TWM286990U - Electron emission apparatus using carbon nanotube and charging device - Google Patents

Electron emission apparatus using carbon nanotube and charging device Download PDF

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Publication number
TWM286990U
TWM286990U TW94212961U TW94212961U TWM286990U TW M286990 U TWM286990 U TW M286990U TW 94212961 U TW94212961 U TW 94212961U TW 94212961 U TW94212961 U TW 94212961U TW M286990 U TWM286990 U TW M286990U
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Taiwan
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electrode
carbon nanotube
electron emission
emitter electrode
emission device
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TW94212961U
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Chinese (zh)
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Chen-Yuan Liu
Sheng-Yi Lo
Chin-Chung Lin
Chung-Han Yu
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Chen-Yuan Liu
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M286990 八、新型說明: 【新型所屬之技術領域】 本創作係有__有電子放射元件之發光元件、肖2次元排 列電子放射元件之電觀射狀電子放概置,以及使用該電子 放射裝置之帶電裝置。 【先前技術】 • &之奈米*官係具有石墨狀之碳素原子1個或數個至數拾個 成圓筒狀排列之纖維形狀構造,其直徑極小至奈米層級,而轴方 向的大小(奈米碳管的長度)則甚至達到_層級,非常具有縱橫比 (長度/直徑比)之材料。而且奈米碳管的侧面因只由碳素原子的 SP2混合執道所構成’故具有化學上的安定性,並具備與半導體類 似之電氣雜。尤其是奈米碳管的前端,具有奈米層級之半球狀 之直徑’因施加電壓而易於獲得集束電場,而能實現以低電壓進 %行電場放射。例如删2騰公報所揭示,在陽極氧化膜中的細 孔中形成奈米碳管(參閱第3圖),能實現高密度化之奈米碳管, 並且藉由設置引出電極於細孔的開σ部位,則能有效率地自奈米 碳管引導電子至細孔的外部。另外,如Ju腦34ρ公報所揭示, 藉由設置障壁層來圍繞導電性表面與奈米碳管的結合部(參閱第4 圖)’則能提昇奈米碳管的配向性、並達麟子放射元件的高效率 化0 然而,在上述之Jll—194134Ρ公報所揭示之技術,係完全在高 M286990 ··真空中施行電場放射,而有關在低真空中或大氣中的電場動作則 =無記載。-般而言,來自奈米韻的電場放射,會因環境氣息 中的氧或水份轉致奈米碳管前_劣化,且在低衫中或大氣 中作動時’電子放射元件所獲得的電流會下降1且,在大氣中 對於流通於1條奈米碳管的電流超過1〇A時則下降,而一旦電壓 值下降’則此後即無法再次拉昇,此即所謂的劣化現象。 —如此使用有奈米石反官之影像形成裝置上的流通於工條奈米碳 • 糾電流’岐重要的問題點。雖然曾考量加大奈米碳管的密度, 以解決1條單位之奈米碳管之電流下降的問題,但即使採用最適 合於奈米碳管之高密度化的化學氣態成長法⑽法),亦不能備 齊全部奈米碳管的放射初始雜,㈣放射擔電駿小,則流 通於奈米碳管的電流即變大,幾乎是難以完全抑制奈米碳管的劣 化。 【新型内容】 • 本案創作人有鑑於此,乃費盡心思加以研究創新,而揭示出本創作 新穎之奈米碳管之電子放射裝置及帶電裝置。 因此,本創作之第-目的,係提供一使用有奈米碳管之電子放射 元件中,即使在大氣中亦無元件劣化、低電壓且安定之電子放射裝置 及帶電裝置。本創作之第二目的,係彻奈米碳管之電子放射元件作 為帶電裝置’以提供即使在大氣巾安定、低輕動作且產生較少之臭 氧或NOx之電子放射裝置及帶電裝置。 為達成上述之第一目的,本創作係具備: M286990 ; 狀體,其係由石英、玻璃、陶究、金屬、縣板等構成; 射極電極,其係藉由將金屬或合金成膜於前述固定體的一單面上 而形成; 複數之陽極氧倾,其_⑽賴隔設置於觀射極電極上的 複數氧化_,在硫酸、過贿雜陽極化處理而形成; 、細孔,其係戦於前述複數陽極氧賴之各陽極氧倾之間,且 在前述射極電極與相反侧具有開口部位;M286990 VIII. New description: [New technical field] This creation system has __ illuminating elements with electron emitting elements, electrical observation devices for oscillating 2 dimensionally arranged electronic radiating elements, and using the electron emitting device The charging device. [Prior Art] • The nanometer system of & has a fiber-like structure in which one or several carbon atoms of a graphite-like shape are arranged in a cylindrical shape, and the diameter thereof is extremely small to the nanometer level, and the axial direction The size (the length of the carbon nanotubes) is even at the _ level, very material with an aspect ratio (length/diameter ratio). Further, since the side surface of the carbon nanotube is composed of only SP2 mixed by carbon atoms, it has chemical stability and is electrically mixed with a semiconductor. In particular, the tip end of the