TWI845773B - Wafer carrier - Google Patents
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- TWI845773B TWI845773B TW109134883A TW109134883A TWI845773B TW I845773 B TWI845773 B TW I845773B TW 109134883 A TW109134883 A TW 109134883A TW 109134883 A TW109134883 A TW 109134883A TW I845773 B TWI845773 B TW I845773B
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- 235000012431 wafers Nutrition 0.000 description 58
- 239000004065 semiconductor Substances 0.000 description 9
- 101100233916 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) KAR5 gene Proteins 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 2
- 101000827703 Homo sapiens Polyphosphoinositide phosphatase Proteins 0.000 description 2
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 2
- 102100023591 Polyphosphoinositide phosphatase Human genes 0.000 description 2
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002259 gallium compounds Chemical class 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Abstract
Description
本申請案係關於一種晶圓載體，更詳言之，係關於一種提升半導體磊晶晶圓均勻性的晶圓載體。This application relates to a wafer carrier, and more particularly, to a wafer carrier for improving uniformity of semiconductor epitaxial wafers.
許多半導體裝置藉由在基板上進行加工而形成，此基板一般為結晶材料片，常稱為「晶圓」。一般而言，晶圓藉由生長晶體及將晶體切割而形成，在此晶圓上常見的實施方法為磊晶生長。Many semiconductor devices are formed by processing on a substrate, which is usually a sheet of crystalline material, often called a "wafer". Generally speaking, wafers are formed by growing crystals and slicing them, and the most common method of implementation on such wafers is epitaxial growth.
例如，由III-V半導體化合物所形成之半導體裝置一般係利用金屬有機化學氣相沈積(MOCVD)生長半導體化合物晶體而形成。於此方法中，將晶圓置於晶圓載體上，再於磊晶設備內將晶圓曝露於氣體組合，此氣體組合通常包括金屬有機化合物作為III族金屬源，且亦包括V族元素源，此氣體組合會流過晶圓表面，同時使晶圓維持在高溫下，以氮化鎵為例，其可藉由有機鎵化合物與氨氣在具有適宜晶格間距之基板(例如藍寶石基板)上之反應而形成。一般而言，在氮化鎵及相關化合物之沈積期間，通常使晶圓維持在約500至1100℃之溫度下。藉由晶圓磊晶生長製造諸如發光二極體(LED)、雷射器及其他電子及光電裝置。For example, semiconductor devices formed from III-V semiconductor compounds are generally formed by growing semiconductor compound crystals using metal organic chemical vapor deposition (MOCVD). In this method, a wafer is placed on a wafer carrier and then exposed to a gas combination in an epitaxial equipment. This gas combination usually includes a metal organic compound as a source of the group III metal and also includes a source of the group V element. This gas combination flows over the surface of the wafer while maintaining the wafer at an elevated temperature. For example, gallium nitride can be formed by the reaction of an organic gallium compound and ammonia on a substrate with an appropriate lattice spacing (such as a sapphire substrate). Generally speaking, during the deposition of gallium nitride and related compounds, the wafer is usually maintained at a temperature of about 500 to 1100°C. Light-emitting diodes (LEDs), lasers, and other electronic and optoelectronic devices are manufactured by epitaxial growth.
在晶圓磊晶成長期間，重要的是使晶圓載體上各晶圓表面上所有位置的晶圓維持均一條件，晶圓表面不同位置之氣體氣流及溫度的微小差異會導致最終完成的半導體裝置具有特性差異而產生不良品。因此，如何改善半導體晶圓磊晶製程中氣體氣流及成長溫度的均勻性進而提升半導體磊晶晶圓均勻性，為本技術領域人員所研究開發的目標之一。During the epitaxial growth of wafers, it is important to maintain uniform conditions for all wafers on the wafer carrier. Slight differences in gas flow and temperature at different locations on the wafer surface will lead to differences in characteristics of the final semiconductor device and produce defective products. Therefore, how to improve the uniformity of gas flow and growth temperature in the semiconductor epitaxial process and thus improve the uniformity of semiconductor epitaxial wafers is one of the research and development goals of researchers in this technical field.
本申請案揭露一種晶圓載體，包含複數個內圈圓形凹穴，包含一第一內圈圓形凹穴；複數個外圈圓形凹穴，圍繞內圈圓形凹穴設置，複數個外圈圓形凹穴組各包含一個或多個外圈圓形凹穴，其中，兩相鄰的外圈圓形凹穴組之間具有一第一間距，其中之一組中兩相鄰的外圈圓形凹穴之間具有一第二間距，第一間距大於第二間距，其中，外圈圓形凹穴包含一第一外圈圓形凹穴以及與第一外圈圓形凹穴相鄰的一第二外圈圓形凹穴，第一內圈圓形凹穴鄰近於第一外圈圓形凹穴與第二外圈圓形凹穴，第一外圈圓形凹穴與第二外圈圓形凹穴之間具有一間距包含第一間距和第二間距其中之一，其中，第一內圈圓形凹穴與第一外圈圓形凹穴之間具有一第一距離，第一內圈圓形凹穴與第二外圈圓形凹穴之間具有一第二距離，第一距離、第二距離與間距其中之一不相等於其中之另一。The present application discloses a wafer carrier, comprising a plurality of inner circular recesses, including a first inner circular recess; a plurality of outer circular recesses, arranged around the inner circular recess, each of the plurality of outer circular recess groups including one or more outer circular recesses, wherein a first spacing is provided between two adjacent outer circular recess groups, a second spacing is provided between two adjacent outer circular recesses in one of the groups, and the first spacing is greater than the second spacing, wherein the outer circular recess includes a first outer circular recess and a plurality of outer circular recesses adjacent to the first outer circular recess. A second outer circle circular recess is adjacent to the first inner circle circular recess, the first inner circle circular recess is adjacent to the first outer circle circular recess and the second outer circle circular recess, and there is a spacing between the first outer circle circular recess and the second outer circle circular recess, including one of a first spacing and a second spacing, wherein there is a first distance between the first inner circle circular recess and the first outer circle circular recess, and there is a second distance between the first inner circle circular recess and the second outer circle circular recess, and one of the first distance, the second distance and the spacing is not equal to another one of them.
下文中，將參照圖示詳細地描述本發明之示例性實施例，已使得本發明領域技術人員能夠充分地理解本發明之精神。本發明並不限於以下之實施例，而是可以以其他形式實施。在本說明書中，有一些相同的符號，其表示具有相同或是類似之結構、功能、原理的元件，且為業界具有一般知識能力者可以依據本說明書之教導而推知。為說明書之簡潔度考量，相同之符號的元件將不再重述。Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings, so that those skilled in the art can fully understand the spirit of the present invention. The present invention is not limited to the following embodiments, but can be implemented in other forms. In this specification, there are some identical symbols, which represent components with the same or similar structures, functions, and principles, and can be inferred by those with general knowledge in the industry based on the teachings of this specification. For the sake of brevity in the specification, components with the same symbols will not be repeated.
圖1顯示本申請案一實施例晶圓載體1之上視圖。晶圓載體1包含複數個內圈圓形凹穴10，複數個外圈圓形凹穴121(121A、121B 、121C) 、122(122A、122B 、122C) 、123(123A、123B 、123C)環繞內圈圓形凹穴10設置，以及複數個外圈圓形凹穴組12，其中複數個外圈圓形凹穴組12分別包含所述複數個外圈圓形凹穴之一或多個。於一實施例中，複數個內圈圓形凹穴10包含第一內圈圓形凹穴10A、第二內圈圓形凹穴10B、第三內圈圓形凹穴10C環繞晶圓載體1的載體圓心C設置。於本實施例中，複數個外圈圓形凹穴組12包含第一外圈圓形凹穴組12A、第二外圈圓形凹穴組12B、第三外圈圓形凹穴組12C圍繞第一內圈圓形凹穴10A、第二內圈圓形凹穴10B、及第三內圈圓形凹穴10C設置。於本實施例中，第一外圈圓形凹穴組12A、第二外圈圓形凹穴組12B及第三外圈圓形凹穴組12C分別包含三個外圈圓形凹穴，分別包含第一外圈圓形凹穴121(121A、121B、121C)、第二外圈圓形凹穴122(122A、122B、122C)及第三外圈圓形凹穴123(123A、123B、123C)。FIG1 shows a top view of a wafer carrier 1 according to an embodiment of the present application. The wafer carrier 1 includes a plurality of inner circular recesses 10, a plurality of outer circular recesses 121 (121A, 121B, 121C), 122 (122A, 122B, 122C), 123 (123A, 123B, 123C) arranged around the inner circular recess 10, and a plurality of outer circular recess groups 12, wherein the plurality of outer circular recess groups 12 respectively include one or more of the plurality of outer circular recesses. In one embodiment, the plurality of inner circular recesses 10 include a first inner circular recess 10A, a second inner circular recess 10B, and a third inner circular recess 10C, which are disposed around the carrier center C of the wafer carrier 1. In this embodiment, the plurality of outer circular recess groups 12 include a first outer circular recess group 12A, a second outer circular recess group 12B, and a third outer circular recess group 12C, which are disposed around the first inner circular recess 10A, the second inner circular recess 10B, and the third inner circular recess 10C. In this embodiment, the first outer ring circular recess group 12A, the second outer ring circular recess group 12B and the third outer ring circular recess group 12C respectively include three outer ring circular recesses, including the first outer ring circular recess 121 (121A, 121B, 121C), the second outer ring circular recess 122 (122A, 122B, 122C) and the third outer ring circular recess 123 (123A, 123B, 123C).
如圖1所示，於本實施例中，第一外圈圓形凹穴組12A相鄰於第二外圈圓形凹穴組12B，第二外圈圓形凹穴組12B相鄰於第三外圈圓形凹穴組12C，第三外圈圓形凹穴組12C相鄰於第一外圈圓形凹穴組12A。第一外圈圓形凹穴121A、121B、121C分別相鄰於第二外圈圓形凹穴122A、122B、122C，第二外圈圓形凹穴122A、122B、122C分別相鄰於第三外圈圓形凹穴123A、123B、123C。第一外圈圓形凹穴組12A的第三外圈圓形凹穴123A相鄰於第二外圈圓形凹穴組12B的第一外圈圓形凹穴121B，第二外圈圓形凹穴組12B的第三外圈圓形凹穴123B相鄰於第三外圈圓形凹穴組12C的第一外圈圓形凹穴121C，第三外圈圓形凹穴組12C的第三外圈圓形凹穴123C相鄰於第一外圈圓形凹穴組12A的第一外圈圓形凹穴121A。As shown in FIG. 1 , in this embodiment, the first outer circle circular recess group 12A is adjacent to the second outer circle circular recess group 12B, the second outer circle circular recess group 12B is adjacent to the third outer circle circular recess group 12C, and the third outer circle circular recess group 12C is adjacent to the first outer circle circular recess group 12A. The first outer circle circular recesses 121A, 121B, and 121C are adjacent to the second outer circle circular recesses 122A, 122B, and 122C, respectively, and the second outer circle circular recesses 122A, 122B, and 122C are adjacent to the third outer circle circular recesses 123A, 123B, and 123C, respectively. The third outer circular recess 123A of the first outer circular recess group 12A is adjacent to the first outer circular recess 121B of the second outer circular recess group 12B, the third outer circular recess 123B of the second outer circular recess group 12B is adjacent to the first outer circular recess 121C of the third outer circular recess group 12C, and the third outer circular recess 123C of the third outer circular recess group 12C is adjacent to the first outer circular recess 121A of the first outer circular recess group 12A.
在本申請案的一實施例中，其中，複數個外圈圓形凹穴121(121A、121B 、121C) 、122(122A、122B 、122C) 、123(123A、123B 、123C)中的任兩相鄰的外圈圓形凹穴之間具有一間距，其中所述間距包含任相鄰兩外圈圓形凹穴組12(12A、12B 、12C)中相鄰的兩外圈圓形凹穴之間具有第一間距D1，以及同一外圈圓形凹穴組12(12A、12B 、12C)中任兩相鄰外圈圓形凹穴之間具有第二間距D2。詳述如後。如圖1所示，第一外圈圓形凹穴組12A與第二外圈圓形凹穴組12B之間、第二外圈圓形凹穴組12B與第三外圈圓形凹穴組12C之間、第三外圈圓形凹穴組12C與第一外圈圓形凹穴組12A之間分別具有第一間距D1，換句話說，第一外圈圓形凹穴組12A的第三外圈圓形凹穴123A與第二外圈圓形凹穴組12B的第一外圈圓形凹穴121B之間、第二外圈圓形凹穴組12B的第三外圈圓形凹穴123B與第三外圈圓形凹穴組12C的第一外圈圓形凹穴121C之間、第三外圈圓形凹穴組12C的第三外圈圓形凹穴123C與第一外圈圓形凹穴組12A的第一外圈圓形凹穴121A之間分別具有第一間距D1。同一組中任兩相鄰的外圈圓形凹穴分別具有第二間距D2，例如第一外圈圓形凹穴121A、121B、121C與第二外圈圓形凹穴122A、122B、122C之間、第二外圈圓形凹穴122A、122B、122C與第三外圈圓形凹穴123A、123B、123C之間分別具有第二間距D2。在本申請案的一實施例中，晶圓載體1中所包含的複數個第一間距D1彼此之間相同或不同。晶圓載體1中所包含的複數個第二間距D2彼此之間相同或不同。In one embodiment of the present application, any two adjacent outer circular recesses in the plurality of outer circular recesses 121 (121A, 121B, 121C), 122 (122A, 122B, 122C), 123 (123A, 123B, 123C) have a spacing, wherein the spacing includes a first spacing D1 between two adjacent outer circular recesses in any two adjacent outer circular recess groups 12 (12A, 12B, 12C), and a second spacing D2 between any two adjacent outer circular recesses in the same outer circular recess group 12 (12A, 12B, 12C). Details are as follows. As shown in FIG. 1 , there is a first spacing D1 between the first outer circular recess group 12A and the second outer circular recess group 12B, between the second outer circular recess group 12B and the third outer circular recess group 12C, and between the third outer circular recess group 12C and the first outer circular recess group 12A. In other words, the third outer circular recess 123A of the first outer circular recess group 12A and the second outer circular recess group 12B are spaced from each other by a distance D1. There is a first spacing D1 between the first outer circular recess 121B of the recess group 12B, between the third outer circular recess 123B of the second outer circular recess group 12B and the first outer circular recess 121C of the third outer circular recess group 12C, and between the third outer circular recess 123C of the third outer circular recess group 12C and the first outer circular recess 121A of the first outer circular recess group 12A. Any two adjacent outer circular recesses in the same group have a second spacing D2, for example, the first outer circular recesses 121A, 121B, 121C and the second outer circular recesses 122A, 122B, 122C, and the second outer circular recesses 122A, 122B, 122C and the third outer circular recesses 123A, 123B, 123C have a second spacing D2. In one embodiment of the present application, the plurality of first spacings D1 included in the wafer carrier 1 are the same or different from each other. The plurality of second spacings D2 included in the wafer carrier 1 are the same or different from each other.
