TWM288004U - Air-float platform and air-float apparatus having the same - Google Patents

Air-float platform and air-float apparatus having the same Download PDF

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Publication number
TWM288004U
TWM288004U TW94218061U TW94218061U TWM288004U TW M288004 U TWM288004 U TW M288004U TW 94218061 U TW94218061 U TW 94218061U TW 94218061 U TW94218061 U TW 94218061U TW M288004 U TWM288004 U TW M288004U
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TW
Taiwan
Prior art keywords
air
platform
positive pressure
guiding
float
Prior art date
Application number
TW94218061U
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Chinese (zh)
Inventor
Hung-Ru Tsai
Jian-Jung Chen
Jing-Hung Jeng
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Utechzone Co Ltd
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Application filed by Utechzone Co Ltd filed Critical Utechzone Co Ltd
Priority to TW94218061U priority Critical patent/TWM288004U/en
Publication of TWM288004U publication Critical patent/TWM288004U/en

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Description

M288004 八、新型說明: 【新型所屬之技術領域】 種供工作物件 本新型是有關於一種平台,特別是指一 擺放的氣浮平台以及具有該平台之氣浮裝置。 【先前技術】 牛凡液晶顯示器、電腦顯示面板、手機顯示面板等各 種用於顯示圖像訊息的裝置,這幾 ^ ^ ^ 、咬千水杓不斷朝向顯示面M288004 VIII. New description: [New technical field] Kind of work object The present invention relates to a platform, in particular to a floating air floating platform and an air floating device having the same. [Prior Art] Various devices for displaying image information, such as Niu Fan liquid crystal display, computer display panel, mobile phone display panel, etc., these ^ ^ ^, bite thousands of water 杓 constantly facing the display surface