carbon nanotube has a hemispherical diameter of a nanometer level. It is easy to obtain a beam electric field by applying a voltage, and it is possible to perform electric field emission at a low voltage. For example, in the pores of the anodized film, a carbon nanotube is formed in the pores of the anodized film (see FIG. 3), and a carbon nanotube having a high density can be realized, and the electrode is provided in the pore by providing the electrode. When the σ portion is opened, electrons can be efficiently guided from the carbon nanotubes to the outside of the pores. In addition, as disclosed in the Ju Brain 34p publication, by providing a barrier layer to surround the junction of the conductive surface and the carbon nanotube (see Fig. 4), the alignment of the carbon nanotubes can be enhanced, and the lining of the carbon nanotubes can be improved. The efficiency of the radiating element is increased. However, in the technique disclosed in the above-mentioned J11-194134Ρ, the electric field radiation is completely performed in a high M286990 vacuum, and the electric field operation in a low vacuum or in the atmosphere = no description . In general, the electric field emission from the nano-rhythm is obtained by the electron emission element when the oxygen or water in the ambient atmosphere is transferred to the front of the carbon nanotubes and is degraded in the low-shirt or in the atmosphere. The current drops by one and falls in the atmosphere when the current flowing through one carbon nanotube exceeds 1 〇A, and once the voltage value drops, it cannot be pulled up again, which is a so-called deterioration phenomenon. - The use of nanowires on the image forming apparatus of the nanometer stone is used to solve the problem of the problem. Although the density of the carbon nanotubes has been increased to solve the problem of the current drop of one unit of carbon nanotubes, even the chemical gas growth method (10) which is most suitable for the high density of carbon nanotubes is used. It is also impossible to prepare a complete initial emission of the carbon nanotubes. (4) When the radiation power is small, the current flowing through the carbon nanotubes becomes large, and it is almost impossible to completely suppress the deterioration of the carbon nanotubes. [New Content] • In view of this, the creators of this case have tried their best to research and innovate, and revealed the novel electronic emission devices and charging devices of the carbon nanotubes. Therefore, the first object of the present invention is to provide an electron emission device and a charging device which are stable in a low voltage and stable in an electronic radiation element using a carbon nanotube, even in the atmosphere. The second object of the present invention is to provide an electron-emitting device of a carbon nanotube as a charging device' to provide an electron-emitting device and a charging device which are stable in operation and low in light, and which generate less ozone or NOx. In order to achieve the above first objective, the creation department has: M286990; a body composed of quartz, glass, ceramics, metal, county