如圖1所示，於一實施例中，複數個內圈圓形凹穴10（10A、10B、10C）分別鄰近於複數個外圈圓形凹穴121(121A、121B 、121C) 、122(122A、122B 、122C) 、123(123A、123B 、123C)中的任相鄰兩個外圈圓形凹穴。於一實施例中，複數個內圈圓形凹穴10（10A、10B、10C）分別鄰近於複數個外圈圓形凹穴組12(12A、12B 、12C)中的兩個外圈圓形凹穴。於本實施例中，第一內圈圓形凹穴10A鄰近於第一外圈圓形凹穴組12A的第三外圈圓形凹穴123A，以及第一內圈圓形凹穴10A鄰近於第二外圈圓形凹穴122A 。第一內圈圓形凹穴10A與第三外圈圓形凹穴123A之間具有第一距離d a1，第一內圈圓形凹穴10A與第二外圈圓形凹穴122A 之間具有第二距離d a2。於本實施例中，第一距離d a1小於第二距離d a2，換句話說第一內圈圓形凹穴10A最鄰近於第三外圈圓形凹穴123A。相似的，第二內圈圓形凹穴10B鄰近於第二外圈圓形凹穴組12B的第三外圈圓形凹穴123B，以及第二內圈圓形凹穴10B鄰近於第二外圈圓形凹穴122B。第二內圈圓形凹穴10B最鄰近於第三外圈圓形凹穴123B，且與第三外圈圓形凹穴123B之間具有第一距離d b1，第二內圈圓形凹穴10B次鄰近於第二外圈圓形凹穴122B，第二內圈圓形凹穴10B與第二外圈圓形凹穴122B之間具有第二距離d b2。第三內圈圓形凹穴10C鄰近於第三外圈圓形凹穴組12C的第三外圈圓形凹穴123C，以及第二內圈圓形凹穴10B鄰近於第三外圈圓形凹穴123C。第三內圈圓形凹穴10C最鄰近於第三外圈圓形凹穴組12C的第三外圈圓形凹穴123C，第三內圈圓形凹穴10C與第三外圈圓形凹穴123C之間具有第一距離d c1，第三內圈圓形凹穴10C次鄰近於第二外圈圓形凹穴122C，第三內圈圓形凹穴10C與第二外圈圓形凹穴122C之間具有第二距離d c2。於一實施例中，相較於第三外圈圓形凹穴123A與第二外圈圓形凹穴122A的第二間距D2，第一距離d a1、第二距離d a2與第二間距D2至少其中之一不相等於其中之另一。相似的，相較於第三外圈圓形凹穴123B與第二外圈圓形凹穴122B的第二間距D2，第一距離d b1、第二距離d b2與第二間距D2至少其中之一不相等於其中之另一。相較於第三外圈圓形凹穴123C與第二外圈圓形凹穴122C的第二間距D2，第一距離d c1、第二距離d c2與第二間距D2至少其中之一不相等於其中之另一。於一實施例中，第一距離d a1、d b1、d c1、第二距離d a2、 d b2、d c2與對應的各第二間距D2互不相等。於一實施例中，第二間距D2＜第一距離(d a1、d b1、d c1)＜第二距離(d a2、 d b2、d c2)。 As shown in FIG. 1 , in one embodiment, the plurality of inner circular recesses 10 (10A, 10B, 10C) are respectively adjacent to any two adjacent outer circular recesses among the plurality of outer circular recesses 121 (121A, 121B, 121C), 122 (122A, 122B, 122C), 123 (123A, 123B, 123C). In one embodiment, the plurality of inner circular recesses 10 (10A, 10B, 10C) are respectively adjacent to two outer circular recesses among the plurality of outer circular recess groups 12 (12A, 12B, 12C). In this embodiment, the first inner circular recess 10A is adjacent to the third outer circular recess 123A of the first outer circular recess set 12A, and the first inner circular recess 10A is adjacent to the second outer circular recess 122A. There is a first distance d a1 between the first inner circular recess 10A and the third outer circular recess 123A, and there is a second distance d a2 between the first inner circular recess 10A and the second outer circular recess 122A. In this embodiment, the first distance d a1 is smaller than the second distance d a2 , in other words, the first inner circular recess 10A is closest to the third outer circular recess 123A. Similarly, the second inner circular recess 10B is adjacent to the third outer circular recess 123B of the second outer circular recess set 12B, and the second inner circular recess 10B is adjacent to the second outer circular recess 122B. The second inner circular recess 10B is closest to the third outer circular recess 123B, and has a first distance d b1 with the third outer circular recess 123B. The second inner circular recess 10B is secondarily adjacent to the second outer circular recess 122B, and has a second distance d b2 with the second outer circular recess 10B. The third inner circular recess 10C is adjacent to the third outer circular recess 123C of the third outer circular recess group 12C, and the second inner circular recess 10B is adjacent to the third outer circular recess 123C. The third inner circular recess 10C is closest to the third outer circular recess 123C of the third outer circular recess group 12C, and there is a first distance d c1 between the third inner circular recess 10C and the third outer circular recess 123C. The third inner circular recess 10C is secondarily adjacent to the second outer circular recess 122C, and there is a second distance d c2 between the third inner circular recess 10C and the second outer circular recess 122C. In one embodiment, compared to the second distance D2 between the third outer circular recess 123A and the second outer circular recess 122A, at least one of the first distance d a1 , the second distance d a2 and the second distance D2 is not equal to the other. Similarly, compared to the second distance D2 between the third outer circular recess 123B and the second outer circular recess 122B, at least one of the first distance d b1 , the second distance d b2 and the second distance D2 is not equal to the other. Compared to the second distance D2 between the third outer circular recess 123C and the second outer circular recess 122C, at least one of the first distance d c1 , the second distance d c2 and the second distance D2 is not equal to the other. In one embodiment, the first distances da1 , d b1 , d c1 , the second distances da2 , d b2 , d c2 and the corresponding second distances D2 are not equal to each other. In one embodiment, the second distance D2<first distance ( da1 , d b1 , d c1 )<second distance ( da2 , d b2 , d c2 ).
在本申請案的一實施例中，第一間距D1為兩相鄰之外圈圓形凹穴組12（12A、12B、12C）中第一外圈圓形凹穴121（121A、121B、121C）與第三外圈圓形凹穴（123A、123B、123C）之間的最短距離。例如第一外圈圓形凹穴組12A的第三外圈圓形凹穴123A及第二外圈圓形凹穴組12B的第一外圈圓形凹穴121B的最短距離為第一間距D1，亦即第一外圈圓形凹穴組12A的第三外圈圓形凹穴123A及第二外圈圓形凹穴組12B的第一外圈圓形凹穴121B的兩圓心連線與第三外圈圓形凹穴123A及第一外圈圓形凹穴121B的兩圓周接點之間具有第一間距D1。第二間距D2為各複數外圈圓形凹穴組12（12A、12B、12C）中任兩相鄰外圈圓形凹穴之間的最短間距。例如第一外圈圓形凹穴組12A的第三外圈圓形凹穴123A及第二外圈圓形凹穴122A兩圓心連線上與第三外圈圓形凹穴123A及第二外圈圓形凹穴122A的兩圓周接點之間具有第二間距D2，或第一外圈圓形凹穴組12A的第二外圈圓形凹穴122A及第一外圈圓形凹穴121A的兩圓心連線上分別與第二外圈圓形凹穴122A及第一外圈圓形凹穴121A的兩圓周接點之間具有第二間距D2。第一距離（d a1、d b1、d c1）為各內圈圓形凹穴10（10A、10B、10C）及與其相鄰的外圈圓形凹穴組12（12A、12B、12C）中最鄰近的外圈圓形凹穴的最短距離。例如第一內圈圓形凹穴10A及第一外圈圓形凹穴組12A的第三外圈圓形凹穴123A的兩圓心連線上與第一內圈圓形凹穴10A及第三外圈圓形凹穴123A 的兩圓周接點之間具有第一距離d a1。第二距離（d a2、d b2、d c2）為各內圈圓形凹穴10（10A、10B、10C）及與其相鄰的外圈圓形凹穴組12（12A、12B、12C）中次鄰近的外圈圓形凹穴的最短距離。例如第一內圈圓形凹穴10A及第一外圈圓形凹穴組12A的第二外圈圓形凹穴122A的兩圓心連線上與第一內圈圓形凹穴10A及第二外圈圓形凹穴122A的兩圓周接點之間具有第二距離d a2。相似的，第二外圈圓形凹穴組12B的第三外圈圓形凹穴123B及第三外圈圓形凹穴組12C的第一外圈圓形凹穴121C的兩圓心連線與第三外圈圓形凹穴123B及第一外圈圓形凹穴121C的兩圓周接點之間具有第一間距D1，第二外圈圓形凹穴組12B的第三外圈圓形凹穴123B及第二外圈圓形凹穴122B兩圓心連線上與第三外圈圓形凹穴123B及第二外圈圓形凹穴122B的兩圓周接點之間具有第二間距D2，或第二外圈圓形凹穴組12B的第二外圈圓形凹穴122B及第一外圈圓形凹穴121B的兩圓心連線上與第二外圈圓形凹穴122B及第一外圈圓形凹穴121B的兩圓周接點之間具有第二間距D2，第二內圈圓形凹穴10B及第二外圈圓形凹穴組12B的第三外圈圓形凹穴123B的兩圓心連線上與第二內圈圓形凹穴10B及第三外圈圓形凹穴123B 的兩圓周接點之間具有第一距離d b1，第二內圈圓形凹穴10B及第二外圈圓形凹穴組12B的第二外圈圓形凹穴122B的兩圓心連線上與第二內圈圓形凹穴10B及第二外圈圓形凹穴122B的兩圓周接點之間具有第二距離d b2。相似的，第一間距D1為第三外圈圓形凹穴組12C的第三外圈圓形凹穴123C及第一外圈圓形凹穴組12A的第一外圈圓形凹穴121A的兩圓心連線與第三外圈圓形凹穴123C及第一外圈圓形凹穴121A的兩圓周接點之間具有第一間距D1，第二間距D2為第三外圈圓形凹穴組12C的第三外圈圓形凹穴123C及第二外圈圓形凹穴122C兩圓心連線上與第三外圈圓形凹穴123C及第二外圈圓形凹穴122C的兩圓周接點之間具有第二間距D2，或第三外圈圓形凹穴組12C的第二外圈圓形凹穴122C及第一外圈圓形凹穴121C的兩圓心連線上與第二外圈圓形凹穴122C及第一外圈圓形凹穴121C的兩圓周接點之間具有第二間距D2，第三內圈圓形凹穴10C及第三外圈圓形凹穴組12C的第三外圈圓形凹穴123C的兩圓心連線上與第三內圈圓形凹穴10C及第三外圈圓形凹穴123C的兩圓周接點之間具有第一距離d c1，第三內圈圓形凹穴10C及第三外圈圓形凹穴組12C的第二外圈圓形凹穴122C的兩圓心連線上與第三內圈圓形凹穴10C及第二外圈圓形凹穴122C的兩圓周接點之間具有第二距離d c2。於本實施例中，第一間距D1大於第二間距D2。 In one embodiment of the present application, the first spacing D1 is the shortest distance between the first outer circular recess 121 (121A, 121B, 121C) and the third outer circular recess (123A, 123B, 123C) in two adjacent outer circular recess groups 12 (12A, 12B, 12C). For example, the shortest distance between the third outer circular recess 123A of the first outer circular recess group 12A and the first outer circular recess 121B of the second outer circular recess group 12B is the first spacing D1, that is, the first spacing D1 is between the two center connecting lines of the third outer circular recess 123A of the first outer circular recess group 12A and the first outer circular recess 121B of the second outer circular recess group 12B and the two circumferential connecting points of the third outer circular recess 123A and the first outer circular recess 121B. The second spacing D2 is the shortest distance between any two adjacent outer circular recesses in each of the plurality of outer circular recess groups 12 (12A, 12B, 12C). For example, a second spacing D2 is provided between the two circumferential contacts of the third outer circular recess 123A and the second outer circular recess 122A on a line connecting the two centers of the third outer circular recess 123A and the second outer circular recess 122A of the first outer circular recess group 12A, or a second spacing D2 is provided between the two circumferential contacts of the second outer circular recess 122A and the first outer circular recess 121A of the first outer circular recess group 12A. The first distance (d a1 , d b1 , d c1 ) is the shortest distance between each inner circular recess 10 (10A, 10B, 10C) and the outer circular recess group 12 (12A, 12B, 12C) adjacent thereto. For example, the first distance d a1 exists between the two circumferential connection points of the first inner circular recess 10A and the third outer circular recess 123A of the first outer circular recess group 12A and the first inner circular recess 10A and the third outer circular recess 123A. The second distance (d a2 , d b2 , d c2 ) is the shortest distance between each inner circular recess 10 (10A, 10B, 10C) and the second adjacent outer circular recess in the adjacent outer circular recess group 12 (12A, 12B, 12C). For example, the second distance d a2 exists between the two circumferential connection points of the first inner circular recess 10A and the second outer circular recess 122A in the first outer circular recess group 12A and the first inner circular recess 10A and the second outer circular recess 122A . Similarly, a first spacing D1 is provided between the two circumferential joints of the third outer circular recess 123B and the first outer circular recess 121C of the third outer circular recess group 12C and the two circumferential joints of the third outer circular recess 123B and the first outer circular recess 121C, and a first spacing D1 is provided between the two circumferential joints of the third outer circular recess 123B and the first outer circular recess 121C and the two circumferential joints of the third outer circular recess 123B and the first outer circular recess 122B of the second outer circular recess group 12B and the third outer circular recess 123B and the second outer circular recess 122B. There is a second spacing D2 between the two circumferential contacts of the second outer circular recess 122B of the second outer circular recess set 12B and the first outer circular recess 121B, or there is a second spacing D2 between the two circumferential contacts of the second outer circular recess 122B and the first outer circular recess 121B on the line connecting the two centers of the second inner circular recess 10B and the third outer circular recess 123B of the second outer circular recess set 12B, and there is a second spacing D2 between the two circumferential contacts of the second inner circular recess 10B and the third outer circular recess 123B on the line connecting the two centers of the second inner circular recess 10B and the third outer circular recess 123B There is a first distance d b1 between the two circumferential contact points of the second inner circular cavity 10B and the second outer circular cavity set 12B, and a second distance d b2 between the two circumferential contact points of the second inner circular cavity 10B and the second outer circular cavity 122B. Similarly, the first spacing D1 is the distance between the two circumferential joints of the third outer circular recess 123C of the third outer circular recess group 12C and the first outer circular recess 121A of the first outer circular recess group 12A and the third outer circular recess 123C and the first outer circular recess 121A, and the second spacing D2 is the distance between the two circumferential joints of the third outer circular recess 123C and the second outer circular recess 122C on the line connecting the two circumferential joints of the third outer circular recess 123C and the second outer circular recess 122C. There is a second distance D2 between the two circumferential joints, or there is a second distance D2 between the two circumferential joints of the second outer circular concave 122C and the first outer circular concave 121C on the line connecting the two centers of the third inner circular concave 10C and the third outer circular concave 123C of the third outer circular concave set 12C and the second outer circular concave 122C and the first outer circular concave 121C, and there is a first distance d between the two circumferential joints of the third inner circular concave 10C and the third outer circular concave 123C on the line connecting the two centers of the third inner circular concave 10C and the third outer circular concave 123C. c1 , a second distance dc2 exists between the two circumferential contact points of the third inner circular cavity 10C and the second outer circular cavity 122C of the third outer circular cavity set 12C and the two centers of the third inner circular cavity 10C and the second outer circular cavity 122C. In this embodiment, the first distance D1 is greater than the second distance D2.
此外，如圖1所示，於本實施例中，晶圓載體1中的複數個外圈圓形凹穴組、每一外圈圓形凹穴組之複數個外圈圓形凹穴、複數個內圈圓形凹穴的數量分別可為三個。在本申請案的一實施例中，晶圓載體1中的複數個外圈圓形凹穴及複數個內圈圓形凹穴分別是用於乘載晶圓，晶圓載體1可由例如石墨、碳化矽或其他耐火材料的材料形成，且晶圓載體1大致呈圓盤狀，內圈圓形凹穴及外圈圓形凹穴係由晶圓載體1表面上的圓形凹處所形成。在本申請案的一實施例中，外圈圓形凹穴及內圈圓形凹穴之面積可大於或等於晶圓面積。In addition, as shown in FIG. 1 , in this embodiment, the number of the plurality of outer circular recess groups, the plurality of outer circular recesses in each outer circular recess group, and the plurality of inner circular recesses in the wafer carrier 1 can be three, respectively. In one embodiment of the present application, the plurality of outer circular recesses and the plurality of inner circular recesses in the wafer carrier 1 are used to carry wafers, respectively. The wafer carrier 1 can be formed of materials such as graphite, silicon carbide, or other refractory materials, and the wafer carrier 1 is roughly disc-shaped, and the inner circular recesses and the outer circular recesses are formed by circular recesses on the surface of the wafer carrier 1. In one embodiment of the present application, the area of the outer circular recesses and the inner circular recesses can be greater than or equal to the area of the wafer.
圖2顯示本申請案一實施例晶圓載體2之上視圖。在圖2的實施例中，晶圓載體2的結構與圖1所示的晶圓載體1的結構大致上相同，故於此不再贅述。差異在於晶圓載體2的每一內圈圓形凹穴20A、20B、20C分別對應每一第一間距D1設置。FIG2 shows a top view of a wafer carrier 2 according to an embodiment of the present application. In the embodiment of FIG2 , the structure of the wafer carrier 2 is substantially the same as that of the wafer carrier 1 shown in FIG1 , and thus will not be described in detail here. The difference is that each inner circular recess 20A, 20B, 20C of the wafer carrier 2 is respectively arranged corresponding to each first spacing D1.