積更為寬廣之目標發展,因此面板的顯示面積必須相對更 大,才能提供足以符合消費需求的產品。 …然而因面板的體積越來越大,其製造組裝難度必定相 ,曰加以形色遽光片來說’其玻璃基板的重量極重,單 :人工搬運或組裳已面臨相當難度’若要將彩色遽光片移 動至取像裝置下方進行移動式檢測將更為困難。另一方面 印刷電路板(即PCB板)也因為搭配各種電器用品而被 。乏運用,基於其大量生產為前提下,pcB板的檢測也變 成一項極為重要的課題。 有鑑於此,目前市面上已開發出利用正壓吹氣原理輔 助支撐此種大面積基板的氣浮技術,如圖丨所示之氣浮裝 置8’其具有_平纟81、多數個分別自平台8ι頂面鑽設形 ^之吹氣孔82,以及一形成在該平台81内部的氣室幻。 其中該氣室83與所有吹氣孔82彼此連通而產生分氣效果 將正壓氣體送入氣室83内,最後經由各個吹氣孔82送 出’可對懸浮在平纟81頂部的工作物件9產生支撐作用, 使得該工作物件9不至於凹陷垂墜。 M288004 雖然该氣室83在整個氣浮 k釣& r 予凌置8中扮演著分氣作用, 月b夠使正壓氣體得以較為平 J也被迗離吹氣孔82,但於眚 際使用上卻發現,每一個吹氧 、 ^ 人矾孔82於距離進氣位置的遠近 距離不同’導致吹氣孔82出 、土力不m相同,也就是該工 ;物件9下方的壓力不平均而發生不穩定的氣浮狀態,導 致乳以置8無法有效率地達到完全支撐之目的,情況較 ==成彩色遽光片局部陷落,嚴重者將使作業或檢測( … a)失效,大大影響品質的穩定性。 【新型内容】 因此,本新型之目的,即扁 τ ^ Ρ在美供一種可產生微風阻以 使出軋量更為均句穩定的氣浮平台。 於疋,本新型之氣浮平台具有一本體、一形成於本體 I的氣室、多數個由本體上表面凹人並與氣室相連通之吹 風孔,以及-設於氣室和吹氣孔交界位置的隔板。其中, 該隔板是由多孔材料所製成。 …j新型之另—目的在於提供—種能夠使工作物件平整 fe浮著而不發生垂墜之氣浮裝置。 —疋本新型之氣浮裝置包含-平台以及-正壓供應單 兀。該平台具有一本體、一形成於該本體中的氣室、多數 個自本體上表面凹陷而與氣室連通的吹氣孔,及一位在氣 室和吹氣孔交界處之隔板。該隔板是由多孔材料所製成, 因此田正塵供應單元將正壓空氣送入氣室内,正麼空氣必 須通過隔板之間隙而形成穩定氣流後自吹氣孔離開。 【實施方式】 M288004 p有i本新型之前述及其他技術内容、特點與功效,在 、' —s苓考圖式之兩個較佳實施例的詳細說明中,將可 清楚的呈現。 1圖2 3本新型氣浮裝置之一較佳實施例適用於搭 :取像裝"電荷耦合裝置,CCD)以檢測一片彩色滤光 D。6的色不均現象。該氣浮裝置包含—平台3、-正壓供應 …(顯示於圖3)’以及—驅動單元5。 其中’ _平台3具有—本體31 —形成於該本體31内 的氣室32、多數個吹氣孔33,以及-隔板34。該本體31 ^為矩形板狀,且錢孔33是自本體31的上表面往氣室 32方向凹陷形成’各吹氣孔33間形成一定距離的間距,並 與該氣室32相互連通。 該隔板34是設置在氣室32與吹氣孔^間的交界位置 處’並係選自於毛細纖維,或者是陶£、金屬粉末其中一 者所燒結製成,本實施例於圖式中係以毛細纖維材料製成 的隔板34為例說明’透過毛細纖維具有極細微的空隙,對 通過隔板34的空氣產生均勻阻隔效果,惟其他具有多孔特 性的材質亦屬本新型可應用的範嘴内,而不受本實施例所 限。 ’且與該氣室32連通’藉以將正壓空氣不斷送入該 内。 / ” 該驅動單元5具有-動力源51、兩㈣稱地分別設於 該平台3之長向兩側的導引件52,以及一自該平台本體μ 該正壓供應單元4是一種可持續提供正塵空氣的機構 室32 M288004 =二广引件52底部的連動板53。本實施例中係採用-龍馬達作為動力源51,並透過一受該動力源51驅動 桿54旋轉’使連動板53沿著螺桿54位移進而驅動導引件 =!二3兩側同向移動。以水平高度為基準,各該導 引件疋略咼於該平台本體31之上表面。 Θ放2 4所不,母—個導引件52包括—供彩色遽光片6 ,、之矩形本體55,及多數個分別由本體55表面凹入 的吸氣孔56,所有吸氣孔56均與-抽氣裝置(圖未示)連通 〇 2 4所示進行作業時,該彩色滤光片6的兩側係被 :、引件52上,隨著抽氣裝置啟動,原本存在於彩色 濾光片6與導引件52之間的空氣被抽離,使得彩 6被緊密地吸附在該導引件52頂部,確保彩色濾^ 6的 兩側受到穩定支撐。 隨後,該動力源51驅使導引件52沿著平台3兩側開 =移動’此時該正壓供應單元4開始將正壓空氣送進 §亥虱:32内,正壓空氣透過隔板34的空隙進入各吹氣孔 33’最後離開該平台而所有正壓空氣自彩色濾光片6的 下方朝向彩色渡光片6吹送,形成由下往上的撐持效果, 且吹氣孔33間形成預定間距,令該彩色濾光片6上的各位 置可以文到正壓空氣平均支撐,而不至於發生垂墜。 在正壓空乳自氣室32進入吹氣孔33前,必須先通過 該隔板34’由於該隔板34是由毛細纖維材料製成,其結構 中形成極微小且均勻的縫隙’致使正壓空氣通過隔板Μ時 M288004 ’因微透氣性會產生一定風 作鞏ί亦” 〇 DpUhu積吹氣 忭菜(亦即衫色濾光月6的表面藉妒士、陳士 u 的表面積車乂大),壓力也不容易集中 /濾先片6的某點,彩色遽光片6 正壓空氣樓托在平台3上方。 ”占都此被 此外,本新型更利用設置在平台3兩側的導引件^册 領丄配合導引件52可牢靠地吸附住彩色遽光片6,使得整 個¥色4光片6從側邊到中央部份的任何_處,維持 整的狀態下,因而受至,丨後壯@ n U而又到取像叙置丨進行檢測作業,而不合The broader goal is to develop, so the display area of the panel must be relatively large to provide products that meet consumer demand. ...but because the size of the panel is getting bigger and bigger, the manufacturing and assembly difficulty is bound to be the same. In the case of the color-changing sheet, the weight of the glass substrate is extremely heavy, and the single: manual handling or grouping has been quite difficult. It is more difficult to move the color calender to the underside of the image taking device for mobile detection. On the other hand, printed circuit boards (ie, PCB boards) are also used because of various electrical appliances. Under the premise of mass production, the detection of pcB board has become an extremely important issue. In view of this, air flotation technology that supports the support of such a large-area substrate by the principle of positive pressure blowing has been developed on the market, and the air flotation device 8' shown in Fig. 