plate, etc.; an emitter electrode, which is formed by forming a metal or an alloy into a film. Forming a single surface of the fixed body; a plurality of anodes are oxidized by oxygen, and _(10) is formed by a plurality of oxidations disposed on the electrode of the emitter electrode, formed by anodizing in sulfuric acid or brittle; and pores, It is between the anodes of the plurality of anodes and the anodes, and has an opening portion on the opposite side of the emitter electrode;

奈米碳管,其係設置於前述細孔内 極,並用以放射電子;以及 且底面為接觸於前述射極電 引出電極,其係覆蓋前述細孔之開口部位; 前述引出電 前述奈米碳管係被前述射極電極、前述陽極氧化膜 極所圍繞。 ' 此外為達成上述之第一目的,來自前述奈米碳管之電場放射之 電子,係貫通前述引出電極而放射至外部。 此外,為達成上述之第一目的,前述引出電極係以Au (金)、Pt (鉑)、Pd (钯)等貴金屬或其合金所形成。 此外,為達成上述之第-目的,係將上述之複數個電子放射 分割成特定數目之區塊,並具轉職各區塊_各電子' 置之前述射極電極之驅動元件。 為達成上述之第二目的,本創作係使用上述之電子放射 電裝置。 ▼ M286990 【實施方式】 本創作之技術思想,可由以下之說明及各圖式而得以明瞭。參閱第 1圖至第4圖以說明本創作之實施例。 (實施例1) 第1圖係本創作之第1實施例之電子放射裝置之示意圖。裝載有電 子放射元件之電子放射裝置,奈米碳管1()係固定於陽極氧化膜u的 細孔中,奈米碳管10的一端係連接於固定體13上的射極電極12,並 為可施加負電壓之構造。而且,陽極氧化膜u的細孔係為引出電極 14所覆蓋。#施加電場於電子放射裝置之射極電極12與引出電極w 之間時’在奈米碳管10的前端即被施以負的高電場,而自奈米碳管 10的前端因電場效應而放射電子。經放射電子係藉由覆蓋開口的引出 電極14的引導’貫通引出電極14而導向電子放職置的外部。 本實施例之構成巾,奈米碳管1G係猶極氧倾u與㈣電極Μ 及射極電極12所完全醜之構造,故奈米碳㈣和外界空氣士入^ 離。因此,陽極氧化膜U與引咖U及射極電極12所圍繞之:; 亦即藉由自細⑽⑽去除祕奈麵f — 措施,即罐綱㈣输卿啸 實施例之電子放職置’映麵真_、、_或根^ 米碳管丨〇亦能和外界空氣完全_,故電場放射時之夺奸二 劣長細_啦_,物 固定 繼之,朗本實關之電子放魏置之作纽各構成的構件 M286990 體13:性、導雜、半導_料均可,例如可使 =究二屬、雜板等。在該_13上以真空蒸鍍、濺鍍法 屬或樹喊膜峨射極電極U。亦可伽η、他、仏、此士 柯里其w域製程的簡易化即可。其後,在射極電邮上以真 空蒸鍍、_法而形成氧化_,並在硫酸、過鹽酸、咖忉 將氧健膜施以陽極氧化處理,而作成陽極氧化膜η和陽極氧化膜中 的細孔。 、 純之深度係可作成卜•時度,若考量在細孔中形成奈米碳管 1〇,則細孔的直徑係作成·nm以下為佳,當細孔的直徑過大,則難 以職優質的奈米碳管1G。又,以氧化銘膜作為射極電極12時:亦 物極祕將祕_表面施以陽極氧化處㈣形成細孔,而以未陽 極氧化的部份作為射極電極12。使用氧化紹作為固定體η時,則益 須成麟射極電極12,只要直接陽極氧倾定體13的氧她的一部 份而形成細孔,並以榻極氧化固定體13的部份作為射極電極 可0 在形祕極氧賴u和陽極氧化财的細孔之後,形成奈米碳管 1〇於細孔中。奈米碳管10有單層奈米碳管和多層奈米碳管 =管係直徑G.7〜5咖程度、長们—而多層奈米碳管^ 徑H程度、長度5nm〜lmm。㈣合成的尺寸係直徑㈣⑽程产、 長度-社。料、錢奈祕管其縱觀均具有杨之纖轉 大。本實施例之奈米碳管1G係不限定於前述之尺寸範圍,只要直徑 滿l//m之奈米碳管即可。 卫 M286990 10nm以下的膜厚則更實用 故以難以氧化之金屬為佳 之,則具有其信賴性。 '由於引出電極14和外部空氣直接接觸, 例如’Au,、IM等金屬或其合金以構成 又,狀電子放射裝置中,當外界氣體壓力和陽極氧化膜 η、引出電極14、射極電極12所圍繞的區域之壓力差過大時乳: 於引出電極14上的應力即變大,_丨出電極14劣化之原因 免此情形,在高真空狀態使財實施狀電子放射裝科,則陽極氧 化膜1ΗΙ出電極14、射極 12所圍繞的區域亦必須保持於高真 空狀悲。據此’即能去除細孔内部之易使奈米碳管1〇產生劣化的氣 體。因此製作如此之構成時,得自陽極氧化膜^中的細孔之傾斜方 向,以真空蒸鍍而形成引出電極14,並覆蓋細孔的開口。例如細孔的 直徑只要控制在謂顔以下’即可因Au的傾斜蒸鍍而覆蓋細孔的開口。 當引出電極14的膜厚過厚時,在真空紐之後,施以祕刻或化學 機械研磨,使引出電極14 _化即可。在健或大氣麼下使用本實施 %例之電子放射裝置時,在細孔内部並不會使奈米碳管1〇產生劣化,或 則可充填不易使其劣化之例如He、Ar等氣體’且該氣壓得與外界壓力 相等。此情形時,在陽極氧化膜11中的細孔中形成奈米碳管1〇之後 可在上述之氣壓氣息壞境下添接預先作成之Au、Pt、Pci等之貴金屬或 其合金之薄膜於陽極氧化膜11上,並藉由化學機械研磨等而使貴金屬 或其合金之薄膜達成薄膜化而作成引出電極14。 在第1圖中’雖在奈米碳管10與陽極氧化膜11中各顯示3個細孔, 但並不限定如此,本實施例之電子放射裝置,其奈米碳管1〇與陽極氧 12 M286990 _ 細孔為1個或複數均可。此外,即使奈米碳管_交細 但亦具有電子放射裝置之機能,故奈米碳㈣與陽極氧化 =中之細孔之數目可㈣設置。以上述之綠,例如將電子放射裝 成固疋體13為石英基板(尺寸3xl〇mra)、射極電極12為Ta膜厚 H陽極氧化膜U為膜厚丨,細孔平均直徑.、奈米碳管 為平均直徑37nm之多層奈米碳管(Fe觸媒和⑽氣體製作)、平均 長度〇. 之引出電極14為Au膜厚7nm之電子放射裝置。