如圖2所示，於一實施例中，複數個內圈圓形凹穴20（20A、20B、20C）鄰近於複數個外圈圓形凹穴221(221A、221B 、221C) 、222(222A、222B 、222C) 、223(223A、223B 、223C)中的兩個外圈圓形凹穴。於一實施例中，複數個內圈圓形凹穴20（20A、20B、20C）中的任一個分別鄰近於相鄰兩個外圈圓形凹穴組22A、22B、22C中的一個外圈圓形凹穴。於本實施例中，第一內圈圓形凹穴20A鄰近於第一外圈圓形凹穴組22A的第三外圈圓形凹穴223A以及第二外圈圓形凹穴組22B的第一外圈圓形凹穴221B。第一內圈圓形凹穴20A與第三外圈圓形凹穴223A之間及第一外圈圓形凹穴221B 之間分別具有第一距離d a1及第二距離d a2。於一實施例中，第一距離d a1大於、等於、或小於第二距離d a2。相似的，第二內圈圓形凹穴20B鄰近於第二外圈圓形凹穴組22B的第三外圈圓形凹穴223B以及第三外圈圓形凹穴組22C的第一外圈圓形凹穴221C。第二內圈圓形凹穴20B與第三外圈圓形凹穴223B之間及第一外圈圓形凹穴221C之間分別具有第一距離d b1及第二距離d b2。於一實施例中，第一距離d b1大於、等於、或小於第二距離d b2。第三內圈圓形凹穴20C鄰近於第三外圈圓形凹穴組22C的第三外圈圓形凹穴223C以及第一外圈圓形凹穴組22A的第一外圈圓形凹穴221A。第三內圈圓形凹穴10C與第三外圈圓形凹穴223C之間及第一外圈圓形凹穴221A之間分別具有第一距離d c1及第二距離d c2。於一實施例中，第一距離d c1大於、等於、或小於第二距離d c2。相較於第三外圈圓形凹穴223A與第一外圈圓形凹穴221B的第一間距D1，第一距離d a1、第二距離d a2與第一間距D1至少其中之一不相等於其中之另一。相似的，相較於第三外圈圓形凹穴223B與第一外圈圓形凹穴221C的第一間距D1，第一距離d b1、第二距離d b2與第一間距D1至少其中之一不相等於其中之另一。相較於第三外圈圓形凹穴223C與第一外圈圓形凹穴221A的第一間距D1，第一距離d c1、第二距離d c2與第一間距D1至少其中之一不相等於其中之另一。於一實施例中，第一距離d a1、d b1、d c1分別相等於第二距離d a2、d b2、d c2，但不相等於第一間距D1。於一實施例中，第一距離d a1、d b1、d c1分別相等於第二距離d a2、d b2、d c2，且小於第一間距D1。於一實施例中，第一距離d a1、d b1、d c1分別小於各內圈圓形凹穴與其他外圈圓形凹穴之間的距離。 As shown in FIG. 2 , in one embodiment, a plurality of inner circular recesses 20 (20A, 20B, 20C) are adjacent to two outer circular recesses among a plurality of outer circular recesses 221 (221A, 221B, 221C), 222 (222A, 222B, 222C), 223 (223A, 223B, 223C). In one embodiment, any one of the plurality of inner circular recesses 20 (20A, 20B, 20C) is adjacent to one outer circular recess of two adjacent outer circular recess groups 22A, 22B, 22C. In this embodiment, the first inner circular recess 20A is adjacent to the third outer circular recess 223A of the first outer circular recess group 22A and the first outer circular recess 221B of the second outer circular recess group 22B. The first inner circular recess 20A and the third outer circular recess 223A and the first outer circular recess 221B have a first distance d a1 and a second distance d a2 , respectively. In one embodiment, the first distance d a1 is greater than, equal to, or less than the second distance d a2 . Similarly, the second inner circular recess 20B is adjacent to the third outer circular recess 223B of the second outer circular recess group 22B and the first outer circular recess 221C of the third outer circular recess group 22C. The second inner circular recess 20B and the third outer circular recess 223B and the first outer circular recess 221C have a first distance d b1 and a second distance d b2 , respectively. In one embodiment, the first distance d b1 is greater than, equal to, or less than the second distance d b2 . The third inner circular recess 20C is adjacent to the third outer circular recess 223C of the third outer circular recess group 22C and the first outer circular recess 221A of the first outer circular recess group 22A. The third inner circular recess 10C and the third outer circular recess 223C and the first outer circular recess 221A have a first distance d c1 and a second distance d c2 , respectively. In one embodiment, the first distance d c1 is greater than, equal to, or less than the second distance d c2 . Compared to the first distance D1 between the third outer circular recess 223A and the first outer circular recess 221B, at least one of the first distance d a1 , the second distance d a2 and the first distance D1 is not equal to the other. Similarly, compared to the first distance D1 between the third outer circular recess 223B and the first outer circular recess 221C, at least one of the first distance d b1 , the second distance d b2 and the first distance D1 is not equal to the other. Compared to the first distance D1 between the third outer circular recess 223C and the first outer circular recess 221A, at least one of the first distance d c1 , the second distance d c2 and the first distance D1 is not equal to the other one. In one embodiment, the first distances d a1 , d b1 , d c1 are respectively equal to the second distances d a2 , d b2 , d c2 , but are not equal to the first distance D1. In one embodiment, the first distances d a1 , d b1 , d c1 are respectively equal to the second distances d a2 , d b2 , d c2 , and are smaller than the first distance D1. In one embodiment, the first distances d a1 , d b1 , d c1 are respectively smaller than the distances between each inner circular recess and other outer circular recesses.
在本申請案的一實施例中，第一間距D1為兩相鄰之外圈圓形凹穴組22（22A、22B、22C）中第一外圈圓形凹穴221（221A、221B、221C）與第三外圈圓形凹穴（223A、223B、223C）之間的最短距離。例如第一外圈圓形凹穴組22A的第三外圈圓形凹穴223A及第二外圈圓形凹穴組22B的第一外圈圓形凹穴221B的最短距離為第一間距D1，亦即第一外圈圓形凹穴組22A的第三外圈圓形凹穴223A及第二外圈圓形凹穴組22B的第一外圈圓形凹穴221B的兩圓心連線與第三外圈圓形凹穴223A及第一外圈圓形凹穴221B的兩圓周接點之間具有第一間距D1。第二間距D2為各複數外圈圓形凹穴組22（22A、22B、22C）中任兩相鄰外圈圓形凹穴之間的最短間距。例如第一外圈圓形凹穴組22A的第三外圈圓形凹穴223A及第二外圈圓形凹穴222A兩圓心連線上與第三外圈圓形凹穴223A及第二外圈圓形凹穴222A的兩圓周接點之間具有第二間距D2，或第一外圈圓形凹穴組22A的第二外圈圓形凹穴222A及第一外圈圓形凹穴221A的兩圓心連線上分別與第二外圈圓形凹穴222A及第一外圈圓形凹穴221A的兩圓周接點之間具有第二間距D2。第一距離（d a1、d b1、d c1）及第二距離（d a2、d b2、d c2）分別為各內圈圓形凹穴20（20A、20B、20C）及與其相鄰的外圈圓形凹穴221(221A、221B 、221C) 、222(222A、222B 、222C) 、223(223A、223B 、223C)中最鄰近的兩外圈圓形凹穴的最短距離。例如第一內圈圓形凹穴20A及第一外圈圓形凹穴組22A的第三外圈圓形凹穴223A的兩圓心連線上與第一內圈圓形凹穴20A及第三外圈圓形凹穴223A 的兩圓周接點之間具有第一距離d a1，以及第一內圈圓形凹穴20A及第二外圈圓形凹穴組22B的第一外圈圓形凹穴221B的兩圓心連線上與第一內圈圓形凹穴20A及第一外圈圓形凹穴221B的兩圓周接點之間具有第二距離d a2。相似的，第二外圈圓形凹穴組22B的第三外圈圓形凹穴223B及第三外圈圓形凹穴組22C的第一外圈圓形凹穴221C的兩圓心連線與第三外圈圓形凹穴223B及第一外圈圓形凹穴221C的兩圓周接點之間具有第一間距D1，第二外圈圓形凹穴組22B的第三外圈圓形凹穴223B及第二外圈圓形凹穴222B兩圓心連線上與第三外圈圓形凹穴223B及第二外圈圓形凹穴222B的兩圓周接點之間具有第二間距D2，或第二外圈圓形凹穴組22B的第二外圈圓形凹穴222B及第一外圈圓形凹穴221B的兩圓心連線上與第二外圈圓形凹穴222B及第一外圈圓形凹穴221B的兩圓周接點之間具有第二間距D2，第二內圈圓形凹穴20B及第二外圈圓形凹穴組22B的第三外圈圓形凹穴223B的兩圓心連線上與第二內圈圓形凹穴20B及第三外圈圓形凹穴223B的兩圓周接點之間具有第一距離d b1，第二內圈圓形凹穴20B及第三外圈圓形凹穴組22C的第一外圈圓形凹穴221C的兩圓心連線上與第二內圈圓形凹穴20B及第一外圈圓形凹穴221C的兩圓周接點之間具有第二距離d b2。相似的，第一間距D1為第三外圈圓形凹穴組22C的第三外圈圓形凹穴223C及第一外圈圓形凹穴組22A的第一外圈圓形凹穴221A的兩圓心連線與第三外圈圓形凹穴223C及第一外圈圓形凹穴221A的兩圓周接點之間具有第一間距D1，第二間距D2為第三外圈圓形凹穴組22C的第三外圈圓形凹穴223C及第二外圈圓形凹穴222C兩圓心連線上與第三外圈圓形凹穴223C及第二外圈圓形凹穴222C的兩圓周接點之間具有第二間距D2，或第三外圈圓形凹穴組22C的第二外圈圓形凹穴222C及第一外圈圓形凹穴221C的兩圓心連線上與第二外圈圓形凹穴222C及第一外圈圓形凹穴221C的兩圓周接點之間具有第二間距D2，第三內圈圓形凹穴20C及第三外圈圓形凹穴組22C的第三外圈圓形凹穴223C的兩圓心連線上與第三內圈圓形凹穴20C及第三外圈圓形凹穴223C的兩圓周接點之間具有第一距離d c1，第三內圈圓形凹穴20C及第一外圈圓形凹穴組22A的第一外圈圓形凹穴221A的兩圓心連線上與第三內圈圓形凹穴20C及第一外圈圓形凹穴221A的兩圓周接點之間具有第二距離d c2。於本實施例中，第一間距D1大於第二間距D2。 In one embodiment of the present application, the first spacing D1 is the shortest distance between the first outer circular recess 221 (221A, 221B, 221C) and the third outer circular recess (223A, 223B, 223C) in two adjacent outer circular recess groups 22 (22A, 22B, 22C). For example, the shortest distance between the third outer circular recess 223A of the first outer circular recess group 22A and the first outer circular recess 221B of the second outer circular recess group 22B is the first spacing D1, that is, the first spacing D1 is between the two center connecting lines of the third outer circular recess 223A of the first outer circular recess group 22A and the first outer circular recess 221B of the second outer circular recess group 22B and the two circumferential connecting points of the third outer circular recess 223A and the first outer circular recess 221B. The second spacing D2 is the shortest distance between any two adjacent outer circular recesses in each of the plurality of outer circular recess groups 22 (22A, 22B, 22C). For example, a second spacing D2 is provided between the two circumferential contacts of the third outer circular recess 223A and the second outer circular recess 222A on a line connecting the two centers of the third outer circular recess 223A and the second outer circular recess 222A of the first outer circular recess group 22A, or a second spacing D2 is provided between the two circumferential contacts of the second outer circular recess 222A and the first outer circular recess 221A of the first outer circular recess group 22A. The first distance (d a1 , d b1 , d c1 ) and the second distance (d a2 , d b2 , d c2 ) are respectively the shortest distances between the two adjacent outer circle circular recesses among each inner circle circular recess 20 (20A, 20B, 20C) and the adjacent outer circle circular recesses 221 (221A, 221B, 221C), 222 (222A, 222B, 222C), 223 (223A, 223B, 223C). For example, a first distance d a1 exists between the line connecting the two centers of the first inner circular recess 20A and the third outer circular recess 223A of the first outer circular recess set 22A and the two circumferential contact points of the first inner circular recess 20A and the third outer circular recess 223A, and a second distance d a2 exists between the line connecting the two centers of the first inner circular recess 20A and the first outer circular recess 221B of the second outer circular recess set 22B and the two circumferential contact points of the first inner circular recess 20A and the first outer circular recess 221B. Similarly, there is a first spacing D1 between the two center lines of the third outer circular recess 223B of the second outer circular recess group 22B and the first outer circular recess 221C of the third outer circular recess group 22C and the two circumferential joints of the third outer circular recess 223B and the first outer circular recess 221C, and a first spacing D2 between the two center lines of the third outer circular recess 223B and the second outer circular recess 222B of the second outer circular recess group 22B and the two circumferential joints of the third outer circular recess 223B and the second outer circular recess 222B. The second distance D2 is provided, or the distance between the two circumferential points of the second outer circular recess 222B and the first outer circular recess 221B on the line connecting the two centers of the second outer circular recess 222B and the first outer circular recess 221B is provided, and the distance between the two circumferential points of the second inner circular recess 20B and the third outer circular recess 223B on the line connecting the two centers of the second inner circular recess 20B and the third outer circular recess 223B is provided. b1 , a second distance d b2 exists between the line connecting the two centers of the second inner circular cavity 20B and the first outer circular cavity 221C of the third outer circular cavity set 22C and the two circumferential contact points of the second inner circular cavity 20B and the first outer circular cavity 221C. Similarly, the first spacing D1 is the distance between the two circumferential joints of the third outer circular recess 223C and the first outer circular recess 221A of the first outer circular recess group 22A and the third outer circular recess 223C and the first outer circular recess 221A, and the second spacing D2 is the distance between the two circumferential joints of the third outer circular recess 223C and the second outer circular recess 222C of the third outer circular recess group 22C and the third outer circular recess 223C and the second outer circular recess 222C. There is a second distance D2 between the two circumferential joints, or there is a second distance D2 between the two circumferential joints of the second outer circular concave 222C and the first outer circular concave 221C on the line connecting the two centers of the third inner circular concave 20C and the third outer circular concave 223C of the third outer circular concave set 22C and the second outer circular concave 222C and the first outer circular concave 221C, and there is a first distance d between the two circumferential joints of the third inner circular concave 20C and the third outer circular concave 223C on the line connecting the two centers of the third inner circular concave 20C and the third outer circular concave 223C. c1 , a second distance dc2 exists between the two circumferential contact points of the third inner circular concave 20C and the first outer circular concave 221A of the first outer circular concave set 22A and the two centers of the third inner circular concave 20C and the first outer circular concave 221A. In this embodiment, the first distance D1 is greater than the second distance D2.