具有 has _ 纟 纟 81, and most of them are respectively The platform 8 is top-mounted with a blowhole 82, and a plenum formed inside the platform 81. The air chamber 83 and all the air blowing holes 82 communicate with each other to generate a gas separation effect, and the positive pressure gas is sent into the gas chamber 83, and finally, the respective air blowing holes 82 are sent out to support the working object 9 suspended on the top of the flat file 81. The action is such that the work item 9 does not hang down. M288004 Although the gas chamber 83 plays a gas-distributing role in the entire air-floating k-fishing & r pre-linger 8, the moon b is enough to make the positive pressure gas relatively flat and is also separated from the blow hole 82, but is used in the air. However, it was found that each of the oxygen blowing and the human orifice 82 has a different distance from the intake position, resulting in the blowing hole 82 being out and the earth force not being the same, that is, the work; the pressure under the object 9 is unevenly generated. The unstable air-floating state leads to the inability of the milk to reach the full support for the purpose of setting 8. The situation is lower than that of the color-cutting sheet. In severe cases, the operation or detection (...a) will be invalid, which will greatly affect the quality. Stability. [New content] Therefore, the purpose of the novel is that the flat τ ^ Ρ provides a gas floating platform in the United States that can generate micro-wind resistance to make the rolling output more stable. Yu Yu, the novel air floating platform has a body, a gas chamber formed on the body I, a plurality of air blowing holes which are recessed by the upper surface of the body and communicate with the air chamber, and are disposed at the junction of the air chamber and the air blowing hole The partition of the location. Wherein the separator is made of a porous material. ...j new type - the purpose is to provide an air flotation device that can make the work object flat and fe float without falling. —The new air flotation device of this type consists of a platform and a positive pressure supply unit. The platform has a body, a gas chamber formed in the body, a plurality of air blowing holes recessed from the upper surface of the body to communicate with the air chamber, and a partition at the interface between the air chamber and the air blowing hole. The partition is made of a porous material, so the Tianzheng dust supply unit sends positive pressure air into the air chamber, and the air must pass through the gap of the partition to form a stable air flow and then leave the air blow hole. [Embodiment] M288004 p has the foregoing and other technical contents, features and effects of the present invention, and will be clearly shown in the detailed description of the two preferred embodiments of the drawings. 1 Figure 2 3 A preferred embodiment of the novel air flotation device is suitable for: taking an image loading device "charge coupled device, CCD) to detect a color filter D. 6 color unevenness. The air flotation device comprises a platform 3, a positive pressure supply ... (shown in Figure 3) and a drive unit 5. Wherein the 'stage 3 has a body 31 — a gas chamber 32 formed in the body 31 , a plurality of blow holes 33 , and a partition plate 34 . The body 31 is rectangular plate-shaped, and the money hole 33 is recessed from the upper surface of the body 31 toward the air chamber 32 to form a distance between the respective air blowing holes 33, and communicates with the air chamber 32. The partition plate 34 is disposed at the boundary between the air chamber 32 and the air blowing hole and is selected from the group consisting of capillary fibers, or one of the ceramic powder and the metal powder. The embodiment is in the drawings. The separator 34 made of a capillary