a carbon nanotube disposed in the inner pole of the pore and configured to emit electrons; and a bottom surface contacting the emitter electrode of the emitter, covering an opening portion of the pore; the aforesaid extraction of the nanocarbon The tube system is surrounded by the emitter electrode and the anodized film electrode. Further, in order to achieve the above first object, electrons emitted from the electric field of the carbon nanotube are radiated to the outside through the extraction electrode. Further, in order to achieve the above first object, the extraction electrode is formed of a noble metal such as Au (gold), Pt (platinum) or Pd (palladium) or an alloy thereof. Further, in order to achieve the above-mentioned first object, the plurality of electron beams are divided into a plurality of blocks, and the drive elements of the emitter electrodes are transferred to the respective blocks. In order to achieve the second object described above, the present invention uses the above-described electronic radiation device. ▼ M286990 [Embodiment] The technical idea of this creation can be explained by the following description and each drawing. Reference is made to Figures 1 through 4 to illustrate an embodiment of the present creation. (Embodiment 1) Fig. 1 is a schematic view showing an electron emission device of a first embodiment of the present invention. An electron emission device equipped with an electron emitting element, wherein a carbon nanotube 1 () is fixed in a pore of the anodized film u, and one end of the carbon nanotube 10 is connected to the emitter electrode 12 on the fixed body 13, and It is a structure that can apply a negative voltage. Further, the pores of the anodized film u are covered by the extraction electrode 14. #When an electric field is applied between the emitter electrode 12 of the electron emission device and the extraction electrode w, a negative high electric field is applied to the front end of the carbon nanotube 10, and the front end of the carbon nanotube 10 is affected by the electric field effect. Radioactivity. The radioactive electrons are guided to the outside of the electronic discharge by the guide of the lead-out electrode 14 covering the opening through the lead-out electrode 14. In the constitutional towel of the present embodiment, the carbon nanotube 1G is a structure in which the sulphide oxygen and the (four) electrode Μ and the emitter electrode 12 are completely ugly, so that the carbon (four) and the outside air are separated. Therefore, the anodized film U and the enveloping electrode U and the emitter electrode 12 are surrounded by:; that is, by removing the secret layer f--measure from the thin (10) (10), that is, the tank type (four) loses the electronic release of the embodiment of the whistling ' The mirror y, _, _ or root ^ m carbon tube 丨〇 can also be completely _ with the outside air, so the electric field is irritating when the second _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The component of the M286990 body of the Weijian is made up of: the sex, the miscellaneous, the semi-conductive material, for example, the second genus, the miscellaneous board, and the like. On this _13, the emitter electrode U was vacuum-deposited, sputtered, or shredded. It is also possible to simplify the process of gamma, he, 仏, and this creek. Thereafter, an oxidation _ is formed by vacuum evaporation on the emitter email, and the oxygen membrane is anodized in sulfuric acid, hydrochloric acid, and curry to form an anodized film η and an anodized