如圖2所示，任一複數個外圈圓形凹穴組22（22A、22B、22C）中，通過任兩相鄰的外圈圓形凹穴221、222、223（221A、222A、223A、221B、222B、223B、221C、222C、223C）之圓心與載體圓心C的兩軸線之間具有一夾角θ1。任兩相鄰的複數個外圈圓形凹穴組22（22A、22B、22C）中，其中之第一外圈圓形凹穴221（221A、221B、221C）具有一圓心，及與其相鄰的第三外圈圓形凹穴223（223A、223B、223C）具有一圓心，其中分別通過兩圓心及通過載體圓心C的兩軸線之間具有一夾角θ2。例如第二外圈圓形凹穴組22B之第一外圈圓形凹穴221B及與其相鄰的第二外圈圓形凹穴222B分別具有第一圓心C1及第二圓心C2，其中通過載體圓心C及第一圓心C1的第一軸線L1與通過載體圓心C及第二圓心C2的第二軸線L2之間具有一夾角θ1。於一實施例中，夾角θ1約為25°~45°。此外，第一外圈圓形凹穴組22A的第一外圈圓形凹穴221A具有第三圓心C3，及與第一外圈圓形凹穴221A相鄰的第三外圈圓形凹穴組22C之第三外圈圓形凹穴223C具有第四圓心C4，其中通過載體圓心C及第三圓心C3的第三軸線L3與通過載體圓心C及第四圓心C4的第四軸線L4之間具有一夾角θ2。於一實施例中，夾角θ2約為40°~60°。在本實施例中，第一軸線L1與第二軸線L2之間的夾角θ1小於第三軸線L3與第四軸線L4之間的夾角θ2。相似的，第二外圈圓形凹穴組22B中相鄰的第二外圈圓形凹穴222B及第三外圈圓形凹穴223B、第一外圈圓形凹穴組22A中相鄰的第一外圈圓形凹穴221A及第二外圈圓形凹穴222A、第二外圈圓形凹穴222A及第三外圈圓形凹穴223A、第三外圈圓形凹穴組22C中相鄰的第一外圈圓形凹穴221C及第二外圈圓形凹穴222C、第二外圈圓形凹穴222C及第三外圈圓形凹穴223C、第一外圈圓形凹穴組22A的第三外圈圓形凹穴223A及與其相鄰的第二外圈圓形凹穴組22B的第一外圈圓形凹穴221B、第二外圈圓形凹穴組22B的第三外圈圓形凹穴223B及與其相鄰的第三外圈圓形凹穴組22C的第一外圈圓形凹穴221C皆可具有上述圓心、軸線及夾角θ1、θ2。As shown in FIG. 2 , in any of the plurality of outer circular recess groups 22 ( 22A, 22B, 22C), there is an angle θ1 between the two axes passing through the centers of any two adjacent outer circular recesses 221, 222, 223 ( 221A, 222A, 223A, 221B, 222B, 223B, 221C, 222C, 223C) and the center C of the carrier. In any two adjacent outer circular recess groups 22 (22A, 22B, 22C), the first outer circular recess 221 (221A, 221B, 221C) has a center, and the third outer circular recess 223 (223A, 223B, 223C) adjacent thereto has a center, wherein an angle θ2 is formed between two axes passing through the two centers and the center C of the carrier, respectively. For example, the first outer circular cavity 221B and the adjacent second outer circular cavity 222B of the second outer circular cavity set 22B respectively have a first center C1 and a second center C2, wherein a first axis L1 passing through the carrier center C and the first center C1 and a second axis L2 passing through the carrier center C and the second center C2 have an angle θ1. In one embodiment, the angle θ1 is about 25° to 45°. In addition, the first outer circular recess 221A of the first outer circular recess group 22A has a third center C3, and the third outer circular recess 223C of the third outer circular recess group 22C adjacent to the first outer circular recess 221A has a fourth center C4, wherein a third axis L3 passing through the carrier center C and the third center C3 and a fourth axis L4 passing through the carrier center C and the fourth center C4 have an angle θ2. In one embodiment, the angle θ2 is about 40° to 60°. In this embodiment, the angle θ1 between the first axis L1 and the second axis L2 is smaller than the angle θ2 between the third axis L3 and the fourth axis L4. Similarly, the adjacent second outer circular recess 222B and the third outer circular recess 223B in the second outer circular recess group 22B, the adjacent first outer circular recess 221A and the second outer circular recess 222A, the second outer circular recess 222A and the third outer circular recess 223A in the first outer circular recess group 22A, the adjacent first outer circular recess 221C and the second outer circular recess 222C, the adjacent first outer circular recess 221C and the second outer circular recess 222C in the third outer circular recess group 22C, and the adjacent second outer circular recess 222A and the third outer circular recess 223A in the first outer circular recess group 22A. The second outer circle circular recess 222C and the third outer circle circular recess 223C, the third outer circle circular recess 223A of the first outer circle circular recess group 22A and the first outer circle circular recess 221B of the second outer circle circular recess group 22B adjacent thereto, the third outer circle circular recess 223B of the second outer circle circular recess group 22B and the first outer circle circular recess 221C of the third outer circle circular recess group 22C adjacent thereto may all have the above-mentioned center of circle, axis and angles θ1 and θ2.
圖3顯示本申請案一實施例晶圓載體3之上視圖。晶圓載體3包含複數個內圈圓形凹穴30，複數個外圈圓形凹穴321(321A、321B 、321C、321D) 、322(322A、322B 、322C、322D)環繞內圈圓形凹穴30設置，以及複數個外圈圓形凹穴組32，其中複數個外圈圓形凹穴組32分別包含所述複數個外圈圓形凹穴之一或多個。於一實施例中，複數個內圈圓形凹穴30包含第一內圈圓形凹穴30A、第二內圈圓形凹穴30B、第三內圈圓形凹穴30C、第四內圈圓形凹穴30D環繞晶圓載體3的載體圓心C設置。於本實施例中，複數個外圈圓形凹穴組32包含第一外圈圓形凹穴組32A、第二外圈圓形凹穴組32B、第三外圈圓形凹穴組32C、第四外圈圓形凹穴組32D圍繞第一內圈圓形凹穴30A、第二內圈圓形凹穴30B、第三內圈圓形凹穴30C、第四內圈圓形凹穴30D設置。於本實施例中，第一外圈圓形凹穴組32A、第二外圈圓形凹穴組32B、第三外圈圓形凹穴組32C及第四外圈圓形凹穴組32D分別包含兩個外圈圓形凹穴321、322，分別包含第一外圈圓形凹穴321A、321B、321C、321D及第二外圈圓形凹穴322A、322B、322C、322D。FIG3 shows a top view of a wafer carrier 3 according to an embodiment of the present application. The wafer carrier 3 includes a plurality of inner circular recesses 30, a plurality of outer circular recesses 321 (321A, 321B, 321C, 321D), 322 (322A, 322B, 322C, 322D) arranged around the inner circular recesses 30, and a plurality of outer circular recess groups 32, wherein the plurality of outer circular recess groups 32 respectively include one or more of the plurality of outer circular recesses. In one embodiment, the plurality of inner circular recesses 30 include a first inner circular recess 30A, a second inner circular recess 30B, a third inner circular recess 30C, and a fourth inner circular recess 30D, which are disposed around the carrier center C of the wafer carrier 3. In this embodiment, the plurality of outer circular recess groups 32 include a first outer circular recess group 32A, a second outer circular recess group 32B, a third outer circular recess group 32C, and a fourth outer circular recess group 32D, which are disposed around the first inner circular recess 30A, the second inner circular recess 30B, the third inner circular recess 30C, and the fourth inner circular recess 30D. In this embodiment, the first outer circle circular recess group 32A, the second outer circle circular recess group 32B, the third outer circle circular recess group 32C and the fourth outer circle circular recess group 32D respectively include two outer circle circular recesses 321, 322, including first outer circle circular recesses 321A, 321B, 321C, 321D and second outer circle circular recesses 322A, 322B, 322C, 322D respectively.
如圖3所示，於本實施例中，第一外圈圓形凹穴組32A相鄰於第二外圈圓形凹穴組32B，第二外圈圓形凹穴組32B相鄰於第三外圈圓形凹穴組32C，第三外圈圓形凹穴組32C相鄰於第四外圈圓形凹穴組32D，第四外圈圓形凹穴組32D相鄰於第一外圈圓形凹穴組32A。第一外圈圓形凹穴321A、321B、321C、321D分別相鄰於第二外圈圓形凹穴322A、322B、322C、322D。第一外圈圓形凹穴組32A的第二外圈圓形凹穴322A相鄰於第二外圈圓形凹穴組32B的第一外圈圓形凹穴321B，第二外圈圓形凹穴組32B的第二外圈圓形凹穴322B相鄰於第三外圈圓形凹穴組32C的第一外圈圓形凹穴321C，第三外圈圓形凹穴組32C的第二外圈圓形凹穴322C相鄰於第四外圈圓形凹穴組32D的第一外圈圓形凹穴321D，第四外圈圓形凹穴組32D的第二外圈圓形凹穴322D相鄰於第一外圈圓形凹穴組32A的第一外圈圓形凹穴321A。As shown in FIG. 3 , in this embodiment, the first outer circle circular recess group 32A is adjacent to the second outer circle circular recess group 32B, the second outer circle circular recess group 32B is adjacent to the third outer circle circular recess group 32C, the third outer circle circular recess group 32C is adjacent to the fourth outer circle circular recess group 32D, and the fourth outer circle circular recess group 32D is adjacent to the first outer circle circular recess group 32A. The first outer circle circular recesses 321A, 321B, 321C, and 321D are adjacent to the second outer circle circular recesses 322A, 322B, 322C, and 322D, respectively. The second outer circular recess 322A of the first outer circular recess group 32A is adjacent to the first outer circular recess 321B of the second outer circular recess group 32B, the second outer circular recess 322B of the second outer circular recess group 32B is adjacent to the first outer circular recess 321C of the third outer circular recess group 32C, the second outer circular recess 322C of the third outer circular recess group 32C is adjacent to the first outer circular recess 321D of the fourth outer circular recess group 32D, and the second outer circular recess 322D of the fourth outer circular recess group 32D is adjacent to the first outer circular recess 321A of the first outer circular recess group 32A.
在本申請案的一實施例中，其中，複數個外圈圓形凹穴321(321A、321B 、321C、321D) 、322(322A、322B 、322C、322D)中的任兩相鄰的外圈圓形凹穴之間具有一間距，其中所述間距包含任相鄰兩外圈圓形凹穴組32(32A、32B 、32C、32D)鄰近的兩外圈圓形凹穴之間具有第一間距D1，以及同一外圈圓形凹穴組32(32A、32B 、32C、32D)中任兩相鄰外圈圓形凹穴之間具有第二間距D2。詳述如後。如圖3所示，第一外圈圓形凹穴組32A與第二外圈圓形凹穴組32B之間、第二外圈圓形凹穴組32B與第三外圈圓形凹穴組32C之間、第三外圈圓形凹穴組32C與第四外圈圓形凹穴組32D之間、第四外圈圓形凹穴組32D與第一外圈圓形凹穴組32A之間分別具有第一間距D1，換句話說，第一外圈圓形凹穴組32A的第二外圈圓形凹穴322A與第二外圈圓形凹穴組32B的第一外圈圓形凹穴321B之間、第二外圈圓形凹穴組32B的第二外圈圓形凹穴322B與第三外圈圓形凹穴組32C的第一外圈圓形凹穴321C之間、第三外圈圓形凹穴組32C的第二外圈圓形凹穴322C與第四外圈圓形凹穴組32D的第一外圈圓形凹穴321D之間、第四外圈圓形凹穴組32D的第二外圈圓形凹穴322D與第一外圈圓形凹穴組32A的第一外圈圓形凹穴321A之間分別具有第一間距D1。同一組中任兩相鄰的外圈圓形凹穴分別具有第二間距D2，例如第一外圈圓形凹穴321A、321B、321C、321D與第二外圈圓形凹穴322A、322B、322C、322D之間分別具有第二間距D2。在本申請案的一實施例中，晶圓載體3中所包含的複數個第一間距D1彼此之間相同或不同。晶圓載體3中所包含的複數個第二間距D2彼此之間相同或不同。In one embodiment of the present application, any two adjacent outer circular recesses in the plurality of outer circular recesses 321 (321A, 321B, 321C, 321D) and 322 (322A, 322B, 322C, 322D) have a spacing, wherein the spacing includes a first spacing D1 between two adjacent outer circular recesses in any two adjacent outer circular recess groups 32 (32A, 32B, 32C, 32D), and a second spacing D2 between any two adjacent outer circular recesses in the same outer circular recess group 32 (32A, 32B, 32C, 32D). Details are as follows. As shown in FIG. 3 , there is a first spacing D1 between the first outer circular recess group 32A and the second outer circular recess group 32B, between the second outer circular recess group 32B and the third outer circular recess group 32C, between the third outer circular recess group 32C and the fourth outer circular recess group 32D, and between the fourth outer circular recess group 32D and the first outer circular recess group 32A. In other words, the second outer circular recess 322A of the first outer circular recess group 32A and the first outer circular recess 322B of the second outer circular recess group 32B are spaced from each other. There is a first spacing D1 between the holes 321B, between the second outer circular hole 322B of the second outer circular hole group 32B and the first outer circular hole 321C of the third outer circular hole group 32C, between the second outer circular hole 322C of the third outer circular hole group 32C and the first outer circular hole 321D of the fourth outer circular hole group 32D, and between the second outer circular hole 322D of the fourth outer circular hole group 32D and the first outer circular hole 321A of the first outer circular hole group 32A. Any two adjacent outer circular recesses in the same group have a second spacing D2, for example, the first outer circular recesses 321A, 321B, 321C, 321D and the second outer circular recesses 322A, 322B, 322C, 322D have a second spacing D2. In one embodiment of the present application, the plurality of first spacings D1 included in the wafer carrier 3 are the same or different from each other. The plurality of second spacings D2 included in the wafer carrier 3 are the same or different from each other.
如圖3所示，於一實施例中，複數個內圈圓形凹穴30（30A、30B、30C、30D）鄰近於複數個外圈圓形凹穴321(321A、321B 、321C、321D) 、322(322A、322B 、322C、322D)中的兩個外圈圓形凹穴。於一實施例中，複數個內圈圓形凹穴30（30A、30B、30C、30D）分別鄰近於複數個外圈圓形凹穴組32(32A、32B 、32C、32D)中的兩個外圈圓形凹穴。於本實施例中，第一內圈圓形凹穴30A鄰近於第一外圈圓形凹穴組32A的第一外圈圓形凹穴321A及第二外圈圓形凹穴322A，第一內圈圓形凹穴30A與第一外圈圓形凹穴321A及第二外圈圓形凹穴322A之間分別具有第一距離d a1及第二距離d a2。其中第一距離d a1大於、等於、或小於第二距離d a2。相似的，第二內圈圓形凹穴30B鄰近於第二外圈圓形凹穴組32B的第一外圈圓形凹穴321B及第二外圈圓形凹穴322B，第二內圈圓形凹穴30B與第一外圈圓形凹穴321B及第二外圈圓形凹穴322B之間分別具有第一距離d b1及第二距離d b2。其中第一距離d b1大於、等於、或小於第二距離d b2。第三內圈圓形凹穴30C鄰近於第三外圈圓形凹穴組32C的第一外圈圓形凹穴321C及第二外圈圓形凹穴322C，第三內圈圓形凹穴30C與第一外圈圓形凹穴321C及第二外圈圓形凹穴322C之間分別具有第一距離d c1及第二距離d c2。其中第一距離d c1大於、等於、或小於第二距離d c2。第四內圈圓形凹穴30D最鄰近於第三外圈圓形凹穴組32C的第一外圈圓形凹穴321C及第二外圈圓形凹穴322C，第三內圈圓形凹穴30D與第一外圈圓形凹穴321C及第二外圈圓形凹穴322C之間分別具有第一距離d d1及第二距離d d2。其中第一距離d d1大於、等於、或小於第二距離d d2。相較於第一外圈圓形凹穴321A與第二外圈圓形凹穴322A的第二間距D2，第一距離d a1、第二距離d a2與第二間距D2至少其中之一不相等於其中之另一。相似的，相較於第一外圈圓形凹穴321B與第二外圈圓形凹穴322B的第二間距D2，第一距離d b1、第二距離d b2與第二間距D2至少其中之一不相等於其中之另一。相較於第一外圈圓形凹穴321C與第二外圈圓形凹穴322C的第二間距D2，第一距離d c1、第二距離d c2與第二間距D2至少其中之一不相等於其中之另一。相似的，相較於第一外圈圓形凹穴321D與第二外圈圓形凹穴322D的第二間距D2，第一距離d d1、第二距離d d2與第二間距D2至少其中之一不相等於其中之另一。於一實施例中，第一距離d a1、d b1、d c1、d d1分別相等於第二距離d a2、d b2、d c2、d d2，但不相等於第二間距D2。於一實施例中，第一距離d a1、d b1、d c1、d d1分別相等於第二距離d a2、d b2、d c2、d d2，且小於第二間距D2。於一實施例中，第一距離d a1、d b1、d c1、d d1分別小於各內圈圓形凹穴與其他外圈圓形凹穴之間的距離。 As shown in FIG3 , in one embodiment, a plurality of inner circular recesses 30 (30A, 30B, 30C, 30D) are adjacent to two outer circular recesses in a plurality of outer circular recesses 321 (321A, 321B, 321C, 321D) and 322 (322A, 322B, 322C, 322D). In one embodiment, a plurality of inner circular recesses 30 (30A, 30B, 30C, 30D) are adjacent to two outer circular recesses in a plurality of outer circular recess groups 32 (32A, 32B, 32C, 32D). In this embodiment, the first inner circular recess 30A is adjacent to the first outer circular recess 321A and the second outer circular recess 322A of the first outer circular recess set 32A, and the first inner circular recess 30A and the first outer circular recess 321A and the second outer circular recess 322A have a first distance d a1 and a second distance d a2 , respectively. The first distance d a1 is greater than, equal to, or less than the second distance d a2 . Similarly, the second inner circular recess 30B is adjacent to the first outer circular recess 321B and the second outer circular recess 322B of the second outer circular recess set 32B, and the second inner circular recess 30B and the first outer circular recess 321B and the second outer circular recess 322B have a first distance d b1 and a second distance d b2 , respectively. The first distance d b1 is greater than, equal to, or less than the second distance d b2 . The third inner circular recess 30C is adjacent to the first outer circular recess 321C and the second outer circular recess 322C of the third outer circular recess set 32C, and the third inner circular recess 30C and the first outer circular recess 321C and the second outer circular recess 322C have a first distance d c1 and a second distance d c2 , respectively. The first distance d c1 is greater than, equal to, or less than the second distance d c2 . The fourth inner circular recess 30D is closest to the first outer circular recess 321C and the second outer circular recess 322C of the third outer circular recess group 32C. The third inner circular recess 30D and the first outer circular recess 321C and the second outer circular recess 322C have a first distance d d1 and a second distance d d2 , respectively. The first distance d d1 is greater than, equal to, or less than the second distance d d2 . Compared to the second distance D2 between the first outer circular recess 321A and the second outer circular recess 322A, at least one of the first distance d a1 , the second distance d a2 and the second distance D2 is not equal to the other one. Similarly, compared to the second distance D2 between the first outer circle circular recess 321B and the second outer circle circular recess 322B, at least one of the first distance d b1 , the second distance d b2 and the second distance D2 is not equal to the other. Compared to the second distance D2 between the first outer circle circular recess 321C and the second outer circle circular recess 322C, at least one of the first distance d c1 , the second distance d c2 and the second distance D2 is not equal to the other. Similarly, compared to the second distance D2 between the first outer circle circular recess 321D and the second outer circle circular recess 322D, at least one of the first distance d d1 , the second distance d d2 and the second distance D2 is not equal to the other. In one embodiment, the first distances da1 , db1 , dc1 , dd1 are respectively equal to the second distances da2 , db2 , dc2 , dd2 , but are not equal to the second distance D2. In one embodiment, the first distances da1 , db1 , dc1 , dd1 are respectively equal to the second distances da2 , db2 , dc2 , dd2 , and are smaller than the second distance D2. In one embodiment, the first distances da1 , db1 , dc1 , dd1 are respectively smaller than the distances between each inner circular recess and other outer circular recesses.