fiber material is taken as an example to illustrate that the fine fibers passing through the capillary fibers have a uniform barrier effect on the air passing through the separator 34, but other materials having porous properties are also applicable to the present invention. It is within the scope of the mouth, and is not limited by this embodiment. And communicating with the plenum 32 to continuously feed positive pressure air therein. The drive unit 5 has a power source 51, two (four) scales respectively disposed on the long sides of the platform 3, and a guide member 52 from the platform body. The positive pressure supply unit 4 is a sustainable The mechanism chamber 32 that provides the dusty air is the interlocking plate 53 at the bottom of the second wide guide 52. In this embodiment, the -long motor is used as the power source 51, and the rod 54 is rotated by the power source 51 to make the linkage The plate 53 is displaced along the screw 54 to drive the guide members to move in the same direction on both sides. The guide members are slightly offset from the upper surface of the platform body 31 based on the horizontal height. No, the mother guide member 52 includes a rectangular body 55 for the color light guide sheet 6, and a plurality of suction holes 56 respectively recessed by the surface of the body 55, and all the air suction holes 56 are - pumped When the device (not shown) is connected to the operation shown in FIG. 24, the two sides of the color filter 6 are: on the lead 52, and the original filter is present on the color filter 6 as the air suction device is activated. The air between the guiding members 52 is pulled away, so that the color 6 is closely adsorbed on the top of the guiding member 52, ensuring two of the color filters 6 The side is stably supported. Subsequently, the power source 51 drives the guide 52 to open along both sides of the platform 3 = then the positive pressure supply unit 4 starts to send positive pressure air into the § 虱: 32, positive pressure The air passes through the gap of the partition plate 34 into the respective air blowing holes 33' and finally leaves the platform, and all the positive pressure air is blown from the lower side of the color filter 6 toward the color light-passing sheet 6, forming a bottom-up supporting effect, and blowing holes. The predetermined distance between the 33 colors is such that the positions on the color filter 6 can be evenly supported by the positive air without sag. Before the positive pressure air is admitted to the air blowing hole 33 from the air chamber 32, it must first Through the partition 34', since the partition 34 is made of a capillary fiber material, a very small and uniform gap is formed in the structure, so that when the positive pressure air passes through the partition, the M288004' generates a certain wind due to the micro-breathability. Gong Li also" 〇 DpUhu accumulates a la carte (that is, the surface of the shirt color filter 6 is borrowed by the gentleman, Chen Shiu's surface area is large), the pressure is not easy to concentrate / filter a certain point of the film 6, Color calender 6 Positive pressure air support is above the platform 3. In addition, the present invention further utilizes the guide members disposed on both sides of the platform 3, and the collar-engaging guide member 52 can firmly hold the color calender sheet 6, so that the entire ¥4 light sheet 6 is From the side to the central part of any _, maintain the whole state, and thus received, and then sturdy @ n U and then take the image to detect the operation, regardless of