film. The pores in the middle. The pure depth system can be used as the time and time. If the carbon nanotubes are formed in the pores, the diameter of the pores is preferably less than or equal to nm. When the diameter of the pores is too large, it is difficult to work. Nano carbon tube 1G. Further, when the oxidized film is used as the emitter electrode 12, the surface is anodized (4) to form pores, and the portion where anodic oxidation is used is used as the emitter electrode 12. When the oxidized slag is used as the fixed body η, it is necessary to form the erbium emitter electrode 12, as long as a part of the oxygen of the anodic oxygen depressing body 13 is directly formed, and the part of the oxidized fixed body 13 is used as the The emitter electrode can form a carbon nanotube 1 in the pores after the pores of the polar oxygen and the anodized. The carbon nanotube 10 has a single-layer carbon nanotube and a multi-layered carbon nanotube. The diameter of the tube is G.7~5, and the length of the tube is as long as - and the thickness of the multilayer carbon nanotube is 0.5 nm to 1 mm. (4) The size of the synthetic system is (4) (10), and the length is -. The material and the secrets of Qiannai have their own appearance. The carbon nanotube 1G of the present embodiment is not limited to the above-mentioned size range, and may be a carbon nanotube having a diameter of 1/m or more. The M286990 has a film thickness of 10 nm or less, which is more practical. Therefore, it is preferable to use a metal that is difficult to oxidize. 'Because the extraction electrode 14 is in direct contact with the outside air, for example, a metal such as 'Au, IM, or an alloy thereof, to constitute a further electron emission device, when the external gas pressure and the anodized film η, the extraction electrode 14, and the emitter electrode 12 When the pressure difference between the surrounding regions is too large, the stress on the extraction electrode 14 becomes large, and the reason why the electrode 14 is deteriorated is free from this situation, and in the high vacuum state, the electronic radiation is mounted, and the anodization is performed. The area surrounded by the membrane 1 and the emitter 12 must also be maintained in a high vacuum. According to this, it is possible to remove the gas inside the pores which is liable to cause deterioration of the carbon nanotubes. Therefore, when such a configuration is made, the extraction electrode 14 is formed by vacuum deposition from the inclined direction of the pores in the anodized film, and the opening of the pores is covered. For example, if the diameter of the pores is controlled to be below the thickness, the opening of the pores may be covered by the oblique vapor deposition of Au. When the film thickness of the extraction electrode 14 is too thick, it is possible to apply the engraving or chemical mechanical polishing after the vacuum, so that the extraction electrode 14 can be formed. When the electron emission device of the present embodiment is used in a healthy atmosphere or the atmosphere, the carbon nanotubes are not deteriorated inside the pores, or