在本申請案的一實施例中，第一間距D1為兩相鄰之外圈圓形凹穴組32（32A、32B、32C、32D）中第一外圈圓形凹穴321（321A、321B、321C、321D）與第二外圈圓形凹穴（322A、322B、322C、322D）之間的最短距離。例如第一外圈圓形凹穴組32A的第二外圈圓形凹穴322A及第二外圈圓形凹穴組32B的第一外圈圓形凹穴321B的最短距離為第一間距D1，亦即第一外圈圓形凹穴組32A的第二外圈圓形凹穴322A及第二外圈圓形凹穴組32B的第一外圈圓形凹穴321B的兩圓心連線與第二外圈圓形凹穴322A及第一外圈圓形凹穴321B的兩圓周接點之間具有第一間距D1，各複數外圈圓形凹穴組32（32A、32B、32C、32D）中任兩相鄰外圈圓形凹穴之間的最短間距。例如為第一外圈圓形凹穴組32A的第一外圈圓形凹穴321A及第二外圈圓形凹穴322A兩圓心連線上與第一外圈圓形凹穴321A及第二外圈圓形凹穴322A的兩圓周接點之間具有第二間距D2。第一距離（d a1、d b1、d c1、d d1）為各內圈圓形凹穴30（30A、30B、30C、30D）及與其相鄰的外圈圓形凹穴組32（32A、32B、32C、32D）中最鄰近的外圈圓形凹穴的最短距離。例如第一內圈圓形凹穴30A及第一外圈圓形凹穴組32A的第一外圈圓形凹穴321A的兩圓心連線上與第一內圈圓形凹穴30A及第一外圈圓形凹穴321A的兩圓周接點之間具有第一距離d a1。第二距離（d a2、d b2、d c2、d d2）為各內圈圓形凹穴30（30A、30B、30C、30D）及與其相鄰的外圈圓形凹穴組32（32A、32B、32C、32D）中第二鄰近的外圈圓形凹穴的最短距離。例如第一內圈圓形凹穴30A及第一外圈圓形凹穴組32A的第二外圈圓形凹穴322A的兩圓心連線上與第一內圈圓形凹穴30A及第二外圈圓形凹穴322A的兩圓周接點之間具有第二距離d a2。相似的，第二外圈圓形凹穴組32B的第二外圈圓形凹穴322B及第三外圈圓形凹穴組32C的第一外圈圓形凹穴321C的兩圓心連線與第二外圈圓形凹穴322B及第一外圈圓形凹穴321C的兩圓周接點之間具有第一間距D1，第二外圈圓形凹穴組32B的第一外圈圓形凹穴321B及第二外圈圓形凹穴322B兩圓心連線上與第一外圈圓形凹穴321B及第二外圈圓形凹穴322B的兩圓周接點之間具有第二間距D2，第二內圈圓形凹穴30B及第二外圈圓形凹穴組32B的第一外圈圓形凹穴321B的兩圓心連線上與第二內圈圓形凹穴30B及第一外圈圓形凹穴321B 的兩圓周接點之間具有第一距離d b1，第二內圈圓形凹穴30B及第二外圈圓形凹穴組32B的第二外圈圓形凹穴322B的兩圓心連線上與第二內圈圓形凹穴30B及第二外圈圓形凹穴322B的兩圓周接點之間具有第二距離d b2。相似的，第三外圈圓形凹穴組32C的第二外圈圓形凹穴322C及第四外圈圓形凹穴組32D的第一外圈圓形凹穴321D的兩圓心連線與第二外圈圓形凹穴322C及第一外圈圓形凹穴321D的兩圓周接點之間具有第一間距D1，第三外圈圓形凹穴組32C的第一外圈圓形凹穴321C及第二外圈圓形凹穴322C兩圓心連線上與第一外圈圓形凹穴321C及第二外圈圓形凹穴322C的兩圓周接點之間具有第二間距D2，第三內圈圓形凹穴30C及第三外圈圓形凹穴組32C的第一外圈圓形凹穴321C的兩圓心連線上與第三內圈圓形凹穴30C及第一外圈圓形凹穴321C的兩圓周接點之間具有第一距離d c1，第三內圈圓形凹穴30C及第三外圈圓形凹穴組32C的第二外圈圓形凹穴322C的兩圓心連線上與第三內圈圓形凹穴30C及第二外圈圓形凹穴322C的兩圓周接點之間具有第二距離d c2。相似的，第四外圈圓形凹穴組32D的第二外圈圓形凹穴322D及第一外圈圓形凹穴組32A的第一外圈圓形凹穴321A的兩圓心連線與第二外圈圓形凹穴322D及第一外圈圓形凹穴321A的兩圓周接點之間具有第一間距D1，第四外圈圓形凹穴組32D的第一外圈圓形凹穴321D及第二外圈圓形凹穴322D兩圓心連線上與第一外圈圓形凹穴321D及第二外圈圓形凹穴322D的兩圓周接點之間具有第二間距D2，第四內圈圓形凹穴30D及第四外圈圓形凹穴組32D的第一外圈圓形凹穴321D的兩圓心連線上與第四內圈圓形凹穴30D及第一外圈圓形凹穴321D的兩圓周接點之間具有第一距離d d1，第四內圈圓形凹穴30D及第四外圈圓形凹穴組32D的第二外圈圓形凹穴322D的兩圓心連線上與第四內圈圓形凹穴30D及第二外圈圓形凹穴322D的兩圓周接點之間具有第二距離d d2。於本實施例中，第一間距D1大於第二間距D2。 In one embodiment of the present application, the first spacing D1 is the shortest distance between the first outer circular recess 321 (321A, 321B, 321C, 321D) and the second outer circular recess (322A, 322B, 322C, 322D) in two adjacent outer circular recess groups 32 (32A, 32B, 32C, 32D). For example, the shortest distance between the second outer circular recess 322A of the first outer circular recess group 32A and the first outer circular recess 321B of the second outer circular recess group 32B is the first spacing D1, that is, the line connecting the two centers of the second outer circular recess 322A of the first outer circular recess group 32A and the first outer circular recess 321B of the second outer circular recess group 32B and the two circumferential contacts of the second outer circular recess 322A and the first outer circular recess 321B has the first spacing D1, which is the shortest distance between any two adjacent outer circular recesses in each of the plurality of outer circular recess groups 32 (32A, 32B, 32C, 32D). For example, the second distance D2 is provided between the two circumferential contact points of the first outer circular recess 321A and the second outer circular recess 322A on the line connecting the two centers of the first outer circular recess 321A and the second outer circular recess 322A of the first outer circular recess group 32A. The first distance (d a1 , d b1 , d c1 , d d1 ) is the shortest distance between each inner circular recess 30 (30A, 30B, 30C, 30D) and the outer circular recess group 32 (32A, 32B, 32C, 32D) adjacent thereto. For example, there is a first distance d a1 between the two circumferential contact points of the first inner circular concave 30A and the first outer circular concave 321A of the first inner circular concave 30A and the first outer circular concave 321A. The second distances (d a2 , d b2 , d c2 , d d2 ) are the shortest distances between each inner circular concave 30 (30A, 30B, 30C, 30D) and the second adjacent outer circular concave in the outer circular concave group 32 (32A, 32B, 32C, 32D) adjacent thereto. For example, a second distance d a2 exists between a line connecting two centers of the first inner circular cavity 30A and the second outer circular cavity 322A of the first outer circular cavity set 32A and two circumferential contact points of the first inner circular cavity 30A and the second outer circular cavity 322A. Similarly, a first spacing D1 is provided between the two centers of the second outer circular recess 322B of the second outer circular recess group 32B and the first outer circular recess 321C of the third outer circular recess group 32C and the two circumferential contacts of the second outer circular recess 322B and the first outer circular recess 321C, a second spacing D2 is provided between the two centers of the first outer circular recess 321B and the second outer circular recess 322B of the second outer circular recess group 32B and the two circumferential contacts of the first outer circular recess 321B and the second outer circular recess 322B, and a second spacing D2 is provided between the two centers of the second inner circular recess 30B and the first outer circular recess 321B of the second outer circular recess group 32B and the two circumferential contacts of the second inner circular recess 30B and the first outer circular recess 321B. There is a first distance d b1 between the two circumferential contacts of the second inner circular recess 30B and the second outer circular recess 322B of the second outer circular recess set 32B, and a second distance d b2 between the two circumferential contacts of the second inner circular recess 30B and the second outer circular recess 322B. Similarly, there is a first distance D1 between the two circumferential contacts of the second outer circular recess 322C of the third outer circular recess set 32C and the first outer circular recess 321D of the fourth outer circular recess set 32D, and the first distance D2 between the two circumferential contacts of the second outer circular recess 322C and the first outer circular recess 321D of the third outer circular recess set 32C. A second distance D2 is provided between the two circumferential contacts of the first outer circular recess 321C and the second outer circular recess 322C on the line connecting the two centers of the hole 322C, a first distance dc1 is provided between the two circumferential contacts of the third inner circular recess 30C and the first outer circular recess 321C of the third outer circular recess group 32C, and a second distance dc2 is provided between the two circumferential contacts of the third inner circular recess 30C and the second outer circular recess 322C on the line connecting the two centers of the third inner circular recess 30C and the second outer circular recess 322C of the third outer circular recess group 32C . Similarly, a first spacing D1 exists between the two center connecting lines of the second outer circular recess 322D of the fourth outer circular recess group 32D and the first outer circular recess 321A of the first outer circular recess group 32A and the two circumferential connecting points of the second outer circular recess 322D and the first outer circular recess 321A. There is a second distance D2 between the two circumferential points of the first outer circular concave 321D and the second outer circular concave 322D on the line connecting the two centers of the hole 322D, the first distance d d1 between the two circumferential points of the first outer circular concave 321D of the fourth inner circular concave 30D and the fourth outer circular concave set 32D, and the second distance d d2 between the two circumferential points of the fourth inner circular concave 30D and the second outer circular concave 322D on the line connecting the two centers of the fourth inner circular concave 30D and the fourth outer circular concave set 32D. In this embodiment, the first distance D1 is greater than the second distance D2.
此外，如圖3所示，於本實施例中，晶圓載體3中的複數個外圈圓形凹穴組、複數個內圈圓形凹穴的數量分別可為四個。每一外圈圓形凹穴組之外圈圓形凹穴的數量可為兩個。In addition, as shown in FIG3 , in this embodiment, the number of the plurality of outer circular recess groups and the number of the plurality of inner circular recesses in the wafer carrier 3 can be four respectively. The number of the outer circular recesses in each outer circular recess group can be two.
圖4顯示本申請案一實施例晶圓載體4之上視圖。在圖4的實施例中，晶圓載體4的結構與圖3所示的晶圓載體3的結構大致上相同，故於此不再贅述。差異在於晶圓載體4的每一內圈圓形凹穴40A、40B、40C、40D分別對應每一第一間距D1設置。FIG4 shows a top view of a wafer carrier 4 according to an embodiment of the present application. In the embodiment of FIG4 , the structure of the wafer carrier 4 is substantially the same as the structure of the wafer carrier 3 shown in FIG3 , so it is not described here in detail. The difference is that each inner circular recess 40A, 40B, 40C, 40D of the wafer carrier 4 is respectively arranged corresponding to each first spacing D1.