如習知氣浮裝置8所承載的工作物件9般凹凸不平,甚I 是局部陷落的狀況,令工作物件6保持在齊平態樣,因此 在工作物件6上所進行的任何作業都能被正確執行,徹底 改善偏差或者良率偏低的問題,提高卫作物件的品質。 參閱圖5所示為本新型之另—較佳實施例,盥前一實 施例不同的地方在於’本實施例中的導引# Μ並不具有吸 附功能,取而代之’該彩色據光片6,是被夾置於兩個導引 件72之間(因圖式角度關係,圖5中僅能見到單_導引件 72)。 必須注意的是,導引件72與平台3同方向地傾斜一個 角度,藉由傾斜角度的設計,也就是說,該彩色濾光片6, 在受到導引件72限制下’僅能依順著導引件72斜向移動 ,配合平”2亦為傾斜樣’在彩色渡光“,移動過程中, 所有吹氣孔33仍不斷地送出正壓空氣,破保彩色濾光“, 保持平整而不陷落。 歸納上述,本新型之氣浮梦罢少、、, 予戒置在运出正壓氣體前,必 M288004 須先通過隔板34,利用隔板34具有微小間隙的特色,使得 运出乳體更為平均地撐持整個彩色濾光片6或6,,使得彩 色濾、光片6、6症夠以更為齊平的狀態受到作業處理或檢測 配合導引件52、72自兩側樓起彩色濾光片6、6,,確保 彩色濾、光片6、6,齊平地被加工,大幅改善晃動或不平整的 缺點’提π生產品質,進而達到本新型訴求之目的。 隹、上所述者,僅為本新型之較佳實施例而已,當不 月b以此限定本新细眚綠 网 ^ K ^之耗圍,即大凡依本新型申請專利 範圍及新型說明内交%从 % 円合所作之間早的4效變化與修飾,皆仍 屬本新型專利涵蓋之範圍内。 【圖式簡單說明】 圖1是曰-種習知氣浮裝置中,—平台的局部剖視圖; Β 7^本新型氣汙裝置之一較佳實施例的一立體組合 圖; ^疋。亥車乂,土貫方也例的一局部剖視圖,說明正壓空氣 通過一隔板後被送出; :4是不同於圖3視角之另一局部剖視圖,說明一彩 到正㈣由下方支:及附'位’且其他部分則受 用狀:二二本新型氣浮裝置之另—較佳實施例的-局部使 用狀恶剖視圖。 10 M288004 【主要元件符號說明】 1 取像裝置 51 動力源 3 平台 52 導引件 31 本體 53 連動板 32 氣室 54 螺桿 33 吹氣孔 55 本體 34 隔板 56 吸氣孔 4 正壓供應單元 6、6, · 彩色濾、光片 5 驅動單元 72· · · 導引件As is known, the working object 9 carried by the air flotation device 8 is rugged, and even I is partially collapsed, so that the work object 6 is kept in a flush state, so any work performed on the work object 6 can be Properly implement, thoroughly improve the problem of deviation or low yield, and improve the quality of the crop parts. Referring to FIG. 5, another preferred embodiment of the present invention is different from the previous embodiment. In the present embodiment, the guide # Μ does not have an adsorption function, and instead the color light film 6 is replaced. It is sandwiched between the two guide members 72 (only the single guide member 72 can be seen in Fig. 5 due to the angle relationship of the drawings). It should be noted that the guiding member 72 is inclined at an angle with the platform 3 in the same direction, and the design of the tilting angle, that is, the color filter 6, can only be controlled by the guiding member 72. The guiding member 72 is moved obliquely, and the flat "2 is also inclined" in the color of the light. During the moving process, all the blowing holes 33 continuously send positive pressure air to break the color filter ", and keep it flat. In the above, the new type of air-floating dream is less, and, before the positive pressure gas is delivered, M288004 must first pass through the partition 34, and the partition 34 has the characteristics of a small gap, so that it is shipped out. The milk body supports the entire color filter 6 or 6 more evenly, so that the color filter, the light film 6, 6 can be processed in a more flush state or the fitting guide members 52, 72 are detected from both sides. The color filters 6 and 6 are installed from the floor to ensure that the color filters and the light sheets 6, 6 are processed in a flush manner, which greatly improves the shortcomings of swaying or unevenness, and the quality of the production is improved, thereby achieving the purpose of the novel. The above is only the preferred embodiment of the present invention. When the month b is used to limit the consumption of the new fine green network ^ K ^, that is, according to the new patent application scope and the new description, the internal 4% change and modification between the % and the It is still within the scope of this new patent. [Simplified illustration of the drawings] Fig. 1 is a partial cross-sectional view of a platform of a conventional air flotation device; Β 7^ A preferred embodiment of the novel gas smear device A three-dimensional combination diagram; ^疋.Hai 乂, a partial cross-sectional view of the soil, also shows that positive pressure air is sent through a partition; 4 is another partial cross-sectional view different from the perspective of Figure 3, illustrating a Color to positive (4) from the lower branch: and attached 'bit' and other parts are used: two or two new air flotation devices - another preferred embodiment - partial use of the evil cross-sectional view. 10 M288004 [Main component symbol description] 1 Image capture device 51 Power source 3 Platform 52 Guide member 31 Body 53 Linkage plate 32 Air chamber 54 Screw 33 Blowhole 55 Body 34 Separator 56 Suction hole 4 Positive pressure supply unit 6, 6, · Color filter, light film 5 drive unit 72· · · guide

