively have an action plate 12, and each of the action plates 12 has at least one long hole 13 The long axial direction of the long hole 13 is perpendicular to the ground. The cap 11 has two Y-axis force rods 71 with the middle portion 15 disposed on the base 61, and the γ-axis force rods 71 have respectively Extending outwardly along the yoke axis, a γ-axis suspension section 74 of the pedestal 61 has a Y-axis tongue 76 extending into each of the elongated holes 13 at each end of the yoke suspension section 74. 76 has a Y-axis screw hole 77, and a plurality of Y-axis bolts 78 are screwed into each of the Y-axis screw holes 77 and the ends are upwardly supported by the top 2 walls of each of the long holes 13. σ Please refer to the third figure. And the eighth figure, in the operation, the end heights of the air floating rods 21 are mainly adjusted by the bolts 51 and the bolts 78. The principle is that both ends of the air floating rods 21 are The connecting rods 31 are connected, so that the height of the connecting rods μ, the height of the ends of the air floating rods 21 such as M322402, and the like, and the tongues 46 by the bolts 51 1敫4 are adjusted. Upwardly pressing against the wall of each of the long holes 32, the top connecting rods 31 can be topped up at the height of the top of the top, and the sag weight is transmitted through the tongues of the force receiving rods 41. The rod 41 is absorbed. That is, through the connection of the connecting rod 31 = the special tongue. " 6 and the bolts 51, the heavy hoe can be transferred to the material receiving rod 41, and the air floating rod ρ is used to make the south The top surface is flush. The action = 4 can solve the problem of the bearing by the above-mentioned operating principle by the shaft bolt 78 and the shaft receiving rod 71. It can be seen from the above that the effect that can be achieved in this case is that... 15 Adjustable king plane flatness · Through the technology of this creation, the bottom can only be placed in the state of the cap, with the screw inspection To adjust ^, the plane flatness' makes all the air floats flat. Further, the glass substrate or the other plate material can be carried out at the time of transportation. 8 M322402 [Simple Description of the Drawings] The first drawing is a perspective view of the present invention - the preferred embodiment. The second drawing is a perspective view of the present invention - the preferred embodiment, showing the state after the air float is removed. The third figure is a partial enlarged view of the second figure showing the relationship between the force bar and the tie bar. The fourth drawing is a front view of a preferred embodiment of the present invention. The fifth figure is a partial enlarged view of the fourth figure. The sixth drawing is a side view of a preferred embodiment of the present invention. The seventh figure is a partial enlarged view of the sixth figure. The eighth figure is a schematic diagram of the action of a preferred embodiment of the present invention, showing the relationship between the Y-axis force bar and the action plate and the air float bar. [Main component symbol description] 15 1〇Air floating table 11 with flatness adjustment function Cap 13 Long hole 24 Suspended section 41 Stress rod 47 Screw hole 71 Y-axis force rod 77 Y-axis screw hole U1 Rod body 21 gas Floating rod 31 connecting rod 44 suspended section 51 bolt 74 Y-axis suspended section 78 Y-axis bolt 12 acting plate 22 air passage 32 long hole 46 tongue 61 base 76 γ-axis tongue 9 20

Claims (1)