如圖4所示，於一實施例中，複數個內圈圓形凹穴40（40A、40B、40C、40D）分別鄰近於複數個外圈圓形凹穴421(421A、421B、421C、421D)、422(422A、422B、422C、422D)。於一實施例中，複數個內圈圓形凹穴40（40A、40B、40C、40D）中的任一個分別鄰近於相鄰兩個外圈圓形凹穴組中421(421A、421B、421C、421D)、422(422A、422B、422C、422D)中的一個外圈圓形凹穴。於本實施例中，第一內圈圓形凹穴40A分別鄰近於第一外圈圓形凹穴組42A的第一外圈圓形凹穴421A以及第四外圈圓形凹穴組42D的第二外圈圓形凹穴422D。第一內圈圓形凹穴40A與第一外圈圓形凹穴421A之間及第二外圈圓形凹穴422D之間分別具有第一距離d a1及第二距離d a2。其中第一距離d a1大於、等於、或小於第二距離d a2。相似的，第二內圈圓形凹穴40B分別鄰近於第二外圈圓形凹穴組42B的第一外圈圓形凹穴421B以及第一外圈圓形凹穴組42A的第二外圈圓形凹穴422A。第二內圈圓形凹穴40B與第一外圈圓形凹穴421B之間及第二外圈圓形凹穴422A之間分別具有第一距離d b1及第二距離d b2。其中第一距離d b1大於、等於、或小於第二距離d b2。第三內圈圓形凹穴40C分別鄰近於第三外圈圓形凹穴組42C的第一外圈圓形凹穴421C以及第二外圈圓形凹穴組42B的第二外圈圓形凹穴422B。第三內圈圓形凹穴40C與第一外圈圓形凹穴421C之間及第二外圈圓形凹穴422B之間分別具有第一距離d c1及第二距離d c2。其中第一距離d c1大於、等於、或小於第二距離d c2。第四內圈圓形凹穴40D最鄰近於第四外圈圓形凹穴組42D的第一外圈圓形凹穴421D以及第三外圈圓形凹穴組42C的第二外圈圓形凹穴422C。第四內圈圓形凹穴40D與第一外圈圓形凹穴421D之間及第二外圈圓形凹穴422C之間分別具有第一距離d d1及第二距離d d2。其中第一距離d d1大於、等於、或小於第二距離d d2。於一實施例中，相較於第一外圈圓形凹穴421A與第二外圈圓形凹穴422B的第一間距D1，第一距離d a1、第二距離d a2與第一間距D1至少其中之一不相等於其中之另一。相似的，相較於第一外圈圓形凹穴421B與第二外圈圓形凹穴422A的第一間距D1，第一距離d b1、第二距離d b2與第一間距D1至少其中之一不相等於其中之另一。相較於第一外圈圓形凹穴421C與第二外圈圓形凹穴422B的第一間距D1，第一距離d c1、第二距離d c2與第一間距D1至少其中之一不相等於其中之另一。相較於第一外圈圓形凹穴421D與第二外圈圓形凹穴422C的第一間距D1，第一距離d d1、第二距離d d2與第一間距D1至少其中之一不相等於其中之另一。於一實施例中，第一距離d a1、d b1、d c1、d d1、第二距離d a2、d b2、d c2、d d2及第一間距D1互不相等。於一實施例中，第一距離d a1、d b1、d c1、d d1與第二距離d a2、d b2、d c2、d d2小於第一間距D1。 As shown in FIG. 4 , in one embodiment, a plurality of inner circular recesses 40 (40A, 40B, 40C, 40D) are respectively adjacent to a plurality of outer circular recesses 421 (421A, 421B, 421C, 421D) and 422 (422A, 422B, 422C, 422D). In one embodiment, any one of the plurality of inner circular recesses 40 (40A, 40B, 40C, 40D) is respectively adjacent to one outer circular recess of two adjacent outer circular recess groups 421 (421A, 421B, 421C, 421D) and 422 (422A, 422B, 422C, 422D). In this embodiment, the first inner circular recess 40A is adjacent to the first outer circular recess 421A of the first outer circular recess group 42A and the second outer circular recess 422D of the fourth outer circular recess group 42D. The first inner circular recess 40A and the first outer circular recess 421A and the second outer circular recess 422D have a first distance d a1 and a second distance d a2 , respectively. The first distance d a1 is greater than, equal to, or less than the second distance d a2 . Similarly, the second inner circular recess 40B is adjacent to the first outer circular recess 421B of the second outer circular recess group 42B and the second outer circular recess 422A of the first outer circular recess group 42A. The second inner circular recess 40B and the first outer circular recess 421B and the second outer circular recess 422A have a first distance d b1 and a second distance d b2 , respectively. The first distance d b1 is greater than, equal to, or less than the second distance d b2 . The third inner circular recess 40C is adjacent to the first outer circular recess 421C of the third outer circular recess group 42C and the second outer circular recess 422B of the second outer circular recess group 42B. The third inner circular recess 40C and the first outer circular recess 421C and the second outer circular recess 422B have a first distance d c1 and a second distance d c2 , respectively. The first distance d c1 is greater than, equal to, or less than the second distance d c2 . The fourth inner circular recess 40D is closest to the first outer circular recess 421D of the fourth outer circular recess group 42D and the second outer circular recess 422C of the third outer circular recess group 42C. The fourth inner circular recess 40D and the first outer circular recess 421D and the second outer circular recess 422C have a first distance d d1 and a second distance d d2 , respectively. The first distance d d1 is greater than, equal to, or less than the second distance d d2 . In one embodiment, compared to the first distance D1 between the first outer circular recess 421A and the second outer circular recess 422B, at least one of the first distance d a1 , the second distance d a2 and the first distance D1 is not equal to the other one. Similarly, compared to the first distance D1 between the first outer circle circular recess 421B and the second outer circle circular recess 422A, at least one of the first distance d b1 , the second distance d b2 and the first distance D1 is not equal to the other. Compared to the first distance D1 between the first outer circle circular recess 421C and the second outer circle circular recess 422B, at least one of the first distance d c1 , the second distance d c2 and the first distance D1 is not equal to the other. Compared to the first distance D1 between the first outer circle circular recess 421D and the second outer circle circular recess 422C, at least one of the first distance d d1 , the second distance d d2 and the first distance D1 is not equal to the other. In one embodiment, the first distances da1 , d b1 , d c1 , d d1 , the second distances da2 , d b2 , d c2 , d d2 and the first distance D1 are not equal to each other. In one embodiment, the first distances da1 , d b1 , d c1 , d d1 and the second distances da2 , d b2 , d c2 , d d2 are smaller than the first distance D1.
在本申請案的一實施例中，第一間距D1為兩相鄰之外圈圓形凹穴組42（42A、42B、42C、42D）中第一外圈圓形凹穴421（421A、421B、421C、421D）與第二外圈圓形凹穴（422A、422B、422C、422D）之間的最短距離。例如第一外圈圓形凹穴組42A的第一外圈圓形凹穴421A及第四外圈圓形凹穴組42D的第二外圈圓形凹穴422D的最短距離為第一間距D1，亦即第一外圈圓形凹穴組42A的第一外圈圓形凹穴421A及第四外圈圓形凹穴組42D的第二外圈圓形凹穴422D的兩圓心連線與第一外圈圓形凹穴421A及第二外圈圓形凹穴422D的兩圓周接點之間具有第一間距D1。第二間距D2為各複數外圈圓形凹穴組42（42A、42B、42C、42D）中任兩相鄰外圈圓形凹穴之間的最短間距。例如第一外圈圓形凹穴組42A的第一外圈圓形凹穴421A及第二外圈圓形凹穴422A兩圓心連線上與第一外圈圓形凹穴421A及第二外圈圓形凹穴422A的兩圓周接點之間具有第二間距D2。第一距離（d a1、d b1、d c1、d d1）及第二距離（d a2、d b2、d c2、d d2）分別為各內圈圓形凹穴40（40A、40B、40C、40D）及與其相鄰的外圈圓形凹穴421(421A、421B、421C、421D)、422(422A、422B、422C、422D)中最鄰近的兩外圈圓形凹穴的最短距離。例如第一內圈圓形凹穴40A及第一外圈圓形凹穴組42A的第一外圈圓形凹穴421A的兩圓心連線上與第一內圈圓形凹穴40A及第一外圈圓形凹穴421A 的兩圓周接點之間具有第一距離d a1，以及第一內圈圓形凹穴40A及第四外圈圓形凹穴組42D的第二外圈圓形凹穴422D的兩圓心連線上與第一內圈圓形凹穴40A及第二外圈圓形凹穴422D的兩圓周接點之間具有第二距離d a2。相似的，第二外圈圓形凹穴組42B的第一外圈圓形凹穴421B及第一外圈圓形凹穴組42A的第二外圈圓形凹穴422A的兩圓心連線與第一外圈圓形凹穴421B及第二外圈圓形凹穴422A的兩圓周接點之間具有第一間距D1，第二外圈圓形凹穴組42B的第一外圈圓形凹穴421B及第二外圈圓形凹穴422B兩圓心連線上與第一外圈圓形凹穴421B及第二外圈圓形凹穴422B的兩圓周接點之間具有第二間距D2，第二內圈圓形凹穴40B及第二外圈圓形凹穴組42B的第一外圈圓形凹穴421B的兩圓心連線上與第二內圈圓形凹穴40B及第一外圈圓形凹穴421B的兩圓周接點之間具有第一距離d b1，第二內圈圓形凹穴40B及第一外圈圓形凹穴組42A的第二外圈圓形凹穴422A的兩圓心連線上與第二內圈圓形凹穴40B及第二外圈圓形凹穴422A的兩圓周接點之間具有第二距離d b2。相似的，第一間距D1為第三外圈圓形凹穴組42C的第一外圈圓形凹穴421C及第二外圈圓形凹穴組42B的第二外圈圓形凹穴422B的兩圓心連線與第一外圈圓形凹穴421C及第二外圈圓形凹穴422B的兩圓周接點之間具有第一間距D1，第二間距D2為第三外圈圓形凹穴組42C的第一外圈圓形凹穴421C及第二外圈圓形凹穴422C兩圓心連線上與第一外圈圓形凹穴421C及第二外圈圓形凹穴422C的兩圓周接點之間具有第二間距D2，第三內圈圓形凹穴40C及第三外圈圓形凹穴組42C的第一外圈圓形凹穴421C的兩圓心連線上與第三內圈圓形凹穴40C及第一外圈圓形凹穴421C的兩圓周接點之間具有第一距離d c1，第三內圈圓形凹穴40C及第二外圈圓形凹穴組42B的第二外圈圓形凹穴422B的兩圓心連線上與第三內圈圓形凹穴40C及第二外圈圓形凹穴422B的兩圓周接點之間具有第二距離d c2。相似的，第一間距D1為第四外圈圓形凹穴組42D的第一外圈圓形凹穴421D及第三外圈圓形凹穴組42C的第二外圈圓形凹穴422C的兩圓心連線與第一外圈圓形凹穴421D及第二外圈圓形凹穴422C的兩圓周接點之間具有第一間距D1，第二間距D2為第四外圈圓形凹穴組42D的第一外圈圓形凹穴421D及第二外圈圓形凹穴422D兩圓心連線上與第一外圈圓形凹穴421D及第二外圈圓形凹穴422D的兩圓周接點之間具有第二間距D2，第四內圈圓形凹穴40D及第四外圈圓形凹穴組42D的第一外圈圓形凹穴421D的兩圓心連線上與第四內圈圓形凹穴40D及第一外圈圓形凹穴421D的兩圓周接點之間具有第一距離d d1，第四內圈圓形凹穴40D及第三外圈圓形凹穴組42C的第二外圈圓形凹穴422C的兩圓心連線上與第四內圈圓形凹穴40D及第二外圈圓形凹穴422C的兩圓周接點之間具有第二距離d d2。於本實施例中，第一間距D1大於第二間距D2。第一間距D1大於或等於第一距離（d a1、d b1、d c1、d d1），及/或大於或等於第二距離（d a2、d b2、d c2、d d2）。 In one embodiment of the present application, the first spacing D1 is the shortest distance between the first outer circular recess 421 (421A, 421B, 421C, 421D) and the second outer circular recess (422A, 422B, 422C, 422D) in two adjacent outer circular recess groups 42 (42A, 42B, 42C, 42D). For example, the shortest distance between the first outer circular recess 421A of the first outer circular recess group 42A and the second outer circular recess 422D of the fourth outer circular recess group 42D is the first spacing D1, that is, the first spacing D1 is between the two center lines of the first outer circular recess 421A of the first outer circular recess group 42A and the second outer circular recess 422D of the fourth outer circular recess group 42D and the two circumferential contact points of the first outer circular recess 421A and the second outer circular recess 422D. The second spacing D2 is the shortest distance between any two adjacent outer circular recesses in each of the plurality of outer circular recess groups 42 (42A, 42B, 42C, 42D). For example, the second distance D2 is provided between the two circumferential points of the first outer circular recess 421A and the second outer circular recess 422A on the line connecting the two centers of the first outer circular recess 421A and the second outer circular recess 422A of the first outer circular recess group 42A. The first distance (d a1 , d b1 , d c1 , d d1 ) and the second distance (d a2 , d b2 , d c2 , d d2 ) are respectively the shortest distances between the two most adjacent outer circular recesses of each inner circular recess 40 (40A, 40B, 40C, 40D) and the adjacent outer circular recesses 421 (421A, 421B, 421C, 421D) and 422 (422A, 422B, 422C, 422D). For example, a first distance d a1 exists between the two centers of the first inner circular recess 40A and the first outer circular recess 421A of the first outer circular recess set 42A and the two circumferential contact points of the first inner circular recess 40A and the first outer circular recess 421A, and a second distance d a2 exists between the two centers of the first inner circular recess 40A and the second outer circular recess 422D of the fourth outer circular recess set 42D and the two circumferential contact points of the first inner circular recess 40A and the second outer circular recess 422D . Similarly, a first spacing D1 is formed between the two center lines connecting the first outer circular recess 421B of the second outer circular recess group 42B and the second outer circular recess 422A of the first outer circular recess group 42A and the two circumferential contact points of the first outer circular recess 421B and the second outer circular recess 422A. A second distance D2 is provided between the two circumferential contact points of the first outer circular recess 421B and the second outer circular recess 422B on the line connecting the two centers of the hole 422B, a first distance d b1 is provided between the two circumferential contact points of the second inner circular recess 40B and the first outer circular recess 421B of the second outer circular recess set 42B, and a second distance d b2 is provided between the two circumferential contact points of the second inner circular recess 40B and the second outer circular recess 422A of the first outer circular recess set 42A. Similarly, the first distance D1 is the distance between the two circumferential joints of the first outer circular recess 421C of the third outer circular recess group 42C and the second outer circular recess 422B of the second outer circular recess group 42B and the first outer circular recess 421C and the second outer circular recess 422B, and the second distance D2 is the distance between the first outer circular recess 421C and the second outer circular recess 422B of the third outer circular recess group 42C. A second distance D2 is provided between the two circumferential contacts of the first outer circular recess 421C and the second outer circular recess 422C on the line connecting the two centers, a first distance dc1 is provided between the two circumferential contacts of the third inner circular recess 40C and the first outer circular recess 421C of the third outer circular recess set 42C, and a second distance dc2 is provided between the two circumferential contacts of the third inner circular recess 40C and the second outer circular recess 422B of the second outer circular recess set 42B . Similarly, the first distance D1 is the distance between the two circumferential joints of the first outer circular recess 421D of the fourth outer circular recess group 42D and the second outer circular recess 422C of the third outer circular recess group 42C and the first outer circular recess 421D and the second outer circular recess 422C, and the second distance D2 is the distance between the first outer circular recess 421D and the second outer circular recess 422C of the fourth outer circular recess group 42D. There is a second distance D2 between the two circumferential points of the first outer circular concave 421D and the second outer circular concave 422D on the line connecting the two centers, a first distance d d1 between the four inner circular concave 40D and the first outer circular concave 421D of the fourth outer circular concave set 42D and the two circumferential points of the fourth inner circular concave 40D and the first outer circular concave 421D, and a second distance d d2 between the four inner circular concave 40D and the second outer circular concave 422C of the third outer circular concave set 42C and the two circumferential points of the fourth inner circular concave 40D and the second outer circular concave 422C . In this embodiment, the first distance D1 is greater than the second distance D2. The first distance D1 is greater than or equal to the first distance (d a1 , d b1 , d c1 , d d1 ) and/or greater than or equal to the second distance (d a2 , d b2 , d c2 , d d2 ).
圖5顯示本申請案一實施例晶圓載體5之上視圖。晶圓載體5包含複數個內圈圓形凹穴50，複數個外圈圓形凹穴521(521A、521B)、522(522A、522B)、523(523A、523B)、524(524A、524B)、525(525A、525B)環繞內圈圓形凹穴50設置，以及複數個外圈圓形凹穴組52，其中複數個外圈圓形凹穴組52分別包含所述複數個外圈圓形凹穴之一或多個。於一實施例中，複數個內圈圓形凹穴50包含第一內圈圓形凹穴50A、第二內圈圓形凹穴50B、第三內圈圓形凹穴50C、第四內圈圓形凹穴50D環繞晶圓載體5的載體圓心C設置。於本實施例中，複數個外圈圓形凹穴組52包含第一外圈圓形凹穴組52A、第二外圈圓形凹穴組52B圍繞第一內圈圓形凹穴50A、第二內圈圓形凹穴50B、第三內圈圓形凹穴50C、第四內圈圓形凹穴50D設置。於本實施例中，第一外圈圓形凹穴組52A及第二外圈圓形凹穴組52B分別包含五個外圈圓形凹穴521、522、523、524、525，分別包含第一外圈圓形凹穴521A、521B、第二外圈圓形凹穴522A、522B、第三外圈圓形凹穴523A、523B、第四外圈圓形凹穴524A、524B及第五外圈圓形凹穴525A、525B。FIG5 shows a top view of a wafer carrier 5 according to an embodiment of the present application. The wafer carrier 5 includes a plurality of inner circular recesses 50, a plurality of outer circular recesses 521 (521A, 521B), 522 (522A, 522B), 523 (523A, 523B), 524 (524A, 524B), 525 (525A, 525B) arranged around the inner circular recesses 50, and a plurality of outer circular recess groups 52, wherein the plurality of outer circular recess groups 52 respectively include one or more of the plurality of outer circular recesses. In one embodiment, the plurality of inner circular recesses 50 include a first inner circular recess 50A, a second inner circular recess 50B, a third inner circular recess 50C, and a fourth inner circular recess 50D, which are disposed around the carrier center C of the wafer carrier 5. In this embodiment, the plurality of outer circular recess groups 52 include a first outer circular recess group 52A and a second outer circular recess group 52B, which are disposed around the first inner circular recess 50A, the second inner circular recess 50B, the third inner circular recess 50C, and the fourth inner circular recess 50D. In this embodiment, the first outer ring circular recess group 52A and the second outer ring circular recess group 52B respectively include five outer ring circular recesses 521, 522, 523, 524, and 525, respectively including the first outer ring circular recess 521A, 521B, the second outer ring circular recess 522A, 522B, the third outer ring circular recess 523A, 523B, the fourth outer ring circular recess 524A, 524B and the fifth outer ring circular recess 525A, 525B.