1111

Claims (1)

M288004 孔材料係由陶瓷燒結而成。 9.依據申請專利範圍第5項所述之氣浮裝置,更包含一驅 動單元,該驅動單元具有一動力源,及至少一总 、 叉5亥動力 源所驅動而帶動該工作物件在該平台上移動之導引件 10·依據申請專利範圍第9項所述之氣浮裝置,1 ϋ 且 共甲,該導 引件具有一沿著該平台本體一側設置並高於該本體上表 面以供該工作物件擺放的本體,以及多數間隔形成於該 本體頂面之吸氣孔,透過吸氣孔抽引空氣而令該工作物 件被定位在該導引件上。 11.依據申請專利範圍第5項所述之氣浮裝置,更包含兩個 分別、/α著5玄平台本體兩側設置的導引件,該工作物件被 夾設於該二導引件間,又該平台與導引件為同向傾斜設 置,使該工作物件在導引件引領下傾斜地在該平台上懸 浮移動。M288004 Hole material is sintered from ceramic. 9. The air flotation device according to claim 5, further comprising a driving unit, the driving unit having a power source, and at least one main, fork 5 power source driven to drive the working object on the platform The upwardly moving guide member 10 is the air flotation device according to claim 9 of the invention, wherein the guide member has a side disposed along a side of the platform body and higher than the upper surface of the body. A body for the work object, and a plurality of air suction holes formed at a top surface of the body, the air is drawn through the air suction hole to position the work object on the guide member. 11. The air flotation device according to claim 5, further comprising two guiding members respectively disposed on both sides of the body, and the working object is sandwiched between the two guiding members. And the platform and the guiding member are inclined in the same direction, so that the working object is suspended and moved on the platform obliquely under the guiding of the guiding member. 1313
TW94218061U 2005-10-19 2005-10-19 Air-float platform and air-float apparatus having the same TWM288004U (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399332B (en) * 2009-11-30 2013-06-21
TWI472767B (en) * 2014-01-22 2015-02-11 Utechzone Co Ltd Detection device
CN109696437A (en) * 2017-10-23 2019-04-30 由田新技股份有限公司 A kind of apparatus for leveling and its method of semiconductor tablet
CN112681018A (en) * 2019-10-17 2021-04-20 兴中环保科技股份有限公司 Forming platform shunting device
CN113108715A (en) * 2021-04-13 2021-07-13 南京中安半导体设备有限责任公司 Suspended matter measuring device and air floatation chuck
TWI759903B (en) * 2019-12-20 2022-04-01 由田新技股份有限公司 A conveying apparatus with an abutted wheel and optical inspection apparatus
CN115199933A (en) * 2022-07-07 2022-10-18 西安热工研究院有限公司 Air storage chamber and gravity compressed air energy storage system based on flexible air guide

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI399332B (en) * 2009-11-30 2013-06-21
TWI472767B (en) * 2014-01-22 2015-02-11 Utechzone Co Ltd Detection device
CN109696437A (en) * 2017-10-23 2019-04-30 由田新技股份有限公司 A kind of apparatus for leveling and its method of semiconductor tablet
CN109696437B (en) * 2017-10-23 2021-07-20 由田新技股份有限公司 Leveling device and method for semiconductor material sheet
CN112681018A (en) * 2019-10-17 2021-04-20 兴中环保科技股份有限公司 Forming platform shunting device
TWI759903B (en) * 2019-12-20 2022-04-01 由田新技股份有限公司 A conveying apparatus with an abutted wheel and optical inspection apparatus
CN113108715A (en) * 2021-04-13 2021-07-13 南京中安半导体设备有限责任公司 Suspended matter measuring device and air floatation chuck
CN113108715B (en) * 2021-04-13 2024-01-23 南京中安半导体设备有限责任公司 Suspension measuring device and air floating chuck
CN115199933A (en) * 2022-07-07 2022-10-18 西安热工研究院有限公司 Air storage chamber and gravity compressed air energy storage system based on flexible air guide
CN115199933B (en) * 2022-07-07 2024-04-02 西安热工研究院有限公司 Air storage chamber based on flexible air guide and gravity compressed air energy storage system

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