the gas such as He or Ar which is not easily deteriorated can be filled. And the air pressure is equal to the external pressure. In this case, after the carbon nanotubes 1 are formed in the pores in the anodized film 11, a film of a noble metal such as Au, Pt, Pci or the like which is prepared in advance may be added under the above-mentioned atmospheric pressure atmosphere. On the anodized film 11, a thin film of a noble metal or an alloy thereof is thinned by chemical mechanical polishing or the like to form the extraction electrode 14. In Fig. 1, although three pores are shown in each of the carbon nanotube 10 and the anodized film 11, the present invention is not limited thereto. The electron emission device of the present embodiment has a carbon nanotube 1 and an anodic oxygen. 12 M286990 _ The pores are 1 or plural. In addition, even if the carbon nanotubes have a function of an electron emission device, the number of pores in the nanocarbon (4) and anodization = can be set (4). In the above green color, for example, the electron beam is fixed into the solid body 13 as a quartz substrate (size 3×10 μm), the emitter electrode 12 is a Ta film thickness H, the anodized film U is a film thickness 丨, and the average pore diameter is The carbon nanotubes are multi-layered carbon nanotubes (made of Fe catalyst and (10) gas) having an average diameter of 37 nm, and the extraction electrode 14 of the average length is an electron emission device having an Au film thickness of 7 nm.

又,_氧化膜U、射極電極12、引出電極Η所圍繞的區域’亦 ㈣孔之内部係以He氣體填充丨大氣壓力。該電子放射裝置置放於大 乱中,在射極電極12與引出電極14之間施加h贴、引出電極14與 接也間知加膽、距離電子放射裝置陶m處置放塗有榮光體的透 ^電極’並接地該翻電極’可確賤光體之發光及獲得胸A之電 机。由Μ上結果可確認本實關之電子放射裝置在大氣巾之良好作 動’而且在經4〇小時連續動作之後,f流值僅下降⑽,幾可確認具 有優異的安定性,_電流值的顶,可對奈米碳管施以高品質化而 改善。 (實施例2) 以下為說明實施例2。第2圖係表示搭載有第j實施例之電子放射 裝置之帶錄置之示意圖。第2實施例中,係將第1實施例所製作之 ,子放射裝置排列23個於垂直於紙面之方向,並—體成型其電路,而 襄成由錢子放射裝置所組成之帶電裝置。使該帶電裝置接近於感光 體而7感光體帶電。本實關所使狀感光體係有機絲體(OPC), 13 M286990 J具肴如下之構成。亦即,在鼓狀之A1基體上以圓鍍法而形成厚1〜5// m電洞注入阻止層,該電洞注入阻止層為散佈氧錕微粒子於膠合樹 脂,並由電荷產生層(CGL)與電荷輸送層(CTL)所積層之有機感光 層。 CGL係由散佈電荷產生材料(CGM)於丁醇樹脂、熱硬化型之變性丙 烯樹脂、苯酴樹脂等之膠合樹脂所組成,以磨鍍法形成厚度〇. 1〜 m°CGM則是具有波長740〜780nm之感度之任意帶有金屬屬性顏料,或 儀^波長635〜650nm之感度之多環氫系顏料等。CTL係由分散電洞之載體 材料於活化性聚乙樹脂等之膠合樹脂所組成,以磨鍍法形成厚度 10〜40//m 〇 本實施例雖以機能分離型之OPC為例而作說明,但並不限定於機能 分離型,單層型之OPC亦可。又本實施例雖為鼓型之〇pc,但並不限 定於此,可採用形成導電層於表面之帶狀體以取代A1基體,或條狀 OPC。此外,本實施例所使用之感光體並無限定於〇pc,負帶電體亦可, 錢I例如,a-Se或Se-Te系之無機感光體亦可。0PC之A1固定體係接地, 且以150nm/s之速度轉動。在距離〇pc之6〇//111處固定帶電裝置,並 施加1· 5Kv於帶電裝置之射極電極與引出電極間,施加5〇〇v於引出電 極與接地間,而自帶電裝置放射電子而使〇pc帶電。 opc的表面電位(帶電電位)則距離帶電裝置施m的位置,以表面 電位计進仃1測,並在帶電裝置的相反位置設置㈣以消除〇pc之電 荷,經測定之0PC之表面電位為備,完全在計劃界限之内 ,亦能依 據引出電極與接地間之電位而控制0PC的表面電位。又,以a4用紙之Further, the inside of the region surrounded by the oxidized film U, the emitter electrode 12, and the extraction electrode ’ is also filled with He gas at atmospheric pressure. The electron emission device is placed in a large chaos, and a h-pad is applied between the emitter electrode 12 and the extraction electrode 14. The extraction electrode 14 and the connection are also known to be fused, and the electron emission device is disposed of and coated with a glory. ^ Electrode 'and grounding the flip electrode' can confirm the illumination of the phosphor and