如圖5所示，於本實施例中，第一外圈圓形凹穴組52A相鄰於第二外圈圓形凹穴組52B。第一外圈圓形凹穴521A、521B分別相鄰於第二外圈圓形凹穴522A、522B，第二外圈圓形凹穴522A、522B分別相鄰於第三外圈圓形凹穴523A、523B，第三外圈圓形凹穴523A、523B分別相鄰於第四外圈圓形凹穴524A、524B，第四外圈圓形凹穴524A、524B分別相鄰於第五外圈圓形凹穴525A、525B。第一外圈圓形凹穴組52A的第一外圈圓形凹穴521A相鄰於第二外圈圓形凹穴組52B的第五外圈圓形凹穴525B，第二外圈圓形凹穴組52B的第一外圈圓形凹穴521B相鄰於第一外圈圓形凹穴組52A的第五外圈圓形凹穴525A。As shown in FIG5 , in this embodiment, the first outer circle circular recess group 52A is adjacent to the second outer circle circular recess group 52B. The first outer circle circular recesses 521A and 521B are adjacent to the second outer circle circular recesses 522A and 522B, respectively. The second outer circle circular recesses 522A and 522B are adjacent to the third outer circle circular recesses 523A and 523B, respectively. The third outer circle circular recesses 523A and 523B are adjacent to the fourth outer circle circular recesses 524A and 524B, respectively. The fourth outer circle circular recesses 524A and 524B are adjacent to the fifth outer circle circular recesses 525A and 525B, respectively. The first outer circular recess 521A of the first outer circular recess set 52A is adjacent to the fifth outer circular recess 525B of the second outer circular recess set 52B, and the first outer circular recess 521B of the second outer circular recess set 52B is adjacent to the fifth outer circular recess 525A of the first outer circular recess set 52A.
在本申請案的一實施例中，其中，複數個外圈圓形凹穴521(521A、521B)、522(522A、522B)、523(523A、523B)、524(524A、524B)、525(525A、525B)中的任兩相鄰的外圈圓形凹穴之間具有一間距，其中所述間距包含任相鄰兩外圈圓形凹穴組52(52A、52B)鄰近的兩外圈圓形凹穴之間具有第一間距D1，以及同一外圈圓形凹穴組52(52A、52B)中任兩相鄰外圈圓形凹穴之間具有第二間距D2。詳述如後。如圖5所示，第一外圈圓形凹穴組52A與第二外圈圓形凹穴組52B之間具有第一間距D1，換句話說，第一外圈圓形凹穴組52A的第一外圈圓形凹穴521A與第二外圈圓形凹穴組52B的第五外圈圓形凹穴525B之間、第二外圈圓形凹穴組52B的第一外圈圓形凹穴521B與第一外圈圓形凹穴組52A的第五外圈圓形凹穴525A之間分別具有第一間距D1。同一組中任兩相鄰的外圈圓形凹穴分別具有第二間距D2，例如第一外圈圓形凹穴521A、521B與第二外圈圓形凹穴522A、522B之間、第二外圈圓形凹穴522A、522B與第三外圈圓形凹穴523A、523B之間、第三外圈圓形凹穴523A、523B與第四外圈圓形凹穴524A、524B之間、第四外圈圓形凹穴524A、524B與五外圈圓形凹穴525A、525B之間分別具有第二間距D2。在本申請案的一實施例中，晶圓載體5中所包含的複數個第一間距D1彼此之間相同或不同。晶圓載體5中所包含的複數個第二間距D2彼此之間相同或不同。In one embodiment of the present application, any two adjacent outer circular recesses among the plurality of outer circular recesses 521 (521A, 521B), 522 (522A, 522B), 523 (523A, 523B), 524 (524A, 524B), 525 (525A, 525B) have a spacing, wherein the spacing includes a first spacing D1 between two adjacent outer circular recesses of any two adjacent outer circular recess groups 52 (52A, 52B), and a second spacing D2 between any two adjacent outer circular recesses in the same outer circular recess group 52 (52A, 52B). Details are as follows. As shown in FIG. 5 , there is a first spacing D1 between the first outer circle circular recess group 52A and the second outer circle circular recess group 52B. In other words, there is a first spacing D1 between the first outer circle circular recess 521A of the first outer circle circular recess group 52A and the fifth outer circle circular recess 525B of the second outer circle circular recess group 52B, and there is a first spacing D1 between the first outer circle circular recess 521B of the second outer circle circular recess group 52B and the fifth outer circle circular recess 525A of the first outer circle circular recess group 52A. Any two adjacent outer circular recesses in the same group have a second spacing D2, for example, the first outer circular recess 521A, 521B and the second outer circular recess 522A, 522B, the second outer circular recess 522A, 522B and the third outer circular recess 523A, 523B, the third outer circular recess 523A, 523B and the fourth outer circular recess 524A, 524B, and the fourth outer circular recess 524A, 524B and the fifth outer circular recess 525A, 525B have a second spacing D2. In one embodiment of the present application, the plurality of first spacings D1 included in the wafer carrier 5 are the same or different from each other. The plurality of second spacings D2 included in the wafer carrier 5 are the same or different from each other.
如圖5所示，於一實施例中，複數個內圈圓形凹穴50（50A、50B、50C、50D）分別鄰近於複數個外圈圓形凹穴組52中的兩個外圈圓形凹穴。於本實施例中，第一內圈圓形凹穴50A鄰近於第一外圈圓形凹穴組52A的第五外圈圓形凹穴525A，以及與第五外圈圓形凹穴525A相鄰的第四外圈圓形凹穴524A 。第一內圈圓形凹穴50A與第五外圈圓形凹穴525A之間具有第一距離d a1，第一內圈圓形凹穴50A與第四外圈圓形凹穴524A之間具有第二距離d a2。於本實施例中，第一距離d a1小於第二距離d a2，換句話說，第一內圈圓形凹穴50A最鄰近於第五外圈圓形凹穴525A，次鄰近於第四外圈圓形凹穴524A。相似的，第二內圈圓形凹穴50B鄰近於第二外圈圓形凹穴組52B的第二外圈圓形凹穴522B，以及與第二外圈圓形凹穴522B相鄰的第三外圈圓形凹穴523B。第二內圈圓形凹穴50B最鄰近於第二外圈圓形凹穴522B，且與第二外圈圓形凹穴522B之間具有第一距離d b1，第二內圈圓形凹穴50B次鄰近於第二外圈圓形凹穴523B，且與第三外圈圓形凹穴523B之間具有第二距離d b2。第三內圈圓形凹穴50C鄰近於第二外圈圓形凹穴組52B的第五外圈圓形凹穴525B，以及與第五外圈圓形凹穴525B相鄰的第四外圈圓形凹穴524B。第三內圈圓形凹穴50C最鄰近於第五外圈圓形凹穴525B，且與第五外圈圓形凹穴525B之間具有第一距離d c1，第三內圈圓形凹穴50C次鄰近於第二外圈圓形凹穴組52B的第四外圈圓形凹穴524B，第三內圈圓形凹穴50C與第四外圈圓形凹穴524B之間具有第二距離d c2。第四內圈圓形凹穴50D鄰近於第一外圈圓形凹穴組52A的第二外圈圓形凹穴522A，以及與第二外圈圓形凹穴522A相鄰的第三外圈圓形凹穴523A。第四內圈圓形凹穴50D最鄰近於第一外圈圓形凹穴組52A的第二外圈圓形凹穴522A，第四內圈圓形凹穴50D與第二外圈圓形凹穴522A之間具有第一距離d d1，第四內圈圓形凹穴50D次鄰近於第一外圈圓形凹穴組52A的第三外圈圓形凹穴523A，第四內圈圓形凹穴50D與第三外圈圓形凹穴523A之間具有第二距離d d2。相較於第四外圈圓形凹穴524A與第五外圈圓形凹穴525A的第二間距D2，第一距離d a1、第二距離d a2與第二間距D2至少其中之一不相等於其中之另一。相似的，相較於第一外圈圓形凹穴521B與第二外圈圓形凹穴522B的第二間距D2，第一距離d b1、第二距離d b2與第二間距D2至少其中之一不相等於其中之另一。相較於第四外圈圓形凹穴524B與第五外圈圓形凹穴525B的第二間距D2，第一距離d c1、第二距離d c2與第二間距D2至少其中之一不相等於其中之另一。相似的，相較於第二外圈圓形凹穴522A與第三外圈圓形凹穴523A的第二間距D2，第一距離d d1、第二距離d d2與第二間距D2至少其中之一不相等於其中之另一。於一實施例中，第一距離d a1、d b1、d c1、d d1、第二距離d a2、d b2、d c2、d d2與第二間距D2互不相等。於一實施例中，第一距離d a1、d b1、d c1、d d1或第二距離d a2、d b2、d c2、d d2大於第二間距D2。 As shown in FIG5 , in one embodiment, the plurality of inner circular recesses 50 (50A, 50B, 50C, 50D) are respectively adjacent to two outer circular recesses in the plurality of outer circular recess groups 52. In this embodiment, the first inner circular recess 50A is adjacent to the fifth outer circular recess 525A of the first outer circular recess group 52A, and the fourth outer circular recess 524A adjacent to the fifth outer circular recess 525A. The first inner circular recess 50A and the fifth outer circular recess 525A have a first distance d a1 , and the first inner circular recess 50A and the fourth outer circular recess 524A have a second distance d a2 . In this embodiment, the first distance d a1 is smaller than the second distance d a2 , in other words, the first inner circular recess 50A is closest to the fifth outer circular recess 525A, and is next closest to the fourth outer circular recess 524A. Similarly, the second inner circular recess 50B is adjacent to the second outer circular recess 522B of the second outer circular recess set 52B, and the third outer circular recess 523B adjacent to the second outer circular recess 522B. The second inner circular recess 50B is closest to the second outer circular recess 522B and has a first distance d b1 between the second inner circular recess 50B and the second outer circular recess 522B. The second inner circular recess 50B is secondarily adjacent to the second outer circular recess 523B and has a second distance d b2 between the second inner circular recess 50B and the third outer circular recess 523B. The third inner circular recess 50C is adjacent to the fifth outer circular recess 525B of the second outer circular recess set 52B and the fourth outer circular recess 524B adjacent to the fifth outer circular recess 525B. The third inner circular recess 50C is closest to the fifth outer circular recess 525B and has a first distance d c1 between the third inner circular recess 50C and the fifth outer circular recess 525B. The third inner circular recess 50C is secondarily adjacent to the fourth outer circular recess 524B of the second outer circular recess group 52B, and has a second distance d c2 between the third inner circular recess 50C and the fourth outer circular recess 524B. The fourth inner circular recess 50D is adjacent to the second outer circular recess 522A of the first outer circular recess group 52A, and the third outer circular recess 523A adjacent to the second outer circular recess 522A. The fourth inner circular recess 50D is closest to the second outer circular recess 522A of the first outer circular recess group 52A, and there is a first distance d d1 between the fourth inner circular recess 50D and the second outer circular recess 522A. The fourth inner circular recess 50D is secondarily adjacent to the third outer circular recess 523A of the first outer circular recess group 52A, and there is a second distance d d2 between the fourth inner circular recess 50D and the third outer circular recess 523A. Compared to the second distance D2 between the fourth outer circular recess 524A and the fifth outer circular recess 525A, at least one of the first distance d a1 , the second distance d a2 and the second distance D2 is not equal to the other one. Similarly, compared to the second distance D2 between the first outer circular recess 521B and the second outer circular recess 522B, at least one of the first distance d b1 , the second distance d b2 and the second distance D2 is not equal to the other. Compared to the second distance D2 between the fourth outer circular recess 524B and the fifth outer circular recess 525B, at least one of the first distance d c1 , the second distance d c2 and the second distance D2 is not equal to the other. Similarly, compared to the second distance D2 between the second outer circular recess 522A and the third outer circular recess 523A, at least one of the first distance d d1 , the second distance d d2 and the second distance D2 is not equal to the other. In one embodiment, the first distances da1 , d b1 , d c1 , d d1 , the second distances da2 , d b2 , d c2 , d d2 and the second distance D2 are not equal to each other. In one embodiment, the first distances da1 , d b1 , d c1 , d d1 or the second distances da2 , d b2 , d c2 , d d2 are greater than the second distance D2.