M322402 九、申請專利範圍: 1,種具有平面平整度調整功能之氣浮台,包含有: -承台’呈長形’該承台的長軸向係平行於γ 複數氣浮桿,呈長形,内部中空而形成n °面 平坦且設有複數噴氣孔,該等氣浮桿彼此相隔預定距 5彼此相平行地設於該承台上,該等氣浮桿之長抽向 於X轴方向,且該等氣浮桿具有向外延伸出該承 空段; ^ -連結桿,呈長形,固接於該等氣浮桿之懸空段末端, 且對應於該等氣浮桿之空隙係設有至少一長孔,該長孔 10長轴向係與該連結桿的長軸向垂直; 、 數氣長形,設於該承台上且位於前述複 數乳子才干中之一乳碑之間,該受力桿具有向外延伸出該 承台的-懸空段,該受力桿之懸空段末端具有一舌部伸入 於該長孔内,該舌部具有-螺孔;以及 15 ^ ’螺接於卿H該螺栓之末端向上頂 住於該長孔頂部之孔壁。 ^ ϋ項 效功!專利範圍第1項所述之具有平面平整度調 ’其中:該等氣浮桿係以其中段設置於該 Ϊ二兩端向外沿χ轴方向延伸出-懸空Μ 20又干’、以、#又设置於該承台,且兩端分別向外沿X軸 f 口延伸έΒ ;並以二連結桿分湘接 桿之兩端。 :·依!:請專利範圍第2項所述之具有平面平整度調 i n該受力桿係為複數,相隔預定距 M322402 離地位於前述複數氣浮桿中之二氣浮桿之間。 4·依據申請專利範圍第3項所述之具有平面平整度調 整功能之氣浮台,其中更包含有:一基座,該承台係以其 中段設於該基座上,該承台之兩端分別具有一作用板,各 5該作用板具有至少一長孔,該長孔之長轴向係相對於地面 呈垂直;該承台具有至少一 γ軸受力桿以其中段設於該基 座,該γ轴受力桿兩端分别具有向外沿γ轴延伸出該基座 的-Υ軸齡段,各該γ_观末端具有—Υ軸舌部伸 ^於賴長孔内’各該γ轴舌部具有—Υ轴螺孔;複數Υ *螺检螺接於各該γ軸螺孔内且末端向上頂住於各該長孔 頂部之孔辟。 5·依射4專利範圍第4項所述之具有平面平整度調 =力能之氣浮台,其中:該等受力桿的頂面係低於該等氣 净桿的頂面。 15 6.依射請專利範圍第5項職之具有平面平整度調 玉功能之氣浮台,其中:該承台係由二桿體所組成。 11M322402 IX. Scope of application: 1. A kind of air-floating platform with flatness adjustment function, including: - the cap is 'long'. The long axis of the cap is parallel to the γ complex air float, which is long. Formed, hollow inside to form a flat surface of n° and provided with a plurality of gas jet holes, the air floating rods being disposed on the platform in parallel with each other by a predetermined distance 5, the length of the air floating rods being drawn toward the X axis Direction, and the air floating rods have outwardly extending out of the air bearing section; ^ - connecting rods, elongated, fixed to the ends of the suspended sections of the air floating rods, and corresponding to the gaps of the air floating rods The utility model is provided with at least one long hole, the long axial direction of the long hole 10 is perpendicular to the long axial direction of the connecting rod; and the number of air is elongated, and is disposed on the platform and located in one of the plurality of breasts Between the two, the force-receiving rod has a suspension portion extending outwardly from the socket, and the end of the suspension portion of the force-receiving rod has a tongue extending into the elongated hole, the tongue having a screw hole; ^ 'Spiral to the end of the bolt H. The end of the bolt is up against the wall of the hole at the top of the slot. ^ 效 效 ! ! 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利 专利The dry ', 、, # is set on the pedestal, and the two ends extend outward along the X-axis f-port; and the two connecting rods are divided into two ends of the struts. :·according to! : Please have the flatness of the plane as described in item 2 of the patent scope. The force rod is plural, separated by a predetermined distance M322402 between the two air floats in the plurality of air floats. 4. The air floating platform having the flatness adjustment function according to the third aspect of the patent application, further comprising: a base, wherein the platform is disposed on the base in a middle portion thereof, the platform Each of the two ends has an action plate, and each of the action plates has at least one long hole, and the long axis of the long hole is perpendicular to the ground; the base has at least one γ-axis force bar with the middle portion disposed on the base a y-axis force rod has two ends extending from the y-axis to the y-axis, and each of the γ-view ends has a Υ-axis extension extending into the long hole The γ-axis tongue has a Υ-axis screw hole; a plurality of Υ 螺 screws are screwed into each of the γ-axis screw holes and the ends are upwardly supported by the holes of the tops of the long holes. 5. The air-floating platform having a flatness of flatness = force energy according to item 4 of the scope of patent 4, wherein the top surface of the force-receiving rods is lower than the top surface of the gas-cleaning rods. 15 6. According to the fifth part of the patent scope, the air-floating platform with the flatness of the flatness adjustment jade function, wherein: the platform is composed of two poles. 11
TW96209503U 2007-06-08 2007-06-08 Air suspension stage having plane level adjustment function TWM322402U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI507340B (en) * 2011-01-31 2015-11-11 Oiles Industry Co Ltd A separation distance adjusting device, and a handling device using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI507340B (en) * 2011-01-31 2015-11-11 Oiles Industry Co Ltd A separation distance adjusting device, and a handling device using the same

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