obtain the motor of the chest A. From the results of the crucible, it can be confirmed that the electronic emission device of the actual control is in good operation in the air towel', and after continuous operation for 4 hours, the f flow value only drops (10), and it can be confirmed that it has excellent stability, _ current value The top can be improved by applying high quality to the carbon nanotubes. (Embodiment 2) Hereinafter, Embodiment 2 will be described. Fig. 2 is a view showing the tape recording on which the electron emission device of the jth embodiment is mounted. In the second embodiment, the sub-radiation devices are arranged in a direction perpendicular to the plane of the paper, and the circuits are formed in a body shape to form a charging device composed of a money emission device. The charging device is brought close to the photoreceptor and the photoreceptor is charged. The organic light body (OPC) of the sensitized photosensitive system of this real-time system, 13 M286990 J has the following composition. That is, a hole injection blocking layer is formed on the drum-shaped A1 substrate by a circular plating method, and the hole injection preventing layer is a dispersion of oxon particles to the bonding resin, and is formed by a charge generating layer ( CGL) An organic photosensitive layer laminated with a charge transport layer (CTL). CGL is composed of a powdered charge generating material (CGM) composed of a butadiene resin, a thermosetting type acryl resin, a benzoquinone resin, etc., and is formed by a grinding method to have a thickness of 〇. 1 to m ° CGM is a wavelength. Any of the 740 to 780 nm sensitivity is a metal-based pigment, or a polycyclic hydrogen-based pigment having a sensitivity of 635 to 650 nm. The CTL is composed of a carrier material of a dispersion hole in a cemented resin such as an activating polyethylene resin, and is formed by a grinding method to have a thickness of 10 to 40//m. This embodiment is described by taking an OPC of a functional separation type as an example. However, it is not limited to the function separation type, and the single layer type OPC is also available. Further, although the present embodiment is a drum type 〇pc, it is not limited thereto, and a strip-shaped body forming a conductive layer on the surface may be used instead of the A1 base, or a strip OPC. Further, the photoreceptor used in the present embodiment is not limited to 〇pc, and may be a negatively charged body. For example, an a-Se or Se-Te-based inorganic photoreceptor may be used. The APC fixed system of 0PC is grounded and rotates at a speed of 150 nm/s. Fix the charging device at a distance of 6〇//111 from 〇pc, and apply 1·5Kv between the emitter electrode and the extraction electrode of the charging device, apply 5〇〇v between the extraction electrode and the ground, and radiate electrons from the self-charged device. And the 〇pc is charged. The surface potential (charged potential) of opc is from the position where m is applied by the charging device, and is measured by the surface potential meter, and is set at the opposite position of the charging device (4) to eliminate the charge of 〇pc, and the surface potential of the measured 0PC is The surface potential of the 0PC can also be controlled according to the potential between the extraction electrode and the ground within the planned limits. Also, use a4 paper