在本申請案的一實施例中，第一間距D1為兩相鄰之外圈圓形凹穴組52（52A、52B）中第一外圈圓形凹穴521（521A、521B）分別與第五外圈圓形凹穴（525A、525B）之間的最短距離。例如第一外圈圓形凹穴組52A的第五外圈圓形凹穴525A及第二外圈圓形凹穴組52B的第一外圈圓形凹穴521B之間的最短距離為第一間距D1，亦即第一外圈圓形凹穴組52A的第五外圈圓形凹穴525A及第二外圈圓形凹穴組52B的第一外圈圓形凹穴521B的兩圓心連線與第五外圈圓形凹穴525A及第一外圈圓形凹穴521B的兩圓周接點之間具有第一間距D1，或是為第二外圈圓形凹穴組52B的第五外圈圓形凹穴525B及第一外圈圓形凹穴組52A的第一外圈圓形凹穴521A的兩圓心連線與第五外圈圓形凹穴525B及第第一外圈圓形凹穴521A的兩圓周接點之間具有第一間距D1。第二間距D2為各複數外圈圓形凹穴組52（52A、52B）中任兩相鄰外圈圓形凹穴之間的最短間距。例如第一外圈圓形凹穴組52A的第四外圈圓形凹穴524A及第五外圈圓形凹穴525A兩圓心連線上與第四外圈圓形凹穴524A及第五外圈圓形凹穴525A的兩圓周接點之間具有第二間距D2。第一距離（d a1、d b1、d c1、d d1）為各內圈圓形凹穴50（50A、50B、50C、50D）及與其相鄰的外圈圓形凹穴組52（52A、52B）中最鄰近的外圈圓形凹穴的最短距離。例如第一內圈圓形凹穴50A及第一外圈圓形凹穴組52A的第五外圈圓形凹穴525A的兩圓心連線上與第一內圈圓形凹穴50A及第五外圈圓形凹穴525A的兩圓周接點之間具有第一距離d a1。第二距離（d a2、d b2、d c2、d d2）為各內圈圓形凹穴50（50A、50B、50C、50D）及與其相鄰的外圈圓形凹穴組52（52A、52B）中第二鄰近的外圈圓形凹穴的最短距離。例如第一內圈圓形凹穴50A及第一外圈圓形凹穴組52A的第四外圈圓形凹穴524A的兩圓心連線上與第一內圈圓形凹穴50A及第四外圈圓形凹穴524A的兩圓周接點之間具有第二距離d a2。相似的，第二外圈圓形凹穴組52B的第一外圈圓形凹穴521B及第二外圈圓形凹穴522B兩圓心連線上與第一外圈圓形凹穴521B及第二外圈圓形凹穴522B的兩圓周接點之間具有第二間距D2，第二內圈圓形凹穴50B及第二外圈圓形凹穴組52B的第二外圈圓形凹穴522B的兩圓心連線上與第二內圈圓形凹穴50B及第二外圈圓形凹穴522B的兩圓周接點之間具有第一距離d b1，第二內圈圓形凹穴50B及第二外圈圓形凹穴組52B的第三外圈圓形凹穴523B的兩圓心連線上與第二內圈圓形凹穴50B及第三外圈圓形凹穴523B的兩圓周接點之間具有第二距離d b2。相似的，第二外圈圓形凹穴組52B的第四外圈圓形凹穴524B及第五外圈圓形凹穴525B兩圓心連線上與第四外圈圓形凹穴524B及第五外圈圓形凹穴525B的兩圓周接點之間具有第二間距D2，第三內圈圓形凹穴50C及第二外圈圓形凹穴組52B的第五外圈圓形凹穴525B的兩圓心連線上與第三內圈圓形凹穴50C及第五外圈圓形凹穴525B的兩圓周接點之間具有第一距離d c1，第三內圈圓形凹穴50C及第二外圈圓形凹穴組52B的第四外圈圓形凹穴524B的兩圓心連線上與第三內圈圓形凹穴50C及第四外圈圓形凹穴524B的兩圓周接點之間具有第二距離d c2。相似的，第一外圈圓形凹穴組52A的第二外圈圓形凹穴522A及第三外圈圓形凹穴523A兩圓心連線上與第二外圈圓形凹穴522A及第三外圈圓形凹穴523A的兩圓周接點之間具有第二間距D2，第四內圈圓形凹穴50D及第一外圈圓形凹穴組52A的第二外圈圓形凹穴522A的兩圓心連線上與第四內圈圓形凹穴50D及第二外圈圓形凹穴522A的兩圓周接點之間具有第一距離d d1，第四內圈圓形凹穴50D及第一外圈圓形凹穴組52A的第三外圈圓形凹穴523A的兩圓心連線上與第四內圈圓形凹穴50D及第三外圈圓形凹穴523A的兩圓周接點之間具有第二距離d d2。於本實施例中，第一間距D1大於第二間距D2。第一間距D1大於或等於第一距離（d a1、d b1、d c1、d d1），及/或大於或等於第二距離（d a2、d b2、d c2、d d2）。 In one embodiment of the present application, the first spacing D1 is the shortest distance between the first outer circular recess 521 (521A, 521B) and the fifth outer circular recess (525A, 525B) in two adjacent outer circular recess groups 52 (52A, 52B). For example, the shortest distance between the fifth outer circular recess 525A of the first outer circular recess group 52A and the first outer circular recess 521B of the second outer circular recess group 52B is the first spacing D1, that is, the shortest distance between the second outer circular recess 525A of the first outer circular recess group 52A and the first outer circular recess 521B of the second outer circular recess group 52B and the fifth outer circular recess 525A. The first spacing D1 is between the two circumferential contacts of the fifth outer circular recess 525B of the second outer circular recess group 52B and the first outer circular recess 521A of the first outer circular recess group 52A and the two circumferential contacts of the fifth outer circular recess 525B and the first outer circular recess 521A. The second spacing D2 is the shortest spacing between any two adjacent outer circular recesses in each of the plurality of outer circular recess groups 52 (52A, 52B). For example, the second distance D2 is between the two circumferential points of the fourth outer circular recess 524A and the fifth outer circular recess 525A on the line connecting the two centers of the first outer circular recess group 52A and the fourth outer circular recess 524A and the fifth outer circular recess 525A. The first distance (d a1 , d b1 , d c1 , d d1 ) is the shortest distance between each inner circular recess 50 (50A, 50B, 50C, 50D) and the outer circular recess group 52 (52A, 52B) adjacent thereto. For example, a first distance d a1 exists between the two circumferential contact points of the first inner circular concave 50A and the fifth outer circular concave 525A of the first outer circular concave group 52A and the first inner circular concave 50A. The second distances (d a2 , d b2 , d c2 , d d2 ) are the shortest distances between each inner circular concave 50 (50A, 50B, 50C, 50D) and the second adjacent outer circular concave in the outer circular concave group 52 (52A, 52B) adjacent thereto. For example, a second distance d a2 exists between the line connecting the two centers of the first inner circular cavity 50A and the fourth outer circular cavity 524A of the first outer circular cavity set 52A and the two circumferential contact points of the first inner circular cavity 50A and the fourth outer circular cavity 524A. Similarly, a line connecting the two centers of the first outer circular recess 521B and the second outer circular recess 522B of the second outer circular recess group 52B and two circumferential points of the first outer circular recess 521B and the second outer circular recess 522B has a second distance D2, a line connecting the two centers of the second inner circular recess 50B and the second outer circular recess 522B of the second outer circular recess group 52B and two circumferential points of the second inner circular recess 50B and the second outer circular recess 522B has a first distance d b1 , and a line connecting the two centers of the second inner circular recess 50B and the third outer circular recess 523B of the second outer circular recess group 52B and two circumferential points of the second inner circular recess 50B and the third outer circular recess 523B has a second distance d b2 . Similarly, a second distance D2 is provided between the two circumferential points of the fourth outer circular recess 524B and the fifth outer circular recess 525B of the second outer circular recess group 52B, a first distance d c1 is provided between the two circumferential points of the third inner circular recess 50C and the fifth outer circular recess 525B of the second outer circular recess group 52B, and a second distance d c1 is provided between the two circumferential points of the third inner circular recess 50C and the fifth outer circular recess 525B of the second outer circular recess group 52B, and a second distance d c1 is provided between the two circumferential points of the third inner circular recess 50C and the fourth outer circular recess 524B of the second outer circular recess group 52B. c2 . Similarly, a second distance D2 is provided between the two circumferential points of the second outer circular recess 522A and the third outer circular recess 523A on the line connecting the two centers of the first outer circular recess group 52A, and the second circumferential points of the second outer circular recess 522A and the third outer circular recess 523A; a first distance d d1 is provided between the four inner circular recess 50D and the two circumferential points of the second outer circular recess 522A on the line connecting the two centers of the first outer circular recess group 52A, and the second circumferential points of the fourth inner circular recess 50D and the second outer circular recess 522A; a second distance d d2 is provided between the four inner circular recess 50D and the three outer circular recess 523A on the line connecting the two centers of the first outer circular recess group 52A, and the second circumferential points of the fourth inner circular recess 50D and the third outer circular recess 523A. In this embodiment, the first distance D1 is greater than the second distance D2. The first distance D1 is greater than or equal to the first distance (d a1 , d b1 , d c1 , d d1 ) and/or greater than or equal to the second distance (d a2 , d b2 , d c2 , d d2 ).
此外，如圖5所示，於本實施例中，晶圓載體5的中的複數個外圈圓形凹穴組的數量為兩個，複數個內圈圓形凹穴的數量為四個，每一外圈圓形凹穴組之複數個外圈圓形凹穴的數量為五個。In addition, as shown in FIG. 5 , in this embodiment, the number of the plurality of outer circular recess groups in the wafer carrier 5 is two, the number of the plurality of inner circular recesses is four, and the number of the plurality of outer circular recesses in each outer circular recess group is five.
綜上所述，本申請案之晶圓載體之兩相鄰的外圈圓形凹穴組之間具有第一間距，其中之一組中兩相鄰的外圈圓形凹穴之間具有第二間距，其中第一間距大於第二間距，且複數個外圈圓形凹穴包含第一外圈圓形凹穴以及與第一外圈圓形凹穴相鄰的第二外圈圓形凹穴，第一內圈圓形凹穴相鄰於第一外圈圓形凹穴與第二外圈圓形凹穴，第一外圈圓形凹穴與第二外圈圓形凹穴之間距有一間距包含第一間距和第二間距其中之一，第一內圈圓形凹穴與第一外圈圓形凹穴之間具有第一距離，第一內圈圓形凹穴與第二外圈圓形凹穴之間具有第二距離，第一距離、第二距離與間距其中之一不相等於其中之另一，進而可提升半導體晶圓製程中氣體氣流及成長溫度的均勻性。In summary, the wafer carrier of the present application has a first spacing between two adjacent outer-circle circular recess groups, a second spacing between two adjacent outer-circle circular recesses in one of the groups, wherein the first spacing is greater than the second spacing, and the plurality of outer-circle circular recesses include a first outer-circle circular recess and a second outer-circle circular recess adjacent to the first outer-circle circular recess, and the first inner-circle circular recess is adjacent to the first outer-circle circular recess and the second outer-circle circular recess. The distance between the first outer circle circular recess and the second outer circle circular recess has a distance including one of the first distance and the second distance, the first inner circle circular recess and the first outer circle circular recess have a first distance, the first inner circle circular recess and the second outer circle circular recess have a second distance, and one of the first distance, the second distance and the distance is not equal to the other one, thereby improving the uniformity of gas flow and growth temperature in the semiconductor wafer manufacturing process.
惟上述實施例僅為例示性說明本申請案之原理及其功效，而非用於限制本申請案。任何本申請案所屬技術領域中具有通常知識者均可在不違背本申請案之技術原理及精神的情況下，對上述實施例進行修改及變化。舉凡依本申請案申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾，均應包括於本申請案之申請專利範圍內。However, the above embodiments are only for illustrative purposes to illustrate the principles and effects of this application, and are not intended to limit this application. Any person with ordinary knowledge in the technical field to which this application belongs can modify and change the above embodiments without violating the technical principles and spirit of this application. All equivalent changes and modifications made according to the shape, structure, features and spirit described in the patent scope of this application should be included in the patent scope of this application.
1、2、3、4、5:晶圓載體 10、20、30、40、50:內圈圓形凹穴 10A、20A、30A、40A、50A:第一內圈圓形凹穴 10B、20B、30B、40B、50B:第二內圈圓形凹穴 10C、20C、30C、40C、50C:第三內圈圓形凹穴 30D、40D、50D:第四內圈圓形凹穴 121、122、123、221、222、223:外圈圓形凹穴 321、322、421、422、521、522、523、524、525:外圈圓形凹穴 12、22、32、42、52:外圈圓形凹穴組 12A、22A、32A、42A、52A:第一外圈圓形凹穴組 12B、22B、32B、42B、52B:第二外圈圓形凹穴組 12C、22C、32C、42C:第三外圈圓形凹穴組 32D、42D:第四外圈圓形凹穴組 121A、121B、121C、221A、221B、221C:第一外圈圓形凹穴 122A、122B、122C、222A、222B、222C:第二外圈圓形凹穴 123A、123B、123C、223A、223B、223C:第三外圈圓形凹穴 321A、321B、321C、321D:第一外圈圓形凹穴 322A、322B、322C、322D:第二外圈圓形凹穴 421A、421B、421C、421D:第一外圈圓形凹穴 422A、422B、422C、422D:第二外圈圓形凹穴 521A、521B:第一外圈圓形凹穴 522A、522B:第二外圈圓形凹穴 523A、523B:第三外圈圓形凹穴 524A、524B:第四外圈圓形凹穴 525A、525B:第五外圈圓形凹穴 D1:第一間距 D2:第二間距 d a1、d b1、d c1、d d1:第一距離 d a2、d b2、d c2、d d2:第二距離 C:載體圓心 C1:第一圓心 C2:第二圓心 C3:第三圓心 C4:第四圓心 L1:第一軸線 L2:第二軸線 L3:第三軸線 L4:第四軸線 θ1、θ2:夾角 1, 2, 3, 4, 5: wafer carrier 10, 20, 30, 40, 50: inner circle circular recess 10A, 20A, 30A, 40A, 50A: first inner circle circular recess 10B, 20B, 30B, 40B, 50B: second inner circle circular recess 10C, 20C, 30C, 40C, 50C: third inner circle circular recess 30D, 40D, 50D: fourth inner circle circular recess 121, 122, 123, 221, 222, 223: outer circle shaped recesses 321, 322, 421, 422, 521, 522, 523, 524, 525: outer circle circular recesses 12, 22, 32, 42, 52: outer circle circular recess group 12A, 22A, 32A, 42A, 52A: first outer circle circular recess group 12B, 22B, 32B, 42B, 52B: second outer circle circular recess group 12C, 22C, 32C, 42C: third outer circle circular recess group 32D, 42D: fourth outer circle circular recess Group 121A, 121B, 121C, 221A, 221B, 221C: first outer circle circular recess 122A, 122B, 122C, 222A, 222B, 222C: second outer circle circular recess 123A, 123B, 123C, 223A, 223B, 223C: third outer circle circular recess 321A, 321B, 321C, 321D: first outer circle circular recess 322A, 322B, 322C, 322D: second outer circle circular recess Circular recesses 421A, 421B, 421C, 421D: first outer circular recesses 422A, 422B, 422C, 422D: second outer circular recesses 521A, 521B: first outer circular recesses 522A, 522B: second outer circular recesses 523A, 523B: third outer circular recesses 524A, 524B: fourth outer circular recesses 525A, 525B: fifth outer circular recesses D1: first spacing D2: second spacing d a1 , db1 , dc1 , dd1 : first distance d a2 , db2 , dc2 , dd2 : second distance C: carrier center C1: first center C2: second center C3: third center C4: fourth center L1: first axis L2: second axis L3: third axis L4: fourth axis θ1, θ2: angle
﹝圖1﹞顯示本申請案一實施例晶圓載體1之上視圖。 ﹝圖2﹞顯示本申請案一實施例晶圓載體2之上視圖。 ﹝圖3﹞顯示本申請案一實施例晶圓載體3之上視圖。 ﹝圖4﹞顯示本申請案一實施例晶圓載體4之上視圖。 ﹝圖5﹞顯示本申請案一實施例晶圓載體5之上視圖。 ﹝Figure 1﹞shows a top view of a wafer carrier 1 of the first embodiment of the present application. ﹝Figure 2﹞shows a top view of a wafer carrier 2 of the first embodiment of the present application. ﹝Figure 3﹞shows a top view of a wafer carrier 3 of the first embodiment of the present application. ﹝Figure 4﹞shows a top view of a wafer carrier 4 of the first embodiment of the present application. ﹝Figure 5﹞shows a top view of a wafer carrier 5 of the first embodiment of the present application.
2:晶圓載體 2: Wafer carrier
20:內圈圓形凹穴 20: Inner circle circular concave cavity
20A:第一內圈圓形凹穴 20A: First inner circle circular recess
20B:第二內圈圓形凹穴 20B: Second inner circle circular recess
20C:第三內圈圓形凹穴 20C: The third inner circle circular concave cavity
221、222、223:外圈圓形凹穴 221, 222, 223: Outer circle circular recesses
22:外圈圓形凹穴組 22: Outer circle circular recess set
22A:第一外圈圓形凹穴組 22A: First outer ring circular recess group
22B:第二外圈圓形凹穴組 22B: Second outer circle circular recess group
22C:第三外圈圓形凹穴組 22C: The third outer circle circular recess group
221A、221B、221C:第一外圈圓形凹穴 221A, 221B, 221C: first outer circle circular recess
222A、222B、222C:第二外圈圓形凹穴 222A, 222B, 222C: Second outer circle circular recess
223A、223B、223C:第三外圈圓形凹穴 223A, 223B, 223C: The third outer circle circular recess
D1:第一間距 D1: First spacing
D2:第二間距 D2: Second distance
da1、db1、dc1:第一距離 d a1 , d b1 , d c1 : first distance
da2、db2、dc2:第二距離 d a2 , d b2 , d c2 : second distance
C:載體圓心 C: Carrier center
C1:第一圓心 C1: First center
C2:第二圓心 C2: Second center
C3:第三圓心 C3: The third center
C4:第四圓心 C4: The fourth center
L1:第一軸線 L1: First axis
L2:第二軸線 L2: Second axis
L3:第三軸線 L3: The third axis
L4:第四軸線 L4: The fourth axis
θ 1、θ 2:夾角 θ 1, θ 2: angle of intersection
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW109134883A TWI845773B (en) | 2020-10-08 | Wafer carrier |
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| Application Number | Priority Date | Filing Date | Title |
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| TW109134883A TWI845773B (en) | 2020-10-08 | Wafer carrier |
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| Publication Number | Publication Date |
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| TW202215578A TW202215578A (en) | 2022-04-16 |
| TWI845773B true TWI845773B (en) | 2024-06-21 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201941273A (en) | 2018-03-26 | 2019-10-16 | 美商維高儀器股份有限公司 | Wafer carrier having thermal cover for chemical vapor deposition |
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201941273A (en) | 2018-03-26 | 2019-10-16 | 美商維高儀器股份有限公司 | Wafer carrier having thermal cover for chemical vapor deposition |
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