Claims (1)

~. α修正 Μ286990 九、申請專利範圍: 1、一種奈米碳管之電子放射裝置,具備: 固定體,其係由石英、破璃、陶莞、金屬、絲板等構成; 射極電極#储由將金屬或合金賴於前述固定體的—單面上 而形成; 、複數之陽極氧倾,其係將崎賴隔設置於前述射極電極上的 複數氧化賴,在硫酸、過驗等猶滅處理而形成; • 細孔’其係形成於前述複數陽極氧化膜之各陽極氧化膜之間,且 在前述射極電極與相反側具有開口部位; 奈米碳管’其係設置於前述細孔内,且底面為接觸於前述射極電 極,並用以放射電子;以及 引出電極,其係覆蓋前述細孔之開口部位; 述奈米碳管係被前述射極電極、前陽極氧化膜、前述引出電 極所圍繞。 _ 2、如申請專利範圍第1項之奈米碳管之電子放射裝置,其中, 自前述奈米碳管經電場放射之電子,係貫通前述㈣電極而放射 至外部。 3、 如申請專利範圍第丨項之奈米碳管之電子放射裝置,其中, 前述引出電極仙Au、Pt、Pd #之貴域或其合金所形成。 4、 一種帶電襄置’係使㈣請專利範圍第1項、第2項或第3 項所記載之奈米碳管之電子放射裝置。 17~.α修正Μ286990 IX. Patent application scope: 1. An electron emission device for carbon nanotubes, comprising: a fixed body composed of quartz, broken glass, pottery, metal, silk plate, etc.; emitter electrode# The storage is formed by using a metal or an alloy on a single surface of the fixed body; and a plurality of anode oxygen tilting, which is a plurality of oxides disposed on the emitter electrode, in sulfuric acid, a test, etc. Formed by treatment; • pores are formed between the anodized films of the plurality of anodic oxide films, and have openings at the emitter electrode and the opposite side; the carbon nanotubes are disposed in the foregoing a bottom hole in contact with the emitter electrode for emitting electrons; and an extraction electrode covering an opening portion of the pore; wherein the carbon nanotube is covered by the emitter electrode, the front anodized film, The aforementioned extraction electrode is surrounded. 2. The electron emission device of the carbon nanotube according to the first aspect of the invention, wherein the electrons emitted from the carbon nanotube via the electric field are radiated to the outside through the electrode of the fourth electrode. 3. The electron emission device of a carbon nanotube according to the third aspect of the invention, wherein the lead electrode Au, Pt, Pd# or an alloy thereof is formed. 4. A charged device is used to make (4) an electron emission device for a carbon nanotube according to item 1, item 2 or item 3 of the patent scope. 17
TW94212961U 2005-07-29 2005-07-29 Electron emission apparatus using carbon nanotube and charging device TWM286990U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI730381B (en) * 2019-07-16 2021-06-11 鴻海精密工業股份有限公司 Carbon nanotube field emitter and making method thereof
TWI740191B (en) * 2019-07-16 2021-09-21 鴻海精密工業股份有限公司 Field emission neutralizer
TWI740192B (en) * 2019-07-16 2021-09-21 鴻海精密工業股份有限公司 Field emission neutralizer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI730381B (en) * 2019-07-16 2021-06-11 鴻海精密工業股份有限公司 Carbon nanotube field emitter and making method thereof
TWI740191B (en) * 2019-07-16 2021-09-21 鴻海精密工業股份有限公司 Field emission neutralizer
TWI740192B (en) * 2019-07-16 2021-09-21 鴻海精密工業股份有限公司 Field emission neutralizer
US11215171B2 (en) 2019-07-16 2022-01-04 Tsinghua University Field emission neutralizer

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